JP2532803B2 - Method for producing electrophotographic photoreceptor and surface protective layer thereof - Google Patents

Method for producing electrophotographic photoreceptor and surface protective layer thereof

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Publication number
JP2532803B2
JP2532803B2 JP4272681A JP27268192A JP2532803B2 JP 2532803 B2 JP2532803 B2 JP 2532803B2 JP 4272681 A JP4272681 A JP 4272681A JP 27268192 A JP27268192 A JP 27268192A JP 2532803 B2 JP2532803 B2 JP 2532803B2
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JP
Japan
Prior art keywords
protective layer
material gas
layer
conductive support
organic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4272681A
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Japanese (ja)
Other versions
JPH06123992A (en
Inventor
徹哉 佐藤
均 久田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
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Priority to JP4272681A priority Critical patent/JP2532803B2/en
Publication of JPH06123992A publication Critical patent/JPH06123992A/en
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Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、有機光導電性物質を含
有する電子写真感光体に関し、特には有機感光層上に保
護層を設けた電子写真感光体に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrophotographic photoreceptor containing an organic photoconductive substance, and more particularly to an electrophotographic photoreceptor having a protective layer provided on an organic photosensitive layer.

【0002】[0002]

【従来の技術】従来、電子写真感光体としてセレン、セ
レン−テルル合金、硫化カドミニウム、酸化亜鉛などの
無機光導電性物質からなる感光体が広く用いられてきた
が、近年、合成が容易であり、適当な波長域に光導電性
を示す化合物を選択できるなどの特徴をもつ有機光導電
性物質の研究が進められている。
2. Description of the Related Art Conventionally, as electrophotographic photoconductors, photoconductors made of inorganic photoconductive substances such as selenium, selenium-tellurium alloy, cadmium sulfide and zinc oxide have been widely used, but in recent years, they are easy to synthesize. Research on organic photoconductive substances having characteristics such as selection of a compound exhibiting photoconductivity in an appropriate wavelength range is under way.

【0003】有機光導電性物質を感光層に用いた電子写
真感光体は、成膜が容易である、可とう性が高く設計の
自由度が大きい、安価で無公害であるなどの長所を有し
ているが、無機光導電性物質に比較して感度及び感光体
寿命が劣っていた。そこで、それらを改善するために電
荷発生層と電荷輸送層とに機能を分離させて感光層を形
成する積層型電子写真感光体が提案され、実用化される
に至ったが依然として十分な寿命は得られていない。特
に最近では有機感光体の感度の向上と複写機のデジタル
化により、比較的高速の複写機にも有機感光体が使用さ
れるようになって、ますます長寿命化の要求が高まって
いる。
An electrophotographic photosensitive member using an organic photoconductive substance as a photosensitive layer has advantages such as easy film formation, high flexibility and a great degree of freedom in designing, inexpensive and non-polluting. However, the sensitivity and the photoreceptor life were inferior as compared with the inorganic photoconductive substance. Therefore, in order to improve them, a multi-layer type electrophotographic photoconductor in which a photosensitive layer is formed by separating the functions of a charge generation layer and a charge transport layer has been proposed, which has been put into practical use, but still has a sufficient life. Not obtained. In particular, recently, due to the improvement of the sensitivity of the organic photoconductor and the digitalization of the copying machine, the organic photoconductor is used also in the copying machine having a relatively high speed, and the demand for longer life is increasing more and more.

【0004】このような長寿命化の要求に応えるため
に、感光体の保護層として、樹脂薄膜ではポリエステル
樹脂、ポリビニルブチラール樹脂、フェノール樹脂、酢
酸セルロース、スチレン無水マレイン酸共重合体、ポリ
アミド樹脂、ポリイミド樹脂、メラミン樹脂等(例え
ば、特公昭38−15446号公報、特公昭51−15
748号公報、特公昭52−24414号公報、特公昭
56−34860号公報、特公昭56−53756号公
報、特公昭60−55357号公報、特公昭61−22
345号公報等)が提案されているが、繰り返し使用に
よる傷、耐磨耗性などの耐久性、環境安定性などの点で
十分とはいえない。
In order to meet the demand for such a long life, as a protective layer for a photoreceptor, polyester resin, polyvinyl butyral resin, phenol resin, cellulose acetate, styrene-maleic anhydride copolymer, polyamide resin, and Polyimide resin, melamine resin, etc. (for example, Japanese Patent Publication No. 38-15446, Japanese Patent Publication No. 51-15)
Japanese Patent Publication No. 748, Japanese Patent Publication No. 52-24414, Japanese Patent Publication No. 56-34860, Japanese Patent Publication No. 56-53756, Japanese Patent Publication No. 60-55357, and Japanese Patent Publication No. 61-22.
No. 345, etc.) has been proposed, but it is not sufficient in terms of scratches due to repeated use, durability such as abrasion resistance, environmental stability, and the like.

【0005】またこれらの樹脂薄膜の保護層では、薄膜
では耐久性が十分ではなく、一方、膜厚を厚くすると残
留電位が上昇したり、繰り返し特性が悪くなるなどの欠
点を有している。
Further, in the protective layer of these resin thin films, the durability is not sufficient with the thin film, and on the other hand, the thicker the film, the higher the residual potential and the poorer the repeated characteristics are.

【0006】そこで、保護層としてバインダー樹脂中に
金属酸化物を分散させた保護層を用いる方法(例えば、
特公昭57−39846号公報、特公昭58−1210
44公報、特公昭59−223445公報等)も提案さ
れているが、バインダー樹脂中における金属酸化物はバ
インダー樹脂および溶剤に不溶で、かつ、その形状が塊
状のために、保護層中の含有量が一定であってもその分
散状態によって、抵抗値が変動し、特性が不安定になっ
たり、また、配合比・粒径等を細かく制御しないと、帯
電性や残留電位の環境変動あるいは繰り返し変動をひき
おこすという欠点がある。
Therefore, a method of using a protective layer in which a metal oxide is dispersed in a binder resin as the protective layer (for example,
Japanese Patent Publication No. 57-39846, Japanese Patent Publication No. 58-1210
44, Japanese Patent Publication No. 59-223445, etc.), but the metal oxide in the binder resin is insoluble in the binder resin and the solvent, and the shape thereof is lumpy. Even if the value is constant, the resistance value fluctuates depending on the dispersion state, the characteristics become unstable, and unless the compounding ratio, particle size, etc. are finely controlled, environmental changes or repetitive fluctuations of the charging property and residual potential. It has the drawback of causing

【0007】他方、一般に感光層の保護層としてダイヤ
モンド状薄膜を用いる方法(例えば、特開昭62−20
3163公報等)も提案されているが、有機感光体の場
合、通常のプラズマCVD法等の合成方法では有機感光
層が劣化したり、合成したダイヤモンド状薄膜にクラッ
クが生じる等の問題があった。
On the other hand, in general, a method using a diamond-like thin film as a protective layer for the photosensitive layer (see, for example, JP-A-62-20).
However, in the case of an organic photoreceptor, there are problems such as deterioration of the organic photosensitive layer and cracks in the synthesized diamond-like thin film by a synthesis method such as a normal plasma CVD method. .

【0008】[0008]

【発明が解決しようとする課題】従って、上述したよう
に、感度、耐久性などの点で満足いく特性のものは余り
得られておらず、温湿度等の使用環境に対して安定で、
かつ電子写真感光体として要求される特性を満足するさ
らに高寿命な電子写真感光体の開発が望まれている。
Therefore, as described above, few satisfactory properties have been obtained in terms of sensitivity, durability, etc., and they are stable to the environment of use such as temperature and humidity.
In addition, there is a demand for the development of an electrophotographic photoreceptor having a longer life, which satisfies the characteristics required for the electrophotographic photoreceptor.

【0009】[0009]

【課題を解決するための手段】本発明は、前記問題点に
鑑み、導電性支持体上に有機感光層およびその保護層の
順で積層して形成され、且つ保護層が高硬度で近赤外光
に対して透明で高抵抗なダイヤモンド状薄膜である感光
体によって、繰り返しによる残留電位の上昇が少なく、
温湿度に対して安定で、特に耐磨耗性・耐久性に優れた
電子写真感光体を提供するものである。
In view of the above problems, the present invention is formed by laminating an organic photosensitive layer and its protective layer in this order on a conductive support, and the protective layer has a high hardness and a near red color. Due to the photoconductor, which is a diamond-like thin film that is transparent and highly resistant to external light, the increase in residual potential due to repetition is small,
The present invention provides an electrophotographic photosensitive member which is stable against temperature and humidity and which is particularly excellent in abrasion resistance and durability.

【0010】また、排気装置に接続された真空槽中で、
導電性支持体上に形成された有機感光層と接地電極を対
向させて、その導電性支持体に負の直流電圧を印加し、
さらに導電性支持体と前記接地電極の間に高周波電極を
配置し、一定の時間間隔で保護層の材料となる気体を超
音速分子線として接地電極側から高周波電極を通して有
機感光層に噴き付ける製造方法によって、有機感光層を
劣化させる事なく保護層として高硬度で近赤外光に対し
て透明で高抵抗なダイヤモンド状薄膜がクラック等の欠
陥の無い状態で形成できるものである。
Further, in a vacuum chamber connected to an exhaust device,
The organic photosensitive layer formed on the conductive support and the ground electrode are opposed to each other, and a negative DC voltage is applied to the conductive support,
Further, a high frequency electrode is arranged between the conductive support and the ground electrode, and a gas serving as a material for the protective layer is sprayed as a supersonic molecular beam from the ground electrode side to the organic photosensitive layer through the high frequency electrode at regular time intervals. According to the method, a diamond-like thin film having high hardness, transparency to near-infrared light, and high resistance can be formed as a protective layer without degrading the organic photosensitive layer without defects such as cracks.

【0011】[0011]

【作用】本発明の電子写真感光体は導電性支持体上に有
機感光層およびその保護層の順で積層することによって
通常の帯電後光感度を有する。
The electrophotographic photosensitive member of the present invention has a usual post-charge photosensitivity by laminating the organic photosensitive layer and its protective layer in this order on the conductive support.

【0012】また、本発明の電子写真感光体は保護層と
して高硬度で近赤外光に対して透明で高抵抗なダイヤモ
ンド状薄膜を用いることによって、耐摩耗性・耐久性を
著しく向上できるものである。また、保護層を薄膜とす
ることで静電特性も比較的温湿度に対して安定する。ま
た、材料ガスを超音速分子線として噴き付ける時間間隔
を比較的長くすることで有機感光層が連続してプラズマ
にさらされないようにし、導電性支持体の水冷と併せて
有機感光層の温度上昇を抑え、有機感光層の劣化や保護
層として形成するダイヤモンド状薄膜のクラックを発生
させることなく形成できるものである。また、導電性支
持体に有機感光層と対向した接地電極に対して負の電圧
を印加することによって、超音速分子線として高周波電
極を通してプラズマ化されて噴き付けられる材料ガス
は、そのプラスイオンが加速されて有機感光層上に形成
されるダイヤモンド薄膜上に衝突し、保護層として形成
されるダイヤモンド状薄膜の硬度・透明度・抵抗率を向
上させるものである。ここで超音速分子線とは、材料ガ
スを真空槽中に導入する時の断熱膨張により、その温度
が著しく低下することによる、材料ガス分子どうしの並
進速度が比較的揃い、相互に衝突し合うなどの干渉の少
ない状態での分子の流れを言う。一般にこのような超音
速分子線は、真空装置内部に材料ガスを導入する際に、
その前後で充分に大きな圧力差が得られるノズルを用い
ることで得ることができる。さらに、材料ガスを真空装
置内部に導入するノズルを電気的に開閉可能なものと
し、一定の時間間隔で材料ガスを真空装置内に導入する
ことにより、ノズルが閉じている時の真空装置内部の圧
力を小さくし、ノズルが開き導入された材料ガス分子
と、真空装置内に残留していたガス分子との衝突確率を
小さくすることで、比較的ノズルから離れた広い範囲で
超音速分子線が得られるようにできるものである。
Further, the electrophotographic photosensitive member of the present invention can be remarkably improved in wear resistance and durability by using a diamond-like thin film having a high hardness, a transparent property against near infrared light and a high resistance as a protective layer. Is. Further, by forming the protective layer as a thin film, the electrostatic characteristics are relatively stable against temperature and humidity. In addition, the organic photosensitive layer is prevented from being continuously exposed to plasma by making the time interval of spraying the material gas as a supersonic molecular beam relatively long, and the temperature rise of the organic photosensitive layer is accompanied by water cooling of the conductive support. It is possible to suppress the deterioration of the organic photosensitive layer and to prevent the diamond-like thin film formed as the protective layer from cracking. In addition, by applying a negative voltage to the ground electrode facing the organic photosensitive layer to the conductive support, the material gas that is turned into plasma through the high-frequency electrode as a supersonic molecular beam and is sprayed has its positive ions. It accelerates and collides with the diamond thin film formed on the organic photosensitive layer to improve the hardness, transparency and resistivity of the diamond-like thin film formed as the protective layer. Here, supersonic molecular beam is the material gas.
Temperature of the gas due to adiabatic expansion when it is introduced into the vacuum chamber.
Of the material gas molecules due to the significant decrease in
The advance speeds are relatively uniform and there is little interference such as collisions with each other.
It is the flow of molecules in the absence. Generally such super sound
The fast molecular beam, when introducing the material gas into the vacuum device,
Use a nozzle that can obtain a sufficiently large pressure difference before and after that.
Can be obtained by Furthermore, the material gas is vacuumed.
A nozzle that can be opened and closed electrically
Then, the material gas is introduced into the vacuum device at regular time intervals.
This allows the pressure inside the vacuum device when the nozzle is closed.
Material gas molecules introduced by reducing the force and opening the nozzle
And the collision probability of the gas molecules remaining in the vacuum device
By making it small, in a wide range relatively far from the nozzle
It is possible to obtain supersonic molecular beams.

【0013】[0013]

【実施例】以下、本発明の電子写真感光体及びその表面
保護層の製造方法について詳細に説明する。
EXAMPLES The method for producing the electrophotographic photosensitive member and the surface protective layer thereof according to the present invention will be described in detail below.

【0014】本発明の電子写真感光体に用いられる導電
性支持体は、従来から知られている導電性を有するもの
であればよく、アルミニウム、アルミニウム合金などの
金属板及び金属ドラム、酸化スズ、酸化インジウムなど
の金属酸化物からなる板、またはそれらの金属及び金属
酸化物などを真空蒸着、スパッタリング、ラミネート、
塗布などによって付着させ導電性処理した各種プラスチ
ックフィルム、紙などである。
The conductive support used in the electrophotographic photosensitive member of the present invention may be any one having a conventionally known conductivity, such as a metal plate of aluminum or aluminum alloy, a metal drum, tin oxide, Plates made of metal oxides such as indium oxide, or those metals and metal oxides are vacuum deposited, sputtered, laminated,
These are various plastic films and papers that have been made conductive by applying them by coating.

【0015】本発明の電子写真感光体の電荷輸送層に用
いる電子供与性物質としては、アルキル基、アルコキシ
基、アミノ基、イミド基などの電子供与性基を有する化
合物、アントラセン、ピレン、フェナントレンなどの多
環芳香族化合物またはそれらを含む誘導体、インドー
ル、オキサゾール、オキサジアゾール、カルバゾール、
チアゾール、ピラゾリン、イミダゾール、トリアゾール
などの複素環化合物またはそれらを含む誘導体などが挙
げられる。これらの電子供与性物質とバインダー樹脂を
適当な溶剤に溶解し、通常の塗布法によって塗布・乾燥
し電荷輸送層を形成せしめるが、電子供与性物質が高分
子化合物の場合はバインダー樹脂を混合せずに単独で電
荷輸送層を形成しても良い。電荷輸送層の膜厚としては
数μm〜数十μmであるが、好ましくは5〜25μmの
厚さである。
Examples of the electron-donating substance used in the charge-transporting layer of the electrophotographic photosensitive member of the present invention include compounds having an electron-donating group such as an alkyl group, an alkoxy group, an amino group and an imide group, anthracene, pyrene and phenanthrene. Polycyclic aromatic compounds or derivatives containing them, indole, oxazole, oxadiazole, carbazole,
Examples thereof include heterocyclic compounds such as thiazole, pyrazoline, imidazole and triazole, and derivatives containing them. The electron-donating substance and the binder resin are dissolved in an appropriate solvent and applied and dried by a normal coating method to form a charge transport layer.If the electron-donating substance is a polymer compound, the binder resin is mixed. Instead, the charge transport layer may be formed alone. The thickness of the charge transport layer is several μm to several tens μm, preferably 5 to 25 μm.

【0016】また、本発明の電子写真感光体の電荷発生
層に用いる電荷発生物質としては、フタロシアニン系、
アゾ系、スクエアリリウム系、シアニン系、ペリレン系
等の各種顔料あるいは染料が挙げられる。電荷発生層は
これらの顔料あるいは染料と適当なバインダー樹脂を加
えて分散させて調液された塗布液を通常の塗工法によっ
て塗布、加熱乾燥し、数μmの膜厚で形成するが、好ま
しくは 0.2〜2μmの膜厚に形成するのがよい。フ
タロシアニン系顔料としては、ε型、α型、β型銅フタ
ロシアニンや、その他の金属フタロシアニン、無金属フ
タロシアニン等を用いることができる。
The charge generating material used in the charge generating layer of the electrophotographic photosensitive member of the present invention is a phthalocyanine-based material.
Examples thereof include various pigments or dyes such as azo type, squarylium type, cyanine type and perylene type. The charge generation layer is formed by coating a coating solution prepared by adding and dispersing these pigments or dyes and a suitable binder resin by a conventional coating method, heating and drying, and forming a film having a thickness of several μm. It is preferable to form the film having a thickness of 0.2 to 2 μm. As the phthalocyanine-based pigment, ε-type, α-type, β-type copper phthalocyanine, other metal phthalocyanine, metal-free phthalocyanine and the like can be used.

【0017】電荷発生層、電荷輸送層に用いられるバイ
ンダー樹脂は、他層との接着性向上、塗布膜の均一性向
上、塗工時の流動性調整などの目的で、必要に応じて用
いられ、具体的には、ポリエステル、ポリ塩化ビニル、
ポリビニルブチラ−ル、ポリ酢酸ビニル、ポリカ−ボネ
イト、アクリル樹脂、メタクリル樹脂、シリコン樹脂、
またはこれらの樹脂の共重合体および混合物などが挙げ
られる。また、溶剤としては電荷発生層の場合は、バイ
ンダー樹脂を溶解させ且つ電荷発生物質の分散性が良好
なものがよく、また電荷輸送層の場合は電荷輸送剤とバ
インダー樹脂を溶解するものであればよく、具体的に
は、ハロゲン化炭化水素類、ハロゲン化芳香族類、芳香
族類、ケトン類、エステル類、エーテル類、アルコール
類などを用いることができる。
The binder resin used in the charge generation layer and the charge transport layer is used, if necessary, for the purpose of improving the adhesiveness with other layers, improving the uniformity of the coating film, and adjusting the fluidity during coating. , Specifically, polyester, polyvinyl chloride,
Polyvinyl butyral, polyvinyl acetate, polycarbonate, acrylic resin, methacrylic resin, silicone resin,
Alternatively, copolymers and mixtures of these resins may be mentioned. Further, as the solvent, in the case of the charge generation layer, a solvent that dissolves the binder resin and has good dispersibility of the charge generation substance is preferable, and in the case of the charge transport layer, a solvent that dissolves the charge transport agent and the binder resin may be used. More specifically, specifically, halogenated hydrocarbons, halogenated aromatics, aromatics, ketones, esters, ethers, alcohols and the like can be used.

【0018】本発明の電子写真感光体は、このようにし
て形成された、電荷発生層、電荷輸送層からなる感光層
上に保護層としてダイヤモンド状薄膜を形成する。以下
にこのダイヤモンド状薄膜の製造方法について図1に概
念的系統図として例示するような製造装置により説明す
る。
In the electrophotographic photoreceptor of the present invention, a diamond-like thin film is formed as a protective layer on the thus-formed photosensitive layer composed of the charge generation layer and the charge transport layer. Hereinafter, a method for manufacturing the diamond-like thin film will be described with reference to a manufacturing apparatus illustrated in FIG. 1 as a conceptual system diagram.

【0019】円筒型接地電極体兼真空槽101の内部に
導電性支持体上に形成された有機感光体ドラム104と
それに対向する材料ガス供給用電磁ノズル弁106と材
料ガスの放電分解用メッシュ状電極体107が配置され
る。電磁ノズル弁は電気信号によって材料ガスを任意の
時間だけ超音速分子線として有機感光体に噴き付けるこ
とができるものであればよく、自動車エンジンの燃料噴
出用ノズル等が用いられる。また電磁ノズル弁と有機感
光体の間に配置される電極体は超音速分子線として噴出
される材料ガスを放電分解させれるものであればよい。
An organic photosensitive drum 104 formed on a conductive support in a cylindrical ground electrode / vacuum chamber 101, an electromagnetic nozzle valve 106 for supplying a material gas, which faces the organic photosensitive drum 104, and a mesh shape for discharging and discharging the material gas. The electrode body 107 is arranged. The electromagnetic nozzle valve only needs to be capable of spraying the material gas as a supersonic molecular beam on the organic photoconductor for an arbitrary time by an electric signal, and a fuel jet nozzle of an automobile engine or the like is used. Further, the electrode body arranged between the electromagnetic nozzle valve and the organic photoconductor may be any one that can discharge-decompose the material gas ejected as a supersonic molecular beam.

【0020】メッシュ状電極体107には高周波電源1
08が接続され、有機感光体ドラム104には直流電源
105が接続される。メッシュ状電極に接続される高周
波電源は超音速分子線として噴出される材料ガスを放電
分解させれるものであればよい。また、有機感光体ドラ
ムに接続される直流電源は、有機感光体に負のバイアス
電圧を与え、放電分解されてプラズマ化した材料ガスの
うち、正イオンを加速して引き寄せることのできるもの
であればよい。
The mesh electrode body 107 has a high frequency power source 1
08 is connected, and the DC power source 105 is connected to the organic photosensitive drum 104. The high-frequency power source connected to the mesh-shaped electrode may be any one capable of discharging and decomposing the material gas ejected as a supersonic molecular beam. Further, the DC power source connected to the organic photoconductor drum may be one that can apply a negative bias voltage to the organic photoconductor to accelerate and attract positive ions from the material gas that is discharged and decomposed into plasma. Good.

【0021】材料ガスは材料ガス供給装置109から材
料ガス供給用ノズル弁106を通して供給される。材料
ガス供給装置109は材料ガスボンベ112、材料ガス
流量調節装置111、材料ガス選択弁110よりなり、
使用する材料ガスの選択弁110を開き材料ガス流量調
節装置111で流量を調節して供給する。材料ガス供給
用ノズル弁106はノズル弁開閉装置113によって適
当な時間間隔で開閉され、同期回路115によってドラ
ム回転装置114によって回転される感光体ドラム10
4と同期を図る。
The material gas is supplied from the material gas supply device 109 through the material gas supply nozzle valve 106. The material gas supply device 109 includes a material gas cylinder 112, a material gas flow rate control device 111, and a material gas selection valve 110,
The material gas selection valve 110 to be used is opened, and the material gas flow rate adjusting device 111 adjusts the flow rate to supply the material gas. The material gas supply nozzle valve 106 is opened and closed at appropriate time intervals by a nozzle valve opening / closing device 113, and is rotated by a drum rotating device 114 by a synchronous circuit 115.
Synchronize with 4.

【0022】使用する材料ガスの種類および流量は、例
えばメタンCH4を500sccm等であるが、酸素
2、二酸化炭素CO2等を添加してもよい。炭素供給用
ガスとしてはメタン、エタン、プロパン、アセチレン等
の炭化水素ガスおよびメタノール、エタノール、アセト
ン等の有機溶剤の蒸気等を用いることができるが、他に
水素、アルゴン、ヘリウム等を併せて用いてもよい。
The type and flow rate of the material gas used are, for example, 500 sccm of methane CH 4 , but oxygen O 2 , carbon dioxide CO 2, etc. may be added. As the carbon supply gas, hydrocarbon gas such as methane, ethane, propane, and acetylene, and vapor of organic solvent such as methanol, ethanol, and acetone can be used, but hydrogen, argon, helium, and the like are also used together. May be.

【0023】感光体ドラム104はドラム回転装置11
4を用いて適当な回転数、例えば0.2〜120rpm
で回転させる。材料ガス供給用ノズル弁106と感光体
ドラム104の回転は同期回路115により同期させ
る。真空槽101内部の圧力は平均で0.001〜1T
orrとなるように、また高周波電源108の出力は材
料ガス供給用ノズルから材料ガスが供給されて局部的に
圧力の上昇した部分でのみ放電分解が起こり、他の部分
では放電分解が起こらないように設定すればよい。正イ
オン加速用の直流電圧は−100〜−1000Vの範囲
であり、通常は−200〜−600V程度である。
The photosensitive drum 104 is a drum rotating device 11
4, using a suitable rotation speed, for example 0.2-120 rpm
Rotate with. The rotation of the material gas supply nozzle valve 106 and the photoconductor drum 104 are synchronized by a synchronizing circuit 115. The pressure inside the vacuum chamber 101 is 0.001 to 1T on average
The discharge of the high frequency power supply 108 is such that discharge decomposition occurs only in a portion where the material gas is supplied from the material gas supply nozzle and the pressure is locally increased, and discharge decomposition does not occur in other portions. You can set it to. The DC voltage for accelerating positive ions is in the range of -100 to -1000V, and is usually about -200 to -600V.

【0024】以下、本発明の実施例を具体的に説明する
が、本発明は以下の実施例に示す組合せに限定されるも
のではない。
Examples of the present invention will be specifically described below, but the present invention is not limited to the combinations shown in the following examples.

【0025】以下本発明の一実施例の電子写真感光体に
ついて説明する。導電性支持体としてアルミニウムのド
ラムを用い、電荷発生層・電荷輸送層・保護層を下記の
ように作製した。
An electrophotographic photosensitive member according to an embodiment of the present invention will be described below. An aluminum drum was used as a conductive support, and a charge generation layer, a charge transport layer, and a protective layer were prepared as follows.

【0026】電荷発生層として、τ型無金属フタロシア
ニン(東洋インキ製造株式会社製)5重量部とアクリル
樹脂(三菱レーヨン株式会社製 商品名ダイヤナールH
R664)4重量部およびメラミン樹脂(大日本インキ
株式会社製 商品名スーパーベッカミンL145−6
0)1重量部とをs−ブチルアルコール115重量部に
分散した。この塗液を外径30mmのアルミドラム上に
浸漬塗布し、130℃にて1時間乾燥して膜厚0.2μ
mの電荷発生層を形成した。
As the charge generation layer, 5 parts by weight of τ-type metal-free phthalocyanine (manufactured by Toyo Ink Mfg. Co., Ltd.) and acrylic resin (trade name DIANAL H, manufactured by Mitsubishi Rayon Co., Ltd.)
R664) 4 parts by weight and melamine resin (trade name: Super Beckamine L145-6 manufactured by Dainippon Ink and Chemicals, Inc.)
0) 1 part by weight was dispersed in 115 parts by weight of s-butyl alcohol. This coating solution is applied onto an aluminum drum having an outer diameter of 30 mm by dip coating and dried at 130 ° C. for 1 hour to give a film thickness of 0.2 μm.
m charge generating layer was formed.

【0027】次に電荷輸送層として、1,1−ビス(p
−ジエチルアミノフェニル)−4,4−ジフェニル−
1,3−ブタジエン 1重量部とポリカーボネイト(バ
イエル社製 商品名マクロホールN)1重量部を塩化メ
チレン9重量部に溶解し、この塗液を前記電荷発生層上
に浸漬塗布し、80℃にて1時間乾燥して膜厚20μm
の電荷輸送層を形成した。
Next, as a charge transport layer, 1,1-bis (p
-Diethylaminophenyl) -4,4-diphenyl-
1 part by weight of 1,3-butadiene and 1 part by weight of polycarbonate (trade name: Macrohole N manufactured by Bayer Co., Ltd.) are dissolved in 9 parts by weight of methylene chloride, and the coating solution is dip-coated on the charge generation layer to 80 ° C. And dry for 1 hour, film thickness 20μm
Was formed on the charge transport layer.

【0028】このようにして得た電荷発生層および電荷
輸送層よりなる感光体ドラムを先に述べた図1に概念的
系統図として示した装置の円筒形真空槽101内部に感
光体ドラム104として配置し、円筒形真空槽101を
10-3Torrまで排気した後にノズル弁開閉装置11
3を用い材料ガス供給用ノズル弁106を1secおき
に1msecの間、開いて材料ガスを供給した。材料ガ
スを供給するタイミングは5個のノズルが順番に開とな
り、ちょうど1secで一巡するように時間間隔を設定
した。使用する材料ガスは材料ガス供給装置109内の
材料ガス選択弁110によって選び、材料ガス流量調節
装置111によって材料ガスの流量を設定した。使用し
た材料ガスの種類および流量は、メタンCH4を200
sccmである。
The photosensitive drum comprising the charge generation layer and the charge transport layer thus obtained is used as a photosensitive drum 104 inside the cylindrical vacuum chamber 101 of the apparatus shown in the conceptual system diagram of FIG. After arranging and evacuating the cylindrical vacuum chamber 101 to 10 −3 Torr, the nozzle valve opening / closing device 11
3, the material gas supply nozzle valve 106 was opened every 1 second for 1 msec to supply the material gas. As for the timing of supplying the material gas, the five nozzles were sequentially opened, and the time interval was set so as to complete one cycle in exactly 1 sec. The material gas to be used was selected by the material gas selection valve 110 in the material gas supply device 109, and the material gas flow rate control device 111 set the flow rate of the material gas. The type and flow rate of the material gas used is methane CH 4 200
sccm.

【0029】高周波電源108として13.56MHz
500Wの電源を用い、直流電源105は直流バイアス
電圧が−500Vとなるように設定した。円筒形真空槽
101内の圧力は平均で0.01Torrとなるように
排気速度調節用バルブ102を設定した。排気装置10
3にはメカニカルブースタポンプを前段に持つロータリ
ポンプを用いた。排気速度は1800m3/hrであ
る。
13.56 MHz as the high frequency power source 108
A 500 W power supply was used, and the DC power supply 105 was set so that the DC bias voltage was -500V. The exhaust speed adjusting valve 102 was set so that the pressure in the cylindrical vacuum chamber 101 was 0.01 Torr on average. Exhaust device 10
For 3, a rotary pump having a mechanical booster pump in the front stage was used. The exhaust speed is 1800 m 3 / hr.

【0030】感光体ドラム104はドラム回転装置11
4を用いて75rpmで回転させるとともに、導電性支
持体内部から水冷して用いた。
The photosensitive drum 104 is a drum rotating device 11
4 was rotated at 75 rpm, and water-cooled from the inside of the conductive support before use.

【0031】上記の合成条件で5時間の膜堆積を行い、
約0.1μmの表面保護層を得た。このようにして得た
保護層のビッカース硬度は2000kg/mm2以上の高硬度であ
り、抵抗率が1010 Ωcm以上の高抵抗であり、屈折
率が約2.2であり、光学的禁制帯幅が約1.6eVで
あり、ラマン散乱スペクトルでは主として1520cm-1
でのみブロードな散乱が観測され、赤外線吸収スペクト
ルでは2960cm -1における吸収係数α1 と3030
cm-1における吸収係数α2 の比α1/α2の値が約3で
あった。また透過電子線回折TEDおよび高速反射電子
線回折RHEEDにおいてハロー状のリングパターンと
なり、X線回折XRDにおいても有意な信号はみられな
かったことから得られた膜は特定の結晶構造を持たない
アモルファスであると考えられるが、sp3結合が主体
となったダイヤモンド状薄膜と考えられる。また、この
ようにして得たダイヤモンド状薄膜はクラックやはがれ
の全く無い平滑な膜であった。
Film deposition was carried out for 5 hours under the above synthesis conditions,
A surface protective layer having a thickness of about 0.1 μm was obtained. Got this way
Vickers hardness of the protective layer is 2000kg / mm2Higher hardness
The resistivity is 10Ten High resistance of Ωcm or more, refraction
The ratio is about 2.2, and the optical band gap is about 1.6 eV.
Yes, the Raman scattering spectrum is mainly 1520 cm-1
Broad scattering is observed only in the infrared absorption spectrum
2960 cm in Le -1Absorption coefficient α 1 and 3030
cm-1The value of the ratio α1 / α2 of the absorption coefficient α2 at is about 3
there were. In addition, transmission electron diffraction TED and high-speed backscattered electrons
In line diffraction RHEED, with a halo ring pattern
And no significant signal was observed in X-ray diffraction XRD.
The film obtained from the fact that it did not have a specific crystal structure
Thought to be amorphous, sp3Mainly binding
It is considered to be a diamond-like thin film. Also this
The diamond-like thin film thus obtained has cracks and peeling.
It was a smooth film without any defects.

【0032】このようにして得た電子写真感光体を、自
作の特性試験機を用いて特性を測定した。試験機は図2
に示すような構成で、表面電位計プローブA203にて
帯電後の電位V0 を、表面電位計プローブB206にて
露光後の電位VL を測定した。表面電位計はトレック・
ジャパン株式会社製 モデル344 を用い、露光光量
は800nm 光で3μJ/cm2 とした。また、帯電・露光
・除電のサイクルを100回繰り返して同様の測定を行
った。このようにして得た電子写真感光体の特性は温度
湿度の影響が少なく、2000000回までの繰り返し
に対しても安定した特性を示した。また、ダイヤモンド
状薄膜保護層を形成しない有機感光層のみからなる感光
体ドラムの特性と比較してもほとんど変化がなく、ダイ
ヤモンド状薄膜保護層の形成により有機感光層が劣化し
ていないことが確認できた。
The characteristics of the electrophotographic photosensitive member thus obtained were measured by using a self-made characteristic tester. The test machine is shown in Figure 2.
With the configuration as shown in FIG. 5, the surface potential meter probe A203 measured the potential V0 after charging, and the surface potential meter probe B206 measured the potential VL after exposure. The surface electrometer is Trek
Model 344 manufactured by Japan Co., Ltd. was used, and the exposure light amount was 3 μJ / cm 2 at 800 nm light. In addition, the same measurement was performed by repeating the cycle of charging, exposing and discharging 100 times. The characteristics of the electrophotographic photosensitive member thus obtained were little affected by temperature and humidity, and showed stable characteristics even after repeated up to 2,000,000 times. Also, there was almost no change compared to the characteristics of the photoconductor drum consisting of only the organic photosensitive layer without forming the diamond-like thin film protective layer, and it was confirmed that the organic photosensitive layer was not deteriorated by the formation of the diamond-like thin film protective layer. did it.

【0033】また、同様にして得た電子写真感光体ドラ
ムを、通常の2成分磁気ブラシ現像法で全面現像した後
ウレタンゴムブレードでクリーニングするサイクルを2
000000回繰り返した後も、表面はトナーフィルミ
ング等はまったく見られず、平滑で、傷や摩耗も見られ
なかった。
Further, the electrophotographic photosensitive drum obtained in the same manner is entirely developed by a usual two-component magnetic brush developing method, and then cleaned with a urethane rubber blade in two cycles.
After repeating 000000 times, the surface of the surface was smooth, no toner filming was observed, and scratches and abrasion were not observed.

【0034】さらに、同様にして得た電子写真感光体ド
ラムを、市販のレーザビームプリンタ(キャノン株式会
社製レーザショットA404)に装着して、20000
0枚プリントした後も、表面はトナーフィルミング等は
まったく見られず、平滑で、傷や摩耗も見られず、良好
な画像が得られた。
Further, the electrophotographic photosensitive drum obtained in the same manner was mounted on a commercially available laser beam printer (Laser Shot A404 manufactured by Canon Inc.), and 20,000
Even after printing 0 sheets, no toner filming was observed on the surface, the surface was smooth, and scratches and abrasion were not observed, and a good image was obtained.

【0035】以上のように本実施例によれば、電子写真
感光体が導電性支持体上に電荷発生層・電荷輸送層・保
護層の順で積層して形成され且つ保護層が高硬度で近赤
外光に対して透明で高抵抗なダイヤモンド状薄膜である
電子写真感光体によって、繰り返しによる残留電位の上
昇が少なく、温湿度に対して安定で、特に耐磨耗性・耐
久性に優れた電子写真感光体を提供するものである。
As described above, according to this embodiment, the electrophotographic photosensitive member is formed by laminating the charge generating layer, the charge transporting layer and the protective layer in this order on the conductive support, and the protective layer has a high hardness. The electrophotographic photosensitive member, which is a diamond-like thin film that is transparent to near-infrared light and has high resistance, has little increase in residual potential due to repetition, is stable against temperature and humidity, and is particularly excellent in abrasion resistance and durability. And an electrophotographic photosensitive member.

【0036】また、排気装置に接続された真空槽中で、
導電性支持体上に形成された有機感光層と接地電極を対
向させて、その導電性支持体に負の直流電圧を印加し、
さらに導電性支持体と前記接地電極の間に高周波電極を
配置し、一定の時間間隔で保護層の材料となる気体を超
音速分子線として接地電極側から高周波電極を通して有
機感光層に噴き付ける製造方法によって、有機感光層を
劣化させる事なく保護層として高硬度で近赤外光に対し
て透明で高抵抗なダイヤモンド状薄膜がクラック等の欠
陥の無い状態で形成できるものである。
In a vacuum chamber connected to the exhaust device,
The organic photosensitive layer formed on the conductive support and the ground electrode are opposed to each other, and a negative DC voltage is applied to the conductive support,
Further, a high frequency electrode is arranged between the conductive support and the ground electrode, and a gas serving as a material for the protective layer is sprayed as a supersonic molecular beam from the ground electrode side to the organic photosensitive layer through the high frequency electrode at regular time intervals. According to the method, a diamond-like thin film having high hardness, transparency to near-infrared light, and high resistance can be formed as a protective layer without degrading the organic photosensitive layer without defects such as cracks.

【0037】以下に本発明の比較例として、熱硬化性シ
リコン樹脂とウレタンエラストマーとからなる塗布型表
面保護層を用いた場合のサンプルを作成した。
As a comparative example of the present invention, a sample using a coating type surface protective layer made of a thermosetting silicone resin and a urethane elastomer was prepared below.

【0038】実施例と同様にして電荷輸送層、電荷発生
層を作成し、表面保護層を電荷発生層上に形成し、特性
の測定を行なった。
A charge transport layer and a charge generation layer were prepared in the same manner as in the example, a surface protective layer was formed on the charge generation layer, and the characteristics were measured.

【0039】また、表面保護層は熱硬化性シリコーン樹
脂(東芝シリコーン株式会社製 商品名トスガード52
0)7重量部とウレタンエラストマー(三井東圧化学株
式会社製 商品名オレスターNL2249E)3重量部
とをn−ブチルアルコール115重量部に溶解し、この
塗液を前記電荷発生層上に浸積塗布し、120℃にて1
時間加熱処理し、硬化させて膜厚1μmの表面保護層を
形成した。
The surface protective layer is made of a thermosetting silicone resin (trade name Tosgard 52 manufactured by Toshiba Silicone Co., Ltd.).
0) 7 parts by weight of urethane elastomer and 3 parts by weight of urethane elastomer (trade name OLESTER NL2249E manufactured by Mitsui Toatsu Chemicals, Inc.) were dissolved in 115 parts by weight of n-butyl alcohol, and this coating solution was immersed on the charge generation layer. Apply and apply at 120 ° C for 1
It was heat-treated for a period of time and cured to form a surface protective layer having a film thickness of 1 μm.

【0040】このようにして得た電子写真感光体の特性
は温度湿度の影響が大きく、高温高湿下では繰り返しに
対しても比較的安定した特性を示すが、低温低湿下では
初期10回の繰り返しで露光後の電位は2倍以上とな
り、さらに100回までに初期の4倍以上の電位まで上
昇した。
The characteristics of the electrophotographic photosensitive member thus obtained are greatly affected by temperature and humidity, and show relatively stable characteristics under high temperature and high humidity even after repeated use. After repeated exposure, the potential after exposure doubled or more, and by 100 times, the potential increased to four times or more of the initial potential.

【0041】また、同様にして得た電子写真感光体ドラ
ムを、通常の2成分磁気ブラシ現像法で全面現像した後
ウレタンゴムブレードでクリーニングするサイクルを2
000000回繰り返すと、保護層および感光層は完全
に摩耗し無くなった。
Further, the electrophotographic photosensitive drum obtained in the same manner is subjected to full-surface development by a usual two-component magnetic brush developing method and then cleaned with a urethane rubber blade in two cycles.
After repeating 000000 times, the protective layer and the photosensitive layer were completely worn away.

【0042】さらに、同様にして得た電子写真感光体ド
ラムを、市販のレーザビームプリンタ(キャノン株式会
社製レーザショットA404)に装着して、20000
0枚プリントした後には、保護層は摩耗していた。
Further, the electrophotographic photosensitive drum obtained in the same manner was mounted on a commercially available laser beam printer (Laser Shot A404 manufactured by Canon Inc.), and 20,000
After printing 0 sheets, the protective layer was worn.

【0043】[0043]

【発明の効果】以上のように本発明の電子写真感光体
は、導電性支持体上に電荷発生層・電荷輸送層・保護層
の順で積層して形成され、且つ保護層が高硬度で近赤外
光に対して透明で高抵抗なダイヤモンド状薄膜である電
子写真感光体によって、繰り返しによる残留電位の上昇
が少なく、温湿度に対して安定で、特に耐磨耗性・耐久
性に優れた電子写真感光体を提供するものである。
As described above, the electrophotographic photosensitive member of the present invention is formed by laminating the charge generation layer, the charge transport layer and the protective layer in this order on the conductive support, and the protective layer has a high hardness. The electrophotographic photosensitive member, which is a diamond-like thin film that is transparent to near-infrared light and has high resistance, has little increase in residual potential due to repetition, is stable against temperature and humidity, and is particularly excellent in abrasion resistance and durability. And an electrophotographic photosensitive member.

【0044】また、排気装置に接続された真空槽中で、
導電性支持体上に形成された有機感光層と接地電極を対
向させて、その導電性支持体に負の直流電圧を印加し、
さらに導電性支持体と前記接地電極の間に高周波電極を
配置し、一定の時間間隔で保護層の材料となる気体を超
音速分子線として接地電極側から高周波電極を通して有
機感光層に噴き付ける製造方法によって、有機感光層を
劣化させる事なく保護層として高硬度で近赤外光に対し
て透明で高抵抗なダイヤモンド状薄膜がクラック等の欠
陥の無い状態で形成できるものである。
In a vacuum chamber connected to the exhaust device,
The organic photosensitive layer formed on the conductive support and the ground electrode are opposed to each other, and a negative DC voltage is applied to the conductive support,
Further, a high frequency electrode is arranged between the conductive support and the ground electrode, and a gas serving as a material for the protective layer is sprayed as a supersonic molecular beam from the ground electrode side to the organic photosensitive layer through the high frequency electrode at regular time intervals. According to the method, a diamond-like thin film having high hardness, transparency to near-infrared light, and high resistance can be formed as a protective layer without degrading the organic photosensitive layer without defects such as cracks.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施に用いる製造装置の一例の概念的
説明図
FIG. 1 is a conceptual explanatory view of an example of a manufacturing apparatus used for carrying out the present invention.

【図2】感光体ドラムの特性を測定するための自作の特
性試験機の概略図
FIG. 2 is a schematic diagram of a self-made characteristic tester for measuring characteristics of a photosensitive drum.

【符号の説明】[Explanation of symbols]

101 円筒型接地電極体兼真空槽 102 排気速度調節用バルブ 103 排気装置 104 導電性支持体上に形成された有機感光体ドラム 105 直流電源 106 材料ガス供給用電磁弁 107 材料ガスの放電分解用メッシュ状電極体 108 高周波電源 109 材料ガス供給装置 110 材料ガス選択弁 111 材料ガス流量調節装置 112 材料ガスボンベ 113 ノズル弁開閉装置 114 ドラム回転装置 115 同期回路 116 真空圧力計 201 感光体ドラム 202 コロナ帯電器 203 電位計プローブA 204,207 タングステンランプ 205 干渉フィルター(800nm) 206 電位計プローブB 208 色ガラスフィルター(紫外線カット) 101 Cylindrical Ground Electrode Body and Vacuum Tank 102 Exhaust Speed Control Valve 103 Exhaust Device 104 Organic Photoreceptor Drum Formed on Conductive Support 105 DC Power Supply 106 Material Gas Supply Electromagnetic Valve 107 Mesh for Discharge Decomposition of Material Gas Electrode body 108 high frequency power supply 109 material gas supply device 110 material gas selection valve 111 material gas flow rate controller 112 material gas cylinder 113 nozzle valve opening / closing device 114 drum rotating device 115 synchronous circuit 116 vacuum pressure gauge 201 photoconductor drum 202 corona charger 203 Electrometer probe A 204, 207 Tungsten lamp 205 Interference filter (800 nm) 206 Electrometer probe B 208 Colored glass filter (UV cut)

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】排気装置に接続された真空槽中で、導電性
支持体上に形成された有機感光層と接地電極を対向させ
て前記導電性支持体に負の直流電圧を印加し、前記導電
性支持体と前記接地電極の間に高周波電極を配置し、一
定の時間間隔で保護層の材料となる気体を超音速分子線
として接地電極側から高周波電極を通して前記有機感光
層に噴き付けられることを特徴とする電子写真感光体用
保護層の製造方法
1. A negative DC voltage is applied to the conductive support by causing an organic photosensitive layer formed on the conductive support and a ground electrode to face each other in a vacuum chamber connected to an exhaust device. A high frequency electrode is arranged between a conductive support and the ground electrode, and a gas serving as a material for the protective layer is sprayed as a supersonic molecular beam from the ground electrode side to the organic photosensitive layer through the high frequency electrode at regular time intervals. method for producing an electrophotographic photoreceptor protective layer, characterized in that.
JP4272681A 1992-10-12 1992-10-12 Method for producing electrophotographic photoreceptor and surface protective layer thereof Expired - Fee Related JP2532803B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4272681A JP2532803B2 (en) 1992-10-12 1992-10-12 Method for producing electrophotographic photoreceptor and surface protective layer thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4272681A JP2532803B2 (en) 1992-10-12 1992-10-12 Method for producing electrophotographic photoreceptor and surface protective layer thereof

Publications (2)

Publication Number Publication Date
JPH06123992A JPH06123992A (en) 1994-05-06
JP2532803B2 true JP2532803B2 (en) 1996-09-11

Family

ID=17517315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4272681A Expired - Fee Related JP2532803B2 (en) 1992-10-12 1992-10-12 Method for producing electrophotographic photoreceptor and surface protective layer thereof

Country Status (1)

Country Link
JP (1) JP2532803B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2567995B1 (en) 2006-12-26 2014-02-19 Asahi Kasei E-materials Corporation Resin composition for printing plate

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04125566A (en) * 1990-09-17 1992-04-27 Matsushita Electric Ind Co Ltd Electrophotographic sensitive body

Also Published As

Publication number Publication date
JPH06123992A (en) 1994-05-06

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