JP2531597B2 - Divided measurement method for DUT - Google Patents
Divided measurement method for DUTInfo
- Publication number
- JP2531597B2 JP2531597B2 JP3105019A JP10501991A JP2531597B2 JP 2531597 B2 JP2531597 B2 JP 2531597B2 JP 3105019 A JP3105019 A JP 3105019A JP 10501991 A JP10501991 A JP 10501991A JP 2531597 B2 JP2531597 B2 JP 2531597B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- measurement
- divided
- reproduction
- areas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は、光学測定装置が有す
る測定開口以上に広い被測定面を有する被測定物に対
し、被測定面を複数に分割した分割域毎に測定作業を行
い、このとき得られたデータから被測定面全体の形状を
合成して求めることができる被測定物の分割測定方法に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an object to be measured having a surface to be measured which is wider than the measuring aperture of an optical measuring device, and the measuring operation is carried out for each divided area obtained by dividing the surface to be measured. The present invention relates to a divided measurement method for an object to be measured, which can be obtained by synthesizing the shape of the entire surface to be measured from the obtained data.
【０００２】[0002]
【従来の技術】各種部品等（以下被測定物とよぶ）にお
ける平面や曲面（以下被測定面とよぶ）の状態を精密に
測定するための手段として干渉計等を用いた装置（以下
形状測定装置とよぶ）が各種開発されており、そのとき
形成される干渉縞等の模様から被測定面の形状を測定で
きるようになっている。この形状測定装置は、一回の測
定当りの測定可能な領域が制限されており、形状測定装
置の測定開口以上の広い被測定面については一回の測定
だけで全範囲を測定できない。2. Description of the Related Art A device using an interferometer (hereinafter referred to as shape measurement) as a means for precisely measuring the state of a flat surface or curved surface (hereinafter referred to as measured surface) of various parts (hereinafter referred to as measured object). Various types of devices have been developed, and the shape of the surface to be measured can be measured from patterns such as interference fringes formed at that time. This shape measuring device has a limited measurable area per measurement, and cannot measure the entire range of the surface to be measured which is larger than the measurement opening of the shape measuring device by only one measurement.
【０００３】そこで、前記広い面積の被測定物等を測定
しようとする場合には、被測定面を幾つか複数の領域に
分割し、その分割された領域（以下分割域とよぶ）毎に
測定作業を行うことが考えられる。即ち、この方法によ
れば、大型被測定物等の各分割域毎に測定作業を行い、
これにより得られたデータから各分割域の被測定面状態
を表す面（以下これを再生面とよぶ）を作成し、これら
の再生面を接続・一体化させて合成させることにより全
体の面形状を得ることが可能である。Therefore, when measuring an object to be measured having a large area, the surface to be measured is divided into a plurality of regions, and the divided regions (hereinafter referred to as divided regions) are measured. It is possible to perform work. That is, according to this method, measurement work is performed for each divided area of a large object to be measured,
The entire surface shape is created by creating a surface (hereinafter called the playback surface) that represents the measured surface state of each divided area from the data obtained by this, and connecting and integrating these playback surfaces. It is possible to obtain
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、この方
法によれば、分割域に応じて被測定物を逐次移動させる
際に、移動機構の不備のためその被測定物が上下方向や
左右・前後方向に微小変位したり、傾くことがある。従
って、これらの各再生面を単純に接続させるだけでは、
再生面どうしの接続部分に不連続面を発生する等のトラ
ブルを招くおそれが多く、そのため実際の形状に対応し
た正確な全体形状を得るのが難しい。そこで、この発明
は、上記した従来の欠点に鑑み、形状測定装置の測定開
口以上の広い面積の被測定物等についての全体形状が、
各再生面どうしの接続部分で不連続面を発生するのを有
効に防止することが可能な測定領域の分割測定方法を提
供することを目的とするものである。However, according to this method, when the object to be measured is successively moved in accordance with the divided areas, the object to be measured is moved in the vertical direction, the left-right direction, and the front-back direction due to the lack of the moving mechanism. It may be slightly displaced or tilted. Therefore, by simply connecting each of these playback surfaces,
There is often a possibility of causing troubles such as generation of a discontinuous surface at the connection portion between the reproduction surfaces, so that it is difficult to obtain an accurate overall shape corresponding to the actual shape. Therefore, in view of the above-mentioned conventional drawbacks, the present invention provides an overall shape of an object to be measured having a large area equal to or larger than the measurement opening of the shape measuring device,
It is an object of the present invention to provide a method for dividing and measuring a measurement area, which can effectively prevent generation of a discontinuous surface at a connecting portion between reproduction surfaces.
【０００５】[0005]
【課題を解決するための手段】即ち、この発明は、被測
定面を複数の被測定域に分割し、その分割された各分割
域毎に測定作業を行い、これらの測定作業によって得ら
れたデータを用いて前記被測定面全体の形状を合成して
求める被測定物の分割測定方法であって、前記分割域内
の被測定面を計測して得られる再生面の凹凸誤差の平均
値よりも、接続しようとする再生面間の傾斜により生じ
る誤差の方が小さくなるか若しくは等しくなるように接
続するものである。また、この発明は、各測定作業によ
って得られる分割域毎の測定領域が、互いに隣合うもの
との間で３％乃至３０％の範囲で重複するように接続す
るものである。That is, according to the present invention, the surface to be measured is divided into a plurality of areas to be measured, the measurement work is performed for each of the divided areas, and the measurement work is obtained. A method for dividing measurement of an object to be measured by synthesizing the entire shape of the surface to be measured using data, wherein the average value of the unevenness error of the reproduction surface obtained by measuring the surface to be measured in the divided area The connection is made so that the error caused by the inclination between the reproduction surfaces to be connected becomes smaller or equal. Further, in the present invention, the measurement areas for each of the divided areas obtained by each measurement operation are connected so as to overlap with each other in the range of 3% to 30%.
【０００６】[0006]
【作用】この発明の被測定物の分割測定方法は、各分割
域での測定により得られた再生面の凹凸誤差の平均値よ
りも、接続しようとする再生面間の傾斜により生じる誤
差の方が小さくなるように接続し、換言すれば再生面ど
うしを連続的に滑らかに接続し、これによって被測定面
全体について正確な再生面を形成する。According to the method for measuring the division of the object to be measured of the present invention, the error caused by the inclination between the reproduction surfaces to be connected is more than the average value of the unevenness error of the reproduction surface obtained by the measurement in each divided area. Are connected so as to be small, in other words, the reproduction surfaces are continuously and smoothly connected, thereby forming an accurate reproduction surface for the entire surface to be measured.
【０００７】[0007]
【実施例】以下、この発明の実施例について添付図面を
参照しながら説明する。図１はこの発明に係る被測定物
の分割測定方法を示すものであり、この分割測定方法で
は、互いに隣接した２面（以下これを再生面とよぶ）
１，２の接続の際に、再生面１，２の凹凸誤差Ｄの平均
値σd よりも接続しようとする再生面１，２間の傾斜に
より生じる誤差Ｈの方が小さくなるような状態で接続さ
れている。即ち、２面１，２は、次の接続式 Ｈ／σd ≦１・・・・・・・（イ） （但し、 Ｈ＝σa ・Ｎ・・・・・・（ロ） σa ：傾き誤差の平均 Ｎ ：分割域内の重複方向の長さ） またEmbodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 shows a method for dividing a measured object according to the present invention. In this divided measuring method, two surfaces adjacent to each other (hereinafter referred to as a reproduction surface) are shown.
When connecting the reproduction surfaces 1 and 2, the error H caused by the inclination between the reproduction surfaces 1 and 2 to be connected is smaller than the average value σ d of the unevenness error D of the reproduction surfaces 1 and 2. It is connected. That is, the two surfaces 1 and 2 have the following connection formula H / σ d ≦ 1 ... (A) (where H = σ a · N ··· (B) σ a : Average of inclination error N: length in overlapping direction in divided area)
【０００８】[0008]
【数１】 [Equation 1]
【０００９】を満足するように接続されている。Are connected so as to satisfy the above condition.
【００１０】次に図１，２を参照しながら、傾き誤差の
平均値σa と凹凸誤差の平均値σd との関係、つまり
（ハ）式を導出する。まず、図２において、再生面１に
対し再生面２が長さｎだけ重複しており、図１に示す座
標系Ｏ′−Ｘ′Ｙ′において再生面２は、 Ｙ′＝ａＸ′＋ｂ （但し、ａ：傾き，ｂ：切片） で示すものとする。次に、最小二乗法を用いてその再生
面２の傾きａを求めると、Next, referring to FIGS. 1 and 2, the relationship between the average value σ a of the inclination error and the average value σ d of the unevenness error, that is, the formula (C) is derived. First, in FIG. 2, the reproducing surface 2 overlaps the reproducing surface 1 by a length n, and in the coordinate system O′-X′Y ′ shown in FIG. 1, the reproducing surface 2 is Y ′ = aX ′ + b ( However, a: slope, b: intercept). Next, when the inclination a of the reproduction surface 2 is obtained using the least squares method,
【００１１】[0011]
【数２】 [Equation 2]
【００１２】となる。ここで、図１に示す新座標系Ｏ−
ＸＹに座標変換すると、Ｘ′−（ｎ／２）＝Ｘ，Ｙ′＝
Ｙの関係が成立するので、これを（ニ）式へ代入し、Ｐ
＝（ｎ−１）／２とおくと、ΣＸ′＝０なので[0012] Here, the new coordinate system O- shown in FIG.
When the coordinates are converted into XY, X '-(n / 2) = X, Y' =
Since the relation of Y is established, this is substituted into the equation (D), and P
= (N-1) / 2, ΣX '= 0, so
【００１３】[0013]
【数３】 (Equation 3)
【００１４】が得られる。Is obtained.
【００１５】次に分散の公式により、傾き誤差の平均σ
a は、Next, according to the formula of variance, the average σ of the slope errors is
a is
【００１６】[0016]
【数４】 [Equation 4]
【００１７】が得られる。なお、この実施例にあって
は、一次元的な方向、つまり、Ｚ方向に関する凹凸誤差
の平均値と再生面の傾斜により生じる誤差とについて説
明してきたが、Ｘ，Ｙ各方向については再生面の凹凸誤
差はなく、従ってこれについて考慮する必要がないので
これまで説明してきたような手続きは必要ない。Is obtained. In this embodiment, the one-dimensional direction, that is, the average value of the unevenness error in the Z direction and the error caused by the inclination of the reproducing surface have been described. Since there is no unevenness error in (1) and therefore it is not necessary to consider this, the procedure as explained so far is not necessary.
【００１８】次に、先に説明した接続式（イ）を満たす
場合の重複領域の割合について説明する。（イ）の接続
式は、（ロ），（ハ）から、Next, a description will be given of the ratio of overlapping areas when the connection equation (a) described above is satisfied. The connection formula of (a) is from (b) and (c),
【００１９】[0019]
【数５】 (Equation 5)
【００２０】となる。ここで、Ｎは再生面２の重複方向
の長さであるので正の数である。従って、接続式（イ）
は、 ｎ3 −ｎ−２４Ｎ2 ≧０ ・・・・・・・（イ）′ となる。この（イ）′式において、再生面２の所定方向
の長さＮが分割域の広さに応じて決定すれば、同方向の
重複領域の長さｎの範囲については、３次不等式
（イ）′から決定される。[0020] Here, N is a positive number because it is the length of the reproduction surface 2 in the overlapping direction. Therefore, connection type (a)
Becomes n 3 −n−24 N 2 ≧ 0 ···· (a) ′. In the equation (a) ′, if the length N of the reproduction surface 2 in the predetermined direction is determined according to the width of the divided area, the range of the length n of the overlapping area in the same direction is a cubic inequality (a). ) ′.
【００２１】 なお、この重複領域の割合について、本
発明者が各種実験を繰り返し、その実験結果について詳
細に検討した結果、次に示す如く、少なくとも ０．０３≦ｎ／Ｎ≦０．３ の範囲内に収める必要があることが判明した。即ち、前
記条件の下限値を下回ると、接続の推定が正しく行えず
に曲った状態で接続されてしまい、一方、上限値を越え
ると測定回数のみが無駄に増大してその割には接続誤差
が効果的に減少しないということが判明した。なお、こ
の発明においてレーザを使用する場合には、波長６３３
ｎｍのＨｅ−Ｎｅレーザや波長８８０ｎｍの半導体レー
ザ等が好ましい。Regarding the ratio of this overlapping region, the present inventor repeated various experiments and examined the experimental results in detail. As a result, as shown below, at least 0.03 ≦ n / N ≦ 0.3 It turned out that it had to fit inside. That is, if the value falls below the lower limit of the above condition, the connection cannot be correctly estimated and the connection is made in a bent state. Has not been effectively reduced. When a laser is used in this invention, the wavelength 633
He-Ne laser or a wavelength 880 nm semiconductor laser of nm are preferred.
【００２２】[0022]
【発明の効果】以上説明してきたように、この発明に係
る被測定物の分割測定方法によれば、各分割域での測定
により得られた再生面の凹凸誤差の平均値よりも、接続
しようとする再生面間の傾斜により生じる誤差の方が小
さくなるように接続し、換言すれば再生面どうしを連続
的に滑らかに接続することにより、被測定面全体につい
て正確な再生面が形成できるので、測定装置の測定開口
以上の大きな面積を有する被測定物の正確な形状測定が
可能となる効果がある。As described above, according to the method for measuring the division of the object to be measured according to the present invention, the connection should be made more than the average value of the unevenness error of the reproducing surface obtained by the measurement in each divided area. By connecting so that the error caused by the inclination between the reproduction surfaces becomes smaller, in other words, by connecting the reproduction surfaces continuously and smoothly, an accurate reproduction surface can be formed for the entire surface to be measured. In addition, it is possible to accurately measure the shape of an object to be measured having a large area equal to or larger than the measurement opening of the measuring device.
【図１】この発明に係る再生面どうしの傾き具合を示す
側面図である。FIG. 1 is a side view showing a degree of inclination between reproduction surfaces according to the present invention.
【図２】図１の再生面どうしの重複具合を示す平面図で
ある。FIG. 2 is a plan view showing how the reproduction surfaces of FIG. 1 overlap with each other.
１，２ 再生面 Ｄ 凹凸誤差 Ｈ 傾斜により生じる誤差 1, 2 Playback surface D Roughness error H Error caused by tilt
Claims (2)
の分割された各分割域毎に測定作業を行い、これらの測
定作業によって得られたデータを用いて前記被測定面全
体の形状を合成して求める被測定物の分割測定方法であ
って、 前記分割域内の被測定面を計測して得られる再生面の凹
凸誤差の平均値よりも、接続しようとする再生面間の傾
斜により生じる誤差の方が小さくなるか若しくは等しく
なるように接続することを特徴とした被測定物の分割測
定方法。1. A surface to be measured is divided into a plurality of areas to be measured, a measurement operation is performed for each of the divided areas, and the entire surface to be measured is measured using data obtained by these measurement operations. A method for dividing measurement of an object to be measured, which is obtained by synthesizing shapes, wherein an inclination between reproduction surfaces to be connected is greater than an average value of unevenness errors of the reproduction surface obtained by measuring the surface to be measured in the divided area. The divided measurement method for the object to be measured is characterized in that the connection is made so that the error caused by becomes smaller or equal.
測定領域が、互いに隣合うものとの間で３％乃至３０％
の範囲で重複するように接続することを特徴とした請求
項１に記載の被測定物の分割測定方法。2. The measurement area for each divided area obtained by each measurement work is 3% to 30% between adjacent measurement areas.
The method for dividing measurement of an object to be measured according to claim 1, wherein the connection is made so as to overlap in the range.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3105019A JP2531597B2 (en) | 1991-03-19 | 1991-03-19 | Divided measurement method for DUT |
| US07/852,595 US5343410A (en) | 1991-03-19 | 1992-03-17 | Method for divisional measurement of object surface, and method for joining object surface sub-areas measured by same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3105019A JP2531597B2 (en) | 1991-03-19 | 1991-03-19 | Divided measurement method for DUT |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0599637A JPH0599637A (en) | 1993-04-23 |
| JP2531597B2 true JP2531597B2 (en) | 1996-09-04 |
Family
ID=14396352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3105019A Expired - Lifetime JP2531597B2 (en) | 1991-03-19 | 1991-03-19 | Divided measurement method for DUT |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2531597B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3309743B2 (en) * | 1996-11-27 | 2002-07-29 | 富士ゼロックス株式会社 | Shape measuring method and device |
-
1991
- 1991-03-19 JP JP3105019A patent/JP2531597B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0599637A (en) | 1993-04-23 |
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