JP2530450Y2 - Ｘ・ｙテーブル - Google Patents
Ｘ・ｙテーブルInfo
- Publication number
- JP2530450Y2 JP2530450Y2 JP1989007290U JP729089U JP2530450Y2 JP 2530450 Y2 JP2530450 Y2 JP 2530450Y2 JP 1989007290 U JP1989007290 U JP 1989007290U JP 729089 U JP729089 U JP 729089U JP 2530450 Y2 JP2530450 Y2 JP 2530450Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- linear guide
- ceramics
- processing
- base member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 claims description 19
- 239000011195 cermet Substances 0.000 claims description 9
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 description 13
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 12
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 238000005259 measurement Methods 0.000 description 7
- 229910010293 ceramic material Inorganic materials 0.000 description 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 6
- 229910010271 silicon carbide Inorganic materials 0.000 description 6
- 230000002411 adverse Effects 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 229910001234 light alloy Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007290U JP2530450Y2 (ja) | 1989-01-24 | 1989-01-24 | Ｘ・ｙテーブル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007290U JP2530450Y2 (ja) | 1989-01-24 | 1989-01-24 | Ｘ・ｙテーブル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0299394U JPH0299394U (enrdf_load_stackoverflow) | 1990-08-08 |
| JP2530450Y2 true JP2530450Y2 (ja) | 1997-03-26 |
Family
ID=31212176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989007290U Expired - Lifetime JP2530450Y2 (ja) | 1989-01-24 | 1989-01-24 | Ｘ・ｙテーブル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2530450Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4544706B2 (ja) * | 2000-06-29 | 2010-09-15 | 京セラ株式会社 | 基板ホルダー |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0758677B2 (ja) * | 1983-08-10 | 1995-06-21 | 日本電信電話株式会社 | 半導体装置の製造に使用される電子ビーム描画装置に用いる試料ステージ |
-
1989
- 1989-01-24 JP JP1989007290U patent/JP2530450Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0299394U (enrdf_load_stackoverflow) | 1990-08-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |