JP2530450Y2 - Ｘ・ｙテーブル - Google Patents
Ｘ・ｙテーブルInfo
- Publication number
- JP2530450Y2 JP2530450Y2 JP1989007290U JP729089U JP2530450Y2 JP 2530450 Y2 JP2530450 Y2 JP 2530450Y2 JP 1989007290 U JP1989007290 U JP 1989007290U JP 729089 U JP729089 U JP 729089U JP 2530450 Y2 JP2530450 Y2 JP 2530450Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- linear guide
- ceramics
- processing
- base member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007290U JP2530450Y2 (ja) | 1989-01-24 | 1989-01-24 | Ｘ・ｙテーブル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007290U JP2530450Y2 (ja) | 1989-01-24 | 1989-01-24 | Ｘ・ｙテーブル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0299394U JPH0299394U (cs) | 1990-08-08 |
| JP2530450Y2 true JP2530450Y2 (ja) | 1997-03-26 |
Family
ID=31212176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989007290U Expired - Lifetime JP2530450Y2 (ja) | 1989-01-24 | 1989-01-24 | Ｘ・ｙテーブル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2530450Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4544706B2 (ja) * | 2000-06-29 | 2010-09-15 | 京セラ株式会社 | 基板ホルダー |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0758677B2 (ja) * | 1983-08-10 | 1995-06-21 | 日本電信電話株式会社 | 半導体装置の製造に使用される電子ビーム描画装置に用いる試料ステージ |
-
1989
- 1989-01-24 JP JP1989007290U patent/JP2530450Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0299394U (cs) | 1990-08-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |