JP2530450Y2 - Ｘ・ｙテーブル - Google Patents

Ｘ・ｙテーブル

Info

Publication number
JP2530450Y2
JP2530450Y2 JP1989007290U JP729089U JP2530450Y2 JP 2530450 Y2 JP2530450 Y2 JP 2530450Y2 JP 1989007290 U JP1989007290 U JP 1989007290U JP 729089 U JP729089 U JP 729089U JP 2530450 Y2 JP2530450 Y2 JP 2530450Y2
Authority
JP
Japan
Prior art keywords
electron beam
linear guide
ceramics
processing
base member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989007290U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0299394U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
次雄 籠原
和彦 三嶋
信博 渡辺
洋司 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP1989007290U priority Critical patent/JP2530450Y2/ja
Publication of JPH0299394U publication Critical patent/JPH0299394U/ja
Application granted granted Critical
Publication of JP2530450Y2 publication Critical patent/JP2530450Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
  • Electron Beam Exposure (AREA)
JP1989007290U 1989-01-24 1989-01-24 Ｘ・ｙテーブル Expired - Lifetime JP2530450Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989007290U JP2530450Y2 (ja) 1989-01-24 1989-01-24 Ｘ・ｙテーブル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989007290U JP2530450Y2 (ja) 1989-01-24 1989-01-24 Ｘ・ｙテーブル

Publications (2)

Publication Number Publication Date
JPH0299394U JPH0299394U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-08-08
JP2530450Y2 true JP2530450Y2 (ja) 1997-03-26

Family

ID=31212176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989007290U Expired - Lifetime JP2530450Y2 (ja) 1989-01-24 1989-01-24 Ｘ・ｙテーブル

Country Status (1)

Country Link
JP (1) JP2530450Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4544706B2 (ja) * 2000-06-29 2010-09-15 京セラ株式会社 基板ホルダー

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0758677B2 (ja) * 1983-08-10 1995-06-21 日本電信電話株式会社 半導体装置の製造に使用される電子ビーム描画装置に用いる試料ステージ

Also Published As

Publication number Publication date
JPH0299394U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-08-08

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term