JP2527804Y2 - Spinner device - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a spinner device for applying a liquid substance on the surface of an object.

[0002]

2. Description of the Related Art As a method for applying a liquid substance to a sample,
2. Description of the Related Art There is known a method in which a liquid material such as an ultraviolet-curable paint is dropped on the surface of a rotating sample such as a disk substrate or a glass substrate, and the liquid material is uniformly applied to the entire surface of the sample. As an apparatus for performing this method, there is a spinner apparatus as shown in FIG. In the figure, a spinner device includes a spinner head 2 on which a disk substrate 1 as an object to be coated is placed, a discharge nozzle 3 for dropping a liquid substance onto the disk substrate 1, and a spinner for rotating a motor (not shown). And a rotating shaft 4 that transmits the rotation to the head 2.

[0003] The disk substrate 1 is
When applying a liquid substance to the surface of the disk substrate, first, the disk substrate 1 is fixed by suction to the upper surface of the spinner head 2. Next, the spinner head 2 is rotated to drop a liquid substance onto the surface of the disk substrate 1, and thereafter the disk substrate 1 is rotated at a high speed. As a result, the liquid substance is
Is uniformly applied to the entire surface of the substrate.

[0004]

However, in this conventional apparatus, the discharge nozzle 3 is fixed and the disk substrate 1 is rotated to discharge the liquid substance. (1) A centrifugal force is applied to the discharged liquid material on the disk substrate surface, and the liquid material on the disk substrate surface has a centrifugal force between the liquid material at the start of discharge and the liquid material at the end of discharge, as shown in FIG. Since there is a difference in the relation, the width of the discharged liquid material is different. As described above, if the shape of the discharged liquid material is different, even if the liquid material is rotated at a high speed, it is not possible to uniformly apply the connection portions having different widths, which may cause unpainted portions. (2) A centrifugal force acts on the liquid material discharged onto the disk substrate surface, and the liquid material receives a force that spreads outward. Therefore, the liquid material that should spread inward spreads outward, so it does not spread inward. An unpainted area occurs on the surface. In particular, if the viscosity of the liquid material is low, the effect of centrifugal force is large,
Since the liquid material flows outside the circumference, unpainted portions occur inside. (3) In order to prevent the occurrence of unpainted portions described in (2),
When ejected inside the disk substrate surface, that is, near the groove,
The liquid material easily falls into the groove, which increases the occurrence of defective products.

[0005]

According to the present invention, in order to eliminate the above-mentioned drawbacks, a liquid substance is dropped on the surface of an object to be coated.
In a spinner device for forming a uniform coating film on the surface of the object to be coated, while rotating the discharge nozzle about the center of the object to be coated, the spinner device is provided with an object which is substantially free from the centrifugal force from the discharge nozzle. An object of the present invention is to provide a spinner device characterized by dropping a liquid substance on a surface.

[0006]

FIG. 1 is a diagram for explaining an embodiment of the present invention. In the figure, 5 is a drive motor for rotating the discharge nozzle, 6 is a rotary drive disk rotated by the drive motor for discharge nozzle rotation 5, 7 is a driven disk that rotates according to the rotation of the rotary drive disk 6, and 8 is a rotary drive. Disk 6 and driven disk 7
Is a rotation transmitting arm that transmits the rotation of the discharge nozzle 3 to the discharge nozzle 3 and rotates the discharge nozzle 3.

By such a mechanism, the discharge nozzle 3 is rotated from the discharge nozzle 3 to an arbitrary diameter with respect to the center of the disk substrate 1 without rotating the disk substrate 1. Discharge the liquid material to the surface. In this way, by eliminating the effect of the centrifugal force applied to the liquid material discharged onto the disk substrate surface, the width of the joining surface at the start and end of the discharge of the liquid material on the object surface becomes the same.

[0008] Liquid substances are subject to the action of gravity and surface tension.
The shape of the boundary line between the liquid substance and the disk substrate surface spreads inside the ring while approaching a circle, and stops at the point where it reaches the groove inside the disk substrate surface due to the action of surface tension. Therefore, by shaking off at a high speed in the next stage, the liquid material spreads from the end of the groove to the outside, and a complete coating film without any unpainted portion can be formed.

When the disk substrate 1 is rotated, there is substantially no influence of the centrifugal force, and a complete coating film without any unpainted portion can be formed on the disk substrate surface.
The disk substrate 1 may be rotated according to the degree. By rotating the disk substrate 1 together with the discharge nozzle 3, the processing capacity can be improved.

FIG. 2 is a view for explaining another embodiment of the present invention. In the figure, two discharge nozzles 3
Are connected by a connecting arm 9. By using such a spinner device, the liquid substance can be discharged from the discharge nozzle 3 to the surface of the disk substrate 1 only by rotating the discharge nozzle 3 by half. Therefore, the processing capacity can be further improved.

Although the case where the number of the discharge nozzles 3 is two has been described here, a spinner device in which a plurality of discharge nozzles 3 are arranged at equal intervals can be generally used. The liquid material can be discharged from the discharge nozzle 3 to the surface of the disk substrate 1 simply by rotating the nozzle 3 (1 / the number of discharge nozzles).

[0012]

As described above, the present invention is directed to a spinner apparatus which forms a uniform coating film on the surface of a coated object by dropping a liquid substance on the surface of the coated object. A spinner device wherein a liquid substance is dripped from the discharge nozzle onto the surface of the object to be coated, which is substantially free from the influence of centrifugal force, while rotating the discharge nozzle around the spinner. Since the present invention has such characteristics, the effect of the centrifugal force on the liquid material discharged onto the surface of the object is substantially eliminated, and the width of the joining surface at the beginning and end of the discharge of the liquid material on the surface of the object is reduced. Become the same. Due to the action of gravity and surface tension, the boundary line between the liquid material and the surface of the object spreads closer to a circle due to the action of gravity and surface tension, and when it reaches the groove inside the surface of the object, the surface tension is reduced. Stops by action. Therefore, by shaking off at high speed in the next stage, the liquid material spreads from the end of the groove to the outside, and a complete coating film without any unpainted portion can be formed on the surface of the object to be coated.

[Brief description of the drawings]

FIG. 1 is a diagram for explaining an embodiment of the present invention.

FIG. 2 is a view for explaining another embodiment of the present invention.

FIG. 3 is a diagram for explaining a conventional example.

FIG. 4 is a diagram for explaining a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Coated body (disk board) 2 Spinner head 3 Discharge nozzle 4 Rotating shaft 5 Discharge nozzle rotation drive motor 6 Rotation drive disk 7 Driven disk 8 Rotation transmission arm 9 Connecting arm

Claims (3)

(57) [Scope of request for utility model registration] 1. A liquid substance is dropped on a surface of an object to be coated,
In a spinner device for forming a uniform coating film on the surface of an object to be coated, while the discharge nozzle is rotated around the center of the object to be coated , there is substantially no effect of centrifugal force from the discharge nozzle. A spinner device wherein a liquid substance is dropped on a surface of an object to be coated. 2. The spinner device according to claim 1, wherein said object to be coated is substantially fixed. 3. The spin according to claim 1 , wherein a plurality of the discharge nozzles are arranged at equal intervals, and the discharge nozzles are rotated (1 / the number of discharge nozzles).
Device .