JP2526862Y2 - Light diffraction, scattering type particle size distribution analyzer - Google Patents

Light diffraction, scattering type particle size distribution analyzer

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Publication number
JP2526862Y2
JP2526862Y2 JP1990028551U JP2855190U JP2526862Y2 JP 2526862 Y2 JP2526862 Y2 JP 2526862Y2 JP 1990028551 U JP1990028551 U JP 1990028551U JP 2855190 U JP2855190 U JP 2855190U JP 2526862 Y2 JP2526862 Y2 JP 2526862Y2
Authority
JP
Japan
Prior art keywords
light
particles
sample cell
particle size
particle diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990028551U
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Japanese (ja)
Other versions
JPH03119749U (en
Inventor
喜昭 東川
達夫 伊串
耕一郎 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
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Filing date
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Priority to JP1990028551U priority Critical patent/JP2526862Y2/en
Publication of JPH03119749U publication Critical patent/JPH03119749U/ja
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Publication of JP2526862Y2 publication Critical patent/JP2526862Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Investigating Or Analysing Materials By Optical Means (AREA)

Description

【考案の詳細な説明】 〔産業上の利用分野〕 本考案は、光回折、散乱式粒度分布測定装置に関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a light diffraction and scattering type particle size distribution measuring device.

〔従来の技術〕[Conventional technology]

第4図は従来までの一般的な光回折、散乱式粒度分布
測定装置の要部を示し、同図において、1は図外のレー
ザ装置から発せられるレーザ光、2′は図外の循環ポン
プによって超音波分散バス(図外)からの試料液が連続
的に供給される断面形状が方形に形成された外形及び内
部空間2a′を有する角筒形の試料セル、3は試料セル
2′を透過した光及び試料セル内の試料液中の微粒子に
より散乱(回折)した光を集光するレンズ、4は集光レ
ンズ3からの光を検出する例えばシリコンフォトダイオ
ードからなる検出器である。
FIG. 4 shows the main parts of a conventional light diffraction and scattering type particle size distribution measuring apparatus, in which 1 is a laser beam emitted from a laser device (not shown) and 2 'is a circulating pump (not shown). The sample liquid is continuously supplied from an ultrasonic dispersing bath (not shown), and a rectangular cylindrical sample cell having an outer space and an internal space 2a 'having a rectangular cross section and a sample cell 2' A lens 4 for condensing the transmitted light and light scattered (diffracted) by the fine particles in the sample liquid in the sample cell is a detector 4 for detecting light from the condensing lens 3, for example, a silicon photodiode.

而して、上記粒度分布測定装置においては、試料セル
2′の内部空間2a′に試料液を連続的に供給している状
態で、レーザ光1を試料セル2′に対して照射すると、
レーザ光1の一部が試料セル2′内の試料液中の微小粒
子を照射して散乱(回折)光5となり、集光レンズ3を
経て検出器4に至る。
Thus, in the above particle size distribution measuring device, when the sample cell 2 'is irradiated with the laser beam 1 while the sample liquid is continuously supplied to the internal space 2a' of the sample cell 2 ',
A part of the laser light 1 irradiates the microparticles in the sample liquid in the sample cell 2 ′ to become scattered (diffraction) light 5, which reaches the detector 4 via the condenser lens 3.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

しかしながら、上記構成による粒度分布測定装置にお
いては、第5図(A),(B)に示すように、微小粒子
6によって散乱された散乱光5と試料セル外面2b′との
なす角度φ1が大きい場合、即ち微小粒子6からの散乱
角θ1が小さい場合(例えば分散液が水の場合、θ1<約
50°)は、散乱光5は試料セル2′を透過し、検出器4
に至るが、散乱光5′と試料セル外面2b′とのなす角度
φ2が小さい場合、即ち微小粒子6からの散乱角θ2が大
きい場合(同様に分散液が水の場合、θ1≧約50°)は
散乱光5′は試料セル外面2b′で全反射して、試料セル
外面2b′を透過しなくなり、散乱光5′を検出器4で受
光できなくなる。一般に、粒子径が小さくなる程散乱角
θが大きくなるため、従来の光回折、散乱式粒度分布測
定装置では粒子径の小さい粒子の粒度を測定することが
困難であり、広範囲にわたる粒度分布測定が不可能であ
った。
However, in the particle size distribution measuring apparatus having the above configuration, as shown in FIGS. 5A and 5B, the angle φ 1 formed between the scattered light 5 scattered by the fine particles 6 and the outer surface 2b ′ of the sample cell. When it is large, that is, when the scattering angle θ 1 from the microparticles 6 is small (for example, when the dispersion is water, θ 1 <about
(50 °), the scattered light 5 passes through the sample cell 2 ′
When the angle φ 2 between the scattered light 5 ′ and the outer surface 2 b ′ of the sample cell is small, that is, when the scattering angle θ 2 from the microparticles 6 is large (similarly, when the dispersion liquid is water, θ 1 ≧ (About 50 °), the scattered light 5 ′ is totally reflected by the outer surface 2 b ′ of the sample cell, does not pass through the outer surface 2 b ′ of the sample cell, and the detector 4 cannot receive the scattered light 5 ′. In general, as the particle diameter decreases, the scattering angle θ increases, so it is difficult to measure the particle size of particles having a small particle size using a conventional light diffraction and scattering type particle size distribution analyzer. It was impossible.

本考案は、上述の事柄に留意してなされたもので、そ
の目的とするところは、比較的簡単な改良によって粒子
径の小さい粒子の粒度も高精度に測定し、広範囲にわた
る粒度分布の測定を可能とする光回折、散乱式粒度分布
測定装置を提供することにある。
The present invention has been made in consideration of the above-mentioned matters, and the purpose is to measure the particle size of particles having a small particle size with high accuracy by relatively simple improvement, and to measure the particle size distribution over a wide range. It is an object of the present invention to provide a light diffraction and scattering type particle size distribution measuring apparatus which enables the measurement.

〔課題を解決するための手段〕[Means for solving the problem]

上述の目的を達成するため、本願の請求項(1)に記
載された考案に係る光回折、散乱式粒度分布測定装置
は、断面形状が方形に形成された外形及び内部空間を有
する試料セルの前記内部空間を流れる微小粒子を含んだ
液体に対してコヒーレント光を照射し、この微小粒子に
よって回折、散乱された回折、散乱光の強度パターンを
光検出器でモニターすることによって粒子分布を測定す
る光回折、散乱式粒度分布測定装置において、前記試料
セルの光出射側の外面の一部に、粒子径の小さな粒子に
よる散乱光を反射させるミラー面を形成し、前記光検出
器を、粒子径の大きな粒子による散乱光の強度パターン
をモニターする第1の光検出器と、前記ミラー面によっ
て反射し前記光出射側の外面以外の面から取り出された
粒子径の小さな粒子による散乱光を検出して粒子径の小
さな粒子による散乱光の強度パターンをモニターする第
2の光検出器で構成した点に特徴がある。
In order to achieve the above object, a light diffraction / scattering type particle size distribution measuring apparatus according to the invention described in claim (1) of the present application provides a sample cell having an outer space and an inner space having a rectangular cross section. A liquid containing fine particles flowing in the internal space is irradiated with coherent light, and the particle distribution is measured by monitoring the intensity pattern of the diffraction and the scattered light diffracted and scattered by the fine particles with a photodetector. In a light diffraction and scattering type particle size distribution measuring device, a mirror surface for reflecting scattered light due to particles having a small particle diameter is formed on a part of the outer surface on the light emission side of the sample cell, and the light detector has a particle diameter. A first photodetector that monitors the intensity pattern of the scattered light by the large particles, and a small particle having a small particle diameter reflected by the mirror surface and taken out from a surface other than the outer surface on the light emission side. By detecting the scattered light has a second feature in that constituted by an optical detector for monitoring the intensity pattern of the light scattered by small particles with a particle size that.

また、本願の請求項(2)に記載された考案では、試
料セルの光出射側の外面の一部を面取りし、そこにミラ
ー面を形成した点に特徴がある。
Further, the invention described in claim (2) of the present application is characterized in that a part of the outer surface on the light emission side of the sample cell is chamfered and a mirror surface is formed there.

〔作用〕[Action]

上記特徴構成によれば、試料セルの光出射側の外面の
一部に、粒子径の小さな粒子による散乱光を反射させる
ミラー面を形成することにより粒子径の小さな粒子によ
る散乱光を任意の角度で反射させるので、従来では散乱
光と試料セル外面とのなす角度が小さいため試料セルを
透過できなかった散乱光を試料セルの光出射側の外面以
外の面から取り出すことが可能となり、粒子径の小さい
粒子から粒子径の大きな粒子の粒度分布を広範囲にわた
って測定することが可能になる。
According to the above-described characteristic configuration, a mirror surface that reflects scattered light due to particles having a small particle diameter is formed on a part of the outer surface on the light emission side of the sample cell, so that scattered light due to particles having a small particle diameter can be formed at an arbitrary angle. Scattered light that could not be transmitted through the sample cell because the angle between the scattered light and the outer surface of the sample cell was small in the past can be extracted from the surface other than the outer surface on the light exit side of the sample cell, and the particle diameter can be reduced. It is possible to measure the particle size distribution of particles having a small particle size to particles having a large particle size over a wide range.

また、前記光出射側の外面以外の面から粒子径の小さ
な粒子による散乱光を取り出せることができ、かつ、光
検出器を、粒子径の大きな粒子による散乱光の強度パタ
ーンをモニターする第1の光検出器と、前記ミラー面に
よって反射し前記光出射側の外面以外の面から取り出さ
れた粒子径の小さな粒子による散乱光を検出して粒子径
の小さな粒子による散乱光の強度パターンをモニターす
る第2の光検出器で構成するので、第2の光検出器を前
記光出射側の外面以外の面に対向して設置するにあたり
自由度を持たせることができ、装置のコンパクト化の面
で有利である。
Further, it is possible to take out scattered light due to particles having a small particle diameter from a surface other than the outer surface on the light emission side, and to use a photodetector to monitor the intensity pattern of the scattered light due to the particles having a large particle diameter. A photodetector detects light scattered by particles having a small particle diameter reflected by the mirror surface and taken out from a surface other than the outer surface on the light emission side, and monitors an intensity pattern of the light scattered by the particles having a small particle diameter. Since the second photodetector is configured, the second photodetector can be provided with a degree of freedom in installing the second photodetector in opposition to a surface other than the outer surface on the light emission side. It is advantageous.

〔実施例〕〔Example〕

以下、本考案の実施例を図面に基づいて説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

第1図(A),(B)及び第2図は本考案の一実施例
を示し、まず第1図(A)において、7はレーザ光1を
発生するレーザ装置、8はレーザ光を適宜拡大するビー
ム拡大器、2は管路9を介して図外の超音波分散バスと
接続され、循環ポンプ(図外)によって試料液が連続的
に供給される試料セル、4,4′は試料セル2を透過した
光を検出する例えばシリコンフォトダイオードからなる
検出器である。
1 (A), 1 (B) and 2 show an embodiment of the present invention. In FIG. 1 (A), reference numeral 7 denotes a laser device for generating a laser beam 1, and 8 denotes a laser beam as appropriate. The expanding beam expander 2 is connected to an ultrasonic dispersion bus (not shown) via a pipe 9 and a sample cell to which a sample liquid is continuously supplied by a circulating pump (not shown). The detector is a detector that detects light transmitted through the cell 2 and includes, for example, a silicon photodiode.

そして、試料セル2の光出射側の外面2bの一部を面取
りし、そこに粒子径の小さな粒子による散乱光5′を反
射させるミラー面10を形成し、かつ、光検出器を、粒子
径の大きな粒子による散乱光5の強度パターンをモニタ
ーする第1の光検出器4と、ミラー面10によって前記光
出射側の外面2bの一部で反射し前記光出射側の外面2b以
外の面から取り出された粒子径の小さな粒子による散乱
光5′を検出して粒子径の小さな粒子による散乱光5′
の強度パターンをモニターする第2の光検出器4′で構
成してある。
Then, a part of the outer surface 2b on the light emission side of the sample cell 2 is chamfered, and a mirror surface 10 for reflecting the scattered light 5 'due to the particles having a small particle diameter is formed thereon. A first photodetector 4 for monitoring the intensity pattern of the scattered light 5 due to the large particles, and a mirror surface 10 which reflects off a part of the outer surface 2b on the light emitting side and reflects light from a surface other than the outer surface 2b on the light emitting side. The scattered light 5 'due to the extracted small particles is detected, and the scattered light 5' due to the small particles is detected.
And a second photodetector 4 'for monitoring the intensity pattern.

つまり、この実施例と従来例との大きく異なる点は、
試料セルの相違にあり、第1図(B)及び第2図に示す
ように、試料セル2の光出射側の外面(以下、試料セル
外面と云う)2bの一部を面取りし、そこにミラー面10を
形成した点である。
In other words, the major difference between this embodiment and the conventional example is that
As shown in FIG. 1 (B) and FIG. 2, there is a difference between the sample cells, and as shown in FIG. 1 (B) and FIG. The point is that the mirror surface 10 is formed.

ここで、試料セル2の構造及びその作用を第2図をも
参照しながら説明すると、試料セル2は光透過性に優れ
たガラス等の材質(例えば石英、BK−7ガラス等)で形
成されており、光透過部分の外形及び内部空間2aは、断
面形状が方形に形成されている。そしてミラー面10は、
試料セル外面2bの一部を面取りし、そこにアルミニウム
や銀などの材質を直接蒸着して形成するのが望ましい。
Here, the structure and operation of the sample cell 2 will be described with reference to FIG. 2 as well. The sample cell 2 is formed of a material such as glass having excellent light transmittance (for example, quartz, BK-7 glass, etc.). The outer shape of the light transmitting portion and the internal space 2a are formed in a square cross section. And the mirror surface 10
It is preferable that a part of the outer surface 2b of the sample cell is chamfered, and a material such as aluminum or silver is directly vapor-deposited thereon.

而して、上述したように試料セル外面2bの一部にミラ
ー面10を形成し、散乱角の大きい粒子径の小さな粒子に
よる散乱光5′をこのミラー面10により反射させ、例え
ば第2図に示すように、試料セル側面2cから散乱光5′
を試料セル2外に取り出すようにしてそれを第2の検出
器4′で検出し、またミラー面10が設置されていない試
料セル外面2bから透過してくる散乱角が小さい粒子径の
大きな粒子による散乱光5は、別途第1の検出器4を設
けて検出する。
As described above, the mirror surface 10 is formed on a part of the outer surface 2b of the sample cell, and the scattered light 5 'due to the particles having a large scattering angle and the small particle diameter is reflected by the mirror surface 10, for example, as shown in FIG. As shown in FIG.
Is taken out of the sample cell 2 and detected by the second detector 4 '. Particles having a small scattering angle and a large particle diameter transmitted from the sample cell outer surface 2b where the mirror surface 10 is not provided are provided. The scattered light 5 is detected by providing the first detector 4 separately.

また、試料セル外面2bの一部に形成する面取り角を第
3図(A)に示すように設定し、第2の検出器4′を試
料セル2の光入射側の外面2dに対向して設けるようにし
てもよく、このように試料セル外面2bの一部を任意の角
度で面取りした後にミラー面10を形成することにより、
試料セル外面2b以外の面から粒子径の小さな粒子による
散乱光5′を取り出すことが可能となる。
Further, the chamfer angle formed on a part of the sample cell outer surface 2b is set as shown in FIG. 3 (A), and the second detector 4 'is opposed to the light incident side outer surface 2d of the sample cell 2. By forming a mirror surface 10 after chamfering a part of the sample cell outer surface 2b at an arbitrary angle in this manner,
Scattered light 5 'due to particles having a small particle diameter can be extracted from a surface other than the sample cell outer surface 2b.

なお、前記実施例では、試料セル外面2bの一部を面取
りし、そこにミラー面10を形成したが、第3図(B)に
示すように、面取りすることなくミラー面11を形成し、
試料セル側面2cに対向して設けた第2の検出器4′によ
り粒子径の小さな粒子による散乱光5′を検出してもよ
い。
In the above embodiment, a part of the outer surface 2b of the sample cell was chamfered and the mirror surface 10 was formed thereon. However, as shown in FIG. 3 (B), the mirror surface 11 was formed without chamfering.
The scattered light 5 'due to particles having a small particle diameter may be detected by the second detector 4' provided opposite to the sample cell side surface 2c.

なお、前記各実施例で説明したミラー面10,11の大き
さ及び面取りの角度設定は、試料セルの材質、サイズあ
るいは分散液の屈折率等により異なり、また、検出器
4′の設置する場所により適宜任意に選択すればよい。
The size of the mirror surfaces 10 and 11 and the setting of the angle of the chamfer described in each of the above embodiments differ depending on the material and size of the sample cell, the refractive index of the dispersion liquid, and the like. May be selected as appropriate.

また、面取り部は上記実施例のような平面に限らず曲
面であってもよい。
Further, the chamfered portion is not limited to a flat surface as in the above embodiment, but may be a curved surface.

〔考案の効果〕[Effect of the invention]

以上説明したように、本願の請求項(1)に記載され
た考案によれば、試料セルの方形に形成された外形にお
ける光出射側の外面の一部にミラー面を形成するといっ
た簡単な工夫により、従来は前記光出射側の外面で全反
射していた粒子径の小さな粒子による散乱光を前記光出
射側の外面以外の面から試料セル外に取り出せることが
でき、しかも前記試料セル外の透過位置に、粒子径の大
きな粒子による散乱光の強度パターンをモニターする第
1の光検出器を設置するとともに、前記試料セル外の前
記ミラー面による反射位置に、粒子径の小さな粒子によ
る散乱光の強度パターンをモニターする第2の光検出器
を設置するので、粒子径の大きな粒子による散乱光のみ
ならず粒子径の小さな粒子による散乱光の測定も可能と
なり、粒子径の小さな粒子から粒子径の大きな粒子の粒
度分布を広範囲にわたって測定することができる。
As described above, according to the invention described in claim (1) of the present application, a simple device such as forming a mirror surface on a part of the outer surface on the light emitting side in the rectangular outer shape of the sample cell is provided. Thereby, scattered light due to particles having a small particle diameter, which was conventionally totally reflected on the outer surface on the light emission side, can be taken out of the sample cell from a surface other than the outer surface on the light emission side, and moreover, outside the sample cell. At the transmission position, a first photodetector that monitors the intensity pattern of the scattered light due to the particles having a large particle diameter is provided, and at the reflection position by the mirror surface outside the sample cell, the scattered light due to the particles having a small particle diameter is provided. Since the second photodetector that monitors the intensity pattern of the particles is installed, it is possible to measure not only the scattered light due to the particles having a large particle diameter but also the scattered light due to the particles having a small particle diameter. It can be measured particle size distribution of large particles having a particle size over a wide range from the particles.

一般的に、前記光出射側の外面において、粒子径の小
さな粒子による散乱光が透過する透過領域と全反射する
全反射領域の境界は、前記光出射側の外面の形状や、試
料の密度等により変動するけれども、本願の請求項
(1)に記載された考案では、前記境界の変動にかかわ
らず、粒子径の小さな粒子による散乱光を前記光出射側
の外面以外の面から試料セル外に取り出せるようにミラ
ー面を前記光出射側の外面の一部に形成したものであ
る。
In general, on the outer surface on the light emission side, the boundary between the transmission region through which scattered light due to particles having a small particle diameter passes and the total reflection region where total reflection is performed is determined by the shape of the outer surface on the light emission side, the density of a sample, and the like. However, according to the invention described in claim (1) of the present application, irrespective of the fluctuation of the boundary, the scattered light due to the particles having a small particle diameter moves out of the sample cell from a surface other than the outer surface on the light emission side. A mirror surface is formed on a part of the outer surface on the light emission side so as to be taken out.

そのため、本願の請求項(1)に記載された考案で
は、粒度分布の測定範囲を広げることができる上に、前
記光出射側の外面以外の面から粒子径の小さな粒子によ
る散乱光を取り出せるので、第2の光検出器を前記試料
セル外の反射位置に設置するにあたり自由度を持たせる
ことができ、装置のコンパクト化の面で有利である。つ
まり、装置のコンパクト化を図る際に第2の光検出器の
設置位置を自由に変えることができる。例えば、第3図
(B)に示されるように、試料セル外の反射位置を試料
セル側面側に設置することができる。
Therefore, according to the invention described in claim (1) of the present application, the measurement range of the particle size distribution can be expanded, and scattered light due to particles having a small particle diameter can be extracted from a surface other than the outer surface on the light emission side. In addition, the second photodetector can be provided with a degree of freedom when it is installed at a reflection position outside the sample cell, which is advantageous in terms of making the apparatus compact. That is, the installation position of the second photodetector can be freely changed when the apparatus is downsized. For example, as shown in FIG. 3B, the reflection position outside the sample cell can be set on the side of the sample cell.

また、本願の請求項(2)に記載された考案でも、第
2の光検出器の設置位置を自由に変えることができる。
試料セルの光出射側の外面の一部に形成する面取り角
を、例えば、第3図(A)に示すように設定し、第2の
光検出器を試料セルの光入射側の外面に対向して設ける
ことができたり、面取り角を、例えば、第2図に示すよ
うに設定して試料セル側面から粒子径の小さな粒子によ
る散乱光を試料セル外に取り出せる。
Also, in the invention described in claim (2) of the present application, the installation position of the second photodetector can be freely changed.
The chamfer angle formed on a part of the light emitting side outer surface of the sample cell is set, for example, as shown in FIG. 3 (A), and the second photodetector is opposed to the light incident side outer surface of the sample cell. By setting the chamfer angle as shown in FIG. 2, for example, scattered light due to particles having a small particle diameter can be taken out of the sample cell from the side surface of the sample cell.

【図面の簡単な説明】[Brief description of the drawings]

第1図(A),(B)及び第2図は本考案の一実施例を
示し、第1図(A)は光回折、散乱式粒度分布測定装置
の要部を示す構成図、第1図(B)は試料セルを示す全
体斜視図、第2図はその作用を説明するための図であ
る。 第3図(A),(B)は本考案の別実施例を示し、それ
ぞれ試料セルの作用を説明するための図である。 第4図及び第5図はそれぞれ従来技術を説明するための
図である。 2……試料セル、2b……試料セルの光出射側の外面、4
……粒子径の大きな粒子による散乱光の強度パターンを
モニターする第1の検出器、4′……粒子径の小さな粒
子による散乱光の強度パターンをモニターする第2の検
出器、5……粒子径の大きな粒子による散乱光、5′…
…粒子径の小さな粒子による散乱光、6……微小粒子、
10,11……ミラー面。
1 (A), 1 (B) and 2 show an embodiment of the present invention, and FIG. 1 (A) is a block diagram showing a main part of a light diffraction / scattering type particle size distribution measuring apparatus. FIG. 2 (B) is an overall perspective view showing the sample cell, and FIG. 2 is a view for explaining its operation. 3 (A) and 3 (B) show another embodiment of the present invention, and are diagrams for explaining the operation of the sample cell. FIG. 4 and FIG. 5 are diagrams for explaining the prior art. 2 ... sample cell, 2b ... outer surface of sample cell on light emission side, 4
... A first detector for monitoring the intensity pattern of the scattered light due to the particles having a large particle diameter; 4 ′ a second detector for monitoring the intensity pattern of the scattered light due to the particles having a small particle diameter; Light scattered by large diameter particles, 5 '...
… Light scattered by particles with a small particle diameter, 6 …… fine particles,
10,11 ... Mirror surface.

Claims (2)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】断面形状が方形に形成された外形及び内部
空間を有する試料セルの前記内部空間を流れる微小粒子
を含んだ液体に対してコヒーレント光を照射し、この微
小粒子によって回折、散乱された回折、散乱光の強度パ
ターンを光検出器でモニターすることによって粒子分布
を測定する光回折、散乱式粒度分布測定装置において、
前記試料セルの光出射側の外面の一部に、粒子径の小さ
な粒子による散乱光を反射させるミラー面を形成し、前
記光検出器を、粒子径の大きな粒子による散乱光の強度
パターンをモニターする第1の光検出器と、前記ミラー
面によって反射し前記光出射側の外面以外の面から取り
出された粒子径の小さな粒子による散乱光を検出して粒
子径の小さな粒子による散乱光の強度パターンをモニタ
ーする第2の光検出器で構成したことを特徴とする光回
折、散乱式粒度分布測定装置。
1. A liquid containing fine particles flowing through an internal space of a sample cell having an outer space and an internal space having a rectangular cross section is irradiated with coherent light, and diffracted and scattered by the fine particles. Diffraction, light diffraction to measure the particle distribution by monitoring the intensity pattern of the scattered light with a photodetector, in the scattering particle size distribution measurement device,
A mirror surface for reflecting scattered light due to particles having a small particle diameter is formed on a part of the outer surface on the light emission side of the sample cell, and the photodetector monitors an intensity pattern of scattered light due to the particles having a large particle diameter. A first photodetector that detects scattered light due to particles having a small particle diameter reflected by the mirror surface and extracted from a surface other than the outer surface on the light emission side, and detects the scattered light due to the particles having a small particle diameter. A light diffraction and scattering type particle size distribution measuring device comprising a second photodetector for monitoring a pattern.
【請求項2】試料セルの光出射側の外面の一部を面取り
し、そこにミラー面を形成した請求項(1)に記載の光
回折、散乱式粒度分布測定装置。
2. A light diffraction and scattering type particle size distribution measuring apparatus according to claim 1, wherein a part of the outer surface on the light emitting side of the sample cell is chamfered and a mirror surface is formed there.
JP1990028551U 1990-03-19 1990-03-19 Light diffraction, scattering type particle size distribution analyzer Expired - Fee Related JP2526862Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990028551U JP2526862Y2 (en) 1990-03-19 1990-03-19 Light diffraction, scattering type particle size distribution analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990028551U JP2526862Y2 (en) 1990-03-19 1990-03-19 Light diffraction, scattering type particle size distribution analyzer

Publications (2)

Publication Number Publication Date
JPH03119749U JPH03119749U (en) 1991-12-10
JP2526862Y2 true JP2526862Y2 (en) 1997-02-26

Family

ID=31531346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990028551U Expired - Fee Related JP2526862Y2 (en) 1990-03-19 1990-03-19 Light diffraction, scattering type particle size distribution analyzer

Country Status (1)

Country Link
JP (1) JP2526862Y2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5682543U (en) * 1979-11-15 1981-07-03
JPS6293747U (en) * 1985-12-02 1987-06-15

Also Published As

Publication number Publication date
JPH03119749U (en) 1991-12-10

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