JP2516113B2 - Dimension / shape measuring device for machine tools - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a machine tool size / shape measuring apparatus mounted on a machine tool for use. More specifically, the present invention relates to a machine tool size / shape measuring device which is mounted on a machine tool and used to measure a large displacement such as a dimension of a workpiece before, during, and after machining, and a screw thread of inner and outer diameters.

[0002]

2. Description of the Related Art Various types of measuring instruments for measuring a workpiece, a tool, etc. being machined by a machine tool are known. The types of measurement measured by this measuring device include work measurement, tool measurement, and machining reference measurement. When measuring workpieces, the contact point of a touch sensor is usually brought into direct contact to check the machining dimensions and measure the amount of wear. The tool measurement is to measure the position of the cutting edge of the tool, perform wear compensation, detect tool breakage, and the like. The processing standard measurement is to measure the size of the material before processing because the processing materials have variations.

A displacement sensor is used for each of these measurements. As the displacement sensor, an air micrometer using a fluid, a mechanical electric micrometer, a magnetic sensor using magnetism, an eddy current sensor, etc. are known and used. However, although these displacement sensors are good at measuring small displacements, they are not suitable for measuring long displacements. Therefore, a scale of an optical grating or a magnetic grating is used, and a long measuring range is possible.

[0004]

The displacement sensor described above is good as a scale, but a large displacement cannot be accurately measured unless the mechanism for supporting it is appropriate. The present invention has been invented in the background described above and achieves the following objects.

An object of the present invention is to provide a machine tool size / shape measuring device for measuring large displacements of the size, shape, etc. of a workpiece, a tool or the like.

Another object of the present invention is to provide a machine tool size / shape measuring device having a support mechanism most suitable for a displacement sensor for measuring a large displacement such as a size or shape of a workpiece or a tool. .

[0007]

[Means for Solving the Problems] To solve the above problems, the following means are adopted.

A. A probe (218) for contacting the object to be measured, b. The arm (21) to which the probe (218) is attached
7,216), and c. A gripping member (21) provided in parallel with each other for fixing the arms (217, 216) at at least two positions.
3), and d. At least two parallel leaf springs (212) having both ends connected to the gripping member (213) and parallel to each other; e. A fixing member (214) having a through hole through which the arms (217, 216) are penetrated with a gap and supporting the parallel leaf spring (212) in contact with and supporting the parallel leaf spring (212) at an intermediate position of the parallel leaf spring (212). And f. A linear scale (215, 219) for measuring the displacement of the gripping member (213); and g. It is a size and shape measuring device for machine tools.

The linear scale (215, 219)
However, an optical linear encoder is preferable. Further, it is more preferable that the parallel spring (212) is composed of four sheets.

[0010]

[Operation] A disk probe 218 is attached to an arm, and this arm is connected to the central rod 216. The center rod 216 is supported by a parallel spring mechanism composed of four parallel springs 212. An optical main scale 215 is fixed to the rear end of the parallel spring mechanism. The detection head 219 is arranged on the fixed side of the tool turret body 89 or the like so as to face the main scale 215.

When the tool turret body 89 is moved along the screw thread 220, the disk probe 218 and the center rod 216 move in accordance with the shape of the screw thread 220, and the parallel spring 212 is also deformed along this, and the main scale 2
15 is translated. This parallel movement is caused by the detection head 21.
This output is taken out through the signal cable and the locus of the screw thread 220 is read out.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing an appearance of a processing system having a plurality of processing elements. The bed 1 is a table that constitutes the main body of the machine, and has a substantially rectangular plane. On both sides of the bed 1, gutters 2 for removing the working fluid, chips, etc. are integrally formed. On the bed 1, first guide surfaces 3 and 3 are formed on two linear guide rails. A rack 4 is fixed to the side surface of the first guide surface 3.

A feed table 5 is movably provided on the first guide surfaces 3 and 3. A nut is fixed to the lower surface of the feed table 5, and the feed screw 6 is screwed into this nut. An output shaft of an X1 servo motor (not shown) is connected to one end of the feed screw 6. The feed table 5 is moved on the first guide surfaces 3 and 3 by the rotational driving of the X1 servo motor. A headstock 8 is provided above the feed table 5. The headstock 8 can be rotated and indexed and positioned about a direction perpendicular to the X1 direction, that is, around the Y1 axis. The drive for rotation and indexing positioning is performed by the Y1 servomotor 9 via the worm and the worm wheel (see FIG. 3).

The headstock 8 has a main shaft rotatably supported by bearings. A chuck 11 is attached to an end surface portion on the front surface side of the spindle. The chuck 11 is for gripping a workpiece. However, on the front end face of the spindle,
Not only the chuck 11 for gripping a workpiece, but also a rectangular workpiece such as a tool turret 29 and a magnetic chuck 70 described later can be mounted. The spindle is rotationally driven at high speed and low speed by a built-in motor embedded in the headstock 8.

On the other hand, on the bed 1, two second guide surfaces 20, 20 parallel to the first guide surfaces 3, 3 in the X2 direction.
Are formed. The second guide surface 20, 20 has a second
A feed table 21 is movably provided. Second guide surface 2
The X2 feed screw 19 is arranged along the lines 0 and 20.
The X2 feed screw 19 is screwed into the nut 17 provided on the lower surface of the second feed base 21. One end of the X2 feed screw 19 is connected to the output shaft of the X2 servo motor 18.
After all, by rotating the X2 servo motor 18,
The second feed table 21 moves on the second guide surface 20.

The second feed base 21 has two third guide surfaces 2.
Guide rails having 2, 22 are mounted in a direction perpendicular to the second guide surfaces 20, 20. Third guide surface 22, 2
A third feed table 23 is movably provided on the second unit. The third feed table 23 is moved by the Z2 servo motor 24 via the feed screw. Further, a column 25 is integrally provided on the third feed table 23. Fourth guide surfaces 26, 26 are formed on the front surface of the column 25.

A spindle head 27 is provided on the fourth guide surfaces 26, 26 so as to be vertically movable. The spindle head 27 is driven by a Y2 servomotor 28 so as to be vertically movable. Spindle head 2
A main shaft is rotatably supported in the inside of 7.
A tool turret 29 is attached to the end of the spindle on the front side of the spindle. A plurality of tools T are mounted on the outer periphery of the tool turret 29. The structure of the front end of the spindle is the same as the structure of the headstock 8 described later, and will not be described here. The tool turret 29 takes out rotational power from the main shaft to rotate the rotary tool attached to the tool turret 29 as described later. Further, the main body of the tool turret 29 can be positioned and fixed to the front end face of the main bearing by a curvic coupling structure.

The tool T attached to the turret 29 is
The workpiece held by the chuck 11 is processed. The bed 1 is further provided with two guide surfaces 31a and 31b having different heights (see FIG. 2). Both guide surfaces 31a and 31b
A tail stock 32 is movably provided on the top.
The tailstock 32 is a stand that supports one end of the workpiece using a center. Further, a servomotor 33 for rotationally driving and indexing the tailstock shaft is provided. Therefore,
The work gripping chuck 11 and the tool turret 29 can also be attached to the tailstock head 34.

A work and tool turret magazine 40 has a fourth movable table 41 movably provided on the first guide surfaces 3 and 3. As the servo motor 42 is mounted on the fourth moving table 41, a pinion provided on its output shaft meshes with the rack 4 of the guide rail. The fourth moving base 41 is driven by the servo motor 42 to move on the first guide surfaces 3 and 3. Therefore, the servo motor 4
By turning 2, the fourth moving base 41 is moved on the guide surfaces 3, 3.

A workpiece and a tool turret magazine 40 are mounted on the fourth movable table 41. 4th moving table 4
A servomotor 44 for indexing the workpiece and tool turret magazine 40 is attached to the machine 1.
A magazine body 46 is indexably provided on the turret table 43 on the fourth moving table 41. Magazine body 4
Reference numeral 6 is an octagon, and turret sockets 47 for mounting the tool turret 29 on the outer peripheral surface thereof are provided at four locations on the outer periphery. On the upper part of the magazine body 46, a work gripping base for gripping and mounting the work W is provided. Therefore, the workpiece and tool turret magazine 40 carries the workpiece as well as the tool turret 29.

FIG. 6 is a sectional view of the fourth moving table 41 taken along the line VI-VI in FIG. A worm 80 is provided on the output shaft of the indexing servomotor 44. Warm
Worm wheel 81 meshing with wheel 81
Are fixed to the magazine body 46. Therefore,
The worm 80 is rotated by rotating the indexing servomotor 44, and the worm wheel 81 is indexed and rotated. The magazine body 46 is indexed at a desired angle by the rotation of the worm wheel 81. By this indexing, the tool turret 29 is indexed to the required angular position. A servo motor 42 is mounted on the fourth moving table 41, and a pinion 82 is connected to this output shaft.
The pinion 82 meshes with the rack 4.

Next to the bed 1, a laser beam machine 50 is installed. The laser processing machine 49 is for performing quenching, cutting, welding, and the like. This laser processing machine 49
Is well known. The laser oscillating head 50 is moved and positioned in three axial directions by a servo motor to perform laser processing on a required position of the workpiece. These drive mechanisms are well known and will not be described in detail here.

[0023]Headstock 8  FIG. 3 is a cut sectional view of the headstock 4 and the first feed table 3.
FIG. 4 is a sectional view taken along line IV-IV of FIG. Headstock
The main body 51 has a cubic shape. Spindle script
An indexing shaft 52 is integrally attached to the lower surface of the body 51.
There is. The indexing shaft 52 is rotatable first by a bearing 53.
It is supported by the table 5. The index shaft 52 has a worm wheel
Is fixed. The worm wheel 54 is
It is engaged with the worm 55. The worm 55 is connected to the shaft 5
The index rotation is performed by the servo motor 9 via the motor 6.

In the headstock body 51, a low-speed spindle 57 for low-speed rotation is supported by bearings 58. Low speed spindle 5
A worm wheel 59 is fixed to the outer periphery of 7. The worm wheel 59 meshes with the worm 72. The worm wheel 59 is rotationally driven by a low speed motor 61 via a shaft 60. An annular curbic coupling 62 is formed on the front end surface of the low speed main shaft 57. The curbic coupling 62 is for attaching the tool turret 29 (see FIGS. 7 and 8), a workpiece chuck, or the like.

An annular magnetic chuck 70 is provided on the low speed main shaft 57 and on the outer periphery of the carbic coupling 62. The magnetic chuck 70 is for adsorbing and fixing a square work piece or a jig for fixing a deformed work piece.

A high-speed main shaft 63 for high-speed rotation is rotatably supported by a bearing 64 at the center coaxially with the low-speed main shaft 57. A taper hole 65 is formed on the front surface of the high speed spindle 63. A motor rotor 66 of an AC motor is integrally fixed to the rear end of the high speed spindle 63. Further, a rotating disk 71 is attached to the high speed spindle 63. The rotary disk 71 is a component that constitutes an encoder, and detects the rotation speed, rotation direction, and rotation angle of the high-speed spindle 63. The detailed structure of this encoder is well known, and its explanation is omitted.

A motor / stator 67 is fixed integrally to the outer periphery of the motor rotor 66 and to the headstock main body 51. The motor rotor 66 and the motor stator 67 are
Configure an AC motor. The motor rotor 66 is an indexing motor (not shown) for indexing to a desired angular position.
It has.

The coil in the motor / stator 67 generates heat due to its internal resistance. Therefore, the motor / stator 67
An oil jacket 68, which is a spiral groove, is formed in the headstock main body 51 on the outer periphery of the. Oil jacket 6
8, the cooling oil cooled by the refrigeration system is flown,
The motor / stator 67 is cooled. An unclamp cylinder 69 is provided at the rearmost portion of the high speed spindle 63.
The unclamp cylinder 69 is for unclamping the tool held in the tapered hole 65 of the low speed spindle 63. The tool is fixed to the tapered hole 65 by a knurl, a draw bar, and a disc spring, which are well-known structures (not shown).

On the other hand, the tool turret is attached to the low speed spindle 57 as follows. An annular curbic coupling 62 is formed on the front end surface of the low speed main shaft 57. The curvic coupling 62 is for engaging with the curvic coupling 93 (FIG. 8) formed on the tool turret 29 to fix the tool turret 29 to the low speed spindle 57.

Tool Turret 29 FIG. 7 is a partially cutaway plan view of the tool turret 29. FIG. 8 is a sectional view taken along line VIII-VIII in FIG. The tool turret 29 is a turret tool post provided with various tools such as a plurality of taps 90, a drill 91 and a turning tool 92 in a radial pattern. For example, the tap 90, which is a rotary tool, is gripped by the tap chuck 93.
The tap chuck 93 is provided at one end of the tap shaft 94, and a bevel gear 95 is keyed to the other end of the tap shaft 94. The tool turret body 89 is a body having a flat hexagonal shape and a height.

A tap 90 and a drill 91 are provided on each side of the hexagon.
A rotary tool such as the above, a turning tool 92, and a sub chuck 96 for gripping a workpiece are attached. The tool turret 29 is fixed to the spindle head 27 or the front surface of the headstock 8 during machining. On the side surface of the tool turret body 89, an annular curbic coupling 97 is formed. The curbic coupling 97 meshes with the curbic coupling 62 formed on the front end surface of the low speed main shaft 57 to fix the tool turret 29 to the low speed main shaft 57.

At the center of the side surface of the tool turret body 89, a taper shank 98 is rotatably supported. A bevel gear 99 is keyed to one end of the taper shank 98. The bevel gear 99 meshes with the bevel gear 95. The taper shank 98 is the taper hole 6 of the high-speed spindle 63.
The tool turret 29 is fixed by meshing with 5. A grip portion 88 is formed on the front surface of the tool turret body 89. The grip portion 88 is for inserting and gripping the tool turret 29 into the turret socket 47.

Machine Tool Size / Shape Measuring Device 210 FIGS. 21, 22, and 23 show a state in which the machine tool size / shape measuring device 210 is attached to the tool turret 29. The tool turret 29 includes a machine tool size / shape measuring device 21.
A box-shaped case 211 that constitutes the main body of 0 is provided. Four parallel leaf springs 212 are inserted inside this. However, the number of parallel springs 212 may be two in principle. Both ends of the parallel leaf spring 212 are fixed to each other by a gripping member 213.

The intermediate position of the parallel leaf spring 212 is supported by the fixing member 214 without being fixed at one point in order to clarify the supporting position. The supporting method is a knife edge (not shown) in this embodiment. Fixing member 21
4 is fixed to the case 211. Gripping member 213
The main scale 215 is fixed to the rear end.
The main scale 215 is an optical glass scale and is graduated at a predetermined pitch. Both gripping members 21
A center rod 216 is arranged at the center of each of 3, 213, and the center rod 216 is fixed and supported by both gripping members 213, 213.

On the other hand, a detection head 219 is provided on the case body 211 near the main scale 215.
The detection head 219 has a main scale 215 inside.
It has an index grating with the same pitch as that in which signals whose phases are shifted from each other by 90 degrees are obtained. Processing this signal to get a pulse signal of a fraction of the scale pitch,
The displacement of the main scale 215 is measured. These principles are well known and will not be described in detail. It should be noted that this scale may be one using electrostatic or magnetic properties.

At the front end of the center rod 216, the rod 21
The disk probe 218 is fixed via the connector 7.
When the turret body 89 is moved along the thread 220, the disc probe 218, the rod 217, and the center rod 216 move according to the shape of the thread 220, and the parallel spring 212 also deforms along the same, and the main scale 2
15 is translated.

This parallel movement is detected by the detection head 219, and this output is taken out through the signal cable and the locus of the screw thread 220 is read out. This measuring device can be used by being attached either to the movement of a turret or the like or to the fixed side of a body or the like.

Tailstock Shaft Head 34 FIGS. 9 and 10 are views showing the details of the head 34 of the tailstock 32. 9 is a front view of the head 34, and FIG. 10 is a half sectional view. A tailstock shaft 101 is supported in the head 34 by a bearing 102. At the front end of the tailstock shaft 101, a flange 103 is provided integrally with the tailstock shaft 101. A curbic coupling 105 is formed on the front end surface of the flange 103. The curbic coupling 105 is for meshing with the curbic coupling 97 of the tool turret 29, and fixes the tool turret 29 or the pallet of the work piece to the tailstock shaft 101. A tapered hole 105 is formed at the center of the front end face of the center of the tailstock shaft 101. The tapered hole 105 is for inserting and clamping a tool shank or the like. A key 106 is fixed to the front end surface of the tailstock 101. The key 106 is a key for driving a tool or the like.

On the other hand, on the back surface of the flange 103, a friction pad 107 is arranged with a slight gap. The friction pad 107 is made of metal, and is selected from a slide bearing metal or the like with low friction. Further, the piezoelectric actuator 109 is attached to the head 34 via the flange-shaped deforming portion 108.
Is arranged. In this example, the piezoelectric actuator 109 is made of crystalline piezoelectric ceramics, that is, lead zirconate titanate (PZT). PZT-based piezoelectric ceramics are advantageous because they have a large strain with respect to an applied voltage.

Further, a taper shank 110 is provided on the outer periphery of the deforming portion 108. Taper shank 110
Is used when clamping an attachment or the like for clamping the workpiece W. When processing is performed only by axial motion such as slotter processing, the force in the thrust direction applied to the flange 103 causes the deforming portion 108 to be deformed forward by the distortion of the piezoelectric actuator 109, and the friction pad 107 is pushed forward, It is protected so that it does not directly contact the main shaft bearing by supporting 103.

Tool / jig / workpiece preparation station 12
0, 11, 12, 13 and 14 show a tool / jig / workpiece preparation station. 11 is a diagram showing the overall appearance, FIG. 12 is a front view, and FIG. 13 is a XI of FIG.
FIG. 14 is a plan view taken along line II-XIII, and FIG. 14 is a right side view. Tool / jig / workpiece preparation station 120
Are arranged on the sides of the bed 1.

This appearance is in the shape of a box,
The internal space is divided into three shelves 121, the upper, middle, and lower rooms. The lower room 122 has a cleaning zone 1
A shutter drum 126 for separating 25 is arranged. The shutter 127 of the shutter drum 126 is guided by the roller 128 and the guide 129 and driven by a drive motor (not shown) to partition the cleaning zone 125.

A similar shutter drum (not shown) is also arranged at a right angle to the shutter 127 to define the cleaning zone 125. From the cleaning zone 125, chips, cleaning liquid, etc. do not scatter by this section. Below the cleaning zone 125, a pyramidal chip dropping hole 130 is provided.
Is arranged. Below the chip dropping hole 130, a chip conveyor 131 is arranged. Chip conveyor 1
Reference numeral 31 is for discharging chips and the like from the chip drop hole 130 to the outside.

A tool turret magazine 132 is arranged in the middle room 123. Tool turret magazine 13
2 stores four tool turrets 29 on the moving table 133. The movable table 133 can be indexed around the vertical axis by a built-in indexing drive mechanism, and indexed when the tool turret 29 is replaced. Further, the moving base 133 can move on the guide rail 134. Along the guide rail 134,
A feed screw 135 is arranged. The feed motor 136 is connected to one end of the feed screw 135, and
It is screwed into a nut fixed to 3. By rotating the feed motor 136, the feed screw 135 is rotated, and the moving base 133 is moved along the guide rail 134.

A guide rail 139 is arranged in the middle room 123 in a direction perpendicular to the guide rail 134. A rotation and conveyance device 140 is movably provided on the guide rail 139. A feed screw 141 is arranged along the guide rail 139. A feed motor 142 is connected to one end of the feed screw 141, and is screwed into a nut fixed to the rotation and conveyance device 140. By rotating the feed motor 142, the feed screw 14
1 is rotated and the rotation and conveyance device 140 is guided by the guide rail 1
Move along 39.

A magnetic chuck 143 is rotatably provided on the rotation and conveyance device 140. Magnetic chuck 1
43 attracts the workpiece jig P and rotates about a horizontal axis. The rotation and conveyance device 140 receives the workpiece jig P from the workpiece and tool turret magazine 40 on the machine tool side. At the time of receiving this, the rotation and conveyance device 14
0 turns around the vertical axis by the built-in indexing device,
The magnetic chuck 143 is turned to the machine tool side.

The received workpiece jig P is gripped by the magnetic chuck 143 of the rotating and transporting device 140, then moves on the guide rail 139 and moves to the cleaning zone 125. In the cleaning zone 125, the magnetic chuck 143 swivels around the horizontal axis to swivel the work jig P through the chip dropping hole 130, and sprays compressed air to dislodge chips. A reversing device 146 is arranged above the chip dropping hole 130.

The reversing device 146 has a magnetic chuck 147, and the magnetic chuck 147 is a cylinder device 148.
It is turned up and down and turned. Therefore, the magnetic chuck 14
7 rotates and vertically moves the work jig 144 as needed. A jig transport device 150 for transporting the workpiece jig 144 is movably provided on the guide rail 151 at the back of the inner chamber 123.

Along the guide rail 151, the feed screw 15
2 are arranged. A feed motor 153 is connected to one end of the feed screw 152, and is screwed into a nut fixed to the jig conveying device 150. Feed motor 153
The rotation of the screw rotates the feed screw 152 and moves the jig transfer device 150 along the guide rail 151.

The jig transfer device 150 includes a cleaning zone 125.
Then, the workpiece jig P is received by the magnetic chuck 154, moved on the guide rail 151, and swung about the vertical axis by the indexing device built in the jig transfer device 150, and the magnetic chuck 154 is moved to the jig stocker 155. Release and store in place towards the side (see Figure 3). The jig stockers 155 may be arranged in multiple stages to improve space efficiency. In this case, the jig transfer device 150 needs a vertical movement drive mechanism capable of vertical movement.

In the upper chamber 124, a bar material conveying device 160 is arranged. The bar material conveying device 160 is for grasping the bar material W for processing from the bar material stocker 161 and supplying and removing it to the machine tool. The guide rail 162 guides the moving base 163. The moving base 163 is connected to the chain 164. Both ends of the chain 164 are
It meshes with the sprocket 165. Sprocket 1
65 is driven by a drive motor 167. Therefore,
When the drive motor 167 is rotated, the chain 164 moves and the moving base 163 moves on the guide rail 162.

A hand device 167 is mounted on the moving table 163. The hand device 167 is capable of gripping the bar W, moving up and down, and turning. These structures are well-known structures, and detailed description thereof will be omitted.

Basket Pallet 170 FIG. 15 is a view showing the appearance of the basket pallet 170.
The frame 171 has a cubic shape and a rectangular cross section. An L-shaped clamp plate 172 is fixed to the frame 171 with bolts 173. An annular curvic coupling 174 is integrally provided on the front surface of the clamp plate 172. The curbic coupling 174 meshes with the curbic coupling 62 of the headstock 8 and is fixed to the low speed spindle 57. It can be fixed to the spindle head 27 as well.

FIG. 19 shows another embodiment of the basket type pallet 170. Depending on the workpiece, the L-shaped clamp plate 172 may interfere with the processing.
In this embodiment, two clamp plates 172a and 172b are arranged to face each other with the frame 171 sandwiched therebetween.

The jack 175 workpiece W is housed in the frame 171 and fixed by the jack 175. FIG. 16 is a cross-sectional view of the jack 175 used for this work piece. In the frame 171,
A jack fixing hole 169 is formed. The jack fixing hole 169 is for inserting the insertion portion 176 of the jack 175. The body 177 is integrally screwed into the insertion portion 176. The main body 177 has an intermediate shaft 178.
Is screwed.

A load cell 179 is inserted into the intermediate shaft 178 and is fixed with a screw 180. Load cell 179
Is for measuring the pressing force applied to the jack 175. The output of the load cell 179 is output terminal 1
Clamping force confirmation device 1 from frame 171 via 81
86 (see FIG. 17). The intermediate shaft 178 has
The bolt 182 is screwed in and fixed by the lock nut 183.

A rod 184 is slidably inserted into the bolt 182. A pad 185 made of hard rubber is fixed to the tip of the rod 184. Pad 1
Reference numeral 85 is for contacting and pressing the surface of the workpiece W. On the outer circumference of the rod 185, a disc spring 186 is interposed between the pad 185 and the bolt 182. Therefore, when the bolt 182 is extended to press the surface of the workpiece W with the pad 185, the disc spring 186 is compressed, the load cell 179 is pressurized, the output from the load cell 179 changes, and the pressing force can be detected.

FIG. 17 is a cross-sectional view showing an example of a fixing method for fixing a deformed work W inside the basket pallet 170 with the jack 175. The magnitude of the reaction force that tightens the workpiece W with the jack 175 is detected by the load cell 179, and this output is input to the clamping force confirmation device 187 from the terminal 186 provided on the basket pallet 170 and confirmed. This confirmation of the clamping force is performed when the workpiece W is attached to the basket pallet 170. However, the clamping force may be confirmed during processing by attaching the basket type pallet 170 to the spindle.

FIG. 20 is an external view showing another embodiment of the jack 175. A sphere 178 and a concave spherical surface 177a into which the sphere 178 is inserted are provided between the main body 177 and the intermediate shaft 178. Therefore, the main body 177 and the intermediate shaft 17
8 can be clamped even if it has an angle. Convenient for clamping deformed workpieces.

Workpiece Attachment Rigidity Confirmation Sensor 190 FIG. 18 is a partial sectional view of the work piece attachment rigidity confirmation sensor 190. The workpiece attachment rigidity confirmation sensor 190 is attached to the tool spindle to check whether the workpiece W is securely clamped by the fixing jig and to measure the rigidity. The tool shank 191 has a tool spindle 19
Used by attaching to 2. A moving rod 194 is movably provided in the rod 193 in front of the tool shank 191.

A contact pad 195 is integrally provided at the front end of the moving rod 194. A piston 196 is integrally provided at the rear end of the moving rod 194. A disc spring 197 is provided between the contact pad 195 and the rod 193.
And a load cell 198 is interposed. Therefore,
When the contact pad 195 is pressed, the disc spring 197 is compressed and the load cell 198 is also pressed to detect the applied pressure.

At the rear end of the piston 196, the rod-shaped core 19
9 are connected. The coil 200 is arranged around the rod-shaped core 199. After all, with the rod-shaped core 199,
The coil 200 constitutes an operating transformer and measures the amount of displacement. The outputs of the load cell 198 and the operating transformer are input to the rigidity calculation circuit 202 via the terminal 201, and the mounting condition of the workpiece on the jig is calculated.

That is, since the spring constant of the workpiece rigidity confirmation sensor 190 is well known, the mounting rigidity of the workpiece, that is, the spring constant is determined from the amount of pressure detected by the load cell 198 and the amount of movement at the time of pressurization detected by the operating transformer. The calculation is performed by the calculation circuit 202. As a result, it is possible to confirm the reliability and the fixing strength of the work piece fixed to the jig.

Outline of Operation A processing system having a plurality of processing elements having the above-described structure operates generally as follows. The NC device 100 has a tool turret 2 according to the workpiece to be machined.
Select 9. Prior to this selection, the replacement of the tool turret 29 with the workpiece / tool turret / magazine 40 is performed by moving the workpiece / tool turret / magazine 40 to the tool / jig / workpiece preparation station 120.
The tool to be mounted on the tool turret 29 is determined in advance according to the processing content of the workpiece. For example, if the processing contents are a drill, an outer diameter, a thread cutting, and an outer peripheral grinding, a tool turret 29 equipped with a drill, an outer diameter bite, a thread cutting bite, and a grindstone is selected so that the processing can be performed.

A plurality of tool turrets 29 are stored in the workpiece and tool turret magazine 40. This tool turret 29 can be replaced by a command from the NC device 100.
The indexing servomotor 44 is activated to rotate the worm 80 and the worm wheel 81, and the tool magazine body 46
To the desired angle (states in FIGS. 1 and 2).

The state of this index is the tool magazine body 4
6 is a state in which the turret socket 47 side of 6 which is open is directed to the column 25 side. Simultaneously with or in parallel with this indexing, the X2 servo motor 18, the Z2 servo motor 24, and the Y2 servo motor 28 are activated to move the spindle head 27 to the replacement position of the tool turret 29. That is, the workpiece and tool turret magazine 40 is opposed to the spindle 27, and the turret socket 47 of the magazine body 46 and the tool turret 2 are arranged.
The center lines of the grip portions 96 of 9 are aligned.

With the center lines aligned and facing each other, Z2
The servomotor 24 is driven to bring the spindle head 27 closer to the magazine body 46, and the grip portion 88 of the tool turret 29 is moved.
Is inserted into the turret socket 47. Magazine body 46
The inner clamp device grips the grip portion 96. After this gripping, the tool clamping device in the spindle head 27 is moved to the tool turret 2
Release the clamp of 9. After this, Z2 servo motor 2
4 is started and the spindle head 27 is separated from the magazine body 46 again.

The indexing servomotor 44 on the fourth moving table 41 is activated to index the magazine body 46 at a desired angle. When the target tool turret 29 is located on the column 25 side, the Z2 servomotor 24 is moved again to bring the spindle head 27 closer to the magazine body 46. The clamping device in the spindle head 27 is a taper shank 98 of the tool turret 29.
To hold. After this gripping, the clamping device in the magazine body 46 releases the tool turret 29. With the above operation, the exchange operation of the tool turret 29 is completed.

On the other hand, the workpiece W is held by the chuck 11 after or before the replacement of the tool turret 29. The work and tool turret magazine 40 is supplied with a work W from a stocker (not shown) of the work and tool turret 29 arranged on the side surface of the bed 1. The work and tool turret magazine 40 mounts the work W on the top thereof, moves on the guide surfaces 3 and 3, and supplies the work W to the chuck 11. It should be noted that, without this movement, the headstock 8 may be moved or the workpiece W may be gripped.

Next, the X2 servo motor 18, the Z2 servo motor 24, and the Y2 servo motor 28 are driven to drive the spindle head 2
7 is moved to a predetermined processing position. The high speed spindle 63 is rotated and the chuck 11 is rotated to perform turning, milling, drilling and grinding with the tool in the tool turret 29 of the spindle head 27. At this time, machining is performed by ringing, drilling, and grinding on the X2, Y2, and Z2 axes. At this time, the processing is X
2, Y2, Z2 axis.

Further, if necessary, the motor / rotor 66
Is electromagnetically fixed, the high-speed spindle 63 is fixed, the Y1 servomotor 9 is driven, and the spindle stock 8 is indexed and rotated around the axis of Y1 to perform necessary machining on the five axes. Long workpiece W
In the case of 1, the workpiece W is held between the tail stock 32 and the chuck 11 and the same processing such as ordinary turning, cylindrical grinding, and milling is performed. Further, for the workpiece W that needs to be quenched, the laser oscillation head 50 oscillates a laser to perform quenching welding or the like. The tool W after processing is
It is mounted on the work and tool turret magazine 40 and discharged.

[0072]How to use tailstock  The tailstock 32 is a long machine like a normal lathe.
It also has the function of supporting one end of the crop at the center. But Naga
The tail stock of this processing system is
It also has the function of holding the workpiece during processing. To the chain line in Figure 10
As shown, when machining the keyway on the workpiece W, first
The work W is mounted on the pallet P. On the back of pallet P
Has a curvic coupling formed on it.
The big coupling is a cover formed on the flange 103.
It meshes with the big coupling 104.

A taper shank 111 is integrally provided on the back surface of the pallet P. The tapered shank 111 is inserted into the tapered hole 104 of the tailstock shaft 101, and a pull stud is attached to the rear end of the tapered shank 111. The pull stud is clamped by a clamp device to fix the pallet P to the tailstock shaft 101. In order to protect the main shaft bearing from the cutting force in the thrust direction, a voltage is applied to the piezoelectric actuator 109 to generate a strain that expands in the axial direction. This distortion is caused by the flange 103 via the deforming portion 108 and the friction pad 107.
Is pushed up and the cutting force from the pallet P is received so as not to be directly applied to the spindle bearing.

[0074]

Other Embodiments The machine tool size / shape measuring device 210 was mounted on the turret 29. This measuring device is, for example, a guide provided parallel to the guide surfaces 31a and 31b of the tail stock 32. Rail (not shown)
A movable table may be movably provided on the movable table, and the measuring device may be mounted and arranged on the movable table. Further, the measurement may be carried out by attaching to a spindle or a tool spindle.

The main shaft has a high-speed shaft at the center and a low-speed shaft at the outer periphery, but the opposite arrangement may be adopted. The driving means is not limited to the built-in motor, and other known means may be used.
The piezoelectric actuator 109 described above is one that generates a strain by applying a voltage. However, the piezoelectric actuator 109 may be an electrostrictive actuator.

The electrostrictive actuator is a device for generating distortion by an electric field. For example, the electrostrictive actuator is lead magnesium niobate (PMN) or the like, and may be a voice coil actuator used for an electrodynamic speaker or the like. The supply of the workpiece W is
It may be supplied or removed by a robot (not shown) arranged near the bed 1 or a workpiece supplying / discharging device (not shown) provided on the upper part.

[0077]

As described in detail above, since the machine tool size / shape measuring device of the present invention can measure displacement while maintaining linearity, large displacements such as the size and shape of a workpiece or tool can be measured. Can be measured accurately.

[Brief description of drawings]

FIG. 1 is a three-dimensional layout diagram showing an appearance of a processing system having a plurality of processing elements.

FIG. 2 is a view on arrow II of FIG.

FIG. 3 is a sectional view of a headstock.

4 is a cross-sectional view taken along line VI-VI of FIG.

FIG. 5 is a front view of a headstock.

6 is a cross-sectional view taken along line VI-VI of FIG.

FIG. 7 is a front view of a tool turret.

8 is a sectional view taken along line VIII-VIII in FIG. 7.

FIG. 9 is a front view of the tail stock.

FIG. 10 is a cross-sectional view of the head portion of the tailstock.

FIG. 11 is a diagram showing an appearance of a tool / jig / workpiece preparation station.

12 is a view on arrow XII of FIG. 11. FIG.

13 is a plan view taken along line XIII-XIII in FIG.

14 is a side view taken along line XIV-XIV in FIG.

FIG. 15 is an exploded view showing the appearance of a basket type pallet.

FIG. 16 is a vertical cross-sectional view of the jack.

FIG. 17 is a cross-sectional view showing a state in which a workpiece is fixed to a basket type pallet with a jack.

FIG. 18 is a cross-sectional view of a workpiece attachment rigidity confirmation sensor.

FIG. 19 is an exploded view showing the external appearance of another embodiment of the basket type pallet.

FIG. 20 is a view showing the outer appearance of another embodiment of the jack.

FIG. 21 is a partial cross-sectional view of a dimension / shape measuring device for machine tools.

22 is a sectional view taken along line XXII-XXII in FIG. 21.

23 is a sectional view taken along line XXIIIXXIII in FIG. 21.

[Explanation of Codes] 1 ... Bed 2 ... Gutter 3 ... Guide surface 4 ... Rack 5 ... Feedstock 8 ... Spindle base 9 ... Y1 servo motor 10 ... CI Servo motor 11 ... Chuck 20 ... Second guide surface 22 ... Third guide Surface 23 ... 3rd feed table 24 ... Z2 servo motor 25 ... Column 27 ... Spindle head 29 ... Tool turret 32 ... Tailstock 40 ... Workpiece and tool turret / magazine 49 ... Laser processing machine 50 ... Laser oscillation head 57 ... Low speed spindle 63 ... High-speed spindle 65 ... Tapered hole 100 ... NC device 109 ... Piezoelectric actuator 120 ... Tool / jig / workpiece preparation station 125 ... Washing zone, 140 ... Rotation and transfer device 146 ... Reversing device 150 ... Jig transfer device 160 ... Bar material conveying device 170 ... Basket pallet 190 ... Mounting rigidity confirmation sensor

Claims (3)

(57) [Claims] 1. A. A probe (218) for contacting the object to be measured, b. The arm (21) to which the probe (218) is attached
7,216), and c. A gripping member (21) provided in parallel with each other for fixing the arms (217, 216) at at least two positions.
3), and d. Both ends are connected to the grip member (213) and are flat with each other.
At least two parallel leaf springs (212), e. The arms (217, 216) penetrate through with a gap
The parallel leaf spring (212) with a through hole
Position to contact and support the parallel leaf springs (212).
A constant member (214), f. A linear scale (215, 219) for measuring the displacement of the gripping member (213); and g. Dimension and shape measuring device for machine tools. 2. The size / shape measuring device for a machine tool according to claim 1, wherein the linear scale (215, 219) is an optical linear encoder. 3. The size / shape measuring device for a machine tool according to claim 1, wherein the parallel spring (212) is composed of four sheets.