JP2511346B2 - Ring resonance type gyro - Google Patents

Ring resonance type gyro

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Publication number
JP2511346B2
JP2511346B2 JP3294709A JP29470991A JP2511346B2 JP 2511346 B2 JP2511346 B2 JP 2511346B2 JP 3294709 A JP3294709 A JP 3294709A JP 29470991 A JP29470991 A JP 29470991A JP 2511346 B2 JP2511346 B2 JP 2511346B2
Authority
JP
Japan
Prior art keywords
waveguide
light
optical
ring
resonance type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3294709A
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Japanese (ja)
Other versions
JPH05133757A (en
Inventor
良二 加来
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Aviation Electronics Industry Ltd
Original Assignee
Japan Aviation Electronics Industry Ltd
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Filing date
Publication date
Application filed by Japan Aviation Electronics Industry Ltd filed Critical Japan Aviation Electronics Industry Ltd
Priority to JP3294709A priority Critical patent/JP2511346B2/en
Publication of JPH05133757A publication Critical patent/JPH05133757A/en
Application granted granted Critical
Publication of JP2511346B2 publication Critical patent/JP2511346B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は特に装置全体を小型化
し、かつ安定化したリング共振型ジャイロに関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ring resonance type gyro, in which the entire apparatus is miniaturized and stabilized.

【0002】[0002]

【従来の技術】光ジャイロの方式として、レーザジャイ
ロ、光ファイバジャイロ、リング共振型ジャイロの3方
式が提案されている。リング共振型ジャイロは、光ファ
イバ長が光ファイバジャイロに比して短くて済む利点が
ある。従来のリング共振型ジャイロの基本的構成および
その動作を図2について簡単に説明する。例えば半導体
レーザにより構成された光源10からの光は、光カプラ
16によって光ファイバ13,14に分岐され、それぞ
れ光カプラ17,18を経由した後、光カプラ19によ
って光ファイバループ15内に導入され、時計回り方向
の光(CW)と、反時計回り方向の光(CCW)とにな
る。
2. Description of the Related Art As an optical gyro system, three systems of a laser gyro, an optical fiber gyro and a ring resonance type gyro have been proposed. The ring resonance type gyro has an advantage that the optical fiber length can be shorter than that of the optical fiber gyro. The basic configuration and operation of the conventional ring resonance type gyro will be briefly described with reference to FIG. For example, the light from the light source 10 formed of a semiconductor laser is branched into the optical fibers 13 and 14 by the optical coupler 16, passes through the optical couplers 17 and 18, respectively, and then is introduced into the optical fiber loop 15 by the optical coupler 19. , Light in the clockwise direction (CW) and light in the counterclockwise direction (CCW).

【0003】CW光はループ15内で多重干渉し、その
漏れ光は光カプラ19−光ファイバ13−光カプラ17
を経由して検出器12に入力される。同様にCCW光も
ループ15内で多重干渉し、その漏れ光は光カプラ19
−光ファイバ14−光カプラ18を経由して検出器11
に入力される。光ファイバループ15には、そのループ
長と光源10より得られる光の波長とで決まる共振周波
数が存在し、共振状態では光ファイバループ15内に光
が閉じ込められる。このようなジャイロに回転が加わら
ない場合は、CW光もCCW光も同一の共振周波数を持
つが、回転角速度が加わるとサニャック効果によりCW
光とCCW光とで共振周波数が相違してくる。この相違
(ずれ)を検知することにより、回転角速度を知ること
ができる。
CW light undergoes multiple interference in the loop 15, and the leaked light is an optical coupler 19-optical fiber 13-optical coupler 17.
Is input to the detector 12 via. Similarly, the CCW light also undergoes multiple interference in the loop 15, and the leaked light is the optical coupler 19
-Optical fiber 14-detector 11 via optical coupler 18
Is input to The optical fiber loop 15 has a resonance frequency determined by the loop length and the wavelength of the light obtained from the light source 10, and the light is confined in the optical fiber loop 15 in the resonance state. When no rotation is applied to such a gyro, both the CW light and the CCW light have the same resonance frequency, but when the rotation angular velocity is applied, the CW light is affected by the Sagnac effect
The resonance frequency differs between light and CCW light. By detecting this difference (deviation), the rotational angular velocity can be known.

【0004】図2に示す構成では、CW光の漏れ光の強
さが検出器12で検出されてその検出出力が光源10に
フィードバックされ、漏れ光の強さに応じて光源10か
ら射出される光の周波数が制御され、光ファイバループ
15内でCW光が常時共振状態にあるように保持され
る。従ってこの例ではCW光は温度などの外乱補正用と
して使用されている場合を示している。
In the configuration shown in FIG. 2, the intensity of the leaked light of the CW light is detected by the detector 12, the detection output is fed back to the light source 10, and the light is emitted from the light source 10 according to the intensity of the leaked light. The frequency of the light is controlled, and the CW light is kept in the optical fiber loop 15 so that it is always in a resonance state. Therefore, this example shows the case where the CW light is used for correcting the disturbance such as temperature.

【0005】一方CCW光の漏れ光の強さは検出器11
で検出されてその検出出力は周波数シフタ20にフィー
ドバックされ、漏れ光の強さに応じて周波数シフタ20
を通る光の周波数がシフトされ、CCW光も光ファイバ
ループ15内で共振状態に保持される。この周波数シフ
タ20に対する周波数のシフト量からジャイロに加えら
れる回転角速度が算出される。
On the other hand, the intensity of leaked CCW light is detected by the detector 11
The detected output is fed back to the frequency shifter 20, and the frequency shifter 20 is detected according to the intensity of leaked light.
The frequency of the light passing therethrough is shifted, and the CCW light is also kept in a resonant state in the optical fiber loop 15. The rotational angular velocity applied to the gyro is calculated from the frequency shift amount with respect to the frequency shifter 20.

【0006】[0006]

【発明が解決しようとする課題】この従来のジャイロに
おいては、ループ15として光ファイバを使用している
ために、振動などの外乱に弱い問題点があり、光ファイ
バ同士を結合するため光カプラの制作技術が必要であ
り、さらに周波数シフタ20を光ファイバ中に取り付け
ねばならず、その取り付け作業および光学的調整に手数
を要する問題点があり、周波数シフタ20としての音響
光学変調器(AOM)が高価である。更に、リング共振
型ジャイロの従来例は、ループを構成する光ファイバ1
3および光ファイバ14と光ファイバループ15とが図
示される通り同一平面上に配列され、光カプラ19を介
して相互に光結合されているので、このジャイロの図2
における左右方向の寸法は光ファイバ13および光ファ
イバ14を構成するループの直径と光ファイバループ1
5の直径を加算した寸法となる。光ファイバ13および
光ファイバ14と光ファイバループ15とがこの様に水
平方向に直列的に配列される構成は、リング共振型ジャ
イロを小型化する上において不都合である。この発明
は、リング共振型ジャイロを小型化および低価格化する
上における上述した問題を解決したリング共振型ジャイ
ロを提供するものである。
In this conventional gyro, since the optical fiber is used as the loop 15, there is a problem that it is vulnerable to disturbances such as vibrations. The production technique is required, and the frequency shifter 20 has to be mounted in the optical fiber, and the mounting work and the optical adjustment are troublesome. Therefore, an acousto-optic modulator (AOM) as the frequency shifter 20 is required. It is expensive. Further, in the conventional example of the ring resonance type gyro, the optical fiber 1 forming the loop is
3 and the optical fiber 14 and the optical fiber loop 15 are arranged on the same plane as shown in the drawing, and are optically coupled to each other through the optical coupler 19, so that the gyro shown in FIG.
Is the diameter of the loop forming the optical fibers 13 and 14 and the optical fiber loop 1
The size is the sum of 5 diameters. The configuration in which the optical fibers 13 and 14 and the optical fiber loop 15 are arranged in series in the horizontal direction in this manner is inconvenient for downsizing the ring resonance gyro. The present invention provides a ring resonance type gyro that solves the above-mentioned problems in reducing the size and cost of the ring resonance type gyro.

【0007】[0007]

【課題を解決するための手段】第1導波路1と、第1導
波路1から送り込まれる光を2分するY字型分岐部5
と、Y字型分岐部5において第1導波路1からY字型に
2分岐した第2導波路2および第3導波路3と、2分岐
した第2導波路2と第3導波路3の間に配置され、光結
合部6を介して第2導波路2に光結合すると共に光結合
部7を介して第3導波路3に光結合するリング導波路4
とを電気光学効果を有する共通の基板9に集積形成し、
第2導波路2或は第3導波路3のY字型分岐部5と光結
合部6或は光結合部7との間の部分に対して変調用電極
8を取り付けたリング共振型ジャイロを構成した。
[Means for Solving the Problems] A first waveguide 1 and a Y-shaped branching portion 5 which divides light sent from the first waveguide 1 into two parts.
Of the second waveguide 2 and the third waveguide 3 that are branched into two Y-shapes from the first waveguide 1 in the Y-shaped branch portion 5, and the second waveguide 2 and the third waveguide 3 that are branched into two. A ring waveguide 4 which is disposed between the ring waveguide 4 and the second waveguide 2 is optically coupled to the second waveguide 2 via the optical coupling portion 6 and to the third waveguide 3 via the optical coupling portion 7.
And are integrally formed on a common substrate 9 having an electro-optical effect,
A ring resonance type gyro in which a modulation electrode 8 is attached to a portion between the Y-shaped branch portion 5 of the second waveguide 2 or the third waveguide 3 and the optical coupling portion 6 or the optical coupling portion 7. Configured.

【0008】[0008]

【作用】電気光学効果を有する共通の基板9上に集積さ
れて、第1導波路1,第2導波路2,第3導波路3,リ
ング導波路4が形成され、かつ光結合部6,7が形成さ
れており、従来と同様の回転角速度の検出動作をするこ
とは勿論であるが、基板9上に集積されているので、小
型化,低価格化でき、かつ安定化できる。
The first waveguide 1, the second waveguide 2, the third waveguide 3, and the ring waveguide 4 are formed by being integrated on a common substrate 9 having an electro-optical effect, and the optical coupling portion 6, 6. 7 is formed and, of course, the same rotational angular velocity detecting operation as in the conventional case is performed, but since it is integrated on the substrate 9, it is possible to reduce the size and cost and to stabilize it.

【0009】[0009]

【実施例】この発明に係わるリング共振型ジャイロの一
例を図1を参照して説明する。この発明では基板9とし
て電気光学材料、例えばニオブ酸リチウムまたはタンタ
ル酸リチウムなどを使用し、これに上述した図2で示す
従来の光ファイバ13,14、光ファイバループ15お
よび光カプラ16,17,18,19と同一作用をなす
部分を直接集積して形成したものである。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An example of a ring resonance type gyro according to the present invention will be described with reference to FIG. In the present invention, an electro-optical material such as lithium niobate or lithium tantalate is used as the substrate 9, and the conventional optical fibers 13 and 14, the optical fiber loop 15 and the optical couplers 16 and 17 shown in FIG. It is formed by directly accumulating portions having the same function as 18, 19.

【0010】即ち、図1に示す基板9の第1導波路1,
第2導波路2,第3導波路3,リング導波路4に対応す
る部分を、他部より高屈折率に形成するものである。基
板9の一部(導波路)を高屈折率に形成するためには、
周知のチタン拡散法あるいはプロトン変換法などが用い
られる。これにより基板9の拡散された部分が各導波路
1,2,3,4となる。光結合部6,7も同様な方法に
より基板9に対し集積して形成することができ、従来の
方向性結合器と同様に機能させ得る。
That is, the first waveguide 1 of the substrate 9 shown in FIG.
The portions corresponding to the second waveguide 2, the third waveguide 3, and the ring waveguide 4 are formed to have a higher refractive index than other portions. In order to form a part (waveguide) of the substrate 9 with a high refractive index,
The well-known titanium diffusion method or proton conversion method is used. As a result, the diffused portion of the substrate 9 becomes the respective waveguides 1, 2, 3, 4. The optical coupling portions 6 and 7 can be integrated and formed on the substrate 9 by a similar method, and can function as a conventional directional coupler.

【0011】分岐部5は第1導波路1に対して第2導波
路2および第3導波路3を単にY字型に形成すればよ
い。図1に示す第1導波路1は基板9の左端縁(図にお
いて)から右端縁に向かって比較的短尺に形成され、左
端部は光源10に光学的に連結され、第2,第3の導波
路2,3は第1導波路1の延長方向に対して対称的に形
成され、それらの右端部は基板9の右端縁に達して、検
出器11,12に光学的に連結されている。
The branch portion 5 may be formed by simply forming the second waveguide 3 and the third waveguide 3 in the Y-shape with respect to the first waveguide 1. The first waveguide 1 shown in FIG. 1 is formed to have a relatively short length from the left edge (in the drawing) of the substrate 9 toward the right edge, and the left edge is optically connected to the light source 10, and the second and third waveguides are provided. The waveguides 2 and 3 are formed symmetrically with respect to the extension direction of the first waveguide 1, and their right end portions reach the right end edge of the substrate 9 and are optically coupled to the detectors 11 and 12. .

【0012】分岐部5から光結合部6までの間の第2導
波路2に対して、これを挟むように一対の変調用電極8
が基板9上に取り付けられている。ニオブ酸リチウムは
電気光学効果を有しているので、一対の電極8間に電場
をかければ、この電場の強さに応じてこの電極8間に挟
まれている光の導波路の屈折率が変わり、導波路中の光
の位相を変えることができ、即ち位相を時間に対して線
形に変えることにより光の周波数を変えることができる
(セロダイン変調法)。よって変調用電極8を周波数シ
フタとして機能させることができる。
A pair of modulation electrodes 8 are provided so as to sandwich the second waveguide 2 between the branch portion 5 and the optical coupling portion 6 so as to sandwich it.
Are mounted on the substrate 9. Since lithium niobate has an electro-optical effect, if an electric field is applied between the pair of electrodes 8, the refractive index of the waveguide of the light sandwiched between the electrodes 8 will be increased according to the strength of the electric field. In other words, the phase of light in the waveguide can be changed, that is, the frequency of light can be changed by changing the phase linearly with respect to time (serodyne modulation method). Therefore, the modulation electrode 8 can function as a frequency shifter.

【0013】このジゃイロの動作を説明すると、光源1
0から射出された光は第1導波路1に導入され、分岐部
5で2分される。2分された一方の光は第2導波路2を
通り、光結合部6でリング導波路4に入りCW光とな
る。分岐部5で2分された他方の光は第3導波路3を通
り、光結合部7でリング導波路4に入りCCW光とな
る。CW光はリング導波路4内で多重干渉し、その漏れ
光の強さは検出器11で検出される。CCW光も同様に
リング導波路4内で多重干渉し、その漏れ光の強さは検
出器12で検出される。
The operation of this gyro will be described. The light source 1
The light emitted from 0 is introduced into the first waveguide 1 and is split into two at the branch portion 5. One of the two split lights passes through the second waveguide 2 and enters the ring waveguide 4 at the optical coupling portion 6 to become CW light. The other light split into two at the branching portion 5 passes through the third waveguide 3 and enters the ring waveguide 4 at the optical coupling portion 7 to become CCW light. The CW light undergoes multiple interference in the ring waveguide 4, and the intensity of the leaked light is detected by the detector 11. Similarly, the CCW light also undergoes multiple interference in the ring waveguide 4, and the intensity of the leaked light is detected by the detector 12.

【0014】CW光およびCCW光にも光源10からの
光の波長とリング導波路4のループ長とで決まる共振周
波数が存在し、共振状態ではジャイロに回転角速度が加
わらない場合は、これらの共振周波数は同一となってリ
ング導波路4内に閉じ込められる。ジャイロに回転角速
度が加わるとサニャック効果によりこれらの共振周波数
は互いにずれるので、このずれを検出することにより回
転角速度を算出することができる。なお周波数のずれを
算出する手段は従来周知であるから、その説明は省略す
る。この例ではCCW光を温度変化などの外乱補正用に
使用(図2で説明したCW光と同様の使用)し、CW光
を測定用に使用している。
CW light and CCW light also have a resonance frequency determined by the wavelength of the light from the light source 10 and the loop length of the ring waveguide 4, and when the rotational angular velocity is not applied to the gyro in the resonance state, these resonances occur. The frequencies are the same and are confined in the ring waveguide 4. When the rotational angular velocity is applied to the gyro, these resonance frequencies shift from each other due to the Sagnac effect. Therefore, the rotational angular velocity can be calculated by detecting this shift. Since the means for calculating the frequency shift is well known in the art, its explanation is omitted. In this example, the CCW light is used for disturbance correction such as temperature change (the same use as the CW light described in FIG. 2), and the CW light is used for measurement.

【0015】なお光源10および検出器11,12は基
板9に直接取り付けてもよく、または光ファイバを介し
て取り付けてもよい。また上述においては変調用電極8
を第2導波路2に対向させた場合であるが、第3導波路
3に対向させてもよい。この場合は検出器12からの出
力で変調用電極8の電場の強さを制御し、検出器11の
出力で光源10からの光の周波数を制御する。
The light source 10 and the detectors 11 and 12 may be directly attached to the substrate 9 or may be attached via an optical fiber. In the above description, the modulation electrode 8
Is opposed to the second waveguide 2, but may be opposed to the third waveguide 3. In this case, the output of the detector 12 controls the strength of the electric field of the modulation electrode 8, and the output of the detector 11 controls the frequency of the light from the light source 10.

【0016】[0016]

【発明の効果】以上の通りであって、この発明のリング
共振型ジャイロは、各導波路と光結合部およびY字型分
岐部を1枚の基板上に集積して形成するものであるの
で、リング共振型ジャイロ全体を小型化することができ
ると共に、低価格化、外乱に対して安定化することがで
きる。即ち、リング導波路4との間において光を送受す
るY字型分岐部およびY字型に分岐する第2、第3導波
路の構成は、第1導波路1に対して第2導波路および第
3導波路を単にY字型に形成すればよく、これら導波路
をリング型に形成する従来例と比較して極く簡単容易な
ことである。そして、第1導波路1は比較的に短尺にす
ることができるので、この構成はリング共振型ジャイロ
全体を小型化し製造コストを低下する上において好適な
構成であるということができる。また、リング導波路4
を、2分岐した第2導波路2と第3導波路3の間に配置
され、光結合部6を介して第2導波路2に光結合すると
共に光結合部7を介して第3導波路3に光結合する構成
として光結合部を2箇所としたことにより、リング導波
路4は第2導波路2および第3導波路3に本来必要とさ
れる領域内に納まることとなり、これに依ってリング共
振型ジャイロ全体の特に図において横方向の寸法は更に
低減することとなる。また、導波路その他の各部は基板
に集積形成されているので、外乱に対して安定なジャイ
ロを構成することができる。
As described above, the ring resonance type gyro of the present invention is formed by integrating each waveguide, the optical coupling section and the Y-shaped branch section on one substrate. It is possible to reduce the size of the entire ring resonance type gyro, reduce the cost, and stabilize the system against disturbance. That is, the configuration of the Y-shaped branch portion that transmits and receives light to and from the ring waveguide 4 and the second and third waveguides that branch in the Y-shape is the same as the first waveguide 1 and the second waveguide. It is only necessary to form the third waveguide in a Y shape, which is extremely easy and easy as compared with the conventional example in which these waveguides are formed in a ring shape. Since the first waveguide 1 can be made relatively short, it can be said that this configuration is suitable for downsizing the entire ring resonance type gyro and reducing the manufacturing cost. In addition, the ring waveguide 4
Is disposed between the second waveguide 2 and the third waveguide 3 which are branched into two, and is optically coupled to the second waveguide 2 through the optical coupling portion 6 and the third waveguide through the optical coupling portion 7. Since there are two optical coupling portions for optically coupling to the optical waveguide 3, the ring waveguide 4 is housed in a region originally required for the second waveguide 3 and the third waveguide 3, and accordingly, The lateral dimension of the entire ring resonance type gyro, particularly in the drawing, is further reduced. Moreover, since the waveguide and other parts are integrated and formed on the substrate, a gyro that is stable against disturbance can be formed.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明に係わるリング共振型ジャイロの一例
を示す平面図。
FIG. 1 is a plan view showing an example of a ring resonance type gyro according to the present invention.

【図2】従来のリング共振型ジャイロの一例を示す平面
図。
FIG. 2 is a plan view showing an example of a conventional ring resonance type gyro.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 第1導波路と、第1導波路から送り込ま
れる光を2分するY字型分岐部と、Y字型分岐部におい
て第1導波路からY字型に2分岐した第2導波路および
第3導波路と、2分岐した第2導波路と第3導波路の間
に配置され、光結合部を介して第2導波路に光結合する
と共に光結合部を介して第3導波路に光結合するリング
導波路とを電気光学効果を有する共通の基板に集積形成
し、第2導波路或は第3導波路のY字型分岐部と光結合
部との間の部分に対して変調用電極を取り付けたことを
特徴とするリング共振型ジャイロ。
1. A first waveguide, a Y-shaped branching portion that divides light sent from the first waveguide into two parts, and a second branching into two Y-shaped portions from the first waveguide at the Y-shaped branching portion. The third waveguide is disposed between the waveguide and the third waveguide, and the second waveguide and the third waveguide that are branched into two, and is optically coupled to the second waveguide through the optical coupling section and the third coupling is performed through the optical coupling section. A ring waveguide optically coupled to the waveguide is integrally formed on a common substrate having an electro-optical effect, and is formed in a portion between the Y-shaped branch portion of the second waveguide or the third waveguide and the optical coupling portion. A ring resonance type gyro characterized in that a modulation electrode is attached thereto.
JP3294709A 1991-11-12 1991-11-12 Ring resonance type gyro Expired - Fee Related JP2511346B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3294709A JP2511346B2 (en) 1991-11-12 1991-11-12 Ring resonance type gyro

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3294709A JP2511346B2 (en) 1991-11-12 1991-11-12 Ring resonance type gyro

Publications (2)

Publication Number Publication Date
JPH05133757A JPH05133757A (en) 1993-05-28
JP2511346B2 true JP2511346B2 (en) 1996-06-26

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Country Link
JP (1) JP2511346B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7535576B2 (en) * 2006-05-15 2009-05-19 Honeywell International, Inc. Integrated optical rotation sensor and method for sensing rotation rate
KR100955395B1 (en) * 2006-06-14 2010-04-29 삼성전자주식회사 Head gimbals assembly of hard disk and method of assembling thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6247516A (en) * 1985-08-23 1987-03-02 ノ−スロツプ・コ−ポレ−シヨン Thin-film laser gyro
JPH04357408A (en) * 1991-01-25 1992-12-10 Tokimec Inc Structure of optical system of optical gyroscope

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JPH05133757A (en) 1993-05-28

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