JP2511257Y2 - 荷電粒子集束装置 - Google Patents

荷電粒子集束装置

Info

Publication number
JP2511257Y2
JP2511257Y2 JP9291U JP9291U JP2511257Y2 JP 2511257 Y2 JP2511257 Y2 JP 2511257Y2 JP 9291 U JP9291 U JP 9291U JP 9291 U JP9291 U JP 9291U JP 2511257 Y2 JP2511257 Y2 JP 2511257Y2
Authority
JP
Japan
Prior art keywords
vacuum chamber
diameter
charged particle
coil
solenoid coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP9291U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0494300U (https=
Inventor
哲也 中西
博文 田中
典幸 水田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9291U priority Critical patent/JP2511257Y2/ja
Publication of JPH0494300U publication Critical patent/JPH0494300U/ja
Application granted granted Critical
Publication of JP2511257Y2 publication Critical patent/JP2511257Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
JP9291U 1991-01-08 1991-01-08 荷電粒子集束装置 Expired - Fee Related JP2511257Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9291U JP2511257Y2 (ja) 1991-01-08 1991-01-08 荷電粒子集束装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9291U JP2511257Y2 (ja) 1991-01-08 1991-01-08 荷電粒子集束装置

Publications (2)

Publication Number Publication Date
JPH0494300U JPH0494300U (https=) 1992-08-17
JP2511257Y2 true JP2511257Y2 (ja) 1996-09-25

Family

ID=31726710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9291U Expired - Fee Related JP2511257Y2 (ja) 1991-01-08 1991-01-08 荷電粒子集束装置

Country Status (1)

Country Link
JP (1) JP2511257Y2 (https=)

Also Published As

Publication number Publication date
JPH0494300U (https=) 1992-08-17

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