JP2509909Y2 - タ―ボ分子ポンプ用ロ―タの構造 - Google Patents
タ―ボ分子ポンプ用ロ―タの構造Info
- Publication number
- JP2509909Y2 JP2509909Y2 JP1988125891U JP12589188U JP2509909Y2 JP 2509909 Y2 JP2509909 Y2 JP 2509909Y2 JP 1988125891 U JP1988125891 U JP 1988125891U JP 12589188 U JP12589188 U JP 12589188U JP 2509909 Y2 JP2509909 Y2 JP 2509909Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- impeller
- molecular pump
- turbo molecular
- main shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988125891U JP2509909Y2 (ja) | 1988-09-26 | 1988-09-26 | タ―ボ分子ポンプ用ロ―タの構造 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988125891U JP2509909Y2 (ja) | 1988-09-26 | 1988-09-26 | タ―ボ分子ポンプ用ロ―タの構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0246093U JPH0246093U (US06521211-20030218-C00004.png) | 1990-03-29 |
JP2509909Y2 true JP2509909Y2 (ja) | 1996-09-04 |
Family
ID=31376899
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988125891U Expired - Lifetime JP2509909Y2 (ja) | 1988-09-26 | 1988-09-26 | タ―ボ分子ポンプ用ロ―タの構造 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2509909Y2 (US06521211-20030218-C00004.png) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61107285A (ja) * | 1984-10-31 | 1986-05-26 | 財団法人鉄道総合技術研究所 | デイスプレイ表示制御方式 |
JPS6371492U (US06521211-20030218-C00004.png) * | 1986-10-28 | 1988-05-13 |
-
1988
- 1988-09-26 JP JP1988125891U patent/JP2509909Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0246093U (US06521211-20030218-C00004.png) | 1990-03-29 |
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