JP2509909Y2 - タ―ボ分子ポンプ用ロ―タの構造 - Google Patents

タ―ボ分子ポンプ用ロ―タの構造

Info

Publication number
JP2509909Y2
JP2509909Y2 JP1988125891U JP12589188U JP2509909Y2 JP 2509909 Y2 JP2509909 Y2 JP 2509909Y2 JP 1988125891 U JP1988125891 U JP 1988125891U JP 12589188 U JP12589188 U JP 12589188U JP 2509909 Y2 JP2509909 Y2 JP 2509909Y2
Authority
JP
Japan
Prior art keywords
rotor
impeller
molecular pump
turbo molecular
main shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988125891U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0246093U (US06521211-20030218-C00004.png
Inventor
幸夫 村井
康 秋山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP1988125891U priority Critical patent/JP2509909Y2/ja
Publication of JPH0246093U publication Critical patent/JPH0246093U/ja
Application granted granted Critical
Publication of JP2509909Y2 publication Critical patent/JP2509909Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1988125891U 1988-09-26 1988-09-26 タ―ボ分子ポンプ用ロ―タの構造 Expired - Lifetime JP2509909Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988125891U JP2509909Y2 (ja) 1988-09-26 1988-09-26 タ―ボ分子ポンプ用ロ―タの構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988125891U JP2509909Y2 (ja) 1988-09-26 1988-09-26 タ―ボ分子ポンプ用ロ―タの構造

Publications (2)

Publication Number Publication Date
JPH0246093U JPH0246093U (US06521211-20030218-C00004.png) 1990-03-29
JP2509909Y2 true JP2509909Y2 (ja) 1996-09-04

Family

ID=31376899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988125891U Expired - Lifetime JP2509909Y2 (ja) 1988-09-26 1988-09-26 タ―ボ分子ポンプ用ロ―タの構造

Country Status (1)

Country Link
JP (1) JP2509909Y2 (US06521211-20030218-C00004.png)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107285A (ja) * 1984-10-31 1986-05-26 財団法人鉄道総合技術研究所 デイスプレイ表示制御方式
JPS6371492U (US06521211-20030218-C00004.png) * 1986-10-28 1988-05-13

Also Published As

Publication number Publication date
JPH0246093U (US06521211-20030218-C00004.png) 1990-03-29

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