JP2509303Y2 - Light section microscope - Google Patents

Description

[Detailed description of the device]

[0001]

BACKGROUND OF THE INVENTION The present invention is designed to project a slit light (optical thin light beam) obliquely onto a measurement surface of an object to be measured so that the surface has a shape similar to that of the above-mentioned surface. I got a light section image as if I cut the
The present invention relates to a light-sectioning microscope for measuring minute irregularities on a measurement surface and depths of steps.

[0002]

2. Description of the Related Art Conventionally, an optical system for projecting slit light 1 as shown in FIG. 7 and a non-inverted light section image 3 as shown in FIG.
An optical cutting microscope as shown in the basic diagram of FIG. 8 is known, which is provided with the observation optical system described above in a state where the optical axes of the objective lenses of these systems intersect on the measurement surface 7. (See Japanese Utility Model Publication No. 3-36882, Japanese Patent Publication No. 53-23094 and Japanese Patent Publication No. 53-23095)

[0003]

The light-sectioning microscope described in the above-mentioned prior art is intended to measure only the light-sectioning image 8 which is not inverted and to measure the minute unevenness of the measurement surface and the depth height of the step. Therefore, when observing or measuring a step having an extremely low height, the magnification of the objective lens is increased so that the step is performed within a limited small field of view.

An object of the present invention is to provide a novel light-sectioning microscope which is devised so that a horizontal image can be magnified twice and observation / measurement can be performed without changing the magnification of the objective lens or the width of the visual field. To do.

[0005]

In order to achieve the above object, the light-sectioning microscope according to the present invention follows the surface of the measurement surface by projecting slit light obliquely onto the measurement surface of the measurement object. In a light-sectioning microscope that obtains a non-inverted light-section image that exhibits a shape and measures the depth and height of minute irregularities and steps on the measurement surface, the optical system that obtains the inverted light-section image and the non-inverted light And an optical system for setting the cut image and the inverted light cut image in a laterally adjacent state.

[0006]

Since the present invention is constructed as described above, the non-inverted light-section image 3 and the inverted light-section image 9 as shown in FIGS. 5 and 6 are arranged side by side (double the width). It is possible to obtain the field of view in the enlarged state). The adjacent horizontal images are moved to the left and right by the fine vertical movement of the entire optical device to be aligned with the measurement reference line 10.

[0007]

[Effects of the Invention] The light-sectioning microscope according to the present invention is capable of observing and measuring by enlarging the horizontal by 2 times without changing the magnification of the objective lens and the width of the field of view. It is extremely low and shallow. It is convenient for observing and measuring irregularities and steps, and is advantageous for highly accurate measurement.

[0008]

In the embodiment shown in the drawings, an optical system 2 for projecting slit light 1 and an optical system 4 for observing a light section image 3 which is not inverted and an inverted light section image 9 which will be described later are provided in both systems 2. A function of forming a light-sectioning microscope body 8 provided such that the optical axes of the objective lenses 5 and 6 of 4 intersect on the measurement surface 7 and obtaining an inverted light-sectioning image 9 on the observation optical system 4. Further, the auxiliary optical system 11 having the function of bringing the non-inverted light section image 3 and the reversed light section image 9 into the adjacent horizontal alignment state is installed.

2 to 4 show the above-mentioned auxiliary optical system, respectively, and show the optical axis 12 of the non-inverted light-section image 3,
It has an optical axis 13 of the inverted light section image 9 and is composed of a prism and a half mirror.

In the figure, reference numeral 15 is an eyepiece lens, 16 is a lamp, 17 is a slit plate, 18 is an object to be measured, and 19 is a visual field.

[Brief description of drawings]

FIG. 1 is a basic diagram of an embodiment of the present invention.

FIG. 2 is a configuration diagram of an auxiliary optical system.

FIG. 3 is a configuration diagram of another auxiliary optical system.

FIG. 4 is a configuration diagram of still another auxiliary optical system.

FIG. 5 is a perspective view of an embodiment of the present invention.

FIG. 6 is a field diagram of another auxiliary optical system.

FIG. 7 is an explanatory diagram showing how slit light strikes.

FIG. 8 is a conventional basic diagram.

FIG. 9 is a view of a conventional example.

[Explanation of symbols]

 1 Slit light 2 Optical system for projecting light 3 Non-inverted light section image 4 Observation optical system 5 Objective lens 6 Objective lens 7 Measurement surface 8 Microscope body 9 Inverted light section image 10 Measurement reference line 11 Auxiliary optical system 12 Optical axis 13 Optical axis 15 Eyepiece 16 Lamp 17 Slit plate 18 Measured object 19 Field of view

Claims (1)

(57) [Scope of utility model registration request] 1. A non-inverted light-section image having a shape conforming to the surface of the measurement surface is obtained by projecting slit light obliquely onto the measurement surface of the object to be measured, whereby minute irregularities on the measurement surface are obtained. , An optical system for obtaining an inverted light-section image in a light-section microscope for measuring depth heights such as steps,
A light-sectioning microscope having an optical system in which a non-inverted light-sectioned image and an inverted light-sectioned image are arranged in a horizontal row adjacent to each other.