JP2506261Y2 - Degassed water production equipment - Google Patents

Degassed water production equipment

Info

Publication number
JP2506261Y2
JP2506261Y2 JP257392U JP257392U JP2506261Y2 JP 2506261 Y2 JP2506261 Y2 JP 2506261Y2 JP 257392 U JP257392 U JP 257392U JP 257392 U JP257392 U JP 257392U JP 2506261 Y2 JP2506261 Y2 JP 2506261Y2
Authority
JP
Japan
Prior art keywords
water
line
vacuum pump
separation tank
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP257392U
Other languages
Japanese (ja)
Other versions
JPH0560584U (en
Inventor
讓 小原
寿恵 小山
林 山谷
Original Assignee
アクアス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アクアス株式会社 filed Critical アクアス株式会社
Priority to JP257392U priority Critical patent/JP2506261Y2/en
Publication of JPH0560584U publication Critical patent/JPH0560584U/en
Application granted granted Critical
Publication of JP2506261Y2 publication Critical patent/JP2506261Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
  • Physical Water Treatments (AREA)
  • Removal Of Specific Substances (AREA)

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】本考案は脱気水を製造するための
装置に関し、特にボイラ用水、化学反応用原料水などと
して用いられる脱酸素水の製造に適するユニット型の脱
気水製造装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing deaerated water, and more particularly to a unit type deaerated water producing apparatus suitable for producing deoxygenated water used as boiler water, raw water for chemical reaction, etc. .

【0002】[0002]

【従来の技術】従来からボイラ給水用軟水、食品製造用
水や化学反応用原料水などの中に含まれる酸素が装置の
腐食や発錆を促進し、或いは化学反応における有害な副
反応を起こす原因となることが知られている。そして酸
素に起因する種々の障害を除くために、用水に脱酸素剤
を添加する化学的処理方法や、或いは減圧処理して水中
の酸素を揮発除去する物理的処理方法などが行われてい
る。
2. Description of the Related Art Conventionally, oxygen contained in soft water for boiler feed water, water for food production, raw water for chemical reaction, etc. promotes corrosion and rusting of equipment or causes harmful side reactions in chemical reactions. It is known that In order to eliminate various obstacles caused by oxygen, a chemical treatment method of adding an oxygen scavenger to the water, or a physical treatment method of decompressing oxygen in the water by performing a reduced pressure treatment is performed.

【0003】ところでこの物理的処理方法は、高度の脱
酸素には相等量のエネルギーを必要とする不利があるが
水中の不純物を増加させないという利点があり、性能の
優れた気体透過膜が開発されていることもあって比較的
に小型な装置が開発され、連続的な脱気水の製造に利用
されるに到っている。こうした用水の脱気装置としては
例えば図2に示すように構成された装置があるが、これ
は多数の中空糸を用いた脱気モジュール1と水封型回転
式真空ポンプ2とを備えていて、中空糸内を通過する水
の中の酸素を中空糸膜を通して外側から吸引し、真空ポ
ンプ2の封水とともに排出するようになっている。
By the way, this physical treatment method has the disadvantage of requiring an equivalent amount of energy for high-level deoxidation, but has the advantage of not increasing impurities in water, and a gas-permeable membrane having excellent performance has been developed. Therefore, a relatively small device has been developed and is being used for continuous production of degassed water. An example of such a water degassing device is a device configured as shown in FIG. 2, which is equipped with a degassing module 1 using a large number of hollow fibers and a water-sealing rotary vacuum pump 2. The oxygen in the water passing through the hollow fiber is sucked from the outside through the hollow fiber membrane and is discharged together with the sealing water of the vacuum pump 2.

【0004】このような脱気装置に用いられる真空ポン
プとしては、水蒸気や水滴を含んだ気体でも支障なく吸
引でき、ポンプ内部に摩擦部分がなくて構造が簡単であ
り、脈動が少なくまた封水によりポンプが冷却されるの
で長時間の連続運転に適するところから、ナッシュ・ポ
ンプなどの水封型回転式真空ポンプが好んで使用されて
いる。ところでこのようなポンプの封水は、排気と共に
一部が排出されるので定常的に補給することが必要であ
り、またそのことによってポンプの冷却がより効果的に
なっているものでもある。
As a vacuum pump used in such a deaerator, even a gas containing water vapor or water droplets can be sucked without any trouble, and there is no friction part inside the pump, so that the structure is simple, there is little pulsation, and water is sealed. The water-sealed rotary vacuum pump such as the Nash pump is preferably used because it is suitable for continuous operation for a long time because the pump cools. By the way, a part of the water for sealing the pump is discharged together with the exhaust gas, so that it is necessary to constantly supply the water, and the cooling of the pump is more effective.

【0005】上記の脱気装置においては、ポンプの封水
を供給する封水供給用配管hを別途に設けなければなら
ない。そこで図3に示すように、真空ポンプ2の封水を
処理原水から分岐して利用したのち、脱気モジュール1
から吸引されたガスとともに排出するようにした装置も
提案されている。この装置においては封水供給用配管を
別途に用意する必要はないが、排出された封水は温度が
高くなっているために再循環使用するには支障があり、
また量も少なくないので不経済である他、排水路iが必
要となるなどの不利もあった。
In the above deaerator, a water supply pipe h for supplying water for the pump must be separately provided. Therefore, as shown in FIG. 3, the sealing water of the vacuum pump 2 is branched from the treated raw water and used, and then the degassing module 1 is used.
A device has also been proposed in which the gas is sucked out together with the gas. In this device, it is not necessary to separately prepare a pipe for supplying sealing water, but since the temperature of the discharged sealing water is high, it is difficult to recycle it.
Moreover, since the amount is not small, it is uneconomical and also has a disadvantage that the drainage channel i is required.

【0006】また一方、図4や図5に示すように、排出
された封水を一旦分離槽3に回収してガスを分離したの
ち、真空ポンプ2の能力を高めるために冷却装置14や
熱交換器15を用いて冷却したうえ、再び真空ポンプ2
の封水として使用する装置も提案されている。しかし、
このように封水を循環使用すると溶解物の濃縮によって
各種の障害が発生する恐れがあり、冷却装置の他にも濃
縮排水を処分するための設備が必要となる問題があっ
た。
On the other hand, as shown in FIGS. 4 and 5, after the discharged sealed water is once collected in the separation tank 3 to separate the gas, a cooling device 14 and a heat generator are provided to enhance the capacity of the vacuum pump 2. After cooling using the exchanger 15, the vacuum pump 2 is reused.
A device for use as a water seal has also been proposed. But,
When the sealed water is circulated in this way, various problems may occur due to the concentration of the dissolved matter, and there is a problem that a facility for disposing the concentrated waste water is required in addition to the cooling device.

【0007】[0007]

【考案が解決しようとする課題】このような事情の下
で、本考案は真空ポンプの封水を処理するための特別な
装置を必要とせず、水の使用量を節減すると共に脱気効
率を高めることができる、改良された脱気水製造装置を
提供しようとするものである。
Under such circumstances, the present invention does not require a special device for treating the sealing water of the vacuum pump, which reduces the amount of water used and improves the degassing efficiency. It is an object of the present invention to provide an improved degassed water production apparatus that can be increased.

【0008】[0008]

【課題を解決するための手段】上記のような本考案の目
的は、気体透過膜式脱気モジュールと、水封式回転翼型
真空ポンプと、ポンプ封水とガスとの分離槽と、原水受
入口から原水逆止弁、給水ライン分岐部、回収水ライン
分岐部及び主弁を順に経て該脱気モジュールの入口に通
ずる原水ラインと、該脱気モジュールの出口から処理水
送出口に通ずる処理水ラインと、該給水ライン分岐部か
ら緩衝水ライン分岐部及び流量調整弁を順に経て該真空
ポンプへ封水を供給する給水ラインと、該脱気モジュー
ルから制御弁を経て該真空ポンプ入口に通ずる吸気ライ
ンと、該真空ポンプ出口から該分離槽に通ずる吐出ライ
ンと、該緩衝水ライン分岐部から分離槽の水位調整弁を
経て分離槽に通ずる緩衝水ラインと、該分離槽から回収
水ポンプ及び回収水逆止弁を経て該回収水ライン分岐部
に通ずる回収水ラインとから構成された脱気水製造装置
によって達成することができる。
The object of the present invention as described above is to provide a gas permeable membrane type degassing module, a water seal type rotary vane type vacuum pump, a pump sealing water / gas separation tank, and raw water. A raw water line leading from the inlet to the inlet of the degassing module through the raw water check valve, the water supply line branch, the recovered water line branch, and the main valve, and the treatment from the outlet of the degassing module to the treated water outlet. A water line, a water supply line for branching from the water supply line branch to a buffer water line branch and a flow rate adjusting valve to supply sealing water to the vacuum pump, and a degassing module through a control valve to the vacuum pump inlet. An intake line, a discharge line communicating from the vacuum pump outlet to the separation tank, a buffer water line communicating from the buffer water line branching portion to the separation tank via a water level adjusting valve of the separation tank, a recovery water pump from the separation tank, and Recovery It can be via the check valve accomplished by degassing water producing device composed of a recovered water line leading to the recovery water line bifurcation.

【0009】[0009]

【作用】本考案の脱気水製造装置は脱気するための原水
の一部を水封式回転翼型真空ポンプ封水用の給水として
利用し、ポンプから温まって排出された封水はガスを分
離したのちに回収水ライン分岐部から原水に戻すように
したものであり、原水ライン中の給水ライン分岐部は回
収水ライン分岐部よりも上流にあるから、温まった封水
が逆流して真空ポンプ用の給水に混合することはなく、
すべて脱気モジュールへ供給される原水の温度を高める
に利用される。従って、原水の一部を真空ポンプ用封水
として利用しながら排水を発生することがない。
The function of the degassed water production apparatus of the present invention is to use a part of the raw water for degassing as water supply for sealing the water-sealed rotary vane type vacuum pump. After the water is separated, it is returned to the raw water from the branch part of the recovered water line.Since the branch part of the water supply line in the raw water line is upstream of the branch part of the recovered water line, warm sealed water flows backward. Not mixed with the water supply for the vacuum pump,
All are used to raise the temperature of the raw water supplied to the degassing module. Therefore, drainage is not generated while using part of the raw water as sealing water for the vacuum pump.

【0010】[0010]

【実施例】本考案の脱気水製造装置の例を図1に示す。
図において、1は中空糸型の脱気モジュール、2はナッ
シュ型の水封式回転翼真空ポンプ、3は排出封水からガ
スを分離するための分離槽、4はガスを分離した封水を
送出する回収水ポンプ、5、6、7はそれぞれ流量調整
弁、8は分離槽3へ緩衝水を補給するための水位調整
弁、9は原水逆止弁、10は回収水逆止弁、11は主
弁、12、13はそれぞれ制御弁である。
EXAMPLE An example of the degassed water producing apparatus of the present invention is shown in FIG.
In the figure, 1 is a hollow fiber type degassing module, 2 is a Nash type water-sealed rotary blade vacuum pump, 3 is a separation tank for separating gas from discharged sealed water, and 4 is sealing water from which gas has been separated. Recovered water pumps to be sent out, 5, 6 and 7 are flow rate adjusting valves respectively, 8 is a water level adjusting valve for supplying buffer water to the separation tank 3, 9 is a raw water check valve, 10 is a recovered water check valve, 11 Is a main valve, and 12 and 13 are control valves.

【0011】また、aは原水受入口Aから原水逆止弁
9、給水ライン分岐部B、回収水ライン分岐部C、主弁
11、流量調整弁5を順に経て脱気モジュール1に到る
原水ラインであり、給水ライン分岐部Bと回収水ライン
分岐部Cとは少なくも3cm、好ましくは7cm以上離れて
いるのがよい。またbは脱気モジュール1から処理水送
出口Dに到る処理水ライン、cは給水ライン分岐部Bか
ら緩衝水ライン分岐部E、流量調整弁6、制御弁12を
経て真空ポンプ2へ封水を供給する給水ライン、dは脱
気モジュール1の中空糸膜の外側から制御弁13を経て
真空ポンプ2に到る吸気ライン、eは真空ポンプ2から
分離槽3に到る吐出ライン、fは緩衝水ライン分岐部E
から水位調整弁8を経て分離槽3に到る緩衝水ライン、
gは分離槽3から回収水ポンプ4、回収水逆止弁10、
流量調整弁7を経て回収水ライン分岐部Cに到る回収水
ラインである。
Further, a is raw water which reaches the degassing module 1 from the raw water inlet A through the raw water check valve 9, the water supply line branch portion B, the recovered water line branch portion C, the main valve 11 and the flow rate adjusting valve 5 in this order. It is a line, and the water supply line branch portion B and the recovered water line branch portion C are separated by at least 3 cm, preferably 7 cm or more. In addition, b is a treated water line from the degassing module 1 to the treated water outlet D, and c is a seal from the water supply line branch B to the buffer water line branch E, the flow rate adjusting valve 6 and the control valve 12 to the vacuum pump 2. A water supply line for supplying water, d is an intake line from the outside of the hollow fiber membrane of the degassing module 1 to the vacuum pump 2 via the control valve 13, e is a discharge line from the vacuum pump 2 to the separation tank 3, and f Is the buffer water line branch E
From the water level adjusting valve 8 to the separation tank 3,
g is the separation tank 3, the recovered water pump 4, the recovered water check valve 10,
It is a recovered water line that reaches the recovered water line branch portion C through the flow rate adjusting valve 7.

【0012】このような本考案の脱気水製造装置におい
て、例えば流量調整弁5を100 l/minに調節し、流量
調整弁6を4 l/minに調節し、更に流量調整弁7を5 l
/minに調節して、制御弁12を開いて真空ポンプ2に封
水を供給する。次いで真空ポンプ2を運転し、主弁11
を開いて脱気モジュール1に100 l/minで原水を供給
すると共に、制御弁13を開いて脱気モジュール1の中
空糸の外側を減圧し、原水の脱気を開始する。
In the degassed water producing apparatus of the present invention, for example, the flow rate adjusting valve 5 is adjusted to 100 l / min, the flow rate adjusting valve 6 is adjusted to 4 l / min, and the flow rate adjusting valve 7 is changed to 5 l / min. l
The pressure is adjusted to / min, the control valve 12 is opened, and the sealing water is supplied to the vacuum pump 2. Next, the vacuum pump 2 is operated, and the main valve 11
The raw water is supplied to the degassing module 1 at 100 l / min, and the control valve 13 is opened to depressurize the outside of the hollow fiber of the degassing module 1 to start degassing the raw water.

【0013】こうすると脱気されたガスと共に真空ポン
プ2から排出された封水は吐出ラインeを経て分離槽3
に入ってガスを分離し、回収水ポンプ4により回収水ラ
インgを経て回収水ライン分岐部Cか2原水ラインaに
戻り、原水と共に脱気モジュール1に供給される。ここ
で給水ライン分岐部Bは回収水ライン分岐部Cより上流
側にあるから、給水ライン分岐部Bから真空ポンプ2に
供給される封水の温度は低いままであり、温度が上昇し
た回収水は脱気モジュール1に供給される原水の温度だ
けを高めることとなる。なお、分離槽3中の水位が低く
なったときには水位調整弁8の作用により緩衝水ライン
fから緩衝水が補給され、水位が低くならないときは補
給が停止されるから、回収水ポンプ4の運転に支障が生
ずることがなく、また封水を無駄に消費することもな
い。
In this way, the sealing water discharged from the vacuum pump 2 together with the degassed gas passes through the discharge line e and the separation tank 3
After entering, the gas is separated and returned to the recovered water line branching section C or the 2 raw water line a by the recovered water pump 4 and to the degassing module 1 together with the raw water. Here, since the water supply line branch portion B is located upstream of the recovered water line branch portion C, the temperature of the sealing water supplied from the water supply line branch portion B to the vacuum pump 2 remains low and the recovered water whose temperature has risen. Will raise only the temperature of the raw water supplied to the degassing module 1. In addition, when the water level in the separation tank 3 becomes low, the buffer water is replenished from the buffer water line f by the action of the water level adjusting valve 8, and when the water level does not become low, the replenishment is stopped. It does not cause any problems and does not waste the sealed water.

【0014】[0014]

【考案の効果】本考案の脱気水製造装置は、原水から分
岐して利用した水封式回転翼型真空ポンプの封水を脱気
モジュールの入口側に戻すので、封水の供給や排水処理
のための特別な設備が不要であるのみならず、水の使用
量が節減されるという効果がある。
[Effect of the Invention] The deaerated water production apparatus of the present invention returns the sealed water of the water-sealed rotary vane type vacuum pump used by branching from the raw water to the inlet side of the degassing module. Not only is there no need for special equipment for treatment, but the water consumption is also reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本考案の脱気水製造装置の例の構成を示すフロ
ーシートである。
FIG. 1 is a flow sheet showing the configuration of an example of a degassed water production apparatus of the present invention.

【図2】従来の脱気水製造装置の例の構成を示すフロー
シートである。
FIG. 2 is a flow sheet showing the configuration of an example of a conventional degassed water production apparatus.

【図3】従来の脱気水製造装置の他の例の構成を示すフ
ローシートである。
FIG. 3 is a flow sheet showing the configuration of another example of the conventional degassed water producing apparatus.

【図4】従来の脱気水製造装置のまた別な例の構成を示
すフローシートである。
FIG. 4 is a flow sheet showing the configuration of another example of the conventional degassed water producing apparatus.

【図5】従来の脱気水製造装置の更に他の例の構成を示
すフローシートである。
FIG. 5 is a flow sheet showing the configuration of still another example of the conventional degassed water producing apparatus.

【符号の説明】[Explanation of symbols]

1 脱気モジュール 2 真空ポンプ 3 分離槽 4 回収水ポンプ 5、6、7 流量調整弁 8 水位調整弁 9 原水逆止弁 10 回収水逆止弁 11 主弁 12、13 制御弁 14 冷却装置 15 熱交換器 A 原水受入 B 給水ライン分岐部 C 回収水ライン分岐部 D 処理水送出口 E 緩衝水ライン分岐部 a 原水ライン b 処理水ライン c 給水ライン d 吸気ライン e 吐出ライン f 緩衝水ライン g 回収水ライン h 封水供給用配管 i 排水路 1 Deaeration Module 2 Vacuum Pump 3 Separation Tank 4 Recovery Water Pump 5, 6, 7 Flow Control Valve 8 Water Level Control Valve 9 Raw Water Check Valve 10 Recovery Water Check Valve 11 Main Valve 12, 13 Control Valve 14 Cooling Device 15 Heat Exchanger A Raw water reception B Water supply line branch C Recovered water line branch D Treated water outlet E Buffer water line branch a Raw water line b Treated water line c Water supply line d Intake line e Discharge line f Buffer water line g Recovered water Line h Sealing water supply pipe i Drainage channel

Claims (2)

(57)【実用新案登録請求の範囲】(57) [Scope of utility model registration request] 【請求項1】 気体透過膜式脱気モジュールと、水封式
回転翼型真空ポンプと、ポンプ封水とガスとの分離槽
と、原水受入口から原水逆止弁、給水ライン分岐部、回
収水ライン分岐部及び主弁を順に経て該脱気モジュール
の入口に通ずる原水ラインと、該脱気モジュールの出口
から処理水送出口に通ずる処理水ラインと、該給水ライ
ン分岐部から緩衝水ライン分岐部及び流量調整弁を順に
経て該真空ポンプへ封水を供給する給水ラインと、該脱
気モジュールから制御弁を経て該真空ポンプ入口に通ず
る吸気ラインと、該真空ポンプ出口から該分離槽に通ず
る吐出ラインと、該緩衝水ライン分岐部から分離槽の水
位調整弁を経て分離槽に通ずる緩衝水ラインと、該分離
槽から回収水ポンプ及び回収水逆止弁を経て該回収水ラ
イン分岐部に通ずる回収水ラインとから構成されたこと
を特徴とする脱気水製造装置。
1. A gas-permeable membrane type deaeration module, a water-sealed rotary vane type vacuum pump, a separation tank for pump water and gas, a raw water inlet valve, a raw water check valve, a water supply line branching section, and a recovery unit. A raw water line leading to the inlet of the degassing module through a water line branching part and a main valve in sequence, a treated water line leading from the outlet of the degassing module to a treated water outlet, and a buffer water line branching from the water supply line branching part Water supply line for supplying sealing water to the vacuum pump through the flow section and the flow rate adjustment valve in order, an intake line from the degassing module to the vacuum pump inlet via the control valve, and a vacuum pump outlet to the separation tank. A discharge line, a buffer water line from the buffer water line branch to the separation tank via the water level adjusting valve of the separation tank, and a recovery water pump and a recovery water check valve from the separation tank to the recovery water line branch. Times A degassed water production apparatus comprising a water collection line.
【請求項2】 給水ライン分岐部と回収水ライン分岐部
とが少なくとも3cm離れている請求項1記載の脱気水製
造装置。
2. The degassed water producing apparatus according to claim 1, wherein the water supply line branch and the recovered water line branch are separated from each other by at least 3 cm.
JP257392U 1992-01-28 1992-01-28 Degassed water production equipment Expired - Lifetime JP2506261Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP257392U JP2506261Y2 (en) 1992-01-28 1992-01-28 Degassed water production equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP257392U JP2506261Y2 (en) 1992-01-28 1992-01-28 Degassed water production equipment

Publications (2)

Publication Number Publication Date
JPH0560584U JPH0560584U (en) 1993-08-10
JP2506261Y2 true JP2506261Y2 (en) 1996-08-07

Family

ID=11533120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP257392U Expired - Lifetime JP2506261Y2 (en) 1992-01-28 1992-01-28 Degassed water production equipment

Country Status (1)

Country Link
JP (1) JP2506261Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5474610B2 (en) * 2010-03-03 2014-04-16 アクアス株式会社 Equipment for supplying oxygen and decarbonated water for boilers

Also Published As

Publication number Publication date
JPH0560584U (en) 1993-08-10

Similar Documents

Publication Publication Date Title
US4434057A (en) Water purification utilizing plural semipermeable membrane stages
JP3787681B2 (en) Seawater desalination method by reverse osmosis
US5297389A (en) Method and apparatus for maintaining a required temperature differential in vacuum deaerators
JPH0555761B2 (en)
JP2506261Y2 (en) Degassed water production equipment
CN211226612U (en) Integrated treatment device for removing hydrogen sulfide in landfill leachate
CN111186949A (en) Multistage flash evaporation seawater desalination and pressure delay permeation salt difference power generation coupling system and operation method
KR20150060936A (en) Gas and steam turbine system having feed-water partial-flow degasser
JPH10174803A (en) Removing method of gas in oil
CN106996557A (en) A kind of power plant's drain recovery to oxygen-eliminating device system
JPS61178088A (en) Apparatus for making pure water
TW428176B (en) Boiling water type reactor
JPH05168864A (en) Membrane filter
CN220238251U (en) Reverse osmosis water purification concentrated fresh water double circulation system
SU1084530A1 (en) Device for degassing softened water
JP4310241B2 (en) System chemical recovery method and recovery device
JP3129965B2 (en) Degassing device
CN217613080U (en) Recovery unit of excessive thing in polymerization inhibitor production process
JP2013536754A (en) Seawater desalination system and method
JPS5932990A (en) Apparatus for removal of dissolved oxygen in reverse- osmotic desalinator
CN220802672U (en) Forward osmosis membrane separation equipment for high-pressure gas-driven negative pressure separation
CN211025732U (en) Cooling water collecting and guiding system for recovering flue gas moisture behind wet cooling unit desulfurizing tower based on microfiltration membrane
JPS6136474B2 (en)
SE8302438L (en) PLANT FOR WASTE WATER TREATMENT
CN208532513U (en) A kind of high organic, high COD zero discharge waste-water unit equipment of processing

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19960312

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term