JP2504554Y2 - Polishing cloth peeling jig - Google Patents

Description

[Detailed description of the device]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for removing a polishing cloth attached to a polishing platen for polishing semiconductor wafers and the like.

[0002]

2. Description of the Related Art In the case of polishing a semiconductor wafer, a polishing cloth is attached and the wafer is pressed against a rotating polishing platen, and the slurry is mixed with grains and a working liquid to finish the wafer to a high mirror surface. . If the polishing cloth moves during the polishing work or if the polishing cloth partially shifts to cause wrinkles, normal polishing of the semiconductor wafer cannot be performed,
Since it becomes a defective product, a strong adhesive is applied to the back surface of the polishing cloth and attached to the polishing platen. Since the polishing cloth is gradually worn away as the semiconductor wafer is polished, it needs to be replaced after a certain period of use. When exchanging
Although it is necessary to remove the worn-out polishing cloth from the polishing platen, conventionally, the polishing cloth is manually peeled off from the outer periphery of the circular polishing platen by hand.

[0003]

The polishing cloth is attached to the polishing platen with a strong adhesive, and since the polishing platen is circular, the burden on the fingertips when peeling it off is large. In addition, since the fingertips may slip and fall backward or hurt the back during the peeling work, the work of peeling the polishing cloth is physically tired and dangerous. Therefore, the present invention focuses on the above-mentioned conventional problems, and an object thereof is to provide a polishing cloth peeling jig which can easily peel the polishing cloth from the polishing platen without physical fatigue or danger.

[0004]

In order to achieve the above object, a polishing cloth stripping jig according to the present invention has two arms that stand up from both left and right ends of a rear portion of a substrate and extend forward. It is composed of a sandwiching body having a rope guide portion at the front end and a sandwiching piece provided between two arms of the sandwiching body, and the rear end of the sandwiching piece is rotated around the arm rear portion of the sandwiching body as a fulcrum. It is freely pivotally mounted, and a rope connecting portion protruding upward is provided at the front end of the sandwiching piece, and the horizontal distance between the fulcrum of the sandwiching piece and the rope connecting portion is
Shorter than the horizontal distance between the fulcrum and the rope guide portion of the sandwiching body, the vertical distance between the fulcrum of the sandwiching piece and the bottom surface is less than the vertical distance between the fulcrum and the top surface of the sandwiching body even at the maximum, The rope connecting portion of the holding piece is positioned relatively higher than the rope guide portion of the holding body.

[0005]

According to the above construction, the sandwiching piece is rotatably pivoted on the rear part of the two arms that stand up from both left and right ends of the rear part of the substrate and extend forward, and the vertical distance between the fulcrum of the sandwiching piece and the bottom surface is set to the above-mentioned value. Since the distance is less than the vertical distance between the fulcrum and the upper surface of the substrate of the sandwiching body, an appropriate gap is formed between the upper surface of the substrate of the sandwiching body and the bottom surface of the sandwiching piece. Therefore, the end of the polishing cloth inserted into the sandwiching body through the gap between the substrate of the sandwiching body and the arm can be sandwiched by the upper surface of the substrate of the sandwiching body and the bottom surface of the sandwiching piece. The horizontal distance between the fulcrum of the sandwiching piece and the rope connecting portion is shorter than the horizontal distance between the fulcrum and the rope guide portion of the sandwiching body, and the rope connecting portion of the sandwiching piece is connected to the rope guiding portion of the sandwiching body. Since it is assumed to be positioned higher than the rope part, one end is attached to the rope attachment part and the other end of the rope that passes through the lower side of the rope guide part is pulled by a winch or the like, the clamping piece is pressed downward. As a result, the polishing cloth clamping force is increased. Then, the polishing cloth can be easily peeled off from the polishing platen by pulling the holding body by the winch via the rope.

[0006]

Embodiments of the polishing cloth peeling jig according to the present invention will be described below with reference to the drawings. 1 is a perspective view of the polishing cloth peeling jig, FIG. 2 is a plan view thereof, FIG. 3 is a sectional view taken along line AA of FIG. 2, and FIG. 4 is a sectional view taken along line BB of FIG. As shown in FIG. 1, the holding body 1 has a substantially U-shaped side surface by a substrate 1a and two arms 1b that stand up from both left and right ends of the rear portion of the substrate 1a and extend forward. The front end of the substrate 1a has an arc-shaped cross section. A pin 2 is inserted into the rear portion of the two arms 1b, and a holding piece 3 provided between the arms 1b has a rear end pivotally attached by the pin 2. Further, the front portions of the two arms 1b are bent obliquely downward, and a rope guide pin 4 is attached to the front ends thereof.

As shown in FIG. 3, the fulcrum of rotation of the sandwiching piece 3, that is, the vertical distance between the center of the pin 2 and the bottom surface 3a of the sandwiching piece 3 is maximum even at the fulcrum and the upper surface 1 of the substrate 1a of the sandwiching body 1.
It is shorter than the vertical distance from c, so that the sandwiching piece 3 can rotate without interfering with the substrate 1a. The sandwiching piece 3
A forked portion projecting upward is formed at the front end of the rope, and the other end of the rope 6 whose one end is connected to the rope connecting pin 5 inserted into this forked portion is below the rope guide pin 4. It is connected to a winch (not shown) through the side. The horizontal distance between the rotation fulcrum of the clamping piece 3 and the center of the rope connecting pin 5 is shorter than the horizontal distance between the fulcrum and the center of the rope guide pin 4, and the rope connecting point of the clamping piece 3 is connected. Wearing pin 5
Is provided at a position relatively higher than the rope guide pin 4 of the holding body 1.

Next, the polishing cloth peeling work performed by using the polishing cloth peeling jig of this embodiment will be described. First, the outer peripheral portion of the polishing cloth is partially peeled off from the polishing platen by hand, and then the polishing cloth peeling jig is placed on the polishing platen. Then, the holding piece 3 is lifted upward, the end of the polishing cloth that has been peeled off in advance is placed on the substrate 1a of the holding body 1, and the holding piece 3 is lowered. As a result, the end of the polishing cloth is sandwiched between the substrate 1a and the sandwiching piece 3. When the winch is driven in this state, the other end of the rope 6 is wound up on the winch as shown in FIG. 3, but the rope 6 is below the rope guide pin 4 provided at a position lower than the rope connecting pin 5. Since it passes through, the rope connecting pin 5 is pulled obliquely downward, and the holding piece 3 is pressed against the upper surface of the substrate 1a of the holding body 1. As the peeling resistance of the polishing cloth 7 increases, the winding force of the winch increases.
Along with this, the polishing cloth holding force of the jig also increases, and the jig crosses the polishing cloth 7 from the polishing surface plate 8 while riding on the polishing cloth 7.

By manually peeling off several points on the outer periphery of the polishing cloth, placing several main jigs on the polishing surface plate after peeling and pulling each with a winch, the polishing cloth can be peeled off more easily. You can Further, when the substrate upper surface and the lower surface of the sandwiching piece of the sandwiching body are provided with irregularities that engage with each other, the sandwiching force can be further increased.

[0010]

As described above, according to the present invention, a rope in which the end of the polishing cloth is sandwiched between the upper surface of the substrate of the sandwiching body and the lower surface of the sandwiching piece, and one end of which is connected to the front portion of the sandwiching piece. Since the polishing cloth peeling jig has a structure in which the gripping piece is pulled obliquely downward by the winch winding operation, the end of the polishing cloth is securely clamped by this jig, and the peeling resistance of the polishing cloth becomes large. The gripping force of the polishing cloth also increases. Therefore, the end of the polishing cloth does not come off from the jig, and the polishing cloth can be peeled off the polishing platen very easily and quickly. By using this jig, the operator can be relieved from the risk of physical fatigue and injury, and the time required for the polishing cloth peeling work can be greatly shortened. Further, the polishing cloth peeling jig according to the present invention can be widely used not only for the polishing cloth peeling work but also for the work of gripping and pulling the end portions of the sheets made of various cloths, rubbers, synthetic resins and the like. it can.

[Brief description of drawings]

FIG. 1 is a perspective view of a polishing cloth peeling jig.

FIG. 2 is a plan view of a polishing cloth peeling jig.

FIG. 3 is a sectional view taken along line AA of FIG. 2;

FIG. 4 is a sectional view taken along line BB of FIG. 3;

[Explanation of symbols]

 1 Clamping Body 1a Substrate 1b Arm 1c Top 2 Pins 3 Clamping Piece 3a Bottom 4 Rope Guide Pin 5 Rope Connecting Pin

Claims (1)

(57) [Scope of utility model registration request] 1. A holding body having two arms which stand up from both left and right ends of a rear portion of a substrate and extend forward, and a rope guide portion is provided at a front end of these arms, and between the two arms of the holding body. And a rope connecting portion projecting upward at the front end of the sandwiching piece. A rear end of the sandwiching piece is rotatably pivoted about a rear portion of the arm of the sandwiching body as a fulcrum. The horizontal distance between the fulcrum of the sandwiching piece and the rope connecting portion is shorter than the horizontal distance between the fulcrum and the rope guide portion of the sandwiching body, and the vertical distance between the fulcrum of the sandwiching piece and the bottom surface is The polishing is characterized in that the maximum distance is less than the vertical distance between the fulcrum and the upper surface of the substrate of the sandwiching body, and the rope connecting portion of the sandwiching piece is positioned relatively higher than the rope guide portion of the sandwiching body. Cross peeling jig.