JP2504059B2 - Electronic circuit package cooling structure - Google Patents

Electronic circuit package cooling structure

Info

Publication number
JP2504059B2
JP2504059B2 JP62157192A JP15719287A JP2504059B2 JP 2504059 B2 JP2504059 B2 JP 2504059B2 JP 62157192 A JP62157192 A JP 62157192A JP 15719287 A JP15719287 A JP 15719287A JP 2504059 B2 JP2504059 B2 JP 2504059B2
Authority
JP
Japan
Prior art keywords
cooling
integrated circuit
cooling plate
refrigerant
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62157192A
Other languages
Japanese (ja)
Other versions
JPS642397A (en
JPH012397A (en
Inventor
和彦 梅澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62157192A priority Critical patent/JP2504059B2/en
Publication of JPS642397A publication Critical patent/JPS642397A/en
Publication of JPH012397A publication Critical patent/JPH012397A/en
Application granted granted Critical
Publication of JP2504059B2 publication Critical patent/JP2504059B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73253Bump and layer connectors

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、大型の情報処理装置等の電子機器に使用さ
れる電子回路パッケージの冷却構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling structure for an electronic circuit package used in electronic equipment such as a large-sized information processing device.

(従来技術) 従来、この種の冷却構造としては、集積回路素子を搭
載した配線基板を複数枚架内に収容し、冷却ファンによ
る空気の強制対流を用いて冷却する方式が広く用いられ
ている。また近年、特に集積回路が大規模高集積化され
るに従い、素子性能を最大限に発揮させ高性能の装置を
実現するため、架内の素子実装方法も大幅に高密度化さ
れるようになったことから、空気より熱容量の大きな水
などの液体冷媒を集積回路素子の近傍に循環させかつ集
積回路素子のケースに金属製部品を接触させてその熱伝
導により冷媒に熱を伝え排熱する方法も用いられるよう
になっている。
(Prior Art) Conventionally, as a cooling structure of this type, a method of accommodating a plurality of wiring boards on which integrated circuit elements are mounted in a rack and cooling by using forced convection of air by a cooling fan is widely used. . Further, in recent years, especially as integrated circuits have become large-scale and highly integrated, in order to maximize the device performance and realize a high-performance device, the device mounting method in the rack has been significantly increased in density. Therefore, a liquid refrigerant such as water having a larger heat capacity than air is circulated in the vicinity of the integrated circuit element, and a metal part is brought into contact with the case of the integrated circuit element, and the heat is transferred to the refrigerant by the heat conduction to exhaust the heat. Is also being used.

その一例を第3図に示して説明すれば、この構造はプ
リント基板13上に、上面にヒートスプレッダー15を設け
たLSI14を複数搭載し、前記ヒートスプレッダー15を上
から押し付けて冷却する方式のものであって、コールド
プレート16には複数の水路17が設けられており、この水
路17に冷媒を流し、LSI14の温度を低く保つようにして
いる。ここで、LSI12の高さは、部品の寸法精度、取り
付けのばらつきやプリント基板のそり、うねり等により
必ずしも一平面上に揃うとは限らない。そこでコールド
プレート16のLSI14に押しつける面にサーマルペースト1
8をフィルム19にて封じこめて、その柔かさを利用して
高さのばらつきを吸収する構造にしている。コールドプ
レート16は回路パッケージの両面に設けられ、機械的に
固定されて押し付けることにより、フィルム19およびサ
ーマルペースト18が変形し、ヒートスプレッダー15に接
触して放熱される。LSI14にて発生した熱はフィルム19
に伝わり、さらにサーマルペースト18を介してコールド
プレート16から水路17を流れる水に放熱される。
An example of this structure is shown in FIG. 3. This structure is one in which a plurality of LSIs 14 each having a heat spreader 15 on the upper surface are mounted on a printed circuit board 13 and the heat spreader 15 is pressed from above to be cooled. In addition, the cold plate 16 is provided with a plurality of water channels 17, and the coolant is flowed through the water channels 17 to keep the temperature of the LSI 14 low. Here, the heights of the LSIs 12 are not necessarily aligned on one plane due to dimensional accuracy of components, variation in mounting, warpage, undulations, etc. of the printed circuit board. Therefore, the thermal paste 1 is applied to the surface of the cold plate 16 pressed against the LSI 14.
8 is sealed with film 19, and its softness is used to absorb the height variation. The cold plates 16 are provided on both sides of the circuit package, and the film 19 and the thermal paste 18 are deformed by being mechanically fixed and pressed, and contact the heat spreader 15 to radiate heat. The heat generated by LSI14 is film 19
Further, the heat is radiated from the cold plate 16 to the water flowing in the water channel 17 via the thermal paste 18.

(発明が解決しようとする問題点) 上述した従来の冷却構造のうち第1番目に述べた強制
空冷方式のものは、近年の電子機器の発熱密度の増加に
対応するため大風量化が進んでいるが、それに伴ない冷
却ファンによる騒音が問題化しており、冷却能力は限界
に達していると考えられる。また第2番目に述べた伝導
冷却方式では、LSIの高さのばらつきがある限度を超え
て第3図の例で述べたサーマルペーストのような材料で
は吸収しきれなくなると、LSIとコールドプレートとの
間の熱の伝わる系路に伝熱特性の悪い空気が介在するた
め冷却能力が低下し、LSIの信頼性に悪影響を及ぼす。
このためコンピュータの記憶装置のように標準品として
ケースに収められて供給されかつ大きさも一種類のみで
ない集積回路素子を多数使用して構成されるものに適用
することは難かしいという欠点があった。
(Problems to be Solved by the Invention) Of the above-described conventional cooling structures, the first type of forced air cooling system has been increased in air volume in order to cope with the recent increase in heat generation density of electronic devices. However, the noise from the cooling fan has become a problem with it, and it is considered that the cooling capacity has reached its limit. In addition, in the second conduction cooling method, if the height of the LSI exceeds a certain limit and the material such as the thermal paste described in the example of FIG. Since the air with poor heat transfer characteristics is present in the system where heat is transmitted between the two, the cooling capacity decreases and the reliability of the LSI is adversely affected.
For this reason, there is a drawback in that it is difficult to apply to a device such as a storage device of a computer, which is supplied as a standard product in a case and is configured by using a large number of integrated circuit elements which are not only one kind in size. .

(問題点を解決するための手段) 本発明の冷却構造は、複数個の集積回路素子を搭載し
た配線基板を複数枚収容する架と、両端に管を有する冷
却板およびこの冷却板複数枚と両端の管に二次冷媒を分
配する流路を形成するよう接合される少なくとも入口
側、出口側1本づつ計2本のヘッダから成る熱交換器と
を有し、前記架および熱交換器を、配線基板と冷却板と
が一定の間隔で交互に配列されるようケーシング内に固
定し、ケーシング内に絶縁性、不活性の一次冷媒を満た
し、集積回路素子で発生した熱が一次冷媒を介して冷却
板に伝わり、さらに冷却板内を伝導により伝わって二次
冷媒に排熱されるようにしたものである。
(Means for Solving Problems) A cooling structure of the present invention includes a rack for accommodating a plurality of wiring boards on which a plurality of integrated circuit elements are mounted, a cooling plate having tubes at both ends, and a plurality of the cooling plates. A heat exchanger comprising at least two headers, one at the inlet side and one at the outlet side, which are joined to each other so as to form a flow path for distributing the secondary refrigerant, to the tubes at both ends, , The wiring board and the cooling plate are fixed in the casing so as to be arranged alternately at a constant interval, the casing is filled with an insulating, inactive primary refrigerant, the heat generated in the integrated circuit element through the primary refrigerant Is transmitted to the cooling plate, and further, is transmitted through the inside of the cooling plate by conduction to be discharged to the secondary refrigerant.

(実施例) 次に、本発明を、図面を参照して実施例につき説明す
る。
(Example) Next, the present invention will be described with reference to the drawings with reference to examples.

第1図は本発明の1実施例に係る冷却構造の一部裁断
して示した側面図である。この図において、1は集積回
路素子、2は集積回路素子1を複数個搭載した配線基
板、3は配線基板2を複数枚収容する架、4は配線基板
2を架3に位置決めして固定するためのカードガイドで
ある。5は冷却板で両端が管になっており、そこを二次
冷媒6が流れるようになっている。7は冷却板5の両端
の管に二次冷媒6を分配するためのヘッダであって、第
2図に示すようにここでは入口側と出口側の冷却板5の
上下で計4つあり、冷却板5の両端の管とはろう付けに
より接合されて二次冷媒流路を形成している。二次冷媒
は入口側ヘッダから冷却管に分配され、出口側ヘッダで
集まって流出する。8は、配線基板2を収容した架3
と、ヘッダ7に冷却板5を取り付けた熱交換器9とを収
容したケーシングであり、封止構造になっている。10は
熱交換器9をケーシング8に固定し、二次冷媒流路を外
部と接続させるための管の形状をしたジョイントで、ケ
ーシング8の封止構造を保つようにケーシング8に取り
付けられている。また架3はケーシング8の内側に取り
付けたフレーム11によりケーシングに固定されてい
る。。ケーシング8の中には、絶縁性、不活性の一次冷
媒12を満たしてある。この一次冷媒12としては例えば3M
社の「フロリナート」等が適する。
FIG. 1 is a side view showing a partially cut structure of a cooling structure according to an embodiment of the present invention. In this figure, 1 is an integrated circuit element, 2 is a wiring board on which a plurality of integrated circuit elements 1 are mounted, 3 is a rack for accommodating a plurality of wiring boards 2, and 4 is a wiring board 2 positioned and fixed on the rack 3. It is a card guide for. Reference numeral 5 denotes a cooling plate, both ends of which are tubes, through which the secondary refrigerant 6 flows. Reference numeral 7 denotes a header for distributing the secondary refrigerant 6 to the pipes at both ends of the cooling plate 5, and here, as shown in FIG. 2, there are a total of four headers above and below the cooling plate 5 on the inlet side and the outlet side, The tubes at both ends of the cooling plate 5 are joined by brazing to form a secondary refrigerant flow path. The secondary refrigerant is distributed from the inlet side header to the cooling pipe, and is collected and discharged at the outlet side header. 8 is a rack 3 that houses the wiring board 2.
And a heat exchanger 9 in which the cooling plate 5 is attached to the header 7, and the casing has a sealed structure. Reference numeral 10 denotes a pipe-shaped joint for fixing the heat exchanger 9 to the casing 8 and connecting the secondary refrigerant flow path to the outside, and is attached to the casing 8 so as to maintain the sealing structure of the casing 8. . The frame 3 is fixed to the casing by a frame 11 attached inside the casing 8. . The casing 8 is filled with an insulating, inactive primary refrigerant 12. As the primary refrigerant 12, for example, 3M
"Fluorinert" of the company is suitable.

次に、本発明の冷却構造における熱の伝達経路につい
て説明する。集積回路素子1で発生した熱は、一部は配
線基板2に伝わり、残りは直接、一次冷媒12に伝達さ
れ、伝導および対流により冷却板5へと伝わる。さらに
冷却板5内を伝導により熱伝導板両端の管へ伝わり、そ
こから二次冷媒6に排熱される。
Next, a heat transfer path in the cooling structure of the present invention will be described. Part of the heat generated in the integrated circuit element 1 is transferred to the wiring board 2, and the rest is directly transferred to the primary refrigerant 12, and is transferred to the cooling plate 5 by conduction and convection. Further, the heat is conducted inside the cooling plate 5 to the pipes at both ends of the heat conducting plate, and is then discharged to the secondary refrigerant 6 from there.

このように冷却板を集積回路素子に直接接触させず、
一次冷媒を介して熱を伝える構造としたことにより、温
度上昇による熱応力が集積回路素子と配線基板との接続
部に悪影響を与えないほか、集積回路素子の取り付け高
さや傾きのばらつきに冷却性能が影響されないので、従
来強制空冷がほとんどであったコンピュータの記憶装置
など標準品としてケースに収められて供給されかつ大き
さも数種類あるような多数の集積回路素子により構成さ
れる装置を、騒音を生じさせずに冷却することができ
る。
In this way, without directly contacting the cooling plate with the integrated circuit element,
By adopting a structure that transfers heat via the primary refrigerant, thermal stress due to temperature rise does not adversely affect the connection part between the integrated circuit element and the wiring board, and the cooling performance due to variations in mounting height and inclination of the integrated circuit element Since it is not affected, noise is generated by a device composed of many integrated circuit elements that are supplied in a case as a standard product such as a memory device of a computer, which was conventionally mostly forced air cooling, and have several sizes. It can be cooled without doing so.

(発明の効果) 以上説明したように本発明は、冷却板を集積回路素子
に直接接触させず一次冷媒を介して熱を伝える構造とす
ることにより、温度上昇による熱応力が集積回路素子と
配線基板との接続部に悪影響を与えないほか、集積回路
素子の取り付け高さや傾きのばらつきがある場合にも対
応できる。また冷媒を、集積回路素子を直接浸漬する一
次冷媒と、集積回路素子とは接触しない二次冷媒とに分
けたことにより、伝導により冷媒へ熱を伝え冷却する方
法と1つの装置内で併用する場合でも、冷媒を循環供給
する冷却装置は一種類の冷媒に対するものだけでよく、
構造の簡素化、コストの低減を図ることができる効果が
ある。
(Effects of the Invention) As described above, the present invention has a structure in which heat is transferred via the primary refrigerant without directly contacting the cooling plate with the integrated circuit element, so that thermal stress due to temperature rise and the integrated circuit element and wiring In addition to having no adverse effect on the connection portion with the substrate, it is also possible to cope with variations in mounting height and inclination of integrated circuit elements. Further, by dividing the refrigerant into a primary refrigerant that directly immerses the integrated circuit element and a secondary refrigerant that does not contact the integrated circuit element, a method of transmitting heat to the refrigerant by conduction and cooling is used together in one device. Even in this case, the cooling device that circulates and supplies the refrigerant is only required for one kind of refrigerant,
There is an effect that the structure can be simplified and the cost can be reduced.

【図面の簡単な説明】 第1図は本発明の1実施例に係る冷却構造の一部裁断し
た側面図、第2図は本発明の1実施例における熱交換器
アセンブリの外観図、第3図は従来の冷却構造例を示す
断面図である。 1……集積回路素子、2……配線基板、3……架、4…
…カードガイド、5……冷却板、6……二次冷媒、7…
…ヘッダ、8……ケーシング、9……熱交換器、10……
ジョイント、11……フレーム、12……一次冷媒。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a partially cutaway side view of a cooling structure according to an embodiment of the present invention, FIG. 2 is an external view of a heat exchanger assembly according to an embodiment of the present invention, and FIG. The figure is a sectional view showing an example of a conventional cooling structure. 1 ... Integrated circuit element, 2 ... Wiring board, 3 ... Rack, 4 ...
… Card guide, 5… Cooling plate, 6… Secondary refrigerant, 7…
… Header, 8 …… Casing, 9 …… Heat exchanger, 10 ……
Joint, 11 …… frame, 12 …… primary refrigerant.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】複数個の集積回路素子を搭載した配線基板
を複数枚収容する架と、両端に管を有する冷却板および
前記冷却板複数枚と両端の管に二次冷媒を分配する流路
を形成するよう接合される入口側、出口側少なくとも2
本のヘッダから成る熱交換器とを有し、前記架と前記熱
交換器とを前記配線基板および前記冷却板が一定の間隔
で交互に配列されるようケーシング内に固定し、前記ケ
ーシング内に絶縁性かつ不活性の一次冷媒を満たし、集
積回路素子で発生した熱が前記一次冷媒を介して前記冷
却板に伝わり、さらに前記冷却板内を伝導により伝わっ
て二次冷媒に排熱されるようにしたことを特徴とする電
子回路パッケージの冷却構造。
1. A rack for accommodating a plurality of wiring boards on which a plurality of integrated circuit devices are mounted, a cooling plate having tubes at both ends, and a flow path for distributing a secondary refrigerant to the plurality of cooling plates and the tubes at both ends. At least two inlet and outlet sides joined to form a
A heat exchanger comprising a header of a book, the rack and the heat exchanger are fixed in a casing so that the wiring board and the cooling plate are alternately arranged at a constant interval, and in the casing. Insulating and inactive primary refrigerant is filled, the heat generated in the integrated circuit element is transferred to the cooling plate via the primary refrigerant, and further transferred by conduction in the cooling plate to be exhausted to the secondary refrigerant. A cooling structure for an electronic circuit package characterized by the above.
JP62157192A 1987-06-24 1987-06-24 Electronic circuit package cooling structure Expired - Lifetime JP2504059B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62157192A JP2504059B2 (en) 1987-06-24 1987-06-24 Electronic circuit package cooling structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62157192A JP2504059B2 (en) 1987-06-24 1987-06-24 Electronic circuit package cooling structure

Publications (3)

Publication Number Publication Date
JPS642397A JPS642397A (en) 1989-01-06
JPH012397A JPH012397A (en) 1989-01-06
JP2504059B2 true JP2504059B2 (en) 1996-06-05

Family

ID=15644212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62157192A Expired - Lifetime JP2504059B2 (en) 1987-06-24 1987-06-24 Electronic circuit package cooling structure

Country Status (1)

Country Link
JP (1) JP2504059B2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3017837B2 (en) * 1991-05-31 2000-03-13 株式会社日立製作所 Electronic equipment
US5774333A (en) 1996-08-23 1998-06-30 Speculative Incorporated Thermally efficient portable computer incorporating deploying CPU module
US6243261B1 (en) 1996-08-23 2001-06-05 Speculative Incorporated Thermally efficient computer incorporating deploying CPU module
JP5425029B2 (en) * 2010-09-15 2014-02-26 アイシン・エィ・ダブリュ株式会社 Semiconductor cooling device and vehicle drive device
JP6001357B2 (en) 2012-06-29 2016-10-05 花王株式会社 Hydraulic composition
JP6939034B2 (en) 2017-04-05 2021-09-22 富士通株式会社 Cooling systems, cooling devices, and electronic systems
JP7096006B2 (en) * 2018-02-16 2022-07-05 エドワーズ株式会社 Vacuum pump and vacuum pump controller

Also Published As

Publication number Publication date
JPS642397A (en) 1989-01-06

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