JP2502054Y2 - Stamper and disk inspection equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a stamper used in a manufacturing process of a disc such as a compact disc and an optical disc inspection apparatus, and in particular, a correlation between the stamper and the disc produced by the stamper. The present invention relates to a stamper and a disk inspection device suitable for measuring the.

[Prior Art] In the conventional stamper and disk inspection device,
A stamper reproduction-only pickup having a correction plate arranged in front of the objective lens as shown in FIG. 5A and a disc-dedicated pickup as shown in FIG. 5B are used for stamper reproduction and disc reproduction. Another optical pickup was used in.

[Problems to be Solved by the Invention] In the conventional device described above, the correlation between the stamper and the disk could not be measured due to variations in the optical and electrical characteristics of the optical pickup.

The present invention has been made in view of the above points, and an object thereof is to provide a stamper / disk inspection device capable of measuring a stamper / disk with the same optical pickup. is there.

[Means for Solving the Problems] A stamper and a disc inspection device according to the present invention include a disc inspection device including an optical pickup, a rotary table, and a feeding mechanism that relatively moves the optical pickup and the rotary table. A mechanism for moving the correction plate in and out is provided between the optical pickup and the rotary table, and the posture can be adjusted with the correction plate inserted between the optical pickup and the rotary table.

[Operation] According to the stamper and the disc inspection apparatus of the present invention, when the disc is inspected, the disc is placed on the rotary table and the disc is rotated under the condition that the correction plate is not inserted under the optical pickup. Play back with a pickup for inspection or measurement.

When inspecting the stamper, the stamper is placed on the rotary table and the correction plate is inserted between the optical pickup and the stamper to reproduce the stamper.

The thickness and refractive index of the compensator are adjusted so that the optical path length from the objective lens to the reflecting surface is the same for the disc covered with the transparent protective film and the stamper without the protective film. Similarly, the light is focused on the light receiving element.

Further, the posture of the correction plate is adjusted to be parallel to the objective lens so that the direction of the light is not changed by the correction plate. In this way, since reproduction is performed on the stamper and the disc by the same optical pickup, the correlation between the stamper and the disc can be obtained without being affected by variations in the characteristics of the optical pickup.

[Embodiment] A stamper and disk inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing a disk inspection state of an inspection device according to an embodiment of the present invention.

In the figure, reference numeral 1 is a spindle shaft which is a rotary shaft of a spindle motor, and integrally rotates a rotary table 2.

An optical pickup 3 is supported by an adjusting stage 4 at a position facing a disk or stamper mounted on the rotary table 2 so that the attitude of the optical pickup 3 can be adjusted. Is performed by the slide table 5 on which is mounted.

The attitude of the optical pickup 3 is adjusted by the adjustment stage 4 so that the optical axis of the optical pickup 3 is perpendicular to the reflecting surface of the disk or stamper.

A correction plate 6 whose thickness and refractive index are adjusted so that the optical paths from the reflecting surfaces of the disc and the stamper to the objective lens are equal is supported by the correction plate holding member 7, and the correction plate holding member 7 is a slide mechanism. It is fixed at 8.

The slide mechanism 8 is supported by an adjustment stage 9 for adjusting the correction plate 6 so as to be parallel to the objective lens of the optical pickup.

When inspecting a disc, the slide mechanism 8 retracts as shown in FIG. 1, and the rotary table 2 rotates with the correction plate 6 not entering between the optical pickup 3 and the disc mounted on the rotary table 2. Then, the slide table 5 moves and the disc is reproduced by the optical pickup to perform inspection or measurement.

When inspecting the stamper, as shown in FIG. 2, the slide mechanism 8 projects and the rotary table 2 rotates while the correction plate 6 is inserted between the optical pickup 3 and the stamper placed on the rotary table 2. Then, the slide table 5 moves and the stamper is reproduced by the optical pickup to perform inspection or measurement.

FIG. 3 is a perspective view showing another embodiment of the present invention,
In this embodiment, the metal sensor 10 is arranged at a position facing the stamper 12 when the stamper 12 is placed on the rotary table 2, and when the stamper 12 is placed, the metal sensor 10 detects the actuator and the actuator 11 moves. It operates automatically and the correction plate 6 is inserted between the optical pickup 3 and the stamper 12.

As shown in FIG. 4, the output of the metal sensor 10 is latched by the latch circuit, and the output of the latch circuit is input to the laser power control circuit and the actuator control circuit.

According to the input, the laser power control circuit sets the laser power of the optical pickup to the optimum power of the disc or stamper.

Further, the actuator control circuit controls the operation of the actuator for the stamper and the disk.

 The other components are the same as those shown in FIG.

[Effect of the Invention] According to the stamper and disk inspection apparatus of the present invention, since the stamper and the disk are reproduced by the same optical pickup, the correlation between the stamper and the disk is not affected by the variation in the characteristics of the optical pickup. The relationship can be measured.

Further, it is possible to obtain the effect that the optical pickup does not need to be adjusted when reproducing the stamper and the disc.

[Brief description of drawings]

FIG. 1 is a perspective view showing a disk inspection state of a stamper and disk inspection apparatus according to an embodiment of the present invention, and FIG. 2 is a perspective view showing a stamper inspection state of a stamper and disk inspection apparatus according to an embodiment of the present invention. FIG. 3 is a perspective view showing a stamper and disk inspection apparatus according to another embodiment of the present invention, FIG. 4 is a block diagram showing a control circuit of the same embodiment, and FIGS. 5A and 5B. FIG. 6 is a perspective view showing an optical pickup of a conventional inspection device. 1 ... Spindle axis, 2 ... Rotation table, 3 ... Optical pickup, 4 ... Adjustment stage, 5 ... Slide table, 6 ... Correction plate, 7 ... Correction plate holding member, 8 ...
… Sliding mechanism, 9 …… Adjustment stage, 10 …… Metal sensor, 11 …… Actuator, 12 …… Stamper.

Claims (1)

(57) [Scope of utility model registration request] 1. A disc inspection apparatus having an optical pickup, a rotary table, and a feeding mechanism for moving the optical pickup and the rotary table relative to each other, and a correction plate is inserted into and removed from the optical pickup and the rotary table. An inspection device for a stamper and a disc, in which a mechanism is provided and a posture can be adjusted while a correction plate is inserted between an optical pickup and a rotary table.