JP2025528545A5 - - Google Patents
Info
- Publication number
- JP2025528545A5 JP2025528545A5 JP2025514206A JP2025514206A JP2025528545A5 JP 2025528545 A5 JP2025528545 A5 JP 2025528545A5 JP 2025514206 A JP2025514206 A JP 2025514206A JP 2025514206 A JP2025514206 A JP 2025514206A JP 2025528545 A5 JP2025528545 A5 JP 2025528545A5
- Authority
- JP
- Japan
- Prior art keywords
- subcarrier
- holder
- container
- tray
- precursor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2022/074665 WO2024051920A1 (en) | 2022-09-06 | 2022-09-06 | Container for feeding a precursor material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2025528545A JP2025528545A (ja) | 2025-08-28 |
| JP2025528545A5 true JP2025528545A5 (enExample) | 2026-04-06 |
Family
ID=83438336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025514206A Pending JP2025528545A (ja) | 2022-09-06 | 2022-09-06 | 前駆物質を供給するためのコンテナ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20260085412A1 (enExample) |
| JP (1) | JP2025528545A (enExample) |
| KR (1) | KR20250065336A (enExample) |
| CN (1) | CN119836489A (enExample) |
| WO (1) | WO2024051920A1 (enExample) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3909792B2 (ja) | 1999-08-20 | 2007-04-25 | パイオニア株式会社 | 化学気相成長法における原料供給装置及び原料供給方法 |
| US6921062B2 (en) | 2002-07-23 | 2005-07-26 | Advanced Technology Materials, Inc. | Vaporizer delivery ampoule |
| US9034105B2 (en) * | 2008-01-10 | 2015-05-19 | American Air Liquide, Inc. | Solid precursor sublimator |
| JP2010040695A (ja) * | 2008-08-04 | 2010-02-18 | Hitachi Kokusai Electric Inc | 基板処理装置および原料補充方法 |
| US20100119734A1 (en) * | 2008-11-07 | 2010-05-13 | Applied Materials, Inc. | Laminar flow in a precursor source canister |
| JP6462096B1 (ja) * | 2017-11-22 | 2019-01-30 | 日本エア・リキード株式会社 | 固体材料容器およびその固体材料容器に固体材料が充填されている固体材料製品 |
| EP4056730B1 (en) * | 2021-03-10 | 2024-07-17 | SK Inc. | Container for feeding a precursor material |
-
2022
- 2022-09-06 CN CN202280099831.1A patent/CN119836489A/zh active Pending
- 2022-09-06 WO PCT/EP2022/074665 patent/WO2024051920A1/en not_active Ceased
- 2022-09-06 KR KR1020257007797A patent/KR20250065336A/ko active Pending
- 2022-09-06 JP JP2025514206A patent/JP2025528545A/ja active Pending
- 2022-09-06 US US19/108,826 patent/US20260085412A1/en active Pending
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