JP2024511619A - ガイド付きフローバルブアセンブリおよびそれを組み込んだシステム - Google Patents

ガイド付きフローバルブアセンブリおよびそれを組み込んだシステム Download PDF

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Publication number
JP2024511619A
JP2024511619A JP2023558363A JP2023558363A JP2024511619A JP 2024511619 A JP2024511619 A JP 2024511619A JP 2023558363 A JP2023558363 A JP 2023558363A JP 2023558363 A JP2023558363 A JP 2023558363A JP 2024511619 A JP2024511619 A JP 2024511619A
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JP
Japan
Prior art keywords
closure member
valve assembly
seat
grooves
flow guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023558363A
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English (en)
Japanese (ja)
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JP2024511619A5 (https=
Inventor
カーソン、スティーブン
Original Assignee
アイコール・システムズ・インク
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アイコール・システムズ・インク filed Critical アイコール・システムズ・インク
Publication of JP2024511619A publication Critical patent/JP2024511619A/ja
Publication of JP2024511619A5 publication Critical patent/JP2024511619A5/ja
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/54—Arrangements for modifying the way in which the rate of flow varies during the actuation of the valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F16K1/38—Valve members of conical shape
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Details Of Valves (AREA)
JP2023558363A 2021-03-22 2022-03-17 ガイド付きフローバルブアセンブリおよびそれを組み込んだシステム Pending JP2024511619A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163164139P 2021-03-22 2021-03-22
US63/164,139 2021-03-22
PCT/US2022/020709 WO2022203931A1 (en) 2021-03-22 2022-03-17 Guided flow valve assembly and system incorporating same

Publications (2)

Publication Number Publication Date
JP2024511619A true JP2024511619A (ja) 2024-03-14
JP2024511619A5 JP2024511619A5 (https=) 2024-04-04

Family

ID=83284338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023558363A Pending JP2024511619A (ja) 2021-03-22 2022-03-17 ガイド付きフローバルブアセンブリおよびそれを組み込んだシステム

Country Status (4)

Country Link
US (2) US12222039B2 (https=)
JP (1) JP2024511619A (https=)
KR (1) KR20230158524A (https=)
WO (1) WO2022203931A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023133539A1 (de) * 2023-11-30 2025-06-05 RAPA Healthcare GmbH & Co. KG Dosier-magnetventil

Citations (3)

* Cited by examiner, † Cited by third party
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JP2003280745A (ja) * 2002-03-25 2003-10-02 Stec Inc マスフローコントローラ
US6953056B1 (en) * 2003-02-26 2005-10-11 Chrisp Lynn E Metering valve assembly

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Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08303612A (ja) * 1995-01-27 1996-11-22 Hans D Baumann カートリツジ式取り付け配置を有する小型流量調整弁
JP2003280745A (ja) * 2002-03-25 2003-10-02 Stec Inc マスフローコントローラ
US6953056B1 (en) * 2003-02-26 2005-10-11 Chrisp Lynn E Metering valve assembly

Also Published As

Publication number Publication date
US12222039B2 (en) 2025-02-11
TW202248554A (zh) 2022-12-16
KR20230158524A (ko) 2023-11-20
US20220299118A1 (en) 2022-09-22
US20250146580A1 (en) 2025-05-08
WO2022203931A1 (en) 2022-09-29

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