JP2024085784A - Functional layer formation device, electronic component manufacturing device, electrode manufacturing device and functional layer formation method - Google Patents

Abstract

To provide a functional layer formation device capable of forming a functional layer with excellent quality.SOLUTION: A functional layer formation device according to one aspect of the present invention includes: discharge means which discharges functional layer precursor fluid through multiple nozzles onto a surface of an object; first movement means which relatively moves the discharge means and the object in the first direction; and control means which controls the operations of the discharge means and the first movement means. In the discharge means, a nozzle surface with the multiple nozzles is arranged so as to be inclined with respect to the first direction. The control means performs control so as to form the contour of the functional layer by the functional layer precursor fluid discharged from the nozzle which is arranged at a position relatively close to the surface of the object due to the inclination of the nozzle surface among the multiple nozzles.SELECTED DRAWING: Figure 1

Description

The present invention relates to a functional layer forming apparatus, an electronic component manufacturing apparatus, an electrode manufacturing apparatus, and a functional layer forming method.

Conventionally, functional layer forming devices are known that form a functional layer on the surface of an object by ejecting a functional layer precursor liquid. Examples of objects include electronic components mounted on PCB (Printed Circuit Board) substrates, PWB (Printed Wiring Board) substrates, etc., and used in applications such as high-speed communications, 5G, and autonomous driving. Functional layer forming devices are used in applications such as forming functional layers such as electromagnetic wave shielding layers on these electronic components.

Also disclosed is an additive printing method that prints a print pattern on the surface of a three-dimensional object by ejecting liquid using a print head having multiple print nozzles based on two-dimensional geometric surface data (see, for example, Patent Document 1). In this method, distortions present in the two-dimensional geometric surface data are corrected in order to print on the surface of the three-dimensional object that is non-parallel to the print nozzle face.

However, in the method described in Patent Document 1, a functional layer such as a print pattern is formed with liquid from a nozzle that is positioned relatively far from the target object surface on a printing nozzle face that is non-parallel to the surface of the target object such as a three-dimensional object, which can degrade the quality of the functional layer.

The present invention aims to provide a functional layer forming device capable of forming functional layers of excellent quality.

A functional layer forming device according to one aspect of the present invention includes a discharge means for discharging functional layer precursor liquid from a plurality of nozzles onto the surface of an object, a first moving means for relatively moving the discharge means and the object in a first direction, and a control means for controlling the operation of the discharge means and the first moving means, wherein the discharge means is arranged such that a nozzle face having the plurality of nozzles is inclined with respect to the first direction, and the control means controls the discharge of the functional layer precursor liquid from a nozzle among the plurality of nozzles that is positioned relatively close to the surface of the object due to the inclination of the nozzle face to form the contour of a functional layer.

The present invention provides a functional layer forming device capable of forming functional layers of excellent quality.

1 is a diagram showing an example of the overall configuration of a functional layer forming apparatus according to a first embodiment; 2 is a plan view showing an example of a first head in the functional layer forming apparatus of FIG. 1 . 2 is a diagram illustrating an example of a hardware configuration of a control unit in the functional layer forming apparatus of FIG. 1 . 2 is a diagram illustrating an example of a functional configuration of a control unit in the functional layer forming apparatus of FIG. 1 . FIG. 2 is a first diagram illustrating a pattern forming method using the functional layer forming apparatus of FIG. 1. FIG. 2 is a second diagram illustrating a pattern forming method using the functional layer forming apparatus of FIG. 1. FIG. 11 is a side view showing an example of a head according to a second embodiment. FIG. 11 is a plan view showing an example of a head according to a second embodiment. FIG. 13 is a diagram illustrating an example of the configuration of a functional layer forming apparatus according to a third embodiment.

Below, the embodiments of the invention will be described in detail with reference to the drawings. In each drawing, the same components are given the same reference numerals, and duplicate explanations will be omitted as appropriate.

[First embodiment]
<Configuration example of functional layer forming apparatus 100>
The configuration of the functional layer forming apparatus according to the first embodiment will be described with reference to Figures 1 and 2. Figure 1 is a diagram showing an example of the overall configuration of the functional layer forming apparatus 100. Figure 1 is a side view showing a schematic view of the periphery of a head unit 1 in the functional layer forming apparatus 100. Figure 2 is a plan view showing an example of a first head 1a in the functional layer forming apparatus 100. Figure 2 shows a first nozzle surface 11a of the first head 1a as viewed from the direction in which the functional layer precursor liquid is ejected.

The functional layer forming device 100 forms a functional layer on the surface of the object 200 using a functional layer precursor liquid. In the example shown in this specification, the functional layer forming device 100 can form a pattern shape (hereinafter simply referred to as a pattern) as an example of a functional layer on the surface of the object 200 using the functional layer precursor liquid. The surface of the object 200 may include the upper surface, side surface, etc. of the object 200. The upper surface of the object 200 is the surface of the object 200 that faces the head unit 1. The side surface of the object 200 is a surface that intersects with the upper surface of the object 200. In this specification, the object 200 is located below the head unit 1.

The target object 200 is an electronic component mounted on a PCB (Printed Circuit Board) substrate, a PWB (Printed Wiring Board) substrate, or the like, and used in applications such as high-speed communication, 5G, and autonomous driving. The functional layer forming device 100 is used in applications such as forming a functional layer such as an electromagnetic wave shielding layer using these electronic components as the target object 200.

The above-mentioned functional layers include layers that are formed on the surface of the object 200 and have functions such as waterproofing, moisture resistance, heat dissipation, rust prevention, gas prevention, static electricity countermeasures, and electromagnetic interference (EMI) shielding, i.e., blocking, electromagnetic waves. In addition, layers that have the function of shielding electromagnetic waves (hereinafter referred to as electromagnetic wave shielding layers) include layers that have the function of shielding at least one of electromagnetic waves generated from the object 200 and electromagnetic waves incident on the object 200 from the outside. However, the functional layer may have functions other than the above-mentioned functions.

The functional layer is composed of an insulating material or a conductive material. The shield layer composed of an insulating material is mainly used for applications such as waterproofing, moisture prevention, heat dissipation, rust prevention, gas prevention, and static electricity countermeasures. The electromagnetic wave shield layer is mainly composed of a conductive material. In the case of the electromagnetic wave shield layer, a protective layer made of an insulating material may be further formed on the electromagnetic wave shield layer to reduce corrosion and oxidation of the conductive material. Various resin materials can be used as the insulating material. Liquid metal materials containing Ag or Cu nanoparticles can be used as the conductive material. However, the material constituting the functional layer according to the embodiment is not limited to an insulating material or a conductive material, and can be appropriately selected depending on the application.

Examples of the object 200 include semiconductor components, semiconductor package components that are semiconductor components covered in a package, and semiconductor modules. In this specification, the object 200 may be semiconductor components, semiconductor package components, and the like manufactured by Ricoh Co., Ltd.

The target object 200 includes an electrode substrate (current collector) used in a storage device such as a battery, a power generation device such as a fuel cell, a solar power generation device, etc. The target object 200 also includes an electrode in which an electrode material layer such as an active material is formed on an electrode substrate. The functional layer forming device 100 applies a functional layer precursor liquid, in which various materials such as a powdered active material, a photo/thermosetting resin, and a catalyst composition are dispersed in a liquid, to the target object 200, and then fixes and dries the functional layer region containing the various materials on the target object 200.

As shown in FIG. 1, the functional layer forming device 100 has a head unit 1, an irradiation unit 2, a carriage 3, a moving stage 4, and a control unit 5. The head unit 1 includes a first head 1a and a second head 1b. The irradiation unit 2 includes a first irradiation unit 2a and a second irradiation unit 2b.

Under the control of the control unit 5, the functional layer forming device 100 moves the head unit 1 and irradiation unit 2 relative to the object 200 using the carriage 3 and moving stage 4. Under the control of the control unit 5, the functional layer forming device 100 also applies the functional layer precursor liquid ejected from the head unit 1 to the object 200, and irradiates the ultraviolet light L from the irradiation unit 2 to harden the functional layer precursor liquid applied to the surface of the object 200. The functional layer precursor liquid ejected from the head unit 1 includes an ultraviolet light curable functional layer precursor liquid. However, the functional layer precursor liquid ejected from the head unit 1 may be a functional layer precursor liquid curable with energy rays other than light energy, such as thermal energy.

As shown in Figures 1 and 2, the first head 1a has a first nozzle surface 11a. The second head 1b has a second nozzle surface 11b. As shown in Figure 2, a first nozzle row 121a and a second nozzle row 122a are formed on the first nozzle surface 11a. The first nozzle row 121a and the second nozzle row 122a are examples of multiple nozzle rows aligned in the first direction A.

The first nozzle row 121 and the second nozzle row 122 each include a plurality of nozzles 13. The plurality of nozzles 13 are aligned in the second direction B, and each ejects functional layer precursor liquid. The second head 1b has a configuration substantially the same as that of the first head 1a.

As shown in FIG. 2, the nozzles 13 are arranged in a staggered manner. By staggering the nozzles 13 included in the first nozzle row 121a, the nozzles 13 are shifted in the second direction B by half the nozzle pitch p relative to the nozzles 13 included in the second nozzle row 122a.

Each of the first head 1a and the second head 1b included in the head unit 1 is an example of an ejection means that ejects functional layer precursor liquid from a plurality of nozzles 13 onto the surface of the target object 200. Each of the first nozzle surface 11a and the second nozzle surface 11b is an example of a nozzle surface.

As shown in FIG. 1, the first head 1a is arranged with the first nozzle surface 11a tilted at an angle θ with respect to the first direction A. The first head 1a ejects the functional layer precursor liquid onto the surface of the target 200 from a direction tilted at an angle θ with respect to the first direction A. On the other hand, the second head 1b is arranged with the second nozzle surface 11b tilted at an angle -θ with respect to the first direction A. The second head 1b ejects the functional layer precursor liquid onto the surface of the target 200 from a direction tilted at an angle -θ with respect to the first direction A. In the example shown in FIG. 1, since the first direction A is along the horizontal direction, the first nozzle surface 11a is arranged with an angle θ with respect to the first direction A, and the second nozzle surface 11b is arranged with an angle -θ with respect to the first direction A. Note that the above "tilted arrangement" excludes the case where θ is 90°, that is, the case where the first nozzle surface 11a or the second nozzle surface 11b is horizontal with respect to the surface of the target 200.

The irradiation unit 2 includes a first irradiation section 2a and a second irradiation section 2b. Each of the first irradiation section 2a and the second irradiation section 2b is, for example, a UV lamp that irradiates ultraviolet light L of a wavelength that cures the ultraviolet-curable functional layer precursor liquid applied to the surface of the target object 200. Note that the irradiation unit 2 is not an essential component of the functional layer forming device 100, and the functional layer forming device 100 does not need to have the irradiation unit 2, for example, when using a functional layer precursor liquid that is not ultraviolet-curable.

The carriage 3 is an example of a second moving means for relatively moving the head unit 1 and the object 200 in the second direction B. The carriage 3 carries the head unit 1 and the irradiation unit 2, and is moved in the second direction B by a carriage drive unit including a motor, etc., thereby relatively moving the head unit 1 and the object 200 in the second direction B. Note that the carriage 3 is not an essential component of the functional layer forming device 100. The functional layer forming device 100 does not need to have the carriage 3, for example, when forming a pattern having a length shorter than the length of the nozzle row 12 in the second direction B.

The moving stage 4 is an example of a first moving means for relatively moving the head unit 1 and the object 200 in the first direction A. The moving stage 4 is, for example, a linear stage that uses a ball screw to linearly move a table on which the object 200 is placed in the first direction A. The ball screw is rotationally driven by a stage drive unit that includes a motor, etc.

The control unit 5 is an example of a control means that controls the operation of each of the head unit 1 and the carriage 3. In this embodiment, the control unit 5 controls the formation of a pattern outline using functional layer precursor liquid ejected from a nozzle 13 that is positioned relatively close to the surface of the target object 200 due to the inclination of the first nozzle surface 11a out of the multiple nozzles 13. The pattern outline refers to the portion of the area on the surface of the target object 200 where the pattern is formed that is located near the boundary with the area where the pattern is not formed.

Here, we will explain in detail "the nozzles among the multiple nozzles that are arranged relatively close to the surface of the target object due to the inclination of the nozzle surface." As shown in FIG. 1, the first head 1a is inclined with respect to the first direction A, and therefore, in accordance with this inclination, the eight nozzles 13 included in the first nozzle row 121a are arranged relatively closer to the surface of the target object 200 than the eight nozzles 13 included in the second nozzle row 122a. Each of the eight nozzles 13 included in the first nozzle row 121a corresponds to "the nozzles among the multiple nozzles that are arranged relatively close to the surface of the target object due to the inclination of the nozzle surface." In other words, the number of "the nozzles among the multiple nozzles that are arranged relatively close to the surface of the target object due to the inclination of the nozzle surface" is not limited to one, and may be multiple.

In addition, in this embodiment, "nozzles arranged in a position relatively close to the surface of the target object" refers to nozzles arranged in a close position among multiple nozzles arranged in positions relatively far and close to the surface of the target object due to the inclination of the nozzle surface. Therefore, for example, a nozzle arranged in a position relatively close to the surface of the target object due to a manufacturing error or the like does not fall under "nozzles arranged in a position relatively close to the surface of the target object due to the inclination of the nozzle surface."

The second head 1b also has a plurality of nozzles that are positioned relatively far from and near the surface of the target object because the second nozzle surface 11b is tilted at an angle of -θ with respect to the first direction A. Of these plurality of nozzles, the second head 1b has a nozzle 13 that is positioned relatively close to the surface of the target object 200 due to the tilt of the second nozzle surface 11b.

<Example of detailed configuration of control unit 5>
(Hardware configuration)
3 is a block diagram showing an example of a hardware configuration of the control unit 5. The control unit 5 has a unit control circuit 51, a memory 52, a CPU (Central Processing Unit) 53, and an I/F (Interface) .

The unit control circuit 51 is an electrical circuit that controls the operation of the moving stage 4, carriage 3, head unit 1, irradiation unit 2, maintenance unit 6, etc. in the functional layer forming device 100 by controlling communication between them.

The maintenance unit 6 includes a wiper that wipes the nozzle surface 11, a suction pump that sucks up foreign matter or thickened functional layer precursor liquid present inside each of the first head 1a and the second head 1b, and the like. The maintenance unit 6 can maintain the ejection state of the functional layer precursor liquid by the head unit 1 by driving the wiper and the suction pump.

Memory 52 includes volatile memory such as RAM (Random Access Memory) and non-volatile memory such as ROM (Read Only Memory), HDD (Hard Disk Drive), and SSD (Solid State Drive).

The CPU 53 uses the RAM in the memory 52 as a working area and executes processing defined in a program stored in the ROM in the memory 52 to control the operation of each unit of the functional layer forming device 100 via a unit control circuit. Specifically, the CPU 53 controls the operation of each unit based on pattern data received from an external device, a PC (Personal Computer), and data detected by the detection group 7, to form a pattern on the surface of the target object 200 shown in FIG. 1.

The I/F 54 is an interface for connecting the functional layer forming device 100 and the PC 300. The functional layer forming device 100 and the PC 300 may be connected in any manner, such as via a network or directly connecting the two with a communication cable.

The detection group 7 includes various sensors provided in the functional layer forming device 100, such as a height sensor.

A printer driver is installed on the PC 300, and this printer driver generates formation data to be sent to the functional layer forming device 100 from the pattern data. The formation data includes command data for operating the moving stage 4 of the functional layer forming device 100, and pixel data related to the pattern. The pixel data is composed of 1 bit of data for each pixel.

The head unit 1 is controlled by the control unit 5 in terms of the timing at which the functional layer precursor liquid is ejected, the volume (drop amount) of the ejected functional layer precursor liquid, etc. The irradiation unit 2 is controlled by the control unit 5 in terms of the timing at which ultraviolet light L is emitted, etc. The carriage 3 is controlled by the control unit 5 in terms of movement in the height direction and in the second direction B. The moving stage 4 is controlled by the control unit 5 in terms of movement in the first direction A.

When the moving stage 4 moves the object 200 one scan in the first direction A, the head unit 1 ejects functional layer precursor liquid onto the surface of the object 200, and the irradiation unit 2 irradiates the functional layer precursor liquid on the surface of the object 200 with ultraviolet light L. This allows the functional layer forming device 100 to form a pattern for one scan on the surface of the object 200. The functional layer forming device 100 can form the entire pattern on the surface of the object 200 by repeating the pattern formation for one scan while intermittently moving the carriage 3 in the second direction B.

(Functional configuration)
4 is a block diagram showing an example of the functional configuration of the control unit 5. The control unit 5 has a data processing unit 501 and a pattern forming unit 502. The data processing unit 501 includes a data receiving unit 511, a data creating unit 512, and a data output unit 513. The pattern forming unit 502 includes a formation mode receiving unit 521, a discharge control unit 522, an irradiation control unit 523, a first driving unit 524, a second driving unit 525, and a formation control unit 526. The formation control unit 526 includes a formation sequence setting unit 527 and a drive waveform generating unit 528.

At least some of the functions included in the control unit 5 may be realized by, for example, having a processor such as a CPU execute a program, i.e., by software. Alternatively, at least some of these functions may be realized by hardware such as an integrated circuit (IC), or may be realized by a combination of software and hardware.

The data receiving unit 511 receives pattern data. The pattern data is information such as the shape of the pattern to be formed and the number of layers. The data receiving unit 511 may obtain the pattern data from the PC 300, which is an external device, or may obtain the pattern data from a memory unit provided in the control unit 5.

The data creation unit 512 performs predetermined data processing, such as mask processing, on the pattern data received by the data reception unit 511 to create formation data.

The data output unit 513 outputs the formation data created by the data creation unit 512 to the pattern formation unit 502.

The formation mode receiving unit 521 receives information regarding the pattern formation mode from the data processing unit 501, PC 300, etc.

The ejection control unit 522 controls the ejection of functional layer precursor liquid by the head unit 1 based on the formation data. The irradiation control unit 523 controls the irradiation of ultraviolet light L by the irradiation unit 2 based on the formation data. The first drive unit 524 moves the object 200 placed on the moving stage 4 in the first direction A. The second drive unit 525 moves the carriage 3 in the second direction B.

The formation control unit 526 receives formation data from the data processing unit 501. The formation control unit 526 controls the operations of the head unit 1, the irradiation unit 2, the moving stage 4, and the carriage 3 via the ejection control unit 522, the irradiation control unit 523, the first drive unit 524, and the second drive unit 525 so that droplets corresponding to each pixel are ejected from the head unit 1 according to the received formation data.

The formation sequence setting unit 527 sets the formation sequence based on the formation data, the formation mode, and information related to the head unit 1. By setting the formation sequence, the control unit 5 specifies and controls how many times the moving stage 4 is moved in the forward or backward direction in the first direction A to form a pattern in the area on the surface of the target object 200 where the pattern is to be formed. In other words, it controls the order in which the patterns are formed, the amount of functional layer precursor liquid dispensed, and the dispense position of the functional layer precursor liquid (the arrangement position of dots made of functional layer precursor liquid).

The drive waveform generating unit 528 generates drive waveforms to be supplied to each of the first head 1a and the second head 1b in order to eject the functional layer precursor liquid.

<Example of pattern formation method using functional layer forming apparatus 100>
5 and 6 are diagrams for explaining an example of a pattern forming method by the functional layer forming device 100. FIG. 5 shows the first nozzle surface 11a of the first head 1a seen from the discharge direction of the functional layer precursor liquid, the second nozzle surface 11b of the second head 1b seen from the discharge direction of the functional layer precursor liquid, and dot patterns 211 and 221 formed by the functional layer precursor liquid discharged from the first head 1a and the second head 1b. The positions of the dot patterns 211 and 221 correspond to the positions where the functional layer precursor liquid discharged from the first head 1a and the second head 1b lands on the surface of the target 200.

As shown in FIG. 1, the first nozzle surface 11a is inclined at an angle θ with respect to the first direction A, so the distance between the first nozzle row 121a and the target 200 is shorter than the distance between the second nozzle row 122a and the target 200. Similarly, the second nozzle surface 11b is inclined at an angle -θ with respect to the first direction A, so the distance between the first nozzle row 121b and the target 200 is shorter than the distance between the second nozzle row 122b and the target 200.

The first head 1a and the second head 1b are arranged so that the first nozzle row 121a and the first nozzle row 121b, and the second nozzle row 122a and the second nozzle row 122b can each deposit the functional layer precursor liquid at the same position in the first direction A.

In FIG. 5, the moving stage 4 moves the object 200 in a predetermined direction in the first direction A (e.g., from right to left in the figure). When the position P on the object 200 passes under the first head 1a, the functional layer precursor liquid is ejected from each of the first nozzle row 121a and the second nozzle row 122a, and the dot pattern 211 of the first scan is formed on the surface of the object 200.

Next, the moving stage 4 moves the object 200 in the opposite direction to the above-mentioned predetermined direction in the first direction A (for example, from left to right in the figure). When the position P on the object 200 passes under the second head 1b, the functional layer precursor liquid is ejected from each of the first nozzle row 121b and the second nozzle row 122b, and the dot pattern 221 of the second scan is formed on the surface of the object 200.

Figure 6 shows pattern data 61, stroke order mask data 62, pre-conversion mask data 63, contour data 64, and post-conversion mask data 65. The grid 60 in Figure 6 represents the pixels of the pattern formed on the surface of the target object 200.

Pattern data 61 is provided by PC 300 shown in FIG. 3 and is data that is the basis of the pattern to be formed on the surface of object 200. Pixels with diagonal hatching in pattern data 61 are pixels that correspond to the part where the pattern is to be formed on the surface of object 200.

The deposit order mask data 62 refers to data indicating the deposit order. The deposit order refers to the order indicating at what movement of the target object 200 in the first direction A the functional layer precursor liquid is ejected from the head unit 1 to the pixel. In FIG. 6, the number "1" shown next to the pixel in the deposit order mask data 62 indicates the pixel onto which the functional layer precursor liquid is ejected in the first scan. Similarly, the number "2" indicates the pixel onto which the functional layer precursor liquid is ejected in the second scan. In the pre-conversion mask data 63, the contour data 64, and the post-conversion mask data 65, the numbers shown next to the pixels indicate the order of scanning in the same manner as above.

The pre-conversion mask data 63 is data in which a stroke order is assigned to each pixel in the pattern data 61 using the pattern data 61 and the stroke order mask data 62.

The contour data 64 is data in which the contour of the pattern is extracted from the pattern data 61. The pixels with dot hatching are pixels that correspond to the contour of the pattern.

In this embodiment, the functional layer forming device 100 ejects functional layer precursor liquid from the first nozzle row 121a and the first nozzle row 121b to pixels in odd rows, and from the second nozzle row 122a and the second nozzle row 122b to pixels in even rows, based on information about the head unit 1. In addition, the functional layer forming device 100 ejects functional layer precursor liquid from the nozzle row that is closest to the target object 200 to pixels that correspond to the contour of the pattern. In the example shown in this specification, the nozzle row that is closest to the target object 200 is the first nozzle row 121a or the second nozzle row 122b. The functional layer forming device 100 generates converted mask data 65 by correcting the pre-conversion mask data 63 so that it can perform these ejections.

In the converted mask data 65 shown in FIG. 6, the pixels shown in black indicate pixels among the multiple pixels corresponding to the contour of the pattern that have been corrected so that functional layer precursor liquid is ejected from the first nozzle row 121a or the second nozzle row 122b that is closer to the target object 200.

During the first scan in the first direction A, the functional layer forming device 100 ejects functional layer precursor liquid from the first nozzle row 121a and the second nozzle row 122a at the timing when the object 200 passes under the first head 1a while the object 200 is moved in a predetermined direction in the first direction A. This ejection forms a pixel (a pixel marked with the number "1") that corresponds to the first scan of the converted mask data 65.

Next, as the second scan, while the object 200 is being moved in the opposite direction to the predetermined direction in the first direction A, functional layer precursor liquid is ejected from the first nozzle row 121b and the second nozzle row 122b at the timing when the object 200 passes under the second head 1b. This ejection forms pixels (pixels marked with the number "2") corresponding to the second scan of the converted mask data 65.

<Functions and Effects of Functional Layer Forming Apparatus 100>
As described above, the functional layer forming device 100 forms a pattern on the surface of the target 200 using the functional layer precursor liquid, and has a first head 1a (discharge means) that discharges the functional layer precursor liquid onto the surface of the target 200 from a plurality of nozzles 13. The functional layer forming device 100 also has a moving stage 4 (first moving means) that moves the first head 1a and the target 200 relatively in the first direction A, and a control unit 5 (control means) that controls the operation of each of the first head 1a and the moving stage 4. The first head 1a is arranged with the first nozzle surface 11a tilted with respect to the first direction A. The control unit 5 controls the functional layer precursor liquid discharged from the nozzles 13 included in the first nozzle row 121a, which is arranged at a position relatively close to the surface of the target 200 due to the tilt of the first nozzle surface 11a among the plurality of nozzles 13, to form the contour of the pattern.

For example, by tilting the nozzle surface of the head that ejects the functional layer precursor liquid relative to the first direction, it becomes possible to form a pattern using the functional layer precursor liquid not only on the top surface but also on the side surfaces of the object. However, among the multiple nozzles included in the nozzle surface, a nozzle that is positioned relatively far from the surface of the object due to the tilt of the nozzle surface will have a longer distance to the surface of the object. For this reason, when a pattern is formed on the surface of the object using the functional layer precursor liquid ejected from the nozzle, the accuracy of the landing position of the functional layer precursor liquid on the surface of the object may decrease. The decrease in accuracy of the landing position reduces the quality of the pattern formed on the surface of the object.

In particular, if the accuracy of the landing position of the functional layer precursor liquid on the contour of the pattern decreases, the visibility of the pattern decreases and defects occur in the functional pattern. The functional pattern is, for example, electrical wiring formed on the surface of the target object. A defect in the functional pattern means, for example, a short circuit between adjacent electrical wiring or a break in the electrical wiring.

In this embodiment, the contour of the pattern is formed by the functional layer precursor liquid discharged from the nozzle 13 that is located relatively close to the surface of the object 200 due to the inclination of the first nozzle surface 11a among the multiple nozzles 13. As a result, the contour of the pattern can be formed using the nozzle 13 that is located relatively close to the surface of the object 200, without using the nozzle 13 that is located relatively far from the surface of the object 200 among the multiple nozzles 13. As a result, the distance from the nozzle 13 to the surface of the object 200 is shortened, and the landing position accuracy of the functional layer precursor liquid on the surface of the object 200 can be improved, so that the quality of the pattern formed on the surface of the object can be improved. In other words, in this embodiment, it is possible to provide a functional layer forming device 100 that can form a pattern with excellent quality. By forming a pattern with excellent quality, it is possible to increase the visibility of the pattern and reduce defects in the functional pattern.

In addition, this embodiment has a carriage 3 (second moving means) that moves the first head 1a and the object 200 relatively in the second direction B. This makes it possible to easily form a two-dimensional pattern on the surface of the object 200.

[Second embodiment]
Next, a functional layer forming apparatus according to a second embodiment will be described. Note that the same names and symbols as those in the previously described embodiments indicate the same or similar members or components, and detailed descriptions will be omitted as appropriate. This also applies to the other embodiments described below.

This embodiment differs from the first embodiment in that the functional layer forming device has a head with four nozzle rows formed on the nozzle surface.

The functional layer forming apparatus 100A according to the second embodiment will be described with reference to Figures 7 and 8. Figure 7 is a side view showing an example of a head 1A possessed by the functional layer forming apparatus 100A. Figure 7 shows a side view near the nozzle surface 11A of the head 1A. Figure 8 is a plan view showing an example of a head 1A possessed by the functional layer forming apparatus 100A. Figure 8 shows the nozzle surface 11A of the head 1A as viewed from the direction in which the functional layer precursor liquid is ejected.

As shown in FIG. 7, head 1A is arranged with nozzle surface 11A tilted with respect to first direction A. As shown in FIG. 7 and FIG. 8, four nozzle rows are formed on nozzle surface 11A of head 1A, including first nozzle row 121A, second nozzle row 122A, third nozzle row 123A, and fourth nozzle row 124A.

By positioning the nozzle surface 11A at an angle, the fourth nozzle row 124A is closest to the surface of the object located below the head 1A, followed by the third nozzle row 123A, the second nozzle row 122A, and the first nozzle row 121A, in that order.

The functional layer forming device 100A may form the contour of a pattern using at least one of the four nozzle rows, the second nozzle row 122A, the third nozzle row 123A, and the fourth nozzle row 124A, which are closer to the surface of the target object than the first nozzle row 121A. This shortens the distance from the nozzle 13 to the surface of the target object 200 compared to when the pattern is formed using the first nozzle row 121A, thereby improving the accuracy of the landing position of the functional layer precursor liquid on the surface of the target object 200. As a result, in this embodiment, the quality of the pattern formed on the surface of the target object can be improved.

When only the fourth nozzle row 124A is used to form the outline of the pattern, the quality of the pattern formed on the surface of the target object is the highest. On the other hand, when the number of nozzle rows that form the outline of the pattern is increased, the pattern that can be formed in one movement in the first direction A can be made larger, thereby improving the productivity of pattern formation.

[Third embodiment]
Next, a functional layer forming apparatus according to a third embodiment will be described. Fig. 9 is a diagram showing a configuration example of a functional layer forming apparatus 100B according to the third embodiment. Fig. 9 shows the inside of the functional layer forming apparatus 100B seen through from a direction substantially perpendicular to the transport direction 20 of the target object 200.

As shown in FIG. 9, the functional layer forming device 100B has an unwinding section 101, a coating section 300, an irradiation section 400, a drying section 500, a winding section 600, and a control section 700. The coating section 300 also has liquid ejection sections 30a, 30b, 30c, and 30d.

The functional layer forming device 100B conveys the object 200 along the conveying direction 20 by the unwinding unit 101 and the winding unit 600, while applying the functional layer precursor liquid ejected by each of the liquid ejection units 30a, 30b, 30c, and 30d included in the application unit 300 onto the object 200. Each of the liquid ejection units 30a, 30b, 30c, and 30d includes a nozzle surface on which a nozzle is formed. At least one of the nozzle surfaces of the liquid ejection units 30a, 30b, 30c, and 30d is inclined with respect to the conveying direction 20.

The functional layer forming device 100B forms a continuous, uniform functional layer on the object 200 by irradiating the functional layer precursor liquid applied onto the object 200 with ultraviolet light using the irradiation unit 400 to harden it, and by blowing warm air using the drying unit 500 to dry it.

The unwinding section 101 rotates the rotatable unwinding roll 102 with the target object 200 wound around it, and unwinds the target object 200 wound around the roll, thereby running and transporting the target object 200 from the unwinding section 101 to the coating section 300. The winding section 600 winds the target object 200 around the rotated winding roll 601 to wind up the target object 200, thereby running and transporting the target object 200 from the drying section 500 to the winding section 600.

In addition to the unwinding section 101 and the winding section 600, conveying rollers and the like not indicated with a reference number are also used as conveying means for conveying the object 200. The conveying rollers, the unwinding section 101, and the winding means constitute the conveying means for the object 200.

The object 200 is continuous along the conveying direction 20. The functional layer forming device 100B conveys the object 200 along the conveying path between the unwinding section 101 and the winding section 600. The length of the object 200 along the conveying direction 20 is at least longer than the conveying path between the unwinding section 101 and the winding section 600. The functional layer forming device 100B is capable of continuously forming functional layers on the object 200 that is continuous along the conveying direction 20.

In addition, the functional layer forming device 100B can be used for a variety of purposes. For example, the functional layer can be formed on a component contained in a battery such as a storage battery.

The components contained in a battery are manufactured by stacking various films such as electrode layers, insulating layers, and active material layers, and it is required to uniformly form films that are uniform in thickness and free of internal defects. The functional layer forming apparatus 100B can form high-quality functional layers, i.e., active material layers and insulating layers, and is therefore particularly suitable for applications in which films are formed on components including batteries. The functional layer forming apparatus 100B is an example of an electrode manufacturing apparatus.

Although the preferred embodiment has been described above in detail, the present invention is not limited to the above-described embodiment, and various modifications and substitutions can be made to the above-described embodiment without departing from the scope of the claims.

The ordinal numbers, quantities, and other numbers used in the description of the embodiments are all provided as examples to specifically explain the technology of the present invention, and the present invention is not limited to the exemplified numbers. In addition, the connections between the components are provided as examples to specifically explain the technology of the present invention, and do not limit the connections that realize the functions of the present invention.

Each function of the embodiments can be realized by one or more processing circuits. Here, the term "processing circuit" in this specification includes a processor programmed to execute each function by software, such as a processor implemented by an electronic circuit, and devices such as an ASIC (Application Specific Integrated Circuit), DSP (digital signal processor), FPGA (field programmable gate array), and conventional circuit modules designed to execute each function described above.

For example, aspects of the present invention are as follows.
<1> A functional layer forming device comprising: a discharge means for discharging functional layer precursor liquid from a plurality of nozzles onto a surface of an object; a first moving means for relatively moving the discharge means and the object in a first direction; and a control means for controlling the operation of each of the discharge means and the first moving means, wherein the discharge means has a nozzle face having the plurality of nozzles arranged at an angle with respect to the first direction, and the control means controls the functional layer precursor liquid discharged from a nozzle among the plurality of nozzles that is arranged at a position relatively close to the surface of the object due to the angle of the nozzle face to form the contour of a functional layer.
<2> The functional layer forming apparatus according to <1>, wherein the functional layer includes a pattern shape.
<3> The functional layer forming apparatus described in <1> or <2>, wherein the ejection means has a plurality of nozzle rows arranged in the first direction, the plurality of nozzle rows are arranged in a second direction intersecting the first direction, and each of the nozzle rows has the plurality of nozzles that eject the functional layer precursor liquid.
<4> The functional layer forming apparatus according to any one of <1> to <3>, further comprising a second moving means for relatively moving the discharge means and the target object in a second direction intersecting the first direction.
<5> An apparatus for manufacturing an electronic component, comprising: a discharge means for discharging functional layer precursor liquid from a plurality of nozzles onto a surface of an electronic component; a first moving means for relatively moving the discharge means and the target object in a first direction; and a control means for controlling the operation of each of the discharge means and the first moving means, wherein the discharge means has a nozzle face having the plurality of nozzles arranged at an angle with respect to the first direction, and the control means controls the functional layer precursor liquid discharged from a nozzle among the plurality of nozzles that is arranged at a position relatively close to the surface of the electronic component due to the angle of the nozzle face so as to form the contour of a functional layer.
<6> An electrode manufacturing apparatus comprising: a discharge means for discharging functional layer precursor liquid from a plurality of nozzles onto a surface of an electrode substrate; a first moving means for relatively moving the discharge means and the electrode substrate in a first direction; and a control means for controlling the operation of each of the discharge means and the first moving means, wherein the discharge means is arranged so that the nozzle face is inclined with respect to the first direction, and the control means controls so that the contour of a functional layer is formed by the functional layer precursor liquid discharged from a nozzle among the plurality of nozzles that is positioned relatively close to the surface of the electrode substrate due to the inclination of the nozzle face.
<7> A functional layer forming method for forming a functional layer by the functional layer forming apparatus described in <1>.

1 Head unit 1a First head (an example of an ejection unit)
11a: first nozzle surface 1b: second head (an example of a discharge means)
11b Second nozzle surface 1A Head 2 Irradiation unit 2a First irradiation section 2b Second irradiation section 3 Carriage (second moving means)
4. Moving stage (first moving means)
5 Control section 51 Unit control circuit 52 Memory 53 CPU
54 I/F
6 Maintenance unit 7 Detection group 13 Nozzle 61 Pattern data 62 Discharge order mask data 63 Pre-conversion mask data 64 Contour data 65 Post-conversion mask data 100, 100A, 100B Functional layer forming device (an example of an electrode manufacturing device)
121a, 121b, 121A First nozzle row 122a, 122b, 122A Second nozzle row 123a, 123A Third nozzle row 124a, 124A Fourth nozzle row 200 Object 211 Dot pattern of first scan 221 Dot pattern of second scan 300 PC
501 Data processing unit 502 Pattern forming unit 511 Data receiving unit 512 Data creating unit 513 Data output unit 521 Formation mode receiving unit 522 Discharge control unit 523 Irradiation control unit 524 First driving unit 525 Second driving unit 526 Formation control unit 527 Formation sequence setting unit 528 Drive waveform generating unit A First direction B Second direction L Ultraviolet light p Nozzle pitch

JP 2022-000341 A

Claims (7)

A discharge means for discharging a functional layer precursor liquid onto a surface of an object from a plurality of nozzles;
A first moving means for relatively moving the discharge means and the target object in a first direction;
a control unit for controlling the operation of each of the discharge unit and the first moving unit,
the ejection means is arranged such that a nozzle surface having the plurality of nozzles is inclined with respect to the first direction,
The control means controls the functional layer precursor liquid ejected from a nozzle among the multiple nozzles that is positioned relatively close to the surface of the object due to the inclination of the nozzle face, thereby forming the contour of a functional layer. The functional layer forming device according to claim 1, wherein the functional layer has a pattern shape. the ejection means has a plurality of nozzle rows aligned in the first direction,
The functional layer forming apparatus according to claim 1 , wherein the plurality of nozzle rows are aligned in a second direction intersecting the first direction, and each of the nozzle rows has the plurality of nozzles that eject the functional layer precursor liquid. The functional layer forming device according to claim 1 or 2, further comprising a second moving means for relatively moving the discharge means and the object in a second direction intersecting the first direction. A discharge means for discharging a functional layer precursor liquid onto a surface of an electronic component from a plurality of nozzles;
a first moving means for relatively moving the discharge means and the electronic component in a first direction;
a control unit for controlling the operation of each of the discharge unit and the first moving unit,
the ejection means is arranged such that a nozzle surface having the plurality of nozzles is inclined with respect to the first direction,
The control means controls the functional layer precursor liquid ejected from a nozzle among the plurality of nozzles that is positioned relatively close to the surface of the electronic component due to the inclination of the nozzle face, so as to form the contour of a functional layer. A discharge means for discharging a functional layer precursor liquid onto a surface of the electrode substrate from a plurality of nozzles;
a first moving means for relatively moving the discharge means and the electrode base material in a first direction;
a control unit for controlling the operation of each of the discharge unit and the first moving unit,
the ejection means is arranged such that a nozzle surface having the plurality of nozzles is inclined with respect to the first direction,
The control means controls the functional layer precursor liquid ejected from a nozzle among the plurality of nozzles that is positioned relatively close to the surface of the electrode substrate by inclining the nozzle face, thereby forming the contour of a functional layer. A functional layer forming method for forming a functional layer using the functional layer forming device described in claim 1.

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