JP2024077369A - Industrial Robots - Google Patents

Abstract

[Problem] To provide an industrial robot that includes an arm, a lifting body to which the arm is connected, a housing in which at least part of the lifting body is housed, and a lifting mechanism that raises and lowers the lifting body relative to the housing, the industrial robot being capable of preventing fluid from being sucked into the interior of the housing through a gap between an opening in the housing in which part of the lifting body is located and the outer peripheral surface of the lifting body when the lifting body is raised or lowered.
[Solution] The robot 1 includes a housing 12 that houses at least a portion of a lifting body 11, a lifting mechanism 13 that raises and lowers the lifting body 11, and a gas injection mechanism 17 having a gas injection part that injects gas toward the lifting body 11. The gas injection part of the gas injection mechanism 17 is disposed along the edge of an opening 19a of the housing 12 in which part of the lifting body 11 is disposed, and injects gas toward the inside of the opening 19a.
[Selected Figure] Figure 1

Description

The present invention relates to an industrial robot that includes an arm, a lifting body to which the arm is connected, and a lifting mechanism that raises and lowers the lifting body.

Conventionally, horizontal articulated industrial robots that transport semiconductor wafers are known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 includes a hand on which the semiconductor wafer is placed, an arm to which the hand is connected at its tip end, and a main body to which the base end of the arm is connected. This industrial robot is installed and used in a clean room. The main body includes a lifting body to which the base end of the arm is connected at its top end, a housing that holds the lifting body so that it can be raised and lowered, a lifting mechanism that is housed in the housing and raises and lowers the lifting body relative to the housing, and an exhaust fan for discharging gas from inside the housing.

In the industrial robot described in Patent Document 1, an exhaust hole is formed in the bottom surface that constitutes the bottom surface of the housing, through which gas exhausted from the exhaust fan passes. An opening is formed in the top surface that constitutes the top surface of the housing, in which part of the lifting body is disposed. In this industrial robot, the exhaust volume per unit time of the exhaust fan is set so that gas inside the housing does not flow out toward the arm side from the gap formed between the edge of the opening in the top surface of the housing and the outer circumferential surface of the lifting body when the lifting body descends relative to the housing. Therefore, in this industrial robot, it is possible to prevent dust generated inside the housing from flowing out from inside the housing to the arm side.

JP 2019-123024 A

In the industrial robot described in Patent Document 1, when the lifting body rises relative to the housing, negative pressure is created inside the housing. Therefore, for example, when the industrial robot described in Patent Document 1 is used in an environment where liquids such as water are used on semiconductor wafers or in an environment where dust is generated, there is a risk that gas containing liquid or dust will be sucked into the housing through the gap between the edge of the opening formed on the top surface of the housing and the outer circumferential surface of the lifting body when the lifting body rises relative to the housing. Furthermore, if gas containing liquid or dust is sucked into the housing, there is a risk of problems occurring, such as corrosion of the lifting mechanism housed inside the housing.

The objective of the present invention is to provide an industrial robot that includes an arm, a lifting body to which the arm is connected, a housing in which at least a portion of the lifting body is housed, and a lifting mechanism that raises and lowers the lifting body relative to the housing, and that is capable of preventing fluid from being sucked into the housing through a gap between the opening of the housing in which a portion of the lifting body is located and the outer circumferential surface of the lifting body when the lifting body is raised or lowered.

In order to solve the above problems, an industrial robot according to one aspect of the present invention comprises an arm, a lifting body to which the arm is connected, a housing in which at least a portion of the lifting body is housed, a lifting mechanism housed in the housing and raising and lowering the lifting body relative to the housing, and a gas injection mechanism having a gas injection part that injects gas toward the lifting body, wherein an opening in which a portion of the lifting body is disposed is formed in an upper surface portion constituting the upper surface of the housing or a lower surface portion constituting the lower surface of the housing, and the gas injection part is disposed along the edge of the opening and injects gas toward the inside of the opening.

The industrial robot of this embodiment is equipped with a gas injection mechanism having a gas injection unit that injects gas toward the lifting body. In addition, in this embodiment, the gas injection unit is arranged along the edge of an opening formed in the housing, and injects gas toward the inside of the opening. Therefore, in this embodiment, when the lifting body rises and falls relative to the housing, it is possible to generate a gas flow that is injected from the gas injection unit, hits the outer peripheral surface of the lifting body, and then flows from the opening of the housing toward the outside of the housing, and a gas flow that is injected from the gas injection unit, hits the outer peripheral surface of the lifting body, and then flows from the opening of the housing toward the inside of the housing.

Therefore, in this embodiment, even if the pressure inside the housing drops when the lifting body rises or falls relative to the housing, it is possible to prevent fluid from being sucked into the housing through the gap between the opening of the housing and the outer circumferential surface of the lifting body. In other words, in this embodiment, it is possible to prevent fluid from being sucked into the housing through the gap between the opening of the housing and the outer circumferential surface of the lifting body when the lifting body rises or falls.

In this embodiment, the gas injection mechanism preferably includes a plurality of gas injection units arranged along the edge of the opening. With this configuration, it is possible to generate a gas flow from the opening toward the outside of the housing and a gas flow from the opening toward the inside of the housing over a wider range in the circumferential direction of the opening. Therefore, when the lifting body is raised or lowered, it is possible to effectively prevent fluid from being sucked into the inside of the housing through the gap between the opening of the housing and the outer peripheral surface of the lifting body.

In this embodiment, the shape of the opening when viewed from the top and bottom is rectangular or square, and it is preferable that at least one gas injection part is disposed on each side of the rectangular or square opening when viewed from the top and bottom. With this configuration, it is possible to generate a well-balanced flow of gas flowing from the opening toward the outside of the housing and a flow of gas flowing from the opening toward the inside of the housing over the entire circumferential area of the opening. Therefore, when the lifting body is raised and lowered, it is possible to more effectively prevent fluid from being sucked into the inside of the housing through the gap between the opening of the housing and the outer circumferential surface of the lifting body.

In this embodiment, it is preferable that the housing has a second opening penetrating the side of the housing. With this configuration, it is possible to take in gas into the housing using the second opening. Therefore, even if the volume of the part of the lifting body housed in the housing is large, it is possible to suppress a drop in pressure inside the housing when the lifting body rises or falls relative to the housing, and as a result, it is possible to effectively suppress the intake of fluid into the housing through the gap between the opening of the housing and the outer circumferential surface of the lifting body when the lifting body rises or falls. In this case, for example, even if the arm of the industrial robot of the present invention is installed in an environment where liquid such as water is used, the second opening is located in an area isolated from the area where the liquid is used. Therefore, gas containing liquid is not sucked into the housing through the second opening.

In this aspect, the industrial robot preferably includes a filter attached to the second opening. With this configuration, even if the housing has a second opening, it is possible to prevent foreign matter such as dust from being sucked into the housing through the second opening.

In this embodiment, for example, the second opening is formed at the lower end of the side of the housing when the opening is formed on the upper surface, and is formed at the upper end of the side of the housing when the opening is formed on the lower surface. In this case, even if the arm of the industrial robot of the present invention is installed in an environment where liquid such as water is used, it is easy to arrange the second opening in an area isolated from the area where the liquid is used.

As described above, in the present invention, in an industrial robot that includes an arm, a lifting body to which the arm is connected, a housing in which at least a portion of the lifting body is housed, and a lifting mechanism that raises and lowers the lifting body relative to the housing, when the lifting body is raised or lowered, it becomes possible to prevent fluid from being sucked into the housing through a gap between the opening of the housing in which a portion of the lifting body is located and the outer circumferential surface of the lifting body.

1A and 1B are side views of an industrial robot according to an embodiment of the present invention, in which FIG. 1A shows a state in which a lifting body is raised, and FIG. 1B shows a state in which the lifting body is lowered. FIG. 2 is a plan view of the industrial robot shown in FIG. 2 is a view showing the main body part from the EE direction in FIG. 2 is a diagram for explaining the configuration of the main body part from the FF direction in FIG. 5 is a diagram showing the configuration of the upper end portion of the main body portion as viewed from the direction GG in FIG. 4. 6A is a cross-sectional view illustrating the configuration of a portion H in FIG. 5, and FIG. 6B is a cross-sectional view illustrating the configuration of a portion J in FIG. 5.

The following describes an embodiment of the present invention with reference to the drawings.

(General configuration of industrial robot)
Fig. 1 is a side view of an industrial robot 1 according to an embodiment of the present invention, in which (A) is a view showing a state in which a lifting body 11 is lifted, and (B) is a view showing a state in which the lifting body 11 is lowered. Fig. 2 is a plan view of the industrial robot 1 shown in Fig. 1.

The industrial robot 1 (hereinafter referred to as "robot 1") of this embodiment is a horizontal articulated robot for transporting semiconductor wafers. Robot 1 is incorporated into a semiconductor manufacturing system for use. Robot 1 comprises a hand 3 on which a semiconductor wafer is placed, an arm 4 to which hand 3 is connected, and a main body 5 to which arm 4 is connected. Robot 1 of this embodiment is used in an environment where liquid such as water is used on the semiconductor wafers.

The hand 3 is rotatably connected to the tip end of the arm 4. The base end of the arm 4 is rotatably connected to the main body 5. The arm 4 is composed of an arm 6, the base end of which is rotatably connected to the main body 5, and an arm 7, the base end of which is rotatably connected to the tip end of the arm 6. The main body 5, arm 6, arm 7, and hand 3 are arranged in this order from the bottom up in the vertical direction. The hand 3 and arm units 6 and 7 rotate with the vertical direction as the axis of rotation. The arm 4 extends and retracts in the horizontal direction. The robot 1 is equipped with an arm drive mechanism that rotates the arm units 6 and 7 and the hand 3 to extend and retract the arm 4.

The hand 3 is formed so that its shape when viewed from the top-bottom direction is approximately Y-shaped. The hand 3 comprises a mounting section 8 on which a semiconductor wafer is mounted, a mounting support section 9 to which the base end side of the mounting section 8 is fixed, and a hand base section 10 which constitutes the base end side portion of the hand 3. The hand base section 10 is rotatably connected to the tip side of the arm section 7. The hand base section 10 is rotatable relative to the arm section 7 with the vertical direction as the axial direction of the rotation.

The mounting support part 9 is rotatably connected to the hand base part 10. The mounting support part 9 is rotatable relative to the hand base part 10 with the horizontal direction as the axial direction of the rotation. The hand 3 is equipped with a rotation mechanism (not shown) that rotates the mounting part 8 and the mounting support part 9 at least 180° relative to the hand base part 10 with the horizontal direction as the axial direction of the rotation. The robot 1 is capable of flipping the semiconductor wafer mounted on the mounting part 8 together with the mounting part 8.

The main body 5 includes a lifting body 11 to which the arm 4 is connected (specifically, to which the base end of the arm 6 is connected), a housing 12 in which at least a portion of the lifting body 11 is housed, and a lifting mechanism 13 that raises and lowers the lifting body 11 relative to the housing 12. The base end of the arm 6 is rotatably connected to the upper end of the lifting body 11. The lifting mechanism 13 is housed in the housing 12. The specific configuration of the main body 5 will be described later.

As described above, the robot 1 is used in an environment where liquid such as water is used on semiconductor wafers. In this embodiment, the hand 3, the arm 4, and the upper part of the main body 5 are placed in the wet area WR, which is the area where liquid is used, and the remaining lower part of the main body 5 is placed in a dry area DR isolated from the wet area WR (see FIG. 1). At the boundary between the wet area WR and the dry area DR, a partition wall 14 is placed to separate the wet area WR and the dry area DR. In other words, the semiconductor manufacturing system in which the robot 1 is installed is equipped with the partition wall 14. The partition wall 14 serves the function of preventing liquid from entering the dry area DR from the wet area WR.

(Configuration of main body)
Fig. 3 is a view showing the main body 5 from the E-E direction in Fig. 1(A). Fig. 4 is a view for explaining the configuration of the main body 5 from the F-F direction in Fig. 1(A). Fig. 5 is a view for explaining the configuration of the upper end portion of the main body 5 from the G-G direction in Fig. 4. Fig. 6(A) is a cross-sectional view for explaining the configuration of part H in Fig. 5, and Fig. 6(B) is a cross-sectional view for explaining the configuration of part J in Fig. 5.

The main body 5 includes the lifting body 11, the housing 12, and the lifting mechanism 13 described above, as well as a gas injection mechanism 17 having a gas injection unit 16 that injects gas toward the lifting body 11. The lifting body 11 is formed in the shape of a rectangular block that is long in the vertical direction. When viewed from the vertical direction, the external shape of the lifting body 11 is rectangular.

The outer shape of the housing 12 is a rectangular prism. The housing 12 is made up of a bottom surface portion 18 that forms the bottom surface of the housing 12, a top surface portion 19 that forms the top surface of the housing 12, and a side surface portion 20 that forms the side surface of the housing 12. The bottom surface portion 18 is formed in a square flat plate shape and is arranged so that the thickness direction of the bottom surface portion 18 coincides with the up-down direction. The top surface portion 19 is formed in a square flat plate shape and is arranged so that the thickness direction of the top surface portion 19 coincides with the up-down direction. The side surface portion 20 is formed in a thin-walled rectangular tube shape.

An opening 19a is formed in the upper surface portion 19 in which a part of the lifting body 11 is disposed. The opening 19a penetrates the upper surface portion 19 in the vertical direction. When viewed from the vertical direction, the shape of the opening 19a is rectangular. A gap is formed between the edge of the opening 19a and the outer circumferential surface of the lifting body 11. The shape of the opening 19a when viewed from the vertical direction may be square.

When the lifting body 11 is lowered to the lower limit position (as shown in FIG. 1B), the entire lifting body 11 is disposed inside the housing 12. When the lifting body 11 is raised to the upper limit position (as shown in FIG. 1A), the lower end of the lifting body 11 is disposed inside the housing 12. That is, at least the lower end of the lifting body 11, which rises and falls relative to the housing 12, is accommodated in the housing 12. Even when the lifting body 11 is lowered to the lower limit position, the upper end of the lifting body 11 is disposed within the opening 19a of the upper surface portion 19. In this embodiment, the pressure inside the housing 12 decreases when the lifting body 11 rises, and the pressure inside the housing 12 increases when the lifting body 11 descends.

The side surface portion 20 has a second opening 20a that penetrates the housing 12 in the horizontal direction (see FIG. 3). That is, the housing 12 has a second opening 20a that penetrates the side surface of the housing 12. The second opening 20a is formed on one of the four side surfaces that make up the side surface portion 20. When viewed from the horizontal direction, the second opening 20a has a rectangular shape. A filter 21 is attached to the second opening 20a. That is, the main body portion 5 has a filter 21 that is attached to the second opening 20a.

The second opening 20a is formed on the lower end side of the side of the housing 12 and is located within the dry region DR. The space inside the housing 12 is connected to the dry region DR via the second opening 20a. When the lifting body 11 rises, air from the dry region DR is taken into the inside of the housing 12 through the second opening 20a. When the lifting body 11 descends, air from inside the housing 12 is exhausted into the dry region DR through the second opening 20a.

The lifting mechanism 13 includes, for example, a motor and a ball screw. The ball screw includes a screw shaft that rotates with the power of the motor, and a nut that engages with the screw shaft. The nut is attached to the lifting body 11, and when the motor rotates, the lifting body 11 rises and falls relative to the housing 12. A guide rail is fixed inside the housing 12 to guide the lifting body 11 in the up and down direction. A guide block that engages with the guide rail is fixed to the lifting body 11.

The gas injection mechanism 17 includes a plurality of gas injection units 16. The gas injection mechanism 17 of this embodiment includes five gas injection units 16. The gas injection units 16 of this embodiment inject air. Specifically, the gas injection units 16 inject dry, clean air (clean dry air). The gas injection mechanism 17 includes a compressed air supply source 24 (see FIG. 4) such as a compressor that sends compressed air to the five gas injection units 16, and a pipe that connects the supply source 24 to the gas injection units 16. The gas injection unit 16 is composed of an injection nozzle 25 that injects compressed air and a gas flow path 19b through which the air injected from the injection nozzle 25 passes. The injection nozzle 25 is attached to the upper surface portion 19. Compressed air is supplied to the injection nozzle 25 from the supply source 24 via the pipe. The gas flow path 19b is formed in the upper surface portion 19.

Five gas injection units 16 are arranged along the edge of opening 19a. In this embodiment, one gas injection unit 16 is arranged on each of three of the four sides of rectangular opening 19a when viewed from the top-bottom direction, and two gas injection units 16 are arranged on the remaining side of opening 19a (see FIG. 4). That is, at least one gas injection unit 16 is arranged on each side of rectangular opening 19a when viewed from the top-bottom direction. Gas flow path 19b is connected to opening 19a. Gas injection unit 16 injects air toward the inside of opening 19a.

The gas injection unit 16 injects air toward the inside of the opening 19a at least when the lifting body 11 rises. In this embodiment, the gas injection unit 16 constantly injects air toward the inside of the opening 19a. The air injected from the gas injection unit 16 hits the outer peripheral surface of the lifting body 11. When the air injected from the gas injection unit 16 hits the outer peripheral surface of the lifting body 11, an air flow flows from the opening 19a toward the outside of the housing 12 (i.e., an air flow toward the upper side), and an air flow flows from the opening 19a toward the inside of the housing 12 (i.e., an air flow toward the lower side) are generated (see the arrows in Figures 6 (A) and (B)).

(Main effects of this embodiment)
As described above, in this embodiment, when the lifting body 11 rises relative to the housing 12, the gas injection unit 16 arranged along the edge of the opening 19a of the housing 12 injects air toward the inside of the opening 19a. Therefore, in this embodiment, as described above, when the lifting body 11 rises relative to the housing 12, there are generated a flow of air that is injected from the gas injection unit 16, hits the outer circumferential surface of the lifting body 11, and then flows from the opening 19a toward the outside of the housing 12, and a flow of air that is injected from the gas injection unit 16, hits the outer circumferential surface of the lifting body 11, and then flows from the opening 19a toward the inside of the housing 12. Therefore, in this embodiment, even if the pressure inside the housing 12 decreases when the lifting body 11 rises relative to the housing 12, it is possible to suppress the fluid from being sucked into the inside of the housing 12 through the gap between the opening 19a and the outer circumferential surface of the lifting body 11.

In this embodiment, five gas injection units 16 are arranged along the edge of the opening 19a. Therefore, in this embodiment, a gas flow flowing from the opening 19a toward the outside of the housing 12 and a gas flow flowing from the opening 19a toward the inside of the housing 12 can be generated over a wider range in the circumferential direction of the opening 19a. Therefore, in this embodiment, when the lifting body 11 rises, it is possible to effectively prevent fluid from being sucked into the inside of the housing 12 through the gap between the opening 19a and the outer circumferential surface of the lifting body 11.

In this embodiment, at least one gas injection section 16 is disposed on each side of the rectangular opening 19a when viewed from above and below. Therefore, in this embodiment, a gas flow flowing from the opening 19a toward the outside of the housing 12 and a gas flow flowing from the opening 19a toward the inside of the housing 12 can be generated in a well-balanced manner over the entire circumferential area of the opening 19a. Therefore, in this embodiment, when the lifting body 11 rises, it is possible to more effectively prevent fluid from being sucked into the inside of the housing 12 through the gap between the opening 19a and the outer circumferential surface of the lifting body 11.

In this embodiment, the housing 12 is formed with a second opening 20a penetrating the side surface of the housing 12, and air is taken into the housing 12 through the second opening 20a when the lifting body 11 rises. Therefore, in this embodiment, even if the volume of the portion of the lifting body 11 housed in the housing 12 increases when the lifting body 11 descends, it is possible to suppress a decrease in the pressure inside the housing 12 when the lifting body 11 rises relative to the housing 12. As a result, it is possible to effectively suppress the intake of fluid into the housing 12 through the gap between the opening 19a and the outer peripheral surface of the lifting body 11 when the lifting body 11 rises.

In this embodiment, since the second opening 20a is disposed within the dry region DR, gas containing liquid is not sucked into the interior of the housing 12 through the second opening 20a. Also, in this embodiment, since the second opening 20a is formed on the lower end side of the side of the housing 12, even if the hand 3, the arm 4, and the upper part of the main body 5 are installed in the wet region WR, it is easy to place the second opening 20a in the dry region DR isolated from the wet region WR.

In this embodiment, a filter 21 is attached to the second opening 20a. Therefore, in this embodiment, even if the second opening 20a is formed in the housing 12, it is possible to prevent foreign matter such as dust from being sucked into the inside of the housing 12 through the second opening 20a.

Other Embodiments
The above-described embodiment is one example of a preferred embodiment of the present invention, but the present invention is not limited to this embodiment and various modifications can be made without departing from the spirit and scope of the present invention.

In the above-described embodiment, the robot 1 may be installed upside down. In this case, the main body 5, the arm 6, the arm 7, and the hand 3 are arranged in this order from the top in the vertical direction, and an opening corresponding to the opening 19a is formed in the lower surface portion that constitutes the lower surface of the housing 12. Also, in this case, a second opening 20a is formed on the upper end side of the side surface of the housing 12. Also, in this case, the pressure inside the housing 12 decreases when the lifting body 11 descends, and the pressure inside the housing 12 increases when the lifting body 11 ascends.

In the above-mentioned embodiment, the gas injection unit 16 may inject air toward the inside of the opening 19a only when the lifting body 11 rises. Also, the gas injection unit 16 may inject air toward the inside of the opening 19a only when the lifting body 11 rises and falls. Also, in the above-mentioned embodiment, the gas injection unit 16 may inject a gas other than air. Furthermore, in the above-mentioned embodiment, when viewed from the top and bottom, there may be a side among the sides of the rectangular opening 19a on which the gas injection unit 16 is not arranged. Also, in the above-mentioned embodiment, the number of gas injection units 16 that the gas injection mechanism 17 has may be six or more. Also, the number of gas injection units 16 that the gas injection mechanism 17 has may be two or more and four or less, or may be one.

In the above-described embodiment, the second opening 20a does not need to be formed in the housing 12 as long as it is possible to sufficiently prevent fluid from being sucked into the housing 12 through the gap between the opening 19a and the outer circumferential surface of the lifting body 11. In this case, the entire robot 1 may be disposed in the wet area WR. Also, in the above-described embodiment, the shape of the opening 19a when viewed from the top and bottom may be a shape other than a rectangle or a square. For example, the shape of the opening 19a when viewed from the top and bottom may be a circle.

In the above-described embodiment, when the lifting body 11 is lowered to the lowest position, the upper end of the lifting body 11 may protrude above the upper end of the housing 12. Also, in the above-described embodiment, the robot 1 may include two hands 3 rotatably connected to the tip end of the arm 4. Furthermore, in the above-described embodiment, the arm 4 may be composed of three or more arm portions. Also, in the above-described embodiment, the transport object transported by the robot 1 may be something other than a semiconductor wafer. In this case, for example, the transport object may be formed in the shape of a square or rectangular flat plate.

The industrial robot to which the present invention is applied may be a robot other than a horizontal articulated industrial robot. For example, the industrial robot to which the present invention is applied may be an industrial robot that includes an arm to which the hand 3 is connected so that the hand 3 can move back and forth linearly, a main body to which the arm is rotatably connected, and a linear drive unit that moves the hand 3 back and forth linearly relative to the arm.

(Configuration of this technology)
The present technology can be configured as follows.
(1) A robotic arm includes an arm, a lifting body to which the arm is connected, a housing in which at least a portion of the lifting body is housed, a lifting mechanism housed in the housing and configured to raise and lower the lifting body relative to the housing, and a gas injection mechanism having a gas injection unit that injects gas toward the lifting body,
an opening in which a part of the lifting body is disposed is formed in an upper surface portion constituting an upper surface of the housing or a lower surface portion constituting a lower surface of the housing;
The gas injection unit is disposed along an edge of the opening and injects gas toward the inside of the opening.
(2) The industrial robot according to (1), wherein the gas injection mechanism includes a plurality of the gas injection parts arranged along the edge of the opening.
(3) The shape of the opening when viewed from above and below is rectangular or square,
3. The industrial robot according to claim 2, wherein at least one of the gas injection parts is disposed on each side of the opening, which is rectangular or square when viewed from above and below.
(4) An industrial robot according to any one of (1) to (3), characterized in that the housing has a second opening penetrating a side surface of the housing.
(5) An industrial robot according to (4), further comprising a filter attached to the second opening.
(6) An industrial robot according to (4) or (5), characterized in that the second opening is formed on the lower end side of the side of the housing when the opening is formed on the upper surface portion, and is formed on the upper end side of the side of the housing when the opening is formed on the lower surface portion.

1. Robots (industrial robots)
Reference Signs List 4: Arm 5: Main body 11: Lifting body 12: Housing 13: Lifting mechanism 16: Gas injection part 17: Gas injection mechanism 19: Top surface 19a: Opening 20a: Second opening 21: Filter

Claims (6)

a lifting body to which the arm is connected, a housing in which at least a portion of the lifting body is housed, a lifting mechanism housed in the housing and raising and lowering the lifting body relative to the housing, and a gas injection mechanism having a gas injection part that injects gas toward the lifting body,
an opening in which a part of the lifting body is disposed is formed in an upper surface portion constituting an upper surface of the housing or a lower surface portion constituting a lower surface of the housing;
The gas injection unit is disposed along an edge of the opening and injects gas toward the inside of the opening. The industrial robot according to claim 1, characterized in that the gas injection mechanism comprises a plurality of the gas injection parts arranged along the edge of the opening. The shape of the opening when viewed from above and below is rectangular or square,
3. The industrial robot according to claim 2, wherein at least one of the gas ejection sections is disposed on each side of the opening which is rectangular or square when viewed from above and below. An industrial robot according to any one of claims 1 to 3, characterized in that the housing has a second opening penetrating the side of the housing. The industrial robot according to claim 4, characterized in that it is provided with a filter attached to the second opening. The industrial robot according to claim 4, characterized in that the second opening is formed on the lower end side of the side of the housing when the opening is formed on the upper surface portion, and is formed on the upper end side of the side of the housing when the opening is formed on the lower surface portion.

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