JP2024058185A - 光電変換装置、光電変換装置の駆動方法、半導体基板、機器 - Google Patents

光電変換装置、光電変換装置の駆動方法、半導体基板、機器 Download PDF

Info

Publication number
JP2024058185A
JP2024058185A JP2022165393A JP2022165393A JP2024058185A JP 2024058185 A JP2024058185 A JP 2024058185A JP 2022165393 A JP2022165393 A JP 2022165393A JP 2022165393 A JP2022165393 A JP 2022165393A JP 2024058185 A JP2024058185 A JP 2024058185A
Authority
JP
Japan
Prior art keywords
well
photoelectric conversion
transistor
potential
conversion device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022165393A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024058185A5 (enExample
Inventor
真也 市野
Shinya Ichino
秀樹 池戸
Hideki Ikedo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2022165393A priority Critical patent/JP2024058185A/ja
Priority to US18/483,857 priority patent/US20240136370A1/en
Publication of JP2024058185A publication Critical patent/JP2024058185A/ja
Publication of JP2024058185A5 publication Critical patent/JP2024058185A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/807Pixel isolation structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/809Constructional details of image sensors of hybrid image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/811Interconnections

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2022165393A 2022-10-14 2022-10-14 光電変換装置、光電変換装置の駆動方法、半導体基板、機器 Pending JP2024058185A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2022165393A JP2024058185A (ja) 2022-10-14 2022-10-14 光電変換装置、光電変換装置の駆動方法、半導体基板、機器
US18/483,857 US20240136370A1 (en) 2022-10-14 2023-10-10 Photoelectric conversion apparatus, method of driving the apparatus, semiconductor substrate, and equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022165393A JP2024058185A (ja) 2022-10-14 2022-10-14 光電変換装置、光電変換装置の駆動方法、半導体基板、機器

Publications (2)

Publication Number Publication Date
JP2024058185A true JP2024058185A (ja) 2024-04-25
JP2024058185A5 JP2024058185A5 (enExample) 2025-10-20

Family

ID=90789878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022165393A Pending JP2024058185A (ja) 2022-10-14 2022-10-14 光電変換装置、光電変換装置の駆動方法、半導体基板、機器

Country Status (2)

Country Link
US (1) US20240136370A1 (enExample)
JP (1) JP2024058185A (enExample)

Also Published As

Publication number Publication date
US20240136370A1 (en) 2024-04-25

Similar Documents

Publication Publication Date Title
JP6808316B2 (ja) 撮像装置、および、撮像システム
US11626431B2 (en) Photoelectric conversion apparatus, solid-state image sensor and device
JP7534902B2 (ja) 光電変換装置、撮像装置、半導体装置及び光電変換システム
JP2019140637A (ja) 撮像装置及び撮像システム
US10818724B2 (en) Photoelectric conversion device and imaging system
US12142623B2 (en) Photoelectric conversion device having a substrate with pixels each including a photoelectric converter, a charge holding portion, and an amplifier unit
JP7414791B2 (ja) 光電変換装置、機器
US20240006451A1 (en) Photoelectric conversion apparatus, equipment, layered structure
US20240015415A1 (en) Photoelectric conversion device, imaging system, and equipment
JP2023072534A (ja) 光電変換装置及び機器
WO2021106748A1 (ja) 半導体装置および機器
US20210159258A1 (en) Photoelectric conversion device, imaging system, and movable body
JP2024058185A (ja) 光電変換装置、光電変換装置の駆動方法、半導体基板、機器
JP7682677B2 (ja) 光電変換装置、機器、基板
JP6808317B2 (ja) 撮像装置、および、撮像システム
US20240038816A1 (en) Photoelectric conversion device and apparatus
US20230420468A1 (en) Photoelectric conversion device
US20250267964A1 (en) Apparatus and equipment
US20250267970A1 (en) Photoelectric conversion apparatus
JP7551304B2 (ja) 半導体装置及び機器
US20250330726A1 (en) Photoelectric conversion apparatus and equipment
JP2023178690A (ja) 光電変換装置、機器
JP2020191600A (ja) 光電変換装置および光電変換システム
US20240038811A1 (en) Photoelectric conversion apparatus and equipment
JP2023178688A (ja) 光電変換装置、機器

Legal Events

Date Code Title Description
RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20231213

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20251009

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20251009