JP2024047932A - Soft magnetic foil and its manufacturing method - Google Patents
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- 239000011888 foil Substances 0.000 title claims abstract description 60
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 239000013078 crystal Substances 0.000 claims abstract description 29
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 23
- 239000000956 alloy Substances 0.000 claims abstract description 23
- 230000035699 permeability Effects 0.000 claims abstract description 23
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 12
- 238000001816 cooling Methods 0.000 claims abstract description 9
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 8
- 238000013016 damping Methods 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000005096 rolling process Methods 0.000 description 7
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 229910000889 permalloy Inorganic materials 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 229910001035 Soft ferrite Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000001887 electron backscatter diffraction Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000005242 forging Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
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Abstract
【課題】製造性に優れ且つ渦電流損失を抑制でき高周波透磁率に優れたＦｅ－Ｎｉ系合金からなる軟磁性箔体及びその製造方法の提供。【解決手段】Ｆｅに３５～８０質量％のＮｉを含むＦｅ－Ｎｉ系合金からなる軟磁性箔体である。厚さ方向に［１１１］軸を配向させた柱状結晶からなる内部組織を有し、直流比透磁率を３５００以上かつ減衰周波数を１５０ｋＨｚ以上とすることを特徴とする。軟磁性箔体の製造方法は、Ｆｅに３５～８０質量％のＮｉを含むＦｅ－Ｎｉ系合金を溶融させて回転する冷却ロールの上に与えて連続した帯状箔体に凝固させる軟磁性箔体の製造方法である。厚さ方向に［１１１］軸を配向させた柱状結晶からなる内部組織を有し、厚さ方向断面における柱状結晶の［１１１］軸の配向度が９０以上とするように冷却ロールの回転を制御することを特徴とする。【選択図】 図２[Problem] To provide a soft magnetic foil made of an Fe-Ni alloy that is excellent in manufacturability, suppresses eddy current loss, and has excellent high-frequency magnetic permeability, and a method for manufacturing the same. [Solution] A soft magnetic foil made of an Fe-Ni alloy containing 35 to 80 mass % Ni in Fe. The soft magnetic foil has an internal structure made of columnar crystals with the [111] axis oriented in the thickness direction, and is characterized by a DC relative magnetic permeability of 3500 or more and an attenuation frequency of 150 kHz or more. A method for manufacturing a soft magnetic foil is to melt an Fe-Ni alloy containing 35 to 80 mass % Ni in Fe, apply it to a rotating cooling roll, and solidify it into a continuous belt-shaped foil. The soft magnetic foil has an internal structure made of columnar crystals with the [111] axis oriented in the thickness direction, and is characterized by controlling the rotation of the cooling roll so that the orientation degree of the [111] axis of the columnar crystals in a cross section in the thickness direction is 90 or more. [Selected Figure] Figure 2
Description
本発明は、Ｆｅ－Ｎｉ系合金からなる軟磁性箔体及びその製造方法に関する。 The present invention relates to a soft magnetic foil made of an Fe-Ni alloy and a method for manufacturing the same.
電子回路におけるノイズ抑制部品であるＣＭＣ（Common Mode Choke-coil：コモンモードチョークコイル）には、ノイズ周波数に応じてパーマロイ（Ｆｅ－Ｎｉ系合金）やソフトフェライトなどの材料が用いられる。例えば、１００ｋＨｚを超えるような高周波帯では、飽和磁束密度は低いが、高い電気抵抗を有するソフトフェライトが多く使用されている。一方、ソフトフェライトは温度上昇に伴って磁気特性を劣化させるため、より磁気特性の温度安定性の高いパーマロイの利用も考慮できる。 Common mode choke coils (CMCs), which are noise suppression components in electronic circuits, use materials such as permalloy (an Fe-Ni alloy) and soft ferrite depending on the noise frequency. For example, in high frequency bands over 100 kHz, soft ferrite, which has a low saturation magnetic flux density but high electrical resistance, is often used. On the other hand, since the magnetic properties of soft ferrite deteriorate with increasing temperature, the use of permalloy, which has magnetic properties with higher temperature stability, can also be considered.
例えば、特許文献１では、パーマロイからなる高周波用ノイズフィルタ用の軟磁性金属箔の製造方法が開示されている。熱間圧延材であるコイルから厚さ２０μｍ程度の軟磁性金属箔が引き出され、圧延装置の圧延ロールにより厚さが３～１４μｍ程度になるまで圧延しコイルに巻回する。その後、７００～１１００℃の温度で１０～６５秒間加熱して結晶粒の大きさを大きくし、磁気特性の調整を図るとしている。 For example, Patent Document 1 discloses a method for manufacturing soft magnetic metal foil made of permalloy for use in high-frequency noise filters. Soft magnetic metal foil with a thickness of about 20 μm is drawn out from a coil of hot-rolled material, and is rolled by the rolling rolls of a rolling mill until the thickness is about 3 to 14 μm, and then wound into a coil. It is then heated at a temperature of 700 to 1100°C for 10 to 65 seconds to increase the size of the crystal grains and adjust the magnetic properties.
上記したような、Ｆｅ－Ｎｉ系合金からなるパーマロイは、ＭｏやＣｕ、Ｃｒ等を添加することでより透磁率を高めることができるが、一方で、箔体への圧延が難しくなる。また、パーマロイはソフトフェライト対比で、温度安定性が高い一方、電気抵抗が低く、高周波帯での使用には、渦電流損失を抑制することが必要となる。 As mentioned above, permalloy, which is made of an Fe-Ni alloy, can have its magnetic permeability increased by adding Mo, Cu, Cr, etc., but this makes it difficult to roll into foil. In addition, permalloy has high temperature stability compared to soft ferrite, but its electrical resistance is low, and for use in high frequency bands, it is necessary to suppress eddy current loss.
本発明は、以上のような状況に鑑みてなされたものであって、その目的とするところは、製造性に優れ且つ渦電流損失を抑制でき高周波透磁率に優れたＦｅ－Ｎｉ系合金からなる軟磁性箔体及びその製造方法を提供することにある。 The present invention was made in consideration of the above circumstances, and its purpose is to provide a soft magnetic foil made of an Fe-Ni alloy that is easy to manufacture, suppresses eddy current loss, and has excellent high-frequency magnetic permeability, and a method for manufacturing the same.
本発明による軟磁性箔体は、Ｆｅに３５～８０質量％のＮｉを含むＦｅ－Ｎｉ系合金からなる軟磁性箔体であって、厚さ方向に［１１１］軸を配向させた柱状結晶からなる内部組織を有し、直流比透磁率を３５００以上かつ減衰周波数を１５０ｋＨｚ以上とすることを特徴とする。 The soft magnetic foil according to the present invention is a soft magnetic foil made of an Fe-Ni alloy containing 35 to 80 mass % Ni in Fe, and is characterized by having an internal structure made of columnar crystals with the [111] axis oriented in the thickness direction, a DC relative permeability of 3500 or more, and an attenuation frequency of 150 kHz or more.
かかる特徴によれば、鍛造法によらずいわゆる単ロール法で箔体を製造できるから製造性に優れ、渦電流損失を抑制し高周波透磁率に優れた軟磁性箔体とできるのである。 This feature allows the foil to be manufactured using the so-called single roll method rather than a forging method, resulting in a soft magnetic foil with excellent manufacturability, reduced eddy current loss, and excellent high-frequency magnetic permeability.
本発明による軟磁性箔体の製造方法は、Ｆｅに３５～８０ｗｔ％のＮｉを含むＦｅ－Ｎｉ系合金を溶融させて回転する冷却ロールの上に与えて連続した帯状箔体に凝固させる軟磁性箔体の製造方法であって、厚さ方向に［１１１］軸を配向させた柱状結晶からなる内部組織を有し、厚さ方向断面における前記柱状結晶の［１１１］軸の配向度が９０以上とするように前記冷却ロールの回転を制御することを特徴とする。 The method for manufacturing soft magnetic foil according to the present invention is a method for manufacturing soft magnetic foil in which an Fe-Ni alloy containing 35 to 80 wt % Ni in Fe is melted and placed on a rotating cooling roll to solidify into a continuous strip-shaped foil, and is characterized in that the foil has an internal structure consisting of columnar crystals with the [111] axis oriented in the thickness direction, and the rotation of the cooling roll is controlled so that the degree of orientation of the [111] axis of the columnar crystals in the thickness direction cross section is 90 or more.
かかる特徴によれば、鍛造法よりも製造性に優れるいわゆる単ロール法で、渦電流損失を抑制し高周波透磁率に優れた軟磁性箔体を製造できるのである。 Due to these characteristics, it is possible to produce soft magnetic foils with excellent high-frequency permeability and reduced eddy current loss using the so-called single roll method, which has superior manufacturability compared to forging methods.
本発明の例による軟磁性箔体及びその製造方法について、図１乃至図３を用いて説明する。 The soft magnetic foil according to the present invention and its manufacturing method will be described with reference to Figs. 1 to 3.
本実施例における軟磁性箔体は、Ｆｅに３５～８０質量％のＮｉを含む成分組成を有するＦｅ－Ｎｉ系合金からなる。かかる成分組成において、Ｃｕ及び／又はＭｏを、それぞれ１．０～６．０質量％、３．０～６．０質量％の範囲で更に含んでもよい。また、かかる成分組成において、Ｍｎを０．４～０．６質量％の範囲で更に含んでもよい。なお、Ｎｉの含有量は、７５～８０質量％の範囲内であることが好ましい。また、Ｃｕを添加する場合に、その含有量は、２．０～４．０質量％の範囲内であることが好ましく、Ｍｏを添加する場合に、その含有量は、４．０～５．０質量％の範囲内であることが好ましい。 The soft magnetic foil in this embodiment is made of an Fe-Ni alloy having a composition containing 35 to 80 mass% Ni in Fe. This composition may further contain Cu and/or Mo in the ranges of 1.0 to 6.0 mass% and 3.0 to 6.0 mass%, respectively. This composition may further contain Mn in the range of 0.4 to 0.6 mass%. The Ni content is preferably in the range of 75 to 80 mass%. When Cu is added, the content is preferably in the range of 2.0 to 4.0 mass%, and when Mo is added, the content is preferably in the range of 4.0 to 5.0 mass%.
上記した成分組成となるよう調整した合金は、いわゆる単ロール法によって箔体とされる。すなわち、かかる合金を溶融させた溶湯を回転する冷却ロールの上に与え凝固させて、連続した帯状箔体を得るのである。このとき、冷却ロールと溶湯の温度、溶湯の時間当たりの供給量、冷却ロールの周速などの条件によって得られる箔体の厚さが変化し、内部の金属組織にも影響を与える。本実施例においては、冷却ロールの回転によって周速を制御し、後述するような厚さや内部組織を有する箔体を得られるように調整する。 The alloy adjusted to have the above-mentioned composition is made into a foil by the so-called single roll method. That is, the alloy is melted and poured onto a rotating chill roll where it solidifies to obtain a continuous strip-shaped foil. At this time, the thickness of the foil obtained varies depending on conditions such as the temperature of the chill roll and the molten metal, the amount of molten metal supplied per hour, and the peripheral speed of the chill roll, and this also affects the internal metal structure. In this embodiment, the peripheral speed is controlled by the rotation of the chill roll, and adjustments are made to obtain a foil with the thickness and internal structure described below.
最後に、箔体に熱処理を行って焼鈍する。後述するように、得られる軟磁性箔体では、厚さ方向に伸びた柱状結晶を得るが、ここでは得られた柱状結晶を維持するように比較的低温で熱処理を行う。すなわち、焼鈍の効果を得られるよう、５００℃以上とすることが好ましく、一方で、再結晶を防止するよう９５０℃以下とすることが好ましい。典型的には８００℃×３時間の熱処理とすることができる。 Finally, the foil is heat-treated to anneal it. As described below, the resulting soft magnetic foil has columnar crystals extending in the thickness direction, but here the heat treatment is performed at a relatively low temperature to maintain the columnar crystals. That is, to obtain the annealing effect, it is preferable to set the temperature to 500°C or higher, while it is preferable to set the temperature to 950°C or lower to prevent recrystallization. Typically, the heat treatment can be performed at 800°C for 3 hours.
図１に示すように、このようにして得られた本実施例による軟磁性箔体１は、圧延方向（ＲＤ：Ｒｏｌｌｉｎｇ Ｄｉｒｅｃｔｉｏｎ）に長く、横方向（ＴＤ：Ｔｒａｎｓｖｅｒｓａｌ Ｄｉｒｅｃｔｉｏｎ）を幅とし、ＲＤ－ＴＤ面の法線方向（ＮＤ：Ｎｏｒｍａｌ Ｄｉｒｅｄｔｉｏｎ）を厚さ方向とする帯状体である。 As shown in FIG. 1, the soft magnetic foil 1 according to this embodiment obtained in this manner is a strip-shaped body that is long in the rolling direction (RD), wide in the transverse direction (TD), and has a thickness direction normal to the RD-TD plane (ND).
図２を併せて参照すると、軟磁性箔体１は、冷却ロールに接触したロール面２の近傍に微細な球状の結晶粒によるチル晶１１を形成し、チル晶１１からフリー面３に向けて厚さ方向に伸びた柱状の結晶からなる柱状結晶１２を形成した内部組織を有する。柱状結晶１２は、主に厚さ方向に［１１１］軸を配向させており、厚さ方向断面における［１１１］軸の配向度が９０以上となるように調整される。ここで、配向度Ａは、電子線後方散乱回折（ＥＢＳＤ）法による解析におけるデータ数をｉ、磁化困難軸である［１１１］軸の方向と厚さ方向（ＮＤ方向）とのなす角をθとして、次の（式１）で表される。なお、今回、データ数ｉは４０万点とした。
Referring also to FIG. 2, the soft magnetic foil 1 has an internal structure in which chill crystals 11 made of fine spherical crystal grains are formed near the
つまり、このような内部組織を得られるように、冷却ロールの回転の制御や、熱処理温度の調整を行うのである。そして得られた軟磁性箔体１によれば、磁気特性として直流透磁率を３５００超、減衰周波数を１５０ｋＨｚ以上とすることができる。ここで、減衰周波数は、直流透磁率対比で交流透磁率を９０％まで減衰させるときの周波数とする。 In other words, the rotation of the cooling roll is controlled and the heat treatment temperature is adjusted to obtain this internal structure. The resulting soft magnetic foil 1 can have magnetic properties such as a DC permeability of over 3500 and a damping frequency of 150 kHz or more. Here, the damping frequency is the frequency at which the AC permeability is damped to 90% compared to the DC permeability.
軟磁性箔体１は、上記したように柱状結晶を得ることで結晶粒を比較的小さく維持し得て、渦電流損失を抑制し、高い高周波透磁率を得ることができる。これによって、例えば、箔体の厚さを１５μｍとするときに、最大約１．５ＭＨｚまでの高周波域においてフェライト以上の透磁率を得ることが可能となる。なお、厚さを４５μｍ以下とすることで、比較的高い高周波透磁率を得ることができて好適である。 As described above, by obtaining columnar crystals, the soft magnetic foil 1 can maintain the crystal grains relatively small, suppressing eddy current losses and achieving high high-frequency permeability. As a result, for example, when the foil thickness is 15 μm, it is possible to obtain a permeability equal to or greater than that of ferrite in the high-frequency range up to a maximum of approximately 1.5 MHz. It is preferable to set the thickness to 45 μm or less, since a relatively high high-frequency permeability can be obtained.
なお、図３に示すように、９５０℃を超える熱処理によって再結晶を生じて柱状結晶を維持できなかった場合、柱状結晶に比べて粗大な結晶粒からなる内部組織となり、上記した磁気特性を得ることが難しくなる。例えば、粗大な結晶粒によって渦電流損失を増大させてしまい、高周波透磁率を低下させてしまう。 As shown in Figure 3, if recrystallization occurs due to heat treatment above 950°C and the columnar crystals cannot be maintained, the internal structure will be made up of coarse crystal grains compared to the columnar crystals, making it difficult to obtain the magnetic properties described above. For example, the coarse crystal grains will increase eddy current loss and reduce high-frequency permeability.
［製造試験］
上記した製造方法によって軟磁性箔体１を得て、磁気特性を調査した結果について図４乃至図６を用いて説明する。
[Production testing]
The soft magnetic foil 1 was obtained by the above-mentioned manufacturing method, and the magnetic properties were examined. The results will be described with reference to FIGS.
図４に示すように、本製造試験には、質量％で、Ｎｉを７７．４％、Ｃｕを３．５％、Ｍｎを０．５％、Ｍｏを４．５％含有するＦｅ－Ｎｉ系合金を用いた。 As shown in Figure 4, an Fe-Ni alloy containing, by mass%, 77.4% Ni, 3.5% Cu, 0.5% Mn, and 4.5% Mo was used for this manufacturing test.
図５に示すロール周速で、上記のＦｅ－Ｎｉ系合金による溶湯を単ロール法で箔体とした。ロール周速を高くするほど得られる箔体の厚さが減少することが判る。５０μｍ未満の比較的小さな厚さの連続帯を得たのは、ロール周速を１８ｍ／ｓ以上とした場合であった。そして、厚さが７２μｍとなった比較例２においては、連続帯の形状を得られずにフレーク状となってしまった。そのため、比較例２では、形状の良否としては不良と判断され「×」を記録された。なお、その他の実施例、比較例においては帯状の箔体を得ることができたので、形状の良否としては良好と判定し「〇」を記録した。 At the roll circumferential speed shown in Figure 5, the above molten Fe-Ni alloy was made into a foil by the single roll method. It can be seen that the thickness of the obtained foil decreases as the roll circumferential speed increases. A continuous band with a relatively small thickness of less than 50 μm was obtained when the roll circumferential speed was 18 m/s or more. In Comparative Example 2, where the thickness was 72 μm, a continuous band shape was not obtained and the shape became flake-like. Therefore, in Comparative Example 2, the shape was judged to be poor and an "X" was recorded. Note that in the other examples and comparative examples, a band-shaped foil could be obtained, so the shape was judged to be good and an "O" was recorded.
図６に示すように、得られた箔体について直流比透磁率、減衰周波数を測定し、高周波透磁率についての良否について判定した。直流比透磁率は、インピーダンス・アナライザＥ４９９０Ａ（キーサイト・テクノロジー社製）を用いて測定される印加磁界４．０Ａ／ｍにおけるインダクタンスから算出した。高周波透磁率の良否については、直流比透磁率で３５００超、減衰周波数で１５０ｋＨｚ以上の両者を満たす場合に良好と判定し、「〇」を記録し、それ以外の場合に不良と判定し「×」を記録した。 As shown in Figure 6, the DC relative permeability and attenuation frequency of the obtained foil body were measured, and the high frequency permeability was judged to be good or bad. The DC relative permeability was calculated from the inductance at an applied magnetic field of 4.0 A/m measured using an impedance analyzer E4990A (manufactured by Keysight Technologies). Regarding the quality of the high frequency permeability, if both the DC relative permeability was over 3500 and the attenuation frequency was 150 kHz or more, it was judged to be good and recorded as "◯", otherwise it was judged to be bad and recorded as "X".
これらの結果から、得られる箔体の厚さが増すほどに、配向度が低下する傾向にあり、直流比透磁率及び減衰周波数の双方も低下する傾向にあることが判った。また、今回の結果において、４５μｍ以下の厚さとなる実施例１～５であれば、高周波透磁率を良好とし得ることが判った。 These results show that as the thickness of the resulting foil increases, the degree of orientation tends to decrease, and both the DC relative permeability and the attenuation frequency also tend to decrease. Furthermore, the results show that in Examples 1 to 5, which have a thickness of 45 μm or less, good high-frequency permeability can be achieved.
以上、本発明の代表的な実施例を説明したが、本発明は必ずしもこれらに限定されるものではなく、当業者であれば、本発明の主旨又は添付した特許請求の範囲を逸脱することなく、種々の代替実施例及び改変例を見出すことができるであろう。 Although the representative embodiments of the present invention have been described above, the present invention is not necessarily limited to these, and a person skilled in the art will be able to find various alternative embodiments and modifications without departing from the spirit of the present invention or the scope of the appended claims.
１ 軟磁性箔体
２ ロール面
３ フリー面
１１ チル晶
１２ 柱状結晶
Reference Signs List 1 Soft
Claims (10)
厚さ方向に［１１１］軸を配向させた柱状結晶からなる内部組織を有し、直流比透磁率を３５００以上かつ減衰周波数を１５０ｋＨｚ以上とすることを特徴とする軟磁性箔体。 A soft magnetic foil made of an Fe-Ni alloy containing 35 to 80 mass % Ni in Fe,
A soft magnetic foil having an internal structure made of columnar crystals with the [111] axis oriented in the thickness direction, and characterized in that it has a DC relative permeability of 3500 or more and an attenuation frequency of 150 kHz or more.
厚さ方向に［１１１］軸を配向させた柱状結晶からなる内部組織を有し、厚さ方向断面における前記柱状結晶の［１１１］軸の配向度を９０以上とするように前記冷却ロールの回転を制御することを特徴とする軟磁性箔体の製造方法。 A method for producing a soft magnetic foil, comprising melting an Fe-Ni alloy containing 35 to 80 mass % Ni in Fe, applying the melted alloy to a rotating cooling roll, and solidifying the melted alloy into a continuous belt-shaped foil, comprising the steps of:
A method for producing a soft magnetic foil, characterized in that the soft magnetic foil has an internal structure consisting of columnar crystals with their [111] axes oriented in the thickness direction, and the rotation of the cooling roll is controlled so that the orientation degree of the [111] axes of the columnar crystals in a cross section in the thickness direction is 90 or more.
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