JP2024041395A - Imaging device - Google Patents

Abstract

[Problem] To provide a technology that can relax restrictions on mirror placement while maintaining the imaging angle and imaging magnification in a device that images a workpiece via a mirror. [Solution] An imaging device 13 images a workpiece 9 from multiple directions. The imaging device 13 includes a single camera 20, a mirror 41 located on a first optical path LP1 that leads from the workpiece 9 to the camera 20, and mirrors 51 and 52 located on a second optical path LP2 that is an optical path different from the first optical path LP1 and leads from the workpiece 9 to the camera 20. On the second optical path LP2, the mirror 52 is located between the workpiece 9 and the mirror 51. The optical path length of the first optical path LP1 and the optical path length of the second optical path LP2 are equal. [Selected Figure] Figure 1

Description

The subject matter disclosed herein relates to an imaging device.

2. Description of the Related Art Conventionally, there has been known an inspection device that inspects the appearance of a workpiece based on a captured image obtained by capturing an image of the workpiece with a camera (for example, Patent Document 1). In Patent Document 1, two mirrors are arranged around the inspection target. The two mirrors are arranged so that the image captured by the camera includes a mirror image of the external appearance of the inspection target. Thereby, the appearance of the workpiece can be observed from multiple directions based on the captured image.

Japanese Patent Application Publication No. 2020-148735

However, when images are taken with a plurality of mirrors in the field of view at the same time, the mirror arrangement is uniquely determined by the imaging angle and imaging magnification. Therefore, the degree of freedom in designing the device becomes relatively low. For example, if the distance between the workpiece and mirror is shortened in order to obtain the desired imaging angle and desired imaging magnification, it is necessary to secure clearance between them to install a reflected illumination light source, etc. It becomes difficult. Therefore, there is a need for a technique that can alleviate constraints on mirror arrangement while maintaining the imaging angle and imaging magnification.

An object of the present invention is to provide a technique that can alleviate constraints on mirror arrangement while maintaining the imaging angle and imaging magnification in an apparatus that images a workpiece through a mirror.

In order to solve the above problems, a first aspect is an imaging device that images a workpiece from a plurality of directions, which includes a single camera and a first mirror located on a first optical path from the workpiece to the camera. , a second mirror and a third mirror located on a second optical path from the workpiece to the camera, which is an optical path different from the first optical path, and on the second optical path, the third mirror is located between the workpiece and the second mirror, and the optical path length of the first optical path and the optical path length of the second optical path are equal.

A second aspect of the imaging device of the first aspect includes a fourth mirror located on the second optical path and located between the third mirror and the second mirror on the second optical path. Be prepared for more.

A third aspect is the imaging device of the first aspect or the second aspect, in which starting points of the first optical path and the second optical path are set at the same location in the imaging workpiece.

A fourth aspect is the imaging device according to the first aspect or the second aspect, in which starting points of the first optical path and the second optical path are set at different parts of the imaging work.

A fifth aspect is the imaging device according to any one of the first to fourth aspects, wherein the camera includes an image sensor and an imaging lens that forms an image on the image sensor, and the imaging lens includes: It includes the object-side telecentric lens.

A sixth aspect is the imaging device according to any one of the first to fifth aspects, further comprising a reflected illumination light source that illuminates the workpiece, and wherein the first mirror and the second mirror The reflected illumination light source is located apart in a first direction, and is located between the workpiece and the first mirror and between the workpiece and the second mirror in the first direction.

A seventh aspect is the imaging device according to any one of the first to sixth aspects, in which the third mirror is located closer to the workpiece than the first mirror.

According to the imaging devices of the first to seventh aspects, the optical path length from the workpiece to the second mirror can be extended by the third mirror regarding the second optical path. Thereby, even if the position of the second mirror is changed, the optical path length of the second optical path can be maintained constant by adjusting the position of the third mirror. Therefore, constraints on mirror arrangement can be relaxed while maintaining the imaging angle and imaging magnification.

According to the imaging device of the second aspect, by providing the fourth mirror, the optical path length of the second optical path can be easily adjusted. In addition, in order to capture a larger workpiece inside the mirror in the captured image, it is necessary to arrange the mirrors so that the surfaces of the mirrors face each other as much as possible on the optical path (in other words, the turning angle of the optical path on the mirror is as close to 45° as possible). It is preferable to do so. By providing the fourth mirror, such an arrangement becomes easier.

According to the imaging device of the third aspect, it is possible to simultaneously image one part of the workpiece from a plurality of directions at the same magnification.

According to the imaging device of the fourth aspect, different parts of the workpiece can be imaged at the same magnification at the same time.

According to the imaging device of the fifth aspect, the design of the object-side optical system can be facilitated.

It is a side view of the inspection device concerning an embodiment. 2 is a diagram showing a captured image obtained by the camera shown in FIG. 1. FIG. FIG. 3 is a diagram showing an optical path diagram in the imaging device according to the embodiment. FIG. 2 is a diagram showing a first mirror arrangement when there is no detour mirror in the second optical path shown in FIG. 1; 5 is a diagram showing a second mirror arrangement in which a detour mirror is added to the second optical path shown in FIG. 4. FIG.

Embodiments of the present invention will be described below with reference to the accompanying drawings. Note that the components described in this embodiment are merely examples, and the scope of the present invention is not intended to be limited thereto. In the drawings, dimensions and numbers of parts may be exaggerated or simplified as necessary to facilitate understanding.

In FIG. 1 and the subsequent figures, arrows indicating mutually orthogonal X, Y, and Z directions may be attached in order to facilitate understanding of the positional relationship of each element. The X direction and the Y direction are preferably horizontal, and the Z direction is preferably vertical.

<1. Embodiment>
FIG. 1 is a side view of the inspection device 1 according to the embodiment. The inspection device 1 is a device that inspects the work 9 based on an image obtained by imaging the work 9. The workpiece 9 is, for example, a lens or a metal part. Examples of lenses include lenses worn by living bodies (intraocular lenses, contact lenses, etc.), lenses as optical components used in cameras, and the like. Furthermore, examples of metal parts include parts used in industrial products such as automobiles.

As shown in FIG. 1, the inspection device 1 has a workpiece holding unit 11, an imaging device 13, and a control unit 15.

The workpiece holding section 11 holds the workpiece 9 from below while exposing the side surface of the workpiece 9. The imaging device 13 images the workpiece 9 held by the workpiece holding section 11 . The control unit 15 processes images captured by the imaging device 13. The control unit 15 includes, for example, a general computer in which a CPU, ROM, RAM, storage device, etc. are interconnected via a bus line. The ROM stores basic programs and the like, and the RAM is used as a work area when the CPU performs predetermined processing. The storage device includes a flash memory or a nonvolatile storage device such as a hard disk device. A program is stored in the storage device, and various processes (e.g., image generation processing, image diagnosis) are executed by the CPU as the main control unit performing arithmetic processing according to the procedures described in this program. .

The imaging device 13 includes a camera 20, a reflected illumination light source 30, and a plurality of (here, five) mirrors 41, 51, 52, 53, and 61. Each mirror 41, 51 to 53, 61 has a flat reflective surface (mirror surface) that reflects light.

The camera 20 includes an image sensor 21, a lens barrel 22, and an imaging lens 23. The image sensor 21 is composed of an imaging device such as a CCD or a CMOS. The camera 20 captures and images the workpiece 9 reflected on each of the mirrors 41, 51, and 61 within the same field of view. Thereby, the camera 20 uses one image sensor 21 to simultaneously capture images of the workpiece 9 from a plurality of directions.

FIG. 2 is a diagram showing a captured image 91 obtained by the camera 20 shown in FIG. In the example shown in FIG. 2, one captured image 91 includes an image 9a of the work 9 reflected on the mirror 41, an image 9b of the work 9 reflected on the mirror 51, and an image 9c of the work 9 reflected on the mirror 61. included.

As shown in FIG. 1, the lens barrel 22 holds an imaging optical system including an imaging lens 23. The imaging lens 23 forms an image of each workpiece 9 reflected on the mirrors 41 , 51 , and 61 on the image sensor 21 . In this example, the imaging lens 23 is an object-side telecentric lens.

The reflected illumination light source 30 illuminates a portion of the work 9 to be imaged by the camera 20 (here, the side of the work 9). The reflected illumination light source 30 may be a spotlight, or may be a line illumination or a ring illumination. The reflected illumination light source 30 is located away from the workpiece 9 in the X direction.

As shown in FIG. 1, in the imaging device 13, reflected or transmitted scattered light from the workpiece 9 enters the camera 20 via the first optical path LP1, the second optical path LP2, and the third optical path LP3, respectively. . The mirror 41 is located on the first optical path LP1 from the workpiece 9 to the camera 20. That is, the light from the workpiece 9 is reflected by the mirror 41 and enters the camera 20.

The mirrors 51 to 53 are located on the second optical path LP2 from the workpiece 9 to the image sensor 21. In the second optical path LP2, mirror 52 and mirror 53 are located between workpiece 9 and mirror 51. In the second optical path LP2, the mirror 52 is located upstream (closer to the workpiece 9) than the mirror 53. That is, the light from the workpiece 9 is sequentially reflected by the mirror 52 and the mirror 53, then reflected by the mirror 51, and then enters the camera 20. The mirrors 52 and 53 are detour mirrors provided to extend the optical path length of the light traveling from the workpiece 9 to the mirror 51.

The mirror 61 is located on the third optical path LP3 from the workpiece 9 to the camera 20. The light from the workpiece 9 is reflected by the mirror 61 and enters the camera 20.

The mirrors 41, 51 to 53, 61 are located apart from the work 9 in the X direction. The X direction is an example of a "first direction."

The mirrors 41, 51 to 53, and 61 are arranged so that the optical path lengths of the first optical path LP1, the second optical path LP2, and the third optical path LP3 are equal. Thereby, the first optical path LP1, the second optical path LP2, and the third optical path LP3 can be focused.

The mirror 41 is located at the same height as the workpiece 9 in the Z direction. The light (principal ray) traveling from the workpiece 9 to the mirror 41 travels parallel to the X direction, which is a horizontal direction. Therefore, by capturing an image of the work 9 reflected on the mirror 41 with the camera 20, an image 9a of the work 9 captured from the horizontal direction can be obtained. Mirror 41 is an example of a "first mirror."

The mirror 52 is located above the workpiece 9 (on the +Z side). By capturing an image of the work 9 reflected on the mirror 52 with the camera 20 via the mirror 53 and the mirror 51, an image 9b captured at an angle looking down on the work 9 (angle of depression θ _e ) can be obtained.

The mirror 61 is located on the lower side (-Z side) with respect to the workpiece 9. By capturing an image of the work 9 reflected on the mirror 61 with the camera 20, an image captured at an angle (elevation angle θ _d ) of looking up at the work 9 can be obtained.

In the example shown in FIG. 2, mirrors 51 to 53 are located closer to camera 20 than mirror 41 in the Z direction. Mirrors 52 and 53 are located between workpiece 9 and mirror 51 in the X direction. Mirror 53 is located closer to mirror 51 than mirror 52 in the X direction. Further, the mirror 52 is located closer to the workpiece 9 than the mirror 41 in the X direction. Note that the positions of the mirrors 52 and 53 are not limited to the positions shown in FIG. 2, and can be changed as appropriate. Mirror 51 is an example of a "second mirror," mirror 52 is an example of a "third mirror," and mirror 53 is an example of a "fourth mirror."

Mirror 61 is located further away from camera 20 than mirror 41 in the Z direction. The mirror 61 is located on the third optical path LP3 through which the light from the work 9 reaches the image sensor 21 of the camera 20.

As shown in FIG. 1, the reflected illumination light source 30 is located between the workpiece 9 and the mirror 41 in the X direction. Further, the reflected illumination light source 30 is located between the workpiece 9 and the mirror 52 in the X direction. Further, the reflected illumination light source 30 is located between the workpiece 9 and the mirror 61 in the X direction. Further, the reflected illumination light source 30 is located closer to the camera 20 than the second optical path LP2 in the Z direction.

FIG. 3 is a diagram showing an optical path diagram in the imaging device 13 according to the embodiment. Since the imaging lens 23 is an object-side telecentric lens, the principal rays L1, L2, L3 (from the object point to the aperture stop) on the first optical path LP1, second optical path LP2, and third optical path LP3 when entering the imaging lens 23 are rays passing through the center of ) are parallel to the optical axis of the imaging lens 23. That is, the principal rays L1 to L3 are parallel to each other.

<About the effects of mirrors 52 and 53>
Next, the effects of providing the detour mirrors 52 and 53 on the second optical path LP2 will be described with reference to FIGS. 4 and 5. Here, for ease of understanding, first, a mirror arrangement in the case where the mirrors 52 and 53 are not provided (hereinafter referred to as "first mirror arrangement") will be described with reference to FIG. 4. Thereafter, a mirror arrangement in the case where mirrors 52 and 53 are provided (hereinafter referred to as "second mirror arrangement") will be described with reference to FIG. 5.

FIG. 4 is a diagram showing the first mirror arrangement when there are no detour mirrors 52 and 53 in the second optical path LP2 shown in FIG. Each point P ₀ , P ₁₁ , P ₁₂ , P ₂₁ , P ₂₂ , C ₁ , C ₂ shown in FIG. 4 is defined as follows.
Point P ₀ : Position point of the workpiece 9 P ₁₁ : Point of incidence of the chief ray L1 on the mirror 41 P ₁₂ : Point of incidence of the chief ray L1 on the imaging lens 23 P ₂₁ : Point P of incidence of the chief ray L2 on the mirror 51 ₂₂ : Incident position of principal ray L2 on imaging lens 23 Point C ₁ : Intersection point of line P ₀ P ₂₁ and line P ₁₁ P ₁₂ Point C ₂ : Line drawn perpendicularly from point P ₂₁ to line P ₁₁ P ₁₂ Intersection with line P ₁₁ P ₁₂

Further, the variables L ₁₁ , L ₂₁ , D ₁ , D ₂ , θ _e , θ _w , a, b, c, and d shown in FIG. 4 are defined as follows.
L ₁₁ : Straight distance between P ₀ P ₁₁ L ₂₁ : Straight distance between P ₁₁ P ₁₂ D ₁ : Distance between P ₁₁ P ₂₁ in the X direction D ₂ : Straight distance between P ₁₂ P ₂₂ θ _e : Angle of depression ∠P ₂₁ P ₀ P ₁₁
θ _w : Angle that the principal ray L1 reflected at point P ₁₁ makes with the vertical direction (Z direction) a: Straight distance between P ₁₁ C ₁ b: Straight line distance between P ₀ C ₁ c: C ₁ P ₂₁ Straight line distance d: Straight line distance between C ₁ C ₂

As shown in FIG. 2, the distance between the image 9a of the first optical path LP1 and the image 9b of the second optical path LP2 is the straight-line distance between the incident positions (P ₁₂ P ₂₂ ) of the principal ray L1 and the principal ray L2. It is a value obtained by multiplying _D2 by the magnification M of the imaging lens 23.

In this embodiment, since the imaging lens 23 is an object-side telecentric lens, the angle that the principal ray L2 reflected at the point _P21 makes with the vertical direction is also _θw . In this way, by making the imaging lens 23 an object-side telecentric lens, the angle θ _w can be made the same for the first optical path LP1, the second optical path LP2, and the third optical path LP3. It can be easily done.

Regarding the lower left triangle P ₀ P ₁₁ C ₁ shown in FIG. 4, the following equations (1) and (2) hold true according to the law of sine.

According to the above formulas (1) and (2), a and b are represented by the following formulas (3) and (4), respectively.

Moreover, from FIG. 4, the following equation (5) clearly holds true.

From the above equations (4) and (5), the following equation (6) is derived.

Subsequently, the following equation (7) holds true for the upper right triangle C ₁ C ₂ P ₂₁ shown in FIG.

From equations (6) and (7), the following equation (8) is derived.

The distance between P ₀ P ₂₁ (=b+c) is larger than the distance between P ₀ P ₁₁ (=L ₁₁ ). If the difference between the distance between P ₀ P ₂₁ and the distance between P ₀ P ₁₁ is “ΔL ₁ ”, ΔL ₁ is expressed by the following equation (9).

Since the optical path lengths of the first optical path LP1 and the second optical path LP2 are equal, the straight-line distance between P ₁₁ P ₁₂ is longer than the straight-line distance between P ₂₁ P ₂₂ . If the difference between the straight line distance between P ₁₁ P ₁₂ and the straight line distance between P ₂₁ P ₂₂ is "ΔL ₂ ", ΔL ₂ is expressed by the following equation (10).

In order to match the optical path lengths of the first optical path LP1 and the second optical path LP2, the following equation (11) holds true.

When formula (9) and formula (10) are substituted into formula (11), distance D ₁ is expressed by the following formula (12).

Further, regarding the upper right triangle C ₁ C ₂ P ₂₁ shown in FIG. 4, the distance D ₂ is derived by the following equation (13).

From equations (6) and (13), the distance D ₂ is expressed by the following equation.

The mirror arrangement for the first optical path LP1 and the second optical path LP2 is determined by the above equation (12). Furthermore, the arrangement of each optical path on the imaging surface of the image sensor 21 is determined by equation (14).

Note that, as shown in FIG. 4, when imaging with only one mirror 41, 51 for the first optical path LP1 and the second optical path LP2, the distance between the work 9 and the mirror 41, and the distance between the work 9 and the mirror 41 are The distance to the mirror 51 is uniquely determined by the imaging angle (angle of depression θ _e ) and the optical magnification of the imaging lens 23 . Therefore, for example, if the distance between the mirror 41 and the workpiece 9 is short, it may be difficult to secure a clearance for installing a reflected illumination light source or the like.

FIG. 5 is a diagram showing a second mirror arrangement in which detour mirrors 52 and 53 are added to the second optical path LP2 shown in FIG. 4. In the second mirror arrangement shown in FIG. 5, in order to secure a space between the workpiece 9 and the mirror 41, the workpiece 9 is placed further away from the mirror 41 than in the first mirror arrangement shown in FIG. It is located. On the other hand, the imaging lens 23 is moved closer to the mirror 41 in order to maintain the optical path length of the first optical path LP1. Regarding the second optical path LP2, in order to maintain the imaging angle (depression angle θe) and the incident position on the image sensor 21, it is necessary to move the position of the mirror 51 closer to the camera 20 (point _P21 → Point _Q22 ). However, since the second optical path LP2 is shortened when the mirror 51 is moved, detour mirrors 52 and 53 are arranged between the mirror 51 and the imaging lens 23 in order to correct this. The arrangement of the mirrors 52 and 53 will be described below with reference to FIG.

Each point Q ₀ , Q ₁₂ , Q ₂₁ , Q ₂₂ , Q ₂₃ , Q ₂₄ , C ₃ , and C ₄ shown in FIG. 5 is defined as follows.
Point Q ₀ : Position of the workpiece 9 in the second mirror arrangement Point Q ₁₂ : Point of incidence of the chief ray L1 on the imaging lens 23 in the second mirror arrangement Point Q ₂₁ : Position of incidence of the principal ray L2 on the mirror 51 in the second mirror arrangement Point Q ₂₂ : Point of incidence of the principal ray L2 on the imaging lens 23 in the second mirror arrangement Point Q ₂₃ : Point of incidence of the principal ray L2 on the mirror 52 Q ₂₄ : Point of incidence of the chief ray L2 on the mirror 53 C ₃ : Point Intersection point C 4 of a straight line drawn perpendicularly to line segment Q _{0 Q 23} from P ₀ and line segment Q 0 Q ₂₃ : Intersection point C ₄ of a straight line drawn perpendicularly to line segment Q ₂₃ Q ₂₁ from point P ₂₁ Intersection with line segment Q ₂₃ Q ₂₁

Further, the variables dz, dy', dz' ₁ , dz' ₂ , and ds shown in FIG. 5 are defined as follows.
dz: Straight line distance between Q ₀ P ₀ dy': Shift amount of principal ray L2 (straight line distance between P ₀ C ₃ )
dz′ ₁ : Straight line distance between Q ₀ C ₃ (increase in optical path length of second optical path LP2 in second mirror arrangement)
dz′ ₂ : Straight line distance between C ₄ Q ₂₁ (increase in optical path length of second optical path LP2 in second mirror arrangement)
ds: Straight line distance between P ₂₁ Q ₂₁ (amount of decrease in optical path length of second optical path LP2 in second mirror arrangement)

In the second mirror arrangement, the position of the workpiece 9 moves from point _P0 to point _Q0 . Point Q ₀ is located further from mirror 41 (point P ₁₁ ) than point P ₀ in the X direction. Further, as shown in FIG. 5, the position of the imaging lens 23 approaches the mirrors 41 and 51 by dz from the position indicated by the broken line. As a result, the incident position of the principal ray L1 on the imaging lens 23 moves from point _P12 to point _Q12 , and the incident position of the principal ray L2 moves from point _P22 to point _Q22 . Point Q ₁₂ and point Q ₂₂ approach mirror 41 (point P ₁₁ ) by dz in the direction in which principal ray L1 (or principal ray L2) advances from point P ₁₂ and point P ₂₂ .

From FIG. 5, the following equations (15) to (18) hold true.

The amount of increase ΔL ₁ in the first optical path LP1 due to the change from the first mirror arrangement to the second mirror arrangement is canceled out before and after the mirror 41, as shown by the following equation (19).

The amount of increase ΔL ₂ in the second optical path LP2 due to the change from the first mirror arrangement to the second mirror arrangement is expressed by the following equation (20).

By substituting equations (15) to (18) into equation (20), the increase amount ΔL ₂ is expressed by the following equation (21).

If the above-mentioned ΔL ₂ is zero, the optical path lengths of the first optical path LP1 and the second optical path LP2 match, so that their focuses can be made to match. However, in equation (21), when dz>0 and θ _e >0, ΔL2<0. Therefore, in order to match the optical path lengths of the first optical path LP1 and the second optical path LP2, it is necessary to extend the optical path length of the second optical path LP2 by (the absolute value of) ΔL ₂ . Therefore, as shown in FIG. 5, by providing a detour from Q23 to Q24 to Q21 using the mirrors 52 and 53, the driving force is increased by (absolute value of) ΔL ₂ compared to when traveling straight (Q23 to Q21). Thereby, the optical path difference between the first optical path LP1 and the second optical path LP2 is corrected.

As described above, by forming a detour using the mirrors 52 and 53 on the second optical path LP2, the optical path length from the workpiece 9 to the mirror 51 in the second optical path LP2 can be extended. Therefore, by adjusting the positions of the mirrors 52 and 53, even if the mirror 51 is moved from point P ₂₁ to point Q ₂₁ in the second arrangement, the imaging angle and imaging magnification in the first arrangement can be maintained. . Therefore, restrictions on mirror arrangement can be relaxed.

<2. Modified example>
Although the embodiments have been described above, the present invention is not limited to the above, and various modifications are possible.

For example, the positions of the mirrors 52 and 53 (the positions of points Q ₂₃ and Q ₂₄ ) are not unique and can be set freely within a range that allows optical path length correction and does not cause interference of light rays. I can do it. For example, in the example shown in FIG. 5, the distance between Q ₀ Q ₂₃ is shorter than the distance between Q ₀ P ₁₁ in the X direction. However, in the X direction, the distance between Q ₀ Q ₂₃ may be longer than the distance between P ₀ P ₁₁ .

In the embodiment described above, the starting points of the first optical path LP1 and the second optical path LP2 are set at the same part (side) of the workpiece 9. Therefore, one part of the workpiece can be imaged from multiple directions at the same magnification. However, the starting points of the first optical path LP1 and the second optical path LP2 may be set at different parts of the workpiece 9 (for example, the side and the top). In this case, different parts of the workpiece 9 can be imaged at the same magnification.

In the above embodiment, two detouring mirrors 52, 53 are provided on the second optical path LP2. However, only one detouring mirror or three or more detouring mirrors may be provided. Also, a detouring mirror may be provided on the first optical path LP1 or the third optical path LP3.

In the above embodiment, the mirror 41 is located at the same height as the work 9 in the Z direction, but the mirror does not necessarily need to be located at the same height as the work 9. That is, the image 9a of the workpiece 9 does not necessarily need to be acquired from the horizontal direction, but an image taken from any direction may be acquired as necessary.

Further, the imaging lens 23 may be a non-telecentric lens instead of a telecentric lens. When the imaging lens 23 is a non-telecentric lens, it is preferable to design the mirror arrangement by setting the angle θ _w for each of the first optical path LP1, the second optical path LP2, and the third optical path LP3.

Although this invention has been described in detail, the above description is illustrative in all aspects, and the invention is not limited thereto. It is understood that countless variations not illustrated can be envisaged without departing from the scope of the invention. The configurations described in each of the above embodiments and modified examples can be appropriately combined or omitted as long as they do not contradict each other.

9 Work 13 Imaging device 20 Camera 21 Image sensor 23 Imaging lens 30 Reflected illumination light source 41 Mirror (first mirror)
51 Mirror (second mirror)
52 Mirror (3rd mirror)
53 Mirror (4th mirror)

Claims (7)

An imaging device that images a workpiece from multiple directions,
a single camera and
a first mirror located on a first optical path from the workpiece to the camera;
a second mirror and a third mirror that are located on a second optical path that is different from the first optical path and that extends from the workpiece to the camera;
Equipped with
On the second optical path, the third mirror is located between the workpiece and the second mirror,
An imaging device in which the optical path length of the first optical path and the optical path length of the second optical path are equal. The imaging device according to claim 1,
a fourth mirror located on the second optical path and located between the third mirror and the second mirror on the second optical path;
An imaging device further comprising: The imaging device according to claim 1 or 2,
In the imaging device, starting points of the first optical path and the second optical path are set at the same location in the imaging workpiece. The imaging device according to claim 1 or 2,
An imaging device, wherein starting points of the first optical path and the second optical path are set at different parts of the imaging workpiece. The imaging device according to claim 1 or 2,
The camera is
image sensor and
an imaging lens that forms an image on the image sensor;
Equipped with
The imaging device, wherein the imaging lens includes the object-side telecentric lens. The imaging device according to claim 1 or 2,
a reflective illumination light source that illuminates the workpiece;
Furthermore,
the first mirror and the second mirror are located away from the workpiece in a first direction;
The reflected illumination light source is an imaging device located between the workpiece and the first mirror and between the workpiece and the second mirror in the first direction. The imaging device according to claim 1 or 2,
In the imaging device, the third mirror is located closer to the workpiece than the first mirror.

Images