JP2024037336A - Ultrasonic inspection method, ultrasonic inspection device and program - Google Patents
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Abstract
【課題】検査対象物に超音波信号を送信して超音波検査を行う際に、検査対象物から受信した受信波形から、検査対象物の表面を伝搬するラテラル波等の不要な周波数成分の波形を消去する。【解決手段】超音波送信部３２は、自己相関を計算するとガボールウェーブレットの波形となるような超音波信号を入力波形として送信探触子３３から検査対象物に対して送信する。そして、超音波受信部３４は、検査対象物において反射又は回折された超音波信号を受信探触子３５により受信する。そして、制御部３１は、受信探触子３５において受信された受信波形と入力波形との間で相互相関演算を行うことにより受信波形を時間軸方向にパルス圧縮して表示部３６上に表示する。【選択図】図１[Problem] When performing ultrasonic inspection by transmitting an ultrasonic signal to an object to be inspected, the waveform of unnecessary frequency components such as lateral waves propagating on the surface of the object to be inspected is detected from the received waveform received from the object to be inspected. Erase. SOLUTION: An ultrasonic transmitter 32 transmits an ultrasonic signal whose autocorrelation is calculated to have a Gabor wavelet waveform as an input waveform from a transmitting probe 33 to an object to be inspected. Then, the ultrasonic receiving unit 34 receives the ultrasonic signal reflected or diffracted from the inspection object using the receiving probe 35 . Then, the control unit 31 performs a cross-correlation calculation between the received waveform received by the receiving probe 35 and the input waveform to pulse-compress the received waveform in the time axis direction and display it on the display unit 36. . [Selection diagram] Figure 1
Description
本発明は、超音波検査方法、超音波検査装置及びプログラムに関する。 The present invention relates to an ultrasonic inspection method, an ultrasonic inspection apparatus, and a program.
構造物の非破壊検査において使用される超音波探傷手法の１つとしてＴＯＦＤ（Time of Flight Diffraction）法が用いられている（例えば非特許文献１）。このＴＯＦＤ法では、超音波のパルス信号を送信探触子から溶接部等の検査対象物に対して送信して、検査対象物において反射又は回折された超音波信号を受信探触子により受信した受信波形により欠陥等の有無の検査が行われる。このようなＴＯＦＤ法によれば、検査対象物の内部に欠陥が存在する場合、欠陥で反射波もしくは回折波が発生することにより欠陥の存在を検知することが可能となる。 The TOFD (Time of Flight Diffraction) method is used as one of the ultrasonic flaw detection methods used in non-destructive inspection of structures (for example, Non-Patent Document 1). In this TOFD method, an ultrasonic pulse signal is transmitted from a transmitting probe to an object to be inspected such as a weld, and the ultrasonic signal reflected or diffracted from the object to be inspected is received by a receiving probe. The presence or absence of defects, etc. is inspected based on the received waveform. According to such a TOFD method, when a defect exists inside the object to be inspected, the presence of the defect can be detected by generating reflected waves or diffracted waves from the defect.
このようなＴＯＦＤ法による探傷検査方法では、送信探触子から送信された超音波が検査対象物の表面を伝搬して受信探触子に受信されるラテラル波の存在が問題となる場合がある。具体的には、検査対象物の表面近傍に欠陥が存在する場合、ラテラル波と、欠陥からの回折波とが重なってしまい、回折波の識別が困難となってしまうという問題が発生する。このように、欠陥からの回折波の識別が困難になると正しく欠陥を検出できなくなり、表面近傍は欠陥を検出できない不感帯となってしまう。 In such a flaw detection inspection method using the TOFD method, there may be a problem with the presence of lateral waves where the ultrasonic waves transmitted from the transmitting probe propagate on the surface of the object to be inspected and are received by the receiving probe. . Specifically, when a defect exists near the surface of the object to be inspected, a problem arises in that lateral waves and diffracted waves from the defect overlap, making it difficult to identify the diffracted waves. In this way, when it becomes difficult to identify the diffracted waves from the defect, the defect cannot be detected correctly, and the vicinity of the surface becomes a dead zone where defects cannot be detected.
このように不感帯が存在する状態で正しい検査を行うとすると、検査対象物の両面から検査を行う必要があり検査の時間、検査費用等が増大してしまうという問題がある。 If a correct inspection is to be performed in a state where such a dead zone exists, there is a problem in that it is necessary to inspect both sides of the object to be inspected, which increases inspection time, inspection cost, and the like.
本発明は、検査対象物に超音波信号を送信して超音波検査を行う際に、検査対象物から受信した受信波形から、検査対象物の表面を伝搬するラテラル波等の不要な周波数成分の波形を消去することが可能な超音波検査方法、超音波検査装置及びプログラムを提供することを目的とする。 The present invention eliminates unnecessary frequency components such as lateral waves propagating on the surface of the object from the received waveform received from the object when performing ultrasonic inspection by transmitting ultrasonic signals to the object. It is an object of the present invention to provide an ultrasonic inspection method, an ultrasonic inspection apparatus, and a program that can erase waveforms.
本発明の第１態様の超音波検査方法は、自己相関を計算するとガボールウェーブレット（Gabor Wavelet）の波形となるような超音波信号を入力波形として送信探触子から検査対象物に対して送信し、
前記検査対象物において反射又は回折された超音波信号を受信探触子により受信し、
受信した受信波形と前記入力波形との間で相互相関演算を行うことにより前記受信波形を時間軸方向に圧縮して表示する。
In the ultrasonic inspection method of the first aspect of the present invention, an ultrasonic signal whose autocorrelation is calculated becomes a Gabor wavelet waveform is transmitted from a transmitting probe to an object to be inspected as an input waveform. ,
Receiving the ultrasonic signal reflected or diffracted by the inspection object with a receiving probe,
By performing a cross-correlation calculation between the received waveform and the input waveform, the received waveform is compressed in the time axis direction and displayed.
本発明の第２態様の超音波検査方法は、第１態様の超音波検査方法において、前記ガボールウェーブレットの波形が、特定の周波数成分が短い時間間隔の中に極在するような特性を有する波形であり、検査対象物の表面を伝搬するラテラル波の周波数成分を含まない波形である。 The ultrasonic testing method according to the second aspect of the present invention is the ultrasonic testing method according to the first aspect, in which the waveform of the Gabor wavelet has a characteristic that a specific frequency component is localized within a short time interval. This is a waveform that does not include the frequency component of the lateral wave propagating on the surface of the object to be inspected.
本発明の第３態様の超音波検査方法は、ガボールウェーブレットの波形の超音波信号を入力波形として送信探触子から検査対象物に対して送信し、
前記検査対象物において反射又は回折された超音波信号を受信探触子により受信し、
受信した受信波形を表示する。
The ultrasonic inspection method according to the third aspect of the present invention includes transmitting an ultrasonic signal having a Gabor wavelet waveform as an input waveform from a transmitting probe to an object to be inspected;
Receiving the ultrasonic signal reflected or diffracted by the inspection object with a receiving probe,
Display the received waveform.
本発明の第４態様の超音波検査装置は、自己相関を計算するとガボールウェーブレットの波形となるような超音波信号を入力波形として送信探触子から検査対象物に対して送信する送信部と、
前記検査対象物において反射又は回折された超音波信号を受信探触子により受信する受信部と、
受信した受信波形と前記入力波形との間で相互相関演算を行うことにより前記受信波形を時間軸方向に圧縮して表示する表示部とを備えている。
The ultrasonic inspection apparatus according to the fourth aspect of the present invention includes a transmitter that transmits an ultrasonic signal having a Gabor wavelet waveform when calculating an autocorrelation as an input waveform from a transmitting probe to an object to be inspected;
a receiving unit that receives the ultrasonic signal reflected or diffracted by the inspection object using a receiving probe;
The display unit includes a display unit that compresses and displays the received waveform in the time axis direction by performing a cross-correlation calculation between the received waveform and the input waveform.
本発明の第５態様の超音波検査装置は、ガボールウェーブレットの波形の超音波信号を入力波形として送信探触子から検査対象物に対して送信する送信部と、
前記検査対象物において反射又は回折された超音波信号を受信探触子により受信する受信部と、
受信した受信波形を表示する表示部とを備えている。
An ultrasonic inspection apparatus according to a fifth aspect of the present invention includes a transmitting unit that transmits an ultrasonic signal having a Gabor wavelet waveform as an input waveform from a transmitting probe to an object to be inspected;
a receiving unit that receives the ultrasonic signal reflected or diffracted by the inspection object using a receiving probe;
and a display section that displays the received waveform.
本発明の第６態様のプログラムは、自己相関を計算するとガボールウェーブレットの波形となるような超音波信号を入力波形として送信探触子から検査対象物に対して送信するステップと、
前記検査対象物において反射又は回折された超音波信号を受信探触子により受信するステップと、
受信した受信波形と前記入力波形との間で相互相関演算を行うことにより前記受信波形を時間軸方向に圧縮して表示するステップとをコンピュータに実行させる。
The program according to the sixth aspect of the present invention includes a step of transmitting an ultrasonic signal whose autocorrelation is calculated to have a Gabor wavelet waveform as an input waveform from a transmitting probe to an object to be inspected;
receiving the ultrasound signal reflected or diffracted by the inspection object with a receiving probe;
The computer is caused to execute a step of compressing the received waveform in a time axis direction and displaying the compressed received waveform by performing a cross-correlation calculation between the received received waveform and the input waveform.
本発明によれば、検査対象物に超音波信号を送信して超音波検査を行う際に、検査対象物から受信した受信波形から、検査対象物の表面を伝搬するラテラル波等の不要な周波数成分の波形を消去することが可能となる。 According to the present invention, when performing an ultrasonic inspection by transmitting an ultrasonic signal to an object to be inspected, unnecessary frequencies such as lateral waves propagating on the surface of the object to be inspected are detected from the received waveform received from the object to be inspected. It becomes possible to erase the component waveform.
次に、本発明の実施の形態について図面を参照して詳細に説明する。 Next, embodiments of the present invention will be described in detail with reference to the drawings.
図１は本発明の一実施形態の超音波検査装置１０の構成を示すブロック図である。 FIG. 1 is a block diagram showing the configuration of an ultrasonic testing apparatus 10 according to an embodiment of the present invention.
本実施形態の超音波検査装置１０は、図１に示されるように、制御部３１と、超音波送信部３２と、送信探触子３３と、超音波受信部３４と、受信探触子３５と、表示部３６とを備えている。 As shown in FIG. 1, the ultrasonic inspection apparatus 10 of this embodiment includes a control section 31, an ultrasonic transmitting section 32, a transmitting probe 33, an ultrasonic receiving section 34, and a receiving probe 35. and a display section 36.
超音波送信部３２は、制御部３１による制御に基づいて、超音波信号を入力波形として送信探触子３３から検査対象物に対して送信する。 The ultrasonic transmitting unit 32 transmits an ultrasonic signal as an input waveform from the transmitting probe 33 to the inspection object under the control of the control unit 31 .
超音波受信部３４は、検査対象物において反射又は回折された超音波信号を受信探触子３５により受信して、制御部３１に転送する。 The ultrasonic receiving section 34 receives an ultrasonic signal reflected or diffracted by the inspection object using the receiving probe 35 and transfers the received ultrasonic signal to the control section 31 .
制御部３１は、超音波受信部３４から転送されてきた超音波信号を表示部３６上に表示する。 The control unit 31 displays the ultrasound signal transferred from the ultrasound reception unit 34 on the display unit 36.
先ず、本実施形態の超音波検査装置１０における動作を説明する前に、一般的なＴＯＦＤ法による探傷原理を図２に示す。 First, before explaining the operation of the ultrasonic inspection apparatus 10 of this embodiment, the principle of flaw detection using the general TOFD method is shown in FIG.
ＴＯＦＤ法により検査対象物における傷等の欠陥を探す場合、超音波のパルス信号を送信探触子３３から溶接部等の検査対象物に対して送信して、検査対象物において反射又は回折された超音波信号を受信探触子３５により受信した受信波形により欠陥の有無の検査が行われる。 When searching for defects such as scratches on an object to be inspected using the TOFD method, an ultrasonic pulse signal is transmitted from the transmitting probe 33 to the object to be inspected such as a welded part, and the signal is reflected or diffracted by the object to be inspected. The presence or absence of defects is inspected based on the received waveform of the ultrasonic signal received by the receiving probe 35.
このＴＯＦＤ法では、検査対象物の内部に欠陥が存在する場合、欠陥からの回折波が発生することにより欠陥の存在を検知することが可能となる。ＴＯＦＤ法により得られる受信波形のデータの概略図を図３に示す。 In this TOFD method, when a defect exists inside the object to be inspected, the presence of the defect can be detected by the generation of diffracted waves from the defect. FIG. 3 shows a schematic diagram of received waveform data obtained by the TOFD method.
受信探触子３５では、最初に表面を伝搬するラテラル波４１が検出され、その後欠陥が存在する場合には欠陥上端及び下端からの回折波４２、４３がそれぞれ検出される。そして、最後に、裏面からの反射波である裏面反射波４４が検出される。 In the receiving probe 35, a lateral wave 41 propagating on the surface is first detected, and then, if a defect exists, diffracted waves 42 and 43 from the upper and lower ends of the defect are detected, respectively. Finally, a back surface reflected wave 44, which is a reflected wave from the back surface, is detected.
このようなＴＯＦＤ法による探傷検査方法では、ラテラル波４１の存在が問題となる場合がある。例えば、送信探触子３３、受信探触子３５を設置した側の表面近傍に欠陥が存在する場合の様子を図４に示す。また、図４に示すような状態における受信波形の概略図を図５に示す。 In such a flaw detection inspection method using the TOFD method, the presence of the lateral waves 41 may pose a problem. For example, FIG. 4 shows a situation where a defect exists near the surface on which the transmitting probe 33 and the receiving probe 35 are installed. Further, FIG. 5 shows a schematic diagram of the received waveform in the state shown in FIG. 4.
図５を参照すると、表面近傍に欠陥が存在する場合、ラテラル波４１と、欠陥からの回折波４２、４３とが重なってしまい、回折波４２、４３の識別が困難となってしまっているのが分かる。このように、欠陥からの回折波４２、４３の識別が困難になると正しく欠陥を検出できなくなり、表面近傍は欠陥を検出できない不感帯となってしまう。 Referring to FIG. 5, when a defect exists near the surface, the lateral wave 41 and the diffracted waves 42 and 43 from the defect overlap, making it difficult to distinguish between the diffracted waves 42 and 43. I understand. In this way, when it becomes difficult to distinguish between the diffracted waves 42 and 43 from the defect, the defect cannot be detected correctly, and the area near the surface becomes a dead zone in which the defect cannot be detected.
このように不感帯が存在する状態で正しい検査を行うとすると、検査対象物の両面から検査を行う必要があり検査の時間、検査費用等が増大してしまうという問題がある。 If a correct inspection is to be performed in a state where such a dead zone exists, there is a problem in that it is necessary to inspect both sides of the object to be inspected, which increases inspection time, inspection cost, and the like.
ここで、検査対象物の表面を伝搬するラテラル波４１と、欠陥からの回折波４２、４３とでは、周波数帯域が異なっている。例えば、入力波形の周波数が５ＭＨｚの場合、ラテラル波の主な周波数成分は１～３ＭＨｚに集中し、回折波の主な周波数成分は３～７ＭＨｚに集中している。 Here, the lateral wave 41 propagating on the surface of the object to be inspected and the diffracted waves 42 and 43 from the defect have different frequency bands. For example, when the frequency of the input waveform is 5 MHz, the main frequency components of the lateral waves are concentrated at 1 to 3 MHz, and the main frequency components of the diffracted waves are concentrated at 3 to 7 MHz.
そこで、上記のような問題を解決するため、本実施形態における超音波検査装置１０では、以下に説明するような方法によって、送信探触子３３から検査対象物に対して送信する超音波信号の入力波形を最適化することにより、受信波形におけるラテラル波を消去するようにしている。 Therefore, in order to solve the above-mentioned problems, the ultrasonic inspection apparatus 10 according to the present embodiment uses a method described below to control the ultrasonic signal transmitted from the transmitting probe 33 to the inspection object. By optimizing the input waveform, lateral waves in the received waveform are eliminated.
まず、本実施形態による超音波検査方法を説明する前に、パルス圧縮技術について図６を参照して説明する。図６は、パルス圧縮技術を用いたＴＯＦＤ法を説明するための概略図である。 First, before explaining the ultrasonic inspection method according to this embodiment, pulse compression technology will be explained with reference to FIG. 6. FIG. 6 is a schematic diagram for explaining the TOFD method using pulse compression technology.
パルス圧縮技術とは，入力波形を時間軸方向に拡張することによりピーク電圧を増加させることなく送信エネルギを増大させ、受信波形を時間軸方向に圧縮することにより空間分解能を保ったままＳＮ比を改善する技術である。ここで、ＳＮ比とは、欠陥等による回折波の成分と、受信波形におけるノイズ成分との比を意味している。 Pulse compression technology increases the transmitted energy without increasing the peak voltage by expanding the input waveform in the time axis direction, and increases the S/N ratio while maintaining spatial resolution by compressing the received waveform in the time axis direction. It is a technique for improvement. Here, the SN ratio means the ratio between the component of a diffracted wave due to a defect or the like and the noise component in the received waveform.
パルス圧縮技術を用いたＴＯＦＤ法では、入力波形ｘ（ｔ）は時間軸方向に拡張された波形となっており、この入力波形ｘ（ｔ）を送信探触子３３から検査対象物に送信して、受信探触子３５で検査対象物からの超音波信号を受信する。そして、受信波形ｙ（ｔ）と入力波形ｘ（ｔ）との間の相互相関演算を行うことにより、受信波形ｙ（ｔ）に対してパルス圧縮を行う。具体的には、受信波形ｙ（ｔ）と、入力波形ｘ（ｔ）の共役をとって時間反転を施したものとの畳み込み演算（コンボリューション演算）を行うことによりパルス圧縮が行われる。つまり、パルス圧縮後の波形ｚ（ｔ）は、ｚ（ｔ）＝ｙ（ｔ）＊ｘ（－ｔ）と表現される。 In the TOFD method using pulse compression technology, the input waveform x(t) is a waveform expanded in the time axis direction, and this input waveform x(t) is transmitted from the transmission probe 33 to the object to be inspected. Then, the receiving probe 35 receives an ultrasonic signal from the object to be inspected. Then, pulse compression is performed on the received waveform y(t) by performing a cross-correlation calculation between the received waveform y(t) and the input waveform x(t). Specifically, pulse compression is performed by performing a convolution operation between the received waveform y(t) and a time-reversed conjugate of the input waveform x(t). That is, the waveform z(t) after pulse compression is expressed as z(t)=y(t)*x(-t).
そして、このパルス圧縮技術を用いたＴＯＦＤ法において、ラテラル波が消去されるような入力波形の検討を行ったところ、自己相関を計算するとガボールウェーブレットとなるような波形を入力波形とすると、パルス圧縮技術を用いたＴＯＦＤ法において、ラテラル波を消去することができることが分かった。 In the TOFD method using this pulse compression technology, we investigated an input waveform in which lateral waves are eliminated, and found that if the input waveform is a waveform that becomes a Gabor wavelet when calculating the autocorrelation, pulse compression It has been found that lateral waves can be eliminated in the TOFD method using this technique.
このような入力波形ｘ（ｔ）の一例を図７に示す。 An example of such an input waveform x(t) is shown in FIG.
そして、図７に示したような入力波形ｘ（ｔ）を用いて図６に示したシミュレーションにより得られた受信波形ｙ（ｔ）を図８に示す。そして、図８に示した受信波形ｙ（ｔ）をパルス圧縮してパルス圧縮後の受信波形ｚ（ｔ）を求めたところ図９のようになった。上述したような図７の入力波形ｘ（ｔ）を用いたシミュレーションの一連の処理の流れを図１０に示す。 FIG. 8 shows a received waveform y(t) obtained by the simulation shown in FIG. 6 using the input waveform x(t) shown in FIG. Then, the received waveform y(t) shown in FIG. 8 was pulse-compressed to obtain the received waveform z(t) after pulse compression, as shown in FIG. 9. FIG. 10 shows the flow of a series of simulation processes using the input waveform x(t) of FIG. 7 as described above.
図９におけるパルス圧縮後の受信波形ｚ（ｔ）を参照すると、ラテラル波がほぼ消失しており回折波と比較して大幅に小さくなっているのが分かる。つまり、検査対象物の表面近傍に欠陥が存在する場合でも、十分に検出可能であることが分かる。 Referring to the received waveform z(t) after pulse compression in FIG. 9, it can be seen that the lateral wave has almost disappeared and is significantly smaller than the diffracted wave. In other words, it can be seen that even if a defect exists near the surface of the object to be inspected, it can be sufficiently detected.
このように自己相関を計算するとガボールウェーブレットとなるような波形を入力波形ｘ（ｔ）として用いてＴＯＦＤ法による探傷検査方法を実行することにより、受信波形におけるラテラル波の成分を消去することが可能となる。そこで、本実施形態の超音波検査装置１０は、図７に示したような入力波形ｘ（ｔ）を用いて検査対象物における探傷検査を行う。 By executing the TOFD inspection method using a waveform that becomes a Gabor wavelet when the autocorrelation is calculated as the input waveform x(t), it is possible to eliminate the lateral wave component in the received waveform. becomes. Therefore, the ultrasonic inspection apparatus 10 of this embodiment performs a flaw detection inspection on the inspection target using the input waveform x(t) as shown in FIG.
つまり、パルス圧縮技術を用いるＴＯＦＤ法を行う場合には、超音波送信部３２は、自己相関を計算するとガボールウェーブレットの波形となるような超音波信号を入力波形として送信探触子３３から検査対象物に対して送信する。そして、超音波受信部３４は、検査対象物において反射又は回折された超音波信号を受信探触子３５により受信する。そして、制御部３１は、受信探触子３５において受信された受信波形と入力波形との間で相互相関演算を行うことにより受信波形を時間軸方向にパルス圧縮して表示部３６上に表示する。 In other words, when performing the TOFD method using pulse compression technology, the ultrasonic transmitter 32 transmits an ultrasonic signal from the transmitting probe 33 to the inspection target using an input waveform as an ultrasonic signal that becomes a Gabor wavelet waveform when calculating autocorrelation. Send to something. Then, the ultrasonic receiving unit 34 receives the ultrasonic signal reflected or diffracted from the inspection object using the receiving probe 35 . Then, the control unit 31 performs a cross-correlation calculation between the received waveform received by the receiving probe 35 and the input waveform to pulse-compress the received waveform in the time axis direction and display it on the display unit 36. .
なお、自己相関を計算するとガボールウェーブレットとなるような波形には、自己相関を計算するとガボールウェーブレットと完全に一致するような波形だけではなく、自己相関を計算するとガボールウェーブレットに近似するような波形、つまり、自己相関を計算すると略（ほぼ）ガボールウェーブレットとなるような波形も含まれる。 Note that waveforms that become Gabor wavelets when calculating autocorrelation include not only waveforms that completely match Gabor wavelets when calculating autocorrelation, but also waveforms that approximate Gabor wavelets when calculating autocorrelation, In other words, it also includes waveforms that become approximately (almost) Gabor wavelets when autocorrelation is calculated.
さらに、上記ではパルス圧縮技術を用いたＴＯＦＤ法による場合について説明したが、パルス圧縮技術を用いないＴＯＦＤ法においても本発明は適用可能である。 Furthermore, although the case where the TOFD method using the pulse compression technique is used has been described above, the present invention is also applicable to the TOFD method that does not use the pulse compression technique.
パルス圧縮技術を用いないＴＯＦＤ法では、入力波形として、時間軸方向に拡張されていないパルス信号が用いられる。そのため、まず、図７に示した入力波形ｘ（ｔ）をパルス圧縮した波形を図１１に示す。入力波形ｘ（ｔ）をパルス圧縮する際には、同一の入力波形ｘ（ｔ）との間の相互相関演算を計算することになるため、結果的には、入力波形ｘ（ｔ）の自己相関演算を行うことになる。 In the TOFD method that does not use pulse compression technology, a pulse signal that is not expanded in the time axis direction is used as an input waveform. Therefore, first, a waveform obtained by pulse-compressing the input waveform x(t) shown in FIG. 7 is shown in FIG. When pulse compressing an input waveform x(t), a cross-correlation operation with the same input waveform x(t) is calculated, so as a result, the self A correlation calculation will be performed.
このようにして得られた波形は、ガボールウェーブレットの波形となっており、検査対象物の表面を伝搬するラテラル波の周波数成分を含まない波形となっている。なお、ガボールウェーブレットの波形とは、特定の周波数成分が短い時間間隔の中に極在するような特性を有する波形である。 The waveform obtained in this manner is a Gabor wavelet waveform, and is a waveform that does not include frequency components of lateral waves propagating on the surface of the object to be inspected. Note that the Gabor wavelet waveform is a waveform having a characteristic that a specific frequency component is localized within a short time interval.
つまり、図７に示した入力波形ｘ（ｔ）は、自己相関を計算するとガボールウェーブレットの波形となるような超音波信号となっている。 In other words, the input waveform x(t) shown in FIG. 7 is an ultrasonic signal that becomes a Gabor wavelet waveform when autocorrelation is calculated.
そして、パルス圧縮技術を用いないＴＯＦＤ法を行う場合には、超音波送信部３２は、ガボールウェーブレットの波形の超音波信号を入力波形として送信探触子３３から検査対象物に対して送信する。そして、超音波受信部３４は、検査対象物において反射又は回折された超音波信号を受信探触子３５により受信する。そして、制御部３１は、受信探触子３５において受信された受信波形をそのまま表示部３６上に表示する。 When performing the TOFD method without using pulse compression technology, the ultrasonic transmitter 32 transmits an ultrasonic signal having a Gabor wavelet waveform as an input waveform from the transmitting probe 33 to the object to be inspected. Then, the ultrasonic receiving section 34 receives the ultrasonic signal reflected or diffracted from the inspection object using the receiving probe 35 . Then, the control unit 31 displays the received waveform received by the reception probe 35 on the display unit 36 as it is.
そして、このガボールウェーブレットの波形を入力波形として用いてＴＯＦＤ法を行った場合のシミュレーション結果を図１２に示す。 FIG. 12 shows simulation results when the TOFD method was performed using this Gabor wavelet waveform as an input waveform.
この場合であっても、受信波形ｙ（ｔ）として、パルス圧縮後の受信波形ｚ（ｔ）と同様な波形が得られることになる。ただし、この場合には、パルス圧縮技術を用いないことにより、ＳＮ比が悪くなるというデメリットがある。 Even in this case, a waveform similar to the received waveform z(t) after pulse compression is obtained as the received waveform y(t). However, in this case, there is a disadvantage that the signal-to-noise ratio deteriorates because the pulse compression technique is not used.
上記で説明した本実施形態の超音波検査方法によれば、検査対象物に超音波信号を送信して超音波検査を行う際に、検査対象物から受信した受信波形から、検査対象物の表面を伝搬するラテラル波を消去することができる。しかし、本発明は、検査対象物から受信した受信波形からラテラル波を消去する場合に限定されるものではない。本発明は、検査対象物に超音波信号を送信して超音波検査を行う場合だけでなく、多孔質材などの高い減衰材料に対して、周波数ごとの超音波伝搬特性を調査する際にも適用することができ、受信波形に含まれる不要な周波数成分の波形を消去することができるという効果を得ることができる。 According to the ultrasonic inspection method of the present embodiment described above, when performing an ultrasonic inspection by transmitting an ultrasonic signal to an object to be inspected, the surface of the object to be inspected is determined based on the received waveform received from the object to be inspected. lateral waves propagating can be eliminated. However, the present invention is not limited to the case where lateral waves are eliminated from the received waveform received from the object to be inspected. The present invention is useful not only when performing ultrasonic inspection by transmitting ultrasonic signals to an object to be inspected, but also when investigating ultrasonic propagation characteristics for each frequency in highly attenuating materials such as porous materials. The present invention can be applied to the present invention, and it is possible to obtain the effect that unnecessary frequency component waveforms included in the received waveform can be erased.
さらに、本発明によれば、特定の周波数の弾性波を高ＳＮ比で送受信することができるようになるという効果を得ることもできる。 Furthermore, according to the present invention, it is also possible to obtain the effect that elastic waves of a specific frequency can be transmitted and received with a high SN ratio.
１０ 超音波検査装置
３１ 制御部
３２ 超音波送信部
３３ 送信探触子
３４ 超音波受信部
３５ 受信探触子
３６ 表示部
４１ ラテラル波
４２、４３ 回折波
４４ 裏面反射波
７０ ＴＯＦＤ法実験装置
10 Ultrasonic inspection device 31 Control unit 32 Ultrasonic transmitter 33 Transmission probe 34 Ultrasonic receiver 35 Reception probe 36 Display unit 41 Lateral waves 42, 43 Diffraction wave 44 Back surface reflected wave 70 TOFD method experimental device
Claims (6)
前記検査対象物において反射又は回折された超音波信号を受信探触子により受信し、
受信した受信波形と前記入力波形との間で相互相関演算を行うことにより前記受信波形を時間軸方向に圧縮して表示する、
超音波検査方法。 When the autocorrelation is calculated, an ultrasonic signal that becomes a Gabor wavelet waveform is sent as an input waveform from the transmitting probe to the object to be inspected.
Receiving the ultrasonic signal reflected or diffracted by the inspection object with a receiving probe,
compressing and displaying the received waveform in the time axis direction by performing a cross-correlation calculation between the received received waveform and the input waveform;
Ultrasonic testing method.
前記検査対象物において反射又は回折された超音波信号を受信探触子により受信し、
受信した受信波形を表示する、
超音波検査方法。 The ultrasonic signal in the form of a Gabor wavelet waveform is transmitted from the transmission probe to the inspection object as an input waveform.
Receiving the ultrasonic signal reflected or diffracted by the inspection object with a receiving probe,
Display the received waveform,
Ultrasonic testing method.
前記検査対象物において反射又は回折された超音波信号を受信探触子により受信する受信部と、
受信した受信波形と前記入力波形との間で相互相関演算を行うことにより前記受信波形を時間軸方向に圧縮して表示する表示部と、
を備えた超音波検査装置。 a transmitter that transmits an ultrasonic signal whose autocorrelation is calculated to have a Gabor wavelet waveform as an input waveform from a transmitting probe to an object to be inspected;
a receiving unit that receives the ultrasound signal reflected or diffracted by the inspection object using a receiving probe;
a display unit that compresses and displays the received waveform in a time axis direction by performing a cross-correlation calculation between the received received waveform and the input waveform;
An ultrasonic inspection device equipped with
前記検査対象物において反射又は回折された超音波信号を受信探触子により受信する受信部と、
受信した受信波形を表示する表示部と、
を備えた超音波検査装置。 a transmitting unit that transmits an ultrasonic signal having a Gabor wavelet waveform as an input waveform from a transmitting probe to an object to be inspected;
a receiving unit that receives the ultrasonic signal reflected or diffracted by the inspection object using a receiving probe;
a display section that displays the received waveform;
An ultrasonic inspection device equipped with
前記検査対象物において反射又は回折された超音波信号を受信探触子により受信するステップと、
受信した受信波形と前記入力波形との間で相互相関演算を行うことにより前記受信波形を時間軸方向に圧縮して表示するステップと、
をコンピュータに実行させるためのプログラム。 a step of transmitting an ultrasonic signal whose autocorrelation is calculated to have a Gabor wavelet waveform as an input waveform from a transmitting probe to an object to be inspected;
receiving the ultrasound signal reflected or diffracted by the inspection object with a receiving probe;
compressing and displaying the received waveform in the time axis direction by performing a cross-correlation calculation between the received received waveform and the input waveform;
A program that causes a computer to execute
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