JP2024031926A - Salt, acid generator, resin, resist composition, and method for producing resist pattern - Google Patents

Abstract

To provide a resist composition and the like which allow a resist pattern having good line edge roughness to be produced.SOLUTION: There are provided: an acid generator and the like using a salt represented by a specific formula or a resin containing a structural unit derived from the salt; and a resist composition.SELECTED DRAWING: None

Description

The present invention relates to a salt, an acid generator, a resin, a resist composition, and a method for producing a resist pattern.

Patent Document 1 describes a resist composition containing a resin containing a structural unit derived from a salt represented by the following formula.

Patent Document 2 describes a resist composition containing a resin containing a structural unit derived from a salt represented by the following formula.

Japanese Patent Application Publication No. 2010-77404 Japanese Patent Application Publication No. 2007-197718

The present invention provides a salt that forms a resist pattern with better line edge roughness (LER) than the resist pattern formed with the above resist composition.

［式（Ｉ）及び式（ＩＰ）中、
Ｒ^１、Ｒ^２及びＲ^３は、それぞれ独立に、－Ｏ－Ｒ^１０、－Ｏ－ＣＯ－Ｒ^１０、－Ｏ－ＣＯ－Ｏ－Ｒ^１０又は－Ｏ－Ｌ^１－ＣＯ－Ｏ－Ｒ^１０を表す。
Ｌ^１は、炭素数１～６のアルカンジイル基を表す。
Ｒ^１０は、－ＳＯ_２－を有する基を表す。
Ｒ^４、Ｒ^５、Ｒ^６、Ｒ^７、Ｒ^８及びＲ^９は、それぞれ独立に、ハロゲン原子、炭素数１～１２のハロアルキル基又は炭素数１～１８の炭化水素基を表し、該炭化水素基は、置換基を有してもよく、該ハロアルキル基及び該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－で置き換わっていてもよい。
Ａ^１、Ａ^２及びＡ^３は、それぞれ独立に、炭素数１～２０の炭化水素基を表し、該炭化水素基は、置換基を有してもよく、該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－で置き換わっていてもよい。
ｍ１は、１～５のいずれかの整数を表し、ｍ１が２以上のとき、複数の括弧内の基は互いに同一であっても異なってもよい。
ｍ２は、０～５のいずれかの整数を表し、ｍ２が２以上のとき、複数の括弧内の基は互いに同一であっても異なってもよい。
ｍ３は、０～５のいずれかの整数を表し、ｍ３が２以上のとき、複数の括弧内の基は互いに同一であっても異なってもよい。
ｍ４は、０～４のいずれかの整数を表し、ｍ４が２以上のとき、複数のＲ^４は互いに同一であっても異なってもよい。
ｍ５は、０～４のいずれかの整数を表し、ｍ５が２以上のとき、複数のＲ^５は互いに同一であっても異なってもよい。
ｍ６は、０～４のいずれかの整数を表し、ｍ６が２以上のとき、複数のＲ^６は互いに同一であっても異なってもよい。
ｍ７は、０～４のいずれかの整数を表し、ｍ７が２以上のとき、複数のＲ^７は互いに同一であっても異なってもよい。
ｍ８は、０～５のいずれかの整数を表し、ｍ８が２以上のとき、複数のＲ^８は互いに同一であっても異なってもよい。
ｍ９は、０～５のいずれかの整数を表し、ｍ９が２以上のとき、複数のＲ^９は互いに同一であっても異なってもよい。
但し、１≦ｍ１＋ｍ７≦５、０≦ｍ２＋ｍ８≦５、０≦ｍ３＋ｍ９≦５である。
Ｑ^ｂ１及びＱ^ｂ２は、それぞれ独立に、水素原子、フッ素原子、炭素数１～６のペルフルオロアルキル基又は炭素数１～６のアルキル基を表す。
Ｌ^ｂ１は、炭素数１～２４の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基で置換されていてもよい。
Ｙ^ｂ１は、単結合又は置換基を有していてもよい炭素数３～２４の環状炭化水素基を表し、該環状炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－に置き換わっていてもよい。
Ｒ^ｂｂ１は、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｘ^１０は、単結合、＊－Ｏ－＊＊、＊－ＣＯ－Ｏ－＊＊、＊－Ｏ－ＣＯ－Ｏ－＊＊又は＊－Ａｘ－Ｐｈ－Ａｙ－＊＊を表す。
Ｐｈは、置換基を有してもよいフェニレン基を表す。
Ａｘは、単結合、エーテル結合、チオエーテル結合、エステル結合及び炭酸エステル結合から構成される群から選択される１種の結合種を表す。
Ａｙは、単結合、エーテル結合、チオエーテル結合、エステル結合及び炭酸エステル結合から構成される群から選択される１種の結合種を表す。
＊及び＊＊は、結合部位を表し、＊は、Ｒ^ｂｂ１が結合した炭素原子との結合部位を表す。
Ｌ^１０は、単結合又は置換基を有してもよい炭素数１～３６の炭化水素基を表し、該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。］
［２］Ａ^１が、＊＊＊－Ｘ^０１－Ｌ^０１－又は＊＊＊－Ｌ^０１－Ｘ^０１－であり、
Ａ^２が、＊＊＊－Ｘ^０２－Ｌ^０２－又は＊＊＊－Ｌ^０２－Ｘ^０２－であり、
Ａ^３が、＊＊＊－Ｘ^０３－Ｌ^０３－又は＊＊＊－Ｌ^０３－Ｘ^０３－であり、
Ｘ^０１、Ｘ^０２及びＸ^０３は、それぞれ独立に、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－を表し、
Ｌ^０１、Ｌ^０２及びＬ^０３は、それぞれ独立に、単結合又は炭素数１～１８の炭化水素基を表し、該炭化水素基は、置換基を有してもよく、該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－で置き換わっていてもよく、
＊＊＊は、Ｒ^１、Ｒ^２又はＲ^３が結合するベンゼン環との結合部位を表す［１］に記載の酸発生剤。
［３］Ｘ^０１、Ｘ^０２及びＸ^０３が、それぞれ独立に、－Ｏ－又は－Ｓ－である［２］に記載の酸発生剤。
［４］Ｌ^０１、Ｌ^０２及びＬ^０３が、それぞれ独立に、単結合又は炭素数１～６のアルカンジイル基（該アルカンジイル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－で置き換わっていてもよい。）である［２］又は［３］に記載の酸発生剤。
［５］Ｒ^１０の－ＳＯ_２－を有する基が、式（Ｔ１Ａ）で表される環を有する基である［１］～［４］のいずれかに記載の酸発生剤。

［式（Ｔ１Ａ）中、
Ｘ^１Ａは、酸素原子、硫黄原子、－ＮＨ－又はメチレン基を表す。
Ｒ^４１Ａは、ハロゲン原子もしくはヒドロキシ基を有していてもよい炭素数１～１２のアルキル基、ハロゲン原子、ヒドロキシ基、シアノ基、炭素数１～１２のアルコキシ基、炭素数６～１２のアリール基、炭素数７～１２のアラルキル基、グリシジルオキシ基、炭素数２～１２のアルコキシカルボニル基又は炭素数２～４のアルキルカルボニル基を表す。
ｍａは、０～９のいずれかの整数を表す。ｍａが２以上のとき、複数のＲ^４１Ａは同一であっても異なってもよい。
結合部位は任意の位置である。］
［６］Ｙ^ｂ１が、単結合又は置換基を有していてもよい炭素数３～１８の脂環式炭化水素基（該脂環式炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－に置き換わっていてもよい。）である［１］～［５］のいずれかに記載の酸発生剤。
［７］Ｙ^ｂ１が、シクロヘキサンジイル基、アダマンタンジイル基、ノルボルナンジイル基、アダマンタンラクトンジイル基又はノルボルナンラクトンジイル基である［６］に記載の酸発生剤。
［８］Ｘ^１０が、単結合又は式（Ｘ^１０－１）～式（Ｘ^１０－１０）のいずれかで表される基である［１］～［７］のいずれかに記載の酸発生剤。

［式（Ｘ^１０－１）～式（Ｘ^１０－１０）中、
＊、＊＊は結合部位であり、＊はＲ^ｂｂ１が結合した炭素原子との結合部位を表す。
Ｒｘは、ハロゲン原子、ヒドロキシ基、炭素数１～６のフッ化アルキル基、炭素数１～１８のアルキル基又は炭素数１～６のアルコキシ基を表す。
ｍｘは、０～４のいずれかの整数を表す。］
［９］Ｘ^１０が、単結合又は式（Ｘ^１０－１）、式（Ｘ^１０－５’）及び式（Ｘ^１０－６’）のいずれかで表される基である［８］に記載の酸発生剤。

［式（Ｘ^１０－１）、式（Ｘ^１０－５’）及び式（Ｘ^１０－６’）中、
＊、＊＊は結合部位であり、＊はＲ^ｂｂ１が結合した炭素原子との結合部位を表す。］
［１０］Ｌ^１０が、単結合、炭素数１～６のアルカンジイル基（但し、該アルカンジイル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。）、炭素数３～１８の環状炭化水素基（但し、該環状炭化水素基は、置換基を有してもよく、該環状炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。）又は炭素数１～６のアルカンジイル基と炭素数３～１８の環状炭化水素基とを組み合わせてなる基（但し、該環状炭化水素基は、置換基を有してもよく、該アルカンジイル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該環状炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。）である［１］～［９］のいずれかに記載の酸発生剤。
［１１］［１］～［１０］のいずれかに記載の酸発生剤を含有するレジスト組成物。
［１２］式（Ｉ）で表される塩と、
酸不安定基を有する構造単位（ａ１）を含む樹脂とを含有する［１１］に記載のレジスト組成物。
［１３］式（ＩＰ）で表される構造単位を含む樹脂を含有し、
式（ＩＰ）で表される構造単位を含む樹脂が、酸不安定基を有する構造単位（ａ１）をさらに含む［１１］に記載のレジスト組成物。
［１４］式（Ｉ）で表される塩をさらに含有する［１３］に記載のレジスト組成物。
［１５］酸不安定基を有する構造単位（ａ１）が、式（ａ１－０）で表される構造単位、式（ａ１－１）で表される構造単位及び式（ａ１－２）で表される構造単位からなる群より選ばれる少なくとも１種を含む［１２］～［１４］のいずれかに記載のレジスト組成物。

［式（ａ１－０）、式（ａ１－１）及び式（ａ１－２）中、
Ｌ^a01、Ｌ^ａ１及びＬ^ａ２は、それぞれ独立に、－Ｏ－又は＊－Ｏ－（ＣＨ_２）_ｋ１－ＣＯ－Ｏ－を表し、ｋ１は１～７のいずれかの整数を表し、＊は－ＣＯ－との結合部位を表す。
Ｒ^a01、Ｒ^ａ４及びＲ^ａ５は、それぞれ独立に、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｒ^a02、Ｒ^a03及びＲ^a04は、それぞれ独立に、炭素数１～８のアルキル基、炭素数３～１８の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組み合わせた基を表す。
Ｒ^ａ６及びＲ^ａ７は、それぞれ独立に、炭素数１～８のアルキル基、炭素数２～８のアルケニル基、炭素数３～１８の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組合せることにより形成される基を表す。
ｍ１’は０～１４のいずれかの整数を表す。
ｎ１は０～１０のいずれかの整数を表す。
ｎ１’は０～３のいずれかの整数を表す。］
［１６］酸不安定基を有する構造単位（ａ１）を含む樹脂が、式（ａ２－Ａ）で表される構造単位をさらに含む［１２］～［１５］のいずれかに記載のレジスト組成物。

［式（ａ２－Ａ）中、
Ｒ^a50は、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｒ^a51は、ハロゲン原子、ヒドロキシ基、炭素数１～６のアルキル基、炭素数１～６のアルコキシ基、炭素数２～１２のアルコキシアルキル基、炭素数２～１２のアルコキシアルコキシ基、炭素数２～４のアルキルカルボニル基、炭素数２～４のアルキルカルボニルオキシ基、アクリロイルオキシ基又はメタクリロイルオキシ基を表す。
Ａ^a50は、単結合又は＊－Ｘ^a51－（Ａ^a52－Ｘ^a52）_nｂ－を表し、＊は－Ｒ^a50が結合する炭素原子との結合部位を表す。
Ａ^a52は、炭素数１～８のアルカンジイル基を表す。
Ｘ^a51及びＸ^a52は、それぞれ独立に、－Ｏ－、－ＣＯ－Ｏ－又は－Ｏ－ＣＯ－を表す。
ｎｂは、０又は１を表す。
ｍｂは、０～４のいずれかの整数を表す。ｍｂが２以上のいずれかの整数である場合、複数のＲ^a51は互いに同一であっても異なっていてもよい。］
［１７］式（Ｂ１）で表される塩又は式（Ｂ２）で表される塩をさらに含有する［１１］～［１６］のいずれかに記載のレジスト組成物。

［式（Ｂ１）中、
Ｑ^ｂ１及びＱ^ｂ２は、それぞれ独立に、水素原子、フッ素原子、炭素数１～６のペルフルオロアルキル基又は炭素数１～６のアルキル基を表す。
Ｌ^ｂ１は、炭素数１～２４の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基で置換されていてもよい。
Ｙは、置換基を有していてもよいメチル基又は置換基を有していてもよい炭素数３～２４の環状炭化水素基を表し、該環状炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。
Ｚ^＋は、有機カチオンを表す。］

［式（Ｂ２）中、
ｍ２１は、１～５のいずれかの整数を表し、ｍ２１が２以上のとき、複数の括弧内の基は互いに同一であっても異なってもよい。
Ｒ²¹は、炭素数３～１８の環状炭化水素基を含む炭素数３～４８の炭化水素基を表し、該環状炭化水素基は、置換基を有してもよく、該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。
Ｒ^2２は、ハロゲン原子又は炭素数１～６のアルキル基を表し、該アルキル基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
ｍ２２は、０～４のいずれかの整数を表し、ｍ２２が２以上のとき、複数のＲ^2２は互いに同一であっても異なってもよい。
Ｚ^＋は、有機カチオンを表す。］
［１８］酸発生剤から発生する酸よりも酸性度の弱い酸を発生する塩をさらに含有する［１１］～［１７］のいずれかに記載のレジスト組成物。
［１９］（１）［１１］～［１８］のいずれかに記載のレジスト組成物を基板上に塗布する工程、
（２）塗布後の組成物を乾燥させて組成物層を形成する工程、
（３）組成物層に露光する工程、
（４）露光後の組成物層を加熱する工程、及び
（５）加熱後の組成物層を現像する工程、
を含むレジストパターンの製造方法。
［２０］上述した式（Ｉ）で表される塩。
［２１］Ａ^１が、＊＊＊－Ｘ^０１－Ｌ^０１－又は＊＊＊－Ｌ^０１－Ｘ^０１－であり、
Ａ^２が、＊＊＊－Ｘ^０２－Ｌ^０２－又は＊＊＊－Ｌ^０２－Ｘ^０２－であり、
Ａ^３が、＊＊＊－Ｘ^０３－Ｌ^０３－又は＊＊＊－Ｌ^０３－Ｘ^０３－であり、
Ｘ^０１、Ｘ^０２及びＸ^０３は、それぞれ独立に、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－を表し、
Ｌ^０１、Ｌ^０２及びＬ^０３は、それぞれ独立に、単結合又は炭素数１～１８の炭化水素基を表し、該炭化水素基は、置換基を有してもよく、該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－で置き換わっていてもよく、
＊＊＊は、Ｒ^１、Ｒ^２又はＲ^３が結合するベンゼン環との結合部位を表す［２０］に記載の塩。
［２２］Ｘ^０１、Ｘ^０２及びＸ^０３が、それぞれ独立に、－Ｏ－又は－Ｓ－である［２１］に記載の塩。
［２３］Ｌ^０１、Ｌ^０２及びＬ^０３が、それぞれ独立に、単結合又は炭素数１～６のアルカンジイル基（該アルカンジイル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－で置き換わっていてもよい。）である［２１］又は［２２］に記載の塩。
［２４］Ｒ^１０の－ＳＯ_２－を有する基が、上述した式（Ｔ１Ａ）で表される環を有する基である［２０］～［２３］のいずれかに記載の塩。
［２５］Ｙ^ｂ１が、単結合又は置換基を有していてもよい炭素数３～１８の脂環式炭化水素基（該脂環式炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－に置き換わっていてもよい。）である［２０］～［２４］のいずれかに記載の塩。
［２６］Ｙ^ｂ１が、シクロヘキサンジイル基、アダマンタンジイル基、ノルボルナンジイル基、アダマンタンラクトンジイル基又はノルボルナンラクトンジイル基である［２５］に記載の塩。
［２７］Ｘ^１０が、単結合又は上述した式（Ｘ^１０－１）～式（Ｘ^１０－１０）のいずれかで表される基である［２０］～［２６］のいずれかに記載の塩。
［２８］Ｘ^１０が、単結合又は上述した式（Ｘ^１０－１）、式（Ｘ^１０－５’）及び式（Ｘ^１０－６’）のいずれかで表される基である［２７］に記載の塩。
［２９］Ｌ^１０が、単結合、炭素数１～６のアルカンジイル基（但し、該アルカンジイル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。）、炭素数３～１８の環状炭化水素基（但し、該環状炭化水素基は、置換基を有してもよく、該環状炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。）又は炭素数１～６のアルカンジイル基と炭素数３～１８の環状炭化水素基とを組み合わせてなる基（但し、該環状炭化水素基は、置換基を有してもよく、該アルカンジイル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該環状炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。）である［２０］～［２８］のいずれかに記載の塩。
［３０］上述した式（ＩＰ）で表される構造単位を含む樹脂。 The present invention includes the following inventions.
[1] An acid generator containing a salt represented by formula (I) or a structural unit represented by formula (IP).

[In formula (I) and formula (IP),
R ¹ , R ² and R ³ are each independently -O-R ¹⁰ , -O-CO-R ¹⁰ , -O-CO-O-R ¹⁰ or -O-L ¹ -CO-O-R ¹⁰ represents.
L ¹ represents an alkanediyl group having 1 to 6 carbon atoms.
R ¹⁰ represents a group having -SO ₂ -.
R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ each independently represent a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 18 carbon atoms; The group may have a substituent, and -CH ₂ - contained in the haloalkyl group and the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO ₂ -. good.
A ¹ , A ² and A ³ each independently represent a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group ₂ - may be replaced with -O-, -CO-, -S- or -SO ₂ -.
m1 represents any integer from 1 to 5, and when m1 is 2 or more, the groups within the parentheses may be the same or different.
m2 represents any integer from 0 to 5, and when m2 is 2 or more, the groups within the parentheses may be the same or different.
m3 represents any integer from 0 to 5, and when m3 is 2 or more, the groups within the parentheses may be the same or different.
m4 represents any integer from 0 to 4, and when m4 is 2 or more, a plurality of R ^4s may be the same or different.
m5 represents any integer from 0 to 4, and when m5 is 2 or more, a plurality of R ⁵ may be the same or different.
m6 represents any integer from 0 to 4, and when m6 is 2 or more, a plurality of R ⁶ may be the same or different.
m7 represents any integer from 0 to 4, and when m7 is 2 or more, a plurality of R ^7s may be the same or different.
m8 represents any integer from 0 to 5, and when m8 is 2 or more, a plurality of R ^8s may be the same or different from each other.
m9 represents any integer from 0 to 5, and when m9 is 2 or more, a plurality of R ⁹ 's may be the same or different.
However, 1≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5.
Q ^b1 and Q ^b2 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms.
L ^b1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and -CH ₂ - contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. , the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
Y ^b1 represents a single bond or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH ₂ - contained in the cyclic hydrocarbon group is -O-, -CO- , -S- or -SO ₂ -.
R ^bb1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may have a halogen atom.
X ¹⁰ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-** or *-Ax-Ph-Ay-**.
Ph represents a phenylene group which may have a substituent.
Ax represents one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, and a carbonate bond.
Ay represents one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, and a carbonate bond.
* and ** represent a bonding site, and * represents a bonding site with the carbon atom to which R ^bb1 is bonded.
L ¹⁰ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH ₂ - contained in the hydrocarbon group is -O-, -S-, -SO ₂ - or -CO- may be substituted. ]
[2] A ¹ is ****-X ⁰¹ -L ⁰¹ - or ****-L ⁰¹ -X ⁰¹ -,
A ² is ****-X ⁰² -L ⁰² - or ****-L ⁰² -X ⁰² -,
A ³ is ****-X ⁰³ -L ⁰³ - or ****-L ⁰³ -X ⁰³ -,
X ⁰¹ , X ⁰² and X ⁰³ each independently represent -O-, -CO-, -S- or -SO ₂ -,
L ⁰¹ , L ⁰² and L ⁰³ each independently represent a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and the hydrocarbon group may have a substituent. -CH ₂ - may be replaced with -O-, -CO-, -S- or -SO ₂ -,
*** represents the bonding site with the benzene ring to which R ¹ , R ² or R ³ is bonded; the acid generator according to [1].
[3] The acid generator according to [2], wherein X ⁰¹ , X ⁰² and X ⁰³ are each independently -O- or -S-.
[4] L ⁰¹ , L ⁰² and L ⁰³ are each independently a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH ₂ - contained in the alkanediyl group is -O- or -CO- The acid generator according to [2] or [3], which may be substituted with
[5] The acid generator according to any one of [1] to [4], wherein the group having -SO ₂ - in R ¹⁰ is a group having a ring represented by formula (T1A).

[In formula (T1A),
X ^1A represents an oxygen atom, a sulfur atom, -NH- or a methylene group.
R ^41A is an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms; represents an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms.
ma represents any integer from 0 to 9. When ma is 2 or more, multiple R ^41A 's may be the same or different.
The binding site can be at any position. ]
[6] Y ^b1 is a single bond or an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH ₂ - contained in the alicyclic hydrocarbon group is -O -, -CO-, -S- or -SO ₂ -.) The acid generator according to any one of [1] to [5].
[7] The acid generator according to [6], wherein Y ^b1 is a cyclohexanediyl group, an adamantanediyl group, a norbornanediyl group, an adamantanelactonediyl group, or a norbornanelactonediyl group.
[8] The acid generator according to any one of [1] to [7], wherein X ¹⁰ is a single bond or a group represented by any one of formulas (X ¹⁰ -1) to (X ¹⁰ -10) agent.

[Formula (X ¹⁰ -1) to (X ¹⁰ -10),
*, ** are bonding sites, and * represents the bonding site with the carbon atom to which R ^bb1 is bonded.
Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms.
mx represents any integer from 0 to 4. ]
[9] As described in [8], wherein X ¹⁰ is a single bond or a group represented by any one of formula (X ¹⁰ -1), formula (X ¹⁰ -5') and formula (X ¹⁰ -6') acid generator.

[In formula (X ¹⁰ -1), formula (X ¹⁰ -5') and formula (X ¹⁰ -6'),
* and ** are bonding sites, and * represents a bonding site with the carbon atom to which R ^bb1 is bonded. ]
[10] L ¹⁰ is a single bond, an alkanediyl group having 1 to 6 carbon atoms (however, -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-). , a cyclic hydrocarbon group having 3 to 18 carbon atoms (however, the cyclic hydrocarbon group may have a substituent, and -CH ₂ - contained in the cyclic hydrocarbon group is -O-, -S -, -SO ₂ - or -CO-) or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (however, the cyclic hydrocarbon group may be substituted with The hydrocarbon group may have a substituent, and the -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-, and the -CH 2 - contained in the cyclic hydrocarbon group may be replaced with -O- or -CO-. CH ₂ - may be replaced with -O-, -S-, -SO ₂ - or -CO-.) The acid generator according to any one of [1] to [9].
[11] A resist composition containing the acid generator according to any one of [1] to [10].
[12] A salt represented by formula (I),
The resist composition according to [11], further comprising a resin containing a structural unit (a1) having an acid-labile group.
[13] Contains a resin containing a structural unit represented by formula (IP),
The resist composition according to [11], wherein the resin containing the structural unit represented by formula (IP) further contains a structural unit (a1) having an acid-labile group.
[14] The resist composition according to [13], further containing a salt represented by formula (I).
[15] The structural unit (a1) having an acid-labile group is a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), and a structural unit represented by formula (a1-2). The resist composition according to any one of [12] to [14], comprising at least one structural unit selected from the group consisting of structural units.

[In formula (a1-0), formula (a1-1) and formula (a1-2),
L ^a01 , L ^a1 and L ^a2 each independently represent -O- or *-O-(CH ₂ ) _k1 -CO-O-, k1 represents any integer from 1 to 7, and * Represents a binding site with -CO-.
R ^a01 , R ^a4 and R ^a5 each independently represent a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.
R ^a02 , R ^a03 and R ^a04 each independently represent an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or any of these. Represents a combined group.
R ^a6 and R ^a7 each independently represent an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic group having 6 to 18 carbon atoms. Represents a hydrocarbon group or a group formed by combining these.
m1' represents any integer from 0 to 14.
n1 represents any integer from 0 to 10.
n1' represents any integer from 0 to 3. ]
[16] The resist composition according to any one of [12] to [15], wherein the resin containing the structural unit (a1) having an acid-labile group further contains a structural unit represented by formula (a2-A). .

[In formula (a2-A),
R ^a50 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may contain a halogen atom.
R ^a51 is a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, a carbon number Represents an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.
A ^a50 represents a single bond or *-X ^a51 --(A ^a52 --X ^a52 ) _nb --, and * represents a bonding site with the carbon atom to which --R ^a50 is bonded.
A ^a52 represents an alkanediyl group having 1 to 8 carbon atoms.
X ^a51 and X ^a52 each independently represent -O-, -CO-O- or -O-CO-.
nb represents 0 or 1.
mb represents any integer from 0 to 4. When mb is any integer of 2 or more, a plurality of R ^a51 's may be the same or different. ]
[17] The resist composition according to any one of [11] to [16], further containing a salt represented by formula (B1) or a salt represented by formula (B2).

[In formula (B1),
Q ^b1 and Q ^b2 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms.
L ^b1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and -CH ₂ - contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. , the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
Y represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH ₂ - contained in the cyclic hydrocarbon group is , -O-, -S-, -SO ₂ - or -CO-.
Z ⁺ represents an organic cation. ]

[In formula (B2),
m21 represents any integer from 1 to 5, and when m21 is 2 or more, the groups within the parentheses may be the same or different.
R ²¹ represents a hydrocarbon group having 3 to 48 carbon atoms, including a cyclic hydrocarbon group having 3 to 18 carbon atoms, and the cyclic hydrocarbon group may have a substituent, and the cyclic hydrocarbon group may have a substituent. -CH ₂ - may be replaced with -O-, -S-, -SO ₂ - or -CO-.
R ²² represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH ₂ - contained in the alkyl group may be replaced with -O- or -CO-.
m22 represents any integer from 0 to 4, and when m22 is 2 or more, a plurality of R ^22s may be the same or different.
Z ⁺ represents an organic cation. ]
[18] The resist composition according to any one of [11] to [17], further containing a salt that generates an acid that is weaker in acidity than the acid generated from the acid generator.
[19](1) Applying the resist composition according to any one of [11] to [18] onto a substrate,
(2) drying the applied composition to form a composition layer;
(3) exposing the composition layer to light;
(4) a step of heating the composition layer after exposure; and (5) a step of developing the composition layer after heating.
A method for manufacturing a resist pattern including:
[20] A salt represented by the above formula (I).
[21] A ¹ is ****-X ⁰¹ -L ⁰¹ - or ****-L ⁰¹ -X ⁰¹ -,
A ² is ****-X ⁰² -L ⁰² - or ****-L ⁰² -X ⁰² -,
A ³ is ****-X ⁰³ -L ⁰³ - or ****-L ⁰³ -X ⁰³ -,
X ⁰¹ , X ⁰² and X ⁰³ each independently represent -O-, -CO-, -S- or -SO ₂ -,
L ⁰¹ , L ⁰² and L ⁰³ each independently represent a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and the hydrocarbon group may have a substituent. -CH ₂ - may be replaced with -O-, -CO-, -S- or -SO ₂ -,
*** represents the bonding site with the benzene ring to which R ¹ , R ² or R ³ is bonded; the salt according to [20];
[22] The salt according to [21], wherein X ⁰¹ , X ⁰² and X ⁰³ are each independently -O- or -S-.
[23] L ⁰¹ , L ⁰² and L ⁰³ are each independently a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH ₂ - contained in the alkanediyl group is -O- or -CO- ) The salt according to [21] or [22].
[24] The salt according to any one of [20] to [23], wherein the group having -SO ₂ - in R ¹⁰ is a group having a ring represented by the above-mentioned formula (T1A).
[25] Y ^b1 is a single bond or an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH ₂ - contained in the alicyclic hydrocarbon group is -O -, -CO-, -S- or -SO ₂ -), the salt according to any one of [20] to [24].
[26] The salt according to [25], wherein Y ^b1 is a cyclohexanediyl group, an adamantanediyl group, a norbornanediyl group, an adamantanelactonediyl group, or a norbornanelactonediyl group.
[27] The compound according to any one of [20] to [26], wherein X ¹⁰ is a single bond or a group represented by any of the above formulas (X ¹⁰ -1) to (X ¹⁰ -10) salt.
[28] X ¹⁰ is a single bond or a group represented by any of the above formulas (X ¹⁰ -1), (X ¹⁰ -5') and (X ¹⁰ -6') [27] Salt as described in.
[29] L ¹⁰ is a single bond or an alkanediyl group having 1 to 6 carbon atoms (however, -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-). , a cyclic hydrocarbon group having 3 to 18 carbon atoms (however, the cyclic hydrocarbon group may have a substituent, and -CH ₂ - contained in the cyclic hydrocarbon group is -O-, -S -, -SO ₂ - or -CO-) or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (however, the cyclic hydrocarbon group may be substituted with The hydrocarbon group may have a substituent, and the -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-, and the -CH 2 - contained in the cyclic hydrocarbon group may be replaced with -O- or -CO-. CH ₂ - may be replaced with -O-, -S-, -SO ₂ - or -CO-.) The salt according to any one of [20] to [28].
[30] A resin containing a structural unit represented by the above formula (IP).

By using a resist composition using the salt of the present invention, a resist pattern with good line edge roughness (LER) can be manufactured.

In this specification, "(meth)acrylic monomer" means "at least one of an acrylic monomer and a methacrylic monomer." Descriptions such as "(meth)acrylate" and "(meth)acrylic acid" also have the same meaning. Groups described in this specification that can have both a linear structure and a branched structure may have either of them. The term "combined group" refers to a group in which two or more of the exemplified groups are combined by appropriately changing their valency, bonding form, etc. "Derived from" or "derived from" refers to a polymerizable C=C bond contained in the molecule becoming a -C-C- group (single bond) through polymerization. If stereoisomers exist, all stereoisomers are included. In each group, depending on the number of substituents, hydrogen atoms at arbitrary positions and numbers contained in the group may be replaced with a bond. The number of carbon atoms in a substituent is not included in the number of carbon atoms in a substituent.
As used herein, "solid content of the resist composition" refers to the total amount of components excluding the solvent (E) described below from the total amount of the resist composition.

<Salt represented by formula (I)>
The present invention relates to a salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)").
Of the salt (I), the side having a positive charge may be referred to as a "cation (I)", and the side having a negative charge may be referred to as an "anion (I)".

［式（Ｉ－Ｃ）中、全ての符号は、式（Ｉ）と同じ意味を表す。］ [Cation (I)]
The cation (I) of the salt represented by formula (I) is a cation represented by formula (IC).

[In formula (IC), all symbols have the same meanings as in formula (I). ]

The alkanediyl group in L ¹ included in R ¹ , R ² and R ³ includes methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, Linear alkanediyl groups such as diyl group, hexane-1,6-diyl group; and ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane- 2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2 Branched alkanediyl groups such as -methylbutane-1,4-diyl group can be mentioned.
L ¹ is preferably an alkanediyl group having 1 to 3 carbon atoms, and more preferably a methylene group.

［式（Ｔ^１）中、
環Ａは、炭素数２～２４の単環式又は多環式のスルトン環を表す。環Ａに含まれる－ＣＨ_２－は、－Ｏ－、－Ｓ－又は－ＮＨ－に置き換わっていてもよい。
Ｒ^４１Ａは、ハロゲン原子もしくはヒドロキシ基を有していてもよい炭素数１～１２のアルキル基、ハロゲン原子、ヒドロキシ基、シアノ基、炭素数１～１２のアルコキシ基、炭素数６～１２のアリール基、炭素数７～１２のアラルキル基、グリシジルオキシ基、炭素数２～１２のアルコキシカルボニル基又は炭素数２～４のアルキルカルボニル基を表す。
ｍａは、０～９のいずれかの整数を表す。ｍａが２以上のとき、複数のＲ^４１Ａは同一であっても異なってもよい。］
スルトン環の炭素数は、好ましくは３～２４であり、より好ましくは３～２０であり、さらに好ましくは３～１８であり、より一層好ましくは３～１６であり、さらに一層好ましくは３～１２であり、さらにより好ましくは３～１０である。 The group having -SO ₂ - in R ¹⁰ included in R ¹ , R ² and R ³ may be a group having -SO 2 - in a linear structure, or a group having -SO _{2 -} in a branched structure. It may be a group, or it may be a group having -SO ₂ - in a cyclic structure (monocyclic or polycyclic). Preferably, it is a group having -SO ₂ - in the cyclic structure (monocyclic and polycyclic), and more preferably a group having -SO ₂ -O- in the monocyclic or polycyclic cyclic structure (sultone ring). ).
Examples of the sultone ring include a ring represented by the following formula (T ¹ ). Here, the binding site of the sultone ring can be at any position (the same applies hereinafter).

[In formula (T ¹ ),
Ring A represents a monocyclic or polycyclic sultone ring having 2 to 24 carbon atoms. -CH ₂ - contained in ring A may be replaced with -O-, -S- or -NH-.
R ^41A is an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms; represents an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms.
ma represents any integer from 0 to 9. When ma is 2 or more, multiple R ^41A 's may be the same or different. ]
The number of carbon atoms in the sultone ring is preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 16, even more preferably 3 to 12 and even more preferably from 3 to 10.

ここで、Ｘ^１Ａは、酸素原子、硫黄原子、－ＮＨ－又はメチレン基を表す。
Ｘ^１Ａは、好ましくは酸素原子又はメチレン基であり、より好ましくはメチレン基である。
Ｒ^４１Ａのハロゲン原子としては、フッ素原子、塩素原子、臭素原子及びヨウ素原子が挙げられる。
アルキル基としては、メチル基、エチル基、プロピル基、ブチル基、ペンチル基、ヘキシル基、オクチル基及びデシル基等が挙げられ、好ましくは炭素数１～６のアルキル基であり、より好ましくは炭素数１～４のアルキル基であり、さらに好ましくはメチル基又はエチル基である。
ハロゲン原子を有するアルキル基としては、トリフルオロメチル基、ペルフルオロエチル基、ペルフルオロプロピル基、ペルフルオロイソプロピル基、ペルフルオロブチル基、ペルフルオロｓｅｃ－ブチル基、ペルフルオロｔｅｒｔ－ブチル基、ペルフルオロペンチル基、ペルフルオロヘキシル基、トリクロロメチル基、トリブロモメチル基及びトリヨードメチル基等が挙げられ、好ましくはトリフルオロメチル基が挙げられる。
ヒドロキシ基を有するアルキル基としては、ヒドロキシメチル基及び２－ヒドロキシエチル基等のヒドロキシアルキル基が挙げられる。
アルコキシ基としては、メトキシ基、エトキシ基、プロポキシ基、ブトキシ基、ペンチルオキシ基、ヘキシルオキシ基、ヘプチルオキシ基、オクチルオキシ基、デシルオキシ基及びドデシルオキシ基等が挙げられる。
アリール基としては、フェニル基、ナフチル基、アントリル基、ｐ－メチルフェニル基、ｐ－ｔｅｒｔ－ブチルフェニル基、ｐ－アダマンチルフェニル基、トリル基、キシリル基、クミル基、メシチル基、ビフェニル基、フェナントリル基、２，６－ジエチルフェニル基及び２－メチル－６－エチルフェニル基等が挙げられる。
アラルキル基としては、ベンジル基、フェネチル基、フェニルプロピル基、ナフチルメチル基及びナフチルエチル基等が挙げられる。
アルコキシカルボニル基としては、メトキシカルボニル基、エトキシカルボニル基等のアルコキシ基とカルボニル基とが結合した基が挙げられ、好ましくは炭素数６以下のアルコキシカルボニル基が挙げられ、より好ましくはメトキシカルボニル基が挙げられる。
アルキルカルボニル基としては、アセチル基、プロピオニル基及びブチリル基等が挙げられる。
Ｒ^４１Ａとしては、好ましくはハロゲン原子もしくはヒドロキシ基を有していてもよい炭素数１～１２のアルキル基、ハロゲン原子又はヒドロキシ基であり、より好ましくは炭素数１～４のアルキル基であり、さらに好ましくはメチル基又はエチル基であり、さらにより好ましくはメチル基である。
ｍａは、０～４であることが好ましく、０又は１であることがより好ましく、０であることがさらに好ましい。つまり、－ＳＯ_２－を有する基は、置換基を有さないスルトン環を有する基がより好ましい。 The sultone ring of ring A is preferably a sultone ring having 3 to 18 carbon atoms, more preferably a sultone ring having 3 to 10 carbon atoms, such as a polycyclic ring represented by the following formula (T ¹ -0). , monocyclic rings represented by formula (T ¹ -3) and formula (T ¹ -4). Among these, polycyclic rings are preferred. The polycyclic sultone ring means a bridged ring containing -SO ₂ -O- as an atomic group constituting the ring, and includes formula (T ¹ -1), formula (T ¹ -2), formula (T ^1-5 ) and a ring represented by formula (T ^1-6 ). The sultone ring has a heteroatom in addition to -SO ₂ -O-, as in the rings represented by formulas (T ^1-2 ), (T ^1-5 ), and (T ^1-6 ). It may be included as an atom. Examples of the heteroatom include an oxygen atom, a sulfur atom, and a nitrogen atom, and preferably an oxygen atom.

Here, X ^1A represents an oxygen atom, a sulfur atom, -NH- or a methylene group.
X ^1A is preferably an oxygen atom or a methylene group, more preferably a methylene group.
Examples of the halogen atom for R ^41A include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group, preferably an alkyl group having 1 to 6 carbon atoms, and more preferably a carbon atom. It is an alkyl group of number 1 to 4, more preferably a methyl group or an ethyl group.
Examples of the alkyl group having a halogen atom include trifluoromethyl group, perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, perfluorobutyl group, perfluorosec-butyl group, perfluorotert-butyl group, perfluoropentyl group, perfluorohexyl group, Examples include a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, and preferably a trifluoromethyl group.
Examples of the alkyl group having a hydroxy group include hydroxyalkyl groups such as hydroxymethyl group and 2-hydroxyethyl group.
Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group, and dodecyloxy group.
Aryl groups include phenyl group, naphthyl group, anthryl group, p-methylphenyl group, p-tert-butylphenyl group, p-adamantylphenyl group, tolyl group, xylyl group, cumyl group, mesityl group, biphenyl group, phenanthryl group. group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, and the like.
Examples of the aralkyl group include benzyl group, phenethyl group, phenylpropyl group, naphthylmethyl group, and naphthylethyl group.
Examples of the alkoxycarbonyl group include groups in which an alkoxy group and a carbonyl group are bonded, such as a methoxycarbonyl group and an ethoxycarbonyl group, preferably an alkoxycarbonyl group having 6 or less carbon atoms, and more preferably a methoxycarbonyl group. Can be mentioned.
Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group.
R ^41A is preferably an alkyl group having 1 to 12 carbon atoms that may have a halogen atom or a hydroxy group, a halogen atom or a hydroxy group, more preferably an alkyl group having 1 to 4 carbon atoms, More preferably a methyl group or an ethyl group, even more preferably a methyl group.
ma is preferably 0 to 4, more preferably 0 or 1, and even more preferably 0. That is, the group having --SO ₂ -- is more preferably a group having a sultone ring without a substituent.

［式（Ｔ１Ａ）及び式（Ｔ１）中、全ての符号は、それぞれ前記と同じ意味を表す。］ As the sultone ring, a ring represented by the following formula (T1A) is preferable, and a ring represented by the formula (T1) is more preferable.

[In formula (T1A) and formula (T1), all symbols represent the same meanings as above. ]

Ｒ^１、Ｒ^２及びＲ^３は、－Ｏ－ＣＯ－Ｒ^１０、－Ｏ－ＣＯ－Ｏ－Ｒ^１０又は－Ｏ－Ｌ^１－ＣＯ－Ｏ－Ｒ^１０であることが好ましく、－Ｏ－ＣＯ－Ｏ－Ｒ^１０又は－Ｏ－Ｌ^１－ＣＯ－Ｏ－Ｒ^１０であることがより好ましい。
なお、ｍ１が２以上であるか、ｍ２又はｍ３が１以上であり、複数のＲ^１０がある場合、複数のＲ^１０は、互い同一であっても異なっていてもよい。
Ｒ^１、Ｒ^２及びＲ^３のベンゼン環への結合位置は、それぞれ独立に、Ａ^１、Ａ^２及びＡ^３の結合位置に対して、о位、ｍ位、ｐ位のいずれでもよい。なかでも、Ｒ^１、Ｒ^２及びＲ^３は、それぞれ独立に、Ａ^１、Ａ^２及びＡ^３の結合位置に対して、ｐ位又はｏ位に結合していることが好ましく、ｐ位に結合していることがより好ましい。 Examples of the ring represented by formula (T ¹ ), the ring represented by formula (T1A), and the ring represented by formula (T1) include the following rings. As mentioned above, the binding site can be at any position, but in the following rings, it is preferably the 1st or 3rd position, more preferably the 1st position.

R ¹ , R ² and R ³ are preferably -O-CO-R ¹⁰ , -O-CO-O-R ¹⁰ or -O-L ¹ -CO-O-R ¹⁰ , and -O-CO -O-R ¹⁰ or -OL ¹ -CO-O-R ¹⁰ is more preferred.
In addition, when m1 is 2 or more, m2 or m3 is 1 or more, and there are a plurality of R ^10s , the plurality of R ^10s may be the same or different.
The bonding positions of R ¹ , R ² and R ³ to the benzene ring may be any of the о-position, m-position, and p-position with respect to the bonding positions of A ¹ , A ² and A ³ , respectively. Among them, R ¹ , R ² and R ³ are each independently preferably bonded to the p-position or o-position with respect to the bonding positions of A ¹ , A ² and A ³ ; It is more preferable that you do so.

具体的には、単環式の脂環式炭化水素基としては、シクロプロピル基、シクロブチル基、シクロペンチル基、シクロヘキシル基、シクロヘプチル基、シクロオクチル基、シクロノニル基、シクロデシル基、シクロドデシル基等の単環式シクロアルキル基が挙げられる。多環式の脂環式炭化水素基としては、デカヒドロナフチル基、アダマンチル基、ノルボルニル基等の多環式シクロアルキル基、スピロシクロヘキサン－１，２’ －シクロペンタン基、スピロアダマンタン－２，３’－シクロペンタン基等のシクロアルキル基、ノルボニル基もしくはアダマンチル基とそれぞれにスピロで結合したシクロアルキル基を有するスピロ環等が挙げられる。脂環式炭化水素基の炭素数は、好ましくは３～１８であり、より好ましくは３～１６であり、さらに好ましくは３～１２である。
芳香族炭化水素基としては、フェニル基、ナフチル基、ビフェニル基、アントリル基、フェナントリル基、ビナフチル基等が挙げられる。芳香族炭化水素基の炭素数は、好ましくは６～１８であり、より好ましくは６～１４であり、さらに好ましくは６～１０である。 Examples of the halogen atoms for R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ include fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms.
The haloalkyl group having 1 to 12 carbon atoms in R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ represents an alkyl group having 1 to 12 carbon atoms having a halogen atom; Examples include a fluorinated alkyl group, a C1-12 alkyl chloride group, a C1-12 alkyl bromide group, and a C1-12 alkyl iodide group. Examples of haloalkyl groups include perfluoroalkyl groups having 1 to 12 carbon atoms (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3, Examples include 3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The haloalkyl group preferably has 1 to 9 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
The hydrocarbon groups having 1 to 18 carbon atoms for R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ include chain hydrocarbon groups such as alkyl groups and alkanediyl groups, and alicyclic hydrocarbon groups. , aromatic hydrocarbon groups, and groups formed by combining these groups.
The alkyl group is a straight-chain or branched alkyl group, such as methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group. Examples include alkyl groups such as a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group.
The alkanediyl group is a linear or branched alkanediyl group, such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, Linear alkanediyl groups such as hexane-1,6-diyl groups; and ethane-1,1-diyl groups, propane-1,1-diyl groups, propane-1,2-diyl groups, propane-2,2 -diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane- Branched alkanediyl groups such as 1,4-diyl groups are mentioned.
The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 12, more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.
The alicyclic hydrocarbon group may be monocyclic or polycyclic, and examples include the groups shown below. The binding site can be at any position.

Specifically, monocyclic alicyclic hydrocarbon groups include cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclononyl group, cyclodecyl group, cyclododecyl group, etc. Examples include monocyclic cycloalkyl groups. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, and norbornyl group, spirocyclohexane-1,2'-cyclopentane group, and spiroadamantane-2,3 Examples include a cycloalkyl group such as a '-cyclopentane group, a spiro ring having a cycloalkyl group bonded to a norbornyl group or an adamantyl group through a spiro, and the like. The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and still more preferably 3 to 12 carbon atoms.
Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, and the like. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and still more preferably 6 to 10 carbon atoms.

Groups formed by combining two or more types of chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups include aromatic hydrocarbon groups and chain hydrocarbon groups. combined groups (for example, aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*, alkyl group-aromatic hydrocarbon group-alkanediyl group-*, the alkanediyl group and the -CH ₂ - contained in the alkyl group may be replaced with -O-, -CO-, -S- or -SO ₂ -), a combination of an alicyclic hydrocarbon group and a chain hydrocarbon group groups (for example, alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*, alkyl group-alicyclic hydrocarbon group-alkanediyl group-*, alicyclic -CH ₂ - contained in the hydrocarbon group, the alkanediyl group and the alkyl group may be replaced with -O-, -CO-, -S- or -SO ₂ -), aromatic hydrocarbon group and an alicyclic hydrocarbon group (for example, aromatic hydrocarbon group - alicyclic hydrocarbon group - *, alicyclic hydrocarbon group - aromatic hydrocarbon group - *, alicyclic hydrocarbon group - -CH ₂ - contained in the hydrogen group may be replaced with -O-, -CO-, -S- or -SO ₂ -. * represents a binding site.
Examples of the aromatic hydrocarbon group -alkanediyl group-* include aralkyl groups such as benzyl group and phenethyl group.
Examples of the alkyl group - aromatic hydrocarbon group - * include tolyl group, xylyl group, cumenyl group and the like.
Alicyclic hydrocarbon group - alkanediyl group - * includes cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl group Examples include cycloalkylalkyl groups such as.
Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, and 2-alkyladamantane-2-yl group.
Examples of the aromatic hydrocarbon group - alicyclic hydrocarbon group -* include phenylcyclohexyl group and the like.
Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include cyclohexylphenyl group and the like.
In addition, in the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Furthermore, any group in the combined group may be bonded to the benzene ring.

-CH ₂ - contained in the haloalkyl group or hydrocarbon group represented by R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ is -O-, -CO-, -S- or -SO When substituted with ₂ -, the number of carbon atoms before substitution is the total number of carbon atoms of the haloalkyl group or the hydrocarbon group. Further, the number may be one, or two or more.
As a group in which -CH ₂ - contained in a haloalkyl group or a hydrocarbon group is replaced with -O-, -S-, -SO ₂ - or -CO-, a hydroxy group (-CH _{2 -} contained in a methyl group) - is replaced with -O-), thiol group (-CH ₂ - contained in the methyl group is replaced with -S-), carboxy group (-CH ₂ -CH contained in the ethyl group) ₂ - is replaced with -O-CO-), alkoxy group (a group in which -CH ₂ - at any position contained in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which -O- is substituted for -CH 2 - contained in an alkyl group), -CH ₂ -CH ₂ - at any position contained in the alkyl group is replaced with -O-CO-), alkylcarbonyl group (-CH ₂ - contained at any position contained in the alkyl group is replaced with -CO- ), alkylcarbonyloxy group (a group in which -CH ₂ -CH 2 - contained in an alkyl group is replaced with -CO-O-), alkylthio group (a group in which -CH 2 -CH ₂ - contained in an alkyl group is replaced with -CO-O-), an alkylthio group (a group contained in an alkyl group) (a group in which -CH ₂ - at any position is replaced by -S-), an alkylsulfonyl group (a group in which -CH ₂ - at any position contained in an alkyl group is replaced by -SO ₂ -), oxy group (a group in which -CH ₂ - contained in a methylene group is replaced with -O-), a carbonyl group (a group in which -CH 2 - contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH ₂ - contained in a methylene group is replaced with -CO-), -CH ₂ - contained in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH ₂ - contained in a methylene group is replaced with -SO ₂ -), alkanediyloxy group (a group in which -CH ₂ - at any position contained in an alkanediyl group is replaced with -O-), an alkanediyloxycarbonyl group (a group in which -CH ₂ -CH ₂ at any position contained in an alkanediyl group) - is replaced with -O-CO-), alkanediylcarbonyl group (a group in which -CH ₂ - at any position contained in the alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy group (a group in which -CH ₂ -CH ₂ - at any position contained in an alkanediyl group is replaced with -CO-O-), an alkanediylthio group (a group in which -CH 2 -CH 2 - at any position contained in an alkanediyl group is replaced with -CO-O-), ₂ - is replaced with -S-), alkanediylsulfonyl group (a group in which -CH ₂ - at any position contained in the alkanediyl group is replaced with -SO ₂ -), cycloalkoxy group, cyclo Alkylalkoxy group, alkoxycarbonyloxy group, aromatic hydrocarbon group-carbonyloxy group, aromatic hydrocarbon group-carbonyl group, aromatic hydrocarbon group-oxy group, haloalkoxy group (any position contained in haloalkyl group) -CH ₂ - is replaced with -O-), haloalkoxycarbonyl group (a group in which -CH ₂ -CH ₂ - at any position contained in the haloalkyl group is replaced with -O-CO-) , haloalkylcarbonyl group (a group in which -CH ₂ - at any position contained in the haloalkyl group is replaced with -CO-), haloalkylcarbonyloxy group (-CH ₂ -CH at any position contained in the haloalkyl group) _Examples include a group in which - is replaced with -CO-O-), a group in which two or more of these groups are combined, and the like.
Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, and nonyloxy group. group, decyloxy group, undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.
The alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.
Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group, and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as an acetyloxy group, a propionyloxy group, a butyryloxy group, and the like. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3.
Examples of the alkylthio group include alkylthio groups having 1 to 17 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, and decylthio group. group, undecylthio group, etc. The alkylthio group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 17 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, -Ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.
Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 17 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanediyloxy group, butanediyloxy group, pentanediyloxy group, and the like. The alkanediyloxy group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 17 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. . Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, and the like. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 17 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. . The alkanediyloxycarbonyl group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. The alkanediylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. The alkanediylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.
Examples of the alkanediylthio group include an alkanediylthio group having 1 to 17 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, and the like. The alkanediylthio group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkanediylsulfonyl group include an alkanediylsulfonyl group having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, and the like. The alkanediylsulfonyl group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include a cycloalkylalkoxy group having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as butoxycarbonyloxy groups. Examples of the aromatic hydrocarbon group-carbonyloxy group include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 18 carbon atoms, such as a benzoyl group. The aromatic hydrocarbon group-oxy group includes an aromatic hydrocarbon group-oxy group having 6 to 17 carbon atoms, such as a phenyloxy group.
Examples of the haloalkoxy group, haloalkoxycarbonyl group, haloalkylcarbonyl group, and haloalkylcarbonyloxy group include a haloalkoxy group having 1 to 11 carbon atoms, a haloalkoxycarbonyl group having 2 to 11 carbon atoms, and a haloalkylcarbonyl group having 2 to 12 carbon atoms. , a haloalkylcarbonyloxy group having 2 to 11 carbon atoms, and for example, a group in which one or more hydrogen atoms of the groups exemplified above are replaced with a halogen atom.

In addition, examples of groups in which -CH ₂ - contained in the alicyclic hydrocarbon group are replaced with -O-, -S-, -CO- or -SO ₂ - include the groups shown below. . -O- or -CO- in the groups shown below may be replaced with -S- or -SO ₂ -. The binding site can be at any position.

Examples of substituents that the hydrocarbon groups R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ may have include a halogen atom, a cyano group, and an alkyl group having 1 to 12 carbon atoms (the alkyl --CH ₂ -- contained in the group may be replaced with --O- or --CO-.
Examples of the halogen atom include the same groups as those described above.
Examples of the alkyl group having 1 to 12 carbon atoms include the same groups as mentioned above.
When -CH ₂ - contained in an alkyl group is replaced with -O- or -CO- as a substituent, the number of carbon atoms before being replaced is the total number of carbon atoms in the alkyl group. Examples of the substituted group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, and the like.
Examples of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group include an alkoxy group having 1 to 11 carbon atoms, an alkoxycarbonyl group having 2 to 11 carbon atoms, an alkylcarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 12 carbon atoms. -11 alkylcarbonyloxy groups, including the same groups as those mentioned above.
The hydrocarbon group may have one substituent or multiple substituents.

具体的には、シクロブタン－１，３－ジイル基、シクロペンタン－１，３－ジイル基、シクロヘキサン－１，４－ジイル基、シクロオクタン－１，５－ジイル基等の単環式シクロアルカンジイル基である単環式の脂環式炭化水素基及び
ノルボルナン－１，４－ジイル基、ノルボルナン－２，５－ジイル基、アダマンタン－１，５－ジイル基、アダマンタン－２，６－ジイル基、スピロシクロヘキサン－１，２’－シクロペンタン基、スピロアダマンタン－２，３’－シクロペンタン基等のシクロアルキル基、ノルボニル基もしくはアダマンチル基とそれぞれにスピロで結合したシクロアルキル基を有するスピロ環等の多環式シクロアルカンジイル基である多環式の脂環式炭化水素基が挙げられる。
脂環式炭化水素基の炭素数は、好ましくは３～１８であり、より好ましくは３～１６であり、さらに好ましくは３～１２であり、さらにより好ましくは３～１０である。
芳香族炭化水素基としては、フェニレン基、ナフチレン基、アントリレン基、ビフェニレン基、フェナントリレン基等のアリーレン基等の芳香族炭化水素基が挙げられる。芳香族炭化水素基の炭素数は、好ましくは６～１８であり、より好ましくは６～１４であり、さらに好ましくは６～１０である。 The hydrocarbon groups of A ¹ , A ² and A ³ include linear or branched chain hydrocarbon groups (for example, alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups , aromatic hydrocarbon groups, and a combination of two or more of these groups may be used. The number of carbon atoms in the hydrocarbon group is preferably 1 to 19, more preferably 1 to 18, still more preferably 1 to 16, even more preferably 1 to 14, even more preferably 1 to 18. It is 12.
Examples of chain hydrocarbon groups include methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, Heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12 -diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, heptadecane-1,17-diyl group, etc. Linear alkanediyl group and ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group branched alkanes such as 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group Diyl group is mentioned.
The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 9, even more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.
The alicyclic hydrocarbon group may be monocyclic or polycyclic, and examples include the groups shown below. The binding site can be at any position.

Specifically, monocyclic cycloalkanediyl such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, etc. a monocyclic alicyclic hydrocarbon group and norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane group and spiroadamantane-2,3'-cyclopentane group, spiro rings having cycloalkyl groups bonded to each spiro group, norbornyl group or adamantyl group, etc. Examples include polycyclic alicyclic hydrocarbon groups which are polycyclic cycloalkanediyl groups.
The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, still more preferably 3 to 12 carbon atoms, and even more preferably 3 to 10 carbon atoms.
Examples of the aromatic hydrocarbon group include aromatic hydrocarbon groups such as arylene groups such as phenylene group, naphthylene group, anthrylene group, biphenylene group, and phenanthrylene group. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and still more preferably 6 to 10 carbon atoms.

Groups formed by combining two or more types of groups include groups that combine an alicyclic hydrocarbon group and an alkanediyl group, groups that combine an aromatic hydrocarbon group and an alkanediyl group, and alicyclic groups. Examples include groups that are a combination of a hydrocarbon group and an aromatic hydrocarbon group. In combination, two or more types of chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups may be combined. Moreover, any group may be bonded to the benzene ring.
Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group -alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group, and the like.
Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl - group, -alkanediyl group - divalent aromatic hydrocarbon group, and the like.
Groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, Examples include -alicyclic hydrocarbon group -aromatic hydrocarbon group -alicyclic hydrocarbon group.

When -CH ₂ - contained in the hydrocarbon group of A ¹ , A ² and A ³ is replaced with -O-, -CO-, -S- or -SO ₂ -, the number of carbon atoms before substitution is The total number of carbon atoms in the hydrocarbon group. Further, the number may be one or more, but preferably one to three.
Groups in which -CH ₂ - contained in a hydrocarbon group is replaced with -O-, -CO-, -S- or -SO ₂ - include a hydroxy group (-CH ₂ - contained in a methyl group, -O-), carboxy group (-CH ₂ -CH ₂ - contained in the ethyl group replaced with -O-CO-), thiol group (-CH ₂ contained in the methyl group) - is replaced with -S-), alkoxy group (a group in which -CH ₂ - at any position contained in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group contained in an alkyl group) -CH ₂ -CH ₂ - at any position is replaced with -O-CO-), alkylcarbonyl group (-CH ₂ - at any position contained in the alkyl group is replaced with -CO-) group), alkylcarbonyloxy group (a group in which -CH ₂ -CH ₂ - at any position contained in an alkyl group is replaced with -CO-O-), alkylthio group (a group in which -CH 2 -CH 2 - contained at any position contained in an alkyl group is replaced with -CO-O-), -CH ₂ - is replaced with -S-), alkylsulfonyl group (a group in which -CH ₂ - at any position in the alkyl group is replaced with -SO ₂ -), oxy group (methylene (a group in which -CH ₂ - contained in the group is replaced with -O-), a carbonyl group (a group in which -CH ₂ - contained in a methylene group is replaced with -CO-), a thio group (a group in which -CH 2 - contained in a methylene group is replaced with -CO-), -CH ₂ - contained in the methylene group is replaced with -S-), sulfonyl group (a group in which -CH ₂ - contained in the methylene group is replaced with -SO ₂ -), alkanediyloxy group (alkanediyl -CH ₂ - at any position contained in the group is replaced with -O-), alkanediyloxycarbonyl group (-CH ₂ -CH ₂ - contained at any position contained in the alkanediyl group is replaced with -O-, -O-CO-), alkanediylcarbonyl group (group in which -CH ₂ - at any position in the alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy group (alkanediyl -CH ₂ -CH ₂ - at any position contained in the group is replaced with -CO-O-), an alkanediylsulfonyl group (a group in which -CH ₂ - contained at any position contained in the alkanediyl group is replaced with -CO-O-) , -SO ₂ -), alkanediylthio group (group in which -CH ₂ - at any position contained in the alkanediyl group is replaced with -S-), cycloalkoxy group, cycloalkylalkoxy group , an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group combining two or more of these groups. .
Examples of the alkoxy group include alkoxy groups having 1 to 19 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, and nonyloxy group. group, decyloxy group, undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.
The alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.
Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 19 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group, and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 20 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 19 carbon atoms, such as an acetyloxy group, a propionyloxy group, a butyryloxy group, and the like. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3.
Examples of the alkylthio group include alkylthio groups having 1 to 19 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, and the like. The alkylthio group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 19 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, and the like. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.
Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 19 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanediyloxy group, butanediyloxy group, pentanediyloxy group, and the like. The alkanediyloxy group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 19 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. . Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 20 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, and the like. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 19 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. . The alkanediyloxycarbonyl group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. The alkanediylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. The alkanediylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.
Examples of the alkanediylsulfonyl group include an alkanediylsulfonyl group having 1 to 19 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, and the like. The alkanediylsulfonyl group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkanediylthio group include alkanediylthio groups having 1 to 19 carbon atoms, such as methylenethio group, ethylenethio group, propylenethio group, and the like. The alkanediylthio group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 19 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include a cycloalkylalkoxy group having 4 to 19 carbon atoms, such as a cyclohexylmethoxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 18 carbon atoms, such as butoxycarbonyloxy groups. The aromatic hydrocarbon group-carbonyloxy group includes an aromatic hydrocarbon group-carbonyloxy group having 7 to 19 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include an aromatic hydrocarbon group-carbonyl group having 7 to 20 carbon atoms, such as a benzoyl group. The aromatic hydrocarbon group-oxy group includes an aromatic hydrocarbon group-oxy group having 6 to 19 carbon atoms, such as a phenyloxy group.

Ａ^１、Ａ^２及びＡ^３の炭化水素基が有していてもよい置換基としては、Ｒ^４～Ｒ^９の炭化水素基が有していてもよい置換基で挙げた基と同様の基が挙げられる。 In addition, examples of groups in which -CH ₂ - contained in the alicyclic hydrocarbon group are replaced with -O-, -CO-, -S- or -SO ₂ - include the groups shown below. . Also included are groups in which -O- is replaced by -S-, and -CO- is replaced by -SO ₂ -, among the groups shown below. The binding site can be at any position.

Examples of the substituents that the hydrocarbon groups of A ¹ , A ² and A ³ may have include the same groups as the substituents that the hydrocarbon groups of R ⁴ to R ⁹ may have. can be mentioned.

A ¹ , A ² and A ³ each independently represent a hydrocarbon group having 1 to 20 carbon atoms (the hydrocarbon group may have a substituent, and -CH ₂ - contained in the hydrocarbon group) may be substituted with -O-, -CO-, -S- or -SO ₂ -.However, at least one of -CH ₂ - contained in the hydrocarbon group is -O-, -CO -, -S- or -SO ₂ -). Specifically, A ¹ is ****-L ⁰¹¹ -X ⁰¹ -L ⁰¹² -, A ² is ****-L ⁰²¹ -X ⁰² -L ⁰²² -, and A ³ is * **-L ⁰³¹ -X ⁰³ -L ⁰³² - (X ⁰¹ , X ⁰² and X ⁰³ each independently represent -O-, -CO-, -S- or -SO ₂ -.L ⁰¹¹ , L ⁰¹² , L ⁰²¹ , L ⁰²² , L ⁰³¹ and L ⁰³² each independently represent a single bond or a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon group may have a substituent. , -CH ₂ - contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO ₂ -.However, the total number of carbon atoms of L ⁰¹¹ and L ⁰¹² is , 0 to 19, the total carbon number of L ⁰²¹ and L ⁰²² is 0 to 19, and the total carbon number of L ⁰³¹ and L ⁰³² is 0 to 19. *** is R ¹ , represents the bonding site with the benzene ring to which R ² or R ³ is bonded), and A ¹ is ****-X ⁰¹ -L ⁰¹ - or ****-L ⁰¹ -X ⁰¹ -. Yes, A ² is ****-X ⁰² -L ⁰² - or ****-L ⁰² -X ⁰² -, and A ³ is ****-X ⁰³ -L ⁰³ - or ****-L ⁰³ -X ⁰³ - (X ⁰¹ , X ⁰² and X ⁰³ each independently represent -O-, -CO-, -S- or -SO ₂ -. ^{L 01} , L ⁰² and L ⁰³ are , each independently represents a single bond or a hydrocarbon group having 1 to 19 carbon atoms, the hydrocarbon group may have a substituent, and -CH ₂ - contained in the hydrocarbon group represents -O -, -CO-, -S- or -SO ₂ - may be substituted. *** represents the bonding site with the benzene ring to which R ¹ , R ² or R ³ is bonded.) preferable. A ¹ , A ² and A ³ preferably have no substituent other than -O-, -CO-, -S- or -SO ₂ -.
L ⁰¹¹ , L ⁰¹² , L ⁰²¹ , L ⁰²² , L ⁰³¹ , L ⁰³² , L ⁰¹ , L ⁰² and L ⁰³ are hydrocarbon groups having 1 to 19 carbon atoms (even if the hydrocarbon group has a substituent) Often, -CH ₂ - contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO ₂ -.) The number of carbon atoms is in the range of 1 to 19. Examples include the same groups as those listed for A ¹ , A ² and A ³ .
X ⁰¹ , X ⁰² and X ⁰³ are each independently preferably -O- or -S-, more preferably -O-.
L ⁰¹¹ , L ⁰¹² , L ⁰²¹ , L ⁰²² , L ⁰³¹ , L ⁰³² , L ⁰¹ , L ⁰² and L ⁰³ are each independently a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group is -CH ₂ - included may be replaced with -O-, -CO-, -S- or -SO ₂ -), and is preferably a single bond or a hydrocarbon group having 1 to 12 carbon atoms. (-CH ₂ - contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO ₂ -) is more preferable, and a single bond or carbon number 1 to 9 chain hydrocarbon groups (-CH ₂ - contained in the chain hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO ₂ -); More preferably, it is a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-). is even more preferable, and a single bond or an alkanediyl group having 1 to 4 carbon atoms (-CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-). Even more preferably, it is a single bond or an alkanediyl group having 1 to 3 carbon atoms (-CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-). More preferred. Among them, single bond, methylene group, ethane-1,1-diyl group, propane-1,1-diyl group, propane-2,2-diyl group, carbonyl group, carbonyloxy group, carbonyloxymethylene group, ethyleneoxy group , methylenecarbonyloxymethylene group or ethyleneoxycarbonyl group, and more preferably a single bond, methylene group or carbonyl group.
The bonding positions of A ¹ , A ² and A ³ to the benzene ring to which S ⁺ is bonded may be any of the о-position, m-position, and p-position with respect to the S ⁺ bonding position, each independently. Among these, it is preferable to bond to the p-position or the m-position, each independently with respect to the bonding position of S ⁺ . More specifically, when m1, m2 and m3 are 1, A ¹ , A ² and A ³ are each independently bonded to the p-position or m-position with respect to the bonding position of S ⁺ is preferable, and it is more preferable that it is bonded to the p-position. When m1, m2 and m3 are 2, one of A ¹ , A ² and A ³ is independently bonded to the о position or m position with respect to the bonding position of S ⁺ , and one is bonded to the о position Alternatively, it is preferable that they are bonded to the m-position, and it is more preferable that two of them are bonded to the m-position. When m1, m2, and m3 are 3, two of A ¹ , A ² , and A ³ are independently bonded to the о or m position, and one is bonded to the p position with respect to the bonding position of S ⁺ . Or preferably, two are bonded to the m-position and one is bonded to the p-position. When m1, m2 and m3 are 4, two of A ¹ , A ² and A ³ are independently bonded to the о or m position, and two are bonded to the p position with respect to the bonding position of S ⁺ . Alternatively, it is preferable that they are bonded to the m-position, two of them are bonded to the о-position, and two of them are preferably bonded to the m-position.
m1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, even more preferably 1 or 2, even more preferably 1.
m2 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and 0 or 1. is even more preferred.
m3 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and 0 or 1. is even more preferred.
m4 is preferably 0, 1, 2 or 4, more preferably 0, 1 or 2.
m5 is preferably 0, 1, 2 or 4, more preferably 0, 1 or 2.
m6 is preferably 0, 1, 2 or 4, more preferably 0, 1 or 2.
m7 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, even more preferably 0 or 1.
m8 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, even more preferably 0 or 1.
m9 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, even more preferably 0 or 1.
R ⁴ , R ⁵ and R ⁶ are each independently a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH ₂ -- contained in the haloalkyl group and the alkyl group is , -O- or -CO-), preferably a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (which may be substituted with --CH ₂ -- may be substituted with --O- or --CO-. (-CH ₂ - contained in the alkyl group may be replaced with -O- or -CO-) is more preferably an alkyl group containing a fluorine atom, an iodine atom, or a carbon number of 1 to 4. It is more preferably a perfluoroalkyl group, a hydroxy group, an alkoxy group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms, and a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or a hydroxy group. or an alkoxy group having 1 to 3 carbon atoms, even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methoxy group, an ethoxy group, or a hydroxy group.
Further, in another embodiment, at least one of one or more R ⁴ , R ⁵ and R ⁶ may include a group having -SO ₂ -, and R ⁴ , R ⁵ and R ⁶ are each Independently, R ¹ , R ² and R ³ may be the same groups, and when R ¹ is -O-R ¹⁰ , one or two R ⁴ are -O-R ¹⁰ , which is the same as R ¹ When R ¹ is -O-CO-R ¹⁰ , one or two R ⁴ are preferably -O-CO-R ¹⁰ , which is the same as R ¹ , and R ¹ is -O-CO-O In the case of -R ¹⁰ , it is preferable that one or two R ⁴ is -O-CO-O-R ¹⁰ , which is the same as R ¹ , and R ¹ is -O-L ¹ -CO-O-R ¹⁰ . In this case, it is preferable that one or two R ⁴ are -OL ¹ -CO-O-R ¹⁰ , which is the same as R ¹ . The combinations of R ² and R ⁵ and the combinations of R ³ and R ⁶ are the same as the combinations of R ¹ and R ⁴ , respectively.
The bonding positions of R ⁴ , R ⁵ and R ⁶ to the benzene ring may be any of the о, m, and p positions with respect to the bonding positions of A ¹ , A ² and A ^3, respectively. In particular, when m4, m5 and m6 are 1, R ⁴ , R ⁵ and R ⁶ are each independently bonded to the p-position or m-position with respect to the bonding positions of A ¹ , A ² and A ³ . It is preferable that it be bonded to the m-position, and more preferably that it is bonded to the m-position. When m4, m5 and m6 are 2, one of R ⁴ , R ⁵ and R ⁶ is independently bonded to the о position or the m position with respect to the bonding position of A ¹ , A ² and A ³ . It is preferable that one is bonded to the p-position or the m-position, and it is more preferable that two of them are bonded to the m-position. When m4, m5 and m6 are 3, R ⁴ , R ⁵ and R ⁶ are each independently bonded to the о or m position with respect to the bonding positions of A ¹ , A ² and A ³ . Preferably, one is bonded to the p-position or the m-position, one is bonded to the о-position, and two are bonded to the m-position. When m4, m5 and m6 are 4, R ⁴ , R ⁵ and R ⁶ are each independently bonded to the о or m position with respect to the bonding positions of A ¹ , A ² and A ³ . Preferably, two are bonded to the p-position or the m-position, two are bonded to the о-position, and two are more preferably bonded to the m-position.
R ⁷ , R ⁸ and R ⁹ each independently represent a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH ₂ -- contained in the haloalkyl group and the alkyl group is , -O- or -CO-), preferably a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (which may be substituted with --CH ₂ -- may be substituted with --O- or --CO-. (-CH ₂ - contained in the alkyl group may be replaced with -O- or -CO-) is more preferably an alkyl group, and a fluorine atom, an iodine atom, a trifluoromethyl group, a hydroxy Even more preferably, it is a methoxy group, a methyl group or a t-butyl group.
The bonding positions of R ⁷ , R ⁸ and R ⁹ to the benzene ring may be any of the о-position, m-position, and p-position with respect to the bonding position of S ⁺ , each independently. Among them, when m7, m8 and m9 are 1, it is preferable that R ⁷ , R ⁸ and R ⁹ are each independently bonded to the p-position or m-position with respect to the bonding position of S ⁺ , More preferably, it is bonded to the p-position. When m7, m8 and m9 are 2, one of R ⁷ , R ⁸ and R ⁹ is independently bonded to the о or m position, and one is bonded to the p position with respect to the bonding position of S ⁺ . It is preferable that one is bonded to the m-position, and one is bonded to the p-position or the m-position. When m7, m8 and m9 are 3, two of R ⁷ , R ⁸ and R ⁹ are each independently bonded to the о ^or m position, and one is bonded to the p position. Or preferably, two are bonded to the m-position and one is bonded to the p-position. When m7, m8 and m9 are 4, two of R ⁷ , R ⁸ and R ⁹ are each independently bonded to the о ^or m position, and two are bonded to the p position. Or preferably, two are bonded to the m-position, one is bonded to the о-position, and one is bonded to the p-position.

［式（Ｉ－Ｃ－１）中、
Ｒ^１、Ｒ^２、Ｒ^３、Ｒ^４、Ｒ^５、Ｒ^６、Ｒ^７、Ｒ^８、Ｒ^９、ｍ１、ｍ２、ｍ３、ｍ４、ｍ５、ｍ６、ｍ７、ｍ８、ｍ９、Ｌ^０１、Ｌ^０２、Ｌ^０３、Ｘ^０１、Ｘ^０２及びＸ^０３の符号は、前記と同じ意味を表す。］ Examples of the cation (I) represented by the formula (IC) include the cation represented by the formula (IC-1) (hereinafter sometimes referred to as "cation (IC-1)"). .

[In formula (IC-1),
R ¹ , R ² , R ³ , R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ , R 9 , m1, m2, m3, m4, m5, ^m6 , m7, m8, m9, L ⁰¹ , L ⁰² , L ⁰³ , X ⁰¹ , X ⁰² and X ⁰³ have the same meanings as above. ]

X ⁰¹ , X ⁰² and X ⁰³ are preferably -O-.
The bonding positions of X ⁰¹ , X ⁰² and X ⁰³ to the benzene ring are independently the same as the bonding positions of A ¹ , A ² and A ³ to the benzene ring.

Examples of the cation (I) of the salt (I) include cations represented by the following formulas (I-c-1) to (I-c-121).

［式（Ｉ－Ａ）中、全ての符号は、式（Ｉ）と同じ意味を表す。］ [Anion (I)]
The anion (I) of the salt represented by formula (I) is an anion represented by formula (IA).

[In formula (IA), all symbols represent the same meanings as in formula (I). ]

The perfluoroalkyl groups represented by Q ^b1 and Q ^b2 include trifluoromethyl group, perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, perfluorobutyl group, perfluorosec-butyl group, perfluorotert-butyl group, perfluoropentyl group, and Examples include perfluorohexyl group.
Examples of the alkyl group represented by Q ^b1 and Q ^b2 include methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group and hexyl group.
At least one of Q ^b1 and Q ^b2 preferably contains a fluorine atom or a perfluoroalkyl group, each independently more preferably a fluorine atom or a perfluoroalkyl group, and a fluorine atom or a trifluoromethyl group. is more preferred, and it is even more preferred that both are fluorine atoms.

Examples of the divalent saturated hydrocarbon group in L ^b1 include a linear alkanediyl group, a branched alkanediyl group, and a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group. It may also be a group formed by combining two or more of the groups.
Specifically, methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1 ,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group , tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group. Alkanediyl group;
Ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane- Branched alkanediyl groups such as 1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group;
A monocyclic cycloalkanediyl group such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, or a cyclooctane-1,5-diyl group. alicyclic saturated hydrocarbon group;
Polycyclic divalent alicyclic saturated hydrocarbons such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group Examples include groups. The terminal of the branched alkanediyl group may be a methyl group.

Examples of groups in which -CH ₂ - contained in the divalent saturated hydrocarbon group represented by L ^b1 are replaced with -O- or -CO- include formulas (b1-1) to (b1-3) Examples include groups represented by any of the following. In addition, in the groups represented by formulas (b1-1) to (b1-3) and the groups represented by formulas (b1-4) to (b1-11), which are specific examples thereof, * and * * represents a binding site; * represents a binding site with -Y ^b1 .

［式（ｂ１－１）中、
Ｌ^ｂ２は、単結合又は炭素数１～２２の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子に置換されていてもよい。
Ｌ^ｂ３は、単結合又は炭素数１～２２の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよく、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
ただし、Ｌ^ｂ２とＬ^ｂ３との炭素数合計は、２２以下である。
式（ｂ１－２）中、
Ｌ^ｂ４は、単結合又は炭素数１～２２の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子に置換されていてもよい。
Ｌ^ｂ５は、単結合又は炭素数１～２２の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよく、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
ただし、Ｌ^ｂ４とＬ^ｂ５との炭素数合計は、２２以下である。
式（ｂ１－３）中、
Ｌ^ｂ６は、単結合又は炭素数１～２３の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
Ｌ^ｂ７は、単結合又は炭素数１～２３の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよく、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
ただし、Ｌ^ｂ６とＬ^ｂ７との炭素数合計は、２３以下である。］

[In formula (b1-1),
L ^b2 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b3 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and the saturated -CH ₂ - contained in the hydrocarbon group may be replaced with -O- or -CO-.
However, the total carbon number of L ^b2 and L ^b3 is 22 or less.
In formula (b1-2),
L ^b4 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b5 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and the saturated -CH ₂ - contained in the hydrocarbon group may be replaced with -O- or -CO-.
However, the total carbon number of L ^b4 and L ^b5 is 22 or less.
In formula (b1-3),
L ^b6 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
L ^b7 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and the saturated -CH ₂ - contained in the hydrocarbon group may be replaced with -O- or -CO-.
However, the total carbon number of L ^b6 and L ^b7 is 23 or less. ]

In the groups represented by formulas (b1-1) to (b1-3), when -CH ₂ - contained in the saturated hydrocarbon group is replaced with -O- or -CO-, the carbon before being replaced The number is the number of carbon atoms in the saturated hydrocarbon group.
Examples of the divalent saturated hydrocarbon group include those similar to the divalent saturated hydrocarbon group of L ^b1 .

L ^b2 is preferably a single bond, a methylene group, -CH(CF ₃ )-, or -C(CF ₃ ) ₂ -.
L ^b3 is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms.
L ^b4 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms, and the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom, more preferably, Methylene group, -CH(CF ₃ )-, -C(CF ₃ ) ₂ -.
L ^b5 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^b6 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b7 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group; -CH ₂ - contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-.

［式（ｂ１－４）中、
Ｌ^ｂ８は、単結合又は炭素数１～２２の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
式（ｂ１－５）中、
Ｌ^ｂ９は、炭素数１～２０の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる－ＣＨ_２－は－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
Ｌ^ｂ１０は、単結合又は炭素数１～１９の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
ただし、Ｌ^ｂ９及びＬ^ｂ１０の合計炭素数は２０以下である。
式（ｂ１－６）中、
Ｌ^ｂ１１は、炭素数１～２１の２価の飽和炭化水素基を表す。
Ｌ^ｂ１２は、単結合又は炭素数１～２０の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
ただし、Ｌ^ｂ１１及びＬ^ｂ１２の合計炭素数は２１以下である。
式（ｂ１－７）中、
Ｌ^ｂ１３は、炭素数１～１９の２価の飽和炭化水素基を表す。
Ｌ^ｂ１４は、単結合又は炭素数１～１８の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる－ＣＨ_２－は－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
Ｌ^ｂ１５は、単結合又は炭素数１～１８の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
ただし、Ｌ^ｂ１３～Ｌ^ｂ１５の合計炭素数は１９以下である。
式（ｂ１－８）中、
Ｌ^ｂ１６は、炭素数１～１８の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる－ＣＨ_２－は－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
Ｌ^ｂ１７は、炭素数１～１８の２価の飽和炭化水素基を表す。
Ｌ^ｂ１８は、単結合又は炭素数１～１７の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
ただし、Ｌ^ｂ１６～Ｌ^ｂ１８の合計炭素数は１９以下である。］ The group in which -CH ₂ - contained in the divalent saturated hydrocarbon group represented by L ^b1 is replaced with -O- or -CO- is represented by formula (b1-1) or formula (b1-3). Preferred groups are
Examples of the group represented by formula (b1-1) include groups represented by formulas (b1-4) to (b1-8), respectively.

[In formula (b1-4),
L ^b8 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
In formula (b1-5),
L ^b9 represents a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and -CH ₂ - contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-.
L ^b10 represents a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, and the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. .
However, the total carbon number of L ^b9 and L ^b10 is 20 or less.
In formula (b1-6),
L ^b11 represents a divalent saturated hydrocarbon group having 1 to 21 carbon atoms.
L ^b12 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. .
However, the total carbon number of L ^b11 and L ^b12 is 21 or less.
In formula (b1-7),
L ^b13 represents a divalent saturated hydrocarbon group having 1 to 19 carbon atoms.
L ^b14 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH ₂ - contained in the divalent saturated hydrocarbon group is replaced with -O- or -CO-. Good too.
L ^b15 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. .
However, the total carbon number of L ^b13 to L ^b15 is 19 or less.
In formula (b1-8),
L ^b16 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH ₂ - contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-.
L ^b17 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms.
L ^b18 represents a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, and the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. .
However, the total carbon number of L ^b16 to L ^b18 is 19 or less. ]

L ^b8 is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms.
L ^b9 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^b10 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^b11 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^b12 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^b13 is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms.
L ^b14 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 6 carbon atoms.
L ^b15 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^b16 is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms.
L ^b17 is preferably a divalent saturated hydrocarbon group having 1 to 6 carbon atoms.
L ^b18 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms.

［式（ｂ１－９）中、
Ｌ^b19は、単結合又は炭素数１～２３の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子に置換されていてもよい。
Ｌ^b20は、単結合又は炭素数１～２３の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子、ヒドロキシ基又はアルキルカルボニルオキシ基に置換されていてもよい。該アルキルカルボニルオキシ基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該アルキルカルボニルオキシ基に含まれる水素原子は、ヒドロキシ基に置換されていてもよい。
ただし、Ｌ^b19及びＬ^b20の合計炭素数は２３以下である。
式（ｂ１－１０）中、
Ｌ^b21は、単結合又は炭素数１～２１の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子に置換されていてもよい。
Ｌ^b22は、単結合又は炭素数１～２１の２価の飽和炭化水素基を表す。
Ｌ^b23は、単結合又は炭素数１～２１の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子、ヒドロキシ基又はアルキルカルボニルオキシ基に置換されていてもよい。該アルキルカルボニルオキシ基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該アルキルカルボニルオキシ基に含まれる水素原子は、ヒドロキシ基に置換されていてもよい。
ただし、Ｌ^b21、Ｌ^b22及びＬ^b23の合計炭素数は２１以下である。
式（ｂ１－１１）中、
Ｌ^b24は、単結合又は炭素数１～２０の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子に置換されていてもよい。
Ｌ^b25は、炭素数１～２１の２価の飽和炭化水素基を表す。
Ｌ^b26は、単結合又は炭素数１～２０の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子、ヒドロキシ基又はアルキルカルボニルオキシ基に置換されていてもよい。該アルキルカルボニルオキシ基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該アルキルカルボニルオキシ基に含まれる水素原子は、ヒドロキシ基に置換されていてもよい。
ただし、Ｌ^b24、Ｌ^b25及びＬ^b26の合計炭素数は２１以下である。］ Examples of the group represented by formula (b1-3) include groups represented by formulas (b1-9) to (b1-11), respectively.

[In formula (b1-9),
L ^b19 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b20 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group is substituted with a fluorine atom, a hydroxy group, or an alkylcarbonyloxy group. Good too. -CH ₂ - contained in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and the hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group.
However, the total carbon number of L ^b19 and L ^b20 is 23 or less.
In formula (b1-10),
L ^b21 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b22 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms.
L ^b23 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group is substituted with a fluorine atom, a hydroxy group, or an alkylcarbonyloxy group. Good too. -CH ₂ - contained in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and the hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group.
However, the total carbon number of L ^b21 , L ^b22 and L ^b23 is 21 or less.
In formula (b1-11),
L ^b24 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b25 represents a divalent saturated hydrocarbon group having 1 to 21 carbon atoms.
L ^b26 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the hydrogen atom contained in the saturated hydrocarbon group is substituted with a fluorine atom, a hydroxy group, or an alkylcarbonyloxy group. Good too. -CH ₂ - contained in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and the hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group.
However, the total carbon number of L ^b24 , L ^b25 and L ^b26 is 21 or less. ]

In addition, in the group represented by formula (b1-9) to the group represented by formula (b1-11), when the hydrogen atom contained in the saturated hydrocarbon group is substituted with an alkylcarbonyloxy group, the substituted Let the previous carbon number be the carbon number of the saturated hydrocarbon group.
Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, a butyryloxy group, a cyclohexylcarbonyloxy group, and an adamantylcarbonyloxy group.

Examples of the group represented by formula (b1-4) include the following.

Examples of the group represented by formula (b1-5) include the following.

Examples of the group represented by formula (b1-6) include the following.

Examples of the group represented by formula (b1-7) include the following.

Examples of the group represented by formula (b1-8) include the following.

Examples of the group represented by formula (b1-2) include the following.

Examples of the group represented by formula (b1-9) include the following.

Examples of the group represented by formula (b1-10) include the following.

Examples of the group represented by formula (b1-11) include the following.

Examples of the cyclic hydrocarbon group represented by Y ^b1 include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, a heterocyclic aromatic hydrocarbon group, or a combination thereof.
Examples of the alicyclic hydrocarbon group in which -CH ₂ - contained in the alicyclic hydrocarbon group represented by Y ^b1 is not replaced with -O-, -S-, -SO ₂ - or -CO- , formulas (Y1) to (Y11), and groups represented by formulas (Y36) to (Y38).
When the -CH ₂ - contained in the alicyclic hydrocarbon group represented by Y ^b1 is replaced with -O-, -S-, -SO ₂ - or -CO-, the number may be one or two. The above is fine. Examples of such groups include groups represented by formulas (Y12) to (Y35) and formulas (Y39) to (Y43). -O- or -CO- in the groups represented by formulas (Y12) to (Y35) and formulas (Y39) to (Y43) may be replaced with -S- or -SO ₂ -. The binding site can be at any position.

Ｙ^ｂ１で表される脂環式炭化水素基としては、好ましくは式（Ｙ１）～式（Ｙ２０）、式（Ｙ２６）、式（Ｙ２７）、式（Ｙ３０）、式（Ｙ３１）、式（Ｙ３９）～式（Ｙ４３）のいずれかで表される基であり、より好ましくは式（Ｙ１１）、式（Ｙ１５）、式（Ｙ１６）、式（Ｙ２０）、式（Ｙ２６）、式（Ｙ２７）、式（Ｙ３０）、式（Ｙ３１）、式（Ｙ３９）、式（Ｙ４０）、式（Ｙ４２）又は式（Ｙ４３）で表される基であり、さらに好ましくは式（Ｙ１１）、式（Ｙ１５）、式（Ｙ２０）、式（Ｙ２６）、式（Ｙ２７）、式（Ｙ３０）、式（Ｙ３１）、式（Ｙ３９）、式（Ｙ４０）、式（Ｙ４２）又は式（Ｙ４３）で表される基である。
脂環式炭化水素基の炭素数は、好ましくは３～２４であり、より好ましくは３～２０であり、さらに好ましくは３～１８であり、より一層好ましくは３～１６である。
Ｙで表される芳香族炭化水素基としては、フェニレン基、ナフチレン基、ビフェニレン基、アントリレン基、フェナントリレン基、ビナフチレン基等が挙げられる。芳香族炭化水素基の炭素数は、好ましくは６～２４であり、より好ましくは６～２０であり、さらに好ましくは６～１８であり、より一層好ましくは６～１４であり、さらに一層好ましくは６～１０である。
Ｙで表される複素環式芳香族炭化水素基としては、フラン環、チオフェン環、ベンゾフラン環又はベンゾチオフェン環等に由来する基が挙げられる。複素環式芳香族炭化水素基の炭素数は、好ましくは４～９であり、より好ましくは４～８である。
Ｙで表される芳香族炭化水素基又は複素環式芳香族炭化水素基としては、フェニレン基、ナフチレン基、フラン環又はチオフェン環に由来する基であることが好ましく、フェニレン基であることがより好ましい。

The alicyclic hydrocarbon group represented by Y ^b1 is preferably one of formulas (Y1) to (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), and formula (Y39). ) to formula (Y43), more preferably formula (Y11), formula (Y15), formula (Y16), formula (Y20), formula (Y26), formula (Y27), A group represented by formula (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42) or formula (Y43), more preferably formula (Y11), formula (Y15), A group represented by formula (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42) or formula (Y43) be.
The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 16.
Examples of the aromatic hydrocarbon group represented by Y include a phenylene group, a naphthylene group, a biphenylene group, an anthrylene group, a phenanthrylene group, and a binaphthylene group. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 14, and even more preferably It is 6-10.
Examples of the heterocyclic aromatic hydrocarbon group represented by Y include groups derived from a furan ring, a thiophene ring, a benzofuran ring, a benzothiophene ring, and the like. The heterocyclic aromatic hydrocarbon group preferably has 4 to 9 carbon atoms, more preferably 4 to 8 carbon atoms.
The aromatic hydrocarbon group or heterocyclic aromatic hydrocarbon group represented by Y is preferably a group derived from a phenylene group, naphthylene group, furan ring or thiophene ring, and more preferably a phenylene group. preferable.

Examples of the substituent of the cyclic hydrocarbon group represented by Y ^b1 include a halogen atom, a hydroxy group, a cyano group, and an alkyl group having 1 to 16 carbon atoms optionally substituted with a hydroxy group (- CH ₂ - may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, and an aromatic hydrocarbon group having 7 to 18 carbon atoms. 21 aralkyl group, glycidyloxy group, -(CH ₂ ) _ja -CO-O-R ^b1 group or -(CH ₂ ) _ja -O-CO-R ^b1 group (wherein R ^b1 has 1 to 1 carbon atoms) 16 alkyl group, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof; -CH ₂ - contained may be replaced with -O-, -SO ₂ - or -CO-, and the hydrogen atom contained in the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may be replaced with a hydroxy group or a fluorine atom; ja represents any integer from 0 to 4).

Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Examples of the alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a methylcyclohexyl group, a dimethylcyclohexyl group, a cycloheptyl group, a cyclooctyl group, a norbornyl group, and an adamantyl group. The alicyclic hydrocarbon group may have a chain hydrocarbon group, and examples thereof include a methylcyclohexyl group and a dimethylcyclohexyl group. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms, more preferably 3 to 10 carbon atoms.
Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, and phenanthryl group. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and an aromatic hydrocarbon group having a chain hydrocarbon group having 1 to 18 carbon atoms (tolyl group, xylyl group, group, cumenyl group, mesityl group, p-methylphenyl group, p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group), and carbon An aromatic hydrocarbon group having 3 to 18 alicyclic hydrocarbon groups (p-adamantylphenyl group, p-cyclohexylphenyl group, etc.) is preferred. The aromatic hydrocarbon group preferably has 6 to 14 carbon atoms, more preferably 6 to 10 carbon atoms.
Examples of the alkyl group include methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, 2-ethylhexyl group, octyl group, and nonyl group. group, decyl group, undecyl group, dodecyl group, etc. The alkyl group preferably has 1 to 12 carbon atoms, more preferably 1 to 6 carbon atoms, and even more preferably 1 to 4 carbon atoms.
Examples of the alkyl group substituted with a hydroxy group include hydroxyalkyl groups such as a hydroxymethyl group and a hydroxyethyl group.
Examples of the aralkyl group include benzyl group, phenethyl group, phenylpropyl group, naphthylmethyl group, and naphthylethyl group.
Groups in which -CH ₂ - contained in the alkyl group is replaced with -O-, -SO ₂ -, -CO-, etc. include an alkoxy group, an alkylsulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, or Examples include groups that are combinations of these.
Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group, and dodecyloxy group. The alkoxy group preferably has 1 to 12 carbon atoms, more preferably 1 to 6 carbon atoms, and still more preferably 1 to 4 carbon atoms.
Examples of the alkylsulfonyl group include a methylsulfonyl group, an ethylsulfonyl group, and a propylsulfonyl group. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 12, more preferably 1 to 6, and still more preferably 1 to 4.
Examples of the alkoxycarbonyl group include a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. The alkoxycarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and still more preferably 2 to 4 carbon atoms.
Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and still more preferably 2 to 4 carbon atoms.
Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, a butyryloxy group, and the like. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, and still more preferably 2 to 4.
Examples of combined groups include a group that combines an alkoxy group and an alkyl group, a group that combines an alkoxy group and an alkoxy group, a group that combines an alkoxy group and an alkylcarbonyl group, and a group that combines an alkoxy group and an alkylcarbonyloxy group. Examples include groups that combine these.
Examples of the group combining an alkoxy group and an alkyl group include alkoxyalkyl groups such as a methoxymethyl group, a methoxyethyl group, an ethoxyethyl group, and an ethoxymethyl group. The number of carbon atoms in the alkoxyalkyl group is preferably 2 to 12, more preferably 2 to 6, and still more preferably 2 to 4.
Examples of the group combining an alkoxy group and an alkoxy group include alkoxyalkoxy groups such as a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, and an ethoxyethoxy group. The number of carbon atoms in the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 6, and still more preferably 2 to 4.
Examples of the group combining an alkoxy group and an alkylcarbonyl group include alkoxyalkylcarbonyl groups such as a methoxyacetyl group, a methoxypropionyl group, an ethoxyacetyl group, and an ethoxypropionyl group. The number of carbon atoms in the alkoxyalkylcarbonyl group is preferably 3 to 13, more preferably 3 to 7, and still more preferably 3 to 5.
Examples of the group combining an alkoxy group and an alkylcarbonyloxy group include alkoxyalkylcarbonyloxy groups such as a methoxyacetyloxy group, a methoxypropionyloxy group, an ethoxyacetyloxy group, and an ethoxypropionyloxy group. The number of carbon atoms in the alkoxyalkylcarbonyloxy group is preferably 3 to 13, more preferably 3 to 7, and still more preferably 3 to 5.
Groups in which -CH ₂ - contained in the alicyclic hydrocarbon group is replaced with -O-, -SO ₂ -, -CO-, etc. include formulas (Y12) to (Y35), formulas (Y39) to Examples include a group represented by (Y43).

［式（ｗ１－１）～式（ｗ１－３２）中、
該基に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－、－ＣＯ－又は－ＳＯ_２－に置き換わっていてもよい。結合部位は任意の位置である。］ The cyclic hydrocarbon group in Y ^b1 (-CH ₂ - contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO ₂ -) is particularly , an alicyclic hydrocarbon group having 3 to 24 carbon atoms (-CH ₂ - contained in the alicyclic hydrocarbon group is replaced with -O-, -CO-, -S- or -SO ₂ -) ) or an aromatic hydrocarbon group having 6 to 24 carbon atoms, and an alicyclic hydrocarbon group having 3 to 20 carbon atoms (-CH ₂ - contained in the alicyclic hydrocarbon group is preferably , -O-, -CO-, -S- or -SO ₂ -) or an aromatic hydrocarbon group having 6 to 20 carbon atoms, more preferably an aromatic hydrocarbon group having 3 to 18 carbon atoms. Alicyclic hydrocarbon group (-CH ₂ - contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO ₂ -) or carbon number More preferably, it is an aromatic hydrocarbon group having 6 to 18 atoms. Specifically, a group represented by any one of formulas (w1-1) to (w1-32) is preferable, and groups represented by formulas (w1-1) to (w1-6) and formula (w1-32) are preferable. 12) ~Formula (w1-30) It is more preferable to be a group represented by any one of formula (w1-1) ~ formula (w1-3), formula (w1-15) ~ formula (w1-17) ), formula (w1-22), formula (w1-25), and any one of formulas (w1-27) to (w1-29) are more preferable. Here, the cyclic hydrocarbon group may have a substituent.

[In formulas (w1-1) to (w1-32),
-CH ₂ - contained in the group may be replaced with -O-, -S-, -CO- or -SO ₂ -. The binding site can be at any position. ]

Y ^b1 is preferably a single bond, an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, or an aromatic hydrocarbon having 6 to 24 carbon atoms which may have a substituent. group, more preferably a single bond, an alicyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent, or an aromatic carbon having 6 to 20 carbon atoms which may have a substituent A hydrogen group, more preferably a single bond, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or an aromatic group having 6 to 18 carbon atoms which may have a substituent. A hydrocarbon group, more preferably a cyclohexanediyl group which may have a substituent, an adamantanediyl group which may have a substituent, a norbornanediyl group which may have a substituent, a substituted An adamantanelactonediyl group that may have a group or a norbornanelactonediyl group that may have a substituent, and constitutes the alicyclic hydrocarbon group, cyclohexanediyl group, adamantanediyl group, or norbornanediyl group. -CH ₂ - may be replaced with -O-, -S-, -CO- or -SO ₂ -.
The substituent that Y ^b1 may have is a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms which may be substituted with a hydroxy group (-CH ₂ - contained in the alkyl group is , -O- or -CO-) or an alicyclic hydrocarbon group having 3 to 12 carbon atoms is preferable, and a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 6 carbon atoms or More preferred is an alkoxy group having 1 to 6 carbon atoms. Examples of the halogen atom, alkyl group, alkoxy group, and alicyclic hydrocarbon group include the same groups as those mentioned above. Among these, a fluorine atom, hydroxy group, methyl group or ethyl group is preferred.

［式（Ｘ１０）中、
Ａｘは、Ｒ^ｂｂ１が結合した炭素原子と結合する結合種を表し、単結合、エーテル結合、チオエーテル結合、エステル結合及び炭酸エステル結合から構成される群から選択される１種の結合種を表す。
Ａｙは、Ｌ^１０と結合する結合種を表し、単結合、エーテル結合、チオエーテル結合、エステル結合及び炭酸エステル結合から構成される群から選択される１種の結合種を表す。
Ｒｘは、ハロゲン原子、ヒドロキシ基、炭素数１～６のフッ化アルキル基、炭素数１～１８のアルキル基又は炭素数１～６のアルコキシ基を表す。
ｍｘは、０～４のいずれかの整数を表し、ｍｘが２以上の整数の場合、複数のＲｘは互いに同じでも異なっていてもよい。］
Ａｘ及びＡｙのどちらかの一方が、単結合である場合、他方は、エーテル結合、チオエーテル結合、エステル結合及び炭酸エステル結合から構成される群から選択される１種であることが好ましい。
フェニレン基におけるＡｙの結合位置は、Ａｘの結合位置に対して、ｍ位又はｐ位であることが好ましく、ｐ位であることがより好ましい。
Ｒｘは、中でも、フッ素原子、ヨウ素原子、トリフルオロメチル基、メチル基又はエチル基が好ましい。
ｍｘは、０、１又は２が好ましい。
Ｘ^１０としては、例えば、以下の式（Ｘ^１０－１）～式（Ｘ^１０－１０）で表される基が挙げられる。＊及び＊＊は結合部位を表し、＊は－Ｒ^ｂｂ１が結合する炭素原子との結合部位を表す。

式（Ｘ^１０－３）～式（Ｘ^１０－１０）で表される基の具体例としては、以下の基が挙げられる。

なかでも、Ｘ^１０は、単結合又は式（Ｘ^１０－１）、式（Ｘ^１０－３’）～式（Ｘ^１０－１０’）のいずれかで表される基であることが好ましく、単結合又は式（Ｘ^１０－１）、式（Ｘ^１０－４’）、式（Ｘ^１０－５’）、式（Ｘ^１０－６’）及び式（Ｘ^１０－１０’）のいずれかで表される基であることがより好ましく、単結合、式（Ｘ^１０－１）で表される基、式（Ｘ^１０－５’）で表される基又は式（Ｘ^１０－６’）で表される基であることがさらに好ましい。 Examples of the halogen atom for R ^bb1 include the same halogen atoms listed for R ⁴ to R ⁹ . Examples of the alkyl group that may have a halogen atom for R ^bb1 include the same alkyl groups and haloalkyl groups listed for R ⁴ to R ⁹ , as long as the upper limit on the number of carbon atoms allows.
R ^bb1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, even more preferably a hydrogen atom or a methyl group, and even more preferably Preferably it is a methyl group.
When X ¹⁰ is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10).

[In formula (X10),
Ax represents a bond type that is bonded to the carbon atom to which R ^bb1 is bonded, and represents one bond type selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, and a carbonate bond.
Ay represents a bond species that binds to L ¹⁰ , and represents one type of bond species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, and a carbonate bond.
Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms.
mx represents any integer from 0 to 4, and when mx is an integer of 2 or more, the plurality of Rx may be the same or different from each other. ]
When either Ax or Ay is a single bond, the other is preferably one selected from the group consisting of an ether bond, a thioether bond, an ester bond, and a carbonate bond.
The bonding position of Ay in the phenylene group is preferably m-position or p-position with respect to the bonding position of Ax, and more preferably p-position.
Among these, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group.
mx is preferably 0, 1 or 2.
Examples of X ¹⁰ include groups represented by the following formulas (X ¹⁰ -1) to (X ¹⁰ -10). * and ** represent a bonding site, and * represents a bonding site with a carbon atom to which -R ^bb1 is bonded.

Specific examples of the groups represented by formulas (X ¹⁰ -3) to (X ¹⁰ -10) include the following groups.

Among these, X ¹⁰ is preferably a single bond or a group represented by any one of formula (X ¹⁰ -1), formula (X ¹⁰ -3') to formula (X ¹⁰ -10'), and A bond or expressed by any of the formulas (X ¹⁰ -1), (X ¹⁰ -4'), (X ¹⁰ -5'), (X ¹⁰ -6') and (X ¹⁰ -10') A group represented by a single bond, a group represented by formula (X ¹⁰ -1), a group represented by formula (X ¹⁰ -5'), or a group represented by formula (X ¹⁰ -6') is more preferable. More preferably, it is a group in which

The hydrocarbon group having 1 to 36 carbon atoms in ^L10 is a divalent aliphatic hydrocarbon group (a divalent chain hydrocarbon group such as an alkanediyl group, an alkenediyl group, an alkynediyl group, and a divalent alicyclic group). (hydrocarbon group), divalent aromatic hydrocarbon group, etc., and a divalent hydrocarbon group that is a combination of two or more of these groups may be used.

具体的に、単環式の２価の脂環式炭化水素基としては、シクロブタン－１，３－ジイル基、シクロペンタン－１，３－ジイル基、シクロヘキサン－１，４－ジイル基、シクロヘキセン－３，６－ジイル基、シクロオクタン－１，５－ジイル基等の単環式シクロアルカンジイル基が挙げられ、多環式の２価の脂環式炭化水素基としては、ノルボルナン－１，４－ジイル基、ノルボルナン－２，５－ジイル基、５－ノルボルネン－２，３－ジイル基、アダマンタン－１，５－ジイル基、アダマンタン－２，６－ジイル基、スピロシクロヘキサン－１，２’－シクロペンタン基、スピロアダマンタン－２，３’－シクロペンタン基等のシクロアルキル基、ノルボニル基もしくはアダマンチル基とそれぞれにスピロで結合したシクロアルキル基を有するスピロ環等の多環式シクロアルカンジイル基が挙げられる。
脂環式炭化水素基の炭素数は、好ましくは３～１８であり、より好ましくは３～１６であり、さらに好ましくは３～１２である。
２価の芳香族炭化水素基としては、フェニレン基、ナフチレン基、アントリレン基、ビフェニレン基、フェナントリレン基等が挙げられる。芳香族炭化水素基の炭素数は、好ましくは６～１８であり、より好ましくは６～１４であり、さらに好ましくは６～１０である。
２種以上を組み合わせた炭化水素基としては、アルカンジイル基と脂環式炭化水素基及び／又は芳香族炭化水素基とを組み合わせた基等が挙げられ、－脂環式炭化水素基－アルカンジイル基－、－アルカンジイル基－脂環式炭化水素基－、－アルカンジイル基－脂環式炭化水素基－アルカンジイル基－、－アルカンジイル基－芳香族炭化水素基－、－芳香族炭化水素基－アルカンジイル基－等が挙げられる。 Examples of alkanediyl groups include methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, and heptane-1,6-diyl group. 1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group Linear alkanediyl groups such as groups;
Ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane- Branched alkanediyl groups such as 1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group are mentioned.
Examples of the alkenediyl group include ethenediyl group, propenediyl group, isopropendiyl group, butenediyl group, isobutenediyl group, tert-butenediyl group, pentenediyl group, hexenediyl group, heptenediyl group, octenediyl group, isooctenediyl group, and nonenediyl group. .
Examples of the alkynediyl group include ethynediyl group, propynediyl group, isopropylenediyl group, butynediyl group, isobutynediyl group, tert-butynediyl group, pentyndiyl group, hexynediyl group, octyndiyl group, nonynediyl group, and the like.
The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 12, more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.
The divalent alicyclic hydrocarbon group may be monocyclic, polycyclic, or spirocyclic. Examples of the divalent alicyclic hydrocarbon group include the groups shown below. The binding site can be at any position.

Specifically, monocyclic divalent alicyclic hydrocarbon groups include cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclohexene-1,3-diyl group. Monocyclic cycloalkanediyl groups such as 3,6-diyl group and cyclooctane-1,5-diyl group are mentioned, and polycyclic divalent alicyclic hydrocarbon groups include norbornane-1,4 -diyl group, norbornane-2,5-diyl group, 5-norbornene-2,3-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, spirocyclohexane-1,2'- A polycyclic cycloalkanediyl group such as a spiro ring having a cycloalkyl group such as a cyclopentane group or a spiroadamantane-2,3'-cyclopentane group, a norbornyl group or an adamantyl group, and a cycloalkyl group bonded to each via a spiro. Can be mentioned.
The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms.
Examples of the divalent aromatic hydrocarbon group include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and still more preferably 6 to 10 carbon atoms.
Examples of hydrocarbon groups that are a combination of two or more types include groups that combine an alkanediyl group and an alicyclic hydrocarbon group and/or an aromatic hydrocarbon group, such as -alicyclic hydrocarbon group-alkanediyl group. Group-, -Alkanediyl group-Alicyclic hydrocarbon group-, -Alkanediyl group-Alicyclic hydrocarbon group-Alkanediyl group-, -Alkanediyl group-Aromatic hydrocarbon group-, -Aromatic hydrocarbon Examples include groups such as alkanediyl groups.

-CH ₂ - contained in the hydrocarbon group having 1 to 36 carbon atoms in L ¹⁰ may be replaced with -O-, -S-, -CO- or -SO ₂ -.
When the hydrocarbon group having 1 to 36 carbon atoms in L ¹⁰ has a substituent, or -CH ₂ - contained in the hydrocarbon group is replaced with -O-, -S-, -CO- or -SO ₂ -. If so, the number of carbon atoms before substitution is defined as the number of carbon atoms in the hydrocarbon group.
Groups in which -CH ₂ - contained in a hydrocarbon group is replaced with -O-, -S-, -SO ₂ - or -CO- include a hydroxy group (-CH ₂ - contained in a methyl group, -O-), carboxy group (-CH ₂ -CH ₂ - contained in the ethyl group replaced with -O-CO-), thiol group (-CH ₂ contained in the methyl group) - is replaced with -S-), alkoxy group (a group in which -CH ₂ - at any position contained in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group contained in an alkyl group) -CH ₂ -CH ₂ - at any position is replaced with -O-CO-), alkylcarbonyl group (-CH ₂ - at any position contained in the alkyl group is replaced with -CO-) group), alkylcarbonyloxy group (a group in which -CH ₂ -CH ₂ - contained in an alkyl group is replaced with -CO-O-), oxy group (-CH ₂ contained in a methylene group) - is replaced with -O-), carbonyl group (-CH ₂ - contained in the methylene group is replaced with -CO-), thio group (-CH ₂ - contained in the methylene group is replaced with -CO-), , -S-), sulfonyl group (-CH ₂ - contained in the methylene group is replaced with -SO ₂ -), alkanediyloxy group (any position contained in the alkanediyl group) -CH ₂ - is replaced with -O-), alkanediyloxycarbonyl group (-CH ₂ -CH ₂ - at any position contained in the alkanediyl group is replaced with -O-CO-) group), alkanediylcarbonyl group (a group in which -CH ₂ - at any position contained in the alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy group (a group in which -CH 2 - contained at any position contained in the alkanediyl group is replaced with -CO-), -CH ₂ -CH ₂ - is replaced with -CO-O-), alkylthio group (a group in which -CH ₂ - at any position in the alkyl group is replaced with -S-), alkyl A sulfonyl group (a group in which -CH ₂ - at any position contained in an alkyl group is replaced with -SO ₂ -), an alkanediylthio group (a group in which -CH 2 - at any position contained in an alkanediyl group is replaced with -SO ₂ -), , -S-), alkanediylsulfonyl group (group in which -CH ₂ - at any position contained in the alkanediyl group is replaced with -SO ₂ -), cycloalkoxy group, cycloalkylalkoxy group , an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group combining two or more of these groups. .
Examples of the alkoxy group include alkoxy groups having 1 to 35 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, and nonyloxy group. group, decyloxy group, undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.
The alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.
Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 35 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group, and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 36 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 35 carbon atoms, such as an acetyloxy group, a propionyloxy group, a butyryloxy group, and the like. The number of carbon atoms in the alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. It is.
Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 35 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanediyloxy group, butanediyloxy group, pentanediyloxy group, and the like. The alkanediyloxy group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 35 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. . Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 36 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, and the like. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 35 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. . The number of carbon atoms in the alkanediyloxycarbonyl group, alkanediylcarbonyl group, and alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably is 2-3.
Examples of the alkylthio group include alkylthio groups having 1 to 35 carbon atoms, such as methylthio group, ethylthio group, propylthio group, and the like. The alkylthio group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 35 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, and the like. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.
Examples of the alkanediylthio group include an alkanediylthio group having 1 to 35 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, and the like. The alkanediylthio group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkanediylsulfonyl group include an alkanediylsulfonyl group having 1 to 35 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, and the like. The alkanediylsulfonyl group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 35 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include a cycloalkylalkoxy group having 4 to 35 carbon atoms, such as a cyclohexylmethoxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 34 carbon atoms, such as a butoxycarbonyloxy group. The number of carbon atoms in the cycloalkoxy group and cycloalkylalkoxy group is preferably 3 to 11, more preferably 3 to 6. The number of carbon atoms in the alkoxycarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. The aromatic hydrocarbon group-carbonyloxy group includes an aromatic hydrocarbon group-carbonyloxy group having 7 to 35 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 36 carbon atoms, such as a benzoyl group. The aromatic hydrocarbon group-oxy group includes an aromatic hydrocarbon group-oxy group having 6 to 35 carbon atoms, such as a phenyloxy group.
In addition, examples of groups in which -CH ₂ - contained in the alicyclic hydrocarbon group are replaced with -O-, -S-, -CO- or -SO ₂ - include the groups shown below. . -O- or -CO- in the groups shown below may be replaced with -S- or -SO ₂ -. The binding site can be at any position.

Examples of the substituent that the hydrocarbon group of L ¹⁰ may have include a halogen atom, a cyano group, and the like.
Due to the group in which -CH ₂ - contained in the hydrocarbon group of L ¹⁰ is replaced with -O- or -CO-, L ¹⁰ is substantially a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group. It can have a substituent such as a group or an alkylcarbonyloxy group.
Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
The hydrocarbon group having 1 to 36 carbon atoms in L ¹⁰ may have one or more substituents.

L ¹⁰ is a single bond, an alkanediyl group having 1 to 6 carbon atoms (however, -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-), a carbon number 3 to 18 cyclic hydrocarbon groups (However, the cyclic hydrocarbon group may have a substituent, and the -CH ₂ - contained in the cyclic hydrocarbon group is -O-, -S-, - ) or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (however _, the cyclic hydrocarbon group may have a substituent, -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-, -CH ₂ - contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO ₂ - or -CO-), and is preferably a single bond, an alkanediyl group having 1 to 4 carbon atoms (however, the alkanediyl -CH ₂ - contained in the group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (however, -CH 2 - contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-), -CH ₂ - may be replaced with -O-, -S-, -SO ₂ - or -CO-), an aromatic hydrocarbon having 6 to 18 carbon atoms which may have a substituent. group, a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (however, -CH ₂ - contained in the alkanediyl group is -O- or -CO- may be substituted, and -CH ₂ - contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO ₂ - or -CO-.) or a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent (provided that -CH ₂ - contained in the alkanediyl group) is more preferably a single bond, an alkanediyl group having 1 to 4 carbon atoms (however, -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-). may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (however, -CH ₂ - contained in the alicyclic hydrocarbon group may be replaced with - ), a phenylene group which may have a substituent, an alkanediyl group having 1 to 4 carbon atoms, and an alicyclic hydrocarbon group having 3 to 18 carbon atoms. A group formed by combining (However, -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-, -CH ₂ - contained in the alicyclic hydrocarbon group, It may be replaced with -O- or -CO-. ) or a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and a phenylene group which may have a substituent (however, -CH ₂ - contained in the alkanediyl group is -O- or -CO - may be substituted with ), and is more preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms (however, -CH ₂ - contained in the alkanediyl group may be replaced by -O- or -CO - may be replaced.) is even more preferred.

Examples of the anion (I) include the following anions.

In the anions represented by formulas (I-a-1) to (I-a-14), anions in which the methyl group corresponding to R ^bb1 of formula (I) is replaced with a hydrogen atom also include the anions of the anion (I). This can be mentioned as a specific example. Among these, anions represented by formulas (I-a-1) to (I-a-6) are preferred.

Specific examples of the salt (I) include salts obtained by arbitrarily combining the above-mentioned cations and anions. Specific examples of salt (I) are shown in the table below.
In the table below, each code represents the code attached to the structure representing the above-mentioned anion or cation, and "~" indicates that the salt (I) and the anion (I) correspond to each other. For example, salt (I-1) is a salt consisting of an anion represented by formula (I-a-1) and a cation represented by formula (I-c-1), and is a salt shown below. Further, the salt (I-2) is a salt consisting of an anion represented by the formula (I-a-2) and a cation represented by the formula (I-c-1), and the salt (I-15) is a salt consisting of the anion represented by the formula (I-a-2) and the cation represented by the formula (I-c-1). A salt consisting of an anion represented by I-a-1) and a cation represented by formula (I-c-2) is shown.

Among them, salt (I) includes salt (I-1) to salt (I-6), salt (I-15) to salt (I-20), salt (I-29) to salt (I-34), Salt (I-42) ~ Salt (I-48), Salt (I-57) ~ Salt (I-62), Salt (I-70) ~ Salt (I-76), Salt (I-85) ~ Salt (I-90), salt (I-98) to salt (I-104), salt (I-113) to salt (I-118), salt (I-126) to salt (I-132), salt ( I-141) ~ Salt (I-146), Salt (I-154) ~ Salt (I-160), Salt (I-169) ~ Salt (I-174), Salt (I-182) ~ Salt (I -188), salt (I-197) to salt (I-202), salt (I-210) to salt (I-216), salt (I-225) to salt (I-230), salt (I- 238) ~ Salt (I-244), Salt (I-253) ~ Salt (I-258), Salt (I-266) ~ Salt (I-272), Salt (I-281) ~ Salt (I-286) ), salt (I-294) to salt (I-300), salt (I-309) to salt (I-314), salt (I-322) to salt (I-328), salt (I-337) ~ Salt (I-342), Salt (I-350) ~ Salt (I-356), Salt (I-365) ~ Salt (I-370), Salt (I-378) ~ Salt (I-384), Salt (I-393) ~ Salt (I-398), Salt (I-406) ~ Salt (I-412), Salt (I-421) ~ Salt (I-426), Salt (I-434) ~ Salt (I-440), salt (I-449) ~ salt (I-454), salt (I-462) ~ salt (I-468), salt (I-477) ~ salt (I-482), salt ( I-490) ~ Salt (I-496), Salt (I-505) ~ Salt (I-510), Salt (I-518) ~ Salt (I-524), Salt (I-533) ~ Salt (I -538), Salt (I-546) ~ Salt (I-552), Salt (I-561) ~ Salt (I-566), Salt (I-574) ~ Salt (I-580), Salt (I- 589) ~ Salt (I-594), Salt (I-602) ~ Salt (I-608), Salt (I-617) ~ Salt (I-622), Salt (I-630) ~ Salt (I-636) ), Salt (I-645) ~ Salt (I-650), Salt (I-658) ~ Salt (I-664), Salt (I-673) ~ Salt (I-678), Salt (I-686) ~ Salt (I-692), Salt (I-701) ~ Salt (I-706), Salt (I-714) ~ Salt (I-720), Salt (I-729) ~ Salt (I-734), Salt (I-742) ~ Salt (I-748), Salt (I-757) ~ Salt (I-762), Salt (I-770) ~ Salt (I-776), Salt (I-785) ~ Salt (I-790), Salt (I-798) ~ Salt (I-804), Salt (I-813) ~ Salt (I-818), Salt (I-826) ~ Salt (I-832), Salt ( I-841) ~ Salt (I-846), Salt (I-854) ~ Salt (I-860), Salt (I-869) ~ Salt (I-874), Salt (I-882) ~ Salt (I -888), Salt (I-897) ~ Salt (I-902), Salt (I-910) ~ Salt (I-916), Salt (I-925) ~ Salt (I-930), Salt (I- 938) ~ Salt (I-944), Salt (I-953) ~ Salt (I-958), Salt (I-966) ~ Salt (I-972), Salt (I-981) ~ Salt (I-986) ), salt (I-994) to salt (I-1000), salt (I-1009) to salt (I-1014), salt (I-1022) to salt (I-1028), salt (I-1037) ~ Salt (I-1042), Salt (I-1050) ~ Salt (I-1056), Salt (I-1065) ~ Salt (I-1070), Salt (I-1078) ~ Salt (I-1084), Salt (I-1093) ~ Salt (I-1098), Salt (I-1106) ~ Salt (I-1112), Salt (I-1121) ~ Salt (I-1126), Salt (I-1134) ~ Salt (I-1140), Salt (I-1149) ~ Salt (I-1154), Salt (I-1162) ~ Salt (I-1168), Salt (I-1177) ~ Salt (I-1182), Salt ( I-1190) ~ Salt (I-1196), Salt (I-1205) ~ Salt (I-1210), Salt (I-1219) ~ Salt (I-1224), Salt (I-1233) ~ Salt (I -1238), salt (I-1247) to salt (I-1252), salt (I-1261) to salt (I-1266), salt (I-1275) to salt (I-1280), salt (I- 1289) ~ Salt (I-1294), Salt (I-1303) ~ Salt (I-1308), Salt (I-1317) ~ Salt (I-1322), Salt (I-1331) ~ Salt (I-1336) ), salt (I-1345) to salt (I-1350), salt (I-1359) to salt (I-1364), salt (I-1373) to salt (I-1378), salt (I-1387) ~ Salt (I-1392), Salt (I-1401) ~ Salt (I-1406), Salt (I-1415) ~ Salt (I-1420), Salt (I-1429) ~ Salt (I-1434), Salt (I-1443) ~ Salt (I-1448), Salt (I-1457) ~ Salt (I-1462), Salt (I-1471) ~ Salt (I-1476), Salt (I-1485) ~ Salt (I-1490), Salt (I-1499) ~ Salt (I-1504), Salt (I-1513) ~ Salt (I-1518), Salt (I-1527) ~ Salt (I-1532), Salt ( I-1541) ~ Salt (I-1546), Salt (I-1555) ~ Salt (I-1560), Salt (I-1569) ~ Salt (I-1574), Salt (I-1583) ~ Salt (I -1588), Salt (I-1597) ~ Salt (I-1602), Salt (I-1611) ~ Salt (I-1616), Salt (I-1625) ~ Salt (I-1630), Salt (I- 1639) ~ Salt (I-1644), Salt (I-1653) ~ Salt (I-1658), Salt (I-1667) ~ Salt (I-1672), Salt (I-1681) ~ Salt (I-1686) ) is preferable.

［式中、Ｒ^１、Ｒ^２、Ｒ^３、Ｒ^４、Ｒ^５、Ｒ^６、Ｒ^７、Ｒ^８、Ｒ^９、ｍ１、ｍ２、ｍ３、ｍ４、ｍ５、ｍ６、ｍ７、ｍ８、ｍ９、Ａ^１、Ａ^２、Ａ^３、Ｑ^ｂ１、Ｑ^ｂ２、Ｌ^ｂ１、Ｙ^ｂ１、Ｌ^１０、Ｘ^１０、Ｒ^ｂｂ１の符号は、それぞれ前記と同じ意味を表す。
Ｌ^ｂ２は、Ｌ^ｂ１末端から－（ＣＯ）_{（１－ｎｎ）}－Ｏ－を除いた基を表す。ｎｎは０又は１を表す。］
触媒としては、カルボニルジイミダゾール、塩基触媒（ジメチルアミノピリジン）などが挙げられる。
溶剤としては、クロロホルム、モノクロロベンゼン、アセトニトリルなどが挙げられる。
反応温度は、通常１５℃～８０℃であり、反応時間は、通常０．５～２４時間である。 <Method for producing salt (I)>
Salt (I) can be produced by reacting a salt represented by formula (I-a) with a compound represented by formula (I-b) in a solvent in the presence of a catalyst.

[Wherein, R ¹ , R ² , R ³ , R ⁴ , R ⁵ , R ⁶ , ^{R 7} , ^{R 8} , R 9 , m1, m2, m3, ^m4 , m5, m6, m7, m8, m9, A ¹ , A ² , A ³ , Q ^b1 , Q ^b2 , L ^b1 , Y ^b1 , L ¹⁰ , X ¹⁰ , and R ^bb1 each represent the same meaning as above.
L ^b2 represents a group obtained by removing -(CO) _(1-nn) -O- from the L ^b1 terminal. nn represents 0 or 1. ]
Examples of the catalyst include carbonyldiimidazole and a base catalyst (dimethylaminopyridine).
Examples of the solvent include chloroform, monochlorobenzene, acetonitrile, and the like.
The reaction temperature is usually 15°C to 80°C, and the reaction time is usually 0.5 to 24 hours.

Examples of the salt represented by formula (Ia) include salts represented by the following formula. These salts can be easily produced by known production methods.

Examples of the compound represented by formula (Ib) include compounds represented by the following formula. These compounds can be easily obtained from the market or can be easily manufactured by known manufacturing methods.

［式（ＩＰ）中、Ｒ^１、Ｒ^２、Ｒ^３、Ｒ^４、Ｒ^５、Ｒ^６、Ｒ^７、Ｒ^８、Ｒ^９、Ｒ^ｂｂ１、ｍ１、ｍ２、ｍ３、ｍ４、ｍ５、ｍ６、ｍ７、ｍ８、ｍ９、Ａ^１、Ａ^２、Ａ^３、Ｑ^ｂ１、Ｑ^ｂ２、Ｌ^ｂ１、Ｙ^ｂ１、Ｘ^１０、Ｌ^１０の符号は、それぞれ前記と同じ意味を表す。］
構造単位（ＩＰ）は、塩（Ｉ）に含まれるＣＨ_２＝Ｃ－Ｒ^ｂｂ１の２重結合が開裂した状態を示す。
このような構造単位（ＩＰ）は、塩（Ｉ）と同様に酸発生剤としても機能するとともに、化合物又は樹脂を構成する構造単位としても機能する。 [Structural unit derived from the salt represented by formula (I)]
The structural unit derived from the salt represented by formula (I) is a structural unit represented by formula (IP) (hereinafter sometimes referred to as "structural unit (IP)").

[In formula (IP), R ¹ , R ² , R 3 , R ⁴ , R ⁵ , R ⁶ , R 7 , R ⁸ , R ⁹ , R ^bb1 , ^m1 , m2, m3, ^m4 , m5, m6, m7 , m8, m9, A ¹ , A ² , A ³ , Q ^b1 , Q ^b2 , L ^b1 , Y ^b1 , X ¹⁰ , and L ¹⁰ each represent the same meaning as above. ]
The structural unit (IP) shows a state in which the double bond of CH ₂ ═C—R ^bb1 contained in salt (I) is cleaved.
Such a structural unit (IP) functions not only as an acid generator similarly to the salt (I), but also as a structural unit constituting a compound or resin.

[Resin containing a structural unit (IP) derived from a salt represented by formula (I)]
The resin of the present invention is a resin (hereinafter sometimes referred to as "resin (Ap)") containing a structural unit (IP) derived from a salt represented by formula (I).
The resin (Ap) may be a homopolymer containing one type of structural unit (IP) or a copolymer containing two or more types of structural units (IP).
Further, the resin (Ap) may contain a structural unit other than the structural unit (IP). As described later, structural units other than the structural unit (IP) include a structural unit having an acid-labile group (hereinafter sometimes referred to as "structural unit (a1)") and a structural unit other than the structural unit (a1). Can be mentioned. Structural units other than structural unit (a1) include structural units that do not have an acid-labile group (hereinafter sometimes referred to as "structural unit (s)"), other structural units (hereinafter referred to as "structural unit (t)") ) and structural units known in the art. Here, "acid-labile group" is a structural unit that has a leaving group, the leaving group is removed by contact with an acid, and the structural unit has a hydrophilic group (for example, a hydroxy group or a carboxy group). means a group that converts into
The content of the structural unit (IP) is 0.1 mol% or more, preferably 0.5 mol% or more, and more preferably 0.8 mol%, based on the total structural units of the resin (Ap). % or more, more preferably 1 mol% or more. Furthermore, the content may be 100 mol% or less, preferably 50 mol% or less, more preferably 30 mol% or less, and still more preferably 10 mol% or less. Specifically, it is 0.1 to 100 mol%, preferably 0.5 to 50 mol%, more preferably 0.8 to 30 mol%, and still more preferably 1 to 10 mol%. be.

In particular, as described below, when used in a resist composition, the resin (Ap) may contain a structural unit (a1) in addition to the structural unit (IP), and the structural unit (a1) It is preferable that it further contains a structural unit other than .
In addition, as described later, when used in a resist composition, the resin (Ap) is a resin containing the structural unit (a1) (hereinafter referred to as It may also be referred to as "resin (A)") and/or a resin other than resin (A). Hereinafter, resin (Ap) and/or resin (A) may be referred to as "resin (A), etc.".
It is preferable that the resin (Ap) and the resin (A) each further contain a structural unit other than the structural unit (a1).

［式（１）中、Ｒ^ａ１、Ｒ^ａ２及びＲ^ａ３は、それぞれ独立に、炭素数１～８のアルキル基、炭素数２～８のアルケニル基、炭素数３～２０の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組み合わせた基を表すか、Ｒ^a1及びＲ^a2は互いに結合してそれらが結合する炭素原子とともに炭素数３～２０の非芳香族炭化水素環を形成する。
ｍａ及びｎａは、それぞれ独立して、０又は１を表し、ｍａ及びｎａの少なくとも一方は１を表す。
＊は結合部位を表す。］

［式（２）中、Ｒ^ａ１’及びＲ^ａ２’は、それぞれ独立に、水素原子又は炭素数１～１２の炭化水素基を表し、Ｒ^ａ３’は、炭素数１～２０の炭化水素基を表すか、Ｒ^ａ２’及びＲ^ａ３’は互いに結合してそれらが結合する炭素原子及びＸとともに炭素数３～２０の複素環を形成し、該炭化水素基及び該複素環に含まれる－ＣＨ_２－は、－Ｏ－又は－Ｓ－で置き換わってもよい。
Ｘは、酸素原子又は硫黄原子を表す。
ｎａ’は、０又は１を表す。
＊は結合部位を表す。］ <Structural unit (a1)>
The structural unit (a1) is derived from a monomer having an acid-labile group (hereinafter sometimes referred to as "monomer (a1)").
The acid labile group contained in the resin (A) etc. is a group represented by formula (1) (hereinafter also referred to as group (1)) and/or a group represented by formula (2) (hereinafter referred to as group ( (also referred to as 2)) is preferred.

[In formula (1), R ^a1 , R ^a2 and R ^a3 each independently represent an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, or an alicyclic hydrocarbon having 3 to 20 carbon atoms. group, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R ^a1 and R ^a2 are bonded to each other and together with the carbon atoms to which they are bonded, represent a non-aromatic carbonized group having 3 to 20 carbon atoms. Forms a hydrogen ring.
ma and na each independently represent 0 or 1, and at least one of ma and na represents 1.
* represents a binding site. ]

[In formula (2), R ^a1' and R ^a2' each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R ^a3' represents a hydrocarbon group having 1 to 20 carbon atoms. Alternatively, R ^a2' and R ^a3' combine with each other to form a heterocycle having 3 to 20 carbon atoms together with the carbon atom to which they are bonded and X, and -CH ₂ contained in the hydrocarbon group and the heterocycle - may be replaced with -O- or -S-.
X represents an oxygen atom or a sulfur atom.
na' represents 0 or 1.
* represents a binding site. ]

Ｒ^ａ１、Ｒ^ａ２及びＲ^ａ３における芳香族炭化水素基としては、フェニル基、ナフチル基、アントリル基、ビフェニル基、フェナントリル基等のアリール基が挙げられる。
組み合わせた基としては、上述したアルキル基と脂環式炭化水素基とを組み合わせた基（例えば、メチルシクロヘキシル基、ジメチルシクロへキシル基、メチルノルボルニル基、シクロヘキシルメチル基、アダマンチルメチル基、アダマンチルジメチル基、ノルボルニルエチル基等のアルキルシクロアルキル基又はシクロアルキルアルキル基）、ベンジル基等のアラルキル基、アルキル基を有する芳香族炭化水素基（ｐ－メチルフェニル基、ｐ－ｔｅｒｔ－ブチルフェニル基、トリル基、キシリル基、クメニル基、メシチル基、２，６－ジエチルフェニル基、２－メチル－６－エチルフェニル基等）、脂環式炭化水素基を有する芳香族炭化水素基（ｐ－シクロヘキシルフェニル基、ｐ－アダマンチルフェニル基等）、フェニルシクロヘキシル基等のアリール－シクロアルキル基等が挙げられる。
好ましくは、ｍａは０であり、ｎａは１である。
Ｒ^a1及びＲ^a2が互いに結合して非芳香族炭化水素環を形成する場合の－Ｃ（Ｒ^a1）（Ｒ^a2）（Ｒ^a3）としては、下記の環が挙げられる。非芳香族炭化水素環は、好ましくは炭素数３～１２である。＊は－Ｏ－との結合部位を表す。

Examples of the alkyl group for R ^a1 , R ^a2 and R ^a3 include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, and the like.
Examples of the alkenyl group in R ^a1 , R ^a2 and R ^a3 include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, Examples include nonenyl group.
The alicyclic hydrocarbon group in R ^a1 , R ^a2 and R ^a3 may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups (* represents a bonding site). The number of carbon atoms in the alicyclic hydrocarbon groups R ^a1 , R ^a2 and R ^a3 is preferably 3 to 16.

Examples of the aromatic hydrocarbon group for R ^a1 , R ^a2 and R ^a3 include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, and phenanthryl group.
Examples of combined groups include groups that combine the above-mentioned alkyl groups and alicyclic hydrocarbon groups (for example, methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyl group). dimethyl group, norbornylethyl group, etc.), aralkyl group such as benzyl group, aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group) group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon group having alicyclic hydrocarbon group (p- Examples include aryl-cycloalkyl groups such as cyclohexylphenyl group, p-adamantylphenyl group, phenylcyclohexyl group, etc.
Preferably ma is 0 and na is 1.
Examples of --C(R ^a1 )(R ^a2 )(R ^a3 ) when R ^a1 and R ^a2 combine with each other to form a non-aromatic hydrocarbon ring include the following rings. The non-aromatic hydrocarbon ring preferably has 3 to 12 carbon atoms. * represents a bonding site with -O-.

Ｒ^ａ１’及びＲ^ａ２’のうち、少なくとも１つは水素原子であることが好ましい。
ｎａ’は、好ましくは０である。 Examples of the hydrocarbon group for R ^a1' , R ^a2' and R ^a3' include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these.
Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and the group formed by combining these groups include the same groups as those listed for R ^a1 , R ^a2 and R ^a3 .
When R ^a2' and R ^a3' combine with each other to form a heterocycle with the carbon atom to which they are bonded and X, -C(R ^a1' ) (R ^a2' ) -X-R ^a3' is as follows. An example is the ring. * represents a binding site.

It is preferable that at least one of R ^a1' and R ^a2' is a hydrogen atom.
na' is preferably 0.

Examples of the group (1) include the following groups.
A group in which R ^a1 , R ^a2 and R ^a3 are alkyl groups, ma=0, and na=1 in formula (1). The group is preferably a tert-butoxycarbonyl group.
In formula (1), R ^a1 and R ^a2 form an adamantyl group together with the carbon atom to which they are bonded, R ^a3 is an alkyl group, ma = 0, and na = 1. .
In formula (1), R ^a1 and R ^a2 are each independently an alkyl group, R ^a3 is an adamantyl group, ma=0, and na=1.
Specific examples of the group (1) include the following groups. * represents a binding site.

Specific examples of group (2) include the following groups. * represents a binding site.

The monomer (a1) is preferably a monomer having an acid-labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid-labile group.

Among the (meth)acrylic monomers having an acid-labile group, those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms are preferred. If a resin (A) having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group is used in the resist composition, the resolution of the resist pattern can be improved.

［式（ａ１－０）、式（ａ１－１）及び式（ａ１－２）中、
Ｌ^a01、Ｌ^ａ１及びＬ^ａ２は、それぞれ独立に、－Ｏ－又は＊－Ｏ－（ＣＨ_２）_ｋ１－ＣＯ－Ｏ－を表し、ｋ１は１～７のいずれかの整数を表し、＊は－ＣＯ－との結合部位を表す。
Ｒ^a01、Ｒ^ａ４及びＲ^ａ５は、それぞれ独立に、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｒ^a02、Ｒ^a03及びＲ^a04は、それぞれ独立に、炭素数１～８のアルキル基、炭素数３～１８の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組み合わせた基を表す。
Ｒ^ａ６及びＲ^ａ７は、それぞれ独立に、炭素数１～８のアルキル基、炭素数２～８のアルケニル基、炭素数３～１８の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組合せることにより形成される基を表す。
ｍ１’は０～１４のいずれかの整数を表す。
ｎ１は０～１０のいずれかの整数を表す。
ｎ１’は０～３のいずれかの整数を表す。］ As a structural unit derived from a (meth)acrylic monomer having group (1), a structural unit represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)), a formula ( a1-1) (hereinafter sometimes referred to as structural unit (a1-1)) or the structural unit represented by formula (a1-2) (hereinafter referred to as structural unit (a1-2)) ) may be mentioned. Preferably, it is at least one type of structural unit selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2), and more preferably structural unit (a1- 1) and structural units (a1-2). These may be used alone or in combination of two or more.

[In formula (a1-0), formula (a1-1) and formula (a1-2),
L ^a01 , L ^a1 and L ^a2 each independently represent -O- or *-O-(CH ₂ ) _k1 -CO-O-, k1 represents any integer from 1 to 7, and * Represents a binding site with -CO-.
R ^a01 , R ^a4 and R ^a5 each independently represent a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.
R ^a02 , R ^a03 and R ^a04 each independently represent an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or any of these. Represents a combined group.
R ^a6 and R ^a7 each independently represent an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic group having 6 to 18 carbon atoms. Represents a hydrocarbon group or a group formed by combining these.
m1' represents any integer from 0 to 14.
n1 represents any integer from 0 to 10.
n1' represents any integer from 0 to 3. ]

R ^a01 , R ^a4 and R ^a5 are preferably a hydrogen atom or a methyl group, more preferably a methyl group.
L ^a01 , L ^a1 and L ^a2 are preferably an oxygen atom or *-O-(CH ₂ ) _k01 -CO-O- (however, k01 is preferably an integer of 1 to 4, more preferably is 1), more preferably an oxygen atom.
Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a combination thereof in R ^a02 , R ^a03 and R ^a04 include the groups listed for R ^a1 , R ^a2 and R ^a3 in group (1). Examples include groups similar to .
Examples of the alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a combination thereof in R ^a6 and R ^a7 include the groups listed for R ^a1 , R ^a2 and R ^a3 in formula (1). Examples include groups similar to .
The alkyl group in R ^a02 , R ^a03 , and R ^a04 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and still more preferably a methyl group.
The alkyl group in R ^a6 and R ^a7 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group or an isopropyl group. Or a t-butyl group.
The alkenyl group in R ^a6 and R ^a7 is preferably an alkenyl group having 2 to 6 carbon atoms, more preferably an ethenyl group, a propenyl group, an isopropenyl group or a butenyl group.
The number of carbon atoms in the alicyclic hydrocarbon groups of R ^a02 , R ^a03 , R ^a04 , R ^a6 and R ^a7 is preferably 5 to 12, more preferably 5 to 10.
The number of carbon atoms in the aromatic hydrocarbon groups R ^a02 , R ^a03 , R ^a04 , R ^a6 and R ^a7 is preferably 6 to 12, more preferably 6 to 10.
In the group that is a combination of an alkyl group and an alicyclic hydrocarbon group, it is preferable that the total carbon number of the alkyl group and alicyclic hydrocarbon group is 18 or less.
In the group that is a combination of an alkyl group and an aromatic hydrocarbon group, it is preferable that the total number of carbon atoms in the combination of these alkyl groups and aromatic hydrocarbon groups is 18 or less.
R ^a02 and R ^a03 are preferably an alkyl group having 1 to 6 carbon atoms or an aromatic hydrocarbon group having 6 to 12 carbon atoms, and more preferably a methyl group, ethyl group, phenyl group or naphthyl group.
R ^a04 is preferably an alkyl group having 1 to 6 carbon atoms or an alicyclic hydrocarbon group having 5 to 12 carbon atoms, more preferably a methyl group, ethyl group, cyclohexyl group or adamantyl group.
R ^a6 and R ^a7 are each independently preferably an alkyl group having 1 to 6 carbon atoms, an alkenyl group having 2 to 6 carbon atoms, or an aromatic hydrocarbon group having 6 to 12 carbon atoms, and more preferably a methyl group. , ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group or naphthyl group, and more preferably ethyl group, isopropyl group, t-butyl group, ethenyl group or phenyl group.
m1' is preferably an integer of 0 to 3, more preferably 0 or 1.
n1 is preferably an integer of 0 to 3, more preferably 0 or 1.
n1' is preferably 0 or 1.

The structural unit (a1-0) is, for example, a structural unit represented by any one of formulas (a1-0-1) to (a1-0-18) and R ^a01 in the structural unit (a1-0). Structural units in which the corresponding methyl group is replaced with a hydrogen atom, halogen atom, haloalkyl group or other alkyl group are mentioned, and include formulas (a1-0-1) to formula (a1-0-10), formula (a1-0) -13) or the structural unit represented by formula (a1-0-14) is preferable.

Examples of the structural unit (a1-1) include structural units derived from monomers described in JP-A No. 2010-204646. Among them, the structural unit represented by any one of formulas (a1-1-1) to formula (a1-1-7) and the methyl group corresponding to R ^a4 in the structural unit (a1-1) are hydrogen atoms or halogen atoms. , a haloalkyl group or another alkyl group is preferable, and a structural unit represented by any one of formulas (a1-1-1) to (a1-1-4) is more preferable.

The structural unit (a1-2) corresponds to the structural unit represented by any of formulas (a1-2-1) to formula (a1-2-14) and R ^a5 in the structural unit (a1-2). Examples include structural units in which a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group, such as formula (a1-2-2), formula (a1-2-5), formula (a1-2-6) ) and any one of formulas (a1-2-10) to (a1-2-14) are preferred.

When the resin (A) etc. contains a structural unit (a1-0) and/or a structural unit (a1-1) and/or a structural unit (a1-2), the total content of these is the Based on the total structural units, the amount is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, and even more preferably 30 mol%. % or more. Further, it may be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, and still more preferably 70 mol% or less. Specifically, it is 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, still more preferably 25 to 70 mol%, and even more preferably It is 30 to 70 mol%.
When the resin (A) etc. contains a structural unit (a1-0), the content thereof is 5 mol% or more, preferably 10 mol% or more, based on the total structural units of the resin (A) etc. be. Further, it may be 80 mol% or less, preferably 75 mol% or less, and more preferably 70 mol% or less. Specifically, it is 5 to 80 mol%, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%.
When the resin (A) etc. contains a structural unit (a1-1) and/or a structural unit (a1-2), the total content of these is 10 mol% with respect to the total structural units of the resin (A) etc. The content is preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, and even more preferably 30 mol% or more. Further, it may be 90 mol% or less, preferably 85 mol% or less, more preferably 80 mol% or less, still more preferably 75 mol% or less, even more preferably 70 mol% or less. Specifically, it is 10 to 90 mol%, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, still more preferably 20 to 80 mol%, even more preferably It is 20 to 75 mol%, and even more preferably 20 to 70 mol%.

［式（ａ１－４）中、
Ｒ^a32は、水素原子、ハロゲン原子、又は、ハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｒ^a33は、ハロゲン原子、ヒドロキシ基、炭素数１～６のアルキル基、炭素数１～６のアルコキシ基、炭素数２～１２のアルコキシアルキル基、炭素数２～１２のアルコキシアルコキシ基、炭素数２～４のアルキルカルボニル基、炭素数２～４のアルキルカルボニルオキシ基、アクリロイルオキシ基又はメタクリロイルオキシ基を表す。
Ａ^a30は、単結合又は＊－Ｘ^a31－（Ａ^a32－Ｘ^a32）_nc－を表し、＊は－Ｒ^a32が結合する炭素原子との結合部位を表す。
Ａ^a32は、炭素数１～８のアルカンジイル基を表す。
Ｘ^a31及びＸ^a32は、それぞれ独立に、－Ｏ－、－ＣＯ－Ｏ－又は－Ｏ－ＣＯ－を表す。
ｎｃは、０又は１を表す。
ｌａは、０～４のいずれかの整数を表す。ｌａが２以上のいずれかの整数である場合、複数のＲ^a33は互いに同一であっても異なっていてもよい。
Ｒ^a34及びＲ^a35は、それぞれ独立に、水素原子又は炭素数１～１２の炭化水素基を表し、Ｒ^a36は、炭素数１～２０の炭化水素基を表すか、Ｒ^a35及びＲ^a36は互いに結合してそれらが結合する－Ｃ－Ｏ－とともに炭素数２～２０の２価の炭化水素基を形成し、該炭化水素基及び該２価の炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－又は－Ｓ－で置き換わってもよい。］ Examples of the structural unit having a group (2) in the structural unit (a1) include a structural unit represented by formula (a1-4) (hereinafter sometimes referred to as "structural unit (a1-4)"). .

[In formula (a1-4),
R ^a32 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.
R ^a33 is a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, a carbon number Represents an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.
A ^a30 represents a single bond or *-X ^a31 --(A ^a32 --X ^a32 ) _nc --, and * represents a bonding site with the carbon atom to which --R ^a32 is bonded.
A ^a32 represents an alkanediyl group having 1 to 8 carbon atoms.
X ^a31 and X ^a32 each independently represent -O-, -CO-O- or -O-CO-.
nc represents 0 or 1.
la represents any integer from 0 to 4. When la is any integer greater than or equal to 2, a plurality of R ^a33 's may be the same or different.
R ^a34 and R ^a35 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R ^a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R ^a35 and R ^a36 each independently represent a hydrocarbon group having 1 to 20 carbon atoms; They combine to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and the -CH ₂ - contained in the hydrocarbon group and the divalent hydrocarbon group is It may be replaced with -O- or -S-. ]

Examples of the halogen atom for R ^a32 and R ^a33 include a fluorine atom, a chlorine atom, and a bromine atom.
Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R ^a32 include trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2, 3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group and perfluoro Examples include hexyl group.
R ^a32 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.
Examples of the alkyl group for R ^a33 include a methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group.
Examples of the alkoxy group for R ^a33 include methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, tert-butoxy group, pentyloxy group, and hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group.
Examples of the alkoxyalkyl group for R ^a33 include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group.
Examples of the alkoxyalkoxy group in R ^a33 include methoxymethoxy group, methoxyethoxy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isopropoxymethoxy group, butoxymethoxy group, sec-butoxymethoxy group, and tert-butoxymethoxy group. Can be mentioned. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group.
Examples of the alkylcarbonyl group for R ^a33 include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group.
Examples of the alkylcarbonyloxy group for R ^a33 include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group.
R ^a33 is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, and includes a fluorine atom, an iodine atom, a hydroxy group, and a methyl group. A methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group are more preferable, and a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group are even more preferable.

*-X ^a31 -(A ^a32 -X ^a32 ) _nc - includes *-O-, *-CO-O-, *-O-CO-, *-CO-O-A ^a32 -CO-O-, *-O-CO-A ^a32 -O-, *-O-A ^a32 -CO-O-, *-CO-O-A ^a32 -O-CO-, *-O-CO-A ^a32 -O-CO -. Among these, *-CO-O-, *-CO-O-A ^a32 -CO-O-, or *-O-A ^a32 -CO-O- is preferred.
Examples of alkanediyl groups include methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, and hexane-1,5-diyl group. 1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group and -methylbutane-1,4-diyl group and the like.
A ^a32 is preferably a methylene group or an ethylene group.
A ^a30 is preferably a single bond, *-CO-O- or *-CO-O-A ^a32 -CO-O-, and is preferably a single bond, *-CO-O- or *-CO-O-CH ₂ -CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

芳香族炭化水素基としては、フェニル基、ナフチル基、アントリル基、ビフェニル基、フェナントリル基等のアリール基が挙げられる。
組み合わせた基としては、上述したアルキル基と脂環式炭化水素基とを組み合わせた基（例えば、メチルシクロヘキシル基、ジメチルシクロへキシル基、メチルノルボルニル基、シクロヘキシルメチル基、アダマンチルメチル基、アダマンチルジメチル基、ノルボルニルエチル基等のアルキルシクロアルキル基又はシクロアルキルアルキル基）、ベンジル基等のアラルキル基、アルキル基を有する芳香族炭化水素基（ｐ－メチルフェニル基、ｐ－ｔｅｒｔ－ブチルフェニル基、トリル基、キシリル基、クメニル基、メシチル基、２，６－ジエチルフェニル基、２－メチル－６－エチルフェニル基等）、脂環式炭化水素基を有する芳香族炭化水素基（ｐ－シクロヘキシルフェニル基、ｐ－アダマンチルフェニル基等）、フェニルシクロヘキシル基等のアリール－シクロアルキル基等が挙げられる。特に、Ｒ^a36としては、炭素数１～１８のアルキル基、炭素数３～１８の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組み合わせることにより形成される基が挙げられる。 la is preferably 0, 1 or 2, more preferably 0 or 1, and even more preferably 0.
Examples of the hydrocarbon group for R ^a34 , R ^a35 and R ^a36 include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a combination thereof.
Examples of the alkyl group include a methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, and octyl group.
The alicyclic hydrocarbon group may be monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups (* represents a bonding site).

Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, and phenanthryl group.
Examples of combined groups include groups that combine the above-mentioned alkyl groups and alicyclic hydrocarbon groups (for example, methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyl group). dimethyl group, norbornylethyl group, etc.), aralkyl group such as benzyl group, aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group) group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon group having alicyclic hydrocarbon group (p- Examples include aryl-cycloalkyl groups such as cyclohexylphenyl group, p-adamantylphenyl group, phenylcyclohexyl group, etc. In particular, R ^a36 is an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination thereof. can be mentioned.

R ^a34 is preferably a hydrogen atom.
R ^a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group.
The hydrocarbon group of R ^a36 is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof. More preferably, it is an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. The alkyl group and alicyclic hydrocarbon group in R ^a36 are preferably unsubstituted. The aromatic hydrocarbon group for R ^a36 is preferably an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.
--OC(R ^a34 )(R ^a35 )-O-R ^a36 in structural unit (a1-4) comes into contact with an acid (for example, p-toluenesulfonic acid) and is eliminated to form a hydroxy group.
--OC(R ^a34 )(R ^a35 )-O-R ^a36 is preferably bonded to the m-position or p-position of the benzene ring, and more preferably to the p-position.

Examples of the structural unit (a1-4) include structural units derived from monomers described in JP-A No. 2010-204646. Preferably, the hydrogen atom corresponding to R ^a32 in the structural units represented by formulas (a1-4-1) to (a1-4-24) and structural unit (a1-4), respectively, is a halogen atom, a haloalkyl group, or Examples include structural units substituted with alkyl groups, more preferably formulas (a1-4-1) to (a1-4-5), formula (a1-4-10), and formula (a1-4-13). , formula (a1-4-14), formula (a1-4-19), and formula (a1-4-20), respectively.

When the resin (A) etc. contains the structural unit (a1-4), the content thereof is preferably 3 to 80 mol% based on the total of all structural units of the resin (A) etc. It is more preferably from 75 mol% to 75 mol%, even more preferably from 7 to 70 mol%, even more preferably from 7 to 65 mol%, and even more preferably from 10 to 60 mol%.

［式（ａ１－５）中、
Ｒ^a8は、ハロゲン原子を有していてもよい炭素数１～６のアルキル基、水素原子又はハロゲン原子を表す。
Ｚ^a1は、単結合又は＊－（ＣＨ₂）_h3－ＣＯ－Ｌ⁵⁴－を表し、ｈ３は１～４のいずれかの整数を表し、＊は、Ｌ⁵¹との結合部位を表す。
Ｌ⁵¹、Ｌ⁵²、Ｌ⁵³及びＬ⁵⁴は、それぞれ独立に、－Ｏ－又は－Ｓ－を表す。
ｓ１は、１～３のいずれかの整数を表す。
ｓ１’は、０～３のいずれかの整数を表す。］ Examples of the structural unit derived from the (meth)acrylic monomer having group (2) include the structural unit represented by formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)"). It will be done.

[In formula (a1-5),
R ^a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom.
Z ^a1 represents a single bond or *-(CH ₂ ) _h3 --CO-L ⁵⁴ --, h3 represents an integer of 1 to 4, and * represents a binding site with L ⁵¹ .
L ⁵¹ , L ⁵² , L ⁵³ and L ⁵⁴ each independently represent -O- or -S-.
s1 represents an integer of 1 to 3.
s1' represents any integer from 0 to 3. ]

Examples of the halogen atom include a fluorine atom and a chlorine atom, with a fluorine atom being preferred.
Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, fluoromethyl group, and trifluoromethyl group. Examples include methyl group.
In formula (a1-5), R ^a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group.
L ⁵¹ is preferably an oxygen atom.
It is preferable that one of L ⁵² and L ⁵³ is -O- and the other is -S-.
s1 is preferably 1.
s1' is preferably an integer of 0 to 2.
Z ^a1 is preferably a single bond or *-CH ₂ -CO-O-.

Examples of the structural unit (a1-5) include structural units derived from monomers described in JP-A No. 2010-61117. Among these, structural units represented by formulas (a1-5-1) to (a1-5-4), respectively, are preferred, and structural units represented by formula (a1-5-1) or formula (a1-5-2) are preferred. Structural units are more preferred.

When the resin (A) etc. contains the structural unit (a1-5), its content is preferably 1 to 50 mol%, and 3 to 45 mol% based on the total structural units of the resin (A) etc. It is more preferably 5 to 40 mol%, even more preferably 5 to 30 mol%.

Moreover, as the structural unit (a1), the following structural units can also be mentioned.

When resin (A) etc. contains structural units represented by formulas (a1-3-1) to (a1-3-7), the content rate is based on the total structural units of resin (A) etc. , is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

樹脂（Ａ）等が、式（ａ１－６－１）～（ａ１－６－３）で表される構造単位を含む場合、その含有率は、樹脂（Ａ）等の全構造単位に対して、１０～６０モル％が好ましく、１５～５５モル％がより好ましく、２０～５０モル％がさらに好ましく、２０～４５モル％がさらにより好ましく、２０～４０モル％が特に好ましい。 Moreover, as the structural unit (a1), the following structural units may also be mentioned.

When resin (A) etc. contains structural units represented by formulas (a1-6-1) to (a1-6-3), the content rate is based on the total structural units of resin (A) etc. , is preferably 10 to 60 mol%, more preferably 15 to 55 mol%, even more preferably 20 to 50 mol%, even more preferably 20 to 45 mol%, and particularly preferably 20 to 40 mol%.

<Structural unit (s)>
The structural unit (s) is derived from a monomer that does not have an acid-labile group (hereinafter sometimes referred to as "monomer (s)"). As the monomer leading to the structural unit (s), monomers having no acid-labile groups known in the field of resists can be used.
The structural unit (s) preferably has a hydroxy group or a lactone ring. A structural unit having a hydroxy group and not having an acid-labile group (hereinafter sometimes referred to as "structural unit (a2)") and/or a structure having a lactone ring and not having an acid-labile group If a resin containing the unit (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, the resolution of the resist pattern and the adhesion to the substrate can be improved.

［式（ａ２）中、
Ｒ^a50は、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ａ^a50は、単結合又は＊－Ｘ^a51－（Ａ^a52－Ｘ^a52）_nｂ－を表し、＊は－Ｒ^a50が結合する炭素原子との結合部位を表す。
Ａ^a52は、炭素数１～８のアルカンジイル基を表す。
Ｘ^a51及びＸ^a52は、それぞれ独立に、－Ｏ－、－ＣＯ－Ｏ－又は－Ｏ－ＣＯ－を表す。
ｎｂは、０又は１を表す。
Ｗ^ａ５０は、置換基を有してもよい炭素数５～１２の環状炭化水素基を表す。
Ｌ^ａ５０は、単結合又はフッ素原子を有してもよい炭素数１～１２の鎖状炭化水素基を表す。
ｍａ５０は、１～５のいずれかの整数を表す。］
Ｒ^a50におけるハロゲン原子としては、フッ素原子、塩素原子及び臭素原子等が挙げられる。
Ｒ^a50におけるハロゲン原子を有していてもよい炭素数１～６のアルキル基としては、トリフルオロメチル基、ジフルオロメチル基、メチル基、ペルフルオロエチル基、２，２，２－トリフルオロエチル基、１，１，２，２－テトラフルオロエチル基、エチル基、ペルフルオロプロピル基、２，２，３，３，３－ペンタフルオロプロピル基、プロピル基、ペルフルオロブチル基、１，１，２，２，３，３，４，４－オクタフルオロブチル基、ブチル基、ペルフルオロペンチル基、２，２，３，３，４，４，５，５，５－ノナフルオロペンチル基、ペンチル基、ヘキシル基、ペルフルオロヘキシル基、トリブロモメチル基、トリクロロメチル基及びトリヨードメチル基等が挙げられる。アルキル基の炭素数は、好ましくは１～４であり、より好ましくは１～３であり、さらに好ましくは１又は２である。
Ｒ^a50は、水素原子又は炭素数１～４のアルキル基が好ましく、水素原子、メチル基又はエチル基がより好ましく、水素原子又はメチル基がさらに好ましい。 <Structural unit (a2)>
Structural unit (a2) is a structural unit represented by formula (a2), and has an alcoholic hydroxy group or a phenolic hydroxy group.

[In formula (a2),
R ^a50 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may contain a halogen atom.
A ^a50 represents a single bond or *-X ^a51 -(A ^a52 -X ^a52 ) _nb -, and * represents a bonding site with the carbon atom to which -R ^a50 is bonded.
A ^a52 represents an alkanediyl group having 1 to 8 carbon atoms.
X ^a51 and X ^a52 each independently represent -O-, -CO-O- or -O-CO-.
nb represents 0 or 1.
W ^a50 represents a cyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent.
L ^a50 represents a chain hydrocarbon group having 1 to 12 carbon atoms which may have a single bond or a fluorine atom.
ma50 represents any integer from 1 to 5. ]
Examples of the halogen atom for R ^a50 include a fluorine atom, a chlorine atom, a bromine atom, and the like.
Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R ^a50 include trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2, 3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluoro Examples include hexyl group, tribromomethyl group, trichloromethyl group and triiodomethyl group. The alkyl group preferably has 1 to 4 carbon atoms, more preferably 1 to 3 carbon atoms, and even more preferably 1 or 2 carbon atoms.
R ^a50 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

The alkanediyl group of A ^a52 in A ^a50 includes methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5 -diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3- Examples include diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The alkanediyl group preferably has 1 to 6 carbon atoms, more preferably 1 to 4 carbon atoms, still more preferably 1 to 3 carbon atoms, and even more preferably 1 or 2 carbon atoms.
A ^a52 is preferably a methylene group or an ethylene group.
*-X ^a51 -(A ^a52 -X ^a52 ) _nb - includes *-O-, *-CO-O-, *-O-CO-, *-CO-O-A ^a52 -CO-O-, *-O-CO-A ^a52 -O-, *-O-A ^a52 -CO-O-, *-CO-O-A ^a52 -O-CO-, *-O-CO-A ^a52 -O-CO -. Among these, *-CO-O-, *-CO-O-A ^a52 -CO-O-, or *-O-A ^a52 -CO-O- is preferred.
A ^a50 is preferably a single bond, *-CO-O- or *-CO-O-A ^a52 -CO-O-, and is preferably a single bond, *-CO-O- or *-CO-O-CH ₂ -CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

Examples of the cyclic hydrocarbon group of W ^a50 include a divalent alicyclic hydrocarbon group and a divalent aromatic hydrocarbon group.
Examples of the monocyclic divalent alicyclic hydrocarbon group in W ^a50 include monocyclic divalent alicyclic hydrocarbon groups such as cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group. Examples include cyclic cycloalkanediyl groups. Examples of polycyclic divalent alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group. Examples include polycyclic cycloalkanediyl groups such as groups.
The alicyclic hydrocarbon group preferably has 6 to 12 carbon atoms, more preferably 6 to 10 carbon atoms.
Examples of the divalent aromatic hydrocarbon group in W ^a50 include a phenylene group and a naphthylene group.
The aromatic hydrocarbon group preferably has 6 to 12 carbon atoms, more preferably 6 to 10 carbon atoms.
Examples of substituents that the cyclic hydrocarbon group having 5 to 12 carbon atoms in W ^a50 may include halogen atoms, hydroxy groups, alkyl groups having 1 to 12 carbon atoms, haloalkyl groups having 1 to 12 carbon atoms, and Alkoxy group having 1 to 12 carbon atoms, alkoxyalkyl group having 2 to 12 carbon atoms, alkoxyalkoxy group having 2 to 12 carbon atoms, alkylcarbonyl group having 2 to 4 carbon atoms, alkylcarbonyloxy group having 2 to 4 carbon atoms, acryloyloxy group or methacryloyloxy group. The number of substituents that W ^a50 has may be one or two or more.
Examples of the halogen atom include a fluorine atom, a chlorine atom, and a bromine atom.
Examples of the alkyl group include methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group. The alkyl group preferably has 1 to 6 carbon atoms, more preferably 1 to 4 carbon atoms, and still more preferably 1 to 3 carbon atoms. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group.
Examples of haloalkyl groups include trifluoromethyl group, difluoromethyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, perfluoropropyl group, 2,2, 3,3,3-pentafluoropropyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, perfluoropentyl group, 2,2,3,3,4, Examples include 4,5,5,5-nonafluoropentyl group, perfluorohexyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The haloalkyl group preferably has 1 to 6 carbon atoms, more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, and tert-butoxy group. The alkoxy group preferably has 1 to 6 carbon atoms, more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group.
Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group.
Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group.
Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group.
Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group.
As the substituent for the cyclic hydrocarbon group of W ^a50 , a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms are preferable, and fluorine Atom, iodine atom, hydroxy group, methyl group, methoxy group, ethoxy group, ethoxyethoxy group or ethoxymethoxy group are more preferred, and fluorine atom, iodine atom, hydroxy group, methyl group, methoxy group or ethoxyethoxy group is even more preferred.

Examples of the chain hydrocarbon group having 1 to 12 carbon atoms in L ^a50 include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, Pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10 -Diyl group, undecane-1,11-diyl group, linear alkanediyl group such as dodecane-1,12-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group, propane- 1,2-diyl group, propane-2,2-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group group, 1-dimethylpropane-1,3-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, pentane-2,4-diyl group and branched alkanediyl groups such as pentane-1,4-diyl group and 2-methylbutane-1,4-diyl group.
The chain hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, still more preferably 1 to 6 carbon atoms, and even more preferably 1 to 4 carbon atoms.
The number of fluorine atoms that L ^a50 has may be one or two or more.
ma50 is preferably an integer of 1 to 4, more preferably an integer of 1 to 3.

When producing a resist pattern from the resist composition of the present invention, when a high-energy beam such as a KrF excimer laser (248 nm), an electron beam, or EUV (ultra-ultraviolet light) is used as an exposure light source, the structural unit (a2) is , a structural unit (a2) having a phenolic hydroxy group is preferable, and it is more preferable to use a structural unit (a2-A) described below. Furthermore, when using an ArF excimer laser (193 nm), etc., the structural unit (a2) is preferably a structural unit (a2) having an alcoholic hydroxy group, and it is more preferable to use the structural unit (a2-1) described below. preferable. The structural unit (a2) may contain one type alone or two or more types.

［式（ａ２－Ａ）中、
Ｒ^a50は、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｒ^a51は、ハロゲン原子、ヒドロキシ基、炭素数１～６のアルキル基、炭素数１～６のアルコキシ基、炭素数２～１２のアルコキシアルキル基、炭素数２～１２のアルコキシアルコキシ基、炭素数２～４のアルキルカルボニル基、炭素数２～４のアルキルカルボニルオキシ基、アクリロイルオキシ基又はメタクリロイルオキシ基を表す。
Ａ^a50は、単結合又は＊－Ｘ^a51－（Ａ^a52－Ｘ^a52）_nb－を表し、＊は－Ｒ^a50が結合する炭素原子との結合部位を表す。
Ａ^a52は、炭素数１～８のアルカンジイル基を表す。
Ｘ^a51及びＸ^a52は、それぞれ独立に、－Ｏ－、－ＣＯ－Ｏ－又は－Ｏ－ＣＯ－を表す。
ｎｂは、０又は１を表す。
ｍｂは、０～４のいずれかの整数を表す。ｍｂが２以上のいずれかの整数である場合、複数のＲ^a51は互いに同一であっても異なっていてもよい。］ Examples of the structural unit having a phenolic hydroxy group in the structural unit (a2) include a structural unit represented by formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)").

[In formula (a2-A),
R ^a50 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may contain a halogen atom.
R ^a51 is a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, a carbon number Represents an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.
A ^a50 represents a single bond or *-X ^a51 --(A ^a52 --X ^a52 ) _nb --, and * represents a bonding site with the carbon atom to which --R ^a50 is bonded.
A ^a52 represents an alkanediyl group having 1 to 8 carbon atoms.
X ^a51 and X ^a52 each independently represent -O-, -CO-O- or -O-CO-.
nb represents 0 or 1.
mb represents any integer from 0 to 4. When mb is any integer of 2 or more, a plurality of R ^a51 's may be the same or different. ]

Examples of R ^a50 and A ^a50 include the same groups as those exemplified in formula (a2).
Examples of the halogen atom for R ^a51 include a fluorine atom, a chlorine atom, a bromine atom, and the like.
Examples of the alkyl group for R ^a51 include methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, and hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group.
Examples of the alkoxy group for R ^a51 include methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, and tert-butoxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group.
Examples of the alkoxyalkyl group for R ^a51 include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group.
Examples of the alkoxyalkoxy group in R ^a51 include methoxymethoxy group, methoxyethoxy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isopropoxymethoxy group, butoxymethoxy group, sec-butoxymethoxy group, and tert-butoxymethoxy group. Can be mentioned. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group.
Examples of the alkylcarbonyl group for R ^a51 include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group.
Examples of the alkylcarbonyloxy group for R ^a51 include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group.
R ^a51 is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, and includes a fluorine atom, an iodine atom, a hydroxy group, and a methyl group. A methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group are more preferable, and a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group are even more preferable.

mb is preferably 0, 1 or 2, more preferably 0 or 1.
Preferably, at least one hydroxy group is bonded to the m-position or p-position of the benzene ring. When two or more hydroxy groups are included, the two hydroxy groups are preferably bonded to the m-position and the p-position, respectively.

Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A No. 2010-204634 and JP-A No. 2012-12577.
Structural units (a2-A) include structural units represented by formulas (a2-2-1) to (a2-2-24) and formulas (a2-2-1) to (a2-2- Examples of the structural unit represented by 24) include a structural unit in which the methyl group corresponding to R ^a50 in structural unit (a2-A) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural unit (a2-A) is a structural unit represented by formula (a2-2-1) to formula (a2-2-4), a structural unit represented by formula (a2-2-6), or a structural unit represented by formula (a2-2-6). a2-2-8), structural units represented by formula (a2-2-12) to formula (a2-2-18), and formula (a2-2-1) to formula (a2- 2-4) Structural unit represented by formula (a2-2-6), structural unit represented by formula (a2-2-8), formula (a2-2-12) ~ In the structural unit represented by the formula (a2-2-18), it is preferable that the methyl group corresponding to R ^a50 in the structural unit (a2-A) is replaced with a hydrogen atom, and the structural unit represented by the formula (a2-2 -3) Structural unit represented by formula (a2-2-4), structural unit represented by formula (a2-2-8), formula (a2-2-12) to formula The structural unit represented by (a2-2-14), the structural unit represented by formula (a2-2-18) and the structural unit represented by formula (a2-2-3), the structural unit represented by formula (a2-2- 4) Structural unit represented by formula (a2-2-8), structural unit represented by formula (a2-2-12) to formula (a2-2-14), formula ( In the structural unit represented by formula (a2-2-18), it is more preferable that the methyl group corresponding to R ^a50 in structural unit (a2-A) is replaced with a hydrogen atom, and the structural unit represented by formula (a2-2- 3), a structural unit represented by formula (a2-2-4), a structural unit represented by formula (a2-2-8), and a structural unit represented by formula (a2-2-3). In the structural unit represented by the formula (a2-2-4), the structural unit represented by the formula (a2-2-8), a methyl group corresponding to R ^a50 in the structural unit (a2-A) It is more preferable that it is a structural unit in which is replaced with a hydrogen atom.

When the structural unit (a2-A) is contained in the resin (A), etc., the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 5 mol% or more based on the total structural units. The content is 10 mol% or more, more preferably 15 mol% or more, even more preferably 20 mol% or more. Moreover, it is preferably 80 mol% or less, more preferably 70 mol% or less, and still more preferably 65 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%.
The structural unit (a2-A) can be incorporated into the resin (A), for example, by polymerizing the structural unit (a1-4) and then treating it with an acid such as p-toluenesulfonic acid. Further, the structural unit (a2-A) can be included in the resin (A) etc. by polymerizing with acetoxystyrene or the like and then treating with an alkali such as tetramethylammonium hydroxide.

［式（ａ２－Ａ１）及び式（ａ２－Ａ２）中、
Ｒ^a50及びＡ^a50は、それぞれ式（ａ２）と同じ意味を表す。
ｍｂ１は、０～４のいずれかの整数を表す。
Ｒ^ａ５２は、ハロゲン原子を表す。
Ｒ^ａ５３は、炭素数１～６のアルキル基、炭素数１～６のアルコキシ基、炭素数２～１２のアルコキシアルキル基、炭素数２～１２のアルコキシアルコキシ基、炭素数２～４のアルキルカルボニル基、炭素数２～４のアルキルカルボニルオキシ基、アクリロイルオキシ基又はメタクリロイルオキシ基を表す。
ｍｂ２及びｍｂ３は、それぞれ独立に、０～４のいずれかの整数を表し、ｍｂ２が２以上の場合、複数のＲ^ａ５２は互いに同一であっても異なってもよく、ｍｂ３が２以上の場合、複数のＲ^ａ５３は互いに同一であっても異なってもよく、１≦ｍｂ２＋ｍｂ３≦４を満たす。］
Ｒ^ａ５２のハロゲン原子は、Ｗ^ａ５０の環状炭化水素基の置換基及びＲ^ａ５１におけるハロゲン原子と同じものが挙げられる。Ｒ^ａ５２のハロゲン原子としては、フッ素原子又はヨウ素原子が好ましい。
Ｒ^ａ５３の炭素数１～６のアルキル基、炭素数１～６のアルコキシ基、炭素数２～１２のアルコキシアルキル基、炭素数２～１２のアルコキシアルコキシ基、炭素数２～４のアルキルカルボニル基、炭素数２～４のアルキルカルボニルオキシ基、アクリロイルオキシ基又はメタクリロイルオキシ基としては、それぞれ、Ｗ^ａ５０の環状炭化水素基の置換基及びＲ^ａ５１におけるアルキル基、アルコキシ基、アルコキシアルキル基、アルコキシアルコキシ基、アルキルカルボニル基、アルキルカルボニルオキシ基、アクロイルオキシ基、メタクリロイルオキシ基と同じものが挙げられ、メチル基、メトキシ基、エトキシ基、エトキシエトキシ基又はエトキシメトキシ基がより好ましく、メトキシ基又はエトキシエトキシ基がさらに好ましい。
ｍｂ１は、０～３のいずれかの整数が好ましく、０～２のいずれかの整数がより好ましく、０又は１がさらに好ましい。
ｍｂ２は、０～３のいずれかの整数が好ましく、１～３のいずれかの整数がより好ましく、１又は２がさらに好ましい。
ｍｂ３は、０～３のいずれかの整数が好ましく、０～２のいずれかの整数がより好ましく、０又は１がさらに好ましい。 The structural unit (a2-A) is a structural unit represented by the following formula (a2-A1) (hereinafter sometimes referred to as "structural unit (a2-A1)") and a structural unit represented by the formula (a2-A2). (hereinafter sometimes referred to as "structural unit (a2-A2)").

[In formula (a2-A1) and formula (a2-A2),
R ^a50 and A ^a50 each represent the same meaning as in formula (a2).
mb1 represents any integer from 0 to 4.
R ^a52 represents a halogen atom.
R ^a53 is an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. group, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.
mb2 and mb3 each independently represent any integer from 0 to 4; when mb2 is 2 or more, the plurality of R ^a52s may be the same or different; when mb3 is 2 or more, The plurality of R ^a53s may be the same or different from each other, and satisfy 1≦mb2+mb3≦4. ]
Examples of the halogen atom in R ^a52 include the same halogen atom as the substituent of the cyclic hydrocarbon group in W ^a50 and the halogen atom in R ^a51 . The halogen atom for R ^a52 is preferably a fluorine atom or an iodine atom.
R ^a53 alkyl group having 1 to 6 carbon atoms, alkoxy group having 1 to 6 carbon atoms, alkoxyalkyl group having 2 to 12 carbon atoms, alkoxyalkoxy group having 2 to 12 carbon atoms, alkylcarbonyl group having 2 to 4 carbon atoms , an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group, respectively, a substituent of a cyclic hydrocarbon group in W ^a50 and an alkyl group, an alkoxy group, an alkoxyalkyl group, an alkoxyalkoxy group in R ^a51 . group, alkylcarbonyl group, alkylcarbonyloxy group, acroyloxy group, methacryloyloxy group, and methyl group, methoxy group, ethoxy group, ethoxyethoxy group or ethoxymethoxy group are more preferred, and methoxy group or ethoxy Ethoxy group is more preferred.
mb1 is preferably an integer of 0 to 3, more preferably an integer of 0 to 2, and even more preferably 0 or 1.
mb2 is preferably an integer of 0 to 3, more preferably 1 to 3, and even more preferably 1 or 2.
mb3 is preferably an integer of 0 to 3, more preferably an integer of 0 to 2, and even more preferably 0 or 1.

［式（ａ２－１）中、
Ｌ^a3は、－Ｏ－又は＊－Ｏ－（ＣＨ₂）_k2－ＣＯ－Ｏ－を表し、
ｋ２は、１～７のいずれかの整数を表す。＊は－ＣＯ－との結合部位を表す。
Ｒ^a14は、水素原子又はメチル基を表す。
Ｒ^a15及びＲ^a16は、それぞれ独立に、水素原子、メチル基又はヒドロキシ基を表す。
ｏ１は、０～１０のいずれかの整数を表す。］ Examples of the structural unit having an alcoholic hydroxy group in the structural unit (a2) include a structural unit represented by formula (a2-1) (hereinafter sometimes referred to as "structural unit (a2-1)").

[In formula (a2-1),
L ^a3 represents -O- or *-O-(CH ₂ ) _k2 -CO-O-,
k2 represents any integer from 1 to 7. * represents a binding site with -CO-.
R ^a14 represents a hydrogen atom or a methyl group.
R ^a15 and R ^a16 each independently represent a hydrogen atom, a methyl group, or a hydroxy group.
o1 represents any integer from 0 to 10. ]

In formula (a2-1), L ^a3 is preferably -O-, -O-(CH ₂ ) _f1 -CO-O- (the f1 represents any integer from 1 to 4) , more preferably -O-.
R ^a14 is preferably a methyl group.
R ^a15 is preferably a hydrogen atom.
R ^a16 is preferably a hydrogen atom or a hydroxy group.
o1 is preferably an integer of 0 to 3, more preferably 0 or 1.

Examples of the structural unit (a2-1) include structural units derived from monomers described in JP-A No. 2010-204646. A structural unit represented by any one of formula (a2-1-1) to formula (a2-1-6) is preferable, and a structural unit represented by any one of formula (a2-1-1) to formula (a2-1-4) is preferable. The structural unit represented by the formula (a2-1-1) or the formula (a2-1-3) is more preferred.

When the resin (A) etc. contains the structural unit (a2-1), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on the total structural units of the resin (A) etc. Furthermore, the amount is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, still more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, it is 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and even more preferably It is 1 to 10 mol%.

［式（ａ２－Ｂ）中、
Ｒ^a50及びＡ^a50は、それぞれ式（ａ２）と同じ意味を表す。
Ｒ^ａ５４及びＲ^ａ５５は、それぞれ独立に、炭素数１～４のフッ化アルキル基を表す。
Ｌ^ａ５１は、単結合又は炭素数１～３のアルカンジイル基を表し、該アルカンジイル基はフッ素原子が置換されていてもよい。
Ｒ^ａ５６は、ハロゲン原子、ヒドロキシ基、炭素数１～４のハロアルキル基又は炭素数１～１２のアルキル基を表し、該アルキル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－で置き換わっていてもよい。
ｍｂ４は、１～３のいずれかの整数を表し、ｍｂ４が２以上のとき、複数のＲ^ａ５４、Ｒ^ａ５５及びＬ^ａ５１は、それぞれ互いに同一であっても異なってもよい。
ｍｂ５は、０～４のいずれかの整数を表し、ｍｂ５が２以上のとき、複数のＲ^ａ５６は互いに同一であっても異なってもよい。但し、１≦ｍｂ４＋ｍｂ５≦５である。］ Examples of the structural unit (a2) having an alcoholic hydroxy group include a structural unit represented by formula (a2-B) (hereinafter sometimes referred to as "structural unit (a2-B)").

[In formula (a2-B),
R ^a50 and A ^a50 each represent the same meaning as in formula (a2).
R ^a54 and R ^a55 each independently represent a fluorinated alkyl group having 1 to 4 carbon atoms.
L ^a51 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom.
R ^a56 represents a halogen atom, a hydroxy group, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 12 carbon atoms, and -CH ₂ - contained in the alkyl group is -O- or -CO-. May be replaced.
mb4 represents any integer from 1 to 3, and when mb4 is 2 or more, the plurality of R ^a54 , R ^a55 and L ^a51 may be the same or different from each other.
mb5 represents any integer from 0 to 4, and when mb5 is 2 or more, a plurality of R ^a56 may be the same or different. However, 1≦mb4+mb5≦5. ]

The fluorinated alkyl groups having 1 to 4 carbon atoms in R ^a54 and R ^a55 each independently include a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, Examples include 4,4,4-trifluorobutyl group. As R ^a54 and R ^a55 , a trifluoromethyl group is preferred.
Examples of the alkanediyl group having 1 to 3 carbon atoms for L ^a51 include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, and the like. L ^a51 is preferably a single bond or a methylene group.
Examples of the halogen atom for R ^a56 include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
The haloalkyl group having 1 to 4 carbon atoms in R ^a56 represents an alkyl group having 1 to 4 carbon atoms having a halogen atom, and includes chloromethyl group, bromomethyl group, fluoromethyl group, difluoromethyl group, trifluoromethyl group, perfluoromethyl group, Examples include butyl.
Examples of the alkyl group having 1 to 12 carbon atoms in R ^a56 include methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, octyl group, nonyl group, etc. Examples include alkyl groups. The alkyl group preferably has 1 to 9 carbon atoms, more preferably 1 to 6 carbon atoms, and even more preferably 1 to 4 carbon atoms.
When the -CH ₂ - contained in the alkyl group represented by R ^a56 is replaced with -O- or -CO-, the number of carbon atoms before being replaced is the total number of carbon atoms in the alkyl group. In addition, R ^a56 is a hydroxy group (a group in which -CH ₂ - contained in a methyl group is replaced with -O-), a carboxyl group (a group in which -CH 2 -CH ₂ - contained in an ethyl group is replaced with -O-), a carboxyl group (a group in which -CH ₂ - contained in an ethyl group is replaced with -O-) -CO-), alkoxy group having 1 to 11 carbon atoms (a group in which -CH ₂ - contained in an alkyl group having 2 to 12 carbon atoms has been replaced with -O-), and a group having 2 to 11 carbon atoms alkoxycarbonyl group (a group in which -CH ₂ -CH _{2 - contained in an alkyl group having 3 to 12 carbon atoms is replaced with -O-CO-), an alkylcarbonyl group having 2 to 12 carbon atoms (a group in which -O-CO- is substituted for -CH 2 -CH 2} - contained in an alkyl group having 3 to 12 carbon atoms), A group in which -CH ₂ - contained in an alkyl group having ~12 carbon atoms is replaced with -CO-), an alkylcarbonyloxy group having 2 to 11 carbon atoms (a group in which -CH _{2 -} contained in an alkyl group having 3 to 12 carbon atoms) -CH ₂ - may have a group in which -CO-O- is replaced with -CO-O-.
R ^a56 is, among others, a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (-CH ₂ - contained in the alkyl group is replaced with -O- or -CO-). ) is preferable.
mb4 is preferably 1 or 2, more preferably 1. More preferably, mb4 is 1 and the group in parentheses is bonded to the para position.
mb5 is preferably an integer of 0 to 2, more preferably 0 or 1, and even more preferably 0.

［式（ａ２－Ｂ１）中、
Ｒ^ａ５７は、水素原子又はメチル基を表す。
Ａ^ａ５３は、単結合又は＊－ＣＯ－Ｏ－を表し、＊は－Ｒ^ａ５７が結合する炭素原子との結合部位を表す。
Ｒ^ａ５６、ｍｂ４及びｍｂ５は、それぞれ式（ａ２－Ｂ）と同じ意味を表す。］ The structural unit (a2-B) is more preferably a structural unit represented by the following formula (a2-B1) (hereinafter sometimes referred to as "structural unit (a2-B1)").

[In formula (a2-B1),
R ^a57 represents a hydrogen atom or a methyl group.
A ^a53 represents a single bond or *-CO-O-, and * represents a bonding site with the carbon atom to which -R ^a57 is bonded.
R ^a56 , mb4 and mb5 each represent the same meaning as in formula (a2-B). ]

In formula (a2-B1), R ^a57 is preferably a hydrogen atom.
A ^a53 is preferably a single bond.

Examples of the structural unit (a2-B) include the structural units described below.

In the structural units represented by formulas (a2-B-1) to (a2-B-8), the structural unit in which the hydrogen atom corresponding to R ^a57 is replaced with a methyl group also has the formula (a2-B-9). A structural unit in which the methyl group corresponding to R ^a57 in the structural unit represented by formula (a2-B-16) is replaced with a hydrogen atom can also be cited as a specific example of the structural unit (a2-B). Among these, structural units represented by formulas (a2-B-1) to (a2-B-8) are preferred, and structural units represented by formulas (a2-B-1) to (a2-B-4) are preferred. A structural unit is more preferable, and a structural unit represented by formula (a2-B-1) is even more preferable.

When the resin (A) etc. contains a structural unit (a2-B), its content is preferably 3 mol% or more, more preferably 5 mol%, based on the total structural units of the resin (A) etc. or more, and more preferably 10 mol% or more. Moreover, it is preferably 80 mol% or less, more preferably 75 mol% or less, still more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, still more preferably 10 to 70 mol%, even more preferably 10 to 65 mol%.

［式（ａ３－１）、式（ａ３－２）、式（ａ３－３）及び式（ａ３－４）中、
Ｌ^ａ４、Ｌ^ａ５及びＬ^ａ６は、それぞれ独立に、－Ｏ－又は＊－Ｏ－（ＣＨ_２）_k3－ＣＯ－Ｏ－（ｋ３は１～７のいずれかの整数を表す。）で表される基を表す。
Ｌ^ａ７は、－Ｏ－、＊－Ｏ－Ｌ^ａ８－Ｏ－、＊－Ｏ－Ｌ^ａ８－ＣＯ－Ｏ－、＊－Ｏ－Ｌ^ａ８－ＣＯ－Ｏ－Ｌ^ａ９－ＣＯ－Ｏ－又は＊－Ｏ－Ｌ^ａ８－Ｏ－ＣＯ－Ｌ^ａ９－Ｏ－を表す。
Ｌ^ａ８及びＬ^ａ９は、それぞれ独立に、炭素数１～６のアルカンジイル基を表す。
＊は、カルボニル基との結合部位を表す。
Ｒ^ａ１８、Ｒ^ａ１９、Ｒ^ａ２０及びＲ^ａ２４は、それぞれ独立に、ハロゲン原子を有していてもよい炭素数１～６のアルキル基、水素原子又はハロゲン原子を表す。
Ｘ^ａ３は、－ＣＨ_２－又は酸素原子を表す。
Ｒ^ａ２１は、炭素数１～４の脂肪族炭化水素基を表す。
Ｒ^ａ２２、Ｒ^ａ２３及びＲ^ａ２５は、それぞれ独立に、カルボキシ基、シアノ基又は炭素数１～４の脂肪族炭化水素基を表す。
ｐ１は、０～５のいずれかの整数を表す。
ｑ１は、０～３のいずれかの整数を表す。
ｒ１は、０～３のいずれかの整数を表す。
ｗ１は、０～８のいずれかの整数を表す。
ｐ１、ｑ１、ｒ１及び／又はｗ１が２以上のとき、複数のＲ^ａ２１、Ｒ^ａ２２、Ｒ^ａ２３及び／又はＲ^ａ２５は互いに同一であっても異なっていてもよい。］ <Structural unit (a3)>
The lactone ring possessed by the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a fused ring of a monocyclic lactone ring and another ring. But that's fine. Preferred examples include a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).
Structural unit (a3) is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3) or formula (a3-4). One type of these may be contained alone, or two or more types may be contained.

[In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4),
L ^a4 , L ^a5 and L ^a6 are each independently represented by -O- or *-O-(CH ₂ ) _k3 -CO-O- (k3 represents any integer from 1 to 7); represents a group.
L ^a7 is -O-, *-OL ^a8 -O-, *-OL ^a8 -CO-O-, *-OL ^a8 -CO-OL ^a9 -CO-O-, or * -O-L ^a8 -O-CO-L ^a9 -O-.
L ^a8 and L ^a9 each independently represent an alkanediyl group having 1 to 6 carbon atoms.
* represents a bonding site with a carbonyl group.
R ^a18 , R ^a19 , R ^a20 and R ^a24 each independently represent an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom.
X ^a3 represents -CH ₂ - or an oxygen atom.
R ^a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms.
R ^a22 , R ^a23 and R ^a25 each independently represent a carboxy group, a cyano group or an aliphatic hydrocarbon group having 1 to 4 carbon atoms.
p1 represents any integer from 0 to 5.
q1 represents any integer from 0 to 3.
r1 represents any integer from 0 to 3.
w1 represents any integer from 0 to 8.
When p1, q1, r1 and/or w1 is 2 or more, the plurality of R ^a21 , R ^a22 , R ^a23 and/or R ^a25 may be the same or different. ]

（式中、Ｒ^ａ２４、Ｌ^ａ７は、上記と同じ意味を表す。） Examples of the aliphatic hydrocarbon groups in R ^a21 , R ^a22 , R ^a23 and R ^a25 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group and tert-butyl group. It will be done.
Examples of the halogen atom in R ^a18 , R ^a19 , R ^a20 and R ^a24 include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom.
Examples of the alkyl group in R ^a18 , R ^a19 , R ^a20 and R ^a24 include methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group and hexyl group. and preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group.
Examples of the alkyl group having a halogen atom in R ^a18 , R ^a19 , R ^a20 and R ^a24 include trifluoromethyl group, perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, perfluorobutyl group, perfluorosec-butyl group, perfluorotert group. -butyl group, perfluoropentyl group, perfluorohexyl group, trichloromethyl group, tribromomethyl group, triiodomethyl group, etc.
Examples of the alkanediyl group in L ^a8 and L ^a9 include methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5 -diyl group, hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1, Examples include 4-diyl group and 2-methylbutane-1,4-diyl group.
In formulas (a3-1) to (a3-3), L ^a4 to L ^a6 are each independently preferably -O- or *-O-(CH ₂ ) _k3 -CO-O-, k3 is an integer of 1 to 4, more preferably -O- and *-O-CH ₂ -CO-O-, even more preferably an oxygen atom.
R ^a18 to R ^a21 are preferably methyl groups.
R ^a22 and R ^a23 are each independently preferably a carboxy group, a cyano group or a methyl group.
p1, q1 and r1 are each independently preferably an integer of 0 to 2, more preferably 0 or 1.
In formula (a3-4), R ^a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. It is.
R ^a25 is preferably a carboxy group, a cyano group or a methyl group.
L ^a7 is preferably -O- or *-O-L ^a8 -CO-O-, more preferably -O-, -O-CH ₂ -CO-O- or -O-C ₂ H ₄ - It is CO-O-.
w1 is preferably an integer of 0 to 2, more preferably 0 or 1.
In particular, formula (a3-4) is preferably formula (a3-4)'.

(In the formula, R ^a24 and L ^a7 represent the same meanings as above.)

As the structural unit (a3), structures derived from monomers described in JP-A No. 2010-204646, monomers described in JP-A No. 2000-122294, and monomers described in JP-A No. 2012-41274 can be used. Units are listed. As the structural unit (a3), formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2), formula (a3-3- 1), a structural unit represented by formula (a3-3-2) and any one of formulas (a3-4-1) to formula (a3-4-12), and in the structural unit, formula (a3-1 ) ~ Structural units in which the methyl groups corresponding to R ^a18 , R ^a19 , R ^a20 and R ^a24 in formula (a3-4) are replaced with hydrogen atoms are preferred.

When the resin (A) etc. contains the structural unit (a3), the total content thereof is 1 mol% or more, preferably 3 mol% or more, based on the total structural units of the resin (A) etc. , more preferably 5 mol% or more, still more preferably 10 mol% or more. Further, it may be 70 mol% or less, preferably 65 mol% or less, and more preferably 60 mol% or less. Specifically, it is 1 to 70 mol%, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, still more preferably 5 to 65 mol%, and even more preferably The amount is 5 to 60 mol%, and even more preferably 10 to 60 mol%.
In addition, the content of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is calculated based on the total structural units of the resin (A), etc. On the other hand, it is preferably 1 mol% or more, more preferably 3 mol% or more, and still more preferably 5 mol% or more. Moreover, it is preferably 60 mol% or less, more preferably 55 mol% or less, and still more preferably 50 mol% or less. Specifically, it is preferably 1 to 60 mol%, more preferably 3 to 60 mol%, even more preferably 3 to 55 mol%, even more preferably 5 to 55 mol%, and even more preferably 5 to 50 mol%. , 10 to 50 mol% is even more preferred.

［式（ａ４）中、
Ｒ⁴¹は、水素原子又はメチル基を表す。
Ｒ⁴²は、炭素数１～２４のハロゲン原子を有する飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。］
Ｒ⁴²で表される飽和炭化水素基は、鎖式飽和炭化水素基及び単環又は多環の脂環式飽和炭化水素基、並びに、これらを組み合わせることにより形成される基等が挙げられる。 <Structural unit (a4)>
Examples of the structural unit (a4) include the following structural units.

[In formula (a4),
R ⁴¹ represents a hydrogen atom or a methyl group.
R ⁴² represents a saturated hydrocarbon group having a halogen atom having 1 to 24 carbon atoms, and -CH ₂ - contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. ]
Examples of the saturated hydrocarbon group represented by R ⁴² include a chain saturated hydrocarbon group, a monocyclic or polycyclic alicyclic saturated hydrocarbon group, and a group formed by combining these.

組み合わせにより形成される基としては、１以上のアルキル基又は１以上のアルカンジイル基と、１以上の脂環式飽和炭化水素基とを組み合わせることにより形成される基が挙げられ、－アルカンジイル基－脂環式飽和炭化水素基、－脂環式飽和炭化水素基－アルキル基、－アルカンジイル基－脂環式飽和炭化水素基－アルキル基等が挙げられる。 Examples of chain saturated hydrocarbon groups include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group, and octadecyl group. can be mentioned.
Examples of monocyclic or polycyclic alicyclic saturated hydrocarbon groups include cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, and cyclooctyl group; decahydronaphthyl group, adamantyl group, norbornyl group, and the following. Examples include polycyclic alicyclic saturated hydrocarbon groups such as groups (* represents a bonding site).

Examples of groups formed by a combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups and one or more alicyclic saturated hydrocarbon groups, and -alkanediyl groups -Alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, -alkanediyl group-alicyclic saturated hydrocarbon group, and the like.

［式（ａ４－０）中、
Ｒ⁵⁴は、水素原子又はメチル基を表す。
Ｌ^4ａは、単結合又は炭素数１～４のアルカンジイル基を表す。
Ｌ^3ａは、炭素数１～８のペルフルオロアルカンジイル基又は炭素数３～１２のペルフルオロシクロアルカンジイル基を表す。
Ｒ⁶⁴は、水素原子又はフッ素原子を表す。］ The structural unit (a4) is preferably a structural unit having a fluorine atom, and includes a structural unit represented by formula (a4-0), a structural unit represented by formula (a4-1), and a structural unit having a fluorine atom. -4) is mentioned.

[In formula (a4-0),
R ⁵⁴ represents a hydrogen atom or a methyl group.
L ^4a represents a single bond or an alkanediyl group having 1 to 4 carbon atoms.
L ^3a represents a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms.
R ⁶⁴ represents a hydrogen atom or a fluorine atom. ]

Examples of the alkanediyl group in L ^4a include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, ethane-1,1-diyl group, Branched alkanediyl groups such as propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group and 2-methylpropane-1,2-diyl group are mentioned. It will be done.

Examples of the perfluoroalkanediyl group in L ^3a include difluoromethylene group, perfluoroethylene group, perfluoroethylfluoromethylene group, perfluoropropane-1,3-diyl group, perfluoropropane-1,2-diyl group, perfluoropropane-2,2 -diyl group, perfluorobutane-1,4-diyl group, perfluorobutane-2,2-diyl group, perfluorobutane-1,2-diyl group, perfluoropentane-1,5-diyl group, perfluoropentane-2,2 -diyl group, perfluoropentane-3,3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7 -diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2 -diyl group, perfluorooctane-3,3-diyl group, perfluorooctane-4,4-diyl group, and the like.
Examples of the perfluorocycloalkanediyl group for L ^3a include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, a perfluoroadamantanediyl group, and the like.

L ^4a is preferably a single bond, a methylene group or an ethylene group, more preferably a single bond or a methylene group.
L ^3a is preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

Examples of the structural unit (a4-0) include the structural units shown below and structural units in which the methyl group corresponding to R ⁵⁴ in the structural unit (a4-0) in the following structural units is replaced with a hydrogen atom.

［式（ａ４－１）中、
Ｒ^a41は、水素原子又はメチル基を表す。
Ｒ^a42は、置換基を有していてもよい炭素数１～２０の飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
Ａ^a41は、置換基を有していてもよい炭素数１～６のアルカンジイル基又は式（ａ－ｇ１）で表される基を表す。ただし、Ａ^ａ４１及びＲ^ａ４２のうち少なくとも１つは、置換基としてハロゲン原子（好ましくはフッ素原子）を有する。

〔式（ａ－ｇ１）中、
ｓは、０又は１を表す。
Ａ^a42及びＡ^a44は、それぞれ独立に、置換基を有していてもよい炭素数１～５の２価の飽和炭化水素基を表す。
Ａ^a43は、単結合又は置換基を有していてもよい炭素数１～５の２価の飽和炭化水素基を表す。
Ｘ^a41及びＸ^a42は、それぞれ独立に、－Ｏ－、－ＣＯ－、－ＣＯ－Ｏ－又は－Ｏ－ＣＯ－を表す。
ただし、Ａ^a42、Ａ^a43、Ａ^a44、Ｘ^a41及びＸ^a42の炭素数の合計は７以下である。〕
＊は結合部位であり、右側の＊が－Ｏ－ＣＯ－Ｒ^a42との結合部位である。］

[In formula (a4-1),
R ^a41 represents a hydrogen atom or a methyl group.
R ^a42 represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH ₂ - contained in the saturated hydrocarbon group is replaced with -O- or -CO-. It's okay.
A ^a41 represents an alkanediyl group having 1 to 6 carbon atoms which may have a substituent or a group represented by formula (a-g1). However, at least one of A ^a41 and R ^a42 has a halogen atom (preferably a fluorine atom) as a substituent.

[In formula (a-g1),
s represents 0 or 1.
A ^a42 and A ^a44 each independently represent a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may have a substituent.
A ^a43 represents a single bond or a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may have a substituent.
X ^a41 and X ^a42 each independently represent -O-, -CO-, -CO-O- or -O-CO-.
However, the total number of carbon atoms of A ^a42 , A ^a43 , A ^a44 , X ^a41 and X ^a42 is 7 or less. ]
* is a binding site, and the * on the right side is a binding site with -O-CO-R ^a42 . ]

組み合わせにより形成される基としては、１以上のアルキル基又は１以上のアルカンジイル基と、１以上の脂環式飽和炭化水素基とを組み合わせることにより形成される基が挙げられ、－アルカンジイル基－脂環式飽和炭化水素基、－脂環式飽和炭化水素基－アルキル基、－アルカンジイル基－脂環式飽和炭化水素基－アルキル基等が挙げられる。
Ｒ^a42が有する置換基としては、ハロゲン原子及び式（ａ－ｇ３）で表される基からなる群より選択される少なくとも１種が挙げられる。ハロゲン原子としては、フッ素原子、塩素原子、臭素原子及びヨウ素原子が挙げられ、好ましくはフッ素原子である。

［式（ａ－ｇ３）中、
Ｘ^a43は、酸素原子、カルボニル基、＊－Ｏ－ＣＯ－又は＊－ＣＯ－Ｏ－を表す。
Ａ^a45は、ハロゲン原子を有していてもよい炭素数１～１７の飽和炭化水素基を表す。
＊はＲ^a42との結合部位を表す。］
ただし、Ｒ^a42－Ｘ^a43－Ａ^a45において、Ｒ^a42がハロゲン原子を有しない場合は、Ａ^a45は、少なくとも１つのハロゲン原子を有する炭素数１～１７の飽和炭化水素基を表す。 Examples of the saturated hydrocarbon group for R ^a42 include a chain saturated hydrocarbon group, a monocyclic or polycyclic alicyclic saturated hydrocarbon group, and a group formed by combining these.
Examples of chain saturated hydrocarbon groups include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group, and octadecyl group. etc.
Examples of monocyclic or polycyclic alicyclic saturated hydrocarbon groups include cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, and cyclooctyl group; decahydronaphthyl group, adamantyl group, norbornyl group, and the following. Examples include polycyclic alicyclic saturated hydrocarbon groups such as groups (* represents a bonding site).

Examples of groups formed by a combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups and one or more alicyclic saturated hydrocarbon groups, and -alkanediyl groups -Alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, -alkanediyl group-alicyclic saturated hydrocarbon group, and the like.
Examples of the substituent that R ^a42 has include at least one selected from the group consisting of halogen atoms and groups represented by formulas (ag3). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being preferred.

[In formula (a-g3),
X ^a43 represents an oxygen atom, a carbonyl group, *-O-CO- or *-CO-O-.
A ^a45 represents a saturated hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom.
* represents the binding site with R ^a42 . ]
However, in R ^a42 -X ^a43 -A ^a45 , when R ^a42 does not have a halogen atom, A ^a45 represents a saturated hydrocarbon group having 1 to 17 carbon atoms and having at least one halogen atom.

組み合わせにより形成される基としては、１以上のアルキル基又は１以上のアルカンジイル基と、１以上の脂環式炭化水素基とを組み合わせることにより形成される基が挙げられ、－アルカンジイル基－脂環式炭化水素基、－脂環式炭化水素基－アルキル基、－アルカンジイル基－脂環式炭化水素基－アルキル基等が挙げられる。 Saturated hydrocarbon groups in A ^a45 include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group, and octadecyl group. Alkyl groups such as groups;
Monocyclic alicyclic hydrocarbon groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group; and decahydronaphthyl group, adamantyl group, norbornyl group and the following groups (* represents the bonding site) ) and other polycyclic alicyclic hydrocarbon groups.

Examples of the group formed by the combination include a group formed by combining one or more alkyl groups or one or more alkanediyl groups and one or more alicyclic hydrocarbon groups, such as -alkanediyl group- Examples thereof include alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic hydrocarbon group-alkyl group.

R ^a42 is preferably a saturated hydrocarbon group which may have a halogen atom, more preferably a saturated hydrocarbon group having an alkyl group having a halogen atom and/or a group represented by formula (a-g3).
When R ^a42 is a saturated hydrocarbon group having a halogen atom, it is preferably a saturated hydrocarbon group having a fluorine atom, more preferably a perfluoroalkyl group or a perfluorocycloalkyl group, and even more preferably a group having 1 to 1 carbon atoms. 6 perfluoroalkyl group, particularly preferably a perfluoroalkyl group having 1 to 3 carbon atoms. Examples of the perfluoroalkyl group include a perfluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluorobutyl group, a perfluoropentyl group, a perfluorohexyl group, a perfluoroheptyl group, and a perfluorooctyl group. Examples of the perfluorocycloalkyl group include a perfluorocyclohexyl group.
When R ^a42 is a saturated hydrocarbon group having a group represented by formula (a-g3), the total carbon number of R ^a42 including the number of carbon atoms contained in the group represented by formula (a-g3) The number is preferably 15 or less, more preferably 12 or less. When having a group represented by formula (a-g3) as a substituent, the number thereof is preferably one.

［式（ａ－ｇ２）中、
Ａ^a46は、ハロゲン原子を有していてもよい炭素数１～１７の２価の飽和炭化水素基を表す。
Ｘ^a44は、＊＊－Ｏ－ＣＯ－又は＊＊－ＣＯ－Ｏ－を表す（＊＊はＡ^a46との結合部位を表す。）。
Ａ^a47は、ハロゲン原子を有していてもよい炭素数１～１７の飽和炭化水素基を表す。
ただし、Ａ^a46、Ａ^a47及びＸ^a44の炭素数の合計は１８以下であり、Ａ^a46及びＡ^a47のうち、少なくとも一方は、少なくとも１つのハロゲン原子を有する。
＊はカルボニル基との結合部位を表す。］
Ａ^a46の飽和炭化水素基の炭素数は１～６が好ましく、１～３がより好ましい。
Ａ^a47の飽和炭化水素基の炭素数は４～１５が好ましく、５～１２がより好ましく、Ａ^a47は、シクロヘキシル基又はアダマンチル基がさらに好ましい。 When R ^a42 is a saturated hydrocarbon group having a group represented by formula (a-g3), R ^a42 is more preferably a group represented by formula (a-g2).

[In formula (a-g2),
A ^a46 represents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom.
X ^a44 represents **-O-CO- or **-CO-O- (** represents the binding site with A ^a46 ).
A ^a47 represents a saturated hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom.
However, the total number of carbon atoms of A ^a46 , A ^a47 and X ^a44 is 18 or less, and at least one of A ^a46 and A ^a47 has at least one halogen atom.
* represents a bonding site with a carbonyl group. ]
The saturated hydrocarbon group of A ^a46 preferably has 1 to 6 carbon atoms, more preferably 1 to 3 carbon atoms.
The number of carbon atoms in the saturated hydrocarbon group of A ^a47 is preferably 4 to 15, more preferably 5 to 12, and A ⁴⁷ is more preferably a cyclohexyl group or an adamantyl group.

Ａ^a41におけるアルカンジイル基としては、メチレン基、エチレン基、プロパン－１，３－ジイル基、ブタン－１，４－ジイル基、ペンタン－１，５－ジイル基、ヘキサン－１，６－ジイル基等の直鎖状アルカンジイル基；プロパン－１，２－ジイル基、ブタン－１，３－ジイル基、２－メチルプロパン－１，２－ジイル基、１－メチルブタン－１，４－ジイル基、２－メチルブタン－１，４－ジイル基等の分岐状アルカンジイル基が挙げられる。
Ａ^a41の表すアルカンジイル基における置換基としては、ヒドロキシ基及び炭素数１～６のアルコキシ基等が挙げられる。
Ａ^a41は、好ましくは炭素数１～４のアルカンジイル基であり、より好ましくは炭素数２～４のアルカンジイル基であり、さらに好ましくはエチレン基である。 A preferable structure of the group represented by formula (a-g2) is the following structure (* is a bonding site with a carbonyl group).

As the alkanediyl group in A ^a41 , methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group Linear alkanediyl groups such as; propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4-diyl group, Examples include branched alkanediyl groups such as 2-methylbutane-1,4-diyl group.
Examples of the substituent on the alkanediyl group represented by A ^a41 include a hydroxy group and an alkoxy group having 1 to 6 carbon atoms.
A ^a41 is preferably an alkanediyl group having 1 to 4 carbon atoms, more preferably an alkanediyl group having 2 to 4 carbon atoms, and even more preferably an ethylene group.

The divalent saturated hydrocarbon groups represented by A ^a42 , A ^a43 and A ^a44 in the group represented by formula (a-g1) include linear or branched alkanediyl groups and monocyclic or polycyclic divalent hydrocarbon groups. Examples thereof include an alicyclic saturated hydrocarbon group, and a divalent saturated hydrocarbon group formed by combining an alkanediyl group and a divalent alicyclic saturated hydrocarbon group. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, 1-methylpropane-1,3-diyl group, Examples include 2-methylpropane-1,3-diyl group and 2-methylpropane-1,2-diyl group.
Examples of the substituent for the divalent saturated hydrocarbon group represented by A ^a42 , A ^a43 and A ^a44 include a hydroxy group and an alkoxy group having 1 to 6 carbon atoms.
Preferably, s is 0.

Examples of the group represented by formula (a-g1) in which X ^a42 is -O-, -CO-, -CO-O- or -O-CO- include the following groups. In the following examples, * and ** each represent a binding site, and ** is a binding site with -O-CO-R ^a42 .

As the structural unit represented by formula (a4-1), the methyl group corresponding to R ^a41 in the structural unit shown below and the structural unit represented by formula (a4-1) in the following structural unit is a hydrogen atom. Examples include substituted structural units.

［式（ａ４－２）中、
Ｒ^f5は、水素原子又はメチル基を表す。
Ｌ⁴⁴は、炭素数１～６のアルカンジイル基を表し、該アルカンジイル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
Ｒ^f6は、炭素数１～２０のフッ素原子を有する飽和炭化水素基を表す。
ただし、Ｌ⁴⁴及びＲ^f6の合計炭素数の上限は２１である。］ Examples of the structural unit represented by formula (a4-1) include the structural unit represented by formula (a4-2) and the structural unit represented by formula (a4-3).

[In formula (a4-2),
R ^f5 represents a hydrogen atom or a methyl group.
L ⁴⁴ represents an alkanediyl group having 1 to 6 carbon atoms, and -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-.
R ^f6 represents a saturated hydrocarbon group having 1 to 20 carbon atoms and having a fluorine atom.
However, the upper limit of the total number of carbon atoms in L ⁴⁴ and R ^f6 is 21. ]

Examples of the alkanediyl group having 1 to 6 carbon atoms for L ⁴⁴ include the same groups as exemplified for A ^a41 .
Examples of the saturated hydrocarbon group for R ^f6 include the same groups as exemplified for R ⁴² .
The alkanediyl group in L ⁴⁴ is preferably an alkanediyl group having 2 to 4 carbon atoms, and more preferably an ethylene group.

Examples of the structural unit represented by formula (a4-2) include structural units represented by formulas (a4-1-1) to (a4-1-11), respectively. A structural unit in which the methyl group corresponding to R ^f5 in structural unit (a4-2) is replaced with a hydrogen atom is also included as a structural unit represented by formula (a4-2).

［式（ａ４－３）中、
Ｒ^f7は、水素原子又はメチル基を表す。
Ｌ⁵は、炭素数１～６のアルカンジイル基を表す。
Ａ^f13は、フッ素原子を有していてもよい炭素数１～１８の２価の飽和炭化水素基を表す。
Ｘ^f12は、＊－Ｏ－ＣＯ－又は＊－ＣＯ－Ｏ－を表す（＊はＡ^f13との結合部位を表す。）。
Ａ^f14は、フッ素原子を有していてもよい炭素数１～１７の飽和炭化水素基を表す。
但し、Ａ^f13及びＡ^f14の少なくとも１つは、フッ素原子を有し、Ｌ⁵、Ａ^f13及びＡ^f14の合計炭素数の上限は２０である。］

[In formula (a4-3),
R ^f7 represents a hydrogen atom or a methyl group.
L ⁵ represents an alkanediyl group having 1 to 6 carbon atoms.
A ^f13 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms which may have a fluorine atom.
X ^f12 represents *-O-CO- or *-CO-O- (* represents a binding site with A ^f13 ).
A ^f14 represents a saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom.
However, at least one of A ^f13 and A ^f14 has a fluorine atom, and the upper limit of the total number of carbon atoms in L ⁵ , A ^f13 and A ^f14 is 20. ]

Examples of the alkanediyl group for L ⁵ include the same groups as exemplified for the alkanediyl group for A ^a41 .

The divalent saturated hydrocarbon group which may have a fluorine atom in A ^f13 is preferably a divalent chain saturated hydrocarbon group which may have a fluorine atom and a divalent saturated hydrocarbon group which may have a fluorine atom. A divalent alicyclic saturated hydrocarbon group is preferable, and a perfluoroalkanediyl group is more preferable.
Examples of the divalent chain saturated hydrocarbon group which may have a fluorine atom include alkanediyl groups such as methylene group, ethylene group, propanediyl group, butanediyl group and pentanediyl group; difluoromethylene group, perfluoroethylene group, Examples include perfluoroalkanediyl groups such as perfluoropropanediyl group, perfluorobutanediyl group, and perfluoropentanediyl group.
The divalent alicyclic saturated hydrocarbon group which may have a fluorine atom may be either monocyclic or polycyclic. Examples of the monocyclic group include a cyclohexanediyl group and a perfluorocyclohexanediyl group. Examples of the polycyclic group include an adamantanediyl group, a norbornanediyl group, and a perfluoroadamantanediyl group.

Examples of the saturated hydrocarbon group of A ^f14 and the saturated hydrocarbon group which may have a fluorine atom include the same groups as those exemplified for R ^a42 . Among them, trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, Fluorination of 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, heptyl group, perfluoroheptyl group, octyl group, perfluorooctyl group, etc. Alkyl group, cyclopropylmethyl group, cyclopropyl group, cyclobutylmethyl group, cyclopentyl group, cyclohexyl group, perfluorocyclohexyl group, adamantyl group, adamantylmethyl group, adamantyldimethyl group, norbornyl group, norbornylmethyl group, perfluoroadamantyl group , perfluoroadamantylmethyl group, etc. are preferred.

In formula (a4-3), L ⁵ is preferably an ethylene group.
The divalent saturated hydrocarbon group of A ^f13 is preferably a group containing a divalent chain-type saturated hydrocarbon group having 1 to 6 carbon atoms and a divalent alicyclic saturated hydrocarbon group having 3 to 12 carbon atoms, A divalent chain-type saturated hydrocarbon group having 2 to 3 carbon atoms is more preferred.
The saturated hydrocarbon group of A ^f14 is preferably a group containing a chain saturated hydrocarbon group having 3 to 12 carbon atoms and an alicyclic saturated hydrocarbon group having 3 to 12 carbon atoms, and a chain saturated hydrocarbon group having 3 to 10 carbon atoms. More preferred are groups containing a hydrocarbon group and an alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms. Among these, A ^f14 is preferably a group containing an alicyclic saturated hydrocarbon group having 3 to 12 carbon atoms, and more preferably a cyclopropylmethyl group, a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group. .

Examples of the structural unit represented by formula (a4-3) include structural units represented by formulas (a4-1'-1) to (a4-1'-11), respectively. A structural unit in which the methyl group corresponding to R ^f7 in structural unit (a4-3) is replaced with a hydrogen atom is also included as a structural unit represented by formula (a4-3).

［式（ａ４－４）中、
Ｒ^f21は、水素原子又はメチル基を表す。
Ａ^f21は、－（ＣＨ₂）_j1－、－（ＣＨ₂）_j2－Ｏ－（ＣＨ₂）_j3－又は－（ＣＨ₂）_j4－ＣＯ－Ｏ－（ＣＨ₂）_j5－を表す。
ｊ１～ｊ５は、それぞれ独立に、１～６のいずれかの整数を表す。
Ｒ^f22は、フッ素原子を有する炭素数１～１０の飽和炭化水素基を表す。］ The structural unit (a4) also includes a structural unit represented by formula (a4-4).

[In formula (a4-4),
R ^f21 represents a hydrogen atom or a methyl group.
A ^f21 represents -(CH ₂ ) _j1 -, -(CH ₂ ) _j2 -O-(CH ₂ ) _j3 - or -(CH ₂ ) _j4 -CO-O-(CH ₂ ) _j5 -.
j1 to j5 each independently represent an integer of 1 to 6.
R ^f22 represents a saturated hydrocarbon group having 1 to 10 carbon atoms and having a fluorine atom. ]

Examples of the saturated hydrocarbon group for R ^f22 include those similar to the saturated hydrocarbon group represented by R ^a42 . R ^f22 is preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom or an alicyclic saturated hydrocarbon group having 1 to 10 carbon atoms having a fluorine atom; More preferred is an alkyl group having 1 to 6 carbon atoms and having a fluorine atom.

In formula (a4-4), A ^f21 is preferably -(CH ₂ ) _j1 -, more preferably an ethylene group or a methylene group, and even more preferably a methylene group.

As the structural unit represented by formula (a4-4), for example, in the following structural units and the structural unit represented by the following formula, the methyl group corresponding to R ^f21 in structural unit (a4-4) is hydrogen. Structural units that are replaced by atoms are mentioned.

When the resin (A) etc. contains the structural unit (a4), its content is preferably 1 to 20 mol%, more preferably 2 to 15 mol%, based on the total structural units of the resin (A) etc. , 3 to 10 mol% is more preferable.

［式（ａ５－１）中、
Ｒ⁵¹は、水素原子又はメチル基を表す。
Ｒ⁵²は、炭素数３～１８の脂環式炭化水素基を表し、該脂環式炭化水素基に含まれる水素原子は炭素数１～８の脂肪族炭化水素基で置換されていてもよい。
Ｌ⁵⁵は、単結合又は炭素数１～１８の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。］ <Structural unit (a5)>
Examples of the non-eliminating hydrocarbon group possessed by the structural unit (a5) include groups having a linear, branched or cyclic hydrocarbon group. Among these, the structural unit (a5) is preferably a group having an alicyclic hydrocarbon group.
Examples of the structural unit (a5) include a structural unit represented by formula (a5-1).

[In formula (a5-1),
R ⁵¹ represents a hydrogen atom or a methyl group.
R ⁵² represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. .
L ⁵⁵ represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH ₂ - contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. . ]

The alicyclic hydrocarbon group for R ⁵² may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group and a norbornyl group.
Examples of aliphatic hydrocarbon groups having 1 to 8 carbon atoms include methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group, and - Alkyl groups such as ethylhexyl group.
Examples of the alicyclic hydrocarbon group having a substituent include a 3-methyladamantyl group.
R ⁵² is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, more preferably an adamantyl group, norbornyl group or cyclohexyl group.

Examples of the divalent saturated hydrocarbon group in L ⁵⁵ include a divalent chain saturated hydrocarbon group and a divalent alicyclic saturated hydrocarbon group, and preferably a divalent chain saturated hydrocarbon group. .
Examples of the divalent chain saturated hydrocarbon group include alkanediyl groups such as methylene group, ethylene group, propanediyl group, butanediyl group, and pentanediyl group.
The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic saturated hydrocarbon group include cycloalkanediyl groups such as cyclopentanediyl group and cyclohexanediyl group. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include an adamantanediyl group and a norbornanediyl group.

［式（Ｌ１－１）中、
Ｘ^x1は、＊－Ｏ－ＣＯ－又は＊－ＣＯ－Ｏ－を表す（＊はＬ^x1との結合部位を表す。）。
Ｌ^x1は、炭素数１～１６の２価の脂肪族飽和炭化水素基を表す。
Ｌ^x2は、単結合又は炭素数１～１５の２価の脂肪族飽和炭化水素基を表す。
ただし、Ｌ^x1及びＬ^x2の合計炭素数は、１６以下である。
式（Ｌ１－２）中、
Ｌ^x3は、炭素数１～１７の２価の脂肪族飽和炭化水素基を表す。
Ｌ^x4は、単結合又は炭素数１～１６の２価の脂肪族飽和炭化水素基を表す。
ただし、Ｌ^x3及びＬ^x4の合計炭素数は、１７以下である。
式（Ｌ１－３）中、
Ｌ^x5は、炭素数１～１５の２価の脂肪族飽和炭化水素基を表す。
Ｌ^x6及びＬ^x7は、それぞれ独立に、単結合又は炭素数１～１４の２価の脂肪族飽和炭化水素基を表す。
ただし、Ｌ^x5、Ｌ^x6及びＬ^x7の合計炭素数は、１５以下である。
式（Ｌ１－４）中、
Ｌ^x8及びＬ^x9は、単結合又は炭素数１～１２の２価の脂肪族飽和炭化水素基を表す。
Ｗ^x1は、炭素数３～１５の２価の脂環式飽和炭化水素基を表す。
ただし、Ｌ^x8、Ｌ^x9及びＷ^x1の合計炭素数は、１５以下である。］ Examples of groups in which -CH ₂ - contained in the divalent saturated hydrocarbon group represented by L ⁵⁵ are replaced with -O- or -CO- include formulas (L1-1) to (L1-4). The groups represented are exemplified. In the following formula, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom.

[In formula (L1-1),
X ^x1 represents *-O-CO- or *-CO-O- (* represents a binding site with L ^x1 ).
L ^x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms.
L ^x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms.
However, the total carbon number of L ^x1 and L ^x2 is 16 or less.
In formula (L1-2),
L ^x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms.
L ^x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms.
However, the total carbon number of L ^x3 and L ^x4 is 17 or less.
In formula (L1-3),
L ^x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms.
L ^x6 and L ^x7 each independently represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms.
However, the total carbon number of L ^x5 , L ^x6 and L ^x7 is 15 or less.
In formula (L1-4),
L ^x8 and L ^x9 represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms.
W ^x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms.
However, the total carbon number of L ^x8 , L ^x9 and W ^x1 is 15 or less. ]

L ^x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group.
L ^x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond.
L ^x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group.
L ^x6 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group.
L ^x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^x8 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group.
L ^x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group.
W ^x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

式（Ｌ１－２）で表される基としては、例えば、以下に示す２価の基が挙げられる。

式（Ｌ１－３）で表される基としては、例えば、以下に示す２価の基が挙げられる。

式（Ｌ１－４）で表される基としては、例えば、以下に示す２価の基が挙げられる。

Ｌ⁵⁵は、好ましくは、単結合又は式（Ｌ１－１）で表される基である。 Examples of the group represented by formula (L1-1) include the divalent groups shown below.

Examples of the group represented by formula (L1-2) include the divalent groups shown below.

Examples of the group represented by formula (L1-3) include the divalent groups shown below.

Examples of the group represented by formula (L1-4) include the divalent groups shown below.

L ⁵⁵ is preferably a single bond or a group represented by formula (L1-1).

樹脂（Ａ）等が、構造単位（ａ５）を含む場合、その含有率は、樹脂（Ａ）等の全構造単位に対して、１～３０モル％が好ましく、２～２０モル％がより好ましく、３～１５モル％がさらに好ましい。 Examples of the structural unit (a5-1) include the structural units shown below and structural units in which the methyl group corresponding to R ⁵¹ in the structural unit (a5-1) in the following structural units is replaced with a hydrogen atom.

When the resin (A) etc. contains the structural unit (a5), its content is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, based on the total structural units of the resin (A) etc. , 3 to 15 mol% is more preferable.

<Structural unit (a6)>
The structural unit (a6) is a structural unit having an -SO ₂ - group, and preferably has an -SO ₂ - group in its side chain.
The structural unit having the -SO ₂ - group may have a linear structure having the -SO ₂ - group, or a branched structure having the -SO ₂ - group, It may have a cyclic structure (monocyclic or polycyclic structure) having a -SO ₂ - group. Preferably, it is a structural unit having a cyclic structure having a -SO ₂ - group, and more preferably a structural unit having a cyclic structure (sultone ring) containing -SO ₂ -O-.

Examples of the sultone ring include rings represented by the following formulas (T ¹ -1), (T ¹ -2), (T ¹ -3) and (T ¹ -4). The binding site can be at any position. Although the sultone ring may be monocyclic, it is preferably polycyclic. The polycyclic sultone ring means a bridged ring containing -SO ₂ -O- as an atomic group constituting the ring, and is represented by formula (T ¹ -1) and formula (T ¹ -2). Examples include rings. The sultone ring, like the ring represented by formula (T ¹ -2), may further contain a heteroatom in addition to -SO ₂ -O- as an atomic group constituting the ring. Examples of the heteroatom include an oxygen atom, a sulfur atom, or a nitrogen atom, and preferably an oxygen atom.

The sultone ring may have a substituent, and examples of the substituent include an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, and a cyano group having 1 carbon atom. Examples include alkoxy groups having ~12 carbon atoms, aryl groups having 6 to 12 carbon atoms, aralkyl groups having 7 to 12 carbon atoms, glycidyloxy groups, alkoxycarbonyl groups having 2 to 12 carbon atoms, and alkylcarbonyl groups having 2 to 4 carbon atoms. It will be done.

Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Examples of the alkyl group include a methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, octyl group, and decyl group, preferably an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group. It is.
Examples of the alkyl group having a halogen atom include trifluoromethyl group, perfluoroethyl group, perfluoropropyl group, perfluoroisopropyl group, perfluorobutyl group, perfluorosec-butyl group, perfluorotert-butyl group, perfluoropentyl group, perfluorohexyl group, Examples include trichloromethyl group, tribromomethyl group and triiodomethyl group, preferably trifluoromethyl group.
Examples of the alkyl group having a hydroxy group include hydroxyalkyl groups such as a hydroxymethyl group and a 2-hydroxyethyl group.
Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group and dodecyloxy group.
Aryl groups include phenyl group, naphthyl group, anthryl group, p-methylphenyl group, p-tert-butylphenyl group, p-adamantylphenyl group, tolyl group, xylyl group, cumyl group, mesityl group, biphenyl group, phenanthryl group. 2,6-diethylphenyl group and 2-methyl-6-ethylphenyl group.
Examples of the aralkyl group include benzyl group, phenethyl group, phenylpropyl group, naphthylmethyl group and naphthylethyl group.
Examples of the alkoxycarbonyl group include groups in which an alkoxy group and a carbonyl group are bonded, such as a methoxycarbonyl group and an ethoxycarbonyl group, preferably an alkoxycarbonyl group having 6 or less carbon atoms, and more preferably a methoxycarbonyl group. Can be mentioned.
Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group.

From the viewpoint of easy production of a monomer leading to the structural unit (a6), a sultone ring having no substituents is preferred.

［式（Ｔ１’）中、
Ｘ^１１は、酸素原子、硫黄原子又はメチレン基を表す。
Ｒ^４１は、ハロゲン原子もしくはヒドロキシ基を有していてもよい炭素数１～１２のアルキル基、ハロゲン原子、ヒドロキシ基、シアノ基、炭素数１～１２のアルコキシ基、炭素数６～１２のアリール基、炭素数７～１２のアラルキル基、グリシジルオキシ基、炭素数２～１２のアルコキシカルボニル基又は炭素数２～４のアルキルカルボニル基を表す。
ｍａは、０～９のいずれかの整数を表す。ｍａが２以上のとき、複数のＲ^４１は同一であっても異なってもよい。
結合部位は任意の位置である。］
Ｘ^１１は、好ましくは酸素原子又はメチレン基であり、より好ましくはメチレン基である。
Ｒ^４１としては、スルトン環の置換基と同様のものが挙げられ、ハロゲン原子又はヒドロキシ基を有していてもよい炭素数１～１２のアルキル基が好ましい。
式（Ｔ１’）におけるｍａは、好ましくは０又は１であり、より好ましくは０である。 As the sultone ring, a ring represented by the following formula (T1') is preferable.

[In formula (T1'),
X ¹¹ represents an oxygen atom, a sulfur atom, or a methylene group.
R ⁴¹ is an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms; represents an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms.
ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R ^41s may be the same or different.
The binding site can be at any position. ]
X ¹¹ is preferably an oxygen atom or a methylene group, more preferably a methylene group.
Examples of R ⁴¹ include the same substituents as those of the sultone ring, and preferably an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group.
ma in formula (T1') is preferably 0 or 1, more preferably 0.

Examples of the ring represented by formula (T1') include the following rings. The binding site can be at any position. Among these, those having a binding site at the 1st or 3rd position are preferred.

The structural unit having the -SO ₂ - group preferably further has a group derived from a polymerizable group. Examples of the polymerizable group include a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, a methacryloylthio group, and the like.
Among these, the monomer leading to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer.

［式（ａ６－０）中、
Ｒ^ｘは、ハロゲン原子を有してもよい炭素数１～６のアルキル基、水素原子又はハロゲン原子を表す。
Ａ^ｘｘは、酸素原子、－Ｎ（Ｒ^ｃ）－又は硫黄原子を表す。
Ａ^ｘは、単結合又は炭素数１～１８の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－ＣＯ－又は－Ｎ（Ｒ^ｄ）－に置き換わっていてもよい。
Ｘ^１１、Ｒ^４１及びｍａは、上記と同じ意味を表す。
Ｒ^ｃ及びＲ^ｄは、互いに独立に、水素原子又は炭素数１～６のアルキル基を表す。］ Structural unit (a6) is preferably a structural unit represented by formula (a6-0).

[In formula (a6-0),
R ^x represents an alkyl group having 1 to 6 carbon atoms that may have a halogen atom, a hydrogen atom, or a halogen atom.
A ^xx represents an oxygen atom, -N(R ^c )- or a sulfur atom.
A ^x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH ₂ - contained in the saturated hydrocarbon group is -O-, -CO- or -N(R ^d )- may be replaced.
X ¹¹ , R ⁴¹ and ma represent the same meanings as above.
R ^c and R ^d each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. ]

Examples of the halogen atom for R ^x include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Examples of the alkyl group for R ^x include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, n-pentyl group, and n-hexyl group. preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group.
^R , perfluorohexyl group, trichloromethyl group, tribromomethyl group, and triiodomethyl group.
R ^x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

Examples of the divalent saturated hydrocarbon group of A ^x include a linear alkanediyl group, a branched alkanediyl group, and a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group. A combination of two or more of these groups may also be used.
Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1 ,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group , dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, heptadecane-1, Straight chain alkanediyl groups such as 17-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group and propane-2,2-diyl group;
Butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4- Branched alkanediyl groups such as diyl groups;
A monocyclic cycloalkanediyl group such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, or a cyclooctane-1,5-diyl group. alicyclic saturated hydrocarbon group;
Polycyclic divalent alicyclic saturated hydrocarbons such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group Examples include groups.
The bonding position of A ^x to the sultone ring can be any position, but the 1st position is preferable.

Examples of the structural unit (a6-0) include the following structural units.

Among them, structural units represented by formula (a6-1), formula (a6-2), formula (a6-6), formula (a6-7), formula (a6-8) and formula (a6-12) is preferred, and structural units represented by formula (a6-1), formula (a6-2), formula (a6-7) and (a6-8) are more preferred.
When the resin (A) etc. contains the structural unit (a6), its content is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, based on the total structural units of the resin (A) etc. , 3 to 30 mol% is more preferable.

The resin (A) and the like are preferably resins containing the structural unit (a1). In particular, the resin (Ap) is more preferably a resin consisting of a structural unit (IP), a structural unit (a1), and a structural unit (s), that is, a salt (I), a monomer (a1), and a monomer (s). It is a copolymer with The resin (A) not containing the structural unit (IP) is preferably a resin consisting of the structural unit (a1) and the structural unit (s), that is, a copolymer of the monomer (a1) and the monomer (s). be.
The structural unit (a1) is preferably a group consisting of the structural unit (a1-0), the structural unit (a1-1) and the structural unit (a1-2) (preferably the structural unit having a cyclohexyl group or a cyclopentyl group). At least one kind selected from, more preferably at least two kinds, still more preferably at least two kinds selected from the group consisting of structural unit (a1-1) and structural unit (a1-2).
The structural unit (s) is preferably at least one type selected from the group consisting of the structural unit (a2) and the structural unit (a3). Structural unit (a2) is preferably structural unit (a2-1) or structural unit (a2-A). Structural unit (a3) is preferably a group consisting of a structural unit represented by formula (a3-1), a structural unit represented by formula (a3-2), and a structural unit represented by formula (a3-4). At least one type selected from

Each structural unit constituting the resin (A) etc. may be used alone or in combination of two or more, and can be produced by a known polymerization method (e.g. radical polymerization method) using a monomer that leads to these structural units. can do. The content of each structural unit contained in the resin (A) etc. can be adjusted by adjusting the amount of monomer used for polymerization.
The weight average molecular weight of the resin (A) and the resin (Ap) is preferably 2,000 or more (more preferably 2,500 or more, even more preferably 3,000 or more) and 50,000 or less (more preferably 30,000 or more), 000 or less, more preferably 15,000 or less), but oligomers with a weight average molecular weight of less than 2,000 may be included. In this specification, the weight average molecular weight is a value determined by gel permeation chromatography under the conditions described in Examples. Note that the structural unit (IP) may constitute a dimer, a trimer, or a compound having a weight average molecular weight of less than 2,000.

[Acid generator]
The acid generator of the present invention is an acid generator containing a salt (I) or a structural unit (IP). The structural unit (IP) can be contained as a compound or resin (Ap) in which a plurality of structural units are polymerized. In the acid generator, the salt (I) may be used alone or in combination of two or more kinds. A compound or resin containing a structural unit (IP) may be used alone, or two or more types may be used in combination. Further, the acid generator of the present invention only needs to contain at least one of the salt (I) and the structural unit (IP), and may contain both the salt (I) and the structural unit (IP).
The acid generator of the present invention contains, in addition to the salt (I), an acid generator known in the resist field (hereinafter sometimes referred to as "acid generator (B)" or "compound (B)"). Good too. The acid generator (B) will be described later.
When the acid generator contains salt (I) and acid generator (B), the content ratio of salt (I) and acid generator (B) (mass ratio, salt (I): acid generator ( B)) is usually 1:99 to 99:1, preferably 2:98 to 98:2, more preferably 5:95 to 95:5, and even more preferably 10:90 to 90. :10, even more preferably 15:85 to 85:15, particularly preferably 40:60 to 60:40.

[Resist composition]
The resist composition of the present invention contains the acid generator of the present invention. The resist composition of the present invention may contain an acid generator (B) that does not contain the acid generator of the present invention, or may contain a resin other than the resin (Ap). The resist composition of the present invention may contain a resin (Ap) and/or a resin (A) and a salt (I) as an acid generator. The resist composition of the present invention preferably contains a resin containing a structural unit (a1) having an acid-labile group. That is, it contains at least (a) a salt (I) and a resin (A) containing a structural unit (a1) having an acid-labile group;
(b) contains a resin (Ap) containing a structural unit (IP) and a structural unit (a1) having an acid-labile group;
(c) It is preferable to include a resin (Ap) containing a structural unit (IP) and a resin (A) containing a structural unit (a1) having an acid-labile group.
Among these, the resist composition (b) above is preferred. It may contain two or more types of resin (A) and/or resin (Ap). The above (b) and (c) may further contain salt (I).
The resist composition of the present invention preferably further contains a quencher (hereinafter sometimes referred to as "quencher (C)") and/or a solvent (hereinafter sometimes referred to as "solvent (E)"). Moreover, the resist composition of the present invention may further contain resins other than the resin (A) and the like mentioned above.

<Resin other than resin (A) etc.>
The resist composition of the present invention may contain resins other than resin (Ap) and resin (A) in combination. Resins other than the resin (Ap) and the resin (A) include a resin (AX) having the same structural unit as the resin (A) except that it does not contain the structural unit (a1) in the resin (A) described above; Examples include resins containing (a4) and/or structural unit (a5) (but not containing structural unit (IP) and structural unit (a1); hereinafter sometimes referred to as "resin (X)").

Examples of the resin (AX) include resins containing the structural unit (a2), and preferably resins containing the structural unit (a2-A). In the resin (AX), the content of the structural unit (a2-A) is preferably 5 mol% or more, and preferably 10 mol% or more, based on the total of all structural units of the resin (AX). More preferably, it is 15 mol% or more. Moreover, it is preferably 80 mol% or less, and more preferably 70 mol% or less.
Examples of structural units that the resin (X) may further include include structural units (a2), structural units (a3), and structural units derived from other known monomers. Among these, the resin (X) is preferably a resin consisting only of the structural unit (a4) and/or the structural unit (a5), and more preferably a resin consisting only of the structural unit (a4).
When the resin (X) contains a structural unit (a4), the content of the structural unit (a4) in the resin (X) is 20 mol% or more based on the total of all structural units of the resin (X). The content is preferably 30 mol% or more, more preferably 40 mol% or more, and even more preferably 45 mol% or more. Furthermore, the content may be 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, even more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. When the resin (X) contains a structural unit (a5), the content of the structural unit (a5) is 20 mol% or more, and 30 mol% or more, based on the total of all structural units of the resin (X). is preferable, 40 mol% or more is more preferable, and even more preferably 45 mol% or more. Furthermore, the content may be 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, even more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. In addition, when the resin (X) contains the structural unit (a4) and the structural unit (a5), the total content of the structural unit (a4) and the structural unit (a5) is the sum of all the structural units of the resin (X). On the other hand, it is 40 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, and even more preferably 80 mol% or more. Further examples include 100 mol% or less. Specifically, the amount is 40 to 100 mol%, preferably 60 to 100 mol%, more preferably 70 to 100 mol%, and even more preferably 80 to 100 mol%.
Resin (AX) and each structural unit constituting resin (X) may be used alone or in combination of two or more, and monomers that induce these structural units may be used by known polymerization methods (for example, radical polymerization method). The content of each structural unit in resin (AX) and resin (X) can be adjusted by adjusting the amount of monomer used for polymerization.
The weight average molecular weight of resin (AX) and resin (X) is preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less), but the weight average Oligomers with a molecular weight of less than 6,000 may be included. The means for measuring the weight average molecular weight of resin (AX) and resin (X) is the same as in the case of resin (A) and the like.
When the resist composition of the present invention contains resin (AX) or resin (X), the content thereof is preferably 1 to 60 parts by mass, more preferably 1 to 60 parts by mass, based on 100 parts by mass of resin (A), etc. is 1 to 50 parts by weight, more preferably 1 to 40 parts by weight, even more preferably 1 to 30 parts by weight, even more preferably 1 to 8 parts by weight.

The total content of resin (A) and resin (Ap) in the resist composition is preferably 80% by mass or more and 99% by mass or less, and 90% by mass or more and 99% by mass, based on the solid content of the resist composition. It is more preferable that it is below. The content of the resin (Ap) is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. In addition, when a resin other than the resin (A) etc. is included, the total content of the resin (A) etc. and the resin other than the resin (A) etc. is 80% by mass or more based on the solid content of the resist composition. It is preferably 99% by mass or less, and more preferably 90% by mass or more and 99% by mass or less. The solid content of the resist composition and the resin content relative to the solid content can be measured by known analytical means such as liquid chromatography or gas chromatography.

<Acid generator>
The acid generator of the present invention includes an acid generator containing only a salt (I) and/or a structural unit (IP), a salt (I) and/or a structural unit (IP), and a compound (B) known in the field of resists. Any of the acid generators may be used.
The acid generators used in the resist composition of the present invention may be used alone or in combination of two or more.

As the compound (B), either a nonionic compound or an ionic compound may be used. Examples of nonionic compounds include sulfonate esters (for example, 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxyketone, diazonaphthoquinone 4-sulfonate), sulfones (for example, disulfone, ketosulfone, sulfonyldiazomethane), etc. Typical ionic compounds include onium salts containing onium cations (eg, diazonium salts, phosphonium salts, sulfonium salts, and iodonium salts). Examples of the anion of the onium salt include a sulfonic acid anion, a benzenesulfonyl anion, a sulfonylimide anion, a sulfonylmethide anion, and a carboxylic acid anion.

As the compound (B), JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-Sho. 62-153853, JP 63-146029, U.S. Patent No. 3,779,778, U.S. Patent No. 3,849,137, German Patent No. 3914407, European Patent No. 126,712, etc. Compounds that generate acids upon exposure to radiation can be used. Moreover, you may use the compound manufactured by the well-known method. Compound (B) may be used in combination of two or more types.

［式（Ｂ１）中、
Ｑ^ｂ１及びＱ^ｂ２は、それぞれ独立に、水素原子、フッ素原子、炭素数１～６のペルフルオロアルキル基又は炭素数１～６のアルキル基を表す。
Ｌ^ｂ１は、炭素数１～２４の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基で置換されていてもよい。
Ｙは、置換基を有していてもよいメチル基又は置換基を有していてもよい炭素数３～２４の環状炭化水素基を表し、該環状炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。
Ｚ^＋は、有機カチオンを表す。］ Compound (B) is preferably a salt represented by formula (B1) (hereinafter sometimes referred to as "salt (B1)", excluding salt (I)) or a salt represented by formula (B2) (Hereinafter, it may be referred to as "salt (B2)". However, salt (I) is excluded.)

[In formula (B1),
Q ^b1 and Q ^b2 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms.
L ^b1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and -CH ₂ - contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. , the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
Y represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH ₂ - contained in the cyclic hydrocarbon group is , -O-, -S-, -SO ₂ - or -CO-.
Z ⁺ represents an organic cation. ]

Examples of Q ^b1 , Q ^b2 and L ^b1 in formula (B1) include the same examples as Q ^b1 , Q ^b2 and L ^b1 in formula (I).
A cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent represented by Y in formula (B1) (-CH ₂ - contained in the cyclic hydrocarbon group is -O-, -S -, -SO ₂ - or -CO-) include the same examples as Y ^b1 in formula (I).
The alicyclic hydrocarbon group represented by Y is a spiro ring having an oxygen atom such as formulas (Y28) to (Y35), formula (Y39), formula (Y40), formula (Y42), formula (Y43), etc. In some cases it is preferred that the alkanediyl group between two oxygen atoms has one or more fluorine atoms. Moreover, among the alkanediyl groups included in the ketal structure, it is preferable that the methylene group adjacent to the oxygen atom is not substituted with a fluorine atom.

Substituents for the methyl group represented by Y include a halogen atom, a hydroxy group, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, a glycidyloxy group, -( CH ₂ ) _ja -CO-O-R ^b1 group or -(CH ₂ ) _ja -O-CO-R ^b1 group (wherein, R ^b1 is an alkyl group having 1 to 16 carbon atoms, an alkyl group having 3 to 16 carbon atoms, Represents an alicyclic hydrocarbon group, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these. ja represents any integer of 0 to 4. The alkyl group and the alicyclic carbon -CH ₂ - contained in the hydrogen group may be replaced with -O-, -SO ₂ - or -CO-, and -CH 2 - contained in the alkyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group The hydrogen atom may be replaced with a hydroxy group or a fluorine atom).

Y is preferably an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent or an aromatic hydrocarbon group having 6 to 24 carbon atoms which may have a substituent. , more preferably an alicyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent or an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent, and Preferably, it is an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. is a cycloalkyl group having 5 or 6 carbon atoms, a norbornyl group, an adamantyl group, a norbornane lactone group, an adamantane lactone group, a cycloalkyl group having 5 or 6 carbon atoms and a cycloalkyl group having 5 to 8 carbon atoms bonded by spiro. Alicyclic hydrocarbon group, an alicyclic hydrocarbon group in which a norbornyl group and a cycloalkyl group having 5 to 8 carbon atoms are bonded via a spiro, an alicyclic group in which an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are bonded via a spiro bond. The formula is a hydrocarbon group or a phenyl group. Here, the alicyclic hydrocarbon group, the cycloalkyl group, the norbornyl group, the adamantyl group, the norbornane lactone group, the adamantane lactone group, and the phenyl group may each have a substituent. , -CH ₂ - contained in the alicyclic hydrocarbon group, the cycloalkyl group, the norbornyl group and the adamantyl group is replaced with -O-, -S-, -SO ₂ - or -CO-, respectively. You can leave it there.
Specific examples of Y include the following.

Y is, among others, preferably an adamantyl group, a hydroxyadamantyl group, an oxoadamantyl group, a norbornane lactone group, a phenyl group, a group containing these, or a formula (Y42), a formula (Y100) to a formula (Y114), a formula (Y134) - A group represented by the formula (Y139), particularly preferably a hydroxyadamantyl group, an oxoadamantyl group, a group containing these, or a group containing these, or the formula (Y42), the formula (Y100) - the formula (Y114), the formula (Y134) - It is a group represented by formula (Y139).

Anions in the salt represented by formula (B1) include anions represented by formulas (B1-A-1) to (B1-A-85) [hereinafter referred to as "anion (B1-A-85)" according to the formula number. -1)” etc. ] is preferred, and formulas (B1-A-1) to (B1-A-4), formula (B1-A-9), formula (B1-A-10), and formulas (B1-A-24) to (B1-A-24) are preferred. (B1-A-33), formula (B1-A-36) to formula (B1-A-40), formula (B1-A-47) to formula (B1-A-85) Anions are more preferred.

ここでＲ^ｉ２～Ｒ^ｉ７は、互いに独立に、例えば、炭素数１～４のアルキル基、好ましくはメチル基又はエチル基である。Ｒ^ｉ８は、例えば、炭素数１～１２の鎖式炭化水素基、好ましくは炭素数１～４のアルキル基、炭素数５～１２の脂環式炭化水素基又はこれらを組合せることにより形成される基、より好ましくはメチル基、エチル基、シクロヘキシル基又はアダマンチル基である。Ｌ^Ａ４１は、単結合又は炭素数１～４のアルカンジイル基である。Ｑ^ｂ１及びＱ^ｂ２は、上記と同じ意味を表す。
式（Ｂ１）で表される塩におけるアニオンとしては、具体的には、特開２０１０－２０４６４６号公報に記載されたアニオンが挙げられる。

Here, R ⁱ² to R ⁱ⁷ each independently represent, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. R ⁱ⁸ is formed, for example, by a chain hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a combination thereof. and more preferably a methyl group, ethyl group, cyclohexyl group or adamantyl group. L ^A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q ^b1 and Q ^b2 represent the same meanings as above.
Specific examples of the anion in the salt represented by formula (B1) include the anions described in JP-A No. 2010-204646.

Preferred anions in the salt represented by formula (B1) include anions represented by formulas (B1a-1) to (B1a-68), respectively.

［式（Ｂ２）中、
ｍ２１は、１～５のいずれかの整数を表し、ｍ２１が２以上のとき、複数の括弧内の基は互いに同一であっても異なってもよい。
Ｒ²¹は、炭素数３～１８の環状炭化水素基を含む炭素数３～４８の炭化水素基を表し、該環状炭化水素基は、置換基を有してもよく、該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。
Ｒ^2２は、ハロゲン原子又は炭素数１～６のアルキル基を表し、該アルキル基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
ｍ２２は、０～４のいずれかの整数を表し、ｍ２２が２以上のとき、複数のＲ^2２は互いに同一であっても異なってもよい。
Ｚ^＋は、有機カチオンを表す。］

[In formula (B2),
m21 represents any integer from 1 to 5, and when m21 is 2 or more, the groups within the parentheses may be the same or different.
R ²¹ represents a hydrocarbon group having 3 to 48 carbon atoms, including a cyclic hydrocarbon group having 3 to 18 carbon atoms, and the cyclic hydrocarbon group may have a substituent, and the cyclic hydrocarbon group may have a substituent. -CH ₂ - may be replaced with -O-, -S-, -SO ₂ - or -CO-.
R ²² represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH ₂ - contained in the alkyl group may be replaced with -O- or -CO-.
m22 represents any integer from 0 to 4, and when m22 is 2 or more, a plurality of R ^22s may be the same or different.
Z ⁺ represents an organic cation. ]

In formula (B2), the hydrocarbon group containing a cyclic hydrocarbon group in R ²¹ is a cyclic hydrocarbon group such as a monocyclic or polycyclic alicyclic hydrocarbon group and an aromatic hydrocarbon group, or a cyclic hydrocarbon group containing these. A combination of a monocyclic or polycyclic alicyclic hydrocarbon group, a cyclic hydrocarbon group such as an aromatic hydrocarbon group, and a chain hydrocarbon group (alkyl group, alkenyl group, alkynyl group, etc.) is optional. Examples include groups in combination with . The number of carbon atoms in the cyclic hydrocarbon group in R ²¹ is, for example, 3 to 24, preferably 3 to 20, more preferably 3 to 18, even more preferably 3 to 16, and even more preferably 5 to 16. The total carbon number of the hydrocarbon groups including the cyclic hydrocarbon group in R ²¹ is, for example, 3 to 48, preferably 3 to 40, more preferably 3 to 36, even more preferably 3 to 30, and 3 to 24. is even more preferred, 3 to 18 is even more preferred, and 3 to 16 is even more preferred.

より具体的に、脂環式炭化水素基としては、以下に表される基等が挙げられる。＊は結合部位を表す。

脂環式炭化水素基の炭素数は、好ましくは３～２４であり、より好ましくは３～１８であり、さらに好ましくは３～１６であり、さらにより好ましくは５～１６である。
芳香族炭化水素基としては、フェニル基、ナフチル基、ビフェニル基、アントリル基、フェナントリル基、ビナフチル基等のアリール基等が挙げられる。芳香族炭化水素基の炭素数は、好ましくは６～２４であり、より好ましくは６～１８であり、さらに好ましくは６～１４であり、さらにより好ましくは６～１０である。 The alicyclic hydrocarbon group may be monocyclic, polycyclic, or spirocyclic, and may be saturated or unsaturated. Examples of alicyclic hydrocarbon groups include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclononyl group, cyclodecyl group, and cyclododecyl group; Examples include polycyclic cycloalkyl groups such as decahydronaphthyl, norbornyl, and adamantyl groups.
Specifically, examples of the alicyclic hydrocarbon group include the groups shown below. The binding site can be at any position.

More specifically, examples of the alicyclic hydrocarbon group include the groups shown below. * represents a binding site.

The alicyclic hydrocarbon group preferably has 3 to 24 carbon atoms, more preferably 3 to 18 carbon atoms, still more preferably 3 to 16 carbon atoms, and even more preferably 5 to 16 carbon atoms.
Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, and binaphthyl group. The aromatic hydrocarbon group preferably has 6 to 24 carbon atoms, more preferably 6 to 18 carbon atoms, still more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

Examples of alkyl groups include methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, and dodecyl group. Examples include alkyl groups such as groups.
Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group.
Examples of the alkynyl group include ethynyl group, propynyl group, isopropynyl group, butynyl group, isobutynyl group, tert-butynyl group, pentynyl group, hexynyl group, octynyl group, nonynyl group, and the like.
The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 24, more preferably 1 to 18, even more preferably 1 to 12, even more preferably 1 to 8, and even more preferably 1 to 6, even more preferably 1 to 4, even more preferably 1 to 3.

As a combined group,
A group that combines an alicyclic hydrocarbon group and an aromatic hydrocarbon group, a group that combines an alicyclic hydrocarbon group and a chain hydrocarbon group, a group that combines an aromatic hydrocarbon group and a chain hydrocarbon group Examples include a group that combines an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a chain hydrocarbon group. Here, -CH ₂ - contained in the combined group may be replaced with -O-, -S-, -CO- or -SO ₂ -.
In addition, in the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Moreover, any group may be bonded to an oxygen atom. Further, the above-mentioned groups may contain groups having different valences (alkanediyl group, alkanetriyl group, cycloalkanediyl group, cycloalkanetriyl group, etc.).

Specific examples of combined groups include:
Alicyclic hydrocarbon groups - chain hydrocarbon groups - * (included in the chain hydrocarbon group and the alicyclic hydrocarbon group) such as adamantylmethyl group, adamantylethyl group, cyclohexylmethyl group, cyclohexylethyl group, etc. -CH ₂ - may be replaced with -O-, -S-, -CO- or -SO ₂ -),
Chain hydrocarbon group - alicyclic hydrocarbon group - * (-CH ₂ - contained in the chain hydrocarbon group and the alicyclic hydrocarbon group) such as methyladamantyl group, methylcyclohexyl group, dimethylcyclohexyl group, etc. may be replaced with -O-, -S-, -CO- or -SO ₂ -.)
Chain hydrocarbon groups such as tolyl group and xylyl group - aromatic hydrocarbon group -* (-CH ₂ - contained in the chain hydrocarbon group is -O-, -S-, -CO- or - may be replaced with SO ₂ -),
Chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - *(-CH ₂ - contained in the chain hydrocarbon group and the alicyclic hydrocarbon group) such as methylcyclohexylmethyl group , -O-, -S-, -CO- or -SO ₂ -).
Aromatic hydrocarbon group - chain hydrocarbon group - such as benzyl group, phenethyl group -* (-CH ₂ - contained in the chain hydrocarbon group is -O-, -S-, -CO- or - may be replaced with SO ₂ -),
Chain hydrocarbon group such as tolylmethyl group - aromatic hydrocarbon group - chain hydrocarbon group -* (-CH ₂ - contained in the chain hydrocarbon group is -O-, -S-, -CO - or -SO ₂ - may be substituted.),
An aromatic hydrocarbon group such as a phenyladamantyl group - an alicyclic hydrocarbon group -* (-CH ₂ - contained in the alicyclic hydrocarbon group is -O-, -S-, -CO- or - may be replaced with SO ₂ -),
Alicyclic hydrocarbon group - aromatic hydrocarbon group - such as cyclohexylphenyl group, adamantyl phenyl group -* (-CH ₂ - contained in the alicyclic hydrocarbon group is -O-, -S-, - may be replaced with CO- or -SO ₂ -),
Chain hydrocarbon group - alicyclic hydrocarbon group - aromatic hydrocarbon group - * (included in the chain hydrocarbon group and the alicyclic hydrocarbon group) such as methylcyclohexylphenyl group and dimethylcyclohexylphenyl group -CH ₂ - may be replaced with -O-, -S-, -CO- or -SO ₂ -),
Chain hydrocarbon group - aromatic hydrocarbon group - alicyclic hydrocarbon group - * (included in the chain hydrocarbon group and the alicyclic hydrocarbon group) such as methylphenylcyclohexyl group and dimethylphenylcyclohexyl group -CH ₂ - may be replaced with -O-, -S-, -CO- or -SO ₂ -),
Alicyclic hydrocarbon group - chain hydrocarbon group - aromatic hydrocarbon group - * (included in the chain hydrocarbon group and the alicyclic hydrocarbon group) such as cyclohexylmethylphenyl group and cyclohexylethylphenyl group -CH ₂ - may be replaced with -O-, -S-, -CO- or -SO ₂ -),
Aromatic hydrocarbon group - Chain hydrocarbon group - Alicyclic hydrocarbon group - * (included in the chain hydrocarbon group and the alicyclic hydrocarbon group) such as phenylmethylcyclohexyl group and phenylethylcyclohexyl group -CH ₂ - may be replaced with -O-, -S-, -CO- or -SO ₂ -),
Alicyclic hydrocarbon group - aromatic hydrocarbon group - chain hydrocarbon group - * (included in the chain hydrocarbon group and the alicyclic hydrocarbon group) such as cyclohexyl phenylmethyl group, cyclohexyl phenylethyl group, etc. -CH ₂ - may be replaced with -O-, -S-, -CO- or -SO ₂ -),
Aromatic hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - * (included in the chain hydrocarbon group and the alicyclic hydrocarbon group) such as phenylcyclohexylmethyl group and phenylcyclohexylethyl group -CH ₂ - may be replaced with -O-, -S-, -CO- or -SO ₂ -),
etc. Here, * represents a bonding site with an oxygen atom.

より具体的に、脂環式炭化水素基に含まれる－ＣＨ_２－が、－Ｏ－、－Ｓ－、－ＣＯ－又は－ＳＯ_２－で置き換わった基としては、以下に表される基等が挙げられる。＊は結合部位を表す。

When -CH ₂ - contained in the hydrocarbon group represented by R ²¹ is replaced with -O-, -S-, -CO- or -SO ₂ -, the number of carbon atoms before substitution is the same as that of the hydrocarbon group. The total number of carbon atoms is Further, the number may be one or two or more.
As a group in which -CH ₂ - contained in a hydrocarbon group is replaced with -O-, -S-, -CO- or -SO ₂ -, a hydroxy group (-CH ₂ - contained in a methyl group is replaced with -O-, -S-, -CO- or -SO 2 -) (a group in which -CH 2 - contained in a methyl group is replaced with -S-), a thiol group (a group in which -CH ₂ - contained in a methyl group is replaced with -S-), a carboxy group (a group in which -CH ₂ -CH ₂ - contained in an ethyl group is , -O-CO-), alkoxy groups (groups in which -CH ₂ - at any position contained in an alkyl group is replaced with -O-), alkylthio groups (any group contained in an alkyl group), (a group in which -CH ₂ - at the position is replaced with -S-), an alkoxycarbonyl group (a group in which -CH ₂ -CH ₂ - at any position contained in the alkyl group is replaced by -O-CO-) ), alkylcarbonyl group (a group in which -CH ₂ - contained in an alkyl group is replaced with -CO-), an alkylsulfonyl group (a group in which -CH ₂ - contained in an arbitrary position in an alkyl group is replaced with -CO-), , -SO ₂ -), alkylcarbonyloxy group (group in which -CH ₂ -CH ₂ - at any position in the alkyl group is replaced with -CO-O-), oxy group (methylene (a group in which -CH ₂ - contained in the group is replaced with -O-), a carbonyl group (a group in which -CH ₂ - contained in a methylene group is replaced with -CO-), a thio group (a group in which -CH 2 - contained in a methylene group is replaced with -CO-), -CH ₂ - contained in the methylene group is replaced with -S-), sulfonyl group (a group in which -CH ₂ - contained in the methylene group is replaced with -SO ₂ -), alkanediyloxy group (alkanediyl -CH ₂ - at any position contained in the group is replaced with -O-), alkanediyloxycarbonyl group (-CH ₂ -CH ₂ - contained at any position contained in the alkanediyl group is replaced with -O-, -O-CO-), alkanediylcarbonyl group (group in which -CH ₂ - at any position in the alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy group (alkanediyl -CH ₂ -CH ₂ - at any position contained in the group is replaced with -CO-O-), an alkanediylthio group (a group in which -CH ₂ - contained at any position contained in the alkanediyl group is replaced with -CO-O-) , -S-), alkanediylsulfonyl group (group in which -CH ₂ - at any position in the alkanediyl group is replaced with -SO ₂ -), cycloalkoxy group, cycloalkylalkoxy group , an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group combining two or more of these groups. .
Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, and nonyloxy group. group, decyloxy group, undecyloxy group, etc. The alkoxy group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkylthio group include alkylthio groups having 1 to 17 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, and decylthio group. group, undecylthio group, etc. The alkylthio group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
The alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.
Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group, and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as an acetyloxy group, a propionyloxy group, a butyryloxy group, and the like. The alkoxycarbonyl group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. The alkylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3.
Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 17 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, -Ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.
Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 17 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanediyloxy group, butanediyloxy group, pentanediyloxy group, and the like. The alkanediyloxy group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 17 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. . Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, and the like. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 17 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. . The alkanediyloxycarbonyl group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. The alkanediylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms. The alkanediylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.
Examples of the alkanediylthio group include an alkanediylthio group having 1 to 17 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, and the like. The alkanediylthio group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the alkanediylsulfonyl group include an alkanediylsulfonyl group having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, and the like. The alkanediylsulfonyl group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include a cycloalkylalkoxy group having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as butoxycarbonyloxy groups. Examples of the aromatic hydrocarbon group-carbonyloxy group include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 18 carbon atoms, such as a benzoyl group. The aromatic hydrocarbon group-oxy group includes an aromatic hydrocarbon group-oxy group having 6 to 17 carbon atoms, such as a phenyloxy group.
In addition, examples of groups in which -CH ₂ - contained in the alicyclic hydrocarbon group are replaced with -O-, -S-, -CO- or -SO ₂ - include the groups shown below. . -O- or -CO- in the groups shown below may be replaced with -S- or -SO ₂ -. The binding site can be at any position.

More specifically, as the group in which -CH ₂ - contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO ₂ -, the following groups etc. can be mentioned. * represents a binding site.

Examples of substituents that the cyclic hydrocarbon group may have include a halogen atom, a cyano group, and an alkyl group having 1 to 12 carbon atoms (-CH ₂ - contained in the alkyl group is -O-, -S- , -CO- or -SO ₂ -). When the cyclic hydrocarbon group has a substituent, the substituent is not included in the total carbon number of the hydrocarbon group including the cyclic hydrocarbon group in R ²¹ .
Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Examples of the alkyl group having 1 to 12 carbon atoms include methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, octyl group, nonyl group, and the like. The number of carbon atoms in the alkyl group is preferably 1 to 10, more preferably 1 to 9, still more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. and even more preferably 1 to 3.
When -CH ₂ - contained in an alkyl group is replaced with -O-, -S-, -CO- or -SO ₂ - as a substituent, the number of carbon atoms before substitution is the total number of carbon atoms in the alkyl group. shall be. Substituted groups include a hydroxy group (a group in which -CH ₂ - contained in a methyl group is replaced with -O-), a carboxy group (a group in which -CH 2 -CH ₂ - contained in an ethyl group is replaced with -O-), and a carboxy group (a group in which -CH ₂ - contained in an ethyl group is replaced with -O-) (a group in which -CO- is replaced with -CO-), an alkoxy group (a group in which -CH 2 - at any position contained in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -O- is substituted for -CH ₂ - at any position contained in an alkyl group) (a group in which -CH ₂ -CH ₂ - is replaced with -O-CO-), an alkylcarbonyl group (a group in which -CH ₂ - at any position contained in the alkyl group is replaced with -CO-), Examples include alkylcarbonyloxy groups (groups in which -CH ₂ -CH ₂ - contained in an alkyl group is replaced with -CO-O-), groups that combine two or more of these groups, etc. It will be done.
Examples of the alkoxy group include alkoxy groups having 1 to 11 carbon atoms. Examples include methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group and the like. The alkoxy group preferably has 1 to 6 carbon atoms, more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.
The alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.
Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 11 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group, and examples of the alkylcarbonyl group include alkyl groups having 2 to 12 carbon atoms. Carbonyl groups include, for example, acetyl, propionyl and butyryl groups, and alkylcarbonyloxy groups include alkylcarbonyloxy groups having 2 to 11 carbon atoms, such as acetyloxy, propionyloxy, etc. group, butyryloxy group, etc. The alkoxycarbonyl group preferably has 2 to 6 carbon atoms, more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 6, more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 6, more preferably 2 to 4, and still more preferably 2 or 3.
The cyclic hydrocarbon group may have one substituent or multiple substituents.
Examples of substituents that the cyclic hydrocarbon group may have include a halogen atom or an alkyl group having 1 to 6 carbon atoms (-CH ₂ - contained in the alkyl group is -O-, -S-, -CO - or -SO ₂ -) is preferable, and a fluorine atom, an iodine atom, or an alkyl group having 1 to 4 carbon atoms (-CH ₂ - contained in the alkyl group is substituted with -O-, -S -, -CO- or -SO ₂ -) is more preferable, and a fluorine atom, an iodine atom, a hydroxy group, an alkoxy group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms is more preferable. Preferably, a fluorine atom, an iodine atom, a hydroxy group, or an alkyl group having 1 to 4 carbon atoms is even more preferable.

Cyclic hydrocarbon group (The cyclic hydrocarbon group may have a substituent, -CH ₂ - contained in the cyclic hydrocarbon group is -O-, -S-, -SO ₂ - or -CO- ) may be replaced by
An alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group may have a substituent, and -CH ₂ - contained in the alicyclic hydrocarbon group is -O- , -S-, -SO ₂ - or -CO-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group may be substituted with a substituent) ) is preferable,
An alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group has one or more atoms selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom) -CH ₂ - contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO ₂ - or -CO-), or a group with 6 carbon atoms. -18 aromatic hydrocarbon group (The aromatic hydrocarbon group may have one or more selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom.) It is more preferable that
An alicyclic hydrocarbon group having 5 to 16 carbon atoms (the alicyclic hydrocarbon group has one or more atoms selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom) (-CH ₂ - contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO ₂ - or -CO-) is more preferable. .

上記式において、Ｒ^21’は、上述したＲ²¹と同じ定義であり、Ｒ²¹と同じであってもよいし異なっていてもよい。 A hydrocarbon group having 3 to 48 carbon atoms including a cyclic hydrocarbon group represented by R ²¹ (the cyclic hydrocarbon group may have a substituent, and the -CH ₂ - contained in the hydrocarbon group is -O-, -S-, -SO ₂ - or -CO- may be substituted).
Preferably, a hydrocarbon group having 3 to 48 carbon atoms including an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group may have a substituent; -CH ₂ - contained may be replaced with -O-, -S-, -SO ₂ - or -CO-), or a carbon number containing an aromatic hydrocarbon group having 6 to 18 carbon atoms. 6 to 48 hydrocarbon groups (the aromatic hydrocarbon group may have a substituent, -CH ₂ - contained in the hydrocarbon group is -O-, -S-, -SO ₂ - or may be replaced with -CO-),
More preferably, a hydrocarbon group having 3 to 48 carbon atoms including an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group includes an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine group) It may have one or more atoms selected from the group consisting of atoms and fluorine atoms, and -CH ₂ - contained in the hydrocarbon group is replaced with -O-, -S-, -SO ₂ - or -CO-. ), or a hydrocarbon group having 6 to 48 carbon atoms including an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group is an alkyl group having 1 to 4 carbon atoms, a hydroxyl group having 1 to 4 carbon atoms, -CH ₂ - contained in the hydrocarbon group may contain -O-, -S-, -SO ₂ - or -CO - may be replaced.),
More preferably, an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group is one selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom) -CH ₂ - contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO ₂ - or -CO-), carbon A group consisting of a combination of an alicyclic hydrocarbon group having 3 to 18 carbon atoms and a chain hydrocarbon group having 1 to 6 carbon atoms (the alicyclic hydrocarbon group is an alkyl group having 1 to 4 carbon atoms, a hydroxy group, It may have one or more selected from the group consisting of iodine atoms and fluorine atoms, and -CH ₂ - contained in the combined group is replaced by -O-, -S-, -SO ₂ - or -CO-. ), an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group is selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom) ), or a group combining an aromatic hydrocarbon group having 6 to 18 carbon atoms and a chain hydrocarbon group having 1 to 6 carbon atoms (the aromatic hydrocarbon group may have one or more , an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom, and the -CH ₂ - contained in the combined group is -O-, -S-, -SO ₂ - or -CO- may be substituted),
Even more preferably, an alicyclic hydrocarbon group having 5 to 16 carbon atoms (the alicyclic hydrocarbon group is selected from the group consisting of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom) -CH ₂ - contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO ₂ - or -CO-), Or, a group consisting of a combination of an alicyclic hydrocarbon group having 5 to 16 carbon atoms and a chain hydrocarbon group having 1 to 4 carbon atoms (the alicyclic hydrocarbon group is an alkyl group having 1 to 4 carbon atoms, It may have one or more selected from the group consisting of a hydroxy group, an iodine atom, and a fluorine atom, and the -CH ₂ - contained in the combined group is -O-, -S-, -SO ₂ - or - may be replaced with CO-).
In addition, a hydrocarbon group having 3 to 48 carbon atoms including a cyclic hydrocarbon group represented by R ²¹ (the cyclic hydrocarbon group may have a substituent, and -CH ₂ - contained in the hydrocarbon group) may be replaced with -O-, -S-, -SO ₂ - or -CO-.)
W ²¹ -L ²¹ -* (W ²¹ represents a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, and -CH ₂ - contained in the cyclic hydrocarbon group is -O- , -S-, -SO ₂ - or -CO-. L ²¹ represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH ₂ - may be replaced by -O-, -S-, -SO ₂ - or -CO-. * is also preferably a bonding site with an oxygen atom).
Examples of the cyclic hydrocarbon group of W ²¹ , the substituent that W ²¹ may have, and the chain hydrocarbon group of L ²¹ include the same groups as mentioned above.
W ²¹ is an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group may have a substituent, and -CH ₂ - contained in the alicyclic hydrocarbon group is , -O-, -S-, -SO ₂ - or -CO-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group may be substituted with a substituent ), preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the alicyclic hydrocarbon group may include an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom and fluorine atoms, and -CH ₂ - contained in the alicyclic hydrocarbon group is -O-, -S-, -SO ₂ - or -CO- ), or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the aromatic hydrocarbon group consists of an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an iodine atom, and a fluorine atom) It is more preferable that it is an alicyclic hydrocarbon group having 5 to 16 carbon atoms (the alicyclic hydrocarbon group may include an alkyl group having 1 to 4 carbon atoms). -CH 2 - contained in the alicyclic hydrocarbon group may have one or more selected from the group consisting of a hydroxyl group, an iodine atom, and a fluorine atom, and the -CH ₂ - contained in the alicyclic hydrocarbon group is -O-, -S-, - (may be replaced with SO ₂ - or -CO-) is more preferable.
L ²¹ is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms (-CH ₂ - contained in the chain hydrocarbon group may be replaced with -O- or -CO-). A single bond or a chain hydrocarbon group having 1 to 4 carbon atoms (-CH ₂ - contained in the chain hydrocarbon group may be replaced with -O- or -CO-). More preferably, it is a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms.
m21 is an integer of 1 to 5, preferably an integer of 1 to 4, more preferably an integer of 1 to 3, even more preferably 1 or 2, and even more preferably 2. When m21 is 1 or 2, it is preferable to have the following structure in which m is substituted for SO ₃ ^- .

In the above formula, R ^21' has the same definition as R ²¹ described above, and may be the same as or different from R ²¹ .

Examples of the alkyl group having 1 to 6 carbon atoms for R ²² include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, and hexyl group. The alkyl group preferably has 1 to 4 carbon atoms, more preferably 1 to 3 carbon atoms.
Examples of the halogen atom for ^R22 include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
R ²² is each independently a halogen atom or an alkyl group having 1 to 4 carbon atoms (-CH ₂ - contained in the alkyl group may be replaced with -O- or -CO-); is preferable, and more preferably a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms (-CH ₂ - contained in the alkyl group may be replaced with -O- or -CO-). Preferably, a fluorine atom, an iodine atom, a hydroxy group, a methoxy group, or a methyl group is more preferable.
m22 is an integer of 0 to 4, preferably an integer of 0 to 3, and more preferably an integer of 0 to 2. In one embodiment, m22 is preferably zero. In another embodiment, m22 is preferably 1 or 2. When m22 is 1, ^R22 is preferably a halogen atom, and more preferably ^R22 is a fluorine atom or an iodine atom. When m22 is 2, one of ^R22 is a halogen atom, the other is preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms, one of ^R22 is a fluorine atom or an iodine atom, and the other is more preferably a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

Examples of the anion in the salt represented by formula (B2) include the following anions. Among these, anions represented by formulas (B2-B-1) to (B2-B-20) are preferable, and anions represented by formulas (B2-B-1) to (B2-B-11) and formula (B2-B-20) are preferred. Anions represented by formulas B-16) to (B2-B-20) are more preferred.

Among them, formula (B1a-1) to formula (B1a-4), formula (B1a-7) to formula (B1a-11), formula (B1a-14) to formula (B1a-30), and formula (B1a-35) ) to formula (B1a-65) and formula (B2-B-1) to formula (B2-B-20) are preferred.

スルホニルメチドアニオンとしては、以下のものが挙げられる。

カルボン酸アニオンとしては、以下のものが挙げられる。

In addition, as another form of compound (B), a salt represented by formula (B1) etc. in which the anion is replaced with a sulfonylimide anion, a sulfonylmethide anion, a carboxylic acid anion, etc. can also be used as a compound (B). It is suitably used as
Examples of sulfonylimide anions include the following.

Examples of sulfonyl methide anions include the following.

Examples of carboxylic acid anions include the following.

［式（ｂ２－１）～式（ｂ２－４）中、
Ｒ^b4～Ｒ^b6は、それぞれ独立に、炭素数１～３０の鎖式炭化水素基、炭素数３～３６の脂環式炭化水素基又は炭素数６～３６の芳香族炭化水素基を表し、該鎖式炭化水素基に含まれる水素原子は、ヒドロキシ基、炭素数１～１２のアルコキシ基、炭素数３～１２の脂環式炭化水素基又は炭素数６～１８の芳香族炭化水素基で置換されていてもよく、該脂環式炭化水素基に含まれる水素原子は、ハロゲン原子、炭素数１～１８の脂肪族炭化水素基、炭素数２～４のアルキルカルボニル基又はグリシジルオキシ基で置換されていてもよく、該芳香族炭化水素基に含まれる水素原子は、ハロゲン原子、ヒドロキシ基、炭素数１～１８の脂肪族炭化水素基、炭素数１～１２のフッ化アルキル基又は炭素数１～１２のアルコキシ基で置換されていてもよい。
Ｒ^b4とＲ^b5とは、互いに結合してそれらが結合する硫黄原子と一緒になって環を形成してもよく、該環に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－又は－ＣＯ－に置き換わってもよい。
Ｒ^b7及びＲ^b8は、それぞれ独立に、ハロゲン原子、ヒドロキシ基、炭素数１～１２の脂肪族炭化水素基、炭素数１～１２のフッ化アルキル基又は炭素数１～１２のアルコキシ基を表す。
ｍ２及びｎ２は、それぞれ独立に０～５のいずれかの整数を表す。
ｍ２が２以上のとき、複数のＲ^b7は同一でも異なってもよく、ｎ２が２以上のとき、複数のＲ^b8は同一でも異なってもよい。
Ｒ^b9及びＲ^b10は、それぞれ独立に、炭素数１～３６の鎖式炭化水素基又は炭素数３～３６の脂環式炭化水素基を表す。
Ｒ^b9とＲ^b10とは、互いに結合してそれらが結合する硫黄原子と一緒になって環を形成してもよく、該環に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－又は－ＣＯ－に置き換わってもよい。
Ｒ^b11は、水素原子、炭素数１～３６の鎖式炭化水素基、炭素数３～３６の脂環式炭化水素基又は炭素数６～１８の芳香族炭化水素基を表す。
Ｒ^b12は、炭素数１～１２の鎖式炭化水素基、炭素数３～１８の脂環式炭化水素基又は炭素数６～１８の芳香族炭化水素基を表し、該鎖式炭化水素基に含まれる水素原子は、炭素数６～１８の芳香族炭化水素基で置換されていてもよく、該芳香族炭化水素基に含まれる水素原子は、炭素数１～１２のアルコキシ基又は炭素数１～１２のアルキルカルボニルオキシ基で置換されていてもよい。
Ｒ^b11とＲ^b12とは、互いに結合してそれらが結合する－ＣＨ－ＣＯ－を含めて環を形成していてもよく、該環に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－又は－ＣＯ－に置き換わってもよい。
Ｒ^b13～Ｒ^b18は、それぞれ独立に、ハロゲン原子、ヒドロキシ基、炭素数１～１２の脂肪族炭化水素基、炭素数１～１２のフッ化アルキル基又は炭素数１～１２のアルコキシ基を表す。
Ｒ^b13とＲ^b14とは、互いに結合してそれらが結合するベンゼン環と一緒になって硫黄原子を含む環を形成してもよく、該環に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－又は－ＣＯ－に置き換わってもよい。
Ｌ^b31は、硫黄原子又は酸素原子を表す。
ｏ２、ｐ２、ｓ２、及びｔ２は、それぞれ独立に、０～５のいずれかの整数を表す。
ｑ２及びｒ２は、それぞれ独立に、０～４のいずれかの整数を表す。
ｕ２は０又は１を表す。
ｏ２が２以上のとき、複数のＲ^b13は同一又は相異なり、ｐ２が２以上のとき、複数のＲ^b14は同一又は相異なり、ｑ２が２以上のとき、複数のＲ^b15は同一又は相異なり、ｒ２が２以上のとき、複数のＲ^b16は同一又は相異なり、ｓ２が２以上のとき、複数のＲ^b17は同一又は相異なり、ｔ２が２以上のとき、複数のＲ^b18は同一又は相異なる。］
ｕ２が０のとき、ｏ２、ｐ２、ｑ２及びｒ２のうちいずれか１つは１以上であり、Ｒ^b13～Ｒ^b1６のうち少なくとも１つはハロゲン原子であることが好ましく、ｕ２が１のとき、ｏ２、ｐ２、ｓ２、ｔ２、ｑ２及びｒ２のうちいずれか１つは１以上であり、Ｒ^b13～Ｒ^b18のうち少なくとも１つはハロゲン原子であることが好ましい。
さらに、ｕ２が０のとき、ｒ２は１以上であることが好ましく、１であることがさらに好ましい。また、ｕ２が０、かつ、ｒ２が１以上のとき、Ｒ^ｂ１６がハロゲン原子であることが好ましい。
脂肪族炭化水素基とは、鎖式炭化水素基及び脂環式炭化水素基を表す。
鎖式炭化水素基としては、メチル基、エチル基、プロピル基、イソプロピル基、ブチル基、ｓｅｃ－ブチル基、ｔｅｒｔ－ブチル基、ペンチル基、ヘキシル基、オクチル基及び２－エチルヘキシル基のアルキル基が挙げられる。
特に、Ｒ^b9～Ｒ^b12の鎖式炭化水素基は、好ましくは炭素数１～１２である。
脂環式炭化水素基としては、単環式又は多環式のいずれでもよく、単環式の脂環式炭化水素基としては、シクロプロピル基、シクロブチル基、シクロペンチル基、シクロへキシル基、シクロヘプチル基、シクロオクチル基、シクロデシル基等のシクロアルキル基が挙げられる。多環式の脂環式炭化水素基としては、デカヒドロナフチル基、アダマンチル基、ノルボルニル基及び下記の基等が挙げられる。

特に、Ｒ^b9～Ｒ^b12の脂環式炭化水素基は、好ましくは炭素数３～１８、より好ましくは炭素数４～１２である。
水素原子が脂肪族炭化水素基で置換された脂環式炭化水素基としては、メチルシクロヘキシル基、ジメチルシクロへキシル基、２－メチルアダマンタン－２－イル基、２－エチルアダマンタン－２－イル基、２－イソプロピルアダマンタン－２－イル基、メチルノルボルニル基、イソボルニル基等が挙げられる。水素原子が脂肪族炭化水素基で置換された脂環式炭化水素基においては、脂環式炭化水素基と脂肪族炭化水素基との合計炭素数が好ましくは２０以下である。
フッ化アルキル基とは、フッ素原子を有する炭素数１～１２のアルキル基を表し、フルオロメチル基、ジフルオロメチル基、トリフルオロメチル基、ペルフルオロブチル基等が挙げられる。フッ化アルキル基の炭素数は、好ましくは１～９であり、より好ましくは１～６であり、さらに好ましくは１～４である。
芳香族炭化水素基としては、フェニル基、ビフェニル基、ナフチル基、フェナントリル基等のアリール基が挙げられる。芳香族炭化水素基は、鎖式炭化水素基又は脂環式炭化水素基を有していてもよく、炭素数１～１８の鎖式炭化水素基を有する芳香族炭化水素基（トリル基、キシリル基、クメニル基、メシチル基、ｐ－エチルフェニル基、ｐ－ｔｅｒｔ－ブチルフェニル基、２，６－ジエチルフェニル基、２－メチル－６－エチルフェニル基等）及び炭素数３～１８の脂環式炭化水素基を有する芳香族炭化水素基（ｐ－シクロへキシルフェニル基、ｐ－アダマンチルフェニル基等）等が挙げられる。なお、芳香族炭化水素基が、鎖式炭化水素基又は脂環式炭化水素基を有する場合は、炭素数１～１８の鎖式炭化水素基及び炭素数３～１８の脂環式炭化水素基が好ましい。
水素原子がアルコキシ基で置換された芳香族炭化水素基としては、ｐ－メトキシフェニル基等が挙げられる。
水素原子が芳香族炭化水素基で置換された鎖式炭化水素基としては、ベンジル基、フェネチル基、フェニルプロピル基、トリチル基、ナフチルメチル基、ナフチルエチル基等のアラルキル基が挙げられる。
アルコキシ基としては、メトキシ基、エトキシ基、プロポキシ基、ブトキシ基、ペンチルオキシ基、ヘキシルオキシ基、ヘプチルオキシ基、オクチルオキシ基、デシルオキシ基及びドデシルオキシ基等が挙げられる。
アルキルカルボニル基としては、アセチル基、プロピオニル基及びブチリル基等が挙げられる。
ハロゲン原子としては、フッ素原子、塩素原子、臭素原子及びヨウ素原子等が挙げられる。
アルキルカルボニルオキシ基としては、メチルカルボニルオキシ基、エチルカルボニルオキシ基、プロピルカルボニルオキシ基、イソプロピルカルボニルオキシ基、ブチルカルボニルオキシ基、ｓｅｃ－ブチルカルボニルオキシ基、ｔｅｒｔ－ブチルカルボニルオキシ基、ペンチルカルボニルオキシ基、ヘキシルカルボニルオキシ基、オクチルカルボニルオキシ基及び２－エチルヘキシルカルボニルオキシ基等が挙げられる。
Ｒ^b4とＲ^b5とが互いに結合してそれらが結合する硫黄原子と一緒になって形成する環は、単環式、多環式、芳香族性、非芳香族性、飽和及び不飽和のいずれの環であってもよい。この環は、炭素数３～１８の環が挙げられ、好ましくは炭素数４～１８の環である。また、硫黄原子を含む環は、３員環～１２員環が挙げられ、好ましくは３員環～７員環であり、例えば下記の環が挙げられる。＊は結合部位を表す。

Ｒ^b9とＲ^b10とが一緒になって形成する環は、単環式、多環式、芳香族性、非芳香族性、飽和及び不飽和のいずれの環であってもよい。この環は、３員環～１２員環が挙げられ、好ましくは３員環～７員環である。例えば、チオラン－１－イウム環（テトラヒドロチオフェニウム環）、チアン－１－イウム環、１，４－オキサチアン－４－イウム環等が挙げられる。
Ｒ^b11とＲ^b12とが一緒になって形成する環は、単環式、多環式、芳香族性、非芳香族性、飽和及び不飽和のいずれの環であってもよい。この環は、３員環～１２員環が挙げられ、好ましくは３員環～７員環である。オキソシクロヘプタン環、オキソシクロヘキサン環、オキソノルボルナン環、オキソアダマンタン環等が挙げられる。 Examples of the organic cation of Z ⁺ include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations are more preferred. Specifically, a cation represented by any of formulas (b2-1) to (b2-4) (hereinafter sometimes referred to as "cation (b2-1)" etc. depending on the formula number) is Can be mentioned.

[In formulas (b2-1) to (b2-4),
R ^b4 to R ^b6 each independently represent a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, The hydrogen atom contained in the chain hydrocarbon group is a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group. The hydrogen atom contained in the aromatic hydrocarbon group may be substituted, such as a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or a fluorinated alkyl group having 1 to 12 carbon atoms. It may be substituted with 1 to 12 alkoxy groups.
R ^b4 and R ^b5 may bond to each other and form a ring together with the sulfur atom to which they are bonded, and -CH ₂ - contained in the ring may be -O-, -S- or -CO- may be substituted.
R ^b7 and R ^b8 each independently represent a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. .
m2 and n2 each independently represent any integer from 0 to 5.
When m2 is 2 or more, multiple R ^b7s may be the same or different; when n2 is 2 or more, multiple R ^b8s may be the same or different.
R ^b9 and R ^b10 each independently represent a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms.
R ^b9 and R ^b10 may bond to each other and form a ring together with the sulfur atom to which they are bonded, and -CH ₂ - contained in the ring may be -O-, -S- or -CO- may be substituted.
R ^b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms.
R ^b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms; The hydrogen atom contained may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkoxy group having 1 to 12 carbon atoms. Optionally substituted with ~12 alkylcarbonyloxy groups.
R ^b11 and R ^b12 may be bonded to each other to form a ring including -CH-CO- to which they are bonded, and -CH ₂ - contained in the ring is -O-, -S - or -CO- may be substituted.
R ^b13 to R ^b18 each independently represent a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. .
R ^b13 and R ^b14 may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are bonded, and -CH ₂ - contained in the ring is -O-, It may be replaced with -S- or -CO-.
L ^b31 represents a sulfur atom or an oxygen atom.
o2, p2, s2, and t2 each independently represent any integer from 0 to 5.
q2 and r2 each independently represent an integer of 0 to 4.
u2 represents 0 or 1.
When o2 is 2 or more, multiple R ^b13s are the same or different; when p2 is 2 or more, multiple R ^b14s are the same or different; when q2 is 2 or more, multiple R ^b15s are the same or different. , when r2 is 2 or more, multiple R ^b16s are the same or different; when s2 is 2 or more, multiple R ^b17s are the same or different; when t2 is 2 or more, multiple R ^b18s are the same or different; different. ]
When u2 is 0, any one of o2, p2, q2 and r2 is 1 or more, at least one of R ^b13 to R ^b16 is preferably a halogen atom, and when u2 is 1, It is preferable that any one of o2, p2, s2, t2, q2 and r2 is 1 or more, and at least one of R ^b13 to R ^b18 is a halogen atom.
Further, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. Further, when u2 is 0 and r2 is 1 or more, R ^b16 is preferably a halogen atom.
The aliphatic hydrocarbon group refers to a chain hydrocarbon group and an alicyclic hydrocarbon group.
Examples of chain hydrocarbon groups include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group, and 2-ethylhexyl group. Can be mentioned.
In particular, the chain hydrocarbon groups R ^b9 to R ^b12 preferably have 1 to 12 carbon atoms.
The alicyclic hydrocarbon group may be monocyclic or polycyclic, and examples of the monocyclic alicyclic hydrocarbon group include cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cyclo Examples include cycloalkyl groups such as heptyl group, cyclooctyl group, and cyclodecyl group. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups.

In particular, the alicyclic hydrocarbon groups R ^b9 to R ^b12 preferably have 3 to 18 carbon atoms, more preferably 4 to 12 carbon atoms.
Examples of alicyclic hydrocarbon groups in which hydrogen atoms are substituted with aliphatic hydrocarbon groups include methylcyclohexyl group, dimethylcyclohexyl group, 2-methyladamantan-2-yl group, and 2-ethyladamantan-2-yl group. , 2-isopropyladamantane-2-yl group, methylnorbornyl group, isobornyl group, and the like. In an alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less.
The fluorinated alkyl group refers to an alkyl group having 1 to 12 carbon atoms and having a fluorine atom, and includes a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, and the like. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 9, more preferably 1 to 6, and still more preferably 1 to 4.
Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, biphenyl group, naphthyl group, and phenanthryl group. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and an aromatic hydrocarbon group having a chain hydrocarbon group having 1 to 18 carbon atoms (tolyl group, xylyl group, group, cumenyl group, mesityl group, p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.) and alicyclic groups having 3 to 18 carbon atoms. Examples include aromatic hydrocarbon groups having the formula hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.). In addition, when the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms. is preferred.
Examples of the aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group include p-methoxyphenyl group.
Examples of the chain hydrocarbon group in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as benzyl group, phenethyl group, phenylpropyl group, trityl group, naphthylmethyl group, and naphthylethyl group.
Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group, and dodecyloxy group.
Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group.
Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Examples of the alkylcarbonyloxy group include methylcarbonyloxy group, ethylcarbonyloxy group, propylcarbonyloxy group, isopropylcarbonyloxy group, butylcarbonyloxy group, sec-butylcarbonyloxy group, tert-butylcarbonyloxy group, and pentylcarbonyloxy group. , hexylcarbonyloxy group, octylcarbonyloxy group, and 2-ethylhexylcarbonyloxy group.
The ring formed by R ^b4 and R ^b5 combined with each other and the sulfur atom to which they are bonded may be monocyclic, polycyclic, aromatic, non-aromatic, saturated or unsaturated. It may be a ring. Examples of this ring include a ring having 3 to 18 carbon atoms, preferably a ring having 4 to 18 carbon atoms. Further, examples of the ring containing a sulfur atom include a 3-membered ring to a 12-membered ring, preferably a 3-membered ring to a 7-membered ring, such as the following rings. * represents a binding site.

The ring formed by R ^b9 and R ^b10 together may be monocyclic, polycyclic, aromatic, non-aromatic, saturated or unsaturated. Examples of this ring include a 3- to 12-membered ring, preferably a 3- to 7-membered ring. Examples include a thiolane-1-ium ring (tetrahydrothiophenium ring), a thian-1-ium ring, and a 1,4-oxathian-4-ium ring.
The ring formed by R ^b11 and R ^b12 together may be monocyclic, polycyclic, aromatic, non-aromatic, saturated or unsaturated. Examples of this ring include a 3- to 12-membered ring, preferably a 3- to 7-membered ring. Examples include an oxocycloheptane ring, an oxocyclohexane ring, an oxonorbornane ring, and an oxoadamantane ring.

カチオン（ｂ２－２）としては、以下のカチオンが挙げられる。

カチオン（ｂ２－３）としては、以下のカチオンが挙げられる。

カチオン（ｂ２－４）としては、以下のカチオンが挙げられる。

Among cations (b2-1) to cations (b2-4), cation (b2-1) is preferred.
Examples of the cation (b2-1) include the following cations.

Examples of the cation (b2-2) include the following cations.

Examples of the cation (b2-3) include the following cations.

Examples of the cation (b2-4) include the following cations.

Compound (B) is a combination of the above-mentioned anion and the above-mentioned organic cation, and these can be arbitrarily combined. As the compound (B), preferably formulas (B1a-1) to (B1a-4), formulas (B1a-7) to (B1a-11), and formulas (B1a-14) to (B1a-30) and an anion represented by any of formulas (B1a-35) to (B1a-65) and formulas (B2-B-1) to (B2-B-20), a cation (b2-1), and a cation (b2-2), a combination with a cation (b2-3) or a cation (b2-4).

Preferable examples of the compound (B) include those represented by formulas (B1-1) to (B1-105) and formulas (B2-1) to (B2-20), respectively. Among these, those containing an arylsulfonium cation are preferred, and include formulas (B1-1) to (B1-3), formulas (B1-5) to (B1-7), and formulas (B1-11) to (B1-14). ), formula (B1-20) to formula (B1-26), formula (B1-29), formula (B1-31) to formula (B1-105), and formula (B2-1) to formula (B2-20) Those represented by are particularly preferred.

In the resist composition of the present invention, the total content of acid generators is preferably 0.1% by mass or more and 99.9% by mass or less, more preferably 1% by mass, based on the solid content of the resist composition. % or more and 45% by mass or less, more preferably 1% by mass or more and 40% by mass or less, even more preferably 3% by mass or more and 40% by mass or less. When resin (A) etc. are included, the total content of the acid generator is preferably 1 part by mass or more and 45 parts by mass or less, more preferably 1 part by mass or more, based on 100 parts by mass of resin (A) etc. It is 40 parts by mass or less, more preferably 3 parts by mass or more and 35 parts by mass or less.
In addition, in the resist composition of the present invention, when the resin (A) is included, the total content of the salt (I), the structural unit (IP), and the compound (B) is based on 100 parts by mass of the resin (A). , preferably 1 part by mass or more and 45 parts by mass or less, more preferably 1 part by mass or more and 40 parts by mass or less, still more preferably 3 parts by mass or more and 35 parts by mass or less. When the resin (Ap) is included, the total content of the salt (I) and the compound (B) is preferably 0 parts by mass or more and 35 parts by mass or less, more preferably 0 parts by mass or more and 35 parts by mass or less, based on 100 parts by mass of the resin (Ap). is from 0 parts by mass to 20 parts by mass.

<Solvent (E)>
The content of the solvent (E) in the resist composition is usually 90% by mass or more and 99.9% by mass or less, preferably 92% by mass or more and 99% by mass or less, and more preferably 94% by mass or more and 99% by mass. % or less. The content of the solvent (E) can be measured by known analytical means such as liquid chromatography or gas chromatography.

Examples of the solvent (E) include glycol ether esters such as ethyl cellosolve acetate, methyl cellosolve acetate, and propylene glycol monomethyl ether acetate; glycol ethers such as propylene glycol monomethyl ether; ethyl lactate, butyl acetate, amyl acetate, ethyl pyruvate, etc. Ketones such as acetone, methyl isobutyl ketone, 2-heptanone and cyclohexanone; Cyclic esters such as γ-butyrolactone; and the like. One type of solvent (E) may be used alone, or two or more types may be used.

<Quencher (C)>
The quencher (C) includes a salt that generates an acid that is weaker than the acid generated from the acid generator (salt (I), structural unit (IP), and compound (B)), and a basic nitrogen-containing acid. Examples include organic compounds. The content of the quencher (C) is preferably about 0.01 to 15% by mass, more preferably about 0.01 to 10% by mass, based on the solid content of the resist composition. It is more preferably about .1 to 8% by mass, and even more preferably about 0.1 to 7% by mass.

<Salt that generates an acid with weaker acidity than the acid generated from the acid generator>
The acidity of a salt that generates an acid less acidic than the acid generated from the acid generator is indicated by the acid dissociation constant (pKa). The salt that generates an acid with weaker acidity than the acid generated from the acid generator is a salt whose acid dissociation constant of the acid generated from the salt is usually -3<pKa, preferably -1<pKa<7. , more preferably a salt with a pKa of 0<pKa<5.
Examples of the salt that generates an acid with weaker acidity than the acid generated from the acid generator include a salt represented by the following formula, a salt represented by the formula (D) described in JP-A-2015-147926 (hereinafter referred to as ), as well as JP2012-229206A, JP2012-6908A, JP2012-72109A, JP2011-39502A, and Examples include salts described in JP-A No. 2011-191745. As a salt that generates an acid that is weaker in acidity than the acid generated from the acid generator, preferably a salt that generates a carboxylic acid that is weaker in acidity than the acid generated from the acid generator (a salt having a carboxylic acid anion). More preferably, it is a weak acid inner salt (D), and even more preferably a diphenyliodonium salt containing a phenyl group substituted with a carboxylic acid anion among the weak acid inner salts (D).

［式（Ｄ）中、
Ｒ^D1及びＲ^D2は、それぞれ独立に、炭素数１～１２の炭化水素基、炭素数１～６のアルコキシ基、炭素数２～７のアシル基、炭素数２～７のアシルオキシ基、炭素数２～７のアルコキシカルボニル基、ニトロ基又はハロゲン原子を表す。
ｍ’及びｎ’は、それぞれ独立に、０～４のいずれかの整数を表し、ｍ’が２以上の場合、複数のＲ^D1は同一であっても異なってもよく、ｎ’が２以上の場合、複数のＲ^D2は同一であっても異なってもよい。］
Ｒ^D1及びＲ^D2の炭化水素基としては、鎖式炭化水素基、脂環式炭化水素基、芳香族炭化水素基及びこれらを組み合わせることにより形成される基等が挙げられる。
鎖式炭化水素基としては、メチル基、エチル基、プロピル基、イソプロピル基、ブチル基、イソブチル基、ｔｅｒｔ－ブチル基、ペンチル基、ヘキシル基、ノニル基等のアルキル基が挙げられる。
脂環式炭化水素基としては、単環式及び多環式のいずれでもよく、飽和及び不飽和のいずれでもよい。シクロプロピル基、シクロブチル基、シクロペンチル基、シクロへキシル基、シクロノニル基、シクロドデシル基等のシクロアルキル基、ノルボニル基、アダマンチル基等が挙げられる。
芳香族炭化水素基としては、フェニル基、１－ナフチル基、２－ナフチル基、２－メチルフェニル基、３－メチルフェニル基、４－メチルフェニル基、４－エチルフェニル基、４－プロピルフェニル基、４－イソプロピルフェニル基、４－ブチルフェニル基、４－ｔ－ブチルフェニル基、４－ヘキシルフェニル基、４－シクロヘキシルフェニル基、アントリル基、ｐ－アダマンチルフェニル基、トリル基、キシリル基、クメニル基、メシチル基、ビフェニル基、フェナントリル基、２，６－ジエチルフェニル基、２－メチル－６－エチルフェニル基等のアリール基等が挙げられる。
これらを組み合わせることにより形成される基としては、アルキル－シクロアルキル基、シクロアルキル－アルキル基、アラルキル基（例えば、フェニルメチル基、１－フェニルエチル基、２－フェニルエチル基、１－フェニル－１－プロピル基、１－フェニル－２－プロピル基、２－フェニル－２－プロピル基、３－フェニル－１－プロピル基、４－フェニル－１－ブチル基、５－フェニル－１－ペンチル基、６－フェニル－１－ヘキシル基等）等が挙げられる。
アルコキシ基としては、メトキシ基、エトキシ基等が挙げられる。
アシル基としては、アセチル基、プロパノイル基、ベンゾイル基、シクロヘキサンカルボニル基等が挙げられる。
アシルオキシ基としては、上記アシル基にオキシ基（－Ｏ－）が結合した基等が挙げられる。
アルコキシカルボニル基としては、上記アルコキシ基にカルボニル基（－ＣＯ－）が結合した基等が挙げられる。
ハロゲン原子としては、フッ素原子、塩素原子、臭素原子等が挙げられる。
Ｒ^D1及びＲ^D2は、それぞれ独立に、炭素数１～８のアルキル基、炭素数３～１０のシクロアルキル基、炭素数１～６のアルコキシ基、炭素数２～４のアシル基、炭素数２～４のアシルオキシ基、炭素数２～４のアルコキシカルボニル基、ニトロ基又はハロゲン原子が好ましい。
ｍ’及びｎ’は、それぞれ独立に、０～２のいずれかの整数であることが好ましく、０であることがより好ましい。ｍ’が２以上の場合、複数のＲ^D1は同一であっても異なってもよく、ｎ’が２以上の場合、複数のＲ^D2は同一であっても異なってもよい。
より具体的には、以下の塩が挙げられる。

The weak acid inner salt (D) is diphenyliodonium having an iodonium cation to which two phenyl groups are bonded, and a carboxylic acid anion substituted with at least one of the two phenyl groups bonded to the iodonium cation. It is preferably a salt, and examples thereof include salts represented by the following formulas.

[In formula (D),
R ^D1 and R ^D2 each independently represent a hydrocarbon group having 1 to 12 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 7 carbon atoms, an acyloxy group having 2 to 7 carbon atoms, or an acyl group having 2 to 7 carbon atoms; Represents 2 to 7 alkoxycarbonyl groups, nitro groups, or halogen atoms.
m' and n' each independently represent any integer from 0 to 4, and when m' is 2 or more, the plurality of R ^D1s may be the same or different, and n' is 2 or more. In the case of , the plurality of R ^D2 may be the same or different. ]
Examples of the hydrocarbon groups R ^D1 and R ^D2 include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these.
Examples of the chain hydrocarbon group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, and nonyl group.
The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and may be saturated or unsaturated. Examples include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cyclononyl group, and cyclododecyl group, norbornyl group, and adamantyl group.
Examples of aromatic hydrocarbon groups include phenyl group, 1-naphthyl group, 2-naphthyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, 4-ethylphenyl group, 4-propylphenyl group. , 4-isopropylphenyl group, 4-butylphenyl group, 4-t-butylphenyl group, 4-hexylphenyl group, 4-cyclohexylphenyl group, anthryl group, p-adamantylphenyl group, tolyl group, xylyl group, cumenyl group , mesityl group, biphenyl group, phenanthryl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, and other aryl groups.
Groups formed by combining these groups include alkyl-cycloalkyl groups, cycloalkyl-alkyl groups, aralkyl groups (for example, phenylmethyl groups, 1-phenylethyl groups, 2-phenylethyl groups, 1-phenyl-1 -propyl group, 1-phenyl-2-propyl group, 2-phenyl-2-propyl group, 3-phenyl-1-propyl group, 4-phenyl-1-butyl group, 5-phenyl-1-pentyl group, 6 -phenyl-1-hexyl group, etc.).
Examples of the alkoxy group include a methoxy group and an ethoxy group.
Examples of the acyl group include an acetyl group, a propanoyl group, a benzoyl group, and a cyclohexanecarbonyl group.
Examples of the acyloxy group include a group in which an oxy group (-O-) is bonded to the above-mentioned acyl group.
Examples of the alkoxycarbonyl group include a group in which a carbonyl group (-CO-) is bonded to the above-mentioned alkoxy group.
Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and the like.
R ^D1 and R ^D2 each independently represent an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 4 carbon atoms, or an acyl group having 2 to 4 carbon atoms; An acyloxy group having 2 to 4 carbon atoms, an alkoxycarbonyl group having 2 to 4 carbon atoms, a nitro group, or a halogen atom is preferred.
m' and n' are each independently preferably an integer of 0 to 2, and more preferably 0. When m' is 2 or more, multiple R ^D1s may be the same or different; when n' is 2 or more, multiple R ^D2s may be the same or different.
More specifically, the following salts may be mentioned.

Basic nitrogen-containing organic compounds include amines and ammonium salts. Amines include aliphatic amines and aromatic amines. Aliphatic amines include primary amines, secondary amines and tertiary amines.
Examples of amines include 1-naphthylamine, 2-naphthylamine, aniline, diisopropylaniline, 2-, 3- or 4-methylaniline, 4-nitroaniline, N-methylaniline, N,N-dimethylaniline, diphenylamine, hexylamine, Heptylamine, octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, triethylamine, trimethylamine, tripropylamine, tributylamine, tripentylamine, trihexylamine, tri- Heptylamine, trioctylamine, trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine, methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, methyldioctylamine, methyldinonylamine, methyldidecylamine, Ethyldibutylamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine, ethyldioctylamine, ethyldinonylamine, ethyldidecylamine, dicyclohexylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, Isopropanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3'-dimethyldiphenylmethane, 4,4'-diamino-3 , 3'-diethyldiphenylmethane, 2,2'-methylenebisaniline, imidazole, 4-methylimidazole, pyridine, 4-methylpyridine, 1,2-di(2-pyridyl)ethane, 1,2-di(4- pyridyl)ethane, 1,2-di(2-pyridyl)ethene, 1,2-di(4-pyridyl)ethene, 1,3-di(4-pyridyl)propane, 1,2-di(4-pyridyloxy) ) Ethane, di(2-pyridyl)ketone, 4,4'-dipyridyl sulfide, 4,4'-dipyridyl disulfide, 2,2'-dipyridylamine, 2,2'-dipicolylamine, bipyridine, etc. Preferably, aromatic amines such as diisopropylaniline are used, and 2,6-diisopropylaniline is more preferable.
Examples of ammonium salts include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethyl Examples include ammonium hydroxide, tetra-n-butylammonium salicylate, and choline.

<Other ingredients>
The resist composition of the present invention may contain components other than the above-mentioned components (hereinafter sometimes referred to as "other components (F)"), if necessary. Other components (F) are not particularly limited, and additives known in the resist field, such as sensitizers, dissolution inhibitors, surfactants, stabilizers, dyes, etc. can be used.

<Preparation of resist composition>
The resist composition of the present invention includes a salt represented by formula (I) or a compound or resin containing a structural unit represented by formula (IP), optionally resin (A), etc., compound (B), resin ( It can be prepared by mixing resins other than A), solvent (E), quencher (C), and other components (F). The mixing order is arbitrary and is not particularly limited. An appropriate temperature for mixing can be selected from 10 to 40° C. depending on the type of resin and the solubility of the resin in the solvent (E). An appropriate mixing time can be selected from 0.5 to 24 hours depending on the mixing temperature. The mixing means is also not particularly limited, and stirring and mixing can be used.
After mixing each component, it is preferable to filter it using a filter with a pore size of about 0.003 to 0.2 μm.

<Resist pattern manufacturing method>
The method for manufacturing a resist pattern of the present invention includes:
(1) Applying the resist composition of the present invention onto a substrate,
(2) drying the applied composition to form a composition layer;
(3) exposing the composition layer to light;
(4) a step of heating the composition layer after exposure; and (5) a step of developing the composition layer after heating.
The resist composition can be applied onto the substrate using a commonly used device such as a spin coater. Examples of the substrate include an inorganic substrate such as a silicon wafer, and an organic substrate on which a resist film or the like is formed on the surface. Before applying the resist composition, the substrate may be cleaned, or an antireflection film or the like may be formed on the substrate.
By drying the applied composition, the solvent is removed and a composition layer is formed. Drying is performed, for example, by evaporating the solvent using a heating device such as a hot plate (so-called pre-baking), or by using a pressure reduction device. The heating temperature is preferably 50 to 200°C, and the heating time is preferably 10 to 180 seconds. Further, the pressure during reduced pressure drying is preferably about 1 to 1.0×10 ⁵ Pa.
The obtained composition layer is usually exposed using an exposure machine. The exposure machine may be an immersion exposure machine. Exposure light sources include those that emit laser light in the ultraviolet region such as KrF excimer laser (wavelength 248 nm), ArF excimer laser (wavelength 193 nm), F ₂ excimer laser (wavelength 157 nm), solid state laser light source (YAG or semiconductor laser). etc.) that converts the wavelength of laser light and emits harmonic laser light in the far ultraviolet or vacuum ultraviolet range, and uses various methods such as those that emit electron beams and ultraviolet light (EUV). Can be done. Note that in this specification, irradiation with these radiations may be collectively referred to as "exposure." During exposure, the exposure is usually performed through a mask corresponding to the desired pattern. When the exposure light source is an electron beam, exposure may be performed by direct writing without using a mask.
The exposed composition layer is subjected to a heat treatment (so-called post-exposure bake) in order to promote the deprotection reaction in acid-labile groups. The heating temperature is usually about 50 to 200°C, preferably about 70 to 150°C. A chemical treatment (silylation) may be performed to adjust the hydrophilicity or hydrophobicity of the resin on the surface side of the heated composition. Furthermore, before development, the steps of applying a resist composition, drying, exposing, and heating may be repeated on the exposed composition layer.
The heated composition layer is usually developed using a developer using a developing device. Examples of the developing method include a dip method, a paddle method, a spray method, and a dynamic dispensing method. The development temperature is preferably, for example, 5 to 60°C, and the development time is, for example, preferably 5 to 300 seconds. By selecting the type of developer as described below, a positive resist pattern or a negative resist pattern can be manufactured.
When producing a positive resist pattern from the resist composition of the present invention, an alkaline developer is used as the developer. The alkaline developer may be any of the various alkaline aqueous solutions used in this field. Examples include aqueous solutions of tetramethylammonium hydroxide and (2-hydroxyethyl)trimethylammonium hydroxide (commonly known as choline). The alkaline developer may contain a surfactant.
It is preferable to wash the resist pattern with ultrapure water after development, and then remove water remaining on the substrate and pattern.
When producing a negative resist pattern from the resist composition of the present invention, a developer containing an organic solvent (hereinafter sometimes referred to as "organic developer") is used as the developer.
Examples of organic solvents contained in organic developers include ketone solvents such as 2-hexanone and 2-heptanone; glycol ether ester solvents such as propylene glycol monomethyl ether acetate; ester solvents such as butyl acetate; glycols such as propylene glycol monomethyl ether. Examples include ether solvents; amide solvents such as N,N-dimethylacetamide; and aromatic hydrocarbon solvents such as anisole.
The content of the organic solvent in the organic developer is preferably 90% by mass or more and 100% by mass or less, more preferably 95% by mass or more and 100% by mass or less, and even more preferably substantially only the organic solvent.
Among these, as the organic developer, a developer containing butyl acetate and/or 2-heptanone is preferred. The total content of butyl acetate and 2-heptanone in the organic developer is preferably 50% by mass or more and 100% by mass or less, more preferably 90% by mass or more and 100% by mass or less, and substantially contains butyl acetate and/or 2-heptanone. - More preferably only heptanone.
The organic developer may contain a surfactant. Further, the organic developer may contain a trace amount of water.
During development, development may be stopped by replacing the organic developer with a different type of solvent.
It is preferable to wash the resist pattern after development with a rinsing liquid. The rinsing liquid is not particularly limited as long as it does not dissolve the resist pattern, and solutions containing common organic solvents can be used, and alcohol solvents or ester solvents are preferable.
After cleaning, it is preferable to remove the rinsing liquid remaining on the substrate and pattern.

<Application>
The resist composition of the present invention is a resist composition for KrF excimer laser exposure, a resist composition for ArF excimer laser exposure, a resist composition for electron beam (EB) exposure, or a resist composition for EUV exposure, particularly for electron beam (EB) exposure. It is suitable as a resist composition for line (EB) exposure or a resist composition for EUV exposure, and is useful for microfabrication of semiconductors.

The present invention will be explained in more detail with reference to Examples. In the examples, "%" and "part" representing the content or amount used are based on mass unless otherwise specified.
The weight average molecular weight is a value determined by gel permeation chromatography. The analysis conditions for gel permeation chromatography are as follows.
Column: TSKgel Multipore HXL-M x 3+guardcolumn (manufactured by Tosoh Corporation)
Eluent: Tetrahydrofuran Flow rate: 1.0mL/min
Detector: RI detector Column temperature: 40℃
Injection volume: 100μl
Molecular weight standard: Standard polystyrene (manufactured by Tosoh Corporation)
The structure of the compound was confirmed by measuring the molecular ion peak using mass spectrometry (LC: Model 1100 manufactured by Agilent; MASS: Model LC/MSD manufactured by Agilent). In the following examples, the value of this molecular ion peak is indicated by "MASS".

式（Ｉ－５０５－ａ）で表される塩１０．２９部及びクロロホルム５０部を混合し、２３℃で３０分間攪拌した後、式（Ｉ－１－ｂ）で表される化合物１．６２部を添加し、５０℃に昇温後、５０℃で２時間撹拌した。得られた反応混合物に、式（Ｉ－１－ｃ）で表される化合物２．５０部を添加し、５０℃で１０時間撹拌した。得られた反応混合物を２３℃まで冷却した後、イオン交換水２５部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、アセトニトリル３部及びｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－５０５）で表される塩１１．２３部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ８５２．９
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４０７．１ Example 1: Synthesis of salt represented by formula (I-505)

After mixing 10.29 parts of the salt represented by formula (I-505-a) and 50 parts of chloroform and stirring at 23°C for 30 minutes, 1.62 parts of the compound represented by formula (I-1-b) was mixed. The mixture was heated to 50°C, and then stirred at 50°C for 2 hours. 2.50 parts of the compound represented by formula (I-1-c) was added to the obtained reaction mixture, and the mixture was stirred at 50° C. for 10 hours. After cooling the obtained reaction mixture to 23°C, 25 parts of ion-exchanged water was added and the mixture was stirred at 23°C for 30 minutes, followed by liquid separation and the organic layer was taken out. After adding 25 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the organic layer was separated. This water washing operation was repeated five times. The obtained organic layer was concentrated, 3 parts of acetonitrile and 30 parts of tert-butyl methyl ether were added to the concentrated residue, and after stirring at 23°C for 30 minutes, the supernatant liquid was removed and concentrated to obtain the formula ( 11.23 parts of a salt represented by I-505) was obtained.
MASS (ESI (+) Spectrum): M ⁺ 852.9
MASS (ESI(-)Spectrum): M ^- 407.1

式（Ｉ－２－ｃ）で表される化合物２．６４部及びクロロホルム５０部を混合し、２３℃で３０分間攪拌した後、式（Ｉ－１－ｂ）で表される化合物１．６２部を添加し、５０℃に昇温後、５０℃で２時間撹拌した。得られた反応混合物に、式（Ｉ－５０６－ａ）で表される塩１０．１５部を添加し、５０℃で１０時間撹拌した。得られた反応混合物を２３℃まで冷却した後、イオン交換水２５部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、アセトニトリル３部及びｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－５０６）で表される塩１１．４４部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ８５２．９
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４０７．１ Example 2: Synthesis of salt represented by formula (I-506)

After mixing 2.64 parts of the compound represented by formula (I-2-c) and 50 parts of chloroform and stirring at 23°C for 30 minutes, 1.62 parts of the compound represented by formula (I-1-b) was mixed. The mixture was heated to 50°C, and then stirred at 50°C for 2 hours. 10.15 parts of a salt represented by formula (I-506-a) was added to the resulting reaction mixture, and the mixture was stirred at 50°C for 10 hours. After cooling the obtained reaction mixture to 23°C, 25 parts of ion-exchanged water was added and the mixture was stirred at 23°C for 30 minutes, followed by liquid separation and the organic layer was taken out. After adding 25 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the organic layer was separated. This water washing operation was repeated five times. The obtained organic layer was concentrated, 3 parts of acetonitrile and 30 parts of tert-butyl methyl ether were added to the concentrated residue, and after stirring at 23°C for 30 minutes, the supernatant liquid was removed and concentrated to obtain the formula ( 11.44 parts of a salt represented by I-506) was obtained.
MASS (ESI (+) Spectrum): M ⁺ 852.9
MASS (ESI(-)Spectrum): M ^- 407.1

式（Ｉ－２－ｃ）で表される化合物２．６４部及びクロロホルム５０部を混合し、２３℃で３０分間攪拌した後、式（Ｉ－１－ｂ）で表される化合物１．６２部を添加し、５０℃に昇温後、５０℃で２時間撹拌した。得られた反応混合物に、式（Ｉ－５０８－ａ）で表される塩１０．８３部を添加し、５０℃で１０時間撹拌した。得られた反応混合物を２３℃まで冷却した後、イオン交換水２５部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、アセトニトリル３部及びｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－５０８）で表される塩９．２６部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ８５２．９
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４７５．１ Example 3: Synthesis of salt represented by formula (I-508)

After mixing 2.64 parts of the compound represented by formula (I-2-c) and 50 parts of chloroform and stirring at 23°C for 30 minutes, 1.62 parts of the compound represented by formula (I-1-b) was mixed. The mixture was heated to 50°C, and then stirred at 50°C for 2 hours. 10.83 parts of a salt represented by formula (I-508-a) was added to the obtained reaction mixture, and the mixture was stirred at 50° C. for 10 hours. After cooling the obtained reaction mixture to 23°C, 25 parts of ion-exchanged water was added and the mixture was stirred at 23°C for 30 minutes, followed by liquid separation and the organic layer was taken out. After adding 25 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the organic layer was separated. This water washing operation was repeated five times. The obtained organic layer was concentrated, 3 parts of acetonitrile and 30 parts of tert-butyl methyl ether were added to the concentrated residue, and after stirring at 23°C for 30 minutes, the supernatant liquid was removed and concentrated to obtain the formula ( 9.26 parts of a salt represented by I-508) was obtained.
MASS (ESI (+) Spectrum): M ⁺ 852.9
MASS (ESI(-)Spectrum): M ^- 475.1

式（Ｉ－２－ｃ）で表される化合物２．６４部及びクロロホルム５０部を混合し、２３℃で３０分間攪拌した後、式（Ｉ－１－ｂ）で表される化合物１．６２部を添加し、５０℃に昇温後、５０℃で２時間撹拌した。得られた反応混合物に、式（Ｉ－１３０４－ａ）で表される塩１０．２９部を添加し、５０℃で１０時間撹拌した。得られた反応混合物を２３℃まで冷却した後、イオン交換水２５部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、アセトニトリル３部及びｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－１３０４）で表される塩１１．４２部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ８６６．９
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４０７．１ Example 4: Synthesis of salt represented by formula (I-1304)

After mixing 2.64 parts of the compound represented by formula (I-2-c) and 50 parts of chloroform and stirring at 23°C for 30 minutes, 1.62 parts of the compound represented by formula (I-1-b) was mixed. The mixture was heated to 50°C, and then stirred at 50°C for 2 hours. 10.29 parts of a salt represented by formula (I-1304-a) was added to the obtained reaction mixture, and the mixture was stirred at 50°C for 10 hours. After cooling the obtained reaction mixture to 23°C, 25 parts of ion-exchanged water was added and the mixture was stirred at 23°C for 30 minutes, followed by liquid separation and the organic layer was taken out. After adding 25 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the organic layer was separated. This water washing operation was repeated five times. The obtained organic layer was concentrated, 3 parts of acetonitrile and 30 parts of tert-butyl methyl ether were added to the concentrated residue, and after stirring at 23°C for 30 minutes, the supernatant liquid was removed and concentrated to obtain the formula ( 11.42 parts of a salt represented by I-1304) was obtained.
MASS (ESI (+) Spectrum): M ⁺ 866.9
MASS (ESI(-)Spectrum): M ^- 407.1

式（Ｉ－２－ｃ）で表される化合物２．６４部及びクロロホルム５０部を混合し、２３℃で３０分間攪拌した後、式（Ｉ－１－ｂ）で表される化合物１．６２部を添加し、５０℃に昇温後、５０℃で２時間撹拌した。得られた反応混合物に、式（Ｉ－１４３０－ａ）で表される塩１０．２９部を添加し、５０℃で１０時間撹拌した。得られた反応混合物を２３℃まで冷却した後、イオン交換水２５部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、アセトニトリル３部及びｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－１４３０）で表される塩１１．５８部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ８６６．９
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４０７．１ Example 5: Synthesis of salt represented by formula (I-1430)

After mixing 2.64 parts of the compound represented by formula (I-2-c) and 50 parts of chloroform and stirring at 23°C for 30 minutes, 1.62 parts of the compound represented by formula (I-1-b) was mixed. The mixture was heated to 50°C, and then stirred at 50°C for 2 hours. 10.29 parts of a salt represented by formula (I-1430-a) was added to the obtained reaction mixture, and the mixture was stirred at 50° C. for 10 hours. After cooling the obtained reaction mixture to 23°C, 25 parts of ion-exchanged water was added and the mixture was stirred at 23°C for 30 minutes, followed by liquid separation and the organic layer was taken out. After adding 25 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the organic layer was separated. This water washing operation was repeated five times. The obtained organic layer was concentrated, 3 parts of acetonitrile and 30 parts of tert-butyl methyl ether were added to the concentrated residue, and after stirring at 23°C for 30 minutes, the supernatant liquid was removed and concentrated to obtain the formula ( 11.58 parts of a salt represented by I-1430) was obtained.
MASS (ESI (+) Spectrum): M ⁺ 866.9
MASS (ESI(-)Spectrum): M ^- 407.1

式（Ｉ－２－ｃ）で表される化合物２．６４部及びクロロホルム５０部を混合し、２３℃で３０分間攪拌した後、式（Ｉ－１－ｂ）で表される化合物１．６２部を添加し、５０℃に昇温後、５０℃で２時間撹拌した。得られた反応混合物に、式（Ｉ－１６５４－ａ）で表される塩１１．６５部を添加し、５０℃で１０時間撹拌した。得られた反応混合物を２３℃まで冷却した後、イオン交換水２５部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、アセトニトリル３部及びｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－１６５４）で表される塩１３．０２部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ １００２．９
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４０７．１ Example 6: Synthesis of salt represented by formula (I-1654)

After mixing 2.64 parts of the compound represented by formula (I-2-c) and 50 parts of chloroform and stirring at 23°C for 30 minutes, 1.62 parts of the compound represented by formula (I-1-b) was mixed. The mixture was heated to 50°C, and then stirred at 50°C for 2 hours. To the obtained reaction mixture, 11.65 parts of a salt represented by formula (I-1654-a) was added, and the mixture was stirred at 50° C. for 10 hours. After cooling the obtained reaction mixture to 23°C, 25 parts of ion-exchanged water was added and the mixture was stirred at 23°C for 30 minutes, followed by liquid separation and the organic layer was taken out. After adding 25 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the organic layer was separated. This water washing operation was repeated five times. The obtained organic layer was concentrated, 3 parts of acetonitrile and 30 parts of tert-butyl methyl ether were added to the concentrated residue, and after stirring at 23°C for 30 minutes, the supernatant liquid was removed and concentrated to obtain the formula ( 13.02 parts of a salt represented by I-1654) was obtained.
MASS (ESI (+) Spectrum): M ⁺ 1002.9
MASS (ESI(-)Spectrum): M ^- 407.1

Synthesis of Resin The compounds (monomers) used in the synthesis of resin (A) are shown below. Hereinafter, these compounds will be referred to as "monomers (a1-1-3)" etc. according to their formula numbers.

Example 7 [Synthesis of resin A1]
As monomers, monomer (a1-1-3), monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2), monomer (a1-4-2), and monomer ( I-505), the molar ratio [monomer (a1-1-3): monomer (a1-2-6): monomer (a2-1-3): monomer (a3-4-2): monomer (a1 -4-2):monomer (I-505)] were mixed in a ratio of 20:35:3:12:25:5, and further added to this monomer mixture based on the total mass of all monomers. , 1.5 times the mass of methyl isobutyl ketone was mixed. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total monomer amount, and these were added at 73 mol%. It was heated at ℃ for about 5 hours. Thereafter, an aqueous p-toluenesulfonic acid solution (2.5% by weight) was added to the polymerization reaction solution in an amount of 2.0 times the total mass of all monomers, stirred for 12 hours, and then separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, which was then filtered and collected to obtain resin A1 with a weight average molecular weight of approximately 5.4×10 ³ in a yield of 63%. This resin A1 has the following structural units.

Example 8 [Synthesis of resin A2]
As monomers, monomer (a1-1-3), monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2), monomer (a1-4-2), and monomer ( I-506), the molar ratio [monomer (a1-1-3): monomer (a1-2-6): monomer (a2-1-3): monomer (a3-4-2): monomer (a1 -4-2):monomer (I-506)] were mixed in a ratio of 20:35:3:12:25:5, and further added to this monomer mixture based on the total mass of all monomers. , 1.5 times the mass of methyl isobutyl ketone was mixed. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total monomer amount, and these were added at 73 mol%. It was heated at ℃ for about 5 hours. Thereafter, an aqueous p-toluenesulfonic acid solution (2.5% by weight) was added to the polymerization reaction solution in an amount of 2.0 times the total mass of all monomers, stirred for 12 hours, and then separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, which was then filtered and collected to obtain resin A2 with a weight average molecular weight of approximately 5.3×10 ³ in a yield of 66%. This resin A2 has the following structural units.

Example 9 [Synthesis of resin A3]
As monomers, monomer (a1-1-3), monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2), monomer (a1-4-2), and monomer ( I-508), the molar ratio [monomer (a1-1-3): monomer (a1-2-6): monomer (a2-1-3): monomer (a3-4-2): monomer (a1 -4-2):monomer (I-508)] were mixed in a ratio of 20:35:3:12:25:5, and further added to this monomer mixture based on the total mass of all monomers. , 1.5 times the mass of methyl isobutyl ketone was mixed. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total monomer amount, and these were added at 73 mol%. It was heated at ℃ for about 5 hours. Thereafter, an aqueous p-toluenesulfonic acid solution (2.5% by weight) was added to the polymerization reaction solution in an amount of 2.0 times the total mass of all monomers, stirred for 12 hours, and then separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, which was then filtered and collected to obtain resin A3 with a weight average molecular weight of approximately 5.5×10 ³ in a yield of 63%. This resin A3 has the following structural units.

Example 10 [Synthesis of resin A4]
As monomers, monomer (a1-1-3), monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2), monomer (a1-4-2), and monomer ( I-1304), the molar ratio [monomer (a1-1-3): monomer (a1-2-6): monomer (a2-1-3): monomer (a3-4-2): monomer (a1 -4-2):monomer (I-1304)] were mixed in a ratio of 20:35:3:12:25:5, and further added to this monomer mixture based on the total mass of all monomers. , 1.5 times the mass of methyl isobutyl ketone was mixed. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total monomer amount, and these were added at 73 mol%. It was heated at ℃ for about 5 hours. Thereafter, an aqueous p-toluenesulfonic acid solution (2.5% by weight) was added to the polymerization reaction solution in an amount of 2.0 times the total mass of all monomers, stirred for 12 hours, and then separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, which was filtered and collected to obtain resin A4 with a weight average molecular weight of about 5.5×10 ³ in a yield of 65%. This resin A4 has the following structural units.

Example 11 [Synthesis of resin A5]
As monomers, monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2), monomer (a1-4-2) and monomer (I-1304) are used, and the mole thereof is The ratio [monomer (a1-2-6): monomer (a2-1-3): monomer (a3-4-2): monomer (a1-4-2): monomer (I-1304)] is 55:3 :12:25:5, and further, methyl isobutyl ketone was added to this monomer mixture in an amount of 1.5 times the total weight of all monomers. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total monomer amount, and these were added at 73 mol%. It was heated at ℃ for about 5 hours. Thereafter, an aqueous p-toluenesulfonic acid solution (2.5% by weight) was added to the polymerization reaction solution in an amount of 2.0 times the total mass of all monomers, stirred for 12 hours, and then separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, which was filtered and collected to obtain resin A5 with a weight average molecular weight of approximately 5.6×10 ³ in a yield of 88%. This resin A5 has the following structural units.

Example 12 [Synthesis of resin A6]
As monomers, monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2), monomer (a1-4-2) and monomer (I-1430) are used, and the mole thereof is The ratio [monomer (a1-2-6): monomer (a2-1-3): monomer (a3-4-2): monomer (a1-4-2): monomer (I-1430)] is 55:3 :12:25:5, and further, methyl isobutyl ketone was added to this monomer mixture in an amount of 1.5 times the total weight of all monomers. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total monomer amount, and these were added at 73 mol%. It was heated at ℃ for about 5 hours. Thereafter, an aqueous p-toluenesulfonic acid solution (2.5% by weight) was added to the polymerization reaction solution in an amount of 2.0 times the total mass of all monomers, stirred for 12 hours, and then separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, which was then filtered and collected to obtain resin A6 with a weight average molecular weight of approximately 5.5×10 ³ in a yield of 89%. This resin A6 has the following structural units.

Example 13 [Synthesis of resin A7]
As monomers, monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2), monomer (a1-4-2) and monomer (I-1654) are used, and the mole thereof is The ratio [monomer (a1-2-6): monomer (a2-1-3): monomer (a3-4-2): monomer (a1-4-2): monomer (I-1654)] is 55:3 :12:25:5, and further, methyl isobutyl ketone was added to this monomer mixture in an amount of 1.5 times the total weight of all monomers. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total monomer amount, and these were added at 73 mol%. It was heated at ℃ for about 5 hours. Thereafter, an aqueous p-toluenesulfonic acid solution (2.5% by weight) was added to the polymerization reaction solution in an amount of 2.0 times the total mass of all monomers, stirred for 12 hours, and then separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, which was then filtered and collected to obtain resin A7 with a weight average molecular weight of about 5.4×10 ³ in a yield of 84%. This resin A7 has the following structural units.

Synthesis Example 1 [Synthesis of resin AX1]
As monomers, monomer (a1-1-3), monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2), monomer (a1-4-2), and monomer ( IX-1), the molar ratio [monomer (a1-1-3): monomer (a1-2-6): monomer (a2-1-3): monomer (a3-4-2): monomer (a1 -4-2):monomer (IX-1)] were mixed in a ratio of 20:35:3:12:25:5, and further added to this monomer mixture based on the total mass of all monomers. , 1.5 times the mass of methyl isobutyl ketone was mixed. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total monomer amount, and these were added to 73 mol%. It was heated at ℃ for about 5 hours. Thereafter, an aqueous p-toluenesulfonic acid solution (2.5% by weight) was added to the polymerization reaction solution in an amount of 2.0 times the total mass of all monomers, stirred for 12 hours, and then separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, and was filtered and collected to obtain resin AX1 with a weight average molecular weight of about 5.5×10 ³ in a yield of 66%. This resin AX1 has the following structural units.

Synthesis Example 2 [Synthesis of resin AX2]
As monomers, monomer (a1-1-3), monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2), monomer (a1-4-2), and monomer ( IX-2), the molar ratio [monomer (a1-1-3): monomer (a1-2-6): monomer (a2-1-3): monomer (a3-4-2): monomer (a1 -4-2):monomer (IX-2)] are mixed in a ratio of 20:35:3:12:25:5, and further added to this monomer mixture based on the total mass of all monomers. , 1.5 times the mass of methyl isobutyl ketone was mixed. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total monomer amount, and these were added at 73 mol%. It was heated at ℃ for about 5 hours. Thereafter, an aqueous p-toluenesulfonic acid solution (2.5% by weight) was added to the polymerization reaction solution in an amount of 2.0 times the total mass of all monomers, stirred for 12 hours, and then separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, which was then filtered and collected to obtain resin AX2 with a weight average molecular weight of approximately 5.4×10 ³ in a yield of 60%. This resin AX2 has the following structural units.

Synthesis Example 3 [Synthesis of resin AA1]
As monomers, monomer (a1-1-3), monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2) and monomer (a1-4-2) are used, The molar ratio [monomer (a1-1-3): monomer (a1-2-6): monomer (a2-1-3): monomer (a3-4-2): monomer (a1-4-2)] is , 20:35:3:15:27, and methyl isobutyl ketone was added to this monomer mixture in an amount of 1.5 times the total weight of all monomers. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total monomer amount, and these were added at 73 mol%. It was heated at ℃ for about 5 hours. Thereafter, an aqueous p-toluenesulfonic acid solution (2.5% by weight) was added to the polymerization reaction solution in an amount of 2.0 times the total mass of all monomers, stirred for 12 hours, and then separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, which was then filtered and collected to obtain resin AA1 with a weight average molecular weight of approximately 5.5×10 ³ in a yield of 68%. This resin AA1 has the following structural units.

<Preparation of resist composition>
As shown in Table 2, a resist composition was prepared by mixing the following components and filtering the resulting mixture through a fluororesin filter with a pore size of 0.2 μm.

ＩＸ－１：特開２０１０－７７４０４号公報記載の方法で合成
ＩＸ－２：特開２００７－１９７７１８号公報記載の方法で合成

＜クエンチャー（Ｃ）＞
Ｃ１：特開２０１１－３９５０２号公報記載の方法で合成

＜溶剤＞
プロピレングリコールモノメチルエーテルアセテート ４００部
プロピレングリコールモノメチルエーテル １００部
γ－ブチロラクトン ５部 <Resin>
A1 to A7, AX1, AX2, AA1: Resin A1 to Resin A7, Resin AX1, Resin AX2, Resin AA1
<Salt (I)>
I-505: Salt represented by formula (I-505) I-506: Salt represented by formula (I-506) I-508: Salt represented by formula (I-508) I-1304: Formula Salt represented by (I-1304) I-1430: Salt represented by formula (I-1430) I-1654: Salt represented by formula (I-1654) <Acid generator>
B1-25: Salt represented by formula (B1-25); synthesized by the method described in JP-A-2011-126869

IX-1: Synthesized by the method described in JP-A No. 2010-77404 IX-2: Synthesized by the method described in JP-A-2007-197718

<Quencher (C)>
C1: Synthesized by the method described in JP-A-2011-39502

<Solvent>
Propylene glycol monomethyl ether acetate 400 parts Propylene glycol monomethyl ether 100 parts γ-butyrolactone 5 parts

(Electron beam exposure evaluation of resist composition: alkaline development)
A 6-inch silicon wafer was treated with hexamethyldisilazane at 90° C. for 60 seconds on a direct hot plate. A resist composition was spin-coated onto this silicon wafer so that the thickness of the composition layer was 0.04 μm. Thereafter, it was prebaked for 60 seconds on a direct hot plate at the temperature shown in the "PB" column of Table 2 to form a composition layer. The composition layer formed on the wafer is coated with a line-and-space pattern (pitch 60 nm/line width 30 nm).
After exposure, post-exposure baking was performed on a hot plate for 60 seconds at the temperature shown in the "PEB" column of Table 2. Next, the composition layer on the silicon wafer was paddle-developed at 23° C. for 60 seconds using a 2.38% by mass tetramethylammonium hydroxide aqueous solution as a developer to obtain a resist pattern.
The obtained resist pattern (line and space pattern) was observed with a scanning electron microscope, and the exposure amount at which the line width and space width of the line and space pattern with a pitch of 60 nm was 1:1 was defined as the effective sensitivity.

Line edge roughness evaluation (LER): The amplitude of unevenness on the side wall surface of a resist pattern manufactured at effective sensitivity was measured using a scanning electron microscope, and line edge roughness was determined. The results are shown in Table 3.


Compared to Comparative Compositions 1 to 8, compositions 1 to 25 had smaller fluctuations in unevenness on the side wall surfaces of the resist patterns, and the line edge roughness evaluation was good.

A resist composition containing the acid generator of the present invention can obtain a resist pattern having a good line edge roughness evaluation (LER), and is therefore suitable for microfabrication of semiconductors and is extremely useful industrially.

Claims (30)

An acid generator containing a salt represented by formula (I) or a structural unit represented by formula (IP).

[In formula (I) and formula (IP),
R ¹ , R ² and R ³ are each independently -O-R ¹⁰ , -O-CO-R ¹⁰ , -O-CO-O-R ¹⁰ or -O-L ¹ -CO-O-R ¹⁰ represents.
L ¹ represents an alkanediyl group having 1 to 6 carbon atoms.
R ¹⁰ represents a group having -SO ₂ -.
R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ each independently represent a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 18 carbon atoms; The group may have a substituent, and -CH ₂ - contained in the haloalkyl group and the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO ₂ -. good.
A ¹ , A ² and A ³ each independently represent a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group ₂ - may be replaced with -O-, -CO-, -S- or -SO ₂ -.
m1 represents any integer from 1 to 5, and when m1 is 2 or more, the groups within the parentheses may be the same or different.
m2 represents any integer from 0 to 5, and when m2 is 2 or more, the groups within the parentheses may be the same or different.
m3 represents any integer from 0 to 5, and when m3 is 2 or more, the groups within the parentheses may be the same or different.
m4 represents any integer from 0 to 4, and when m4 is 2 or more, a plurality of R ^4s may be the same or different.
m5 represents any integer from 0 to 4, and when m5 is 2 or more, a plurality of R ⁵ may be the same or different.
m6 represents any integer from 0 to 4, and when m6 is 2 or more, a plurality of R ⁶ may be the same or different.
m7 represents any integer from 0 to 4, and when m7 is 2 or more, a plurality of R ^7s may be the same or different.
m8 represents any integer from 0 to 5, and when m8 is 2 or more, a plurality of R ^8s may be the same or different from each other.
m9 represents any integer from 0 to 5, and when m9 is 2 or more, a plurality of R ⁹ 's may be the same or different.
However, 1≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5.
Q ^b1 and Q ^b2 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms.
L ^b1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and -CH ₂ - contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. , the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
Y ^b1 represents a single bond or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH ₂ - contained in the cyclic hydrocarbon group is -O-, -CO- , -S- or -SO ₂ -.
R ^bb1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may have a halogen atom.
X ¹⁰ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-** or *-Ax-Ph-Ay-**.
Ph represents a phenylene group which may have a substituent.
Ax represents one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, and a carbonate bond.
Ay represents one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, and a carbonate bond.
* and ** represent a bonding site, and * represents a bonding site with the carbon atom to which R ^bb1 is bonded.
L ¹⁰ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH ₂ - contained in the hydrocarbon group is -O-, -S-, -SO ₂ - or -CO- may be substituted. ] A ¹ is ****-X ⁰¹ -L ⁰¹ - or ****-L ⁰¹ -X ⁰¹ -,
A ² is ****-X ⁰² -L ⁰² - or ****-L ⁰² -X ⁰² -,
A ³ is ****-X ⁰³ -L ⁰³ - or ****-L ⁰³ -X ⁰³ -,
X ⁰¹ , X ⁰² and X ⁰³ each independently represent -O-, -CO-, -S- or -SO ₂ -,
L ⁰¹ , L ⁰² and L ⁰³ each independently represent a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and the hydrocarbon group may have a substituent. -CH ₂ - may be replaced with -O-, -CO-, -S- or -SO ₂ -,
The acid generator according to claim 1, wherein *** represents a bonding site with a benzene ring to which R ¹ , R ² or R ³ is bonded. The acid generator according to claim 2, wherein X ⁰¹ , X ⁰² and X ⁰³ are each independently -O- or -S-. L ⁰¹ , L ⁰² and L ⁰³ are each independently a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH ₂ - contained in the alkanediyl group is replaced with -O- or -CO-) The acid generator according to claim 2, which is The acid generator according to claim 1, wherein the group having -SO ₂ - in R ¹⁰ is a group having a ring represented by formula (T1A).

[In formula (T1A),
X ^1A represents an oxygen atom, a sulfur atom, -NH- or a methylene group.
R ^41A is an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms; represents an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms.
ma represents any integer from 0 to 9. When ma is 2 or more, multiple R ^41A 's may be the same or different.
The binding site can be at any position. ] Y ^b1 is an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a single bond or a substituent (-CH ₂ - contained in the alicyclic hydrocarbon group is -O-, - The acid generator according to claim 1, which may be replaced with CO-, -S- or -SO ₂ -. The acid generator according to claim 6, wherein ^Yb1 is a cyclohexanediyl group, an adamantanediyl group, a norbornanediyl group, an adamantanelactonediyl group, or a norbornanelactonediyl group. The acid generator according to claim 1, wherein X ¹⁰ is a single bond or a group represented by any one of formulas (X ¹⁰ -1) to (X ¹⁰ -10).

[Formula (X ¹⁰ -1) to (X ¹⁰ -10),
*, ** are bonding sites, and * represents the bonding site with the carbon atom to which R ^bb1 is bonded.
Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms.
mx represents any integer from 0 to 4. ] The acid generator according to claim 8, wherein X ¹⁰ is a single bond or a group represented by any one of formula (X ¹⁰ -1), formula (X ¹⁰ -5') and formula (X ¹⁰ -6'). agent.

[In formula (X ¹⁰ -1), formula (X ¹⁰ -5') and formula (X ¹⁰ -6'),
*, ** are bonding sites, and * represents the bonding site with the carbon atom to which R ^bb1 is bonded. ] L ¹⁰ is a single bond, an alkanediyl group having 1 to 6 carbon atoms (however, -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-), a carbon number 3 to 18 cyclic hydrocarbon groups (However, the cyclic hydrocarbon group may have a substituent, and the -CH ₂ - contained in the cyclic hydrocarbon group is -O-, -S-, - ) or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (however _, the cyclic hydrocarbon group may have a substituent, -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-, -CH ₂ - contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO ₂ - or -CO-. The acid generator according to claim 1. A resist composition containing the acid generator according to any one of claims 1 to 10. A salt represented by formula (I),
12. The resist composition according to claim 11, further comprising a resin containing a structural unit (a1) having an acid-labile group. Contains a resin containing a structural unit represented by formula (IP),
12. The resist composition according to claim 11, wherein the resin containing the structural unit represented by formula (IP) further contains a structural unit (a1) having an acid-labile group. The resist composition according to claim 13, further comprising a salt represented by formula (I). The structural unit (a1) having an acid-labile group is a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), and a structure represented by formula (a1-2). 13. The resist composition according to claim 12, comprising at least one type selected from the group consisting of units.

[In formula (a1-0), formula (a1-1) and formula (a1-2),
L ^a01 , L ^a1 and L ^a2 each independently represent -O- or *-O-(CH ₂ ) _k1 -CO-O-, k1 represents any integer from 1 to 7, and * Represents a binding site with -CO-.
R ^a01 , R ^a4 and R ^a5 each independently represent a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.
R ^a02 , R ^a03 and R ^a04 each independently represent an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or any of these. Represents a combined group.
R ^a6 and R ^a7 each independently represent an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic group having 6 to 18 carbon atoms. Represents a hydrocarbon group or a group formed by combining these.
m1' represents any integer from 0 to 14.
n1 represents any integer from 0 to 10.
n1' represents any integer from 0 to 3. ] 13. The resist composition according to claim 12, wherein the resin containing the structural unit (a1) having an acid-labile group further contains a structural unit represented by formula (a2-A).

[In formula (a2-A),
R ^a50 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may contain a halogen atom.
R ^a51 is a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, a carbon number Represents an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.
A ^a50 represents a single bond or *-X ^a51 --(A ^a52 --X ^a52 ) _nb --, and * represents a bonding site with the carbon atom to which --R ^a50 is bonded.
A ^a52 represents an alkanediyl group having 1 to 8 carbon atoms.
X ^a51 and X ^a52 each independently represent -O-, -CO-O- or -O-CO-.
nb represents 0 or 1.
mb represents any integer from 0 to 4. When mb is any integer of 2 or more, a plurality of R ^a51 's may be the same or different. ] The resist composition according to claim 11, further comprising a salt represented by formula (B1) or a salt represented by formula (B2).

[In formula (B1),
Q ^b1 and Q ^b2 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms.
L ^b1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and -CH ₂ - contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. , the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
Y represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH ₂ - contained in the cyclic hydrocarbon group is , -O-, -S-, -SO ₂ - or -CO-.
Z ⁺ represents an organic cation. ]

[In formula (B2),
m21 represents any integer from 1 to 5, and when m21 is 2 or more, the groups within the parentheses may be the same or different.
R ²¹ represents a hydrocarbon group having 3 to 48 carbon atoms, including a cyclic hydrocarbon group having 3 to 18 carbon atoms, and the cyclic hydrocarbon group may have a substituent, and the cyclic hydrocarbon group may have a substituent. -CH ₂ - may be replaced with -O-, -S-, -SO ₂ - or -CO-.
R ²² represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH ₂ - contained in the alkyl group may be replaced with -O- or -CO-.
m22 represents any integer from 0 to 4, and when m22 is 2 or more, a plurality of R ^22s may be the same or different.
Z ⁺ represents an organic cation. ] 12. The resist composition according to claim 11, further comprising a salt that generates an acid less acidic than the acid generated from the acid generator. (1) Applying the resist composition according to claim 11 onto a substrate,
(2) drying the applied composition to form a composition layer;
(3) exposing the composition layer to light;
(4) a step of heating the composition layer after exposure; and (5) a step of developing the composition layer after heating.
A method for manufacturing a resist pattern including: A salt represented by formula (I).

[In formula (I),
R ¹ , R ² and R ³ are each independently -O-R ¹⁰ , -O-CO-R ¹⁰ , -O-CO-O-R ¹⁰ or -O-L ¹ -CO-O-R ¹⁰ represents.
L ¹ represents an alkanediyl group having 1 to 6 carbon atoms.
R ¹⁰ represents a group having -SO ₂ -.
R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ each independently represent a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 18 carbon atoms; The group may have a substituent, and -CH ₂ - contained in the haloalkyl group and the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO ₂ -. good.
A ¹ , A ² and A ³ each independently represent a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group ₂ - may be replaced with -O-, -CO-, -S- or -SO ₂ -.
m1 represents any integer from 1 to 5, and when m1 is 2 or more, the groups within the parentheses may be the same or different.
m2 represents any integer from 0 to 5, and when m2 is 2 or more, the groups within the parentheses may be the same or different.
m3 represents any integer from 0 to 5, and when m3 is 2 or more, the groups within the parentheses may be the same or different.
m4 represents any integer from 0 to 4, and when m4 is 2 or more, a plurality of R ^4s may be the same or different.
m5 represents any integer from 0 to 4, and when m5 is 2 or more, a plurality of R ⁵ may be the same or different.
m6 represents any integer from 0 to 4, and when m6 is 2 or more, a plurality of R ⁶ may be the same or different.
m7 represents any integer from 0 to 4, and when m7 is 2 or more, a plurality of R ^7s may be the same or different.
m8 represents any integer from 0 to 5, and when m8 is 2 or more, a plurality of R ^8s may be the same or different from each other.
m9 represents any integer from 0 to 5, and when m9 is 2 or more, a plurality of R ⁹ 's may be the same or different.
However, 1≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5.
Q ^b1 and Q ^b2 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms.
L ^b1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and -CH ₂ - contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. , the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
Y ^b1 represents a single bond or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH ₂ - contained in the cyclic hydrocarbon group is -O-, -CO- , -S- or -SO ₂ -.
R ^bb1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may have a halogen atom.
X ¹⁰ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-** or *-Ax-Ph-Ay-**.
Ph represents a phenylene group which may have a substituent.
Ax represents one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, and a carbonate bond.
Ay represents one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, and a carbonate bond.
* and ** represent a bonding site, and * represents a bonding site with the carbon atom to which R ^bb1 is bonded.
L ¹⁰ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH ₂ - contained in the hydrocarbon group is -O-, -S-, -SO ₂ - or -CO- may be substituted. ] A ¹ is ****-X ⁰¹ -L ⁰¹ - or ****-L ⁰¹ -X ⁰¹ -,
A ² is ****-X ⁰² -L ⁰² - or ****-L ⁰² -X ⁰² -,
A ³ is ****-X ⁰³ -L ⁰³ - or ****-L ⁰³ -X ⁰³ -,
X ⁰¹ , X ⁰² and X ⁰³ each independently represent -O-, -CO-, -S- or -SO ₂ -,
L ⁰¹ , L ⁰² and L ⁰³ each independently represent a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and the hydrocarbon group may have a substituent. -CH ₂ - may be replaced with -O-, -CO-, -S- or -SO ₂ -,
21. The salt according to claim 20, wherein *** represents a bonding site with a benzene ring to which R ¹ , R ² or R ³ is bonded. The salt according to claim 21, wherein X ⁰¹ , X ⁰² and X ⁰³ are each independently -O- or -S-. L ⁰¹ , L ⁰² and L ⁰³ are each independently a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH ₂ - contained in the alkanediyl group is replaced with -O- or -CO-) 23. The salt according to claim 21 or 22. The salt according to claim 20 or 21, wherein the group having -SO ₂ - in R ¹⁰ is a group having a ring represented by formula (T1A).

[In formula (T1A),
X ^1A represents an oxygen atom, a sulfur atom, -NH- or a methylene group.
R ^41A is an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms; represents an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms.
ma represents any integer from 0 to 9. When ma is 2 or more, multiple R ^41A 's may be the same or different.
The binding site can be at any position. ] Y ^b1 is an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a single bond or a substituent (-CH ₂ - contained in the alicyclic hydrocarbon group is -O-, - 22. The salt according to claim 20 or 21, which may be replaced with CO-, -S- or -SO ₂ -. The salt according to claim 25, wherein ^Yb1 is a cyclohexanediyl group, an adamantanediyl group, a norbornanediyl group, an adamantanelactonediyl group, or a norbornanelactonediyl group. 22. The salt according to claim 20 or 21, wherein X ¹⁰ is a single bond or a group represented by any one of formulas (X ¹⁰ -1) to (X ¹⁰ -10).

[Formula (X ¹⁰ -1) to (X ¹⁰ -10),
*, ** are bonding sites, and * represents the bonding site with the carbon atom to which R ^bb1 is bonded.
Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms.
mx represents any integer from 0 to 4. ] 28. The salt according to claim 27, wherein X ¹⁰ is a single bond or a group represented by any one of formula (X ¹⁰ -1), formula (X ¹⁰ -5') and formula (X ¹⁰ -6').

[In formula (X ¹⁰ -1), formula (X ¹⁰ -5') and formula (X ¹⁰ -6'),
*, ** are bonding sites, and * represents the bonding site with the carbon atom to which R ^bb1 is bonded. ] L ¹⁰ is a single bond, an alkanediyl group having 1 to 6 carbon atoms (however, -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-), a carbon number 3 to 18 cyclic hydrocarbon groups (However, the cyclic hydrocarbon group may have a substituent, and the -CH ₂ - contained in the cyclic hydrocarbon group is -O-, -S-, - ) or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (however _, the cyclic hydrocarbon group may have a substituent, -CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-, -CH ₂ - contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO ₂ - or -CO-.) The salt according to claim 20 or 21. A resin containing a structural unit represented by formula (IP).

[In the formula (IP),
R ¹ , R ² and R ³ are each independently -O-R ¹⁰ , -O-CO-R ¹⁰ , -O-CO-O-R ¹⁰ or -O-L ¹ -CO-O-R ¹⁰ represents.
L ¹ represents an alkanediyl group having 1 to 6 carbon atoms.
R ¹⁰ represents a group having -SO ₂ -.
R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ each independently represent a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 18 carbon atoms; The group may have a substituent, and -CH ₂ - contained in the haloalkyl group and the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO ₂ -. good.
A ¹ , A ² and A ³ each independently represent a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group ₂ - may be replaced with -O-, -CO-, -S- or -SO ₂ -.
m1 represents any integer from 1 to 5, and when m1 is 2 or more, the groups within the parentheses may be the same or different.
m2 represents any integer from 0 to 5, and when m2 is 2 or more, the groups within the parentheses may be the same or different.
m3 represents any integer from 0 to 5, and when m3 is 2 or more, the groups within the parentheses may be the same or different.
m4 represents any integer from 0 to 4, and when m4 is 2 or more, a plurality of R ^4s may be the same or different.
m5 represents any integer from 0 to 4, and when m5 is 2 or more, a plurality of R ⁵ may be the same or different.
m6 represents any integer from 0 to 4, and when m6 is 2 or more, a plurality of R ⁶ may be the same or different.
m7 represents any integer from 0 to 4, and when m7 is 2 or more, a plurality of R ^7s may be the same or different.
m8 represents any integer from 0 to 5, and when m8 is 2 or more, a plurality of R ^8s may be the same or different from each other.
m9 represents any integer from 0 to 5, and when m9 is 2 or more, a plurality of R ⁹ 's may be the same or different.
However, 1≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5.
Q ^b1 and Q ^b2 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms.
L ^b1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and -CH ₂ - contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. , the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
Y ^b1 represents a single bond or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH ₂ - contained in the cyclic hydrocarbon group is -O-, -CO- , -S- or -SO ₂ -.
R ^bb1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may have a halogen atom.
X ¹⁰ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-** or *-Ax-Ph-Ay-**.
Ph represents a phenylene group which may have a substituent.
Ax represents one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, and a carbonate bond.
Ay represents one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, and a carbonate bond.
* and ** represent a bonding site, and * represents a bonding site with the carbon atom to which R ^bb1 is bonded.
L ¹⁰ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH ₂ - contained in the hydrocarbon group is -O-, -S-, -SO ₂ - or -CO- may be substituted. ]