JP2023542155A - Ultrasonic cleaning equipment - Google Patents

Abstract

TECHNICAL FIELD The present invention relates to an ultrasonic cleaning apparatus that can easily clean workpieces having patterns of complex and various shapes. An ultrasonic cleaning apparatus according to an embodiment of the present invention includes a main body including a jetting port arranged to direct a workpiece, a first chamber arranged on one side of the main body and supplied with fluid, and a first chamber provided with a fluid. a second chamber disposed on the other side of the main body and sucking in external air; and a cavity resonance (disposed within the first chamber) in which the fluid supplied to the first chamber generates a stationary pressure wave. resonance cavity), and an ultrasonic generator.

Description

The present invention relates to an ultrasonic cleaning apparatus, and more particularly to an apparatus for cleaning a workpiece using ultrasonic waves.

In recent years, microfabrication such as laser processing has become essential for processing highly integrated products in the display and semiconductor industries. Laser processing has the advantage of being able to precisely process even minute products, but it has the problem of generating fine particles during the processing process. In addition, since highly integrated products have complex patterns, it is difficult to remove generated particles.

As a conventional technique, a dry cleaning device using ultrasonic waves has been used to remove such fine particles. However, conventional ultrasonic cleaning devices have an excessively wide frequency range and low amplitude, and can only remove relatively large-sized particles, but cannot properly remove small-sized particles. Further, if the surface of the workpiece has an uneven pattern, there is a problem that fine particles cannot be properly removed.

The above-mentioned background technology is technical information that the inventor has retained for the purpose of deriving the present invention or has acquired in the process of deriving the present invention, and is not necessarily known technology that has been disclosed to the general public before the application of the present invention. is not limited.

The present invention is intended to solve the above-mentioned problems, and uses an ultrasonic cleaning device for a fluid medium containing cavity resonance to generate ultrasonic waves of a desired amplitude and frequency to clean a workpiece. An object of the present invention is to provide an ultrasonic cleaning device that can easily remove fine particles.

However, such problems are exemplary, and the problems to be solved by the present invention are not limited thereto.

An ultrasonic cleaning apparatus according to an embodiment of the present invention includes a main body including a jetting port arranged to direct a workpiece, a first chamber arranged on one side of the main body and supplied with fluid, and a first chamber provided with a fluid. a second chamber disposed on the other side of the main body and sucking in external air; and a cavity resonance disposed within the first chamber in which a stationary pressure wave is generated by the fluid supplied to the first chamber. (resonance cavity), including an ultrasonic generator.

An ultrasonic cleaning apparatus according to an embodiment of the present invention can generate ultrasonic waves having a desired frequency and/or amplitude in consideration of a workpiece and/or contaminants on the workpiece. In particular, the frequency width of the generated ultrasonic waves can be narrowed and the amplitude can be increased, making it possible to strongly vibrate fine particles below the boundary layer formed by the viscous resistance of air.

An ultrasonic cleaning apparatus according to an embodiment of the present invention uses an ultrasonic generator to vary the frequency and/or amplitude, and can easily clean various workpieces.

The ultrasonic cleaning device according to an embodiment of the present invention can more reliably clean a workpiece by reinforcing and interfering with the ultrasonic waves generated by the ultrasonic generator.

The ultrasonic cleaning device according to an embodiment of the present invention can more reliably clean a workpiece using ultrasonic waves of different frequencies generated by an ultrasonic generator.

FIG. 1 is a diagram showing an ultrasonic cleaning device according to an embodiment of the present invention. FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1; FIG. 3 is an enlarged view of III in FIG. 2; FIG. 3 is an enlarged view of IV in FIG. 2; FIG. 6 is a diagram showing an ultrasonic cleaning device according to another embodiment of the present invention. FIG. 6 is a diagram showing an ultrasonic cleaning device according to another embodiment of the present invention. 7 is a sectional view showing a cross section taken along VII-VII in FIG. 6. FIG. It is a figure showing an example of a workpiece. It is a figure which shows the cleaning state of the workpiece by a comparative example and an invention example. It is a figure which shows the cleaning state of the workpiece by a comparative example and an invention example. It is a figure which shows the cleaning state of the workpiece by a comparative example and an invention example. It is a figure which shows the cleaning state of the workpiece by a comparative example and an invention example. It is a figure which shows the cleaning state of the workpiece by a comparative example and an invention example. It is a figure which shows the cleaning state of the workpiece by a comparative example and an invention example.

BEST MODE FOR CARRYING OUT THE INVENTION

An ultrasonic cleaning apparatus according to an embodiment of the present invention includes a main body including a jetting port arranged to direct a workpiece, a first chamber arranged on one side of the main body and supplied with fluid, and a first chamber provided with a fluid. a second chamber disposed on the other side of the main body and sucking in external air; and a cavity resonance disposed within the first chamber in which a stationary pressure wave is generated by the fluid supplied to the first chamber. (resonance cavity), including an ultrasonic generator.

In the ultrasonic cleaning device according to an embodiment of the present invention, the ultrasonic generator branches the supplied fluid into a first path and a second path, and the ultrasonic generator branches the supplied fluid into a first path and a second path into which the fluid flowing along the first path flows. It may include a cavity resonance and a second cavity resonance into which the fluid flowing along the second path enters.

In the ultrasonic cleaning device according to an embodiment of the present invention, the ultrasonic waves generated by the fluid flowing into the first cavity resonance and the ultrasonic waves generated by the fluid flowing into the second cavity resonance have the same frequency. Good too.

In the ultrasonic cleaning device according to the embodiment of the present invention, the ultrasonic waves generated by the fluid flowing into the first cavity resonance and the ultrasonic waves generated by the fluid flowing into the second cavity resonance cause reinforcing interference. , the injection port may be disposed on the bottom surface of the main body, and may eject the reinforced ultrasonic waves to the workpiece.

In the ultrasonic cleaning device according to an embodiment of the present invention, the ultrasonic waves generated by the fluid flowing into the first cavity resonance and the ultrasonic waves generated by the fluid flowing into the second cavity resonance have different frequencies. Good too.

In the ultrasonic cleaning device according to an embodiment of the present invention, two injection ports are arranged on the bottom surface of the main body, and ultrasonic waves generated by fluid flowing into the first cavity resonance and ultrasonic waves flowing into the second cavity resonance. Ultrasonic waves generated by the fluids can be respectively injected onto the workpiece.

In the ultrasonic cleaning device according to an embodiment of the present invention, the ultrasonic generator includes a fine slit having a flow cross-sectional area smaller than a flow cross-sectional area of the fluid flowing along the first chamber, and the cavity resonance is caused by the The fluid passing through the fine slit may generate a steady pressure wave.

In the ultrasonic cleaning device according to an embodiment of the present invention, the ultrasonic generator is arranged at a distance between a first block and the first block, and the fine slit is arranged between the first block and the first block. The device includes a second block, and at least one of the first block and the second block can move in one direction to adjust the interval between the fine slits.

In the ultrasonic cleaning device according to an embodiment of the present invention, the ultrasonic generator has the cavity resonance disposed between it and the second block, and can move in one direction to adjust the length of the cavity resonance. A third block may be included.

In the ultrasonic cleaning device according to an embodiment of the present invention, the ultrasonic generator may include a fourth block that defines the cavity resonance and has a tapered shape or a film shape toward the injection port.

Other aspects, features, and advantages other than those described above will become apparent from the following detailed description, claims, and drawings.

Since the invention is amenable to various modifications and may have various embodiments, specific embodiments are shown in the drawings and will be explained in detail in the description of the invention. However, it is to be understood that this is not intended to limit the invention to any particular embodiment, but rather includes all modifications, equivalents, and alternatives that fall within the spirit and technical scope of the invention. . In the description of the invention, the same identification symbols will be used for the same components even if shown in other embodiments.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing the embodiments with reference to the drawings, the same or corresponding components are given the same drawing symbols, and overlapping explanations thereof will be given. is omitted.

In the following embodiments, terms such as "first" and "second" are used not in a limiting sense, but for the purpose of distinguishing one component from another component.

In the following embodiments, the singular expression includes the plural expression unless the context clearly dictates otherwise.

In the following embodiments, terms such as "comprising" or "having" refer to the presence of a feature or component described herein, and one or more other features or components. This does not exclude in advance the possibility that

In the drawings, the size of components may be exaggerated or reduced for clarity. For example, the size and thickness of each component shown in the drawings are shown arbitrarily for convenience of explanation, so the present invention is not necessarily limited to what is shown in the drawings.

In the following embodiments, the x-axis, y-axis, and z-axis are not limited to the three axes on the orthogonal coordinate system, but can be interpreted in a broad sense including them. For example, the x-axis, y-axis, and z-axis may be orthogonal to each other, or may point in different directions that are not orthogonal to each other.

The particular order of steps may be performed differently from that described, as certain embodiments may be implemented differently. For example, two steps described in succession may be performed substantially simultaneously or may proceed in the reverse order of the order described.

The terminology used in this application is merely used to describe particular embodiments and is not intended to limit the invention. In this application, terms such as "comprising" or "having" are intended to specify the presence of features, numbers, steps, acts, components, parts, or combinations thereof described herein. It is to be understood that this does not exclude in advance the possibility of the presence or addition of one or more other features, figures, steps, acts, components, parts or combinations thereof.

FIG. 1 is a diagram showing an ultrasonic cleaning apparatus 10 according to an embodiment of the present invention, FIG. 2 is a sectional view showing a cross section taken along line II-II in FIG. 1, and FIG. FIG. 4 is an enlarged view of IV of FIG. 2. FIG.

The ultrasonic cleaning apparatus 10 according to an embodiment of the present invention is an apparatus that dry-cleans the surface of a workpiece by generating ultrasonic waves having a frequency higher than an audible frequency using a fluid as a medium.

More specifically, a boundary layer is formed on the surface of the workpiece due to the viscous resistance of air, but such a boundary layer becomes an obstacle to cleaning the surface of the workpiece. . The ultrasonic cleaning device 10 according to an embodiment of the present invention can use ultrasonic waves to vibrate fine particles under a boundary layer and remove them from a workpiece.

Referring to FIGS. 1 and 2, an ultrasonic cleaning apparatus 10 according to an embodiment of the present invention may include a main body 110, a first chamber 170, a second chamber 190, and an ultrasonic generator 210. .

The main body 110 is a member forming a frame of the ultrasonic cleaning device 10 and can support other members. In one embodiment, the body 110 may have a rectangular parallelepiped shape with an interior space. However, the shape of the main body 110 is not particularly limited, and can be appropriately selected in consideration of the size and type of the workpiece, cleaning strength, etc.

As shown in FIG. 1, a first connection port 130 and a second connection port 150 may be arranged on the top surface of the main body 110.

The first connection port 130 connects a first chamber 170, which will be described later, and a fluid supply section (not shown). The fluid supplied from the fluid supply unit may flow into the first chamber 170 through the first connection port 130. The pressure of the fluid supplied from the fluid supply section can be appropriately selected in consideration of the amplitude and/or frequency of the generated ultrasonic waves.

Although FIG. 1 shows that two first connection ports 130 are arranged on the upper surface of the main body 110, the number and position thereof are not particularly limited.

The second connection port 150 connects a second chamber 190, which will be described later, and a suction section (not shown). When the suction unit performs a suction operation, sound pressure is generated in the second chamber 190. Accordingly, after external air and pollutants flow into the second chamber 190, they can be transferred to the suction part through the second connection port 150. Although FIG. 1 shows a total of six second connection ports 150, three each on the left and right sides of the top surface of the main body 110, the number and position thereof are not particularly limited.

A first injection port 113 may be disposed on one side of the main body 110. At the first injection port 113, ultrasonic waves using a fluid that has passed through a first chamber 170 and an ultrasonic generator 210 (described later) as a medium are ejected to the outside. The first injection port 113 is arranged to be directed toward the workpiece, and the ultrasonic waves ejected to the outside through the first injection port 113 clean the surface of the workpiece while colliding with the surface of the workpiece. be able to.

The first chamber 170 is disposed on one side of the body 110 and can supply fluid. In one embodiment, the first chamber 170 is disposed in the internal space of the main body 110, is connected to the first connection port 130, and is supplied with fluid from the fluid supply unit. As shown in FIG. 2, the first chamber 170 may be defined by the guide wall 111 of the main body 110.

Although FIG. 2 shows that the first chamber 170 is one space, the present invention is not limited thereto. For example, the number of first chambers 170 may correspond to the number of first connection ports 130. Thereby, the number of ultrasonic generators 210 described later can be provided in a number corresponding to the number of first chambers 170. However, for convenience of explanation, the following description will focus on the fact that the first chamber 170 is divided into one space inside the main body 110.

The second chamber 190 is disposed on the other side of the main body 110 and can draw in external air. In one embodiment, the second chamber 190 is disposed in the interior of the main body 110 and can be connected to the second connection port 150 . When the suction unit connected to the second connection port 150 performs a suction operation, external air and foreign matter may be sucked into the second chamber 190 .

Although FIG. 2 shows that one second chamber 190 is disposed on each side of the first chamber 170, the present invention is not limited thereto. For example, the second chamber 190 may be disposed in the center of the main body 110, and the first chambers 170 may be disposed on each side of the second chamber 190.

Note that although FIG. 2 shows that each second chamber 190 is one space, the present invention is not limited thereto. For example, the number of second chambers 190 may correspond to the number of second connection ports 150. However, for convenience of explanation, the following description will focus on the fact that each second chamber 190 is divided into one space inside the main body 110.

The ultrasonic generator 210 generates ultrasonic waves using the fluid that has entered the first chamber 170 as a medium. In one embodiment, the ultrasonic generator 210 is disposed within the first chamber 170 and has a resonance cavity that forms a stationary pressure wave using the fluid supplied to the first chamber 170 as a medium. can include.

More specifically, the ultrasonic cleaning apparatus 10 according to an embodiment of the present invention is an apparatus that generates ultrasonic waves using a fluid as a medium instead of using an ultrasonic piezo actuator. In such an ultrasonic cleaning device using fluid as a medium, the resonance cavity determines the frequency and amplitude of the ultrasonic waves. The waves generated by the high-speed, high-pressure fluid are amplified through cavity resonance to become ultrasound waves having a predetermined frequency, and the frequency and amplitude of the generated ultrasound waves can vary depending on the shape or size of the cavity.

However, in conventional ultrasonic cleaning devices, resonance due to cavities does not occur, so the frequency width of the generated ultrasonic waves is wide and the amplitude is low. This is because stationary pressure waves due to cavity resonance are not generated, making it difficult to generate ultrasonic waves having a desired frequency and amplitude.

The ultrasonic cleaning apparatus 10 according to an embodiment of the present invention can generate steady pressure waves within the cavity resonance because the ultrasonic generator 210 includes cavity resonance. Thereby, ultrasonic waves having a desired frequency and amplitude can be generated. In particular, by narrowing the frequency width and increasing the amplitude of the generated ultrasonic waves, fine particles below the boundary layer formed by the viscous resistance of air can be strongly vibrated.

More specifically, in the ultrasonic cleaning device 10 according to an embodiment of the present invention, the supplied fluid vibrates slightly (for example, in the vertical direction) and moves toward the fourth block 229 while causing the cavity resonance 225. Squirts inside/outside. The ejected fluid causes pressure fluctuations while moving inside/outside the cavity resonance. The pressure of the fluid changes periodically within the cavity resonance, amplifying the vibrations present within the cavity resonance. A steady pressure wave is then generated that has a resonance frequency and a maximum amplitude at that frequency (ie, a steady pressure wave generation with a narrow frequency band and amplified amplitude). The generated steady pressure waves are ejected externally in resonance with the supplied fluid, and can clean the surface of the workpiece.

In one embodiment, the cavity resonance according to an embodiment of the present invention may be a Helmholtz resonance cavity applying the principle of a Helmholtz resonator. However, the type of cavity resonance according to an embodiment of the present invention is not limited to this, and it is sufficient to generate an ultrasonic wave by generating a steady pressure wave using a fluid as a medium.

Referring again to FIG. 2, the ultrasonic generator 210 according to an embodiment of the present invention includes a support 211, a first block 213, a second block 217, a third block 221, and a first cavity resonance 225. can include.

The support stand 211 may be disposed inside the first chamber 170 and may support the ultrasonic generator 210 so as to be located within the first chamber 170 . In one embodiment, the support pedestal 211 can extend in one direction and connect to the inner walls on both sides of the body 110.

In one embodiment, the support base 211 can branch the fluid supplied through the first connection port 130 in the fluid supply unit. More specifically, as shown in FIG. 2, the support stand 211 is arranged to face the first connection port 130, and can branch the fluid ejected from the first connection port 130 into different paths. For example, after the fluid injected from the first connection port 130 collides with the support stand 211, the fluid flows into a first path on the left side of the support stand 211 and a second path on the right side of the support stand 211, as shown in FIG. Can be moved.

Referring to FIGS. 2 to 4, the first block 213 defines a first fine slit 218 together with a second block 217, which will be described later. The first block 213 may be connected to one side of the support 211 and placed inside the first chamber 170 .

The second block 217 may be disposed apart from the first block 213 such that a first fine slit 218 is disposed between the second block 217 and the first block 213 . In one embodiment, the second block 217 may be placed on one side of the guide wall 111 that defines the first chamber 170.

In one embodiment, the cross-sectional area of the first fine slit 218 may be smaller than the cross-sectional area of the first connection port 130. More specifically, the fluid supplied to the first chamber 170 through the first connection port 130 in the fluid supply unit may have a flow cross-sectional area rapidly reduced while passing through the first fine slit 218. . As a result, the fluid is ejected from the first fine slit 218 at high speed and flows into the first cavity resonance 225, which will be described later. Waves generated by the fluid flowing into the first cavity resonance 225 resonate internally, and can generate ultrasonic waves having a large amplitude and a specific frequency.

In one embodiment, the first block 213 and/or the second block 217 can move toward or away from each other. That is, at least one of the first block 213 and the second block 217 can move in one direction (for example, the X-axis direction in FIG. 3) to adjust the first distance d1. Here, the first distance d1 may correspond to the interval between the first fine slits 218.

More specifically, the first block 213 can approach or move away from the second block 217 while being connected to the support 211 . Alternatively, the second block 217 may be disposed on one side of the guide wall 111 and moved toward or away from the second block 217 .

By adjusting the first distance d1, the speed and/or pressure of the fluid ejected from the first fine slit 218 can be controlled, and thereby the amplitude and/or frequency of the generated ultrasonic waves can be controlled. I can do it.

The third block 221 defines a first cavity resonance 225 between it and the second block 217 . In one embodiment, the third block 221 may be spaced downwardly from the second block 217 by a third distance d3. Here, the third distance d3 may correspond to the length of the first cavity resonance 225.

In one embodiment, the third block 221 can move toward or away from the second block 217. More specifically, the third block 221 may be disposed on the guide wall 111 so as to be movable in one direction (eg, the Z-axis direction in FIG. 4). By moving the third block 221, the length of the first cavity resonance 225 defined by the second block 217 and the third block 221 can be adjusted.

By adjusting the third distance d3, the frequency and/or amplitude of the steady pressure wave generated by the first cavity resonance 225 can be controlled, thereby controlling the frequency and/or amplitude of the generated ultrasonic wave. can do.

The fourth block 229 is disposed on one side of the third block 221 and defines the first cavity resonance 225 together with the second block 217 and the third block 221 .

In one embodiment, one end of the fourth block 229 may be spaced apart from an end of the second block 217 by a second distance d2. The fourth block 229 may be spaced apart from the second block 217 to form a first outlet 230 . Fluid and ultrasound are injected outside the first cavity resonance 225 via the first outlet 230 .

In one embodiment, the fourth block 229 can move toward or away from the second block 217. More specifically, the fourth block 229 may be arranged to be movable in one direction (eg, the Z-axis direction in FIG. 4). By moving the fourth block 229, the length of the first outlet 230 defined by the second block 217 and the fourth block 229 can be adjusted.

By moving the fourth block 229 and adjusting the second distance d2, the frequency and/or amplitude of the ultrasonic waves injected to the first outlet 230 can be controlled.

In one embodiment, the fourth block 229 may have an inclined shape at one end. More specifically, as shown in FIG. 4, the fourth block 229 may have a tapered shape at the end toward the inside of the first chamber 170 at the first angle θ. Therefore, the fluid and ultrasonic waves emitted from the first cavity resonance 225 can move toward the first injection port 113 along the inclined surface of the fourth block 229 .

In other embodiments, the fourth block 229 can have a thin film shape.

In one embodiment, the ultrasonic generator 210 may further include a first nozzle defining member 235 that defines the first nozzle 113 .

The first nozzle partition member 235 may be provided at an end of the ultrasonic generator 210. The fluid and ultrasonic waves emitted from the first cavity resonance 225 may be emitted to the outside of the ultrasonic cleaning apparatus 10 through the first injection port 113 .

Although FIG. 2 shows that a pair of first injection port dividing members 235 are provided and the first injection port 113 is partitioned between them, the present invention is not limited thereto. For example, the first injection port dividing member 235 is a single member, and can partition the first injection port 113 between it and the guide wall 111 .

In one embodiment, the first nozzle partition member 235 may be formed such that an inner corner of the first chamber 170 is rounded.

With such a configuration, the ultrasonic cleaning device 10 according to an embodiment of the present invention can generate ultrasonic waves using fluid as a medium by including cavity resonance. In particular, the frequency and/or amplitude of the ultrasound can be adjusted by adjusting the arrangement relationship between the elements constituting the ultrasound generator 210.

In one embodiment, ultrasound generator 210 may include multiple cavity resonances.

More specifically, as shown in FIG. 2, the ultrasonic generator 210 includes a fifth block 215, a sixth block 219, a seventh block 223, an eighth block 231, and a second cavity resonance 227. can include.

The fluid flowing into the first chamber 170 may collide with the support 211 and branch into a first path and a second path. For example, as shown in FIG. 2, fluid moving along the first path may move toward the first block 213, and fluid moving along the second path may move toward the fifth block 215.

The fifth block 215, the sixth block 219, the seventh block 223, and the eighth block 231 correspond to the first block 213, the second block 217, the third block 221, and the fourth block 229, respectively. It can be placed in the desired position. Note that the configuration and function thereof may be the same as the first block 213, second block 217, third block 221, and fourth block 229, and detailed description thereof will be omitted.

The second cavity resonance 227 is partitioned by a sixth block 219, a seventh block 223, and an eighth block 231. When fluid flows into the interior of the second cavity resonance 227, a steady pressure wave will likewise be generated, which will generate ultrasound waves. The generated ultrasonic waves are emitted from the second cavity resonance 227 together with the fluid.

With this configuration, the ultrasonic cleaning apparatus 10 according to an embodiment of the present invention can move fluids to different paths and generate and eject ultrasonic waves from each path.

In particular, by equally controlling the frequencies of the ultrasonic waves generated in the first cavity resonance 225 and the second cavity resonance 227, reinforcing interference between the ultrasonic waves injected through the first injection port 113 can occur. Can be done. As a result, ultrasonic waves having a larger amplitude are ejected to strongly vibrate the area below the boundary layer formed on the surface of the workpiece due to the viscous resistance of the air, thereby making it possible to peel off fine-sized particles.

FIG. 5 is a diagram showing an ultrasonic cleaning device 10A according to another embodiment of the present invention.

As shown in FIG. 5, the ultrasonic cleaning device 10A may have a somewhat different arrangement relationship between the elements constituting the ultrasonic generator 210A compared to the ultrasonic cleaning device 10 of the above-described embodiment. The other configurations of the ultrasonic cleaning device 10A are the same as those of the ultrasonic cleaning device 10, and detailed description thereof will be omitted.

The ultrasonic generator 210A may include a first injection port 113 and a second injection port 114. More specifically, as shown in FIG. 5, a pair of first injection port dividing members 235 are disposed at the ends of the guide wall 111 at the ends of the main body 110. A second jet nozzle dividing member 237 may be disposed between the pair of first jet nozzle dividing members 235 . The second injection nozzle partitioning member 237 is arranged to be separated from the pair of first injection nozzle partitioning members 235 by a preset distance, thereby forming the first injection nozzle 113 and the second injection nozzle 114. Can be done.

In one embodiment, the ultrasound generator 210A may further include a second support 212. The second support stand 212 is connected to the first support stand 211 and can support the second injection port partition member 237 . Further, the third block 221 and the seventh block 223 may be arranged not on the guide wall 111 but on the second support stand 212 side.

In one embodiment, when compared to ultrasound generator 210, third block 221 and fourth block 229 of ultrasound generator 210A may be arranged oppositely to each other.

The fluid supplied from the fluid supply section branches off from the support base 211 and moves to a first path and a second path. The fluid that has moved along the first path generates ultrasonic waves through the first cavity resonance 225 and is injected into the first injection port 113 . The fluid that has moved along the second path generates ultrasonic waves through the second cavity resonance 227 and is injected into the second injection port 114 .

In one embodiment, the fluid moving along the first path and the second path may move along mutually separated regions within the first chamber 170. That is, once the fluid is branched, it may not share any space within the first chamber 170 until it is injected to the outside.

In one embodiment, the positions of the first block 213, second block 217, third block 221, and fourth block 229 and the fifth block 215, sixth block 219, seventh block 223, and eighth block 231 are relative to each other. May be different. More specifically, the interval between the first fine slits (not shown in the figures) defined by the first block 213 and the second block 217, and the second fine slit defined by the fifth block 215 and the sixth block 219. The spacing of the slits (not shown in the figures) may be different from each other. Alternatively, the length of the first cavity resonance 225 defined by the first block 213 and the third block 221 and the length of the second cavity resonance 227 defined by the fifth block 215 and the seventh block 223 may be different from each other. good. Alternatively, the length of the first outlet (not shown in the drawings) defined by the second block 217 and the fourth block 229 and the length of the second outlet (not shown in the drawings) defined by the sixth block 219 and the eighth block 231 may be different from each other. ) may be different from each other.

Therefore, the frequency and amplitude of the ultrasound waves generated by the fluid moving along the first path and the frequency and amplitude of the ultrasound waves generated by the fluid moving along the second path may be different from each other.

With this configuration, the ultrasonic cleaning apparatus 10A according to another embodiment of the present invention can efficiently clean the workpiece using ultrasonic waves having different frequencies and amplitudes.

FIG. 6 is a diagram showing an ultrasonic cleaning apparatus 10B according to another embodiment of the present invention, and FIG. 7 is a cross-sectional view taken along VII-VII in FIG. 6.

As shown in FIGS. 6 and 7, an ultrasonic cleaning apparatus 10B according to the present invention may be a cleaning apparatus for cleaning large substrates.

The ultrasonic cleaning device 10B includes a first main body 110A and a second main body 120, and the first main body 110A may correspond to the main body 110 of the embodiment described above. The first body 110A has a first chamber 170 and a second chamber 190 disposed therein, and can be connected to the second connection port 150 connected to the suction part.

The second body 120 is disposed on the upper surface of the first body 110A, and may be connected to a first connection port 130 connected to the fluid supply unit.

In one embodiment, as shown in FIG. 7, the first connection port 130 may be disposed to extend into the interior space of the second body 120. In addition, the first connection port 130 may include at least one injection port (not shown) on the bottom surface of the first connection port 130 to be connected to the first chamber 170 of the first body 110 . Accordingly, the fluid supplied from the fluid supply unit is supplied to the first connection port 130 and can flow into the first chamber 170 through the injection port.

An ultrasound generator 210 may be disposed inside the first chamber 170 . The configuration of the ultrasonic generator 210 may be similar to the configuration described above, and detailed description thereof will be omitted.

As described above, the ultrasonic generator 10B according to an embodiment of the present invention can have various sizes and shapes, and thus can be applied to cleaning processes for workpieces having various sizes and shapes. can.

FIG. 8 is a diagram showing an example of the workpiece, and FIGS. 9A, 9B, 10A, 10B, 11A, and 11B are diagrams showing cleaning states of the workpiece according to the comparative example and the invention example. .

As shown in FIG. 8, the workpiece to be cleaned in the present invention can have complex and various patterns. In particular, the patterns formed on the workpiece have complex shapes and heights, and the steps between the patterns can be formed in various ways. Furthermore, particles of various sizes generated during the processing process can be placed between the patterns of the workpiece.

Referring to FIG. 9A, in the case of a comparative example in which the ultrasonic cleaning device does not include cavity resonance and does not generate steady pressure waves, particles below the boundary layer formed on the upper surface of the workpiece are strongly vibrated due to the viscous resistance of the air. Can not do it. As a result, relatively large-sized particles can be removed, but small-sized particles cannot be separated from the workpiece through vibration and cannot be removed.

On the other hand, referring to FIG. 9B, in the example of the invention, the frequency width of the ultrasonic wave is narrowed through cavity resonance, the amplitude can be further amplified, and the particles below the boundary layer can be strongly vibrated. Thereby, even relatively small-sized particles can be easily removed.

Referring to FIG. 10A, in the comparative example, when patterns with complex and various shapes are arranged on the workpiece, the ultrasonic waves collide with the patterns and are diffracted or refracted, resulting in weakening of the intensity and Certain particulates cannot be properly removed.

On the other hand, referring to FIG. 10B, since the example of the invention can eject ultrasonic waves with strong amplitude, it is possible to easily remove fine particles located between complex patterns. In addition, since the invention can simultaneously eject ultrasonic waves with different frequencies and amplitudes, it is possible to easily remove fine particles located between the patterns even when the workpiece has patterns of various sizes and shapes. can do.

Referring to FIG. 11A, in the case of the comparative example, as the distance between the cleaning device and the workpiece increases, the intensity of the ultrasonic waves reaching the workpiece becomes weaker, making it impossible to clean the workpiece properly. Furthermore, if the distance between the cleaning device and the workpiece is shortened, the workpiece may be damaged by the fluid and ultrasonic waves jetted from the cleaning device.

On the other hand, referring to FIG. 11B, in the case of the invention example, since ultrasonic waves can be ejected with a strong amplitude, fine particles can be easily removed even if the distance from the workpiece is relatively large. In particular, the invention example allows the workpiece to be cleaned while maintaining an appropriate distance so that the workpiece is not damaged.

The ultrasonic cleaning apparatus 10 according to an embodiment of the present invention can generate ultrasonic waves having a desired frequency and/or amplitude in consideration of a workpiece and/or contaminants on the workpiece. In particular, the frequency width of the generated ultrasonic waves can be narrowed and the amplitude can be increased, making it possible to strongly vibrate fine particles below the boundary layer formed by the viscous resistance of air.

The ultrasonic cleaning apparatus 10 according to an embodiment of the present invention uses the ultrasonic generator 210 to vary the frequency and/or amplitude, and can easily clean various workpieces.

The ultrasonic cleaning apparatus 10 according to an embodiment of the present invention can more reliably clean a workpiece by reinforcing and interfering with the ultrasonic waves generated by the ultrasonic generator 210.

The ultrasonic cleaning apparatus 10 according to an embodiment of the present invention can more reliably clean a workpiece using ultrasonic waves of different frequencies generated by the ultrasonic generator 210.

Although the invention has thus been described with reference to the embodiments shown in the drawings, this is by way of example only. Those of ordinary skill in the art will appreciate that various modifications and equivalent other embodiments of the embodiments are possible. Therefore, the true technical protection scope of the present invention should be determined based on the appended claims.

The specific technical content described in the embodiment is one embodiment, and does not limit the technical scope of the embodiment. In order to provide a concise and clear description of the present invention, descriptions of conventional general techniques and configurations may be omitted. Furthermore, wire connections or connecting members between components shown in the drawings are illustrative examples of functional connections and/or physical or circuit connections, and various alternative or additional connections may be made in an actual device. It may be expressed as a functional connection, a physical connection, or a circuit connection. Further, unless there is a specific mention such as "essential", "important", etc., a component may not necessarily be necessary for applying the present invention.

In the description and claims of the invention, references to "the" and the like can refer to both the singular and the plural, unless the context specifically limits the context. In addition, when a range is described in the embodiments, each individual value constituting the range is included in the description of the invention (unless there is a statement to the contrary) that applies individual values belonging to the range. This is the same as the value listed. Furthermore, in the absence of an explicit order or description of steps constituting a method according to an embodiment, the steps may be performed in any suitable order. The embodiments are not necessarily limited by the order in which the steps are described. Any use of examples or exemplary terms (e.g., etc.) in the embodiments is merely to describe the embodiments in detail, and unless limited by the claims, the use of such examples or exemplary terms The scope of the embodiments is not limited by this. Moreover, one of ordinary skill in the art will appreciate that various modifications, combinations, and changes may be made according to design considerations and factors within the scope of the appended claims or their equivalents.

The present invention relates to a cleaning device, and can be applied to a cleaning device that cleans a workpiece using an ultrasonic generator.

Claims (10)

a main body equipped with an injection port arranged to point toward the workpiece;
a first chamber disposed on one side of the body and supplied with fluid;
a second chamber disposed on the other side of the main body and sucking external air;
an ultrasonic cleaning device including an ultrasonic generator disposed within the first chamber and including a resonance cavity in which a stationary pressure wave is generated by a fluid supplied to the first chamber; . The ultrasonic generator includes:
branching the supplied fluid into a first path and a second path;
a first cavity resonance into which fluid flowing along the first path enters; and
The ultrasonic cleaning device according to claim 1, further comprising a second cavity resonance into which fluid flowing along the second path enters. The ultrasonic cleaning device according to claim 2, wherein the ultrasonic waves generated by the fluid flowing into the first cavity resonance and the ultrasonic waves generated by the fluid flowing into the second cavity resonance have the same frequency. The ultrasonic waves generated by the fluid flowing into the first cavity resonance and the ultrasonic waves generated by the fluid flowing into the second cavity resonance cause reinforcing interference,
The ultrasonic cleaning apparatus according to claim 2, wherein the injection port is arranged on the bottom surface of the main body and injects the reinforced and interfered ultrasonic waves to the workpiece. The ultrasonic cleaning device according to claim 2, wherein the ultrasonic waves generated by the fluid flowing into the first cavity resonance and the ultrasonic waves generated by the fluid flowing into the second cavity resonance have different frequencies. Two injection ports are arranged on the bottom surface of the main body, and each of the injection ports transmits an ultrasonic wave generated by the fluid flowing into the first cavity resonance and an ultrasonic wave generated by the fluid flowing into the second cavity resonance. The ultrasonic cleaning device according to claim 2, which sprays the ultrasonic cleaning device onto the workpiece. The ultrasonic generator includes:
a fine slit having a flow cross-sectional area smaller than a flow cross-sectional area of the fluid flowing along the first chamber;
The cavity resonance is
The ultrasonic cleaning device according to claim 1, connected to the fine slit so that fluid passing through the fine slit generates a steady pressure wave. The ultrasonic generator includes:
a first block, and
a second block disposed apart from the first block, the fine slit being disposed between the second block and the first block;
The ultrasonic cleaning device according to claim 7, wherein at least one of the first block and the second block can move in one direction to adjust the interval between the fine slits. The ultrasonic generator includes:
The ultrasonic cleaning device according to claim 8, further comprising a third block in which the cavity resonance is arranged between the second block and which can move in one direction to adjust the length of the cavity resonance. The ultrasonic generator includes:
The ultrasonic cleaning device according to claim 1, further comprising a fourth block that defines the cavity resonance and has a tapered shape or a film shape toward the injection port.