JP2023523158A - 電磁放射線の操作 - Google Patents
電磁放射線の操作 Download PDFInfo
- Publication number
- JP2023523158A JP2023523158A JP2022560947A JP2022560947A JP2023523158A JP 2023523158 A JP2023523158 A JP 2023523158A JP 2022560947 A JP2022560947 A JP 2022560947A JP 2022560947 A JP2022560947 A JP 2022560947A JP 2023523158 A JP2023523158 A JP 2023523158A
- Authority
- JP
- Japan
- Prior art keywords
- optoelectronic device
- electrical contact
- tuning
- optical
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005670 electromagnetic radiation Effects 0.000 title claims abstract description 55
- 230000003287 optical effect Effects 0.000 claims abstract description 147
- 230000005693 optoelectronics Effects 0.000 claims abstract description 86
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 230000005684 electric field Effects 0.000 claims abstract description 45
- 230000003750 conditioning effect Effects 0.000 claims abstract description 24
- 239000000382 optic material Substances 0.000 claims abstract description 5
- 230000010287 polarization Effects 0.000 claims description 4
- 229910010272 inorganic material Inorganic materials 0.000 claims description 3
- 239000011147 inorganic material Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 37
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 238000013459 approach Methods 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- 230000001788 irregular Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 230000005697 Pockels effect Effects 0.000 description 2
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 206010067623 Radiation interaction Diseases 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001093 holography Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 230000004936 stimulating effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
- G02B1/007—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials made of negative effective refractive index materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1809—Diffraction gratings with pitch less than or comparable to the wavelength
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/30—Metamaterials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Light Receiving Elements (AREA)
- Optical Integrated Circuits (AREA)
Abstract
【選択図】図1
Description
2 基板
3 基板の主表面
4 調整構造
4’ 別の調整構造
5 調整構造の上面
6 調整構造の背面
7 第1の電気接点
8 第2の電気接点
9 調整構造の側面
9’ 調整構造の別の側面
10 カバー層
11 カバー層の上面
12 光学構造
13 光学構造の構造要素
14 光学構造の凹部
15 電圧源
16 導電性ワイヤ
17 基板の背面
18 調整構造の円周部
19 別の外周部
20 別の円周部のギャップ
21 光学構造の表面
22 関数グラフの第1の曲線
23 関数グラフの第2の曲線
24 関数グラフの第3の曲線
x,y 横方向
z 横断方向
d 光学構造までの距離
Claims (16)
- 電磁放射線を操作するための光電子デバイス(1)であって、
主延長面を有する基板(2)と、
前記基板(2)の主表面(3)上に配置された少なくとも1つの調整構造(4)であって、前記調整構造(4)は電気光学材料を含み、前記少なくとも1つの調整構造(4)は、前記調整構造(4)の第1の側にある第1の電気接点(7)と、前記調整構造(4)の第2の側にある第2の電気接点(8)とを含む、前記少なくとも1つの調整構造(4)と、
前記少なくとも1つの調整構造(4)を覆うカバー層(10)と、
前記カバー層(10)が光学構造(12)と前記少なくとも1つの調整構造(4)との間に配置されるように、前記カバー層(10)上に配置された光学構造(12)と、
前記第1の電気接点(7)及び前記第2の電気接点(8)に電気的に接続された電圧源(15)であって、前記少なくとも1つの調整構造(4)内に電場を生成するために設けられる、前記電圧源(15)と、
を含む、光電子デバイス(1)。 - 前記調整構造(4)の少なくとも1つの光学特性は、各々の電場を印加することによって変更される、請求項1に記載の光電子デバイス(1)。
- 前記光学構造(12)は、それぞれが、操作される電磁放射線の波長よりも小さい構造要素(13)を含む、請求項1または2に記載の光電子デバイス(1)。
- 前記光学構造(12)はメタマテリアルを含む、請求項1から3のいずれか一項に記載の光電子デバイス(1)。
- 前記光学構造(12)は、レンズ、回折格子、ゾーンプレート、位相板、ホログラフィックプレート、及び拡散板を含むグループの1つの要素を形成する、請求項1から4のいずれか一項に記載の光電子デバイス(1)。
- 前記光学構造(12)は、焦点距離、偏向角、位相遅延、光偏光、及びパターン投影を含むグループの要素である目標仕様を含み、前記光学構造(12)の前記目標仕様は、前記少なくとも1つの調整構造(4)内の前記電場を制御することによって変更される、請求項1から5のいずれか一項に記載の光電子デバイス(1)。
- 上面図において、前記調整構造(4)は円周部(18)を含む、先行請求項1から6のいずれか一項に記載の光電子デバイス(1)。
- 上面図において、少なくとも1つの別の調整構造(4’)は少なくとも1つの別の円周部(19)を含み、前記少なくとも1つの別の円周部(19)は、前記基板(2)の前記主延長面と平行に延長する横方向(x,y)において円周部(18)を囲む、請求項7に記載の光電子デバイス(1)。
- 調整構造(4)のアレイを形成する複数の調整構造(4)をさらに含む、請求項1から6のいずれか一項に記載の光電子デバイス(1)。
- 前記第1の電気接点(7)及び前記第2の電気接点(8)は、前記調整構造(4)の各々の側面(9,9’)上に配置され、前記側面(9,9’)は、前記基板(2)の前記主延長面に対して垂直または横方向に延びる、請求項1から9のいずれか一項に記載の光電子デバイス(1)。
- 前記第1の電気接点(7)及び前記第2の電気接点(8)は、各々、前記調整構造(4)の上面(5)及び背面(6)上に配置され、前記上面(5)及び前記背面(6)は前記基板(2)の前記主延長面に平行であり、前記上面(5)及び前記背面(6)は前記調整構造(4)の反対側に配置される、請求項1から9のいずれか一項に記載の光電子デバイス(1)。
- 複数の調整構造(4’)をさらに含み、前記電圧源(15)によって生成された前記電場は、動作中、前記調整構造(4’)のうちの少なくとも2つにおいて異なる、請求項1から11のいずれか一項に記載の光電子デバイス(1)。
- 前記少なくとも1つの調整構造(4)において、前記電圧源(15)によって生成された前記電場は、動作中に時間とともに可変である、請求項1から12のいずれか一項に記載の光電子デバイス(1)。
- 操作される前記電磁放射線は、赤外線範囲、近赤外線範囲、もしくは可視波長範囲、またはこれらの波長範囲の少なくとも2つに重なる範囲にある、請求項1から13のいずれか一項に記載の光電子デバイス(1)。
- 前記調整構造(4)は固体無機材料を含む、請求項1から14のいずれか一項に記載の光電子デバイス(1)。
- 電子システムは、特に、電磁放射線を放出及び/または感知するために設けられた光電子システムである、請求項1から15のいずれか一項に記載の光電子デバイス(1)を備える電子システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP20172735.1A EP3907536A1 (en) | 2020-05-04 | 2020-05-04 | Manipulating electromagnetic radiation |
EP20172735.1 | 2020-05-04 | ||
PCT/EP2021/061301 WO2021224108A1 (en) | 2020-05-04 | 2021-04-29 | Manipulating electromagnetic radiation |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2023523158A true JP2023523158A (ja) | 2023-06-02 |
Family
ID=70553757
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022560947A Pending JP2023523158A (ja) | 2020-05-04 | 2021-04-29 | 電磁放射線の操作 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20230161075A1 (ja) |
EP (1) | EP3907536A1 (ja) |
JP (1) | JP2023523158A (ja) |
KR (1) | KR20230003217A (ja) |
CN (1) | CN115485589B (ja) |
DE (1) | DE112021002589T5 (ja) |
WO (1) | WO2021224108A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023220096A2 (en) * | 2022-05-11 | 2023-11-16 | Lumotive, Inc. | Tunable optical devices with integrated electronics |
US11487184B1 (en) | 2022-05-11 | 2022-11-01 | Lumotive, LLC | Integrated driver and self-test control circuitry in tunable optical devices |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006293018A (ja) * | 2005-04-11 | 2006-10-26 | Rohm Co Ltd | 光変調装置および光変調システム |
JP2006301630A (ja) * | 2005-04-15 | 2006-11-02 | Asml Netherlands Bv | 可変レンズ及び露光システム |
US20080151168A1 (en) * | 2006-12-21 | 2008-06-26 | Citizen Watch Co., Ltd. | Liquid-crystal optical element, camera using the same, and optical pickup device using the same |
US20130128334A1 (en) * | 2011-11-18 | 2013-05-23 | Vuzix Corporation | Beam Steering Device |
CN204129398U (zh) * | 2014-11-05 | 2015-01-28 | 华中科技大学 | 一种红外聚光芯片 |
US20150146116A1 (en) * | 2013-11-28 | 2015-05-28 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Display device and liquid crystal prism cell panel |
WO2017057700A1 (ja) * | 2015-10-01 | 2017-04-06 | 国立大学法人東京大学 | 光変調器及び光変調装置 |
EP3324235A1 (en) * | 2016-11-16 | 2018-05-23 | Samsung Electronics Co., Ltd. | Two-dimensional light modulating device and electronic apparatus including the same |
JP2019086765A (ja) * | 2017-11-08 | 2019-06-06 | 三星電子株式会社Samsung Electronics Co.,Ltd. | メタレンズを含むプロジェクタ |
JP2021051293A (ja) * | 2019-09-23 | 2021-04-01 | 三星電子株式会社Samsung Electronics Co.,Ltd. | 光変調器、及びそれを含むビームステアリングシステム |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2369896A (en) * | 2000-12-06 | 2002-06-12 | Marconi Comm Ltd | Tunable optical filter actuator |
CN110994091A (zh) * | 2019-12-13 | 2020-04-10 | 华南理工大学 | 基于超表面的太赫兹可调谐滤波器 |
-
2020
- 2020-05-04 EP EP20172735.1A patent/EP3907536A1/en not_active Withdrawn
-
2021
- 2021-04-29 WO PCT/EP2021/061301 patent/WO2021224108A1/en active Application Filing
- 2021-04-29 US US17/922,900 patent/US20230161075A1/en active Pending
- 2021-04-29 JP JP2022560947A patent/JP2023523158A/ja active Pending
- 2021-04-29 KR KR1020227042105A patent/KR20230003217A/ko not_active Application Discontinuation
- 2021-04-29 DE DE112021002589.9T patent/DE112021002589T5/de active Pending
- 2021-04-29 CN CN202180032477.6A patent/CN115485589B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006293018A (ja) * | 2005-04-11 | 2006-10-26 | Rohm Co Ltd | 光変調装置および光変調システム |
JP2006301630A (ja) * | 2005-04-15 | 2006-11-02 | Asml Netherlands Bv | 可変レンズ及び露光システム |
US20080151168A1 (en) * | 2006-12-21 | 2008-06-26 | Citizen Watch Co., Ltd. | Liquid-crystal optical element, camera using the same, and optical pickup device using the same |
US20130128334A1 (en) * | 2011-11-18 | 2013-05-23 | Vuzix Corporation | Beam Steering Device |
US20150146116A1 (en) * | 2013-11-28 | 2015-05-28 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Display device and liquid crystal prism cell panel |
CN204129398U (zh) * | 2014-11-05 | 2015-01-28 | 华中科技大学 | 一种红外聚光芯片 |
WO2017057700A1 (ja) * | 2015-10-01 | 2017-04-06 | 国立大学法人東京大学 | 光変調器及び光変調装置 |
EP3324235A1 (en) * | 2016-11-16 | 2018-05-23 | Samsung Electronics Co., Ltd. | Two-dimensional light modulating device and electronic apparatus including the same |
JP2019086765A (ja) * | 2017-11-08 | 2019-06-06 | 三星電子株式会社Samsung Electronics Co.,Ltd. | メタレンズを含むプロジェクタ |
JP2021051293A (ja) * | 2019-09-23 | 2021-04-01 | 三星電子株式会社Samsung Electronics Co.,Ltd. | 光変調器、及びそれを含むビームステアリングシステム |
Also Published As
Publication number | Publication date |
---|---|
WO2021224108A1 (en) | 2021-11-11 |
US20230161075A1 (en) | 2023-05-25 |
KR20230003217A (ko) | 2023-01-05 |
CN115485589A (zh) | 2022-12-16 |
DE112021002589T5 (de) | 2023-02-16 |
CN115485589B (zh) | 2024-06-21 |
EP3907536A1 (en) | 2021-11-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10856057B2 (en) | Optical device and methods | |
US10705214B2 (en) | Optical projector having switchable light emission patterns | |
US9709829B2 (en) | Beam steering device | |
CN107219685B (zh) | 显示装置及显示装置的显示方法 | |
US9772484B2 (en) | Light modulating device | |
JP2023523158A (ja) | 電磁放射線の操作 | |
US20080239420A1 (en) | Agile holographic optical phased array device and applications | |
CN110446972B (zh) | 光扫描设备、光接收设备及光检测系统 | |
US20120307165A1 (en) | Imaging System | |
JP6596201B2 (ja) | 光偏向素子 | |
WO2019130721A1 (ja) | 光デバイス | |
WO2017154910A1 (ja) | レーザー走査装置及びその駆動方法 | |
US10267997B2 (en) | Infrared scene projector with per-pixel spectral and polarisation capability | |
WO2020264262A1 (en) | Speckle reduction in vcsel arrays | |
WO2018061231A1 (ja) | 光スキャンデバイス、光受信デバイス、および導波路アレイ | |
CN114761883B (zh) | 包含平面的超表面的电控动态光学组件 | |
US10156769B2 (en) | Two-dimensional beam steering device | |
US11480836B2 (en) | Liquid crystal on silicon device with microlens | |
WO2017219606A1 (en) | Light diffraction apparatus, display substrate, touch substrate and touch display apparatus, and method of modulating image display light intensity | |
US8089677B2 (en) | Dynamic optical grating device and associated method for modulating light | |
RU2680431C1 (ru) | Устройство и способ для управления направлением распространения луча | |
KR20200020577A (ko) | 회절 격자 구조체, 이를 포함하는 증강 현실장치 및 회절 격자 구조체의 제조 방법 | |
WO2017213100A1 (ja) | 反射型空間光変調器、光観察装置及び光照射装置 | |
RU2729979C1 (ru) | Устройство для оптического сканирования | |
WO2023231859A1 (zh) | 一种液晶器件、光学调制装置和系统 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221202 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20221202 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230914 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230926 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240305 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240603 |