JP2023508334A - 高範囲差圧センサ - Google Patents
高範囲差圧センサ Download PDFInfo
- Publication number
- JP2023508334A JP2023508334A JP2022538234A JP2022538234A JP2023508334A JP 2023508334 A JP2023508334 A JP 2023508334A JP 2022538234 A JP2022538234 A JP 2022538234A JP 2022538234 A JP2022538234 A JP 2022538234A JP 2023508334 A JP2023508334 A JP 2023508334A
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- Prior art keywords
- pressure transmitter
- diaphragm
- process pressure
- flexible diaphragm
- transmitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 claims abstract description 59
- 230000008569 process Effects 0.000 claims abstract description 59
- 239000000463 material Substances 0.000 claims abstract description 26
- 239000003990 capacitor Substances 0.000 claims abstract description 25
- 210000005056 cell body Anatomy 0.000 claims abstract description 14
- 239000007788 liquid Substances 0.000 claims abstract description 11
- 230000004044 response Effects 0.000 claims abstract description 7
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910001026 inconel Inorganic materials 0.000 claims description 10
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 5
- 229910000816 inconels 718 Inorganic materials 0.000 claims description 3
- 230000001419 dependent effect Effects 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 abstract description 14
- 230000006854 communication Effects 0.000 abstract description 10
- 238000004891 communication Methods 0.000 abstract description 10
- 238000012545 processing Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000002955 isolation Methods 0.000 description 7
- 238000009530 blood pressure measurement Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 239000000945 filler Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
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- 239000011521 glass Substances 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 230000007175 bidirectional communication Effects 0.000 description 1
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- 238000006073 displacement reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
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- 229920006302 stretch film Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/06—Devices or apparatus for measuring differences of two or more fluid pressure values using electric or magnetic pressure-sensitive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Abstract
Description
発明の概要
Claims (19)
- ハウジング内に配置された伝送電子機器と、
内部キャビティを規定する第1の材料を含むセル本体と、導電部を有する第2の材料を含み、ダイアフラムが前記セル本体に結合され、前記内部キャビティを第1キャビティおよび第2キャビティに分離する可撓性ダイアフラムと、を含み、前記第1および第2キャビティはそれぞれ誘電性充填液を含み、充填液のそれぞれは、圧力を受け取り、前記ダイアフラムに対応する力を発揮するように構成され、前記ダイアフラムは、前記第1および第2キャビティの充填液によって受け取られた圧力の差異に応じて、変形可能とされた、圧力センサと、
前記第1キャビティ内の前記セル本体に結合され、第1可変キャパシタを形成するために前記ダイアフラムに容量結合された第1電極と、
前記第1電極に電気的に接続され、セル本体から延びる第1のリードワイヤと、
第2キャビティ内のセル本体に結合され、ダイアフラムの導電部に容量結合されて第2キャパシタを形成し、第1および第2の可変キャパシタは、印加された圧力に応じた静電容量値を有する第2電極と、
前記第2電極に電気的に結合され、前記第2電極から伸びる第2リードワイヤと、
を備え、
前記第1および第2リードワイヤは、前記伝送電子機器に電気的に結合され、
前記可撓性ダイアフラムは、前記可撓性ダイアフラムの周囲に位置する溝領域を含む、
プロセス圧力伝送器。 - 前記第2の材料がインコネル合金を含む、請求項1に記載のプロセス圧力伝送器。
- 前記インコネル合金は、インコネル718合金を含む、請求項2に記載のプロセス圧力伝送器。
- 前記第1の材料がニトロニック合金を含む、請求項1に記載のプロセス圧力伝送器。
- 前記ニトロニック合金は、ニトロニック32合金を含む、請求項4に記載のプロセス圧力伝送器。
- 前記第1の材料がニトロニック32合金を含み、前記第2の材料がインコネル718合金を含む、請求項1に記載のプロセス圧力伝送器。
- 前記セル本体は、2つのハーフセルから形成される、請求項1に記載のプロセス圧力伝送器。
- 前記2つのハーフセルは、前記可撓性ダイアフラムに溶接される、請求項7に記載のプロセス圧力伝送器。
- 第1の溶接部が第1のハーフセルを前記可撓性ダイアフラムに結合し、第2の溶接部が第2のハーフセルを前記可撓性ダイアフラムに結合する、請求項8に記載のプロセス圧力伝送器。
- 前記第1の溶接部および前記第2の溶接部が、前記可撓性ダイアフラムのランド領域内に位置する、請求項9に記載のプロセス圧力伝送器。
- 前記第1の溶接部および前記第2の溶接部が、部分的に前記ランド領域内に延在する、請求項10に記載のプロセス圧力伝送器。
- 前記可撓性ダイアフラムの溝領域の反対側上に対向する溝領域を含む、請求項1に記載のプロセス圧力伝送器。
- 前記溝領域はテーパ状である、請求項12に記載のプロセス圧力伝送器。
- 前記可撓性ダイアフラムの厚さは、前記溝領域の内周における厚さに比べて、前記溝領域の外周においてより大きい、請求項13に記載のプロセス圧力伝送器。
- 前記溝領域は、前記可撓性ダイアフラムと前記セル本体との間に追加の間隙を提供する、請求項1に記載のプロセス圧力伝送器。
- 前記ランド領域は、溶着処理中の前記セル本体の歪みを低減するように構成される、請求項10に記載のプロセス圧力伝送器。
- 前記溝領域が、前記内部キャビティ内に位置する前記可撓性ダイアフラムの内周から、前記内部キャビティを越えて位置する外周まで延びる、請求項1に記載のプロセス圧力伝送器。
- 前記第1の材料および前記第2の材料が同じである、請求項1に記載のプロセス圧力伝送器。
- 前記第1の材料および前記第2の材料がインコネルを含む、請求項1に記載のプロセス圧力伝送器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/725,035 | 2019-12-23 | ||
US16/725,035 US11226253B2 (en) | 2019-12-23 | 2019-12-23 | High range differential pressure sensor |
PCT/US2020/060726 WO2021133481A1 (en) | 2019-12-23 | 2020-11-16 | High range differential pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2023508334A true JP2023508334A (ja) | 2023-03-02 |
JP7459257B2 JP7459257B2 (ja) | 2024-04-01 |
Family
ID=73793811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022538234A Active JP7459257B2 (ja) | 2019-12-23 | 2020-11-16 | 高範囲差圧センサ |
Country Status (6)
Country | Link |
---|---|
US (1) | US11226253B2 (ja) |
EP (1) | EP4058768A1 (ja) |
JP (1) | JP7459257B2 (ja) |
CN (2) | CN212300704U (ja) |
CA (1) | CA3162203A1 (ja) |
WO (1) | WO2021133481A1 (ja) |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4905575A (en) | 1988-10-20 | 1990-03-06 | Rosemount Inc. | Solid state differential pressure sensor with overpressure stop and free edge construction |
US5224383A (en) | 1991-06-14 | 1993-07-06 | Industrial Sensors, Inc. | Melt pressure measurement and the like |
US5386729A (en) | 1993-09-22 | 1995-02-07 | The Babcock & Wilcox Company | Temperature compensated microbend fiber optic differential pressure transducer |
US6295875B1 (en) | 1999-05-14 | 2001-10-02 | Rosemount Inc. | Process pressure measurement devices with improved error compensation |
US6837111B2 (en) | 2002-06-24 | 2005-01-04 | Mykrolis Corporation | Variable capacitance measuring device |
US7000482B2 (en) | 2002-06-24 | 2006-02-21 | Mykrolis Corporation | Variable capacitance measuring device |
US7401522B2 (en) | 2005-05-26 | 2008-07-22 | Rosemount Inc. | Pressure sensor using compressible sensor body |
US7434472B2 (en) | 2006-03-31 | 2008-10-14 | Leitko Travis W | Differential pressure transducer configurations including displacement sensor |
WO2007127170A2 (en) | 2006-04-25 | 2007-11-08 | Rosemount Inc. | Pressure sensor using near net shape sintered ceramics |
US9316553B2 (en) * | 2014-03-26 | 2016-04-19 | Rosemount Inc. | Span line pressure effect compensation for diaphragm pressure sensor |
US9857259B2 (en) | 2014-09-30 | 2018-01-02 | Rosemount Inc. | Differential pressure sensor with high pressure capabilities |
DE102017109971A1 (de) | 2017-05-09 | 2018-11-15 | Endress+Hauser SE+Co. KG | Drucksensor |
-
2019
- 2019-12-23 US US16/725,035 patent/US11226253B2/en active Active
-
2020
- 2020-04-03 CN CN202020484878.8U patent/CN212300704U/zh active Active
- 2020-04-03 CN CN202010262844.9A patent/CN113091992B/zh active Active
- 2020-11-16 CA CA3162203A patent/CA3162203A1/en active Pending
- 2020-11-16 JP JP2022538234A patent/JP7459257B2/ja active Active
- 2020-11-16 WO PCT/US2020/060726 patent/WO2021133481A1/en unknown
- 2020-11-16 EP EP20824000.2A patent/EP4058768A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
CN113091992B (zh) | 2023-02-03 |
US11226253B2 (en) | 2022-01-18 |
CA3162203A1 (en) | 2021-07-01 |
CN212300704U (zh) | 2021-01-05 |
US20210190619A1 (en) | 2021-06-24 |
JP7459257B2 (ja) | 2024-04-01 |
CN113091992A (zh) | 2021-07-09 |
EP4058768A1 (en) | 2022-09-21 |
WO2021133481A1 (en) | 2021-07-01 |
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