JP2023184422A5 - - Google Patents

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Publication number
JP2023184422A5
JP2023184422A5 JP2023030136A JP2023030136A JP2023184422A5 JP 2023184422 A5 JP2023184422 A5 JP 2023184422A5 JP 2023030136 A JP2023030136 A JP 2023030136A JP 2023030136 A JP2023030136 A JP 2023030136A JP 2023184422 A5 JP2023184422 A5 JP 2023184422A5
Authority
JP
Japan
Prior art keywords
measurement
sensitivity
distribution
adopted
parameter value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023030136A
Other languages
English (en)
Japanese (ja)
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JP2023184422A (ja
Filing date
Publication date
Application filed filed Critical
Priority to KR1020230072599A priority Critical patent/KR20230173023A/ko
Priority to TW112121446A priority patent/TW202414124A/zh
Priority to US18/331,986 priority patent/US12578181B2/en
Priority to CN202310707304.0A priority patent/CN117250830A/zh
Publication of JP2023184422A publication Critical patent/JP2023184422A/ja
Publication of JP2023184422A5 publication Critical patent/JP2023184422A5/ja
Pending legal-status Critical Current

Links

JP2023030136A 2022-06-16 2023-02-28 計測方法、計測装置、リソグラフィ装置および物品製造方法 Pending JP2023184422A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020230072599A KR20230173023A (ko) 2022-06-16 2023-06-07 계측방법, 계측장치, 리소그래피 장치, 및 물품 제조방법
TW112121446A TW202414124A (zh) 2022-06-16 2023-06-08 測量方法、測量設備、光刻設備、及物品製造方法
US18/331,986 US12578181B2 (en) 2022-06-16 2023-06-09 Measuring method, measuring apparatus, lithography apparatus, and article manufacturing method
CN202310707304.0A CN117250830A (zh) 2022-06-16 2023-06-14 测量方法、测量装置、光刻装置和物品制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022097424 2022-06-16
JP2022097424 2022-06-16

Publications (2)

Publication Number Publication Date
JP2023184422A JP2023184422A (ja) 2023-12-28
JP2023184422A5 true JP2023184422A5 (https=) 2026-03-10

Family

ID=89333450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023030136A Pending JP2023184422A (ja) 2022-06-16 2023-02-28 計測方法、計測装置、リソグラフィ装置および物品製造方法

Country Status (1)

Country Link
JP (1) JP2023184422A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025243386A1 (ja) * 2024-05-21 2025-11-27 株式会社日立ハイテク 計測システム

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