JP2023147578A - chuck for prober - Google Patents

Abstract

To provide a chuck for a prober that can equalize the temperature of a holding surface that holds a wafer.SOLUTION: A chuck for a prober includes an introduction flow path 52 that guides air introduced from an air introduction port 30 to heat exchange positions 46, 48, and 50 distributed in at least three locations, and an outlet flow path 54 that guides the air guided to each of the heat exchange positions 46, 48, and 50 to an air outlet 34. A heat exchange promoting surface 68 is provided at each of the heat exchange positions 46, 48, and 50 by forming the cross-sectional area of the introduction flow path 52 at each of the heat exchange positions 46, 48, and 50 to be larger than the cross-sectional area of the outlet flow path 54.SELECTED DRAWING: Figure 2

Description

The present invention relates to a prober chuck, and particularly to a prober chuck that holds a semiconductor wafer.

In a semiconductor manufacturing process, a semiconductor wafer (hereinafter referred to as a wafer) is subjected to various treatments to form a plurality of chips having devices. Each chip is tested for electrical characteristics, then cut into pieces with a dicer, and then fixed to a lead frame or the like and assembled.

Inspection of electrical characteristics is performed by a prober equipped with a tester. The prober holds the wafer on the holding surface of the chuck and brings the probe into contact with the electrode pads of each chip. The tester supplies power and various test signals to the chip from terminals connected to probes, and analyzes signals output from the electrodes of the chip to check whether the chip operates normally (for example, Patent Document 1 reference).

Japanese Patent Application Publication No. 2019-169549

When testing the electrical characteristics of a chip, the wafer and heater generate heat, so the temperature of the wafer is adjusted by cooling the chuck that holds the wafer with a medium. At that time, the inspection may be performed by adjusting the temperature of the chuck to about 20 to 30 degrees near normal temperature. When measuring near room temperature, the temperature of the chuck is adjusted to the desired temperature by supplying a medium such as liquid or air into the chuck. It becomes necessary and becomes a large-scale system. Therefore, if the temperature is around room temperature, it can be adjusted by cooling the compressed air with a simple cooler, making it possible to operate a system that is simpler than using a liquid.

However, when air is used as the medium, the specific heat of air is smaller than the specific heat of liquid. For this reason, for example, heat exchange from the chuck to the air may almost end near the air inlet provided in the chuck. As a result, there is a problem in that a temperature difference occurs on the holding surface of the chuck from the air inlet to the air outlet.

In recent years, temperature uniformity on the holding surface of a chuck has become an important requirement because it affects the yield of device measurements. For this reason, the chuck is required to have a uniform temperature on its holding surface.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a chuck for a prober that uses air as a medium that can uniformize the temperature of a holding surface that holds a wafer.

In order to achieve the object of the present invention, a prober chuck of the present invention is a prober chuck for holding a wafer, and includes a chuck body having a holding surface capable of holding a wafer, and a chuck body provided at one end of the chuck body. An air inlet provided at one end of the chuck body, an air outlet provided at the other end different from one end of the chuck body, and air introduced from the air inlet at multiple locations in the in-plane direction of the holding surface inside the chuck body. It includes an inlet flow path that leads the air to the distributed heat exchange positions, and an outlet flow path that leads the air led to each heat exchange position to the air outlet.

In one form of the present invention, the cross-sectional area of the inlet flow path at each heat exchange position is formed larger than the cross-sectional area of the outlet flow path, and at each heat exchange position, a cross-sectional area is formed between the introduction flow path and the outlet flow path. It is preferable that a heat exchange promoting surface constituted by a stepped surface is provided.

In one form of the present invention, each heat exchange position is preferably arranged on concentric circles equidistant from the center of the chuck body.

In one embodiment of the present invention, it is preferable that the heat exchange positions are evenly distributed along the circumferential direction of the concentric circles.

In one form of the present invention, the heat exchange positions are distributed in at least three locations, and include a first heat exchange position, a second heat exchange position, and a third heat exchange position, and the introduction flow path is configured to introduce air. A main flow path extending from the mouth to the first heat exchange position, a first branch flow path branching from the main flow path and extending to the second heat exchange position, and a second branch flow branching from the main flow path and extending to the third heat exchange position. It is preferable to have a path.

In one aspect of the present invention, the first branch channel and the second branch channel are preferably provided along the same straight line orthogonal to the channel direction of the main channel.

In one embodiment of the present invention, it is preferable that at least a portion of the introduction flow path be constructed of a plastic pipe material.

In one embodiment of the present invention, the pipe material is preferably arranged with a gap from the inner wall surface of the chuck body.

In one aspect of the present invention, the pipe material is preferably connected to the air inlet via a rubber packing.

In one embodiment of the present invention, it is preferable that the outlet passages have communication passages that communicate with each other on the way from each heat exchange position to the air outlet.

According to the present invention, it is possible to equalize the temperature of the holding surface that holds the wafer.

FIG. 2 is a schematic diagram showing the configuration of a prober. FIG. 3 is a perspective view showing the internal structure of the chuck body. FIG. 3 is an enlarged perspective view showing the form of a heat exchange position provided in the chuck body. It is a sectional view showing the arrangement form of the pipe material with respect to a chuck main body. FIG. 3 is a cross-sectional view of the air inlet and its vicinity including the pipe material.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a prober chuck according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic diagram showing the configuration of a prober 12 on which a prober chuck (hereinafter referred to as chuck) 10 of an embodiment is mounted. As shown in FIG. 1, the prober 12 is equipped with a chuck 10 for holding the wafer W, and the chuck 10 includes a chuck body 16 having a holding surface 14 capable of holding the wafer W. . The chuck body 16 is made of a metal such as aluminum or copper, or a material with good thermal conductivity such as ceramic. The chuck body 16 of this example is an example of the chuck body of the present invention.

Further, the prober 12 includes a probe card 20 having a probe 18 that comes into contact with an electrode of a chip to be tested, and a tester 22. The tester 22 includes a tester main body 24 and an interface 26 that electrically connects terminals of the tester main body 24 and terminals of the probe card 20. The tester 22 supplies power and various test signals to the chip from terminals connected to the probe 18, and analyzes signals output to the electrodes of the chip to check whether the chip operates normally.

Next, a cooling system for cooling the chuck body 16 to about 20 to 30 degrees near room temperature, for example, will be described. The cooling system of this example includes a cooler 28 that cools air (compressed air), a supply side flow path 32 that supplies the air cooled by the cooler 28 to the air inlet 30 of the chuck body 16, and The chuck main body 16 includes an air outlet 34 and an exhaust side flow path 36. Furthermore, a refrigerant flow path 38 is provided in the chuck body 16 to guide air from the air inlet 30 to the air outlet 34. Therefore, the cooling system of this example has a configuration in which air cooled by the cooler 28 is supplied from the supply side flow path 32 to the refrigerant flow path 38, and is discharged from the refrigerant flow path 38 to the atmosphere via the exhaust side flow path 36. have.

Here, the chuck 10 of the embodiment has the following configuration for the purpose of making the temperature of the holding surface 14 uniform.

FIG. 2 is a perspective view showing the internal structure of the chuck body 16, and in particular, a perspective view showing the structure of the coolant flow path 38. As shown in FIG. 2, the chuck main body 16 of this example has, for example, a disk-shaped appearance. Note that when explaining the configuration of the chuck body 16, the explanation may be made using a so-called clock position expressed from 1 o'clock to 12 o'clock.

As shown in FIG. 2, the outer peripheral surface 40 of the chuck body 16 is provided with a joint 42 connected to the air inlet 30 and a joint 44 connected to the air outlet 34. The air inlet 30 and the air outlet 34 are provided, for example, when the air inlet 30 is located at the 6 o'clock position, the air outlet 34 is provided at approximately the 12 o'clock position. That is, the air inlet 30 is provided at one end of the chuck body 16 (6 o'clock position), and the air outlet 34 is provided at the other end (approximately 12 o'clock) different from the one end of the chuck body 16 (6 o'clock position). position). The air inlet 30 of this example is an example of the air inlet of the present invention, and the air outlet 34 of this example is an example of the air outlet of the present invention.

The above-mentioned coolant flow path 38 is arranged within the plane of the chuck body 16. The refrigerant channel 38 includes an introduction channel 52 and an outlet channel 54. The introduction flow path 52 is a flow path that guides air introduced from the air introduction port 30 (see FIG. 1) to each heat exchange position 46, 48, and 50 inside the chuck body 16. The outlet channel 54 is a channel that guides the air guided to each heat exchange position 46 , 48 , 50 to the air outlet 34 . Note that each heat exchange position 46, 48, and 50 will be described later. Further, in the introduction flow path 52 of this example, a main flow path 56, which will be described later, is formed of a pipe material 70. Further, the introduction channel 52 and the outlet channel 54 (excluding the portion where the pipe material 70 is disposed) have a concave cross-sectional shape, for example, perpendicular to the channel direction.

The introduction passage 52 includes a main passage 56 extending from the air introduction port 30 to the heat exchange position 46, a first branch passage 58 branching from the main passage 56 and extending to the heat exchange position 48, and a first branch passage 58 branching from the main passage 56. It has a second branch flow path 60 extending to the heat exchange position 50. The first branch channel 58 and the second branch channel 60 are branched from the side portions of the main channel 56, respectively. Further, the first branch channel 58 and the second branch channel 60 are provided along the same straight line orthogonal to the channel direction of the main channel 56. According to the introduction passage 52 configured in this manner, the air introduced into the introduction passage 52 from the air introduction port 30 flows through the main passage 56 and reaches the heat exchange position 46 . Furthermore, air introduced into the first branch passage 58 midway through the main passage 56 flows through the first branch passage 58 and reaches the heat exchange position 48 . Furthermore, air introduced into the second branch passage 60 midway through the main passage 56 flows through the second branch passage 60 and reaches the heat exchange position 50 .

As shown in FIG. 2, the outlet passage 54 includes a first communication passage 62 extending from the heat exchange position 46 to the air outlet 34, and a second communication passage 62 extending from the heat exchange position 48 to the first communication passage 62. 64, and a third communication passage 66 extending from the heat exchange position 50 to the first communication passage 62.

The second communication channel 64 extends from the heat exchange position 48 toward the outer periphery of the chuck body 16 (9 o'clock direction), and is folded back toward the air outlet 34 at the outer periphery of the chuck body 16. They are arranged in an arc shape along the outer periphery of the chuck body 16. The second communication channel 64 communicates with the first communication channel 62 near the air outlet 34. The third communication channel 66 extends from the heat exchange position 50 toward the outer periphery of the chuck body 16 (3 o'clock direction), and is folded back toward the air outlet 34 at the outer periphery of the chuck body 16. They are arranged in an arc shape along the outer periphery of the chuck body 16. The third communication channel 66 communicates with the first communication channel 62 near the air outlet 34. That is, the outlet passage 54 includes communication passages (first to third communication passages 62, 64, 66) that communicate with each other on the way from each heat exchange position 46, 48, 50 to the air outlet 34. are doing. According to the outlet passage 54 configured in this way, the air that has reached each heat exchange position 46 , 48 , 50 can be guided to the air outlet 34 . In addition, each flow path structure of the said 2nd communication flow path 64 and the 3rd communication flow path 66 is an example.

Next, a configuration for promoting heat exchange using air at each heat exchange position 46, 48, 50 will be described. FIG. 3 is an enlarged perspective view showing the configuration of the heat exchange position 50. In addition, in this example, the structure of the heat exchange position 50 will be explained as an example, and the structure of the heat exchange positions 46 and 48 is the same as the structure of the heat exchange position 50, so the description thereof will be omitted.

As shown in FIG. 3, the cross-sectional area of the second branch channel 60 (introduction channel 52) at the heat exchange position 50 is formed larger than the cross-sectional area of the third communication channel 66 (outlet channel 54). There is. For example, the second branch flow path 60 has a cross-sectional area that is 5 to 10 times larger than the cross-sectional area of the third communication flow path 66. With such a configuration, the heat exchange position 50 is provided with a heat exchange promoting surface 68 that is constituted by a stepped surface formed between the second branch flow path 60 and the third communication flow path 66. The heat exchange promoting surface 68 is configured, for example, as a surface perpendicular to the flow path direction indicated by the arrow A of the second branch flow path 60. According to the chuck 10 of the embodiment having such a heat exchange promoting surface 68, the air introduced into the second branch passage 60 flows through the second branch passage 60 having a large cross-sectional area and reaches the heat exchange position 50. collides substantially perpendicularly with a heat exchange promoting surface 68 provided on the surface. This effectively promotes heat exchange between the air and the chuck body 16 at the heat exchange position 50. Further, in the chuck 10 of the embodiment, similar heat exchange promoting surfaces 68 are provided at the other two heat exchange positions 46 and 48 (see FIG. 2), so that air is generated within the plane of the chuck body 16. heat exchange can be effectively promoted. As a result, it is possible to make the temperature of the holding surface 14 uniform.

As shown in FIG. 2, the heat exchange positions 46, 48, and 50 are distributed in the in-plane direction of the holding surface 14 (see FIG. 1) of the chuck body 16.

For example, each of the heat exchange positions 46, 48, and 50 is arranged on a concentric circle S shown by an imaginary line, which is equidistant from the center C of the chuck body 16. The radius of the concentric circle S is, for example, about 50 to 80% of the radius of the chuck body 16. Further, the heat exchange positions 46, 48, and 50 are evenly distributed along the circumferential direction of the concentric circle S. That is, to explain using clock positions, the heat exchange position 46 is at approximately the 12 o'clock position, the heat exchange position 48 is at approximately the 8 o'clock position, and the heat exchange position 50 is at approximately the 4 o'clock position when viewed from the center C. are placed in each.

Here, the heat exchange positions 46, 48, and 50 of this example are examples of the heat exchange positions of the present invention. Further, the heat exchange position 46 of this example is an example of the first heat exchange position of the present invention, and the heat exchange position 48 of this example is an example of the second heat exchange position of the present invention, and the heat exchange position 48 of this example is an example of the second heat exchange position of the present invention. Exchange position 50 is an example of the third heat exchange position of the present invention.

Moreover, according to the chuck 10 of the embodiment, in order to more effectively promote heat exchange by air, the chuck 10 has the following configuration. That is, as shown in FIG. 2, a plastic pipe material 70 is disposed in the main flow path 56. As the material constituting the pipe material 70, for example, plastic having low thermal conductivity is used. The pipe material 70 has an opening 70A at one end connected to the air inlet 30 of the chuck body 16, and an opening 70B at the other end facing the heat exchange promotion surface 68 of the heat exchange position 46. That is, in the introduction channel 52 of this example, the main channel 56 is constituted by the pipe material 70. Therefore, the air introduced into the air introduction port 30 from the supply side flow path 32 (see FIG. 1) is introduced into the pipe material 70 from the opening 70A of the pipe material 70, flows through the pipe material 70, and flows through the opening of the pipe material 70. The heat exchange promoting surface 68 of the heat exchange position 46 is injected from the portion 70B. By configuring the main flow path 56 with the plastic pipe material 70 having low thermal conductivity, it is possible to increase the heat insulation effect on the chuck body 16, so that the temperature change (temperature increase) of the air passing through the pipe material 70 can be ) can be suppressed. In other words, heat exchange with air by the chuck body 16 can be suppressed.

As shown in FIG. 3, the pipe material 70 is formed with an opening 72 communicating with the first branch channel 58 and an opening 74 communicating with the second branch channel 60. Therefore, a part of the air introduced into the pipe material 70 flows through the first branch flow path 58 from the opening 72 and collides with the heat exchange promotion surface 68 (see FIG. 2) of the heat exchange position 48, and 74 , flows through the second branch flow path 60 and impinges on the heat exchange promoting surface 68 of the heat exchange position 50 . Note that in the introduction flow path 52 of this example, the main flow path 56, which is a part of the introduction flow path 52, is configured with a pipe material 70 for the purpose of suppressing temperature changes of the air flowing through the introduction flow path 52. One or both of the first branch flow path 58 and the second branch flow path 60 may be constructed from the pipe material 70.

FIG. 4 is a cross-sectional view showing an example of how the pipe material 70 is arranged with respect to the chuck body 16. As shown in FIG. 4, the pipe material 70 is arranged with a gap 76 spaced from the inner wall surface 16A of the chuck body 16 (the wall surface of the main channel 56). According to this configuration, since the gap 76 can enhance the heat insulation effect on the chuck body 16, it is possible to further suppress the temperature change of the air flowing through the introduction channel 52.

FIG. 5 is a cross-sectional view of the air inlet 30 and the pipe material 70 and its vicinity. As shown in FIG. 5, the air introduction port 30 is formed at the end of a short and small pipe material 82 on which a flange 80 is formed. This pipe material 82 is made of metal, and is connected to the pipe material 70 by a screw 86 with a flange 80 of the pipe material 82 butted against a flange 84 formed at the end of the pipe member 70 via a rubber packing 78. has been done. Further, the surface of the flange 84 opposite to the surface on which the rubber packing 78 is arranged is connected to the chuck body 16 via the rubber packing 88. According to this configuration, the rubber packing 78 can enhance the heat insulating effect on the pipe material 82, and the rubber packing 88 can also enhance the heat insulating effect on the chuck body 16, so that the temperature of the air flowing through the introduction channel 52 can be increased. Changes can be further suppressed.

Next, the operation of the chuck 10 configured as described above will be explained. Air cooled to a predetermined temperature by the cooler 28 in FIG. 1 is introduced from the supply side flow path 32 into the air introduction port 30, and then introduced into the pipe material 70 from the opening 70A of the pipe material 70. The air flows in a first direction (12 o'clock direction) toward the heat exchange position 46 at the positions of the openings 72 and 74 (see FIG. 3) of the pipe material 70, and in a second direction (9 o'clock direction) toward the heat exchange position 48. direction) and a third direction (3 o'clock direction) toward the heat exchange position 50.

As shown in FIG. 2, the air flowing in the first direction flows through the pipe material 70 and collides with the heat exchange promotion surface 68 of the heat exchange position 46, and the air flowing in the second direction flows through the first branch flow path. The air that flows in the third direction flows through the second branch flow path 60 and collides with the heat exchange promoting surface 68 of the heat exchange position 50 . As a result, the chuck body 16 effectively exchanges heat with the air at the three heat exchange positions 46, 48, and 50. The entire area is cooled evenly. As a result, according to the chuck 10 of the embodiment, it is possible to make the temperature of the holding surface 14 uniform.

The air that has undergone heat exchange at the three heat exchange positions 46, 48, and 50 passes through the first communication passage 62, the second communication passage 64, and the third communication passage 66 to the air outlet 34. The air flows from the air to the exhaust side flow path 36, and is then discharged to the atmosphere.

Therefore, according to the chuck 10 of the embodiment, the introduction channel 52 guides the air introduced from the air introduction port 30 to the heat exchange positions 46, 48, and 50 distributed in at least three locations, and the respective heat exchange positions. 46, 48, 50, the air is guided to the air outlet 34, and a heat exchange promotion surface 68 is provided at each heat exchange position 46, 48, 50. , it becomes possible to equalize the temperature of the holding surface 14 of the chuck body 16. As a result, the temperature of the holding surface 14 can be uniformly adjusted to, for example, around room temperature using air.

Further, according to the chuck 10 of the embodiment, since at least a portion of the introduction channel 52 is made of the pipe material 70, temperature changes in the air flowing through the introduction channel 52 can be suppressed. As a result, heat exchange at heat exchange locations 46, 48, 50 is effectively promoted.

Further, according to the chuck 10 of the embodiment, when the heat exchange positions 46, 48, and 50 are evenly distributed along the circumferential direction of the concentric circle S as described above, the first branch flow path 58 and the second Since the branch flow path 60 is arranged along the same straight line orthogonal to the flow direction of the main flow path 56, the lengths of the first branch flow path 58 and the second branch flow path 60 are minimized. It can be done. Thereby, temperature changes in the air flowing through the first branch flow path 58 and the second branch flow path 60 can be suppressed to a minimum. As a result, heat exchange at the heat exchange locations 48, 50 is effectively promoted.

Furthermore, according to the chuck 10 of the embodiment, as shown in FIG. 4, the pipe material 70 is arranged with a gap 76 from the inner wall surface 16A (main flow path 56) of the chuck body 16, so that the introduction flow path 52 is Temperature changes in the flowing air can be suppressed. As a result, heat exchange at the heat exchange positions 46, 48, 50 is promoted more effectively.

Furthermore, according to the chuck 10 of the embodiment, as shown in FIG. , it is possible to suppress a change in the temperature of the air flowing through the introduction channel 52. As a result, heat exchange at the heat exchange positions 46, 48, 50 is promoted even more effectively.

Hereinafter, modified examples of the present invention will be briefly described.

<First variation>
In the prober chuck 10 of the embodiment, as a preferable aspect, the chuck body 16 has the heat exchange positions 46, 48, and 50 distributed at three locations, but the heat exchange locations are not limited to three locations. Instead, there may be four or more heat exchange positions.

<Second modification example>
In the prober chuck 10 of the embodiment, the chuck body 16 is illustrated in which the heat exchange positions 46, 48, 50 are arranged on the concentric circle S, but the arrangement is not limited to this example, and the heat exchange positions 46, 50 are not necessarily arranged. , 48, and 50 may not be arranged on the concentric circle S. However, from the viewpoint of making the temperature of the holding surface 14 (see FIG. 1) uniform, it is preferable that the heat exchange positions 46, 48, and 50 are arranged on concentric circles S. Further, a plurality of heat exchange positions may be arranged on each of the plurality of concentric circles S (for example, three heat exchange positions on each concentric circle S).

<Third modification example>
In the prober chuck 10 of the embodiment, the chuck body 16 is illustrated in which the heat exchange positions 46, 48, and 50 are evenly distributed along the circumferential direction of the concentric circle S, but the arrangement is not limited to this example. For example, the intervals between the heat exchange positions 46, 48, and 50 along the circumferential direction of the concentric circle S may be different from each other. However, from the viewpoint of making the temperature of the holding surface 14 (see FIG. 1) uniform, it is more preferable to distribute them evenly along the circumferential direction of the concentric circle S.

<Fourth variation>
In the prober chuck 10 of the embodiment, as shown in FIG. Although the configuration in which the branch flow path 58 and the second branch flow path 60 are provided along the same straight line orthogonal to the flow path direction of the main flow path 56 has been illustrated, the present invention is not limited to this configuration. For example, a first branch flow path 58 is provided radially from a portion of the main flow path 56 located at the center C of the chuck body 16 toward the heat exchange position 48, and a second branch flow path is provided toward the heat exchange position 50. A channel 60 may also be provided. However, in this configuration, the lengths of the first branch channel 58 and the second branch channel 60 are longer than in the configuration shown in FIG. 2, so it is difficult to equalize the temperature of the holding surface 14 (see FIG. The configuration shown in FIG. 2 is preferable from the viewpoint of achieving this.

<Fifth modification example>
In the prober chuck 10 of the embodiment, the chuck body 16 is illustrated in which the heat exchange promoting surface 68 is configured as a surface perpendicular to the flow path direction; The present invention can also be applied to a chuck body configured as a sloped surface. Further, the heat exchange promoting surface 68 is formed by making the cross-sectional area of the introduction flow path 52 larger than the cross-sectional area of the discharge flow path 54; Even if they are equal, each heat exchange position 46, 48, 50 may be formed by providing an orifice tube or a venturi tube.

<Sixth variation>
The shape of the chuck body 16 is not limited to a circle. In that case, it is more preferable that the heat exchange positions provided at a plurality of locations in the in-plane direction of the chuck body 16 are evenly distributed.

Although an example of the prober chuck according to the present invention has been described above, the technique of the present invention is not limited to the embodiments, and some improvements or modifications may be made without departing from the gist of the present invention.

DESCRIPTION OF SYMBOLS 10... Chuck, 12... Prober, 14... Holding surface, 16... Chuck body, 18... Probe, 20... Probe card, 22... Tester, 24... Tester body, 26... Interface, 28... Cooler, 30... Air inlet, 32... Supply side flow path, 34... Air outlet, 36... Exhaust side flow path, 38... Refrigerant flow path, 40... Outer peripheral surface, 42... Joint, 44... Joint, 46... Heat exchange position, 48... Heat exchange position , 50... heat exchange position, 52... introduction channel, 54... outlet channel, 56... main channel, 58... first branch channel, 60... second branch channel, 62... first communication channel, 64... Second communication channel, 66... Third communication channel, 68... Heat exchange promoting surface, 70... Pipe material, 72... Opening, 74... Opening, 76... Gap, 78... Rubber packing, 80... Flange, 82 ...Pipe material, 84...Flange, 86...Screw, 88...Rubber packing

Claims (10)

A prober chuck for holding a wafer,
a chuck body having a holding surface capable of holding the wafer;
an air inlet provided at one end of the chuck body;
an air outlet provided at an end different from the one end of the chuck body;
an introduction channel that guides air introduced from the air introduction port to heat exchange positions distributed at a plurality of locations in the in-plane direction of the holding surface inside the chuck body;
an outlet flow path that guides the air guided to each of the heat exchange positions to the air outlet;
Equipped with
Chuck for prober. The cross-sectional area of the introduction channel at each of the heat exchange positions is larger than the cross-sectional area of the outlet channel,
Each of the heat exchange positions is provided with a heat exchange promoting surface constituted by a stepped surface formed between the introduction flow path and the output flow path.
The prober chuck according to claim 1. each of the heat exchange positions is arranged on concentric circles equidistant from the center of the chuck body;
The prober chuck according to claim 1 or 2. Each of the heat exchange positions is evenly distributed along the circumferential direction of the concentric circle,
The prober chuck according to claim 3. The heat exchange positions are distributed in at least three locations, and include a first heat exchange position, a second heat exchange position, and a third heat exchange position,
The introduction flow path includes a main flow path extending from the air introduction port to the first heat exchange position, a first branch flow path branching from the main flow path and extending to the second heat exchange position, and a branch flow path branching from the main flow path. and a second branch flow path extending to the third heat exchange position.
The prober chuck according to any one of claims 1 to 4. The first branch flow path and the second branch flow path are provided along the same straight line orthogonal to the flow direction of the main flow path.
The prober chuck according to claim 5. At least a portion of the introduction channel is made of a plastic pipe material,
The prober chuck according to any one of claims 1 to 6. The pipe material is arranged with a gap from the inner wall surface of the chuck body,
The prober chuck according to claim 7. The pipe material is connected to the air inlet via a rubber packing.
The prober chuck according to claim 7 or 8. The outlet flow path has a communication flow path that communicates with each other on the way from each of the heat exchange positions to the air outlet.
The chuck for a prober according to any one of claims 1 to 9.

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