JP2023107571A - Liquid discharge head, liquid discharge unit, device for discharging liquid, and positional deviation amount measuring method - Google Patents

Abstract

To enable highly accurate measurement of a positional deviation amount between two component members constituting a joint component of a liquid discharge head.SOLUTION: A liquid discharge head for driving an actuator element 5 and discharging a liquid in a pressure chamber from nozzles has a joint component obtained by joining two component members 8 and 9, wherein scales 101 and 102 for measuring a positional deviation amount of the other component member to at least one component member are formed on at least the one component member out of the two component members.SELECTED DRAWING: Figure 9

Description

The present invention relates to a liquid ejection head, a liquid ejection unit, an apparatus for ejecting liquid, and a positional deviation amount measuring method.

2. Description of the Related Art Conventionally, a liquid ejection head is known that drives an actuator element to eject a liquid in a pressure chamber from a nozzle.

For example, Patent Document 1 discloses a liquid ejection head that drives a laminated piezoelectric element (actuator element) to eject ink (liquid) in a pressure generating chamber (pressure chamber) from a nozzle. In this liquid ejection head, a vibration plate (constituent member) joined to a channel plate in which pressure generating chambers are formed and a base (constituent member) having a laminated piezoelectric element are joined together via an adhesive layer. Contains parts.

However, in the liquid ejection head, there is a problem that it is difficult to accurately check the amount of positional deviation between the two components that are joined together.

In order to solve the above-described problems, the present invention provides a liquid discharge head for driving an actuator element to discharge liquid in a pressure chamber from a nozzle, the head comprising a joint part in which two constituent members are joined to each other, At least one of the two constituent members is formed with a scale for measuring the amount of positional deviation of the other constituent member with respect to the at least one constituent member.

As described above, according to the present invention, it is possible to highly accurately measure the amount of positional deviation between the two constituent members that constitute the joint parts of the liquid ejection head.

FIG. 2 is a cross-sectional view of the liquid ejection head according to the embodiment cut along a plane perpendicular to the nozzle arrangement direction; FIG. 2 is a cross-sectional view of the liquid ejection head cut along the nozzle arrangement direction; FIG. 2 is a cross-sectional view taken along a plane parallel to the nozzle surface of the liquid ejection head; 1 is a block diagram of an ink circulation system according to an embodiment; FIG. FIG. 3 is an explanatory perspective view of the external appearance of the liquid ejection head. The schematic diagram which shows each component before joining in the joining process of embodiment. FIG. 4 is a side view showing a state in which the channel member and the actuator member are joined; FIG. 4 is an enlarged side view of the joint between the flow path member and the actuator member, viewed from a direction parallel to the nozzle arrangement direction; 9A to 9C are enlarged views showing scales formed on both the flow path member and the actuator member, and enlarging the portion indicated by symbol A in FIG. 8; FIG. The enlarged view which shows the scale formed only in the actuator member in a modification. FIG. 2 is a plan view of an essential part of an example of a device that ejects liquid. FIG. 2 is an explanatory side view of a main part of a device that ejects liquid. FIG. 10 is an explanatory plan view of essential parts of another example of the liquid ejection unit.

An embodiment of a liquid ejection head according to the present invention will be described below.
FIG. 1 is a cross-sectional view of an individual circulation liquid ejection head 434 according to the present embodiment, taken along a plane orthogonal to the nozzle arrangement direction.
FIG. 2 is a cross-sectional view of the liquid ejection head 434 cut along the nozzle arrangement direction.
FIG. 3 is a cross-sectional view taken along a plane parallel to the nozzle surface of the liquid ejection head 434. As shown in FIG.

The liquid ejection head 434 according to this embodiment mainly includes a frame 1 , a channel plate 2 , a nozzle plate 3 , a base 4 , a laminated piezoelectric element 5 and a vibration plate 6 .

The frame 1 is a structural member in which an ink supply port 11 (see FIG. 3) and a common liquid chamber 12 are carved. The flow path plate 2 is a structural member in which carvings that form pressure generating chambers 22 that are pressure chambers and communication pipe portions 23 that communicate with the nozzles 31 are formed. The nozzle plate 3 is a structural member in which nozzles 31 are formed. The base 4 is a structural member that supports a laminated piezoelectric element 5 that is a pressure generating element as an actuator element. The vibration plate 6 is a structural member having an island-shaped convex portion 61 , a diaphragm portion 62 and an ink inlet 63 .

The channel plate 2 is formed with a pressure generating chamber 22 as an individual liquid chamber that communicates with the nozzle 31 , a fluid resistance portion 21 communicating with the pressure generating chamber 22 , and an introduction portion 20 communicating with the fluid resistance portion 21 . The flow path plate 2 is formed by laminating and joining a plurality of (here, three) plate-like members 2A, 2B, and 2C from the nozzle plate 3 side. are laminated and joined to form the flow channel member 8 .

The nozzle plate 3 is made of a metal material, such as a Ni-plated film by electroforming, and has a large number of nozzles 31, which are fine ejection openings for ejecting ink droplets. The internal shape (inner shape) of the nozzle 31 is formed in a horn shape (which may be a substantially cylindrical shape or a substantially truncated conical shape). Further, the diameter of the nozzle 31 is about 20 [μm] to 35 [μm] on the ink droplet outlet side. The nozzle pitch of each row was set to 150 [dpi].

The ink ejection surface (nozzle surface side) of the nozzle plate 3 is provided with a water-repellent treatment layer 32 that is subjected to a water-repellent surface treatment. For example, PTFE-Ni eutectoid plating, fluororesin electrodeposition coating, evaporable fluororesin (for example, fluorinated pitch, etc.) vapor deposition coating, silicone resin/fluorine resin solvent coating and baking, etc. A water-repellent layer 32 selected according to the physical properties of the ink is provided. This stabilizes the droplet shape and flight characteristics of the ink, and enables high image quality to be obtained. A frame 1 forming an engraving for forming the ink supply port 11 and the common liquid chamber 12 is manufactured by resin molding.

The base 4 is a base material that supports the laminated piezoelectric element 5, and is made of SUS.

The laminated piezoelectric element 5 includes a lead zirconate titanate (PZT) piezoelectric layer with a thickness of 10 [μm] to 50 [μm]/layer, and a silver/palladium (AgPd) layer with a thickness of several [μm/layer]. It has a laminated structure in which the internal electrode layers are alternately laminated. The internal electrode layers are connected to external electrodes at both ends. The laminated piezoelectric element 5 is divided into a comb-teeth shape by half-cut dicing, and each of them is used as a driving portion 56 and a supporting portion 57 (non-driving portion). The length of the external electrodes is limited by processing such as notches so as to be divided by half-cut dicing processing, and these become a plurality of individual electrodes 54 . The other is not divided by dicing and is conductive and becomes a common electrode 55 .

An FPC (Flexible Printed Circuit) 13 is soldered to the individual electrodes 54 of the drive section 56 . Further, the common electrode 55 is connected to the ground electrode of the FPC 13 by providing an electrode layer at the end of the laminated piezoelectric element 5 and winding it. A head driver, which is a head control section, is mounted on the FPC 13 and controls application of a drive voltage to the drive section 56 .

The diaphragm 6 is formed by stacking two layers of Ni-plated films by an electroforming method. The vibration plate 6 includes a thin-film diaphragm portion 62 , an island-shaped convex portion 61 joined to the laminated piezoelectric element 5 as the driving portion 56 formed in the center of the diaphragm portion 62 , and a beam joined to the frame 1 . A film portion and an opening serving as an ink inlet 63 are formed. The diaphragm portion 62 has a thickness of 3 [μm] and a width of 35 [μm] (one side). For the bonding between the island-shaped convex portion 61 of the diaphragm 6 and the movable portion (driving portion) 56 of the laminated piezoelectric element 5 and the bonding between the diaphragm 6 and the frame 1, an adhesive layer made of an adhesive containing a gap material is used. 7 are patterned and joined by adhesion.

In the liquid ejection head 434 configured as described above, a driving waveform (pulse voltage of 10 [V] to 50 [V]) composed of driving pulses is applied to the driving section 56 according to the image recording signal. As a result, the drive unit 56 is displaced in the stacking direction, the pressure generating chamber 22 is pressurized via the vibration plate 6 , the pressure is increased, and ink droplets are ejected from the nozzle 31 . After that, the ink pressure in the pressure generating chamber 22 is reduced with the completion of ink droplet ejection, and a negative pressure is generated in the pressure generating chamber 22 by the inertia of the ink flow and the discharge process of the driving voltage (driving pulse). Move to the ink filling process. At this time, the ink supplied from the ink tank flows into the common liquid chamber 12 , passes through the common liquid chamber 12 through the ink inlet 63 , the fluid resistance portion 21 , and fills the pressure generating chamber 22 .

The fluid resistance portion 21 is effective in damping residual pressure vibration after ejection, but on the other hand it acts as a resistance to refilling. By appropriately selecting the fluid resistance portion 21, the attenuation of the residual pressure and the refill time can be balanced, and the time (driving cycle) until the next ink droplet ejection operation can be shortened.

Next, an example of an ink circulation system using the liquid ejection head 434 according to this embodiment will be described with reference to FIG.
FIG. 4 is a block diagram of the ink circulation system according to this embodiment.
As shown in FIG. 4, the ink circulation system includes a main tank 410, a liquid ejection head 434, a head tank 435, a supply-side pump 438a, a circulation-side pump 438b, a liquid feed pump 438c, a supply-side pressure sensor 439a, and a circulation-side pressure sensor. 439b, etc.

The supply-side pressure sensor 439a is connected between the supply-side pump 438a and the liquid ejection head 434 and on the side of the supply channel connected to the later-described supply port 71 (see FIG. 1) of the liquid ejection head 434 . The circulation-side pressure sensor 439b is connected between the liquid ejection head 434 and the circulation-side pump 438b and on the side of the circulation flow path connected to the later-described circulation port 72 (see FIG. 1) of the liquid ejection head 434 . Then, the supply-side pump 438a and the circulation-side pump 438b flow ink so that the supply-side pressure sensor 439a detects positive pressure and the circulation-side pressure sensor 439b detects negative pressure. As a result, the ink circulates so that it flows from the head tank 435 through the supply port 71 into the liquid ejection head 434 , is discharged from the circulation port 72 and returns to the head tank 435 .

Further, the supply side pump 438a and the circulation side pump 438b are always controlled so that the supply side pressure sensor 439a has a constant positive pressure and the circulation side pressure sensor 439b has a constant negative pressure. As a result, the negative pressure of the meniscus can be kept constant while the ink is circulated through the liquid ejection head 434 . In addition, when droplets are ejected from the nozzles of the liquid ejection head 434, the amount of ink in the head tank 435 decreases. It is desirable to replenish the ink. The timing of ink replenishment from the main tank 410 to the head tank 435 is determined by the liquid level sensor provided in the head tank 435, for example, when the ink level in the head tank 435 drops below a predetermined level. can be controlled by the detection result of

In the present embodiment, the circulation flow flows from the common liquid chamber 12 through the introduction portion 20, the fluid resistance portion 21, the pressure generating chamber 22, the communication tube portion 23, and the circulation resistance portion 42, and is connected to the common circulation flow path 41. become a road. A nozzle 31 is arranged at the end of the communicating tube portion 23 in the middle of the circulation flow path. The common liquid chamber 12 is formed in the frame 1 , and the flow path from the introduction portion 20 to the circulation flow path 41 is formed in the flow path plate 2 .

FIG. 5 is an external perspective explanatory view of the liquid ejection head 434 according to this embodiment.
The supply port 71 of the frame 1 is arranged in the center of the common liquid chamber 12 in the nozzle arrangement direction and is connected to the common liquid chamber 12 . The circulation port 72 of the frame 1 is connected to the circulation liquid chamber 43 inside the channel plate 2 . By arranging the supply port 71 in the center of the common liquid chamber 12 in the nozzle arrangement direction, the length of the liquid flow path from the supply port 71 to each circulation port 72 can be the same in all the pressure generating chambers 22. can. By making the length of the flow path the same in this way, the sum of the pressure loss generated in the common liquid chamber 12 and the pressure loss generated in the circulating liquid chamber 43 can be can be the same. Since the sum of the pressure losses becomes the same, it is possible to eliminate the characteristic difference due to the pressure loss.

In general, a printer, facsimile machine, copier, plotter, or an image forming apparatus combining a plurality of these functions includes, for example, a liquid ejection head for ejecting ink droplets (hereinafter referred to as ink droplets). There is an inkjet recording device. 2. Description of the Related Art In an inkjet recording apparatus, an image is formed by depositing ink droplets on a sheet of paper using a liquid ejection head while conveying the sheet of paper as a medium. The medium here is also referred to as "paper", but the material is not limited, and the term "recording medium", "recording medium", "transfer material", "recording paper" and the like are used synonymously. An image forming apparatus means an apparatus that forms an image by ejecting droplets onto a medium such as paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics, or the like. Image formation is not only the application of meaningful images, such as characters and figures, to a medium, but also the application of meaningless images, such as patterns, to the medium (simply ejecting droplets). also means In addition, the ink is not limited to so-called ink, and is not particularly limited as long as it forms droplets when ejected. used as

Next, a bonding process for bonding the constituent members of the liquid ejection head 434 in this embodiment to each other will be described.
FIG. 6 is a schematic diagram showing each constituent member before joining in the main joining step.
FIG. 7 is a side view showing a state in which the channel member 8 and the actuator member 9 are joined together.
In the joining process described here, the flow path member 8 having the vibration plate 6 formed on the flow path plate 2 is attached to the frame 1 and the actuator member having the laminated piezoelectric element 5 formed on the base 4 . 9 are joined together.

In this joining process, it is important to keep the positional deviation of the frame 1 and the actuator member 9 with respect to the flow path member 8 within an allowable range. Desired. Therefore, in the present embodiment, after the joining process, an inspection process is performed to inspect whether each positional deviation of the frame 1 and the actuator member 9 with respect to the flow path member 8 is within an allowable range.

In this inspection process, it is required to measure each positional deviation amount of the frame 1 and the actuator member 9 with respect to the flow path member 8 with high accuracy. As a method of measuring the amount of positional deviation with high accuracy, for example, a joint portion between two components to be joined together is imaged by a camera as imaging means, and based on the captured image, the distance between the two components is determined. There is a method of measuring the amount of positional deviation. However, if there is no dimensional reference mark at the joint between the two components, it may be difficult to accurately measure the amount of positional deviation between the two components from the captured image.

Also, it may be difficult to image the joint between the two components with a camera. For example, it is difficult for a camera to capture an image of the joint between the flow path member 8 and the actuator member 9, which enables highly accurate measurement of the amount of positional deviation. In such a case, the amount of positional deviation is visually measured by a measurement operator (human) using a microscope or the like. In this case as well, if there is no mark that serves as a dimensional reference at the joint between the two constituent members, measurement results will vary due to individual differences between measurers, and it will be difficult to measure the amount of misalignment with high accuracy. .

Therefore, in the present embodiment, at least one of the two constituent members constituting the joint component is provided with a scale that can serve as a dimensional reference mark. , high-precision measurement of the amount of misalignment is realized.

FIG. 8 is an enlarged side view of the joint between the flow path member 8 and the actuator member 9 as seen from a direction parallel to the nozzle arrangement direction.
9(a) to 9(c) are enlarged views of the portion indicated by symbol A in FIG. 8. FIG.
In this embodiment, both the flow path member 8 and the actuator member 9 are provided with scales 101 and 102 that can be observed from the outside.

In the present embodiment, as shown in FIGS. 9A to 9C, the scale 101 formed on the flow path member 8 is formed on the outer surface of the diaphragm portion 62 of the diaphragm 6 constituting the flow path member 8. A plurality of them are formed at intervals of 10 μm. The scale 101 of the channel member 8 can be formed together with the diaphragm 6 on the channel plate 2, for example.

Specifically, when the diaphragm portion 62 of the diaphragm 6 is formed by an electroforming method, it is possible to form the film of the diaphragm portion 62 with an accuracy of about 1 μm or less. grooves can be formed. The scale 101 of this embodiment is formed by forming a plurality of grooves having a groove width of less than 1 μm along the nozzle array direction at intervals of 10 μm on the outer surface of the diaphragm portion 62 of the diaphragm 6 constituting the flow path member 8 . . Note that the method of forming the scale 101 of the flow path member 8 is not limited to this, and various methods capable of forming the scale 101 with necessary and sufficient dimensional accuracy can be adopted.

On the other hand, as shown in FIGS. 9A to 9C, the scales 102 formed on the actuator member 9 are formed on the outer surface of the laminated piezoelectric element 5 constituting the actuator member 9 at intervals of 8 μm. . As the scale 102 of the actuator member 9, for example, grooves formed by machining on the laminated piezoelectric element 5 of the actuator member 9 may be used.

Specifically, the laminated piezoelectric element 5 on the actuator member 9 is subjected to half-cut dicing so as to be divided into a driving portion 56 and a supporting portion 57 (non-driving portion) in a comb shape. Since the processing accuracy of this dicing process is about 1 μm or less, it is possible to form the grooves that become the scale 102 with an accuracy of about 1 μm or less by using this dicing process. In this embodiment, a plurality of grooves having a groove width of 8 μm are formed on the outer surface of the laminated piezoelectric element 5 constituting the actuator member 9 at intervals of 16 μm along the nozzle arrangement direction, thereby forming the scale 102 . That is, the one end side edge and the other end side edge of each groove in the nozzle arrangement direction function as scales 102, and the scales 102 are formed at intervals of 8 μm. The method of forming the scale 102 of the actuator member 9 is not limited to this, and various methods that can form the scale 102 with necessary and sufficient dimensional accuracy can be adopted.

In the present embodiment, as shown in FIG. 9A, the position of a reference scale 101a serving as a reference in the scale 101 on the flow path member 8 in the nozzle array direction and the reference position in the scale 102 on the actuator member 9 When the position in the nozzle arrangement direction of the reference scale 102a matches, there is no positional deviation. On the other hand, as shown in FIGS. 9B and 9C, the position of a reference scale 101a serving as a reference among the scales 101 on the flow path member 8 in the nozzle array direction and the position of the scale 102 on the actuator member 9 When the position of the reference scale 102a, which serves as a reference, is deviated from the position in the nozzle arrangement direction, there is a positional deviation.

9(b) and 9(b) can be read by a vernier scale using the scale 101 on the flow path member 8 as a main scale and the scale 102 on the actuator member 9 as a vernier scale. can be done.

For example, in the positional deviation state shown in FIG. 9B, the second (the reference scale 101a is the first) scale 101b among the scales 101 serving as the main scale in the nozzle array direction position and the scale serving as the vernier scale. 102 coincides with the position of the second scale 102b (with the reference scale 102a as the first) in the nozzle arrangement direction. Therefore, from the relationship between the graduation interval of 10 μm on the main scale 101 and the graduation interval of 8 μm on the vernier scale 102, it can be read that the positional deviation amount is 2 μm.

Further, for example, in the misaligned state shown in FIG. 9C, the nozzle arrangement direction position of the fifth scale 101e of the scale 101 serving as the main scale and the fifth scale of the scale 102 serving as the vernier scale 102e in the nozzle arrangement direction. Therefore, from the relationship between the graduation interval of 10 μm on the main scale 101 and the graduation interval of 8 μm on the vernier scale 102, it can be read that the positional deviation amount is 8 μm.

As in the present embodiment, the scales 101 and 102 are formed on both the flow channel member 8 and the actuator member 9 so that the scales are shifted from each other, thereby forming a vernier scale. It is possible to read the positional deviation amount narrower than the scale interval of the scale, compared to the case of reading the positional deviation amount with . That is, it is possible to improve the measurement resolution of the positional deviation amount compared to reading the positional deviation amount using only one of the scales.

In the present embodiment, the vernier scale is configured by forming the scales 101 and 102 on both the flow path member 8 and the actuator member 9. However, for example, only one of the scales may be formed. good too. For example, as shown in FIG. 10, when the scale 102 is formed only on the actuator member 9, the nozzle arrangement direction position of the reference mark 103 formed on the flow path member 8 is the third position of the scale 102. It can be read that it is positioned substantially in the center between the scale 102c and the fourth scale 102d. In this case, it is assumed that there is no positional deviation when the position of the reference mark 103 of the flow path member 8 in the nozzle arrangement direction coincides with the position of the reference scale 102a (first scale) of the scales 102 in the nozzle arrangement direction. In this case, the amount of positional deviation in the state shown in FIG. 10 can be measured to be at least within the range of 16 μm to 24 μm. Also in this case, the positional deviation amount can be measured with higher accuracy (higher measurement resolution) than when such a scale 102 is not formed.

In this embodiment, the scales 101 and 102 formed on both the flow channel member 8 and the actuator member 9 have different scale intervals, but may have the same scale interval. Even in this case, accurate measurement with less variation is possible by measuring and comparing the amount of positional deviation with both scales.

Further, in this embodiment, the scales 101 and 102 formed on both the flow channel member 8 and the actuator member 9 are arranged at positions adjacent to or close to each other, but both scales are separated from each other. may be placed as

Further, in the present embodiment, since the scales 101 and 102 are formed by grooves, if the surplus adhesive constituting the adhesive layer 7 at the joint between the flow path member 8 and the actuator member 9 flows out, The outflowing adhesive flows into the grooves forming the scales 101 and 102 . As a result, the outflow range of the adhesive can be suppressed more than when there is no such groove. If the outflow range of the adhesive is enlarged, the behavior of the diaphragm portion 62 by the laminated piezoelectric element 5 that is the drive portion 56 is hindered, causing a problem that the ejection efficiency is lowered. Therefore, by forming the scales 101 and 102 with grooves to suppress the outflow range of the adhesive, it is possible to improve the robustness with respect to the ejection efficiency. In addition, the scales 101 and 102 are formed by grooves, and the adhesive enters the grooves, so that the adhesive can reinforce the strength that has decreased due to the formation of the grooves, and an effect of improving the strength can be expected.

Further, in the present embodiment, the scales 101 and 102 are used to measure the amount of positional deviation in the inspection process that is performed after the flow path member 8 and the actuator member 9 of the liquid ejection head 434 are joined (after the joining process). Although the case of measuring has been described, the present invention is not limited to this. For example, the displacement amount may be measured using scales 101 and 102 before or during bonding (during the bonding process) of the channel member 8 and the actuator member 9 . In this case, it is possible to align the channel member 8 and the actuator member 9 using the measurement result of the positional deviation amount, and join them together.

Next, an example of a device for ejecting liquid to which the liquid ejection heads 434 and 504 according to each embodiment can be applied will be described with reference to FIGS.
FIG. 11 is an explanatory plan view of the essential part of the liquid ejecting apparatus according to the present embodiment, and FIG. 12 is an explanatory side view of the essential part of the liquid ejecting apparatus according to the present embodiment.

This liquid ejection device is a serial type device, and a main scanning movement mechanism 593 reciprocates the carriage 503 in the main scanning direction. The main scanning movement mechanism 593 is composed of a guide member 501, a main scanning motor 505, a timing belt 508, and the like. The guide member 501 spans side plates 591A and 591B provided on both sides in the longitudinal direction of the apparatus, and holds the carriage 503 movably. The carriage 503 is reciprocated in the main scanning direction, which is the longitudinal direction of the apparatus, by means of a main scanning motor 505 via a timing belt 508 stretched between a drive pulley 506 and a driven pulley 507 .

The carriage 503 is provided with a liquid ejection unit 540 on which the liquid ejection head 504 is mounted. The liquid ejection head 504 of the liquid ejection unit 540 ejects yellow (Y), cyan (C), magenta (M), and black (K) liquids, for example. Further, the liquid ejection head 504 is mounted with a nozzle row having a plurality of nozzles arranged in a sub-scanning direction perpendicular to the main scanning direction, with the ejection direction directed downward. Liquid is supplied and circulated inside the liquid ejection head 504 by a supply circulation mechanism 594 for supplying the liquid stored outside the liquid ejection head 504 to the liquid ejection head 504 .

In this embodiment, the supply circulation mechanism 594 includes a supply tank 531, a circulation tank 532, a compressor 533, a vacuum pump 534, a first liquid-sending pump 535, a second liquid-sending pump 536, regulators (R) 539a, 539b, and the like. consists of The supply-side pressure sensor 537 is connected between the supply tank 531 and the liquid ejection head 504 and on the supply channel side connected to the supply port 71 of the liquid ejection head 504 . The circulation-side pressure sensor 538 is connected between the liquid ejection head 504 and the circulation tank 532 and on the side of the circulation channel connected to the circulation port 72 of the liquid ejection head 504 .

The device for ejecting liquid has a transport mechanism 595 for transporting the paper 510 . The transport mechanism 595 includes a transport belt 512 as transport means, a sub-scanning motor 516 for driving the transport belt 512, and the like. The transport belt 512 attracts the paper 510 and transports it at a position facing the liquid ejection head 504 . The conveying belt 512 is an endless belt and stretched between a conveying roller 513 and a tension roller 514 . Adsorption of the paper 510 to the conveying belt 512 can be performed by electrostatic adsorption, air suction, or the like. The conveying belt 512 rotates in the sub-scanning direction when the conveying roller 513 is rotationally driven by the sub-scanning motor 516 via the timing belt 517 and the timing pulley 518 .

On one side of the carriage 503 in the main scanning direction, a maintenance/recovery mechanism 520 for maintaining/recovering the liquid ejection head 504 is arranged on the side of the transport belt 512 . The maintenance/recovery mechanism 520 includes, for example, a cap member 521 that caps the nozzle surface (surface on which nozzles are formed) of the liquid ejection head 504, a wiper member 522 that wipes the nozzle surface, and the like.

The main scanning movement mechanism 593, the supply circulation mechanism 594, the maintenance recovery mechanism 520, and the transport mechanism 595 are attached to a housing composed of side plates 591A and 591B, a back plate 591C, and the like. In the liquid ejecting device configured as described above, the paper 510 is fed onto and attracted to the transport belt 512, and the paper 510 is transported in the sub-scanning direction by the circular movement of the transport belt 512. FIG. By driving the liquid ejection head 504 according to the image signal while moving the carriage 503 in the main scanning direction, the liquid is ejected onto the stationary paper 510 to form an image. As described above, since the apparatus for ejecting liquid includes the liquid ejection head 504, it is possible to stably form a high-quality image.

Next, another example of the liquid ejection unit 540 will be described with reference to FIG.
FIG. 13 is an explanatory plan view of the main part of the same unit.
The liquid ejection unit 540 includes, of the members constituting the apparatus for ejecting the liquid, a casing portion composed of side plates 591A and 591B and a back plate 591C, a main scanning movement mechanism 593, a carriage 503, and a liquid ejection head 504 . Note that the liquid ejection unit 540 can also be constructed by further attaching at least one of the maintenance/recovery mechanism 520 and the supply/circulation mechanism 594 to the side plate 591B of the liquid ejection unit 540, for example.

In this embodiment, the "liquid ejection head" is a functional component that ejects and ejects liquid from nozzles. The liquid to be ejected is not particularly limited as long as it has a viscosity and surface tension that can be ejected from the head, but the viscosity becomes 30 [mPa s] or less at normal temperature and pressure, or by heating or cooling. It is preferable to be More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, functional-imparting materials such as polymerizable compounds, resins, and surfactants, biocompatible materials such as DNA, amino acids, proteins, and calcium. , edible materials such as natural pigments, and the like. These can be used, for example, as inkjet inks, surface treatment liquids, constituent elements of electronic elements and light emitting elements, liquids for forming electronic circuit resist patterns, material liquids for three-dimensional modeling, and the like. Piezoelectric actuators (laminated piezoelectric element and thin film piezoelectric element), thermal actuators that use electrothermal conversion elements such as heating resistors, and electrostatic actuators that consist of a diaphragm and a counter electrode are used as energy sources for liquid ejection. includes those that

A "liquid ejection unit" is a combination of functional parts and mechanisms integrated with a liquid ejection head, and is a collection of parts related to ejection of liquid. For example, the "liquid ejection unit" includes a combination of at least one of a supply circulation mechanism, a carriage, a maintenance/recovery mechanism, and a main scanning movement mechanism with a liquid ejection head. Here, integration means, for example, that the liquid ejection head and functional parts or mechanisms are fixed to each other by fastening, adhesion, engagement, or the like, or that one is held movably with respect to the other. include. Also, the liquid ejection head, the functional parts, and the mechanism may be configured to be detachable from each other.

For example, there is a liquid ejection unit in which a liquid ejection head and a supply circulation mechanism are integrated. Also, there is a type in which the liquid ejection head and the supply circulation mechanism are integrated by being connected to each other by a tube or the like. Here, a unit including a filter can be added between the supply circulation mechanism of these liquid ejection units and the liquid ejection head. Further, there is a liquid ejection unit in which a liquid ejection head and a carriage are integrated. Further, as a liquid ejection unit, there is one in which the liquid ejection head is movably held by a guide member constituting a part of the scanning movement mechanism, and the liquid ejection head and the scanning movement mechanism are integrated. There is also a liquid ejection unit in which the liquid ejection head, the carriage, and the maintenance and recovery mechanism are integrated by fixing a cap member, which is a part of the maintenance and recovery mechanism, to a carriage to which the liquid ejection head is attached. . Further, as a liquid ejection unit, there is one in which a tube is connected to a liquid ejection head to which a supply circulation mechanism or a channel component is attached, and the liquid ejection head and the supply mechanism are integrated. The liquid in the liquid storage source is supplied to the liquid discharge head through this tube. It is assumed that the main scanning movement mechanism also includes a single guide member. Also, the supply mechanism includes the tube unit and the loading unit unit.

A “device for ejecting liquid” is a device that includes a liquid ejection head or a liquid ejection unit, drives the liquid ejection head, and ejects liquid. Devices that eject liquid include not only devices that can eject liquid onto an object to which liquid can adhere, but also devices that eject liquid into air or liquid. The "liquid ejecting device" can include means for feeding, transporting, and ejecting an object to which liquid can adhere, as well as a pre-processing device, a post-processing device, and the like.

For example, as a "device that ejects liquid", an image forming device that ejects ink to form an image on paper, and powder is formed in layers to form a three-dimensional object (three-dimensional object). There is a three-dimensional modeling apparatus (three-dimensional modeling apparatus) that ejects a modeling liquid onto a formed powder layer. Further, the "apparatus for ejecting liquid" is not limited to one that visualizes significant images such as characters and figures with the ejected liquid. For example, it includes those that form patterns that have no meaning per se, and those that form three-dimensional images.

The above-mentioned "substance to which a liquid can adhere" means a substance to which a liquid can adhere at least temporarily, such as a substance to which a liquid adheres and adheres, a substance which adheres and permeates, and the like. Specific examples include media such as recording media such as paper, recording paper, recording paper, film, and cloth, electronic components such as electronic substrates and piezoelectric elements, powder layers (powder layers), organ models, and test cells. Yes, and unless otherwise specified, includes anything that has liquid on it. The material of the above-mentioned "thing to which a liquid can adhere" may be paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics, etc., as long as the liquid can adhere even temporarily.

In addition, the "liquid" is not particularly limited as long as it has a viscosity and surface tension that can be discharged from the head. It is preferable to be More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, functional-imparting materials such as polymerizable compounds, resins, and surfactants, biocompatible materials such as DNA, amino acids, proteins, and calcium. , edible materials such as natural pigments, and the like. These can be used, for example, as inkjet inks, surface treatment liquids, constituent elements of electronic elements and light emitting elements, liquids for forming electronic circuit resist patterns, material liquids for three-dimensional modeling, and the like.

Further, the ``device for ejecting liquid'' includes a device in which a liquid ejection head and an object to which liquid can be adhered move relatively, but is not limited to this. Specific examples include a serial type apparatus in which the liquid ejection head is moved and a line type apparatus in which the liquid ejection head is not moved. In addition, as a "liquid ejecting device", there is also a processing liquid coating device that ejects a processing liquid onto the paper in order to apply the processing liquid to the surface of the paper for the purpose of modifying the surface of the paper. be. There is also an injection granulator that granulates fine particles of the raw material by injecting a composition liquid in which the raw material is dispersed in a solution through a nozzle. Further, the terms used in the present application, such as image formation, recording, printing, printing, printing, modeling, etc., are synonymous.

What has been described above is only an example, and each of the following aspects has a unique effect.
[First aspect]
A first mode is a liquid ejection head 434 that drives an actuator element (for example, a laminated piezoelectric element 5) to eject a liquid (for example, ink) in a pressure chamber (for example, a pressure generation chamber 22) from a nozzle 31. The component members (for example, the flow path member 8 and the actuator member 9) have joint parts joined together, and at least one component member of the two component members has the other configuration for the at least one component member. It is characterized in that scales 101 and 102 are formed for measuring the amount of positional deviation of the member.
For a liquid ejection head having a joint component in which two constituent members are joined together, it is often required to measure the amount of positional deviation between the two constituent members with high accuracy. As a method for measuring the amount of positional deviation between the two constituent members with high accuracy, for example, the joint between the two constituent members is imaged by a camera, and based on the captured image, the position between the two constituent members is measured. There is a method of measuring the amount of positional deviation. However, if there is no dimensional reference mark at the joint between the two constituent members, it is difficult to accurately measure the amount of positional deviation between the two constituent members from the captured image.
In addition, in a situation where it is difficult to image the joint between the two components with a camera, it is impossible to obtain a captured image of the joint in the first place, and the positional deviation amount cannot be measured from the captured image. There is also In such a case, the amount of positional deviation is visually measured by a measurement operator (human) using a microscope or the like. In this case as well, if there is no mark that serves as a dimensional reference at the joint between the two constituent members, measurement results will vary due to individual differences between measurers, and it will be difficult to measure the amount of misalignment with high accuracy. .
In this aspect, the scale is formed on at least one of the two components forming the joint component. This scale is provided so as to be able to measure the amount of positional deviation of the other component with respect to the at least one component, and can serve as a mark that serves as a dimensional reference. Therefore, by using this scale, it is possible to highly accurately measure the amount of positional deviation between the two components, whether by the above-described measurement by a camera or by visual measurement by a measurer (human). Become.
In particular, since the component on which the scale is formed is a component that constitutes the liquid ejection head, it is processed with high dimensional accuracy and high positional accuracy. Therefore, by forming the scale when the component is processed, the scale with extremely high dimensional accuracy and positional accuracy can be formed on the component. Since such a highly accurate scale can be used, it is possible to measure the amount of positional deviation between the two components with high accuracy.

[Second aspect]
A second aspect is characterized in that, in the first aspect, the two constituent members include an actuator member 9 having the actuator element.
According to this, it is possible to measure the positional deviation amount of the actuator member 9 with high accuracy.

[Third aspect]
A third aspect is characterized in that, in the first or second aspect, the two constituent members include a channel member 8 in which the pressure chamber is formed.
According to this, it is possible to measure the displacement amount of the flow path member 8 with high accuracy.

[Fourth aspect]
A fourth aspect is any one of the first to third aspects, wherein the scale is formed on both of the two constituent members, and the scale is formed on one of the two constituent members. is used as a main scale, and the scale formed on the other component member is used as a vernier scale.
According to this, it becomes possible to measure with high accuracy even the amount of positional deviation that is narrower than the interval between the scales formed on the constituent members.

[Fifth aspect]
According to a fifth aspect, in any one of the first to fourth aspects, the scale is constituted by a plurality of grooves formed on the surface of the at least one component.
According to this, the scale can be formed relatively easily.

[Sixth aspect]
According to a sixth aspect, in the fifth aspect, the joined component is formed by joining the two constituent members together with an adhesive, and the plurality of grooves are arranged at positions into which the surplus of the adhesive flows. It is characterized by having
According to this, the outflow range of the adhesive can be suppressed, and problems such as a decrease in discharge efficiency due to the expansion of the outflow range of the adhesive can be suppressed. In addition, since the adhesive enters the grooves forming the scale, the adhesive can reinforce the strength that has decreased due to the formation of the grooves, and an effect of improving the strength can be expected.

[Seventh aspect]
A seventh aspect is a liquid ejection unit comprising at least one of a head tank, a carriage, a supply mechanism, a maintenance and recovery mechanism, and a main scanning movement mechanism aspect, and a liquid ejection head, wherein the liquid ejection head includes the first to It is characterized by using the liquid ejection head according to any one of the sixth aspects.
According to this, in the liquid ejection unit, it is possible to measure with high accuracy the amount of positional deviation between the two constituent members that constitute the joint parts of the liquid ejection head.

[Eighth aspect]
An eighth aspect is an apparatus for ejecting liquid, characterized by having the liquid ejection head of any one of the first to sixth aspects or the liquid ejection unit of the seventh aspect.
According to this, in a device that ejects liquid, it is possible to measure with high accuracy the amount of positional deviation between the two components that constitute the joint parts of the liquid ejection head.

[Ninth aspect]
A ninth aspect is a positional displacement amount measuring method for measuring an amount of positional displacement between the two constituent members in the liquid ejection head according to any one of the first to sixth aspects, wherein at least one of the two constituent members is The positional displacement device is characterized in that the scale is formed on one of the constituent members, and the scale is read to measure the amount of positional displacement between the two constituent members.
It is possible to measure with high accuracy the amount of positional deviation between the two constituent members that constitute the joint parts of the liquid ejection head.

Reference Signs List 1: frame 2: channel plate 3: nozzle plate 4: base 5: laminated piezoelectric element 6: diaphragm 7: adhesive layer 8: channel member 9: actuator member 11: ink supply port 12: common liquid chamber 13: FPC
20 : Introduction portion 21 : Fluid resistance portion 22 : Pressure generation chamber 23 : Communication tube portion 31 : Nozzle 32 : Water-repellent layer 41 : Circulation channel 42 : Circulation resistance portion 43 : Circulation liquid chamber 54 : Individual electrode 55 : Common Electrode 56 : Drive portion 57 : Support portion 61 : Island-shaped convex portion 62 : Diaphragm portion 63 : Ink inlet 71 : Supply port 72 : Circulation port 101 : Scale 101a : Reference scale 102 : Scale 102a : Reference scale 103 : Reference mark 410: main tank 434: liquid ejection head 435: head tank 438a: supply side pump 438b: circulation side pump 438c: liquid feeding pump 439a: supply side pressure sensor 439b: circulation side pressure sensor 501: guide member 503: carriage 504: liquid Ejection head 505 : Main scanning motor 506 : Driving pulley 507 : Driven pulley 508 : Timing belt 510 : Paper 512 : Conveying belt 513 : Conveying roller 514 : Tension roller 516 : Sub-scanning motor 517 : Timing belt 518 : Timing pulley 520 : Maintain Recovery mechanism 521 : Cap member 522 : Wiper member 531 : Supply tank 532 : Circulation tank 533 : Compressor 534 : Vacuum pump 535 : First liquid sending pump 536 : Second liquid sending pump 537 : Supply side pressure sensor 538 : Circulation side pressure Sensor 540: liquid ejection unit 591A: side plate 591B: side plate 591C: back plate 593: main scanning movement mechanism 594: supply circulation mechanism 595: transport mechanism

JP 2016-199033 A

Claims (9)

A liquid ejection head that drives an actuator element to eject liquid in a pressure chamber from a nozzle,
two components having a joint part joined together;
A liquid ejection head characterized in that at least one of the two constituent members is formed with a scale for measuring a positional deviation amount of the other constituent member with respect to the at least one constituent member. . In the liquid ejection head according to claim 1,
The liquid ejection head, wherein the two constituent members include an actuator member including the actuator element. 3. In the liquid ejection head according to claim 1,
The liquid ejection head, wherein the two constituent members include a channel member in which the pressure chamber is formed. The liquid ejection head according to any one of claims 1 to 3,
The scale is formed on both of the two constituent members,
A liquid ejection head comprising a vernier scale having the scale formed on one of the two components as a main scale and the scale formed on the other component as a vernier scale. . The liquid ejection head according to any one of claims 1 to 4,
The liquid ejection head, wherein the scale is composed of a plurality of grooves formed on the surface of the at least one component. In the liquid ejection head according to claim 5,
The joint component is obtained by joining the two constituent members to each other with an adhesive,
The liquid ejection head, wherein the plurality of grooves are arranged at positions into which the surplus of the adhesive flows. A liquid ejection unit comprising at least one of a head tank, a carriage, a supply mechanism, a maintenance and recovery mechanism, and a main scanning movement mechanism, and a liquid ejection head,
A liquid ejection unit using the liquid ejection head according to any one of claims 1 to 6 as the liquid ejection head. In a device that ejects a liquid,
7. A device for ejecting liquid, comprising the liquid ejection head according to claim 1 or the liquid ejection unit according to claim 7. A positional deviation amount measuring method for measuring a positional deviation amount between the two constituent members in the liquid ejection head according to any one of claims 1 to 6, comprising:
forming the scale on at least one of the two components;
A positional displacement amount measuring method, comprising: reading the scale to measure the positional displacement amount between the two constituent members.

Images