JP2023107157A - vapor chamber - Google Patents

Abstract

To provide a vapor chamber having especially excellent heat transport capacity.SOLUTION: A vapor chamber 100 has a container 20 having a cavity part inside, a wick 13 arranged in the cavity part, and hydraulic liquid 30 arranged in the cavity part, wherein a contact angle of the hydraulic liquid to the wick at 23°C is more than 0.1° and less than 100°. The wick preferably contains fibers made of a material containing at least one selected from a group consisting of glass, aramid, and polyparaphenylenebenzobisoxazole. A thickness of the fibers is preferably 3.0 μm or more and 20.0 μm or less.SELECTED DRAWING: Figure 1

Description

The present invention relates to vapor chambers.

For example, heat-generating members such as central processing units (CPUs), light-emitting diodes (LEDs), and power semiconductors used in mobile terminals such as portable terminals and tablet terminals are cooled by heat pipes.

In recent years, in order to reduce the thickness of mobile terminals and the like, the development of vapor chambers that can be made thinner than heat pipes has been progressing (see, for example, Patent Document 1).

A working fluid (working fluid) is sealed in the vapor chamber, and the working fluid absorbs heat from the heat-generating member and transfers the heat, thereby cooling the heat-generating member.

More specifically, the working fluid in the vapor chamber receives heat from the heat-generating member at the portion (evaporation section) that is close to the heat-generating member and evaporates into vapor. It moves, cools, and condenses into a liquid.

Inside the vapor chamber, there is a liquid channel portion as a capillary structure (wick), and the liquid working fluid passes through this liquid channel portion and is transported toward the evaporator, where it evaporates again. It evaporates by receiving heat in the part.

In this way, the working fluid circulates in the vapor chamber while repeating phase changes, that is, evaporation and condensation, thereby transferring heat from the device and increasing heat radiation efficiency.

However, the vapor chamber is required to further improve its heat transport capability.

WO2017/104819

SUMMARY OF THE INVENTION An object of the present invention is to provide a vapor chamber having particularly excellent heat transport capability.

Such objects are achieved by the present invention of the following (1) to (12).
(1) a container having a cavity therein;
a wick disposed in the cavity; and
a hydraulic fluid disposed in the cavity;
A vapor chamber, wherein the contact angle of the working liquid with respect to the wick at 23°C is more than 0.1° and less than 100°.

(2) The vapor chamber according to (1) above, wherein the wick includes fibers made of a material containing at least one selected from the group consisting of glass, aramid, and polyparaphenylenebenzobisoxazole.

(3) The vapor chamber according to (2) above, wherein the fibers have a thickness of 3.0 μm or more and 20.0 μm or less.

(4) The vapor chamber according to any one of (1) to (3) above, wherein the wick has a basis weight of 10 g/m ² or more and 250 g/m ² or less.

(5) The vapor chamber according to any one of (1) to (4) above, wherein the cavity has a height of 10 μm or more and 2000 μm or less.

(6) The vapor chamber according to any one of (1) to (5) above, wherein the wick has a thickness of 10 μm or more and 1000 μm or less.

(7) The vapor chamber according to any one of (1) to (6) above, wherein the container is mainly made of Cu or a Cu alloy.

(8) The container is constructed by joining sheet materials,
The vapor chamber according to any one of (1) to (7) above, wherein the sheet material has a thickness of 12 μm or more and 500 μm or less.

(9) The vapor chamber according to (8) above, wherein the volume between the wick and the sheet material per unit area in plan view is 1 mm ³ /cm ² or more and 25 mm ³ /cm ² or less.

(10) The vapor chamber according to any one of (1) to (9) above, which has a deformation prevention member disposed in the cavity and having a function of preventing deformation of the container in the thickness direction.

(11) The vapor chamber according to (10) above, wherein the deformation preventing member is formed integrally with the wick.

(12) The deformation prevention member has a portion that functions as a flow path wall for the hydraulic fluid,
The vapor chamber according to (10) or (11) above, wherein the wick is arranged to penetrate through a portion functioning as a flow path wall for the hydraulic fluid.

According to the present invention, it is possible to provide a vapor chamber having particularly excellent heat transport ability.

1 is a longitudinal sectional view schematically showing an example of a vapor chamber of the present invention; FIG. FIG. 4 is a longitudinal sectional view schematically showing another example of the vapor chamber of the present invention; FIG. 4 is a longitudinal sectional view schematically showing another example of the vapor chamber of the present invention; FIG. 4 is a longitudinal sectional view schematically showing another example of the vapor chamber of the present invention; FIG. 4 is a plan view schematically showing a wick structure provided in the vapor chamber of the present invention; FIG. 2 is a perspective view schematically showing an example of a vapor chamber-manufacturing member; FIG. 2 is a vertical cross-sectional view schematically showing an example of a vapor chamber-manufacturing member. FIG. 3 is a vertical cross-sectional view schematically showing another example of the vapor chamber-manufacturing member. FIG. 3 is a vertical cross-sectional view schematically showing another example of the vapor chamber-manufacturing member. 1 is a longitudinal sectional view schematically showing an example of a method for manufacturing a vapor chamber of the present invention; FIG. 1 is a longitudinal sectional view schematically showing an example of a method for manufacturing a vapor chamber of the present invention; FIG.

The present invention will now be described in detail with reference to the accompanying drawings.
[1] Vapor Chamber First, the vapor chamber of the present invention will be described.

FIG. 1 is a longitudinal sectional view schematically showing an example of the vapor chamber of the present invention. 2 to 4 are longitudinal sectional views schematically showing other examples of the vapor chamber of the present invention. FIG. 5 is a plan view schematically showing a wick structure provided in the vapor chamber of the present invention. It should be noted that illustration of the fibers 131 is omitted in FIG. In the following description, the vapor chamber 100 is in contact with a member (heat generating member) to which the vapor chamber 100 is applied on the lower surface (the surface of the first sheet material 21) in FIGS. 1 to 4. Although mainly described, the upper surface in FIGS. 1 to 4 may be used so that the vapor chamber 100 is in contact with a member (heat generating member) to which it is applied. 1 to 4 show a state in which the first sheet member 21 faces downward, but the orientation of the vapor chamber 100 when the vapor chamber 100 is in use is not particularly limited. may be used with the sheet material 21 facing upward.

The vapor chamber 100 has a container 20 having a cavity inside, a wick 13 arranged in the cavity, and a working liquid (working fluid) 30 arranged in the cavity. The contact angle of the working fluid 30 with respect to the wick 13 at 23° C. is more than 0.1° and less than 100°.

Thereby, it is possible to provide the vapor chamber 100 having particularly excellent heat transport capability.

It is believed that such excellent effects are obtained for the following reasons. That is, when the contact angle of the working fluid 30 with respect to the wick 13 satisfies a predetermined condition, the liquid working fluid 30 can move through the wick 13 in a suitable form in the vapor chamber 100 , so that the working fluid 30 can move in the vapor chamber 100 in a suitable manner. can transfer heat to As a result, the vapor chamber 100 as a whole can have excellent heat transport capability.

On the other hand, satisfactory results cannot be obtained if the above conditions are not satisfied.
For example, if the contact angle of the working fluid 30 with respect to the wick at 23° C. is greater than or equal to the upper limit value, the wettability of the working fluid 30 with the wick 13 deteriorates, and the movement of the working fluid 30 does not proceed smoothly. The heat transport capability of the chamber 100 as a whole is significantly reduced.

As described above, the contact angle of the hydraulic fluid 30 with respect to the wick 13 at 23° C. is more than 0.1° and less than 100°, preferably more than 0.1° and less than 95°, and more than 0.1°. More preferably less than 90°, more preferably more than 0.1° and less than 85°.
Thereby, the effect mentioned above is exhibited more notably.

The contact angle of the working fluid 30 with respect to the wick 13 at 23° C. is determined by, for example, adjusting the combination of the constituent material of the wick 13 and the composition of the working fluid 30 or by adjusting the surface condition of the wick 13 (for example, surface roughness). It can be suitably adjusted by adjusting the thickness or performing surface treatment such as plasma treatment.

[1-1] Container The container 20 accommodates the wick 13 and the working fluid 30. Mainly, in the evaporating section, for example, it comes into contact with a member to be cooled such as a heat-generating member, and the inside of the container 20 The condensing portion has a function of dissipating the heat received from the working fluid 30 undergoing a phase transition from the gas state to the liquid state.

Container 20 may be constructed of any material, but is preferably constructed of a metallic material.

Metal materials generally have high thermal conductivity and are also excellent in strength, extensibility, and the like. Therefore, for example, the vapor chamber 100 can be applied to a member to which the vapor chamber 100 is applied (for example, a member to be cooled such as a heat-generating member, etc.). In addition, the vapor chamber 100 can have a particularly excellent durability. In particular, the container 20 can be suitably formed using a relatively thin sheet material made of metal, which is advantageous from the viewpoint of thinning the vapor chamber 100 and reducing raw material costs of the vapor chamber 100 .

Examples of metal materials forming the container 20 include Cu, Al, Mg, Zn, and alloys containing at least one of these.

Among them, the metal material forming the container 20 is preferably Cu or a Cu alloy.

As a result, the effect of providing the container 20 made of a metal material can be exhibited more remarkably. That is, Cu or a Cu alloy is relatively inexpensive among various metal materials and has particularly excellent thermal conductivity and ductility. (such as a member to be cooled, etc.) can be made particularly excellent, and the substantial heat transport capability of the vapor chamber 100 can be made even more excellent. Also, the durability of the vapor chamber 100 can be further improved.

When the container 20 is configured by joining metal sheet materials, the thickness of the sheet materials is preferably 12 μm or more and 500 μm or less, and more preferably 18 μm or more and 250 μm or less.

As a result, it is particularly advantageous from the viewpoint of thinning of the vapor chamber 100, further improvement of flexibility (flexibility) and heat transport ability, reduction of raw material cost of the vapor chamber 100, and durability and reliability of the vapor chamber 100. properties can be improved.

In the illustrated configuration, the container 20 is formed using a first sheet material 21 and a second sheet material 22 .

The first sheet material 21 and the second sheet material 22 may be made of the same material, or may be made of different materials.

Also, the first sheet material 21 and the second sheet material 22 may have the same thickness, or may have different thicknesses.

The first sheet member 21 and the second sheet member 22 are sealed by a sealing portion 23 at their outer peripheral portions. As a result, the cavity containing the deformation prevention member 10 and the hydraulic fluid 30, which will be described in detail later, is sealed, and the liquid-tight state and the air-tight state are maintained.

For example, the sealing portion 23 may be made of the same material as the first sheet material 21 or the second sheet material 22, or may be made of a material different from the first sheet material 21 and the second sheet material 22. may be composed of

The sealing portion 23 can be formed by, for example, plating up, laser welding, seam welding, cold pressure welding, diffusion bonding, brazing, or adhesion.

The height of the cavity provided inside the container 20 is preferably 10 μm or more and 2000 μm or less, more preferably 20 μm or more and 1000 μm or less, and even more preferably 30 μm or more and 500 μm or less.

As a result, while preventing the vapor chamber 100 from becoming thicker than necessary, the flow path portion of the working fluid 30 (especially, the flow path portion of the gaseous working fluid 30 and the flow of the liquid working fluid 30 can be prevented). road portion) can be more suitably secured.

The volume between the sheet materials (the first sheet material 21 and the second sheet material 22) constituting the container 20 and the wick 13, which will be described in detail later, per unit area when the vapor chamber 100 is viewed in plan is , 1 mm ³ /cm ² or more and 25 mm ³ /cm ² or less.

Thereby, it is possible to provide the vapor chamber 100 having particularly excellent heat transport capability.

It is believed that such excellent effects are obtained for the following reasons. That is, when the volume between the wick 13 and the sheet material forming the container 20 satisfies the above conditions, the working fluid 30 can be preferably caused to flow within the hollow portion, and the vapor chamber 100 can be filled with the working fluid 30 . It is believed that this is because the heat can be suitably transferred, and as a result, the heat transport capability of the vapor chamber 100 as a whole can be made excellent.

As described above, the volume between the wick 13 and the sheet material per unit area when the vapor chamber 100 is viewed from above is preferably 1 mm ³ /cm ² or more and 25 mm ³ /cm ² or less, It is more preferably 1.5 mm ³ /cm ² or more and 20 mm ³ /cm ² or less, even more preferably 2 mm ³ /cm ² or more and 18 mm ³ /cm ² or less, and 2.5 mm ³ /cm ² or more and 15 mm ^{3 .} /cm ² or less is most preferred.
Thereby, the effect mentioned above is exhibited more notably.

It should be noted that “the volume between the wick 13 and the sheet material per unit area when the vapor chamber 100 is viewed in plan” refers to the flow path portion of the liquid working fluid 30 . More specifically, for example, when the vapor chamber 100 is laid flat and used, it refers to the space below the wick 13 in the hollow portion of the container 20 .

[1-2] Wick The wick 13 is a member having a liquid flow path portion as a capillary structure, and is made of a material containing fibers 131 . In particular, in the illustrated configuration, the wick 13 is configured as a sheet-like base material (fiber sheet, fiber base material).

By having the sheet-like wick (fiber sheet, fiber base material) 13, for example, a plurality of fibers 131 can be included in an intertwined state rather than in an independent state. is easy to adjust the liquid working fluid 30 to a state in which capillary action is likely to occur. Therefore, the channel portion for the gaseous working fluid 30 and the channel portion for the liquid working fluid 30 can more preferably coexist, and the above effects can be exhibited more reliably. In addition, it becomes easy to manufacture a wick structure, which is an integrally molded product of the deformation prevention member 10 and the wick (fiber base material) 13, which will be described in detail later, and it is easy to adjust the arrangement and distribution of the fibers 131 in the wick structure. For example, unwanted uneven distribution of the fibers 131 at each site in the wick structure (for example, insufficient presence of the fibers 131 in the site to be the flow path section 15) can be suitably prevented. In addition, since the wick 13 is sheet-like, it is possible to suitably prevent the wick structure from becoming thicker than necessary, and the wick 13 can be prevented from becoming unnecessarily thick during the manufacturing of the vapor chamber 100 (wick structure). Intentional deformation and unintended movement of the fibers 131 in the wick structure can be more suitably prevented.

The fiber 131 may be made of any material, and examples of the material of the fiber 131 include cotton, hemp, wool, polyester resin, polyamide resin, acrylic resin, aramid, and a heterocyclic ring in the molecule. Various resins such as contained aromatic resins (e.g., polyparaphenylenebenzobisoxazole and derivatives thereof), glass, carbon, iron, silver, copper, etc., and one or more selected from these can be used in combination.

Above all, when the fibers 131 are made of a material containing at least one selected from the group consisting of glass, aramid, and polyparaphenylenebenzobisoxazole, the thermal conductivity is higher than that of ordinary plastics such as polypropylene. is high, the vapor chamber 100 can have a better heat transport capability.

In particular, when the fibers 131 are glass fibers, the vapor chamber 100 can have excellent heat transport capability. In addition, since glass fibers generally have excellent transparency to light including ultraviolet rays, the curing reaction in the exposure step may be unintentionally inhibited in the manufacturing method of the vapor chamber 100, which will be described in detail later. can be effectively prevented, and the productivity and yield of the vapor chamber 100 can be made particularly excellent. Further, since glass fiber is excellent in long-term durability, the long-term durability of the vapor chamber can be made excellent.

Although the thickness of the fiber 131 is not particularly limited, it is preferably 3.0 μm or more and 20.0 μm or less, more preferably 3.5 μm or more and 19.0 μm or less, and 4.0 μm or more and 18.0 μm or less. It is more preferable to have

This makes it easier to control the contact angle of the hydraulic fluid 30 with respect to the wick 13 so as to satisfy the conditions described above. In addition, while preventing the wick 13 from becoming thicker than necessary, the gaps between the fibers 131 can be secured in a more suitable state, and the liquid working fluid 30 can be transported by capillary action in the vapor chamber 100. can be made better. As a result, the heat transport capability of the vapor chamber 100 can be improved.

In the wick 13 and the vapor chamber 100, the fibers 131 may be included, for example, in a state in which a plurality of fibers 131 are bundled together, that is, as a fiber bundle. Examples of fiber bundles include plied yarns, single twisted yarns, Lang twisted yarns, braided cords, and the like.

This makes it easier to control the contact angle of the hydraulic fluid 30 with respect to the wick 13 so as to satisfy the conditions described above. In addition, while preventing the wick 13 from becoming thicker than necessary, the gaps between the fibers 131 can be secured in a more suitable state, and the liquid working fluid 30 can be transported by capillary action in the vapor chamber 100. can be made better. As a result, the heat transport capability of the vapor chamber 100 can be improved.

The wick (fiber sheet, fiber base material) 13 may be, for example, a nonwoven fabric or a woven fabric.

When the wick 13 is a woven fabric, examples of the woven fabric include plain weave, twill weave, satin weave, leno weave, satin weave, diagonal weave, and double weave.

The wick 13 may have portions with different densities of the fibers 131 . For example, the wick 13 may have regions with different densities of the fibers 131 in its thickness direction.

The wick structure may include a plurality of wicks (fiber base material) 13 . In this case, these wicks 13 may have the same conditions or may have different conditions. When the wick structure includes a plurality of wicks 13, for example, the plurality of wicks 13 may be stacked in the thickness direction of the wick structure.

The wick structure may include the wick 13 or may further include fibers 131 separate from the wick 13 .

The content of the fibers 131 in the wick structure is preferably 1% by mass or more and 80% by mass or less, more preferably 3% by mass or more and 75% by mass or less, and 5% by mass or more and 70% by mass or less. It is more preferable to have

In particular, when the fibers 131 are made of an inorganic material such as glass or metal, the content of the fibers 131 in the wick structure is preferably 30% by mass or more and 80% by mass or less, and is preferably 35% by mass. It is more preferably at least 75% by mass, and even more preferably at least 40% by mass and not more than 70% by mass.

When the fibers 131 are made of an organic material, the content of the fibers 131 in the wick structure is preferably 1% by mass or more and 30% by mass or less, and more preferably 3% by mass or more and 25% by mass or less. and more preferably 5% by mass or more and 20% by mass or less.

By satisfying the content rate conditions as described above, the proportion of the gaseous working fluid 30 channel portion and the liquid working fluid 30 channel portion in the vapor chamber 100 (wick structure) can be further reduced. can be suitable.

The wick structure as described above may be formed by any method, but is preferably formed using a vapor chamber manufacturing member 10' as described later.

As a result, the vapor chamber 100 can be manufactured with high productivity and high yield by, for example, a method described later, and the reliability of the vapor chamber 100 can be improved.

When the wick structure is formed using a vapor chamber manufacturing member 10' as described later, the wick structure is manufactured using one vapor chamber manufacturing member 10'. Alternatively, it may be manufactured using a plurality of vapor chamber manufacturing members 10'. When a plurality of vapor chamber manufacturing members 10' are used, these vapor chamber manufacturing members 10' may be arranged in the plane direction of the wick structure, or may be arranged in the thickness direction of the wick structure. (Lamination) may be used.

The sheet-like wick 13 (fibers 131) may exist almost entirely in the thickness direction of the wick structure as shown in FIG. It may be unevenly distributed near the center in the thickness direction, or may be unevenly distributed on the second surface 12 side of the wick structure as shown in FIG. 3, or as shown in FIG. Alternatively, it may be unevenly distributed on the first surface 11 side of the wick structure. In addition, the sheet-like wick 13 (fibers 131) is unevenly distributed on both surface sides (the first surface 11 side and the second surface 12 side) of the wick structure, and compared to these parts, the wick structure The content of the fibers 131 near the center in the thickness direction may be low.

The basis weight of the wick 13 is preferably 10 g/m ² or more and 250 g/m ² or less, more preferably 12 g/m ² or more and 220 g/m ² or less.

As a result, the wick 13 can be prevented from becoming thicker than necessary, and the gaps between the fibers 131 can be secured in a more suitable state. Capabilities can be made better. As a result, the heat transport capability of the vapor chamber 100 can be improved.

In addition, in this embodiment, the wick 13 is arranged so as to penetrate the flow path wall 16 of the deformation preventing member 10 described later.

As a result, unwanted movement of the fibers 131 in the vapor chamber 100 is more effectively prevented, and the effects described above are exhibited more remarkably. Further, the shape stability of the deformation prevention member 10 and the wick structure is improved, and the durability and reliability of the vapor chamber 100 can be further improved. In addition, the ease of handling of the vapor chamber manufacturing member 10', the deformation prevention member 10, and the wick structure during manufacture of the vapor chamber 100, which will be described in detail later, is improved.

The thickness of the wick 13 is preferably 10 μm or more and 1000 μm or less, more preferably 20 μm or more and 500 μm or less, and even more preferably 30 μm or more and 200 μm or less.

As a result, the wick 13 and the wick structure can be prevented from becoming thicker than necessary, and the gaps between the fibers 131 can be secured in a more suitable state. The ability to transport the liquid 30 can be further improved. As a result, the heat transport capability of the vapor chamber 100 can be further improved.

The wick 13 may be plasma treated.
This makes it easier to control the contact angle of the hydraulic fluid 30 with respect to the wick 13 so as to satisfy the conditions described above. In particular, when the wick 13 includes fibers 131 made of a material including at least one selected from the group consisting of glass, aramid, and polyparaphenylenebenzobisoxazole, the working fluid 30 contacts the wick 13. Corners may meet more favorable conditions. As a result, the effects described above are exhibited more remarkably.

The plasma treatment includes, for example, plasma treatment using hydrogen, argon, nitrogen, and oxygen gases, and one or a combination of two or more gases selected from these can be used. Gas is preferred.

As a result, it is possible to perform the plasma processing more preferably while suppressing undesired variations in the degree of plasma processing at each portion of the wick 13 . In addition, it becomes easier to control the contact angle of the hydraulic fluid 30 with respect to the wick 13 so as to satisfy the conditions described above.

[1-3] Hydraulic Fluid In the hollow portion of the container 20, the wick 13 and the hydraulic fluid 30 are placed.

The working fluid 30 mainly functions to transport heat in the cavity inside the container 20 .

Examples of the working fluid 30 include water, hydrochlorofluorocarbons such as HCFC-22, hydrofluorocarbons such as HFCR134a, HFCR407C, HFCR410A, and HFC32, hydrofluoroolefins such as HFO1234yf, alcohols such as hydrofluoroethers, ethanol, and methanol, and acetone. , carbon dioxide, ammonia, propane, and the like.

Among them, water is preferable as the working fluid 30 .
As a result, the wettability of the wick 13, the container 20, and the deformation prevention member 10 can be made suitable, and the substantial heat transport capability of the vapor chamber 100 can be made more excellent. In addition, since water is a substance with an excellent balance between heat capacity and ease of evaporation and condensation when used as the working fluid 30, the substantial heat transport capability of the vapor chamber 100 can be improved. can. In addition, it is preferable from the viewpoints of reduction in production cost of the vapor chamber 100, safety, small environmental impact, and the like.

The volume of the working fluid 30 in the cavity (the working fluid 30 in the cavity of the container 20 is all liquid) relative to the volume of the cavity of the container 20 (the space in which the working fluid in the liquid or gaseous state can exist inside the container 20) volume when it exists in a state) is preferably 5% by volume or more and 80% by volume or less, more preferably 10% by volume or more and 60% by volume or less, and 20% by volume or more and 50% by volume or less. It is more preferable to have

As a result, the movement of the working liquid 30 in the liquid state and the gas state within the cavity of the container 20 can be made more favorable, and the heat transport capability of the vapor chamber 100 can be made particularly excellent.

[1-4] Deformation prevention member In the present embodiment, a cavity provided inside the container 20 is filled with the wick 13 and the hydraulic fluid 30 to deform the container 20 in the thickness direction (for example, to reduce the boiling point of the hydraulic fluid 30). A deformation preventing member 10 is arranged, which is a member having a function of preventing deformation when decompressing the cavity for lowering.

By arranging such a deformation prevention member 10 in the cavity of the container 20, the flow path of the hydraulic fluid 30 can be more preferably secured in the cavity of the container 20. It is possible to more effectively prevent the flow of the hydraulic fluid 30 from being obstructed.

The deformation prevention member 10 has a portion that functions as the flow path wall 16 for the hydraulic fluid 30, and the portion of the deformation prevention member 10 where the flow path wall 16 is not disposed serves as the flow path portion 15 for the hydraulic fluid 30. ing.

The width L of the flow channel wall 16 (the width in the cross section perpendicular to the longitudinal direction of the flow channel wall 16) is not particularly limited, but is preferably 5 μm or more and 1000 μm or less, more preferably 10 μm or more and 500 μm or less. .

As a result, unintentional deformation of the container 20 in the thickness direction can be sufficiently prevented. In particular, when the deformation prevention member 10 is made of a resin material, and the width of the flow path wall 16 is a value within the above range, the vapor chamber 100 has particularly excellent flexibility. can be

In the illustrated configuration, the deformation preventing member 10 has a plurality of portions functioning as channel walls 16 extending in its longitudinal direction.

The interval S between adjacent channel walls 16 (that is, the width of the channel portion 15) is not particularly limited, but is preferably 100 μm or more and 1000 μm or less, more preferably 200 μm or more and 800 μm or less, and 300 μm or more and 700 μm. More preferably:

As a result, the hydraulic fluid 30 (the gaseous hydraulic fluid 30 and the liquid hydraulic fluid 30) can be moved more smoothly while suppressing the enlargement of the deformation preventing member 10 and the vapor chamber 100 . In addition, unintentional deformation of the container 20 in the thickness direction can be sufficiently prevented. In particular, when the deformation preventing member 10 is made of a resin material, the flexibility (softness) of the vapor chamber 100 is particularly high when the interval S between the adjacent flow path walls 16 is within the above range. can be excellent.

The ratio (L/S) of the width L [μm] of the flow path wall 16 to the width S [μm] of the flow path portion 15 is not particularly limited, but is preferably 0.05 or more and 0.50 or less. It is more preferably 0.08 or more and 0.40 or less, and still more preferably 0.10 or more and 0.35 or less.

As a result, unintentional deformation of the container 20 in the thickness direction can be sufficiently prevented. In particular, when the deformation preventing member 10 is made of a resin material, if the L/S is within the above range, the flexibility of the vapor chamber 100 is particularly excellent. can be done. Further, while suppressing the deformation prevention member 10 and the vapor chamber 100 from being enlarged, the heat transport capability of the vapor chamber 100, the durability of the vapor chamber 100, and the like can be improved. On the other hand, if the value of L/S is less than the lower limit, deformation in the thickness direction of the container 20 is likely to occur depending on the thickness of the sheet material forming the container 20, the constituent materials, and the like. Also, when the value of L/S exceeds the upper limit, the heat transport efficiency decreases.

In the illustrated configuration, the channel portion 15 and channel wall 16 have constant widths, but they may have portions of varying widths.

Further, in the illustrated configuration, the channel portion 15 and the channel wall 16 are linearly provided in one direction, but they may have curved or bent portions.

The height (thickness) of the deformation preventing member 10 is preferably 10 μm or more and 2000 μm or less, more preferably 20 μm or more and 1000 μm or less, and even more preferably 30 μm or more and 500 μm or less.

As a result, while preventing the vapor chamber 100 from becoming thicker than necessary, the flow path portion of the working fluid 30 (especially, the flow path portion of the gaseous working fluid 30 and the flow of the liquid working fluid 30 can be prevented). road portion) can be more suitably secured.

Although the deformation preventing member 10 may be made of any material, it is preferably made of a resin material.

This is advantageous in reducing the weight of the vapor chamber 100 and making it excellent in flexibility.

The resin material constituting the deformation prevention member 10 is not particularly limited, but in the present embodiment, a cured product (resin cured 14).

Thereby, the durability and reliability of the vapor chamber 100 can be improved.

Moreover, the deformation preventing member 10 may contain an alkali-soluble resin as described in detail later.

The deformation preventing member 10 may contain components other than the resin material. Examples of such components include fillers, ultraviolet absorbers, leveling agents, coupling agents, flame retardants, antioxidants, and the like.

However, the content of components other than the resin material in the deformation preventing member 10 (the total content of these components when multiple types of components are included) is preferably 10.0% by mass or less. It is more preferably 0% by mass or less, and even more preferably 5.0% by mass or less.

In the illustrated configuration, the deformation preventing member 10 is in contact with the inner surface of the container 20 on both surfaces (more specifically, the first surface 11, which is one surface, is in contact with the first sheet material 21). The second surface 12, which is the other surface, is in contact with the second sheet material 22), but another member is interposed between the deformation prevention member 10 and the container 20. may be In other words, the deformation prevention member 10 may be fixed to the inner surface of the container 20 via another member, for example.

In this embodiment, the deformation preventing member 10 is formed integrally with the wick 13 . In other words, the integrally molded product of the deformation preventing member 10 and the wick 13 is a member that has the function of preventing deformation in the thickness direction of the container, and also prevents the flow of the hydraulic fluid 30 accompanying heat transport, particularly the container 20. The wick structure is also a member in which the working fluid 30 vaporized by receiving heat in the evaporating portion flows and the working fluid 30 condensed by releasing heat in the condensing portion of the container 20 flows.

In particular, the wick structure includes the deformation preventing member 10 and the wick 13, and the wick 13 (fibers 131) is arranged in a part of the flow path portion 15 of the hydraulic fluid 30 where the deformation preventing member 10 is not arranged. ing.

Since the deformation preventing member 10 is integrally formed with the wick 13 in this way, for example, the flow path portion 15 can be a flow path portion for the gaseous working fluid 30 (a portion of the flow path portion 15). a portion where the fibers 131 do not exist or a portion where the density of the fibers 131 is low); high portion), which can provide functional separation between the liquid and gaseous hydraulic fluid 30 flow paths. As a result, the heat transport capability of the vapor chamber 100 can be made particularly excellent. Also, the durability of the vapor chamber 100 can be improved.

[1-5] Overall Configuration of Vapor Chamber The thickness of the vapor chamber 100 is preferably 50 μm or more and 2100 μm or less, more preferably 80 μm or more and 1070 μm or less, and even more preferably 100 μm or more and 570 μm or less.

As a result, the working fluid 30 (the gaseous working fluid 30 and the liquid working fluid 30) can be moved more smoothly while preventing the vapor chamber 100 from becoming thicker. As a result, the heat transport capability of the vapor chamber 100 can be made particularly excellent. Also, the durability of the vapor chamber 100 can be improved.

[1-6] Form of use of vapor chamber Next, examples of forms of use of the vapor chamber of the present invention will be described.

The vapor chamber of the present invention may be used, for example, for the purpose of transferring the heat of the heat-generating member to a predetermined location, or for the purpose of uniforming the heat of the local high-temperature portion of the heat-generating member. There may be.

As described above, the vapor chamber of the present invention has a particularly excellent heat-transporting ability, and even when the heat of the heat-generating member is transferred to a predetermined location, the heat of the local high-temperature portion of the heat-generating member is evenly distributed. Even when heating, heat can be efficiently transported.

Hereinafter, the case where the vapor chamber of the present invention is used for the purpose of transferring heat from a predetermined member (heat generating member) will be mainly described.

When used for the purpose of cooling a heat-generating member (e.g., CPU, etc.), the vapor chamber has a part of its surface (evaporation section) made of a high-thermal-conductivity material (e.g., heat-conducting sheet, etc.) (hereinafter collectively referred to as "heat-generating member, etc.").

At this time, the vapor chamber is composed of a heat dissipating member (such as a heat sink) and a high thermal conductivity material in contact with the condensing portion, which is a portion different from the evaporating portion, that is, a portion that dissipates the heat received from the heat generating member. It may also be in contact with a member (for example, a thermally conductive sheet, etc.) (hereinafter collectively referred to as a “heat radiating member, etc.”).

In particular, if the deformation preventing member 10 is made of a resin material (especially if the vapor chamber 100 is manufactured using a vapor chamber manufacturing member 10′ described later), the vapor chamber 100 is excellent in flexibility (softness).

If there is a step between the part where the heat-generating member is installed and the part where the heat-dissipating member should be installed, and when using a conventional heat pipe or vapor chamber that is inferior in flexibility (flexibility), the step It was necessary to install a spacer (for example, a metal spacer) to eliminate or alleviate this, and problems such as an increase in cost due to an increase in parts and an increase in the weight of the entire device were caused, but with the above configuration, The vapor chamber 100 has excellent flexibility (flexibility), and can be suitably bent, for example. Therefore, even if the spacer is omitted, other members ( It is possible to secure a good adhesion state with the heat generating member and the like and the heat radiating member and the like. Therefore, it is possible to satisfactorily solve the above-described problems while exhibiting good heat dissipation performance.

In addition, by curving and bending the vapor chamber 100, interference with other members can be favorably avoided, thereby increasing the degree of freedom in layout of each part of the device provided with the heat-generating member.

In addition, since the shape of the channel portion 15 and the channel wall 16 provided in the vapor chamber 100 (wick structure) can be suitably adjusted, for example, not only a simple shape such as a rectangle but also a cutout portion can be used. Even the vapor chamber 100 having a complicated shape such as a shape having a shape, and having the channel portion 15 and the channel wall 16 corresponding to the shape can be suitably manufactured. Therefore, for example, it is possible to preferably eliminate interference with other members while increasing the contact area with the heat-generating member and the like and the heat-dissipating member and the like. Thereby, better heat dissipation performance can be exhibited.

Further, for example, in a housing containing a motor as a heat-generating member (for example, a joint part of an articulated robot), in order to release the heat generated from the motor to the outside through the housing, In some cases, an aluminum molded body and a heat conductive sheet are used in combination, but in this case, there is a problem that the housing becomes large. On the other hand, when the vapor chamber 100 as described above is used, it is not necessary to use an aluminum molded body, which is advantageous from the viewpoint of miniaturization of the housing, reduction of the number of parts, and the like.

[2] Vapor chamber manufacturing member Next, a vapor chamber manufacturing member that can be suitably used for manufacturing the vapor chamber of the present invention described above, particularly for manufacturing the deformation preventing member (wick structure) included in the vapor chamber. will be explained.

FIG. 6 is a perspective view schematically showing an example of a vapor chamber manufacturing member. FIG. 7 is a vertical cross-sectional view schematically showing an example of a vapor chamber manufacturing member. 8 and 9 are longitudinal sectional views schematically showing other examples of vapor chamber manufacturing members.

The vapor chamber manufacturing member 10' includes a wick 13 and an uncured resin material 14'.

As a result, it is possible to provide the vapor chamber manufacturing member 10' that is excellent in flexibility (softness) and can be suitably used for manufacturing the vapor chamber 100 that has particularly excellent heat transport ability. In addition, since the flexibility (softness) of the vapor chamber 100 can be made excellent, the adhesion state between the vapor chamber 100 and the above-mentioned member is good regardless of the member or arrangement to which the vapor chamber 100 is applied. , and excellent heat-transporting ability can be exhibited more reliably.

It is believed that such excellent effects are obtained for the following reasons. That is, since the vapor chamber manufacturing member 10' includes the wick 13 and the uncured resin material 14', the wick structure formed using the vapor chamber manufacturing member 10' is composed of the wick 13 and the resin material 14'. The vapor chamber 100 as a whole can exhibit excellent flexibility (flexibility). In addition, since the vapor chamber manufacturing member 10' includes the uncured resin material 14', the vapor chamber 100 can be exposed to light (exposure light) in a predetermined pattern by, for example, a method described later. in the flow path portion 15 of the working liquid 30, in particular, the flow path portion of the gaseous working liquid 30 (the portion of the flow path portion 15 where the fibers 131 do not exist or the portion where the fibers 131 are low in density), and the liquid A channel portion for the working fluid 30 (a portion of the channel portion 15 where the fibers 131 are present or a portion where the fibers 131 are dense) can be preferably formed. More specifically, the structure for moving the gaseous working fluid 30 and the structure for moving the liquid working fluid 30 by capillarity can be formed in a suitable arrangement. As a result, the evaporation/condensation cycle of the working fluid 30 can be sped up, and the heat transport capability of the vapor chamber 100 as a whole can be made particularly excellent. However, part of the liquid working fluid 30 flows through the flow path portion of the gaseous working fluid 30 (a portion of the flow path portion 15 where the fibers 131 do not exist or a portion where the fibers 131 have a low density). Alternatively, in the flow channel portion of the liquid working fluid 30 (the portion of the flow channel portion 15 where the fibers 131 exist or the portion where the fibers 131 have a high density), a part of the gaseous Hydraulic fluid 30 may flow.

In addition, the shape of the channel portion 15 and the channel wall 16 provided in the vapor chamber 100 (wick structure, deformation prevention member 10) manufactured using the vapor chamber manufacturing member 10' is determined according to the use of the vapor chamber 100, It can be suitably adjusted according to the application site and the like. In other words, it excels in on-demand performance. Further, the vapor chamber 100 (the wick structure, the deformation prevention member 10) can be suitably manufactured by general treatment such as light irradiation and heat treatment, and the above-described vapor chamber can be manufactured without performing complicated metal processing or the like. A vapor chamber 100 with excellent properties can be manufactured. In addition, since the flow channel portion for the gaseous working fluid 30 and the flow channel portion for the liquid working fluid 30 can be formed in a common process, there is no need to align these portions. High productivity and high yield in manufacturing the chamber 100 can be achieved.

The uncured resin material 14′ may be a curable resin material in which the curing reaction has not been completed, and may be a material in which the curing reaction has partially progressed, for example, a B-stage resin material. may

In addition, by including the wick 13 in which a plurality of fibers 131 are entangled, for example, the gaps between the fibers 131 in the vapor chamber manufacturing member 10' are adjusted to a state where the liquid working fluid 30 is likely to cause capillary action. In addition, it is easy to adjust the location of the fibers 131 in the vapor chamber manufacturing member 10'. Therefore, in the wick structure formed by using the vapor chamber manufacturing member 10′, it is possible to more preferably form the channel portion for the gaseous working fluid 30 and the channel portion for the liquid working fluid 30. Therefore, the effects described above can be exhibited more reliably. In addition, it becomes easy to manufacture the vapor chamber manufacturing member 10′, and it is easy to adjust the arrangement state and distribution of the fibers 131 in the vapor chamber manufacturing member 10′. Undesired uneven distribution of the fibers 131 (for example, insufficient presence of the fibers 131 in the portion to be the channel portion 15) can be preferably prevented.

In the illustrated configuration, the wick 13 has a sheet shape, but the shape of the wick 13 is not particularly limited.

Further, in the illustrated configuration, the vapor chamber manufacturing member 10' is sheet-shaped, particularly having a shape corresponding to the sheet-shaped wick 13. The shape of the vapor chamber manufacturing member 10' is , is not particularly limited.

[2-1] Resin material The vapor chamber manufacturing member 10' includes an uncured resin material 14'.

The resin material 14′ may contain an uncured curable resin, may be partially cured (for example, a B-stage resin), or may be an uncured curable resin. In addition to the curable resin, it may contain a thermoplastic resin.

Among them, the resin material 14' preferably contains an alkali-soluble resin and a photopolymerizable resin.

As a result, in the method described later, a predetermined pattern can be preferably formed by the exposure step and the development step, and in the development step, the environmental load is less than the organic solvent widely used as the developer. A smaller amount of alkaline aqueous solution can be preferably used.

The alkali-soluble resin will be described below.
Alkali-soluble resins include, for example, cresol type, phenol type, bisphenol A type, bisphenol F type, catechol type, resorcinol type, pyrogallol type novolak resins, phenol aralkyl resins, hydroxystyrene resins, methacrylic acid resins, and methacrylic acid esters. Acrylic resins such as resins, cyclic olefin resins containing hydroxyl groups, carboxyl groups, etc., polyamide resins (specifically, at least one of a polybenzoxazole structure and a polyimide structure, and hydroxyl groups in the main chain or side chain , a resin having a carboxyl group, an ether group or an ester group, a resin having a polybenzoxazole precursor structure, a resin having a polyimide precursor structure, a resin having a polyamic acid ester structure, etc.).

As the alkali-soluble resin, for example, a resin having an alkali-soluble group and a double bond can be preferably used.

As a result, when removing the resin in which the double bond portion is unreacted during development processing, instead of the organic solvent normally used as the developer, an alkaline aqueous solution with less environmental load can be applied. Since the double bond portion contributes to the curing reaction, the heat resistance of the cured resin 14 obtained by curing the resin material 14' can be maintained.

Resins having alkali-soluble groups and double bonds include, for example, curable resins that can be cured by both light and heat.

Examples of alkali-soluble groups include hydroxyl groups and carboxyl groups. This alkali-soluble group can also contribute to the thermosetting reaction.

Examples of such resins include thermosetting resins having photoreactive groups such as acryloyl groups, methacryloyl groups, and vinyl groups, and thermoreactive groups such as phenolic hydroxyl groups, alcoholic hydroxyl groups, carboxyl groups, and acid anhydride groups. and a photocurable resin having In addition, the photocurable resin may further have a thermoreactive group such as an epoxy group, an amino group, or a cyanate group. Specific examples include (meth)acrylic-modified phenol resins, (meth)acryloyl group-containing acrylic acid polymers, and carboxyl group-containing (epoxy)acrylates.

Among these, the alkali-soluble resin preferably contains a (meth)acrylic group and a phenolic hydroxyl group, or contains a (meth)acrylic group and a carboxyl group. More preferably, it contains a hydroxyl group, and more preferably a (meth)acrylic-modified phenolic resin.

As a result, unreacted resin can be removed more favorably during development using an alkaline aqueous solution, and the productivity of the vapor chamber 100 and the reliability of the manufactured vapor chamber 100 are improved. be able to.

In particular, when the alkali-soluble resin contains a (meth)acrylic group and a phenolic hydroxyl group, the effects described above can be obtained, and the resolution of the resin material 14' in the manufacturing method of the vapor chamber 100 described later can be improved. In other words, the pattern reproducibility in the exposure process can be improved. Among alkali-soluble resins containing a (meth)acrylic group and a phenolic hydroxyl group, such an effect is exhibited more remarkably when a (meth)acrylic-modified phenolic resin is used.

(Meth)acrylic-modified phenolic resins include, for example, phenolic novolac resins, cresol novolac resins, bisphenol A novolak resins, and other novolak resins, and glycidyl groups such as glycidyl acrylate and glycidyl methacrylate, and (meth)acrylic groups. It can be obtained by reacting a compound having Among them, methacrylic-modified phenolic resin obtained by reacting phenol novolac and glycidyl methacrylate, and methacrylic-modified phenolic resin obtained by reacting bisphenol A novolac resin and glycidyl methacrylate are preferable.

As a result, the effects as described above are exhibited more remarkably. That is, it is possible to more preferably remove unreacted resin during development processing using an alkaline aqueous solution, and to further improve the productivity of the vapor chamber 100 and the reliability of the manufactured vapor chamber 100. In addition, the pattern reproducibility in the exposure process can be further improved.

When a thermosetting resin having a photoreactive group is used as the alkali-soluble resin, the modification rate (substitution rate) of the photoreactive group is not particularly limited. is preferably 20 mol % or more and 80 mol % or less, more preferably 30 mol % or more and 70 mol % or less.

As a result, the resolution of the resin material 14' in the manufacturing method of the vapor chamber 100, which will be described later, that is, the reproducibility of the pattern in the exposure process can be improved. As a result, the vapor chamber 100 including the deformation preventing member 10 (wick structure) having a fine pattern can be more suitably applied.

On the other hand, when a photocurable resin having a heat-reactive group is used, the modification rate (substitution rate) of the heat-reactive group is not particularly limited. % or more and 80 mol % or less, more preferably 30 mol % or more and 70 mol % or less.

As a result, the resolution of the resin material 14' in the manufacturing method of the vapor chamber 100, which will be described later, that is, the reproducibility of the pattern in the exposure process can be improved. As a result, the vapor chamber 100 including the deformation preventing member 10 (wick structure) having a fine pattern can be more suitably applied.

The weight average molecular weight of the resin having an alkali-soluble group and a double bond is not particularly limited, but is preferably 300,000 or less, more preferably 5,000 or more and 150,000 or less.

As a result, the shape stability of the resin material 14' in the vapor chamber manufacturing member 10' can be sufficiently improved, and the resin material 14' can be removed more favorably in the developing process.

In addition, the weight average molecular weight is, for example, G.I. P. C. and the weight average molecular weight can be calculated from a calibration curve prepared in advance using a styrene standard substance. In particular, tetrahydrofuran (THF) can be used as the measurement solvent and the measurement can be performed at a temperature of 40°C.

Although the content of the alkali-soluble resin in the resin material 14' is not particularly limited, it is preferably 10% by mass or more and 80% by mass or less, and more preferably 15% by mass or more and 70% by mass or less.

Thereby, the shape stability of the resin material 14' in the vapor chamber manufacturing member 10' is sufficiently excellent, and the resolution in the exposure process and the developability in the development process are further improved. be able to. In addition, the heat treatment in the manufacturing process of the vapor chamber 100 further improves the bonding strength and adhesion between the deformation preventing member 10 (wick structure) and the container 20 (first sheet material 21, second sheet material 22). can be assumed.

Next, the photopolymerizable resin will be described.
Patterning properties can be improved by including a photopolymerizable resin together with the alkali-soluble resin described above in the resin material 14'.

Examples of the photopolymerizable resin include unsaturated polyesters, acrylic compounds such as acrylic monomers and oligomers having at least one acryloyl group or methacryloyl group in one molecule, and vinyl compounds such as styrene. , or a combination of two or more selected from these.

Among these, an ultraviolet curable resin containing an acrylic compound as a main component is preferable. The acrylic compound has a high curing speed when irradiated with light (exposure light), and can suitably pattern the resin material 14' with a relatively small amount of exposure.

Examples of acrylic compounds include monomers of acrylic acid esters and methacrylic acid esters, and more specifically, ethylene glycol diacrylate, ethylene glycol dimethacrylate, 1,6-hexanediol diacrylate, and dimethacrylic acid. Bifunctional acrylates such as 1,6-hexanediol acid, glyceryl diacrylate, glyceryl dimethacrylate, 1,10-decanediol diacrylate, 1,10-decanediol dimethacrylate, trimethylolpropane triacrylate, trimethacryl Polyfunctional acrylates such as acid trimethylolpropane, pentaerythritol triacrylate, pentaerythritol trimethacrylate, dipentaerythritol hexaacrylate, and dipentaerythritol hexamethacrylate.

Among them, (meth)acrylic acid esters are preferred, and acrylic acid esters and methacrylic acid alkyl esters having 1 to 15 carbon atoms in the ester moiety are more preferred.
Thereby, the reactivity can be improved, and the sensitivity in the exposure process is improved.

Also, the photopolymerizable resin is not particularly limited, but preferably is liquid at room temperature (23° C.).

Thereby, the curing reactivity with exposure light (in particular, ultraviolet rays) can be improved. In addition, the work of mixing with other compounding components (for example, an alkali-soluble resin) can be facilitated. Examples of photopolymerizable resins that are liquid at room temperature include UV-curable resins containing the aforementioned acrylic compound as a main component.

Although the weight average molecular weight of the photopolymerizable resin is not particularly limited, it is preferably 5,000 or less, more preferably 150 or more and 3,000 or less.

Thereby, the reactivity of the resin material 14' can be improved, the sensitivity in the exposure process can be improved, and the resolution of the resin material 14' can be improved.

The content of the photopolymerizable resin in the resin material 14' is not particularly limited, but is preferably 9% by mass or more and 40% by mass or less, and more preferably 13% by mass or more and 30% by mass or less.

As a result, the cured resin 14 obtained by curing the resin material 14' can have both heat resistance and flexibility at a higher level. In addition, the resolution of the resin material 14' in the manufacturing method of the vapor chamber 100, which will be described later, that is, the reproducibility of the pattern in the exposure process can be improved. As a result, the vapor chamber 100 including the deformation preventing member 10 (wick structure) having a fine pattern can be more suitably applied.

When the content of the alkali-soluble resin in the resin material 14' is XA [mass%] and the content of the photopolymerizable resin in the resin material 14' is XP [mass%], 0.15≤XP/XA≤ It preferably satisfies the relationship of 0.90, more preferably satisfies the relationship of 0.19≤XP/XA≤0.87, and further preferably satisfies the relationship of 0.22≤XP/XA≤0.33. .

As a result, the stability of the shape of the resin material 14' in the vapor chamber manufacturing member 10' is determined by the resolution in the exposure process, the developability in the development process, the deformation prevention member 10 (wick structure) and the container 20 ( The bonding strength and adhesion with the first sheet material 21 and the second sheet material 22), and the heat resistance and flexibility of the resin cured product 14 obtained by curing the resin material 14' are further well balanced. can be

When the resin material 14' contains an alkali-soluble resin and a photopolymerizable resin, the resin material 14' preferably further contains a thermosetting resin different from the alkali-soluble resin.

Thereby, the heat resistance of the deformation prevention member 10 (wick structure) can be improved. In addition, suitable adhesiveness can be expressed in the manufacturing process of the vapor chamber 100 described later, and the deformation preventing member 10 (wick structure) and the container 20 (first sheet material 21, second sheet material 22) can be made more excellent in bonding strength and adhesion.

Examples of the thermosetting resin include novolac-type phenolic resins such as phenol novolak resin, cresol novolac resin, and bisphenol A novolak resin; phenol resins such as resole phenol resin; and bisphenol-type resins such as bisphenol A epoxy resin and bisphenol F epoxy resin. epoxy resins, novolak epoxy resins, novolac epoxy resins such as cresol novolac epoxy resins, biphenyl epoxy resins, stilbene epoxy resins, triphenolmethane epoxy resins, alkyl-modified triphenolmethane epoxy resins, triazine nucleus-containing epoxy resins, Epoxy resins such as dicyclopentadiene-modified phenol-type epoxy resins, urea resins, resins having a triazine ring such as melamine resins, unsaturated polyester resins, bismaleimide resins, polyurethane resins, diallyl phthalate resins, silicone resins, benzoxazines A resin having a ring, a cyanate ester resin, and the like can be mentioned, and one or more selected from these can be used in combination. Among them, epoxy resin is particularly preferable as the thermosetting resin. As a result, the heat resistance of the resin cured product 14 obtained by curing the resin material 14 ′, the wick 13 of the resin cured product 14 obtained by curing the resin material 14 ′, the first sheet material 21 and the second sheet material 22 can be made more excellent.

In particular, as the epoxy resin, it is preferable to use a silicone-modified epoxy resin, which includes an epoxy resin that is solid at room temperature (especially a bisphenol type epoxy resin) and an epoxy resin that is liquid at room temperature (especially a silicone-modified epoxy resin that is liquid at room temperature). resin) is more preferably used in combination.

As a result, the cured resin 14 obtained by curing the resin material 14' can have both heat resistance and flexibility at a higher level. In addition, the resolution of the resin material 14' in the manufacturing method of the vapor chamber 100, which will be described later, that is, the reproducibility of the pattern in the exposure process can be further improved. As a result, the vapor chamber 100 including the deformation preventing member 10 (wick structure) having a fine pattern can be more suitably applied.

Although the content of the thermosetting resin in the resin material 14' is not particularly limited, it is preferably 10% by mass or more and 60% by mass or less, and more preferably 15% by mass or more and 55% by mass or less.

As a result, the resin cured product 14 obtained by curing the resin material 14 ′ can have both heat resistance and toughness at a higher level.

When the content of the alkali-soluble resin in the resin material 14' is XA [mass%] and the content of the thermosetting resin in the resin material 14' is XT [mass%], 0.20≤XT/XA It preferably satisfies the relationship ≦1.5, more preferably satisfies the relationship 0.30≦XT/XA≦1.2, and further satisfies the relationship 0.55≦XT/XA≦0.80. preferable.

As a result, the stability of the shape of the resin material 14' in the vapor chamber manufacturing member 10', the resolution in the exposure process, the developability in the development process, and the production of the resin cured product 14 obtained by curing the resin material 14'. To further improve the balance of heat resistance, toughness, bonding strength, adhesion, etc. between the deformation preventing member 10 (wick structure) and the container 20 (the first sheet material 21 and the second sheet material 22). can be done.

The content of the resin material 14' in the vapor chamber manufacturing member 10' is preferably 10% by mass or more and 50% by mass or less, more preferably 15% by mass or more and 45% by mass or less, and 20% by mass. It is more preferable that the content is not less than 40% by mass.

By satisfying the content rate conditions as described above, in the vapor chamber 100 (wick structure) manufactured using the vapor chamber manufacturing member 10′, the flow path portion of the gaseous working fluid 30 and the liquid state and the passage portion of the hydraulic fluid 30 can be made more suitable.

When the content of the wick 13 in the vapor chamber manufacturing member 10' is Xf [% by mass] and the content of the resin material 14' is Xr [% by mass], 0.8≤Xf/Xr≤8.0. , more preferably 1.0≤Xf/Xr≤7.0, and even more preferably 2.0≤Xf/Xr≤6.0.

By satisfying the above-described content ratio relationship, the vapor chamber 100 (wick structure) manufactured using the vapor chamber manufacturing member 10′ has a flow path portion for the gaseous working fluid 30 and a liquid phase portion. and the passage portion of the hydraulic fluid 30 can be made more suitable.

[2-2] Wick The vapor chamber manufacturing member 10 ′ of the present embodiment includes a wick 13 .

The wick 13 included in the vapor chamber manufacturing member 10' preferably satisfies the same conditions as the wick 13 described as the constituent material of the vapor chamber 100 (wick structure).
As a result, the same effect as described above can be obtained.

[2-3] Curing Agent The vapor chamber manufacturing member 10' may further contain a curing agent.

The curing agent (photosensitive agent) is not particularly limited as long as it cures the resin material 14'. Benzylphenyl sulfide, benzyl, dibenzyl, diacetyl and the like can be mentioned, and one or more selected from these can be used in combination.

The content of the curing agent (photosensitive agent) in the vapor chamber manufacturing member 10′ is not particularly limited, but is preferably 0.1% by mass or more and 50% by mass or less, and 0.5% by mass or more and 40% by mass. is more preferably 1.0% by mass or more and 30% by mass or less.

As a result, the storage stability of the vapor chamber manufacturing member 10 ′ is sufficiently excellent, and the photopolymerization reaction can be started and progressed more favorably when manufacturing the vapor chamber 100 described later.

[2-4] Other Components The vapor chamber manufacturing member 10' may contain components other than the components described above (hereinafter also referred to as "other components"). Such components include, for example, fillers, ultraviolet absorbers, leveling agents, coupling agents, flame retardants, antioxidants, etc., and may be used alone or in combination of two or more selected from these. can be done.

However, the content of other components in the vapor chamber manufacturing member 10′ is preferably 7.0% by mass or less, more preferably 5.0% by mass or less, and 3.0% by mass or less. is more preferable.

[2-5] Overall Configuration of Vapor Chamber Manufacturing Member The shape of the vapor chamber manufacturing member 10' is not particularly limited, but in the illustrated configuration, it is sheet-like.

Thereby, the sheet-like vapor chamber 100 (wick structure) can be suitably manufactured.

When the vapor chamber manufacturing member 10' has a sheet shape, the sheet-like wick 13 (fibers 131) extends over substantially the entirety of the vapor chamber manufacturing member 10' in the thickness direction, as shown in FIG. It may be present, or it may be unevenly distributed near the center in the thickness direction of the vapor chamber manufacturing member 10' as shown in FIG. It may be unevenly distributed on one side of the chamber-manufacturing member 10'. In addition, the sheet-like wick 13 (fibers 131) is unevenly distributed on both sides of the vapor chamber manufacturing member 10', and is closer to the center of the vapor chamber manufacturing member 10' in the thickness direction than these portions. , the content of the fibers 131 may be low.

The thickness of the vapor chamber manufacturing member 10 ′ is preferably 10 μm or more and 2000 μm or less, more preferably 20 μm or more and 1000 μm or less, and even more preferably 30 μm or more and 500 μm or less.

As a result, while preventing the vapor chamber 100 manufactured using the vapor chamber manufacturing member 10' from becoming thicker than necessary, can be formed more preferably.

[3] Manufacturing Method of Vapor Chamber Next, the manufacturing method of the vapor chamber of the present invention will be described.

10 and 11 are longitudinal sectional views schematically showing an example of the vapor chamber manufacturing method of the present invention.

The manufacturing method of the vapor chamber 100 of the present embodiment includes a vapor chamber manufacturing member preparing step (1a) of preparing a vapor chamber manufacturing member 10' made of a material containing an uncured resin material 14'; A first bonding step (1b) of bonding the chamber manufacturing member 10′ to a first sheet material 21 made of a metal material on the first surface 11, which is one surface thereof, and a first sheet The exposure step (1c) of irradiating light (exposure light) E in a predetermined pattern to the vapor chamber manufacturing member 10′ joined to the material 21, and the unexposed portion of the portion not irradiated with the light E in the exposure step. A developing step (1d) for removing the cured resin material 14′, and the vapor chamber manufacturing member 10′ that has undergone the developing step, on the second surface 12 opposite to the first surface 11, A second bonding step (1e) of bonding to a second sheet member 22 made of a metal material, and injecting a hydraulic fluid 30 into a space between the first sheet member 21 and the second sheet member 22. and a hydraulic fluid supply/sealing step (1f) for sealing the space.

Accordingly, it is possible to provide a method for manufacturing a vapor chamber that can suitably manufacture a vapor chamber having particularly excellent heat transport ability. Moreover, the flexibility (flexibility) of the manufactured vapor chamber 100 can be made excellent. Therefore, for example, regardless of the member to which the vapor chamber 100 is applied, the arrangement, etc., the vapor chamber 100 and the member can be in a good contact state, and the excellent heat transport ability can be exhibited more reliably. can do.

[3-1] Vapor Chamber Manufacturing Member Preparing Step In the vapor chamber manufacturing member preparing step, the vapor chamber manufacturing member 10' made of a material containing the resin material 14' in an uncured state, particularly the vapor chamber manufacturing member 10' as described above. A vapor chamber manufacturing member 10' including a wick 13 together with an uncured resin material 14' is prepared (1a).

The vapor chamber manufacturing member 10' can be obtained, for example, by impregnating the wick 13 with a composition containing the uncured resin material 14'.

The composition may include, for example, the other components described above in addition to the resin material 14'. Moreover, the composition may contain a solvent. When the composition contains a solvent, the vapor chamber manufacturing member 10 ′ can be obtained by impregnating the wick 13 with the composition and volatilizing the solvent.

For example, the composition may be applied from the surface side corresponding to the first surface 11 of the wick 13, or may be applied from the surface side corresponding to the second surface 12 of the wick 13. 13 may be applied from both sides of the surface corresponding to the first surface 11 and the surface corresponding to the second surface 12 .

Examples of methods for applying the composition to the wick 13 include coating, spraying, and dipping.

[3-2] First Bonding Step In the first bonding step, the vapor chamber manufacturing member 10′ is bonded to the first sheet material 21 on the first surface 11, which is one surface thereof (1b). ).

By bringing the uncured resin material 14' constituting the vapor chamber manufacturing member 10' into contact with the first sheet material 21 and further applying pressure, the two can be suitably bonded. In addition to pressure, the bonding can be performed more preferably by heating.

[3-3] Exposure Step In the exposure step, the vapor chamber manufacturing member 10' joined to the first sheet material 21 is irradiated with light E in a predetermined pattern (1c).

As a result, the portion of the resin material 14 ′ irradiated with the light E is selectively cured to become the resin cured product 14 . That is, it is possible to form a cured portion corresponding to a portion to be the flow path wall 16 composed of the cured resin 14 in a pattern corresponding to the irradiation pattern of the light E. FIG.

It should be noted that the curing reaction in this step should be allowed to proceed to such an extent that the uncured resin material 14' can be removed while leaving the cured resin 14 in the subsequent development step. It doesn't have to be.

The type of light E irradiated in this step is determined according to the type of the resin material 14', but is preferably ultraviolet light.

As a result, the resin material 14' can be preferably cured by exposure processing in a relatively short time, and the productivity of the vapor chamber 100 can be improved.

The exposure step may be performed by scanning light such as laser light in a predetermined pattern, but it can be preferably performed by using a photomask.

[3-4] Developing Step In the developing step, the uncured resin material 14' is removed from the portion not irradiated with the light E in the exposure step (1d).

As a result, the resin material 14' can be removed while leaving the cured resin 14 and the wick 13 (fibers 131). As a result, a predetermined pattern, that is, a portion to be the flow path wall 16 having a pattern corresponding to the irradiation pattern of the light E can appear.

The development process can be suitably performed by using a developer that selectively dissolves the resin material 14 ′ but does not dissolve the cured resin 14 .

The composition of the developer varies depending on the resin material 14', the cured resin 14, etc. For example, when the resin material 14' contains an alkali-soluble resin as described above, sodium hydroxide and tetramethylammonium hydroxide are used. An alkaline aqueous solution such as can be preferably used.

After the developing process, the wick 13 (fibers 131) may be subjected to plasma treatment.
As a result, the surface of the wick 13 in the finally obtained vapor chamber 100 is significantly reduced compared to the case where the vapor chamber manufacturing member 10′ is manufactured using a material that has been subjected to plasma treatment in advance and the plasma treatment is not performed thereafter. state can be more favorably maintained, and the above-described effects are exhibited more remarkably.

[3-5] Second bonding step In the second bonding step, the vapor chamber manufacturing member 10′ that has undergone the developing step is placed on the second surface 12 opposite to the first surface 11, It is joined to the second sheet material 22 (1e).

The second sheet material 22 and the vapor chamber manufacturing member 10' may be joined by, for example, applying an adhesive to the second sheet material 22 or the vapor chamber manufacturing member 10'. 14' that satisfies the above-described conditions (especially, one containing a thermosetting resin different from the alkali-soluble resin together with the alkali-soluble resin and the photopolymerizable resin), the vapor chamber manufacturing member 10' and the second By heating after contacting the second sheet material 22, the thermosetting resin develops adhesiveness in the process of thermosetting, and the second sheet material 22 and the vapor chamber manufacturing member 10' (wick structure (Body) can be made particularly excellent. Similarly, the bonding strength between the first sheet material 21 and the vapor chamber manufacturing member 10' (wick structure) can also be particularly excellent.

In particular, when the resin material 14' contains a thermosetting resin different from the alkali-soluble resin, the resin material 14' is made to develop adhesiveness, and then the heat treatment for thermosetting the resin material 14' is performed in this step. is preferred.

As a result, the adhesion between the deformation prevention member 10 (wick structure) and the container 20 can be improved, and the strength of the deformation prevention member 10 (wick structure) can be improved. , and the durability and reliability of the vapor chamber 100 can be improved.

The heating temperature in this step is preferably 80° C. or higher and 250° C. or lower, more preferably 90° C. or higher and 220° C. or lower, even more preferably 100° C. or higher and 200° C. or lower.

As a result, the above-described effects are exhibited more remarkably while preventing unintended deterioration of the constituent materials of the vapor chamber 100 more effectively. Also, the productivity of the vapor chamber 100 can be improved.

Moreover, in this step, heating under different conditions may be combined. Specifically, for example, heat treatment in a pressurized state (thermocompression bonding) and subsequent heat treatment in a state in which the pressurized state is released (post-cure) may be combined.

Moreover, the heating time in this step is preferably 0.1 minute or more and 600 minutes or less.
As a result, the above-described effects are exhibited more remarkably while preventing unintended deterioration of the constituent materials of the vapor chamber 100 more effectively. Also, the productivity of the vapor chamber 100 can be improved.

As described above, when the heat treatment under pressure (thermocompression bonding) and the subsequent heat treatment after releasing the pressure (post-cure) are performed in combination, the heat treatment under pressure ( The treatment time for thermocompression bonding is preferably 0.1 minute or more and 10 minutes or less, and the treatment time for heat treatment (post-cure) in a state where the pressure is released is 20 minutes or more and 480 minutes or less. It is preferable to have

[3-6] Hydraulic Fluid Supply/Seal Step In the hydraulic fluid supply/seal step, the hydraulic fluid 30 is injected into the space between the first sheet member 21 and the second sheet member 22, and the space is sealed. (1f).

The injection of the hydraulic fluid 30 can be suitably performed, for example, in a state where the space between the first sheet material 21 and the second sheet material 22 is decompressed by vacuuming.

By reducing the pressure in the space between the first sheet material 21 and the second sheet material 22, the boiling point of the working fluid 30 can be lowered, and the evaporation and condensation cycle of the working fluid 30 can be performed more efficiently. Therefore, the heat transport effect and the heat uniforming effect can be further enhanced.

After the hydraulic fluid 30 is injected, the injection part of the hydraulic fluid 30 is sealed, and the wick structure (the deformation preventing member 10 and the wick 13) and the space containing the hydraulic fluid 30 are liquid-tightly and air-tightly sealed. be.

The wick structure (deformation prevention member 10 and wick 13 ) and the space containing the hydraulic fluid 30 are sealed by forming the sealing portion 23 .

Examples of methods for forming the sealing portion 23 include plating, laser welding, seam welding, cold pressure welding, diffusion bonding, brazing, and adhesion.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited to the above-described ones, and modifications, improvements, etc. within the range that can achieve the object of the present invention are included in the present invention. is.

For example, the vapor chamber manufacturing method may further include other steps in addition to the steps described above.

Also, the vapor chamber of the present invention is not limited to those manufactured by the method described above, and may be manufactured by any method.

For example, in the above-described embodiment, the case where the container is formed using two metal sheet materials (the first sheet material and the second sheet material) has been described. It may be formed using a sheet material made of metal, or may be formed using three or more metal sheet materials.

Further, in the above-described embodiment, the vapor chamber is mainly used for the purpose of transferring the heat of the heat-generating member to a predetermined location. It may be used for the purpose of soaking the heat of the high-temperature part.

EXAMPLES The present invention will be described in detail below based on examples, but the present invention is not limited to these.

(Example 1)
[4] Manufacture of Vapor Chamber The vapor chamber of Example 1 was manufactured as follows.

[4-1] Preparation of resin composition [4-1-1] Alkali-soluble resin (resin having alkali-soluble group and double bond (curing resin curable by both light and heat: methacrylic-modified bisphenol A novolac Synthesis of resin: MPN))

500 g of methyl ethyl ketone (MEK) solution of phenol novolac resin (Phenolite LF-4871, manufactured by DIC Corporation) having a solid content of 60% was charged into a 2 L flask, and tributylamine as a catalyst: 1.5 g, and 0.15 g of hydroquinone was added as a polymerization inhibitor and heated to 100°C.

Thereafter, 162.6 g of glycidyl methacrylate was added dropwise to the above mixture over 30 minutes, and the mixture was stirred at 100° C. for 5 hours for reaction to obtain a methacrylic-modified phenolic novolak resin having a non-volatile content of 69.9%. . The methacrylic-modified phenolic novolak resin thus obtained as an alkali-soluble resin contains (meth)acrylic groups and phenolic hydroxyl groups in the molecule. Moreover, the modification rate of the methacrylic-modified phenol novolac resin (alkali-soluble resin) thus obtained was 45%.

[4-1-2] Preparation of resin varnish (resin composition)
Methacrylic-modified phenolic novolak resin (MPN) synthesized as described above as an alkali-soluble resin (a curable resin that can be cured by both light and heat): 45 parts by mass, methacrylic resin that is liquid at room temperature as a photopolymerizable resin Monomer (manufactured by Shin-Nakamura Chemical Co., Ltd., NK Ester 3G): 13 parts by mass, phenol novolac type epoxy resin as thermosetting resin (manufactured by DIC, Epiclon N-770): 30 parts by mass, bisphenol as thermosetting resin F (Bis-F, manufactured by Honshu Kagaku Kogyo Co., Ltd.): 10 parts by mass was weighed, and methyl ethyl ketone (MEK) was added to adjust the resin component concentration to 71% by mass. Then, the mixture was stirred until the phenol novolac type epoxy resin (N-770) was dissolved.

After that, a curing agent (photosensitive agent) (Irgacure 651, manufactured by IGM Resins B.V.): 1.7 parts by mass, 2-phenyl-4,5-dihydroxyimidazole (2PHZ-PW, manufactured by Shikoku Kasei Kogyo Co., Ltd.) : 0.3 parts by mass and stirred for 1 hour with a stirring blade (450 rpm) to obtain a resin varnish as a resin composition.

[4-2] Manufacture of Vapor Chamber Manufacturing Member Using the resin composition (resin varnish) prepared as described above, a vapor chamber manufacturing member was manufactured as follows.

By immersing the fiber sheet in the resin varnish obtained as described above, the gaps between the fibers forming the wick were impregnated with the resin varnish.

Here, as the fiber sheet, a woven cloth of glass cloth (#2116 manufactured by Unitika Ltd.) having a thickness of 95 μm, a basis weight of 104 g/m ² and a softening point of 840° C. was used.

After that, by heating and drying at 80° C. for 15 minutes, a member for manufacturing a vapor chamber was obtained.

The thus-obtained member for producing a vapor chamber is in the form of a sheet with a thickness of 150 μm. As shown in FIG. No fibers were present on both sides of the chamber-making member.

[4-3] Manufacture of Vapor Chamber First, the vapor chamber manufacturing member obtained as described above is prepared (vapor chamber manufacturing member preparation step). Utilizing the adhesiveness of the uncured resin material (resin composition) constituting the chamber manufacturing member, it was joined to a copper sheet material (thickness: 35 μm) as the first sheet material (first bonding process).

Next, using a photomask provided with openings (light transmitting portions) in a pattern corresponding to the flow channel wall to be formed, light is applied to the vapor chamber manufacturing member joined to the first sheet material. was irradiated (exposure) (exposure step). Exposure was performed using a mercury lamp with a dominant wavelength of 365 nm under the condition of an exposure dose of 700 mJ/cm ² .

Next, using a 3% by weight tetramethylammonium hydroxide (TMAH) aqueous solution, which is an alkaline aqueous solution, as a developer, processing is performed under the conditions of developer pressure: 0.2 MPa and development time: 150 seconds. The uncured resin material was removed from the portions not irradiated with light (development step).

After that, oxygen plasma treatment was applied to the vapor chamber manufacturing member that had been bonded to the first sheet material and had undergone the exposure process and the development process. This modified the surface of the exposed fibers. The contact angle of the working liquid at 23° C. on the plasma-treated portion of the fiber sheet was 1°.

Next, the vapor chamber manufacturing member that has undergone the development step and the plasma treatment is placed on the second surface opposite to the first surface by a copper sheet material (thickness: 35 μm) and pressed with a pressure of 1 MPa. In this state, thermocompression bonding is performed at 170° C. for 1 minute, and then heat treatment (post cure) is performed in an oven at 180° C. for 90 minutes to firmly bond the member for manufacturing the vapor chamber and the second sheet material. After that, the curing reaction is completed, so that the wick structure formed using the vapor chamber manufacturing member is firmly bonded to the first sheet material on the first surface, and the second surface A bonded body was obtained in which the surface was firmly bonded to the second sheet material (second bonding step). That is, in the second bonding step, by heating the vapor chamber manufacturing member and the second sheet material while they are in contact with each other, first, adhesiveness (adhesiveness) is reduced in the thermosetting process of the thermosetting resin. was expressed, and then the curing reaction of the thermosetting resin was completed by further heating.

After that, by copper plating, the peripheral edge portions of the first sheet material and the second sheet material are joined to seal the space between the first sheet material and the second sheet material, and the first sheet material and the second sheet material are sealed. Pure water was injected as a working fluid into the space between the second sheet material. Furthermore, the port for injecting pure water was sealed with solder (working fluid supply/sealing step). This resulted in a vapor chamber.

The wick structure provided in the thus obtained vapor chamber has a thickness of 200 μm and has a structure as shown in FIG. and has a plurality of portions functioning as flow channel walls for the hydraulic fluid, and the interval between adjacent flow channel walls (that is, the width of the flow channel portion) is 500 μm, and the width of the flow channel wall is 100 μm. rice field.

(Examples 2 to 11)
A vapor chamber was manufactured in the same manner as in Example 1 except that the configuration shown in Table 1 was obtained by adjusting the conditions of the fiber sheet used for manufacturing the member for manufacturing the vapor chamber and the conditions of the plasma treatment. .

(Comparative example 1)
A vapor chamber was manufactured in the same manner as in Example 1 except that the configuration shown in Table 1 was obtained by adjusting the conditions of the fiber sheet used for manufacturing the member for manufacturing the vapor chamber and the conditions of the plasma treatment. .

Table 1 summarizes the conditions of the wicks constituting the vapor chambers of the above Examples and Comparative Examples, and the volumes between the wicks and the sheet material per unit area when the vapor chambers are viewed from above. In Table 1, polyparaphenylenebenzobisoxazole is indicated as "PPBBO" and polypropylene as "PP".

[5] Evaluation A ceramic heater (manufactured by Sakaguchi Dennetsu Co., Ltd., product number: Ultramic, heater part 12 mm square, 2.5 mm thick) was prepared, the output of which is variable and the temperature inside the heater can be measured. The heater internal temperatures when the ceramic heater was output to 4 W and 7 W were 225° C. and 310° C., respectively.

Next, the output of the ceramic heater was set to 4 W and 7 W, respectively, and the end of the vapor chamber manufactured in each of the examples and comparative examples was placed on the ceramic heater, and the temperature inside the ceramic heater was measured when the temperature was stabilized. It was measured.
The results are shown in Table 2.

As is clear from Table 2, in the present invention, the temperature drop when applied to the ceramic heater was greater than in the comparative example. This indicates that the vapor chamber of the present invention has particularly excellent heat transport ability. Moreover, it was confirmed that the vapor chamber of the present invention is excellent in flexibility (softness).

In addition, the thickness of the fibers constituting the fiber base material is variously changed within the range of 3.0 μm or more and 20.0 μm or less, and the basis weight of the fiber base material is changed within the range of 10 g/m ² or more and 250 g/m ² or less. The thickness of the fiber base material is variously changed within the range of 10 μm or more and 1000 μm or less, the thickness of the vapor chamber manufacturing member is variously changed within the range of 10 μm or more and 2000 μm or less, and the container The thickness of the sheet material used for formation is variously changed within the range of 12 μm or more and 500 μm or less, and the content of the fiber base material in the vapor chamber manufacturing member is Xf [% by mass], and the content of the resin material is Xr. Vapor chambers were manufactured in the same manner as in the above examples, except that the value of Xf/Xr when expressed as [% by mass] was varied within the range of 0.8 or more and 8.0 or less, and evaluated in the same manner as described above. was carried out, an excellent effect was obtained in the same manner as described above.

Also, by changing the method of applying the resin varnish to the fiber base material, vapor chamber manufacturing members were manufactured as shown in FIGS. 7 and 9, and using these vapor chamber manufacturing members, A vapor chamber was manufactured in the same manner as in the above example except that the cross-sectional structure shown in FIGS. 1, 3, and 4 was used. effect was obtained.

Reference Signs List 100: Vapor Chamber 10: Deformation Prevention Member 10': Vapor Chamber Manufacturing Member 11: First Surface 12: Second Surface 13: Wick (Fiber Sheet, Fiber Base Material)
131: Fiber 14': Resin material 14: Cured resin material 15: Channel part 16: Channel wall 20: Container 21: First sheet material 22: Second sheet material 23: Sealing part 30: Hydraulic fluid ( working fluid)
S: Spacing L: Width E: Light (exposure light)

Claims (12)

a container having a cavity therein;
a wick disposed in the cavity; and
a hydraulic fluid disposed in the cavity;
A vapor chamber, wherein the contact angle of the working liquid with respect to the wick at 23°C is more than 0.1° and less than 100°. 2. The vapor chamber of claim 1, wherein said wick includes fibers made of a material including at least one selected from the group consisting of glass, aramid, and polyparaphenylenebenzobisoxazole. 3. The vapor chamber according to claim 2, wherein the fibers have a thickness of 3.0 [mu]m or more and 20.0 [mu]m or less. The vapor chamber according to any one of claims 1 to 3, wherein the wick has a basis weight of 10 g/ ^m2 or more and 250 g/m2 or ^less . 5. The vapor chamber according to any one of claims 1 to 4, wherein the cavity has a height of 10 µm or more and 2000 µm or less. 6. The vapor chamber according to any one of claims 1 to 5, wherein the wick has a thickness of 10 µm or more and 1000 µm or less. 7. A vapor chamber as claimed in any one of claims 1 to 6, wherein the container is mainly composed of Cu or a Cu alloy. The container is configured by joining sheet materials,
The vapor chamber according to any one of claims 1 to 7, wherein the sheet material has a thickness of 12 µm or more and 500 µm or less. 9. The vapor chamber according to claim 8, wherein the volume between the wick and the sheet material per unit area in plan view is 1 ^mm3 / ^cm2 or more and 25 ^mm3 /cm2 ^or less. 10. The vapor chamber according to any one of claims 1 to 9, further comprising a deformation prevention member arranged in the cavity and having a function of preventing deformation of the container in the thickness direction. 11. The vapor chamber according to claim 10, wherein said deformation preventing member is formed integrally with said wick. The deformation prevention member has a portion that functions as a flow path wall for the hydraulic fluid,
12. The vapor chamber according to claim 10 or 11, wherein the wick is arranged to pass through a portion functioning as a flow path wall for the hydraulic fluid.

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