JP2023092416A - Nitride semiconductor substrate and method for manufacturing the same - Google Patents

Abstract

To provide a nitride semiconductor substrate having small warp and less dislocation, excellent crystallinity and including a group III nitride semiconductor layer, and a method for manufacturing the same.SOLUTION: A nitride semiconductor substrate includes a group III nitride semiconductor layer including GaN on a support substrate. The support substrate includes: a composite substrate obtained by laminating a plurality of layers including a polycrystal ceramic core, a first adhesive layer bonded to the entire polycrystal ceramic core, a second adhesive layer laminated on the entire first adhesive layer and a barrier layer bonded to the entire second adhesive layer; and a group III nitride semiconductor seed crystal layer bonded on the composite substrate through a planarization layer and including at least GaN. The group III nitride semiconductor layer is formed on the group III nitride semiconductor seed crystal layer, and the crystallinity of the GaN (0002) growth plane of the group III nitride semiconductor seed crystal layer is 550 arcsec or less in a XRD half value width.SELECTED DRAWING: Figure 1

Description

The present invention relates to a nitride semiconductor substrate and a method for manufacturing a nitride semiconductor substrate.

The MOCVD method, which is one of semiconductor thin film manufacturing methods, is widely used because it is excellent in large diameter and mass productivity, and can form homogeneous thin film crystals. Nitride semiconductors typified by GaN are expected to be next-generation semiconductor materials that exceed the limits of silicon single crystal materials.

GaN has a characteristic of a high saturated electron velocity, so it is possible to fabricate a device capable of operating at high frequencies, and since it has a large breakdown electric field, it can operate at a high output. In addition, weight reduction, miniaturization, and low power consumption can be expected.

In recent years, GaN HEMTs capable of operating at high frequencies and high power have been attracting attention due to the demand for higher communication speeds as typified by 5G and the accompanying demands for higher power.

As a substrate used for a GaN epitaxial wafer for fabricating a GaN device, a silicon single crystal substrate is the cheapest and advantageous for increasing the diameter. SiC substrates are also used because of their high thermal conductivity and good heat dissipation. However, since these substrates have different coefficients of thermal expansion from GaN, stress is applied in the cooling process after the epitaxial film formation, and cracks are likely to occur. In addition, the application of strong stress may cause wafer cracking during the device process. In addition, it is impossible to form a thick GaN film, and even if a complicated stress relaxation layer is formed in the epitaxial layer, the crack-free thickness is at most about 5 μm.

Since the GaN substrate has the same (or very close to) thermal expansion coefficient as that of the GaN epitaxial growth layer, the problem of cracks as described above and the problem of wafer breakage due to warpage are less likely to occur. Moreover, since the difference in lattice constant between the GaN substrate and the epitaxially grown GaN layer is extremely small, the problem of generation of dislocations and deterioration of crystallinity due to the difference in lattice constant can be solved.

However, the self-supporting GaN substrate is not only difficult to produce, but also extremely expensive and cannot be produced with a large diameter, so it is not suitable for mass production.

Therefore, a large-diameter substrate for GaN epitaxial use (hereinafter referred to as a support substrate for GaN or simply a growth substrate) having a large diameter and a coefficient of thermal expansion close to that of GaN has been developed. A typical support substrate for GaN includes a support structure including a polycrystalline ceramic core, a first adhesion layer, a conductive layer, a second adhesion layer, a barrier layer, and a planarization layer laminated on one side of the support structure. , a single-crystal silicon layer stacked on the planarization layer. Incidentally, the conductive layer may not be formed, or may be formed only on one side. Alternatively, a conductive layer may be formed further on the rear surface of the barrier layer.

By using this GaN supporting substrate, a GaN epitaxial substrate having a large diameter, a large epitaxial film thickness, and no cracks can be produced. In addition, since the difference in thermal expansion coefficient from GaN is extremely small, it is difficult for warping to occur during GaN growth and cooling. Since there is no need to provide a layer, the epitaxial film formation time is shortened, and the cost required for epitaxial growth can be greatly reduced.

Furthermore, since most of the supporting substrate for GaN is made of ceramics, the substrate itself is very hard and is resistant to plastic deformation. does not occur.

Patent Literature 1 discloses a technology of a bonded substrate (support substrate for GaN) having a coefficient of thermal expansion close to that of GaN.

The support substrate for GaN is unlikely to warp during growth due to the difference in thermal expansion coefficient, but since the surface layer is composed of a silicon layer, a difference in lattice constant from the GaN layer occurs and crystal defects (dislocations) occur. easier to do. As a result, the crystallinity of the GaN epitaxial layer formed on the supporting substrate for GaN is not significantly different from that in the case of using a silicon single crystal substrate as the supporting substrate.

Patent Document 2 describes a method for separating a sapphire substrate and a GaN layer by irradiating a pulsed laser beam.

Patent Document 3 describes a method of peeling off a semiconductor thin film by laser beam processing or the like and bonding it to another substrate.

Japanese Patent Publication No. 2019-523994 JP 2013-21225 A JP 2010-161355 A

However, none of Patent Documents 1 to 3 describes or suggests measures for improving the crystallinity of a GaN epitaxial layer formed on a GaN support substrate.

The present invention has been made to solve the above problems, and provides a nitride semiconductor substrate including a Group III nitride semiconductor layer with less warpage, less dislocations, and good crystallinity, and a method for manufacturing the same. for the purpose.

In order to solve the above problems, the present invention provides a nitride semiconductor substrate in which a group III nitride semiconductor layer containing GaN is formed on a support substrate,
The support substrate is
a polycrystalline ceramic core, a first adhesive layer bonded over the polycrystalline ceramic core, a second adhesive layer laminated over the first adhesive layer, and bonded over the second adhesive layer a composite substrate in which a plurality of layers including a barrier layer are laminated;
a Group III nitride semiconductor seed crystal layer containing at least GaN, which is bonded onto the composite substrate via a planarization layer;
The group III nitride semiconductor layer is formed on the group III nitride semiconductor seed crystal layer, and the crystallinity of the (0002) growth plane of GaN of the group III nitride semiconductor seed crystal layer is the XRD half width Provided is a nitride semiconductor substrate characterized in that it is 550 arcsec or less at .

Thus, any nitride semiconductor substrate in which a group III nitride semiconductor layer is formed on a group III nitride semiconductor seed crystal layer in which the crystallinity of the (0002) growth surface of GaN of the seed crystal is 550 arcsec or less in XRD half-value width. For example, it is possible to have a Group III nitride semiconductor layer with extremely low dislocation density and excellent crystallinity, thereby improving device characteristics.

Further, if the nitride semiconductor substrate of the present invention includes a support substrate including a composite substrate in which a plurality of layers are laminated, warping during epitaxial growth of the group III nitride semiconductor layer due to a difference in thermal expansion coefficient is reduced. Therefore, it is possible to have a thick Group III nitride semiconductor layer without cracks. Therefore, the group III nitride semiconductor layer can be finally separated from the support substrate and used as a free-standing substrate.

Further, in the present invention, a nitride semiconductor substrate in which a Group III nitride semiconductor layer containing GaN is formed on a support substrate,
The support substrate is
a polycrystalline ceramic core, a first adhesive layer bonded over the polycrystalline ceramic core, a barrier layer bonded over the first adhesive layer, a second adhesive layer bonded to the back surface of the barrier layer; and a composite substrate laminated with a plurality of layers including a conductive layer bonded to the back surface of the second adhesive layer;
a Group III nitride semiconductor seed crystal layer comprising at least GaN, bonded onto the composite substrate via a planarization layer bonded only to the surface of the composite substrate;
The group III nitride semiconductor layer is formed on the group III nitride semiconductor seed crystal layer, and the crystallinity of the (0002) growth plane of GaN of the group III nitride semiconductor seed crystal layer is the XRD half width Provided is a nitride semiconductor substrate characterized in that it is 550 arcsec or less at .

Thus, any nitride semiconductor substrate in which a group III nitride semiconductor layer is formed on a group III nitride semiconductor seed crystal layer in which the crystallinity of the (0002) growth surface of GaN of the seed crystal is 550 arcsec or less in XRD half-value width. For example, it is possible to have a Group III nitride semiconductor layer with extremely low dislocation density and excellent crystallinity, thereby improving device characteristics.

In addition, if this nitride semiconductor substrate includes a supporting substrate including a composite substrate in which a plurality of layers are laminated, it is possible to reduce warping during epitaxial growth of the group III nitride semiconductor layer due to a difference in thermal expansion coefficient. Therefore, it is possible to have a thick Group III nitride semiconductor layer without cracks. Therefore, the group III nitride semiconductor layer can be finally separated from the support substrate and used as a free-standing substrate.

Further, with the nitride semiconductor substrate of the present invention including the above-described support substrate, no leakage path is generated due to the surface-side conductive layer of the support substrate, and excellent high-frequency characteristics can be obtained.

Further, in the present invention, a nitride semiconductor substrate in which a Group III nitride semiconductor layer containing GaN is formed on a support substrate,
The support substrate is
A polycrystalline ceramic core, a first adhesive layer bonded over the polycrystalline ceramic core, a conductive layer bonded to the back surface of the first adhesive layer, and a second adhesive layer bonded to the back surface of the conductive layer. and a barrier layer bonded to the front and side surfaces of the first adhesive layer, the side surfaces of the conductive layer, and the side and back surfaces of the second adhesive layer;
a Group III nitride semiconductor seed crystal layer comprising at least GaN, bonded onto the composite substrate via a planarization layer bonded only to the surface of the composite substrate;
The group III nitride semiconductor layer is formed on the group III nitride semiconductor seed crystal layer, and the crystallinity of the (0002) growth plane of GaN of the group III nitride semiconductor seed crystal layer is the XRD half width Provided is a nitride semiconductor substrate characterized in that it is 550 arcsec or less at .

Thus, any nitride semiconductor substrate in which a group III nitride semiconductor layer is formed on a group III nitride semiconductor seed crystal layer in which the crystallinity of the (0002) growth surface of GaN of the seed crystal is 550 arcsec or less in XRD half-value width. For example, it is possible to have a Group III nitride semiconductor layer with extremely low dislocation density and excellent crystallinity, thereby improving device characteristics.

Further, if such a nitride semiconductor substrate is used, warping during epitaxial growth of the group III nitride semiconductor layer due to a difference in thermal expansion coefficient is reduced by including a supporting substrate including a composite substrate in which a plurality of layers are laminated. Therefore, it is possible to have a thick Group III nitride semiconductor layer without cracks. Therefore, the group III nitride semiconductor layer can be finally separated from the support substrate and used as a free-standing substrate.

Further, with the nitride semiconductor substrate of the present invention including the above-described support substrate, no leakage path is generated due to the surface-side conductive layer of the support substrate, and excellent high-frequency characteristics can be obtained.

The Group III nitride semiconductor layer may contain GaN, as well as one or more of AlN and AlGaN.

Thus, the III-nitride semiconductor layer can also contain nitrides other than GaN.

The polycrystalline ceramic core preferably contains aluminum nitride.

If the polycrystalline ceramic core contains aluminum nitride, the difference in thermal expansion coefficient can be made extremely small.

Preferably, each of the first adhesion layer and the second adhesion layer contains tetraethylorthosilicate and/or silicon oxide, and the barrier layer contains silicon nitride.

The first adhesive layer and the second adhesive layer can contain, for example, the compounds described above. Moreover, if the barrier layer contains the above compound, it can sufficiently block the movement of impurities from the inside of the composite substrate to the Group III nitride semiconductor layer.

Preferably, each of the first adhesion layer and the second adhesion layer has a thickness of 50-200 nm, and the barrier layer has a thickness of 100 nm-1500 nm.

If the thickness of each of the first adhesive layer and the second adhesive layer is within the above range, the upper and lower layers can be adhered with sufficient force, and warping can be suppressed more reliably. Moreover, if the thickness of the barrier layer is within the above range, it is possible to sufficiently block the movement of impurities from the inside of the composite substrate to the Group III nitride semiconductor layer.

The planarization layer preferably contains at least one selected from the group consisting of tetraethylorthosilicate, silicon oxide, aluminum oxide, silicon nitride, and silicon oxynitride, and has a thickness of 500 nm to 3000 nm. .

If such a flattening layer is included, it is possible to more reliably suppress warping and include a Group III nitride semiconductor layer having better crystallinity. Moreover, the unevenness of the surface can be sufficiently flattened.

The III-nitride semiconductor seed crystal layer may have a thickness of 100 nm or more.

The III-nitride semiconductor seed crystal layer can have a thickness of, for example, 100 nm or more.

It is preferable that the composite substrate further has a conductive layer laminated on the whole or one side of the first adhesive layer between the first adhesive layer and the second adhesive layer.

By including such a conductive layer, a nitride semiconductor substrate including a conductive portion can be obtained.

The conductive layer preferably has a thickness of 50 nm to 500 nm.

If the thickness of the conductive layer is within this range, it is possible to obtain a nitride semiconductor substrate including a portion having excellent conductivity while suppressing the occurrence of warpage.

It is preferable that the composite substrate further includes a back conductive layer laminated on the back surface to which the group III nitride semiconductor seed crystal layer is not bonded.

If it further has such a back surface conductive layer, it can be a nitride semiconductor substrate having a conductive back surface.

Further, according to the present invention, there is provided a method for manufacturing a nitride semiconductor substrate comprising epitaxially growing a group III nitride semiconductor layer on a group III nitride semiconductor seed crystal layer containing at least GaN,
(1) In order to manufacture a group III nitride semiconductor substrate for bonding, a silicon single crystal thin film is formed as a starting seed crystal layer on a silicon single crystal substrate or a starting composite substrate having a plurality of layers laminated via a starting planarization layer. providing a starting support substrate to which is bonded as a growth substrate;
(2) The group III nitride semiconductor seed crystal layer containing at least GaN is epitaxially grown on the growth substrate so that the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. manufacturing a group III nitride semiconductor substrate for bonding comprising a semiconductor seed crystal layer;
(3) The vicinity of the interface of the group III nitride semiconductor substrate for bonding between the silicon single crystal substrate or the silicon single crystal thin film and the group III nitride semiconductor seed crystal layer is irradiated with a laser to form a peeling layer. process,
(4) As a composite substrate different from the starting composite substrate, a polycrystalline ceramic core, a first adhesive layer bonded to the entire polycrystalline ceramic core, and a second adhesive layer laminated to the entire first adhesive layer. providing a composite substrate laminated with a plurality of layers including an adhesive layer and a barrier layer bonded over the second adhesive layer, and laminating a planarization layer on the composite substrate;
(5) bonding the planarizing layer laminated on the composite substrate prepared in step (4) and the group III nitride semiconductor seed crystal layer of the group III nitride semiconductor substrate for bonding to form a bonding substrate; the step of obtaining
(6) separating the silicon single crystal substrate or the silicon single crystal thin film of the group III nitride semiconductor substrate for bonding by the peeling layer, and peeling a part of the growth substrate from the bonding substrate;
(7) polishing the peeled surface to remove a portion of the silicon single crystal substrate or the silicon single crystal thin film remaining on the bonding substrate; (8) a group III nitride semiconductor layer containing GaN on the group III nitride semiconductor seed crystal layer of the support substrate; is epitaxially grown to manufacture a nitride semiconductor substrate.

With such a method for manufacturing a nitride semiconductor substrate, GaN is contained on the group III nitride semiconductor seed crystal layer in which the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. Since the Group III nitride semiconductor layer is epitaxially grown, no lattice mismatch occurs between the seed crystal layer and the Group III nitride semiconductor layer which is the epitaxial growth layer, and the Group III nitride semiconductor has a low dislocation density, that is, good crystallinity. Layers can be deposited. Further, by repeating this, a Group III nitride semiconductor layer with fewer dislocations can be formed.

Moreover, since the group III nitride semiconductor layer formed by this method has few dislocations, it can be laminated thickly. Since the support substrate including the composite substrate in which a plurality of layers are laminated is used as the support substrate, warping during the growth of the group III nitride semiconductor layer due to the difference in thermal expansion coefficient can be reduced, and cracks are not included. A thick Group III nitride semiconductor layer can be formed. Therefore, the group III nitride semiconductor layer can be finally separated from the support substrate and used as a free-standing substrate.

Further, when the starting support substrate is used as the growth substrate, the starting support substrate is separated by separating the silicon single crystal thin film from the bonding substrate. The substrate obtained in (1) can be used again as a starting support substrate, and the merit of cost reduction can be obtained.

In step (4), the composite substrate further has a conductive layer laminated on the whole or one side of the first adhesive layer between the first adhesive layer and the second adhesive layer. Preparation is preferred.

In this way, a nitride semiconductor substrate including a conductive portion can be manufactured.

Further, according to the present invention, there is provided a method for manufacturing a nitride semiconductor substrate comprising epitaxially growing a group III nitride semiconductor layer on a group III nitride semiconductor seed crystal layer containing at least GaN,
(1) In order to manufacture a group III nitride semiconductor substrate for bonding, a silicon single crystal thin film is formed as a starting seed crystal layer on a silicon single crystal substrate or a starting composite substrate having a plurality of layers laminated via a starting planarization layer. providing a starting support substrate to which is bonded as a growth substrate;
(2) The group III nitride semiconductor seed crystal layer containing at least GaN is epitaxially grown on the growth substrate so that the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. manufacturing a group III nitride semiconductor substrate for bonding comprising a semiconductor seed crystal layer;
(3) The vicinity of the interface of the group III nitride semiconductor substrate for bonding between the silicon single crystal substrate or the silicon single crystal thin film and the group III nitride semiconductor seed crystal layer is irradiated with a laser to form a peeling layer. process,
(4) as a composite substrate separate from the starting composite substrate, a polycrystalline ceramic core, a first adhesion layer bonded over the polycrystalline ceramic core, a barrier layer bonded over the first adhesion layer; providing a composite substrate laminated with a plurality of layers including a second adhesive layer bonded to the back surface of the barrier layer and a conductive layer bonded to the back surface of the second adhesive layer; laminating a planarization layer only on top;
(5) bonding the planarizing layer laminated on the composite substrate prepared in step (4) and the group III nitride semiconductor seed crystal layer of the group III nitride semiconductor substrate for bonding to form a bonding substrate; the step of obtaining
(6) separating the silicon single crystal substrate or the silicon single crystal thin film of the group III nitride semiconductor substrate for bonding by the peeling layer, and peeling a part of the growth substrate from the bonding substrate;
(7) polishing the peeled surface to remove a portion of the silicon single crystal substrate or the silicon single crystal thin film remaining on the bonding substrate; (8) a group III nitride semiconductor layer containing GaN on the group III nitride semiconductor seed crystal layer of the support substrate; is epitaxially grown to manufacture a nitride semiconductor substrate.

With such a method for manufacturing a nitride semiconductor substrate, GaN is contained on the group III nitride semiconductor seed crystal layer in which the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. Since the Group III nitride semiconductor layer is epitaxially grown, no lattice mismatch occurs between the seed crystal layer and the Group III nitride semiconductor layer which is the epitaxial growth layer, and the Group III nitride semiconductor has a low dislocation density, that is, good crystallinity. Layers can be deposited. Further, by repeating this, a Group III nitride semiconductor layer with fewer dislocations can be formed.

Moreover, since the group III nitride semiconductor layer formed by this method has few dislocations, it can be laminated thickly. Since the support substrate including the composite substrate in which a plurality of layers are laminated is used as the support substrate, warping during the growth of the group III nitride semiconductor layer due to the difference in thermal expansion coefficient can be reduced, and cracks are not included. A thick Group III nitride semiconductor layer can be formed. Therefore, the group III nitride semiconductor layer can be finally separated from the support substrate and used as a free-standing substrate.

Further, when the starting support substrate is used as the growth substrate, the starting support substrate is separated by separating the silicon single crystal thin film from the bonding substrate. The substrate obtained in (1) can be used again as a starting support substrate, and the merit of cost reduction can be obtained.

With such a nitride semiconductor substrate manufacturing method, it is possible to manufacture a nitride semiconductor substrate excellent in high-frequency characteristics without causing a leakage path due to the surface-side conductive layer of the supporting substrate.

Further, according to the present invention, there is provided a method for manufacturing a nitride semiconductor substrate comprising epitaxially growing a group III nitride semiconductor layer on a group III nitride semiconductor seed crystal layer containing at least GaN,
(1) In order to manufacture a group III nitride semiconductor substrate for bonding, a silicon single crystal thin film is formed as a starting seed crystal layer on a silicon single crystal substrate or a starting composite substrate having a plurality of layers laminated via a starting planarization layer. providing a starting support substrate to which is bonded as a growth substrate;
(2) The group III nitride semiconductor seed crystal layer containing at least GaN is epitaxially grown on the growth substrate so that the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. manufacturing a group III nitride semiconductor substrate for bonding comprising a semiconductor seed crystal layer;
(3) The vicinity of the interface of the group III nitride semiconductor substrate for bonding between the silicon single crystal substrate or the silicon single crystal thin film and the group III nitride semiconductor seed crystal layer is irradiated with a laser to form a peeling layer. process,
(4) a composite substrate separate from the starting composite substrate, comprising a polycrystalline ceramic core, a first adhesive layer bonded to the entire polycrystalline ceramic core, and a conductive layer bonded to the back surface of the first adhesive layer; , a second adhesive layer bonded to the back surface of the conductive layer, and a barrier bonded to the front and side surfaces of the first adhesive layer, the side surfaces of the conductive layer, and the side and back surface of the second adhesive layer. preparing a composite substrate in which a plurality of layers including a layer are laminated, and laminating a planarization layer only on the surface of the composite substrate;
(5) bonding the planarizing layer laminated on the composite substrate prepared in step (4) and the group III nitride semiconductor seed crystal layer of the group III nitride semiconductor substrate for bonding to form a bonding substrate; the step of obtaining
(6) separating the silicon single crystal substrate or the silicon single crystal thin film of the group III nitride semiconductor substrate for bonding by the peeling layer, and peeling a part of the growth substrate from the bonding substrate;
(7) polishing the peeled surface to remove a portion of the silicon single crystal substrate or the silicon single crystal thin film remaining on the bonding substrate; (8) a group III nitride semiconductor layer containing GaN on the group III nitride semiconductor seed crystal layer of the support substrate; is epitaxially grown to manufacture a nitride semiconductor substrate.

With such a method for manufacturing a nitride semiconductor substrate, GaN is contained on the group III nitride semiconductor seed crystal layer in which the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. Since the Group III nitride semiconductor layer is epitaxially grown, no lattice mismatch occurs between the seed crystal layer and the Group III nitride semiconductor layer which is the epitaxial growth layer, and the Group III nitride semiconductor has a low dislocation density, that is, good crystallinity. Layers can be deposited. Further, by repeating this, a Group III nitride semiconductor layer with fewer dislocations can be formed.

Moreover, since the group III nitride semiconductor layer formed by this method has few dislocations, it can be laminated thickly. Since the support substrate including the composite substrate in which a plurality of layers are laminated is used as the support substrate, warping during the growth of the group III nitride semiconductor layer due to the difference in thermal expansion coefficient can be reduced, and cracks are not included. A thick Group III nitride semiconductor layer can be formed. Therefore, the group III nitride semiconductor layer can be finally separated from the support substrate and used as a free-standing substrate.

Further, when the starting support substrate is used as the growth substrate, the starting support substrate is separated by separating the silicon single crystal thin film from the bonding substrate. The substrate obtained in (1) can be used again as a starting support substrate, and the merit of cost reduction can be obtained.

Also, with such a nitride semiconductor substrate manufacturing method, it is possible to manufacture a nitride semiconductor substrate excellent in high-frequency characteristics without causing a leakage path due to the surface-side conductive layer of the support substrate.

It is preferable that the wavelength of the laser used in step (3) is 360 nm or more and 1100 nm or less.

In this way, the peeling layer can be reliably formed targeting the vicinity of the interface of the silicon single crystal thin film of the growth substrate or the silicon single crystal substrate.

As described above, the nitride semiconductor substrate of the present invention can include a Group III nitride semiconductor layer with less warpage, less dislocations, and better crystallinity.

Further, according to the method for manufacturing a nitride semiconductor substrate of the present invention, it is possible to manufacture a nitride semiconductor substrate containing a Group III nitride semiconductor layer with less warpage, less occurrence of dislocations, and good crystallinity.

1 is a schematic cross-sectional view showing an example of a nitride semiconductor substrate of the present invention; FIG. 1 is a partial flow diagram of a first embodiment of a method for manufacturing a nitride semiconductor substrate of the present invention; FIG. 1 is a schematic cross-sectional view of a starting support substrate used in the first embodiment of the method for manufacturing a nitride semiconductor substrate of the present invention; FIG. 1 is a partial flow diagram of a first embodiment of a method for manufacturing a nitride semiconductor substrate of the present invention; FIG. 1 is a partial flow diagram of a first embodiment of a method for manufacturing a nitride semiconductor substrate of the present invention; FIG. 1 is a partial flow diagram of a first embodiment of a method for manufacturing a nitride semiconductor substrate of the present invention; FIG. FIG. 6 is a partial flow diagram of a second embodiment of the method for manufacturing a nitride semiconductor substrate of the present invention; FIG. 6 is a partial flow diagram of a second embodiment of the method for manufacturing a nitride semiconductor substrate of the present invention; FIG. 6 is a partial flow diagram of a second embodiment of the method for manufacturing a nitride semiconductor substrate of the present invention; FIG. 4 is a schematic cross-sectional view showing another example of the nitride semiconductor substrate of the present invention; FIG. 4 is a schematic cross-sectional view showing another example of the nitride semiconductor substrate of the present invention;

As described above, there has been a demand for development of a nitride semiconductor substrate including a Group III nitride semiconductor layer with less warpage, less occurrence of dislocations, and good crystallinity, and a method for manufacturing the same.

As a result of intensive studies on the above problems, the present inventors have found that the crystallinity of the (0002) growth plane of GaN, which is bonded to a composite substrate via a planarizing film on the composite substrate, is 550 arcsec or less in XRD half-value width. and a group III nitride semiconductor layer formed on the group III nitride semiconductor seed crystal layer, the dislocation density is extremely low and the crystallinity is high. The inventors have found that a nitride semiconductor substrate having a good group III nitride semiconductor layer and less warpage can be obtained, and have completed the present invention.

That is, the present invention provides a nitride semiconductor substrate having a group III nitride semiconductor layer containing GaN formed on a support substrate,
The support substrate is
a polycrystalline ceramic core, a first adhesive layer bonded over the polycrystalline ceramic core, a second adhesive layer laminated over the first adhesive layer, and bonded over the second adhesive layer a composite substrate in which a plurality of layers including a barrier layer are laminated;
a Group III nitride semiconductor seed crystal layer containing at least GaN, which is bonded onto the composite substrate via a planarization layer;
The group III nitride semiconductor layer is formed on the group III nitride semiconductor seed crystal layer, and the crystallinity of the (0002) growth plane of GaN of the group III nitride semiconductor seed crystal layer is the XRD half width 1. A nitride semiconductor substrate characterized by being 550 arcsec or less at .

The present invention also provides a nitride semiconductor substrate having a group III nitride semiconductor layer containing GaN formed on a support substrate,
The support substrate is
a polycrystalline ceramic core, a first adhesive layer bonded over the polycrystalline ceramic core, a barrier layer bonded over the first adhesive layer, a second adhesive layer bonded to the back surface of the barrier layer; and a composite substrate laminated with a plurality of layers including a conductive layer bonded to the back surface of the second adhesive layer;
a Group III nitride semiconductor seed crystal layer comprising at least GaN, bonded onto the composite substrate via a planarization layer bonded only to the surface of the composite substrate;
The group III nitride semiconductor layer is formed on the group III nitride semiconductor seed crystal layer, and the crystallinity of the (0002) growth plane of GaN of the group III nitride semiconductor seed crystal layer is the XRD half width 1. A nitride semiconductor substrate characterized by being 550 arcsec or less at .

The present invention also provides a nitride semiconductor substrate having a group III nitride semiconductor layer containing GaN formed on a support substrate,
The support substrate is
A polycrystalline ceramic core, a first adhesive layer bonded over the polycrystalline ceramic core, a conductive layer bonded to the back surface of the first adhesive layer, and a second adhesive layer bonded to the back surface of the conductive layer. and a barrier layer bonded to the front and side surfaces of the first adhesive layer, the side surfaces of the conductive layer, and the side and back surfaces of the second adhesive layer;
a Group III nitride semiconductor seed crystal layer comprising at least GaN, bonded onto the composite substrate via a planarization layer bonded only to the surface of the composite substrate;
The group III nitride semiconductor layer is formed on the group III nitride semiconductor seed crystal layer, and the crystallinity of the (0002) growth plane of GaN of the group III nitride semiconductor seed crystal layer is the XRD half width A nitride semiconductor substrate characterized by being 550 arcsec or less at

The present invention also provides a method for manufacturing a nitride semiconductor substrate, comprising epitaxially growing a group III nitride semiconductor layer on a group III nitride semiconductor seed crystal layer containing at least GaN,
(1) In order to manufacture a group III nitride semiconductor substrate for bonding, a silicon single crystal thin film is formed as a starting seed crystal layer on a silicon single crystal substrate or a starting composite substrate having a plurality of layers laminated via a starting planarization layer. providing a starting support substrate to which is bonded as a growth substrate;
(2) The group III nitride semiconductor seed crystal layer containing at least GaN is epitaxially grown on the growth substrate so that the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. manufacturing a group III nitride semiconductor substrate for bonding comprising a semiconductor seed crystal layer;
(3) The vicinity of the interface of the group III nitride semiconductor substrate for bonding between the silicon single crystal substrate or the silicon single crystal thin film and the group III nitride semiconductor seed crystal layer is irradiated with a laser to form a peeling layer. process,
(4) As a composite substrate different from the starting composite substrate, a polycrystalline ceramic core, a first adhesive layer bonded to the entire polycrystalline ceramic core, and a second adhesive layer laminated to the entire first adhesive layer. providing a composite substrate laminated with a plurality of layers including an adhesive layer and a barrier layer bonded over the second adhesive layer, and laminating a planarization layer on the composite substrate;
(5) bonding the planarizing layer laminated on the composite substrate prepared in step (4) and the group III nitride semiconductor seed crystal layer of the group III nitride semiconductor substrate for bonding to form a bonding substrate; the step of obtaining
(6) separating the silicon single crystal substrate or the silicon single crystal thin film of the group III nitride semiconductor substrate for bonding by the peeling layer, and peeling a part of the growth substrate from the bonding substrate;
(7) polishing the peeled surface to remove a portion of the silicon single crystal substrate or the silicon single crystal thin film remaining on the bonding substrate; (8) a group III nitride semiconductor layer containing GaN on the group III nitride semiconductor seed crystal layer of the support substrate; is epitaxially grown to manufacture a nitride semiconductor substrate.

The present invention also provides a method for manufacturing a nitride semiconductor substrate, comprising epitaxially growing a group III nitride semiconductor layer on a group III nitride semiconductor seed crystal layer containing at least GaN,
(1) In order to manufacture a group III nitride semiconductor substrate for bonding, a silicon single crystal thin film is formed as a starting seed crystal layer on a silicon single crystal substrate or a starting composite substrate having a plurality of layers laminated via a starting planarization layer. providing a starting support substrate to which is bonded as a growth substrate;
(2) The group III nitride semiconductor seed crystal layer containing at least GaN is epitaxially grown on the growth substrate so that the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. manufacturing a group III nitride semiconductor substrate for bonding comprising a semiconductor seed crystal layer;
(3) The vicinity of the interface of the group III nitride semiconductor substrate for bonding between the silicon single crystal substrate or the silicon single crystal thin film and the group III nitride semiconductor seed crystal layer is irradiated with a laser to form a peeling layer. process,
(4) as a composite substrate separate from the starting composite substrate, a polycrystalline ceramic core, a first adhesion layer bonded over the polycrystalline ceramic core, a barrier layer bonded over the first adhesion layer; providing a composite substrate laminated with a plurality of layers including a second adhesive layer bonded to the back surface of the barrier layer and a conductive layer bonded to the back surface of the second adhesive layer; laminating a planarization layer only on top;
(5) bonding the planarizing layer laminated on the composite substrate prepared in step (4) and the group III nitride semiconductor seed crystal layer of the group III nitride semiconductor substrate for bonding to form a bonding substrate; the step of obtaining
(6) separating the silicon single crystal substrate or the silicon single crystal thin film of the group III nitride semiconductor substrate for bonding by the peeling layer, and peeling a part of the growth substrate from the bonding substrate;
(7) polishing the peeled surface to remove a portion of the silicon single crystal substrate or the silicon single crystal thin film remaining on the bonding substrate; (8) a group III nitride semiconductor layer containing GaN on the group III nitride semiconductor seed crystal layer of the support substrate; is epitaxially grown to manufacture a nitride semiconductor substrate.

The present invention also provides a method for manufacturing a nitride semiconductor substrate, comprising epitaxially growing a group III nitride semiconductor layer on a group III nitride semiconductor seed crystal layer containing at least GaN,
(1) In order to manufacture a group III nitride semiconductor substrate for bonding, a silicon single crystal thin film is formed as a starting seed crystal layer on a silicon single crystal substrate or a starting composite substrate having a plurality of layers laminated via a starting planarization layer. providing a starting support substrate to which is bonded as a growth substrate;
(2) The group III nitride semiconductor seed crystal layer containing at least GaN is epitaxially grown on the growth substrate so that the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. manufacturing a group III nitride semiconductor substrate for bonding comprising a semiconductor seed crystal layer;
(3) The vicinity of the interface of the group III nitride semiconductor substrate for bonding between the silicon single crystal substrate or the silicon single crystal thin film and the group III nitride semiconductor seed crystal layer is irradiated with a laser to form a peeling layer. process,
(4) a composite substrate separate from the starting composite substrate, comprising a polycrystalline ceramic core, a first adhesive layer bonded to the entire polycrystalline ceramic core, and a conductive layer bonded to the back surface of the first adhesive layer; , a second adhesive layer bonded to the back surface of the conductive layer, and a barrier bonded to the front and side surfaces of the first adhesive layer, the side surfaces of the conductive layer, and the side and back surface of the second adhesive layer. preparing a composite substrate in which a plurality of layers including a layer are laminated, and laminating a planarization layer only on the surface of the composite substrate;
(5) bonding the planarizing layer laminated on the composite substrate prepared in step (4) and the group III nitride semiconductor seed crystal layer of the group III nitride semiconductor substrate for bonding to form a bonding substrate; the step of obtaining
(6) separating the silicon single crystal substrate or the silicon single crystal thin film of the group III nitride semiconductor substrate for bonding by the peeling layer, and peeling a part of the growth substrate from the bonding substrate;
(7) polishing the peeled surface to remove a portion of the silicon single crystal substrate or the silicon single crystal thin film remaining on the bonding substrate; (8) a group III nitride semiconductor layer containing GaN on the group III nitride semiconductor seed crystal layer of the support substrate; is epitaxially grown to manufacture a nitride semiconductor substrate.

Hereinafter, the present invention will be described in detail with reference to the drawings, but the present invention is not limited thereto.

[Nitride semiconductor substrate]
FIG. 1 shows a schematic cross-sectional view of an example of the nitride semiconductor substrate of the present invention.

A nitride semiconductor substrate 100 shown in FIG. 1 includes a support substrate 10 and a Group III nitride semiconductor layer 20 formed on the support substrate 10 .

Support substrate 10 includes composite substrate 6 and group III nitride semiconductor seed crystal layer 8 bonded onto composite substrate 6 via planarization film 7 .

The composite substrate 6 includes a polycrystalline ceramic core 1, a first adhesive layer 2 bonded to the entire polycrystalline ceramic core 1, a second adhesive layer 4 laminated to the entire first adhesive layer 2, and a second A plurality of layers are laminated including a barrier layer 5 bonded over two adhesive layers 4 . In the example shown in FIG. 1, the composite substrate 6 includes, as an arbitrary layer, a conductive layer 3 laminated over the entire first adhesive layer 2 between the first adhesive layer 2 and the second adhesive layer 4. further has

In the example shown in FIG. 1 , a Group III nitride semiconductor seed crystal layer 8 is bonded to only one side of the composite substrate 6 with a planarization layer 7 interposed therebetween.

Group III nitride semiconductor seed crystal layer 8 contains at least GaN. In addition, the crystallinity of the (0002) growth plane of GaN of the group III nitride semiconductor seed crystal layer 8 is 550 arcsec or less in XRD (X-ray Diffraction) half width.

A group III nitride semiconductor layer 20 is formed on such a group III nitride semiconductor seed crystal layer 8 . Group III nitride semiconductor layer 20 contains GaN.

In the nitride semiconductor substrate 100 of the present invention, the group III nitride semiconductor layer 20 is a group III nitride semiconductor seed crystal layer 8 in which the crystallinity of the (0002) growth surface of GaN of the seed crystal is 550 arcsec or less in XRD half width. Due to the epitaxial formation above, the dislocation density is extremely low and good crystallinity can be exhibited. As a result, the nitride semiconductor substrate 100 of the present invention can improve device characteristics.

In addition, the nitride semiconductor substrate 100 of the present invention includes the support substrate 10 including the composite substrate 6 in which a plurality of layers are laminated as described above, so that during the epitaxial growth of the group III nitride semiconductor layer 8 due to the difference in thermal expansion coefficient warpage can be reduced, a thick group III nitride semiconductor layer 20 can be obtained without cracks. Therefore, the group III nitride semiconductor layer 20 can be finally separated from the support substrate 10 and used as a free-standing substrate.

The nitride semiconductor substrate 100 shown in FIG. 1 will be described in more detail below.

The polycrystalline ceramic core 1 may contain, for example, aluminum nitride. If the polycrystalline ceramic core 1 contains aluminum nitride, the difference in thermal expansion coefficient can be made extremely small.

Such a polycrystalline ceramic core 1 can be sintered at a high temperature of eg 1800° C. with a sintering aid and have a thickness of about 600-1150 μm. Basically, it is often formed with a thickness of the SEMI (Semiconductor Equipment and Materials International) standard for a silicon substrate.

The first adhesion layer 2 and the second adhesion layer 4 can be layers comprising, for example, a tetraethylorthosilicate (TEOS) layer or a silicon oxide ( _SiO2 ) layer, or both. The first adhesion layer 2 and the second adhesion layer 4 are respectively deposited by an LPCVD (Low-Pressure Chemical Vapor Deposition) process, a CVD (Chemical Vapor Deposition) process, or the like. , can have a thickness of approximately 50-200 nm.

Conductive layer 3 comprises, for example, polysilicon and is deposited, for example, by an LPCVD process or the like. The conductive layer 3 is a layer for imparting conductivity, and is doped with boron (B), phosphorus (P), or the like, for example. The conductive layer 3 containing polysilicon is provided as required, and may be omitted or may be formed on only one side of the first adhesive layer 2 .

The optional conductive layer 3 preferably has a thickness between 50 nm and 500 nm. If the thickness of conductive layer 3 is within this range, nitride semiconductor substrate 100 including a portion having excellent conductivity can be obtained while suppressing the occurrence of warpage.

The barrier layer 5 contains, for example, silicon nitride, is deposited by an LPCVD process or the like, and has a thickness of about 100 nm to 1500 nm. The barrier layer 5 is a layer that blocks impurities from inside the substrate such as ceramics.

The planarization layer 7 is deposited, for example, by an LPCVD process or the like, and has a thickness of, for example, approximately 500 nm to 3000 nm. This planarization layer 7 is deposited for planarization of the upper surface. The material of the planarizing layer 7 is, for example, tetraorthosilicate, silicon oxide (SiO ₂ ), aluminum oxide (Al ₂ O ₃ ), silicon nitride (Si ₃ N ₄ ), or silicon oxynitride (Si _x O _y N _z : 0<x<1, 0<y<2, 0≦z≦0.6), and the like.

In the nitride semiconductor substrate 100 of the present invention, the crystallinity of the (0002) growth plane of the seed crystal GaN in the group III nitride semiconductor seed crystal layer 8 is 550 arcsec or less in XRD half width. It is more preferable that the crystallinity of the (0002) growth surface of GaN of the seed crystal is 300 arcsec or less in XRD half width.

Group III nitride semiconductor seed crystal layer 8 may contain, in addition to GaN, one or more of AlN and AlGaN, for example.

Also, the thickness of the group III nitride semiconductor seed crystal layer 8 is not particularly limited because it varies depending on the application, but can be, for example, 100 nm or more.

The group III nitride semiconductor layer 20 contains GaN, but may contain, for example, one or more of AlN and AlGaN in addition to GaN.

Since the GaN in the group III nitride semiconductor layer 20 is epitaxially grown on the group III nitride semiconductor seed crystal layer 8 with good crystallinity as described above, the GaN crystal of the group III nitride semiconductor seed crystal layer 8 It can exhibit good crystallinity as well as good crystallinity. Also, the group III nitride semiconductor layer 20 can have a thickness of, for example, 10 μm or more without including cracks.

Although not shown, in the nitride semiconductor substrate 100 of the present invention, the composite substrate 6 is laminated on the rear surface to which the group III nitride semiconductor seed crystal layer 8 is not bonded instead of the conductive layer 3. It may further have a back conductive layer. The backside conductive layer, like the conductive layer 3, comprises, for example, polysilicon and is deposited, for example, by an LPCVD process. Also, the back conductive layer can have a thickness of, for example, 50 nm to 500 nm.

The nitride semiconductor substrate 100 of the present invention can be manufactured, for example, by the method of manufacturing a nitride semiconductor substrate of the present invention, which will be described below with an example. However, the nitride semiconductor substrate 100 of the present invention may be manufactured by a method other than the nitride semiconductor substrate manufacturing method of the present invention.

The nitride semiconductor substrate of the present invention can also use a composite substrate 10 schematically shown in FIG. 10 or 11 as a supporting substrate.

The support substrate 10 shown in FIG. 10 includes a composite substrate 6 and at least and a group III nitride semiconductor seed crystal layer 8 containing GaN. The composite substrate 6 comprises a polycrystalline ceramic core 1 , a first adhesive layer 2 bonded to the entire polycrystalline ceramic core 1 , a barrier layer 5 bonded to the entire first adhesive layer 2 , and bonded to the rear surface of the barrier layer 5 . A composite substrate 6 having a plurality of laminated layers including a second adhesive layer 4 bonded thereto and a conductive layer 3 bonded to the back surface of the second adhesive layer 4 .

The support substrate 10 shown in FIG. 11 includes a composite substrate 6 and at least a and a group III nitride semiconductor seed crystal layer 8 containing GaN. The composite substrate 6 includes a polycrystalline ceramic core 1 , a first adhesive layer 2 bonded to the entire polycrystalline ceramic core 1 , a conductive layer 3 bonded to the back surface of the first adhesive layer 2 , and a conductive layer 3 bonded to the back surface of the conductive layer 3 . A plurality of barrier layers 5 including a bonded second adhesive layer 4 and barrier layers 5 bonded to the front and side surfaces of the first adhesive layer 2, the side surfaces of the conductive layer 3, and the side and back surfaces of the second adhesive layer 4. It is a composite substrate with laminated layers.

Each layer of composite substrate 6 shown in FIGS. 10 and 11 may be similar to those previously described.

The nitride semiconductor substrate 100 including the support substrate 10 having the structure in which the conductive layer 3 is formed only on the rear surface side as shown in FIGS. 10 and 11 has the effect described above with reference to FIG. In addition, when fabricating a high-frequency device, no leakage path is generated by the surface-side conductive layer of the supporting substrate 10, and excellent high-frequency characteristics can be obtained.

[Method for manufacturing nitride semiconductor substrate]
Hereinafter, as examples of the method for manufacturing a nitride semiconductor substrate of the present invention, first and second embodiments will be described with reference to the drawings. However, the method for manufacturing a nitride semiconductor substrate of the present invention is not limited to the examples described below.

(First embodiment)
A first embodiment of the method for manufacturing a nitride semiconductor substrate of the present invention will be described with reference to FIGS. 2 to 6. FIG.

(Step (1): Step of preparing a starting support substrate as a growth substrate)
In step (1), in order to manufacture a group III nitride semiconductor substrate for bonding, as shown in FIG. A starting support substrate 30 to which a single crystal thin film is bonded is prepared as a growth substrate. The starting support substrate 30 can also be called a support substrate for GaN.

Starting composite substrate 36 can have, for example, the configuration shown in schematic cross-section in FIG. Specifically, the starting composite substrate 36 shown in FIG. a support structure including a bonded conductive layer 33 , a second adhesive layer 34 bonded over the conductive layer 33 , and a barrier layer 35 bonded over the second adhesive layer 34 .

Each of the polycrystalline ceramic core 31, the first adhesive layer 32, the conductive layer 33, the second adhesive layer 34, and the barrier layer 35 is, for example, the nitride semiconductor substrate 100 of the present invention described with reference to FIG. can be similar to each layer of the composite substrate 6 included in . Starting composite substrate 36 can be manufactured by the method described in the description of composite substrate 6 . Note that the starting composite substrate 36 is not limited to the one shown in FIG. 3 as long as a plurality of layers are laminated. For example, the conductive layer 33 and the first adhesive layer 32 are formed as required, and do not necessarily exist, and may be formed only on one side.

In the examples shown in FIGS. 2( a ) and 3 , the planarizing film 37 is bonded to only one side of the starting composite substrate 36 . The planarizing film 37 can be, for example, the same as the planarizing film 7 described with reference to FIG. 1, but is not limited to this.

The silicon single crystal thin film 38 is combined with the planarizing film 37 and can also be called a substantial silicon layer. The silicon single crystal thin film 38 has a thickness of about 50 nm to 1000 nm, for example, and is used for epitaxial growth of the group III nitride semiconductor seed crystal layer containing GaN in step (2).

The silicon single crystal thin film 38, which is the starting seed crystal layer, is preferably a silicon single crystal thin film with a <111> axis orientation, but the resistivity and the like are not critical.

The silicon single crystal thin film 38 can be formed, for example, by bonding it to the flattening layer 37 by a bonding process, and then peeling it off leaving a required thickness by an ion irradiation method or the like.

(Step (2): Step of manufacturing a Group III nitride semiconductor substrate for bonding)
Next, as step (2), the step of manufacturing the group III nitride semiconductor substrate 200 for bonding shown in FIG. 2B is performed. In step (2), a group III nitride semiconductor seed crystal layer 8 containing at least GaN is formed on a starting support substrate 30 as a growth substrate, more specifically, on a silicon single crystal thin film 38 as a starting seed crystal layer. By epitaxially growing, a group III nitride semiconductor substrate 200 for bonding is manufactured, which includes the group III nitride semiconductor seed crystal layer 8 in which the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width.

This step (2) can be performed, for example, in a MOCVD (Metal Organic Chemical Vapor Deposition) reactor.

In this step (2), a Group III nitride semiconductor seed crystal layer (epitaxial layer) 8 such as AlN, AlGaN and GaN is epitaxially grown on the silicon single crystal thin film 38 of the starting support substrate 30 . The structure of the group III nitride semiconductor seed crystal layer 8 is not limited to this, and there are cases in which AlGaN is not formed, and AlN is formed after AlGaN is formed. In some cases, multiple layers of AlGaN with different Al compositions are deposited. On the other hand, in step (2), GaN is always grown. The film thickness is not particularly limited because it is changed depending on the application.

During epitaxial growth, for example, trimethylaluminum (TMAl) is used as an Al source, trimethylgallium (TMGa) as a Ga source, and NH ₃ as an N source. Also, the carrier gas can be, for example, N ₂ and/or H ₂ , and the process temperature can be about 900-1200°C.

In step (2), the conditions are controlled to epitaxially grow the group III nitride semiconductor seed crystal layer 8 on the silicon single crystal thin film 38 having the <111> axial orientation, for example, to form a crystal of the (0002) growth plane of GaN. Group III nitride semiconductor substrate 200 for bonding, which includes group III nitride semiconductor seed crystal layer 8 having an XRD half width of 550 arcsec or less, can be manufactured.

(Step (3): Step of forming a peeling layer on the silicon single crystal thin film by laser irradiation)
Next, in the vicinity of the interface between the silicon single crystal thin film 38 of the group III nitride semiconductor substrate 200 for bonding manufactured in step (2) and the group III nitride semiconductor seed crystal layer 8, as shown in FIG. 2(c), Laser irradiation is performed to form a release layer 38a shown in FIG. 4(d).

The wavelength of the laser at this time is preferably longer than the wavelength of light equal to the bandgap energy of GaN and shorter than the wavelength of light equal to the bandgap energy of silicon single crystal. Specifically, it is preferably about 360 nm or more and 1100 nm or less. By doing so, the separation layer 38a can be formed targeting the silicon single crystal thin film 38, so that damage to the group III nitride semiconductor seed crystal layer 8 containing GaN can be suppressed. The power of the laser is not particularly limited as long as the release layer 38a can be formed, but about 5 W to 20 W is suitable. The pitch of laser irradiation is preferably about 30 μm or less. By setting the irradiation pitch to 30 μm or less, it is possible to form the peeling layer 38a that can be sufficiently peeled off in step (6) described below.

By using a method of forming a delamination layer (damage layer) 38a by laser irradiation and detaching, the difference in ease of laser focusing between the group III nitride semiconductor seed crystal layer 8 containing GaN and the silicon single crystal is utilized. The separation layer 38a can be formed in the silicon single crystal thin film 38 by a laser beam transmitted through the group III nitride semiconductor seed crystal layer 8 containing GaN, so that damage to the group III nitride semiconductor seed crystal layer 8 containing GaN is suppressed. can. In addition, since the laser can be focused to a deep position from the surface, even when the group III nitride semiconductor seed crystal layer 8 containing GaN is formed as a film with a thickness of several μm, the group III nitride semiconductor seed crystal of the silicon single crystal thin film 38 can be used. A release layer 38 a may be formed near the interface with layer 8 .

On the other hand, in the delamination method using ion irradiation such as the Smart Cut method (registered trademark), the penetration depth is greatly limited, and if the group III nitride semiconductor seed crystal layer is formed with a thickness of several μm or more, the ions cannot penetrate and the delamination is prevented. is often not possible. Also, the ion irradiation damages the crystal.

(Step (4): Step of preparing a composite substrate different from the starting composite substrate and laminating a planarizing layer on the composite substrate)
Next, a composite substrate 6 shown in the lower part of FIG. 4(e) is prepared. This composite substrate 6 is a supporting base substrate different from the starting composite substrate 36 prepared in step (1).

The composite substrate 6 prepared in this step (4) is the same as the composite substrate included in the nitride semiconductor substrate of the present invention. That is, the composite substrate 6 includes the polycrystalline ceramic core 1, the first adhesive layer 2 bonded to the entire polycrystalline ceramic core 1, and the first adhesive layer 2 laminated to the entirety, like the composite substrate 6 shown in FIG. A composite substrate 6 having a plurality of laminated layers including a second adhesive layer 4 bonded and a barrier layer 5 bonded over the second adhesive layer 4 .

Next, a planarization layer 7 is laminated on the prepared composite substrate 6 .

For the manufacturing method of the composite substrate 6 and the planarizing layer 7, refer to the description of the nitride semiconductor of the present invention.

(Step (5): Step of bonding the planarizing layer and the group III nitride semiconductor seed crystal layer to obtain a bonded substrate)
Next, as shown in FIG. 4( e ), the planarizing layer 7 laminated on the composite substrate 6 prepared in step (4) and the group III nitride semiconductor substrate 200 for bonding (a release layer on the silicon single crystal thin film 38 38a) are bonded together with the group III nitride semiconductor seed crystal layer 8 to obtain the bonded substrate 300 shown in FIG. 5(f).

(Step (6): Step of peeling a part of the growth substrate (starting support substrate) from the bonding substrate)
Next, in the bonding substrate 300 produced in the step (5), the silicon single crystal thin film 38 of the group III nitride semiconductor substrate 200 for bonding is formed as shown in FIG. A portion of the starting support substrate 30 as a growth substrate is separated from the bonded substrate 300 by dividing into a portion 38b and another portion 38c.

The peeling method is not particularly limited, but for example, the front and back surfaces of the bonding substrate 300 shown in FIG. It is possible to divide the silicon single crystal thin film 38 by the separation layer 38a and separate it.

(Step (7): Step of removing a portion of the silicon single crystal thin film remaining on the bonding substrate to obtain a supporting substrate)
Next, a part 38c of the silicon single crystal thin film is removed by polishing the separated surface of the portion 38c remaining on the bonding substrate 300 of the silicon single crystal thin film shown in FIG. 6(h). In this way, as shown in FIG. 6(i), the composite substrate 6 and the group III nitride semiconductor seed crystal as the group III nitride semiconductor seed crystal layer bonded onto the composite substrate 6 via the planarization layer 7 A support substrate 10 comprising a layer 8 is obtained. As shown in FIG. 6(i), the surface layer of the support substrate 10 is a group III nitride semiconductor seed crystal layer 8 containing GaN.

Through these steps, a support substrate 10 (for GaN) containing, as a surface layer, a nitride semiconductor seed crystal layer 8 containing GaN and having a (0002) growth surface crystallinity of 550 arcsec or less in XRD half-value width support substrate) can be fabricated.

(Step (8): Step of epitaxially growing a group III nitride semiconductor layer containing GaN on the group III nitride semiconductor seed crystal layer of the support substrate to manufacture a nitride semiconductor substrate)
Next, as shown in FIG. 6( j ), a group III nitride semiconductor layer 20 containing GaN is epitaxially grown on the group III nitride semiconductor seed crystal layer 8 of the support substrate 10 . The conditions for epitaxial film formation can be the same as in step (2).

Through the steps (1) to (8) described above, the nitride semiconductor substrate 100 shown in FIG. 6(j) can be manufactured.

(Second embodiment)
Next, a second embodiment of the method for manufacturing a nitride semiconductor substrate of the present invention will be described with reference to FIGS. 7 to 9. FIG.

The second embodiment is significantly different from the first embodiment in that instead of the starting support substrate 30, a silicon single crystal substrate 40 shown in FIG. 7(a) is used as the growth substrate. Differences from the first embodiment will be mainly described below.

In step (1), as described above, the silicon single crystal substrate 40 shown in FIG. 7A is prepared as a growth substrate.

The silicon single crystal substrate 40 is preferably a silicon single crystal substrate having a <111> axis orientation, but the resistivity and the like are not particularly limited.

In the step (2), a Group III nitride semiconductor seed crystal layer 8 containing at least GaN is epitaxially grown on a silicon single crystal substrate 40 as a growth substrate in the same manner as in the first embodiment, thereby forming the structure shown in FIG. A group III nitride semiconductor substrate 200 for bonding including the group III nitride semiconductor seed crystal layer 8 in which the (0002) growth plane of GaN has a crystallinity of 550 arcsec or less in XRD half-value width is manufactured as shown in b).

In step (3), a laser is irradiated to the vicinity of the interface between the silicon single crystal substrate 40, which is the growth substrate, and the group III nitride semiconductor seed crystal layer 8 as shown in FIG. 7C to form a peeling layer. . The release layer can be formed in the same manner as in the first embodiment.

Step (4) is the same as in the first embodiment.

In step (5), planarizing layer 7 laminated on composite substrate 6 prepared in step (4) and group III nitride semiconductor substrate 200 for bonding (separation layer 40a is formed on silicon single crystal substrate 40). is bonded with the group III nitride semiconductor seed crystal layer 8 to obtain a bonded substrate 300 shown in FIG. 8(d).

In step (6), in the bonding substrate 300 produced in step (5), the silicon single crystal substrate 40 of the group III nitride semiconductor substrate 200 for bonding is separated from the silicon single crystal substrate 40 of the bonding group III nitride semiconductor substrate 200 with the peeling layer 40a shown in FIG. As shown in FIG. 2, the silicon single crystal substrate 40b, which is the growth substrate, is separated from the bonding substrate 300 by dividing it into a portion 40b and another portion 40c. Peeling can be performed in the same manner as in the first embodiment.

In step (7), a portion 40c of the silicon single crystal thin film is removed by polishing the peeled surface of the portion 40c remaining on the bonded substrate 300 of the silicon single crystal substrate shown in FIG. 9(f). In this way, as shown in FIG. 9G, the composite substrate 6 and the group III nitride semiconductor seed crystal as the group III nitride semiconductor seed crystal layer bonded onto the composite substrate 6 via the planarization layer 7 A support substrate 10 comprising a layer 8 is obtained. As shown in FIG. 9G, the surface layer of the support substrate 10 is a group III nitride semiconductor seed crystal layer 8 containing GaN.

Step (8) is the same as in the first embodiment.

Through the steps (1) to (8) described above, the nitride semiconductor substrate 100 shown in FIG. 9(h) can be manufactured.

In the method for manufacturing a nitride semiconductor substrate of the present invention, which has been described above with an example, the lattice constant difference between the group III nitride semiconductor layer (for example, a GaN epitaxial layer) 20 containing GaN and the support substrate 10 is made extremely small. Therefore, the group III nitride semiconductor layer 20 containing GaN with few dislocations and good crystallinity can be formed. Further, by repeating this, the group III nitride semiconductor layer 20 with fewer dislocations can be formed.

In addition, since the group III nitride semiconductor layer 20 formed by this method has few dislocations, it can be laminated thickly. Since the support substrate 10 including the composite substrate 6 in which a plurality of layers are laminated is used as the support substrate, warping during the growth of the group III nitride semiconductor layer 20 due to the difference in thermal expansion coefficient can be reduced, and cracks can be prevented. Group III nitride semiconductor layer 20 having a large thickness can be formed without inclusion. Therefore, the group III nitride semiconductor layer 20 can be finally separated from the support substrate 10 and used as a free-standing substrate.

On the other hand, conventionally, even if a group III nitride semiconductor seed crystal containing GaN is formed on a composite substrate in which a plurality of layers are laminated, the lattice constant cannot be made appropriate, and the (0002) growth plane of GaN cannot be obtained. It was not possible to form a group III nitride semiconductor seed crystal layer having crystallinity of 550 arcsec or less in XRD half-value width.

Further, in the first embodiment, since the starting support substrate 30 is separated from the bonding substrate 300 by dividing the silicon single crystal thin film 38 as shown in FIG. The substrate obtained by bonding the silicon single crystal again to the substrate can be used again as the starting support substrate, and the merit of cost reduction can be obtained. If necessary, a portion 38b of the silicon single crystal thin film 8 remaining on the surface layer may be removed, and after forming a film of SiO ₂ , the silicon single crystal may be attached. If the background is removed, the substrate cannot be reused.

As the composite substrate 6 prepared in step (4), the composite substrate 6 shown in FIG. 10 or 11 is prepared instead of the composite substrate 6 shown in FIG. The flattening layer 7 may be laminated only on the side surface).

In the nitride semiconductor substrate manufacturing method of this modified example, it is possible to manufacture a nitride semiconductor substrate excellent in high-frequency characteristics without causing a leakage path due to the surface-side conductive layer of the supporting substrate.

3 is used as the starting composite substrate 36, the structure of the starting composite substrate is not limited to that shown in FIG. It may have the same structure as the composite substrate 6 described above.

EXAMPLES The present invention will be specifically described below using Examples and Comparative Examples, but the present invention is not limited to these.

(Example 1)
In Example 1, a nitride semiconductor substrate was manufactured according to the manufacturing flow of the first embodiment shown in FIGS. 2 and 4 to 6. FIG.

(Step (1))
First, the starting support substrate (support substrate for GaN) 30 described above with reference to FIGS. 2A and 3 was produced as a growth substrate.

In step (1), a silicon single crystal thin film 38 is formed by bonding a silicon single crystal having an axial orientation of <111> to the flattening layer 37 and then peeling it off by ion irradiation leaving a thickness.

(Step (2))
This starting support substrate 30 was placed in an MOCVD reactor, and a Group III nitride semiconductor seed crystal layer containing AlN, AlGaN and GaN was epitaxially grown on the starting support substrate 30 . A starting support substrate 30 was placed in a wafer pocket called a satellite. During epitaxial growth, TMAl was used as an Al source, TMGa was used as a Ga source, and _NH3 was used as an N source.

Both _N2 and _H2 were used as the carrier gas. The process temperature was 1200°C.

In step (2), a supporting substrate for GaN was placed on the satellite, and when epitaxial growth was performed, AlN and AlGaN were deposited in order from the substrate side toward the growth direction as epitaxial layers, and then GaN was epitaxially grown. .

As a result, as shown in FIG. 2B, a group III nitride semiconductor seed crystal layer (epitaxial layer) 8 is formed on the silicon single crystal thin film 38 of the starting support substrate 30, and a group III nitride for bonding is formed. A semiconductor substrate (supporting substrate for GaN on GaN) 200 was produced. The total film thickness of the group III nitride semiconductor seed crystal layer (epitaxial layer) 8 was set to 1 μm.

(Step (3))
Next, as shown in FIG. 2C, the group III nitride semiconductor seed crystal layer (epitaxial layer) 8 of the silicon single crystal thin film 38 of the group III nitride semiconductor substrate 200 for bonding produced in step (2) and The vicinity of the interface of was irradiated with a laser.

At this time, the laser wavelength was 1064 nm, and the irradiation pitch was 5 μm. Moreover, the power of the laser was set to 12W. Through this step (3), the release layer 38a shown in FIG. 4D was formed.

(Step (4))
Separately from the starting composite substrate 36 prepared in the step (1), a composite substrate 6 as a supporting base substrate shown in the lower part of FIG. 4(e) was prepared. Moreover, a planarization layer 7 was laminated on the composite substrate 6 . The composite substrate 6 and the flattening layer 7 were produced by a method in which the step (1) of producing the starting support substrate 30 did not include the step of bonding the silicon single crystal thin film 38 of the surface layer.

(Step (5))
Next, as shown in FIG. 4(e), the group III nitride semiconductor substrate 200 for bonding produced in steps (1) to (3) is attached to the planarizing layer 7 formed on the composite substrate 6. , a bonded substrate 300 shown in FIG. 5( f ) was obtained. The bonding process was performed at room temperature.

(Step (6))
In the bonding substrate 300 produced in the step (5), the silicon single crystal thin film 38 of the group III nitride semiconductor substrate 200 for bonding is partially 38b as shown in FIG. and another portion 38c, and a portion of the starting support substrate 30, which is a growth substrate, was peeled off from the bonded substrate 300. As shown in FIG. Here, the top and bottom of the bonding substrate 300 were fixed to a jig, and an external force was applied in the opposite direction, thereby dividing the silicon single crystal thin film 38 at the separation layer.

(Step (7))
After the separation in step (6), a portion 38c of the silicon single crystal thin film remaining on the surface layer of the bonding substrate 300 shown in FIG. 6(h) was polished. By polishing about 100 nm, the silicon single crystal thin film was completely removed. As a result, support substrate 10 including composite substrate 6 and group III nitride semiconductor seed crystal layer 8 bonded to composite substrate 6 via planarization layer 7 was obtained as shown in FIG. 6(i).

The crystallinity of the (0002) growth plane of GaN of the group III nitride semiconductor seed crystal layer 8 on the surface of the support substrate 10 was 540 arcsec in XRD half-value width.

(Step (8))
As shown in FIG. 6(j), a GaN layer was epitaxially grown as a group III nitride semiconductor layer 20 on the support substrate 10 fabricated up to step (7). The epitaxial growth conditions at this time were the same as in step (2) except for the film thickness. The thickness of the GaN layer 20 was set to 5 μm together with the GaN layer already present in the group III nitride semiconductor seed crystal layer 8 . Thus, the nitride semiconductor substrate 100 of Example 1 shown in FIG. 6(j) was manufactured.

After that, when the crystallinity of GaN contained in the GaN layer 20 was measured, the crystallinity of the (0002) growth plane of GaN was 250 arcsec in XRD half-value width.

Also, the GaN layer 20 contained no cracks.

(Example 2)
In Example 2, a nitride semiconductor substrate was manufactured according to the manufacturing flow of the second embodiment shown in FIGS.

(Step (1))
First, a silicon single crystal substrate 40 shown in FIG. 7A was prepared as a growth substrate. The silicon single crystal substrate 40 has an axial orientation of <111>.

(Step (2))
This silicon single crystal substrate 40 was placed in an MOCVD reactor, and a Group III nitride semiconductor seed crystal layer containing AlN, AlGaN and GaN was epitaxially grown on the silicon single crystal substrate 40 . A silicon single crystal substrate 40 was placed in a wafer pocket called a satellite. During epitaxial growth, TMAl was used as an Al source, TMGa was used as a Ga source, and _NH3 was used as an N source.

Both _N2 and _H2 were used as the carrier gas. The process temperature was 1200°C.

In step (2), a supporting substrate for GaN was placed on the satellite, and when epitaxial growth was performed, AlN and AlGaN were deposited in order from the substrate side toward the growth direction as epitaxial layers, and then GaN was epitaxially grown. .

Thereby, as shown in FIG. 7B, a group III nitride semiconductor seed crystal layer (epitaxial layer) 8 is formed on the silicon single crystal substrate 40, and a group III nitride semiconductor substrate for bonding (GaN on Si substrate) 200 was produced. The total film thickness of the group III nitride semiconductor seed crystal layer (epitaxial layer) 8 was set to 1 μm.

(Step (3))
Next, as shown in FIG. 7C, near the interface between the group III nitride semiconductor seed crystal layer 8 and the silicon single crystal substrate 40 of the group III nitride semiconductor substrate 200 for bonding produced in step (2), , was irradiated with a laser.

At this time, the laser wavelength was 1064 nm, and the irradiation pitch was 5 μm. Moreover, the power of the laser was set to 12W. Through this step (3), a separation layer was formed on the silicon single crystal substrate 40 .

(Step (4))
A composite substrate 6 and a planarizing layer 7 were produced in the same manner as in step (4) of Example 1.

(Step (5))
Next, the bonding group III nitride semiconductor substrate 200 produced in steps (1) to (3) is attached to the planarization layer 7 formed on the composite substrate 6 produced in step (4), and the substrate shown in FIG. A bonded substrate 300 shown in (d) was obtained. The bonding process was performed at room temperature.

Subsequent steps (6) to (8) were the same as in Example 1.

The crystallinity of the (0002) growth plane of GaN in the group III nitride semiconductor seed crystal layer 8 on the surface of the support substrate 10 obtained in step (7) was 540 arcsec in XRD half-value width.

Further, when the crystallinity of GaN in the GaN layer 20, which is the surface layer of the nitride semiconductor substrate 100 shown in FIG. was 450 arcsec in XRD half-width.

Also, the GaN layer 20 contained no cracks.

(Comparative example)
In a comparative example, a GaN layer having a total thickness of 5 μm was formed in step (2) of Example 1 to prepare a GaN-on-GaN supporting substrate. This supporting substrate was used as a nitride semiconductor substrate of a comparative example.

When the crystallinity of GaN in the surface layer of the nitride semiconductor substrate of the comparative example was measured, the crystallinity of the (0002) growth plane of GaN was 600 arcsec in XRD half width.

As is clear from the above results, the Group III nitride semiconductor layer 20, which is the surface layer of the nitride semiconductor substrate 100 of Examples 1 and 2 of the present invention, suppresses the occurrence of dislocations, and the (0002) growth plane of GaN. was 550 arcsec or less in XRD half-value width, which was superior to the crystallinity of GaN in the surface layer of the nitride semiconductor substrate of the comparative example.

Moreover, no warpage was observed in the group III nitride semiconductor layer 20, which is the surface layer of the nitride semiconductor substrates 100 of Examples 1 and 2. FIG.

In addition, this invention is not limited to the said embodiment. The above-described embodiment is an example, and any device having substantially the same configuration as the technical idea described in the claims of the present invention and exhibiting the same effect is the present invention. included in the technical scope of

DESCRIPTION OF SYMBOLS 1, 31... Polycrystalline ceramic core 2, 32... First adhesive layer 3, 33... Conductive layer 4, 34... Second adhesive layer 5, 35... Barrier layer 6... Composite substrate 7... Planarization layer 8 Group III nitride semiconductor seed crystal layer 10 Support substrate 20 Group III nitride semiconductor layer (GaN layer) 30 Starting support substrate (growth substrate) 36 Starting composite substrate 37 Starting planarization layer 38 Starting seed crystal layer (silicon single crystal thin film) 38a, 40a Separation layer 38b, 38c Part of starting seed crystal layer 40 Silicon single crystal substrate 40b, 40c Silicon Part of the single crystal substrate, 100... Nitride semiconductor substrate, 200... Group III nitride semiconductor substrate for bonding, 300... Bonding substrate.

Claims (17)

A nitride semiconductor substrate having a group III nitride semiconductor layer containing GaN formed on a support substrate,
The support substrate is
a polycrystalline ceramic core, a first adhesive layer bonded over the polycrystalline ceramic core, a second adhesive layer laminated over the first adhesive layer, and bonded over the second adhesive layer a composite substrate in which a plurality of layers including a barrier layer are laminated;
a Group III nitride semiconductor seed crystal layer containing at least GaN, which is bonded onto the composite substrate via a planarization layer;
The group III nitride semiconductor layer is formed on the group III nitride semiconductor seed crystal layer, and the crystallinity of the (0002) growth plane of GaN of the group III nitride semiconductor seed crystal layer is the XRD half width 550 arcsec or less at a nitride semiconductor substrate. A nitride semiconductor substrate having a group III nitride semiconductor layer containing GaN formed on a support substrate,
The support substrate is
a polycrystalline ceramic core, a first adhesive layer bonded over the polycrystalline ceramic core, a barrier layer bonded over the first adhesive layer, a second adhesive layer bonded to the back surface of the barrier layer; and a composite substrate laminated with a plurality of layers including a conductive layer bonded to the back surface of the second adhesive layer;
a Group III nitride semiconductor seed crystal layer comprising at least GaN, bonded onto the composite substrate via a planarization layer bonded only to the surface of the composite substrate;
The group III nitride semiconductor layer is formed on the group III nitride semiconductor seed crystal layer, and the crystallinity of the (0002) growth plane of GaN of the group III nitride semiconductor seed crystal layer is the XRD half width 550 arcsec or less at a nitride semiconductor substrate. A nitride semiconductor substrate having a group III nitride semiconductor layer containing GaN formed on a support substrate,
The support substrate is
A polycrystalline ceramic core, a first adhesive layer bonded over the polycrystalline ceramic core, a conductive layer bonded to the back surface of the first adhesive layer, and a second adhesive layer bonded to the back surface of the conductive layer. and a barrier layer bonded to the front and side surfaces of the first adhesive layer, the side surfaces of the conductive layer, and the side and back surfaces of the second adhesive layer;
a Group III nitride semiconductor seed crystal layer comprising at least GaN, bonded onto the composite substrate via a planarization layer bonded only to the surface of the composite substrate;
The group III nitride semiconductor layer is formed on the group III nitride semiconductor seed crystal layer, and the crystallinity of the (0002) growth plane of GaN of the group III nitride semiconductor seed crystal layer is the XRD half width 550 arcsec or less at a nitride semiconductor substrate. 4. The nitride semiconductor substrate according to any one of claims 1 to 3, wherein the group III nitride semiconductor layer contains GaN and at least one of AlN and AlGaN. 5. The nitride semiconductor substrate according to claim 1, wherein said polycrystalline ceramic core contains aluminum nitride. 6. Any one of claims 1 to 5, wherein each of said first adhesion layer and said second adhesion layer comprises tetraethylorthosilicate and/or silicon oxide, and said barrier layer comprises silicon nitride. The nitride semiconductor substrate according to item 1. From claim 1, wherein each of the first adhesion layer and the second adhesion layer has a thickness of 50-200 nm, and the barrier layer has a thickness of 100 nm-1500 nm. 7. The nitride semiconductor substrate according to any one of 6. The planarization layer contains at least one selected from the group consisting of tetraethylorthosilicate, silicon oxide, aluminum oxide, silicon nitride, and silicon oxynitride, and has a thickness of 500 nm to 3000 nm. The nitride semiconductor substrate according to any one of claims 1 to 7, wherein 9. The nitride semiconductor substrate according to claim 1, wherein said group III nitride semiconductor seed crystal layer has a thickness of 100 nm or more. The composite substrate further has a conductive layer laminated on the whole or one side of the first adhesive layer between the first adhesive layer and the second adhesive layer. The nitride semiconductor substrate according to claim 1. 11. The nitride semiconductor substrate according to claim 10, wherein said conductive layer has a thickness of 50 nm to 500 nm. 12. The composite substrate according to any one of claims 1, 10 and 11, further comprising a back conductive layer laminated on the back surface to which the group III nitride semiconductor seed crystal layer is not bonded. The nitride semiconductor substrate according to item 1. A method for manufacturing a nitride semiconductor substrate, comprising epitaxially growing a group III nitride semiconductor layer on a group III nitride semiconductor seed crystal layer containing at least GaN,
(1) In order to manufacture a group III nitride semiconductor substrate for bonding, a silicon single crystal thin film is formed as a starting seed crystal layer on a silicon single crystal substrate or a starting composite substrate having a plurality of layers laminated via a starting planarization layer. providing a starting support substrate to which is bonded as a growth substrate;
(2) The group III nitride semiconductor seed crystal layer containing at least GaN is epitaxially grown on the growth substrate so that the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. manufacturing a group III nitride semiconductor substrate for bonding comprising a semiconductor seed crystal layer;
(3) The vicinity of the interface of the group III nitride semiconductor substrate for bonding between the silicon single crystal substrate or the silicon single crystal thin film and the group III nitride semiconductor seed crystal layer is irradiated with a laser to form a peeling layer. process,
(4) As a composite substrate different from the starting composite substrate, a polycrystalline ceramic core, a first adhesive layer bonded to the entire polycrystalline ceramic core, and a second adhesive layer laminated to the entire first adhesive layer. providing a composite substrate laminated with a plurality of layers including an adhesive layer and a barrier layer bonded over the second adhesive layer, and laminating a planarization layer on the composite substrate;
(5) bonding the planarizing layer laminated on the composite substrate prepared in step (4) and the group III nitride semiconductor seed crystal layer of the group III nitride semiconductor substrate for bonding to form a bonding substrate; the step of obtaining
(6) separating the silicon single crystal substrate or the silicon single crystal thin film of the group III nitride semiconductor substrate for bonding by the peeling layer, and peeling a part of the growth substrate from the bonding substrate;
(7) polishing the peeled surface to remove a portion of the silicon single crystal substrate or the silicon single crystal thin film remaining on the bonding substrate; (8) a group III nitride semiconductor layer containing GaN on the group III nitride semiconductor seed crystal layer of the support substrate; is epitaxially grown to manufacture a nitride semiconductor substrate. In step (4), the composite substrate further has a conductive layer laminated on the whole or one side of the first adhesive layer between the first adhesive layer and the second adhesive layer. 14. The method of manufacturing a nitride semiconductor substrate according to claim 13, further comprising preparing. A method for manufacturing a nitride semiconductor substrate, comprising epitaxially growing a group III nitride semiconductor layer on a group III nitride semiconductor seed crystal layer containing at least GaN,
(1) In order to manufacture a group III nitride semiconductor substrate for bonding, a silicon single crystal thin film is formed as a starting seed crystal layer on a silicon single crystal substrate or a starting composite substrate having a plurality of layers laminated via a starting planarization layer. providing a starting support substrate to which is bonded as a growth substrate;
(2) The group III nitride semiconductor seed crystal layer containing at least GaN is epitaxially grown on the growth substrate so that the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. manufacturing a group III nitride semiconductor substrate for bonding comprising a semiconductor seed crystal layer;
(3) The vicinity of the interface of the group III nitride semiconductor substrate for bonding between the silicon single crystal substrate or the silicon single crystal thin film and the group III nitride semiconductor seed crystal layer is irradiated with a laser to form a peeling layer. process,
(4) as a composite substrate separate from the starting composite substrate, a polycrystalline ceramic core, a first adhesion layer bonded over the polycrystalline ceramic core, a barrier layer bonded over the first adhesion layer; providing a composite substrate laminated with a plurality of layers including a second adhesive layer bonded to the back surface of the barrier layer and a conductive layer bonded to the back surface of the second adhesive layer; laminating a planarization layer only on top;
(5) bonding the planarizing layer laminated on the composite substrate prepared in step (4) and the group III nitride semiconductor seed crystal layer of the group III nitride semiconductor substrate for bonding to form a bonding substrate; the step of obtaining
(6) separating the silicon single crystal substrate or the silicon single crystal thin film of the group III nitride semiconductor substrate for bonding by the peeling layer, and peeling a part of the growth substrate from the bonding substrate;
(7) polishing the peeled surface to remove a portion of the silicon single crystal substrate or the silicon single crystal thin film remaining on the bonding substrate; (8) a group III nitride semiconductor layer containing GaN on the group III nitride semiconductor seed crystal layer of the support substrate; is epitaxially grown to manufacture a nitride semiconductor substrate. A method for manufacturing a nitride semiconductor substrate, comprising epitaxially growing a group III nitride semiconductor layer on a group III nitride semiconductor seed crystal layer containing at least GaN,
(1) In order to manufacture a group III nitride semiconductor substrate for bonding, a silicon single crystal thin film is formed as a starting seed crystal layer on a silicon single crystal substrate or a starting composite substrate having a plurality of layers laminated via a starting planarization layer. providing a starting support substrate to which is bonded as a growth substrate;
(2) The group III nitride semiconductor seed crystal layer containing at least GaN is epitaxially grown on the growth substrate so that the crystallinity of the (0002) growth plane of GaN is 550 arcsec or less in XRD half-value width. manufacturing a group III nitride semiconductor substrate for bonding comprising a semiconductor seed crystal layer;
(3) The vicinity of the interface of the group III nitride semiconductor substrate for bonding between the silicon single crystal substrate or the silicon single crystal thin film and the group III nitride semiconductor seed crystal layer is irradiated with a laser to form a peeling layer. process,
(4) a composite substrate separate from the starting composite substrate, comprising a polycrystalline ceramic core, a first adhesive layer bonded to the entire polycrystalline ceramic core, and a conductive layer bonded to the back surface of the first adhesive layer; , a second adhesive layer bonded to the back surface of the conductive layer, and a barrier bonded to the front and side surfaces of the first adhesive layer, the side surfaces of the conductive layer, and the side and back surface of the second adhesive layer. preparing a composite substrate in which a plurality of layers including a layer are laminated, and laminating a planarization layer only on the surface of the composite substrate;
(5) bonding the planarizing layer laminated on the composite substrate prepared in step (4) and the group III nitride semiconductor seed crystal layer of the group III nitride semiconductor substrate for bonding to form a bonding substrate; the step of obtaining
(6) separating the silicon single crystal substrate or the silicon single crystal thin film of the group III nitride semiconductor substrate for bonding by the peeling layer, and peeling a part of the growth substrate from the bonding substrate;
(7) polishing the peeled surface to remove a portion of the silicon single crystal substrate or the silicon single crystal thin film remaining on the bonding substrate; (8) a group III nitride semiconductor layer containing GaN on the group III nitride semiconductor seed crystal layer of the support substrate; is epitaxially grown to manufacture a nitride semiconductor substrate. 17. The method for manufacturing a nitride semiconductor substrate according to claim 13, wherein the laser used in step (3) has a wavelength of 360 nm or more and 1100 nm or less.

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