JP2023086646A - Liquid injection and extraction device - Google Patents

Abstract

To provide a liquid injection and extraction device capable of automatically inserting a rod, such as a conduit, into an opening of a container.SOLUTION: A liquid injection and extraction device 100 automatically inserts a rod 10 into a container 200 having an opening in an upper surface so as to inject liquid into the container 200 or extract liquid from the container 200. The liquid injection and extraction device 100 comprises: a measurement system 20 capable of measuring the position of the opening 210 of the container 200; a rod provision system 30 present on top of the container 200 and capable of moving the rod 10 to the position measured by the measurement system 20; and a control system 50 for controlling these operations.SELECTED DRAWING: Figure 1

Description

The present invention relates to liquid injection and extraction devices. In particular, the present invention relates to a liquid injection/extraction apparatus capable of automatically inserting rod-shaped bodies such as conduits and stirring impellers into openings of containers.

2. Description of the Related Art Devices for automatically extracting liquid from containers such as tanks and drums are used in factories and the like in various technical fields. For example, an apparatus is used that automatically extracts polishing slurry used in a semiconductor manufacturing process or the like, and chemicals such as a cleaning liquid and a plating liquid from a drum.

For example, regarding polishing slurry used in semiconductor manufacturing processes and the like, Patent Literature 1 discloses a polishing liquid supply device capable of supplying liquid.

In a device such as Patent Document 1, a drum containing a chemical solution has an opening on its upper surface, and by inserting a conduit for extracting the chemical solution into the opening, the chemical solution can be extracted from the conduit. In addition to the conduit for extracting the chemical solution, the opening may be used to insert a stirring blade or a gas pipe for pressurizing the inside.

Japanese Patent Application Laid-Open No. 2021-8003

The step of inserting rod-shaped bodies such as conduits and stirring blades into the openings on the upper surface of the container can be performed manually. However, in recent years, there are cases where a container containing a chemical solution is transported to a position where the chemical solution is extracted using an automatic guided vehicle (AGV) or the like. is desired.

In addition, not only the process of extracting the chemical solution performed in the factory where the chemical solution is used, but also the process of injecting the chemical solution performed in the factory where the chemical solution is manufactured, is preferably performed fully automatically. It is desired that the process of inserting the rod-shaped body into the opening in the upper surface be performed fully automatically.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a liquid injection and extraction apparatus capable of automatically inserting a rod-shaped body such as a conduit into an opening of a container.

In one embodiment, the liquid injection and extraction device is a liquid injection and extraction device that automatically inserts a rod-shaped body into a container having an opening on the top surface to inject liquid into or extract liquid from the container. and
a measurement system capable of measuring the position of the opening of the container;
A rod-shaped object providing system that exists in the upper part of the container and can move the rod-shaped object to the position measured by the measurement system;
and a control system for controlling these operations,
Equipped with

Devices that provide rods for insertion into liquid injection and extraction devices are located at fixed locations within the factory and cannot be moved significantly. For example, rods are conduits for injecting or extracting liquids, which are installed only at defined locations within the factory. Therefore, in order to insert the rod-shaped body into the container, it is necessary to move the container to the vicinity of the rod-shaped body providing system. Moreover, the container may contain hundreds of kilograms of liquid, and it is very difficult to move the container manually. Therefore, it is being considered to move the container using an automatic guided vehicle (AGV) or the like.

After the container is moved to the vicinity of the rod-shaped body providing system, when the step of inserting the rod-shaped body into the opening is also performed fully automatically, the opening of the container is arranged directly below the rod-shaped body, and the rod-shaped body is moved downward. need to let Here, when the diameter of the opening of the container and the diameter of the rod-shaped body are substantially the same and it is necessary to align them in units of millimeters, it is necessary to align them with very high accuracy. In particular, when the container is a drum made of resin, the molding error is large, and the position of the opening may be shifted by about 1 cm.

Therefore, in this embodiment, after measuring the position of the opening of the container using a measuring system capable of measuring the position of the opening of the container, a rod-shaped body providing system capable of moving the rod-shaped body to a position directly above the opening is combined. . Thereby, the horizontal positions of the opening and the bar can be aligned in units of millimeters.

In one embodiment, the liquid injection and extraction device further comprises a container repositioning system capable of planar and/or circumferential movement of the container.

The rod-shaped body providing system present in the upper part of the container, for example, when the container has a plurality of openings and it is necessary to insert a rod-shaped body into each opening, a plurality of rod-shaped body providing systems are required. Become. For example, if it is necessary to insert a conduit for liquid extraction in one opening and a stirrer blade in another opening, there will be at least two rod-providing systems at the top of the container. In this case, since they collide with each other, it may be possible to limit the horizontal movement distance of the rod-shaped object providing system.

In addition, even if only one rod is inserted into one opening, the horizontal movement distance of the rod-shaped body providing system may be limited due to reasons such as the lack of space in the factory. Therefore, in such a case, if the initial positions of the opening and the bar are too far apart, automatic alignment may not be possible.

Therefore, in this embodiment, by further combining a container position changing system capable of moving the container in the planar direction and/or the circumferential direction, even when the horizontal movement distance of the rod-shaped body providing system is limited, Also, by moving the opening itself of the container to the vicinity of the rod-shaped body providing system, the movement distance of the rod-shaped body providing system is minimized, and the rod-shaped body can be easily moved to the position directly above the opening. .

In one embodiment, the container repositioning system of the liquid injection and extraction device includes a turntable.

When a container is moved using an AGV or the like, the container faces in an arbitrary direction even though the container can be moved to the place where the container is placed. In contrast, this embodiment is preferable because it allows the container to be easily placed in the intended position.

In one embodiment, there are two or more openings in the container used for the liquid injection and extraction device, and the liquid injection and extraction device includes said rod providing system corresponding to each opening.

If there are two or more openings in the container and there are a plurality of rod-shaped body providing systems, they collide with each other, so that the horizontal movement distance of the rod-shaped body providing system can be limited. In contrast, in this liquid injection and extraction device, the container position changing system can move the container in the planar direction and/or the circumferential direction, so that the movement distance of the rod-shaped body providing system can be minimized. preferable.

In one embodiment, a liquid injection and extraction device metrology system includes a camera and an image processor for processing images captured by the camera.

When the measurement system is equipped with a camera and an image processing device for processing the image taken by the camera, very high-precision measurement is possible, and such a system is commercially available and easy to obtain. It is preferable because it is easy to connect the rod-shaped body providing system and the control system.

In one embodiment, the liquid injection and extraction device includes a stirring impeller in its rod.

When the rod-shaped body to be inserted into the liquid injection and extraction device is a stirring blade, it is very useful especially when extracting the dispersion liquid in the liquid extraction process.

In one embodiment, the liquid injection and extraction device comprises a tilting mechanism for tilting said impeller.

In such an embodiment, the opening is not particularly present in the central portion of the container, and when extracting the dispersion in the liquid extraction step, the stirring blade is brought close to the vicinity of the central position of the container, and the dispersion is It is very useful because it becomes possible to stir the

In one embodiment, the container used in the liquid injection and extraction apparatus can contain between 100 and 1000 liters of liquid.

In such an embodiment, it is very difficult to transport the container manually even with a trolley or the like.

In one embodiment, the liquid injected or extracted by the liquid injection and extraction device is a polishing slurry or chemical used in semiconductor manufacturing processes.

In such embodiments, a very high degree of cleanliness is required and full automation of the process is desired, so this liquid injection and extraction device is very useful.

According to the present invention, it is possible to provide a liquid injection and extraction device capable of automatically inserting a rod-shaped body such as a conduit into an opening of a container.

FIG. 1 shows a schematic diagram of one embodiment of the liquid injection and extraction apparatus of the present invention. Figure 2 shows a schematic diagram of another embodiment of the liquid injection and extraction apparatus of the present invention. FIG. 3 exemplifies the state in which the rod-shaped agitating blade is inclined in order to agitate near the central axis of the container in the liquid injection and extraction apparatus of the present invention. Figure 4 shows details of a turntable that can be used in one embodiment of the liquid injection and extraction device of the present invention. FIG. 5 is a perspective view of the container immediately after being transported to the liquid injection and extraction apparatus of the present invention. FIG. 6 is a perspective view showing the position of the opening of the container on the container placement table after the container has been transported to the liquid injection and extraction apparatus of the present invention. FIG. 7 is a side view of the position of the opening of the container on the container placement table after the container has been transported to the liquid injection and extraction apparatus of the present invention. FIG. 8 is a perspective view showing the rod-shaped body inserted into the opening of the container in the liquid injection and extraction device of the present invention. FIG. 9 is a side view showing the rod-shaped body inserted into the opening of the container in the liquid injection and extraction device of the present invention.

The present invention will be specifically described with the following embodiments as examples, but the present invention is not limited by these. If there is no particular detailed reference to each device, mechanism, means, etc. in this specification, a person skilled in the art can use well-known mechanical devices, mechanisms, means, etc. for these. Each embodiment can be combined based on ordinary knowledge by those skilled in the art, and configurations not specifically described for each embodiment have the same configuration as other embodiments or a configuration suitable for that embodiment be able to.

《Liquid injection and extraction device》
FIG. 1 shows a schematic diagram of one embodiment of the liquid injection and extraction apparatus of the present invention. Figure 2 shows a schematic diagram of another embodiment of the liquid injection and extraction apparatus of the present invention.

A liquid injection and extraction device 100 shown in FIG. 1 is a device for automatically inserting a rod-shaped body 10 into an opening provided on the top surface of a container 200 . This apparatus 100 includes a measuring system 20 capable of measuring the position of the opening of the container 200, a rod providing system 30 for the rod 10, and an optional device capable of moving the container in the planar and/or circumferential direction. A container repositioning system 40 and a control system 50 for controlling these operations are provided.

A liquid injection/extraction device 100 shown in FIG. 2 is a device for automatically inserting first and second rod-shaped bodies 11 and 12 into an opening provided on the upper surface of a container 200 . This device 100 includes a measurement system 20 capable of measuring the position of the opening of a container 200, first and second rod-shaped body providing systems 31 and 32 for first and second rod-shaped bodies 11 and 12, container , and a control system 50 for controlling these movements.

Rod 10 may not be a component of liquid injection and extraction device 100 but may be an element used by liquid injection and extraction device 100 . In the embodiment of FIG. 1, there are two rod-shaped bodies 10, at least one of which is a liquid conduit for injecting or extracting liquid, and the other is a liquid conduit, a gas conduit, a stirring blade, a thermometer, etc. sensor. For example, rod 10 may be a bundle of rods such as conduits for liquids or gases, sensors, or the like.

Also, for example, when the liquid injection and extraction device 100 is an extraction device for a processing liquid used in some manufacturing process, the rod-shaped body 10 is used as a conduit for extracting liquid for extraction of the processing liquid. It may also be a conduit for injecting liquids for reuse of later processing liquids back into the vessel 200, or a bundle thereof.

In the embodiment of FIG. 2, the first rod 11 is a liquid conduit for liquid extraction and the second rod 12 is a stirring impeller. In this case, the first rod-shaped body 11 includes a conduit for extracting the liquid for extracting the processing liquid, and a conduit for injecting the liquid for recycling the used processing liquid and returning it to the container 200. It may be a bundle with a conduit.

In the embodiment of FIG. 2, the first rod 11, which is the liquid conduit, is further present with a tubular pipe 13 for injecting or extracting the liquid. In addition, a stirrer 14 for stirring the stirring blades is further present on the second rod-shaped body 12 which is the stirring blade.

As shown in FIGS. 3(a) and 3(b), the second rod-shaped body 12, which is the stirring blade, has a tilting mechanism 15 for tilting the stirring blade so that the stirring blade 12 can be tilted. good too. As a result, the tip of the stirring blade 12 can be brought closer to the center of the container 200, and the liquid inside the container 200 can be efficiently mixed.

The diameter of the rod-shaped body 10 must be smaller than the diameter of the opening of the container 200, and the diameter of the second rod-shaped body 12, which is the stirring blade, must also be small. On the other hand, the larger the diameter of the stirring blade, the higher the mixing performance. Therefore, when a stirring blade is used as the rod-shaped body 10, it is preferable to use a centrifugal stirrer or the like without stirring blades. As the stirring blade, a foldable stirring blade is also useful, the blades of which can be opened by rotating and can be closed by contacting the opening when pulled out from the opening of the container 200 .

The measurement system 20 can measure the position of the opening of the container 200 that has been loaded into the liquid injection and extraction apparatus 100 . The liquid injection and extraction device 100 has the measurement system 20 measure the position of the aperture and transmit that information to the control system 50 .

In the embodiment of FIGS. 1 and 2, the measuring system 20 is located above the container 200 and the stick providing system 30 to be carried. However, the position of the opening of the container 200 is not particularly limited as long as the measurement system 20 can measure the position of the opening of the container 200 . As shown in FIGS. 1 and 2, the measurement system 20 may be mounted on the cradle 70 of the liquid injection and extraction apparatus 100, but is not limited to such embodiments, and the measurement system 20 may be located at a location separate from the liquid injection and extraction device 100 .

The measurement system 20 is not particularly limited as long as it can provide the functions described above. For example, the measurement system 20 can include a camera and an image processing device that processes images captured by the camera. Such a measurement system 20 is commercially available, and a well-known measurement system can be used. The image processing device may be shared with the control system 50 or may be an independent component.

In the measurement system 20, for example, in the image captured by the camera, the opening of the container has a black circular shape, so the image processing device can recognize the black circular shape as the opening of the container 200.

The rod-shaped body providing system 30 can receive control from the control system 50 and move the rod-shaped body 10 to the upper position of the opening of the container 200 measured by the measurement system. If there are a plurality of rod-shaped body providing systems 30 as shown in FIG. 1 or 2, each system can be independently controlled to move the rod-shaped body 10. FIG.

Particularly when there are a plurality of stick-shaped body providing systems 30, they collide with each other, so the horizontal movement distance of the stick-shaped body providing system 30 may be limited. Therefore, a liquid injection and extraction device 100 with a container repositioning system 40 that can move the position of the opening of the container 200 is highly advantageous, especially when there are multiple rod delivery systems 30 .

The rod-shaped body providing system 30 is positioned above the container 200 to be carried. As shown in FIGS. 1 and 2, the rod-shaped body delivery system 30 may be attached to the cradle 70 of the liquid injection and extraction device 100, but is not limited to such embodiments, and may be a rod-shaped body. Body delivery system 30 may be installed at a location separate from fluid injection and extraction device 100 .

The rod-shaped body providing system 30 is not particularly limited as long as it can provide the functions described above, but can be configured to be movable together with the rod-shaped body 10 by, for example, a rack-and-pinion mechanism. The rod-shaped body providing system 30 is configured to move the rod-shaped body 10 at least vertically. For example, when the container 200 used in the liquid injection and extraction apparatus 100 always has the same shape, and the opening moves to a position directly below the stick-shaped body providing system 10 simply by rotating the container 200 on the spot. In this case, the rod-shaped body providing system 30 should move the rod-shaped body 10 only in the vertical direction. However, the rod-shaped body providing system 30 may be configured to be movable in one or two horizontal directions. In this case, the liquid injection and extraction device 100 can be used for a variety of container shapes.

In the embodiment of Figure 2 there are first and second rod delivery systems 31,32 for the first and second rods 11,12. The first rod-shaped body providing system 31 can move the tube-shaped pipe 13 for the first rod-shaped body 11 which is a liquid conduit, together with the first rod-shaped body 11 . Also, the second rod-shaped body providing system 32 can move the stirrer 14 for the second rod-shaped body 12 , which is a stirring blade, together with the second rod-shaped body 12 .

The optional container position changing system 40 is controlled by the control system 50 based on the information on the position of the opening of the container 200 measured by the measurement system 20, and finely adjusts the position and/or orientation of the container 200 that has been carried in. By adjusting, the position of the opening of the container 200 on the horizontal plane and the position of the rod-shaped body 10 on the horizontal plane can be made close to each other. In the case of the semi-automatic liquid injection and extraction apparatus 100, etc., in which the container 200 is transported manually, the container position changing system 40 must be installed because the container 200 can be transported after the position of the opening of the container 200 is determined to a certain extent. isn't it.

The configuration of the container position changing system 40 is not particularly limited as long as the position and/or orientation of the container 200 can be changed. For example, the container repositioning system 40 can be a container placement platform that can place the container 200 and change its position and/or orientation from the bottom of the container 200, and can grip the container 200 to change its position and/or orientation. It may be a system that can change orientation. For example, the container repositioning system 40 may be a system that changes the orientation of the container 200 by clamping both sides of the container 200 with two belts and moving the belts in opposite directions.

Further, for example, the container position changing system 40 may be a turntable-like container placement table capable of moving the container in the circumferential direction. For example, FIG. 4 shows an example in which the container placement table 40 includes a circular plate-shaped turntable. This container placement table 40 has a side wall 41 over approximately 2/3 of its entire circumference. The side wall 41 is vertically erected on the outer periphery of the circular plate-shaped container placement table 40 , and the container 200 is transported to the container placement table 40 from the portion 42 without the side wall by an automatic guided vehicle or a cart 220 . .

A side wall 41 of the container placement table 40 is provided with a gear 43, and together with a gear (not shown) provided on a motor 44, the entire container placement table 40 can be rotated by a rack and pinion mechanism. It is The motor 44 is controlled by the control system 50 to rotate the loaded container 200 on the container placement table 40 so that the horizontal position of the opening 210 of the container 200 and the horizontal surface of the bar 10 are adjusted. can be brought closer to the position of

It is preferable that the thickness of the container placement table 40 is small. For example, the thickness of container placement platform 40 may be 10 cm or less, 5 cm or less, 3 cm or less, 2 cm or less, or 1 cm or less from the ground on which liquid injection and extraction device 100 is installed, excluding sidewalls 43 . If the thickness is small, the AGV can be used to move the container even when using a relatively heavy container. In this case, a slope may be installed to place the container on the container placement table 40 from the ground.

The control system 50 controls the measuring system 20, the rod providing system 30, and the container position changing system 40 of the liquid injection and extraction apparatus 100 to automatically insert the rod into a container having an opening on the upper surface, and the container liquid can be injected into or extracted from said container. The configuration of the control system 50 is not particularly limited as long as it can exhibit such functions.

The control system 50 may be an electronic control unit (ECU), and although not shown, is configured as a microprocessor centered on a CPU. It can have a RAM for storing data in it, an input/output port, and a communication port.

For example, information about the position of the opening 210 of the container 200 transmitted from the measurement system 20 is input to the control system 50 as a signal through an input port. Based on the signal regarding the opening position input to the control system 50, the control system 50 operates the container position changing system so that the horizontal position of the opening 210 of the container 200 and the horizontal position of the bar 10 are brought closer to each other. A signal is output to the container repositioning system 40 to operate 40 . The initial position of the rod-shaped body 10 may be always constant. In this case, the control system 50 sends a signal to the rod-shaped body providing system to return the rod-shaped body 10 to the initial position at the timing when the container 200 is newly replaced. 30. Further, when the initial position of the rod-shaped body 10 is not constant, the control system 50 adjusts the current position of the rod-shaped body 10 when bringing the horizontal position of the opening 210 of the container 200 closer to the horizontal position of the rod-shaped body 10 . After obtaining the positional information of , a signal for operating the container position changing system 40 is output to the container position changing system 40 .

The control system 50 then outputs a signal to the rod providing system 30 to move the rod 10 to a position directly above the opening 210 of the container 200, but only the container repositioning system 40 operates. However, if the rod-shaped body 10 can be positioned directly above the opening 210 of the container 200, there is no need for this. Once the rod 10 has moved to a position directly above the opening 210 of the container 200 , the control system 50 instructs the rod providing system 30 to insert the rod 10 into the opening 210 of the container 200 . to move downward.

In the liquid injection and extraction apparatus 100 , when the injection of liquid into the container 200 or the extraction of liquid from the container 200 is completed, the control system 50 instructs the rod-shaped body providing system 30 to move the rod-shaped body 10 to the opening 210 of the container 200 . A signal is output so as to move the rod-shaped body 10 right up so that it is pulled out from the housing. The end of filling or extracting liquid from container 200 can be determined by control system 50 based on container 200 weight information from weighing device 60 . The control system 50 also determines when the container 200 is placed on the liquid injection/extraction apparatus 100 and the liquid injection/extraction apparatus 100 starts operating based on the weight information of the container 200 from the weighing device 60 . can be done.

A weighing device 60 can be positioned above or below the container repositioning system 40 and can measure the weight of the container 200 .

The pedestal 70 may, for example, support the metering system 20, the rod delivery system 30, and the control system 50 of the liquid injection and extraction device 100. FIG. The gantry 70 may be a part of the equipment in the factory, or may be an independent equipment.

The container 200 is not particularly limited as long as it can be transported by an automatic guided vehicle or a trolley 220. For example, it may be a tank, a drum, or the like, and may be made of metal, resin, or the like. However, as described above, when the container 200 is made of resin, the position of the opening of the container 200 varies greatly due to molding errors. Injection and extraction device 100 is particularly useful.

Container 200 can contain, for example, 10 liters or more, 50 liters or more, 100 liters or more, or 200 liters or more of liquid, and contains 3000 liters or less, 2000 liters or less, 1000 liters or less, or 500 liters or less of liquid. be able to.

The container 200 has one or more openings 210 to which a lid may be attached. In this case, the liquid injection and extraction device 100 may have an automatic lid removal system.

The liquid contained in the container 200 may be, for example, a polishing slurry used in a semiconductor manufacturing process or the like, or a chemical such as a cleaning liquid or a plating liquid, and the liquid injection and extraction apparatus 100 is also used in such fields. be able to.

Further, the present invention relates to a method of extracting liquid from or injecting liquid into a container using the liquid injection and extraction apparatus 100 as described above. For each configuration of the method of the present invention, reference can be made to each configuration described with respect to the liquid injection and extraction device of the present invention.

This method includes: loading a container 200 having an opening 210 into the liquid injection and extraction apparatus 100; transmitting to the control system 50, operating the rod-shaped body providing system 30 by the control system 50 based on the positional information of the opening 210 and the positional information of the rod-shaped body 10 to insert the rod-shaped body 10 into the opening 210 of the container; Extracting liquid from or injecting liquid into container 200 by rod 10 .

The step of loading the container 200 into the liquid injection and extraction device 100 may be the step of loading the container 200 into the container repositioning system 40 of the liquid injection and extraction device 100 . In this case, the control system 50 controls and operates the container placement table 40 based on the position information of the opening 210 to bring the horizontal position of the container opening 210 closer to the horizontal position of the bar 10. can include

After loading the container 200 into the liquid injection and extraction apparatus 100 , the method of the present invention can further include weighing the container 200 with the weighing device 60 and transmitting the information to the control system 50. After control system 50 receives the weight information of container 200, measurements of the position of opening 210 by measurement system 20 can be made.

In the step of inserting the rod-shaped body 10 into the opening 210 of the container by operating the rod-shaped body providing system 30 with the control system 50 based on the positional information of the opening 210 and the positional information of the rod-shaped body 10, the positional information of the rod-shaped body 10 is: If the initial position of the rod-shaped body 10 is determined, that information can be used, and if the initial position is not determined, the positional information of the rod-shaped body 10 can be measured and used. Also, actuation of the rod delivery system 30 can include horizontal and vertical movement.

After the step of extracting liquid from or filling the container 200 , the method of the present invention further includes weighing the container 200 with the weighing device 60 and transmitting the information to the control system 50 . be able to. This allows control system 50 to control when to stop extracting liquid or injecting liquid.

After extracting the liquid or ceasing the injection of the liquid, the method of the present invention can further include activating the rod delivery system 30 by the control system 50 to withdraw the rod 10 from the opening 210 of the container 200. . In this case, the rod-shaped body providing system 30 can move the rod-shaped body 10 to the initial position, or move the rod-shaped body 10 to a position where the rod-shaped body 10 does not interfere with the unloading of the container.

Finally, the used containers can be transported from the liquid injection and extraction apparatus 100 , and in particular from the container repositioning system 40 , by an automated guided vehicle or truck 220 .

Figures 5-9 illustrate the steps when the liquid injection and extraction device 100 is in use.

FIG. 5 shows the condition immediately after the container 200 has been transferred to the liquid injection and extraction apparatus 100 . Here, the position of the opening 210 of the container 200 and the position of the rod-shaped body 10 on the top of the container 200 are separated.

As container 200 is transported, weighing device 60 measures the weight of container 200 and sends a signal to control system 50 . Control system 50 then activates container repositioning system 40 .

FIGS. 6 and 7 show container 200 being moved circumferentially by container repositioning system 40 actuated by control system 50 to properly position opening 210 of container 200 , i.e. opening 210 of container 200 . , and the horizontal position of the rod-shaped body 10 on the top of the container 200 are brought close to each other. Also shown here is a state in which the control system 50 further operates the rod-shaped body providing system 30 to move the rod-shaped body 10 to a position directly above the opening 210 of the container 200 .

8 and 9 show a state in which the rod-shaped body 10 is vertically moved by the rod-shaped body providing system 30 and inserted into the opening 210 of the container 200. FIG.

Reference Signs List 10, 11, 12 Rod-shaped body 13 Tubular pipe 14 Stirrer 15 Tilting mechanism 20 Measuring system 30, 31, 32 Rod-shaped body providing system 40 Container position changing system 41 Side wall 42 Part without side wall 43 Gears 44 Motors 50 Control system 60 Weighing device 70 Base 100 Liquid injection and extraction device 200 Container 210 Opening 220 Automatic guided vehicle or cart

Claims (9)

A liquid injection and extraction device for automatically inserting a rod-shaped body into a container having an opening on the upper surface to inject liquid into or extract liquid from the container,
a measurement system capable of measuring the position of the opening of the container;
A rod-shaped object providing system that exists in the upper part of the container and can move the rod-shaped object to the position measured by the measurement system;
and liquid injection and extraction devices, including control systems for controlling their operation. 2. A liquid injection and extraction device according to claim 1, further comprising a container repositioning system capable of planarly and/or circumferentially moving the container. 3. The liquid injection and extraction device of claim 2, wherein the container repositioning system includes a turntable. 4. The liquid injection and extraction device according to any one of claims 1 to 3, wherein there are two or more openings in the container, each containing the rod providing system corresponding to each opening. A liquid injection and extraction device according to any one of claims 1 to 4, wherein the measurement system comprises a camera and an image processor for processing images taken by the camera. The liquid injection and extraction device according to any one of claims 1 to 5, wherein the rod-shaped body includes a stirring blade. 7. A liquid injection and extraction device according to claim 6, comprising a tilting mechanism for tilting the stirring blades. A liquid injection and extraction device according to any one of the preceding claims, wherein the container is capable of containing between 100 and 1000 liters of liquid. 9. The liquid injection and extraction device according to claim 8, wherein the liquid is an abrasive slurry or chemical liquid used in semiconductor manufacturing processes.

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