JP2023086228A - X-ray inspection device - Google Patents

X-ray inspection device Download PDF

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JP2023086228A
JP2023086228A JP2021200598A JP2021200598A JP2023086228A JP 2023086228 A JP2023086228 A JP 2023086228A JP 2021200598 A JP2021200598 A JP 2021200598A JP 2021200598 A JP2021200598 A JP 2021200598A JP 2023086228 A JP2023086228 A JP 2023086228A
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裕宗 中村
Hiromune Nakamura
千代子 高橋
Chiyoko Takahashi
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Omron Kirin Techno System Co Ltd
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Kirin Techno System Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/10Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the material being confined in a container, e.g. in a luggage X-ray scanners
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18Investigating the presence of flaws defects or foreign matter
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21FPROTECTION AGAINST X-RADIATION, GAMMA RADIATION, CORPUSCULAR RADIATION OR PARTICLE BOMBARDMENT; TREATING RADIOACTIVELY CONTAMINATED MATERIAL; DECONTAMINATION ARRANGEMENTS THEREFOR
    • G21F3/00Shielding characterised by its physical form, e.g. granules, or shape of the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/10Different kinds of radiation or particles
    • G01N2223/101Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016X-ray
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/30Accessories, mechanical or electrical features
    • G01N2223/307Accessories, mechanical or electrical features cuvettes-sample holders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/30Accessories, mechanical or electrical features
    • G01N2223/33Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
    • G01N2223/3307Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts source and detector fixed; object moves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/639Specific applications or type of materials material in a container
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/643Specific applications or type of materials object on conveyor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/652Specific applications or type of materials impurities, foreign matter, trace amounts

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Abstract

To provide an X-ray inspection device with which it is possible to improve adaptability to high-speed conveyance and reduce the device size.SOLUTION: Provided is an X-ray detection device 1 comprising a shielded container 10 having an analyte carry-in port 15 and carry-out port 16; an X-ray source 20 for irradiating the analyte located at an inspection region A in the shielded container 10 with an X-ray and a detector 21 for detecting the X-ray having passed through the analyte; and conveyors 3, 22, 4 for conveying the analyte from the carry-in port 15 through the inspection region A to the carry-out port 16 in such a manner as to not obstruct X-ray detection by the detector 21. A shielding material 25 is provided between the detector 21 in the shielded container 10 and the carry-in port 15 and carry-out port 16 in such a way as not to protrude to the analyte conveyance range, and as to obstruct the X-ray scattering from above a detection surface 21a of the detector 21 toward the carry-in port 15 and carry-out port 16.SELECTED DRAWING: Figure 2

Description

本発明は、X線を用いて被検体を検査するX線検査装置に関する。 The present invention relates to an X-ray inspection apparatus that inspects a subject using X-rays.

容器に充填された液体中の異物の有無を検査するための手法として、X線を利用した透過検査法が従来より用いられている。この種の検査を実施する場合には、検査環境の周囲へのX線の漏洩に配慮する必要がある。そのため、X線源及びX線の検出器を遮蔽容器内に収容するのみならず、その遮蔽容器に対する被検体の搬入口及び搬出口からのX線の漏洩を防ぐ対策が講じられる。例えば、特許文献1には、X線検査室の搬入搬出用の開口部に遮蔽カーテンを配置したX線検査装置が開示されている。特許文献2には、搬入口及び搬出口に対してX線の検出器を上方にずらして配置して、搬入側の経路に上り勾配を、搬出側の経路に下り勾配をそれぞれ付与することにより、検出器上の領域から搬入口及び搬出口へとX線が向かわないように構成したX線検査装置が開示されている。特許文献3には、遮蔽容器内のX線発生部の前後にて被検体の搬送方向を90°ずつ変化させることにより、被検体の搬入口及び搬出口へとX線が向かわないように構成したX線検査装置が開示されている。 2. Description of the Related Art Conventionally, a transmission inspection method using X-rays has been used as a method for inspecting the presence or absence of foreign matter in a liquid filled in a container. When performing this type of inspection, consideration must be given to X-ray leakage to the surroundings of the inspection environment. Therefore, measures are taken not only to accommodate the X-ray source and the X-ray detector in the shielding container, but also to prevent the X-rays from leaking from the entrance and exit of the subject to the shielding container. For example, Patent Literature 1 discloses an X-ray inspection apparatus in which a shielding curtain is arranged at the loading/unloading opening of an X-ray inspection room. In Patent Document 2, an X-ray detector is shifted upward with respect to the loading port and the loading port, and an upward slope is given to the path on the loading side, and a downward slope is given to the path on the delivery side. , an x-ray inspection apparatus configured to prevent x-rays from being directed from the area above the detector to the inlet and outlet. Patent Document 3 discloses a configuration in which X-rays are not directed to the entrance and exit of the object by changing the transport direction of the object by 90° before and after the X-ray generator in the shielding container. An X-ray inspection apparatus is disclosed.

特開平11-160487号公報JP-A-11-160487 特開平9-145343号公報JP-A-9-145343 特開2000-74856号公報JP-A-2000-74856

特許文献1の検査装置のように遮蔽カーテンを利用した場合には、被検体と遮蔽カーテンとの接触により被検体、特には接地寸法に比して高さが大きい被検体が転倒するおそれがある。そのため、高速搬送への適応が課題となる。特許文献2の検査装置では遮蔽カーテンを省略可能である。しかし、遮蔽容器内の搬送経路が勾配を有するため、高さが嵩む被検体が転倒するおそれを排除できず、高速搬送時の被検体の安定性の確保に課題がある。傾斜を緩めて安定性を高めると搬送方向の機長が増加し、装置の小型化に支障が生じる。特許文献3の検査装置では遮蔽カーテンが不要であり、搬送経路に勾配を付す必要もない。しかし、搬送経路の全長が増加し、検査装置の小型化が困難となる点で同様の課題がある。 When a shielding curtain is used as in the inspection apparatus of Patent Document 1, contact between the subject and the shielding curtain may cause the subject, especially the subject whose height is large compared to the ground size, to topple over. . Therefore, adaptation to high-speed transportation becomes a problem. In the inspection device of Patent Document 2, the shielding curtain can be omitted. However, since the transport path in the shielding container has a slope, the risk of overturning of the tall object cannot be eliminated, and there is a problem in ensuring the stability of the object during high-speed transport. Increasing the stability by loosening the inclination increases the machine length in the conveying direction, which hinders the miniaturization of the apparatus. The inspection apparatus of Patent Document 3 does not require a shielding curtain, nor does it need to give a slope to the conveying path. However, there is a similar problem in that the total length of the conveying route is increased, making it difficult to reduce the size of the inspection apparatus.

そこで、本発明は、搬入口及び搬出口からのX線の漏洩を従来とは異なる手段で抑制することにより、高速搬送への適応性を高め、あるいは装置の小型化を図ることが可能なX線検査装置を提供することを目的とする。 Therefore, the present invention is capable of improving the adaptability to high-speed transportation or miniaturizing the apparatus by suppressing the leakage of X-rays from the loading port and the loading port by means different from the conventional method. An object of the present invention is to provide a line inspection device.

本発明の一態様に係るX線検査装置は、X線を用いて被検体を検査するX線検査装置であって、前記被検体の搬入口及び搬出口を有する遮蔽容器と、前記遮蔽容器内の検査領域に位置する被検体にX線を照射するX線源、及び前記被検体を透過したX線を検出する検出器と、前記検出器によるX線の検出を妨げないようにして、前記被検体を前記搬入口から前記検査領域を経て前記搬出口へと所定の搬送方向に搬送する搬送手段と、前記搬送手段による前記被検体の搬送範囲に突出しないように、かつ前記検出器の検出面上から前記搬入口及び前記搬出口に向けて散乱するX線を遮るようにして、前記遮蔽容器内の前記検出器と前記搬入口及び前記搬出口との間に設けられた遮蔽材と、を備えたものである。 An X-ray inspection apparatus according to one aspect of the present invention is an X-ray inspection apparatus for inspecting a subject using X-rays, comprising: a shielding container having an inlet and a outlet for the subject; an X-ray source for irradiating X-rays onto a subject located in an examination area of the above; a detector for detecting X-rays transmitted through the subject; a transport means for transporting the subject from the loading port to the transport outlet through the inspection area in a predetermined transport direction; a shielding material provided between the detector and the entrance and the exit in the shielding container so as to block X-rays scattered from the surface toward the entrance and the exit; is provided.

本発明の一形態に係るX線検査装置の外観構成を示す斜視図。1 is a perspective view showing an external configuration of an X-ray inspection apparatus according to one embodiment of the present invention; FIG. X線検査装置の内部の概略構成を示す図。The figure which shows the schematic structure inside an X-ray inspection apparatus. X線検査装置内の要部を拡大して示す図。The figure which expands and shows the principal part in an X-ray inspection apparatus. 図3の要部の平面図。The top view of the principal part of FIG. 遮蔽材の寸法関係を説明するための拡大図。An enlarged view for explaining the dimensional relationship of the shielding material. 遮蔽材と搬入口との関係を示す図。The figure which shows the relationship between a shielding material and a loading port. 搬入口の形状及び大きさを変更するための構成の一例を示す図。The figure which shows an example of the structure for changing the shape and size of an inlet. エリアセンサ型の検出器を用いた場合のX線の照射範囲と遮蔽材との関係の一例を示す図。FIG. 10 is a diagram showing an example of the relationship between the X-ray irradiation range and the shielding material when an area sensor type detector is used; ラインセンサ型の検出器を用いた場合のX線の照射範囲と遮蔽材との関係の一例を示す図。FIG. 4 is a diagram showing an example of the relationship between the X-ray irradiation range and the shielding material when a line sensor type detector is used; X線源及び検出器の配置を変更した例を示す図。The figure which shows the example which changed arrangement|positioning of an X-ray source and a detector.

図1は本発明の一形態に係るX線検査装置の外観を示し、図2はその内部の概略構成を示している。X線検査装置(以下、検査装置と略称する。)1は、被検体の一例としての容器2のX線透過像を撮像し、得られたX線透過像に基づいて容器2を検査する。検査は、一例として容器2に充填された液体中に異物が存在するか否かを判別することを目的とする。容器2は、X線を透過する性質を有する限りにおいて適宜の材質で構成されてよい。一例として、樹脂、ガラス等によって容器2が構成されてよい。容器2の形状や大きさも適宜でよい。例えば、接地寸法に対して全高が大きい壜形状、箱状等の適宜の形状で容器2が形成されてよい。容器2内に充填される液体は、X線の透過率に関して検出対象の異物と差がある限り適宜の液種が対象とされてよい。一例として、飲料、調味料、薬品等が容器2に充填されてよい。容器2は必ずしも液体が充填されることを要しない。X線を用いた検査が可能な限り、各種の内容物が容器2に収容されてよい。さらに、被検体は容器2に限らない。X線による検査が可能である限り、各種の物品が被検体として設定されてよい。以下では、容器2が壜形状でかつ内部に液体が充填されている場合を例に挙げて説明を続ける。 FIG. 1 shows the appearance of an X-ray inspection apparatus according to one embodiment of the present invention, and FIG. 2 shows the schematic internal configuration thereof. An X-ray inspection apparatus (hereinafter abbreviated as an inspection apparatus) 1 captures an X-ray transmission image of a container 2 as an example of a subject, and inspects the container 2 based on the obtained X-ray transmission image. The purpose of the inspection is, for example, to determine whether or not foreign substances are present in the liquid filled in the container 2 . The container 2 may be made of an appropriate material as long as it has the property of transmitting X-rays. As an example, the container 2 may be made of resin, glass, or the like. The shape and size of the container 2 may also be appropriate. For example, the container 2 may be formed in an appropriate shape such as a bottle shape, a box shape, or the like having a large total height with respect to the ground size. The liquid to be filled in the container 2 may be an appropriate type of liquid as long as the X-ray transmittance is different from that of the foreign matter to be detected. As an example, the container 2 may be filled with beverages, seasonings, chemicals, and the like. The container 2 does not necessarily have to be filled with liquid. Various contents may be accommodated in the container 2 as long as inspection using X-rays is possible. Furthermore, the subject is not limited to the container 2 . Various articles may be set as subjects as long as they can be inspected by X-rays. Below, the case where the container 2 is bottle-shaped and the inside is filled with the liquid is mentioned as an example, and description is continued.

検査装置1は、搬入コンベア3及び搬出コンベア4の間に介在するようにして設置される。搬入コンベア3は検査前の容器2を検査装置1に搬入する搬入手段として機能し、搬出コンベア4は検査後の容器2を検査装置1から搬出する搬出手段として機能する。搬入コンベア3及び搬出コンベア4のそれぞれは、搬送体の一例としてのベルト3a、4aにて容器2を底側から支持しつつベルト3a、4aを矢印Fで示す搬送方向に走行させて容器2を搬送する。容器2は、正立状態、すなわち壜底を下にしてベルト3a、4aに載せられた状態で搬送される。ただし、容器2の搬送時の形態は、必ずしも正立状態に限らない。横置きその他の適宜の形態で容器2が搬送されてよい。 The inspection device 1 is installed so as to be interposed between the carry-in conveyor 3 and the carry-out conveyor 4 . The carry-in conveyor 3 functions as a carry-in means for carrying the uninspected container 2 into the inspection apparatus 1 , and the carry-out conveyor 4 functions as a carry-out means for carrying out the inspected container 2 from the inspection apparatus 1 . Each of the carry-in conveyor 3 and the carry-out conveyor 4 supports the container 2 from the bottom side with belts 3a and 4a as an example of a conveying body, and runs the belts 3a and 4a in the conveying direction indicated by the arrow F to move the container 2. transport. The container 2 is transported in an upright state, that is, placed on the belts 3a, 4a with the bottle bottom down. However, the form of the container 2 during transportation is not necessarily limited to the upright state. The container 2 may be transported horizontally or in any other appropriate manner.

搬入コンベア3及び搬出コンベア4は、容器2を直線的な経路に沿って容器2を搬送するように構成されている。各コンベア3、4の搬送面、すなわちベルト3a、4aの上面は水平であって、検査装置1の設置面(例えば、検査場所の床面等)から搬送面までの高さは一定である。ただし、搬入コンベア3は、検査装置1に容器2を搬入できる限りにおいて、その一部に非直線の区間、あるいは傾斜を有する区間を含むように構成されてもよい。同様に、搬出コンベア4も、検査装置1から容器2を搬出できる限りにおいて、その一部に非直線の区間、あるいは傾斜を有する区間を含むように構成されてもよい。 The carry-in conveyor 3 and the carry-out conveyor 4 are configured to convey the containers 2 along a linear path. The conveying surfaces of the conveyors 3 and 4, that is, the upper surfaces of the belts 3a and 4a are horizontal, and the height from the installation surface of the inspection apparatus 1 (for example, the floor surface of the inspection place) to the conveying surface is constant. However, as long as the carrying-in conveyor 3 can carry the container 2 into the inspection device 1, it may be configured to include a non-straight section or an inclined section in part thereof. Similarly, the carry-out conveyor 4 may be configured to include a non-straight section or a sloped section as long as the container 2 can be carried out from the inspection apparatus 1 .

検査装置1は筐体10を備えている。筐体10は、X線の遮蔽効果が高い金属材料等で構成されることにより、検査装置1の外部へのX線の漏洩を抑える遮蔽容器として機能する。筐体10は、一例として、床面等の設置面上に据え付けられるベース11と、そのベース11の上方を覆うハウジング12とを備えている。ハウジング12には、容器2を検査装置1に搬入するための搬入口15、及び容器2を検査装置1から搬出するための搬出口16が設けられている。搬出口16は図2に示されており、図1では搬出口16が背後に隠れている。搬入コンベア3及び搬出コンベア4は、搬入口15及び搬出口16から筐体10の内部に幾らか入り込むように設けられている。搬入口15及び搬出口16は、容器2が通過する際の隙間をなるべく小さく制限するために、容器2の外形輪郭に倣った形状、好ましくは容器2の外形輪郭に対して相似形に形成されている。形状や大きさが異なる容器2に対応するため、搬入口15及び搬出口16の形状及び大きさは変更可能である。形状等の変更を可能とするための構成の例は後述する。 The inspection device 1 has a housing 10 . The housing 10 is made of a metal material or the like having a high X-ray shielding effect, and functions as a shielding container that suppresses leakage of X-rays to the outside of the inspection apparatus 1 . The housing 10 includes, for example, a base 11 that is installed on an installation surface such as a floor, and a housing 12 that covers the base 11 from above. The housing 12 is provided with a carry-in port 15 for carrying the container 2 into the inspection device 1 and a carry-out port 16 for carrying the container 2 out of the inspection device 1 . The outlet 16 is shown in FIG. 2, where the outlet 16 is hidden behind it in FIG. The carry-in conveyor 3 and the carry-out conveyor 4 are provided so as to somewhat enter the inside of the housing 10 from the carry-in entrance 15 and the carry-out exit 16 . The carry-in port 15 and the carry-out port 16 are formed in a shape following the outer contour of the container 2, preferably in a shape similar to the outer contour of the container 2, in order to limit the gap as small as possible when the container 2 passes through. ing. The shape and size of the carry-in port 15 and the carry-out port 16 can be changed to accommodate containers 2 having different shapes and sizes. An example of a configuration for enabling changes in shape and the like will be described later.

図3及び図4にも示したように、筐体10内において、搬入コンベア3と搬出コンベア4とは、それらの間に検査領域Aが空くように互いに離して配置されている。換言すれば、容器2を水平面内で直線的に搬送する単一のコンベアが搬入コンベア3及び搬出コンベア4に分離され、それらの間に検査領域Aが設定されている。検査領域Aの上方には、容器2に対してX線を照射するX線源20が設けられ、検査領域Aの下方には、容器2を透過したX線を検出する検出器21が設けられている。X線源20によるX線の照射方向は矢印Bで示すように鉛直下方である。図4から明らかなように、検出器21は、一例として、容器2の搬送方向、及び水平面内で搬送方向と直交する奥行き方向(図4における上下方向)のそれぞれに広がる検出面21aを有し、その検出面21a内で2次元的に検出範囲が設定されたエリアセンサ型の検出器である。検出範囲は、X線を検出する素子類が配置される範囲であり、検出面21aはX線源20に向けられる面である。エリアセンサ型の検出器に代えて、X線の検出範囲が搬送方向と直交する奥行き方向に1次元的に延ばされたラインセンサ型の検出器(一例として、後述する図9の検出器21A)が用いられてもよい。 As also shown in FIGS. 3 and 4, in the housing 10, the carry-in conveyor 3 and the carry-out conveyor 4 are arranged apart from each other so that an inspection area A is provided between them. In other words, a single conveyor that conveys containers 2 linearly in a horizontal plane is separated into an input conveyor 3 and an output conveyor 4, and an inspection area A is set between them. An X-ray source 20 for irradiating the container 2 with X-rays is provided above the inspection area A, and a detector 21 for detecting X-rays transmitted through the container 2 is provided below the inspection area A. ing. The X-ray irradiation direction from the X-ray source 20 is vertically downward as indicated by an arrow B. As shown in FIG. As is clear from FIG. 4, the detector 21 has, as an example, a detection surface 21a that extends in the conveying direction of the container 2 and in the depth direction (vertical direction in FIG. 4) perpendicular to the conveying direction in the horizontal plane. , an area sensor type detector in which a detection range is set two-dimensionally within the detection surface 21a. The detection range is a range in which elements for detecting X-rays are arranged, and the detection surface 21 a is a surface facing the X-ray source 20 . Instead of the area sensor type detector, a line sensor type detector whose X-ray detection range is one-dimensionally extended in the depth direction orthogonal to the conveying direction (for example, a detector 21A in FIG. 9 described later). ) may be used.

X線源20及び検出器21は、筐体10内を通過する容器2と干渉しないように、容器2の搬送範囲C(図3では一対の二点鎖線によりその上下端を示す。)から後退させて配置されている。一例として、X線源20は搬送範囲Cから上方に離して配置され、検出器21は搬送範囲Cから下方に離して配置されている。搬送範囲Cの下端は各コンベア3、4のベルト3a、4aの上面と同一の高さである。したがって、検出器21の検出面21aは、ベルト3a、4aの高さよりも幾らか下方に後退する。 The X-ray source 20 and the detector 21 retreat from the transport range C of the container 2 (the upper and lower ends thereof are indicated by a pair of chain double-dashed lines in FIG. 3) so as not to interfere with the container 2 passing through the housing 10. Let it be arranged. As an example, the X-ray source 20 is spaced upward from the transport range C, and the detector 21 is spaced downward from the transport range C. The lower end of the conveying range C is level with the upper surfaces of the belts 3a and 4a of the conveyors 3 and 4, respectively. Therefore, the detection surface 21a of the detector 21 retreats somewhat below the height of the belts 3a, 4a.

容器2を搬入コンベア3から検査領域Aを経由して搬出コンベア4へと搬送する内部搬送手段として、筐体10内には中間コンベア22が設けられている。中間コンベア22は、検出器21によるX線の検出を妨げることがないように、換言すれば、X線源20から容器2を透過して検出器21に向かうX線を遮らないように、容器2を側方から一対のベルト22aで挟み込んで保持しつつ搬送するように構成されている。搬入コンベア3及び搬出コンベア4と中間コンベア22とは、それらの端部が搬送方向において重なり合うようにして配置され、ベルト22aは搬送方向に走行駆動される。したがって、搬入コンベア3にて搬入される容器2はベルト22a間に取り込まれて検査領域Aを通過し、搬出コンベア4に到達した後にベルト22a間から解放されて搬出コンベア4により搬出される。 An intermediate conveyor 22 is provided in the housing 10 as internal conveying means for conveying the container 2 from the carry-in conveyor 3 to the carry-out conveyor 4 via the inspection area A. As shown in FIG. The intermediate conveyor 22 is arranged so as not to interfere with detection of X-rays by the detector 21 , in other words, so as not to block X-rays from the X-ray source 20 that pass through the container 2 and travel to the detector 21 . 2 are sandwiched and held by a pair of belts 22a from the sides and conveyed. The carrying-in conveyor 3, the carrying-out conveyor 4, and the intermediate conveyor 22 are arranged so that their ends overlap each other in the conveying direction, and the belt 22a is driven to run in the conveying direction. Therefore, the container 2 carried in by the carry-in conveyor 3 is taken in between the belts 22a, passes through the inspection area A, reaches the carry-out conveyor 4, is released from between the belts 22a, and is carried out by the carry-out conveyor 4.

上記の中間コンベア22によれば、検出器21の検出面21aがベルト3a、4aよりも下方に後退することに起因して容器2を検出面21aにて底側から支持できない状態であっても、その検出面21aから浮いた状態で容器2を搬送することが可能である。容器2の上方及び下方にベルト22aが存在せず、ベルト22aが容器2のX線透過像の撮像に対して障害となるおそれはない。 According to the intermediate conveyor 22, even if the container 2 cannot be supported by the detection surface 21a from the bottom side due to the detection surface 21a of the detector 21 retreating below the belts 3a and 4a, , the container 2 can be transported while floating from the detection surface 21a. Since the belts 22a do not exist above and below the container 2, there is no possibility that the belts 22a will interfere with the imaging of the X-ray transmission image of the container 2.

上記の例では、搬入コンベア3の終端部、中間コンベア22、及び搬出コンベア4の始端部の組み合わせが、容器2を搬入口15から検査領域Aを経由して搬出口16に搬送する搬送手段の一例として機能する。ただし、搬送手段はそのような例に限らない。例えば、中間コンベア22を搬入口15及び搬出口16まで延長することにより、中間コンベア22を単独で搬送手段として機能させてもよい。 In the above example, the combination of the terminal end of the loading conveyor 3, the intermediate conveyor 22, and the starting end of the unloading conveyor 4 is the transport means for transporting the container 2 from the loading port 15 to the loading port 16 via the inspection area A. Serves as an example. However, the conveying means is not limited to such an example. For example, by extending the intermediate conveyor 22 to the inlet 15 and the outlet 16, the intermediate conveyor 22 may function independently as a conveying means.

筐体10内の検出器21と搬入口15及び搬出口16との間には遮蔽材25が設けられている。中間コンベア22にて搬送される容器2と干渉しないように、遮蔽材25は、搬送範囲Cに突出しない範囲に限って設けられている。具体的には、遮蔽材25は、検出面21aの搬送方向における両端部でかつ搬送範囲Cから検出面21aが後退することによって生じる隙間に配置されている。 A shielding material 25 is provided between the detector 21 in the housing 10 and the inlet 15 and the outlet 16 . The shielding material 25 is provided only in a range that does not protrude into the transport range C so as not to interfere with the containers 2 transported by the intermediate conveyor 22 . Specifically, the shielding members 25 are arranged at both ends of the detection surface 21a in the conveying direction and in a gap formed by the retreating of the detection surface 21a from the conveying range C. As shown in FIG.

図3に示すように、X線源20から検出器21の検出面21aにX線が照射されると、同図中に矢印a、b、cで例示したように検査領域Aの周囲の比較的広い範囲にX線が散乱する。X線の一部(一例として矢印a、bで示す散乱X線)は搬入口15又は搬出口16に向かって進むことがある。そのX線の搬入口15及び搬出口16からの漏洩を抑制するため、遮蔽材25は、検出面21a上から搬入口15及び搬出口16に向かうX線を遮るように、その位置及び大きさが定められている。 As shown in FIG. 3, when the detection surface 21a of the detector 21 is irradiated with X-rays from the X-ray source 20, the surroundings of the inspection area A are compared as illustrated by arrows a, b, and c in the figure. X-rays are scattered over a wide area. Some of the X-rays (scattered X-rays indicated by arrows a and b as an example) may travel toward the entrance 15 or the exit 16 . In order to suppress the leakage of the X-rays from the entrance 15 and the exit 16, the shielding material 25 is positioned and sized so as to block the X-rays traveling from the detection surface 21a toward the entrance 15 and the exit 16. is defined.

一例として、図2に示すように、検出面21aのうち、遮蔽材25に覆われることなくX線源20側に露出する範囲の搬送方向における両端を境界位置P1、P2、搬出口16側の境界位置P2から搬入口15の上端に向かうX線、及び搬入口15側の境界位置P1から搬出口16の上端に向かうX線をそれぞれ限界X線R1、R2、それらの限界X線R1、R2の水平面に対する傾きを限界傾斜角θ1、θ2とした場合、検出面21a上で散乱して搬入口15又は搬出口16から漏れ出る可能性があるX線は限界X線R1、R2よりも下方の範囲で直進するX線である。したがって、限界X線R1、R2を遮ることができるように遮蔽材25の高さ及び位置を設定すれば、検出面21aから搬入口15又は搬出口16に向けて直進するX線を遮蔽材25で遮り、搬入口15及び搬出口16からのX線の漏洩を抑制することができる。水平面に対する傾斜角が限界傾斜角θ1、θ2より小さいX線は全て遮蔽材25に当たる。水平面に対する傾斜角が限界傾斜角θ1、θ2より大きいX線は、遮蔽材25に当たるか、あるいは、遮蔽材25の上方を通過しても筐体10の内面に当たる。いずれにしても、検出面21a上で散乱したX線が搬入口15又は搬出口16に向けて直進して装置外に漏れることはない。 As an example, as shown in FIG. 2, of the detection surface 21a, both ends in the transport direction of the range exposed to the X-ray source 20 side without being covered with the shielding material 25 are positioned at boundary positions P1 and P2, and at the outlet 16 side. X-rays from the boundary position P2 to the upper end of the carry-in port 15 and X-rays from the boundary position P1 on the side of the carry-in port 15 to the upper end of the carry-out port 16 are defined as limit X-rays R1 and R2, respectively. with respect to the horizontal plane are defined as critical tilt angles θ1 and θ2, X-rays that may scatter on the detection surface 21a and leak from the entrance 15 or the exit 16 are below the critical X-rays R1 and R2. X-rays traveling straight through the range. Therefore, if the height and position of the shielding material 25 are set so as to block the limit X-rays R1 and R2, the X-rays traveling straight from the detection surface 21a toward the entrance 15 or the exit 16 are blocked by the shielding material 25. , thereby suppressing leakage of X-rays from the carry-in port 15 and the carry-out port 16 . All the X-rays whose tilt angles with respect to the horizontal plane are smaller than the critical tilt angles θ1 and θ2 hit the shielding material 25 . X-rays whose inclination angles with respect to the horizontal plane are greater than the critical inclination angles θ1 and θ2 hit the shielding material 25 or hit the inner surface of the housing 10 even after passing above the shielding material 25 . In any case, the X-rays scattered on the detection surface 21a do not go straight toward the entrance 15 or the exit 16 and leak out of the apparatus.

なお、図4に示すように、筐体10内の奥行き方向に関して、遮蔽材25は、検出面21aの一端から他端まで延びるように設けられている。したがって、検出面21aで散乱したX線、特には限界傾斜角θ1、θ2よりも小さい傾斜角で散乱するX線が遮蔽材25の側方を通過して搬入口15又は搬出口16から漏れるおそれもない。ただし、奥行き方向における遮蔽材25の寸法及び配置は、搬入口15及び搬出口16に向かうX線を遮ることができる限りにおいて適宜に設定されてよい。 In addition, as shown in FIG. 4, the shielding material 25 is provided so as to extend from one end to the other end of the detection surface 21a in the depth direction inside the housing 10 . Therefore, the X-rays scattered on the detection surface 21a, especially the X-rays scattered at an inclination angle smaller than the critical inclination angles θ1 and θ2, may pass the side of the shielding material 25 and leak from the entrance 15 or the exit 16. Nor. However, the dimensions and arrangement of the shielding material 25 in the depth direction may be appropriately set as long as the X-rays traveling toward the entrance 15 and the exit 16 can be blocked.

以上のように、本形態の検査装置1によれば、筐体10の内部の検出器21上又はその近傍に配置された遮蔽材25により、搬入口15及び搬出口16に向かうX線を遮るようにしたため、搬入口15及び搬出口16に遮蔽カーテンを装着し、あるいは搬入コンベア3や搬出コンベア4に搬送経路に勾配を設定し、あるいは両コンベア3、4の搬送方向を途中で変化させるといった対策を講じることなくX線の漏洩を抑えることができる。よって、容器2の高速搬送に対する検査装置1の適応性を高め、あるいは検査装置1の小型化、特には搬送方向における機長の短縮化を図ることが可能である。 As described above, according to the inspection apparatus 1 of this embodiment, the shielding material 25 arranged on or near the detector 21 inside the housing 10 shields the X-rays traveling toward the entrance 15 and the exit 16. Therefore, shielding curtains are installed at the inlet 15 and the outlet 16, or a gradient is set in the conveying path of the conveying-in conveyor 3 and the conveying-out conveyor 4, or the conveying directions of both conveyors 3 and 4 are changed in the middle. Leakage of X-rays can be suppressed without taking countermeasures. Therefore, it is possible to enhance the adaptability of the inspection apparatus 1 to high-speed transportation of the container 2, or to reduce the size of the inspection apparatus 1, particularly to shorten the machine length in the transportation direction.

遮蔽材25が検出面21a上又はその近傍に配置されるため、搬出範囲Cと検出面21aとの間に生じる上下方向(X線の照射方向)の隙間に収容可能な程度の大きさに遮蔽材25を制限しつつ、搬入口15及び搬出口16の全面をカバーできる遮蔽効果を得ることが可能である。仮に遮蔽材25を搬入口15及び搬出口16の近傍に配置するならば、その大きさを搬入口15及び搬出口16に匹敵する程度まで拡大する必要があり、搬送範囲Cと遮蔽材25との干渉を避けることが困難となる。これに対して、本形態における遮蔽材25の配置によれば、そのような不都合を避けることが可能である。 Since the shielding material 25 is arranged on or near the detection surface 21a, the shielding is large enough to be accommodated in the gap in the vertical direction (X-ray irradiation direction) generated between the carry-out range C and the detection surface 21a. It is possible to obtain a shielding effect capable of covering the entire surfaces of the entrance 15 and the exit 16 while restricting the material 25 . If the shielding material 25 is arranged in the vicinity of the inlet 15 and the outlet 16, the size of the shielding material 25 must be increased to a level comparable to that of the inlet 15 and the outlet 16. It becomes difficult to avoid the interference of On the other hand, according to the arrangement of the shielding material 25 in this embodiment, it is possible to avoid such inconvenience.

遮蔽材25によるX線の遮蔽効果は、搬入口15及び搬出口16に向かうX線を完全に遮断する程度であることを必ずしも要しない。搬入口15及び搬出口16からのX線の漏洩量を実用上問題がない範囲に低減できる限りにおいて、遮蔽材25の遮蔽効果は適宜に設定されてよい。遮蔽材25に関して「X線を遮る」という場合は、遮蔽材25を設けない場合と比較して、搬入口15及び搬出口16に向かうX線量を有意に低減できることを意味する。つまり、遮蔽材25は、X線を完全に遮る例に限らず、必要な限度でX線の通過を妨げるものであってよい。 The X-ray shielding effect of the shielding material 25 does not necessarily have to be such that the X-rays traveling toward the entrance 15 and the exit 16 are completely blocked. The shielding effect of the shielding material 25 may be appropriately set as long as the amount of X-rays leaked from the entrance 15 and the exit 16 can be reduced to a practically acceptable range. When the shielding material 25 is referred to as "shielding X-rays", it means that the amount of X-rays directed to the entrance 15 and the exit 16 can be significantly reduced compared to when the shielding material 25 is not provided. In other words, the shielding material 25 is not limited to an example that completely blocks X-rays, and may block the passage of X-rays to the necessary extent.

検査装置1において、遮蔽カーテンや搬送経路への勾配の付与あるいは搬送方向の変化といった従来の漏洩対策は必ずしも排除されるものではない。検査装置1が使用される環境、検査装置1に要求される仕様によっては、遮蔽カーテンの設置等の従来の漏洩対策が併用されてもよい。 In the inspection apparatus 1, conventional leakage countermeasures, such as shielding curtains, imparting gradients to the conveying path, and changing the conveying direction, are not necessarily eliminated. Depending on the environment in which the inspection device 1 is used and the specifications required for the inspection device 1, conventional leakage countermeasures such as installation of shielding curtains may be used together.

次に、遮蔽材25の寸法及び配置の具体例を説明する。図5及び図6に示すように、検出器21の検出面21aからの遮蔽材25の高さをh、搬送方向における遮蔽材25の厚さをd、遮蔽材25同士の間隔をDとし、限界位置P2と搬入口15の上端Puとを結ぶ線分X(図2の限界X線R1の進路に等しい、)の水平面に対する傾斜角をθ1、限界位置P2から搬入口15までの搬送方向の距離をL、搬入口15の高さをHとする。なお、遮蔽材25は、検出面21aの中央を通過する垂線Nに対して搬送方向に等距離に配置される。つまり、垂線Nから遮蔽材25までの距離はD/2である。X線源20(図2及び図3)からのX線は垂線Nを軸線として照射されるものとする。この例において、D=100mm、H=200mmとすると、遮蔽材25の高さhが25mmであれば、距離Lを800mm以下に収めることができる。なお、検出器21が奥行き方向にのみ一定長さで延びるラインセンサ型であれば、遮蔽材25間の間隔Dを短縮し、それに伴って遮蔽材25の高さhや、距離Lをさらに短縮することが可能である。 Next, specific examples of the dimensions and arrangement of the shielding material 25 will be described. As shown in FIGS. 5 and 6, h is the height of the shielding material 25 from the detection surface 21a of the detector 21, d is the thickness of the shielding material 25 in the conveying direction, and D is the interval between the shielding materials 25. The inclination angle of the line segment X connecting the limit position P2 and the upper end Pu of the inlet 15 (equal to the course of the limit X-ray R1 in FIG. 2) with respect to the horizontal plane is θ1, and the transport direction from the limit position P2 to the inlet 15 is Let L be the distance and H be the height of the entrance 15 . The shielding member 25 is arranged equidistantly in the conveying direction with respect to a perpendicular line N passing through the center of the detection surface 21a. That is, the distance from the perpendicular line N to the shielding material 25 is D/2. It is assumed that the X-rays from the X-ray source 20 (FIGS. 2 and 3) are emitted with the vertical line N as the axis. In this example, if D=100 mm and H=200 mm, the distance L can be kept within 800 mm if the height h of the shielding member 25 is 25 mm. If the detector 21 is of a line sensor type that extends only in the depth direction with a constant length, the distance D between the shielding members 25 is shortened, and accordingly the height h and the distance L of the shielding members 25 are further shortened. It is possible to

遮蔽材25の素材及び厚さdは、必要とされるX線の遮蔽効果の程度に応じて適宜に設定されてよい。例えば、鉛やタングステンのように遮蔽効果が高い材料を素材として遮蔽材25を構成すれば、厚さdの低減に有利である。鉄やステンレス鋼等の材料を利用した場合でも、X線の照射条件にもよるが、厚さdを10mm~20mm程度に設定すれば実用上十分な程度にX線を遮ることができる。 The material and thickness d of the shielding material 25 may be appropriately set according to the required degree of X-ray shielding effect. For example, if the shielding member 25 is made of a material having a high shielding effect such as lead or tungsten, it is advantageous in reducing the thickness d. Even when a material such as iron or stainless steel is used, depending on the X-ray irradiation conditions, if the thickness d is set to about 10 mm to 20 mm, X-rays can be blocked to a practically sufficient extent.

次に、図7を参照して搬入口15及び搬出口16の形状及び大きさを変更可能とするための構成の一例を説明する。なお、図7では搬入口15を例示するが、搬出口16についても同様である。容器2が搬入口15及び搬出口16を通過するタイミングでは、搬入口15及び搬出口16の開口面積が容器2によって狭められ、容器2それ自体によるX線の遮蔽がある程度は期待できる。しかしながら、その場合でも、搬入口15及び搬出口16と容器2との間には隙間が残るため、X線の漏洩を抑えるためには隙間を可能な限り低減することが望ましい。一方、検査装置1よって検査されるべき容器2の形状及び大きさは常に一定とは限らない。したがって、搬入口15及び搬出口16の最適な形状及び大きさを一義的に定めることはできない。このような事情から、検査装置1では搬入口15及び搬出口16を容器2の形状及び大きさに応じて変更可能とする構成が採用されることが望ましい。図7はそのような構成の一例を示すものである。 Next, an example of a configuration for changing the shape and size of the carry-in port 15 and the carry-out port 16 will be described with reference to FIG. In addition, although the carry-in port 15 is illustrated in FIG. 7, the carry-out port 16 is the same. At the timing when the container 2 passes through the carry-in port 15 and the carry-out port 16, the opening areas of the carry-in port 15 and the carry-out port 16 are narrowed by the container 2, and shielding of X-rays by the container 2 itself can be expected to some extent. However, even in this case, since gaps remain between the inlet 15 and the outlet 16 and the container 2, it is desirable to reduce the gaps as much as possible in order to suppress leakage of X-rays. On the other hand, the shape and size of the container 2 to be inspected by the inspection device 1 are not always constant. Therefore, the optimal shape and size of the carry-in port 15 and the carry-out port 16 cannot be uniquely determined. Under these circumstances, it is desirable that the inspection apparatus 1 employ a configuration in which the inlet 15 and the outlet 16 can be changed according to the shape and size of the container 2 . FIG. 7 shows an example of such a configuration.

図7の例において、筐体10のハウジング12における搬入口15側の壁部12aには開口部12bが形成されている。開口部12bは搬入口15を形成するためのものである。開口部12bは、搬入コンベア3を取り込むために必要で、かつ検査装置1にて検査すべき対象となり得る各種の容器2のすべてが通過可能な大きさであればよい。一方、筐体10には、開口部12bを狭めて搬入口15の形状及び大きさを規定するための開口制限部材の一例として、複数枚の開口制限パネル30が用意されている。開口制限パネル30は、搬入口15及び搬出口16のそれぞれに対応して複数枚ずつ設けられている。開口制限パネル30はハウジング12とは別部品であって、ハウジング12の搬入口15側、及び搬出口16側のそれぞれに対して選択的に装着可能である。開口制限パネル30の装着には、ボルト31等の取付手段が用いられてよい。なお、取付手段はボルト31を用いる例に限らない。挿し込み式の取付構造、スナップフィット、クリップ等の弾性を利用した取付構造等が適宜に採用されてよい。 In the example of FIG. 7, an opening 12b is formed in the wall portion 12a of the housing 12 of the housing 10 on the inlet 15 side. The opening 12b is for forming the carry-in port 15. As shown in FIG. The opening 12b may be of a size necessary for taking in the carry-in conveyor 3 and allowing all of the various containers 2 to be inspected by the inspection apparatus 1 to pass through. On the other hand, the housing 10 is provided with a plurality of opening restricting panels 30 as an example of an opening restricting member for narrowing the opening 12b to define the shape and size of the entrance 15 . A plurality of opening restricting panels 30 are provided corresponding to each of the carry-in port 15 and the carry-out port 16 . The opening restricting panel 30 is a component separate from the housing 12 and can be selectively attached to the housing 12 on the inlet 15 side and the outlet 16 side. Mounting means such as bolts 31 may be used to mount the opening limiting panel 30 . Note that the mounting means is not limited to the example using the bolt 31 . An insertion-type mounting structure, a snap-fit, a mounting structure using elasticity such as a clip, or the like may be employed as appropriate.

搬入口15に対応する開口制限パネル30のそれぞれには搬入口15が形成されている。それらの開口制限パネル30の搬入口15の形状及び大きさは、互いに異なる容器2に適合するように差別化されている。ただし、開口制限パネル30と容器2の種類とは必ずしも1対1で対応付けられることを要しない。一枚の開口制限パネル30が、形状及び大きさが近似する複数種類の容器2に適合するものとして利用されてもよい。また、各開口制限パネル30の搬入口15は、形状又は大きさの少なくともいずれか一方が異なっていればよい。例えば、開口制限パネル30間において、搬入口15の形状が相似形で大きさが異なる場合があってもよいし、開口制限パネル30間において、搬入口15の幅及び高さ寸法が同一で形状が異なる場合があってもよい。 A loading port 15 is formed in each of the opening limiting panels 30 corresponding to the loading port 15 . The shape and size of the loading openings 15 of the opening restricting panels 30 are differentiated to fit different containers 2 from each other. However, the opening restricting panel 30 and the type of container 2 do not necessarily need to be associated one-to-one. A single opening restricting panel 30 may be used to accommodate multiple types of containers 2 that are similar in shape and size. In addition, at least one of the shape and size of the inlets 15 of the respective opening restricting panels 30 should be different. For example, between the opening limiting panels 30, the inlets 15 may have similar shapes but different sizes, or between the opening limiting panels 30, the inlets 15 may have the same width and height but the same shape. may be different.

以上のような構成によれば、検査すべき容器2の形状及び大きさに適合した搬入口15を備えた開口制限パネル30を選択し、これをハウジング12に取り付けることにより、筐体10の搬入口15の形状及び大きさを、各種の容器2に合わせて適宜に変更することが可能である。搬出口16に関しても同様の構成で対応可能である。なお、搬入口15及び搬出口16は互いに同形同大であってもよいし、差別化されてもよい。前者の場合には、一枚の開口制限パネル30を、搬入口15又は搬出口16のいずれを形成するための開口制限パネル30としても利用可能である。したがって、同形同大の2枚の開口制限パネル30を用意し、それらを区別することなく筐体10の搬入口15側又は搬出口16側に取り付ければよい。 According to the above configuration, by selecting the opening limiting panel 30 having the loading port 15 suitable for the shape and size of the container 2 to be inspected and attaching it to the housing 12, the housing 10 can be loaded. The shape and size of the mouth 15 can be appropriately changed according to various containers 2 . The same configuration can be applied to the outlet 16 as well. The carry-in port 15 and the carry-out port 16 may have the same shape and size, or may be differentiated. In the former case, a single opening restricting panel 30 can be used as the opening restricting panel 30 for forming either the inlet 15 or the outlet 16 . Therefore, two opening limiting panels 30 of the same shape and size should be prepared and attached to the entrance 15 side or the exit 16 side of the housing 10 without distinguishing between them.

なお、搬入口15及び搬出口16の形状あるいは大きさを変更するための手段は、筐体10に対して選択的に装着可能な開口制限パネル30を利用する例に限らない。例えば、搬入口15及び搬出口16のそれぞれに位置や形状を調整可能な調整機構を設け、その調整機構を容器2の形状及び大きさに合わせて操作することにより、搬入口15及び搬出口16の形状や大きさを変更可能としてもよい。 Note that the means for changing the shape or size of the loading port 15 and the loading port 16 is not limited to the example of using the opening limiting panel 30 that can be selectively attached to the housing 10 . For example, by providing an adjustment mechanism capable of adjusting the position and shape of each of the carry-in port 15 and the carry-out port 16 and operating the adjustment mechanism according to the shape and size of the container 2, the carry-in port 15 and the carry-out port 16 can be adjusted. may be changeable in shape and size.

図8は、X線の照射範囲を制限する絞り手段の一例としての規制板33を、X線源20と検出器21との間に配置した例を示している。X線源20から出射されるX線は、規制板33の開口部33aによってその広がりが制限される。それにより、X線源20からのX線の照射範囲IRは検出面21aとほぼ一致する程度に絞られる。遮蔽材25は、X線の散乱を防止するために照射範囲IR外に設置されることが望ましく、この点を考慮して遮蔽材25同士の間隔Dを設定することが好ましい。 FIG. 8 shows an example in which a restricting plate 33 as an example of diaphragm means for restricting the irradiation range of X-rays is arranged between the X-ray source 20 and the detector 21 . The spread of X-rays emitted from the X-ray source 20 is restricted by the opening 33a of the restricting plate 33 . As a result, the irradiation range IR of the X-rays from the X-ray source 20 is narrowed down to substantially coincide with the detection surface 21a. The shielding member 25 is desirably installed outside the irradiation range IR in order to prevent scattering of X-rays, and it is preferable to set the distance D between the shielding members 25 in consideration of this point.

図9は、図8に示したエリアセンサ型の検出器21に代えて、ラインセンサ型の検出器21Aを利用した例を示している。この場合、規制板33の開口部33bは検出器21Aの長手方向に沿ったスリット状に設定され、照射範囲IRも容器2の搬送方向に関して図8の例よりも大きく狭められる。そのため、遮蔽材25の搬送方向における間隔Dを大きく低減させることが可能であり、それに伴って遮蔽材25の高さhも低減される。したがって、ラインセンサ型の検出器21Aを用いた場合には、検査装置1の搬送方向に関する機長の短縮に有利である。 FIG. 9 shows an example using a line sensor type detector 21A instead of the area sensor type detector 21 shown in FIG. In this case, the opening 33b of the regulating plate 33 is set in a slit-like shape along the longitudinal direction of the detector 21A, and the irradiation range IR is also much narrower in the conveying direction of the container 2 than in the example of FIG. Therefore, it is possible to greatly reduce the interval D of the shielding material 25 in the conveying direction, and accordingly the height h of the shielding material 25 is also reduced. Therefore, when the line sensor type detector 21A is used, it is advantageous for shortening the length of the inspection apparatus 1 in the conveying direction.

上記の形態では、容器2を透過するX線の検出の妨げとならないように中間コンベア22にて容器2を側方から挟んで保持しつつ搬送しているが、搬送手段はそのような例に限らない。搬送手段は、被検体としての容器2を透過するX線の検出器21、21Aによる検出の妨げとならないようにして容器2を搬送できるものであれば適宜に変形可能である。X線の検出の妨げとなるか否かは、検出器21、21AによるX線の検出に対して実質的に差し支えが生じないか否かで判断されてよく、X線の光路から搬送手段が完全に外れていることを必ずしも要しない。したがって、容器2の支持形態も、X線の照射方向に対する側方から容器2を保持する形態に必ずしも限られない。例えば、ワイヤ等の断面積が比較的小さい支持体を用いて容器2を底側から支持しつつ搬送するように搬送手段が構成されてもよい。容器2を搬送体の螺旋溝やポケットに取り込みつつ、その搬送体を運動させて容器2を搬送する形態の搬送手段が用いられてもよい。 In the above embodiment, the intermediate conveyor 22 sandwiches and holds the container 2 from the side so as not to interfere with the detection of the X-rays that pass through the container 2, and conveys the container. Not exclusively. The conveying means can be appropriately modified as long as it can convey the container 2 without interfering with the detection of the X-rays passing through the container 2 as the subject by the detectors 21 and 21A. Whether the detection of X-rays is hindered may be determined by whether or not there is substantially no problem with the detection of X-rays by the detectors 21 and 21A. It does not necessarily have to be completely off. Therefore, the support form of the container 2 is not necessarily limited to the form in which the container 2 is held from the side with respect to the X-ray irradiation direction. For example, the conveying means may be configured such that a support having a relatively small cross-sectional area such as a wire is used to support and convey the container 2 from the bottom side. A transport means may be used in which the container 2 is transported by moving the transport body while taking the container 2 into a spiral groove or pocket of the transport body.

上記の形態では、検査領域Aの上方にX線源20を、下方に検出器21、21Aをそれぞれ配置したが、X線源20及び検出器21、21Aの配置はそのような例に限定されない。X線源20及び検出器21、21Aは検査領域Aの容器2にX線を照射して容器2を透過したX線を検出できるように、かつ搬送範囲Cに突出しないように配置されていればよい。例えば、図10に示したように、検査領域Aの下方にX線源20を、上方に検出器21をそれぞれ搬送範囲Cから後退するようにして配置してもよい。この場合でも、検出器21上で散乱して搬入口15及び搬出口16に向かうX線源を遮ることができるように、検出器21と搬入口15及び搬出口16との間に遮蔽材25を配置すれば、上記の形態と同様にX線の漏洩を抑制しつつ検査装置1の小型化を図り得る。その他にも、検査領域Aに対して検査装置1の奥行き方向にX線源及び検出器を対向配置してX線を水平に照射してもよいし、X線が検査領域Aを斜めに横切るようにしてX線源及び検出器が配置されてもよい。なお、X線を水平に照射する場合、搬送手段は、被検体を底側から支持しつつ搬送するように構成することが可能である。例えば、上記の形態において中間コンベア22を省略し、搬入コンベア3及び搬出コンベア4を分離することなく一体化されたコンベアとして構成してもよい。 In the above embodiment, the X-ray source 20 is arranged above the inspection area A, and the detectors 21 and 21A are arranged below the inspection area A. However, the arrangement of the X-ray source 20 and the detectors 21 and 21A is not limited to such an example. . The X-ray source 20 and the detectors 21 and 21A should be arranged so as to irradiate the container 2 in the inspection area A with X-rays and detect the X-rays that have passed through the container 2, and not protrude into the transport range C. Just do it. For example, as shown in FIG. 10, the X-ray source 20 may be arranged below the inspection area A, and the detector 21 may be arranged above the inspection area A so as to retreat from the transport range C, respectively. Even in this case, a shielding material 25 is provided between the detector 21 and the inlet 15 and the outlet 16 so as to block the X-ray source that scatters on the detector 21 and travels toward the inlet 15 and the outlet 16 . , the size of the inspection apparatus 1 can be reduced while suppressing leakage of X-rays in the same manner as in the above embodiment. Alternatively, an X-ray source and a detector may be arranged opposite to the inspection area A in the depth direction of the inspection apparatus 1 to irradiate the X-rays horizontally, or the X-rays may cross the inspection area A obliquely. The X-ray source and detector may be arranged in this manner. In the case of horizontally irradiating X-rays, the transport means can be configured to transport the subject while supporting it from the bottom side. For example, the intermediate conveyor 22 may be omitted in the above embodiment, and the loading conveyor 3 and the unloading conveyor 4 may be configured as an integrated conveyor without being separated.

上記の形態では、一対の遮蔽材25を検出器21、21Aに対して搬送方向の両側に配置したが、遮蔽材25を搬入口15側及び搬出口16側のそれぞれで分離することも必須ではない。例えば、検出面21aを取り囲むように枠状又は環状の一体化された遮蔽材が配置されてもよい。 In the above embodiment, the pair of shielding members 25 are arranged on both sides of the detectors 21 and 21A in the conveying direction. do not have. For example, a frame-shaped or ring-shaped integrated shielding material may be arranged so as to surround the detection surface 21a.

上述した実施の形態及び変形例のそれぞれから導き出される本発明の各種の態様を以下に記載する。なお、以下の説明では、本発明の各態様の理解を容易にするために添付図面に図示された対応する構成要素を括弧書きにて付記するが、それにより本発明が図示の形態に限定されるものではない。 Various aspects of the present invention derived from each of the embodiments and modifications described above are described below. In the following description, in order to facilitate understanding of each aspect of the present invention, the corresponding components illustrated in the accompanying drawings are added in parentheses, but the present invention is thereby limited to the illustrated form. not something.

本発明の一態様に係るX線検査装置は、X線を用いて被検体(2)を検査するX線検査装置(1)であって、前記被検体の搬入口(15)及び搬出口(16)を有する遮蔽容器(10)と、前記遮蔽容器内の検査領域(A)に位置する被検体にX線を照射するX線源(20)、及び前記被検体を透過したX線を検出する検出器(21;21A)と、前記検出器によるX線の検出を妨げないようにして、前記被検体を前記搬入口から前記検査領域を経て前記搬出口へと所定の搬送方向(F)に搬送する搬送手段(3、22、4)と、前記搬送手段による前記被検体の搬送範囲(C)に突出しないように、かつ前記検出器の検出面(21a)上から前記搬入口及び前記搬出口に向けて散乱するX線を遮るようにして、前記遮蔽容器内の前記検出器と前記搬入口及び前記搬出口との間に設けられた遮蔽材(25)と、を備えたものである。 An X-ray inspection apparatus according to one aspect of the present invention is an X-ray inspection apparatus (1) for inspecting a subject (2) using X-rays, comprising an entrance (15) and an exit ( 16), an X-ray source (20) for radiating X-rays to a subject positioned in an examination area (A) in the shielding vessel, and detecting X-rays transmitted through the subject. and a detector (21; 21A) that carries the subject from the carry-in port through the inspection region to the carry-out port in a predetermined conveying direction (F) so as not to interfere with detection of X-rays by the detector. transport means (3, 22, 4) for transporting the subject to the transport means (3, 22, 4), and the carry-in port and the A shielding material (25) provided between the detector in the shielding container and the loading port and the loading port so as to block X-rays scattered toward the loading port. be.

上記態様のX線検査装置によれば、検出面上で散乱して搬入口及び搬出口に向かうX線を遮蔽容器内の遮蔽材にて遮ることにより、搬入口及び搬出口からのX線の漏洩を抑制することができる。搬入口や搬出口を遮蔽カーテンで覆い、あるいは遮蔽容器内の搬送経路に勾配を付し、遮蔽容器内の搬送方向を途中で変更するといった従来の漏洩対策への依存性が低下することにより、高速搬送への適応性を高め、あるいは搬送方向における装置の機長を短縮して小型化を図ることが可能である。 According to the X-ray inspection apparatus of the aspect described above, X-rays scattered on the detection surface and directed toward the entrance and the exit are shielded by the shielding material in the shielding container, thereby preventing X-rays from the entrance and the exit. Leakage can be suppressed. By reducing the dependence on conventional leakage countermeasures such as covering the entrance and exit with a shielding curtain, or making a slope on the conveying path in the shielded container and changing the conveying direction in the shielded container midway, Adaptability to high-speed transportation can be improved, or the machine length in the transportation direction can be shortened to achieve miniaturization.

上記態様において、前記検出器は、前記検出面が前記搬送範囲よりも前記X線の照射方向(B)に後退するように設けられ、前記遮蔽材は、前記照射方向に関して前記搬送範囲と前記検出面との間に位置してもよい。これによれば、検出器の検出面を搬送範囲から後退させて生じた隙間部分に遮蔽材を設けることにより、X線の散乱が生じる箇所に遮蔽材を近付けて遮蔽材の小型化を図ることができる。 In the above aspect, the detector is provided so that the detection surface is set back in the irradiation direction (B) of the X-rays relative to the transport range, and the shielding material is positioned between the transport range and the detection surface with respect to the irradiation direction. may be located between the surfaces. According to this, by providing the shielding material in the gap formed by retreating the detection surface of the detector from the transport range, the shielding material can be brought closer to the location where the X-rays are scattered, thereby reducing the size of the shielding material. can be done.

前記搬送手段は、前記検査領域にて前記被検体を前記X線の照射方向に対する側方から保持しつつ搬送する内部搬送手段(22)を含んでもよい。これによれば、X線源から照射されて被検体を透過するX線を内部搬送手段が実質的に遮らないようになるため、内部搬送手段がX線の検出に対して妨げとなるおそれを排除することができる。 The transport means may include an internal transport means (22) that transports the subject while holding it from a side in the X-ray irradiation direction in the examination area. According to this, since the internal transport means does not substantially block the X-rays emitted from the X-ray source and transmitted through the subject, the possibility that the internal transport means interferes with the detection of the X-rays is eliminated. can be eliminated.

前記内部搬送手段は、前記搬送方向に走行する一対のベルト(22a)により前記被検体を前記照射方向に対する側方から挟み込んで保持しつつ搬送するように設けられてもよい。これによれば、一対のベルトで被検体を挟み込むことにより、X線の検出の妨げとならない状態で被検体を搬送することが可能である。 The internal conveying means may be provided so as to hold and convey the subject from the sides with respect to the irradiation direction with a pair of belts (22a) running in the conveying direction. According to this, by sandwiching the subject between the pair of belts, it is possible to convey the subject in a state that does not hinder the detection of X-rays.

前記搬送手段は、前記被検体を前記搬入口から搬入する搬入コンベア(3)と、前記被検体を前記搬出口から搬出する搬出コンベア(4)とを含み、前記内部搬送手段は、前記搬入コンベアから前記搬出コンベアに前記被検体を搬送するように設けられてもよい。これによれば、遮蔽容器の内部にて搬入コンベアから内部搬送手段を介して搬出コンベアへと被検体を搬送することができる。内部搬送手段を検査領域の通過に必要な程度の搬送長で設ければよく、被検体を側方から保持しつつ搬送する区間を短縮することが可能である。 The conveying means includes a carry-in conveyor (3) for carrying in the subject from the carry-in entrance and a carry-out conveyor (4) for carrying out the subject from the carry-out opening, and the internal conveying means comprises the carry-in conveyor. may be provided to transport the specimen from the outlet conveyor to the unloading conveyor. According to this, the subject can be transported from the carry-in conveyor to the carry-out conveyor via the internal transport means inside the shielding container. The internal conveying means may be provided with a conveying length necessary for passing through the inspection area, and it is possible to shorten the section for conveying while holding the subject from the side.

前記遮蔽材は、前記X線の照射範囲(IR)の外に設けられてもよい。これによれば、遮蔽材に対してX線が照射されることによって生じる散乱を防止し、X線の漏洩をより確実に抑制することが可能である。 The shielding material may be provided outside the irradiation range (IR) of the X-rays. According to this, it is possible to prevent the scattering caused by the irradiation of the shielding material with the X-rays, and to more reliably suppress the leakage of the X-rays.

前記照射範囲を制限する絞り手段(33)をさらに備えてもよい。これによれば、X線の照射範囲が搬送方向において不必要に広がるおそれを排除し、搬送方向に関して照射範囲を縮小することができる。そのため、遮蔽材を照射範囲外に配置しつつ搬送方向における遮蔽材同士の間隔を狭め、ひいては搬送方向における装置の機長の短縮化を図ることが可能である。 A diaphragm means (33) for limiting the irradiation range may be further provided. According to this, it is possible to eliminate the possibility that the irradiation range of X-rays unnecessarily widens in the transport direction, and to reduce the irradiation range in the transport direction. Therefore, it is possible to reduce the distance between the shielding members in the transport direction while arranging the shielding members outside the irradiation range, thereby shortening the length of the apparatus in the transport direction.

前記検出器として、前記X線の検出範囲が前記搬送方向と直交する方向に1次元的に延ばされたラインセンサ型の検出器(21A)が設けられてもよい。これによれば、搬送方向における検出面の幅を必要最小限に抑えることができるので、搬送方向における遮蔽材同士の間隔、及び同方向における機長の短縮化に極めて有利である。 As the detector, a line sensor type detector (21A) having a detection range of the X-rays one-dimensionally extended in a direction orthogonal to the transport direction may be provided. According to this, the width of the detection surface in the conveying direction can be minimized, which is extremely advantageous in shortening the interval between the shielding members in the conveying direction and shortening the machine length in the same direction.

前記搬入口及び前記搬出口のそれぞれが、前記被検体の外形輪郭に倣った形状に形成されてもよい。これによれば、被検体が搬入口及び搬出口を通過する際の隙間を縮小し、その隙間からのX線の漏洩を抑えることが可能である。 Each of the carry-in port and the carry-out port may be formed in a shape that follows the outer contour of the subject. According to this, it is possible to reduce the gap when the subject passes through the inlet and the outlet, and to suppress the leakage of X-rays from the gap.

前記搬入口及び前記搬出口の形状及び大きさの少なくともいずれか一方が変更可能であってもよい。これによれば、被検体の形状や大きさが変化した場合でも、それに対応して搬入口及び搬出口の形状及び大きさを適合させて、被検体の通過時における搬入口及び搬出口と被検体との隙間を小さく維持することができる。 At least one of the shape and size of the inlet and the outlet may be changeable. According to this, even if the shape and size of the subject change, the shape and size of the entrance and exit are adapted accordingly, and the entrance and exit and the subject when the subject passes through are adjusted accordingly. A small gap can be maintained with the specimen.

前記遮蔽容器は、前記搬入口及び前記搬出口を設けるための開口部(12b)を狭めて前記搬入口及び前記搬出口の形状及び大きさを規定するようにして前記搬入口側及び前記搬出口側のそれぞれに対して選択的に装着可能な複数の開口制限部材(30)を備え、前記搬入口側に装着可能な開口制限部材間では、前記搬入口が形状及び大きさの少なくともいずれか一方が差別化され、前記搬出口側に装着可能な開口制限部材間では、前記搬出口の形状及び大きさの少なくともいずれか一方が差別化されてもよい。これによれば、被検体の形状や大きさの変化に対応して開口制限部材を適宜に交換することにより、搬入口及び搬出口の形状及び大きさを適正に維持することができる。 The shielding container narrows the opening (12b) for providing the inlet and the outlet so as to define the shape and size of the inlet and the outlet. a plurality of opening restricting members (30) selectively attachable to each side of the inlet, wherein the inlet has at least one of shape and size between the aperture restricting members attachable to the inlet. may be differentiated, and at least one of the shape and size of the outlet may be differentiated between the opening restricting members attachable to the outlet. According to this, it is possible to appropriately maintain the shape and size of the loading port and the loading port by appropriately replacing the opening restricting member in response to changes in the shape and size of the subject.

1 X線検査装置
2 容器(被検体)
3 搬入コンベア
4 搬出コンベア
10 筐体(遮蔽容器)
12 ハウジング
12b ハウジングの開口部
15 搬入口
16 搬出口
20 X線源
21 エリアセンサ型の検出器
21A ラインセンサ型の検出器
21a 検出面
22 中間コンベア(内部搬送手段)
25 遮蔽材
30 開口制限パネル(開口制限部材)
33 規制板(絞り手段)
1 X-ray inspection device 2 container (subject)
3 carry-in conveyor 4 take-out conveyor 10 housing (shielding container)
12 housing 12b housing opening 15 inlet 16 outlet 20 X-ray source 21 area sensor type detector 21A line sensor type detector 21a detection surface 22 intermediate conveyor (internal conveying means)
25 Shielding material 30 Opening limiting panel (opening limiting member)
33 regulation plate (throttle means)

Claims (11)

X線を用いて被検体を検査するX線検査装置であって、
前記被検体の搬入口及び搬出口を有する遮蔽容器と、
前記遮蔽容器内の検査領域に位置する被検体にX線を照射するX線源、及び前記被検体を透過したX線を検出する検出器と、
前記検出器によるX線の検出を妨げないようにして、前記被検体を前記搬入口から前記検査領域を経て前記搬出口へと所定の搬送方向に搬送する搬送手段と、
前記搬送手段による前記被検体の搬送範囲に突出しないように、かつ前記検出器の検出面上から前記搬入口及び前記搬出口に向けて散乱するX線を遮るようにして、前記遮蔽容器内の前記検出器と前記搬入口及び前記搬出口との間に設けられた遮蔽材と、
を備えたX線検査装置。
An X-ray inspection apparatus for inspecting a subject using X-rays,
a shielding container having an inlet and an outlet for the subject;
an X-ray source that emits X-rays to a subject located in an examination area within the shielding container; and a detector that detects X-rays that have passed through the subject;
a conveying means for conveying the subject in a predetermined conveying direction from the carry-in port to the carry-out port through the examination region without hindering detection of X-rays by the detector;
X-rays scattered from the detection surface of the detector toward the loading port and the loading port are blocked so as not to protrude into the transportation range of the subject by the transportation means. a shielding material provided between the detector and the entrance and the exit;
An X-ray inspection device with
前記検出器は、前記検出面が前記搬送範囲よりも前記X線の照射方向に後退するように設けられ、前記遮蔽材は、前記照射方向に関して前記搬送範囲と前記検出面との間に位置している請求項1に記載のX線検査装置。 The detector is provided such that the detection surface is set back in the X-ray irradiation direction relative to the transport range, and the shielding material is positioned between the transport range and the detection surface with respect to the irradiation direction. An X-ray inspection apparatus according to claim 1. 前記搬送手段は、前記検査領域にて前記被検体を前記X線の照射方向に対する側方から保持しつつ搬送する内部搬送手段を含んでいる請求項1又は2に記載のX線検査装置。 3. The X-ray inspection apparatus according to claim 1, wherein said transport means includes internal transport means for transporting said subject while holding it from a side of said X-ray irradiation direction in said inspection area. 前記内部搬送手段は、前記搬送方向に走行する一対のベルトにより前記被検体を前記照射方向に対する側方から挟み込んで保持しつつ搬送するように設けられている請求項3に記載のX線検査装置。 4. The X-ray inspection apparatus according to claim 3, wherein the internal conveying means is provided so as to hold and convey the subject from a side with respect to the irradiation direction by a pair of belts running in the conveying direction. . 前記搬送手段は、前記被検体を前記搬入口から搬入する搬入コンベアと、前記被検体を前記搬出口から搬出する搬出コンベアとを含み、前記内部搬送手段は、前記搬入コンベアから前記搬出コンベアに前記被検体を搬送するように設けられている請求項3又は4に記載のX線検査装置。 The conveying means includes a carry-in conveyor that carries in the subject from the carry-in entrance and a carry-out conveyor that carries out the subject from the carry-out opening. 5. An X-ray inspection apparatus according to claim 3 or 4, arranged to transport a subject. 前記遮蔽材は、前記X線の照射範囲外に設けられている請求項1~5のいずれか一項に記載のX線検査装置。 The X-ray inspection apparatus according to any one of claims 1 to 5, wherein the shielding material is provided outside the irradiation range of the X-rays. 前記照射範囲を制限する絞り手段をさらに備えた請求項6に記載のX線検査装置。 7. The X-ray inspection apparatus according to claim 6, further comprising diaphragm means for limiting said irradiation range. 前記検出器として、前記X線の検出範囲が前記搬送方向と直交する方向に1次元的に延ばされたラインセンサ型の検出器が設けられている請求項6又は7に記載のX線検査装置。 8. The X-ray inspection according to claim 6, wherein the detector is a line sensor type detector whose X-ray detection range is one-dimensionally extended in a direction orthogonal to the conveying direction. Device. 前記搬入口及び前記搬出口のそれぞれが、前記被検体の外形輪郭に倣った形状に形成されている請求項1~8のいずれか一項に記載のX線検査装置。 The X-ray inspection apparatus according to any one of claims 1 to 8, wherein each of said carry-in port and said carry-out port is formed in a shape following the outer contour of said subject. 前記搬入口及び前記搬出口の形状及び大きさの少なくともいずれか一方が変更可能である請求項9に記載のX線検査装置。 10. The X-ray inspection apparatus according to claim 9, wherein at least one of the shape and size of the carry-in port and the carry-out port can be changed. 前記遮蔽容器は、前記搬入口及び前記搬出口を設けるための開口部を狭めて前記搬入口及び前記搬出口の形状及び大きさを規定するようにして前記搬入口側及び前記搬出口側のそれぞれに対して選択的に装着可能な複数の開口制限部材を備え、
前記搬入口側に装着可能な開口制限部材間では、前記搬入口が形状及び大きさの少なくともいずれか一方が差別化され、前記搬出口側に装着可能な開口制限部材間では、前記搬出口の形状及び大きさの少なくともいずれか一方が差別化されている請求項10に記載のX線検査装置。
The shielding container narrows the openings for providing the carry-in port and the carry-out port to define the shape and size of the carry-in port and the carry-out port, respectively. A plurality of opening limiting members selectively attachable to the
At least one of the shape and size of the carry-in opening is differentiated between the opening restricting members attachable to the carry-in opening, 11. The X-ray inspection apparatus according to claim 10, wherein at least one of shape and size is differentiated.
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