JP2023072346A - Quality determination device, quality determination method, surface treatment apparatus and surface treatment method - Google Patents

Abstract

To provide a quality determination device, a quality determination method, a surface treatment apparatus and a surface treatment method which can obtain a correct determination result of the quality of a portion irradiated with a laser beam in an object.SOLUTION: A quality determination device 60 used in a surface treatment apparatus 100 which performs surface treatment by irradiating an object 1 with a laser beam by a laser beam irradiation device 10, comprises: an image acquisition unit 30 which acquires a color image including light emitted by a surface when the surface being the object 1 is irradiated with the laser beam; and a determination unit 52 which determines the quality of the object by comparing color information on each pixel existing in a region assumed that the light emitted from the surface is located in the image acquired by the image acquisition unit 30 with a preset threshold.SELECTED DRAWING: Figure 1

Description

The present invention relates to a quality determination apparatus, a quality determination method, a surface treatment apparatus, and a surface treatment method, and more particularly to a quality determination apparatus and quality determination method used in a surface treatment method for removing deposits on an object by laser irradiation.

For example, on the surface of steel structures such as bridges, various coatings such as coating, pavement, lining, and resin sheets are formed according to their uses and functions. Such coatings are often exposed to the weather, and over time, they deteriorate or become contaminated with oxides, dirt, and the like. Even if the paint is applied without completely removing the dirt and rust attached to the iron part, the paint may not adhere to the iron part, so it will peel off immediately. Can not. For this reason, it is necessary to perform surface preparation work to reliably remove dirt and rust to improve adhesion. Therefore, in structures and the like having such coatings, etc., removal work such as cleaning and peeling (including surface treatment work) is performed periodically, and processing such as repainting and repapering of the coating is performed as necessary.

In the past, in the process of removing rust and coating from the surface of the object, the coating was removed using a coating remover or shot blasting. Since there are problems with the collection and disposal of the rust, it has been proposed to remove the rust and remove the paint film by laser irradiation.

For example, as a coating film removal method capable of removing a coating film without using chemicals, and a laser processing apparatus suitable for removing the coating film, a lens that collects laser light and irradiates it on the surface of the object to be processed. a lens support mechanism for supporting a lens and capable of adjusting the height from the surface of the object to be processed to the lens; There has been proposed a laser processing apparatus capable of suppressing an increase in the surface temperature of an object to be processed (see, for example, Patent Literatures 1 and 2).

Patent Literature 1 relates to a laser cleaning device that removes only the deposit by irradiating a laser beam on a target having the deposit adhered to the surface of the base material. Means for monitoring the removal process of removing deposits on the base material of the object with a laser beam in order to carry out the optimal removal of deposits without detailed material analysis, investigation, and setting of construction conditions in advance. 8, and the removal status is determined by the status determining means from the output signal of the monitoring means. Then, the control means controls the irradiation conditions of the laser light based on the determination result of the situation determination means.

Patent document 2 relates to a pipe inner surface treatment method for efficiently exfoliating and removing scale generated by steam oxidation on the inner surfaces of main steam pipes, reheat steam pipes, etc. of a thermal power plant, for example, by laser light irradiation. In order to remove scale formed on the inner surface of a pipe by remote control using a pulsed laser beam efficiently and reliably in a short period of time, the inner surface of the metal pipe to be treated is irradiated with a pulsed laser beam, By giving a thermal change to the scale formed on the inner surface of the pipe, the scale is peeled off from the inner surface of the pipe. As the pulsed laser light, a fundamental wave of Nd.YAG laser light, a double wave or more, or a copper vapor laser light is applied. The irradiation head is mounted on a self-propelled robot 7 which is self-propelled in the pipe to be treated. The self-propelled robot has a crawling device capable of traveling and stopping within the pipe.

Japanese Patent Application Laid-Open No. 2001-232315 JP-A-2002-224875

By the way, based on the processing methods described in Patent Documents 1 and 2, when an object is irradiated with laser light by a color sensor, even if an attempt is made to determine the quality of a linear light portion emitted from the object, the color Since the color information acquired by the sensor is summed up and averaged, it is difficult to obtain an accurate quality determination result. That is, the color sensor is arranged at a certain distance from the light portion emitted by the object, and the farther apart the color sensor is arranged, the wider the target area is to the area around the light portion emitted by the object. end up As a result, the quality judgment result including not only the light portion emitted by the object but also the surrounding area is obtained, so the accurate quality judgment result of the light portion emitted by the object cannot be obtained. There was an inconvenience.

Therefore, in view of the conventional circumstances as described above, we provide a quality determination device, a quality determination method, a surface treatment device, and a surface treatment method that can obtain an accurate result of quality determination of a portion of an object that has been irradiated with a laser beam. intended to

The present invention relates to a quality determination device used in a substrate processing apparatus that performs substrate processing by irradiating a laser beam onto an object using a laser beam irradiation device, wherein when the laser beam is irradiated onto the substrate that is the object, the an image acquisition unit that acquires a color image including light emitted from a background; color information of each pixel existing in an area where the light emitted from the background is assumed to be located in the image acquired by the image acquisition unit and set in advance. and a judgment unit for judging the quality of the object by comparing the threshold values.

In the quality determination device according to the present invention, the region where the light emitted by the background is considered to be located is obtained by converting the RGB components of the color image acquired by the image acquisition unit into another color space. It can be defined as an area in the object whose lightness value or luminance value is equal to or greater than a predetermined value.

Further, in the quality determination device according to the present invention, the determination unit has a hue determination value within the range of 180 to 240 obtained by converting the RGB components of the color image acquired by the image acquisition unit into an HSV space. It is possible to determine that the quality of the object is good when the ratio of the area occupied by the area exceeds a predetermined value.

Further, in the quality determination device according to the present invention, the determination unit performs machine learning using a plurality of images determined to be of good quality among the plurality of color images sequentially acquired by the image acquisition unit. A learning unit may be provided.

A substrate processing apparatus according to the present invention includes a laser beam irradiation device, a moving device that holds the laser beam irradiation device and moves the laser beam irradiation device within a work area including a processing target region of an object, and a laser beam. and an image acquisition unit that acquires a color image including light emitted by the base when the base, which is an object, is irradiated with the light emitted by the base in the image acquired by the image acquisition unit. a judgment unit that judges the quality of an object by comparing color information of each pixel present in an area with a preset threshold value; and a control device that controls operations of the laser beam irradiation device and the movement device. The control device causes the laser beam irradiation device to irradiate the laser beam again on the portion determined to be insufficient in processing quality by the determination unit, thereby obtaining a base having a predetermined base processing quality for the entire object. It is characterized by processing.

In the surface preparation apparatus according to the present invention, the control device irradiates the object with the laser beam irradiation device based on the color information obtained from the image of the surface of the object acquired by the image acquisition unit. The laser density to be applied may be modified.

The present invention relates to a quality determination method used in a substrate treatment method in which an object is irradiated with a laser beam by a laser beam irradiation device to perform substrate treatment, and when the laser beam is irradiated onto the substrate, which is the object, the quality determination method is used. an image acquisition step of acquiring a color image including light emitted by a background; and color information of each pixel existing in an area where the light emitted by the background is assumed to be located in the image acquired in the image acquisition step and set in advance. and a determination step of comparing the determined threshold values to determine the quality of the object.

In the quality determination method according to the present invention, the region where the light emitted by the background is considered to be located is obtained by converting the RGB components of the color image acquired in the image acquisition step into another color space. It can be defined as an area in the object whose lightness value or luminance value is equal to or greater than a predetermined value.

Further, in the quality determination method according to the present invention, in the determination step, the hue determination value obtained by converting the RGB components of the color image acquired in the image acquisition step into the HSV space is within the range of 180 to 240 It is possible to determine that the quality of the object is good when the ratio of the area occupied by the area exceeds a predetermined value.

Further, in the quality determination method according to the present invention, in the determination step, machine learning is performed using a plurality of images determined to be of good quality among the plurality of color images sequentially acquired in the image acquisition step. A learning process may be provided.

The present invention is a surface treatment method for removing deposits on an object or changing the state of the surface of the object, comprising: a surface treatment step of irradiating the object with a laser beam from a laser beam irradiation device to perform the surface treatment; , each pixel existing in an area where the light emitted by the background is considered to be located in the color image obtained by the image acquisition unit and including the light emitted by the background when the base is irradiated with the laser light. and a processing quality determining step for determining the quality of the object by comparing the color information of and a preset threshold value, and in the processing target region determined to have insufficient processing quality in the processing quality determining step On the other hand, the present invention is characterized in that a base treatment having a predetermined base treatment quality is performed on the entire object by performing laser irradiation again with the above-described laser beam irradiation device.

In the surface treatment method according to the present invention, in the surface treatment step, a laser light irradiation device for irradiating the object with a laser beam is held by a moving device and moved within a work area including the processing target region of the object. Then, the laser beam irradiation device can be used to irradiate the object with a laser beam to perform a base treatment.

Further, in the surface treatment method according to the present invention, the laser density with which the object is irradiated is corrected based on the color image of the object acquired by the image acquisition unit in the process quality determination step. can be done.

As described above, according to the present invention, it is possible to improve the accuracy of determining the quality of an object.

1 is a block diagram showing a configuration example of a substrate processing apparatus according to a first embodiment of the present invention; FIG. FIG. 2(a) is a schematic diagram showing an example of division of an object, and FIG. 2(b) is a schematic diagram showing pixels in one area of the object. It is a perspective view which shows typically the structure of the biaxial galvanomirror mechanism with which the said base-coat processing apparatus was equipped. FIG. 3 is a schematic diagram showing a state in which laser irradiation is sequentially performed on divided elements that have been three-dimensionally approximated by this surface treatment apparatus; 4 is a flow chart showing a procedure of quality judgment work; It is a figure which shows an example of a determination result, Fig.6 (a) is a figure which showed the example of a bad determination result, and FIG.6(b) is a figure which showed the example of a good determination result. 5 is a flow chart showing the procedure of the surface preparation work performed by the surface preparation apparatus that performs quality judgment on all the elements obtained by dividing the object; 5 is a flow chart showing the procedure of a surface treatment operation performed by the surface treatment apparatus on a group of elements that are aggregated in all the elements obtained by dividing the object. FIG. 4 is a schematic diagram showing the relationship between processing quality and laser density (spot diameter) in the surface treatment work by the surface treatment apparatus. 4 is a flow chart showing the procedure of a base treatment work performed by an operator holding the laser head portion in hand. FIG. 5 is a block diagram showing a configuration example of a substrate processing apparatus according to a second embodiment of the present invention;

<First embodiment>
First, a quality determination device, a quality determination method, a base processing device, and a base processing method according to the first embodiment of the present invention will be described. Note that common constituent elements will be described by attaching common reference numerals in the drawings. Further, the present invention is not limited to the following examples, and can be arbitrarily modified without departing from the gist of the present invention.

INDUSTRIAL APPLICABILITY The present invention is applied to a substrate processing apparatus 100 that performs substrate processing work using a moving device, as shown in the block diagram of FIG. 1, for example. Note that the surface preparation work may include quality judgment work.

A manipulator robot composed of articulated links, a three-axis robot composed of three axes (X, Y, Z), and two robots in two directions, one axis being in the direction of the transfer line and the other two, are used as moving devices for surface preparation work. It also includes a robot consisting of a shaft or a transfer device using a mobile cart. Note that the moving device can also be applied to a facility in which a robot and a holding portion of the laser beam irradiation portion are mechanically moved.

This substrate processing apparatus 100 carries out a substrate processing operation of removing deposits such as scale and rust from an object 1 by irradiating a manipulator robot 20 with a laser beam irradiation device 10 and irradiating the object 1 with a laser beam. By determining the color of the portion of the linear light (ablation light) emitted from the base of the object 1 when the object 1 is irradiated, it is determined whether the adhering matter has been sufficiently removed, that is, the quality of the object 1. It consists of a laser light irradiation device 10, a manipulator robot 20, an image acquisition unit 30, an integrated control device 50, a storage unit 54, a quality determination device 60, and the like.

The laser beam irradiation device 10 comprises a laser oscillation section 11 and a laser head section 13 connected to the laser oscillation section 11 via an optical fiber 12 . The operation of the laser beam irradiation device 10 is controlled by a laser control unit 51 provided in an integrated control unit 50 , a laser beam is generated by a laser oscillation unit 11 , emitted from a laser head unit 13 , and emitted onto an object 1 . Irradiate.

The manipulator robot 20 has an articulated robot arm 21 , and an image acquisition section 30 is attached to the distal end portion 21 A of the robot arm 21 together with the laser head section 13 of the laser beam irradiation device 10 .

Here, although the image acquisition unit 30 is attached to the distal end portion 21A of the robot arm 21 together with the laser head unit 13, it is not limited to this case. For example, if the image acquisition unit 30 is located within the processing target region of the object 1 and can acquire a color image (RGB image) showing the surface condition of the object 1, the manipulator robot 20 There is also a method in which a color image showing the surface condition of the object 1 is obtained by installing it independently at a different position.

The manipulator robot 20 is controlled by the robot control unit 22 to freely move the distal end portion 21A of the robot arm 21 within a predetermined working range and direct it in any direction with a substantial solid angle forward. It is possible.

That is, the manipulator robot 20 holds the laser head portion 13 of the laser beam irradiation device 10 together with the image acquisition portion 30 attached to the distal end portion 21A of the robot arm 21, and the manipulator robot 20 includes the processing target region of the object 1. The laser head unit 13 is moved together with the image acquisition unit 30 within the work area by the robot arm 21, and the laser head unit 13 of the laser beam irradiation device 10 moves the laser head unit 13 forward in any desired direction at any position within the work area. When irradiating a laser beam to perform surface treatment of the object 1 and performing quality judgment, the image acquisition unit 30 can acquire a color image showing the surface condition of the object 1 during the surface treatment. It's becoming Here, the laser head unit 13 moves to a position separated from the surface of the object 1 by an irradiation distance that determines a spot diameter for obtaining a predetermined laser density.

The storage unit 54 stores values of hue (Hue), saturation (Saturation), and lightness (Value) in the HSV color space of the color image acquired by the image acquisition unit 30 . Note that the storage unit 54 may store luminance values obtained from the RGB components of the color image.

A method of acquiring a hue value (HSV hue determination value) in the HSV color space will be described with reference to FIG. 2(a) is a diagram showing the entire area of the object 1, and FIG. 2(b) is a schematic diagram of a partial color image of the object 1 acquired by the image acquiring unit 30. FIG.

As shown in FIG. 2(a), the surface preparation work is generally divided into several areas. For example, after finishing the surface treatment of the area A1, the surface treatment of the area B1 is performed. Note that FIG. 2A shows an example in which the object 1 is divided into 25 regions, but the method of dividing the regions is not particularly limited, and the size of the object 1 can be determined as appropriate. It should be decided. The quality determination process is carried out by irradiating laser light onto the object 1 in the process of undercoating and acquiring and analyzing an image including light emitted by the undercoating.

FIG. 2B shows an example of the color image P1 acquired by the image acquisition section 30. As shown in FIG. The color image P1 is a color image including light emitted from the background when the object 1 is irradiated with laser light targeting the area A1. The color image P1 is an image acquired by the image acquisition unit 30 at a predetermined frame rate (eg, 30 frames/second, 60 frames/second, etc.).

As shown in FIG. 2B, the color image P1 is composed of a plurality of pixels (a, 1), (b, 1), (c, 1) . . . (m, n). The data processing unit 52 acquires the HSV hue determination values of each pixel (a, 1), (b, 1), (c, 1) . . . (m, n) over the entire area of the color image P1. Similarly, the data processing unit 52 acquires the HSV hue determination value of each pixel for color images other than the color image P1.

Further, the storage unit 54 stores a threshold value (HSV hue determination value) used as a criterion for determining whether or not the quality of the object is good. The threshold value is a predetermined value for quality judgment (color judgment). , 70%). In FIG. 2(b), the light portion emitted by the base is located on the line connecting (a, 7) and (m, 6), and the total area ratio of each color included in the light portion emitted by the base is If the value is 100%, the threshold may be set so that the ratio of the blue area is 70%. The “blue area” referred to here is an area within the range of 180 to 240 in terms of hue values obtained by converting the RGB components of a color image into the HSV space, for example. Red indicates a hue value in the range of -60 to 60, and green indicates a hue value in the range of 60 to 180.

When the number of laser light irradiations to the object is small, the light portion emitted by the base is mainly red. As the deposit is removed from the strip, the light portion emitted by the substrate changes to a bluer color. Therefore, when the blue area ratio contained in the light portion emitted from the base exceeds a certain value, it is considered that deposits such as scale and rust have been removed, and the value at that time can be set as the threshold value.

It should be noted that the threshold at which the ratio of the blue area is 70% is merely an example, and the threshold can be set according to any criteria. For example, the threshold value is an arbitrary value with which it can be determined that blue is the main color among the colors included in the light portion emitted by the background. The threshold value may be a value of 70% or less, but the higher the percentage of the blue area is than 70%, the more reliable the quality of the object can be. Alternatively, considering that the ratio of the red area is high for the pixels corresponding to the adhering matter in the color image, the threshold is set so that the ratio of the area of red is, for example, a predetermined ratio (for example, 20%) or less. May be set. Furthermore, the threshold value may be set based on the area value of any two or more colors of red, green, and blue.

In addition, as shown in FIG. 3, the laser head section 13 of the laser beam irradiation device 10 is provided with a biaxial galvanomirror mechanism 130 consisting of two motors 131X and 131Y and two mirrors 132X and 132Y. .

The two-axis galvanomirror mechanism 130 can scan the laser light L supplied from the laser oscillator 11 through the optical fiber 12 by independently changing the reflection angle of the laser in the X-axis direction and the Y-axis direction. It is possible.

The two-axis galvanomirror mechanism 130 functions as scanning means for moving the irradiation position of the laser light L within the processing target region of the object 1 .

That is, the mirror 132X is rotated around the Z-axis by the motor 131X, thereby scanning the object 1 with the laser light L in the X-axis direction.

Also, the mirror 132Y is rotated around the X-axis by the motor 131Y, thereby scanning the object 1 with the laser light L in the Y-axis direction.

The two mirrors 132X and 132Y in the two-axis galvanomirror mechanism 130 can be replaced with polygon mirrors.

That is, in a state where the position of the laser head portion 13 of the laser beam irradiation device 10 is fixed, the laser beam can be irradiated within a predetermined range.

In scanning with a galvanometer mirror or a polygon mirror, the optical axis coincides with the normal direction only at one point, and the focal position of the laser light L is positioned in an arc. irradiates the object 1 with laser light L through a telecentric f-θ lens (or a telecentric optical system having optical characteristics equivalent to the telecentric f-θ lens) 133 . That is, in the laser irradiation by scanning with the carbonometer mirror, the focal length changes to the object 1, so it is necessary to restrict the laser irradiation range so that the irradiation position of the laser light L is scanned within a range in which the decrease in the laser processing capacity is small. There is

The image acquisition unit 30 attached to the distal end portion 21A of the robot arm 21 together with the laser head unit 13 of the laser beam irradiation device 10 is imaging means for acquiring, for example, a color image showing the surface condition of the object 1. be.

Here, as the image acquiring unit 30, a video camera is attached to the distal end portion 21A of the robot arm 21 of the manipulator robot 20 together with the laser beam irradiation device 10, and the object being irradiated with the laser beam by the laser beam irradiation device 10 is detected. A color image showing the surface condition of the object 1 can be obtained. Specifically, the image acquisition unit 30 acquires a color image (RGB image) including light emitted from the background at a predetermined frame rate (eg, 30 frames/second, 60 frames/second, etc.).

Then, the integrated control device 50 performs trajectory control so that the laser head portion 13 of the laser beam irradiation device 10 attached to the tip portion 21A of the robot arm 21 passes through the predetermined base treatment work trajectory of the manipulator robot 20. The robot control unit 22 is controlled by the data arithmetic processing unit 53, and the operation of the laser beam irradiation device 10 is controlled to automatically control a series of base processing operations by the base processing device 100. FIG.

In the substrate processing apparatus 100, the manipulator robot 20 is basically controlled by programming the motion trajectory by teaching in advance using the robot control unit 22.

That is, in automatically controlling a series of surface treatment operations by the surface treatment apparatus 100, the integrated control device 50 uses the object 1 as three-dimensional curved surface shape data representing the three-dimensional curved surface of the processing target region of the object 1. The three-dimensional CAD data designed by the three-dimensional CAD of No. 1 is acquired in advance, and the operation of the manipulator robot 20 is initially taught based on the shape of the object 1 and registered in the robot control unit 22 by the trajectory control data arithmetic processing unit 53. do.

However, the robot control method is not limited to this method. For example, although not shown, a camera for measuring the three-dimensional shape of the object 1 may be provided in the work area for surface treatment, or a camera for measuring the three-dimensional shape may be provided at the tip 21A of the robot arm 21. , the measurement result of the three-dimensional camera may be acquired as three-dimensional data.

In the substrate processing apparatus 100, the general control unit 50 creates dividing element data for polygonally approximating the three-dimensional curved surface of the processing target area in the data processing unit 52 based on three-dimensional CAD data acquired in advance. Based on the created segmented element data, the apex, the center of gravity and the normal vector of each segmented element are calculated to determine the laser irradiation pattern. , and the laser control unit 51 irradiates the divided elements with the galvanomirror control of the laser beam irradiation device 10. As shown in FIG. The center of gravity of the element is moved as a target point, and the laser is irradiated in order. Here, FIG. 4 shows the movement of the robot trajectory with respect to part of the laser irradiation to each of the dividing element triangles .DELTA.1, .DELTA.2, .DELTA.3 . . . be.

That is, in the substrate processing apparatus 100, the trajectory control data arithmetic processing unit 53 of the general control unit 50 performs robot control of the manipulator robot 20 based on the determined irradiation pattern to move between the divided elements. 20 receives a signal from the robot control unit 22 indicating that the laser beam has reached a predetermined position. The laser beam is scanned in the splitting element by the above galvanomirror control, a laser irradiation completion signal is received from the laser control unit 51, and a start command to move to the next irradiation position is sent to the robot control unit 22, thereby setting in advance. By repeatedly irradiating laser light from the laser light irradiation device 10 from the laser irradiation start position to the end position for each processing area, the base treatment work for the entire processing target area of the object 1 is performed.

As described above, in the substrate processing apparatus 100, the trajectory control data arithmetic processing unit 53 performs robot control of the manipulator robot 20 to move between the divided elements, and the laser control unit 51 controls the galvanometer mirror of the laser beam irradiation device 10. By scanning the inside of the dividing element with a laser beam, even if the object 1 is a three-dimensional curved surface treatment object having a complicated shape or a large area shape, the surface treatment can be performed reliably and efficiently by laser irradiation. It can be done.

Further, in the surface preparation apparatus 100, the image acquisition unit 30 of the quality determination device 60 sequentially acquires images of the irradiated area of the object irradiated with the laser beam, and performs quality determination processing of the object 1. FIG. The quality determination process according to the present invention is executed according to the procedure shown in the flowchart of FIG.

First, in the color image acquisition step ST01, the image acquisition section 30 acquires a color image. Specifically, as shown in FIG. 2(b), a color image P1 including the light emitted from the base is obtained for the region of the object 1 in which the base treatment is being performed. When acquiring a color image by the image acquisition unit 30, the imaging conditions may be controlled so that the HSV space is not saturated.

In the next HSV hue determination value acquisition step ST02, the HSV hue determination value of the color image acquired by the data processing unit 52 is acquired. Specifically, as shown in FIG. 2B, HSV hue determination is performed for each pixel (a, 1), (b, 1), (c, 1) . . . get the value.

In the next brightness calculation step ST03, the brightness value (brightness value) of each pixel (a, 1), (b, 1), (c, 1), . . . in the HSV space is calculated. Specifically, the brightness value is calculated by converting the color image P1 into image information in HSV space having hue H, saturation S, and brightness V. FIG.

In the next color determination step ST04, based on the calculated brightness value, a color determination process is performed for pixels having brightness above a certain level. In other words, the area corresponding to the pixels having the lightness above a certain level is considered to be the area corresponding to the light emitted from the background. For example, in FIG. 2(b), the regions having brightness above a certain level are (a, 7), (b, 7), (c, 7), (d, 7), . . . (m, 6). If it is a region, it can be considered that the light emitted by the base exists in these regions. For use in quality determination processing, the HSV hue determination value of the area corresponding to the light emitted by the background is obtained.

In the next quality judgment step ST05, the quality is judged based on the color (HSV hue judgment value) of the area corresponding to the light emitted from the background. For example, if there are many red areas, it is considered that rust or other deposits remain, and the judgment result is that the quality is poor. Since the kimono is considered to have been removed, the determination result that the quality is good is obtained.

Note that the quality may be determined based on the color of a part of the area corresponding to the light emitted from the background. For example, in the example shown in FIG. 2(b), the entire area of the object 1 irradiated with the light emitted by the background is shown in (b, 7), (c, 7), and (d, 7). The quality may be determined based on the HSV hue determination values of only some pixels (regions). By limiting the area of the quality determination process in this way, the processing load can be reduced. Furthermore, the quality may be determined based on the color of the entire object 1 .

FIG. 6 shows an example of determination results. FIG. 6(a) is a diagram conceptually showing an image including light emitted by a background obtained, for example, when the object 1 is irradiated with laser light 20 times. The straight line portion in the figure indicates the light emitted by the base, and the scale existing around the light emitted by the base is indicated by "x" marks. After 20 laser beam irradiations, the scale was not sufficiently removed, and many "x" marks were present on and around the light emitted from the base in FIG. 6(a). The scale indicates red (R) in a color image, and when a large amount of scale remains, the proportion of red in the HSV hue determination value of each pixel is relatively high. For example, assume that the HSV hue determination value of a certain pixel is "red: 30%, green: 20%, blue: 50%". In this case, it is determined that scale has not been removed because the blue value is 50% compared to the threshold blue value of 70% blue.

FIG. 6(b) is a diagram conceptually showing an image including light emitted by the base obtained when the object 1 is irradiated with the laser light 30 times. At the stage of irradiating the laser beam 30 times, the scale was sufficiently removed, and the ratio of "x" existing on and around the light emitted from the base in FIG. decreased in comparison. For example, the HSV hue determination value of a certain pixel is "red: 10%, green: 10%, blue: 80%". In this case, it can be determined that the scale has been removed because the blue value is 80% compared to the threshold blue value of 70% blue.

The overall control device 50 in the surface treatment apparatus 100 can also apply the quality determination process to the object 1 after surface treatment. Specifically, in the general control unit 50, the trajectory control data arithmetic processing unit 53 performs robot control of the manipulator robot 20 to move between the divided elements, and the laser control unit 51 performs galvanometer mirror control of the laser beam irradiation device 10. In scanning the divisional elements with the laser beam, the color image of the object 1 is acquired by the image acquisition unit 30 after the base treatment by the laser irradiation within the first processing range (divided element) of the object 1 is completed. , the data processing unit 52 calculates the lightness in the HSV space of the acquired color image. With reference to the calculated lightness value, an HSV hue determination value is obtained for an area having a lightness value equal to or higher than a certain value, and is compared with a preset threshold to determine whether or not the processing quality is equal to or higher than a predetermined processing quality. If the processing quality is determined to be insufficient, the laser irradiation device 10 again irradiates the processing range (divided element) for which the processing quality is determined to be insufficient. By doing so, the base treatment can be reliably performed by laser irradiation.

That is, in the surface treatment apparatus 100, the surface treatment method according to the present invention is automatically executed according to the procedure shown in the flow chart of FIG.

In the initial element setting step ST1, as the initial setting of the surface treatment, the number of divisions of the color image of the object 1 is set, and the laser irradiation conditions for each element (for example, the irradiation distance and laser scanning speed that determine the laser density). , quality judgment conditions, thresholds, etc. Here, as a method for setting the laser density, the laser spot diameter determined based on the laser irradiation distance and the scanning speed, which is the moving distance of the laser spot per laser pulse, can be determined from the spot diameter. In other words, if the laser irradiation distance is determined, the laser spot diameter and the laser scanning speed are determined based thereon. For example, if the laser spot diameter is determined as d (μm), the laser scanning speed is determined within the range of d×(1/√2˜1). Therefore, hereinafter, the laser density is expressed as determined based on the laser irradiation distance.

In the initial element setting step ST2, the processing element counter is set as the first element, and in the processing element determination step ST3, the manipulator robot 20 is moved to the element corresponding to the processing element counter K to The irradiation standby of the laser beam irradiation device 10 attached to is performed.

In the next surface treatment ST4, the surface treatment for the element is performed under the conditions set in the initial element setting step ST1.

In the next color information obtaining step ST5, the image obtaining unit 30 obtains color information (HSV hue determination value) included in the color image in each divided area indicating the surface condition of the object 1 .

Then, in the next processing quality judgment step ST6, the data processing section 52 of the general control device 50 acquires the HSV hue judgment value from the color image. As a result, when the value of blue is equal to or greater than the threshold, it is determined that the quality of the object 1 is good.

If the determination result in the processing quality determination step ST6 is NG, that is, if the base processing in the processing range (divided element) does not reach the predetermined processing quality, in the irradiation distance correction step ST7, how much laser irradiation density is insufficient, and the laser irradiation distance is corrected by the shortage so that the laser density is appropriate.

In the irradiation distance correction step ST7, based on the color image in the processing range (divided element) during base processing obtained by the image acquisition unit 30, the laser beam irradiation device 10 corrects the processing range (divided element) and/or the next processing. Modify the laser density that irradiates the area (dividing element).

That is, if the quality result for that treatment area is below the target level, then for that treatment area and/or subsequent treatment areas, the laser density is increased and the throw distance is increased to achieve the target quality level. On the contrary, if the quality judgment result is higher than the target level, it means that the laser density is applied more than necessary, which is wasteful in terms of energy cost and processing time. For the treatment area and/or subsequent treatment areas, the throw distance is modified so that the laser density is reduced and the target quality level is achieved.

Then, returning to the processing element determination step ST3, the laser light irradiation device 10 irradiates the laser light onto the processing range (divided element) again to perform the base processing. The number of times of re-undercoating by laser is not particularly limited, and may be repeated until a good judgment result of the quality of the object 1 is obtained.

In the general control unit 50 in the surface treatment apparatus 100, a function for setting a laser irradiation distance for obtaining a required laser density according to at least one of the required material of the object, the required processing quality, and the processing time, or A table value is provided, and the laser irradiation distance for obtaining the laser density corresponding to the quality level is set based on the function or table value.

If the determination result in the processing quality determination step ST6 is OK, that is, if the base processing in the processing range (divided element) has reached a predetermined processing quality, the process proceeds to ST8 to move to the next element.

In the next processing end determination step ST8, it is determined whether or not the base processing of all processing ranges (divided elements) has been completed.

If the processing element counter K is less than N, which is the number of divided elements, in this processing end determination step ST8, that is, if there remains a processing range (divided elements) for performing base processing, in ST9, the processing element counter K is counted up by one, and the process returns to the surface treatment step, and the manipulator robot 20 is moved to the next processing area (divided element), and the laser light irradiation device 10 irradiates the laser beam to perform the surface treatment. Further, when the processing element counter K becomes equal to the number of divided elements N, that is, when the surface preparation of all the processing ranges (divided elements) is completed, the surface preparation of the object 1 by the surface preparation apparatus 100 ends. .

Here, the shortage of the laser density depends on the brightness level obtained in the HSV space or the color image information obtained by the color imaging means. In the case of II, the irradiation distance is corrected in order to increase the laser density by the amount that corrects this level difference.

Then, it is desirable to determine the correction of the shortfall of the irradiation distance for each divided element in the irradiation distance correction step ST7 based on the following temporary smoothing formula.

<Insufficient correction amount> = <Previous correction amount> x (1-α) + <Current correction amount> x α

Here, α (0≤α≤1) is a weighting coefficient, which determines how much the correction effect based on the results of the current element is reflected. In the case of α=1, it means that the modified portion of the current element is used as it is. Normally, it is determined within the range of 0≦α≦1 while checking the actual quality results. By doing so, it is possible to obtain an average correction amount without being greatly affected by data of a specific element.

Regarding the <current correction amount> at the first element K=1, there are cases where it starts from 0. A table set for each type and quality level of an object is provided in a storage device equipped in the laser control unit 51 of 50, and stored in the table. A method of quoting the obtained numerical value from the table and using it as an initial value is effective.

In the background processing method shown in the flowchart of FIG. 7, the case where color images are acquired for all divided elements and the quality is judged is shown. is effective, but for objects with relatively low quality levels, it may be inefficient to make quality judgments for all segmented elements.

For such an object, quality judgment is not performed for all divided elements, but the divided areas are grouped together based on the number or range specified in advance, and then aggregated. When the background processing in the group of divided elements has been completed, based on the color image acquired by the image acquisition unit in the representative element (such as the central element or the last element of the element group), the following aggregated division Correct the laser irradiation distance for the element group and irradiate.

A background processing method in which the division elements are collectively grouped and the background processing is performed within a group of divided elements will be described with reference to the flowchart of FIG.

In the base processing method shown in the flowchart of FIG. 8, the processing steps ST2, ST3, and ST9 shown in FIG. conduct. Let m be the number of element groups to be aggregated, and in order to count the number of elements to be aggregated, a new aggregation counter J and an element group counter L related to aggregation are introduced in ST2, and a processing element counter K is introduced in ST3. is calculated as K=m(L−1)+1.

In ST4, the group of m elements aggregated is subjected to background processing, and in ST10, it is determined whether or not the number of background processing is equal to the number of aggregation m. Returning to ST3, when it becomes equal to m, the background processing for the aggregate portion is completed.

A color image is obtained in ST5 for a preset representative element (the central element or the last element of the element group) for the aggregated m element group, and the quality is judged in ST6. Here, for example, if the representative element is an intermediate element, select the element number K = m (L - 1) + m / 2 (rounded off), and if the final element is the element of K = m (L - 1) + m select.

If the determination result in the processing quality determination step ST6 is NG, that is, if the surface treatment in the processing range does not reach the predetermined processing quality, it is determined to what degree the laser irradiation density is insufficient in the irradiation distance correction step ST7. The laser irradiation distance is corrected by the shortfall so that the appropriate laser density is obtained.

In the irradiation distance correction step ST7, based on the color image in the processing range (divided element group) during base processing obtained by the image acquisition unit 30, the laser beam irradiation device 10 corrects the processing range (divided element group) and/or the next Correct the laser density irradiated to the processing range (dividing element group) of .

In ST12, the group of m aggregated elements (K=m(L-1)+1 to mL) is again subjected to surface treatment. Here, re-undercoating with laser is performed only once. This satisfies the quality target with the one rework, as the laser density is modified to bring the quality result within the target level, as explained above. The number of times of reprocessing is, of course, not limited to one, but it is desirable to limit the number of reprocessing to an appropriate number because the efficiency decreases as the number of times of reprocessing increases.

Then, in ST9, the processing element group counter L is incremented by one and the aggregation count J is initialized to J=1. 20 is moved to irradiate laser light from the laser light irradiation device 10 to perform base treatment. Do this over the entire area.

As described above, in the surface preparation apparatus 100, the color image representing the surface condition of the object 1 is acquired by the image acquisition unit 30, and the predetermined processing is performed based on the color image acquired by the data processing unit 52 of the integrated control unit 50. It is determined whether or not the quality is higher than or equal to the quality, and if the quality determination level is lower (inferior) than the target quality level, the target quality level is secured by performing laser irradiation again with the laser beam irradiation device 10. can do.

That is, in the surface treatment apparatus 100, by quantitatively evaluating the quality level, which has conventionally been qualitatively evaluated, the laser irradiation conditions are appropriately set according to the required quality level, and the surface treatment is performed. Quality can be improved.

Further, in the general control unit 50 in the surface treatment apparatus 100, when the quality result of the first processing range is lower than the target level, the laser light irradiation device 10 irradiates the laser beam again, and for the subsequent processing range, Laser irradiation is performed by increasing the laser density and changing the irradiation distance so as to obtain the target quality level. On the other hand, if the quality judgment result is higher than the target level, it means that the laser density is more than necessary, which is wasteful in terms of energy cost and processing time. On the other hand, laser irradiation is performed by changing the irradiation distance so that the laser density is lowered and the target quality level is obtained. In the surface treatment apparatus 100, in the irradiation distance correcting step ST7, the irradiation distance of the laser light by the laser light irradiation device 10 is adjusted according to the processing quality evaluation result based on the color image by the image acquisition unit 30 in the processing quality judgment step ST6. is corrected so as to have an appropriate laser density on the surface of the object 1, as shown in FIG. 9, the laser density (spot diameter and laser scanning speed determined based on the spot diameter) can be set.

Here, the laser beam generated by the laser oscillation unit 11 of the laser beam irradiation device 10 has the power necessary to remove deposits (for example, a paint film applied to the surface) of the object 1 by laser ablation. Either continuous light or pulsed light may be used as long as it is a light source. It is possible to perform a surface treatment operation for removing deposits on the object 1 by the set laser irradiation.

Therefore, in the surface treatment apparatus 100, the surface treatment by laser irradiation using the laser beam irradiation apparatus 10 is automatically performed from the first processing range to the last processing range, thereby performing the entire processing area of the object 1. Therefore, it is possible to reliably and efficiently perform a surface treatment having a predetermined surface treatment quality.

Here, in the data processing unit 52 of the integrated control unit 50 in the surface preparation apparatus 100, the image acquisition unit 30 is attached to the distal end portion 21A of the robot arm 21 of the manipulator robot 20 together with the laser beam irradiation device 10. A color image showing the surface condition of the object 1 being irradiated with the laser beam by the laser beam irradiation device 10 is acquired by a video camera, and the processing quality is judged by the HSV hue judgment value. (eg, HLS component values) may be used to determine processing quality.

In the above embodiment, the hue value obtained by converting the color image into the HSV space was used as the threshold value, but the present invention is not limited to this, and other The quality of the object 1 may be determined by using a value such as a hue obtained by conversion to the color space of , as a threshold value.

In this embodiment, the image acquisition unit 30 is attached to the distal end portion 21A of the robot arm 21 together with the laser head unit 13, but is not limited to this case. For example, if the image acquisition unit 30 is located within the processing target area of the object 1 and is at a position where a color image showing the surface condition of the object 1 can be acquired, the image acquisition unit 30 can be positioned at a position different from the manipulator robot 20 . There is also a method of installing independently at a position and acquiring a color image showing the surface condition of the object 1 .

In the above embodiment, the manipulator robot 20 holds the laser beam irradiation device 10 for irradiating the object 1 with a laser beam, moves it within the work area including the processing target area of the object 1, and irradiates the laser beam. A detailed description has been given of the method of irradiating the object 1 with laser light by using the device 10 to carry out the undercoating. According to the above method, it is possible to automatically perform surface treatment on the object 1 under optimum laser conditions for ensuring a predetermined surface treatment quality.

However, the present invention is not limited to the above method, and laser light irradiation comprising a laser oscillation unit 11 and a laser head unit 13 connected to the laser oscillation unit 11 via an optical fiber 12 in the surface treatment apparatus 100. It is also possible for the operator to take out the device 10, hold the laser head section 13 by hand, and carry the portable image acquisition section 30 for work.

The method for the operator to work while holding the laser head section 13 is executed according to the procedure of ST20 to ST25 shown in the flow chart of FIG.

In ST20, the operator directly inputs the laser irradiation conditions for the object 1 (for example, the irradiation distance and laser power that determine the laser density) to the laser oscillation unit 11 as initial settings for the surface treatment.

In ST21, the operator moves the laser head held in his/her hand to irradiate a range that can be irradiated with the laser. Here, if the target material is small, it is possible to perform the surface treatment on the entire surface in one operation, but if the target material is large, the surface treatment is performed in multiple steps. . To maintain the laser irradiation distance, the laser head 13 is provided with a guide light (using an LED or the like) that indicates that the irradiation distance is within the allowable range, and the guide light enters a predetermined range (within the allowable range of the irradiation distance). The operator will carry out this while visually confirming.

In ST22, the portable image acquisition unit 30 is used to acquire the HSV hue determination value of the color image representing the surface condition of the representative portion of the portion of the object 1 where the laser irradiation has been completed, and the acquired HSV hue determination value is Evaluate the treatment quality according to the substrate treatment criteria.

In ST23, if the determination result in the processing quality determination step ST22 is NG, that is, if the base processing in the first processing range (division element) has not reached a predetermined processing quality, the required laser irradiation conditions (laser irradiation distance etc.) is corrected based on the judgment of the operator, and laser irradiation is performed again.

If the judgment result in the processing quality judging step ST22 is OK, that is, if the base processing of the first processing range (division element) has reached a predetermined processing quality, then in ST24, the presence or absence of the next processing target portion is determined. to judge.

In ST25, if the determination result in ST24 is YES, that is, if there is a portion to be processed next, in ST25, a new laser irradiation condition is set in consideration of the correction amount of the laser irradiation condition, and the next processing is performed. A base treatment is performed by irradiating the target portion with a laser.

By sequentially performing steps ST20 to ST25 for all the processed portions of the object 1, the surface treatment of the entire object 1 is completed.

According to the above method, it is difficult to perform high-quality surface treatment compared to the automatic treatment using the manipulator robot 20 described above. It becomes possible to

<Second embodiment>
Next, a quality determination device, a quality determination method, a base processing device, and a base processing method according to a second embodiment of the present invention will be described. In the following description of the second embodiment, the description of points common to the above-described first embodiment will be omitted, and differences from the first embodiment will be described.

2nd Embodiment is a form which performs the determination process of the quality of the target object 1 using machine learning. As shown in FIG. 11, the data processing section 52 has a machine learning section 52a. In the first embodiment, the threshold was stored in the storage unit 54 in advance, but in the second embodiment, the threshold calculated or updated by machine learning is stored in the storage unit 54 . Specifically, the machine learning unit 52a machine-learns the relationship between the HSV hue determination values and determination results of a plurality of color images determined to be of good quality as a result of irradiating the object 1 with laser light. A threshold is generated by machine-learning the relationship between the HSV hue determination value of the color image of the object 1 and the determination result, and the quality is determined based on the generated threshold. A threshold generated or updated as a result of machine learning is stored in the storage unit 54 . For machine learning, for example, a technique such as deep learning using a neural network is used.

According to the second embodiment, even if the determination result is inaccurate with the existing threshold, the threshold can be updated to an accurate value by performing machine learning. As a result, it is possible to accurately determine whether or not the adhering matter has been removed from the object as a result of irradiating the laser beam. That is, it is possible to improve the accuracy of the quality determination process.

Although one embodiment and examples of the present invention have been described in detail above, those skilled in the art will understand that many modifications are possible without substantially departing from the novel matters and effects of the present invention. would be easy to understand. Therefore, all such modifications are intended to be included in the scope of the present invention.

For example, a term described at least once in the specification or drawings together with a different, broader or synonymous term can be replaced with the different term anywhere in the specification or drawings. Also, the configurations of the quality determination device and the surface treatment device are not limited to those described in the embodiment and examples of the present invention, and various modifications are possible.

1 Object, 10 Laser Light Irradiator, 11 Laser Oscillator, 12 Optical Fiber, 13 Laser Head, 20 Manipulator Robot, 21 Robot Arm, 21A Tip, 22 Robot Control Unit, 23, 30 Image Acquisition Unit, 35 Color Chart , 50 integrated control device, 51 laser control unit, 52 data processing unit, 52a machine learning unit, 53 trajectory control data arithmetic processing unit, 54 storage unit, 60 quality determination device, 100 surface treatment device, 130 galvanomirror mechanism, 131X, 131Y motor, 132X, 132Y mirror, 133 telecentric f-θ lens

The present invention relates to a quality determination device used in a substrate processing apparatus that performs substrate processing by irradiating a laser beam onto an object using a laser beam irradiation device, wherein when the laser beam is irradiated onto the substrate that is the object, the an image acquisition unit that acquires a color image including light emitted from a background; color information of each pixel existing in an area where the light emitted from the background is assumed to be located in the image acquired by the image acquisition unit and set in advance. a judgment unit that judges the quality of the object by comparing the thresholds that have been obtained, wherein the judgment unit converts the RGB components of the color image acquired by the image acquisition unit into image information in another color space. , a region of pixels in which lightness or luminance in the other color space indicates a predetermined value or more is regarded as a region in which the light emitted by the background is located, and color information in the region in which the light emitted by the background is regarded as located is the above It is characterized in that it is determined that the quality of the object is good when the ratio of pixels within a predetermined range indicating the background color exceeds a predetermined value.

In the quality determination device according to the present invention , the determination unit converts the RGB components of the color image acquired by the image acquisition unit into image information in an HSV space (hue H, saturation S, brightness V), and converts the HSV The light emitted from the background is assumed to be located in a pixel area in which the lightness V value in the space is a predetermined value or more, and the hue H value in the area where the light emitted by the background is assumed to be located is a predetermined value indicating the color of the background. It can be determined that the quality of the object is good when the ratio of the pixels within the range exceeds a predetermined value.

The present invention also provides a substrate processing apparatus comprising a laser beam irradiation device and a moving device that holds the laser beam irradiation device and moves the laser beam irradiation device within a work area including a processing target region of an object. an image acquisition unit that acquires a color image including light emitted by the base, which is a target object, when the base is irradiated with laser light; a judgment unit for judging the quality of the object by comparing the color information of each pixel present in the region assumed to be the same and a preset threshold; and the determination unit converts the RGB components of the color image acquired by the image acquisition unit into image information in another color space, and the lightness value or luminance value in the other color space is equal to or greater than a predetermined value. is regarded as the area where the light emitted by the background is located, and the pixel area where the color information in the area where the light emitted by the background is regarded as being located is within a predetermined range indicating the color of the background If the ratio exceeds a predetermined value, it is determined that the quality of the object is good, and it is determined whether or not the quality is equal to or higher than the predetermined quality, and the control device determines whether the processing quality is insufficient for the portion determined by the determination unit to be insufficient. In the method, the laser irradiation is performed again by the above-described laser light irradiation device, so that the entire object is subjected to a surface treatment having a predetermined surface treatment quality.

The present invention relates to a quality determination method used in a substrate treatment method in which an object is irradiated with a laser beam by a laser beam irradiation device to perform substrate treatment, and when the laser beam is irradiated onto the substrate, which is the object, the quality determination method is used. an image acquisition step of acquiring a color image including light emitted by a background; and color information of each pixel existing in an area where the light emitted by the background is assumed to be located in the image acquired in the image acquisition step and set in advance. and determining the quality of the object by comparing the obtained threshold values , wherein the determining step converts the RGB components of the color image acquired in the image acquiring step into image information of another color space. and a region of pixels in which the lightness value or luminance value in the other color space indicates a predetermined value or more is regarded as the region where the light emitted by the background is located, and the color in the region where the light emitted by the background is considered to be located It is characterized in that it is determined that the quality of the object is good when the ratio of the area occupied by the pixels whose information is within the predetermined range indicating the background color exceeds a predetermined value.

In the quality determination apparatus according to the present invention , in the determination step, the RGB components of the acquired color image acquired in the image acquisition step are converted into image information (hue H, saturation S, brightness V) in HSV space. , the light emitted by the background is assumed to be located in a pixel area in which the lightness V value in the HSV space is a predetermined value or more, and the hue H value in the area where the light emitted by the background is assumed to be the color of the background It can be determined that the quality of the object is good when the ratio of the pixels within the predetermined range indicating the above exceeds a predetermined value.

The present invention is a surface treatment method for removing deposits on an object or changing the state of the surface of the object, comprising: a surface treatment step of irradiating the object with a laser beam from a laser beam irradiation device to perform the surface treatment; , each pixel existing in an area where the light emitted by the background is considered to be located in the color image obtained by the image acquisition unit and including the light emitted by the background when the base is irradiated with the laser light. and a processing quality determination step of comparing the color information of and a preset threshold value to determine the quality of the object , wherein the processing quality determination step includes RGB components of the color image acquired by the image acquisition unit is converted into image information in another color space, and an area of pixels indicating a lightness value or luminance value in the other color space that is equal to or greater than a predetermined value is regarded as an area where the light emitted by the background is located, and If the ratio of the area of pixels whose color information is within the predetermined range indicating the color of the background in the area considered to be located exceeds a predetermined value, the quality of the object is deemed to be good and the quality is equal to or higher than the predetermined quality. It is determined whether or not the processing quality is insufficient, and the laser irradiation device is used to irradiate the processing target region again with the laser beam irradiation device, so that the entire object has a predetermined base processing quality. It is characterized by performing a base treatment.

As described above, according to the present invention, the RGB components of a color image acquired by an image acquisition unit are converted into image information in another color space, and the lightness value or luminance value in the other color space is a predetermined value. A region of pixels indicating the above is regarded as a region in which the light emitted by the background is located, and a pixel region in which the color information in the region regarded as the location of the light emitted by the background is within a predetermined range indicating the color of the background. exceeds a predetermined value, it is determined that the quality of the object is good, so the accuracy of determining the quality of the object can be improved.

Claims (13)

A quality determination device used in a surface treatment apparatus that performs surface treatment by irradiating a laser beam on an object with a laser beam irradiation device,
an image acquisition unit that acquires a color image including light emitted by a base that is an object when the base is irradiated with laser light;
A judgment unit for judging quality of an object by comparing color information of each pixel existing in an area where the light emitted from the background is assumed to be located in the image acquired by the image acquisition unit with a preset threshold value. and,
Quality determination device comprising. The area where the light emitted by the background is considered to be located is one in which the lightness value or luminance value obtained by converting the RGB components of the color image obtained by the image obtaining unit into another color space is equal to or greater than a predetermined value. 2. The quality judgment device according to claim 1, wherein the region is an area in an object showing The judging unit determines that a ratio of a region within a range of 180 to 240 in a hue judgment value obtained by converting the RGB components of the color image acquired by the image acquiring unit into an HSV space exceeds a predetermined value. 3. The quality determination device according to claim 2, wherein the quality determination device determines that the quality of the object is good when the quality of the object is good. 3. The determining unit includes a machine learning unit that performs machine learning using a plurality of images determined to be of good quality among the plurality of color images sequentially acquired by the image acquiring unit. The quality judgment device according to any one of claims 1 to 3. a laser beam irradiation device;
a moving device that holds the laser beam irradiation device and moves the laser beam irradiation device within a work area including a processing target area of an object;
an image acquisition unit that acquires a color image including light emitted by a base that is an object when the base is irradiated with laser light;
A judgment unit for judging quality of an object by comparing color information of each pixel existing in an area where the light emitted from the background is assumed to be located in the image acquired by the image acquisition unit with a preset threshold value. and,
a control device for controlling the operation of the laser light irradiation device and the movement device;
with
The control device causes the laser beam irradiation device to irradiate the laser beam again on the portion determined to be insufficient in processing quality by the determination unit, thereby performing base processing having a predetermined base processing quality on the entire object. A substrate processing apparatus characterized by performing The control device is characterized in that, based on the color information obtained from the image of the surface of the object acquired by the image acquiring unit, the density of the laser beam irradiated to the object by the laser beam irradiation device is corrected. The substrate processing apparatus according to claim 5. A quality determination method used in a surface treatment method for surface treatment by irradiating a laser beam onto an object with a laser beam irradiation device,
an image acquiring step of acquiring a color image including light emitted from a base that is an object when the image acquisition unit irradiates the base with laser light;
A judgment step of judging the quality of the object by comparing the color information of each pixel existing in the area where the light emitted from the background is assumed to be located in the image acquired in the image acquisition step with a preset threshold value. and,
A quality determination method characterized by having The region where the light emitted by the background is considered to be located is a region in which the brightness value or luminance value obtained by converting the RGB components of the color image acquired in the image acquisition step into another color space is a predetermined value or more. 8. The quality determination method according to claim 7, wherein the area in the object indicates In the determination step, the ratio of the area occupied by the hue determination value within the range of 180 to 240 obtained by converting the RGB components of the color image acquired in the image acquisition step into the HSV space exceeds a predetermined value. 9. The quality determination method according to claim 8, wherein the quality of the object is determined to be good when the quality of the object is good. 3. The determining step comprises a machine learning step of performing machine learning using a plurality of images determined to be of good quality among the plurality of color images sequentially acquired in the image acquiring step. The quality judgment method according to any one of claims 7 to 9. A surface treatment method for removing deposits on an object or changing the condition of the surface of the object,
A surface treatment step of irradiating the object with a laser beam from a laser beam irradiation device to perform surface treatment;
The number of pixels existing in an area where the light emitted by the background is assumed to be located in the color image obtained by the image acquisition unit and including the light emitted by the background when the background is irradiated with the laser light. A processing quality determination step of comparing the color information with a preset threshold value to determine the quality of the object;
has
In the processing quality determination step, the region to be processed that has been determined to have insufficient processing quality is subjected to laser irradiation again by the laser beam irradiation device, so that the entire object has a predetermined surface processing quality. A base treatment method, characterized by performing treatment. In the base treatment step, a laser beam irradiation device for irradiating the object with a laser beam is held by a moving device, moved within a work area including the processing target region of the object, and the laser beam irradiation device moves the laser beam irradiation device. 12. The base treatment method according to claim 11, wherein the base treatment is performed by irradiating the object with a laser beam. 13. The method according to claim 11 or 12, wherein, in the process quality determining step, the laser density with which the object is irradiated is corrected based on the color image of the object acquired by the image acquiring unit. groundwork method.

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