JP2023061349A - Package type rotation pump unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a package type rotation pump unit capable of maintaining high pump performance to actualize a longer device life by preventing the overheat of internal air in a sealed casing even when a rotation pump embraced in the sealed casing is used as a vacuum pump in a high-vacuum-degree range.

SOLUTION: The package type rotation pump unit includes an electric rotation pump 200 and a sealed casing 1 embracing the electric rotation pump 200, and further includes a liquid-cooled heat exchanger 5 arranged in the sealed casing 1 and adapted to be cooled with cooling liquid supplied from a cooling liquid supply source 4 arranged outside the sealed casing 1, a blowing device 6 arranged in the sealed casing 1 for feeding internal air in the sealed casing 1 including heated air generated by air around a rotation pump 2 being heated with the operation of the rotation pump 2 to the liquid-cooled heat exchanger 5 so as to cool it, and a liquid-cooled flow path from the cooling liquid supply source connected in series therewith over the liquid-cooled heat exchanger and the rotation pump.

SELECTED DRAWING: Figure 1

COPYRIGHT: (C)2023,JPO&INPIT

Description

TECHNICAL FIELD The present invention relates to a package-type rotary pump unit comprising a rotary pump for sucking and discharging gas, an electric rotary pump having an electric motor for driving the rotary pump, and a sealed housing enclosing the electric rotary pump.

A conventional package-type rotary pump unit includes a pneumatic device such as a vacuum pump or blower that generates negative or positive air pressure, and a storage box that can accommodate a plurality of such pneumatic devices and can be soundproofed by housing them in a closed space. a blowing device for generating and exhausting a cooling airflow that flows substantially from bottom to top within the storage box so as to cool the interior of the storage box heated by the pneumatic device by taking in outside air; A water-cooled cooler provided for cooling by passing a cooling airflow therethrough, a cooler unit supplying cold water to the cooler, and controlling the temperature of the water to adjust the temperature of the cold water supplied to the cooler. and at least one of a water temperature control means for controlling the flow rate of cold water supplied to the cooler and a flow rate control means for controlling the flow rate so as to adjust the flow rate of the cold water supplied to the cooler. At least one shelf-like support on which the device is placed is provided, and the shelf-like support has an opening to allow the flow of the cooling airflow. A system (see Patent Document 1) has been proposed by the present applicant.

As an example of a rotary pump incorporated in a package-type rotary pump unit, as shown in FIG. a cylinder portion 10a, one end wall portion 10b provided on one end surface of the cylinder portion 10a, and the other end wall portion 10c provided on the other end surface of the cylinder portion 10a; Two rotary shafts 20A and 20B are arranged in parallel in the pump chamber 10 and rotate in opposite directions at the same speed, and the two rotary shafts 20A and 20B are respectively provided in the pump chamber 10 and mutually Two rotors 30A and 30B, which are rotated in a non-contact state and have hook-shaped claw portions so that the sucked gas can be compressed and discharged, the one end wall portion 10b and the other end wall portion 10c and a rotary pump (claw pump) provided with an exhaust-side opening 50 provided at a position facing a portion where the gas is compressed in the pump chamber 10. The exhaust-side opening 50 is a front-stage vent port 51 that communicates with the outside of the pump chamber 10 at the front stage where the gas compression ratio is maximized by the claw portions of the two rotors 30A and 30B. , a rear stage exhaust port (exhaust port 55), and when the rear exhaust port (exhaust port 55) is communicated with the outside of the pump chamber 10 to maximize the gas compression ratio, the front vent port 51 is closed by the rotor 30A. a pump chamber body portion provided by a cylinder portion 10a so as to form the pump chamber 10 and end wall portions 10b and 10c provided on both end surfaces of the cylinder portion; and the two rotors. A bearing body provided with a bearing portion 40 for bearing the two rotating shafts 20A and 20B so that the two rotating shafts 20A and 20B are supported in a cantilever manner by being arranged at one end of the two rotating shafts 20A and 20B, respectively. A claw pump has been proposed in which a pump body is provided in a divided structure so that a cooling gap is formed between the parts (see Patent Document 2).

According to the claw pump proposed by the present applicant, the exhaust-side opening 50 is composed of a front-stage vent 51 and a rear-stage exhaust port (exhaust port 55) which are separately opened. For this reason, for example, when the vacuum pump is used at a high degree of vacuum, unsuperheated outside air is sucked into the pump chamber 10 through the front-stage vent port 51, causing the exhaust gas to flow back through the rear-stage exhaust port (exhaust port 55). It is possible to prevent the pump chamber 10 from being overheated, thereby improving the pump performance.

Japanese Patent No. 5041849 (Claim 1, Fig. 1) Japanese Patent No. 6749714 (Claim 1, Fig. 3)

The problem to be solved with the package-type rotary pump unit is that in the conventional package-type rotary pump unit, cooling air is introduced from the outside and the air heated by the rotary pump is discharged to the outside of the housing. However, when the rotary pump is built in the sealed housing and the air heated by the rotary pump is not discharged outside the sealed housing, the inside of the sealed housing is effectively prevented from being overheated. It is that the means have not been considered. That is, when the inside of the closed housing is overheated by the operation of the rotary pump and the temperature of the internal air rises, it adversely affects the electric motor, electrical components, and the like, so appropriate temperature countermeasures are required.

SUMMARY OF THE INVENTION It is therefore an object of the present invention to prevent overheating of the internal air of a sealed housing even when a rotary pump enclosed in a sealed housing is used, for example, as a vacuum pump in a high degree of vacuum and generates a large amount of heat. To provide a package-type rotary pump unit capable of maintaining high pump performance and prolonging the life of the device by preventing it.

The present invention has the following configurations in order to achieve the above objects.
According to one embodiment of the package-type rotary pump unit according to the present invention, an electric rotary pump including a rotary pump for sucking and discharging gas and an electric motor for driving the rotary pump, and a sealed housing enclosing the electric rotary pump. A package-type rotary pump unit comprising Then, the air inside the sealed housing, which is arranged inside the sealed housing and contains heated air generated by heating the air around the rotary pump due to the operation of the rotary pump, is transferred to the liquid cooling heat exchanger. and a blower for directing cooling, a liquid cooling flow from the cooling liquid supply such that the rotary pump is also cooled by the cooling liquid from the cooling liquid supply that has cooled the liquid cooling heat exchanger. A line is connected in series across the liquid-cooled heat exchanger and the rotary pump.

Further, according to one aspect of the package-type rotary pump unit according to the present invention, the rotary pump includes a bearing body portion, a pump chamber body portion, and a first muffler portion, and pumps coolant from the coolant supply source. is connected in series so that the liquid cooling flow path from the cooling liquid supply source flows in the order of the liquid cooling heat exchanger, the bearing body portion, the pump chamber body portion and the first muffler portion. can be

Further, according to one aspect of the package-type rotary pump unit according to the present invention, the internal air circulating inside the sealed housing is disposed inside the sealed housing so as to cover the rotary pump. and a circulating air outlet through which the internal air containing the heated air is discharged.

Further, according to one aspect of the package-type rotary pump unit according to the present invention, the liquid cooling heat exchanger is connected to the circulating air outlet side, and the blower sucks the internal air to cause the circulating air. It can be characterized in that the air is connected to the liquid cooling heat exchanger so as to flow from the air inlet to the circulating air outlet and pass through the liquid cooling heat exchanger.

Further, according to one aspect of the package-type rotary pump unit according to the present invention, the rotary pump is a biaxial rotary pump, and one rotor rotary shaft is connected in series to the rotary shaft of the electric motor and is rotated. , a space on which the other rotor rotating shaft is synchronously rotated in the opposite direction to the one rotor rotating shaft through a gear, and which is an extension of the axial center where the other rotor rotating shaft is arranged The liquid cooling heat exchanger and the air blower are arranged in a space adjacent to a portion where the electric motor and the one rotor rotating shaft are connected.

Further, according to one aspect of the package-type rotary pump unit according to the present invention, the electric motor is provided with a blower fan for cooling the electric motor, which blows air so as to cool the electric motor. It can be characterized in that it is disposed on the side opposite to the side connected to one of the rotor rotating shafts and is provided so as to blow air toward the motor body.

According to the package-type rotary pump unit according to the present invention, when it is operated in a high-temperature environment, or when the rotary pump contained in the sealed housing is used as a vacuum pump in a high degree of vacuum and generates a large amount of heat. However, by preventing overheating of the internal air of the sealed housing, it is possible to maintain high pump performance, thereby achieving a particularly advantageous effect of prolonging the life of the device.

FIG. 3 is a block diagram schematically showing a liquid cooling flow and a circulating gas (air) flow inside the sealed housing of the package-type rotary pump unit according to the present invention; FIG. 2 is a block diagram schematically showing a liquid cooling flow and an exhaust flow of a form example of a package-type rotary pump unit according to the present invention; 1 is a perspective view showing the inside of a sealed housing, which is an example of the form of a package-type rotary pump unit according to the present invention; FIG. FIG. 4 is a perspective view showing a state in which the pump cover portion of the embodiment shown in FIG. 3 is removed; FIG. 4 is a plan view of an electric rotary pump mounted in the embodiment of FIG. 3; 6 is a plan view showing a state in which the pump cover portion of the embodiment shown in FIG. 5 is removed; FIG. 4 is a rear view of the embodiment of FIG. 3; FIG. 1 is a perspective view showing an appearance of a form example in which two electric rotary pumps of a package-type rotary pump unit according to the present invention are housed in two upper and lower stages; FIG. FIG. 9 is a perspective view showing the internal structure of the sealed housing of the form example of FIG. 8; FIG. 9 is a side view showing the internal structure of the sealed housing of the form example of FIG. 8; FIG. 9 is a perspective view showing the internal structure of the sealed housing of the form example of FIG. 8 with the switchboard removed; FIG. 9 is a front view showing the internal structure of the sealed housing of the form example of FIG. 8 with the switchboard removed; FIG. 2 is a cross-sectional perspective view showing a stepwise broken state to show the internal structure of a rotary pump (claw pump) mounted in a package-type rotary pump unit according to the present invention. 14 is a front perspective view of the embodiment of FIG. 13; FIG. FIG. 14 is a rear perspective view of the embodiment of FIG. 13; FIG. 14 is a front view of the embodiment of FIG. 13; 14 is a rear view of the embodiment of FIG. 13; FIG. FIG. 14 is a plan view of the embodiment of FIG. 13; FIG. 14 is a cross-sectional perspective view showing a bearing cooling liquid flow path in the embodiment of FIG. 13; FIG. 14 is an exploded view showing a coolant flow path forming surface, which is an inner surface of the first flow path forming portion in the embodiment of FIG. 13; FIG. 2 is an exploded view showing an exhaust flow path forming surface, which is an outer surface of a first flow path forming portion in the embodiment of FIG. 1; 1 is an exploded view showing a conventional rotary pump; FIG.

An example of a package-type rotary pump unit according to the present invention, in which a claw pump is mounted as an example of a rotary pump, will be described in detail below with reference to the accompanying drawings (FIGS. 1 to 21). An example of the form of the rotary pump according to the present invention is a vacuum pump, which is a water-cooled biaxial rotary pump (claw pump). However, the rotary pump according to the present invention is not limited to this form example, and includes a pump that can be used as a blower that uses the discharged gas as a product gas, and a uniaxial rotary pump such as a vane pump. It also includes those that use other liquids as cooling liquids.

The package-type rotary pump unit according to the present invention includes, as a basic configuration, an electric rotary pump 200 having a rotary pump 2 for sucking and discharging gas and an electric motor 3 for driving the rotary pump 2, and the electric rotary pump 200. A sealed housing 1 is provided.

It should be noted that the sealed housing 1 according to the present invention does not have to be strictly airtightly sealed, and gas (air in this embodiment) can flow sufficiently between the inside of the housing and the outside world. Any enclosure may be used as long as it forms a closed space limited to All you have to do is That is, in the sealed housing 1 according to the present invention, a slight gap is allowed, and structural members such as steel plates constituting the housing are brought into contact with each other without using a sealing material as in the present embodiment. The degree of hermeticity may be such that air circulation is sufficiently restricted.

In addition, the sealed housing 1 of the present embodiment has a rectangular box shape, and includes a housing frame portion 1a (see FIGS. 3, 9, etc.), a base portion 1b (see FIGS. 3, 9, etc.), and a housing cover. A portion 1c (see FIG. 8) is provided. The sealed housing 1 has a frame structure in which a housing frame portion 1a made of a square steel pipe, an angle steel, or the like is covered with a housing cover portion 1c made of a steel plate or the like.
Inside the sealed housing 1 are an electric rotary pump 200 having a rotary pump 2 and an electric motor 3, a liquid cooling heat exchanger 5, an air blower 6, a pump cover portion 25, a switchboard 8, a first muffler portion 31, a first 2 muffler portion 32, blower 9 for cooling electrical components, drain pan 91, various types of piping, various types of electrical wiring, and accessories for these are arranged.

Reference numeral 5 denotes a liquid-cooling heat exchanger, which is arranged inside the sealed housing 1 as shown in FIGS. It is provided to be supplied and cooled. That is, the cooling liquid supply source 4 is connected to the liquid cooling heat exchanger 5 via the cooling liquid supply connection port 4a and the cooling liquid supply pipe 4b. In FIG. 1, the flow of the coolant is schematically indicated by double-line arrows.

The liquid-cooling heat exchanger 5 of this embodiment is a so-called fin and tube housing in a rectangular box-shaped heat exchange chamber in which a heat exchange pipe 5a through which a cooling liquid passes is routed back and forth (zigzag). is provided in the form of In the rectangular box-shaped heat exchange chamber of the present embodiment, the rectangular inlet, which is the side into which the internal air (circulating air) is introduced, is connected to the circulating air outlet 25b of the pump cover 25, which will be described later. , and a rectangular outlet from which the internal air (circulating air) is discharged is connected to a blower device 6, which will be described later. This constitutes a fan cooler having the liquid-cooled heat exchanger 5 . Note that the detailed illustration of the liquid-cooling heat exchanger 5 is omitted because it is a general form. Further, in the liquid cooling heat exchanger 5, it is of course possible to appropriately and selectively set the form of the cooling liquid flow path and the form of the circulating air passage cooled by heat exchange.

Here, as the cooling liquid supply source 4, a liquid cooling device that cools liquid using a refrigeration cycle can be used. Depending on the location conditions, other cooling sources such as air (outside air), fresh water, seawater, ice, groundwater, etc. may be used, and more than one cooling source may be used in combination as appropriate. is. The cooling liquid in this embodiment is cooling water, which is supplied from the same cooling liquid supply source 4 that cools the exhaust gas discharged from the exhaust port 55, as will be described later.

A blower 6 is arranged inside the sealed housing 1 and contains heated air generated when the air around the rotary pump 2 is heated by the operation of the rotary pump 2. Means are provided for directing internal air to the liquid-cooled heat exchanger 5 for cooling. In addition, in FIG. 1, the flow of the internal air is schematically shown by a thick arrow.
The blower device 6 of this embodiment is an axial fan, and is arranged along the longitudinal direction of the electric rotary pump 200 so as to suck and discharge internal air. The air blowing device 6 is not limited to an axial fan, and other air blowing means such as a centrifugal fan (for example, a sirocco fan) may be used as appropriate.

According to the package-type rotary pump unit according to the present invention, when it is operated in a high-temperature environment, or when the rotary pump 2 contained in the sealed housing 1 is used as a vacuum pump in a high degree of vacuum, the amount of heat generated is reduced. Even in the case of a large air gap, it is possible to prevent overheating of the air inside the sealed housing 1, thereby maintaining high pump performance and prolonging the life of the apparatus, which is particularly advantageous. That is, the internal air in the sealed housing 1 is caused to flow by the air blower 6 and pass through the liquid cooling heat exchanger 5, thereby preventing the overheated air from stagnation around the rotary pump 2, and the internal air is efficiently discharged. It can be well circulated and cooled. Therefore, it is possible to appropriately suppress the temperature rise in the sealed housing 1 due to the heat generated by the rotary pump 2, etc., and prevent adverse effects on the electric motor 3, electrical components, etc., so that high pump performance can be maintained and the life of the device can be improved. can be prolonged.

In addition, all or most of the heat exhausted to the outside of the sealed housing 1 is mediated by the cooling liquid (cooling water) for heat exchange, so the heat radiation to the surroundings can be minimized, and the installation environment can be improved. There is an advantage that the influence given is extremely small. For example, it is possible to reduce the burden of air conditioning in the room where the packaged rotary pump unit according to the present invention is installed.
In addition, since the closed housing 1 can provide a closed structure, there is an advantage that the operation noise reduction effect is large. In addition, according to the example of the sealed structure using the sealed housing 1 according to the present embodiment, the noise can be reduced to 73 dB.
By forming a sealed structure with the sealed housing 1 in this way, the inflow and outflow of gas between the inside of the housing and the outside world is sufficiently restricted, so even in a high-humidity environment, the dew condensation inside the housing generated less. That is, if the cooling liquid can be supplied, the internal temperature of the closed housing 1 is less likely to be affected by the product installation environment (temperature and humidity), so it can be used in a wide environmental temperature and humidity range.
As will be described later, in this embodiment, the first muffler section 31 and the second muffler section 32 are housed in the sealed housing 1. Including the heat emitted from these muffler sections, It is configured to be able to cool the internal air of the sealed housing 1 .

In addition, in this embodiment, a circulating air inlet 25a is arranged inside the sealed housing 1 so as to cover the rotary pump 2, and into which the internal air circulating inside the sealed housing 1 is introduced; A pump cover portion 25 is provided so as to be provided with a circulating air outlet portion 25b through which the internal air containing the heated air is discharged. The installation position of the blower device 6 with respect to the pump cover portion 25 is limited to this embodiment as long as the internal air can flow so as to be introduced from the circulating air inlet portion 25a and discharged from the circulating air outlet portion 25b. It is also possible to appropriately and selectively set the positional relationship including the positional relationship with the liquid-cooling heat exchanger 5 .

According to this pump cover portion 25, the heat generated by the rotary pump 2 can be kept inside the pump cover portion 25, and the heat is radiated to the outside of the pump cover portion 25, so that the entire inside of the sealed housing 1 is cooled. Spatial dispersion can be suppressed. According to this, by not dispersing the heat generated by the rotary pump 2, high-temperature air (heated air) can be collected and sent to the liquid-cooling heat exchanger 5, and the heated air can be efficiently cooled. That is, the temperature difference between the heated air and the liquid-cooling heat exchanger 5 can be increased, heat exchange can be performed efficiently, and temperature rise in the sealed housing 1 can be suppressed efficiently. In addition, since the high-temperature air is sent to the liquid-cooling heat exchanger 5 in a collected state, the circulating air outlet 25b has a narrowed flow path, so that the size of the liquid-cooling heat exchanger 5 can be reduced and the product cost can be reduced. also be reduced.

The pump cover portion 25 of this embodiment is designed to exhaust the rotary pump 2 so that the internal air can flow to effectively contact the entire outer surface of the rotary pump 2 to efficiently cool the outer surface. A circulating air inlet portion 25a is formed so as to surround the periphery of the rotary pump 2 and open in a strip shape on the side (the side opposite to the side to which the electric motor 3 is connected). The circulating air outlet 25b, through which the internal air containing the heated air heated by the rotary pump 2 is discharged, collects the internal air and guides it to the liquid-cooling heat exchanger 5. It's becoming Furthermore, in this embodiment, the circulating air outlet portion 25b is connected to the internal air inlet of the heat exchange chamber of the liquid cooling heat exchanger 5 in an airtight seal. According to this, the internal air flow can be appropriately generated, the internal air can be appropriately circulated, the heat exchange can be efficiently performed, and the temperature rise in the sealed housing 1 can be efficiently suppressed.

Further, in this embodiment, the introduction port of the liquid cooling heat exchanger 5 is connected to the circulating air outlet 25b side, and the blower 6 sucks the internal air from the circulating air inlet 25a to the circulating air outlet. 25 b and is connected to the liquid cooling heat exchanger 5 so as to pass through the liquid cooling heat exchanger 5 . In this embodiment, the internal air suction port of the blower 6 is connected to the internal air discharge port of the heat exchange chamber of the liquid-cooling heat exchanger 5 in an airtight seal.

According to this, a smooth flow of the internal air can be generated rationally and effectively, the internal air can be efficiently circulated, heat exchange can be efficiently performed, and the temperature inside the sealed housing 1 can be reduced. It is possible to efficiently suppress the rise. In addition, since the blower 6 is arranged in the liquid-cooled heat exchanger 5 as in this embodiment, the blower 6 itself sucks the air cooled by the liquid-cooled heat exchanger 5, resulting in overheating. It is possible to prevent this from happening and prolong the life of the device.
In this embodiment, the pump cover portion 25 (see FIGS. 3 to 6, etc.) is provided so as to cover the range of the pump chamber body portion 110 and the bearing body portion 120 (see FIGS. 13 to 18, etc.) of the rotary pump 2. It is In other words, it effectively covers a portion with a high surface temperature, excluding the first muffler portion 31 which is liquid-cooled as will be described later. In addition, the size of the gap (width of the air passage) provided between the inner surface of the pump cover portion 25 and the outer surface of the rotary pump 2 is adjusted so that the circulating air inlet portion 25a is appropriately formed. It suffices that the airflow resistance during the flow does not increase as much as possible, and the internal air (heated air) heated by the heat generated by the rotary pump 2 is not dispersed to the outside of the pump cover portion 25 as much as possible.

Further, in this embodiment, the rotary pump 2 is a two-shaft rotary pump, and one rotor rotating shaft (rotating shaft 20A) is connected in series to the rotating shaft 3a of the electric motor 3 and rotated, and the other rotor rotates. A shaft (rotating shaft 20B) is provided so as to rotate synchronously in a direction opposite to one rotor rotating shaft (rotating shaft 20A) through a gear, and the other rotor rotating shaft (rotating shaft 20B) is arranged. In addition, the liquid cooling heat exchanger 5 and the air blower are installed in a space on the extension of the axial center of the rotating shaft 20B and adjacent to the portion where the electric motor 3 and one rotor rotating shaft (rotating shaft 20A) are connected. 6 are placed.

According to this, the internal space of the sealed housing 1 can be preferably used, and the internal air can be preferably circulated.
One of the rotor rotating shafts (rotating shaft 20A) of this embodiment and the rotating shaft 3a of the electric motor 3 are connected in series via a coupling 3b, as shown in FIG. Further, as shown in FIG. 3 and the like, 3c is a safety cover, which covers the connecting portion of the rotary shaft (3a, 20A) including the rotationally driven coupling 3b for safety. Further, the coupling 3b may be configured to blow air by attaching blower blades coaxially to the rotating shafts (3a, 20A). According to this blower blade, the cooling performance can be improved.

Further, in this embodiment, the electric motor 3 is provided with a blower fan 7 for cooling the electric motor 3, which blows air to cool the electric motor 3. ) is arranged on the rotating shaft on the side opposite to the side connected to the motor body so as to blow air toward the motor main body.

According to this, as indicated by the thick arrow in FIG. Temperature rise can be efficiently suppressed. That is, as shown in FIG. 1 , the internal air is first sucked by the blower 6, heated through the inside of the pump cover portion 25, and then cooled through the liquid cooling heat exchanger 5. . Next, the internal air sucked from the liquid-cooling heat exchanger 5 is discharged by the air blower 6 in the direction away from the rotary pump 2 (leftward from the air blower 6 in FIG. 5), to the side of the electric motor 3 ( above the electric motor 3 in FIG. 5). Next, the internal air cooled by the liquid-cooling heat exchanger 5 and discharged from the blower 6 hits the inner surface of the sealed housing 1, and a part of the internal air is sucked by the blower fan 7 of the electric motor 3. After flowing to cool the motor body of the electric motor 3 , it flows toward the body of the rotary pump 2 . Then, the internal air that has flowed around the pump cover portion 25 is reversed and drawn into the pump cover portion 25 by the suction force of the air blower 6 from the circulating air inlet portion 25a. As described above, by generating an air flow, it is possible to appropriately circulate the internal air, efficiently perform heat exchange, and efficiently suppress the temperature rise in the sealed housing 1 .

Further, in the present embodiment, the switchboard 8 formed on the front side of the sealed housing 1 is provided with air flowing inside the switchboard 8 formed in a small chamber, as shown in FIGS. A blower 9 for cooling electrical components is attached to the lower portion of the switchboard 8 as an air cooling means for cooling.

According to the electric component cooling blower 9 of this embodiment, part of the internal air (cooling gas) inside the sealed housing 1 is sucked into the switchboard 8, and inside the switchboard 8, the air is blown from the bottom to the top. It can be flowed and ventilated to be discharged from an upper opening (not shown) in the switchboard 8 . As a result, it is possible to efficiently cool the electrical component 82 and the inverter device 83 that are installed in the switchboard 8 and have high heat generation. Further, the internal air discharged from the switchboard 8 is sucked into the pump cover portion 25 from the circulating air inlet portion 25 a of the pump cover portion 25 . As shown in FIGS. 9 and 10, reference numeral 81 denotes an operation unit, which is not provided with an individual air cooling means in the present embodiment because of its low heat generation, and is located away from the switchboard 8. FIG.

Further, in this embodiment, the rotary pump 2 is connected to the coolant supply source 4 so as to be liquid-cooled, as will be described in detail with reference to FIGS. In this embodiment, the coolant flowing from the coolant supply source 4 first passes through the liquid cooling heat exchanger 5, and then cools the exhaust discharged from the exhaust port 55 (see FIG. 13, etc.). The pipes are connected in series. By cooling both the liquid-cooling heat exchanger 5 and the rotary pump 2 in this way, it is possible to effectively suppress the temperature rise in the sealed housing 1 .

Next, specific examples of flow paths for the cooling liquid supplied from the cooling liquid supply source 4 will be described with reference to the drawings (FIGS. 1, 3, 7, 9 to 15, etc.).
The cooling liquid supply source 4 is connected to a cooling liquid supply connection port 4a provided on the rear surface of the sealed housing 1, and the cooling liquid is supplied from the cooling liquid supply connection port 4a by a liquid flow pump (not shown). First, it is supplied to the liquid-cooling heat exchanger 5 through the supply pipe 4b, and the liquid-cooling heat exchanger 5 is cooled. 9 to 12, in which the electric rotary pump 200 is arranged in two stages, the cooling liquid supply pipe 4b is branched into two, and the cooling liquid is supplied to each of the two-stage electric rotary pumps 200. The two cooling liquid discharge pipes 4c are joined to discharge the cooling liquid.

Next, the cooling liquid that has cooled the internal air through the liquid cooling heat exchanger 5 passes through the cooling liquid connection pipe 5b (see FIGS. 1, 7, etc.) to cool the rotary pump 2, the cooling liquid inlet connection. It is supplied to the portion 71a (see FIGS. 7, 15, etc.). 13 to 21, the cooling liquid passes through the bearing section cooling liquid flow path 71, thereby cooling the bearing section 40 and the gear box 45 of the rotary pump 2. Accordingly, the gear box Lubricating oil in 45 is cooled.

Next, the cooling liquid that has passed through the bearing cooling liquid flow path 71 is introduced into the exhaust cooling liquid flow path 72 to cool the exhaust of the rotary pump 2, as will be described later with reference to FIGS. The coolant flows further through the extension cooling liquid flow path 73, cools the exhaust section of the rotary pump 2 and the first muffler section 31, and is discharged from the extension cooling liquid outlet connection section 73b. A cooling liquid discharge pipe 4c is connected to the extension cooling liquid outlet connection portion 73b, and the outlet end of the cooling liquid discharge piping 4c serves as a cooling liquid discharge connection port 4d connected to the cooling liquid supply source 4. there is

By flowing through the flow paths described above, the liquid cooling heat exchanger 5 and the rotary pump 2 can be cooled. , in this embodiment, the coolant is returned to the coolant supply source 4 and circulated. When using underground water, it is of course possible to flow the water in one direction without circulating it.

According to this, the liquid cooling heat exchanger 5, the bearing portion 40 of the rotary pump 2, the gear box 45, Three portions of the first muffler portion 31, which is the exhaust portion of the rotary pump 2, can be rationally cooled in order. That is, regarding the temperature of each part, the permissible temperature of the oil stored in the gearbox is higher than the permissible temperature of the air inside the sealed housing 1, and the permissible temperature of the oil stored in the gearbox is lower than the permissible temperature. Since there is a temperature relationship in which the permissible temperature of the exhaust air of the rotary pump is higher than that of the rotary pump, it is rational to flow the cooling liquid in the order described above. That is, when cooling the above-mentioned three places sequentially, the coolant is gradually heated, but there is a temperature difference (temperature difference between the coolant temperature and the temperature of the part to be cooled) that can sufficiently cool each part. can be maintained. Such liquid cooling pipes connected in series have the advantage of simplifying the structure of the pipes and reducing the cost.
In addition, the liquid cooling pipes are not limited to this embodiment, and may be provided in parallel. Parallel piping has the advantage that it is possible to individually adjust the flow rates, enabling precise cooling control.

Next, specific measurement data (verification values) for the cooling effect in the sealed housing 1 of the embodiment shown in FIGS. 1 to 7 will be described.
Data was obtained by setting the temperature of the coolant (cooling water) to 32° C. as an example of the condition of the highest assumed temperature, and measuring the temperature of each part.
As comparison data, when the liquid-cooling heat exchanger 5 is not installed and the rotary pump 2 is installed as shown in FIGS. It rose to 80°C.
On the other hand, when the rotary pump 2 is water-cooled as described above and the internal air is water-cooled by installing the liquid cooling heat exchanger 5 as in the present embodiment, the circulating air outlet portion 25b of the pump cover portion 25 The temperature of the internal air reached 55.degree. As a result, the heat-resistant temperature of the electric motor 3, the electrical component 82, etc. was sufficiently cleared. Also, the temperature of the cooling water returned to the cooling liquid supply source 4 became 40 to 45°C.

By the way, the intake pipe of the rotary pump 2 is provided so that the intake introduction pipe connection port 16 can be connected to an external intake pipe, and is configured to take in outside air through the external intake pipe. It is A check valve 17 is connected between the suction introduction pipe connection port 16 and the suction port 15 of the rotary pump 2 so as to regulate the flow of gas from the pump 2 to the suction introduction pipe connection port 16. is provided.
Further, 90 is a drain discharge connection port, which is a discharge port through which the drain can be discharged to the outside. A drain pan 91 arranged under the rotary pump 2 and a heat exchanger drain pan 93 arranged in the liquid cooling heat exchanger 5 are connected to the drain discharge connection port 90 by a drain pipe 92 and a heat exchanger drain pipe 94 . It is possible to receive the generated drainage and discharge it appropriately.

Next, the noise reduction structure of the package type rotary pump unit according to the present invention will be described in detail with reference to the attached drawings (FIGS. 1 to 21). As described above, the package-type rotary pump unit according to the present invention comprises, as a basic configuration, an electric rotary pump 200 having a rotary pump 2 for sucking and discharging gas and an electric motor 3 for driving the rotary pump 2; and a sealed housing 1 containing a pump 200 .

The rotary pump 2 mounted on the package-type rotary pump unit according to the present invention has an exhaust cooling section in which the exhaust is cooled by the cooling liquid supplied from the cooling liquid supply source 4 disposed outside the sealed housing 1. A first muffler portion 31 is provided which also serves as a silencing effect. A second muffler portion 32 that introduces the exhaust that has passed through the first muffler portion 31 to muffle the noise is arranged above the electric rotary pump 200 inside the sealed housing 1 .

According to the package-type rotary pump unit according to the present invention, when the rotary pump 2 is housed in the sealed housing 1, the noise generated by the operation of the rotary pump 2 can be reduced more rationally and effectively. It has the special advantage of being able to That is, by providing a first muffler portion 31 for cooling the exhaust of the rotary pump 2 with coolant and disposing a second muffler portion 32 above the electric rotary pump 200, the electric rotary pump 200 and the muffler ( The entirety of the first muffler section 31 and the second muffler section 32) can be effectively covered with the above-described sealed housing (sealed housing 1). Therefore, the noise, including the sound leaking from the muffler and pipes in the middle, can be shielded and absorbed, and the silencing effect can be effectively enhanced. The second muffler portion 32 itself arranged above the electric rotary pump 200 also has the effect of shielding the noise generated from the electric rotary pump 200 . According to the example of the package-type rotary pump unit according to this embodiment, noise can be reduced to 73 dB, and high quietness can be achieved. Also, by disposing the second muffler portion 32 above the electric rotary pump 200, the foot space can be reduced. In order to improve the sound absorbing performance, it is of course possible to attach a sound absorbing material to the inner surface of the members constituting the sealed housing 1 .

Further, in this embodiment, the second muffler section 32 is composed of a plurality of sound reduction chambers, and the plurality of sound reduction chambers are arranged in the same direction as the connection direction of the rotary pump 2 and the electric motor 3 and are enclosed in a sealed housing. They are arranged in series in the longitudinal direction of the body 1 .

According to this, a plurality of sound reduction chambers can be preferably arranged in a limited space, and a sufficient sound reduction effect can be obtained. That is, since the electric rotary pump 200 of this embodiment has a form in which the rotary pump 2 and the electric motor 3 are connected in series, it has a horizontally long shape, and the sealed housing 1 is also horizontally long as in this embodiment. formed. The second muffler part 32 can be appropriately arranged inside the horizontally long sealed housing 1 so as to conform to the form of the electric rotary pump 200, and the overall structure can be provided compactly. .

As for the internal structure of the second muffler portion 32, it is possible to appropriately and selectively design a form that enhances the sound reduction (silencing) effect by means of expansion, shielding, sound absorption, or the like. For example, by providing three sound reduction chambers and arranging the three chambers in series, a compact structure with high sound reduction performance can be achieved.
More specifically, for example, in this embodiment, the second muffler portion 32 has a cylindrical outer shape elongated in the axial direction, and the longitudinal direction includes a sound reduction chamber at one end and an intermediate portion. and a sound reduction chamber on the other end side, and in the sound reduction chamber on the one end side, exhaust introduced by an exhaust pipe extended from the exhaust port 57 of the first muffler part is The sound is reduced by expelling it from the perforated tube on the tip side of the tube. Then, the pipe line is communicated so that the exhaust gas is sent from the sound reduction chamber on the one end side to the sound reduction chamber on the other end side, and the exhaust gas is discharged to the sound reduction chamber on the other end side, thereby reducing sound by expansion. Let Further, the exhaust air introduced into the sound reduction chamber on the other end side is reversed through the ventilation hole provided in the partition wall between the sound reduction chamber on the other end side and the sound reduction chamber on the intermediate portion. Exhaust gas is discharged to the sound reduction chamber in the middle portion to reduce noise by expansion, and the exhaust is provided to be discharged to the outside from the sound reduction chamber in the middle portion through the exhaust outlet 35 of the second muffler portion. It is

In addition, in this embodiment, the second muffler section 32 is installed in a suspended state inside the sealed housing 1 . That is, as shown in FIGS. 3 and 9, the second muffler portion 32 formed in a cylindrical shape according to this embodiment is a suspension member fixed to the upper portion of the housing frame portion 1a and extending downward. 37 and installed in a state of being suspended from the top of the sealed housing 1 to the inside.

According to this, by using the space above the electric rotary pump 200, the muffler (second muffler portion 32) has an appropriate volume with a high noise reduction effect due to expansion and is lighter than other constituent devices. can be appropriately and conveniently arranged. It goes without saying that a sound absorbing effect can be obtained by appropriately attaching a sound absorbing material to the inner surface of each of the sound reducing chambers of the second muffler portion 32 .

Further, in this embodiment, as shown in FIGS. 3, 4, 7, and 9 to 12, the electric rotary pump 200 is installed in the sealed housing 1 via the damping member 300, and the first The muffler portion 31 and the second muffler portion 32 are connected via a vibration damping pipe 33 . That is, in this embodiment, the electric rotary pump 200 is installed on the base portion 1b in the sealed housing 1 via the vibration damping member 300 provided with anti-vibration rubber, and the exhaust port 57 of the first muffler portion and the second muffler portion. A vibration damping pipe 33 is connected between the muffler portion and an exhaust introduction port 34 of the muffler portion so that the exhaust gas flows from the first muffler portion 31 to the second muffler portion 32 .

According to this, the electric rotary pump 200 is installed by the vibration damping member 300, and is connected to the second muffler portion 32 by the vibration damping pipe 33, so that the vibration of the electric rotary pump 200 is sealed. The transmission to the housing 1 side can be reduced, and the effect of vibration isolation and sound isolation can be preferably obtained. In addition, since the transmission of the vibration of the electric rotary pump 200 to the second muffler portion 32 can be reduced, the second muffler portion 32 can be appropriately and easily installed in the sealed housing 1 .

Further, in this embodiment, as shown in the package-type rotary pump unit in which the electric rotary pump 200 is mounted in a plurality of stages (two stages in this embodiment) shown in FIGS. The power distribution board 8 is arranged on the front side inside the sealed housing 1, and is arranged on the rear side. According to this, it is possible to further reduce the noise transmitted to the front side as the switchboard 8 serves as a shield. This can further improve the work environment.

Next, as an example of a rotary pump used in the package-type rotary pump unit according to the present invention, an example of a claw pump will be described with reference to FIGS. 13 to 21. FIG.
In this claw pump, as shown in FIG. 13, reference numeral 110 denotes a pump chamber body portion, and the cylinders are arranged so as to form a pump chamber 10 (see FIG. 22) having a cross-sectional shape in which parts of two circles overlap each other. It has a portion 10a, one end wall portion 10b provided on one end surface of the cylinder portion 10a, and the other end wall portion 10c provided on the other end surface of the cylinder portion 10a.

Two rotating shafts 20A and 20B are arranged in parallel in the pump chamber 10 and are rotated in opposite directions at the same speed by a pair of gears 21A and 21B. In this embodiment, gears 21A (driving side gear) and 21B (driven side gear) are integrally fixed to the two rotating shafts 20A and 20B, respectively. The pair of gears 21A and 21B are meshed within a gear box 45 constituted by a bearing body portion 120. As shown in FIG.

Two rotors 30A and 30B are provided corresponding to the two rotating shafts 20A and 20B and arranged in the pump chamber 10, and are rotated in a non-contact state to compress and exhaust the sucked gas. A hook-shaped claw portion (see FIG. 22) is formed and provided. One end wall portion 10b of the pump chamber body portion 110 is located on the side of the gear box 45 containing the pair of gears 21A and 21B, and gas is discharged to at least the other end wall portion 10c of the pump chamber body portion 110. An exhaust port 55 is provided. This constitutes a package-type rotary pump unit, which is a kind of biaxial rotary pump.

In this embodiment, two rotating shafts 20A and 30B are arranged so as to correspond to one end (one tip end) of each of the two rotating shafts 20A and 20B and are supported in a cantilevered state. 20B is supported by the bearing portion 40, one end wall portion 10b of the pump chamber body portion 110 is positioned on the bearing portion 40 side, and the other end wall portion 10c of the pump chamber body portion 110 is an exhaust port for discharging gas. 55 is provided. Reference numeral 15 denotes an intake port, which is opened at a position facing a portion in the pump chamber 10 where the gas is not compressed. The intake port 15 of the present embodiment is a corner portion of the upper portion of the pump chamber body portion 110, and is provided in a notched form extending over the upper wall portion of the cylinder portion 10a and the upper portion of the one end wall portion 10b. It is Reference numeral 14 denotes an intake connection port, which is provided so that its lower end is connected to the intake port 15 and its upper end is connected to a pneumatic device (not shown) via a pipeline.

In the package-type rotary pump unit according to the present invention, the other end wall portion 10c side of the pump chamber body portion 110 is provided with an exhaust port for passing cooling liquid so as to cool the exhaust gas discharged from the exhaust port 55. An internal coolant flow path 72 is provided. It should be noted that, in this embodiment (an example of use as a vacuum pump), the state in which the exhaust is discharged from the exhaust port 55 means that the pump chamber 10 is open and communicated with the atmosphere (air), which is the outside air. state, and the exhaust will be released into the atmosphere (air). Cooling liquid is typically cooling water, but it goes without saying that liquids other than water can also be used, including mixtures (aqueous solutions) with water, such as antifreeze, and oil. be.

According to the packaged rotary pump unit according to the present invention, even when the vacuum pump is used in a high vacuum range in which the ultimate vacuum is closer to the absolute vacuum, the overheating of the pump chamber 10 can be avoided. This can be prevented more positively and effectively, and the pump performance can be significantly improved.

That is, by providing the exhaust cooling liquid flow path 72 on the side of the other end wall section 10c of the pump chamber body section 110, the cooling liquid can effectively cool the exhaust immediately after being discharged from the exhaust port 55. can. According to this, even if the vacuum pump is used in a high vacuum range above a certain level and the pump chamber 10 is heated due to the reverse flow of the exhaust gas, it is possible to suppress the increase in the internal temperature of the pump chamber 10 . For this reason, it is possible to set a small clearance for non-contact between the inner wall surface of the pump chamber 10 and the two rotors 30A and 30B. can improve.

Further, according to the package-type rotary pump unit according to the present invention, the clearance can be set small as described above, so that the degree of ultimate vacuum can be further increased, and overheating can be prevented even if there is a reverse flow of the exhaust gas. Since the opening area of the port 55 can be set wider, a vacuum pump with a larger processing air volume can be constructed.

According to the package-type rotary pump unit of this embodiment, the other end wall portion 10c provided with the most heated exhaust port 55 is actively and locally cooled. there is That is, the other wall portion of the pump chamber body portion 110 centered on the exhaust port 55 is adjusted so as to reduce the temperature difference with respect to the pump chamber body portion 110 in which the temperature gradient (temperature difference) is large. The exhaust gas is cooled by preferentially cooling the 10c side. By cooling the exhaust gas in this way to prevent overheating of the pump chamber 10, it has been confirmed that the internal temperature difference can be reduced by about 140° C., and the ultimate vacuum can be increased to 97 kPa. It is possible to significantly improve the pump performance. Conventionally, as the limit for the continuous operation, the ultimate vacuum is up to about 90 kPa in order to avoid contact (internal interference) between the inner wall surface of the pump chamber 10 and the two rotors 30A and 30B. was only able to drive In contrast, according to the present invention, it is possible to continuously perform shut-off operation with a higher ultimate vacuum.

By the way, in the package type rotary pump unit, the compressibility of the gas is high and the gas is heated and discharged. The portion 10c becomes hotter than the other portions. Then, compared with the other end wall portion 10c, the other portion of the pump chamber body portion 110 has a lower temperature. Therefore, if the entire pump chamber body portion 110 including the cylinder portion 10a and the like is cooled in the same manner, the temperature difference between the exhaust port 55 of the other end wall portion 10c and the other portions is maintained. Therefore, the problem that the rotors 30A and 30B, which are moving parts, interfere with each other due to thermal expansion cannot be solved.

Further, according to this embodiment, a cooling liquid introduction port 72b (see FIG. 20) for introducing the cooling liquid into the exhaust cooling liquid flow path 72 is provided near the exhaust port 55, and the exhaust cooling liquid flow path 72 A cooling liquid flow regulating portion 61b is provided at the formed portion to regulate the flow of the introduced cooling liquid so that the cooling liquid circulates in the vicinity of the exhaust port 55 first. As shown in FIG. 20, the coolant flow regulating portion 61b of this embodiment is provided at a plurality of locations (two locations in this embodiment) on the coolant flow path forming surface 61a of the first flow path forming portion 61, which will be described later. It is provided in a form protruding like a rib.

According to this, by cooling the portion around the exhaust port 55, which is the most heated portion of the pump chamber body portion 110 (surrounding the exhaust port 55), the exhaust immediately after the exhaust port can be effectively cooled. By lowering the temperature of the periphery of the exhaust port 55 and the temperature of the exhaust gas, it is possible to prevent the periphery of the exhaust port 55 from being excessively heated and unevenly deformed due to thermal expansion in a well-balanced manner. In this manner, the thermal expansion of the pump chamber body portion 110 and the two rotors 30A and 30B can be suppressed in a well-balanced manner, so the mutual clearance therebetween can be reduced and the pump efficiency can be improved.

In the package-type rotary pump unit, the exhaust port 55 is generally provided at a portion corresponding to the lower portion of the pump chamber 10 (in this embodiment, the lower portion of the other end wall portion 10c) in terms of driving stability. become. In this embodiment, the cooling liquid inlet 72b is provided as described above, and the portion of the exhaust cooling liquid flow path 72 near the exhaust port 55 located below the other end wall portion 10c is further expanded. The cooling liquid having a lower temperature is first cooled, and the cooling liquid that has cooled the other end wall portion 10c in this manner is discharged upward through the exhaust cooling liquid outlet connection portion 72d. At this time, the cooling liquid is heat-exchanged and its temperature rises, so that the specific gravity of the cooling liquid becomes smaller and an upward flow vector is generated. According to this flow of the cooling liquid, the portion of the lower exhaust port 55 can be effectively cooled, and the directionality of the flow due to the temperature rise of the cooling liquid and the directionality of the flow for discharging the cooling liquid upward can be changed. can be aligned. Therefore, the cooling liquid can pass through smoothly, and the cooling efficiency can be effectively improved.

Further, according to this embodiment, the exhaust cooling liquid flow path 72 is arranged in the other end wall portion 10c of the pump chamber body portion 110 so as to cover the outer surface side of the other end wall portion 10c. A first flow path forming portion 61 having a cooling liquid flow path forming surface 61a provided to form the exhaust cooling liquid flow path 72 with the outer surface of the other end wall portion 10c. is provided by placing According to this, the exhaust cooling liquid flow path 72 can be configured effectively and rationally.

As shown in FIGS. 13, 20, and 21, the first flow path forming portion 61 of this embodiment is provided by a board-like member having irregularities formed on both sides so that flow paths are formed. It is fixed to the outer surface of the other end wall portion 10c by bolts, and is provided so that the mating portion is water-tightly sealed by a seal member 65 to form an exhaust portion coolant flow path 72. As shown in FIG. The joining portion of this embodiment includes an inner loop joining portion 61c formed in a rectangular loop frame shape surrounding the exhaust port 55 so as to extend the exhaust path of the exhaust port 55, and a peripheral portion of the other end wall portion 10c. and an outer loop joint portion 61d formed so as to abut against the loop frame shape. Between the inner loop mating portion 61c and the outer loop mating portion 61d, an exhaust cooling liquid flow path 72 is formed and is filled with cooling liquid. According to this configuration, the outer wall surface of the other end wall portion 10c is brought into contact with the cooling liquid over the entire surface to enable efficient cooling. In addition, this structure has a form in which the layered exhaust cooling liquid flow path 72 is planarly stacked on the outside of the outer end surface of the pump chamber body 110, and has a compact configuration.

In addition, in the first flow path forming portion 61 of the present embodiment, one portion of the exhaust portion cooling liquid flow path 72 is provided on the cooling liquid flow path forming surface 61a that faces (faces) the outer surface of the other end wall portion 10c. A passage forming wall constituting the cooling liquid flow restricting portion 61b is provided in a protruded form so that an exhaust port surrounding passage portion 72c, which is a groove-shaped passage, is formed. That is, in this embodiment, the outer surface of the other end wall portion 10c is a flat surface, and as shown in FIGS. , a passage forming wall (coolant flow restricting portion 61b) for appropriately bending and guiding the exhaust portion coolant flow path 72 is provided. In addition, the present invention is not limited to this, and it is also possible to appropriately provide a passage forming wall on the side of the outer surface of the other end wall portion 10c.

Further, according to this embodiment, the surface opposite to the cooling liquid flow path forming surface 61 a of the first flow path forming section 61 is arranged so that the exhaust gas is cooled by the first flow path forming section 61 . An exhaust flow path 56 through which exhaust gas passes is provided on the side of the exhaust flow path forming surface 61 e that is the outer surface of the first flow path forming portion 61 . That is, the exhaust channel 56 is a channel connected to the exhaust port 55 and a channel through which the exhaust discharged from the exhaust port 55 passes.

According to this exhaust flow path 56, the overheated exhaust gas can be effectively cooled, and the temperature in the pump chamber 10 is lowered by lowering the temperature of the exhaust gas. Overheating and thermal expansion of the two rotors 30A and 30B can be suppressed in a well-balanced manner.
In addition, the exhaust flow path 56 can appropriately regulate the direction of the flow of the exhaust gas, and has a form for promoting the cooling of the exhaust gas, and also serves as a muffler structure for reducing exhaust noise. It has become. That is, the first muffler portion 31 is configured by the structure in which the exhaust flow path 56 is formed. Incidentally, reference numeral 57 denotes an exhaust port of the first muffler portion, which is opened in the upper wall portion of the first flow path forming portion 61 and serves as an exhaust port of the exhaust flow path 56. It is exhausted to the outside through an exhaust port 57 in the muffler portion. As shown in FIG. 21, the exhaust port 57 of the first muffler portion of this embodiment is provided in a shape in which the flow path is constricted on the inner side, and is formed so as to enhance the silencing effect.

Further, according to the present embodiment, the exhaust flow path 56 is a portion arranged in the first flow path forming portion 61 so as to cover the outer surface side of the first flow path forming portion 61, and By arranging the second flow path forming portion 62 having the exhaust flow path forming surface 62a provided to form the exhaust flow path 56 with the outer surface of the first flow path forming section 61, is provided. According to this, the exhaust flow path 56 can be effectively and rationally configured, and the exhaust immediately after the exhaust port can be effectively cooled on both the exhaust flow path forming surface 61e and the exhaust flow path forming surface 62a. . In addition, this structure has a form in which the layered exhaust passages 56 are planarly stacked on the outside of the outer end surface of the pump chamber body portion 110, and thus has a compact structure.

As shown in FIG. 13 and the like, the second flow path forming portion 62 of this embodiment has an exhaust flow path forming surface that is an inner surface (a surface that contacts the outer surface side of the first flow path forming portion 61). A plate-like member 62a is formed flat, and is fixed to the outer surface (exhaust flow path forming surface 61e) side of the first flow path forming portion 61 by bolts. Further, on the side of the outer surface (exhaust flow path forming surface 61e) of the first flow path forming portion 61 with respect to the exhaust flow path forming surface 62a (flat surface), a groove-like groove that becomes the exhaust flow path 56 is provided. The exhaust passage forming wall 61f is provided in a projecting form so as to form a passage. Then, the loop frame-shaped mating portion 61g and the exhaust passage forming wall 61f of the outer peripheral portion, which is the outer surface side of the first flow path forming portion 61, and the inner surface of the second flow path forming portion 62 are substantially fixed by close contact. It can be naturally airtight, or it can be airtight by placing a sealing member. The present invention is not limited to this, and it is also possible to provide an exhaust passage forming wall on the side of the exhaust passage forming surface 62a. As shown in FIG. 21, the exhaust flow path 56 is formed in a complicatedly curved flow path, so that the cooling of the exhaust gas can be further promoted, and the muffler chamber functions properly to further reduce the exhaust noise. can be reduced.

Furthermore, according to this embodiment, the extension cooling liquid flow path 73 that is continuous with the exhaust cooling liquid flow path 72 is formed in the second flow path forming section 62 on the outer surface of the second flow path forming section 62 ( It is a part arranged so as to cover the side of the extension flow path forming surface 62b), and the extension part cooling liquid flow path is formed between the outer surface (extension flow path forming surface 62b) of the second flow path forming part 62 and It is provided by disposing a third flow path forming portion 63 having an extended flow path forming surface 63 a provided to form 73 . According to this, the extension cooling liquid flow path 73 can be configured effectively and rationally. In addition, this structure has a form in which the layered extension cooling liquid flow paths 73 are stacked on the outside of the outer end face of the pump chamber body 110 in a planar manner, resulting in a compact configuration. In addition, the layered extension coolant flow path 73 and the structural walls that form it can reduce noise. That is, the structure forming the extension cooling liquid flow path 73 and the exhaust cooling liquid flow path 72 described above has a structure for shielding sound and reducing noise. It is also

In addition, as shown in FIG. 13 and the like, the third flow path forming portion 63 of this embodiment is provided by a flat plate-like member (plate member), and the second flow path forming portion 62 is secured by bolts. , and is watertightly sealed by a sealing member 65 to the peripheral edge joint portion 62c provided in the shape of a loop frame on the outer surface of the second flow path forming portion 62, so that the extension portion coolant flow path 73 is formed. is provided in In addition, in this embodiment, the cooling liquid is retained in the flat layered space of the extension cooling liquid flow path 73. However, the present invention is not limited to this, and any suitable configuration can be used. Needless to say, the flow path may be set at . Furthermore, it is also possible to increase the cooling performance by multilayering the extension cooling liquid flow path 73 . Also, in the extension cooling liquid flow path 73, similarly to the exhaust cooling liquid flow path 72, the upper portion of the second connection pipe 72e is arranged so that the cooling liquid flows from the bottom to the top. From the exhaust cooling liquid outlet connection 72d provided and connected to the exhaust cooling liquid flow path 72, the second connection is provided to the extension cooling liquid inlet connection 73a provided in the lower part of the second connecting pipe 72e. An extension cooling liquid outlet connection portion 73b is provided at the upper portion so that the cooling liquid flowing through the extension cooling liquid flow path 73 is discharged to the outside.

By the way, in this embodiment, the pump chamber 10 includes the cylinder case 11 integrally provided with the cylinder portion 10a, one end wall portion 10b, and one structural wall portion 121a provided with the first bearing portion 40a. , and the side plate 12 provided as the other end wall portion 10c are fixed in a sealed state. As described above, in this embodiment, the pump chamber 10 is formed by two divided members, but is not limited to this. Of course, it may be formed by mainly three divided members.

Next, in the biaxial rotary pump according to the present invention, an example of a configuration for cooling the bearing portion 40 that supports the two rotary shafts 20A and 20B will be described in detail with reference to the accompanying drawings (FIGS. 13 to 21). do. As described above, the biaxial rotary pump of this embodiment is a package type rotary pump unit, but the present invention is not limited to this, and other biaxial rotary pumps such as roots pumps and screw pumps can be used. It can also be applied to pumps. Further, in the biaxial rotary pump according to the present invention, the two rotors 30A and 30B are not limited to the form in which the two rotors 30A and 30B are supported in a cantilevered state, and the rotary shafts 20A and 20B are rotated at both ends. It has a configuration that can be applied to a biaxial rotary pump that is freely supported.

In the biaxial rotary pump according to the present invention, as shown in FIG. 13, the structural wall portion 121 provided with the bearing portion 40 for bearing the two rotating shafts 20A and 20B is configured, and the two rotating shafts 20A and 20B It comprises a bearing body portion 120 forming a structural wall portion 121 as a gearbox 45 enclosing a pair of correspondingly provided gears 21A, 21B in mesh. In the bearing body portion 120 of this embodiment, the two rotors 30A (drive-side rotor) and 30B (driven-side rotor) are connected to the two rotation shafts 20A (drive-side rotation shaft) and 20B (driven-side rotation shaft). Bearing portions 40 for bearing the rotating shafts 20A and 20B are provided so as to be respectively arranged at one end and supported in a cantilevered state. The bearing body portion 120 and the pump chamber body portion 110 constitute the pump main body 100 of the biaxial rotary pump.

The pump main body 100 is arranged between the pump chamber body portion 110 and the bearing body portion 120 so that a cooling gap 60 capable of suppressing heat conduction is formed between the pump chamber body portion 110 and the bearing body portion 120 . The structural wall portion 121 (one structural wall portion 121a in this embodiment) located on the side of the pump chamber body portion 110 of the bearing body portion 120 is provided so as to be partitioned into the bearing portion cooling for passing the cooling liquid. A liquid flow path 71 is provided.

According to this, along with the heat transfer prevention effect of reducing the transfer of the heat of the compressed gas (exhaust gas) generated by the driving of the two rotors 30A and 30B to the bearing body portion 120, the coolant passing through the bearing portion coolant flow path 71 is reduced. This cooling effect provides a particularly advantageous effect of prolonging the life of the functional parts constituting the bearing portion 40 and the like. That is, according to the present invention, by providing the gap 60 for cooling by partitioning the pump chamber body portion 110 and the bearing body portion 120, heat conduction can be suppressed so as to minimize the amount of heat transfer, and the bearing portion Since the bearing body portion 120 can be cooled more positively by the coolant flowing through the coolant flow path 71, the reliability of the device can be improved. In this example, it has been confirmed that the temperature rise of the lubricating oil can be reduced by about 40°C.
The functional parts are components including the bearing 41 and the oil seal 42, and are treated as consumable parts. Running costs can be reduced by prolonging the life of these functional parts.

By the way, the bearing portion 40 of the present embodiment has the pump chamber body portion 110 in the bearing body portion 120 so as to support the two rotating shafts 20A and 20B between the two gears 21A and 21B and the two rotors 30A and 30B. A first bearing portion 40a provided in the side structural wall portion (one structural wall portion 121a) and a structural wall portion opposite to the first bearing portion 40a, which is a drive motor (electric motor 3 (Fig. 3 etc.)) is arranged on the side to which the two rotating shafts 20A and 20B are connected. ing. The rotating shaft 3a of the electric motor 3 is connected to the rotating shaft 20A (driving side rotating shaft) via a coupling 3b (see FIG. 4, etc.).

Further, in this embodiment, the two rotating shafts 20A and 20B are provided in a horizontal type installed by arranging them horizontally, and the bearing cooling liquid flow path 71 is a lubricating oil stored in the gear box 45. is provided in the lower portion of the structural wall portion 121 of the bearing body portion 120 so as to pass below the liquid surface of the lubricating oil in the stored state at rest so as to cool the oil. The liquid level of the lubricating oil when it is stationary is set to be between the inner bottom surface of the gear box 45 (oil chamber) and the rotating shafts 20A and 20B arranged horizontally. According to this, the lubricating oil can be effectively cooled, and the lubricating oil is scooped up by the two rotating gears 21A, 21B to lubricate the gears 21A, 21B and the bearing 41, and to lubricate the inside of the gear box 45. can be cooled.

In this embodiment, the bearing cooling liquid flow path 71 is provided in the bearing body 120 under the first bearing 40a (below the bearing 41 of the first bearing 40a). It is provided in the shape of a through hole, and is locally arranged. According to this, it is possible to positively cool the portion of the bearing body portion 120 to which heat is easily conducted from the pump chamber body portion 110 side, and to effectively cool the lubricating oil.

Furthermore, in this embodiment, the exhaust port 55 of the pump chamber 10 is provided in the lower portion of the pump chamber body portion 110 . According to this, when the bearing cooling liquid flow path 71 is provided in the lower portion of the structural wall portion 121 of the bearing body portion 120 as described above, heat conduction is effectively suppressed, and the bearing portion 40 is Overheating can be suppressed.

Further, in addition to the configuration provided in the horizontal type installed by arranging the two rotating shafts 20A and 20B horizontally as in this embodiment, the cooling gap 60 is provided from the bottom to the top. A blowing means for blowing air may be provided. According to this, the pump chamber body portion 110 and the bearing body portion 120 can be effectively air-cooled, and the reliability of the biaxial rotary pump can be further improved. That is, since the cooling air can flow appropriately between the pump chamber body portion 110 and the bearing body portion 120, heat transfer can be suppressed more effectively, and cooling by heat radiation can be promoted. As a result, the temperature rise of the bearing body portion 120 can be suppressed, and the life of the functional parts can be extended.

According to the biaxial rotary pump of the present invention, the bearing cooling liquid flow path 71 is provided in the pump chamber body section 110 so that the cooling liquid that has cooled the bearing body section 120 cools the pump chamber body section 110 . It can be characterized in that it is connected to a cooling liquid flow path. According to this, in order to prevent the lubricating oil from boiling and overheating, the temperature of the cooling liquid flowing through the bearing section cooling liquid flow path 71 is higher than that of the cooling liquid flow path provided in the pump chamber body section 110. The temperature can be lower than the temperature of the flowing coolant, and the coolant can be effectively utilized.

Further, in this embodiment, the exhaust cooling liquid flow path 72 is connected to the bearing cooling liquid flow path 71 so that the cooling liquid flows in order from the bearing cooling liquid flow path 71 to the exhaust cooling liquid flow path 72. It is According to this, the structural wall portion 121 (one structural wall portion) constituting the bearing portion 40 (first bearing portion 40a) of the bearing body portion 120 is supplied by one coolant supply source 4 (FIGS. 1 and 2). 121a) and the other end wall portion 10c side of the pump chamber body portion 110 can be directly and sequentially cooled effectively. In addition, the cooling liquid of this embodiment is supplied from the cooling liquid supply source 4 (FIGS. 1 and 2), and is supplied to the cooling liquid inlet connecting portion 71a (FIGS. 15, 17, and 19) and the bearing portion cooling liquid flow path 71. (FIGS. 13 and 19), the cooling liquid outlet connection portion 71b (FIGS. 14, 16, 18 and 19), and then the first connecting pipe 71c (FIGS. 14, 16 and 18). , FIG. 19), the exhaust cooling liquid inlet connecting portion 72a (FIGS. 14, 16, 18), the cooling liquid inlet 72b (FIG. 20), and the exhaust cooling liquid flow path 72 (FIGS. 13, 20). ), flows through the extension cooling liquid flow path 73 , and is discharged to the outside of the pump 2 . Without being limited to this, the cooling liquid may be supplied separately without connecting the bearing cooling liquid flow path 71 and the exhaust cooling liquid flow path 72, and the cooling liquid supply may be individually adjusted. It may be optimized by

In addition, in the flow path constituted by the bearing cooling liquid flow path 71, the exhaust cooling liquid flow path 72, and the extension cooling liquid flow path 73, the exhaust cooling liquid flow path 71 is located above the bearing cooling liquid flow path 71. The cooling liquid flow path 72 is provided, and the cooling liquid flows from the bottom to the top in the exhaust cooling liquid flow path 72 and the extension cooling liquid flow path 73. By aligning the properties and the directionality of the flow of the cooling liquid, the cooling liquid can flow smoothly, and the bearing portion 40 and the exhaust gas can be cooled effectively.

According to the cooling structure of the biaxial rotary pump described above, it is possible to rationally cope with the package-type rotary pump unit and improve the cooling performance, thereby improving the pump performance. Further, in the package-type rotary pump unit according to the present invention, the lower side of the pump chamber 10 is easily overheated, and a structure capable of cooling from the lower side can be appropriately formed as described above. As a result, the pump chamber 10 can be efficiently cooled, the performance of the pump can be improved, and a particularly advantageous effect can be obtained in that the service life of the functional parts can be extended as described above.

In this embodiment, as shown in FIGS. 13 to 19, the cooling gap 60 between the pump chamber body portion 110 and the bearing body portion 120 includes one end wall portion 10b and one end wall portion 10b. A plurality of columnar portions 115 are provided to integrate with one structural wall portion 121a provided with the first bearing portion 40a facing the portion 10b. It is provided so that the gap 60 for cooling is formed in the portion where it does not exist. For example, when such a shape is manufactured by casting, the cooling gap 60 may be formed by a core. Moreover, the present invention is not limited to this, and as shown in FIG. The members on the bearing body portion 120 side that constitute the structural wall portion 121 of the portion 40 are composed of separate members and are connected by columnar connection portions 111 and 122 formed on both sides, thereby forming a cooling gap 60. Of course you can.

Further, in the package-type rotary pump unit according to the present invention, in addition to the configuration described above, at least one of the one end wall portion 10b and the other end wall portion 10c has the pump chamber 10. The exhaust-side opening 50, which is open at a position facing a portion inside the pump chamber 10 where the gas is compressed, is provided in the pump chamber 10 at the front stage where the gas compression ratio is maximized by the claw portions of the two rotors 30A and 30B. and the claw portions of the two rotors 30A and 30B to maximize the gas compression ratio compared to the previous stage, and communicate to the outside of the pump chamber 10. The latter exhaust port is an exhaust port 55 provided in the other end wall portion 10c, and the exhaust port 55 is communicated with the outside of the pump chamber 10 to reduce the compression ratio of the gas. It is also possible to provide the front vent 51 to be closed by the rotor when the is maximized.

According to this, it is possible to prevent the exhaust gas from flowing backward, suppress the overheating of the pump chamber 10, and improve the pump performance. Due to the synergistic effect of the backflow prevention effect of the exhaust gas and the cooling effect of the cooling liquid, overheating of the pump chamber 10 can be more effectively prevented, and pump performance can be improved.

By the way, in this embodiment, the two rotors 30A and 30B are supported in a cantilevered state, but the present invention is not limited to this. , 30B are supported from both sides via two rotary shafts 20A and 20B. Moreover, it can also be effectively applied to a package-type rotary pump unit having exhaust ports on both one end wall portion and the other end wall portion of the pump chamber body portion as disclosed in Patent Document 1. However, after balancing with the exhaust cooling liquid flow path provided on the other end wall side, the exhaust cooling liquid flow path may also be provided on the one end wall side.

Further, in the present invention, for example, by adjusting and managing the temperature of the cooling liquid, it is possible to expand the range of use of the present invention in response to use in cold regions, and heat exchange is performed by circulating the cooling liquid. Of course, additional control methods and configurations used for liquid cooling can be selectively adopted as appropriate, such as a configuration in which the cooling liquid is cooled using a device.

Although the present invention has been described in various ways with preferred embodiments, the present invention is not limited to these embodiments, and many modifications can be made without departing from the spirit of the invention. It's about.

Reference Signs List 1 sealed housing 1a housing frame 1b base 1c housing cover 2 rotating pump 3 electric motor 3a rotating shaft 3b coupling 3c safety cover 4 cooling liquid supply source 4a cooling liquid supply connection port 4b cooling liquid supply pipe 4c cooling Liquid discharge pipe 4d Coolant discharge connection port 5 Liquid cooling heat exchanger 5a Pipe line for heat exchange 5b Coolant connection pipe 6 Air blower 7 Blower fan 8 Switchboard 9 Air blower for cooling electrical components 10 Pump chamber 10a Cylinder part 10b One side End wall portion 10c Other end wall portion 11 Cylinder case 12 Side plate 14 Intake connection port 15 Intake port 16 Intake introduction pipe connection port 17 Check valve 20A Rotating shaft (drive-side rotating shaft)
20B rotary shaft (driven side rotary shaft)
21A gear (drive side gear)
21B gear (driven side gear)
25 pump cover portion 25a circulating air inlet portion 25b circulating air outlet portion 30A rotor (drive side rotor)
30B rotor (driven rotor)
31 First muffler portion 32 Second muffler portion 33 Vibration damping pipe 34 Exhaust gas introduction port of second muffler portion 35 Exhaust gas exhaust port of second muffler portion 37 Hanging member 40 Bearing portion 40a First bearing portion 40b 2 bearing portion 41 bearing 42 oil seal 45 gear box 50 exhaust side opening 51 front stage vent 55 exhaust port 56 exhaust flow path 57 first muffler exhaust port 60 cooling gap 61 first flow path forming portion 61a Coolant flow channel forming surface 61b Coolant flow restricting portion 61c Inner loop mating portion 61d Outer loop mating portion 61e Exhaust flow channel forming surface 61f Exhaust passage forming wall 61g Loop frame mating portion 62 Second flow channel forming portion 62a Exhaust Flow path forming surface 62b Extension flow path forming surface 62c Peripheral joint portion 63 Third flow path forming portion 63a Extension flow path forming surface 65 Sealing member 71 Bearing cooling liquid flow path 71a Cooling liquid inlet connecting section 71b Bearing cooling liquid outlet Connection portion 71c First connection pipe 72 Exhaust cooling liquid flow path 72a Exhaust cooling liquid inlet connection 72b Coolant inlet 72c Exhaust surrounding flow path 72d Exhaust cooling liquid outlet connection 72e Second connection pipe 73 Extension cooling liquid flow path 73a Extension cooling liquid inlet connection 73b Extension cooling liquid outlet connection 81 Operation part 82 Electrical component 83 Inverter device 90 Drain discharge connection port 91 Drain pan 92 Drain pipe 93 Drain pan for heat exchanger 94 For heat exchanger Drain pipe 100 Pump body 110 Pump chamber body 115 Column 120 Bearing body 121 Structural wall 121a One structural wall 121b Other structural wall 200 Electric rotary pump 300 Damping member

Claims (6)

A package-type rotary pump unit comprising a rotary pump for sucking and discharging gas, an electric rotary pump comprising an electric motor for driving the rotary pump, and a sealed housing enclosing the electric rotary pump,
a liquid-cooling heat exchanger arranged inside the sealed housing and cooled by being supplied with cooling liquid from a cooling liquid supply source arranged outside the sealed housing;
The air inside the sealed housing, which is arranged inside the sealed housing and includes heated air generated by heating the air around the rotary pump due to the operation of the rotary pump, is cooled to the liquid cooling heat exchanger. and a blower that sends the
A liquid cooling flow path from the cooling liquid supply is arranged between the liquid cooling heat exchanger and the rotary pump so that the rotary pump is also cooled by the cooling liquid from the cooling liquid supply that has cooled the liquid cooling heat exchanger. A package-type rotary pump unit, characterized in that it is connected in series over and through. The rotary pump comprises a bearing body portion, a pump chamber body portion and a first muffler portion,
A liquid cooling flow path from the cooling liquid supply source is provided such that the cooling liquid from the cooling liquid supply source flows through the liquid cooling heat exchanger, the bearing body portion, the pump chamber body portion, and the first muffler portion in this order. 2. The package type rotary pump unit according to claim 1, wherein the units are connected in series. a circulating air inlet portion disposed inside the sealed housing so as to cover the rotary pump and through which the internal air circulating inside the sealed housing is introduced; and the internal air containing the heated air. 3. The package type rotary pump unit according to claim 1, further comprising a pump cover portion formed so as to be provided with a circulating air outlet portion through which the air is discharged. The liquid cooling heat exchanger is connected to the circulating air outlet side,
The air blower is connected to the liquid cooling heat exchanger so as to suck the internal air and flow it from the circulating air inlet to the circulating air outlet through the liquid cooling heat exchanger. The package type rotary pump unit according to claim 3. The rotary pump is a two-shaft rotary pump, one rotor rotary shaft is connected in series with the rotary shaft of the electric motor and rotated, and the other rotor rotary shaft is connected to the one rotor rotary shaft through a gear. is provided so as to rotate synchronously in opposite directions, and is an extension of the axial center where the other rotor rotating shaft is arranged, and the electric motor and the one rotor rotating shaft are connected. The package type rotary pump unit according to any one of claims 1 to 4, wherein the liquid cooling heat exchanger and the air blower are arranged in a space adjacent to the part. The electric motor is provided with a blower fan for cooling the electric motor that blows air so as to cool the electric motor, and the blower fan is disposed on the side opposite to the side connected to the one rotor rotating shaft. 6. The package-type rotary pump unit according to claim 5, wherein the package-type rotary pump unit is provided so as to blow air toward the motor body.

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