JP2023052430A - Physical quantity sensor and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a small size physical quantity sensor having a high Q value and a high detection sensitivity, and to provide an electronic apparatus using the same.

SOLUTION: A physical quantity sensor 1 includes: a ring part 31 capable of circular-ring oscillation; four support parts 61-64; four beams 71-72 which connect the support parts 61-64 to the parts as a hub of the circular-ring oscillation of the ring part 31; a pair of first mass parts 51 and 52 each of which has a movable part, and which are disposed being opposed to each other in an X1-axis direction via the ring part 31; a pair of second mass parts 53 and 54 each of which has a movable part, and which are disposed being opposed to each other in a Y-axis direction via the ring part 31; oscillation means 4 that causes at least one of the pair of first mass parts 51 and 52 and the pair of second mass parts 53 and 54 to oscillate at a first frequency in a phase opposite to each other. The ring part 31 performs circular-ring oscillations relative to the X-axis direction and the Y-axis direction according to the first frequency.

SELECTED DRAWING: Figure 2

COPYRIGHT: (C)2023,JPO&INPIT

Description

The present invention relates to a physical quantity sensor and an electronic device using the same.

2. Description of the Related Art In recent years, angular velocity sensors that detect angular velocities have been widely used for camera shake correction in imaging devices such as digital cameras, and attitude control in mobile navigation systems such as vehicles using GPS signals. Further, as an angular velocity sensor, there is known one that can detect angular velocity around each of three mutually orthogonal axes with one sensor (see, for example, Patent Document 1).

The sensor described in Patent Document 1 has an annular drive mass, an anchor arranged at the center thereof, an elastic anchor element connecting the drive mass and the anchor, and a substrate 2 to which the anchor is fixed. It is configured to detect the angular velocity about each axis while the driving mass is rotationally oscillated.
However, in such a configuration, vibrations of the driving mass are transmitted to the substrate 2 via the elastic anchoring elements and anchors, resulting in vibration leakage. Such vibration leakage reduces the Q factor of the sensor vibration (ie, leads to energy loss). When the Q value of vibration decreases, the desired vibration amplitude cannot be obtained, and the detection sensitivity of the sensor deteriorates. In addition, a driving device with a high driving capability is required to obtain the required amplitude, which leads to an increase in size of the sensor.

JP 2007-271611 A

An object of the present invention is to provide a small physical quantity sensor having a high Q value and high detection sensitivity, and an electronic device using the same.

Such objects are achieved by the present invention described below.
In the physical quantity sensor of the present invention, when the two axes orthogonal to each other are the first axis and the second axis,
a ring portion capable of circular vibration;
four support portions that support the ring portion;
four beams connecting each of the support portions and a node of the annular vibration of the ring portion;
a pair of first mass portions having a movable portion and arranged to face each other in a direction parallel to the first axis via the ring portion;
a pair of second mass portions having a movable portion and arranged opposite to each other in a direction parallel to the second axis via the ring portion;
A pair of first springs connecting each of the first mass portions and the ring portion so that each of the first mass portions can vibrate with respect to the ring portion in a direction parallel to the first axis. Department and
A pair of second springs connecting each of the second mass portions and the ring portion so that each of the second mass portions can vibrate with respect to the ring portion in a direction parallel to the second axis. Department and
Vibration for vibrating at least one of the pair of first mass portions and the pair of second mass portions at a first frequency in a plane direction including the first axis and the second axis so as to have opposite phases. means and
at least one transducer that converts the amount of displacement of the movable portion of each of the first mass portions and the movable portion of each of the second mass portions into an electrical signal;
The ring portion is characterized by circularly vibrating in a direction parallel to the first axis and in a direction parallel to the second axis according to the first frequency.
This makes it possible to provide a compact physical quantity sensor with a high Q value and high detection sensitivity.

In the physical quantity sensor of the present invention, when the two axes orthogonal to each other are the first axis and the second axis,
a ring portion capable of circular vibration;
four support portions that support the ring portion;
four beams connecting each of the support portions and four fixing points that become nodes of the annular vibration of the ring portion;
It has a first movable portion that can be displaced around an axis parallel to the second axis and a second movable portion that can be displaced in a direction parallel to the second axis, and is parallel to the first axis via the ring portion. a pair of first mass portions arranged to face each other in a direction;
It has a third movable portion that can be displaced around an axis parallel to the first axis and a fourth movable portion that can be displaced in a direction parallel to the first axis, and is parallel to the second axis via the ring portion. a pair of second mass portions arranged facing each other in a direction;
A pair of first spring portions connecting each of the first mass portions and the ring so that each of the first mass portions can vibrate with respect to the ring portion in a direction parallel to the first axis. and,
a pair of second spring portions connecting each of the second mass portions and the ring so that each of the second mass portions can vibrate relative to the ring in a direction parallel to the second axis; ,
Vibration for vibrating at least one of the pair of first mass portions and the pair of second mass portions at a first frequency in a plane direction including the first axis and the second axis so as to have opposite phases. means and
a transducer that converts a displacement amount of a first movable portion of each of the first mass portions and a third movable portion of each of the second mass portions into an electrical signal;
a transducer that converts a displacement amount of a second movable portion of each of the first mass portions and a fourth movable portion of each of the second mass portions into an electrical signal;
The ring portion is characterized by circularly vibrating in a direction parallel to the first axis and in a direction parallel to the second axis according to the first frequency.
This makes it possible to provide a compact physical quantity sensor with a high Q value and high detection sensitivity.

The physical quantity sensor of the present invention has a substrate that supports the ring portion,
The substrate is preferably composed of a semiconductor substrate, an insulating substrate, or a composite substrate in which a semiconductor layer and an insulating layer are laminated.
This simplifies the device configuration.
In the physical quantity sensor of the present invention, it is preferable that the ring portion has an outer diameter and an inner diameter, has a gap inside the inner diameter, and is elastically deformable.
As a result, the ring portion can be circularly vibrated more efficiently.

In the physical quantity sensor of the present invention, each of the first spring portions is capable of deformation in a direction parallel to the second axis and deformation in a direction parallel to an axis orthogonal to the first axis and the second axis. is regulated and
It is preferable that deformation of the second spring portion in a direction parallel to the first axis and deformation in a direction parallel to an axis perpendicular to the first axis and the second axis are restricted. .
Accordingly, the first mass section can be stably vibrated in the direction parallel to the first axis, and the second mass section can be stably vibrated in the direction parallel to the second axis.

In the physical quantity sensor of the present invention, the four support portions are positioned inside the pair of first mass portions and the pair of second mass portions and outside the ring portion, and intersect the center of the ring portion. It is preferable that they are provided at mirror-symmetrical positions with respect to the first axis and the second axis.
As a result, the size of the device can be reduced. Also, the ring portion can be stably supported.

In the physical quantity sensor of the present invention, it is preferable that each of the beams is restricted in radial displacement from the center of the ring.
Thereby, vibration leakage can be prevented or suppressed more effectively.
In the physical quantity sensor of the present invention, it is preferable that the vibrating means be either electrostatically driven or piezoelectrically driven.
Thereby, the first mass section and the second mass section can be vibrated efficiently.

In the physical quantity sensor of the present invention, the transducer preferably has any one of electrostatic, piezoelectric, and piezoresistive sensing capabilities.
This makes the physical quantity sensor excellent in detection ability.
In the physical quantity sensor of the present invention, the transducer detects angular velocity about the first axis, angular velocity about the second axis, and angular velocity about a third axis orthogonal to both the first axis and the second axis. Detection is preferred.
Thereby, it can be used as an angular velocity sensor.

In the physical quantity sensor of the present invention, it is preferable that each of the transducers is paired with another transducer to electrically cancel linear acceleration in a predetermined direction.
This improves the detection accuracy of the angular velocity.
In the physical quantity sensor of the present invention, each of the transducers also preferably has a unique resonance frequency.
As a result, since it is possible to drive in the resonance mode, the detection accuracy of the angular velocity is further improved.

In the physical quantity sensor of the present invention, the annular vibration of the ring portion is contracted in a direction parallel to the first axis and expanded in a direction parallel to the second axis; It is preferable that the vibration repeats a state of extending in a direction and contracting in a direction parallel to the second axis.
In the physical quantity sensor of the present invention, each of the first spring portions and each of the second spring portions are connected to portions of the ring portion which are inclined by 45 degrees from both the first axis and the second axis. is preferred.
As a result, it is possible to effectively prevent or suppress leakage of the annular vibration of the ring portion to the outside.

The physical quantity sensor of the present invention is characterized in that the projection outline of the assembly of the pair of first mass parts and the pair of second mass parts is substantially circular.
As a result, the size of the device can be reduced.
The physical quantity sensor of the present invention is characterized in that the projection outline of the assembly of the pair of first mass parts and the pair of second mass parts is substantially rectangular.
As a result, the size of the device can be reduced.

In the physical quantity sensor according to the aspect of the invention, it is preferable that the vibrating means is connected to the inside of each of the first mass portions and the inside of each of the second mass portions.
As a result, the size of the device can be reduced.
In the physical quantity sensor of the present invention, it is preferable that the transducer is connected inside each of the first mass parts and each of the second mass parts.
As a result, the size of the device can be reduced.

In the physical quantity sensor of the present invention, when the two axes orthogonal to each other are the first axis and the second axis,
a stretchable connection; and
four support portions that are provided at positions inclined by a predetermined angle from both the first axis and the second axis that intersect the center of the connecting portion of the connecting portion and support the connecting portion;
four beams connecting each of the support portions and the connecting portion;
a pair of first mass portions having a movable portion and arranged to face each other in a direction parallel to the first axis via the ring portion;
a pair of second mass portions having a movable portion and arranged opposite to each other in a direction parallel to the second axis via the ring portion;
A pair of first springs connecting each of the first mass portions and the ring portion so that each of the first mass portions can vibrate with respect to the ring portion in a direction parallel to the first axis. Department and
A pair of second springs connecting each of the second mass portions and the ring portion so that each of the second mass portions can vibrate with respect to the ring portion in a direction parallel to the second axis. Department and
Vibration for vibrating at least one of the pair of first mass portions and the pair of second mass portions at a first frequency in a plane direction including the first axis and the second axis so as to have opposite phases. means and
at least one transducer that converts the amount of displacement of the movable portion of each of the first mass portions and the movable portion of each of the second mass portions into an electrical signal;
A connecting portion between the beam and the connecting portion becomes a node when the connecting portion expands and contracts according to the first frequency.
This makes it possible to provide a compact physical quantity sensor with a high Q value and high detection sensitivity.
An electronic device of the present invention is characterized by using the physical quantity sensor of the present invention.
Accordingly, a highly reliable electronic device can be provided.

1 is a schematic plan view showing a first embodiment of a physical quantity sensor of the present invention; FIG. FIG. 2 is a detailed plan view of the physical quantity sensor shown in FIG. 1; FIG. 3 is a plan view for explaining vibration of a ring portion of the physical quantity sensor shown in FIG. 2; FIG. 3 is a plan view for explaining the configuration of detection means included in the physical quantity sensor shown in FIG. 2; FIG. 4 is a diagram for explaining driving of a physical quantity sensor; FIG. 4 is a diagram for explaining driving of a physical quantity sensor; FIG. 4 is a diagram for explaining driving of a physical quantity sensor; FIG. 5 is a plan view showing a second embodiment of the physical quantity sensor of the present invention; FIG. 5 is a plan view showing a third embodiment of the physical quantity sensor of the present invention; FIG. 5 is a plan view showing a physical quantity sensor according to a fourth embodiment of the present invention; FIG. 11 is a plan view showing a physical quantity sensor according to a fifth embodiment of the present invention; FIG. 11 is a plan view showing a sixth embodiment of the physical quantity sensor of the present invention; FIG. 11 is a plan view showing a seventh embodiment of the physical quantity sensor of the present invention; FIG. 11 is a plan view showing an eighth embodiment of the physical quantity sensor of the present invention; It is an electronic device (laptop personal computer) equipped with the physical quantity sensor of the present invention. It is an electronic device (mobile phone) equipped with the physical quantity sensor of the present invention. It is an electronic device (digital still camera) equipped with the physical quantity sensor of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION The physical quantity sensor of the present invention will now be described in detail based on preferred embodiments shown in the accompanying drawings.
<First embodiment>
1 is a schematic plan view showing a first embodiment of the physical quantity sensor of the present invention, FIG. 2 is a detailed plan view of the physical quantity sensor shown in FIG. 1, and FIG. 3 is a ring included in the physical quantity sensor shown in FIG. FIG. 4 is a plan view for explaining the configuration of the detection means possessed by the physical quantity sensor shown in FIG. 2; FIGS. FIG. 4 is a diagram for explaining driving; In addition, in each figure, the X-axis, the Y-axis, and the Z-axis are illustrated as three mutually orthogonal axes for convenience of explanation. In the following description, the direction parallel to the X axis (first axis) will be referred to as the "X axis direction", the direction parallel to the Y axis (second axis) will be referred to as the Y axis direction, and the direction parallel to the Z axis (third axis) is called "Z-axis direction".

1. Physical Quantity Sensor The physical quantity sensor 1 of the present embodiment is an angular velocity sensor capable of detecting angular velocities around the X-axis, angular velocities around the Y-axis, and angular velocities around the Z-axis. According to such an angular velocity sensor, one sensor can independently detect the angular velocities around the three axes, so that excellent convenience can be exhibited.

As shown in FIG. 1, the physical quantity sensor 1 includes a ring portion 31 capable of circular vibration, four substrate fixing portions (support portions) 61, 62, 63, and 64 that support the ring portion 31, and a substrate fixing portion 61. , 62, 63, and 64, and four beams 71, 72, 73, and 74 connecting the nodes of the annular vibration of the ring portion 31; A pair of first vibrating portions (first mass portions) 51 and 52 arranged to face each other, and a pair of second vibrating portions (second mass portions) having a movable portion and arranged to face each other in the Y-axis direction with the ring portion 31 interposed therebetween. 53 and 54, and a pair of first vibrating portions 51 and 52 and the ring portion 31 that connect the first vibrating portions 51 and 52 and the ring portion 31 so that the first vibrating portions 51 and 52 can vibrate with respect to the ring portion 31 in the X-axis direction. The inner spring portions (first spring portions) 81 and 82 and the second vibrating portions 53 and 54 are arranged so that they can vibrate with respect to the ring portion 31 in the direction parallel to the Y-axis. It has a pair of second inner spring portions (second spring portions) 83 and 84 that connect with the ring portion 31 . Furthermore, a vibrating means 4 for vibrating the first vibrating parts 51 and 52 in the X-axis direction at a first frequency in opposite phases, and a movable part and a second vibrating part included in the first vibrating parts 51 and 52 It has a transducer (detection means 9) that converts the amount of displacement of the movable part contained in 53 and 54 into an electric signal.
The ring portion 31 circularly vibrates in the X-axis direction and the Y-axis direction according to the first frequency. According to the physical quantity sensor 1 as described above, since the vibration of the ring portion 31 does not leak to the substrate, it is possible to increase the Q value of the vibration while miniaturizing the device. Therefore, it is possible to provide a small physical quantity sensor with excellent detection accuracy.

The physical quantity sensor 1 will be described in detail below.
As shown in FIG. 2, the physical quantity sensor 1 includes a vibration system structure 3 provided in the XY plane, a substrate 2 supporting the vibration system structure 3, and vibration means 4 for vibrating the vibration system structure 3. , and detecting means 9 for detecting the angular velocity applied to the physical quantity sensor 1 .
－Vibration system structure－
As shown in FIG. 2 , the vibration system structure 3 includes a ring portion (connection portion) 31 and a pair of first vibration portions (first mass portions) 51 arranged to face each other in the X-axis direction via the ring portion 31 . , 52 , first inner spring portions (first spring portions) 81 and 82 connecting the first vibrating portions 51 and 52 and the ring portion 31 , and a pair of spring portions arranged opposite to each other in the Y-axis direction via the ring portion 31 . second vibration portions (second mass portions) 53 and 54, second inner spring portions (second spring portions) 83 and 84 connecting the second vibration portions 53 and 54 and the ring portion 31, and the ring portion 31 inner fixed portions (support portions) 61, 62, 63, and 64 provided around the ring portion 31 and the inner fixed portions 61, 62, 63, and 64, beams 71, 72, 73, and 74; outside fixed parts 651, 652, 661, 662, 671, 672, 681, 682 provided outside the vibrating parts 51, 52, 53, 54; 652, 661, 662, 671, 672, 681, 682 are connected to each other.

The vibration system structure 3 of the present embodiment is mainly composed of silicon, and a thin film formation technique (e.g., deposition technique such as epitaxial growth technique or chemical vapor deposition technique) or various techniques are applied to a silicon substrate (silicon wafer). By using processing technology (for example, etching technology such as dry etching, wet etching, etc.) to process it into a desired outer shape, the aforementioned parts are integrally formed. Alternatively, after bonding a silicon substrate and a glass substrate together, only the silicon substrate can be processed into a desired outer shape to form the above-described portions.

At least, by using silicon as the main material of the vibration system structure 3, excellent vibration characteristics can be realized and excellent durability can be exhibited. In addition, it becomes possible to apply the fine processing technology used for manufacturing silicon semiconductor devices, and the size of the physical quantity sensor 1 can be reduced. Further, by using silicon as the main material of the vibrating structure 3, the physical quantity sensor 1 can be driven without forming electrodes on the vibrating structure 3, as will be described later. can be made simpler. It is possible to form the vibration system structure of the present invention by coating the periphery of a material other than silicon, such as an insulator, with a metal film.

In addition, the main material of the substrate 2 is not limited to silicon, and may be, for example, crystal or various types of glass.
In the vibrating system structure 3 of the present embodiment, the aggregate of the vibrating portions 51, 52, 53, and 54 has a substantially circular projected outline in plan view with the Z-axis direction as the normal. As a result, the size of the physical quantity sensor 1 can be reduced.

(Ring part)
The ring portion 31 has an annular shape in which the outer diameter and the inner diameter are concentric circles, and has no structure inside the inner diameter. In addition, below, the center of the ring part 31 is called "the center O."
Also, the ring portion 31 is arranged so that its axis is parallel to the Z-axis. This ring portion 31 is elastically deformable, and as shown in FIG. and a second state in which it expands in the X-axis direction and contracts in the Y-axis direction. In addition, below, the vibration which repeats a 1st state and a 2nd state is also called "annular vibration."

(First vibration part)
The first vibrating portion 51 has a plate shape. The first vibrating portion 51 includes a frame portion 511 forming the edge portion of the first vibrating portion 51 and a Z-axis direction displacement portion (first movable portion, a movable portion) 512 , a comb-shaped drive electrode 515 , and a Y-axis direction displacement portion (second movable portion, movable portion) 516 connected to the frame via a spring portion 517 .

Similarly, the first vibrating portion 52 also has a plate shape. The first vibrating portion 52 also includes a frame portion 521 forming the edge portion of the first vibrating portion 52 and a Z-axis direction displacement portion (first movable portion, a movable portion) 522 , a comb-shaped drive electrode 525 , and a Y-axis direction displacement portion (second movable portion, movable portion) 526 connected to the frame via a spring portion 527 .

The first vibrating portions 51 and 52 will be described in detail below. Since the first vibrating portions 51 and 52 have the same configuration, the first vibrating portion 51 will be representatively described below, and the first vibrating portions 51 and 52 will be described below. Description of the vibrating portion 52 is omitted.
The outer shape of the frame portion 511 forms a substantially 90-degree fan shape in plan view with the Z-axis as the normal. The frame portion 511 is formed with a pair of first openings 511a, a pair of second openings 511b, and a third opening 511c.

A plurality of comb-shaped drive electrodes 515 are arranged in each first opening 511a. Each drive electrode 515 extends in the Y-axis direction and is spaced apart from each other in the X-axis direction. This drive electrode 515 constitutes a part of the vibrating means 4 .
A Y-axis direction displacement portion 516 is provided inside each of the second openings 511b. The Y-axis direction displacement portion 516 is composed of a frame portion 516a and a plurality of detection electrodes 516b provided inside the frame portion 516a. The detection electrodes 516b extend in the X-axis direction and are spaced apart from each other in the Y-axis direction.

Each Y-axis displacement portion 516 is connected to the frame portion 511 by four spring portions 517 . Each spring portion 517 has a shape extending in the Y-axis direction while reciprocating in the X-axis direction. By forming each spring portion 517 into such a shape, the spring portion 517 can be smoothly expanded and contracted in the Y-axis direction, and the spring portion 517 can be extended in directions other than the Y-axis direction (that is, the X-axis direction and the Z-axis direction). direction) can be effectively prevented or suppressed. Therefore, each Y-axis direction displacement portion 516 can be smoothly displaced in the Y-axis direction.

A Z-axis displacement portion 512 is provided inside the third opening 511c. The Z-axis displacement portion 512 is connected to the frame portion 511 by shaft portions 513 and 514 . The shaft portions 513 and 514 extend in the Y-axis direction and are provided coaxially. Therefore, when a stress in the Z-axis direction is applied to the physical quantity sensor 1, the Z-axis direction displacement part 512 rotates around the shaft parts 513 and 514 while torsionally deforming the shaft parts 513 and 514 around the axes.
The first vibrating portion 51 has been described above. As described above, the first vibrating portion 52 has the same configuration as the first vibrating portion 51, and is symmetrical with respect to the Y-axis that intersects the center O of the ring portion 31 in plan view with the Z-axis as the normal line. is provided However, a requirement of the present invention is a configuration that minimizes vibration leakage to the substrate 2, and the constituent elements do not need to be completely symmetrical with respect to the center O and the Y axis.

(Second vibration part)
The second vibrating portion 53 has a plate shape. The second vibrating portion 53 includes a frame portion 531 forming the edge portion of the second vibrating portion 53 and a Z-axis direction displacement portion (third movable portion, A movable portion) 532 and an X-axis direction displacement portion (fourth movable portion, movable portion) 536 connected to the frame via a spring portion 537 .
Similarly, the second vibrating portion 54 also has a plate shape. The second vibrating portion 54 also includes a frame portion 541 forming the edge portion of the second vibrating portion 54 and a Z-axis direction displacement portion (third movable portion, movable portion) 542 and an X-axis direction displacement portion (fourth movable portion, movable portion) 546 connected to the frame via a spring portion 547 .

Hereinafter, the second vibrating portions 53 and 54 will be described in detail. Since the second vibrating portions 53 and 54 have the same configuration, the second vibrating portion 53 will be representatively described below, and the second vibrating portions 53 and 54 will be Description of the vibrating portion 54 is omitted.
The outer shape of the frame portion 531 forms a fan shape of approximately 90 degrees in plan view with the Z axis as the normal. Also, the outer shape of the frame portion 531 is the same as that of the frame portions 511 and 521 of the first vibrating portions 51 and 52 . The frame portion 531 is formed with a pair of second openings 531b and a third opening 531c.

An X-axis direction displacement portion 536 is provided inside each second opening 511b. The X-axis direction displacement portion 536 is composed of a frame portion 536a and a plurality of detection electrodes 536b provided inside the frame portion 536a. The detection electrodes 536b extend in the Y-axis direction and are spaced apart from each other in the X-axis direction.
Such an X-axis direction displacement portion 536 is connected to the frame portion 531 by four spring portions 537 . Each spring portion 537 has a shape extending in the X-axis direction while reciprocating in the Y-axis direction. By forming each spring portion 537 in such a shape, the spring portion 537 can be smoothly expanded and contracted in the X-axis direction, and the spring portion 537 can be extended in directions other than the X-axis direction (that is, the Y-axis direction and the Z-axis direction). direction) can be effectively prevented or suppressed. Therefore, the X-axis direction displacement portion 536 can be smoothly displaced in the X-axis direction.

A Z-axis displacement portion 532 is provided inside the third opening 531c. The Z-axis displacement portion 532 is connected to the frame portion 531 by shaft portions 533 and 534 . The shaft portions 533 and 534 extend in the X-axis direction and are provided coaxially. Therefore, when a stress in the Z-axis direction is applied to the physical quantity sensor 1, the Z-axis direction displacement part 532 rotates around the shaft parts 533 and 534 while torsionally deforming the shaft parts 533 and 534 around the axes.
The second vibrating portion 53 has been described above. As described above, the second vibrating portion 54 has the same configuration as the second vibrating portion 53, and is symmetrical with respect to the X-axis that intersects the center O of the ring portion 31 in plan view with the Z-axis as the normal line. is provided However, the second vibrating portions 53 and 54 do not need to be completely symmetrical with respect to the center O and the X axis, as described above.

(First inner spring portion)
The first inner spring portion 81 connects the first vibrating portion 51 and the ring portion 31 . Also, the first inner spring portion 82 connects the first vibrating portion 52 and the ring portion 31 . Since the first inner spring portions 81 and 82 have the same configuration, the first inner spring portion 81 will be described below as a representative, and the description of the first inner spring portion 82 will be omitted. do.

The first inner spring portion 81 is composed of a pair of spring portions 811 and 812. Each spring portion 811 and 812 has a shape extending in the X-axis direction while reciprocating in the Y-axis direction. Moreover, the spring portions 811 and 812 are provided symmetrically with respect to the X-axis that intersects the center O of the ring portion 31 in plan view with the Z-axis as the normal. By forming each of the spring portions 811 and 812 in such a shape, the first inner spring portion 81 can smoothly expand and contract in the X-axis direction while suppressing (restricting) deformation in the Y-axis and Z-axis directions. can be done. Therefore, as will be described later, it is possible to smoothly vibrate the first vibrating portion 51 in the X-axis direction while expanding and contracting the first inner spring portion 81 in the X-axis direction.

(Second inner spring portion)
The second inner spring portion 83 connects the second vibrating portion 53 and the ring portion 31 . Also, the second inner spring portion 84 connects the second vibrating portion 54 and the ring portion 31 . Since the second inner spring portions 83 and 84 have the same configuration, the second inner spring portion 83 will be described below as a representative, and the description of the first inner spring portion 84 will be omitted. do.

The second inner spring portion 83 is composed of a pair of spring portions 831 and 832. Each spring portion 831 and 832 has a shape extending in the Y-axis direction while reciprocating in the X-axis direction. Moreover, the spring portions 831 and 832 are provided symmetrically with respect to the Y-axis that intersects the center O of the ring portion 31 in plan view with the Z-axis as the normal. By configuring the second inner spring portion 83 as described above, the second inner spring portion 83 can be smoothly expanded and contracted in the Y-axis direction while suppressing (restricting) deformation in the X-axis direction and the Z-axis direction. can be done. Therefore, as will be described later, it is possible to smoothly vibrate the second vibrating portion 53 in the Y-axis direction while expanding and contracting the second inner spring portion 83 in the Y-axis direction.

(inner fixed part)
The inner fixing parts 61 , 62 , 63 , 64 have the function of supporting the ring part 31 . Such inner fixed portions 61, 62, 63, 64 are provided inside the four vibrating portions 51, 52, 53, 54, respectively. By arranging the inner fixing portions 61, 62, 63, and 64 in this way, the space can be effectively utilized, and the size of the physical quantity sensor 1 can be reduced. Moreover, since the lengths of the beams 71, 72, 73, and 74 can be shortened, the ring portion 31 can be supported more stably. Furthermore, by arranging the inner fixing parts 61, 62, 63, 64 in this way, they can serve as stoppers for the first vibrating parts 51, 52 and the second vibrating parts 53, 54. FIG.

The inner fixing portions 61, 62, 63, and 64 are provided around the outer circumference of the ring portion 31 at intervals of 90 degrees in plan view with the Z axis as the normal. Specifically, J1 and J2 are a pair of axes that intersect the center O of the ring portion 31 and are inclined by 45 degrees with respect to each of the X axis and the Y axis in plan view with the Z axis as the normal. When this is done, the inner fixed portions 61 and 63 are positioned on the axis J1 and arranged to face each other with the ring portion 31 interposed therebetween. In addition, the inner fixing portions 62 and 64 are positioned on the axis J2 and arranged to face each other with the ring portion 31 interposed therebetween.
In other words, the four inner fixed portions 61, 62, 63, 64 are provided at mirror-symmetrical positions with respect to both the X-axis and the Y-axis. Thereby, the ring portion 31 can be stably supported.

(Beam)
Beams 71 , 72 , 73 , 74 connect ring portion 31 and inner fixing portions 61 , 62 , 63 , 64 . The beam 71 extends linearly along the axis J1 and connects the ring portion 31 and the inner fixing portion 61 . Similarly, the beam 72 extends linearly along the axis J2 and connects the ring portion 31 and the inner fixing portion 62 . The beam 73 extends linearly along the axis J1 and connects the ring portion 31 and the inner fixing portion 63 . The beam 74 extends linearly along the axis J2 and connects the ring portion 31 and the inner fixed portion 64 .

Such beams 71 , 72 , 73 , 74 are respectively inclined by 45 degrees with respect to the respective X-axis and Y-axis of the side surface of the ring portion 31 (fixing points, fixing points of the first group). It is connected to the. As shown in FIG. 3, each fixed point is a node of the annular vibration of the ring portion 31 (that is, a portion where substantially no displacement or deformation occurs). By connecting the beams 71 , 72 , 73 , 74 to the respective fixed points, the beams 71 , 72 , 73 , 74 do not hinder the circular vibration of the ring portion 31 , and the vibration caused by the circular vibration is prevented. Leakage of vibration to the outside of the vibration system structure 3 via the beams 71, 72, 73, 74 and the fixed portions 61, 62, 63, 64 is prevented or suppressed. As a result, the vibration Q value of the vibration system structure 3 is increased, and the detection accuracy of the physical quantity sensor 1 is improved. In addition, since the vibration system structure 3 can be vibrated efficiently, the output of the vibrating means 4 can be reduced, and as a result, the size of the physical quantity sensor 1 can be reduced.
Moreover, the beams 71 , 72 , 73 , and 74 are restricted from moving (deforming) in the radial direction (extending direction) with respect to the center O of the ring portion 31 . As a result, the ring portion 31 can be more stably supported by the inner fixing portions 61, 62, 63, and 64, and vibration leakage can be more effectively prevented or suppressed.

(outside fixed part)
The outer fixed parts 651, 652, 661, 662, 671, 672, 681, 682 are provided outside the four vibrating parts 51, 52, 53, 54, respectively. In addition, the outer fixed portions 651 and 652 are provided corresponding to the first vibrating portion 51 and are separated from each other in the Y-axis direction. Similarly, the outer fixed portions 661 and 662 are provided corresponding to the first vibrating portion 52 and separated from each other in the Y-axis direction. In addition, the outer fixing portions 671 and 672 are provided corresponding to the second vibrating portion 53 and are separated from each other in the X-axis direction. In addition, the outer fixed portions 681 and 682 are provided corresponding to the second vibrating portion 54 and are provided apart from each other in the X-axis direction.

(outer spring part)
The outer spring portions 851, 852, 861, 862, 871, 872, 881, 882 connect the outer fixing portions 651, 652, 661, 662, 671, 672, 681, 682 and the vibrating portions 51, 52, 53, 54. are connected. Specifically, the outer spring portions 851 and 852 connect the first vibrating portion 51 and the outer fixing portions 651 and 652 , and the outer spring portions 861 and 862 connect the first vibrating portion 52 and the outer fixing portion 661 . , 656, the outer spring portions 871 and 872 connect the second vibrating portion 53 and the outer fixed portions 671 and 672, and the outer spring portions 881 and 882 connect the second vibrating portion 54 and the outer fixed portions. The parts 681 and 682 are connected.

The outer spring portions 851 and 852 are shaped to extend in the X-axis direction while reciprocating in the Y-axis direction. Also, the outer spring portions 851 and 852 are provided symmetrically with respect to the X-axis that intersects the center O of the ring portion 31 .
Similarly, the outer spring portions 861 and 862 are shaped to extend in the X-axis direction while reciprocating in the Y-axis direction. Also, the outer spring portions 861 and 862 are provided symmetrically with respect to the X-axis that intersects the center O of the ring portion 31 .
The outer spring portions 871 and 872 are shaped to extend in the Y-axis direction while reciprocating in the X-axis direction. Also, the outer spring portions 871 and 872 are provided symmetrically with respect to the Y-axis that intersects the center O of the ring portion 31 .

Similarly, the outer spring portions 881 and 882 are shaped to extend in the Y-axis direction while reciprocating in the X-axis direction. Also, the outer spring portions 881 and 882 are provided symmetrically with respect to the Y-axis intersecting the center O of the ring portion 31 . However, it is not an essential condition of the present invention that the outer spring portions 851 and 852, 861 and 862, 871 and 872, 881 and 882 are completely symmetrical with respect to the center O, the X axis, or the Y axis.
The vibration system structure 3 as described above has a unique resonance frequency. Thereby, as will be described later, the vibration system structure 3 can be driven in the resonance mode, and the angular velocity detection accuracy can be improved.

-substrate-
The substrate 2 supports the vibration system structure 3 . As shown in FIG. 2, the substrate 2 has a plate shape and is provided within the XY plane. By bonding the inner fixing portions 61, 62, 63, 64 and the outer fixing portions 651, 652, 661, 662, 671, 672, 681, 682 of the vibration system structure 3 to the upper surface of the substrate 2, the vibration A system structure 3 is fixed and supported on the substrate 2 .

The bonding method of the substrate 2 and the inner fixing parts 61, 62, 63, 64 and the outer fixing parts 651, 652, 661, 662, 671, 672, 681, 682 is not particularly limited, and various methods such as direct bonding and anodic bonding are possible. Depending on the constituent materials of the vibration system structure 3 and the substrate 2, they may be joined using a joining method.
In addition, recesses are formed on the upper surface of the substrate 2 (the surface facing the vibration system structure 3) as necessary. This concave portion has a function of preventing contact between the substrate 2 and the portion of the vibration system structure 3 that actually vibrates (for example, the first vibrating portions 51 and 52 and the second vibrating portions 53 and 54).
Such a substrate 2 is formed by processing, for example, a semiconductor substrate such as silicon, an insulating substrate such as glass or quartz, or a composite substrate in which a semiconductor layer and an insulating layer are laminated into a desired outer shape using various processing techniques. It is formed by This simplifies the configuration of the physical quantity sensor 1 .

-Vibration Means-
The vibrating means 4 has a function of vibrating the first vibrating portions 51 and 52 in opposite phases to each other in the X-axis direction at a predetermined frequency (first frequency). That is, the vibrating means 4 displaces the first vibrating portions 51 and 52 in a direction (inward) toward the ring portion 31 and in a direction (outward) in which the first vibrating portions 51 and 52 move away from the ring portion 31 (outward). ), the first vibrating portions 51 and 52 are vibrated so as to repeat the state of displacing to ).

Such vibrating means 4 has a plurality of fixed electrodes 41 provided corresponding to the driving electrodes 515 of the first vibrating portion 51 . Each fixed electrode 41 has a pair of comb-shaped electrode pieces 411 and 412 arranged opposite to each other in the X-axis direction with a drive electrode 515 interposed therebetween. Similarly, the vibrating means 4 has a plurality of fixed electrodes 42 provided corresponding to the drive electrodes 525 of the first vibrating portion 52 . Each fixed electrode 42 has a pair of comb-shaped electrode pieces 421 and 422 arranged opposite to each other in the X-axis direction with a drive electrode 525 interposed therebetween.

The vibrating means 4 applies alternating voltages 180 degrees out of phase to the electrode strips 411 and 421 and to the electrode strips 412 and 422 from a power source (not shown). Electrostatic forces are generated between the strips 411 and 421 and between the drive electrodes 515 and 525 and the electrode strips 412 and 422, respectively, to generate the first inner spring portions 81 and 82 and the outer spring portions 851, 852 and 861. , 862 in the X-axis direction, the first vibrating portions 51 and 52 vibrate in the X-axis direction at a predetermined frequency and in opposite phases.

Although the frequency of the alternating voltage is not particularly limited, it is preferably substantially equal to the resonance frequency of the vibrating structure 3 . As a result, since the vibration system structure 3 can be driven in the resonance mode, it is possible to improve the detection accuracy of the angular velocity.
When the first vibrating portions 51 and 52 vibrate in opposite phases, the vibration is transmitted to the ring portion 31 through the first inner spring portions 81 and 82 . Then, when the first vibrating portions 51 and 52 are displaced inward, the ring portion 31 contracts in the X-axis direction and expands in the Y-axis direction. When it is displaced outward, it deforms so as to expand in the X-axis direction and contract in the Y-axis direction. That is, the ring portion 31 is circularly vibrated in synchronization with the vibration of the first vibrating portions 51 and 52 .

Furthermore, when the ring portion 31 is deformed so as to contract in the X-axis direction and expand in the Y-axis direction due to the circular vibration, the deformation causes both the second vibrating portions 53 and 54 to be displaced outward. Both the second vibrating parts 53 and 54 are displaced inward when deformed so as to expand in the axial direction and contract in the Y-axis direction. That is, in synchronization with the circular vibration of the ring portion 31, the second vibrating portions 53 and 54 vibrate in the Y-axis direction in opposite phases.

That is, in the physical quantity sensor 1, the circular vibration of the ring portion 31 is used to displace the first vibrating portions 515 and 52 inward while displacing the second vibrating portions 53 and 54 outward. , and displacing the first vibrating portions 51 and 52 outward while displacing the second vibrating portions 53 and 54 inward are repeated. can.

The fixed points to which the beams 71, 72, 73, and 74 of the ring portion 31 are connected are the nodes of the ring vibration of the ring portion 31 (that is, the portions where substantially no displacement or deformation occurs). Therefore, the beams 71, 72, 73, and 74 do not interfere with the circular vibration of the ring portion 31, and the vibration caused by the circular vibration does not , 64 to the outside of the vibration system structure 3 is prevented or suppressed. As a result, the vibration Q value of the vibration system structure 3 is increased, and the detection accuracy of the physical quantity sensor 1 is improved. In addition, since the vibration system structure 3 can be vibrated efficiently, the output of the vibrating means 4 can be reduced, and as a result, the size of the physical quantity sensor 1 can be reduced.
Further, according to the electrostatic drive as in the present embodiment, the above vibration can be generated more smoothly and reliably. Further, in this embodiment, since the vibrating means 4 is connected to the inner side of each vibrating portion 51, 52, 53, 54, the space can be effectively utilized and the size of the physical quantity sensor 1 can be reduced.

-Detection means 9-
The detection means 9 comprises displacement transducers 91, 92, 93, 94 and rotation transducers 95, 96, 97, 98, as shown in FIG. In addition, in FIG. 4, illustration of some of the components of the physical quantity sensor 1 is omitted for convenience of explanation.
The displacement transducer 91 has a Y-axis direction displacement portion 516 provided in the first vibrating portion 51 and a fixed electrode 911 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 911 are provided corresponding to the detection electrodes 516 b of the Y-axis displacement portion 516 . Each fixed electrode 911 has a pair of electrode pieces 911a and 911b arranged opposite to each other via a detection electrode 516b, and these electrode pieces 911a and 911b are provided extending in the X-axis direction. .

The displacement transducer 92 has a Y-axis direction displacement portion 526 provided in the first vibrating portion 52 and a fixed electrode 921 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 921 are provided corresponding to the detection electrodes 526 b of the Y-axis displacement portion 526 . Each fixed electrode 921 has a pair of electrode pieces 921a and 921b arranged opposite to each other via a detection electrode 526b, and these electrode pieces 921a and 921b are provided extending in the X-axis direction. .

The displacement transducer 93 has an X-axis direction displacement portion 536 provided in the second vibrating portion 53 and a fixed electrode 931 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 931 are provided corresponding to the detection electrodes 536 b of the X-axis direction displacement portion 536 . Each fixed electrode 931 has a pair of electrode strips 931a and 931b arranged opposite to each other with a detection electrode 536b interposed therebetween, and these electrode strips 931a and 931b are provided extending in the Y-axis direction. .

The displacement transducer 94 has an X-axis direction displacement portion 546 provided in the second vibrating portion 54 and a fixed electrode 941 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 941 are provided corresponding to the detection electrodes 546 b of the X-axis direction displacement portion 546 . Each fixed electrode 941 has a pair of electrode strips 941a and 941b arranged to face each other via a detection electrode 546b, and these electrode strips 941a and 941b are provided extending in the Y-axis direction. .
In this embodiment, since these displacement transducers 91, 92, 93, and 94 are connected inside the vibrating parts 51, 52, 53, and 54, the space of the device can be effectively used, and the physical quantity sensor 1 can be made smaller. can be achieved.

The rotation transducer 95 is fixed to the substrate 2 and faces the Z-axis direction displacement portion 512 provided on the first vibrating portion 51 via the shafts 513 and 514 while being separated from the Z-axis direction displacement portion 512 in the Z-axis direction. and a fixed electrode 951 disposed thereon.
The rotation transducer 96 is fixed to the substrate 2 and faces the Z-axis direction displacement portion 522 provided on the first vibrating portion 52 via the shafts 523 and 524 while being spaced apart in the Z-axis direction. and a fixed electrode 961 disposed thereon.

The rotation transducer 97 is fixed to the substrate 2 and faces the Z-axis direction displacement portion 532 provided on the second vibrating portion 53 via the shafts 533 and 534 while being spaced apart in the Z-axis direction. and a fixed electrode 971 disposed thereon.
The rotation transducer 98 is fixed to the substrate 2 and faces the Z-axis direction displacement portion 542 provided on the second vibrating portion 54 via the shafts 543 and 544 while being spaced apart in the Z-axis direction. and a fixed electrode 981 disposed thereon.
In this embodiment, since these rotary transducers 95, 96, 97, and 98 are connected inside the vibrating units 51, 52, 53, and 54, the space of the device can be effectively utilized, and the physical quantity sensor 1 can be miniaturized. can be achieved.

A method of detecting the angular velocity by the detecting means 9 will be briefly described below with reference to FIGS. 5, 6 and 7. FIG. 5, 6 and 7 omit illustration of a part of the configuration of the physical quantity sensor 1 for convenience of explanation.
-Detection of angular velocity around Z-axis-
As shown in FIG. 5, the vibrating means 4 vibrates the first vibrating portions 51 and 52 in the X-axis direction, while vibrating the second vibrating portions 53 and 54 in the Y-axis direction. When an angular velocity ω about the axis is applied, a Coriolis force in the Y-axis direction acts on the first vibrating portions 51 and 52 vibrating in the X-axis direction, and the second vibrating portions 53 and 54 vibrating in the Y-axis direction act on the X-axis direction. of Coriolis force acts.

When such a Coriolis force acts, in the first vibrating portion 51, the Y-axis direction displacement portion 516 is displaced in the Y-axis direction with respect to the frame portion 511, thereby causing static electricity between the detection electrode 516b and the electrode piece 911a. The capacitance and the capacitance between the detection electrode 516b and the electrode strip 911b change, resulting in a difference in these capacitances. Similarly, in the first vibrating portion 52, the Y-axis direction displacement portion 526 is displaced in the Y-axis direction with respect to the frame portion 521, thereby causing the electrostatic capacitance between the detection electrode 526b and the electrode piece 921a and the detection electrode The capacitance between 516b and the electrode piece 921b changes and a difference is produced between these capacitances.

In addition, in the second vibrating portion 53, the X-axis direction displacement portion 536 is displaced in the X-axis direction with respect to the frame portion 531, whereby the capacitance between the detection electrode 536b and the electrode piece 931a and the capacitance between the detection electrode 536b , and the capacitance between the electrode piece 931b changes, and a difference occurs between these capacitances. Similarly, in the second vibrating portion 54, the X-axis direction displacement portion 546 is displaced in the X-axis direction with respect to the frame portion 541, thereby causing the electrostatic capacitance between the detection electrode 546b and the electrode piece 941a and the detection electrode The capacitance between 546b and the electrode piece 941b changes and a difference is produced between these capacitances.
The detecting means 9 detects such changes in capacitance occurring in the vibrating portions 51, 52, 53, and 54, and detects the angular velocity about the Z-axis applied to the physical quantity sensor 1 from the detection results. can be done.

-Detection of angular velocity around X-axis-
As in the perspective view shown in FIG. When an angular velocity around the X-axis is applied to the sensor 1, a Coriolis force in the Z-axis direction acts on the second vibrating parts 53 and 54 vibrating in the Y-axis direction.

When such a Coriolis force acts, the Z-axis direction displacement portion 532 rotates around the shaft portions 533 and 534 in the second vibrating portion 53 . The capacitance changes. Similarly, in the second vibrating portion 54 , the Z-axis direction displacement portion 542 rotates around the shaft portions 543 and 544 , thereby changing the capacitance between the Z-axis direction displacement portion 542 and the fixed electrode 981 .
The detecting means 9 can detect such a change in capacitance occurring in the second vibrating portions 53 and 54 and detect the angular velocity about the X-axis applied to the physical quantity sensor 1 from the detection result.

-Detection of angular velocity around Y-axis-
As shown in FIG. 7, the vibrating means 4 vibrates the first vibrating portions 51 and 52 in the X-axis direction, while vibrating the second vibrating portions 53 and 54 in the Y-axis direction. When an angular velocity around the axis is applied, a Coriolis force in the Z-axis direction acts on the first vibrating parts 51 and 52 vibrating in the X-axis direction.

When such a Coriolis force acts, the Z-axis direction displacement portion 512 rotates around the shaft portions 513 and 514 in the first vibrating portion 51 . The capacitance changes. Similarly, in the first vibrating portion 52 , the Z-axis direction displacement portion 522 rotates around the shaft portions 523 and 524 , thereby changing the capacitance between the Z-axis direction displacement portion 522 and the fixed electrode 961 .

The detecting means 9 can detect such a change in capacitance occurring in the first vibrating portions 51 and 52 and detect the angular velocity about the X-axis applied to the physical quantity sensor 1 from the detection result.
As described above, the physical quantity sensor 1 can detect angular velocities around all of the X, Y, and Z axes. Therefore, the physical quantity sensor 1 is compact and highly convenient. Further, in this embodiment, since the electrostatic detection means 9 is used, it is possible to improve the detection accuracy while reducing the size of the device.

In the physical quantity sensor 1 , the displacement transducers 91 and 92 are paired and have a function of canceling acceleration in the Y-axis direction (linear acceleration) applied to the physical quantity sensor 1 . A set of displacement transducers 93 and 94 has a function of canceling the acceleration applied to the physical quantity sensor 1 in the X-axis direction. A set of rotation transducers 95 , 96 , 97 , and 98 has a function of canceling the acceleration applied to the physical quantity sensor 1 in the Z-axis direction.

Specifically, for example, when acceleration is applied to the physical quantity sensor 1 in the Y-axis direction, both the Y-axis direction displacement portion 516 of the first vibrating portion 51 and the Y-axis direction displacement portion 526 of the first vibrating portion 52 move along the Y-axis. Displace in the same direction. Such displacement of the Y-axis direction displacement portions 516 and 526 is different from displacement when an angular velocity around the Z-axis is applied (that is, displacement of the Y-axis direction displacement portions 516 and 526 to opposite sides in the Y-axis direction). ing. Therefore, according to the physical quantity sensor 1, the change in the capacitance between the detection electrode 516b and the electrode pieces 911a and 911b and the change in the capacitance between the detection electrode 526b and the electrode pieces 921a and 921b causes the physical quantity sensor 1 to The applied acceleration can be detected, and when this angular velocity is detected, the detected acceleration can be electrically canceled by correction processing or the like. As a result, the detection accuracy of the angular velocity of the physical quantity sensor 1 is further improved. Acceleration in the X-axis direction and acceleration in the Z-axis direction can also be canceled in the same manner.

<Second embodiment>
FIG. 8 is a plan view showing a second embodiment of the physical quantity sensor of the invention.
The physical quantity sensor of this embodiment will be described with a focus on differences from the above-described embodiments, and descriptions of the same items will be omitted.
The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the vibrating means is different. In addition, in FIG. 8, the same code|symbol is attached|subjected to the structure similar to 1st Embodiment mentioned above.

In the physical quantity sensor 1 of this embodiment, the vibrating means 4 is also connected to the second vibrating portions 53 and 54 . That is, the second vibrating portion 53 is provided with a plurality of drive electrodes 535 extending in the X-axis direction, and the second vibrating portion 54 is also provided with a plurality of drive electrodes 545 extending in the X-axis direction. there is
The vibrating means 4 also has a plurality of fixed electrodes 43 provided corresponding to the driving electrodes 535 of the second vibrating portion 53 . Each fixed electrode 43 has a pair of comb-shaped electrode pieces 431 and 432 arranged opposite to each other in the Y-axis direction with a drive electrode 535 interposed therebetween. Similarly, the vibrating means 4 has a plurality of fixed electrodes 44 provided corresponding to the drive electrodes 545 of the second vibrating portion 54 . Each fixed electrode 44 has a pair of comb-shaped electrode pieces 441 and 442 arranged opposite to each other in the Y-axis direction with a drive electrode 545 interposed therebetween.

The vibrating means 4 applies alternating voltages 180 degrees out of phase to the electrode strips 411, 421, 432, and 442 and the electrode strips 412, 422, 431, and 441 from a power supply (not shown) to generate the first While vibrating the vibrating portions 51 and 52 in opposite phases in the X-axis direction, the second vibrating portions 53 and 54 vibrate in opposite phases in the Y-axis direction to the opposite side of the first vibrating portions 51 and 52 .
Such a second embodiment can also exhibit the same effect as the first embodiment described above.

<Third Embodiment>
FIG. 9 is a plan view showing a third embodiment of the physical quantity sensor of the invention.
The physical quantity sensor of this embodiment will be described with a focus on differences from the above-described embodiments, and descriptions of the same items will be omitted.
The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the projected shape of the vibration system structure is different. In addition, in FIG. 9, the same code|symbol is attached|subjected to the structure similar to 1st Embodiment mentioned above.

In the physical quantity sensor 1 of the present embodiment, each of the vibrating portions 51, 52, 53, and 54 has a trapezoidal outer shape in plan view with the Z axis as the normal. In a plan view with the Z-axis direction as a normal line, the projection outline of the assembly of the vibrating portions 51, 52, 53, and 54 is substantially rectangular. As a result, the size of the physical quantity sensor 1 can be reduced. Further, for example, when the physical quantity sensor 1 is mounted in a chip, mounting on the chip becomes easy because it corresponds to the shape of the chip.
Such a third embodiment can also exhibit the same effect as the first embodiment described above.

<Fourth Embodiment>
FIG. 10 is a plan view showing a fourth embodiment of the physical quantity sensor of the invention.
The physical quantity sensor of this embodiment will be described with a focus on differences from the above-described embodiments, and descriptions of the same items will be omitted.
The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the vibrating means is different. In addition, in FIG. 10, the same code|symbol is attached|subjected to the structure similar to 1st Embodiment mentioned above.

The vibrating means 4 of this embodiment is configured to vibrate the first vibrating portions 51 and 52 in the X-axis direction by piezoelectric driving. Below, the first vibrating portion 51 will be described as a representative, and the description of the first vibrating portion 52 will be omitted.
In the first vibrating portion 51, a fixed portion 518a is provided inside the first opening 511a and is fixed to the substrate 2, and the fixed portion 518a is provided inside the first opening 511a and connects the frame portion 511 and the fixed portion 518a. It has a plurality of connecting portions 518b. Each connecting portion 518b extends in the Y-axis direction and is spaced apart from each other in the X-axis direction.
The vibrating means 4 has a pair of piezoelectric elements 45 and 46 provided on each connecting portion 518b. The piezoelectric elements 45 and 46 extend in the Y-axis direction and are spaced apart in the X-axis direction.

The piezoelectric elements 45 and 46 are composed of a pair of electrodes facing each other in the Z-axis direction and a piezoelectric layer interposed between the pair of electrodes, and a voltage is applied between the pair of electrodes. By doing so, it expands or contracts in the Y-axis direction. Therefore, when each piezoelectric element 45 is expanded and each piezoelectric element 46 is contracted, each connecting portion 518b is bent and deformed, and the end portion of the side connected to the frame portion 511 is displaced toward the ring portion 31 side. As a result, the first vibrating portion 51 is displaced inward. Conversely, when each piezoelectric element 45 is contracted and each piezoelectric element 46 is expanded, each connecting portion 518 b is bent and deformed, and the end portion of the side connected to the frame portion 511 is opposite to the ring portion 31 . side, and as a result, the first vibrating portion 51 is displaced outward.

In the vibrating means 4 configured, a state in which each piezoelectric element 45 is expanded and each piezoelectric element 46 is contracted and a state in which each piezoelectric element 45 is contracted and each piezoelectric element 46 is expanded are alternately performed. , the first vibrating portions 51 and 52 are vibrated in opposite phases to each other in the X-axis direction.
Such a fourth embodiment can also exhibit the same effect as the first embodiment described above.

<Fifth Embodiment>
FIG. 11 is a plan view showing a fifth embodiment of the physical quantity sensor of the invention.
The physical quantity sensor of this embodiment will be described with a focus on differences from the above-described embodiments, and descriptions of the same items will be omitted.
The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In addition, in FIG. 11, the same code|symbol is attached|subjected to the structure similar to 1st Embodiment mentioned above. Also, since the configurations of the first vibrating portions 51 and 52 are similar to each other, and the configurations of the second vibrating portions 53 and 54 are similar to each other, the first vibrating portion 51 and the second vibrating portion 53 will be described below as a representative. , and description of the first vibrating portion 52 and the second vibrating portion 54 is omitted.

The first vibrating portion 51 is provided inside the second opening 511b, and includes a plate-like Y-axis direction displacement portion 519a that can be displaced in the Y-axis direction with respect to the frame portion 511, a Y-axis direction displacement portion 519a, and the frame portion. 511 and a plurality of spring portions 519b. Each spring portion 519b is provided extending in the X-axis direction.
The second vibrating portion 53 is provided inside the second opening 531b, and includes a plate-shaped X-axis direction displacement portion 539a that can be displaced in the X-axis direction with respect to the frame portion 531, an X-axis direction displacement portion 539a, and a frame portion. 531 and a plurality of spring portions 539b. Each spring portion 539a is provided to extend in the Y-axis direction.

The detection means 9 has a pair of piezoelectric elements 991 and 992 provided on each spring portion 519 b of the first vibrating portion 51 . The piezoelectric elements 991 and 992 extend in the X-axis direction and are spaced apart from each other in the Y-axis direction. The detection means 9 also has a pair of piezoelectric elements 993 and 994 provided on each spring portion 539 b of the second vibrating portion 53 . The piezoelectric elements 993 and 994 extend in the Y-axis direction and are spaced apart from each other in the X-axis direction.

Each of the piezoelectric elements 991, 992, 993, and 994 is composed of a pair of electrodes opposed to each other in the Z-axis direction and a piezoelectric layer interposed between the pair of electrodes.
Such piezoelectric elements 991, 992, 993, and 994 have the property of generating electric charge by deformation, and the greater the amount of deformation, the more electric charge is generated.
Therefore, when an angular velocity around the Z-axis is applied to the physical quantity sensor 1, and the Y-axis direction displacement portion of the first vibrating portion 51 bends and deforms the spring portion 519b in the Y-axis direction while displacing it in the Y-axis direction, the piezoelectric element 991, When the 992 generates an electric charge having a magnitude corresponding to the amount of deformation of the spring portion 519b, and the X-axis direction displacement portion of the second vibrating portion 53 bends and deforms the connecting portion 539b in the X-axis direction while displacing it in the X-axis direction, The piezoelectric elements 993 and 994 generate electric charges having a magnitude corresponding to the amount of deformation of the connecting portion 539b.
The detection means 9 detects the angular velocity about the Z-axis by detecting the magnitude of charges generated from the piezoelectric elements 991, 992, 993, and 994. FIG.

<Sixth Embodiment>
FIG. 12 is a plan view showing a sixth embodiment of the physical quantity sensor of the invention.
The physical quantity sensor of this embodiment will be described with a focus on differences from the above-described embodiments, and descriptions of the same items will be omitted.
The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In addition, in FIG. 12, the same code|symbol is attached|subjected to the structure similar to 1st Embodiment mentioned above. Also, since the configurations of the first vibrating portions 51 and 52 are similar to each other, and the configurations of the second vibrating portions 53 and 54 are similar to each other, the first vibrating portion 51 and the second vibrating portion 53 will be described below as a representative. , and description of the first vibrating portion 52 and the second vibrating portion 54 is omitted.

The first vibrating portion 51 is provided inside the second opening 511b, and includes a plate-like Y-axis direction displacement portion 519a that can be displaced in the Y-axis direction with respect to the frame portion 511, a Y-axis direction displacement portion 519a, and the frame portion. 511 and a plurality of spring portions 519b. Each spring portion 519b is provided extending in the X-axis direction.
The second vibrating portion 53 is provided inside the second opening 531b, and includes a plate-shaped X-axis direction displacement portion 539a that can be displaced in the X-axis direction with respect to the frame portion 531, an X-axis direction displacement portion 539a, and a frame portion. 531 and a plurality of spring portions 539b. Each spring portion 539a is provided to extend in the Y-axis direction.

The detection means 9 of this embodiment has a piezoresistive portion 995 provided on each spring portion 519b of the first vibrating portion 51 and a piezoresistive portion 996 provided on each spring portion 539b of the second vibrating portion 53. are doing. For the piezoresistive portions 995 and 996, for example, when the vibrating structure 3 is formed using an n-type silicon substrate, an impurity such as boron is diffused at a high concentration, and a p-type silicon layer is formed in the diffusion portion. It can be formed by forming.

The piezoresistive portions 995 and 996 have the property that their resistance values change due to deformation, and the greater the amount of deformation, the greater the amount of change in resistance value. Therefore, when an angular velocity around the Z-axis is applied to the physical quantity sensor 1 and the Y-axis direction displacement portion of the first vibrating portion 51 bends and deforms the spring portion 519b in the Y-axis direction while displacing it in the Y-axis direction, the piezoresistive portion 995 The resistance value changes according to the amount of deformation of the spring portion 519b, and when the X-axis direction displacement portion of the second vibrating portion 53 bends and deforms the connecting portion 539b in the X-axis direction while displacing it in the X-axis direction, the piezo The resistance value of the resistance portion 996 changes according to the amount of deformation of the connecting portion 539b.
The detecting means 9 detects the angular velocity about the Z-axis by detecting such changes in the resistance values of the piezoresistive portions 995 and 996 .

<Seventh embodiment>
FIG. 13 is a plan view showing a seventh embodiment of the physical quantity sensor of the invention. In addition, in FIG. 13, illustration of a part of the configuration of the physical quantity sensor is omitted for convenience of explanation.
The physical quantity sensor of this embodiment will be described with a focus on differences from the above-described embodiments, and descriptions of the same items will be omitted.

The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In addition, in FIG. 13, the same code|symbol is attached|subjected to the structure similar to 1st Embodiment mentioned above. In addition, since the configurations of the four vibrating sections are the same as each other except for their arrangement around the Z axis, the first vibrating section 51 will be representatively described below, and the first vibrating section 52 and the second vibrating section will be described. The description of the parts 53 and 54 is omitted.

In the first vibrating portion 51 , a Y-axis direction displacement portion 516 is provided outside the frame portion 511 and connected to the frame portion 511 by a plurality of spring portions 517 . Such a Y-axis direction displacement portion 516 is composed of a plate-shaped base portion 516c and a plurality of detection electrodes 516d projecting from the base portion 516c in the X-axis direction.
The displacement transducer 91 of the detection means 9 of this embodiment has a Y-axis direction displacement portion 516 provided in the first vibrating portion 51 and a fixed electrode 911 fixed to the substrate 2 via an anchor. . A plurality of fixed electrodes 911 are provided corresponding to the detection electrodes 516 d of the Y-axis direction displacement portion 516 . Each fixed electrode 911 has a pair of electrode pieces 911a and 911b arranged opposite to each other via the detection electrode 516d, and these electrode pieces 911a and 911b are provided extending in the X-axis direction. .

<Eighth embodiment>
FIG. 14 is a plan view showing an eighth embodiment of the physical quantity sensor of the invention. In addition, in FIG. 13, illustration of a part of the configuration of the physical quantity sensor is omitted for convenience of explanation.
The physical quantity sensor of this embodiment will be described with a focus on differences from the above-described embodiments, and descriptions of the same items will be omitted.

The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In addition, in FIG. 14, the same code|symbol is attached|subjected to the structure similar to 1st Embodiment mentioned above. In addition, since the configurations of the four vibrating sections are the same as each other except for their arrangement around the Z axis, the first vibrating section 51 will be representatively described below, and the first vibrating section 52 and the second vibrating section will be described. The description of the parts 53 and 54 is omitted.

In the first vibrating portion 51, a Z-axis displacement portion 516A provided outside the frame portion 511 is connected to the frame portion 511 by a pair of connection springs 517A. Also, the pair of connecting springs 517A extends along the radial direction with respect to the center O of the ring portion 31, respectively. The Z-axis displacement portion 516A has a plate-like base portion 516Aa and a plurality of fixed electrodes 516Ab projecting radially from the base portion 516Aa with respect to the center O of the ring portion 31 .

In such a first vibrating portion 51, the Coriolis force in the Y-axis direction generated when an angular velocity about the Z-axis is applied causes the Z-axis displacement portion 516A to bend and deform the pair of connecting springs 517A while moving the Z-axis. rotate around. According to such a configuration, since the Coriolis force in the Y-axis direction can be changed into stress around the Z-axis, the amount of displacement of the Z-axis displacement portion 516A can be increased.

The rotation transducer 91 of the detecting means 9 of this embodiment has a Z-axis displacement portion 516A provided in the first vibrating portion 51 and a fixed electrode 911 fixed to the substrate 2 via an anchor. . A plurality of fixed electrodes 911 are provided corresponding to the fixed electrodes 516Ab of the Z-axis displacement portion 516A. Each fixed electrode 911 has a pair of electrode pieces 911a and 911b arranged to face each other via a fixed electrode 516Ab.
The resonator element of each embodiment as described above can be applied to various electronic devices, and the obtained electronic devices have high reliability.

Here, an electronic device provided with the resonator element of the present invention will be described in detail with reference to FIGS. 15 to 17. FIG.
FIG. 15 is a perspective view showing the configuration of a mobile (or notebook) personal computer to which an electronic device equipped with the physical quantity sensor of the present invention is applied.
In this figure, a personal computer 1100 is composed of a main body 1104 having a keyboard 1102 and a display unit 1106 having a display 100. The display unit 1106 rotates with respect to the main body 1104 via a hinge structure. movably supported.
Such a personal computer 1100 incorporates a physical quantity sensor 1 that functions as angular velocity detection means (gyro sensor).

FIG. 16 is a perspective view showing the configuration of a mobile phone (including PHS) to which electronic equipment having the physical quantity sensor of the present invention is applied.
In this figure, a mobile phone 1200 has a plurality of operation buttons 1202 , an earpiece 1204 and a mouthpiece 1206 , and a display unit 100 is arranged between the operation buttons 1202 and the earpiece 1204 .
Such a mobile phone 1200 incorporates a physical quantity sensor 1 that functions as angular velocity detection means (gyro sensor).

FIG. 17 is a perspective view showing the configuration of a digital still camera to which an electronic device equipped with the physical quantity sensor of the invention is applied. In addition, this figure also briefly shows connections with external devices.
Here, while a normal camera exposes a silver salt photographic film to an optical image of an object, the digital still camera 1300 photoelectrically converts an optical image of an object using an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

A display unit is provided on the back surface of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. Function.
A light receiving unit 1304 including an optical lens (imaging optical system) and a CCD is provided on the front side (rear side in the figure) of the case 1302 .

When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306 , the CCD imaging signal at that time is transferred and stored in the memory 1308 .
In this digital still camera 1300, a side surface of the case 1302 is provided with a video signal output terminal 1312 and an input/output terminal 1314 for data communication.
As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312, and a personal computer 1440 is connected to the input/output terminal 1314 for data communication as required. Furthermore, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.
Such a digital still camera 1300 incorporates a physical quantity sensor 1 that functions as angular velocity detection means (gyro sensor).

In addition to the personal computer (mobile type personal computer) shown in FIG. 15, the mobile phone shown in FIG. 16, and the digital still camera shown in FIG. Inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation systems, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, televisions Telephones, security TV monitors, electronic binoculars, POS terminals, medical equipment (e.g., electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiogram measuring devices, ultrasonic diagnostic devices, electronic endoscopes), fish finders, various measuring devices, instruments (e.g. vehicle, aircraft, ship instruments), flight simulators and the like.

As described above, the physical quantity sensor of the present invention has been described based on the illustrated embodiments, but the present invention is not limited to this, and the configuration of each part can be replaced with any configuration having similar functions. can be done.
Also, other optional components may be added to the present invention. Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.

1... Physical quantity sensor 2... Substrate 3... Vibration system structure 31... Ring part 4... Vibration means 41... Fixed electrodes 411, 412... Electrode piece 42... Fixed electrode 421, 422... Electrode piece 43, 44... Fixed electrodes 431, 432... Electrode strips 441, 442... Electrode strips 45, 46... Piezoelectric element 51... First vibration part 511... Frame part 511a... First opening 511b... Second opening 511c... Third opening 512... Z-axis direction displacement part 513, 514... Shaft part 515... Drive electrode 516... Y-axis direction displacement part 516A... Displacement part 516Aa... Base part 516Ab... Fixed Electrode 516a Frame portion 516b Detection electrode 516c Base portion 516d Detection electrode 517 Spring portion 517A Pair of connection springs 518a Fixed portion 518b Connection portion 519a Y-axis direction displacement portion 519b... Spring part 52... First vibration part 521... Frame part 522... Z-axis direction displacement part 523, 524... Shaft part 525... Drive electrode 526... Y-axis direction displacement part 526b... Detection electrode 527... Spring part 53... Second vibration part 531... Frame part 531a... First opening 531b... Second opening 531c... Third opening 532... Z-axis direction displacement part 533, 534... Shaft part 535... Drive electrode 536... X-axis direction displacement part 536a... Frame part 536b... Detection electrode 537... Spring part 539a... Spring part 539b... Connection part 519a... X-axis direction displacement part 519b... Spring Part 54... Second vibration part 541... Frame part 542... Z-axis direction displacement part 543, 544... Shaft part 545... Drive electrode 546... Detection electrode 546b... Y-axis direction extension part 547... Spring parts 61, 62, 63, 64... Inner fixed parts 651, 652, 661, 662, 671, 672, 681, 682... Outer fixed parts 71, 72, 73, 74... Beams 81... First inner side Spring portions 811, 812 . 872, 881, 882... Outer spring portion 9... Detecting means 91... Displacement transducer 911, 912... Fixed electrode 911a, 911b... Electrode piece 92... Displacement transducer 921, 922... Fixed electrode 921a, 921b...Electrode strip 93...Displacement transducer 931, 932...Fixed electrode 931a, 931b...Electrode strip 94...Displacement transducer 941, 942...Fixed electrode 941a, 941b...Electrode strip 95...Rotating transformer Deducer 951: Fixed electrode 96: Rotating transducer 961: Fixed electrode 97: Rotating transducer 971: Fixed electrode 98: Rotating transducer 981: Fixed electrode 991, 992: Piezoelectric element 993, 994 Piezoelectric elements 995, 996 Piezoresistor 100 Display 1100 Personal computer 1102 Keyboard 1104 Main unit 1106 Display unit 1200 Mobile phone 1202 Operation buttons 1204 Earpiece 1206 Mouthpiece 1300 Digital still camera 1302 Case 1304 Light receiving unit 1306 Shutter button 1308 Memory 1312 Video signal output terminal 1314 Input/output terminal 1430 TV monitor 1440... Personal computer J1, J2... Axis

Claims (20)

When the two axes orthogonal to each other are the first axis and the second axis,
a ring portion capable of circular vibration;
four support portions that support the ring portion;
four beams connecting each of the support portions and a node of the annular vibration of the ring portion;
a pair of first mass portions having a movable portion and arranged to face each other in a direction parallel to the first axis via the ring portion;
a pair of second mass portions having a movable portion and arranged opposite to each other in a direction parallel to the second axis via the ring portion;
A pair of first springs connecting each of the first mass portions and the ring portion so that each of the first mass portions can vibrate with respect to the ring portion in a direction parallel to the first axis. Department and
A pair of second springs connecting each of the second mass portions and the ring portion so that each of the second mass portions can vibrate with respect to the ring portion in a direction parallel to the second axis. Department and
Vibration for vibrating at least one of the pair of first mass portions and the pair of second mass portions at a first frequency in a plane direction including the first axis and the second axis so as to have opposite phases. means and
at least one transducer that converts the amount of displacement of the movable portion of each of the first mass portions and the movable portion of each of the second mass portions into an electrical signal;
The physical quantity sensor, wherein the ring portion circularly vibrates in a direction parallel to the first axis and in a direction parallel to the second axis according to the first frequency. When the two axes orthogonal to each other are the first axis and the second axis,
a ring portion capable of circular vibration;
four support portions that support the ring portion;
four beams connecting each of the support portions and four fixing points that become nodes of the annular vibration of the ring portion;
It has a first movable portion that can be displaced around an axis parallel to the second axis and a second movable portion that can be displaced in a direction parallel to the second axis, and is parallel to the first axis via the ring portion. a pair of first mass portions arranged to face each other in a direction;
It has a third movable portion that can be displaced around an axis parallel to the first axis and a fourth movable portion that can be displaced in a direction parallel to the first axis, and is parallel to the second axis via the ring portion. a pair of second mass portions arranged facing each other in a direction;
A pair of first spring portions connecting each of the first mass portions and the ring so that each of the first mass portions can vibrate with respect to the ring portion in a direction parallel to the first axis. and,
a pair of second spring portions connecting each of the second mass portions and the ring so that each of the second mass portions can vibrate relative to the ring in a direction parallel to the second axis; ,
Vibration for vibrating at least one of the pair of first mass portions and the pair of second mass portions at a first frequency in a plane direction including the first axis and the second axis so as to have opposite phases. means and
a transducer that converts a displacement amount of a first movable portion of each of the first mass portions and a third movable portion of each of the second mass portions into an electrical signal;
a transducer that converts a displacement amount of a second movable portion of each of the first mass portions and a fourth movable portion of each of the second mass portions into an electrical signal;
The physical quantity sensor, wherein the ring portion circularly vibrates in a direction parallel to the first axis and in a direction parallel to the second axis according to the first frequency. Having a substrate that supports the ring portion,
3. The physical quantity sensor according to claim 1, wherein the substrate is composed of a semiconductor substrate, an insulating substrate, or a composite substrate in which a semiconductor layer and an insulating layer are laminated. 4. The physical quantity sensor according to any one of claims 1 to 3, wherein the ring portion has an outer diameter and an inner diameter, a gap is formed inside the inner diameter, and the ring portion is elastically deformable. . deformation of the first spring portion in a direction parallel to the second axis and deformation in a direction parallel to an axis orthogonal to the first axis and the second axis are restricted;
Deformation of the second spring portion in a direction parallel to the first axis and deformation in a direction parallel to an axis orthogonal to the first axis and the second axis are restricted. The physical quantity sensor according to any one of claims 1 to 4. The four support portions are positioned inside the pair of first mass portions and the pair of second mass portions and outside the ring portion, and are positioned on the first axis and the second axis that intersect the center of the ring portion. 6. The physical quantity sensor according to any one of claims 1 to 5, wherein the physical quantity sensor is provided at a position of mirror symmetry with respect to two axes. 7. The physical quantity sensor according to any one of claims 1 to 6, wherein each of said beams is restricted in radial displacement from the center of said ring. 8. The physical quantity sensor according to any one of claims 1 to 7, wherein the vibrating means is electrostatically driven or piezoelectrically driven. 9. The physical quantity sensor according to any one of claims 1 to 8, wherein the transducer has any one of electrostatic, piezoelectric, and piezoresistive sensing capabilities. The transducer detects an angular velocity about the first axis, an angular velocity about the second axis, and an angular velocity about a third axis orthogonal to both the first axis and the second axis. The physical quantity sensor according to any one of claims 1 to 9. 11. The physical quantity sensor according to any one of claims 1 to 10, wherein said transducer electrically cancels linear acceleration in a predetermined direction by pairing with each other said transducer. 12. A physical quantity sensor according to any one of claims 1 to 11, wherein each of said transducers also has a unique resonance frequency. The annular vibration of the ring portion is contracted in a direction parallel to the first axis and expanded in a direction parallel to the second axis; 13. The physical quantity sensor according to any one of claims 1 to 12, wherein the vibration repeats contraction in a direction parallel to the two axes. 2. Each of said first spring portions and each of said second spring portions is connected to a portion of said ring portion which is inclined by 45 degrees from both said first axis and said second axis. 14. The physical quantity sensor according to any one of 13 to 13. 15. The physical quantity sensor according to any one of claims 1 to 14, wherein the projection outline of the assembly of the pair of first mass portions and the pair of second mass portions is substantially circular. 15. The physical quantity sensor according to any one of claims 1 to 14, wherein the projection outline of the assembly of the pair of first mass portions and the pair of second mass portions is substantially rectangular. 17. The physical quantity sensor according to any one of claims 1 to 16, wherein said vibrating means is connected inside each of said first mass portions and each of said second mass portions. 18. The physical quantity sensor according to any one of claims 1 to 17, wherein the transducer is connected inside each of the first mass and each of the second mass. When the two axes orthogonal to each other are the first axis and the second axis,
a stretchable connection; and
four support portions that are provided at positions inclined by a predetermined angle from both the first axis and the second axis that intersect the center of the connecting portion of the connecting portion and support the connecting portion;
four beams connecting each of the support portions and the connecting portion;
a pair of first mass portions having a movable portion and arranged to face each other in a direction parallel to the first axis via the ring portion;
a pair of second mass portions having a movable portion and arranged opposite to each other in a direction parallel to the second axis via the ring portion;
A pair of first springs connecting each of the first mass portions and the ring portion so that each of the first mass portions can vibrate with respect to the ring portion in a direction parallel to the first axis. Department and
A pair of second springs connecting each of the second mass portions and the ring portion so that each of the second mass portions can vibrate with respect to the ring portion in a direction parallel to the second axis. Department and
Vibration for vibrating at least one of the pair of first mass portions and the pair of second mass portions at a first frequency in a plane direction including the first axis and the second axis so as to have opposite phases. means and
at least one transducer that converts the amount of displacement of the movable portion of each of the first mass portions and the movable portion of each of the second mass portions into an electrical signal;
A physical quantity sensor, wherein a connecting portion between the beam and the connecting portion becomes a node when the connecting portion expands and contracts according to the first frequency. An electronic device using the physical quantity sensor according to any one of claims 1 to 19.

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