JP2023039883A - Film removal mechanism - Google Patents

Abstract

To provide a film removal mechanism capable of stably peeling off a protective film when partially removing the protective film from a substrate on which a protective film layer is formed.SOLUTION: The film removal mechanism includes: a peeling roller 6 that horizontally moves an adhesive tape F, which is fed from a tape supply pulley 4 to a tape take-up pulley 5, while pressing the adhesive tape against a surface of a protective film and peels off the protective film by bonding it to the adhesive tape F; a horizontal drive mechanism for horizontally moving the peeling roller 6; a peeling roller elevating mechanism 8 for vertically moving the peeling roller 6; a pair of left and right cover plates 13, 13 arranged opposite to each other along the left and right sides of the movement path of the peeling roller 6 below the peeling roller 6; and a cover plate elevating mechanism 14 for vertically moving the pair of left and right cover plates 13, 13.SELECTED DRAWING: Figure 3

Description

TECHNICAL FIELD The present invention relates to a film removing mechanism for peeling and removing a part of a protective film layer from a laminated substrate having a protective film layer such as a resin film laminated on the surface of the substrate. The present invention provides a protective film layer covering a terminal area in order to expose the terminal area for external connection formed in the peripheral portion of a substrate for an electronic device such as an LCD (liquid crystal display) or an OLED (organic EL display). The present invention relates to a film removal mechanism suitable for the operation of partially separating the .

In general, in the process of cutting out a unit substrate to be a product from a large-area laminated substrate (mother substrate) having a protective film layer formed on the surface of the substrate, a cutting method using a cutter wheel or a laser beam is used. In this case, as shown in FIG. 10(a), first, a scribe line S1 in the Y direction is carved at the planned cutting position of the substrate W with a cutter wheel or a laser beam, and then a scribe line S2 in the X direction is carved. Thereafter, the wafer is cut along the scribe lines S2 in the X direction to cut out strip-shaped substrates W1 as shown in FIG. A unit substrate W2 shown is cut out.

In substrates for electronic devices such as LCDs and OLEDs, a terminal area for external connection is formed on at least one side of the four peripheral sides of the cut unit substrate W2. In that case, it is necessary to peel off the protective film covering the terminal area portion during the manufacturing process to expose the terminal area for external connection. Therefore, when scribe lines in the X direction are carved on the substrate W, the scribe lines S3 for forming the terminal regions are processed along the X direction, and after dividing into strip-shaped substrates W1 or unit substrates W2, as shown in FIG. As shown, the terminal region T is exposed by removing the unnecessary portion of the protective film E separated by the scribe line S3 from the substrate 20. As shown in FIG.

As a device for removing the unnecessary portion of the protective film E from the substrate 20, there is a film removing mechanism (film peeling device) that peels and removes using a pressure roller and an adhesive tape, as described in Patent Document 1, for example. Are known.
In this conventional apparatus, the lower surface of the substrate is fixed by suction on a vacuum suction stage, and the adhesive tape is pressed onto the surface of the protective film by a roller, and the protective film is peeled off while being wound up. .

Japanese Patent Application Laid-Open No. 2020-1875

In the conventional film removing mechanism described above, if the protective film E adhered to the adhesive tape does not have sufficient adhesive strength and the adhesive tape is easily removed from the protective film E during the pulling operation, the protective film E may be removed from the substrate 20 . can no longer be peeled off. Therefore, the adhesive tape having a sufficiently strong adhesive force is used to ensure that the protective film E is not easily separated after being adhered to the adhesive tape. On the other hand, the width of the protective film E to be peeled off may be wide or narrow depending on the substrate to be processed. It is desirable to attach the protective film E with a strong adhesive force using an adhesive tape of a certain width so that it can be peeled off.

Further, in order to stably repeat the peeling work, it is not enough to strengthen the adhesive force between the adhesive tape 20 and the protective film E, and another problem arises.
Specifically, in FIG. 11, when the protective film E is to be peeled off with the adhesive tape, the force (adhesive force between the protective film E and the substrate 20) with which the protective film E pulls up the substrate 20 is applied to the vacuum adsorption stage. (not shown) is stronger than the force for fixing the lower surface of the substrate 20 by vacuum suction, the substrate 20 is dragged and floated together with the protective film E when the protective film E is peeled off by the adhesive tape. The protective film E cannot be peeled off from the substrate 20, and the substrate 20 is pulled up and bent upward, which causes a problem that fine electronic circuit portions are damaged.

Further, as shown in FIG. 12, when the width of the protective film E to be peeled off is narrower than the width of the adhesive tape F pressed by the roller 21, a portion of the adhesive tape F is not on the surface of the table 22 on which the substrate 20 is placed. The adhesive tape F may become tangled, tangled, or cut off.
Therefore, if there is a change in the width dimension of the protective film E to be peeled off, it is necessary to replace or adjust the adhesive tape F and the roller 21 according to the width, and prepare a replacement with a different width dimension. In addition, it was necessary to perform troublesome replacement work.

Therefore, the present invention is a laminated substrate on which a protective film is laminated on the surface, and when the protective film in a partial area divided on the substrate is peeled off using an adhesive tape, it is difficult to cause problems and can be stably removed. It is an object of the present invention to provide a highly reliable film removing mechanism capable of
In addition, according to the present invention, even if the width of a part of the protective film to be peeled off is changed, it can be peeled and removed using the same width adhesive tape regardless of its width, and can be stably peeled off only by simple adjustment work. It is an object of the present invention to provide a film removing mechanism capable of removing.

In order to achieve the above object, the present invention has taken the following technical measures. That is, the film removing mechanism of the present invention is a film removing mechanism for peeling off the protective film in a partial area divided by the scribe line from the laminated substrate having the protective film layer formed on the surface, and the tape is wound from the tape supply pulley. a peeling roller that moves horizontally while pressing the adhesive tape sent to the take-up pulley against the surface of the protective film to adhere the protective film to the adhesive tape and peel it off; and a horizontal drive mechanism that horizontally moves the peeling roller. a peeling roller elevating mechanism for moving the peeling roller up and down; a pair of left and right cover plates disposed opposite to each other along the left and right sides of the movement path of the peeling roller below the peeling roller; and a cover plate elevating mechanism for moving the cover plate up and down.

According to the present invention, when the peeling operation is performed by the peeling roller, the substrate main body side can be pressed by the cover plate in the vicinity of the partial area of the protective film to be peeled off. It is possible to prevent the problem of being lifted up.
In addition, since the right and left sides of the protective film in the partial area to be peeled off are covered by the cover plate, the table surface is not exposed under the adhesive tape, and the adhesive tape adheres to the table surface and gets tangled. It is possible to prevent troubles such as loosening, tangling, and cutting.

In the above invention, it is preferable that the pair of left and right cover plates be made of a material that can be peeled off from the adhesive surface of the adhesive tape and that is easier to peel than the protective film (good releasability). Here, for example, polyacetal (POM), fluororesin (PTFE, Teflon (registered trademark)) are suitable as materials that are easily peeled off. In addition, the cover plate may be coated, in which case Teflon coating is suitable. is.
According to the present invention, the cover plate is made of a material that is easier to separate than the protective film. Due to the difference in adhesion, the adhesive tape can be easily peeled off from the cover plate.

In the above invention, an adjusting mechanism may be provided for adjusting the interval between the pair of left and right cover plates.
Thus, even when the width of the protective film to be peeled off is changed, it can be dealt with only by adjusting the gap between the pair of left and right cover plates without replacing the adhesive tape or peeling roller with a different width.

In the above invention, the outer peripheral surface of the peeling roller may be formed with a convex portion that presses the adhesive tape with a pressing surface narrower than the width of the roller.
As a result, the pressing force can be concentrated on the central portion of the wide adhesive tape, and the protective film can be efficiently adhered and peeled off with a light pressing force.
In this case, the convex portion may be formed in a stepped shape or a tapered shape so that the central portion in the width direction of the outer peripheral surface of the peeling roller protrudes.

Further, the tip portions of the pair of left and right cover plates facing each other may be sharply formed by a horizontal bottom surface and an upper inclined surface.
As a result, contact between the roller and the cover plate can be avoided even when the cover plate is closely fitted to the lower surface of the peeling roller.

1 is a front view of a film removing mechanism that is an embodiment of the present invention; FIG. FIG. 2 is a side view of the film removal mechanism of FIG. 1; FIG. 2 is an enlarged perspective view of a main part of the film removing mechanism of FIG. 1; BRIEF DESCRIPTION OF THE DRAWINGS The front view of the peeling roller which is one Example of this invention. 1 is a partial side view of a cover plate that is one embodiment of the present invention; FIG. FIG. 4 is a schematic diagram showing a protective film peeling operation according to the present invention; Explanatory drawing which shows operation|movement of the peeling roller in this invention. FIG. 5 is an explanatory diagram showing a protective film peeling operation when the width of the protective film to be peeled off is small; The front view which shows the deformation|transformation Example of a peeling roller. The figure explaining the division process of a board|substrate. FIG. 4 is a cross-sectional view of a step of removing a part of the protective film of an unnecessary portion to expose the terminal region; The figure explaining the malfunction when the width|variety of the protective film which is going to peel is small.

Hereinafter, details of the film removing mechanism according to the present invention will be described based on examples. FIG. 1 is a front view of a film removing mechanism A, which is an embodiment of the present invention, FIG. 2 is its side view, and FIG. 3 is its main enlarged perspective view.
As shown in FIGS. 1 and 2, the film removing mechanism A includes a movable frame 2 held by a fixed frame 1. As shown in FIGS. The moving frame 2 is provided so that it can reciprocate in the horizontal direction along the horizontal guide 3 of the fixed frame 1 for a set length by means of a horizontal drive mechanism (not shown) comprising a rack, pinion gears, a motor, and the like. ing.

A tape supply pulley 4 for feeding the adhesive tape F and a tape take-up pulley 5 for winding the fed tape F are attached to the moving frame 2 . The tape supply pulley 4 is provided with a brake mechanism (not shown), and the tape take-up pulley 5 is provided with a torque motor (not shown), so that the tension of the adhesive tape F is maintained.

A lifting mechanism 8 (peeling roller lifting mechanism) for vertically moving the peeling roller 6 is attached to the moving frame 2 . That is, a holder 7 is fixed to the elevating mechanism 8 via an arm 10 so as to be vertically movable, and the peeling roller 6 is rotatably held by the holder 7 .

The peeling roller 6 is horizontally moved by the horizontal driving mechanism when the holder 7 is lowered, thereby peeling off the adhesive surface of the intermediate portion of the adhesive tape F sent from the tape supply pulley 4 to the tape take-up pulley 5. It rolls while being pressed against the surface of the protective film to be applied, and the protective film adhering to the adhesive tape F can be peeled off from the substrate W at this time.

The adhesive tape F is passed over a plurality of intermediate rollers 9a, 9b, 9c, 9d, 9e, 9f and a tension roller 9g from the tape supply pulley 4 to the tape take-up pulley 5 via the peeling roller 6. passed. The tension roller 9g is always pressed downward by the weight of the weight 11 so that tension is applied to the adhesive tape F, whereby the adhesive tape F is kept in a tensioned state. A spring or the like may be used instead of the weight 11 to apply tension to the tension roller 9g. A servomotor (driving motor) attached to the position of the intermediate roller 9e drives the tape to feed the length necessary for one stripping operation.
The adhesive tape F has a strong adhesive layer formed on the entire surface of one side of the resin film, and when the protective film to be peeled adheres to it, it can be peeled off without being peeled off again. In this embodiment, an adhesive tape with a width of 15 mm is used. In this embodiment, the width of the protective film to be peeled off is about 15 mm at the maximum and about 3 mm at the minimum. Therefore, only replacement adhesive tapes F having the same constant width are prepared.

As shown in FIG. 4, the peeling roller 6 has a narrow convex portion 6b formed on its outer peripheral surface. That is, a protruding portion 6b is provided in the central portion in the width direction of the outer peripheral surface of the roller, and the top surface of the protruding portion 6b substantially forms the pressing surface 6a of the peeling roller 6. As shown in FIG. Specifically, the peeling roller 6 has a diameter D of 30 mm and a width L2 of 15 mm. The top surface of the shaped portion 6b is used as a pressing surface 6a having a width of 3 mm. The width of the convex portion 6b is adjusted to the minimum width of 3 mm in the range (3 to 15 mm) of the protective film to be peeled off.

In the film removing mechanism A of the present invention, as shown in the enlarged perspective view of FIG. 13, 13 are provided.
The cover plate 13 is formed of a long body having substantially the same length as the entire length of the protective film of the unnecessary portion to be peeled off, and is attached to the fixed frame 1 by a lifting mechanism 14 such as a fluid cylinder (cover plate lifting mechanism). , so that it can move up and down with respect to the substrate held on the suction table 12 by suction. Specifically, the mounting portion 13a of the cover plate 13 is connected to the mounting member 16 fixed to the plunger 14a of the elevating mechanism 14 so that the mounting member 16 moves up and down together.

Further, an adjusting mechanism for adjusting the interval between the left and right cover plates 13, 13 is provided. Specifically, in this embodiment, the attachment portion 13a of the cover plate 13 is attached to the attachment member 16 so as to be slidable in the direction for adjusting the above-described distance, and can be positioned and fixed at an appropriate position by screws 17. be. The cover plate 13 may be made slidable by an adjustment mechanism using an air cylinder or the like.

The tip portions of the right and left cover plates 13 facing each other are formed to be sharply pointed by a horizontal bottom surface 13b and an upper inclined surface 13c. As shown in FIG. 5, the inclination angle α1 of the inclined surface 13c with respect to the horizontal bottom surface 13b is the inclination of the inclined line connecting the edge P1 of the convex portion of the peeling roller 6 and the edge P2 of the peripheral surface of the roller body in FIG. Contact between the peeling roller 6 and the cover plate 13 is avoided by forming the peeling roller 6 at an angle smaller than the angle α2.

The cover plate 13 is made of a material that is weakly adhesive to the adhesive surface of the adhesive tape F and can be peeled off, such as polyacetal (POM), so that the cover plate 13 is easier to peel off than the protective film. After the adhesive tape F adheres to both the protective film and the cover plate 13, the protective film remains adhered and the adhesive tape F is easily peeled off from the cover plate 13. - 特許庁

Next, the operation of removing the protective film of the unnecessary portion by the film removing mechanism will be described.
First, as shown in FIGS. 6(a) and 7(a), the unit substrate W2 is sucked and held on a fixed position of the suction table and placed under the peeling roller 6. As shown in FIG. At this time, the direction of the scribe line S3 is made to coincide with the running direction of the peeling roller 6, and the widthwise central portion of the protective film E of the unnecessary portion to be peeled off by the pressing surface 6a of the peeling roller 6 (or the scribe line S3 from it). side). The relative values of the adhesive tape F and the peeling roller 6 may be appropriately changed depending on the situation. Also, the left and right cover plates 13 are arranged with a gap slightly larger than the width of the protective film E. As shown in FIG. In addition, in FIG. 6A, the protective film E is arranged on the right side.

Then, as shown in FIGS. 6(b) and 7(b), the peeling roller 6 and the cover plate 13 are lowered toward the substrate W2 so as to adhere to one end of the protective film E on the running start side. is supplied to the peeling roller 6, the protective film E is horizontally moved to the other end of the protective film E on the running end side as shown in FIG. 7(c). As a result, as shown in FIGS. 6(c) and 7(d), the protective film E can be peeled off with the adhesive tape F and wound around the tape take-up pulley 5. FIG.

During the peeling operation by the peeling roller 6, the body side of the substrate W2 is pressed by the left cover plate 13 in the vicinity of the protective film E to be peeled off. It is not dragged and lifted. Further, since the cover plate 13 is formed with a length substantially equal to the total length of the protective film E to be peeled off, the substrate W2 can be kept pressed while the protective film E is peeled off, thereby protecting the substrate W2. It is possible to reliably prevent the film from being dragged together with the film E and floating up.

Further, since the pressing surface 6a of the peeling roller 6 is formed with a narrow width of 3 mm, the pressing force can be concentrated on the central portion of the wide adhesive tape F (15 mm tape is used in this embodiment). As a result, the protective film E can be efficiently adhered and peeled off with a light pressing force.

Furthermore, in the present invention, even if the width of the protective film E of the unnecessary portion to be peeled off is changed, there is no need to replace the adhesive tape F or the peeling roller 6, and only the interval between the pair of left and right cover plates 13 is adjusted. can be dealt with.
FIG. 8 shows the case where the width of the protective film E to be peeled off is set to about half of the width described above. Also in this case, after adjusting the gap between the left and right cover plates 13 according to the width of the protective film E, the peeling roller 6 is run to peel off the protective film E. At this time, as shown in FIG. 8(b), the tips of the left and right cover plates 13 are fitted close to the lower surface area of the peeling roller 6, but the pressing surface 6a of the peeling roller 6 is formed with a narrow width of 3 mm. Moreover, since the tip portion of the cover plate 13 is sharply formed by the upper inclined surface, contact with the pressing surface 6a can be avoided when the pressing surface 6a is pressed against the protective film E. FIG. That is, as shown in FIG. 4, the inclination angle α1 of the inclined surface 13c with respect to the horizontal bottom surface 13b is greater than the inclination angle α2 with respect to the horizontal line of the inclined line connecting the convex portion edge P1 of the peeling roller 6 and the roller body edge P2. Since it is formed at a small angle, it is possible to prevent the roller body edge P2 from coming into contact with the inclined surface of the cover plate 13 even when it is fitted into the lower surface of the roller.

Further, since the cover plate 13 on the right side covers the upper surface of the suction table 12, the portion of the adhesive tape F protruding from the protective film E to the right side does not adhere to the upper surface of the table 12.例文帳に追加The portion of the adhesive tape F protruding from the protective film E contacts the upper surfaces of the left and right cover plates 13. Since the cover plates 13 are made of a material that is easily peeled off from the adhesive tape F, the peeling roller 6 is raised. can be easily separated when

Although the embodiments of the present invention have been described above, the present invention is not necessarily limited to the above-described embodiments, and can be appropriately modified and changed within the scope of achieving the object and not departing from the scope of the claims. is.

For example, the holder 7 of the peeling roller 6 is provided with a detector for detecting whether or not the adhesive tape F can be peeled by allowing light to pass through the adhesive tape F after peeling the protective film, or a detector for detecting a change in the thickness of the tape. If it is not possible, the peeling operation may be controlled to be repeated again. As a result, it is possible to reduce the occurrence of defective products due to the failure of the peeling work.
Also, a remaining amount detection sensor (for example, an optical sensor) for notifying that the remaining amount of tape is low may be provided on the tape supply pulley 4 or the tape take-up pulley 5 to inform the timing of replacing the tape.

Further, the shape of the peeling roller 6 with the narrowed pressing surface 6a is not limited to the shape shown in the embodiment. For example, as shown in FIG. 9, the outer peripheral surface of the roller body may be formed in a smooth mountain shape (tapered shape) and the narrowed top portion may be formed as the pressing surface 6a.
In addition, the present invention is not limited to electronic device substrates, and can be applied to any substrate having a protective film layer such as a resin film formed on its surface, even if it is a substrate for decoration, when part of the substrate is removed. .

INDUSTRIAL APPLICABILITY The present invention can be used for a film peeling mechanism for peeling a part of a protective film of a laminated substrate having a protective film laminated on the surface of the substrate.

E Protective film of unnecessary part to be peeled F Adhesive tape W2 Unit substrate 1 Fixed frame 2 Moving frame 3 Horizontal guide 4 Tape supply pulley 5 Tape take-up pulley 6 Peeling roller 6a Pressing surface 6b Convex part 7 Holder 8 Peeling Roller Lifting Mechanism 9a-9f Intermediate Roller 9g Tension Roller 10 Arm 11 Weight 12 Adsorption Table 13 Cover Plate 14 Cover Plate Lifting Mechanism

Claims (6)

A film removing mechanism for removing a protective film from a partial region separated by a scribe line from a laminated substrate having a protective film layer formed on the surface,
a peeling roller that moves horizontally while pressing the adhesive tape sent from the tape supply pulley to the tape take-up pulley against the surface of the protective film to adhere the protective film to the adhesive tape and peel it off;
a horizontal drive mechanism for horizontally moving the peeling roller;
a peeling roller elevating mechanism for moving the peeling roller up and down;
a pair of left and right cover plates disposed opposite to each other along the left and right sides of the movement path of the peeling roller below the peeling roller;
A film removing mechanism, comprising: a cover plate elevating mechanism for vertically moving the pair of left and right cover plates. 2. The film removing mechanism according to claim 1, wherein the pair of left and right cover plates are made of a material that can be peeled off from the adhesive surface of the adhesive tape and is easier to peel off than the protective film. 3. The film removing mechanism according to claim 1, further comprising an adjusting mechanism for adjusting the distance between the pair of left and right cover plates. 4. The film removing mechanism according to any one of claims 1 to 3, wherein the outer peripheral surface of the peeling roller is formed with a convex portion that presses the adhesive tape with a pressing surface narrower than the width of the roller. 5. The film removing mechanism according to claim 4, wherein the convex portion is formed in a stepped shape or a tapered shape so that a central portion in the width direction of the outer peripheral surface of the peeling roller protrudes. 6. The film removing mechanism according to claim 4, wherein the pair of left and right cover plates has a sharp edge formed by a horizontal bottom surface and an upper inclined surface.

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