JP2023034627A - Transfer film, and method for manufacturing laminate having conductor pattern - Google Patents

Abstract

To provide a transfer film which enables manufacture of a resist pattern having large thickness and a large aspect ratio, and a method for manufacturing a laminate having a conductor pattern.SOLUTION: A transfer film is provided, having a temporary support and a photosensitive composition layer, wherein average film thickness of the photosensitive composition layer is 10 μm or more, the photosensitive composition layer includes a sensitizer and resin having a weight average molecular weight of 10,000 or more, the resin includes a structural unit having a crosslinkable group, the content of the structural unit having the crosslinkable group is 30 mass% or more with respect to the total structural unit of the resin, and transmittance at a wavelength of 365 nm of the photosensitive composition layer is 40% or more.SELECTED DRAWING: None

Description

TECHNICAL FIELD The present invention relates to a transfer film and a method for manufacturing a laminate having a conductor pattern.

Since the number of steps for obtaining a predetermined pattern is small, after disposing a photosensitive composition layer on an arbitrary substrate using a transfer film and exposing this photosensitive composition layer through a mask, The method of developing is widely used.

Patent Document 1 discloses a transfer film having a temporary support and a photosensitive resin composition layer containing a binder polymer containing a predetermined repeating unit.

JP 2010-060891 A

Recently, a resist pattern having a large thickness (approximately 10 μm or more) and a large aspect ratio is required.
When the inventors of the present invention attempted to form a resist pattern using the transfer film described in Patent Document 1, it was not possible to form a resist pattern having the above characteristics, and it was found that further improvement was necessary. I found out.

An object of the present invention is to provide a transfer film that can produce a resist pattern having a large thickness and a large aspect ratio.
Another object of the present invention is to provide a method for manufacturing a laminate having a conductor pattern.

As a result of intensive studies on the above problem, the inventors have found that the above problem can be solved by the following configuration.

(1) A transfer film having a temporary support and a photosensitive composition layer,
The average film thickness of the photosensitive composition layer is 10 μm or more,
The photosensitive composition layer contains a sensitizer and a resin having a weight average molecular weight of 10000 or more,
The resin contains a structural unit having a crosslinkable group,
The content of structural units having a crosslinkable group is 30% by mass or more with respect to all structural units of the resin,
A transfer film in which the transmittance of the photosensitive composition layer at a wavelength of 365 nm is 40% or more.
(2) The transfer film according to (1), wherein the mass ratio of the polymerizable compound other than the resin contained in the photosensitive composition layer and having a weight average molecular weight of less than 10,000 to the resin is 0.50 to 0.80.
(3) The transfer film according to (1) or (2), which has an intermediate layer between the temporary support and the photosensitive composition layer.
(4) The transfer film according to (3), wherein the intermediate layer is a water-soluble resin layer.
(5) The transfer film and the substrate are placed such that the surface of the transfer film according to any one of (1) to (4) on the side opposite to the temporary support is in contact with the metal layer of the substrate having the metal layer on the surface. A laminating step of laminating the
An exposure step of exposing the photosensitive composition layer;
A developing step of performing a developing process on the exposed photosensitive composition layer to form a resist pattern;
one of an etching step of performing an etching process and a plating process of performing a plating process on the metal layer in the area where the resist pattern is not arranged;
A stripping step of stripping the resist pattern;
Furthermore, when a plating process is provided, a removal step of removing the metal layer exposed by the peeling step and forming a conductor pattern on the substrate. A method for producing a laminate having a conductor pattern, further comprising a temporary support peeling step of peeling off the temporary support between the above and the developing step.
(6) The method for producing a laminate having a conductor pattern according to (5), wherein the exposure step is a step of performing pattern exposure through a photomask.
(7) The conductor pattern according to (5) or (6), wherein the exposure step is a step of patternwise exposing the photosensitive composition layer through a lens using actinic rays onto which an image of a photomask is projected. A method for manufacturing a laminate having
(8) having a temporary support peeling step between the lamination step and the exposure step;
The conductor according to any one of (5) to (7), wherein the exposure step is a step of exposing the photosensitive composition layer in a pattern by contacting the exposed surface of the temporary support with a photomask. A method for manufacturing a laminate having a pattern.

ADVANTAGE OF THE INVENTION According to this invention, the transfer film which is thick and can manufacture a resist pattern with a large aspect ratio can be provided.
Moreover, according to the present invention, it is possible to provide a method for manufacturing a laminate having a conductor pattern.

It is a schematic diagram showing an example of layer composition of a transfer film concerning an embodiment.

The present invention will be described in detail below.
The description of the constituent elements described below may be made based on representative embodiments of the present invention, but the present invention is not limited to such embodiments.

Hereinafter, the meaning of each description in this specification is expressed.
In this specification, a numerical range represented by "to" means a range including the numerical values before and after "to" as lower and upper limits.
In the present specification, in the numerical ranges described stepwise, the upper limit or lower limit described in a certain numerical range may be replaced with the upper limit or lower limit of the numerical range described in other steps. . Moreover, in the numerical ranges described in this specification, the upper limit or lower limit described in a certain numerical range may be replaced with the values shown in the examples.

In this specification, the term "process" is not only an independent process, but even if it cannot be clearly distinguished from other processes, it is included in this term as long as the intended purpose of the process is achieved. .

As used herein, “transparent” means that the average transmittance of visible light with a wavelength of 400 to 700 nm is 80% or more, preferably 90% or more.
As used herein, the average transmittance of visible light is a value measured using a spectrophotometer, and can be measured using, for example, a spectrophotometer U-3310 manufactured by Hitachi, Ltd.

In this specification, unless otherwise specified, the weight average molecular weight (Mw) and number average molecular weight (Mn) are measured using TSKgel GMHxL, TSKgel G4000HxL, or TSKgel G2000HxL (all trade names manufactured by Tosoh Corporation). ), using THF (tetrahydrofuran) as an eluent, a differential refractometer as a detector, and polystyrene as a standard substance, a value converted using polystyrene as a standard substance measured by a gel permeation chromatography (GPC) analyzer. be.
In this specification, unless otherwise specified, the molecular weight of compounds having a molecular weight distribution is the weight average molecular weight (Mw).
In this specification, unless otherwise specified, the content of metal elements is a value measured using an inductively coupled plasma (ICP) spectroscopic analyzer.
In this specification, unless otherwise specified, the refractive index is a value measured using an ellipsometer at a wavelength of 550 nm.
In this specification, unless otherwise specified, the hue is a value measured using a color difference meter (CR-221, manufactured by Minolta Co., Ltd.).

As used herein, "(meth)acryl" is a concept that includes both acryl and methacryl, and "(meth)acryloxy group" is a concept that includes both acryloxy and methacryloxy.

In this specification, the term “alkali-soluble” means that the solubility in 100 g of a 1 mass % aqueous solution of sodium carbonate at 22° C. is 0.1 g or more.

As used herein, the term “water-soluble” means that the solubility in 100 g of water having a liquid temperature of 22° C. and a pH of 7.0 is 0.1 g or more. Thus, for example, by water-soluble resin is intended a resin that satisfies the solubility conditions set forth above.

As used herein, the “solid content” of the composition means a component that forms a composition layer formed using the composition, and when the composition contains a solvent (organic solvent, water, etc.), the solvent means all ingredients except In addition, as long as it is a component that forms a composition layer, a liquid component is also regarded as a solid content.

A characteristic point of the transfer film of the present invention is that the transmittance of the photosensitive composition layer is high while using a predetermined resin.
When the transmittance of the photosensitive composition layer is high, light can easily reach the inside of the photosensitive composition layer, and as a result, the reaction of the crosslinkable group and the reaction of the polymerizable compound can easily proceed. Further, when the weight average molecular weight of the resin is at least a predetermined value and the content of the structural unit having a crosslinkable group is at least a predetermined value, the curing in the formed pattern proceeds more easily. As a result, even if the thickness of the pattern is large, a pattern with a large aspect ratio can be formed.

<Transfer film>
The transfer film of the present invention has a temporary support and a photosensitive composition layer.
The transfer film may have other layers in addition to the temporary support and the photosensitive composition layer.
Other layers include, for example, an intermediate layer to be described later. Moreover, the transfer film may have other members (for example, a protective film, etc.) which will be described later.

Embodiments of the transfer film include, for example, the following configuration (1) or (2), with configuration (2) being preferred.
(1) "Temporary support/photosensitive composition layer/protective film"
(2) "Temporary support/intermediate layer/photosensitive composition layer/protective film"
Preferably, the transfer film has an intermediate layer.

From the viewpoint of suppressing the generation of air bubbles in the later-described bonding step, the maximum width of the undulations of the transfer film is preferably 300 μm or less, more preferably 200 μm or less, and even more preferably 60 μm or less. The lower limit of the maximum width of the undulation is 0 μm or more, preferably 0.1 μm or more, and more preferably 1 μm or more.
The maximum width of waviness of the transfer film is a value measured by the following procedure.
First, the transfer film is cut in a direction perpendicular to the main surface so as to have a size of 20 cm long and 20 cm wide to prepare a test sample. In addition, when a transfer film has a protective film, a protective film is peeled off. Next, the test sample is placed on a flat and horizontal stage so that the surface of the temporary support faces the stage. After standing, the surface of the test sample is scanned with a laser microscope (for example, VK-9700SP manufactured by Keyence Corporation) in the center 10 cm square range of the test sample to obtain a three-dimensional surface image. Subtract the minimum concave height from the maximum convex height observed in the dimensional surface image. The above operation is performed for 10 test samples, and the arithmetic average value is defined as "the maximum waviness width of the transfer film".

In the photosensitive composition layer of the transfer film, when the surface of the photosensitive composition layer opposite to the temporary support has another composition layer, the total thickness of the other composition layer is the photosensitive composition It is preferably 0.1 to 30%, more preferably 0.1 to 20%, of the total thickness of the material layer.

Example embodiments of transfer films are described.
The transfer film 10 shown in FIG. 1 has a temporary support 11, a composition layer 17 including an intermediate layer 13 and a photosensitive composition layer 15, and a protective film 19 in this order.
Although the transfer film 10 shown in FIG. 1 has the intermediate layer 13 and the protective film 19, the intermediate layer 13 and the protective film 19 may be omitted.
In FIG. 1, each layer (for example, a photosensitive composition layer, an intermediate layer, etc.) other than the protective film 19 that can be placed on the temporary support 11 is also referred to as a "composition layer".
Each member and each component of the transfer film will be described in detail below.

[Temporary support]
The transfer film has a temporary support.
A temporary support is a member that supports the photosensitive composition layer, and is finally removed by a peeling treatment.

The temporary support may have either a single layer structure or a multilayer structure.
The temporary support is preferably a film, more preferably a resin film. In addition, as the temporary support, a film that has flexibility and does not undergo significant deformation, shrinkage, or elongation under pressure or under pressure and heat is also preferable, and a film that is free from deformation such as wrinkles and scratches is also preferable. preferable.
Examples of the film include polyethylene terephthalate film (eg, biaxially stretched polyethylene terephthalate film), polymethyl methacrylate film, cellulose triacetate film, polystyrene film, polyimide film and polycarbonate film, with polyethylene terephthalate film being preferred.

The temporary support preferably has high transparency from the viewpoint that pattern exposure can be performed through the temporary support, and the transmittance at 365 nm is preferably 60% or more, more preferably 70% or more.
From the viewpoint of pattern formability during pattern exposure through the temporary support and transparency of the temporary support, it is preferable that the haze of the temporary support is small. Specifically, the haze value of the temporary support is preferably 2.0% or less, more preferably 1.0% or less, and even more preferably 0.1% or less. Although the lower limit is not particularly limited, it may be 0.01% or more.
From the viewpoint of pattern formability during pattern exposure through the temporary support and transparency of the temporary support, it is preferable that the number of fine particles, foreign matter and defects contained in the temporary support is small. The number of fine particles having a diameter of 1 μm or more, foreign matter, and defects in the temporary support is preferably 50/10 mm ² or less, more preferably 10/10 mm ² or less, further preferably 3/10 mm ² or less, and 0 pcs/10 mm ² is particularly preferred.

The thickness of the temporary support is preferably 5 μm or more, more preferably 6 μm or more. The upper limit is preferably 200 µm or less, more preferably 150 µm or less, still more preferably 50 µm or less, and particularly preferably 20 µm or less from the viewpoint of ease of handling and versatility.
The thickness of the temporary support is calculated as an average value of arbitrary five points measured by cross-sectional observation with a SEM (Scanning Electron Microscope).

The temporary support may have a layer containing fine particles (lubricant layer) on one side or both sides of the temporary support from the viewpoint of handling.
The fine particles contained in the lubricant layer preferably have a diameter of 0.05 to 0.8 μm.
The thickness of the lubricant layer is preferably 0.05 to 1.0 μm.

From the viewpoint of improving the adhesion between the temporary support and the photosensitive composition layer, the surface of the temporary support in contact with the photosensitive composition layer may be subjected to a surface modification treatment.
Surface modification treatment includes, for example, treatment using UV (ultraviolet) irradiation, corona discharge, plasma, and the like.
The exposure amount in UV irradiation is preferably 10-2000 mJ/cm ² , more preferably 50-1000 mJ/cm ² .
As long as the exposure amount is within the above range, the lamp output and illuminance are not particularly limited.
Light sources for UV irradiation include, for example, low-pressure mercury lamps, high-pressure mercury lamps, ultra-high-pressure mercury lamps, carbon arc lamps, metal halide lamps, xenon lamps, chemical lamps, electrodeless discharge lamps, and light-emitting diodes that emit light in the wavelength band of 150 to 450 nm. (LED).

Examples of the temporary support include a biaxially stretched polyethylene terephthalate film with a thickness of 16 μm, a biaxially stretched polyethylene terephthalate film with a thickness of 12 μm, and a biaxially stretched polyethylene terephthalate film with a thickness of 9 μm.
Further, as the temporary support, for example, paragraphs [0017] to [0018] of JP-A-2014-085643, paragraphs [0019] to [0026] of JP-A-2016-027363, International Publication No. 2012/081680 and paragraphs [0029] to [0040] of WO2018/179370, the contents of which are incorporated herein.
Examples of commercially available temporary supports include Lumirror 16KS40 (registered trademark) and Lumirror 16FB40 (registered trademark) (manufactured by Toray Industries, Inc.); Cosmoshine A4100, Cosmoshine A4300 and Cosmoshine A8300 (manufactured by Toyobo Co., Ltd.).

[Photosensitive composition layer]
The transfer film has a photosensitive composition layer.
As the photosensitive composition layer, a negative photosensitive composition layer is preferred. When the photosensitive composition layer is a negative photosensitive composition layer, the formed resist pattern corresponds to a cured film.

The transmittance of the photosensitive composition layer at a wavelength of 365 nm is 40% or more, and a resist pattern having a greater thickness and a higher aspect ratio can be produced (hereinafter, simply referred to as "a point where the effect of the present invention is more excellent" ), preferably 45% or more, more preferably 50% or more. The upper limit is not particularly limited, and is often 95% or less, preferably 80% or less, more preferably 70% or less, from the viewpoint that the effects of the present invention are more excellent.
A method for measuring the transmittance of the photosensitive composition layer at a wavelength of 365 nm is as follows.
The transfer film is laminated to Eagle XG so that the photosensitive composition layer in the transfer film faces Eagle XG (manufactured by Corning, 0.7 mm thick) (laminating conditions: substrate temperature 80 ° C., rubber roller temperature 110 °C, linear pressure 1.0 MPa, linear velocity 4.0 m/min).
Next, the temporary support is peeled off from the obtained laminate, and the laminate is set in a spectrophotometer UV1800 (manufactured by Shimadzu Corporation) with the photosensitive composition layer surface facing the incident light side. After that, the transmittance spectrum is measured (reference: air) in the wavelength range of 250 to 750 nm in an air atmosphere to obtain the transmittance at a wavelength of 365 nm.

The average film thickness of the photosensitive composition layer is 10 μm or more. Among them, the thickness is preferably 15 μm or more, and more preferably 17 μm or more, from the viewpoint that the effect of the present invention is more excellent. Although the upper limit is not particularly limited, it is often 30 μm or less, more often 20 μm or less.
The thickness of the photosensitive composition layer can be calculated, for example, as an average value of arbitrary five points measured by cross-sectional observation with a scanning electron microscope (SEM).

Each component contained in the photosensitive composition layer will be described below.

(resin)
The photosensitive composition layer contains a resin having a weight-average molecular weight of 10,000 or more and containing a structural unit having a crosslinkable group (hereinafter also referred to as "resin A"). In addition, the content of the structural unit having a crosslinkable group in Resin A is 30% by mass or more with respect to the total structural units of Resin A.
First, the resin A will be described in detail below.

The weight average molecular weight of Resin A is 10,000 or more. Among them, 15,000 or more is preferable, and 18,000 or more is more preferable, because the effect of the present invention is more excellent. Although the upper limit is not particularly limited, it is often 100,000 or less, and more often 80,000 or less.

The dispersity of resin A is preferably 1.0 to 6.0, more preferably 1.0 to 5.0, even more preferably 1.0 to 4.0, and particularly preferably 1.0 to 3.0. In this disclosure:
Dispersity is the ratio of weight average molecular weight to number average molecular weight (weight average molecular weight/number average molecular weight). In the present disclosure, the weight average molecular weight and number average molecular weight are values measured using gel permeation chromatography.

Resin A is preferably an alkali-soluble resin.
The acid value of Resin A is preferably 220 mgKOH/g or less, more preferably less than 200 mgKOH/g, more preferably 190 mgKOH/g, from the viewpoint of better resolution by suppressing swelling of the photosensitive composition layer due to the developer. Less than is more preferred.
Although the lower limit of the acid value of Resin A is not particularly limited, it is preferably 120 mgKOH/g or more, still more preferably 150 mgKOH/g or more, and particularly preferably 170 mgKOH/g or more, from the viewpoint of better developability.
The acid value (mgKOH/g) is the mass [mg] of potassium hydroxide required to neutralize 1 g of the sample. The acid value can be calculated, for example, from the average content of acid groups in the compound. The acid value of Resin A may be adjusted according to the type of structural units constituting Resin A and the content of structural units containing acid groups, which will be described later.

The glass transition temperature Tg of Resin A is preferably 30 to 135°C. By using the resin A having a Tg of 135° C. or lower, thickening of the line width and degradation of resolution when the focal point shifts during exposure can be suppressed. From this point of view, the Tg of Resin A is more preferably 130° C. or lower, still more preferably 120° C. or lower, and particularly preferably 110° C. or lower. Moreover, it is preferable to use the resin A having a Tg of 30° C. or more from the viewpoint of improving the edge fuse resistance. From this point, the Tg of Resin A is more preferably 40° C. or higher, more preferably 50° C. or higher, particularly preferably 60° C. or higher, and most preferably 70° C. or higher.

- Structural Unit Having a Crosslinkable Group -
Resin A contains a structural unit having a crosslinkable group.
The crosslinkable group can link the polymer chains constituting the resin A with covalent bonds. The crosslinkable group includes, for example, a polymerizable group, preferably a polymerizable group. That is, the resin A preferably contains a structural unit having a polymerizable group.
The polymerizable group is preferably a radically polymerizable group, more preferably an ethylenically unsaturated group. Moreover, when the resin A has an ethylenically unsaturated group, the resin A preferably has a constitutional unit having an ethylenically unsaturated group in its side chain.
As used herein, the term "main chain" refers to the relatively longest bond chain in the molecule of the polymer compound that constitutes the resin, and the term "side chain" refers to an atomic group branched from the main chain. show.
The ethylenically unsaturated group is more preferably an allyl group or a (meth)acryloxy group.

As the structural unit having a polymerizable group, a structural unit represented by formula (P) is preferable.

In formula (P), R ^P represents a hydrogen atom or a methyl group. ^LP represents a divalent linking group. P represents a crosslinkable group.

R ^P represents a hydrogen atom or a methyl group.
R 2 ^P is preferably a hydrogen atom.

^LP represents a divalent linking group.
Examples of the divalent linking group include -CO-, -O-, -S-, -SO-, -SO ₂ -, -NR ^N -, divalent hydrocarbon groups and divalent group. ^RN represents a substituent.
Examples of the hydrocarbon group include an alkylene group, a cycloalkylene group and an arylene group.
The alkylene group may be linear or branched. The alkylene group preferably has 1 to 10 carbon atoms, more preferably 2 to 8 carbon atoms, and still more preferably 3 to 5 carbon atoms. The alkylene group may have a heteroatom, and the methylene group in the alkylene group may be replaced with a heteroatom. The heteroatom is preferably an oxygen atom, a sulfur atom or a nitrogen atom, more preferably an oxygen atom.
The cycloalkylene group may be either monocyclic or polycyclic. The cycloalkylene group preferably has 3 to 20 carbon atoms, more preferably 5 to 10 carbon atoms, and still more preferably 6 to 8 carbon atoms.
The arylene group may be monocyclic or polycyclic. The arylene group preferably has 6 to 20 carbon atoms, more preferably 6 to 15 carbon atoms, and even more preferably 6 to 10 carbon atoms. A phenylene group is preferable as the arylene group.
The cycloalkylene group and the arylene group may have a heteroatom as a ring member atom. The heteroatom is preferably an oxygen atom, a sulfur atom or a nitrogen atom, more preferably an oxygen atom.
The hydrocarbon group may further have a substituent.
Examples of the substituent include halogen atoms (eg, fluorine atoms), hydroxy groups, nitro groups, cyano groups, alkyl groups, alkoxy groups, alkoxycarbonyl groups and alkenyl groups, with hydroxy groups being preferred.
As L ^P , an alkylene group optionally having a heteroatom is preferable.

P represents a crosslinkable group.
The crosslinkable group is as described above, and is preferably a polymerizable group.

Examples of structural units having a polymerizable group include, but are not limited to, those shown below.

In the structural unit above, Rx represents a hydrogen atom or a methyl group. Moreover, Ry represents a hydrogen atom or a methyl group in the said structural unit.

The resin A may contain one type of structural unit having a crosslinkable group, or may contain two or more types thereof.
The content of the structural unit having a crosslinkable group in the resin A is 30% by mass or more based on the total structural units of the resin A. Although the upper limit is not particularly limited, it is often 50% by mass or less.

As a means for introducing a crosslinkable group into the resin A, functional groups such as a hydroxyl group, a carboxyl group, a primary amino group, a secondary amino group, an acetoacetyl group, and a sulfo group may be added to an epoxy compound, a blocked isocyanate, or the like. compounds, isocyanate compounds, vinylsulfone compounds, aldehyde compounds, methylol compounds, and carboxylic acid anhydrides.
As a preferred example of means for introducing a crosslinkable group into the resin A, after synthesizing a polymer having a carboxy group by a polymerization reaction, glycidyl (meth)acrylate is added to a part of the carboxy group of the obtained polymer by a polymer reaction. (Meth)acryloxy group is introduced into the polymer by reacting (meth)acrylate having an epoxy group such as. As another method, after synthesizing a polymer having a hydroxyl group by a polymerization reaction, some of the hydroxyl groups of the obtained polymer are reacted with a (meth)acrylate having an isocyanate group to form a (meth)acryloxy group. Means of introduction into the polymer can be mentioned.
By this means, Resin A having (meth)acryloxy groups in side chains can be obtained.
The polymerization reaction is preferably carried out under temperature conditions of 70 to 100°C, more preferably under temperature conditions of 80 to 90°C. As the polymerization initiator used in the above polymerization reaction, an azo initiator is preferable, and for example, V-601 (trade name) or V-65 (trade name) manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd. is more preferable. The above polymer reaction is preferably carried out under temperature conditions of 80 to 110°C. In the polymer reaction, it is preferable to use a catalyst such as an ammonium salt.

- Structural Unit Derived from Monomer Having Aromatic Hydrocarbon Group -
Moreover, from the viewpoint of suppressing line width thickening and deterioration of resolution when the focus position during exposure is shifted, the resin A preferably contains a structural unit derived from a monomer having an aromatic hydrocarbon group. Examples of such aromatic hydrocarbon groups include substituted or unsubstituted phenyl groups and substituted or unsubstituted aralkyl groups.
The content of structural units derived from a monomer having an aromatic hydrocarbon group in Resin A is preferably 20% by mass or more, more preferably 30% by mass or more, based on all the structural units of Resin A. Although the upper limit is not particularly limited, it is preferably 95% by mass or less, more preferably 85% by mass or less. In addition, when multiple types of resin A are included, it is preferable that the average value of the content of structural units derived from the monomer having an aromatic hydrocarbon group is within the above range.

Examples of monomers having an aromatic hydrocarbon group include monomers having an aralkyl group, styrene, and polymerizable styrene derivatives (e.g., methylstyrene, vinyltoluene, tert-butoxystyrene, acetoxystyrene, styrene dimer, and styrene trimer, etc.). Among them, a monomer having an aralkyl group or styrene is preferred.
When the monomer having an aromatic hydrocarbon group is styrene, the content of structural units derived from styrene is preferably 10 to 70% by mass, preferably 15 to 65% by mass, based on the total structural units of Resin A. is more preferable, 20 to 60% by mass is more preferable, and 25 to 55% by mass is particularly preferable. When the photosensitive composition layer contains a plurality of types of resin A, the content of structural units having an aromatic hydrocarbon group is obtained as a weight average value.

The aralkyl group includes an optionally substituted phenylalkyl group, and an optionally substituted benzyl group is preferred.

Examples of the monomer having a phenylalkyl group which may have a substituent include phenylethyl (meth)acrylate and the like.

Examples of monomers having a benzyl group which may have a substituent include (meth)acrylates having a benzyl group such as benzyl (meth)acrylate and chlorobenzyl (meth)acrylate; vinylbenzyl chloride and vinylbenzyl Examples thereof include vinyl monomers having a benzyl group such as alcohol, preferably (meth)acrylates having a benzyl group, more preferably benzyl (meth)acrylates.
When the monomer having an aromatic hydrocarbon group is benzyl (meth)acrylate, the content of structural units derived from benzyl (meth)acrylate is 10 to 70% by mass with respect to the total structural units of Resin A. is preferred, 15 to 65% by weight is more preferred, 20 to 60% by weight is even more preferred, and 25 to 55% by weight is particularly preferred.

- Structural Unit Derived from a Monomer Having a Carboxy Group -
Resin A may have a structural unit derived from a monomer having a carboxy group.
Examples of monomers having a carboxy group include (meth)acrylic acid, fumaric acid, cinnamic acid, crotonic acid, itaconic acid, 4-vinylbenzoic acid, maleic anhydride, and maleic acid half ester. be done. Among these, (meth)acrylic acid is preferred.
The content of structural units derived from a monomer having a carboxy group in resin A is preferably 5 to 50% by mass, more preferably 10 to 40% by mass, more preferably 15 to 30%, based on the total structural units of resin A. % by mass is more preferred.
The above content of 5% by mass or more is preferable from the viewpoints of exhibiting good developability, controlling edge fuse properties, and the like. Setting the content to 50% by mass or less is preferable from the viewpoints of high resolution and groove shape of the resist pattern, and further from the viewpoint of chemical resistance of the resist pattern.

-Non-acidic structural unit-
The resin A is non-acidic and may contain a non-acidic structural unit derived from a monomer having at least one polymerizable unsaturated group in the molecule.
Examples of the above monomers (non-acidic monomers) include methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) acrylate, n-butyl (meth) acrylate. , isobutyl (meth)acrylate, tert-butyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, cyclohexyl (meth)acrylate, and 2-ethylhexyl (meth)acrylate ( meth)acrylates; vinyl alcohol esters such as vinyl acetate; and (meth)acrylonitrile. Among them, methyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, or n-butyl (meth)acrylate is preferred, and methyl (meth)acrylate is more preferred.
The content of structural units derived from non-acidic monomers in Resin A is preferably 0.5 to 60% by mass, more preferably 1 to 50% by mass, more preferably 1 to 50% by mass, based on all structural units of Resin A. 30% by mass is more preferred.

Resin A may have any one of a linear structure, a branched structure, and an alicyclic structure in the side chain.
As used herein, the term "main chain" refers to the relatively longest bond chain in the molecule of the polymer compound that constitutes the resin, and the term "side chain" refers to an atomic group branched from the main chain. show.
A branched structure or alicyclic structure is introduced into the side chain of Resin A by using a monomer containing a group having a branched structure in the side chain or a monomer containing a group having an alicyclic structure in the side chain. be able to. A group having an alicyclic structure may be monocyclic or polycyclic.
Specific examples of the monomer containing a group having a branched structure in its side chain include isopropyl (meth)acrylate, isobutyl (meth)acrylate, sec-butyl (meth)acrylate, and tert-butyl (meth)acrylate. , isoamyl (meth)acrylate, tert-amyl (meth)acrylate, sec-amyl (meth)acrylate, 2-octyl (meth)acrylate, 3-octyl (meth)acrylate, and (meth)acrylic acid and tert-octyl. Among these, isopropyl (meth)acrylate, isobutyl (meth)acrylate, or tert-butyl methacrylate is preferable, and isopropyl methacrylate or tert-butyl methacrylate is more preferable.
Specific examples of the monomer containing a group having an alicyclic structure in the side chain include monomers having a monocyclic aliphatic hydrocarbon group and monomers having a polycyclic aliphatic hydrocarbon group. . (Meth)acrylates having an alicyclic hydrocarbon group with 5 to 20 carbon atoms are also included. More specific examples include (meth)acrylic acid (bicyclo[2.2.1]heptyl-2), (meth)acrylate-1-adamantyl, (meth)acrylate-2-adamantyl, (meth) 3-methyl-1-adamantyl acrylate, 3,5-dimethyl-1-adamantyl (meth)acrylate, 3-ethyladamantyl (meth)acrylate, 3-methyl-5-(meth)acrylate Ethyl-1-adamantyl, (meth)acrylate-3,5,8-triethyl-1-adamantyl, (meth)acrylate-3,5-dimethyl-8-ethyl-1-adamantyl, (meth)acrylic acid 2 -methyl-2-adamantyl, 2-ethyl-2-adamantyl (meth)acrylate, 3-hydroxy-1-adamantyl (meth)acrylate, octahydro-4,7-mentanoindene-5- (meth)acrylate yl, octahydro-4,7-menthanoinden-1-ylmethyl (meth)acrylate, 1-menthyl (meth)acrylate, tricyclodecane (meth)acrylate, 3-hydroxy-(meth)acrylate 2,6,6-trimethyl-bicyclo[3.1.1]heptyl, (meth)acrylic acid-3,7,7-trimethyl-4-hydroxy-bicyclo[4.1.0]heptyl, (meth)acrylic (nor)bornyl acid, isobornyl (meth)acrylate, fenchyl (meth)acrylate, 2,2,5-trimethylcyclohexyl (meth)acrylate, and cyclohexyl (meth)acrylate. Among these (meth)acrylic acid esters, cyclohexyl (meth)acrylate, (nor)bornyl (meth)acrylate, isobornyl (meth)acrylate, 1-adamantyl (meth)acrylate, (meth)acrylic acid -2-adamantyl, fenchyl (meth)acrylate, 1-menthyl (meth)acrylate, or tricyclodecane (meth)acrylate is preferred, cyclohexyl (meth)acrylate, (nor)bornyl (meth)acrylate, Isobornyl (meth)acrylate, 2-adamantyl (meth)acrylate, or tricyclodecane (meth)acrylate are more preferred.

Resin A may be used alone or in combination of two or more.
When two or more types are used, two types of resin A containing a structural unit derived from a monomer having an aromatic hydrocarbon group are used in combination, or a monomer having an aromatic hydrocarbon group is used. It is preferable to use a mixture of the resin A containing the structural unit derived from and the resin A not containing the structural unit derived from the monomer having an aromatic hydrocarbon group. In the latter case, the proportion of resin A used containing structural units derived from a monomer having an aromatic hydrocarbon group is preferably 50% by mass or more, more preferably 70% by mass or more, relative to the total mass of resin A. Preferably, 80% by mass or more is more preferable, and 90% by mass or more is particularly preferable.

Synthesis of Resin A involves combining one or more of the monomers described above with radicals such as a peroxide polymerization initiator (e.g. benzoyl peroxide) and an azo polymerization initiator (e.g. azobisisobutyronitrile). It can be carried out by polymerizing using a polymerization initiator.

Resin A may be used alone or in combination of two or more.
The content of resin A is preferably 10 to 90% by mass, more preferably 20 to 80% by mass, still more preferably 30 to 70% by mass, and 40 to 60% by mass, based on the total mass of the photosensitive composition layer. is particularly preferred. It is preferable from the viewpoint of controlling the developing time that the content of the resin A is 90% by mass or less. On the other hand, setting the content of resin A to 10% by mass or more is preferable from the viewpoint of improving edge fuse resistance.

The photosensitive composition layer may contain other resins than the resin A described above.
Other resins include acrylic resins, styrene-acrylic copolymers, polyurethane resins, polyvinyl alcohol, polyvinyl formal, polyester resins, epoxy resins, polyacetal resins, polybenzoxazole resins, polysiloxane resins, polyethyleneimine, polyallylamine, and polyalkylene glycols.

(sensitizer)
The photosensitive composition layer contains a sensitizer.
The sensitizer is not particularly limited, and known sensitizers, dyes and pigments can be used. Sensitizers include, for example, dialkylaminobenzophenone compounds, pyrazoline compounds, anthracene compounds, coumarin compounds, xanthone compounds, thioxanthone compounds, acridone compounds, oxazole compounds, benzoxazole compounds, thiazole compounds, benzothiazole compounds, triazole compounds (e.g., 1,2,4-triazole), stilbene compounds, distyrylbenzene compounds, styrylpyridine compounds, triazine compounds, thiophene compounds, naphthalimide compounds, triarylamine compounds, and aminoacridine compounds. The compounds listed above also include derivatives of the above compounds.
Among them, the sensitizer is preferably a dialkylaminobenzophenone compound, an anthracene compound, a distyrylbenzene compound, or a styrylpyridine compound, more preferably an anthracene compound, a distyrylbenzene compound, or a styrylpyridine compound, an anthracene derivative, Distyrylbenzene derivatives or styrylpyridine derivatives are more preferred.

A sensitizer may be used alone or in combination of two or more.
The content of the sensitizer in the photosensitive composition layer can be appropriately selected depending on the purpose. 0.001 to 5% by mass is preferable, 0.01 to 1% by mass is more preferable, and 0.01 to 0.5% by mass is even more preferable with respect to the total mass.

(Polymerizable compound)
The photosensitive composition layer may contain a polymerizable compound having a polymerizable group. As the polymerizable compound, an ethylenically unsaturated compound is preferred.
As used herein, the term "polymerizable compound" means a compound that polymerizes under the action of a polymerization initiator, which will be described later, and that is different from the resin A described above.

The polymerizable group possessed by the polymerizable compound may be any group that participates in the polymerization reaction. and a group having a cationic polymerizable group such as an oxetane group, preferably a group having an ethylenically unsaturated group, more preferably an acryloyl group or a methacryloyl group.

Examples of ethylenically unsaturated groups possessed by ethylenically unsaturated compounds include vinyl groups, acryloyl groups, methacryloyl groups, styryl groups, maleimide groups, and the like. As the ethylenically unsaturated group, an acryloyl group or a methacryloyl group is preferred.
The polymerizable group possessed by the polymerizable compound other than the ethylenically unsaturated compound is not particularly limited as long as it is a group involved in the polymerization reaction. For example, a group having a cationic polymerizable group such as an epoxy group and an oxetane group mentioned.
The ethylenically unsaturated compounds are described below.

The ethylenically unsaturated compound is preferably a compound having two or more ethylenically unsaturated groups in one molecule (polyfunctional ethylenically unsaturated compound) from the viewpoint of better photosensitivity.
Further, from the viewpoint of excellent resolution and peelability, the number of ethylenically unsaturated groups that the ethylenically unsaturated compound has in one molecule is preferably 6 or less, more preferably 3 or less, and 2 or less. More preferred.

A bifunctional or trifunctional ethylenically unsaturated compound having two or three ethylenically unsaturated groups in one molecule from the viewpoint of better balance between photosensitivity, resolution, and releasability of the photosensitive composition layer. and more preferably a bifunctional ethylenically unsaturated compound having two ethylenically unsaturated groups in one molecule.
The content of the bifunctional ethylenically unsaturated compound relative to the total weight of the polymerizable compound is preferably 20% by mass or more, more preferably more than 40% by mass, and still more preferably 55% by mass or more, from the viewpoint of excellent peelability. The upper limit is not particularly limited, and may be 100% by mass. That is, all polymerizable compounds may be difunctional ethylenically unsaturated compounds.
Moreover, as the ethylenically unsaturated compound, a (meth)acrylate compound having a (meth)acryloyl group as a polymerizable group is preferable.

-Polymerizable compound B1-
The photosensitive composition layer preferably contains, as a polymerizable compound, a polymerizable compound B1 having an aromatic ring and two ethylenically unsaturated groups.

In the photosensitive composition layer, the mass ratio of the content of the polymerizable compound B1 to the total mass of the polymerizable compounds is preferably 40% by mass or more, more preferably 50% by mass or more, from the viewpoint of better resolution. 55% by mass or more is more preferable, and 60% by mass or more is particularly preferable. Although the upper limit is not particularly limited, from the viewpoint of peelability, it is, for example, 100% by mass or less, preferably 99% by mass or less, more preferably 95% by mass or less, further preferably 90% by mass or less, and particularly 85% by mass or less. preferable.

Examples of the aromatic ring of the polymerizable compound B1 include aromatic hydrocarbon rings such as benzene ring, naphthalene ring and anthracene ring; aromatic rings such as thiophene ring, furan ring, pyrrole ring, imidazole ring, triazole ring and pyridine ring; Heterocyclic rings and condensed rings thereof are included, with aromatic hydrocarbon rings being preferred, and benzene rings being more preferred. In addition, the said aromatic ring may have a substituent.
Polymerizable compound B1 may have only one aromatic ring, or may have two or more aromatic rings.

The polymerizable compound B1 preferably has a bisphenol structure from the viewpoint of improving the resolution by suppressing swelling of the photosensitive composition layer due to the developer.
The bisphenol structure includes, for example, a bisphenol A structure derived from bisphenol A (2,2-bis(4-hydroxyphenyl)propane) and a bisphenol derived from bisphenol F (2,2-bis(4-hydroxyphenyl)methane). F structure and bisphenol B structure derived from bisphenol B (2,2-bis(4-hydroxyphenyl)butane) are included, and bisphenol A structure is preferred.

Examples of the polymerizable compound B1 having a bisphenol structure include compounds having a bisphenol structure and two polymerizable groups (preferably (meth)acryloyl groups) bonded to both ends of the bisphenol structure.
Both ends of the bisphenol structure and the two polymerizable groups may be directly bonded, may be bonded via one or more alkyleneoxy groups, or may be bonded via one or more alkyleneoxy groups. is preferred. That is, the polymerizable compound B1 preferably has an alkylene oxide-modified bisphenol structure.
The alkyleneoxy group added to both ends of the bisphenol structure is preferably an ethyleneoxy group or a propyleneoxy group, more preferably an ethyleneoxy group. The number of alkyleneoxy groups to be added to the bisphenol structure is not particularly limited, but is preferably 4 to 16, more preferably 6 to 14 per molecule.
The polymerizable compound B1 having a bisphenol structure is described in paragraphs [0072] to [0080] of JP-A-2016-224162, and the contents described in this publication are incorporated herein.

As the polymerizable compound B1, a bifunctional ethylenically unsaturated compound having a bisphenol A structure is preferable, and 2,2-bis(4-((meth)acryloxypolyalkoxy)phenyl)propane is more preferable.
2,2-bis(4-((meth)acryloxypolyalkoxy)phenyl)propane includes, for example, 2,2-bis(4-(methacryloxydiethoxy)phenyl)propane (FA-324M, Hitachi Chemical Co., Ltd.) ), 2,2-bis(4-(methacryloxyethoxypropoxy)phenyl)propane, 2,2-bis(4-(methacryloxypentaethoxy)phenyl)propane (BPE-500, manufactured by Shin-Nakamura Chemical Co., Ltd.) , 2,2-bis(4-(methacryloxydodecaethoxytetrapropoxy)phenyl)propane (FA-3200MY, manufactured by Hitachi Chemical Co., Ltd.), 2,2-bis(4-(methacryloxypentadecaethoxy)phenyl)propane ( BPE-1300, manufactured by Shin-Nakamura Chemical Co., Ltd.), 2,2-bis(4-(methacryloxydiethoxy)phenyl)propane (BPE-200, manufactured by Shin-Nakamura Chemical Co., Ltd.), ethoxylated (10) bisphenol A di Acrylate (NK Ester A-BPE-10, manufactured by Shin-Nakamura Chemical Co., Ltd.) and ethoxylated bisphenol A dimethacrylate (BPE-100, manufactured by Shin-Nakamura Chemical Co., Ltd.).

As the polymerizable compound B1, a compound represented by the following general formula (B1) is also preferable.

In general formula (B1), R ₁ and R ₂ each independently represent a hydrogen atom or a methyl group. A represents _{C2H4 .} B represents _{C3H6 .} n1 and n3 are each independently an integer of 1-39, and n1+n3 is an integer of 2-40. n2 and n4 are each independently an integer of 0-29, and n2+n4 is an integer of 0-30. The arrangement of -(AO)- and -(B-O)- constitutional units may be random or block. In the case of a block, either -(AO)- or -(B-O)- may be on the side of the biphenyl group.
In one aspect, n1+n2+n3+n4 is preferably 2 to 20, more preferably 2 to 16, and even more preferably 4 to 12. Also, n2+n4 is preferably 0 to 10, more preferably 0 to 4, still more preferably 0 to 2, and particularly preferably 0.

One type of polymerizable compound B1 may be used alone, or two or more types may be used.
The content of the polymerizable compound B1 is preferably 10% by mass or more, more preferably 20% by mass or more, relative to the total mass of the photosensitive composition layer from the viewpoint of better resolution. Although the upper limit is not particularly limited, it is preferably 70% by mass or less, more preferably 60% by mass or less, from the viewpoint of transferability and edge fusion (a phenomenon in which the photosensitive resin oozes out from the end of the transfer member).

The photosensitive composition layer may contain a polymerizable compound other than the polymerizable compound B1 described above.
Polymerizable compounds other than polymerizable compound B1 are not particularly limited, and can be appropriately selected from known compounds. For example, a compound having one ethylenically unsaturated group in one molecule (monofunctional ethylenically unsaturated compound), a bifunctional ethylenically unsaturated compound having no aromatic ring, and a trifunctional or higher ethylenically unsaturated compound are mentioned.

Examples of monofunctional ethylenically unsaturated compounds include ethyl (meth)acrylate, ethylhexyl (meth)acrylate, 2-(meth)acryloyloxyethyl succinate, polyethylene glycol mono(meth)acrylate, polypropylene glycol mono(meth)acrylate. , and phenoxyethyl (meth)acrylate.

Examples of bifunctional ethylenically unsaturated compounds having no aromatic ring include alkylene glycol di(meth)acrylate, polyalkylene glycol di(meth)acrylate, urethane di(meth)acrylate, and trimethylolpropane diacrylate. .
Alkylene glycol di(meth)acrylates include, for example, tricyclodecanedimethanol diacrylate (A-DCP, manufactured by Shin-Nakamura Chemical Co., Ltd.), tricyclodecanedimethanol dimethacrylate (DCP, manufactured by Shin-Nakamura Chemical Co., Ltd.), 1,9-nonanediol diacrylate (A-NOD-N, manufactured by Shin-Nakamura Chemical Co., Ltd.), 1,6-hexanediol diacrylate (A-HD-N, manufactured by Shin-Nakamura Chemical Co., Ltd.), polyethylene glycol dimethacrylate (4G, 9G, 14G, and 23G, etc., manufactured by Shin-Nakamura Chemical Co., Ltd.), Aronix (registered trademark) M-220 (manufactured by Toagosei Co., Ltd.), Aronix (registered trademark) M-240 (manufactured by Toagosei Co., Ltd.), Aronix® M-270 (manufactured by Toagosei Co., Ltd.), ethylene glycol dimethacrylate, 1,10-decanediol diacrylate, and neopentyl glycol di(meth)acrylate.
Polyalkylene glycol di(meth)acrylates include, for example, polyethylene glycol di(meth)acrylate, dipropylene glycol diacrylate, tripropylene glycol diacrylate, and polypropylene glycol di(meth)acrylate.
Urethane di(meth)acrylates include, for example, propylene oxide-modified urethane di(meth)acrylates, and ethylene oxide and propylene oxide-modified urethane di(meth)acrylates. Commercially available products include, for example, 8UX-015A (manufactured by Taisei Fine Chemical Co., Ltd.), UA-32P (manufactured by Shin-Nakamura Chemical Co., Ltd.), and UA-1100H (manufactured by Shin-Nakamura Chemical Co., Ltd.).

Examples of trifunctional or higher ethylenically unsaturated compounds include dipentaerythritol (tri/tetra/penta/hexa) (meth) acrylate, pentaerythritol (tri/tetra) (meth) acrylate, trimethylolpropane tri(meth) Acrylate, ditrimethylolpropane tetra(meth)acrylate, trimethylolethane tri(meth)acrylate, isocyanurate tri(meth)acrylate, glycerin tri(meth)acrylate, and alkylene oxide-modified products thereof.
Here, "(tri/tetra/penta/hexa) (meth)acrylate" is a concept including tri(meth)acrylate, tetra(meth)acrylate, penta(meth)acrylate, and hexa(meth)acrylate. , "(tri/tetra)(meth)acrylate" is a concept including tri(meth)acrylate and tetra(meth)acrylate.
In one embodiment, the photosensitive composition layer preferably contains the above-described polymerizable compound B1 and a trifunctional or higher ethylenically unsaturated compound, and the above-described polymerizable compound B1 and two or more trifunctional or higher ethylenic More preferably, it contains an unsaturated compound. In this case, the mass ratio of the polymerizable compound B1 and the trifunctional or higher ethylenically unsaturated compound is (total mass of the polymerizable compound B1):(total mass of the trifunctional or higher ethylenically unsaturated compound) = 1:1. ~5:1 is preferred, 1.2:1 to 4:1 is more preferred, and 1.5:1 to 3:1 is even more preferred.
In one aspect, the photosensitive composition layer preferably contains the polymerizable compound B1 and two or more trifunctional ethylenically unsaturated compounds.

Examples of alkylene oxide-modified trifunctional or higher ethylenically unsaturated compounds include caprolactone-modified (meth)acrylate compounds (KAYARAD (registered trademark) DPCA-20 manufactured by Nippon Kayaku Co., Ltd., A-9300-1CL manufactured by Shin-Nakamura Chemical Co., Ltd. etc.), ethoxylated trimethylolpropane triacrylate (SR454, SR499, and SR502, etc. manufactured by Tomoe Kogyo Co., Ltd.), alkylene oxide-modified (meth) acrylate compounds (KAYARAD RP-1040 manufactured by Nippon Kayaku Co., Ltd., manufactured by Shin-Nakamura Chemical Co., Ltd. ATM-35E and A-9300, EBECRYL (registered trademark) 135 manufactured by Daicel Allnex Co., Ltd.), ethoxylated glycerin triacrylate (A-GLY-9E manufactured by Shin-Nakamura Chemical Co., Ltd.), Aronix (registered trademark) TO-2349 (manufactured by Toagosei Co., Ltd.), Aronix M-520 (manufactured by Toagosei Co., Ltd.), and Aronix M-510 (manufactured by Toagosei Co., Ltd.).

Moreover, you may use the polymerizable compound which has an acid group (carboxy group etc.) as a polymerizable compound. The acid group may form an acid anhydride group. Examples of the polymerizable compound having an acid group include Aronix (registered trademark) TO-2349 (manufactured by Toagosei Co., Ltd.), Aronix (registered trademark) M-520 (manufactured by Toagosei Co., Ltd.), and Aronix (registered trademark) M-510 ( manufactured by Toagosei Co., Ltd.).
As the polymerizable compound having an acid group, for example, polymerizable compounds having an acid group described in paragraphs [0025] to [0030] of JP-A-2004-239942 may be used.

The molecular weight (weight average molecular weight when having a molecular weight distribution) of the polymerizable compound (including polymerizable compound B1) is preferably 200 to 3000, more preferably 280 to 2200, and even more preferably 300 to 2200.

A polymerizable compound may be used individually by 1 type, and may use 2 or more types simultaneously.
The content of the polymerizable compound is preferably 0 to 70% by mass, more preferably 10 to 70% by mass, still more preferably 20 to 60% by mass, based on the total mass of the photosensitive composition layer.
The mass ratio of the polymerizable compound other than the resin A contained in the photosensitive composition layer and having a weight average molecular weight of less than 10000 relative to the resin A is not particularly limited. preferable. Although the lower limit of the mass ratio is not particularly limited, it is preferably 0.50 or more, more preferably 0.60 or more, from the viewpoint of more excellent effects of the present invention.

(Polymerization initiator)
The photosensitive composition layer may contain a polymerization initiator.
As the polymerization initiator, for example, a known polymerization initiator can be used depending on the type of polymerization reaction. Specific examples include thermal polymerization initiators and photopolymerization initiators.
The polymerization initiator may be either a radical polymerization initiator or a cationic polymerization initiator.

The photosensitive composition layer preferably contains a photopolymerization initiator.
A photopolymerization initiator is a compound that initiates polymerization of a polymerizable compound upon exposure to actinic rays such as ultraviolet rays, visible rays, and X-rays. The photopolymerization initiator is not particularly limited, and known photopolymerization initiators can be used.
Examples of photopolymerization initiators include radical photopolymerization initiators and cationic photopolymerization initiators, and radical photopolymerization initiators are preferred.

Examples of photoradical polymerization initiators include photopolymerization initiators having an oxime ester structure, photopolymerization initiators having an α-aminoalkylphenone structure, photopolymerization initiators having an α-hydroxyalkylphenone structure, and acylphosphine oxide. structure and a photopolymerization initiator having an N-phenylglycine structure.

In addition, the photosensitive composition layer contains 2,4,5-triarylimidazole dimer and It preferably contains at least one selected from the group consisting of derivatives thereof. The two 2,4,5-triarylimidazole structures in the 2,4,5-triarylimidazole dimer and its derivative may be the same or different.
Derivatives of 2,4,5-triarylimidazole dimer include, for example, 2-(o-chlorophenyl)-4,5-diphenylimidazole dimer, 2-(o-chlorophenyl)-4,5-di (Methoxyphenyl)imidazole dimer, 2-(o-fluorophenyl)-4,5-diphenylimidazole dimer, 2-(o-methoxyphenyl)-4,5-diphenylimidazole dimer, and 2- (p-Methoxyphenyl)-4,5-diphenylimidazole dimer.

Examples of photoradical polymerization initiators include, for example, paragraphs [0031] to [0042] of JP-A-2011-095716, and paragraphs [0064] to [0081] of JP-A-2015-014783. An initiator may be used.

Examples of photoradical polymerization initiators include ethyl dimethylaminobenzoate (DBE, CAS No. 10287-53-3), benzoin methyl ether, anisyl (p,p'-dimethoxybenzyl), TAZ-110 (trade name: Midori Chemical Co., Ltd.), benzophenone, 4,4′-bis(diethylamino)benzophenone, TAZ-111 (trade name: Midori Chemical Co., Ltd.), IrgacureOXE01, OXE02, OXE03, OXE04 (manufactured by BASF), Omnirad 651 and 369 (products Name: IGM Resins B.V.), and 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole (Tokyo Chemical Industry Co., Ltd. made).

Examples of commercially available radical photopolymerization initiators include 1-[4-(phenylthio)]-1,2-octanedione-2-(O-benzoyloxime) (trade name: IRGACURE (registered trademark) OXE-01). , manufactured by BASF), 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]ethanone-1-(O-acetyloxime) (trade name: IRGACURE OXE-02, BASF company), IRGACURE OXE-03 (manufactured by BASF), IRGACURE OXE-04 (manufactured by BASF), 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-[4-(4 -morpholinyl)phenyl]-1-butanone (trade name: Omnirad 379EG, manufactured by IGM Resins BV), 2-methyl-1-(4-methylthiophenyl)-2-morpholinopropan-1-one (trade name : Omnirad 907, manufactured by IGM Resins B.V.), 2-hydroxy-1-{4-[4-(2-hydroxy-2-methylpropionyl)benzyl]phenyl}-2-methylpropan-1-one (product Name: Omnirad
127, IGM ResinsB. V. ), 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)butanone-1 (trade name: Omnirad 369, manufactured by IGM Resins BV), 2-hydroxy-2-methyl-1- Phenylpropan-1-one (trade name: Omnirad 1173, manufactured by IGM Resins BV), 1-hydroxycyclohexyl phenyl ketone (trade name: Omnirad 184, manufactured by IGM Resins BV), 2,2-dimethoxy- 1,2-diphenylethan-1-one (trade name: Omnirad 651, manufactured by IGM Resins B.V.), 2,4,6-trimethylbenzoyl-diphenylphosphine oxide (trade name: Omnirad TPO H, IGM Resins BV), bis(2,4,6-trimethylbenzoyl)phenylphosphine oxide (trade name: Omnirad 819, IGM Resins BV), oxime ester-based photopolymerization initiator (trade name : Lunar 6, manufactured by DKSH Japan), 2,2′-bis(2-chlorophenyl)-4,4′,5,5′-tetraphenylbisimidazole (2-(2-chlorophenyl)-4,5-diphenyl imidazole dimer) (trade name: B-CIM, manufactured by Hampford), 2-(o-chlorophenyl)-4,5-diphenylimidazole dimer (trade name: BCTB, manufactured by Tokyo Chemical Industry Co., Ltd.), 1- [4-(Phenylthio)phenyl]-3-cyclopentylpropane-1,2-dione-2-(O-benzoyloxime) (trade name: TR-PBG-305, manufactured by Changzhou Power Electronics New Materials Co., Ltd.), 1,2 -propanedione, 3-cyclohexyl-1-[9-ethyl-6-(2-furanylcarbonyl)-9H-carbazol-3-yl]-, 2-(O-acetyloxime) (trade name: TR-PBG -326, manufactured by Changzhou Yuan Electronics New Materials Co., Ltd.), and 3-cyclohexyl-1-(6-(2-(benzoyloxyimino)hexanoyl)-9-ethyl-9H-carbazol-3-yl)-propane-1, 2-dione-2-(O-benzoyloxime) (trade name: TR-PBG-391, manufactured by Changzhou Tenryu Electric New Materials Co., Ltd.).

A photocationic polymerization initiator (photoacid generator) is a compound that generates an acid upon receiving an actinic ray. The photocationic polymerization initiator is preferably a compound that responds to an actinic ray with a wavelength of 300 nm or more, preferably 300 to 450 nm, and generates an acid, but its chemical structure is not limited. In addition, for photocationic polymerization initiators that do not directly react to actinic rays with a wavelength of 300 nm or more, if they are compounds that react to actinic rays with a wavelength of 300 nm or more and generate an acid by using them in combination with a sensitizer, the sensitizer can be used. It can be preferably used in combination with
The photocationic polymerization initiator is preferably a photocationic polymerization initiator that generates an acid with a pKa of 4 or less, more preferably a photocationic polymerization initiator that generates an acid with a pKa of 3 or less, and an acid with a pKa of 2 or less. Photocationic polymerization initiators that generate are more preferred. Although the lower limit of pKa is not particularly defined, it is preferably -10.0 or more, for example.

Examples of photocationic polymerization initiators include ionic photocationic polymerization initiators and nonionic photocationic polymerization initiators.
Ionic photocationic polymerization initiators include, for example, onium salt compounds such as diaryliodonium salts and triarylsulfonium salts, and quaternary ammonium salts.
As the ionic photocationic polymerization initiator, the ionic photocationic polymerization initiators described in paragraphs [0114] to [0133] of JP-A-2014-085643 may be used.

Nonionic photocationic polymerization initiators include, for example, trichloromethyl-s-triazines, diazomethane compounds, imidosulfonate compounds, and oximesulfonate compounds. As trichloromethyl-s-triazines, diazomethane compounds and imidosulfonate compounds, compounds described in paragraphs [0083] to [0088] of JP-A-2011-221494 may be used. Further, as the oxime sulfonate compound, compounds described in paragraphs [0084] to [0088] of WO 2018/179640 may be used.

The photosensitive composition layer preferably contains a photoradical polymerization initiator, more preferably at least one selected from the group consisting of 2,4,5-triarylimidazole dimers and derivatives thereof.

A polymerization initiator may be used individually by 1 type, and may be used 2 or more types.
The content of the polymerization initiator (preferably a photopolymerization initiator) is not particularly limited, but is preferably 0.1% by mass or more, more preferably 0.5% by mass or more, relative to the total mass of the photosensitive composition layer. , more preferably 1.0% by mass or more. Although the upper limit is not particularly limited, it is preferably 20% by mass or less, more preferably 15% by mass or less, and even more preferably 10% by mass or less, relative to the total mass of the photosensitive composition layer.

(pigment)
The photosensitive composition layer has a maximum absorption wavelength of 450 nm or more in a wavelength range of 400 to 780 nm during color development from the viewpoints of visibility of exposed and unexposed areas, pattern visibility after development, and resolution. In addition, it is also preferable to include a dye (also referred to as “dye N”) whose maximum absorption wavelength is changed by acid, base, or radical. When the dye N is included, the adhesion to the adjacent layer (for example, the water-soluble resin layer) is improved and the resolution is improved, although the detailed mechanism is unknown.

In the present specification, the expression that the dye "changes the maximum absorption wavelength due to an acid, a base, or a radical" means that the dye in a colored state is decolored by an acid, a base, or a radical, and the dye in a decolored state is It may mean any one of a mode in which a color is developed by an acid, a base, or a radical, and a mode in which a dye in a coloring state changes to a coloring state of another hue.
Specifically, the dye N may be a compound that changes from a decolored state to develop color upon exposure, or may be a compound that changes from a colored state to decolor upon exposure. In this case, it may be a dye that changes the state of coloring or decoloring due to the action of acid, base, or radicals generated in the photosensitive composition layer by exposure. It may be a dye that develops or decolors depending on changes in the state (for example, pH) in the layer. Moreover, it may be a dye that changes its coloring or decoloring state by being directly stimulated by an acid, a base, or a radical without being exposed to light.

Among them, from the viewpoint of the visibility and resolution of the exposed and unexposed areas, the dye N is preferably a dye whose maximum absorption wavelength is changed by acid or radicals, more preferably a dye whose maximum absorption wavelength is changed by radicals. .
In the case where the photosensitive composition layer is a negative photosensitive composition layer, the negative photosensitive composition layer has the maximum amount of radicals as the dye N from the viewpoint of visibility and resolution in the exposed and unexposed areas. It is preferable to contain both a dye whose absorption wavelength changes and a photoradical polymerization initiator.
From the viewpoint of the visibility of the exposed and unexposed areas, the dye N is preferably a dye that develops color with an acid, a base, or a radical.

As an example of the coloring mechanism of dye N, a photoradical polymerization initiator, a photocationic polymerization initiator (photoacid generator), or a photobase generator is added to the photosensitive composition layer, and photoradical polymerization is initiated after exposure. A radical-reactive dye, an acid-reactive dye, or a base-reactive dye (e.g., a leuco dye) develops color by radicals, acids, or bases generated from the agent, photocationic polymerization initiator, or photobase generator. be done.

Dye N preferably has a maximum absorption wavelength of 550 nm or more, more preferably 550 to 700 nm, in the wavelength range of 400 to 780 nm during color development, from the viewpoint of visibility in the exposed and unexposed areas. More preferably ~650 nm.
Also, the dye N may have only one maximum absorption wavelength in the wavelength range of 400 to 780 nm during color development, or may have two or more. When the dye N has two or more maximum absorption wavelengths in the wavelength range of 400 to 780 nm during color development, the maximum absorption wavelength with the highest absorbance among the two or more maximum absorption wavelengths should be 450 nm or more.

The maximum absorption wavelength of Dye N was determined by measuring the transmission of a solution containing Dye N (liquid temperature 25°C) in the wavelength range of 400 to 780 nm using a spectrophotometer: UV3100 (manufactured by Shimadzu Corporation) in an air atmosphere. It is obtained by measuring the spectrum and detecting the wavelength (maximum absorption wavelength) at which the intensity of light is minimal.

Examples of dyes that develop or decolorize upon exposure include leuco compounds.
Examples of dyes that are decolorized by exposure include leuco compounds, diarylmethane-based dyes, oxazine-based dyes, xanthene-based dyes, iminonaphthoquinone-based dyes, azomethine-based dyes, and anthraquinone-based dyes.
As the dye N, a leuco compound is preferable from the viewpoint of the visibility of the exposed area and the non-exposed area.

Examples of leuco compounds include leuco compounds having a triarylmethane skeleton (triarylmethane dyes), leuco compounds having a spiropyran skeleton (spiropyran dyes), leuco compounds having a fluorane skeleton (fluoran dyes), and diarylmethane skeletons. a leuco compound (diarylmethane dye), a leuco compound having a rhodamine lactam skeleton (rhodamine lactam dye), a leuco compound having an indolylphthalide skeleton (indolylphthalide dye), and a leuco auramine skeleton Leuco compounds (leuco auramine dyes) can be mentioned.
Among them, triarylmethane-based dyes or fluoran-based dyes are preferable, and leuco compounds having a triphenylmethane skeleton (triphenylmethane-based dyes) or fluoran-based dyes are more preferable.

The leuco compound preferably has a lactone ring, a sultine ring, or a sultone ring from the viewpoint of visibility in exposed and unexposed areas. As a result, the lactone ring, sultine ring, or sultone ring of the leuco compound is reacted with a radical generated from a radical photopolymerization initiator or an acid generated from a photocationic polymerization initiator to change the leuco compound into a ring-closed state. Alternatively, the color can be developed by changing the leuco compound into a ring-opened state. The leuco compound is preferably a compound that has a lactone ring, a sultine ring, or a sultone ring and develops a color due to the opening of the lactone ring, sultine ring, or sultone ring by a radical or an acid. A compound that develops color by opening the lactone ring with an acid is more preferable.

Examples of dye N include the following dyes and leuco compounds.
Specific examples of dyes among dyes N include brilliant green, ethyl violet, methyl green, crystal violet, basic fuchsine, methyl violet 2B, quinaldine red, rose bengal, methanil yellow, thymolsulfophtalein, xylenol blue, methyl Orange, Paramethyl Red, Congo Fred, Benzopurpurin 4B, α-Naphthyl Red, Nile Blue 2B, Nile Blue A, Methyl Violet, Malachite Green, Parafuchsin, Victoria Pure Blue-Naphthalene Sulfonate, Victoria Pure Blue BOH (protective Tsuchiya Chemical Industry Co., Ltd.), Oil Blue #603 (Orient Chemical Industry Co., Ltd.), Oil Pink #312 (Orient Chemical Industry Co., Ltd.), Oil Red 5B (Orient Chemical Industry Co., Ltd.), Oil Scarlet #308 (Orient Chemical Industry Co., Ltd.) company), Oil Red OG (Orient Chemical Industry Co., Ltd.), Oil Red RR (Orient Chemical Industry Co., Ltd.), Oil Green #502 (Orient Chemical Industry Co., Ltd.), Spiron Red BEH Special (Hodogaya Chemical Industry Co., Ltd.), m-cresol purple, cresol red, rhodamine B, rhodamine 6G, sulforhodamine B, auramine, 4-p-diethylaminophenyliminonaphthoquinone, 2-carboxyanilino-4-p-diethylaminophenyliminonaphthoquinone, 2-carboxystearylamino- 4-p-N,N-bis(hydroxyethyl)amino-phenyliminonaphthoquinone, 1-phenyl-3-methyl-4-p-diethylaminophenylimino-5-pyrazolone, and 1-β-naphthyl-4-p- and diethylaminophenylimino-5-pyrazolone.

Specific examples of the leuco compound of the dye N include p,p′,p″-hexamethyltriaminotriphenylmethane (leuco crystal violet), Pergascript Blue SRB (manufactured by Ciba-Geigy), crystal violet lactone, malachite green lactone, benzoyl leucomethylene blue, 2-(N-phenyl-N-methylamino)-6-(Np-tolyl-N-ethyl)aminofluorane, 2-anilino-3-methyl-6-(N-ethyl-p -toluidino)fluorane, 3,6-dimethoxyfluorane, 3-(N,N-diethylamino)-5-methyl-7-(N,N-dibenzylamino)fluorane, 3-(N-cyclohexyl-N-methyl amino)-6-methyl-7-anilinofluorane, 3-(N,N-diethylamino)-6-methyl-7-anilinofluorane, 3-(N,N-diethylamino)-6-methyl-7 -xyridinofluorane, 3-(N,N-diethylamino)-6-methyl-7-chlorofluorane, 3-(N,N-diethylamino)-6-methoxy-7-aminofluorane, 3-(N ,N-diethylamino)-7-(4-chloroanilino)fluorane, 3-(N,N-diethylamino)-7-chlorofluorane, 3-(N,N-diethylamino)-7-benzylaminofluorane, 3- (N,N-diethylamino)-7,8-benzofluorane, 3-(N,N-dibutylamino)-6-methyl-7-anilinofluorane, 3-(N,N-dibutylamino)-6 -methyl-7-xyridinofluorane, 3-piperidino-6-methyl-7-anilinofluorane, 3-pyrrolidino-6-methyl-7-anilinofluorane, 3,3-bis(1-ethyl- 2-methylindol-3-yl)phthalide, 3,3-bis(1-n-butyl-2-methylindol-3-yl)phthalide, 3,3-bis(p-dimethylaminophenyl)-6-dimethyl aminophthalide, 3-(4-diethylamino-2-ethoxyphenyl)-3-(1-ethyl-2-methylindol-3-yl)-4-zaphthalide, 3-(4-diethylaminophenyl)-3-( 1-ethyl-2-methylindol-3-yl)phthalide, and 3′,6′-bis(diphenylamino)spiroisobenzofuran-1(3H),9′-[9H]xanthen-3-one .

Dye N is preferably a dye whose maximum absorption wavelength is changed by radicals from the viewpoint of visibility of exposed and unexposed areas, pattern visibility after development, and resolution, and is a dye that develops color by radicals. It is more preferable to have
Preferred dyes N are leuco crystal violet, crystal violet lactone, brilliant green, or victoria pure blue-naphthalene sulfonate.

The pigment N may be used singly or in combination of two or more.
The content of the dye N is 0.1% by mass or more with respect to the total mass of the photosensitive composition layer, from the viewpoints of visibility of exposed and unexposed areas, pattern visibility after development, and resolution. is preferred, 0.1 to 10% by mass is more preferred, 0.1 to 5% by mass is even more preferred, and 0.1 to 1% by mass is particularly preferred.

The content of the dye N means the content of the dye when all the dyes N contained in the total weight of the photosensitive composition layer are in a colored state. A method for quantifying the content of dye N will be described below using a dye that develops color by radicals as an example.
A solution of 0.001 g and 0.01 g of dye in 100 mL of methyl ethyl ketone is prepared. A photoradical polymerization initiator Irgacure OXE01 (trade name, BASF Japan Co., Ltd.) is added to each of the solutions obtained, and radicals are generated by irradiating light with a wavelength of 365 nm to bring all the dyes into a colored state. After that, the absorbance of each solution having a liquid temperature of 25° C. is measured using a spectrophotometer (UV3100, manufactured by Shimadzu Corporation) in an air atmosphere to create a calibration curve.
Next, the absorbance of the solution in which all the dyes are developed is measured in the same manner as described above except that 3 g of the photosensitive composition layer is dissolved in methyl ethyl ketone instead of the dyes. From the absorbance of the obtained solution containing the photosensitive composition layer, the content of the dye contained in the photosensitive composition layer is calculated based on the calibration curve.
3 g of the photosensitive composition layer is the same as 3 g of the total solid content in the photosensitive composition.

(Thermal cross-linking agent)
The photosensitive composition layer may contain a thermal cross-linking agent.
Thermal cross-linking agents include methylol compounds and blocked isocyanate compounds. Among them, a blocked isocyanate compound is preferable from the viewpoint of the strength of the cured film obtained and the adhesiveness of the uncured film obtained.
Since the blocked isocyanate compound reacts with the hydroxy group and the carboxy group, for example, when the resin and/or the polymerizable compound has at least one of the hydroxy group and the carboxy group, the hydrophilicity of the formed film is lowered. , the function tends to be enhanced when a film obtained by curing a negative photosensitive composition layer is used as a protective film.
The blocked isocyanate compound refers to "a compound having a structure in which the isocyanate group of isocyanate is protected (so-called masked) with a blocking agent".

Although the dissociation temperature of the blocked isocyanate compound is not particularly limited, it is preferably 100 to 160°C, more preferably 130 to 150°C.
The dissociation temperature of the blocked isocyanate means "the temperature of the endothermic peak associated with the deprotection reaction of the blocked isocyanate measured by DSC (Differential Scanning Calorimetry) analysis using a differential scanning calorimeter".
As the differential scanning calorimeter, for example, a differential scanning calorimeter (model: DSC6200) manufactured by Seiko Instruments Inc. can be preferably used. However, the differential scanning calorimeter is not limited to this.

Blocking agents having a dissociation temperature of 100 to 160° C. include active methylene compounds [malonic acid diesters (dimethyl malonate, diethyl malonate, di-n-butyl malonate, di-2-ethylhexyl malonate, etc.)], oxime compounds ( Compounds having a structure represented by -C(=N-OH)- in the molecule such as formaldoxime, acetaldoxime, acetoxime, methylethylketoxime, and cyclohexanone oxime).
Among these, the blocking agent having a dissociation temperature of 100 to 160° C. is preferably at least one selected from oxime compounds from the viewpoint of storage stability.

The blocked isocyanate compound preferably has an isocyanurate structure from the viewpoints of, for example, improving the brittleness of the film and improving the adhesion to the transferred material.
A blocked isocyanate compound having an isocyanurate structure is obtained, for example, by isocyanurating hexamethylene diisocyanate and protecting it.
Among the blocked isocyanate compounds having an isocyanurate structure, a compound having an oxime structure using an oxime compound as a blocking agent tends to have a dissociation temperature within a preferred range and produces less development residue than compounds having no oxime structure. It is preferable because it is easy to

The blocked isocyanate compound may have a polymerizable group.
The polymerizable group is not particularly limited, and any known polymerizable group can be used, and a radically polymerizable group is preferred.
Polymerizable groups include ethylenically unsaturated groups such as (meth)acryloxy groups, (meth)acrylamide groups, and styryl groups, and groups having epoxy groups such as glycidyl groups.
Among them, the polymerizable group is preferably an ethylenically unsaturated group, more preferably a (meth)acryloxy group, and still more preferably an acryloxy group.

A commercial item can be used as a block isocyanate compound.
Examples of commercially available blocked isocyanate compounds include Karenz (registered trademark) AOI-BM, Karenz (registered trademark) MOI-BM, Karenz (registered trademark) MOI-BP, etc. (manufactured by Showa Denko KK), block-type Duranate series (eg, Duranate (registered trademark) TPA-B80E, Duranate (registered trademark) WT32-B75P, etc., manufactured by Asahi Kasei Chemicals).
Moreover, the compound of the following structure can also be used as a blocked isocyanate compound.

The thermal cross-linking agent may be used singly or in combination of two or more.
The content of the thermally crosslinkable compound in the photosensitive composition layer is preferably 1 to 50% by weight, more preferably 5 to 30% by weight, based on the total weight of the photosensitive composition layer.

(pigment)
The photosensitive composition layer may contain a pigment.
When the photosensitive composition layer contains a pigment, the photosensitive composition layer corresponds to the colored resin layer.
In order to protect the liquid crystal display window of electronic equipment in recent years, there are cases where a cover glass with a black frame-shaped light shielding layer formed on the periphery of the back surface of a transparent glass substrate or the like is attached in order to protect the liquid crystal display window. be. A colored resin layer may be used to form such a light shielding layer.
The pigment may be appropriately selected according to the desired hue. Examples thereof include black pigments, white pigments, and chromatic pigments other than black and white. As such, a black pigment is preferable.

Examples of black pigments include known black pigments (eg, organic pigments, inorganic pigments, etc.).
Among them, carbon black, titanium oxide, titanium carbide, iron oxide, titanium oxide or graphite are preferable as the black pigment, and carbon black is more preferable, from the viewpoint of optical density. From the viewpoint of surface resistance, the carbon black is preferably surface-modified carbon black having at least a portion of the surface coated with a resin.

The particle size (number average particle size) of the black pigment is preferably 0.001 to 0.1 μm, more preferably 0.01 to 0.08 μm, from the viewpoint of dispersion stability.
The term "particle size" means the diameter of a circle obtained by determining the area of a pigment particle from a photographic image of the pigment particle taken with an electron microscope and considering a circle having the same area as the area of the pigment particle. Further, the "number average particle size" means an average value obtained by determining the particle size of 100 arbitrary particles and averaging the obtained 100 particle sizes.

Examples of white pigments include inorganic pigments and white pigments described in paragraphs [0015] and [0114] of JP-A-2005-007765.
The inorganic pigment is preferably titanium oxide, zinc oxide, lithopone, light calcium carbonate, white carbon, aluminum oxide, aluminum hydroxide or barium sulfate, more preferably titanium oxide or zinc oxide, still more preferably titanium oxide, rutile type or Anatase-type titanium oxide is particularly preferred, and rutile-type titanium oxide is most preferred.
In addition, the surface of titanium oxide may be subjected to silica treatment, alumina treatment, titania treatment, zirconia treatment, organic substance treatment, or two or more of these treatments. Thereby, the catalytic activity of titanium oxide is suppressed, and the heat resistance and fade resistance can be improved.
From the viewpoint of reducing the thickness of the photosensitive composition layer after heating, the surface treatment of the titanium oxide surface is preferably at least one of alumina treatment and zirconia treatment, and both alumina treatment and zirconia treatment are performed. is more preferable.

When the photosensitive composition layer is a colored resin layer, the photosensitive composition layer preferably contains a chromatic pigment other than the black pigment and the white pigment from the viewpoint of transferability.
The particle size (number average particle size) of the chromatic pigment is preferably 0.1 μm or less, more preferably 0.08 μm or less, from the viewpoint of better dispersibility. The lower limit is preferably 10 nm or more.
Examples of chromatic pigments include Victoria Pure Blue BO (Color Index (hereinafter also referred to as “CI”) 42595), Auramine (CI 41000), Fat Black HB (CI .26150), Monolite Yellow GT (C.I. Pigment Yellow 12), Permanent Yellow GR (C.I. Pigment Yellow 17), Permanent Yellow HR (C.I. Pigment Yellow 83), Permanent Carmine FBB (C.I. Pigment Red 146), Hoster Balm Red ESB (C.I. Pigment Violet 19), Permanent Ruby FBH (C.I. Pigment Red 11), Fastel Pink B Splash (C.I. Pigment Red 81), Monastral Fast Blue (C.I. Pigment Blue 15), Monolite Fast Black B (C.I. Pigment Black 1) and Carbon, C.I. I. Pigment Red 97, C.I. I. Pigment Red 122, C.I. I. Pigment Red 149, C.I. I. Pigment Red 168, C.I. I. Pigment Red 177, C.I. I. Pigment Red 180, C.I. I. Pigment Red 192, C.I. I. Pigment Red 215, C.I. I. Pigment Green 7, C.I. I. Pigment Blue 15:1, C.I. I. Pigment Blue 15:4, C.I. I. Pigment Blue 22, C.I. I. Pigment Blue 60, C.I. I. Pigment Blue 64 and C.I. I. Pigment Violet 23, C.I. I. Pigment Red 177 is preferred.

One type of pigment may be used alone, or two or more types may be used.
The content of the pigment is preferably more than 3% by mass and 40% by mass or less, more preferably more than 3% by mass and 35% by mass or less, and more than 5% by mass and 35% by mass or less with respect to the total mass of the photosensitive composition layer. More preferably, 10 to 35% by mass is particularly preferable.

When the photosensitive composition layer contains pigments other than black pigments (e.g., white pigments, chromatic pigments, etc.), the content of pigments other than black pigments is 30% by mass or less with respect to the total mass of black pigments. is preferred, 1 to 20 mass % is more preferred, and 3 to 15 mass % is even more preferred.

When the photosensitive composition layer contains a black pigment, the black pigment (preferably carbon black) is preferably introduced into the photosensitive composition in the form of a pigment dispersion.
The dispersion liquid may be prepared by adding a mixture obtained by previously mixing a black pigment and a pigment dispersant to an organic solvent (or vehicle) and dispersing the mixture with a dispersing machine. A pigment dispersant may be selected according to the pigment and solvent, and for example, a commercially available dispersant can be used.
By "vehicle" is meant that portion of the medium in which the pigment is dispersed when made into a pigment dispersion. The vehicle is liquid and contains a binder component that holds the black pigment in a dispersed state and a solvent component (organic solvent) that dissolves and dilutes the binder component.

Examples of dispersers include known dispersers such as kneaders, roll mills, attritors, super mills, dissolvers, homomixers and sand mills.
Moreover, it may be finely pulverized using frictional force by mechanical grinding. Dispersers and fine pulverization are described, for example, in "Encyclopedia of Pigments" (Kunizo Asakura, 1st edition, Asakura Shoten, 2000, pp. 438, 310).

(Other additives)
The photosensitive composition layer may contain known additives, if necessary, in addition to the above components.
Additives include, for example, radical polymerization inhibitors, antioxidants (e.g., phenidone, etc.), rust inhibitors (e.g., benzotriazoles and carboxybenzotriazoles, etc.), sensitizers, surfactants, plasticizers, Heterocyclic compounds (eg triazole etc.), pyridines (eg isonicotinamide etc.) and purine bases (eg adenine etc.) can be mentioned.
Other additives include, for example, metal oxide particles, chain transfer agents, antioxidants, dispersants, acid multipliers, development accelerators, conductive fibers, ultraviolet absorbers, thickeners, cross-linking agents, organic Or inorganic suspending agents and paragraphs [0165] to [0184] of JP-A-2014-085643, the contents of which are incorporated herein.
Each additive may be used individually by 1 type, and may be used 2 or more types.

The photosensitive composition layer may contain a radical polymerization inhibitor.
Examples of radical polymerization inhibitors include thermal polymerization inhibitors described in paragraph [0018] of Japanese Patent No. 4502784. Among them, phenothiazine, phenoxazine and 4-methoxyphenol are preferred. Other radical polymerization inhibitors include naphthylamine, cuprous chloride, nitrosophenylhydroxyamine aluminum salt, and diphenylnitrosamine. In order not to impair the sensitivity of the photosensitive composition layer, it is preferred to use a nitrosophenylhydroxyamine aluminum salt as a radical polymerization inhibitor.
The content of the radical polymerization inhibitor is preferably 0.005 to 5.0% by mass, more preferably 0.01 to 3.0% by mass, and 0.01 to 1.0% by mass, based on the total mass of the polymerizable compound. 0% by mass is more preferred.

Examples of benzotriazoles include 1,2,3-benzotriazole, 1-chloro-1,2,3-benzotriazole, bis(N-2-ethylhexyl)aminomethylene-1,2,3-benzotriazole, bis(N-2-ethylhexyl)aminomethylene-1,2,3-tolyltriazole, bis(N-2-hydroxyethyl)aminomethylene-1,2,3-benzotriazole and the like.

Carboxybenzotriazoles include, for example, 4-carboxy-1,2,3-benzotriazole, 5-carboxy-1,2,3-benzotriazole, N-(N,N-di-2-ethylhexyl)aminomethylene Carboxybenzotriazole, N-(N,N-di-2-hydroxyethyl)aminomethylene carboxybenzotriazole, N-(N,N-di-2-ethylhexyl)aminoethylene carboxybenzotriazole and the like. As carboxybenzotriazoles, commercially available products such as CBT-1 (manufactured by Johoku Kagaku Kogyo Co., Ltd., trade name) can be used.

The total content of benzotriazoles and carboxybenzotriazoles is preferably 0.01 to 3% by mass, more preferably 0.05 to 1% by mass, based on the total mass of the photosensitive composition layer. When the content is 0.01% by mass or more, the storage stability of the photosensitive composition layer is more excellent. On the other hand, when the content is 3% by mass or less, the maintenance of sensitivity and suppression of decolorization of the dye are more excellent.

Examples of surfactants include those described in paragraph [0017] of Japanese Patent No. 4502784 and paragraphs [0060] to [0071] of JP-A-2009-237362.

As the surfactant, a nonionic surfactant, a fluorosurfactant or a silicone surfactant is preferred.
Examples of commercially available fluorosurfactants include MEGAFACE F-171, F-172, F-173, F-176, F-177, F-141, F-142, F-143, and F-144. , F-437, F-475, F-477, F-479, F-482, F-551-A, F-552, F-554, F-555-A, F-556, F-557, F -558, F-559, F-560, F-561, F-565, F-563, F-568, F-575, F-780, EXP.MFS-330, EXP. MFS-578, EXP. MFS-579, EXP. MFS-586, EXP. MFS-587, EXP. MFS-628, EXP. MFS-631, EXP. MFS-603, R-41, R-41-LM, R-01, R-40, R-40-LM, RS-43, TF-1956, RS-90, R-94, RS-72-K, DS-21 (manufactured by DIC Corporation), Florado FC430, FC431, FC171 (manufactured by Sumitomo 3M), Surflon S-382, SC-101, SC-103, SC-104, SC-105, SC-1068, SC-381, SC-383, S-393, KH-40 (manufactured by AGC), PolyFox PF636, PF656, PF6320, PF6520, PF7002 (manufactured by OMNOVA), Futergent 710FL , 710FM, 610FM, 601AD, 601ADH2, 602A, 215M, 245F, 251, 212M, 250, 209F, 222F, 208G, 710LA, 710FS, 730LM, 650AC, 681, 683 (manufactured by NEOS Co., Ltd.), U- 120E (Unichem Co., Ltd.) and the like.
In addition, as the fluorosurfactant, an acrylic compound that has a molecular structure with a functional group containing a fluorine atom and in which the portion of the functional group containing the fluorine atom is cleaved and the fluorine atom volatilizes when heat is applied. can also be suitably used. Examples of such fluorine-based surfactants include Megafac DS series manufactured by DIC Corporation (The Chemical Daily (February 22, 2016), Nikkei Sangyo Shimbun (February 23, 2016)), for example, Megafac and DS-21.
As the fluorosurfactant, it is also preferable to use a polymer of a fluorine atom-containing vinyl ether compound having a fluorinated alkyl group or a fluorinated alkylene ether group and a hydrophilic vinyl ether compound.
A block polymer can also be used as the fluorosurfactant.
Further, the fluorine-based surfactant has a structural unit derived from a (meth)acrylate compound having a fluorine atom and 2 or more (preferably 5 or more) alkyleneoxy groups (preferably ethyleneoxy groups and propyleneoxy groups). A fluorine-containing polymer compound containing a structural unit derived from a (meth)acrylate compound can also be preferably used.
As the fluorosurfactant, a fluoropolymer having an ethylenically unsaturated bond-containing group in a side chain can also be used. Megafac RS-101, RS-102, RS-718K, RS-72-K (manufactured by DIC Corporation) and the like.

As fluorine-based surfactants, from the viewpoint of improving environmental suitability, compounds having linear perfluoroalkyl groups having 7 or more carbon atoms, such as perfluorooctanoic acid (PFOA) and perfluorooctane sulfonic acid (PFOS), are used. Surfactants derived from alternative materials are preferred.
Nonionic surfactants include glycerol, trimethylolpropane, trimethylolethane and their ethoxylates and propoxylates (e.g., glycerol propoxylate, glycerol ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, Polyoxyethylene oleyl ether, polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester and the like. Specific examples include Pluronic (registered trademark) L10, L31, L61, L62, 10R5, 17R2, 25R2, HYDROPALAT WE 3323 (manufactured by BASF), Tetronic 304, 701, 704, 901, 904, 150R1 (manufactured by BASF). , manufactured by BASF), Solsperse 20000 (manufactured by Nippon Lubrizol Co., Ltd.), NCW-101, NCW-1001, NCW-1002 (manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.), Pionin D-1105, D-6112, D-6112-W, D-6315 (manufactured by Takemoto Oil & Fat Co., Ltd.), Olfine E1010, Surfynol 104, 400, 440 (manufactured by Nissin Chemical Industry Co., Ltd.) and the like. .

Examples of silicone-based surfactants include linear polymers composed of siloxane bonds, and modified siloxane polymers in which organic groups are introduced into side chains or terminals.

Specific examples of silicone surfactants include EXP. S-309-2, EXP. S-315, EXP. S-503-2, EXP. S-505-2 (manufactured by DIC Corporation), DOWSIL 8032 ADDITIVE, Toray Silicone DC3PA, Toray Silicone SH7PA, Toray Silicone DC11PA, Toray Silicone SH21PA, Toray Silicone SH28PA, Toray Silicone SH29PA, Toray Silicone SH30PA, Toray Silicone SH8400 ( Above, Dow Corning Toray Co., Ltd.) and X-22-4952, X-22-4272, X-22-6266, KF-351A, K354L, KF-355A, KF-945, KF-640, KF -642, KF-643, X-22-6191, X-22-4515, KF-6004, KP-341, KF-6001, KF-6002, KP-101 KP-103, KP-104, KP-105, KP -106, KP-109, KP-109, KP-112, KP-120, KP-121, KP-124, KP-125, KP-301, KP-306, KP-310, KP-322, KP-323 , KP-327, KP-341, KP-368, KP-369, KP-611, KP-620, KP-621, KP-626, KP-652 (manufactured by Shin-Etsu Silicone Co., Ltd.), F-4440, TSF-4300, TSF-4445, TSF-4460, TSF-4452 (manufactured by Momentive Performance Materials), BYK300, BYK306, BYK307, BYK310, BYK320, BYK323, BYK325, BYK330, BYK313, BYK315N, BYK33 BYK333, BYK345, BYK347, BYK348, BYK349, BYK370, BYK377, BYK378, BYK323 (manufactured by BYK-Chemie) and the like.

One type of surfactant may be used alone, or two or more types may be used.
When the photosensitive composition layer contains a surfactant, the content of the surfactant is preferably 0.01 to 3.0% by mass, more preferably 0.01 to 1.0% by mass, based on the total mass of the photosensitive composition layer. 0% by mass is more preferable, and 0.05 to 0.80% by mass is even more preferable.

The content of water in the photosensitive composition layer is preferably 0.01 to 1.0% by mass, preferably 0.05 to 0.5% by mass is more preferred.

(impurities, etc.)
The photosensitive composition layer may contain impurities.
Impurities include, for example, metal impurities or their ions, halide ions, residual organic solvents, and residual monomers.

Metal impurities include, for example, sodium, potassium, magnesium, calcium, iron, manganese, copper, aluminum, titanium, chromium, cobalt, nickel, zinc, tin and ions thereof, and halide ions.
Among them, sodium ions, potassium ions and halide ions are preferably contained in the following amounts because they are easily mixed.
Metal impurities are compounds different from the particles (eg, metal oxide particles) that may be included in the transfer film.

The content of metal impurities is preferably 80 ppm by mass or less, more preferably 10 ppm by mass or less, and even more preferably 2 ppm by mass or less, relative to the total mass of the photosensitive composition layer. The lower limit is preferably 1 mass ppb or more, more preferably 0.1 mass ppm or more.

Methods for adjusting the content of impurities include, for example, a method of selecting a material with a low impurity content as a raw material for the photosensitive composition layer, a method of preventing contamination of impurities during the formation of the photosensitive composition layer, and A method of removing by washing can be mentioned.
The content of impurities can be quantified by known methods such as ICP emission spectroscopy, atomic absorption spectroscopy and ion chromatography.

Residual organic solvents include, for example, benzene, formaldehyde, trichlorethylene, 1,3-butadiene, carbon tetrachloride, chloroform, N,N-dimethylformamide, N,N-dimethylacetamide and hexane.
The content of the residual organic solvent is preferably 100 ppm by mass or less, more preferably 20 ppm by mass or less, and even more preferably 4 ppm by mass or less, relative to the total mass of the photosensitive composition layer. The lower limit is preferably 10 mass ppb or more, more preferably 100 mass ppb or more, relative to the total mass of the photosensitive composition layer.
As a method for adjusting the content of the residual organic solvent, there is a method for adjusting the drying treatment conditions in the transfer film manufacturing method described below. Also, the content of the residual organic solvent can be quantified by a known method such as gas chromatography analysis.

The content of water in the photosensitive composition layer is preferably 0.01 to 1.0% by mass, preferably 0.05 to 0.5% by mass is more preferred.

[Middle layer]
The transfer film preferably has an intermediate layer between the temporary support and the photosensitive composition layer.
Examples of the intermediate layer include a water-soluble resin layer and an oxygen barrier layer having an oxygen barrier function described as a "separation layer" in JP-A-5-072724.
As the intermediate layer, an oxygen-blocking layer is preferable from the viewpoint that the sensitivity at the time of exposure is improved, the time load of the exposure machine is reduced, and the productivity is improved. More preferred is an oxygen barrier layer dispersed or dissolved in a 1% by weight aqueous solution of sodium carbonate.
Each component that can be included in the water-soluble resin layer (intermediate layer) is described below.

The water-soluble resin layer (intermediate layer) contains a resin.
It is preferable that the resin contains a water-soluble resin as part or all of it.
Examples of resins that can be used as water-soluble resins include polyvinyl alcohol-based resins, polyvinylpyrrolidone-based resins, cellulose-based resins, acrylamide-based resins, polyethylene oxide-based resins, gelatin, vinyl ether-based resins, polyamide resins, and copolymers thereof. Examples include resins such as coalescence.
A (meth)acrylic acid/vinyl compound copolymer or the like can also be used as the water-soluble resin. As the (meth)acrylic acid/vinyl compound copolymer, a (meth)acrylic acid/allyl (meth)acrylate copolymer is preferable, and a methacrylic acid/allyl methacrylate copolymer is more preferable.
When the water-soluble resin is a (meth)acrylic acid/vinyl compound copolymer, the composition ratio (mol%) is preferably 90/10 to 20/80, and preferably 80/20 to 30/70. more preferred.

The lower limit of the weight average molecular weight of the water-soluble resin is preferably 5,000 or more, more preferably 7,000 or more, and even more preferably 10,000 or more. Moreover, the upper limit thereof is preferably 200,000 or less, more preferably 100,000 or less, and even more preferably 50,000 or less.
The dispersity (Mw/Mn) of the water-soluble resin is preferably 1-10, more preferably 1-5.

One type of water-soluble resin may be used alone, or two or more types may be used.
Although the content of the water-soluble resin is not particularly limited, it is preferably 50% by mass or more with respect to the total mass of the water-soluble resin layer (intermediate layer) in order to further improve the oxygen barrier property and the ability to suppress interlayer mixing. , more preferably 70% by mass or more, still more preferably 80% by mass or more, and particularly preferably 90% by mass or more. Although the upper limit is not particularly limited, for example, 99.9% by mass or less is preferable, and 99.8% by mass or less is more preferable.

The intermediate layer may contain other components in addition to the above water-soluble resin.
As other components, polyhydric alcohols, alkylene oxide adducts of polyhydric alcohols, phenol derivatives or amide compounds are preferred, and polyhydric alcohols, phenol derivatives or amide compounds are more preferred.
In addition, other components include, for example, known surfactants.

Polyhydric alcohols include, for example, glycerin, diglycerin and diethylene glycol.
The number of hydroxy groups possessed by the polyhydric alcohol is preferably 2-10.
Examples of alkylene oxide adducts of polyhydric alcohols include compounds obtained by adding ethyleneoxy groups, propyleneoxy groups, and the like to the above polyhydric alcohols.
The average number of alkyleneoxy groups added is preferably 1-100, more preferably 2-50, and even more preferably 2-20.
Phenol derivatives include, for example, bisphenol A and bisphenol S.
Amide compounds include, for example, N-methylpyrrolidone.

The intermediate layer preferably contains at least one selected from the group consisting of water-soluble cellulose derivatives, polyhydric alcohols, oxide adducts of polyhydric alcohols, polyether resins, phenol derivatives and amide compounds.

The molecular weight of other components is preferably less than 5,000, more preferably 4,000 or less, still more preferably 3,000 or less, particularly preferably 2,000 or less, and most preferably 1,500 or less. The lower limit is preferably 60 or more.

Other components may be used singly or in combination of two or more.
The content of other components is preferably 0.1% by mass or more, more preferably 0.5% by mass or more, and even more preferably 1% by mass or more, relative to the total mass of the intermediate layer. The upper limit is preferably less than 30% by mass, more preferably 10% by mass or less, and even more preferably 5% by mass or less.

The intermediate layer may contain impurities.
Impurities include, for example, impurities contained in the photosensitive composition layer.

The layer thickness of the water-soluble resin layer (intermediate layer) is not particularly limited, but is preferably 0.1 to 5 μm, more preferably 0.5 to 3 μm. When the thickness of the water-soluble resin layer (intermediate layer) is within the above range, the inter-layer mixing suppression ability is excellent without lowering the oxygen barrier properties. Furthermore, it is possible to suppress the increase in the time required for removing the water-soluble resin layer (intermediate layer) during development.

[Protective film]
The transfer film may have a protective film on the photosensitive composition layer.
As the protective film, a resin film having heat resistance and solvent resistance can be used. Examples thereof include polyolefin films such as polypropylene films and polyethylene films, polyester films such as polyethylene terephthalate films, polycarbonate films, and polystyrene films. be done.
Also, as the protective film, a resin film made of the same material as the temporary support may be used.
Among them, the protective film is preferably a polyolefin film, more preferably a polypropylene film or a polyethylene film, and still more preferably a polyethylene film.

The thickness of the protective film is preferably 1 to 100 μm, more preferably 5 to 50 μm, even more preferably 5 to 40 μm, particularly preferably 15 to 30 μm.
The thickness of the protective film is preferably 1 μm or more from the viewpoint of excellent mechanical strength, and preferably 100 μm or less from the viewpoint of being relatively inexpensive.

In the protective film, the number of fisheyes with a diameter of 80 μm or more contained in the protective film is preferably 5/m ² or less.
In addition, "fish eye" refers to foreign matter, undissolved matter, and oxidative degradation products of the material when producing a film by methods such as heat melting, kneading, extrusion, biaxial stretching, and casting. is captured in the film.

The number of particles with a diameter of 3 μm or more contained in the protective film is preferably 30 particles/mm ² or less, more preferably 10 particles/mm ² or less, and even more preferably 5 particles/mm ² or less.
This makes it possible to suppress defects caused by the unevenness caused by the particles contained in the protective film being transferred to the photosensitive composition layer or the metal layer.

From the viewpoint of imparting windability, the surface of the protective film opposite to the surface in contact with the photosensitive composition layer preferably has an arithmetic mean roughness Ra of 0.01 μm or more, more preferably 0.02 μm or more, and 0 More preferably 0.03 μm or more. On the other hand, it is preferably less than 0.50 µm, more preferably 0.40 µm or less, and even more preferably 0.30 µm or less.
From the viewpoint of suppressing defects during transfer, the surface roughness Ra of the surface in contact with the photosensitive composition layer of the protective film is preferably 0.01 μm or more, more preferably 0.02 μm or more, and still more preferably 0.03 μm or more. On the other hand, it is preferably less than 0.50 µm, more preferably 0.40 µm or less, and even more preferably 0.30 µm or less.

[Manufacturing method of transfer film]
The method for producing the transfer film is not particularly limited, and includes known methods.
As a method for producing the transfer film 10, for example, a process of applying an intermediate layer forming composition to the surface of the temporary support 11 to form a coating film, and further drying the coating film to form the intermediate layer 13. and a step of applying a photosensitive composition to the surface of the intermediate layer 13 to form a coating film, and further drying the coating film to form the photosensitive composition layer 15 .

When the transfer film 10 has the protective film 19, the protective film 19 may be pressure-bonded onto the composition layer 17 of the transfer film 10 manufactured by the manufacturing method described above.
The method for producing the transfer film 10 includes a step of providing a protective film 19 so as to be in contact with the surface of the composition layer 17 opposite to the temporary support 11 side, whereby the temporary support 11, the intermediate layer 13, the photosensitive Preferably, the transfer film 10 is manufactured with a protective composition layer 15 and a protective film 19 .
After manufacturing the transfer film 10 by the manufacturing method described above, the transfer film 10 may be wound up to produce and store a roll-shaped transfer film. The roll-shaped transfer film 10 can be provided as it is to the laminating step with a substrate in a roll-to-roll method, which will be described later.

Further, the method of manufacturing the transfer film 10 may be a method of forming the composition layer 17 on the protective film 19 .

(Water-soluble resin composition and method for forming intermediate layer (water-soluble resin layer))
The water-soluble resin composition preferably contains various components and a solvent that form the above-described intermediate layer (water-soluble resin layer). In the water-soluble resin composition, the preferred range of the content of each component with respect to the total solid content of the composition is the same as the preferred range of the content of each component with respect to the total mass of the water-soluble resin layer described above.
The solvent is not particularly limited as long as it can dissolve or disperse the water-soluble resin, preferably at least one selected from the group consisting of water and water-miscible organic solvents, water or water and water-miscible organic solvents A mixed solvent with a solvent is more preferable.
Examples of water-miscible organic solvents include alcohols having 1 to 3 carbon atoms, acetone, ethylene glycol, and glycerin, with alcohols having 1 to 3 carbon atoms being preferred, and methanol or ethanol being more preferred.
A solvent may be used individually by 1 type, and may be used 2 or more types.
The content of the solvent is preferably 50 to 2,500 parts by mass, more preferably 50 to 1,900 parts by mass, even more preferably 100 to 900 parts by mass, based on 100 parts by mass of the total solid content of the composition.

The method for forming the water-soluble resin layer is not particularly limited as long as it is a method capable of forming a layer containing the above components. For example, known coating methods (slit coating, spin coating, curtain coating, inkjet coating, etc.) mentioned.

(Method for forming photosensitive composition and photosensitive composition layer)
In terms of excellent productivity, components constituting the photosensitive composition layer described above (e.g., resin A, a polymerizable compound, a polymerization initiator, a sensitizer, etc.), and a photosensitive composition containing a solvent It is desirable to use and form by a coating method.
Specifically, the transfer film is produced by coating a photosensitive composition on the intermediate layer to form a coating film, and drying the coating film at a predetermined temperature to form a photosensitive composition layer. A method of forming is preferred.

The photosensitive composition preferably contains various components and a solvent that form the photosensitive composition layer described above. In the photosensitive composition, the preferred range of the content of each component with respect to the total solid content of the composition is the same as the preferred range of the content of each component with respect to the total mass of the photosensitive composition layer described above.
The solvent is not particularly limited as long as it can dissolve or disperse each component other than the solvent, and known solvents can be used. Specifically, for example, alkylene glycol ether solvents, alkylene glycol ether acetate solvents, alcohol solvents (methanol, ethanol, etc.), ketone solvents (acetone, methyl ethyl ketone, etc.), aromatic hydrocarbon solvents (toluene, etc.), aprotic polar Solvents (N,N-dimethylformamide, etc.), cyclic ether solvents (tetrahydrofuran, etc.), ester solvents (n-propyl acetate, etc.), amide solvents, lactone solvents, and mixed solvents containing two or more of these can be mentioned.

The solvent preferably contains at least one selected from the group consisting of alkylene glycol ether solvents and alkylene glycol ether acetate solvents. Among them, a mixed solvent containing at least one selected from the group consisting of alkylene glycol ether solvents and alkylene glycol ether acetate solvents and at least one selected from the group consisting of ketone solvents and cyclic ether solvents is more preferable. A mixed solvent containing at least three of an alkylene glycol ether, an alkylene glycol ether acetate solvent, and a ketone solvent is more preferable.

Examples of alkylene glycol ether solvents include ethylene glycol monoalkyl ether, ethylene glycol dialkyl ether, propylene glycol monoalkyl ether (propylene glycol monomethyl ether acetate, etc.), propylene glycol dialkyl ether, diethylene glycol dialkyl ether, dipropylene glycol monoalkyl ether, and dipropylene glycol dialkyl ethers.
Alkylene glycol ether acetate solvents include, for example, ethylene glycol monoalkyl ether acetate, propylene glycol monoalkyl ether acetate, diethylene glycol monoalkyl ether acetate, and dipropylene glycol monoalkyl ether acetate.
Ketone solvents include acetone, methyl ethyl ketone, methyl isobutyl ketone, 2-heptanone, and cyclohexanone.
As the solvent, the solvent described in paragraphs [0092] to [0094] of WO 2018/179640, and the solvent described in paragraph [0014] of JP-A-2018-177889 may be used. the contents of which are incorporated herein.
A solvent may be used individually by 1 type, and may be used 2 or more types.
The content of the solvent is preferably 50 to 1,900 parts by mass, more preferably 100 to 1,200 parts by mass, even more preferably 100 to 900 parts by mass, based on 100 parts by mass of the total solid content of the composition.

Examples of the method of applying the photosensitive composition include printing, spraying, roll coating, bar coating, curtain coating, spin coating, and die coating (that is, slit coating).

Heat drying and reduced pressure drying are preferable as a method for drying the coating film of the photosensitive composition.
The drying temperature is preferably 90° C. or higher, more preferably 100° C. or higher, and even more preferably 110° C. or higher. Although the upper limit is not particularly limited, it is preferably 130° C. or lower, more preferably 120° C. or lower.
Moreover, the drying time is preferably 20 seconds or longer, more preferably 40 seconds or longer, and even more preferably 60 seconds or longer. Although the upper limit is not particularly limited, it is preferably 450 seconds or less, more preferably 300 seconds or less. The drying temperature is preferably 80° C. or higher, more preferably 90° C. or higher. Further, the upper limit thereof is preferably 130° C. or lower, more preferably 120° C. or lower. Drying can also be performed by changing the temperature continuously.
Moreover, the drying time is preferably 20 seconds or longer, more preferably 40 seconds or longer, and even more preferably 60 seconds or longer. Although the upper limit is not particularly limited, it is preferably 600 seconds or less, more preferably 300 seconds or less.

Furthermore, a transfer film can be produced by laminating a protective film to the photosensitive composition layer.
A method for laminating the protective film to the photosensitive composition layer is not particularly limited, and includes known methods.
Apparatuses for bonding the protective film to the photosensitive composition layer include known laminators such as a vacuum laminator and an autocut laminator.
Preferably, the laminator is equipped with any heatable roller, such as a rubber roller, and can be applied with pressure and heat.

<Method for producing a laminate having a conductor pattern>
Although the method for producing a laminate having a conductor pattern using the transfer film of the present invention is not particularly limited,
A bonding step of bonding the transfer film and the substrate such that the surface of the transfer film on the side opposite to the temporary support side is in contact with the metal layer of the substrate having the metal layer on the surface;
An exposure step of pattern-exposing the photosensitive composition layer;
A developing step of developing the exposed photosensitive composition layer to form a resist pattern;
one of an etching step of performing an etching process and a plating process of performing a plating process on the metal layer in the area where the resist pattern is not arranged;
A stripping step of stripping the resist pattern;
Furthermore, when a plating process is included, a removal step of removing the metal layer exposed by the peeling step and forming a conductor pattern on the substrate, in this order;
It is preferable to further include a temporary support peeling step for peeling the temporary support between the bonding step and the exposure step, or between the exposure step and the developing step.
Each step will be described in detail below.

[Lamination process]
The bonding step is a step of bonding the transfer film and the substrate such that the surface of the transfer film opposite to the temporary support side is in contact with the metal layer of the substrate having the metal layer on the surface.
By carrying out this step, it is possible to obtain a substrate with a photosensitive composition layer having a substrate, a metal layer, a photosensitive composition layer, and a temporary support in this order.
In addition, when a transfer film is the structure which has a protective film, after peeling off a protective film, the bonding process is implemented.

The configuration of the transfer film is as described above.

A substrate having a metal layer on its surface (a substrate with a metal layer) has a substrate and a metal layer disposed on the surface of the substrate.
Examples of substrates include resin substrates, glass substrates, ceramic substrates, and semiconductor substrates, and substrates described in paragraph [0140] of WO2018/155193 are preferable.
As a material for the resin substrate, polyethylene terephthalate, cycloolefin polymer, or polyimide is preferable.
The thickness of the resin substrate is preferably 5-200 μm, more preferably 10-100 μm.

The metal layer is a layer containing metal, and the metal is not particularly limited, and known metals can be used. Preferably, the metal layer is a conductive layer.
Main components of the metal layer (so-called main metals) include, for example, copper, chromium, lead, nickel, gold, silver, tin and zinc. In addition, a "main component" means the metal with the largest content among the metals contained in a metal layer.

The method for forming the metal layer is not particularly limited, and examples thereof include known methods such as a method of applying a dispersion liquid in which fine metal particles are dispersed and sintering the coating film, a sputtering method, a vapor deposition method, and the like.

The thickness of the metal layer is not particularly limited, and is preferably 50 nm or more, more preferably 100 nm or more. The upper limit is preferably 2 μm or less.

One or more metal layers may be disposed on the substrate.
When two or more metal layers are arranged, the two or more metal layers may be the same or different, and are preferably made of different materials.

In the lamination, the photosensitive composition layer side of the transfer film (the surface opposite to the temporary support side) is preferably brought into contact with the metal layer on the substrate and pressure-bonded.
The method of pressure bonding is not particularly limited, and known transfer methods and lamination methods can be used. Among them, it is preferable to stack the surface of the photosensitive composition layer on the substrate having the metal layer, and pressurize and heat with a roll or the like.
A known laminator such as a vacuum laminator and an autocut laminator can be used for bonding.
Although the lamination temperature is not particularly limited, it is preferably 70 to 130° C., for example.

[Exposure process]
The exposure step is a step of patternwise exposing the photosensitive composition layer.
"Pattern exposure" is a form of exposure in a pattern, and means an exposure form in which an exposed portion and an unexposed portion are present.
The positional relationship between the exposed portion (exposed area) and the unexposed portion (unexposed area) in the pattern exposure can be appropriately adjusted. Exposure is preferably performed from the photosensitive composition layer side.

The exposure method in the exposure step includes, for example, mask exposure, direct imaging exposure and projection exposure, preferably mask exposure or projection exposure.
In other words, the exposure step is preferably a step of performing pattern exposure through a photomask.
The exposure step is also preferably a step of patternwise exposing the photosensitive composition layer through a lens using an actinic ray onto which an image of a photomask is projected.

When the temporary support peeling step described later is performed between the bonding step and the exposure step, the exposure step includes contacting the surface exposed by peeling the temporary support with a photomask, and performing pattern exposure. A process is preferred. In other words, the exposure step of exposing the photosensitive composition layer in a pattern by bringing the exposed surface exposed by peeling the temporary support of the laminated body from which the temporary support is peeled off into contact with a photomask is preferred. When the transfer film has a three-layer structure of a temporary support, an intermediate layer, and a photosensitive composition layer, the exposed surface corresponds to the surface of the intermediate layer.
By adopting such an exposure process, a finer resist pattern can be obtained, and finally a finer conductor pattern can be obtained.
Such an exposure step is preferably employed particularly when a temporary support peeling step, which will be described later, is performed between the bonding step and the exposure step.
In the case where the temporary support peeling step described later is performed between the exposure step and the development step, the side having the transfer film substrate in the laminate of the substrate and the transfer film obtained by the bonding step is used as the exposure step. It is preferable to perform an exposure step in which the surface on the opposite side is brought into contact with a photomask for pattern exposure.

In the exposure step of pattern exposure, a curing reaction of the components contained in the photosensitive composition layer can occur in the exposed regions of the photosensitive composition layer (regions corresponding to the openings of the photomask). A development step is performed after the exposure to remove the non-exposed areas of the photosensitive composition layer to form a pattern.

It is also preferable that the method of the present invention has a photomask stripping step of stripping the photomask used in the exposure step between the exposure step and the development step.
The photomask peeling process includes, for example, a known peeling process.

The light source for pattern exposure can be appropriately selected and used as long as it can irradiate at least light in a wavelength range capable of curing the photosensitive composition layer (for example, 365 nm or 405 nm). Among others, the dominant wavelength of the exposure light for pattern exposure is preferably 365 nm. Note that the dominant wavelength is the wavelength with the highest intensity.

Examples of light sources include various lasers, light emitting diodes (LEDs), ultrahigh pressure mercury lamps, high pressure mercury lamps, and metal halide lamps.
The exposure dose is preferably 5-200 mJ/cm ² , more preferably 10-200 mJ/cm ² .

Preferred embodiments of the light source, exposure dose and exposure method used for exposure are described in, for example, paragraphs [0146] to [0147] of WO 2018/155193, the contents of which are incorporated herein. .

[Temporary support peeling step]
A temporary support peeling step is performed between the bonding step and the exposure step, or between the exposure step and the developing step.
Among them, it is preferable to have a peeling step between the bonding step and the exposure step.
A peeling process is a process of peeling a temporary support body from the laminated body of a transfer film and a board|substrate with a metal layer.
Examples of the peeling method of the temporary support include known peeling methods. Specifically, there is a cover film peeling mechanism described in paragraphs [0161] to [0162] of JP-A-2010-072589.

[Development process]
The development step is a step of developing the exposed photosensitive composition layer to form a resist pattern.
Development of the photosensitive composition layer can be performed using a developer.
As a developer, an alkaline aqueous solution is preferred. Alkaline compounds that can be contained in the alkaline aqueous solution include, for example, sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate, sodium hydrogen carbonate, potassium hydrogen carbonate, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, and choline (2-hydroxyethyltrimethylammonium hydroxide).

The liquid temperature of the developer during development is preferably 10 to 50.degree. C., more preferably 15 to 40.degree. C., even more preferably 20 to 35.degree.
The pH of the developer during development is preferably 9 or higher, more preferably 10 or higher, and even more preferably 11 or higher. The upper limit is preferably 14 or less, more preferably less than 13. pH can be measured by a method based on JIS Z8802-1984 using a known pH meter. The pH measurement temperature is 25°C.

The content of water in the developer is preferably 50% by mass or more and less than 100% by mass, more preferably 90% by mass or more and less than 100% by mass, relative to the total mass of the developer.
The content of the alkaline compound in the developer is preferably 0.01 to 20% by mass, more preferably 0.1 to 10% by mass, based on the total mass of the developer.

Examples of the development method include methods such as puddle development, shower development, spin development, and dip development.

Examples of the developer suitably used in the present specification include the developer described in paragraph [0194] of International Publication No. 2015/093271. Examples include the development method described in paragraph [0195] of 2015/093271.

After development, it is also preferable to perform a rinse treatment for removing the developer remaining on the substrate with the metal layer before proceeding to the next step. Water or the like can be used for the rinse treatment.
After the development and/or rinsing treatment, a drying treatment for removing excess liquid from the substrate with the metal layer may be performed.

The position and size of the resist pattern formed on the metal layer-coated substrate are not particularly limited, but fine lines are preferred.
Specifically, the line width of the resist pattern is preferably 20 μm or less, more preferably 15 μm or less, still more preferably 10 μm or less, and particularly preferably 5 μm or less. The lower limit is often 1.0 μm or more.

[Post-exposure process and post-bake process]
The method of the present invention may include a step of exposing (post-exposure step) and/or heating (post-baking step) the resist pattern obtained by the developing step.
When both a post-exposure step and a post-bake step are included, post-baking is preferably performed after post-exposure. The exposure amount of post-exposure is preferably 100 to 5000 mJ/cm ² , more preferably 200 to 3000 mJ/cm ² . The post-baking temperature is preferably 80 to 250°C, more preferably 90 to 160°C. The post-baking time is preferably 1 to 180 minutes, more preferably 10 to 60 minutes.

[Etching process]
The method for manufacturing a laminate having the conductor pattern includes an etching process or a plating process described later.
When the etching process is performed, the metal layer is removed at the openings of the resist pattern, and the metal layer has the same pattern shape as the resist pattern. Thus, the etching step yields a laminate having a conductor pattern.
As the etching method, known methods can be applied, for example, the method described in paragraphs [0209] to [0210] of JP-A-2017-120435, paragraphs [0048] to JP-A-2010-152155. [0054], etc., a wet etching method in which the substrate is immersed in an etchant, and a dry etching method such as plasma etching.

As the etchant used for wet etching, an acidic or alkaline etchant may be appropriately selected according to the object to be etched.
Examples of acidic etching solutions include aqueous solutions of acidic components alone selected from hydrochloric acid, sulfuric acid, nitric acid, acetic acid, hydrofluoric acid, oxalic acid and phosphoric acid, and acidic components, ferric chloride, ammonium fluoride and A mixed aqueous solution with a salt selected from potassium permanganate can be mentioned. The acidic component may be a combination of multiple acidic components.
Alkaline etchants include aqueous solutions of alkali components alone selected from sodium hydroxide, potassium hydroxide, ammonia, organic amines, and salts of organic amines (tetramethylammonium hydroxide, etc.), and alkali components and salts. (potassium permanganate, etc.). The alkaline component may be a component obtained by combining a plurality of alkaline components.
The etchant preferably does not dissolve the resist pattern.
The developer used in the development step may also serve as the etchant used in the etching process. In this case, the development process and the etching process may be performed simultaneously.

After the etching treatment, it is also preferable to perform a rinsing treatment to remove the etchant remaining on the substrate with the metal layer before proceeding to the next step. Water or the like can be used for the rinse treatment.
After the etching process and/or the rinsing process, a drying process for removing excess liquid from the substrate with the metal layer may be performed.

[Plating process]
The plating process is a process of plating a metal layer in a region where the resist pattern is not arranged.
By carrying out this step, a plating layer is formed on the metal layer in the region where the resist pattern is not arranged.

Examples of plating methods include electroplating and electroless plating, with electroplating being preferred from the standpoint of productivity.
When the plating step is carried out, a plating layer having a pattern shape similar to that of the area where the resist pattern is not arranged (opening of the resist pattern) is obtained on the substrate with the metal layer.

Examples of the metal contained in the plating layer include known metals.
Specific examples include metals such as copper, chromium, lead, nickel, gold, silver, tin, and zinc, and alloys of these metals.
Above all, the plated layer preferably contains copper or an alloy thereof from the viewpoint of better conductivity of the conductor pattern. In addition, the plating layer preferably contains copper as a main component in order to improve the conductivity of the conductor pattern.

The thickness of the plating layer is preferably 0.1 μm or more, more preferably 1 μm or more. The upper limit is preferably 20 μm or less.

[Protective layer forming step]
It is also preferable to have a protective layer forming step between the plating treatment step and the peeling step described below.
The protective layer laminating step is a step of forming a protective layer on the plating layer.
As a material for the protective layer, a material having resistance to a stripping solution and/or an etching solution in the stripping process and/or the removing process is preferable. Examples thereof include metals such as nickel, chromium, tin, zinc, magnesium, gold and silver, alloys thereof and resins, with nickel or chromium being preferred.

Examples of the method for forming the protective layer include electroless plating and electroplating, with electroplating being preferred.

The thickness of the protective layer is preferably 0.3 μm or more, more preferably 0.5 μm or more. The upper limit is preferably 3.0 μm or less, more preferably 2.0 μm or less.

[Peeling process]
The stripping step is a step of stripping the resist pattern.
A method for stripping the remaining resist pattern is not particularly limited, but a method of removing by chemical treatment can be mentioned, and a method of removing using a stripping solution is preferable.
Moreover, you may remove by well-known methods, such as a spray method, a shower method, and a paddle method, using a remover.

Examples of stripping solutions include stripping solutions obtained by dissolving an inorganic alkaline component or an organic alkaline component in water, dimethylsulfoxide, N-methylpyrrolidone, or a mixed solution thereof. Examples of inorganic alkaline components include sodium hydroxide and potassium hydroxide. Organic alkali components include primary amine compounds, secondary amine compounds, tertiary amine compounds and quaternary ammonium salt compounds. Tetramethylammonium hydroxide or an alkanolamine compound is preferable as the alkaline organic compound. It is also preferable that the stripping solution does not dissolve the metal layer.

As a method for stripping the resist pattern, a substrate having a remaining resist pattern is immersed in a stripping solution being stirred at a liquid temperature of preferably 30 to 80° C., more preferably 50 to 80° C., for 1 to 30 minutes. is mentioned.

The pH of the stripping solution during the stripping treatment is preferably 11 or higher, more preferably 12 or higher, and even more preferably 13 or higher. The upper limit is preferably 14 or less, more preferably 13.8 or less. pH can be measured by a method based on JIS Z8802-1984 using a known pH meter. The pH measurement temperature is 25°C.
It is preferable that the liquid temperature of the stripping solution during the stripping process is higher than the liquid temperature of the developer during the development process. Specifically, the value obtained by subtracting the liquid temperature of the developer from the liquid temperature of the stripper (liquid temperature of the stripper - liquid temperature of the developer) is preferably 10°C or higher, and more preferably 20°C or higher. preferable. The upper limit is preferably 100°C or lower, more preferably 80°C or lower.
It is preferable that the pH of the stripping solution for the stripping treatment is higher than the pH of the developer for the development treatment. Specifically, the value obtained by subtracting the pH of the developer from the pH of the stripper (pH of the stripper - pH of the developer) is preferably 1 or more, more preferably 1.5 or more. The upper limit is preferably 5 or less, more preferably 4 or less.

After stripping the resist pattern with the stripping solution, it is also preferable to perform a rinse treatment for removing the stripping solution remaining on the substrate. Water or the like can be used for the rinse treatment.
After stripping and/or rinsing the resist pattern with a stripping solution, a drying process for removing excess liquid from the substrate may be performed.

[Removal step]
The removing step is a step of removing the metal layer exposed by the peeling step and forming a conductor pattern on the substrate.
In the removing step, the plating layer formed by the plating step is used as an etching resist to etch the metal layer located in the non-pattern forming region (in other words, the region not protected by the plating layer).

Although the method for removing part of the metal layer is not particularly limited, it is preferable to use a known etchant.
Examples of known etching solutions include ferric chloride solution, cupric chloride solution, ammonia alkali solution, sulfuric acid-hydrogen peroxide mixed solution, and phosphoric acid-hydrogen peroxide mixed solution. .

When the removing step is performed, the metal layer exposed on the surface of the substrate is removed, and the plated layer (conductor pattern) having a pattern shape remains to obtain a laminate having the conductor pattern.

The upper limit of the line width of the formed conductor pattern is preferably 8 μm or less, more preferably 6 μm or less. Although the lower limit is not particularly limited, it is often 1 μm or more.

[Other processes]
A method for manufacturing a laminate having a conductor pattern may include arbitrary steps (other steps) other than the steps described above.
For example, the step of reducing the visible light reflectance described in paragraph [0172] of WO2019/022089, a new metal layer on the insulating film described in paragraph [0172] of WO2019/022089 Examples include a forming step and the like, but are not limited to these steps.

- Step of reducing visible light reflectance -
The method for producing a laminate having a conductor pattern may include a step of performing a process for reducing the visible light reflectance of some or all of the plurality of metal layers of the substrate.
The treatment for reducing the visible light reflectance includes oxidation treatment. When the substrate has a metal layer containing copper, the visible light reflectance of the metal layer can be reduced by oxidizing the copper to form copper oxide and blackening the metal layer.
Regarding the treatment for reducing the visible light reflectance, paragraphs [0017] to [0025] of JP-A-2014-150118, and paragraphs [0041], [0042] and [0042] of JP-A-2013-206315. 0048] and paragraph [0058], the contents of which are incorporated herein.

-Step of forming an insulating film, and step of forming a new metal layer on the surface of the insulating film-
It is also preferable that the method for manufacturing a laminate having a conductor pattern includes the steps of forming an insulating film on the surface of the circuit wiring and forming a new metal layer on the surface of the insulating film.
Through the above steps, a second electrode pattern insulated from the first electrode pattern can be formed.
The process of forming the insulating film is not particularly limited, and a known method of forming a permanent film can be used. Alternatively, an insulating film having a desired pattern may be formed by photolithography using an insulating photosensitive material.

A method for producing a laminate having a conductor pattern uses a substrate having a plurality of metal layers on both surfaces of the substrate, and sequentially or simultaneously forms circuits on the metal layers formed on both surfaces of the substrate. is also preferred. With such a configuration, it is possible to form a circuit wiring for a touch panel in which the first conductor pattern is formed on one surface of the substrate and the second conductor pattern is formed on the other surface of the substrate. It is also preferable to form the touch panel circuit wiring having such a configuration from both sides of the substrate by roll-to-roll.

<Use of laminate having conductor pattern>
The method of manufacturing a laminate having a conductor pattern includes the manufacture of conductive films such as touch panels, transparent heaters, transparent antennas, electromagnetic shielding materials, and light control films; the manufacture of printed wiring boards and semiconductor packages; the manufacture of semiconductor chips and between packages. Manufacture of interconnect pillars and pins; manufacture of metal masks; manufacture of tape substrates such as COF (Chip on Film) and TAB (Tape Automated Bonding);
Moreover, as said touch panel, a capacitive touch panel is mentioned. The method for manufacturing a laminate according to the present invention can be used for forming a conductive film and peripheral circuit wiring in a touch panel. The touch panel can be applied to display devices such as organic EL (electro-luminescence) display devices and liquid crystal display devices.

EXAMPLES The features of the present invention will be described more specifically below with reference to examples and comparative examples. The materials, amounts used, proportions, processing details, processing procedures, etc. shown in the following examples can be changed as appropriate without departing from the gist of the present invention. Therefore, the scope of the present invention should not be construed as being restricted by the specific examples shown below.
Further, in the following examples, the weight average molecular weight of the resin is the weight average molecular weight determined by gel permeation chromatography (GPC) in terms of polystyrene. Moreover, the theoretical acid value was used for the acid value.

<Materials used to prepare the transfer film>
The materials (the photosensitive composition and the composition for forming the intermediate layer) used in the preparation of the transfer film used in the examples will be described.

(Component of photosensitive composition)
The photosensitive composition layer of the transfer film was formed using a photosensitive composition.
The components used in the preparation of the photosensitive composition are as follows, and each component shown below is mixed in the formulation shown in Tables 2 to 5 shown later, and each photosensitive composition used in Examples or Comparative Examples A composition was obtained.

[resin]
Resins A1 to A10 containing structural units derived from the respective compounds shown in Table 1 were prepared.
Table 1 shows the amount (% by mass) of the structural unit of each synthesized resin, the acid value, the glass transition temperature (Tg), and the weight average molecular weight (Mw).
In Table 1, each abbreviation is as follows.
・MAA: methacrylic acid ・St: styrene ・MMA: methyl methacrylate ・BzMA: benzyl methacrylate ・DCPMA: dicyclopentanyl methacrylate ・GMA-MAA: structure obtained by adding glycidyl methacrylate to a structural unit derived from methacrylic acid Unit The repeating unit represented by GMA-MAA is represented by the following formula.

As shown in the above table, for example, Resin A1 is formed by adding glycidyl methacrylate to structural units derived from methacrylic acid, structural units derived from styrene, structural units derived from methacrylic acid, and structural units derived from methacrylic acid. and the structural units in a mass ratio of 20:46:2:32, respectively.

[Polymerizable compound]
B1: BPE-900 (ethoxylated bisphenol A dimethacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.)
B2: BPE-500 (ethoxylated bisphenol A dimethacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.)
B3: BPE-100 (ethoxylated bisphenol A dimethacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.)
B4: FA-024M (in the compound represented by the following general formula, R = methyl group, P = propylene group, E = ethylene group, m ³ = 6 (average value), n ² + n ³ = 12 (average value) A certain compound, manufactured by Hitachi Chemical Co., Ltd.)

B5: M-270 (polypropylene glycol diacrylate, manufactured by Toagosei Co., Ltd.)
B6: M-114 (4-normal nonylphenoxyoctaethylene glycol acrylate, manufactured by Toagosei Co., Ltd.)
B7: A-TMPT (trimethylolpropane triacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.)
B8: A-DCP (tricyclodecanedimethanol diacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.)
B9: 8UX-015A (15-functional urethane acrylate, manufactured by Taisei Fine Chemical Co., Ltd.)
B10: Aronix TO-2349 (acid-modified polyfunctional acrylate, manufactured by Toagosei Co., Ltd.)
B11: A-DOD-N (1,10-decanediol diacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.)
B12: DPHA (dipentaerythritol hexaacrylate, manufactured by Nippon Kayaku Co., Ltd.)

[Polymerization initiator]
・B-CIM (2,2′-bis(2-chlorophenyl)-4,4′,5,5′-tetraphenylbisimidazole, manufactured by Hampford ・Irgacure OXE-02 (manufactured by BASF)
・Ominirad 907 (IGM Resins B.V)

[Sensitizer]
・ SB-PI 701 (manufactured by Sanyo Trading Co., Ltd.)
・ DBA (9,10-dibutoxyanthracene, manufactured by Tokyo Chemical Industry Co., Ltd.)

[Dye]
Leuco Crystal Violet (manufactured by Tokyo Chemical Industry Co., Ltd.)

[Additive]
・ N-phenylcarbamoylmethyl-N-carboxymethylaniline (manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd.)
・TDP-G (manufactured by Kawaguchi Chemical Co., Ltd.)
・ CBT-1: Carboxybenzotriazole (manufactured by Johoku Chemical Co., Ltd.)
· 4-hydroxymethyl-4-methyl-1-phenyl-3-pyrazolidone (manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.)
・ Karenzu AOI-BM (manufactured by Showa Denko)
・N-Phenylglycine (manufactured by Junsei Chemical Co., Ltd.)
・ 1,2,4-triazole (manufactured by Otsuka Glass Co., Ltd.)
・Megafac F-552 (manufactured by DIC)
・Megafac F-551A (manufactured by DIC)

[solvent]
・PGMEA: propylene glycol monomethyl ether acetate ・MEK: methyl ethyl ketone ・MFG: propylene glycol monomethyl ether ・MeOH: methanol

When preparing the photosensitive composition, a solution obtained by dissolving each of the resins A1 to A10 in a mixed solvent of PGMEA/MFG = 50:50 was used, and the numerical values in the "Resin" column in Table 2 represents parts by weight of the resin in the composition.
In addition, the numerical value in each component column other than resin in Tables 2 to 5 represents the amount (parts by mass) of each component used.

(Components of Intermediate Layer Forming Composition)
An intermediate layer-forming composition was prepared by mixing the following components. In addition, the unit of the quantity of each component is a mass part.
Ion-exchanged water: 38.12 parts by mass Methanol (manufactured by Mitsubishi Gas Chemical Company, Inc.): 57.17 parts by mass Kuraray Poval 4-88LA (polyvinyl alcohol, manufactured by Kuraray Co., Ltd.): 3.17 parts by mass Polyvinylpyrrolidone K- 30 (manufactured by Nippon Shokubai Co., Ltd.): 1.49 parts by mass Metolose 60SH03 (hydroxypropyl methylcellulose, (manufactured by Shin-Etsu Chemical Co., Ltd.): 0.05 parts by mass Megafac F-444 (fluorosurfactant, DIC Corporation): 0.0035 parts by mass

<Production of transfer film>
For Examples 1 to 25 and Comparative Examples 1 to 4, transfer films were produced by the following procedure.
First, a temporary support (16 μm thick polyethylene terephthalate film (Lumirror 16KS40, manufactured by Toray Industries, Inc.), haze: 0.6%) was coated with each photosensitive composition described in Tables 6 and 7 using a bar coater. It was applied so that the thickness after drying would be the average film thickness shown in Tables 6 and 7, and dried at 80° C. using an oven to form a photosensitive composition layer.
A 16 μm-thick polyethylene terephthalate (16KS40, manufactured by Toray Industries, Inc.) was pressure-bonded as a protective film onto the obtained photosensitive composition layer to prepare a transfer film.

Moreover, regarding Example 26, a transfer film was produced by the following procedure.
First, on a temporary support (16 μm thick polyethylene terephthalate film (Lumirror 16KS40, manufactured by Toray Industries, Inc.), haze: 0.6%), the composition for forming an intermediate layer is applied using a bar coater, and the thickness after drying is was coated so as to have a thickness of 1.0 μm and dried at 90° C. using an oven to form an intermediate layer.
Furthermore, on the intermediate layer, the photosensitive composition described in Tables 6 and 7 is applied using a bar coater so that the thickness after drying becomes the average film thickness described in Tables 6 and 7, and the oven is turned on. and dried at 80° C. to form a photosensitive composition layer (negative photosensitive composition layer).
A 16 μm-thick polyethylene terephthalate (16KS40, manufactured by Toray Industries, Inc.) was pressure-bonded as a protective film onto the obtained photosensitive composition layer to prepare a transfer film.

<Production of laminate>
The protective film of the prepared transfer film was peeled off, and the exposed surface was laminated on a substrate having a metal layer obtained by Cu sputtering (thickness 100 nm) on polyimide (laminating conditions: substrate temperature 80 ° C., rubber roller temperature 110° C., linear pressure 1.0 MPa, linear velocity 4.0 m/min) to obtain a laminate. The laminate had a substrate, a metal layer, a photosensitive composition layer, and a temporary support in this order.
Next, a photomask having a pattern with a line (μm)/space (μm) ratio of 1/1 was brought into close contact with the surface of the photosensitive composition layer in the obtained laminate opposite to the substrate side. A high-pressure mercury lamp exposure machine (MAP-1200L, manufactured by Dainippon Kaken Co., Ltd., main wavelength: 365 nm) was used to expose the photosensitive composition layer to an arbitrary exposure amount. Thereafter, a pattern was formed by performing shower development for 60 seconds using an aqueous sodium carbonate solution having a liquid temperature of 30°C.
The cross-sectional shape of the obtained pattern was observed with a scanning electron microscope, and the width of the upper surface portion of the pattern having a pattern width of ±5% of the mask width was evaluated as the resolution. The results are shown in the "Resolution" column of Tables 6-7.
Also, the aspect ratio (pattern height/width of upper surface portion of pattern) of the obtained pattern was calculated and evaluated according to the following criteria.
A: Aspect ratio of 4.0 or more B: Aspect ratio of 3.5 or more and less than 4.0 C: Aspect ratio of 3.0 or more and less than 3.5 D: Aspect ratio of less than 3.0

In Tables 6 and 7, the "type" column in the "photosensitive composition layer" column indicates the photosensitive composition used to produce the photosensitive composition layer of the transfer film prepared in each example and comparative example. Represents the type of layer. For example, in Example 1, photosensitive composition 1 in Table 2 was used to prepare a photosensitive composition layer.
In Tables 6 and 7, in the column "presence or absence of sensitizer", "yes" indicates that the photosensitive composition layer contains a sensitizer, and "no" indicates that it does not.
In Tables 6 and 7, the "crosslinkable group content (% by mass)" column represents the content (% by mass) of structural units having a crosslinkable group with respect to all the structural units of the resin.
In Tables 6 and 7, the "365 nm transmittance (%)" column represents the transmittance (%) of the photosensitive composition layer at a wavelength of 365 nm.
In Tables 6 and 7, the "B/A" column represents the mass ratio of the polymerizable compound other than the A resin contained in the photosensitive composition layer and having a weight average molecular weight of less than 10,000 to the resin A.
In Tables 6 and 7, in the "presence/absence of intermediate layer" column, "yes" indicates that the transfer film includes an intermediate layer, and "no" indicates that it does not.
In Tables 6 and 7, the column "Average thickness (μm) of photosensitive composition layer" represents the average thickness (μm) of the photosensitive composition layer in the transfer film.

As shown in the table, it was confirmed that the transfer film of the present invention provided the desired effects.
A comparison between Examples 12 and 13 confirmed that when the transmittance at a wavelength of 365 nm was 80% or less, more excellent effects were obtained.
A comparison of Examples 14 to 18 confirmed that when B/A is 0.50 to 0.80 (preferably 0.55 to 0.80), better effects are obtained.

<Example 27>
A copper layer-attached substrate was prepared by forming a copper layer with a thickness of 200 nm on a PET substrate with a thickness of 0.1 mm by vapor deposition.
After peeling off the protective film of the transfer film of Example 1, under lamination conditions of a roll temperature of 100° C., a linear pressure of 1.0 MPa, and a linear velocity of 4.0 m/min, the copper layer and the photosensitive composition layer were brought into contact with each other. It was laminated on the substrate with the copper layer.
Next, using a photomask having a pattern of line/space=3 μm/5 μm, the temporary support was peeled off and exposure was performed at 70 mJ/cm ² .
Next, shower development was performed with a 1% aqueous solution of sodium carbonate at a liquid temperature of 30° C., followed by washing with water to form a predetermined pattern on the copper layer.
Electrolytic plating using a copper sulfate bath was performed on the substrate on which the pattern was arranged to form a Cu plating pattern with a thickness of 12 μm.
Next, using a removing liquid, the pattern is removed from the resulting laminate, and then using an etchant, the copper layer is removed to form a laminate having a conductive fine line pattern of L/S = 4 µm/4 µm. got a body

<Example 28>
A copper layer-attached substrate was prepared by forming a copper layer with a thickness of 200 nm on a PET substrate with a thickness of 0.1 mm by vapor deposition.
After peeling off the protective film of the transfer film of Example 1, under lamination conditions of a roll temperature of 100° C., a linear pressure of 1.0 MPa, and a linear velocity of 4.0 m/min, the copper layer and the photosensitive composition layer were brought into contact with each other. It was laminated on the substrate with the copper layer.
Next, a photomask having a pattern of line/space=5 μm/3 μm was used, the temporary support was peeled off, and exposure was performed at 80 mJ/cm ² .
Next, shower development was performed with a 1% aqueous solution of sodium carbonate at a liquid temperature of 30° C., followed by washing with water to form a predetermined pattern on the copper layer.
An etchant was used to remove the copper layer located in the region where the pattern was not arranged on the substrate on which the pattern was arranged.
Next, the pattern was removed from the resulting laminate using a removing liquid to obtain a laminate having a fine conductive line pattern of L/S=4 μm/4 μm.

REFERENCE SIGNS LIST 10 transfer film 11 temporary support 13 intermediate layer 15 photosensitive composition layer 17 composition layer 19 protective film

Claims (8)

A transfer film having a temporary support and a photosensitive composition layer,
The average film thickness of the photosensitive composition layer is 10 μm or more,
The photosensitive composition layer contains a sensitizer and a resin having a weight average molecular weight of 10000 or more,
the resin comprises a structural unit having a crosslinkable group,
The content of the structural unit having the crosslinkable group is 30% by mass or more with respect to the total structural units of the resin,
The transfer film, wherein the photosensitive composition layer has a transmittance of 40% or more at a wavelength of 365 nm. 2. The transfer film according to claim 1, wherein the mass ratio of the polymerizable compound other than the resin contained in the photosensitive composition layer and having a weight average molecular weight of less than 10000 to the resin is 0.50 to 0.80. 3. The transfer film according to claim 1, wherein said transfer film has an intermediate layer between said temporary support and said photosensitive composition layer. 4. The transfer film according to claim 3, wherein the intermediate layer is a water-soluble resin layer. The transfer film and the substrate so that the surface of the transfer film according to any one of claims 1 to 4 on the side opposite to the temporary support is in contact with the metal layer of the substrate having a metal layer on the surface. A laminating step of laminating the
An exposure step of exposing the photosensitive composition layer;
a developing step of performing a developing process on the exposed photosensitive composition layer to form a resist pattern;
any one of an etching step of performing an etching process and a plating process of performing a plating process on the metal layer in a region where the resist pattern is not arranged;
a stripping step of stripping the resist pattern;
Further, in the case of including the plating step, a removing step of removing the metal layer exposed by the peeling step and forming a conductive pattern on the substrate. A method for producing a laminate having a conductor pattern, further comprising a temporary support stripping step of stripping the temporary support between the exposure step and the development step. 6. The method of manufacturing a laminate having a conductor pattern according to claim 5, wherein said exposure step is a step of performing pattern exposure through a photomask. 7. The laminate having a conductor pattern according to claim 5 or 6, wherein the exposure step is a step of pattern-exposing the photosensitive composition layer through a lens using actinic rays onto which an image of a photomask is projected. manufacturing method. Having the temporary support peeling step between the bonding step and the exposure step,
In any one of claims 5 to 7, wherein the exposure step is a step of exposing the photosensitive composition layer in a pattern by contacting the surface exposed by peeling the temporary support with a photomask. A method for producing a laminate having the conductor pattern described above.

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