JP2023026958A - piezoelectric valve - Google Patents

piezoelectric valve Download PDF

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JP2023026958A
JP2023026958A JP2021132431A JP2021132431A JP2023026958A JP 2023026958 A JP2023026958 A JP 2023026958A JP 2021132431 A JP2021132431 A JP 2021132431A JP 2021132431 A JP2021132431 A JP 2021132431A JP 2023026958 A JP2023026958 A JP 2023026958A
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Prior art keywords
valve seat
valve
piezoelectric
actuator
longitudinal direction
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Inventor
隆文 伊藤
Takafumi Ito
忠史 松下
Tadashi Matsushita
世傑 徐
Seiketsu Jo
徴力 王
Zheng Li Wang
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Satake Engineering Co Ltd
Satake Corp
Mechano Transformer Corp
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Satake Engineering Co Ltd
Satake Corp
Mechano Transformer Corp
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Priority to JP2021132431A priority Critical patent/JP2023026958A/en
Priority to PCT/JP2022/030822 priority patent/WO2023022115A1/en
Priority to TW111130696A priority patent/TW202309425A/en
Publication of JP2023026958A publication Critical patent/JP2023026958A/en
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
    • F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/42—Valve seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic

Abstract

To provide a piezoelectric valve capable of securing a discharge amount of a compressed gas necessary at the time of valve opening, even in shortening a length of a valve element and a valve seat, in a case when the valve element disposed on an actuator is brought into contact with and is separated from the valve seat disposed on a valve seat plate by circular arc motion.SOLUTION: In a piezoelectric valve which includes an actuator for driving a valve element, a valve seat plate having a valve seat brought into contact with and separated from the valve element and a discharge passage and fixing the actuator, and a main body case for housing the valve seat plate, and in which the valve element disposed on the actuator is brought into contact with and is separated from the valve seat disposed on the valve seat plate by circular arc motion, the valve seat has a valve seat surface on which discharge passages are opened in a plurality of annular projecting portions respectively at one end, the plurality of annular projecting portions are opened on top faces of a plurality of frustums respectively at one end, and the valve element is brought into contact with and is separated from the plurality of annular projecting portions of the valve seat surface.SELECTED DRAWING: Figure 8

Description

本発明は、圧電素子の変位を利用してバルブの開閉を行う圧電式バルブに関する。 The present invention relates to a piezoelectric valve that opens and closes using displacement of a piezoelectric element.

従来、圧電素子の変位を利用してバルブの開閉を行い、圧縮気体を噴出する圧電式バルブは周知である（特許文献１，２を参照。）。 2. Description of the Related Art Piezoelectric valves that eject compressed gas by opening and closing the valve using the displacement of a piezoelectric element are well known (see Patent Documents 1 and 2).

特許文献１，２に記載された圧電式バルブは、高速応答性能に優れる圧電素子の特性を利用するアクチュエータを備えるものであり、前記アクチュエータに前記圧電素子の小さな変位をテコの原理に基づき拡大する変位拡大機構を備えるものである。 The piezoelectric valves described in Patent Documents 1 and 2 are provided with an actuator that utilizes the characteristics of a piezoelectric element with excellent high-speed response performance, and the actuator magnifies a small displacement of the piezoelectric element based on the principle of leverage. It has a displacement magnifying mechanism.

前記圧電式バルブは、応答性に優れるため、米粒等の粒状物を対象とした光学式選別機のエジェクタバルブに用いて不良品を除去する場合、良品が巻き添えとなって除去されることが少なく、除去された不良品側の不良品混入率が電磁式バルブに比べて高いとの知見を、試験からも、また経験則上も得られている。 Since the piezoelectric valve has excellent responsiveness, when it is used as an ejector valve of an optical sorter for grains such as rice grains to remove defective products, good products are less likely to be removed as a side effect. It has been found from tests and empirical rules that the contamination rate of the removed defective products is higher than that of electromagnetic valves.

ところで、本発明者らは、先に、アクチュエータがシンプルな構造の変位拡大機構を備える圧電式バルブを提案した（特許文献３を参照。）。
特許文献３に記載された圧電式バルブは、アクチュエータにおける作用部に弁体が設けられ、前記弁体が支持部に設けられるくびれ部を支点として円弧運動するものであり、特許文献１，２に記載された従来の圧電式バルブに比べ、バルブの開閉動作をより高速に行うことができる。 By the way, the inventors of the present invention have previously proposed a piezoelectric valve in which the actuator has a simple-structured displacement magnifying mechanism (see Patent Document 3).
In the piezoelectric valve described in Patent Document 3, a valve body is provided in an action portion of an actuator, and the valve body moves in an arc with a constricted portion provided in a support portion as a fulcrum. The opening and closing motion of the valve can be performed at a higher speed than the conventional piezoelectric valves described.

ところが、特許文献３に記載された圧電式バルブは、前記弁体が弁座プレートに設けられる弁座に対して円弧運動により接離するものであり、弁体の長さ方向であって前記支点から遠い先端側と前記支点に近い基端側で前記弁体が前記弁座と接離するタイミングが異なる（時間差が生じる）虞があるため、前記弁座の長さを短くする必要があるが、前記弁座の長さを短くすることで開弁時に圧縮気体の排出量が少なくなる問題がある。 However, in the piezoelectric valve described in Patent Document 3, the valve disc moves toward and away from a valve seat provided on a valve seat plate by an arcuate motion. Since there is a possibility that the valve disc contacts and separates from the valve seat at different timings (a time difference occurs) between the distal end side farther from the fulcrum and the proximal end side closer to the fulcrum, it is necessary to shorten the length of the valve seat. , there is a problem that the amount of compressed gas discharged when the valve is opened is reduced by shortening the length of the valve seat.

特許第５７６４０４９号公報Japanese Patent No. 5764049 特開２０２１－８８９２号公報Japanese Patent Application Laid-Open No. 2021-8892 特願２０２０－１５４３０８号Japanese Patent Application No. 2020-154308

そこで、本発明は、弁体が弁座に対して円弧運動により接離する場合であって、前記弁体と前記弁座の長さを短くした場合でも、開弁時に必要な圧縮気体の排出量を確保することが可能な圧電式バルブを提供することを目的とする。 Therefore, in the present invention, even when the valve disc moves toward and away from the valve seat by arcuate motion and the length of the valve disc and the valve seat is shortened, the compressed gas necessary for opening the valve is discharged. It is an object of the present invention to provide a piezoelectric valve capable of securing a quantity.

上記目的を達成するため、本発明は、
弁体を駆動するアクチュエータと、
前記弁体と接離する弁座及び排出路を有し、前記アクチュエータを固定する弁座プレートと、
前記弁座プレートを収納する本体ケースと、を備える圧電式バルブであって、
前記アクチュエータは、
前記弁座プレートに固定される基部と、
前記基部の取付け面に一端部が接続され、第１長手方向に延びる圧電素子と、
前記基部に一体に設けられ、前記圧電素子と並んで前記第１長手方向と交差する第２長手方向に延びる支持部と、
前記圧電素子の他端部及び前記支持部の先端部と接続され、前記圧電素子の伸縮に伴って、前記第１長手方向及び前記第２長手方向それぞれと異なる方向に変位する作用部と、
前記作用部の前記変位する方向の側に設けられ、前記作用部の変位によって駆動される前記弁体と、を備え、
前記本体ケースは、
圧縮気体が供給される気体供給口と、
前記気体供給口から供給された圧縮気体を前記弁体と前記弁座との離間によって前記弁座プレートの前記排出路を介して排出する気体排出口と、を備える圧電式バルブにおいて、
前記弁座は、複数の環状凸部内にそれぞれ前記排出路の一端が開口する弁座面を有し、
前記複数の環状凸部は、複数の錐台の頂面にそれぞれ前記排出路の一端が開口し、
前記弁体は、前記弁座面の前記複数の環状凸部と接離することを特徴とする。 In order to achieve the above object, the present invention
an actuator that drives the valve body;
a valve seat plate that has a valve seat and a discharge passage contacting and separating from the valve body and that fixes the actuator;
A piezoelectric valve comprising a body case that houses the valve seat plate,
The actuator is
a base secured to the valve seat plate;
a piezoelectric element having one end connected to the mounting surface of the base and extending in a first longitudinal direction;
a support portion integrally provided with the base portion and extending in a second longitudinal direction parallel to the piezoelectric element and intersecting with the first longitudinal direction;
an action portion connected to the other end portion of the piezoelectric element and the tip portion of the support portion and displaced in directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts;
the valve body provided on the side of the action portion in the direction of displacement and driven by the displacement of the action portion;
The body case is
a gas supply port to which compressed gas is supplied;
a gas discharge port for discharging the compressed gas supplied from the gas supply port through the discharge passage of the valve seat plate due to the separation between the valve body and the valve seat,
the valve seat has a valve seat surface in which one end of the discharge passage opens into a plurality of annular projections;
one end of each of the discharge passages is opened to the top surface of each of the plurality of frustums of the plurality of annular protrusions;
The valve body is characterized in that it contacts and separates from the plurality of annular projections of the valve seat surface.

本発明は、
前記アクチュエータの前記作用部が、前記圧電素子の伸縮に伴って、前記第１長手方向及び前記第２長手方向それぞれと異なる方向であって、前記第１長手方向及び前記第２長手方向を含む平面に平行な面内における変位方向に変位することが好ましい。 The present invention
The acting portion of the actuator is in a direction different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts, and is a plane that includes the first longitudinal direction and the second longitudinal direction. is preferably displaced in a displacement direction in a plane parallel to .

本発明は、
前記複数の環状凸部が、前記弁座の幅方向に並設され、前記排出路の一端は、前記弁座の幅方向に直交する長さ方向に沿って前記複数の環状凸部内にそれぞれスリット状に開口することが好ましい。 The present invention
The plurality of annular projections are arranged side by side in the width direction of the valve seat, and one end of the discharge passage is slit in each of the plurality of annular projections along the length direction orthogonal to the width direction of the valve seat. It is preferable that the opening is shaped like a shape.

本発明は、
前記排出路が、前記複数の環状凸部内にそれぞれ開口する複数の弁座側流路と、前記各弁座側流路が交差して連通し前記弁座プレートの表面に開口する１つの主流路とを有し、
前記主流路の内面は、前記各弁座側流路が交差する連通部において前記弁座面側に凸状をなし、前記各連通部間において凹状をなす形状とすることが好ましい。 The present invention
The discharge passage includes a plurality of valve-seat-side passages each opening into the plurality of annular projections, and one main passage that is open to the surface of the valve-seat plate by crossing and communicating with the valve-seat-side passages. and
It is preferable that the inner surface of the main flow path has a convex shape toward the valve seat surface at communicating portions where the respective valve seat side channels intersect, and a concave shape between the communicating portions.

本発明は、
前記主流路が、前記各弁座側流路の流路断面の合計よりも大きな流路断面を有することが好ましい。 The present invention
It is preferable that the main flow passage has a flow passage cross section larger than the sum of the flow passage cross sections of the respective valve seat side flow passages.

また、上記目的を達成するため、本発明は、
弁体を駆動するアクチュエータと、
前記弁体と接離する弁座及び排出路を有し、前記アクチュエータを固定する弁座プレートと、
前記弁座プレートを収納する本体ケースと、を備える圧電式バルブであって、
前記アクチュエータは、
前記弁座プレートに固定される基部と、
前記基部の取付け面に一端部が接続され、第１長手方向に延びる圧電素子と、
前記基部に一体に設けられ、前記圧電素子と並んで前記第１長手方向と交差する第２長手方向に延びる支持部と、
前記圧電素子の他端部及び前記支持部の先端部と接続され、前記圧電素子の伸縮に伴って、前記第１長手方向及び前記第２長手方向それぞれと異なる方向に変位する作用部と、
前記作用部の前記変位する方向の側に設けられ、前記作用部の変位によって駆動される前記弁体と、を備え、
前記本体ケースは、
圧縮気体が供給される気体供給口と、
前記気体供給口から供給された圧縮気体を前記弁体と前記弁座との離間によって前記弁座プレートの前記排出路を介して排出する気体排出口と、を備える圧電式バルブにおいて、
前記弁座は、環状凸部内に前記排出路の一端が開口する弁座面を有し、
前記環状凸部は、錐台の頂面に前記排出路の一端が開口し、
前記弁体は、前記弁座面の前記環状凸部と接離することを特徴とする。 Further, in order to achieve the above object, the present invention
an actuator that drives the valve body;
a valve seat plate that has a valve seat and a discharge passage contacting and separating from the valve body and that fixes the actuator;
A piezoelectric valve comprising a body case that houses the valve seat plate,
The actuator is
a base secured to the valve seat plate;
a piezoelectric element having one end connected to the mounting surface of the base and extending in a first longitudinal direction;
a support portion integrally provided with the base portion and extending in a second longitudinal direction parallel to the piezoelectric element and intersecting with the first longitudinal direction;
an action portion connected to the other end portion of the piezoelectric element and the tip portion of the support portion and displaced in directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts;
the valve body provided on the side of the action portion in the direction of displacement and driven by the displacement of the action portion;
The body case is
a gas supply port to which compressed gas is supplied;
a gas discharge port for discharging the compressed gas supplied from the gas supply port through the discharge passage of the valve seat plate due to the separation between the valve body and the valve seat,
The valve seat has a valve seat surface in which one end of the discharge passage opens in the annular protrusion,
one end of the discharge passage is open to the top surface of the frustum of the annular projection;
The valve body is characterized in that it contacts and separates from the annular convex portion of the valve seat surface.

本発明は、
前記アクチュエータの前記支持部が、前記第２長手方向に延びる中間部分にくびれ部を有することが好ましい。 The present invention
Preferably, the support portion of the actuator has a constriction at an intermediate portion extending in the second longitudinal direction.

本発明は、
前記弁座プレートが、前記弁座及び前記排出路が形成される弁座部を有し、前記弁座部の正面側又は背面側の少なくとも一面に前記弁座が設けられ、
前記アクチュエータは、前記弁体が前記弁座に対峙すべく前記弁座プレートの少なくとも一側面に固定されることが好ましい。 The present invention
The valve seat plate has a valve seat portion in which the valve seat and the discharge passage are formed, and the valve seat is provided on at least one surface of the front side or the back side of the valve seat portion,
Preferably, the actuator is fixed to at least one side surface of the valve seat plate so that the valve body faces the valve seat.

本発明は、
前記弁座プレートが、前記弁座及び前記排出路が形成される弁座部を有し、前記弁座部の正面側及び背面側の相対する両面に前記弁座が設けられ、
複数の前記アクチュエータは、各弁体が前記各弁座にそれぞれ対峙すべく前記弁座プレートに固定されることが好ましい。 The present invention
The valve seat plate has a valve seat portion in which the valve seat and the discharge passage are formed, and the valve seats are provided on opposite surfaces of the front side and the back side of the valve seat portion,
It is preferable that the plurality of actuators be fixed to the valve seat plate so that each valve disc faces each valve seat.

本発明の圧電式バルブは、前記弁座が、複数の環状凸部内にそれぞれ前記排出路の一端が開口する弁座面を有するので、前記弁座の長さを短くした場合でも、前記複数の環状凸部によって前記排出路における前記開口の周長を全体として長くすることができる。
また、本発明の圧電式バルブは、前記弁座が、複数の環状凸部内にそれぞれ前記排出路の一端が開口する弁座面を有し、前記複数の環状凸部は、複数の錐台の頂面にそれぞれ前記排出路の一端が開口するので、前記弁座面は、前記複数の環状凸部の周囲が傾斜面となり、開弁時に前記複数の環状凸部の周囲から前記排出路の前記開口に圧縮気体を取り込む際の抵抗を小さくすることができる。
したがって、本発明の圧電式バルブによれば、弁体が弁座に対して円弧運動により接離する場合であって、前記弁体と前記弁座の長さを短くした場合でも、開弁時に必要な圧縮気体の排出量を確保することが可能となる。 In the piezoelectric valve of the present invention, since the valve seat has a valve seat surface in which one end of the discharge passage opens in each of the plurality of annular projections, even if the length of the valve seat is shortened, the plurality of The circumferential length of the opening in the discharge passage can be lengthened by the annular protrusion as a whole.
Further, in the piezoelectric valve of the present invention, the valve seat has a valve seat surface in which one end of the discharge passage is opened in a plurality of annular projections, and the plurality of annular projections are formed of a plurality of frustums. Since one end of each of the discharge passages is opened on the top surface, the valve seat surface has an inclined surface around the plurality of annular projections. It is possible to reduce resistance when taking compressed gas into the opening.
Therefore, according to the piezoelectric valve of the present invention, even when the valve disc moves toward and away from the valve seat by arcuate motion and the lengths of the valve disc and the valve seat are shortened, when the valve is opened, It becomes possible to secure the necessary discharge amount of the compressed gas.

本発明の圧電式バルブは、前記複数の環状凸部が、前記弁座の幅方向に並設され、前記排出路の一端は、前記弁座の幅方向に直交する長さ方向に沿って前記複数の環状凸部内にそれぞれスリット状に開口することとすれば、前記弁座の長さを短くした場合でも、前記複数の環状凸部によって前記各弁座側流路における前記開口の周長を全体として長くすることができる。 In the piezoelectric valve of the present invention, the plurality of annular protrusions are arranged side by side in the width direction of the valve seat, and one end of the discharge passage extends along the length direction orthogonal to the width direction of the valve seat. If the slit-like openings are formed in the plurality of annular projections, even if the length of the valve seat is shortened, the plurality of annular projections allow the circumferential length of the openings in the respective valve-seat-side passages to be adjusted. can be lengthened as a whole.

本発明の圧電式バルブは、前記排出路が、前記複数の環状凸部内にそれぞれ開口する複数の弁座側流路と、前記各弁座側流路が交差して連通し前記弁座プレートの表面に開口する１つの主流路とを有し、前記主流路の内面が、前記各弁座側流路が交差する連通部において前記弁座面側に凸状をなす形状とするものであれば、前記各弁座側流路の長さが短くなり、開弁時に前記排出路に圧縮気体を取り込む際の前記弁座側流路内における抵抗を小さくすることができる。
また、本発明の圧電式バルブは、前記主流路の内面が、前記各連通部間において前記弁座面側から凹状をなす形状とするものであれば、前記各環状凸部間の溝の深さを深くして大きな空気溜まりを形成できるので、開弁時に前記弁座側流路に取り込む圧縮気体の容量を確保することができる。
したがって、本発明の圧電式バルブによれば、弁体が弁座に対して円弧運動により接離する場合であって、前記弁体と前記弁座の長さを短くした場合でも、開弁時に必要な圧縮気体の排出量を確保することが可能となる。 In the piezoelectric valve of the present invention, the discharge passage intersects and communicates with a plurality of valve-seat-side flow passages each opening into the plurality of annular projections, and the valve-seat plate. and one main flow path that opens to the surface, and the inner surface of the main flow path has a shape that forms a convex shape on the valve seat surface side at the communicating portion where the valve seat side flow paths intersect. , the length of each of the valve-seat-side passages is shortened, and the resistance in the valve-seat-side passages when the compressed gas is introduced into the discharge passage when the valve is opened can be reduced.
Further, in the piezoelectric valve of the present invention, if the inner surface of the main flow passage has a concave shape from the valve seat surface side between the communicating portions, the depth of the groove between the annular convex portions is Since a large air pool can be formed by increasing the depth, it is possible to ensure the capacity of the compressed gas to be taken into the valve-seat-side channel when the valve is opened.
Therefore, according to the piezoelectric valve of the present invention, even when the valve disc moves toward and away from the valve seat by arcuate motion and the lengths of the valve disc and the valve seat are shortened, when the valve is opened, It becomes possible to secure the necessary discharge amount of the compressed gas.

本発明の圧電式バルブは、前記弁座が、環状凸部内に前記排出路の一端が開口する弁座面を有し、前記環状凸部は、錐台の頂面に前記排出路の一端が開口するので、前記弁座面は、前記環状凸部の周囲が傾斜面となり、開弁時に前記環状凸部の周囲から前記排出路の前記開口に圧縮気体を取り込む際の抵抗を小さくすることができる。
したがって、本発明の圧電式バルブによれば、弁体が弁座に対して円弧運動により接離する場合であって、前記弁体と前記弁座の長さを短くした場合でも、開弁時に必要な圧縮気体の排出量を確保することが可能となる。 In the piezoelectric valve of the present invention, the valve seat has a valve seat surface in which one end of the discharge passage opens in an annular projection, and the annular projection has a frustum having a top surface in which one end of the discharge passage is opened. Since the opening is formed, the valve seat surface has an inclined surface around the annular convex portion, and when the valve is opened, it is possible to reduce the resistance when the compressed gas is drawn into the opening of the discharge passage from the circumference of the annular convex portion. can.
Therefore, according to the piezoelectric valve of the present invention, even when the valve disc moves toward and away from the valve seat by arcuate motion and the lengths of the valve disc and the valve seat are shortened, when the valve is opened, It becomes possible to secure the necessary discharge amount of the compressed gas.

本発明の圧電式バルブは、前記アクチュエータの前記支持部が、前記第２長手方向に延びる中間部分にくびれ部を有するものであれば、前記作用部の変位を拡大することができる。
また、本発明の圧電式バルブは、前記アクチュエータの前記支持部が、前記第２長手方向に延びる中間部分にくびれ部を有するものであれば、前記アクチュエータに設けられる弁体が前記弁座プレートに設けられる弁座に対し前記くびれ部を支点として円弧運動するため、前記弁体の軌道が安定する。 In the piezoelectric valve of the present invention, if the support portion of the actuator has a constricted portion in the intermediate portion extending in the second longitudinal direction, the displacement of the action portion can be increased.
Further, in the piezoelectric valve of the present invention, if the support portion of the actuator has a constricted portion in an intermediate portion extending in the second longitudinal direction, the valve body provided in the actuator is attached to the valve seat plate. The orbit of the valve body is stabilized because the valve body moves in an arc with the constricted portion as a fulcrum relative to the provided valve seat.

圧電式バルブの斜視図である。1 is a perspective view of a piezoelectric valve; FIG. 図１の圧電式バルブの正面図である。2 is a front view of the piezoelectric valve of FIG. 1; FIG. アクチュエータの斜視図である。FIG. 4 is a perspective view of an actuator; 図３のアクチュエータを側面側から見た説明図である。FIG. 4 is an explanatory view of the actuator of FIG. 3 as viewed from the side; 弁座プレートの斜視図である。FIG. 4 is a perspective view of a valve seat plate; アクチュエータを固定した状態の弁座プレートの斜視図である。FIG. 4 is a perspective view of the valve seat plate with the actuator fixed; 図６の弁座プレートの側面図である。7 is a side view of the valve seat plate of FIG. 6; FIG. 弁座プレートの弁座部を正面側から見た説明図である。FIG. 4 is an explanatory view of the valve seat portion of the valve seat plate viewed from the front side; 図８の弁座部を側面側から見た説明図である。FIG. 9 is an explanatory view of the valve seat portion of FIG. 8 viewed from the side; 図８のＡ－Ａ断面図である。FIG. 9 is a cross-sectional view taken along the line AA of FIG. 8; 図９のＢ－Ｂ断面図である。FIG. 10 is a cross-sectional view taken along the line BB of FIG. 9;

本発明の実施の形態を図面に基づいて説明する。
図１は圧電式バルブの斜視図を示す。図２は図１の圧電式バルブの正面図を示す。
本発明の実施の形態において、圧電式バルブ１は、バルブ本体２、後述するアクチュエータ３、及び前記アクチュエータ３が固定された状態で前記バルブ本体２の内部に配設される後述する弁座プレート４を備える。 An embodiment of the present invention will be described with reference to the drawings.
FIG. 1 shows a perspective view of a piezoelectric valve. FIG. 2 shows a front view of the piezoelectric valve of FIG.
In the embodiment of the present invention, the piezoelectric valve 1 includes a valve body 2, an actuator 3 described later, and a valve seat plate 4 described later which is disposed inside the valve body 2 with the actuator 3 fixed. Prepare.

前記バルブ本体２は、後面（図１及び図２では下面）が開口するケースであって、内部には、外部の圧縮気体供給源（図示せず）から圧縮気体の供給を受ける気体圧力室を備える。
また、前記バルブ本体２の前面（図１及び図２では上面）には、圧縮気体源から圧縮気体が供給される空間を内部に有するマニホールド（図示せず）に装着するためのコネクタ部（図示せず）が設けられる。 The valve body 2 is a case whose rear surface (bottom surface in FIGS. 1 and 2) is open, and has a gas pressure chamber inside which receives compressed gas from an external compressed gas supply source (not shown). Prepare.
Further, on the front surface (top surface in FIGS. 1 and 2) of the valve body 2, there is provided a connector portion (Fig. not shown) are provided.

前記コネクタ部の前面には、前記バルブ本体２内に圧縮気体を吸入する気体吸入口及び前記圧縮気体を排出する複数の気体排出口が開口する。
また、前記バルブ本体２の前面には、前記コネクタ部の前記気体吸入口と連通する気体供給口２１、及び前記コネクタ部の前記各気体排出口と連通する複数の気体排出口２２が開口する。
図１及び図２に示すように、前記バルブ本体２の後面にはカバー体６が装着され、前記カバー体６の後面には後述する圧電素子３２に給電するための配線コネクタが形成される。 A gas inlet for sucking compressed gas into the valve body 2 and a plurality of gas outlets for discharging the compressed gas are opened on the front surface of the connector portion.
A gas supply port 21 communicating with the gas suction port of the connector portion and a plurality of gas discharge ports 22 communicating with the respective gas discharge ports of the connector portion are opened on the front surface of the valve body 2 .
As shown in FIGS. 1 and 2, a cover body 6 is attached to the rear surface of the valve body 2, and a wiring connector is formed on the rear surface of the cover body 6 for supplying power to a piezoelectric element 32, which will be described later.

図３はアクチュエータの斜視図を示す。図４は図３のアクチュエータを側面側からみた説明図を示す。
前記アクチュエータ３は、後述する弁座プレート４に固定される基部３１と、前記基部３１の取付け面に一端部が接続され、第１長手方向に延びる圧電素子３２と、前記基部３１に一体に設けられ、前記圧電素子３２と並んで前記第１長手方向と交差する第２長手方向に延びる支持部３３を備える。 FIG. 3 shows a perspective view of the actuator. FIG. 4 shows an explanatory view of the actuator of FIG. 3 as viewed from the side.
The actuator 3 includes a base portion 31 fixed to a valve seat plate 4 to be described later, a piezoelectric element 32 having one end connected to an attachment surface of the base portion 31 and extending in a first longitudinal direction, and a piezoelectric element 32 integrally provided with the base portion 31. A support portion 33 extending in a second longitudinal direction crossing the first longitudinal direction is provided alongside the piezoelectric element 32 .

前記アクチュエータ３は、前記圧電素子３２の他端部及び前記支持部３３の先端部と接続され、前記圧電素子３２の伸縮に伴って、前記第１長手方向及び前記第２長手方向それぞれと異なる方向に変位する作用部３４、前記作用部３４の先端側であって前記変位する方向の一側面に設けられ、前記作用部３４の前記変位によって駆動される弁体３５を備える。 The actuator 3 is connected to the other end portion of the piezoelectric element 32 and the tip portion of the support portion 33, and moves in directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element 32 expands and contracts. and a valve body 35 provided on one side surface of the acting portion 34 in the direction of displacement and driven by the displacement of the acting portion 34 .

前記基部３１は、少なくとも前記支持部３３が一体に設けられる側の取付け穴３８１を利用して前記弁座プレート４にネジにより固定される。 The base portion 31 is fixed to the valve seat plate 4 by screws using at least the mounting holes 381 on the side where the support portion 33 is integrally provided.

また、前記支持部３３は、前記第２長手方向に延びる中間部分にくびれ部３３１を有し、前記くびれ部３３１よりも前記基部３１の側に設けられる取付け穴３８２を利用して前記弁座プレート４にネジにより固定される。 The support portion 33 has a constricted portion 331 at an intermediate portion extending in the second longitudinal direction. 4 is fixed with a screw.

前記アクチュエータ３は、前記圧電素子３３の変位を拡大して前記弁体３５に作用させる変位拡大機構として前記支持部３３及び前記作用部３４を含み、前記圧電素子３２の伸縮に伴い、前記作用部３４が前記第１長手方向及び前記第２長手方向を含む平面に略平行な面内で、前記第１長手方向及び前記第２長手方向それぞれと異なる変位方向（Ｘ方向）に変位する。
その際、前記支持部３３の前記第２長手方向に延びる中間部分に前記くびれ部３３１を設けることで、前記圧電素子３２の伸縮に伴う前記作用部３４の変位を拡大することができる。 The actuator 3 includes the support portion 33 and the acting portion 34 as a displacement magnifying mechanism that magnifies the displacement of the piezoelectric element 33 and acts on the valve body 35. As the piezoelectric element 32 expands and contracts, the acting portion 34 is displaced in a displacement direction (X direction) different from each of the first longitudinal direction and the second longitudinal direction within a plane substantially parallel to a plane containing the first longitudinal direction and the second longitudinal direction.
At this time, by providing the constricted portion 331 in the intermediate portion of the support portion 33 extending in the second longitudinal direction, the displacement of the action portion 34 accompanying expansion and contraction of the piezoelectric element 32 can be increased.

また、前記アクチュエータ３は、前記作用部３４の変位する方向の一側面に前記弁体３５が設けられるので、前記弁体３５が前記支持部３３に設けられる前記くびれ部３３１を支点として前記作用部３４とともに前記変位方向（Ｘ方向）に円弧運動する。前記弁体３５は、後述する弁座に対し前記くびれ部３３１を支点として円弧運動するので軌道が安定する。 In addition, since the actuator 3 is provided with the valve body 35 on one side surface in the direction in which the acting portion 34 is displaced, the valve body 35 moves toward the acting portion with the constricted portion 331 provided in the support portion 33 as a fulcrum. 34 in the displacement direction (X direction). Since the valve body 35 makes an arcuate motion with the constricted portion 331 as a fulcrum relative to a later-described valve seat, the orbit is stabilized.

なお、前記アクチュエータ３において、前記支持部３３に設けられる前記くびれ部３３１は必須のものでなく、前記支持部３３に前記くびれ部３３１が設けられていない場合でも、前記作用部３４及び前記弁体３５は前記変位方向（Ｘ方向）に変位することができる。 In the actuator 3, the constricted portion 331 provided in the support portion 33 is not essential. 35 can be displaced in the displacement direction (X direction).

ここで、前記基部３１及び前記支持部３３は、例えばインバー材を含むステンレス材等の金属材料を打ち抜いて一体成形することができる。
前記基部３１及び前記支持部３３を、金属材料を打ち抜いて一体成形すれば、部品点数が削減され、前記アクチュエータ３の組立てが容易となる。 Here, the base portion 31 and the support portion 33 can be integrally formed by punching a metal material such as stainless steel including Invar material.
If the base portion 31 and the support portion 33 are integrally formed by punching a metal material, the number of parts can be reduced and the assembly of the actuator 3 can be facilitated.

また、前記基部３１と前記支持部３３を別部材により形成し、前記基部３１に別部材の前記支持部３３を取り付けることで、前記支持部３３を前記基部３１に一体に設けることもできる。 Alternatively, the base portion 31 and the support portion 33 may be formed of separate members, and the support portion 33 of the separate member may be attached to the base portion 31 so that the support portion 33 can be provided integrally with the base portion 31 .

前記基部３１の取付け面には、例えばアルミブロック等からなる連結部材（図示せず）を取付けることができる。
前記基部３１の取付け面に、前記支持部３３よりも線膨張係数の大きな材料からなる連結部材を取付け、前記圧電素子３２を、前記連結部材を介して前記基部３１に取付けることとすれば、温度変化による前記圧電素子３２の熱膨張又は熱収縮の影響を軽減し、又は無くすことができる。
前記連結部材は、前記基部３１の取付け面でなく、前記圧電素子３２と前記作用部３４の間に取り付けることもできる。 A connection member (not shown) made of, for example, an aluminum block can be attached to the attachment surface of the base portion 31 .
If a connecting member made of a material having a larger linear expansion coefficient than that of the supporting portion 33 is attached to the mounting surface of the base portion 31, and the piezoelectric element 32 is attached to the base portion 31 via the connecting member, the temperature The effect of thermal expansion or contraction of the piezoelectric element 32 due to changes can be reduced or eliminated.
The connecting member can be attached between the piezoelectric element 32 and the action portion 34 instead of the attachment surface of the base portion 31 .

前記作用部３４は、例えばアルミニウム材等の軽量材料により形成することができる。前記作用部３４をアルミニウム材等の軽量材料により形成することとすれば、前記作用部３４を変位させるうえで好ましい。
また、前記弁体３５は、ゴム製等であって、好ましくは滑性ゴムとすることができる。 The action portion 34 can be made of a lightweight material such as aluminum. Forming the action portion 34 from a lightweight material such as aluminum is preferable for displacing the action portion 34 .
Further, the valve body 35 is made of rubber or the like, and preferably lubricating rubber.

前記アクチュエータ３は、前記基部３１と前記作用部３４の間を圧縮部材３６で連結することができる。
圧電素子は引張方向の荷重に対し損傷しやすいが、前記基部３１と前記作用部３４の間を前記圧縮部材３６で連結することとすれば、前記圧電素子３２を前記第１長手方向に圧縮することができるため、前記圧電素子３２の損傷を防止できる。 The actuator 3 can connect the base portion 31 and the action portion 34 with a compression member 36 .
Although the piezoelectric element is easily damaged by a load in the tensile direction, if the compression member 36 connects the base portion 31 and the action portion 34, the piezoelectric element 32 is compressed in the first longitudinal direction. Therefore, damage to the piezoelectric element 32 can be prevented.

図５は弁座プレートの斜視図を示す。図６はアクチュエータを固定した状態の弁座プレートの斜視図を示す。図７は図６の弁座プレートの側面図を示す。
図５に示す弁座プレート４は、４つのアクチュエータを取り付けることが可能な弁座プレートの一例である。前記弁座プレート４は中央部分に弁座部４１を有し、前記弁座部４１の正面側及び背面側の相対する両面にそれぞれ前記アクチュエータ３の前記弁体３５が当接する弁座４２が２つずつ設けられる。 FIG. 5 shows a perspective view of the valve seat plate. FIG. 6 shows a perspective view of the valve seat plate with the actuator fixed. FIG. 7 shows a side view of the valve seat plate of FIG.
A valve seat plate 4 shown in FIG. 5 is an example of a valve seat plate to which four actuators can be attached. The valve seat plate 4 has a valve seat portion 41 in the central portion thereof, and two valve seats 42 are provided on the front side and the rear side of the valve seat portion 41, respectively, with which the valve body 35 of the actuator 3 abuts. are provided one by one.

前記弁座プレート４の一側面には、前記弁座部４１の両面に対向する位置にそれぞれ前記アクチュエータ３の取り付け部４３，４３が形成される。
また、前記弁座プレート４の他面側にも、前記弁座部４１の両面に対向する位置にそれぞれ前記アクチュエータ３の取り付け部４４が形成される。 Mounting portions 43 and 43 for the actuator 3 are formed on one side surface of the valve seat plate 4 at positions facing both surfaces of the valve seat portion 41 .
Mounting portions 44 for the actuator 3 are also formed on the other side of the valve seat plate 4 at positions facing both surfaces of the valve seat portion 41 .

前記弁座部４１には、前記各弁座４２の弁座面に一端が開口する複数の排出路４５が形成され、前記各排出路４５の他端が前記弁座プレート４の前面（図５乃至図７では上面）に開口する。
また、前記弁座プレート４には、前記バルブ本体２の後面の開口を閉鎖する蓋材４６が一体に設けられる。 The valve seat portion 41 is formed with a plurality of discharge passages 45, one end of which is open to the valve seat surface of each of the valve seats 42, and the other end of each of the discharge passages 45 is the front surface of the valve seat plate 4 (see FIG. 5). to the upper surface in FIG. 7).
Further, the valve seat plate 4 is integrally provided with a cover member 46 for closing the opening of the rear surface of the valve body 2 .

本発明の実施の形態では、前記弁座プレート４の前記各取り付け部４３，４４に対し、４つのアクチュエータ３の各弁体３５が前記各弁座４２に対峙するように配設され、前記各アクチュエータ３が前記弁座プレート４に対しネジにより固定される。 In the embodiment of the present invention, the valve bodies 35 of the four actuators 3 are arranged so as to face the valve seats 42 on the mounting portions 43 and 44 of the valve seat plate 4. An actuator 3 is fixed to the valve seat plate 4 by screws.

前記弁座プレート４は、前記４つのアクチュエータ３が固定された状態で前記バルブ本体２の後面の開口から内部に配設され、前記バルブ本体２の前面側から前記弁座プレート４の前面がネジにより固定されることで、前記弁座プレート４の前面に開口する前記各排出路４５が前記バルブ本体２の前面に開口する前記各気体排出口２２と連通する。
前記弁座プレート４は、前記蓋材４６が前記バルブ本体２に対し後方からネジにより固定され、前記バルブ本体２の前記後面の開口を閉鎖する。 The valve seat plate 4 is arranged inside from an opening in the rear surface of the valve body 2 in a state in which the four actuators 3 are fixed. , the discharge passages 45 opening on the front surface of the valve seat plate 4 communicate with the gas discharge ports 22 opening on the front surface of the valve body 2 .
The lid member 46 of the valve seat plate 4 is fixed to the valve body 2 from behind by screws to close the opening of the rear surface of the valve body 2 .

上記本発明の実施の形態における圧電式バルブ１は、閉弁状態において前記アクチュエータ３の前記圧電素子３２に通電すると、前記圧電素子３２が伸長し、前記作用部３４が変位して、前記弁体３５が前記弁座４２から離間して開弁し、前記バルブ本体２に前記気体供給口から供給される圧縮気体を、前記弁座プレート４の前記弁座部４１に形成される前記排出路４５を介して前記バルブ本体２の前面に開口する前記気体排出口２２から排出する。
他方、前記圧電式バルブ１は、前記アクチュエータ３の前記圧電素子３２への通電が解除されると、前記圧電素子３２が収縮し、前記作用部３４が反対方向へ変位して、前記弁体３５が前記弁座４２に着座して閉弁する。 In the piezoelectric valve 1 according to the embodiment of the present invention, when the piezoelectric element 32 of the actuator 3 is energized in the valve closed state, the piezoelectric element 32 expands, the action portion 34 displaces, and the valve body 35 is spaced apart from the valve seat 42 to open, and the compressed gas supplied from the gas supply port to the valve body 2 is discharged through the discharge passage 45 formed in the valve seat portion 41 of the valve seat plate 4 . The gas is discharged from the gas discharge port 22 opened in the front surface of the valve body 2 via.
On the other hand, in the piezoelectric valve 1, when the piezoelectric element 32 of the actuator 3 is deenergized, the piezoelectric element 32 contracts, the action portion 34 displaces in the opposite direction, and the valve body 35 is seated on the valve seat 42 to close the valve.

図８は弁座プレートの弁座部を正面側から見た説明図を示す。図９は図８の弁座部を側面側から見た説明図を示す。
本発明の実施の形態において、前記弁座プレート４の前記弁座部４１に設けられる前記各弁座４２は、それぞれ２つの環状凸部４２１を有し、前記各環状凸部４２１内にそれぞれ前記排出路４５が開口する弁座面を有する。 FIG. 8 shows an explanatory diagram of the valve seat portion of the valve seat plate viewed from the front side. FIG. 9 shows an explanatory view of the valve seat portion of FIG. 8 viewed from the side.
In the embodiment of the present invention, each of the valve seats 42 provided on the valve seat portion 41 of the valve seat plate 4 has two annular projections 421, and each of the annular projections 421 contains the It has a valve seat surface through which the discharge passage 45 opens.

前記２つの環状凸部４２１は、それぞれ楕円錐台の頂面のそれぞれに前記排出路４５が開口する。前記楕円錐台の傾斜角度は、例えば６０度とすることができる。
また、前記２つの環状凸部４２１は、前記弁座４２の幅方向に並設され、前記排出路４５は、前記弁座４２の幅方向に直交する長さ方向に沿って前記２つの環状凸部４２１内にそれぞれスリット状に開口する。 The two annular protrusions 421 have the discharge passages 45 opening at the top surfaces of the truncated elliptical cones, respectively. The inclination angle of the truncated elliptical cone can be, for example, 60 degrees.
The two annular protrusions 421 are arranged side by side in the width direction of the valve seat 42 , and the discharge passage 45 extends along the length direction perpendicular to the width direction of the valve seat 42 . A slit-like opening is provided in each of the portions 421 .

本発明の実施の形態における圧電式バルブは、前記弁座４２が、２つの環状凸部４２１内にそれぞれ前記排出路４５が開口する弁座面を有するので、前記弁座４２の長さを短くした場合でも、前記２つの環状凸部４２１によって前記排出路４５における前記開口の周長を全体として長くすることができる。 In the piezoelectric valve according to the embodiment of the present invention, since the valve seat 42 has valve seat surfaces in which the discharge passages 45 are opened in the two annular protrusions 421, the length of the valve seat 42 can be shortened. Even in this case, the circumferential length of the opening in the discharge passage 45 can be lengthened by the two annular protrusions 421 as a whole.

また、本発明の実施の形態における圧電式バルブは、前記２つの環状凸部４２１が、前記弁座４２の幅方向に並設され、前記各排出路４５が、前記弁座４２の幅方向に直交する長さ方向に沿って前記２つの環状凸部４２１内にそれぞれスリット状に開口するので、前記弁座４２の長さを短くした場合でも、前記２つの環状凸部４２１によって前記各排出路４５における前記開口の周長を全体として長くすることができる。 Further, in the piezoelectric valve according to the embodiment of the present invention, the two annular protrusions 421 are arranged side by side in the width direction of the valve seat 42, and the discharge passages 45 are arranged in the width direction of the valve seat 42. Since slit-like openings are formed in the two annular projections 421 along the length direction perpendicular to each other, even when the length of the valve seat 42 is shortened, the two annular projections 421 allow the respective discharge passages to be opened. The perimeter of the opening at 45 can be lengthened as a whole.

したがって、本発明の実施の形態における圧電式バルブによれば、アクチュエータ３に設けられる弁体３５が弁座プレート４に設けられる弁座４２に対して円弧運動により接離する場合であって、前記弁座４２の長さを短くした場合でも、開弁時に必要な圧縮気体の排出量を確保することが可能となる。 Therefore, according to the piezoelectric valve according to the embodiment of the present invention, when the valve element 35 provided on the actuator 3 moves toward and away from the valve seat 42 provided on the valve seat plate 4 by arcuate motion, Even when the length of the valve seat 42 is shortened, it is possible to secure the required discharge amount of the compressed gas when the valve is opened.

また、本発明の実施の形態における圧電式バルブは、前記弁座４２が、２つの環状凸部４２１内にそれぞれ前記排出路４５が開口する弁座面を有し、前記２つの環状凸部４２１は、それぞれ楕円錐台の頂面のそれぞれに前記排出路４５が開口するので、前記弁座面は、前記２つの環状凸部４２１の周囲が傾斜面となり、開弁時に前記２つの環状凸部４２１の周囲から前記排出路４５の前記開口に圧縮気体を取り込む際の抵抗を小さくすることができる。 Further, in the piezoelectric valve according to the embodiment of the present invention, the valve seat 42 has valve seat surfaces in which the discharge passages 45 are opened in the two annular projections 421 respectively, and the two annular projections 421 Since the discharge passage 45 opens at each of the top surfaces of the truncated elliptical cones, the valve seat surface is inclined around the two annular protrusions 421, and when the valve is opened, the two annular protrusions 421 are inclined. It is possible to reduce the resistance when the compressed gas is drawn into the opening of the discharge passage 45 from around 421 .

したがって、本発明の実施の形態における圧電式バルブによれば、アクチュエータ３に設けられる弁体３５が弁座プレート４に設けられる弁座４２に対して円弧運動により接離する場合であって、前記弁座４２の長さを短くした場合でも、開弁時に必要な圧縮気体の排出量を確保することが可能となる。 Therefore, according to the piezoelectric valve according to the embodiment of the present invention, when the valve element 35 provided on the actuator 3 moves toward and away from the valve seat 42 provided on the valve seat plate 4 by arcuate motion, Even when the length of the valve seat 42 is shortened, it is possible to secure the required discharge amount of the compressed gas when the valve is opened.

図１０は図８のＡ－Ａ断面図を示す。図１１は図９のＢ－Ｂ断面図を示す。
前記排出路４５は、前記２つの環状凸部４２１内にそれぞれスリット状に開口する弁座側流路４５１と、前記各弁座側流路４５１が直交状に交差して連通し前記弁座プレート４の前面に開口する１つの前面側流路４５２を有し、前記前面側流路４５２は前記各弁座側流路４５１の流路断面積（軸直断面積）の合計よりも大きなの流路断面積を有する。ここでは、前記各弁座側流路４５１と前記前面側流路４５２とが直交状に交差する場合を例としたが、両者が交差して連通するものであれば、必ずしも直交状に交差する必要はない。 FIG. 10 shows a cross-sectional view taken along line AA of FIG. FIG. 11 shows a cross-sectional view taken along line BB of FIG.
The discharge path 45 includes a valve seat side flow path 451 opening in a slit shape in each of the two annular projections 421 and the valve seat side flow path 451 orthogonally intersecting and communicating with the valve seat plate. 4, and the front side passage 452 has a flow passage larger than the sum of the flow passage cross-sectional areas (axis-perpendicular cross-sectional areas) of the respective valve seat side flow passages 451. It has a road cross-sectional area. Here, a case where the respective valve seat side flow paths 451 and the front side flow paths 452 intersect orthogonally is taken as an example, but if both intersect and communicate with each other, they will necessarily intersect orthogonally. No need.

図１１に示すように、前記前面側流路４５２の内面は、前記各弁座側流路４５１が交差する連通部４６において前記弁座面側に凸状をなし、前記各連通部４６間において凹状をなす形状とされる。 As shown in FIG. 11 , the inner surface of the front side flow path 452 forms a convex shape toward the valve seat surface side at the communicating portion 46 where the valve seat side flow paths 451 intersect. It has a concave shape.

本発明の実施の形態における圧電式バルブは、前記排出路４５が、前記２つの環状凸部４２１内にそれぞれスリット状に開口する弁座側流路４５１と、前記各弁座側流路４５１が交差して連通し前記弁座プレート４の前面に開口する１つの前面側流路４５２を有し、前記前面側流路４５２の内面が、前記各弁座側流路４５１が交差する連通部４６において前記弁座面側に凸状をなす形状とされるので、前記各弁座側流路４５１の長さＬ１が短くなり、開弁時に前記排出路４５に圧縮気体を取り込む際の前記弁座側流路４５１内における抵抗を小さくすることができる。 In the piezoelectric valve according to the embodiment of the present invention, the discharge passage 45 has a valve seat side passage 451 that opens into the two annular projections 421 in a slit shape, and each of the valve seat side passages 451 has A communicating portion 46 having one front side flow path 452 that intersects and communicates with the front surface of the valve seat plate 4, and the inner surface of the front side flow path 452 is the communication portion 46 where the valve seat side flow paths 451 intersect. , the length L1 of each valve-seat-side passage 451 is shortened, and the valve seat when taking in compressed gas into the discharge passage 45 when the valve is opened Resistance in the side channel 451 can be reduced.

また、本発明の実施の形態における圧電式バルブは、前記前面側流路４５２の内面が、前記各連通部４６間において前記弁座面側から凹状をなす形状とされるので、前記各環状凸部４２１間の溝４７の深さＬ２を深くして大きな空気溜まりを形成できるので、開弁時に前記弁座側流路４５１に取り込む圧縮気体の容量を確保することができる。 Further, in the piezoelectric valve according to the embodiment of the present invention, the inner surface of the front side flow path 452 is formed in a concave shape from the valve seat surface side between the communicating portions 46, so that each annular convex Since the depth L2 of the groove 47 between the portions 421 can be increased to form a large air pool, it is possible to ensure the capacity of the compressed gas to be taken into the valve seat side passage 451 when the valve is opened.

したがって、本発明の実施の形態における圧電式バルブによれば、アクチュエータ３に設けられる弁体３５が弁座プレート４に設けられる弁座４２に対して円弧運動により接離する場合であって、前記弁座４２の長さを短くした場合でも、開弁時に必要な圧縮気体の排出量を確保することが可能となる。 Therefore, according to the piezoelectric valve according to the embodiment of the present invention, when the valve element 35 provided on the actuator 3 moves toward and away from the valve seat 42 provided on the valve seat plate 4 by arcuate motion, Even when the length of the valve seat 42 is shortened, it is possible to secure the required discharge amount of the compressed gas when the valve is opened.

上記本発明の実施の形態において、２つの環状凸部４２１は、それぞれ楕円錐台の頂面のそれぞれに前記弁座側流路４５１（排出路４５）が開口するものであったが、これに限定されるものでなく、例えば角錐台など、他の形状の錐台の頂面に前記弁座側流路４５１（排出路４５）が開口するものとすることができる。 In the above-described embodiment of the present invention, the two annular projections 421 have the valve-seat-side passages 451 (exhaust passages 45) opening to the respective top surfaces of the truncated elliptical cones. The valve-seat-side channel 451 (discharge channel 45) may be opened to the top surface of a truncated pyramid having another shape, such as a truncated pyramid.

上記本発明の実施の形態において、前記弁座４２には、２つの環状凸部４２１が設けられるものであったが、３つ以上の環状凸部を設けることもできる。 In the above-described embodiment of the present invention, the valve seat 42 is provided with two annular protrusions 421, but it is also possible to provide three or more annular protrusions.

本発明の実施の形態において、前記弁座４２には、１つの環状凸部４２１を設けるものとすることもできる。
前記弁座４２に１つの環状凸部４２１を設ける場合でも、開弁時に前記環状凸部４２１の周囲から前記排出路４５における前記開口に圧縮気体を取り込む際の抵抗を小さくすることができるので、アクチュエータ３に設けられる弁体３５が弁座プレート４に設けられる弁座４２に対して円弧運動により接離する場合であって、前記弁体と前記弁座の長さを短くした場合でも、開弁時に必要な圧縮気体の排出量を確保することが可能となる。 In the embodiment of the present invention, the valve seat 42 may be provided with one annular protrusion 421 .
Even if the valve seat 42 is provided with one annular projection 421, it is possible to reduce the resistance when the compressed gas is taken into the opening of the discharge passage 45 from the periphery of the annular projection 421 when the valve is opened. When the valve body 35 provided on the actuator 3 moves toward and away from the valve seat 42 provided on the valve seat plate 4 by arcuate motion, even if the lengths of the valve body and the valve seat are shortened, the opening It becomes possible to ensure the discharge amount of the compressed gas necessary for valve operation.

上記本発明の実施の形態において、前記圧電式バルブ１は、前記圧電素子３２に電圧が印加されていない状態で、弁体３５が弁座４２に着座することとしたが、駆動部から供給される電圧等の極性を変更することで、前記圧電素子３２に電圧が印加されていない状態で、弁体３５が弁座４２から離間した状態とすることもできる。 In the above-described embodiment of the present invention, the piezoelectric valve 1 is configured such that the valve element 35 is seated on the valve seat 42 when no voltage is applied to the piezoelectric element 32. By changing the polarity of the voltage applied to the piezoelectric element 32, the valve body 35 can be separated from the valve seat 42 when no voltage is applied to the piezoelectric element 32. FIG.

上記本発明の実施の形態において、前記圧電式バルブ１は、バルブ本体２の内部に４つのアクチュエータ３を固定した弁座プレート４を配設し、前記バルブ本体２の前面に４つの気体排出口２２が開口することとしたが、これに限定されるものでなく、バルブ本体２に１つ以上のアクチュエータを固定した弁座プレートを配設することができる。 In the above-described embodiment of the present invention, the piezoelectric valve 1 has a valve seat plate 4 to which four actuators 3 are fixed inside the valve body 2, and four gas discharge ports on the front surface of the valve body 2. 22 is open, but the present invention is not limited to this, and the valve body 2 may be provided with a valve seat plate to which one or more actuators are fixed.

上記本発明の実施の形態では、４つのアクチュエータ３を取り付けることが可能な弁座プレート４を例として説明したが、これに限定されるものでなく、例えば、一面側にのみ２つのアクチュエータ３を取り付けることが可能な弁座プレートや、一面側にのみ１つのアクチュエータ３を取り付けることが可能な弁座プレートを用いることもできる。 In the above embodiment of the present invention, the valve seat plate 4 to which four actuators 3 can be attached has been described as an example, but the present invention is not limited to this. An attachable valve seat plate or a valve seat plate to which one actuator 3 can be attached only on one side can also be used.

以上、本発明の実施の形態について説明したが、本発明は、上記実施の形態に限定されるものでなく、発明の範囲を逸脱しない限りにおいてその構成を適宜変更することができる。 Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and its configuration can be changed as appropriate without departing from the scope of the invention.

本発明の圧電式バルブは、アクチュエータに設けられる弁体が弁座プレートに設けられる弁座に対して円弧運動により接離する場合であって、前記弁体と前記弁座の長さを短くした場合でも、開弁時に必要な圧縮気体の排出量を確保することが可能なものであり、極めて有用である。 In the piezoelectric valve of the present invention, the valve disc provided in the actuator moves toward and away from the valve seat provided in the valve seat plate by arcuate motion, and the length of the valve disc and the valve seat is shortened. Even in such a case, it is possible to secure the necessary amount of compressed gas to be discharged when the valve is opened, which is extremely useful.

１ 圧電式バルブ
２ バルブ本体（本体ケース）
２１ 気体供給口
２２ 気体排出口
３ アクチュエータ
３１ 基部
３２ 圧電素子
３３ 支持部
３３１ くびれ部
３４ 作用部
３５ 弁体
３６ 圧縮部材
３８１ 取付け穴
３８２ 取付け穴
４ 弁座プレート
４１ 弁座部
４２ 弁座
４２１ 環状凸部
４３ 取り付け部
４４ 取り付け部
４５ 排出路
４５１ 弁座側流路
４５２ 前面側流路（主流路）
４６ 連通部
４７ 溝
６ カバー体
Ｌ１ 弁座側流路の長さ
Ｌ２ 溝の深さ

1 Piezoelectric valve 2 Valve body (body case)
21 Gas supply port 22 Gas discharge port 3 Actuator 31 Base portion 32 Piezoelectric element 33 Support portion 331 Constricted portion 34 Action portion 35 Valve body 36 Compression member 381 Mounting hole 382 Mounting hole 4 Valve seat plate 41 Valve seat portion 42 Valve seat 421 Annular convex Part 43 Mounting part 44 Mounting part 45 Discharge path 451 Valve seat side flow path 452 Front side flow path (main flow path)
46 Communicating portion 47 Groove 6 Cover body L1 Valve seat side channel length L2 Groove depth

Claims (6)

弁体を駆動するアクチュエータと、
前記弁体と接離する弁座及び排出路を有し、前記アクチュエータを固定する弁座プレートと、
前記弁座プレートを収納する本体ケースと、を備える圧電式バルブであって、
前記アクチュエータは、
前記弁座プレートに固定される基部と、
前記基部の取付け面に一端部が接続され、第１長手方向に延びる圧電素子と、
前記基部に一体に設けられ、前記圧電素子と並んで前記第１長手方向と交差する第２長手方向に延びる支持部と、
前記圧電素子の他端部及び前記支持部の先端部と接続され、前記圧電素子の伸縮に伴って、前記第１長手方向及び前記第２長手方向それぞれと異なる方向に変位する作用部と、
前記作用部の前記変位する方向の側に設けられ、前記作用部の変位によって駆動される前記弁体と、を備え、
前記本体ケースは、
圧縮気体が供給される気体供給口と、
前記気体供給口から供給された圧縮気体を前記弁体と前記弁座との離間によって前記弁座プレートの前記排出路を介して排出する気体排出口と、を備える圧電式バルブにおいて、
前記弁座は、複数の環状凸部内にそれぞれ前記排出路の一端が開口する弁座面を有し、
前記複数の環状凸部は、複数の錐台の頂面にそれぞれ前記排出路の一端が開口し、
前記弁体は、前記弁座面の前記複数の環状凸部と接離することを特徴とする圧電式バルブ。 an actuator that drives the valve body;
a valve seat plate that has a valve seat and a discharge passage contacting and separating from the valve body and that fixes the actuator;
A piezoelectric valve comprising a body case that houses the valve seat plate,
The actuator is
a base secured to the valve seat plate;
a piezoelectric element having one end connected to the mounting surface of the base and extending in a first longitudinal direction;
a support portion integrally provided with the base portion and extending in a second longitudinal direction parallel to the piezoelectric element and intersecting with the first longitudinal direction;
an action portion connected to the other end portion of the piezoelectric element and the tip portion of the support portion and displaced in directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts;
the valve body provided on the side of the action portion in the direction of displacement and driven by the displacement of the action portion;
The body case is
a gas supply port to which compressed gas is supplied;
a gas discharge port for discharging the compressed gas supplied from the gas supply port through the discharge passage of the valve seat plate due to the separation between the valve body and the valve seat,
the valve seat has a valve seat surface in which one end of the discharge passage opens into a plurality of annular projections;
one end of each of the discharge passages is opened to the top surface of each of the plurality of frustums of the plurality of annular protrusions;
A piezoelectric valve, wherein the valve body contacts and separates from the plurality of annular projections of the valve seat surface. 前記複数の環状凸部は、前記弁座の幅方向に並設され、前記排出路の一端は、前記弁座の長さ方向に沿って前記複数の環状凸部内にそれぞれスリット状に開口する請求項１に記載の圧電式バルブ。 The plurality of annular protrusions are arranged side by side in the width direction of the valve seat, and one end of the discharge passage opens into the plurality of annular protrusions in a slit shape along the length direction of the valve seat. Item 1. The piezoelectric valve according to item 1. 前記排出路は、前記複数の環状凸部内にそれぞれ開口する複数の弁座側流路と、前記各弁座側流路が交差して連通し前記弁座プレートの表面に開口する１つの主流路とを有し、
前記主流路の内面は、前記各弁座側流路が交差する連通部において前記弁座面側に凸状をなし、前記各連通部間において凹状をなす形状とする請求項１又は２に記載の圧電式バルブ。 The discharge passage includes a plurality of valve-seat-side passages each opening into the plurality of annular protrusions, and one main passage that is open to the surface of the valve-seat plate by crossing and communicating with the respective valve-seat-side passages. and
3. The inner surface of the main flow passage according to claim 1, wherein the inner surface of the main flow passage has a convex shape toward the valve seat surface at the communication portion where the valve seat side flow passages intersect, and a concave shape between the communication portions. piezoelectric valve. 弁体を駆動するアクチュエータと、
前記弁体と接離する弁座及び排出路を有し、前記アクチュエータを固定する弁座プレートと、
前記弁座プレートを収納する本体ケースと、を備える圧電式バルブであって、
前記アクチュエータは、
前記弁座プレートに固定される基部と、
前記基部の取付け面に一端部が接続され、第１長手方向に延びる圧電素子と、
前記基部に一体に設けられ、前記圧電素子と並んで前記第１長手方向と交差する第２長手方向に延びる支持部と、
前記圧電素子の他端部及び前記支持部の先端部と接続され、前記圧電素子の伸縮に伴って、前記第１長手方向及び前記第２長手方向それぞれと異なる方向に変位する作用部と、
前記作用部の前記変位する方向の側に設けられ、前記作用部の変位によって駆動される前記弁体と、を備え、
前記本体ケースは、
圧縮気体が供給される気体供給口と、
前記気体供給口から供給された圧縮気体を前記弁体と前記弁座との離間によって前記弁座プレートの前記排出路を介して排出する気体排出口と、を備える圧電式バルブにおいて、
前記弁座は、環状凸部内に前記排出路の一端が開口する弁座面を有し、
前記環状凸部は、錐台の頂面に前記排出路の一端が開口し、
前記弁体は、前記弁座面の前記環状凸部と接離することを特徴とする圧電式バルブ。 an actuator that drives the valve body;
a valve seat plate that has a valve seat and a discharge passage contacting and separating from the valve body and that fixes the actuator;
A piezoelectric valve comprising a body case that houses the valve seat plate,
The actuator is
a base secured to the valve seat plate;
a piezoelectric element having one end connected to the mounting surface of the base and extending in a first longitudinal direction;
a support portion integrally provided with the base portion and extending in a second longitudinal direction parallel to the piezoelectric element and intersecting with the first longitudinal direction;
an action portion connected to the other end portion of the piezoelectric element and the tip portion of the support portion and displaced in directions different from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts;
the valve body provided on the side of the action portion in the direction of displacement and driven by the displacement of the action portion;
The body case is
a gas supply port to which compressed gas is supplied;
a gas discharge port for discharging the compressed gas supplied from the gas supply port through the discharge passage of the valve seat plate due to the separation between the valve body and the valve seat,
The valve seat has a valve seat surface in which one end of the discharge passage opens in the annular protrusion,
one end of the discharge passage is open to the top surface of the frustum of the annular projection;
A piezoelectric valve, wherein the valve body contacts and separates from the annular convex portion of the valve seat surface. 前記支持部は、前記第２長手方向に延びる中間部分にくびれ部を有する請求項１乃至４のいずれかに記載の圧電式バルブ。 5. The piezoelectric valve according to any one of claims 1 to 4, wherein said support portion has a constricted portion at an intermediate portion extending in said second longitudinal direction. 前記弁座プレートは、前記弁座及び前記排出路が形成される弁座部を有し、前記弁座部の正面側又は背面側の少なくとも一面に前記弁座が設けられ、
前記アクチュエータは、前記弁体が前記弁座に対峙すべく前記弁座プレートに固定される請求項１乃至５のいずれかに記載の圧電式バルブ。

The valve seat plate has a valve seat portion in which the valve seat and the discharge passage are formed, and the valve seat is provided on at least one surface on the front side or the back side of the valve seat portion,
6. The piezoelectric valve according to claim 1, wherein the actuator is fixed to the valve seat plate so that the valve body faces the valve seat.
JP2021132431A 2021-08-16 2021-08-16 piezoelectric valve Pending JP2023026958A (en)

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JPH074534A (en) * 1993-06-18 1995-01-10 Hitachi Metals Ltd Automatic regulating balve
JP6678938B2 (en) * 2015-12-11 2020-04-15 株式会社ノーリツ Valve device and hot water supply device including the same
JP7001296B2 (en) * 2020-01-08 2022-01-19 有限会社メカノトランスフォーマ Displacement expansion mechanism, actuator, polishing device, electronic component processing device, dispenser, and air valve

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