JP2023018763A - Plated film, composite film, sliding component, method for manufacturing plated film, method for manufacturing composite film and method for manufacturing sliding component - Google Patents

Plated film, composite film, sliding component, method for manufacturing plated film, method for manufacturing composite film and method for manufacturing sliding component Download PDF

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JP2023018763A
JP2023018763A JP2021123010A JP2021123010A JP2023018763A JP 2023018763 A JP2023018763 A JP 2023018763A JP 2021123010 A JP2021123010 A JP 2021123010A JP 2021123010 A JP2021123010 A JP 2021123010A JP 2023018763 A JP2023018763 A JP 2023018763A
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film
plating film
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顕 森田
Akira Morita
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Japan Kanigen Co Ltd
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Abstract

To provide: a plated film capable of preventing a surface shape increasing the surface area of the plated film from being degraded by a load; a composite film; a sliding component; a method for manufacturing the plated film; a method for manufacturing the composite film; and a method for manufacturing the sliding component.SOLUTION: A plated film 13 provided on the surface of a material 11 to be plated includes: a film part 14 including nickel or nickel alloy; and insulator or semiconductor inorganic compound particles 15 positioned in the inside of the film part 14. The surface of the film part 14 includes a smooth part 14A following the surface of the material 11 to be plated and a depression part 14B having a shape following at least a part of the appearance of the inorganic compound particle 15.SELECTED DRAWING: Figure 1

Description

本発明は、ニッケルまたはニッケル合金を含むめっき皮膜、当該めっき皮膜を含む複合皮膜、当該複合皮膜を備える摺動部品、めっき皮膜の製造方法、複合皮膜の製造方法、及び、摺動部品の製造方法に関する。 The present invention provides a plating film containing nickel or a nickel alloy, a composite film containing the plating film, a sliding component comprising the composite film, a method for producing the plating film, a method for producing the composite film, and a method for producing the sliding component. Regarding.

表面処理技術の分野では、耐摩耗性及び耐食性等の向上を目的として、ニッケルまたはニッケル合金めっきが用いられる。めっき皮膜における表面積の増加は、めっき皮膜上への樹脂接着時の接着強度の向上、塗膜との密着性の向上、触媒や潤滑剤等の担持量の増加、はんだ付け時のはんだ付け性の向上を実現する。めっき皮膜における表面積の増加技術の一例は、Ni-P(ニッケル-リン)めっき皮膜を酸に浸漬させることで、めっき皮膜に微細孔を形成する(例えば、特許文献1を参照)。 In the field of surface treatment technology, nickel or nickel alloy plating is used for the purpose of improving wear resistance and corrosion resistance. The increase in the surface area of the plating film improves the adhesion strength when the resin adheres to the plating film, improves the adhesion with the coating film, increases the amount of catalysts and lubricants carried, and improves the solderability during soldering. Realize improvement. One example of a technique for increasing the surface area of a plated film is to immerse a Ni—P (nickel-phosphorus) plated film in acid to form micropores in the plated film (see, for example, Patent Document 1).

特開平1-191789号公報JP-A-1-191789

一方、めっき皮膜を酸に浸漬させる方法は、めっき皮膜の表面全体を粗面化し、先細り形状を有した凸部を表面全体に点在させる。このような方法によって製造されためっき皮膜に荷重が加わると、表面に点在する先細り形状の凸部に荷重が集中することで凹凸形状が損なわれる。その結果、めっき皮膜の表面に設けた樹脂や塗膜等がめっき皮膜から剥離するおそれがある。 On the other hand, in the method of immersing the plating film in acid, the entire surface of the plating film is roughened and tapered protrusions are scattered over the entire surface. When a load is applied to a plated film manufactured by such a method, the load concentrates on the tapered convex portions scattered on the surface, which impairs the irregular shape. As a result, there is a risk that the resin, coating film, etc., provided on the surface of the plating film will peel off from the plating film.

上記課題を解決するためのめっき皮膜は、被めっき材の表面に設けられためっき皮膜であって、ニッケルまたはニッケル合金を含む皮膜部と、前記皮膜部の内部に位置する絶縁体または半導体の無機化合物粒子と、を備え、前記皮膜部の表面は、前記被めっき材の表面に追従する平滑部と、前記無機化合物粒子の外形の少なくとも一部に倣った形状を有する凹部と、を備える。 The plating film for solving the above problems is a plating film provided on the surface of a material to be plated, comprising a film portion containing nickel or a nickel alloy, and an insulator or semiconductor inorganic material located inside the film portion. compound particles, and the surface of the film portion includes a smooth portion that follows the surface of the material to be plated, and a concave portion having a shape that follows at least a part of the outer shape of the inorganic compound particles.

上記構成によれば、皮膜部の表面が凹部を備えるため、凹部を備えない皮膜部の表面と比べて、皮膜部の表面積が増加する。これにより、めっき皮膜上への樹脂接着時の接着強度向上、塗膜との密着性の向上、触媒や潤滑剤等の担持量の増加、はんだ付け時のはんだ付け性の向上等が可能となる。また、皮膜部の表面が被めっき材の表面に追従する平滑部を備えるため、例えば、被めっき材の表面に追従しない凸形状がめっき皮膜の表面に点在している場合と比較して、皮膜部の表面に加えられた荷重がより大きな面積で分散される。これにより、めっき皮膜の表面形状の劣化を抑制できる。 According to the above configuration, since the surface of the coating portion is provided with the recesses, the surface area of the coating portion is increased compared to the surface of the coating portion without the recesses. As a result, it is possible to improve adhesive strength when resin is adhered to the plating film, improve adhesion with the coating film, increase the amount of catalysts and lubricants supported, and improve solderability during soldering. . In addition, since the surface of the film portion has a smooth portion that follows the surface of the material to be plated, for example, compared to the case where the surface of the plating film is dotted with convex shapes that do not follow the surface of the material to be plated, The load applied to the surface of the coating is distributed over a larger area. Thereby, deterioration of the surface shape of the plating film can be suppressed.

上記めっき皮膜において、前記凹部は、前記平滑部に対して1μm以上の深さを有し、前記めっき皮膜の厚さ方向を含む前記めっき皮膜の断面において、前記凹部の個数は、前記皮膜部の表面に沿う一次元方向において、100μmあたり1個以上100個以下であり、前記凹部の開口幅の総和は、前記一次元方向において、100μmあたり2μm以上50μm以下であることが好ましい。また、上記めっき皮膜において、前記皮膜部の表面において、前記凹部の面積が2%以上50%以下であることが好ましい。上記各構成によれば、皮膜部の表面において、平滑部の面積を十分に確保することでめっき皮膜の表面形状の劣化を好適に抑制しつつ、凹部によってめっき皮膜の表面積を増加させることができる。 In the plating film, the recesses have a depth of 1 μm or more with respect to the smooth portion, and the number of recesses in the cross section of the plating film including the thickness direction of the plating film is the same as that of the film portion. It is preferable that the number is 1 or more and 100 or less per 100 μm in the one-dimensional direction along the surface, and the total opening width of the recesses is 2 μm or more and 50 μm or less per 100 μm in the one-dimensional direction. Moreover, in the plating film, it is preferable that the surface area of the concave portion is 2% or more and 50% or less on the surface of the film portion. According to each of the above configurations, on the surface of the film portion, the surface area of the plated film can be increased by the recesses while appropriately suppressing deterioration of the surface shape of the plated film by ensuring a sufficient area of the smooth portion. .

上記課題を解決するための複合皮膜は、上記何れかのめっき皮膜と、前記めっき皮膜の表面に位置する潤滑剤から構成される表面層と、を備える。上記構成によれば、平滑部と凹部とを備えるめっき皮膜の表面に潤滑剤から構成される表面層を設けることで、平滑部における摺動性を高めることができる。また、摺動に伴って平滑部上の潤滑剤が減少した場合でも、凹部に充填された潤滑剤が供給されることで、めっき皮膜表面の摺動性能が維持される。また、めっき皮膜上の凹部によって、潤滑剤の保持力を高めることができる。 A composite film for solving the above problems includes any of the plating films described above and a surface layer composed of a lubricant located on the surface of the plating film. According to the above configuration, by providing a surface layer made of a lubricant on the surface of the plating film having the smooth portion and the concave portions, the slidability in the smooth portion can be enhanced. In addition, even when the lubricant on the smooth portion decreases due to sliding, the lubricant filled in the recesses is supplied to maintain the sliding performance of the plating film surface. In addition, the holding power of the lubricant can be enhanced by the concave portions on the plating film.

上記複合皮膜において、前記表面層は、前記潤滑剤として層状格子構造物を含むことが好ましい。層状格子構造物を含む潤滑剤は、他の固体潤滑剤、液体潤滑剤、及び、半固体状潤滑剤と比較して、摺動に際してめっき皮膜の表面から固体潤滑剤が減少しにくい。したがって、表面層が潤滑剤として層状格子構造物を含むことで、複合皮膜が設けられた部品が他の部品と摺動した際にも、摺動性能を好適に持続させることができる。 In the above composite coating, the surface layer preferably contains a layered lattice structure as the lubricant. A lubricant containing a layered lattice structure is less likely to reduce the solid lubricant from the surface of the plated film during sliding, compared to other solid lubricants, liquid lubricants, and semi-solid lubricants. Therefore, by including the layered lattice structure as a lubricant in the surface layer, even when the part provided with the composite film slides against another part, the sliding performance can be preferably maintained.

上記課題を解決するための摺動部品は、上記何れかの複合皮膜を備え、前記複合皮膜の表面が摺動対象に摺接する面である。上記構成によれば、平滑部と凹部とを備える皮膜部を有するめっき皮膜上に層状格子構造物を含む潤滑剤から構成される表面層が設けられた複合皮膜を摺動部品の表面に備えることで、摺動部品の摺動性能を高めることができる。 A sliding component for solving the above problems is provided with any one of the above composite coatings, the surface of the composite coating being in sliding contact with a sliding object. According to the above configuration, the surface of the sliding component is provided with the composite coating in which the surface layer composed of the lubricant containing the layered lattice structure is provided on the plating coating having the coating portion having the smooth portion and the concave portion. Therefore, the sliding performance of the sliding parts can be improved.

上記課題を解決するためのめっき皮膜の製造方法は、ニッケル成分が溶解し、かつ、絶縁体または半導体の無機化合物粒子が分散しためっき液を用いて、無電解めっき法または電気めっき法によって、前記ニッケル成分に由来したニッケルまたはニッケル合金を含む皮膜部を被めっき材の表面に析出させることで、前記皮膜部の内部及び表面に前記無機化合物粒子が共析しためっき皮膜を前記被めっき材の表面に形成する第一工程と、前記めっき皮膜を、前記無機化合物粒子が可溶かつ前記皮膜部が不溶な溶液に接触させることによって、前記めっき皮膜の表面に存在する前記無機化合物粒子を溶解させて凹部を形成する第二工程と、を含む。 A method for producing a plating film for solving the above problems is to use a plating solution in which a nickel component is dissolved and inorganic compound particles of an insulator or a semiconductor are dispersed, by an electroless plating method or an electroplating method. By depositing a coating containing nickel or a nickel alloy derived from a nickel component on the surface of a material to be plated, a plating film in which the inorganic compound particles codeposit on the inside and surface of the coating is formed on the surface of the material to be plated. and the plating film is contacted with a solution in which the inorganic compound particles are soluble and the film portion is insoluble, thereby dissolving the inorganic compound particles present on the surface of the plating film. and a second step of forming a recess.

上記製造方法によれば、第一工程において、被めっき材に皮膜部と無機化合物粒子とを含むめっき皮膜が形成され、第二工程において、めっき皮膜の表面に存在する無機化合物粒子が溶解される。その結果、めっき皮膜の表面のうち無機化合物粒子が存在する箇所には、無機化合物粒子の外形に倣う形状を有する凹部が形成される。これにより、めっき皮膜上への樹脂接着時の接着強度の向上、塗膜との密着性の向上、触媒や固体潤滑剤等の担持量の増加、はんだ付け時のはんだ付け性の向上等が可能となる。また、めっき皮膜の表面のうち無機化合物粒子が存在しない箇所には、平滑な表面である平滑部が形成される。これにより、例えば、被めっき材の表面に追従しない凸形状がめっき皮膜の表面に点在している場合と比較して、皮膜部の表面に加えられた荷重がより大きな面積で分散される。したがって、めっき皮膜の表面形状の劣化を抑制できる。 According to the above manufacturing method, in the first step, a plating film containing a film portion and inorganic compound particles is formed on the material to be plated, and in the second step, the inorganic compound particles present on the surface of the plating film are dissolved. . As a result, recesses having a shape following the outer shape of the inorganic compound particles are formed on the surface of the plating film where the inorganic compound particles are present. As a result, it is possible to improve the adhesive strength when bonding resin to the plating film, improve the adhesion to the coating film, increase the amount of supported catalysts and solid lubricants, and improve solderability during soldering. becomes. In addition, a smooth portion, which is a smooth surface, is formed on a portion of the surface of the plating film where no inorganic compound particles are present. As a result, the load applied to the surface of the film portion is dispersed over a larger area than, for example, when the surface of the plating film is dotted with convex shapes that do not follow the surface of the material to be plated. Therefore, deterioration of the surface shape of the plated film can be suppressed.

上記課題を解決するための複合皮膜の製造方法は、上記めっき皮膜の製造方法を用いて、被めっき材の表面に前記めっき皮膜を形成させた後、潤滑剤からなる表面層を前記めっき皮膜の表面に形成する。 A method for producing a composite film for solving the above problems is to form the plating film on the surface of a material to be plated using the method for producing a plating film, and then apply a surface layer made of a lubricant to the plating film. form on the surface.

上記課題を解決するための摺動部品の製造方法は、上記複合皮膜の製造方法を用いて、摺動部品の表面に前記複合皮膜を形成する。 A method of manufacturing a sliding component for solving the above-mentioned problems uses the above-described method of manufacturing a composite coating to form the composite coating on the surface of the sliding component.

本発明によれば、めっき皮膜の表面積を増加させる表面形状について荷重による劣化を抑制できる。 According to the present invention, deterioration due to load can be suppressed for the surface shape that increases the surface area of the plating film.

図1は、摺動部品の断面図である。FIG. 1 is a cross-sectional view of a sliding component. 図2は、複合皮膜の製造方法における第1工程において、被めっき材に形成されためっき皮膜の断面図である。FIG. 2 is a cross-sectional view of a plating film formed on a material to be plated in the first step in the method of manufacturing a composite film. 図3は、第1工程におけるめっき液の液面に対する被めっき材の角度と、めっき皮膜の表面における無機化合物粒子の表面積比率との関係を示すグラフである。FIG. 3 is a graph showing the relationship between the angle of the material to be plated with respect to the surface of the plating solution in the first step and the surface area ratio of the inorganic compound particles on the surface of the plating film. 図4は、複合皮膜の製造方法における第2工程において、めっき皮膜の表面に露出した無機化合物粒子が除去されためっき皮膜の断面図である。FIG. 4 is a cross-sectional view of a plating film from which inorganic compound particles exposed on the surface of the plating film have been removed in the second step of the method for producing a composite film. 実施例1において、めっき皮膜の表面に露出した無機化合物粒子が除去されためっき皮膜表面のSEM画像(二次電子像)である。1 is an SEM image (secondary electron image) of the surface of a plating film from which inorganic compound particles exposed on the surface of the plating film have been removed in Example 1. FIG. 実施例1において、めっき皮膜形成後、かつ、無機化合物粒子を除去する前の状態におけるめっき皮膜表面のSEM画像(反射電子像)を二値化した画像である。1 is a binarized SEM image (backscattered electron image) of the surface of a plating film after forming the plating film and before removing the inorganic compound particles in Example 1. FIG. 実施例1において、めっき皮膜の表面に露出した無機化合物粒子が除去されためっき皮膜断面のSEM画像(二次電子像)である。1 is an SEM image (secondary electron image) of a section of a plating film from which inorganic compound particles exposed on the surface of the plating film have been removed in Example 1. FIG.

以下、本発明の一実施形態について図1~図4を参照して説明する。
[摺動部品]
図1に示すように、摺動部品10は、例えば、自動車のエンジンまたはパワートレイン等を構成する部品である。具体的に、摺動部品10は、エンジンのピストンやシリンダ、軸受け、摺動軸としてのシャフト、ブランジャポンプ、ワッシャ等の各種工業製品を構成する部品である。
An embodiment of the present invention will be described below with reference to FIGS. 1 to 4. FIG.
[Sliding parts]
As shown in FIG. 1, the sliding component 10 is, for example, a component that constitutes an automobile engine, power train, or the like. Specifically, the sliding parts 10 are parts that constitute various industrial products such as engine pistons and cylinders, bearings, shafts as sliding axes, plunger pumps, and washers.

摺動部品10は、平面状、曲面状、または、球面状の平滑な表面を有した被めっき材11を備える。被めっき材11は、例えば、鉄鋼、銅合金、アルミニウム合金等の金属材料である。なお、被めっき材11は、金属材料に限定されず、ガラスまたは樹脂等の非金属材料でもよい。 The sliding part 10 includes a material to be plated 11 having a planar, curved, or spherical smooth surface. The material to be plated 11 is, for example, a metal material such as steel, copper alloy, or aluminum alloy. In addition, the material to be plated 11 is not limited to a metal material, and may be a non-metal material such as glass or resin.

被めっき材11の表面には、複合皮膜12が設けられる。複合皮膜12の表面は、任意の摺動対象に摺接する面である。複合皮膜12は、被めっき材11の表面に位置するめっき皮膜13と、めっき皮膜13の表面に位置する表面層16とを備える。 A composite film 12 is provided on the surface of the material 11 to be plated. The surface of the composite film 12 is a surface that comes into sliding contact with an arbitrary sliding object. The composite film 12 includes a plated film 13 positioned on the surface of the material to be plated 11 and a surface layer 16 positioned on the surface of the plated film 13 .

[めっき皮膜]
めっき皮膜13は、例えば、無電解めっき法または電気めっき法によって形成される層である。めっき皮膜13は、ニッケルまたはニッケル合金を含む皮膜部14と、皮膜部14とは異なる成分を有する粒子である無機化合物粒子15とを備える。めっき皮膜13の形成に用いられるめっき液は、ニッケル成分と、無機化合物粒子15とを含む。めっき皮膜13を形成するめっき法は、皮膜部14と無機化合物粒子15との共析である。めっき皮膜13を形成する共析は、ニッケル成分に由来する皮膜部14を被めっき材11の表面に析出させながら、無機化合物粒子15を皮膜部14の表面及び内部に取り込ませる。なお、めっき皮膜13のめっき厚は、例えば、3μm以上30μm以下であるが、3μm未満でもよいし、30μm超であってもよい。
[Plating film]
The plating film 13 is a layer formed by electroless plating or electroplating, for example. The plated film 13 includes a film portion 14 containing nickel or a nickel alloy, and inorganic compound particles 15 which are particles having a different component from the film portion 14 . A plating solution used for forming the plating film 13 contains a nickel component and inorganic compound particles 15 . A plating method for forming the plating film 13 is co-deposition of the film portion 14 and the inorganic compound particles 15 . The eutectoid forming the plating film 13 causes the inorganic compound particles 15 to be incorporated into the surface and inside of the film portion 14 while depositing the film portion 14 derived from the nickel component on the surface of the material to be plated 11 . The plating thickness of the plating film 13 is, for example, 3 μm or more and 30 μm or less, but may be less than 3 μm or more than 30 μm.

皮膜部14の表面は、平滑部14Aと、凹部14Bとを備える。
平滑部14Aは、被めっき材11の表面に追従する。平滑部14Aは、被めっき材11の表面と同じ程度に平滑、あるいは被めっき材11の表面よりも平滑な面である。平滑部14Aは、皮膜部14の表面のなかで凹部14Bに分断されない1つの面である。皮膜部14の表面は、平滑部14Aを海とし、凹部14Bを島とする海島構造を有する。
The surface of the coating portion 14 includes a smooth portion 14A and recesses 14B.
The smooth portion 14A follows the surface of the material 11 to be plated. The smooth portion 14A is a surface that is as smooth as the surface of the material 11 to be plated or smoother than the surface of the material 11 to be plated. The smooth portion 14A is one surface of the surface of the coating portion 14 that is not divided into the recesses 14B. The surface of the coating portion 14 has a sea-island structure in which the smooth portion 14A is the sea and the concave portion 14B is the island.

凹部14Bは、無機化合物粒子15の外形の少なくとも一部に倣った形状を有する。例えば、無機化合物粒子15が結晶体である場合、無機化合物粒子15の外形は、無機化合物粒子15に固有の結晶面を有する。無機化合物粒子15の外形が結晶面を有する場合、凹部14Bを区切る面は、無機化合物粒子15の結晶面を反映した平面を含む。無機化合物粒子15が非結晶性の球状体である場合、無機化合物粒子15の外形は、小さい球面を有する。無機化合物粒子15の外形が球面を有する場合、凹部14Bを区切る面は、無機化合物粒子15の球面の少なくとも一部を反映した球面を有する。無機化合物粒子15が先細る外形面を有した針状体である場合、凹部14Bを区切る面は、無機化合物粒子15の先細る外形面の少なくとも一部を反映した先細る形状を有する。 The concave portion 14B has a shape following at least part of the outer shape of the inorganic compound particles 15 . For example, when the inorganic compound particles 15 are crystalline, the outer shape of the inorganic compound particles 15 has crystal planes unique to the inorganic compound particles 15 . When the outer shape of the inorganic compound particles 15 has crystal planes, the planes defining the recesses 14B include planes reflecting the crystal planes of the inorganic compound particles 15 . When the inorganic compound particles 15 are amorphous spherical bodies, the outer shape of the inorganic compound particles 15 has a small spherical surface. When the outer shape of the inorganic compound particle 15 has a spherical surface, the surface defining the concave portion 14B has a spherical surface that reflects at least part of the spherical surface of the inorganic compound particle 15 . When the inorganic compound particle 15 is a needle-like body having a tapered outer surface, the surface that separates the recess 14B has a tapered shape that reflects at least part of the tapered outer surface of the inorganic compound particle 15 .

凹部14Bは、めっき皮膜13の形成において、平滑部14Aと共析された無機化合物粒子15を皮膜部14の表面から除去することで形成される。皮膜部14の表面が凹部14Bを備える構成は、皮膜部14の表面が凹部14Bを備えない構成と比べて、皮膜部14の表面積を増大させる。また、皮膜部14に加えられた荷重を平滑部14Aが受けることで、皮膜部14の表面が先細りの凸形状を備える構成と比べて、より大きな面積で荷重を分散できるため、めっき皮膜13の表面形状の劣化が抑制される。 The concave portions 14B are formed by removing the inorganic compound particles 15 codeposited with the smooth portions 14A from the surface of the coating portion 14 in the formation of the plated coating 13 . The configuration in which the surface of the coating portion 14 includes the concave portions 14B increases the surface area of the coating portion 14 compared to the configuration in which the surface of the coating portion 14 does not include the concave portions 14B. In addition, since the load applied to the coating portion 14 is received by the smooth portion 14A, the load can be dispersed over a larger area than when the surface of the coating portion 14 has a tapered convex shape. Deterioration of the surface shape is suppressed.

無機化合物粒子15は、めっき液のpH範囲において溶解度が低く、かつめっき液に溶解してもめっき皮膜13の形成を妨げない粒子である。無機化合物粒子15は、めっき皮膜13の形成に際して、無機化合物粒子15が帯電せず皮膜部14の析出自体には寄与しない非導電性を有した絶縁体または半導体の粒子である。本実施形態では、pH範囲が4.0以上6.0以下程度の弱酸性のめっき液を用いる。無機化合物粒子15は、皮膜部14が不溶である酸性溶液またはアルカリ性溶液に可溶である。無機化合物粒子15を構成する無機化合物は、例えば、金属塩、金属水酸化物、珪素酸化物である。金属塩、あるいは金属水酸化物を構成する金属の一例は、カルシウム、マグネシウム、ストロンチウム、マンガン、チタンからなる群から選択されるいずれか一種である。金属酸塩の一例は、リン酸塩、シュウ酸塩、炭酸塩である。具体的に、無機化合物粒子15を構成する材料は、リン酸マンガン、リン酸カルシウム、リン酸ストロンチウム、リン酸チタン、水酸化ニッケル、シュウ酸ニッケル、炭酸マグネシウムからなる群から選択される少なくとも1種である。 The inorganic compound particles 15 are particles that have low solubility in the pH range of the plating solution and do not interfere with the formation of the plating film 13 even when dissolved in the plating solution. The inorganic compound particles 15 are non-conductive insulator or semiconductor particles that do not contribute to the deposition of the film portion 14 because the inorganic compound particles 15 are not charged when the plating film 13 is formed. In this embodiment, a weakly acidic plating solution having a pH range of approximately 4.0 to 6.0 is used. The inorganic compound particles 15 are soluble in an acidic solution or an alkaline solution in which the coating portion 14 is insoluble. Inorganic compounds forming the inorganic compound particles 15 are, for example, metal salts, metal hydroxides, and silicon oxides. An example of the metal constituting the metal salt or metal hydroxide is any one selected from the group consisting of calcium, magnesium, strontium, manganese and titanium. Examples of metal salts are phosphates, oxalates and carbonates. Specifically, the material constituting the inorganic compound particles 15 is at least one selected from the group consisting of manganese phosphate, calcium phosphate, strontium phosphate, titanium phosphate, nickel hydroxide, nickel oxalate, and magnesium carbonate. .

無機化合物粒子15の粒子径は、めっき皮膜13の厚さの要求値に対して、50%粒子径(メジアン径D50)で20%以上200%以下とすることが好ましい。上記範囲の粒子径を有した無機化合物粒子15を用いることで、皮膜部14の析出に際して無機化合物粒子15を好適に取り込ませることができ、かつ、皮膜部14に埋没し皮膜部14の表面に露出しない無機化合物粒子15を低減できる。 The particle diameter of the inorganic compound particles 15 is preferably 20% or more and 200% or less as a 50% particle diameter (median diameter D50) with respect to the required thickness of the plating film 13 . By using the inorganic compound particles 15 having a particle diameter within the above range, the inorganic compound particles 15 can be suitably incorporated during the deposition of the coating portion 14, and are embedded in the coating portion 14 and on the surface of the coating portion 14. The inorganic compound particles 15 that are not exposed can be reduced.

また、無機化合物粒子15のモース高度は、純ニッケル及びニッケル合金と同程度、例えば、純ニッケルよりも高く、かつ、ニッケル合金よりも低いことが好ましい。例えば、純ニッケルのモース硬度が約3.5であり、ニッケル合金の一例であるニッケルリン合金のモース硬度が約6であり、無機化合物粒子15の一例であるリン酸マンガンが約5(代表値)である。無機化合物粒子15として純ニッケル及びニッケル合金と同程度のモース硬度を有する物質を用いることで、無機化合物粒子15の共析に伴うめっき皮膜13のモース硬度の増減を抑制できる。なお、無機化合物粒子15として、純ニッケル及びニッケル合金よりも高いモース高度を有する物質を用いてもよい。 Moreover, the Mohs degree of the inorganic compound particles 15 is preferably comparable to that of pure nickel and nickel alloy, for example, higher than that of pure nickel and lower than that of nickel alloy. For example, the Mohs hardness of pure nickel is about 3.5, the Mohs hardness of a nickel phosphorus alloy, which is an example of a nickel alloy, is about 6, and the Mohs hardness of manganese phosphate, which is an example of the inorganic compound particles 15, is about 5 (typical value ). By using a substance having a Mohs hardness comparable to that of pure nickel and a nickel alloy as the inorganic compound particles 15 , it is possible to suppress increase or decrease in the Mohs hardness of the plating film 13 due to codeposition of the inorganic compound particles 15 . As the inorganic compound particles 15, a substance having a higher Mohs degree than pure nickel and nickel alloy may be used.

[表面層]
表面層16は、皮膜部14の平滑部14A上に存在するとともに、凹部14Bの内部にも充填される。表面層16は、一例として、潤滑剤から構成される。表面層16を構成する潤滑剤としては、液体潤滑剤(例えば潤滑油)、半固体状潤滑剤(例えばグリース)、固体潤滑剤の何れかが用いられる。固体潤滑剤としては、金属酸化物、金属水酸化物、金属硫化物、リン酸塩化合物等の無機化合物、スズ、鉛等の軟質金属、及び、樹脂であるPTFE等が挙げられる。表面層16は、摺動に伴って平滑部14A上の潤滑剤が減少した場合であっても、凹部14Bに充填された潤滑剤が供給されることで、摺動部品10の摺動性能が維持される。
[Surface layer]
The surface layer 16 exists on the smooth portion 14A of the coating portion 14 and also fills the inside of the concave portions 14B. The surface layer 16 is made of a lubricant, for example. As the lubricant forming the surface layer 16, any one of a liquid lubricant (eg, lubricating oil), a semi-solid lubricant (eg, grease), and a solid lubricant is used. Solid lubricants include metal oxides, metal hydroxides, metal sulfides, inorganic compounds such as phosphate compounds, soft metals such as tin and lead, and PTFE, which is a resin. Even if the lubricant on the smooth portion 14A is reduced due to sliding, the surface layer 16 is supplied with the lubricant filled in the concave portion 14B, so that the sliding performance of the sliding component 10 is improved. maintained.

本実施形態のように複合皮膜12が摺動部品10に使用される場合、表面層16としては、層状格子構造物を含む固体潤滑剤を用いることが好ましい。層状格子構造物は、層状格子のへき開により摺動性能を向上させる。層状格子構造物は、固体潤滑剤の一例であって、例えば、二硫化モリブデン、二硫化タングステン、グラファイト、窒化ホウ素、雲母等である。層状格子構造物は、摺動部品10が他の部品と摺動した際にも変形しながら平滑部14A上に留まることで摺動性能を持続させる。すなわち、層状格子構造物を含む固体潤滑剤は、他の固体潤滑剤、液体潤滑剤、及び、半固体状潤滑剤と比較して、摺動部品10が他の部品と摺動した際にめっき皮膜13の表面から固体潤滑剤が減少しにくい。また、層状格子構造物を含む固体潤滑剤は、仮にめっき皮膜13の表面から剥離した場合であっても摺動相手の部品表面に付着することで摺動性能を維持する。 When the composite coating 12 is used for the sliding component 10 as in this embodiment, it is preferable to use a solid lubricant containing a layered lattice structure as the surface layer 16 . The layered lattice structure improves sliding performance by cleaving the layered lattice. The layered lattice structure is an example of a solid lubricant such as molybdenum disulfide, tungsten disulfide, graphite, boron nitride, mica, and the like. The layered lattice structure maintains the sliding performance by staying on the smooth portion 14A while deforming even when the sliding part 10 slides on other parts. In other words, the solid lubricant containing the layered lattice structure is more likely to plate than other solid lubricants, liquid lubricants, and semi-solid lubricants when the sliding component 10 slides against other components. The solid lubricant is less likely to decrease from the surface of the film 13 . In addition, even if the solid lubricant containing the layered lattice structure is peeled off from the surface of the plating film 13, it adheres to the surface of the sliding partner and maintains the sliding performance.

[実施形態の作用]
以下、図2~図4を参照して、複合皮膜12の製造方法について説明する。
[第1工程]
図2に示すように、複合皮膜12の製造方法として、まず、無電解めっき法または電気めっき法によって、被めっき材11上にめっき皮膜13を形成する第1工程を行う。第1工程では、めっき液に含まれるニッケル成分に由来した皮膜部14が被めっき材11の表面に析出するとともに、析出した皮膜部14の表面及び内部に無機化合物粒子15が取り込まれて共析する。このとき、無機化合物粒子15が絶縁体または半導体の粒子であることで、めっき皮膜13の表面に露出した無機化合物粒子15の周囲に皮膜部14が析出することを抑制している。このため、皮膜部14の表面のうち無機化合物粒子15が露出した部分以外の部分は、被めっき材11の表面に追従した平滑部14Aとなる。以下、第1工程における無電解めっきまたは電気めっきの各々で用いるめっき液について説明する。
[Action of Embodiment]
A method for manufacturing the composite coating 12 will be described below with reference to FIGS. 2 to 4. FIG.
[First step]
As shown in FIG. 2, as a method of manufacturing the composite film 12, first, a first step of forming a plating film 13 on a material to be plated 11 by electroless plating or electroplating is performed. In the first step, the film portion 14 derived from the nickel component contained in the plating solution is deposited on the surface of the material to be plated 11, and the inorganic compound particles 15 are incorporated into the surface and inside of the deposited film portion 14 to eutectoid. do. At this time, since the inorganic compound particles 15 are insulator or semiconductor particles, deposition of the film portion 14 around the inorganic compound particles 15 exposed on the surface of the plating film 13 is suppressed. Therefore, the portion of the surface of the film portion 14 other than the portion where the inorganic compound particles 15 are exposed becomes a smooth portion 14A following the surface of the material 11 to be plated. The plating solution used for each of electroless plating and electroplating in the first step will be described below.

[無電解めっき]
無電解めっき法の場合に用いるめっき液は、無機化合物粒子15、ニッケル成分、還元剤、錯化剤、及び、pH調整剤を含む。無機化合物粒子15の添加量は、例えば、0.1g/L以上20g/L以下であり、好ましくは0.5g/L以上10g/L以下であり、より好ましくは1g/L以上5g/L以下である。なお、無機化合物粒子15は、めっき液に溶解せずめっき液中に分散した状態で存在する。
[Electroless plating]
A plating solution used for electroless plating contains inorganic compound particles 15, a nickel component, a reducing agent, a complexing agent, and a pH adjuster. The amount of the inorganic compound particles 15 added is, for example, 0.1 g/L or more and 20 g/L or less, preferably 0.5 g/L or more and 10 g/L or less, and more preferably 1 g/L or more and 5 g/L or less. is. Note that the inorganic compound particles 15 are present in a state of being dispersed in the plating solution without being dissolved in the plating solution.

ニッケル成分は、めっき液に可溶な水溶性ニッケル化合物が使用される。水溶性ニッケル化合物は、例えば、硫酸ニッケル、塩化ニッケル、スルファミン酸ニッケル、次亜リン酸ニッケルからなる群から選択される少なくとも1種である。特に、めっき液への溶解性が良好である点で硫酸ニッケルが好ましい。ニッケル成分の濃度は、例えば、0.5g/L以上50g/L以下である。 As the nickel component, a water-soluble nickel compound that is soluble in the plating solution is used. The water-soluble nickel compound is, for example, at least one selected from the group consisting of nickel sulfate, nickel chloride, nickel sulfamate, and nickel hypophosphite. In particular, nickel sulfate is preferable because it has good solubility in the plating solution. The concentration of the nickel component is, for example, 0.5 g/L or more and 50 g/L or less.

還元剤は、例えば、次亜リン酸、次亜リン酸塩(ナトリウム塩、カリウム塩、アンモニウム塩)、ジメチルアミンボラン、ヒドラジンからなる群から選択される少なくとも1種である。還元剤の濃度は、例えば、0.01g/L以上100g/L以下である。 The reducing agent is, for example, at least one selected from the group consisting of hypophosphorous acid, hypophosphite (sodium salt, potassium salt, ammonium salt), dimethylamine borane, and hydrazine. The concentration of the reducing agent is, for example, 0.01 g/L or more and 100 g/L or less.

錯化剤は、例えば、モノカルボン酸、ジカルボン酸、ヒドロキシカルボン酸、アミノポリカルボン酸、エチレンジアミンジ酢酸、1-ヒドロキシエチリデン-1,1-ジホスホン酸、及びこれらのアンモニウム塩、カリウム塩、ナトリウム塩からなる群から選択される少なくとも1種である。モノカルボン酸は、例えば、酢酸、あるいは蟻酸である。ジカルボン酸は、例えば、マロン酸、コハク酸、アジピン酸、マレイン酸、フマール酸である。ヒドロキシカルボン酸は、例えば、リンゴ酸、乳酸、グリコール酸、グルコン酸、クエン酸である。アミノポリカルボン酸は、例えば、エチレンジアミンテトラ酢酸、ジエチレントリアミンペンタ酢酸である。他にも、ホスホン酸類、アミノ酸類等も錯化剤として用いてもよい。錯化剤の濃度は、例えば、5g/L以上180g/L以下である。 Complexing agents include, for example, monocarboxylic acids, dicarboxylic acids, hydroxycarboxylic acids, aminopolycarboxylic acids, ethylenediaminediacetic acid, 1-hydroxyethylidene-1,1-diphosphonic acid, and their ammonium, potassium and sodium salts. At least one selected from the group consisting of Monocarboxylic acids are, for example, acetic acid or formic acid. Dicarboxylic acids are, for example, malonic acid, succinic acid, adipic acid, maleic acid, fumaric acid. Hydroxycarboxylic acids are, for example, malic acid, lactic acid, glycolic acid, gluconic acid, citric acid. Aminopolycarboxylic acids are, for example, ethylenediaminetetraacetic acid and diethylenetriaminepentaacetic acid. Phosphonic acids, amino acids and the like may also be used as complexing agents. The concentration of the complexing agent is, for example, 5 g/L or more and 180 g/L or less.

pH調整剤は、例えば、硫酸、リン酸等の無機酸、水酸化ナトリウム、アンモニア水からなる群から選択される少なくとも1種である。無電解めっき法におけるめっき液のpH範囲は、通常、2以上9以下である。なお、本実施形態での無電解めっき法におけるめっき液のpH範囲は、4.0以上6.0以下である。 The pH adjuster is, for example, at least one selected from the group consisting of inorganic acids such as sulfuric acid and phosphoric acid, sodium hydroxide, and aqueous ammonia. The pH range of the plating solution in the electroless plating method is usually 2 or more and 9 or less. In addition, the pH range of the plating solution in the electroless plating method in this embodiment is 4.0 or more and 6.0 or less.

また、めっき液には、各種の添加剤を添加してもよい。添加剤の一例である安定剤は、例えば、硝酸鉛及び酢酸鉛等の鉛塩、硝酸ビスマス及び酢酸ビスマス等のビスマス塩、チオジグリコール酸及びチオ硫酸ナトリウム等の硫黄化合物からなる群から選択される少なくとも1種である。安定剤の添加量は、例えば、0.01mg/L以上100mg/L以下である。添加剤の一例であるpH緩衝剤は、例えば、ホウ酸、リン酸、亜リン酸、炭酸、これらのナトリウム塩、カリウム塩、アンモニウム塩からなる群から選択される少なくとも1種である。緩衝剤の添加量は、例えば、0.1g/L以上200g/L以下である。添加剤の一例である界面活性剤は、例えば、ノニオン性、カチオン性、アニオン性、両性の各種界面活性剤を1種単独又は2種以上混合して用いることができる。界面活性剤の添加量は、例えば、0.1mg/L以上100mg/L以下である。 Moreover, various additives may be added to the plating solution. Stabilizers, which are examples of additives, are selected from the group consisting of, for example, lead salts such as lead nitrate and lead acetate, bismuth salts such as bismuth nitrate and bismuth acetate, and sulfur compounds such as thiodiglycolic acid and sodium thiosulfate. is at least one The amount of stabilizer added is, for example, 0.01 mg/L or more and 100 mg/L or less. A pH buffer, which is an example of an additive, is, for example, at least one selected from the group consisting of boric acid, phosphoric acid, phosphorous acid, carbonic acid, sodium salts, potassium salts, and ammonium salts thereof. The amount of buffer added is, for example, 0.1 g/L or more and 200 g/L or less. Surfactants, which are examples of additives, can be used singly or in combination of two or more of various nonionic, cationic, anionic, and amphoteric surfactants. The amount of surfactant added is, for example, 0.1 mg/L or more and 100 mg/L or less.

本実施形態の無電解めっき法におけるめっき液は、25g/Lの硫酸ニッケル六水和物と、25g/Lの次亜リン酸ナトリウム一水和物と、20g/Lのリンゴ酸と、10g/Lの酢酸ナトリウムと、10g/Lの水酸化ナトリウムと、10g/Lのリン酸マンガンとを含む。他にも、めっき液には、めっき液中のビスマスイオンが0.5mg/Lとなるように任意の安定剤が添加される。 The plating solution in the electroless plating method of the present embodiment contains 25 g/L nickel sulfate hexahydrate, 25 g/L sodium hypophosphite monohydrate, 20 g/L malic acid, and 10 g/L L sodium acetate, 10 g/L sodium hydroxide, and 10 g/L manganese phosphate. In addition, an optional stabilizer is added to the plating solution so that the bismuth ion in the plating solution is 0.5 mg/L.

[電気めっき]
電気めっき法の場合では、ワット浴、スルファミン酸ニッケル浴等のめっき液が用いられる。これらのめっき液では、無機化合物粒子15の他、ニッケル成分を含む。無機化合物粒子15の添加量は、電気めっき法であっても無電解めっき法場合と同様の数値範囲を適用できる。なお、無機化合物粒子15は、めっき液に溶解せずめっき液中に分散した状態で存在する。
[Electroplating]
In the case of the electroplating method, a plating solution such as Watt's bath or nickel sulfamate bath is used. These plating solutions contain a nickel component in addition to the inorganic compound particles 15 . As for the amount of the inorganic compound particles 15 to be added, the same numerical range as in the electroless plating method can be applied even in the electroplating method. Note that the inorganic compound particles 15 are present in a state of being dispersed in the plating solution without being dissolved in the plating solution.

ワット浴の場合、ニッケル成分は、例えば、水溶性ニッケル化合物である硫酸ニッケル六水和物、塩化ニッケル六水和物、炭酸ニッケル四水和物からなる群から選択される少なくとも1種である。水溶性ニッケル化合物の中でも、被めっき材11への析出性に優れる点で、硫酸ニッケル六水和物または塩化ニッケル六水和物が好ましく、硫酸ニッケル六水和物と塩化ニッケル六水和物との混合物がより好ましい。ニッケル成分として硫酸ニッケル六水和物及び塩化ニッケル六水和物を混合して用いる場合、硫酸ニッケル六水和物の添加量が200g/L以上500g/L以下、かつ塩化ニッケル六水和物の添加量が70g/L以下であることが好ましい。また、スルファミン酸ニッケル浴の場合、ニッケル成分は、例えば、水溶性ニッケル化合物であるスルファミン酸ニッケル、塩化ニッケル六水和物、または、これらを混合した混合物である。 In the case of the Watt bath, the nickel component is, for example, at least one selected from the group consisting of water-soluble nickel compounds such as nickel sulfate hexahydrate, nickel chloride hexahydrate, and nickel carbonate tetrahydrate. Among the water-soluble nickel compounds, nickel sulfate hexahydrate or nickel chloride hexahydrate is preferable in terms of excellent deposition on the material to be plated 11, and nickel sulfate hexahydrate and nickel chloride hexahydrate are preferred. is more preferred. When nickel sulfate hexahydrate and nickel chloride hexahydrate are mixed and used as a nickel component, the amount of nickel sulfate hexahydrate added is 200 g / L or more and 500 g / L or less, and nickel chloride hexahydrate The amount added is preferably 70 g/L or less. In the case of a nickel sulfamate bath, the nickel component is, for example, a water-soluble nickel compound such as nickel sulfamate, nickel chloride hexahydrate, or a mixture thereof.

また、めっき液には、各種の一次光沢剤及び二次光沢剤を添加してもよい。一次光沢剤は、例えば、サッカリン、ナフタレンスルホン酸ナトリウム等のベンゼン、ナフタレン等の誘導体、スルホン酸塩、スルホンアミドからなる群から選択される少なくとも1種である。二次光沢剤は、ブチンジオール、プロパルギルアルコール、クマリンからなる群から選択される少なくとも1種である。 Various primary brighteners and secondary brighteners may be added to the plating solution. The primary brightener is, for example, at least one selected from the group consisting of saccharin, benzene such as sodium naphthalenesulfonate, derivatives such as naphthalene, sulfonates, and sulfonamides. The secondary brightener is at least one selected from the group consisting of butynediol, propargyl alcohol and coumarin.

本実施形態におけるワット浴の場合のめっき液は、240g/Lの硫酸ニッケル六水和物と、45g/Lの塩化ニッケル六水和物と、45g/Lのホウ酸と、5g/Lのシュウ酸ニッケル二水和物粒子とを含む。他にも、光沢剤として、2g/L以下のサッカリンと、0.2g/L以下のブチンジオールとを含んでもよい。また、めっき液のpH範囲は、4.0以上4.5以下である。 The plating solution for the Watt bath in this embodiment is 240 g/L of nickel sulfate hexahydrate, 45 g/L of nickel chloride hexahydrate, 45 g/L of boric acid, and 5 g/L of oxalic acid. and nickel acid dihydrate particles. Other brightening agents may include 2 g/L or less of saccharin and 0.2 g/L or less of butynediol. Moreover, the pH range of the plating solution is 4.0 or more and 4.5 or less.

本実施形態におけるスルファミン酸ニッケル浴のめっき液は、450g/Lのスルファミン酸ニッケル四水和物と、15g/Lの塩化ニッケル六水和物と、30g/Lのホウ酸と、5g/Lのシュウ酸ニッケル二水和物粒子とを含む。また、めっき液のpH範囲は、4.0以上4.5以下である。 The plating solution for the nickel sulfamate bath in this embodiment is composed of 450 g/L nickel sulfamate tetrahydrate, 15 g/L nickel chloride hexahydrate, 30 g/L boric acid, and 5 g/L and nickel oxalate dihydrate particles. Moreover, the pH range of the plating solution is 4.0 or more and 4.5 or less.

[無機化合物粒子の共析量の制御方法]
ここで、図3を参照して、第1工程における無機化合物粒子15のめっき皮膜13への共析量の制御方法について説明する。図3に示すグラフ100の横軸は、めっき液の液面に対する被めっき材11の角度を表す。なお、横軸の角度は、めっき液の液面と被めっき材11とが平行な状態が0度であり、めっき液の液面と被めっき材11とが垂直な状態が90度である。グラフ100の縦軸は、第1工程で形成されためっき皮膜13、すなわち、表面に露出した無機化合物粒子15が除去される前のめっき皮膜13の表面における無機化合物粒子15の表面積比率を示す。
[Method for controlling the amount of eutectoid of inorganic compound particles]
Here, with reference to FIG. 3, a method for controlling the amount of co-precipitation of the inorganic compound particles 15 onto the plating film 13 in the first step will be described. The horizontal axis of the graph 100 shown in FIG. 3 represents the angle of the material to be plated 11 with respect to the surface of the plating solution. The angle of the horizontal axis is 0 degrees when the surface of the plating solution and the material to be plated 11 are parallel, and 90 degrees when the surface of the plating solution and the material to be plated 11 are perpendicular. The vertical axis of the graph 100 represents the surface area ratio of the inorganic compound particles 15 on the surface of the plating film 13 formed in the first step, that is, the surface of the plating film 13 before the inorganic compound particles 15 exposed on the surface are removed.

グラフ100中の曲線101は、無電解めっき法によって形成されためっき皮膜13における無機化合物粒子15の表面積比率を示す。グラフ100中の曲線102は、電気めっき法によって形成されためっき皮膜13における無機化合物粒子15の表面積比率を示す。めっき液中の無機化合物粒子15の濃度は、曲線101及び曲線102の何れにおいても2.0g/Lである。 A curve 101 in the graph 100 indicates the surface area ratio of the inorganic compound particles 15 in the plating film 13 formed by the electroless plating method. A curve 102 in the graph 100 indicates the surface area ratio of the inorganic compound particles 15 in the plating film 13 formed by electroplating. The concentration of the inorganic compound particles 15 in the plating solution is 2.0 g/L for both curves 101 and 102 .

グラフ100に示すように、めっき皮膜13の表面における無機化合物粒子15の表面積比率は、無電解めっき法及び電気めっき法の何れにおいても、めっき液の液面に対する被めっき材11の角度の増加に伴い減少した。したがって、めっき液の液面に対する被めっき材11の角度を制御することで、めっき皮膜13の表面における無機化合物粒子15の表面積比率、すなわち、めっき皮膜13における無機化合物粒子15の共析量を制御できる。 As shown in the graph 100, the surface area ratio of the inorganic compound particles 15 on the surface of the plating film 13 varies with the increase in the angle of the material to be plated 11 with respect to the liquid surface of the plating solution in both the electroless plating method and the electroplating method. decreased accordingly. Therefore, by controlling the angle of the material to be plated 11 with respect to the liquid surface of the plating solution, the surface area ratio of the inorganic compound particles 15 on the surface of the plating film 13, that is, the amount of codeposition of the inorganic compound particles 15 in the plating film 13 is controlled. can.

具体的に、めっき液の液面に対する被めっき材11の角度は、0度以上90度以下であればよく、15度以上80度以下であればより好ましい。めっき液の液面に対する被めっき材11の角度を上記範囲とすることで、無機化合物粒子15をめっき皮膜13中に好適に共析させることができる。なお、めっき液の液面に対する被めっき材11の角度が90度超の場合は、めっき皮膜13中に無機化合物粒子15が共析しないおそれがある。 Specifically, the angle of the material to be plated 11 with respect to the surface of the plating solution should be 0 degrees or more and 90 degrees or less, and more preferably 15 degrees or more and 80 degrees or less. By setting the angle of the material to be plated 11 with respect to the surface of the plating solution within the above range, the inorganic compound particles 15 can be favorably co-deposited in the plating film 13 . If the angle of the material to be plated 11 with respect to the surface of the plating solution exceeds 90 degrees, the inorganic compound particles 15 may not codeposit in the plating film 13 .

[第2工程]
図4に示すように、第1工程で被めっき材11上に形成されためっき皮膜13を、無機化合物粒子15が可溶かつ皮膜部14が不溶な処理液に接触させる第2工程を行う。これにより、めっき皮膜13の表面に露出した無機化合物粒子15が溶解することで、無機化合物粒子15の外形の少なくとも一部に倣った形状を有する凹部14Bが形成される。
[Second step]
As shown in FIG. 4, a second step is performed in which the plating film 13 formed on the material to be plated 11 in the first step is brought into contact with a treatment liquid in which the inorganic compound particles 15 are soluble and the coating portion 14 is insoluble. As a result, the inorganic compound particles 15 exposed on the surface of the plating film 13 are dissolved, thereby forming the recesses 14B having a shape following at least a part of the outer shape of the inorganic compound particles 15 .

第2工程で用いられる処理液は、有機酸または無機酸の何れかの酸成分を含む溶液である。処理液に含まれる酸成分は、皮膜部14が腐食されにくく、かつ、無機化合物粒子15を速やかに溶解させる観点から、塩酸、硫酸、硝酸、クロム酸等の無機酸が好ましい。処理液のpH範囲は、2.0以下であり、好ましくは1.0以下である。めっき皮膜13と処理液との接触方法は、浸漬法またはスプレー法を適用できる。本実施形態では、浸漬法を用いる。処理液における酸成分の濃度は、例えば0.1質量%以上10質量%以下である。また、第2工程における処理条件は、例えば、接触時間が30秒以上600秒以下、温度が10℃以上80℃以下である。 The treatment liquid used in the second step is a solution containing an acid component, either an organic acid or an inorganic acid. Inorganic acids such as hydrochloric acid, sulfuric acid, nitric acid, and chromic acid are preferable as the acid component contained in the treatment liquid, from the viewpoints that the coating portion 14 is less likely to be corroded and the inorganic compound particles 15 are quickly dissolved. The pH range of the treatment liquid is 2.0 or less, preferably 1.0 or less. As a method for contacting the plating film 13 with the treatment liquid, an immersion method or a spray method can be applied. In this embodiment, an immersion method is used. The concentration of the acid component in the treatment liquid is, for example, 0.1% by mass or more and 10% by mass or less. Moreover, the treatment conditions in the second step are, for example, a contact time of 30 seconds or more and 600 seconds or less and a temperature of 10° C. or more and 80° C. or less.

凹部14Bの形状は、めっき皮膜13の表面において、無機化合物粒子15が皮膜部14から露出する程度に依存する。すなわち、凹部14Bは、開口部が内部よりも狭いもの、開口部が内部と同じ大きさのもの、または、開口部が内部よりも広いもの等、種々の形状を有する。特に、本実施形態では、開口部が内部よりも狭い凹部14Bを形成できることから、表面層16を構成する材料を好適に担持できる。 The shape of the recesses 14B depends on the extent to which the inorganic compound particles 15 are exposed from the film portion 14 on the surface of the plating film 13 . That is, the recess 14B has various shapes, such as an opening narrower than the inside, an opening the same size as the inside, or an opening wider than the inside. In particular, in the present embodiment, the recess 14B having an opening narrower than the inside can be formed, so that the material forming the surface layer 16 can be favorably supported.

凹部14Bは、皮膜部14の表面においてその面積比率が2%以上50%以下であることが好ましく、5%以上40%以下であればより好ましい。皮膜部14の表面における凹部14Bの面積比率が上記範囲であることで、平滑部14Aの面積を十分に確保しつつ、凹部14Bによって皮膜部14の表面積を増加させることができる。 The area ratio of the concave portion 14B on the surface of the coating portion 14 is preferably 2% or more and 50% or less, and more preferably 5% or more and 40% or less. When the area ratio of the concave portions 14B on the surface of the coating portion 14 is within the above range, the surface area of the coating portion 14 can be increased by the concave portions 14B while sufficiently securing the area of the smooth portion 14A.

めっき皮膜13の厚さ方向を含むめっき皮膜13の断面において、平滑部14Aに対して1μm以上の深さを有する凹部14Bの個数は、皮膜部14の表面に沿う一次元方向において、100μmあたり1個以上100個以下が好ましい。また、100μmあたり2個以上50個以下であればより好ましい。そして、めっき皮膜13の断面において、平滑部14Aに対して1μm以上の深さを有する凹部14Bの開口幅の総和は、皮膜部14の表面に沿う一次元方向において、100μmあたり2μm以上50μm以下が好ましく、5μm以上40μm以下がより好ましい。めっき皮膜13の断面中、皮膜部14の表面に沿う一次元方向において、100μmあたり凹部14Bの個数、及び開口幅の総和が上記範囲であることで、平滑部14Aの面積を十分に確保しつつ、凹部14Bによって皮膜部14の表面積を増加させることができる。 In the cross section of the plating film 13 including the thickness direction of the plating film 13, the number of the concave portions 14B having a depth of 1 μm or more with respect to the smooth portion 14A is 1 per 100 μm in the one-dimensional direction along the surface of the coating portion 14. More than 100 pieces or less are preferable. Moreover, it is more preferable that the number is 2 or more and 50 or less per 100 μm. In the cross section of the plating film 13, the total opening width of the concave portions 14B having a depth of 1 μm or more with respect to the smooth portion 14A is 2 μm or more and 50 μm or less per 100 μm in the one-dimensional direction along the surface of the coating portion 14. It is preferably 5 µm or more and 40 µm or less. In the cross section of the plating film 13, in the one-dimensional direction along the surface of the film part 14, the number of recesses 14B per 100 μm and the sum of the opening widths are within the above range, so that the area of the smooth part 14A is sufficiently secured. , the surface area of the coating portion 14 can be increased by the concave portions 14B.

[第3工程]
最後に、第2工程で凹部14Bが形成されためっき皮膜13上に表面層16を形成する第3工程を行う。本実施形態では、めっき皮膜13上に層状格子構造物を含む固体潤滑剤から構成される表面層16を形成する。具体的に、水または有機溶剤からなる溶媒に層状格子構造物の粒子を分散させたディスパージョンを刷毛塗り、浸漬、スプレー等の方法でめっき皮膜13の表面に付着させた後、溶媒を加熱蒸発させることで表面層16を形成する。なお、上記ディスパージョンには層状格子構造物の粒子の他にバインダーとして樹脂等を配合しても良い。もしくは、層状格子構造物の粒子そのものを刷毛塗り、浸漬、スプレー等の方法でめっき皮膜13の表面に直接付着させてもよい。これにより、被めっき材11の表面に、めっき皮膜13と表面層16とを備えた複合皮膜12が形成される。
[Third step]
Finally, the third step is performed to form the surface layer 16 on the plated film 13 in which the concave portions 14B are formed in the second step. In this embodiment, a surface layer 16 composed of a solid lubricant containing a layered lattice structure is formed on the plated film 13 . Specifically, a dispersion in which particles of a layered lattice structure are dispersed in a solvent made of water or an organic solvent is applied to the surface of the plating film 13 by a method such as brushing, immersion, or spraying, and then the solvent is evaporated by heating. Then, the surface layer 16 is formed. The dispersion may contain a resin or the like as a binder in addition to the particles of the layered lattice structure. Alternatively, the particles themselves of the layered lattice structure may be directly adhered to the surface of the plating film 13 by brush coating, dipping, spraying, or the like. As a result, a composite film 12 including the plating film 13 and the surface layer 16 is formed on the surface of the material 11 to be plated.

[実施形態の効果]
上記実施形態によれば、以下に列挙する効果を得ることができる。
(1)皮膜部14の表面が凹部14Bを備えるため、皮膜部14の表面が凹部14Bを備えない構成と比べて、皮膜部14の表面積が増大する。これにより、表面層16を構成する潤滑剤の保持力の向上とともに潤滑剤の担持量が増加する。また、皮膜部14の表面が先細りの凸形状を備える構成と比べて、より大きな面積を有した平滑部14Aによって皮膜部14に加えられた荷重を分散できる。これにより、めっき皮膜13の表面形状の劣化を抑制できる。したがって、凹部14Bによる効果を好適に保つことができる。
[Effects of Embodiment]
According to the above embodiment, the following effects can be obtained.
(1) Since the surface of the coating portion 14 is provided with the concave portion 14B, the surface area of the coating portion 14 is increased as compared with a structure in which the surface of the coating portion 14 is not provided with the concave portion 14B. As a result, the holding power of the lubricant forming the surface layer 16 is improved and the amount of the lubricant carried is increased. In addition, the load applied to the coating portion 14 can be dispersed by the smooth portion 14A having a larger area than in the case where the surface of the coating portion 14 has a tapered convex shape. Thereby, deterioration of the surface shape of the plating film 13 can be suppressed. Therefore, the effect of the recess 14B can be favorably maintained.

(2)凹部14Bの表面積比率、断面中の凹部14Bの個数及び開口幅の総和を制御することで、平滑部14Aの面積を十分に確保してめっき皮膜13の表面形状の劣化を好適に抑制しつつ、凹部14Bによってめっき皮膜13の表面積を増加させることができる。 (2) By controlling the surface area ratio of the recesses 14B, the number of the recesses 14B in the cross section, and the sum of the opening widths, the area of the smooth parts 14A is sufficiently secured, and deterioration of the surface shape of the plating film 13 is preferably suppressed. At the same time, the surface area of the plating film 13 can be increased by the recesses 14B.

(3)めっき皮膜13の表面に潤滑剤で構成される表面層16を備えることで、摺動部品10の摺動性能を向上できる。また、摺動に伴い平滑部14A上の潤滑剤が減少しても、凹部14Bに充填された潤滑剤が平滑部14Aに供給されるため、摺動部品10の摺動性能が維持される。 (3) By providing the surface layer 16 made of a lubricant on the surface of the plating film 13, the sliding performance of the sliding component 10 can be improved. Moreover, even if the lubricant on the smooth portion 14A decreases due to sliding, the lubricant filled in the concave portion 14B is supplied to the smooth portion 14A, so the sliding performance of the sliding component 10 is maintained.

(4)表面層16として層状格子構造物を含む固体潤滑剤を用いることで、層状格子構造物が摺動に際してめっき皮膜13の表面から減少しにくいことから、摺動部品10が他の部品と摺動した際にも摺動性能を好適に持続させることができる。 (4) By using a solid lubricant containing a layered lattice structure as the surface layer 16, the layered lattice structure is less likely to decrease from the surface of the plated film 13 during sliding, so that the sliding part 10 can be separated from other parts. The sliding performance can be favorably maintained even when sliding.

(5)第一工程において、被めっき材11に皮膜部14と無機化合物粒子15とを含むめっき皮膜13が形成され、第二工程において、めっき皮膜13の表面に露出した無機化合物粒子15が溶解される。その結果、めっき皮膜13の表面のうち無機化合物粒子15が露出した箇所には、無機化合物粒子15の外形に倣う形状を有する凹部14Bを形成できる。また、めっき皮膜13の表面のうち無機化合物粒子が存在しない箇所には、平滑な表面である平滑部14Aを形成できる。 (5) In the first step, the plating film 13 containing the film portion 14 and the inorganic compound particles 15 is formed on the material to be plated 11, and in the second step, the inorganic compound particles 15 exposed on the surface of the plating film 13 are dissolved. be done. As a result, recesses 14B having a shape following the outer shape of the inorganic compound particles 15 can be formed in the portions of the surface of the plating film 13 where the inorganic compound particles 15 are exposed. In addition, a smooth portion 14A, which is a smooth surface, can be formed on a portion of the surface of the plating film 13 where no inorganic compound particles are present.

なお、上記実施形態は、以下のように変更して実施することができる。
・表面層16を構成する潤滑剤は、層状格子構造物を含む固体潤滑剤に限定されず、他の固体潤滑剤、液体潤滑剤、及び、半固体状潤滑剤であってもよい。この場合でも、上記(3)の効果を得ることができる。
It should be noted that the above embodiment can be implemented with the following modifications.
- The lubricant that constitutes the surface layer 16 is not limited to solid lubricants containing layered lattice structures, and may be other solid lubricants, liquid lubricants, and semi-solid lubricants. Even in this case, the above effect (3) can be obtained.

・複合皮膜12は、摺動部品10以外の用途にも適用可能である。したがって、めっき皮膜13上に表面層16を備える構成であれば、表面層16の材質は潤滑剤に限定されず、例えば、成形樹脂、各種塗膜、触媒、はんだ等の任意の材料を用いてもよい。この場合、めっき皮膜13上への樹脂接着時のアンカー効果による接着強度の向上、めっき皮膜13と塗膜との密着性の向上、触媒の担持量の増加、はんだ付け時の濡れ性向上によるはんだ付け性の向上等を達成できる。 - The composite film 12 can also be applied to applications other than the sliding component 10 . Therefore, as long as the surface layer 16 is provided on the plating film 13, the material of the surface layer 16 is not limited to lubricants, and any material such as molding resin, various coatings, catalysts, solder, etc. can be used. good too. In this case, the adhesive strength is improved by the anchor effect when the resin adheres to the plated film 13, the adhesion between the plated film 13 and the coating film is improved, the amount of catalyst supported is increased, and the solder is improved by improving wettability during soldering. It is possible to achieve improvement in attachability and the like.

・平滑部14Aの面積を十分に確保でき、かつ、凹部14Bによってめっき皮膜13の表面積を増加させることができるのであれば、皮膜部14の表面における凹部14Bの面積比率は、2%以上50%以下に限定されず、例えば、50%超でもよい。同様に、めっき皮膜13の断面において、凹部14Bの個数は、皮膜部14の表面に沿う一次元方向において100μmあたり100個超でもよく、凹部14Bの開口幅の総和が100μmあたり50μm超でもよい。 If the area of the smooth portion 14A can be sufficiently secured and the surface area of the plating film 13 can be increased by the recesses 14B, the area ratio of the recesses 14B on the surface of the film portion 14 is 2% or more and 50%. It is not limited to below, and may be more than 50%, for example. Similarly, in the cross section of the plating film 13, the number of recesses 14B may be more than 100 per 100 μm in one-dimensional direction along the surface of the film portion 14, and the total opening width of the recesses 14B may be more than 50 μm per 100 μm.

・被めっき材11とめっき皮膜13との間に下地となる各種のめっき皮膜を設けてもよい。例えば、無機化合物粒子15の粒子径に対して十分厚いめっき皮膜が求められる場合、無機化合物粒子15を含まないめっき液を用いて、被めっき材11とめっき皮膜13との間に無機化合物粒子15を含まない皮膜部14と同種のめっき皮膜を設けてもよい。この場合、被めっき材11とめっき皮膜13との間に設けられた無機化合物粒子15を含まないめっき皮膜により、凹部14Bが被めっき材11まで達することを抑制できる。なお、被めっき材11とめっき皮膜13との間に設けられるめっき皮膜は、皮膜部14と同種のめっき皮膜でなくてもよい。 - Various plating films may be provided as a base between the material to be plated 11 and the plating film 13 . For example, when a sufficiently thick plating film is required with respect to the particle diameter of the inorganic compound particles 15, using a plating solution that does not contain the inorganic compound particles 15, the inorganic compound particles 15 are used between the material to be plated 11 and the plating film 13. A plating film of the same type as the film portion 14 that does not contain may be provided. In this case, the plating film that does not contain the inorganic compound particles 15 provided between the material to be plated 11 and the plating film 13 can prevent the concave portion 14B from reaching the material to be plated 11 . The plated film provided between the material to be plated 11 and the plated film 13 may not be the same type of plated film as the film portion 14 .

[実施例]
以下、本発明の実施例1~8及び比較例1~6について説明する。なお、各実施例及び各比較例は上記の実施形態を限定するものではない。
[Example]
Examples 1 to 8 and Comparative Examples 1 to 6 of the present invention are described below. In addition, each example and each comparative example do not limit said embodiment.

[基材及びめっき前処理]
実施例1~8及び比較例1~6では、基材として50mm×50mm×t3.0mmの冷間圧延鋼板SPCC-SB(株式会社パルテック製)を用いた。また、めっき処理の前工程として、アルカリ脱脂、脱イオン水洗、電解脱脂、脱イオン水洗、酸洗(17%塩酸)、脱イオン水洗の順に基材の表面清浄化を行った。
[Base material and plating pretreatment]
In Examples 1 to 8 and Comparative Examples 1 to 6, a cold-rolled steel plate SPCC-SB (manufactured by Paltec Co., Ltd.) of 50 mm×50 mm×t3.0 mm was used as the base material. In addition, as a pre-plating step, the surface of the substrate was cleaned in the order of alkali degreasing, deionized water washing, electrolytic degreasing, deionized water washing, acid washing (17% hydrochloric acid), and deionized water washing.

[実施例1]
スターラーで撹拌した状態の無電解めっき液に基材を浸漬させ、90℃にて膜厚が約5μmになるまで無電解めっきした。めっき液として、中高リン型無電解ニッケルめっき液「SE-666」(日本カニゼン社製)に、2g/Lのリン酸マンガン粒子「PL-55A」(日本パーカライジング社製)を添加したものを用いた。その後、15%塩酸に常温で30秒浸漬させることで、めっき皮膜表面に共析したリン酸マンガン粒子を溶解除去した後、水洗、乾燥した。
[Example 1]
The substrate was immersed in the electroless plating solution being stirred with a stirrer, and electroless plating was performed at 90° C. until the film thickness reached about 5 μm. As the plating solution, a medium-high phosphorous type electroless nickel plating solution “SE-666” (manufactured by Nippon Kanigen Co., Ltd.) was added with 2 g/L of manganese phosphate particles “PL-55A” (manufactured by Nihon Parkerizing Co., Ltd.). board. Thereafter, the plated film was immersed in 15% hydrochloric acid at room temperature for 30 seconds to dissolve and remove the manganese phosphate particles co-precipitated on the plated film surface, followed by washing with water and drying.

[実施例2]
リン酸マンガン粒子に代えてリン酸チタン粒子(フジミインコーポレーテッド社製)を0.5g/L添加した点を除き実施例1と同様に無電解めっきした。その後、実施例1と同様にめっき皮膜表面に共析したリン酸チタン粒子を溶解除去した後、水洗、乾燥した。
[Example 2]
Electroless plating was carried out in the same manner as in Example 1 except that 0.5 g/L of titanium phosphate particles (manufactured by Fujimi Incorporated) were added instead of the manganese phosphate particles. Thereafter, the titanium phosphate particles codeposited on the surface of the plating film were removed by dissolution in the same manner as in Example 1, followed by washing with water and drying.

[実施例3]
リン酸マンガン粒子に代えて4g/Lの水酸化ニッケル粒子(純正化学社製)を添加した点を除き実施例1と同様に無電解めっきした。その後、実施例1と同様にめっき皮膜表面に共析した水酸化ニッケルを溶解除去した後、水洗、乾燥した。
[Example 3]
Electroless plating was carried out in the same manner as in Example 1, except that 4 g/L nickel hydroxide particles (manufactured by Junsei Chemical Co., Ltd.) were added in place of the manganese phosphate particles. Thereafter, nickel hydroxide codeposited on the surface of the plating film was removed by dissolution in the same manner as in Example 1, followed by washing with water and drying.

[実施例4]
ワット浴に5g/Lのシュウ酸ニッケル二水和物粒子(米山薬品工業製)を添加し、スターラーで撹拌しながら基材を浸漬させ、50℃にて電流密度が2A/dmである直流電解で膜厚が約5μmになるまで電気めっきした。ワット浴は、280g/Lの硫酸ニッケル、40g/Lの塩化ニッケル、及び、20g/Lのホウ酸を含み、pHが4.5であった。その後、70℃に加温した5%無水クロム酸に600秒浸漬させることにより、めっき表面に共析したシュウ酸ニッケル粒子を溶解除去した後、水洗、乾燥した。
[Example 4]
Add 5 g/L of nickel oxalate dihydrate particles (manufactured by Yoneyama Yakuhin Kogyo Co., Ltd.) to a Watts bath, immerse the substrate while stirring with a stirrer, and apply a direct current with a current density of 2 A/dm 2 at 50 ° C. The solution was electroplated until the film thickness was about 5 μm. The Watts bath contained 280 g/L nickel sulfate, 40 g/L nickel chloride, and 20 g/L boric acid and had a pH of 4.5. After that, the nickel oxalate particles co-precipitated on the plated surface were dissolved and removed by immersion in 5% chromic anhydride heated to 70° C. for 600 seconds, followed by washing with water and drying.

[実施例5]
実施例1と同様の工程によりめっき皮膜を形成した後、めっき皮膜上に二硫化モリブデン含有潤滑塗料デフリックコート、HMB-2(川邑研究所製)を乾燥膜厚5μmになるように塗装して固体潤滑皮膜を形成した。
[Example 5]
After forming a plating film in the same process as in Example 1, a molybdenum disulfide-containing lubricating paint Defric Coat HMB-2 (manufactured by Kawamura Laboratory) was applied on the plating film so that the dry film thickness was 5 μm. A solid lubricating film was formed.

[実施例6]
実施例2と同様の工程によりめっき皮膜を形成した後、実施例5と同様の工程によりめっき皮膜上に固体潤滑皮膜を形成した。
[Example 6]
After forming a plated film by the same steps as in Example 2, a solid lubricating film was formed on the plated film by the same steps as in Example 5.

[実施例7]
実施例3と同様の工程によりめっき皮膜を形成した後、実施例5と同様の工程によりめっき皮膜上に固体潤滑皮膜を形成した。
[Example 7]
After forming a plated film by the same steps as in Example 3, a solid lubricating film was formed on the plated film by the same steps as in Example 5.

[実施例8]
実施例4と同様の工程によりめっき皮膜を形成した後、実施例5と同様の工程によりめっき皮膜上に固体潤滑皮膜を形成した。
[Example 8]
After forming a plated film by the same steps as in Example 4, a solid lubricating film was formed on the plated film by the same steps as in Example 5.

[比較例1]
中高リン型無電解ニッケルめっき液「SE-666」(日本カニゼン社製)に基材を浸漬させ、スターラーで撹拌しながら90℃にて膜厚が約5μmになるまで無電解めっきした後、水洗、乾燥した。
[Comparative Example 1]
The substrate is immersed in medium-high phosphorous type electroless nickel plating solution "SE-666" (manufactured by Nippon Kanigen Co., Ltd.), electroless plating is performed at 90°C while stirring with a stirrer until the film thickness is about 5 μm, and then washed with water. , dried.

[比較例2]
比較例1と同様の工程によりめっき皮膜を形成させた後、30%硝酸に常温にて1分浸漬させてめっき皮膜表面にマイクロクラックを形成させた。その後、水洗、乾燥した。
[Comparative Example 2]
After forming a plating film in the same process as in Comparative Example 1, the plated film was immersed in 30% nitric acid at room temperature for 1 minute to form microcracks on the surface of the plating film. Then, it was washed with water and dried.

[比較例3]
220g/Lの硫酸ニッケル、150g/Lの塩化ニッケル、20g/Lのホウ酸を含むめっき液を用いて、スターラーで撹拌しながら基材を浸漬させ、50℃にて電流密度8A/dmの直流電解で電気めっきした。膜厚は、約1μmとした。その後、水洗、乾燥した。
[Comparative Example 3]
Using a plating solution containing 220 g/L nickel sulfate, 150 g/L nickel chloride, and 20 g/L boric acid, the substrate was immersed while stirring with a stirrer, and the current density was 8 A/dm 2 at 50 ° C. It was electroplated by direct current electrolysis. The film thickness was about 1 μm. Then, it was washed with water and dried.

[比較例4]
比較例1と同様の工程によりめっき皮膜を形成した後、実施例5と同様の工程によりめっき皮膜上に固体潤滑皮膜を形成した。
[Comparative Example 4]
After forming a plating film in the same steps as in Comparative Example 1, a solid lubricating film was formed on the plating film in the same steps as in Example 5.

[比較例5]
比較例2と同様の工程によりめっき皮膜を形成した後、実施例5と同様の工程によりめっき皮膜上に固体潤滑皮膜を形成した。
[Comparative Example 5]
After forming a plating film in the same steps as in Comparative Example 2, a solid lubricating film was formed on the plating film in the same steps as in Example 5.

[比較例6]
比較例3と同様の工程によりめっき皮膜を形成した後、実施例5と同様の工程によりめっき皮膜上に固体潤滑皮膜を形成した。
[Comparative Example 6]
After forming a plating film by the same steps as in Comparative Example 3, a solid lubricating film was formed on the plating film by the same steps as in Example 5.

[凹部面積率評価方法]
実施例1~8及び比較例1~6について、めっき皮膜を走査型電子顕微鏡(SEM)で取得したSEM画像を観察することにより、めっき皮膜の表面における凹部の面積比率を測定した。一例として、実施例1のめっき皮膜13をSEMで取得した二次電子像を図5に示す。
[Recess area ratio evaluation method]
For Examples 1 to 8 and Comparative Examples 1 to 6, the area ratio of recesses on the surface of the plating film was measured by observing SEM images obtained by scanning electron microscope (SEM) of the plating film. As an example, FIG. 5 shows a secondary electron image of the plating film 13 of Example 1 obtained by SEM.

図5に示すように、実施例1のめっき皮膜13は、平滑部14Aと凹部14Bとの境界が明確なため、画像解析により凹部14Bの面積比率を求めることができる。実施例1では、凹部14Bの面積比率が22%であった。 As shown in FIG. 5, in the plated film 13 of Example 1, since the boundary between the smooth portion 14A and the concave portion 14B is clear, the area ratio of the concave portion 14B can be obtained by image analysis. In Example 1, the area ratio of the concave portion 14B was 22%.

また、図6は、実施例1のめっき皮膜13形成後に、めっき皮膜13表面に共析した無機化合物粒子15であるリン酸マンガン粒子を塩酸で溶解させずに、#3000のエメリー紙で軽く水研した後のSEM画像(反射電子像)である。なお、図6は、SEMにより取得された反射電子像を、画像解析手法の一例である大津の二値化法を用いて二値化した画像である。図6では、重元素で構成される皮膜部14が露出している平滑部14Aが明るく、比較的軽元素で構成される無機化合物粒子15が埋まっている部分が暗く映し出されている。この場合、暗く映し出された無機化合物粒子15の部分を、処理液によって溶解されて凹部14Bが形成される部分とみなすことができる。このような手法によれば、より簡便に凹部14Bの面積比率を求めることができる。また、反射電子像ではなくEDSにより無機化合物粒子15固有の元素を検出しても同様の効果を得ることができる。 In addition, FIG. 6 shows that after forming the plating film 13 of Example 1, the manganese phosphate particles, which are the inorganic compound particles 15 codeposited on the surface of the plating film 13, were lightly washed with #3000 emery paper without dissolving with hydrochloric acid. It is an SEM image (backscattered electron image) after polishing. FIG. 6 is an image obtained by binarizing the backscattered electron image acquired by the SEM using Otsu's binarization method, which is an example of an image analysis method. In FIG. 6, the smooth portion 14A where the film portion 14 composed of the heavy element is exposed appears bright, and the portion where the inorganic compound particles 15 composed of the relatively light element are buried appears dark. In this case, the portion of the inorganic compound particles 15 that appears dark can be regarded as a portion that is dissolved by the treatment liquid to form the concave portion 14B. According to such a method, the area ratio of the concave portion 14B can be obtained more easily. Also, the same effect can be obtained by detecting an element specific to the inorganic compound particles 15 by EDS instead of the backscattered electron image.

[凹部個数評価方法、及び、凹部開口幅評価方法]
実施例1~8及び比較例1~6について、めっき皮膜上にその表面の保護を目的として銅めっきを電気めっきした後、樹脂埋めした。その後、めっき皮膜の厚さ方向を含む断面を観察可能に加工して断面のSEM画像を観察することにより、単位長さ100μmあたりでの1μm以上の深さを有する凹部の個数、及び、開口幅の総和を測定した。一例として、実施例1のめっき皮膜13の断面をSEMで観察した際の二次電子像を図7に示す。なお、図7中の破線200は、平滑部14Aの稜線を繋いだ線である。また、図7中の破線201は、破線200と同一形状の線であって、破線200から被めっき材11の方向に1μm平行移動させた線である。
[Method for evaluating the number of recessed portions and method for evaluating the opening width of recessed portions]
In Examples 1 to 8 and Comparative Examples 1 to 6, the plated film was filled with resin after electroplating with copper for the purpose of protecting the surface. After that, by processing the cross section including the thickness direction of the plating film so that it can be observed and observing the SEM image of the cross section, the number of recesses having a depth of 1 μm or more per unit length of 100 μm and the opening width was measured. As an example, FIG. 7 shows a secondary electron image when a cross section of the plating film 13 of Example 1 is observed with an SEM. A dashed line 200 in FIG. 7 is a line connecting the ridgelines of the smooth portion 14A. A dashed line 201 in FIG. 7 is a line having the same shape as the dashed line 200, and is a line translated from the dashed line 200 in the direction of the material to be plated 11 by 1 μm.

図7に示すように、実施例1のめっき皮膜13は、その表面に銅めっき層20が設けられている。実施例1において、平滑部14Aに対して1μm以上の深さを有する凹部14Bの個数が、単位長さ100μmあたり10個であった。また、1μm以上の深さを有する凹部の開口幅の総和が、単位長さ100μmあたり23μmであった。 As shown in FIG. 7, the plating film 13 of Example 1 is provided with a copper plating layer 20 on its surface. In Example 1, the number of concave portions 14B having a depth of 1 μm or more with respect to the smooth portion 14A was 10 per unit length of 100 μm. In addition, the total opening width of the concave portions having a depth of 1 μm or more was 23 μm per unit length of 100 μm.

[塗膜密着性評価方法]
実施例1~4及び比較例1~3について、めっき皮膜上にスプレー塗料(株式会社アサヒペン製、水性多用途スプレー黒)を塗装することで、乾燥膜厚15μm以上20μm以下の塗膜を形成した。その後、めっき皮膜上に形成された塗膜の上から、鋭利なカッターで基材表面に達する格子状のカット疵を形成した。具体的に、第1方向に延びるカット痕を1mm間隔で11本形成し、さらに、第1方向と直交する第2方向に延びるカット痕を1mm間隔で11本形成した。第2方向に延びる各カット痕は、第1方向に延びる各カット痕と交差するように形成された。次いで、めっき皮膜上に形成された塗膜の上にセロハンテープを付着させた後、セロハンテープを引き剥がした。そして、格子状のカット痕によって区画される100個の領域のうち塗膜が50%以上剥離した領域の個数を測定した。各カット痕によって区画される100個の領域のうち塗膜が50%以上剥離した領域の個数が11個以上のものを不良(×)とし、1個以上10個以下のものを並(△)とし、0個のものを良(〇)とした。
[Paint film adhesion evaluation method]
For Examples 1 to 4 and Comparative Examples 1 to 3, a coating film having a dry film thickness of 15 μm or more and 20 μm or less was formed by applying a spray paint (manufactured by Asahipen Co., Ltd., water-based multipurpose spray black) on the plating film. . After that, grid-like cut flaws reaching the base material surface were formed with a sharp cutter from above the coating film formed on the plating film. Specifically, 11 cut marks extending in the first direction were formed at intervals of 1 mm, and 11 cut marks extending in the second direction perpendicular to the first direction were formed at intervals of 1 mm. Each cut mark extending in the second direction was formed so as to cross each cut mark extending in the first direction. Then, after a cellophane tape was adhered onto the coating film formed on the plating film, the cellophane tape was peeled off. Then, the number of regions where 50% or more of the coating film was peeled off was measured among the 100 regions partitioned by the grid-like cut marks. Of the 100 regions partitioned by each cut mark, 11 or more regions where the coating film was peeled off by 50% or more were regarded as defective (x), and 1 or more and 10 or less were average (Δ). , and 0 pieces were evaluated as good (○).

[摺動性評価方法]
実施例5~8及び比較例4~6について、ボールオンディスク法による摩擦試験を用いて摺動性について評価した。球形試験片は、直径10mmのSUJ2Cを用いた。測定条件は、荷重が19.6N、摺動円直径が10mm、回転速度が300rpmであった。評価方法としては、回転時の摩擦力を摩擦係数μに換算し、摩擦係数μが0.1を超えるまでの時間を測定した。摩擦係数μが0.1を超えるまでの時間が、2000秒未満のものを不良(×)とし、2000秒以上4000秒未満のものを並(△)とし、4000秒以上6000秒未満のものを良(〇)とし、6000秒以上のものを最良(◎)とした。
[Method for evaluating slidability]
Examples 5 to 8 and Comparative Examples 4 to 6 were evaluated for slidability using a friction test by the ball-on-disk method. SUJ2C with a diameter of 10 mm was used as the spherical test piece. The measurement conditions were a load of 19.6 N, a sliding circle diameter of 10 mm, and a rotation speed of 300 rpm. As an evaluation method, the frictional force during rotation was converted into a coefficient of friction μ, and the time until the coefficient of friction μ exceeded 0.1 was measured. If the time until the coefficient of friction μ exceeds 0.1 is less than 2000 seconds, it will be judged as bad (×). It was rated as good (◯), and those of 6000 seconds or more were rated as best (⊚).

Figure 2023018763000002
Figure 2023018763000002

表1に示すように、実施例1~8では、凹部14Bの面積比率が2%以上50%以下であった。また、実施例1~8では、めっき皮膜13の断面において、100μmあたり凹部14Bの個数が1個以上100個以下であり、かつ、凹部14Bの開口幅の総和が100μmあたり2μm以上50μm以下であった。これに対して、比較例1,4では、凹部が確認されなかった。また、比較例2,5及び比較例3,6では、めっき皮膜の表面全体に凹部が観察され、凹部の面積比率が50%を超えた。なお、比較例3,6では、ニッケルめっき層の結晶が、(1.1.1)面および(3.1.1)面に強い配向性与えることで、表面全体が激しい凹凸形状を有しためっき皮膜が形成される。 As shown in Table 1, in Examples 1 to 8, the area ratio of the concave portion 14B was 2% or more and 50% or less. In Examples 1 to 8, the number of concave portions 14B per 100 μm in the cross section of the plating film 13 was 1 or more and 100 or less, and the total opening width of the concave portions 14B was 2 μm or more and 50 μm or less per 100 μm. rice field. In contrast, in Comparative Examples 1 and 4, no concave portion was observed. Moreover, in Comparative Examples 2 and 5 and Comparative Examples 3 and 6, recesses were observed on the entire surface of the plating film, and the area ratio of the recesses exceeded 50%. In Comparative Examples 3 and 6, the crystals of the nickel plating layer gave strong orientation to the (1.1.1) plane and (3.1.1) plane, so that the entire surface had a severe uneven shape. A plating film is formed.

そして、実施例1~4では、塗膜密着性評価において、比較例1~3よりも優れた結果が得られた。比較例1では、凹部が存在しないことから、めっき皮膜と塗膜との密着性が低かったものと考えられる。比較例2では、凹部を形成する際の酸によってめっき皮膜自体が変質したため、めっき皮膜と基材との間で剥離が生じたものと考えられる。比較例3では、凹部の面積こそ大きいものの、凹部を区画するめっき皮膜自体が滑らかな表面を有するため、めっき皮膜と塗膜との密着性が低かったものと考えられる。 In Examples 1 to 4, better results than Comparative Examples 1 to 3 were obtained in the coating film adhesion evaluation. In Comparative Example 1, it is considered that the adhesiveness between the plating film and the coating film was low because there were no concave portions. In Comparative Example 2, it is considered that the plated film itself was degraded by the acid during the formation of the recesses, resulting in separation between the plated film and the base material. In Comparative Example 3, although the area of the recesses was large, the adhesion between the plating film and the coating film was low because the plating film itself defining the recesses had a smooth surface.

また、実施例5~8では、摺動性評価において、比較例4~6よりも優れた結果が得られた。比較例4では、凹部が存在しないことから、めっき皮膜と固体潤滑皮膜との密着性が低いため、摺動に伴い固体潤滑皮膜が減少したものと考えられる。比較例5では、凹部を形成する際の酸によってめっき皮膜自体が変質したため、めっき皮膜と基材との間で剥離が生じたものと考えられる。比較例6では、凹部を区画するめっき皮膜自体が滑らかな表面を有するため、めっき皮膜が固体潤滑皮膜を維持できず摺動により固体潤滑皮膜が減少したものと考えられる。また、比較例5,6では、上記の理由に加えて、凹部の面積が大きく平滑部の面積が小さいため、摺動に伴い表面の凹凸形状が損なわれることで、固体潤滑皮膜を担持できなかったものと考えられる。 Further, in Examples 5-8, better results than Comparative Examples 4-6 were obtained in the slidability evaluation. In Comparative Example 4, since there were no concave portions, the adhesion between the plating film and the solid lubricating film was low. In Comparative Example 5, it is considered that the plated film itself was degraded by the acid during the formation of the recesses, resulting in separation between the plated film and the base material. In Comparative Example 6, it is considered that the solid lubricating film was reduced due to sliding because the plating film itself that defines the recesses had a smooth surface, so that the solid lubricating film could not be maintained by the plating film. Further, in Comparative Examples 5 and 6, in addition to the above reasons, since the area of the concave portion is large and the area of the smooth portion is small, the uneven shape of the surface is damaged due to sliding, and the solid lubricating film cannot be supported. It is considered to be

10…摺動部品
11…被めっき材
12…複合皮膜
13…めっき皮膜
14…皮膜部
14A…平滑部
14B…凹部
15…無機化合物粒子
16…表面層
DESCRIPTION OF SYMBOLS 10... Sliding part 11... Material to be plated 12... Composite film 13... Plating film 14... Film part 14A... Smooth part 14B... Recessed part 15... Inorganic compound particle 16... Surface layer

Claims (9)

被めっき材の表面に設けられためっき皮膜であって、
ニッケルまたはニッケル合金を含む皮膜部と、
前記皮膜部の内部に位置する絶縁体または半導体の無機化合物粒子と、を備え、
前記皮膜部の表面は、
前記被めっき材の表面に追従する平滑部と、
前記無機化合物粒子の外形の少なくとも一部に倣った形状を有する凹部と、を備える
めっき皮膜。
A plating film provided on the surface of a material to be plated,
a coating portion containing nickel or a nickel alloy;
Insulator or semiconductor inorganic compound particles located inside the coating,
The surface of the coating portion is
A smooth portion that follows the surface of the material to be plated;
and a concave portion having a shape following at least a part of the outer shape of the inorganic compound particles.
前記凹部は、前記平滑部に対して1μm以上の深さを有し、
前記めっき皮膜の厚さ方向を含む前記めっき皮膜の断面において、
前記凹部の個数は、前記皮膜部の表面に沿う一次元方向において、100μmあたり1個以上100個以下であり、
前記凹部の開口幅の総和は、前記一次元方向において、100μmあたり2μm以上50μm以下である
請求項1に記載のめっき皮膜。
The concave portion has a depth of 1 μm or more with respect to the smooth portion,
In the cross section of the plating film including the thickness direction of the plating film,
The number of recesses is 1 or more and 100 or less per 100 μm in a one-dimensional direction along the surface of the coating portion,
2. The plating film according to claim 1, wherein the total opening width of said concave portions is 2 μm or more and 50 μm or less per 100 μm in said one-dimensional direction.
前記皮膜部の表面において、前記凹部の面積が2%以上50%以下である
請求項1または2に記載のめっき皮膜。
The plating film according to claim 1 or 2, wherein the area of the concave portion is 2% or more and 50% or less on the surface of the film portion.
請求項1ないし3の何れか一項に記載のめっき皮膜と、
前記めっき皮膜の表面に位置する潤滑剤から構成される表面層と、を備える
複合皮膜。
A plating film according to any one of claims 1 to 3;
and a surface layer composed of a lubricant located on the surface of the plating film.
前記表面層は、前記潤滑剤として層状格子構造物を含む
請求項4に記載の複合皮膜。
5. The composite coating of claim 4, wherein the surface layer includes a layered lattice structure as the lubricant.
請求項4または5に記載の複合皮膜を備え、
前記複合皮膜の表面が摺動対象に摺接する面である
摺動部品。
Equipped with the composite coating according to claim 4 or 5,
A sliding part, wherein the surface of the composite coating is a surface that slides against a sliding object.
ニッケル成分が溶解し、かつ、絶縁体または半導体の無機化合物粒子が分散しためっき液を用いて、無電解めっき法または電気めっき法によって、前記ニッケル成分に由来したニッケルまたはニッケル合金を含む皮膜部を被めっき材の表面に析出させることで、前記皮膜部の内部及び表面に前記無機化合物粒子が共析しためっき皮膜を前記被めっき材の表面に形成する第一工程と、
前記めっき皮膜を、前記無機化合物粒子が可溶かつ前記皮膜部が不溶な溶液に接触させることによって、前記めっき皮膜の表面に存在する前記無機化合物粒子を溶解させて凹部を形成する第二工程と、を含む
めっき皮膜の製造方法。
Using a plating solution in which a nickel component is dissolved and inorganic compound particles of an insulator or a semiconductor are dispersed, a coating portion containing nickel or a nickel alloy derived from the nickel component is formed by an electroless plating method or an electroplating method. A first step of forming a plating film on the surface of the material to be plated, in which the inorganic compound particles codeposit on the inside and surface of the film portion by depositing on the surface of the material to be plated;
A second step of forming recesses by dissolving the inorganic compound particles present on the surface of the plating film by contacting the plating film with a solution in which the inorganic compound particles are soluble and the film portion is insoluble. A method for producing a plating film.
請求項7に記載のめっき皮膜の製造方法を用いて、被めっき材の表面に前記めっき皮膜を形成させた後、
潤滑剤からなる表面層を前記めっき皮膜の表面に形成する
複合皮膜の製造方法。
After forming the plating film on the surface of the material to be plated using the method for producing a plating film according to claim 7,
A method for producing a composite coating, wherein a surface layer made of a lubricant is formed on the surface of the plating coating.
請求項8に記載の複合皮膜の製造方法を用いて、摺動部品の表面に前記複合皮膜を形成する
摺動部品の製造方法。
A method for manufacturing a sliding component, wherein the composite coating is formed on a surface of a sliding component using the method for manufacturing a composite coating according to claim 8 .
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