JP2023016456A - ozone generator - Google Patents

Abstract

To provide an ozone generator with a length in a circumferential direction and a flow rate increased, when moving an oxygen-containing gas closer to a tube part in a radial direction and advancing in the circumferential direction of the tube part.SOLUTION: A Xe excimer lamp 27a includes a tube part 28, a positive electrode 29a, a negative electrode 29b and a guide 35a. The guide 35a is projecting from the negative electrode 29b toward an ozone release port 18. The tube part 28 has a central axis Oc aligned to a cross line of a reference plane Px and a reference plane Py orthogonal to each other. A nozzle 21a is arranged between one side of the first reference plane Px and the reference plane Py with regard to the central axis Oc, and sprays an oxygen-containing gas to hit the tube part 28 from a direction parallel to a cross section of the tube part 28 and oblique to both of the reference plane Px and the reference plane Py.SELECTED DRAWING: Figure 1

Description

The present invention relates to an ozone generator that uses vacuum ultraviolet rays from an excimer lamp to generate ozone.

Patent Literature 1 discloses an ozone generator that generates ozone using vacuum ultraviolet rays from an excimer lamp. In this ozone generator, a columnar tube of an excimer lamp having a central axis perpendicular to the laminar flow is placed in a space in which an oxygen-containing gas flows in parallel laminar flow in one direction. Ozone is generated from oxygen by the light irradiated to the

The ozone generator of Patent Literature 1 further includes a reflecting section that covers the downstream side of the pipe section in the flow direction of the laminar flow, and an adjacent body that is connected to the downstream side of the reflecting section. The reflecting part reflects the light radiated downstream from the pipe part to the pipe part, thereby enhancing the ozone generation efficiency. In addition, the adjacent body prevents an air stagnation portion from occurring on the downstream side of the reflecting portion.

Patent Literature 2 discloses an ozone generator in which a straight tube type excimer lamp is arranged such that its central axis is parallel to the flow direction of a fluid.

JP 2018-90450 A Japanese Patent No. 6778003

In an ozone generator that emits vacuum ultraviolet rays from an excimer lamp to generate ozone, the vacuum ultraviolet rays emitted from the excimer lamp can effectively generate ozone from oxygen in the air outside the excimer lamp tube. It is within 10 mm at most in the radial direction from the part. Therefore, in order to effectively generate ozone, it is necessary to increase the length of the flow in the circumferential direction while keeping the oxygen-containing gas sufficiently close to the tube portion in the radial direction.

The inventor of the present application performed a simulation analysis of the flow of gas in the ozone generator of Patent Document 1, and found that the gas hits the tube portion of the excimer lamp from the upstream side in a direction perpendicular to the central axis of the tube portion. Upon splitting into two streams, it was found that both split streams immediately left the tube. In other words, in the ozone generator of Patent Document 1, both the length of the flow in the circumferential direction along the pipe portion within 10 mm in the radial direction from the pipe portion of the excimer lamp and the flow rate are insufficient.

In Patent Document 2, since the oxygen-containing fluid is caused to flow in the axial direction of the excimer lamp, the length of the oxygen-containing fluid flowing within 10 mm from the tube portion of the excimer lamp is sufficient. However, since the tube is narrow, the flow rate is insufficient.

SUMMARY OF THE INVENTION An object of the present invention is to provide an ozonizer capable of increasing the circumferential length and the flow rate when oxygen-containing gas is allowed to radially approach a pipe portion and advance in the circumferential direction of the pipe portion. .

The ozone generator of the present invention is
a housing;
It has a tube portion, one electrode for applying a discharge voltage to the rare gas in the tube portion, and the other electrode as a ground electrode, and the central axis of the tube portion is set in the housing and perpendicular to each other. an excimer lamp arranged in the housing in alignment with the line of intersection of the reference plane and the second reference plane;
is arranged between one side of the first reference plane and one side of the second reference plane with respect to the central axis in the housing, is parallel to the cross section of the tube portion, and is parallel to the first reference plane and a nozzle that injects an oxygen-containing gas that hits the pipe from a direction that is inclined with respect to both reference planes of the second reference plane;
an ozone discharge port provided on the other side of the first reference plane with respect to the central axis and communicating between the inside and outside of the housing;
a guide projecting from the other electrode toward the ozone discharge port;
Prepare.

According to the present invention, the oxygen-containing gas from the nozzle is applied to the tube from a direction parallel to the cross section of the tube and inclined with respect to both the first and second reference planes, and On the ozone discharge port side of the pipe portion, a guide extends from the pipe portion in parallel with the first reference plane. This enhances the Coanda effect in the tube portion when the oxygen-containing gas advances in the circumferential direction of the tube portion toward the ozone discharge port side. As a result, it is possible to increase the circumferential length and the flow rate when the oxygen-containing gas is allowed to radially approach the tubular portion and progress in the circumferential direction of the tubular portion.

BRIEF DESCRIPTION OF THE DRAWINGS It is a block diagram of the ozone generator of 1st Embodiment. FIG. 3 is a perspective view of a nozzle and a Xe excimer lamp; It is an ozone generator block diagram of 2nd Embodiment. It is a block diagram of the ozone generator of 3rd Embodiment. 4 is a graph showing the relationship between transmission distance and illuminance in a Xe excimer lamp. FIG. 4 is a graph showing the relationship between the room volume and the operation time of the ozone generator for achieving a CT value of 330 using the exposure amount of vacuum ultraviolet rays as a parameter. FIG. FIG. 11 is a first analysis diagram of flow velocity contours and airflow directions; FIG. 4 is a first analysis diagram of streamlines; FIG. 10 is a second analysis diagram of flow velocity contours and airflow directions; FIG. 11 is a second analysis diagram of streamlines; FIG. 11 is a third analysis diagram of flow velocity contours and airflow directions; FIG. 11 is a third analysis diagram of streamlines; FIG. 11 is a fourth analysis diagram of flow velocity contours and airflow directions; FIG. 11 is a fourth analysis diagram of streamlines; FIG. 11 is a fifth analysis diagram of flow velocity contours and airflow directions; FIG. 11 is a fifth analysis diagram of streamlines; FIG. 11 is a sixth analysis chart of flow velocity contours and airflow directions; FIG. 11 is a sixth analysis diagram of streamlines; FIG. 11 is a seventh analysis diagram of flow velocity contours and airflow directions; FIG. 11 is a seventh analysis diagram of streamlines; FIG. 11 is an eighth analysis diagram of flow velocity contours and airflow directions; FIG. 11 is an eighth analysis diagram of streamlines; FIG. 10 is a ninth analysis diagram of flow velocity contours and airflow directions; FIG. 11 is a ninth analysis diagram of streamlines; 4 is a histogram showing the ratio of the amount of airflow flowing through the ozone generation region Ra of the pipe part 28 when the rotation angle α of the nozzle in the ozone generator is set to 0° for each residence time. 4 is a histogram showing the ratio of the amount of airflow flowing through the ozone generation area Ra of the tube part 28 when the rotation angle α of the nozzle in the ozone generator is set to 30° for each residence time. 4 is a histogram showing the ratio of the amount of airflow flowing through the ozone generation area Ra of the tube part 28 when the rotation angle α of the nozzle in the ozone generator is 60°, for each residence time. FIG. 4 is a configuration diagram of another embodiment of the Xe excimer lamp; FIG. 11 is a configuration diagram of still another embodiment of the Xe excimer lamp; FIG. 4 is a configuration diagram of another embodiment of the Xe excimer lamp; FIG. 10 is a diagram showing another embodiment of the guide; FIG. 10 is a diagram showing still another embodiment of the guide; FIG. 11 shows another embodiment of a guide;

Embodiments of the present invention will be described below. It goes without saying that the invention is not limited to the embodiments. In addition, the same code|symbol is used through all figures about a common component.

(First embodiment)
FIG. 1 is a configuration diagram of an ozone generator 10a of the first embodiment. The ozone generator 10 a has a housing 11 . The housing 11 is assumed to have a rectangular parallelepiped shape in FIG. 1 on the basis of simulation analysis described later. The shape of the housing 11 is changed to an optimum shape according to the use environment of the ozone generator 10a.

The housing 11, which is set in a rectangular parallelepiped shape, has an injection side wall portion 12a, an emission side wall portion 12b, and an upper wall portion 13a and a lower wall portion 13b. In the ozone generator 10a, the injection side wall portion 12a and the discharge side wall portion 12b face each other in the horizontal direction, and the upper wall portion 13a and the lower wall portion 13b face each other in the vertical direction. The ozone discharge port 18 is provided in the discharge side wall portion 12 b and communicates the inside and outside of the housing 11 .

Here, for convenience of explanation, a three-axis orthogonal coordinate system is defined. The X-axis is defined as the axis parallel to the facing direction of the injection sidewall 12a and the discharge sidewall 12b. The Y-axis is defined as an axis parallel to the facing direction of the upper wall portion 13a and the lower wall portion 13b. The Z-axis is defined as the axis perpendicular to both the X-axis and the Y-axis.

Further, a reference plane Px and a reference plane Py that are orthogonal to each other are defined in the housing 11 . The reference plane Px and the reference plane Py are set inside the housing 11 in order to determine the relative positional relationship between the ozone discharge port 18, the nozzle 21a and the Xe excimer lamp 27a, regardless of the shape of the housing 11. set. In this embodiment, the housing 11 has a rectangular parallelepiped shape, so the reference plane Px and the reference plane Py are set parallel to the upper wall portion 13a and the ejection side wall portion 12a, respectively.

Oc is the central axis of the tube portion 28 of the Xe excimer lamp 27a. The central axis Oc extends on the line of intersection between the reference plane Px and the reference plane Py.

α is defined as the rotation angle around the central axis Oc. In this embodiment, the increasing direction of the rotation angle α is clockwise in FIG. On the reference plane Px, the rotation angles on the ox direction with respect to the central axis Oc on the − side and the + side are set to 0° and 180°, respectively. As a result, the rotation angles on the Y-axis direction with respect to the central axis Oc on the reference plane Py on the + side and the - side are 90° and 270°, respectively.

The ozone discharge port 18 is provided in the discharge side wall portion 12b as a rectangular through hole elongated in the Z-axis direction, and communicates the inside and outside of the housing 11 with each other. In the ozone generator 10a, the center of the rectangular short side (the side in the Y-axis direction) of the ozone discharge port 18 is set on the reference plane Px.

FIG. 2 is a perspective view of the nozzle 21a and the Xe excimer lamp 27a. In FIGS. 1 and 2, the nozzle 21a has a casing 22a and an injection port 23a, and is attached to the injection side wall portion 12a at a rotation angle α=30° when viewed from the central axis Oc. The injection port 23a is formed at an end portion of the casing 22a inside the housing 11 and is oriented in the radial direction of the pipe portion 28 toward the central axis Oc.

A pressure pump (not shown) outside the housing 11 supplies air (eg, atmospheric air containing about 1/5 oxygen) into the casing 22a. This compressed air is jetted from the jet port 23a toward the pipe portion 28 in a direction of approximately a rotation angle α of 30° when viewed from the central axis Oc.

In the first embodiment, the nozzle 21a is attached to the injection side wall portion 12a in the direction of the rotation angle α=30° when viewed from the central axis Oc. However, the nozzle 21a, strictly speaking, the injection port 23a of the nozzle 21a, sees from the central axis Oc and the rotation angle α of 0° is in the range of 0°<α<90°. You just have to shoot it. That is, the injection direction is parallel to the cross section of the tube portion 28 between the negative side of the reference plane Px and the positive side of the reference plane Py with respect to the central axis Oc, and both reference planes Px and Py. It suffices if the direction is inclined with respect to

The Xe excimer lamp 27a includes a tube portion 28, a positive electrode 29a, a negative electrode 29b, and a guide 35a. Each of the positive electrode 29a and the negative electrode 29b has an inner peripheral surface whose cross section is an arc centered on the central axis Oc. The diameter of the arc of this inner peripheral surface is equal to the diameter of the tube portion 28 . The inner peripheral surfaces of the positive electrode 29a and the negative electrode 29b are brought into contact with the tube portion 28 at rotation angles α of 0° and 180°, respectively.

The positive electrode 29a and the negative electrode 29b are supplied with an AC voltage (eg, several thousand volts) from a power supply (not shown) outside the housing 11 . Xe (xenon) as a rare gas in the tube portion 28 discharges and emits vacuum ultraviolet rays when an AC discharge voltage is applied from the positive electrode 29a and the negative electrode 29b. The vacuum ultraviolet rays pass through the transparent tube wall of the tube portion 28 and generate ozone from oxygen existing on the outer peripheral side of the tube portion 28 .

The guide 35a has a flat plate shape, and the front end (the end on the negative side in the X-axis direction) is connected to the upper end (the end on the positive side in the Y-axis direction) of the negative electrode 29b, and the ozone discharge port 18 extends parallel to the reference plane Px. It protrudes toward In the ozone generator 10a, the guide 35a is above the reference plane Px.

In addition, in the ozone generator 10a, the negative electrode 29b and the guide 35a are integrally formed by bending a single metal material.

The action of the ozone generator 10a will be described. The main stream of air injected from the injection port 23a of the nozzle 21a advances in order as airflows Ga1, Ga2, and Ga3 inside the housing 11 . Then, the ozone-containing injection flow Go is jetted out of the ozone discharge port 18 from the ozone discharge port 18 . Note that the main stream is defined as an air stream that has a predetermined value or more of exposure to vacuum ultraviolet rays from the tube portion 28 among the air streams that flow along various routes in the housing 11 from the nozzle 21a to the ozone discharge port 18. .

The airflow Ga1 advances from the nozzle 21a toward the tube portion 28 . The airflow Ga2 advances in the circumferential direction of the pipe portion 28 through the ozone generation region Ra as a region exposed to the vacuum ultraviolet rays emitted from the pipe portion 28 within 10 mm in the radial direction from the pipe portion 28 . The airflow Ga3 advances toward the ozone discharge port 18 along the guide 35a.

In FIG. 1, the direction of the airflow Ga1 is the direction of the rotation angle α=30° viewed from the central axis Oc or the direction parallel thereto. In this way, the jet air from the jet port 23a intensively hits the circumferential position of the rotation angle α=30° or a rotation angle in the vicinity thereof in the pipe portion 28 .

Thereafter, although a portion of the air advances in the negative direction in the Y-axis direction, the main airflow Ga2 advances in the circumferential direction of the tube portion 28 in the clockwise direction in FIG. The ozone generation area Ra faces the exposed portion of the tube portion 28 from the positive electrode 29a and the negative electrode 29b, and is an area where the airflow Ga2 is exposed to vacuum ultraviolet rays having an illuminance equal to or higher than a predetermined value. As a result, the oxygen in the airflow Ga2 is smoothly converted to ozone.

After that, the airflow Ga3 advances along the upper surface of the guide 35a to the + side of the X axis. As a result of the existence of the upper surface of the guide 35a continuing to the exposed portion of the pipe portion 28, the Coanda effect of the exposed portion of the pipe portion 28 is enhanced, and the flow rate of the airflow Ga2 is increased. In this way, the amount of ozone generated and the generation efficiency can be increased.

Thereafter, the ozone-containing injection flow Go containing ozone is discharged to the outside from the ozone discharge port 18 . The ozone-containing jet Go is used, for example, for sterilization, deodorization, cleaning, and surface modification (eg, cleaning and surface modification of glass, wafers, etc.).

Since the guide 35a is coupled to the negative electrode 29b as the ground electrode, discharge between the negative electrode 29b and the guide 35a can be prevented. In addition, since the guide 35a protrudes from the end of the negative electrode 29b, the negative electrode 29b and the guide 35a can be easily processed from a single metal plate.

(Other embodiments)
3 and 4 are configuration diagrams of ozone generators 10b and 10c as other embodiments, respectively. Only differences from the ozone generator 10a will be described.

In FIG. 3, the ozone generator 10b has a nozzle 21b and a Xe excimer lamp 27b instead of the nozzle 21a and the Xe excimer lamp 27a of the ozone generator 10a. The Xe excimer lamp 27b has a guide 35b instead of the guide 35a of the Xe excimer lamp 27a. The ozonizer 10a and the ozonator 10b have a symmetrical structure with respect to the internal structure of the housing 11 with the reference plane Px as a plane of symmetry. That is, the nozzle 21b and the Xe excimer lamp 27b are symmetrical in shape and position to the nozzle 21a and the Xe excimer lamp 27a with respect to the reference plane Px.

The operation of the ozone generator 10b is such that the airflows in the housing 11, which were the airflows Ga1, Ga2, and Ga3 above the reference plane Px in the ozone generator 10a, are now below the reference plane Px. are changed to airflows Gb1, Gb2, and Gb3 at symmetrical positions.

The ozone generation region Rb has a symmetrical relationship with the ozone generation region Ra (FIG. 1) with the central axis Oc as a plane of symmetry. When the airflow Gb1 passes through the ozone generation region Rb, the airflow Gb1 is exposed to vacuum ultraviolet rays from the pipe portion 28, and oxygen is converted into ozone.

In FIG. 4, the ozone generator 10c has a structure in which the structure of the ozone generator 10a and the structure of the ozone generator 10b are overlapped in the structure in the housing 11. As shown in FIG. That is, the ozone generator 10c includes the nozzle 21a and the guide 35a of the ozone generator 10a above the reference plane Px (+ side with respect to the central axis Oc in the Y-axis direction). A nozzle 21b and a guide 35b of the ozone generator 10b are provided on the lower side (the negative side with respect to the central axis Oc in the Y-axis direction).

The ozone generator 10c has an action combining the action of the ozone generator 10a and the action of the ozone generator 10b. As a result, the amount of ozone generated by the ozone generator 10c is substantially the sum of the amounts of ozone generated by the ozone generators 10a and 10b.

(Characteristics of excimer lamp)
FIG. 5 is a graph showing the relationship between the transmission distance and the illuminance in the Xe excimer lamp 27 (generic term for the Xe excimer lamps 27a-27c). The transmission distance is the radial distance from the tube portion 28 of the Xe excimer lamp 27 to the outside. The Xe excimer lamp 27 radiates vacuum ultraviolet rays with a wavelength of 172 nm from the exposed portion. The characteristics of FIG. 5 are characteristics when vacuum ultraviolet rays are radiated to the atmosphere.

It can be seen from FIG. 5 that the illuminance decreases as the transmission distance increases, that is, as the distance from the pipe portion 28 increases in the radial direction. The illuminance of the vacuum ultraviolet rays is 1/10 of the surface of the tube portion 28 (transmission distance=0 mm) at the radial position where the radial distance is 10 mm.

In order to convert oxygen into ozone by vacuum ultraviolet rays having a wavelength of 172 nm, 1/10 or more of the illuminance immediately after transmission (illuminance on the surface of the tube portion 28) is required. 28 should be set as a region within a transmission distance of 10 mm or less from the surface of . In the ozone generator 10 (a generic term for the ozone generators 10a to 10c), the guide 35 (a generic term for the guides 35a and 35b) enhances the Coanda effect in the ozone generation regions Ra and Rb. It is possible to increase the amount of ozone generated by increasing the exposure amount Eq of the vacuum ultraviolet rays (FIG. 6, which will be described later).

FIG. 6 is a graph showing the relationship between the room volume (m ³ ) for achieving a CT value of 330 and the operation time (minutes) of the ozone generator 10a using the exposure amount Eq of the vacuum ultraviolet rays as a parameter. The exposure amount Eq (mW/cm ² ×sec) of the vacuum ultraviolet rays is calculated by the illuminance (W/cm ² ×irradiation time (minutes)) of the vacuum ultraviolet rays in the tube portion 28. The CT value is the exposure to ozone. It is the amount, and is calculated by ozone concentration (ppm) x contact time (minutes).

If the CT value is increased, the sterilization efficiency is improved. As can be seen from FIG. 6, when the volume of the room is the same, the operation time of the ozone generator 10 can be shortened as the exposure amount Eq of the vacuum ultraviolet rays increases. In order to shorten the operation time of the ozone generator 10a, it is desirable that the radial length of the ozone generation regions Ra and Rb in the ozone generator 10 be within 10 mm, which is within 10 mm of the permeation distance.

(simulation analysis)
7A to 15B are diagrams obtained by analyzing the state of the airflow inside the housing 11 by simulation by changing the rotation angle α of the mounting position of the nozzle and the length of the guide 35a. In FIGS. 7A to 15B, analysis items (drawing numbers with suffix A are analysis diagrams of flow velocity contours and flow directions. Drawing numbers with suffix B are analysis diagrams of streamlines. ), and the rotation angle α of the nozzle and the length of the guide 35 are shown in Table 1 below.

In Table 1, guide length=0 mm means that the Xe excimer lamp does not have a guide (FIGS. 7A-9B). The aforementioned guide 35a corresponds to guide length=20 mm in Table 1 and is analyzed in FIGS. 10A-12B. In Table 1, guide length=40 mm means with guide 60, analyzed in FIGS. 13A-15B.

In FIGS. 7A to 15B, the nozzles 21a, 51, 53 are nozzles whose mounting positions have rotation angles α of 30°, 0°, and 60°, respectively. Analytical diagrams of the ozone generator 10a of FIG. 1 are FIGS. 11A and 11B.

The following observations can be made from analysis of the analytical diagrams of FIGS. 7A-14B.

(m1) Analysis diagrams for rotation angle α = 0° (Figs. 7A, 7B, 10A, 10B, 13A and 13B) and analysis diagrams for rotation angle α = 30° (Figs. 8A, 8B, and 11A, FIG. 11B, FIGS. 14A and 14B) or the analysis diagram of the rotation angle α=60° (FIGS. 9A, 9B, 12A, 12B, 15A and 15B), the rotation angle α=0 It can be seen that the flow rate of the airflow Ga2 (FIG. 1) is greater when the rotation angle α is 30° or 60° than when the rotation angle is °.

As the reason for (m1) above, by setting the mounting position of the nozzle 21a so that the rotation angle α is in the range of 0°<α<90° when viewed from the central axis Oc, that is, the jet air from the nozzle 21 is positioned on the reference plane Px If the airflow is not parallel to the reference plane Px, but obliquely to the reference plane Py, the amount of the airflow that hits the pipe section 28 and is divided into two above the reference plane Px increases. can be considered.

(m2) When the jet air from the nozzle 21a is applied to the pipe portion 28 obliquely with respect to the reference plane Px and the reference plane Py, the analysis diagram without a guide (FIGS. 8A-9B) and the analysis diagram with a guide ( 11A-12B and 14A-15B), it can be seen that the flow rate of the airflow Ga2 passing through the ozone generation region Ra (FIG. 1) increases with the presence of the guide.

A possible reason for (m2) is that the Coanda effect is enhanced by the addition of the guide.

(m3) At the same rotation angle α (however, 0° < α < 90°), for the upper branch flow, the analysis diagram (FIGS. 11A-12B) and the guide length when the guide length is 20 mm 14A-15B), it is better to extend the guide so that the rear end of the guide (the end on the side of the ozone discharge port 18) is closer to the ozone discharge port 18. It can be seen that the tendency to go straight towards the exit 18 increases.

The reason for (m3) is that the guide has the function of guiding the airflow while exhibiting the Coanda effect, and if the guide protrudes closer to the ozone discharge port 18, it deviates in the Y-axis direction accordingly. This is thought to be due to the suppression of

(Ozone generation efficiency)
16A, 16B, and 16C show the ratio of the amount of airflow flowing through the ozone generation region Ra of the pipe portion 28 when the rotation angles α of the nozzle in the ozone generator 10a are set to 0°, 30°, and 60°, respectively. It is a histogram shown according to stay time. The numerical value on the horizontal axis is the average stay time in each segment. The numerical value of the flow rate ratio on the vertical axis is the relative value of the ratio.

From FIGS. 16A-16C, the following findings are obtained.

(n1) When the rotation angle α=0°, the airflow in the ozone generation area Ra concentrates for a very short stay time.

(n2) When the rotation angle α is 30° or 60°, the airflow in the ozone generation area Ra shifts to a longer residence time than when the rotation angle α is 0°, and the residence time is dispersed.

(n3) When the rotation angle α is 30°, the airflow in the ozone generation area Ra shifts to a longer residence time and is dispersed more widely when the rotation angle α is 30° than when the rotation angle α is 60°. When the rotation angle α=60°, the stay time shifts to a longer side than when the rotation angle α=0°. The proportion of those with shorter time increases. This is because, in FIGS. 12A and 12B, when the flow that hits the pipe portion 28 splits, the component that directly flows to the lower portion of the pipe portion 28 increases.

(Other Examples of Xe Excimer Lamp)
17A to 17C are configuration diagrams of Xe excimer lamps 61a, 61b and 67, respectively, as other examples of the Xe excimer lamp. 17A to 17C, elements common to FIG. 1 (including descriptive elements such as the reference plane Px) are denoted by the same reference numerals as those used in FIG.

A Xe excimer lamp 61 a ( FIG. 17A ) has a double cylindrical tube portion 62 . The double cylindrical tube portion 62 has an inner peripheral surface 63 and an outer peripheral surface 64 coaxial with the central axis Oc. The inner peripheral surface 63 defines a hollow space with a circular cross section on the inner peripheral side. The axial center electrode 69a extends in the hollow space along the central axis Oc. The peripheral electrode 69b of the ground electrode has a semicircular cross section whose inner peripheral side coincides with the peripheral contour of the outer peripheral surface 64, and is fitted to the outer peripheral surface 64 below the reference plane Px to form the outer peripheral surface 64. covering. The length of the central electrode 69 a and the peripheral electrode 69 b is approximately equal to the axial length of the double cylindrical tube portion 62 .

In addition, the rotation angle range occupied by the peripheral electrode 69b in the circumferential direction of the double cylindrical tube portion 62 is smaller than 180°. Therefore, both circumferential ends of the peripheral electrode 69b are positioned below the reference plane Px. A flat plate-shaped guide 75a projecting from the end of the peripheral electrode 69b on the side of the ozone discharge port 18 (FIG. 1) toward the ozone discharge port 18 is also arranged parallel to the reference plane Px below the reference plane Px. there is

In the Xe excimer lamp 61a, similarly to the Xe excimer lamp 27a, jet air is applied to the outer peripheral surface 64 from a direction where the rotation angle α is 0°<α<90° when viewed from the central axis Oc or in a direction parallel thereto. As with the Xe excimer lamp 27a, the air that hits the outer peripheral surface 64 passes through the ozone generation area Ra set for the Xe excimer lamp 61a in an airflow Ga2, and then flows along the upper surface side of the guide 75a. It passes through with an airflow Ga3.

The Xe excimer lamp 61b (FIG. 17B) has mesh electrodes 70 and guides 75b instead of the peripheral electrodes 69b and guides 75a of the Xe excimer lamp 61a. The mesh electrode 70 covers the outer peripheral surface 64 of the double cylindrical tube portion 62 over the entire circumference and the entire length in the axial direction. The guide 75b protrudes from the circumferential position where the rotation angle α of the double cylindrical tube portion 62 is 180° toward the + side of the X axis.

The vacuum ultraviolet rays generated within the double cylindrical tube portion 62 radiate radially from between the mesh electrodes 70 . In the Xe excimer lamp 61b as well, similarly to the Xe excimer lamp 61a, jet air is blown onto the outer peripheral surface 64 from a direction in which the rotation angle α is in the range of 0°<α<90° when viewed from the central axis Oc, or from a direction parallel thereto. be guessed. The subsequent action is the same as that of the Xe excimer lamp 61a.

In FIG. 10C, the Xe excimer lamp 67 includes an arc-shaped positive electrode 71a and a negative electrode 71b having a central angle of less than 90° on the inner periphery with respect to the central axis Oc. The positive electrode 71a has its inner peripheral surface in contact with the tube portion 28 so as to cover the tube portion 28 in the range of 0°≧α>−90° from the lower side of the reference plane Px. The negative electrode 71b has its inner peripheral surface in contact with the tube portion 28 so as to cover the tube portion 28 with a rotation angle α in the range of 90°>α≧−180°.

The positive electrode 71a and the negative electrode 71b have a symmetrical positional relationship with respect to the reference plane Py and are separated in the circumferential direction. The guide 75c protrudes from the + side end (the rotation angle α of this end is 180°) in the X-axis direction of the negative electrode 71b toward the + side in the X-axis direction.

The method of generating ozone from airflow and oxygen in the Xe excimer lamp 67 is the same as in the Xe excimer lamp 27 . Since the upper half of the tube portion 28 of the Xe excimer lamp 67 is exposed with respect to the reference plane Px, the rotation angle range of the ozone generation area Ra can be increased.

(Another example of a guide)
18A-18C are diagrams showing another embodiment of the guide. The difference between each guide and the guide 35a of the nozzle 21a will be described.

In the Xe excimer lamp 27u of FIG. 18A, the front end of the guide 35u in the flow direction of the airflow, that is, the negative end in the X-axis direction has the same rotation angle α as the guide 35a. However, while the guide 35a protrudes toward the ozone discharge port 18 in parallel with the reference plane Px, the guide 35u is inclined to the negative side of the Y-axis and protrudes to the + side of the X-axis. there is

Like the guide 35u, the one that is inclined downward toward the ozone discharge port 18 is located within 10 mm in the radial direction from the tube portion 28 at the vacuum ultraviolet ray exposed portion of the tube portion 28. It may be possible to increase the Coanda effect that advances in the circumferential direction.

In the Xe excimer lamp 27v of FIG. 18B, the guide 35v is connected to the negative electrode 29b at the circumferential position where the rotation angle α of the negative electrode 29b is 180° at the front end, and protrudes to the + side of the X axis parallel to the reference plane Px. . The Xe excimer lamp 27v can replace the Xe excimer lamp 27c in the ozone generator 10c of FIG.

In the Xe excimer lamp 27v, one guide 35v doubles as the guides 35a and 35b of the Xe excimer lamp 27c. This simplifies the configuration.

The Xe excimer lamp 27w of FIG. 18C has a guide 35w instead of the guide 35a of the Xe excimer lamp 27a. The guide 35a (FIG. 1) is entirely parallel to the reference plane Px, whereas the guide 35w extends parallel to the reference plane Px from the front end to the middle in the X-axis direction. , the range from the middle to the rear end is inclined with respect to the reference plane Px.

As can be seen in Figures 11A and 12A, the airflow coming along the guide 35a toward the ozone outlet 18 tends to change direction upward after passing the rear end of the guide 35a. . Since the rear end portion of the guide 35w is inclined downward, it is possible to suppress displacement in the Y-axis direction after the airflow passes through the guide 35w.

(Modification)
The nozzles 21 and 53 of the embodiment have rotation angles α of 30° and 60°, respectively, when viewed from the central axis Oc. In the present invention, the rotation angle α of the nozzle may be in the range between the reference planes Px and Py and in a direction oblique to the reference planes Px and Py.

In the embodiment, the increasing direction of the rotation angle α is defined as the clockwise direction in FIG. 1, but in the present invention, it may be the counterclockwise direction.

In the embodiment, the ground electrode is the negative electrode. In the present invention, the one electrode and the other electrode as the ground electrode may be the negative electrode and the positive electrode, respectively.

In the embodiment, the nozzle is attached to the jet sidewall 12 a of the housing 11 . In the present invention, the nozzle may be attached to the upper wall portion 13a.

In the embodiment, a Xe excimer lamp is employed as the excimer lamp. In the present invention, the excimer lamp need not be a Xe excimer lamp as long as it emits light that generates ozone from oxygen. That is, the rare gas does not have to be Xe (xenon).

In embodiments, atmospheric air is used as the oxygen-containing gas. In the present invention, an oxygen-containing gas (having an oxygen concentration different from that of the atmosphere) dedicated to ozone generation can be used to increase the efficiency of ozone generation.

In the embodiment, the nozzle injects the oxygen-containing gas from directions with rotation angles α of 30° and 60° when viewed from the central axis Oc. In the present invention, the jet air from the nozzle blows the oxygen-containing gas so that it hits the pipe from a direction parallel to the cross section of the pipe and inclined with respect to both the first and second reference planes. Injection is enough. That is, when viewed from the central axis Oc, the nozzle should inject the oxygen-containing gas from a direction where the rotation angle α is 0°<α<90°.

Preferably, the nozzle injects the oxygen-containing gas from a direction where the rotation angle α is 10°≦α≦40° when viewed from the central axis Oc. The reason is that if α>40°, the nozzle must be attached to the upper wall portion 13a instead of the injection side wall portion 12a, which complicates the attachment.

In the embodiment, the ozone outlet 18 has its centerline on the reference plane Px. In the present invention, the center line of the ozone discharge port 18 may be shifted in the Y-axis direction with respect to the reference plane Px.

10a, 10b, 10c...ozone generator, 11...housing, 18...ozone discharge port, 21a, 21b, 53...nozzle, 28...pipe, 29a, 71a,... Positive electrode (one electrode), 29b, 71b Negative electrode (other electrode), 35, 60, 75 Guide, 27a, 27b, 27c, 27u, 27v, 27w, 57, 61a, 61b, 67 Xe excimer lamp (excimer lamp), 62 Double cylindrical tube portion (tube portion), 69a Center electrode (one electrode), 69b Peripheral electrode (other electrode), 70 Mesh Electrode (other electrode), Px... reference plane (first reference plane), Py... reference plane (second reference plane), Oc... central axis.

Claims (7)

a housing;
It has a tube portion, one electrode for applying a discharge voltage to the rare gas in the tube portion, and the other electrode as a ground electrode, and the central axis of the tube portion is set in the housing and perpendicular to each other. an excimer lamp arranged in the housing in alignment with the line of intersection of the reference plane and the second reference plane;
is arranged between one side of the first reference plane and one side of the second reference plane with respect to the central axis in the housing, is parallel to the cross section of the tube portion, and is parallel to the first reference plane and a nozzle that injects an oxygen-containing gas that hits the pipe from a direction that is inclined with respect to both reference planes of the second reference plane;
an ozone discharge port provided on the other side of the first reference plane with respect to the central axis and communicating between the inside and outside of the housing;
a guide projecting from the other electrode toward the ozone discharge port;
An ozone generator comprising: The ozone generator according to claim 1,
The one electrode and the other electrode are arranged symmetrically with respect to the second reference plane,
The ozone generator, wherein the guide is formed integrally with the other electrode. The ozone generator according to claim 1,
The tube portion is double cylindrical,
The one electrode extends along the central axis on the inner peripheral side of the tubular portion,
the other electrode covering the outer circumference of the pipe portion with a mesh all around or partially covering it in the circumferential direction;
The ozonizer according to claim 1, wherein the guide protrudes from the other electrode on the other side of the first reference plane. In the ozone generator according to any one of claims 1 to 3,
When the rotation angle around the central axis is defined such that the one side of the first reference plane and the one side of the second reference plane are 0° and 90°, respectively, with respect to the central axis, the nozzle is , an ozonizer that injects an oxygen-containing gas toward the pipe portion at a rotation angle within the range of 10° to 40°. In the ozone generator according to any one of claims 1 to 4,
The length of the guide is set so that the airflow that has flowed along the guide from the tube portion, after passing through the guide, advances to the ozone discharge port without hitting the inner surface of the housing. An ozone generator characterized by the following. In the ozone generator according to any one of claims 1 to 5,
An ozone generator, wherein the nozzle and the guide are provided on both sides of the first reference plane as a plane of symmetry. In the ozone generator according to claim 6,
An ozone generator, wherein one guide formed along the plane of symmetry doubles as each guide on each side of the plane of symmetry.

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