JP2022540515A - 高出力用途のための横方向励起フィルムバルク音響共振器 - Google Patents
高出力用途のための横方向励起フィルムバルク音響共振器 Download PDFInfo
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- JP2022540515A JP2022540515A JP2022518002A JP2022518002A JP2022540515A JP 2022540515 A JP2022540515 A JP 2022540515A JP 2022518002 A JP2022518002 A JP 2022518002A JP 2022518002 A JP2022518002 A JP 2022518002A JP 2022540515 A JP2022540515 A JP 2022540515A
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02125—Means for compensation or elimination of undesirable effects of parasitic elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/566—Electric coupling means therefor
- H03H9/568—Electric coupling means therefor consisting of a ladder configuration
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/578,811 US10637438B2 (en) | 2018-06-15 | 2019-09-23 | Transversely-excited film bulk acoustic resonators for high power applications |
| PCT/US2020/054811 WO2021062421A1 (en) | 2019-09-23 | 2020-10-08 | Transversely-excited film bulk acoustic resonators for high power applications |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2022540515A true JP2022540515A (ja) | 2022-09-15 |
Family
ID=75166507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022518002A Pending JP2022540515A (ja) | 2019-09-23 | 2020-10-08 | 高出力用途のための横方向励起フィルムバルク音響共振器 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2022540515A (de) |
| CN (5) | CN116545408A (de) |
| DE (1) | DE112020004488B8 (de) |
| WO (1) | WO2021062421A1 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024043344A1 (ja) * | 2022-08-26 | 2024-02-29 | 株式会社村田製作所 | 弾性波装置 |
| WO2024055388A1 (en) * | 2022-09-14 | 2024-03-21 | Huawei Technologies Co., Ltd. | Acoustic resonator |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017188342A1 (ja) * | 2016-04-27 | 2017-11-02 | 京セラ株式会社 | 弾性波素子および通信装置 |
| WO2020100744A1 (ja) * | 2018-11-16 | 2020-05-22 | 株式会社村田製作所 | 弾性波装置 |
| US20200295729A1 (en) * | 2019-03-14 | 2020-09-17 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with partial bragg reflectors |
| US20200304091A1 (en) * | 2018-06-15 | 2020-09-24 | Resonant Inc. | Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in bragg reflector stack |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5601377B2 (ja) * | 2010-11-30 | 2014-10-08 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
| CN106664072A (zh) * | 2014-07-31 | 2017-05-10 | 天工滤波方案日本有限公司 | 声波滤波器和使用其的双工器 |
| JP2017224890A (ja) | 2016-06-13 | 2017-12-21 | 株式会社村田製作所 | 弾性波装置 |
| US10491192B1 (en) | 2018-06-15 | 2019-11-26 | Resonant Inc. | Transversely-excited film bulk acoustic resonator |
| CN113765495A (zh) * | 2020-05-19 | 2021-12-07 | 谐振公司 | 用于大功率应用的使用yx切割的铌酸锂的横向激励的薄膜体声波谐振器 |
-
2020
- 2020-10-08 CN CN202310513637.XA patent/CN116545408A/zh active Pending
- 2020-10-08 CN CN202310511615.XA patent/CN116545405A/zh active Pending
- 2020-10-08 JP JP2022518002A patent/JP2022540515A/ja active Pending
- 2020-10-08 WO PCT/US2020/054811 patent/WO2021062421A1/en active Application Filing
- 2020-10-08 DE DE112020004488.2T patent/DE112020004488B8/de active Active
- 2020-10-08 CN CN202310513628.0A patent/CN116545407A/zh active Pending
- 2020-10-08 CN CN202310512524.8A patent/CN116545406A/zh active Pending
- 2020-10-08 CN CN202080066592.0A patent/CN115004548B/zh active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017188342A1 (ja) * | 2016-04-27 | 2017-11-02 | 京セラ株式会社 | 弾性波素子および通信装置 |
| US20200304091A1 (en) * | 2018-06-15 | 2020-09-24 | Resonant Inc. | Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in bragg reflector stack |
| WO2020100744A1 (ja) * | 2018-11-16 | 2020-05-22 | 株式会社村田製作所 | 弾性波装置 |
| US20200295729A1 (en) * | 2019-03-14 | 2020-09-17 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with partial bragg reflectors |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021062421A1 (en) | 2021-04-01 |
| CN115004548A (zh) | 2022-09-02 |
| CN115004548B (zh) | 2023-05-26 |
| CN116545407A (zh) | 2023-08-04 |
| CN116545406A (zh) | 2023-08-04 |
| DE112020004488T5 (de) | 2022-10-13 |
| DE112020004488B4 (de) | 2023-05-25 |
| CN116545405A (zh) | 2023-08-04 |
| CN116545408A (zh) | 2023-08-04 |
| DE112020004488B8 (de) | 2023-08-03 |
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