JP2022509079A - 窒化ホウ素ナノ構造体 - Google Patents
窒化ホウ素ナノ構造体 Download PDFInfo
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- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims abstract description 157
- 229910052582 BN Inorganic materials 0.000 title claims abstract description 155
- 239000002086 nanomaterial Substances 0.000 title claims abstract description 63
- 239000000463 material Substances 0.000 claims abstract description 84
- 239000002243 precursor Substances 0.000 claims abstract description 80
- 230000005855 radiation Effects 0.000 claims abstract description 64
- 238000000034 method Methods 0.000 claims abstract description 46
- 238000002679 ablation Methods 0.000 claims description 39
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 239000002135 nanosheet Substances 0.000 claims description 14
- 239000002064 nanoplatelet Substances 0.000 claims description 9
- 239000002073 nanorod Substances 0.000 claims description 8
- 239000002116 nanohorn Substances 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 5
- 229910052724 xenon Inorganic materials 0.000 claims description 4
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 4
- 239000002071 nanotube Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000003708 ampul Substances 0.000 description 15
- 239000005350 fused silica glass Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000000724 energy-dispersive X-ray spectrum Methods 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 241000234282 Allium Species 0.000 description 5
- 235000002732 Allium cepa var. cepa Nutrition 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 4
- 238000003917 TEM image Methods 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 3
- 238000000619 electron energy-loss spectrum Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 229910052984 zinc sulfide Inorganic materials 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910001507 metal halide Inorganic materials 0.000 description 2
- 150000005309 metal halides Chemical class 0.000 description 2
- 239000002077 nanosphere Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000008707 rearrangement Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 238000010583 slow cooling Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 231100000481 chemical toxicant Toxicity 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005430 electron energy loss spectroscopy Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- VSQYNPJPULBZKU-UHFFFAOYSA-N mercury xenon Chemical compound [Xe].[Hg] VSQYNPJPULBZKU-UHFFFAOYSA-N 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- -1 nanohorns Substances 0.000 description 1
- 239000002074 nanoribbon Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/064—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
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Abstract
Description
実施例
装置
図2に示すような装置を使用して、ランプアブレーションを実施した。大きな楕円反射面鏡は、焦点に位置する定格7kWの連続する超高輝度のキセノンショートアーク放電ランプ内部において、ランプ由来のプラズマの出力密度を再現する。メーカーのランプ放射輝度データをレイトレースシミュレーション結果と統合することによって推測すると、焦点領域におけるピーク放射照度は、300mm2以下の領域上で6W/mm2以下であった。
使用した窒化ホウ素前駆体パウダーは分析グレードh-BNであり、前記窒化ホウ素前駆体パウダーを、各々密閉した2つの溶融石英層からなる真空状態の石英アンプルに封入した。可能な限り多量の前駆体パウダーを、直接、確実に放射するように、放射したアンプルを60秒毎に180°以下回転させた。別の実験では、ランプアブレーションを連続して30分間および50分間実施した。
製品ナノ構造体とBN前駆体材料とを区別するために、まず、h-BN前駆体パウダーのTEM画像(図4(a))とSEM画像(図4(b))を作成した。これらの画像によって、前駆体が特異な六方晶形を有し、高純度であることが確認される。図4(c)は、X線回折(X-Ray Diffraction:XRD)パターンを示す。前記パターンにおいて、d-間隔での4つのピーク、3.32805Å、2.16692Å、2.06206Å、1.81562Å、および1.66521Åを、それぞれ、(002)面、(100)面、(101)面、(102)面、および(004)面に対するh-BNとして示すことができる。格子定数は、a=2.502Å、c=6.656Åであり、これらは、文献値、a=2.5044、c=6.6562(JCPDSカードNo.34-421)に近似する。
製品ナノ構造体とBN前駆体材料とを区別するために、まず、h-BN前駆体パウダーのTEM画像(図4(a))とSEM画像(図4(b))を作成した。これらの画像によって、前駆体が特異な六方晶形を有し、高純度であることが確認される。図4(c)は、X線回折(X-Ray Diffraction:XRD)パターンを示す。前記パターンにおいて、d-間隔での5つのピーク、3.32805Å、2.16692Å、2.06206Å、1.81562Å、および1.66521Åを、それぞれ、(002)面、(100)面、(101)面、(102)面、および(004)面に対するh-BNとして示すことができる。格子定数は、a=2.502Å、c=6.656Åであり、これらは、文献値、a=2.5044、c=6.6562(JCPDSカードNo.34-421)に近似する。
Claims (21)
- 窒化ホウ素ナノ構造体を製造する方法であって、断熱的放射遮蔽環境内で窒化ホウ素前駆体材料をランプアブレーションすることを含む、方法。
- 製造された前記ナノ構造体は、ナノオニオン構造体を含む、請求項1に記載の方法。
- 製造された前記ナノ構造体は、少なくとも50wt%のナノオニオン構造体を含む、請求項1または2に記載の方法。
- ランプアブレーションされる前記窒化ホウ素前駆体材料は、非晶質窒化ホウ素、六方晶窒化ホウ素、立方晶窒化ホウ素、ウルツ鉱型窒化ホウ素、または、これらのうち2つ以上の組み合わせを含む、請求項1~3のいずれか1項に記載の方法。
- ランプアブレーションされる前記窒化ホウ素前駆体材料は、六方晶窒化ホウ素を含む、請求項1~4のいずれか1項に記載の方法。
- ランプアブレーションされる前記窒化ホウ素前駆体材料は、窒化ホウ素ナノホーン、窒化ホウ素ナノロッド、窒化ホウ素ナノチューブ、窒化ホウ素ナノシート、窒化ホウ素ナノプレートレット、窒化ホウ素ナノオニオン、またはこれらのうち2つ以上の組み合わせを含む、請求項1~5のいずれか1項に記載の方法。
- ランプアブレーションされる前記窒化ホウ素前駆体材料を、前記ランプアブレーションのためのランプ放射の中で回転させる、請求項1~6のいずれか1項に記載の方法。
- 前記ランプアブレーションは、キセノンガス放電ランプを使用して実施される、請求項1~7のいずれか1項に記載の方法。
- 前記ランプアブレーションは、前記窒化ホウ素前駆体材料にランプ放射を集束させるために、楕円面鏡を使用して実施される、請求項1~8のいずれか1項に記載の方法。
- 前記窒化ホウ素前駆体材料は、少なくとも5分間、ランプアブレーションされる、請求項1~9のいずれか1項に記載の方法。
- 前記窒化ホウ素前駆体材料は、大気圧未満の圧力でランプアブレーションされる、請求項1~10のいずれか1項に記載の方法。
- 前記窒化ホウ素前駆体材料は、約1,400℃~約3,500℃の範囲の温度でランプアブレーションされる、請求項1~11のいずれか1項に記載の方法。
- 製造された前記ナノ構造体は、ナノプレートレット構造体を含む、請求項1~12のいずれか1項に記載の方法。
- 製造された前記ナノ構造体は、ナノロッド構造体を含む、請求項1~13のいずれか1項に記載の方法。
- 製造された前記ナノ構造体は、ナノホーン構造体を含む、請求項1~14のいずれか1項に記載の方法。
- 製造された前記ナノ構造体は結晶である、請求項1~14のいずれか1項に記載の方法。
- 前記断熱的放射遮蔽環境は、溶融石英を含む容器の形態をとる、請求項1~15のいずれか1項に記載の方法。
- 前記窒化ホウ素前駆体材料を含む前記容器は、前記ランプアブレーションのためのランプの焦点に位置する、または前記焦点に近い場所に位置する、請求項16に記載の方法。
- 製造される前記窒化ホウ素ナノ構造体は、前記ランプの前記焦点から約6cm~約30cm離れて位置する前記容器内で形成される、請求項17に記載の方法。
- 前記容器は、密閉され、かつ、2つ以上の材料層を有し、前記材料層は、それぞれ、間隔をおいて配置され、かつ、密閉されている、請求項16~18のいずれか1項に記載の方法。
- 前記窒化ホウ素前駆体材料は、ランプアブレーションに、複数回、曝露される、請求項1~19のいずれか1項に記載の方法。
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