JP2022505202A - Vacuum pump temperature control method, as well as related vacuum pumps and their equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To propose a dry vacuum pump type vacuum pump and a temperature control method of a vacuum pump capable of preventing disappearance and seizure of a gap in particular.
The present invention relates to a temperature control method (100) for a dry vacuum pump type vacuum pump (2) exposed to fluctuations in intake / exhaust load, wherein the temperature of the vacuum pump (2) is a set temperature and a stator (5). ), In the temperature control method (100) of the dry vacuum pump type vacuum pump (2) controlled by at least one cooling element (11a, 11b) coupled to the stator (5). Monitoring monitors whether the value of the parameter indicating the intake / exhaust load selected from either the current induced by the vacuum pump (2) or the power consumed is below the load threshold, and monitors the intake / exhaust load. When the value of the parameter indicating the exhaust load is lower than the load threshold value, the set temperature is raised.
The present invention also relates to the dry vacuum pump type vacuum pump and its equipment.
[Selection diagram] Fig. 1

Description

The present invention relates to a temperature control method for a dry vacuum pump type vacuum pump. The present invention also relates to a dry vacuum pump type vacuum pump provided with means for carrying out this temperature control method. The present invention also relates to equipment provided with this dry vacuum pump.

The dry vacuum pump type low vacuum pump is provided with several intake / exhaust stages in series, through which the intake / exhaust gas circulates between the intake port and the exhaust port. Among the known low vacuum pumps, those with a rotary lobe, also known as the "roots" pump, and those with two or more lobes, also known as "claw" pumps and screw pumps. It is distinguished from. Also, one-stage or two-stage roots compressor (or more generally "roots blower") type vacuum pumps used upstream of low vacuum pumps to increase intake and exhaust capacity under very high flow conditions. Are known.

These vacuum pumps are "dry" because during operation, the rotors rotate within the stator without mutual or mechanical contact with the stator, allowing no oil to be used in the intake and exhaust stages. is called.

More and more applications are, on the one hand, a processing process in which a vacuum pump needs to circulate a large amount of gas, on the one hand, a few slm (standard liter / min) or a few tens of slm, and on the other hand, a vacuum pump sucks and exhausts. Needs the ability to change the flow of gas to be taken in and out quickly at high flow rates between an idle (or standby) process that operates at a pressure called "final vacuum pressure" where the gas flow is zero or very low. There is.

When a large flow rate of gas is sucked in and exhausted, the vacuum pump is greatly heated by compression. Due to this temperature rise, it is possible to avoid the condensation of the contaminated gaseous substance or the solidification of the powder in the vacuum pump. However, it is necessary to cool the bearings of the vacuum pump to prevent any malfunction. Further, in a specific application example, it is necessary to control the temperature of the stator so as not to exceed a predetermined maximum value. If this maximum value is exceeded, the contaminated gaseous substances that are taken in and out will aggregate in the vacuum pump, causing the vacuum pump to seize.

Cooling of the stator is usually done by circulating water at outside air temperature through a cooling circuit that is in thermal contact with the stator.

However, in the above situation where the flow of the gas to be sucked and exhausted drops sharply, the vacuum pump has no heating source of its own and is cooled rapidly. Therefore, the temperature of the stator in contact with the cooling circuit drops, while the rotor that is not directly cooled remains at a high temperature.

Due to the fact that the temperature measurement position for controlling the cooling circuit is not always in the proper place where sudden changes in temperature due to fluctuations in intake and exhaust loads can be detected, the rotor and stator There is a risk that the temperature difference between them will increase. Therefore, the measured temperature may be erroneously evaluated, for example, the stator cooling command may continue even though the bearing temperature has already dropped significantly. The response time required to actually recognize the temperature drop of the stator becomes relatively long, which may increase the temperature difference between the rotor and the stator.

This temperature difference can cause the disappearance of the gap between the stator and rotor due to various thermomechanical behaviors. In particular, since the cooling circuit is usually located at each axial end of the vacuum pump in the bearing region, it may cause the disappearance of the axial gap and reduce the interaxial distance due to the contraction of the shaft support. be. The disappearance of these gaps can cause seizure of the pump and contact between the rotors.

One of the objects of the present invention is temperature control of a dry vacuum pump type vacuum pump and a vacuum pump which makes it possible to correct at least one of the above-mentioned drawbacks by preventing the disappearance and seizure of a gap in particular. It is to propose a method.

For this purpose, one subject of the present invention is a method for controlling the temperature of a dry vacuum pump type vacuum pump exposed to fluctuations in intake and exhaust loads, and the vacuum pump is a method of controlling the temperature of the dry vacuum pump type vacuum pump.
-The stator and
-At least one intake / exhaust stage and
-It extends in at least one intake / exhaust stage and rotates synchronously in the stator in the opposite direction in order to drive the gas that is taken in and out from the intake port of the vacuum pump to the exhaust port. Two shafts that each support at least one rotor,
-With at least one cooling element coupled to the stator,
-At least one temperature sensor that is designed to measure the temperature of the stator,
-Equipped with at least one cooling element and a control unit designed to control the temperature of the stator by at least one temperature sensor.
In a method of controlling the temperature of a dry vacuum pump type vacuum pump, the temperature of the vacuum pump is controlled by at least one cooling element coupled to the stator based on the set temperature and the measurement of the temperature of the stator.
Monitoring monitors whether the value of the parameter indicating the intake / exhaust load selected from either the current induced by the vacuum pump or the power consumed is below the load threshold, and is a parameter indicating the intake / exhaust load. When the value is below the load threshold value, the set temperature is raised.

Therefore, by changing the set temperature, the cooling of the stator by the cooling element can be interrupted more quickly, and the stator can be warmed near the cooling element. Raising the set temperature during the low intake / exhaust load process allows the stator to remain as hot as during the high load process, thereby preventing the risk of seizure or rotor contact with each other.

By keeping the temperature high during the low load process, it is also possible to avoid the generation of low temperature regions where condensable contaminants may solidify or condense.

By changing the set temperature triggered by monitoring the intake / exhaust load, the responsiveness of the temperature control method can be improved.

No need to add a temperature sensor, no information about what is happening in the chamber, and control the thermal behavior of the vacuum pump without changing the position of at least one temperature sensor or the structure of the cooling element. By incorporating it into the determination mechanism, this monitoring can be further performed based on the information available from the sensor of the vacuum pump.

The temperature control method may also include one or more of the features described below, either alone or in combination.

According to one exemplary embodiment, a cooling element coupled to the low pressure intake / exhaust stage of the vacuum pump raises the set temperature, at least in order to control the temperature.

According to one exemplary embodiment, after raising the set temperature, monitoring monitors whether the value of the parameter indicating the intake / exhaust load exceeds the load threshold, and the value of the parameter indicating the intake / exhaust load. If exceeds the load threshold, the raised set temperature is maintained for a predetermined additional time.

The predetermined additional time is, for example, a time exceeding 10 minutes.

The increase in the set temperature is, for example, a temperature exceeding 3 ° C.

The increase in the set temperature is, for example, a temperature of less than 20 ° C.

Another subject of the present invention is a dry vacuum pump type vacuum pump.
-The stator and
-At least one intake / exhaust stage and
-It extends in at least one intake / exhaust stage and rotates synchronously in the stator in the opposite direction in order to drive the gas that is taken in and out from the intake port of the vacuum pump to the exhaust port. Two shafts that each support at least one rotor,
-With at least one cooling element coupled to the stator,
-At least one temperature sensor that is designed to measure the temperature of the stator,
-In a dry vacuum pump type vacuum pump equipped with at least one cooling element and a control unit configured to control the temperature of the stator by at least one temperature sensor.
This control unit is characterized in that it implements the temperature control method as described above.

The dry vacuum pump type vacuum pump can be a multi-stage low vacuum pump. This means one with at least two intake and exhaust stages mounted in series. The vacuum pump can also be a roots blower type vacuum pump with one or two intake and exhaust stages mounted in series.

According to one exemplary embodiment, a dry vacuum pump type vacuum pump comprises two cooling elements coupled to a stator, one cooling element at each axial end of the vacuum pump. Have been placed.

Another subject of the present invention is in equipment comprising a chamber, wherein the equipment comprises a dry vacuum pump type vacuum pump as described above connected to the chamber for intake and exhaust in the chamber. And.

It is a schematic diagram of the equipment by this invention. FIG. 3 is a schematic view of a partial and partial cross section of a vacuum pump in the equipment shown in FIG. 1 in disassembled state, showing only the components required for operation. It is a schematic diagram which shows various steps of the temperature control method of the vacuum pump shown in FIG. The curves A to D shown below show the curves obtained as a function of time (minutes). -Power consumed by the vacuum pump in FIG. 2 (in watts, vertical axis on the right), (Curve A). -The temperature of the stator measured by the temperature sensor of the vacuum pump (° C, vertical axis on the left), (Curve B). -The temperature of the stator as measured by two test temperature sensors fixed in the center of the cooling element of the vacuum pump (curves C and D).

Further features and advantages of the invention will be apparent from the following description given as a non-limiting example with reference to the accompanying drawings below.

In these figures, the same components are labeled with the same reference numerals. The following embodiments are merely examples. Although the specification refers to one or more embodiments, this does not necessarily mean that each reference is related to the same embodiment or that the features apply only to a single embodiment. It doesn't mean. The simple features of the various embodiments may be combined or interchanged to provide other embodiments.

FIG. 1 is a first of equipment 1 comprising a dry vacuum pump type vacuum pump 2 and a chamber 3 to which the vacuum pump 2 is connected, for example, via a valve 4 for intake and exhaust in the chamber 3. An example is shown.

During the steps called "treatment" steps P1 and P2 (FIG. 3), a large flow rate gas of about several slm or several tens of slm can be introduced into the chamber 3, for example, periodically. These processing steps P1 and P2 can be located before or after a step called "idle" step I where the flow rate of the introduced gas is low or zero. During idle step I, the vacuum pump 2 operates at a pressure known as the "final vacuum pressure" for more than a few minutes, eg, to empty the chamber 3. This series of steps is carried out in a process for manufacturing a semiconductor, for example, a process known as a "HarpXT" process.

As most often seen in FIGS. 1 and 2, the vacuum pump 2 extends within the stator 5, at least one intake / exhaust stage T1-T5, and at least one intake / exhaust stage T1-T5, and Two shafts 6 and 7, respectively supporting at least one rotor 8, at least one cooling element 11a and 11b connected to the stator 5, and at least one temperature adapted to measure the temperature of the stator 5. It includes sensors 12a, 12b and a control unit 13 whose temperature is controlled by at least one cooling element 11a, 11b and at least one temperature sensor 12a, 12b.

The rotor 8 rotates synchronously in the stator 5 in the stator 5 in order to drive the gas G sucked and exhausted from the intake port 9 of the vacuum pump 2 to the exhaust port 10 of the vacuum pump 2.

The rotor 8 has a lobe having the same contour, for example, such as a "roots" type (having a cross section in the form of "number 8" or "bean bean"), or a "claw" type. is doing. According to another example, the intake / exhaust rotor 8 is a "screw" type.

The vacuum pump 2 includes at least two intake / exhaust stages, for example, five intake / exhaust stages. Each intake / exhaust stage T1 to T5 has its own inlet and outlet. The continuous intake / exhaust stages T1 to T5 are connected in series one after another by the respective interstage ducts 14 that connect the outlet (or exhaust port) of the previous intake / exhaust stage to the inlet (or intake port) of the next stage. There is.

During the rotation of the rotor 8, the gas sucked from the inlet is confined in the space formed by the rotor 8 and then pushed out toward the exhaust port 10 by the rotor 8 (the direction in which the gas circulates, FIGS. 1 and 1). (Indicated by arrow G in FIG. 2). In particular, the vacuum pump 2 rotates in the stator 5 without any mechanical contact with the rotors 8 or with the stator 5 during operation, allowing oil to be used in the intake and exhaust stages T1 to T5. It is called "dry".

In this exemplary embodiment, the dry vacuum pump type vacuum pump 2 is a multi-stage low vacuum pump. The low vacuum pump is a positive displacement vacuum pump that sucks, transfers, and exhausts gas using two rotors so that it can be taken in and out under atmospheric pressure. According to another embodiment, the vacuum pump 2 is of the roots blower type and includes one or two stages of intake and exhaust. The roots blower type vacuum pump is installed in series upstream of the low vacuum pump.

According to one exemplary embodiment, the cooling elements 11a, 11b include, for example, a fluid pressure circuit 16 for allowing circulation of water at outside air temperature (FIG. 2).

The fluid pressure circuit 16 is incorporated in the stator 5, for example. For example, in order to cool the bearings of the shafts 6 and 7, it has a "U" shape surrounding the bearings.

The cooling elements 11a, 11b further include, for example, a valve 17 that can be operated to allow or shut off the circulation of water (“all or nothing” control).

The vacuum pump 2 includes, for example, two cooling elements 11a and 11b coupled to the stator 5, one cooling element 11a and 11b being arranged at each axial end of the vacuum pump 2 (FIG. FIG. 2). The cooling element 11a is coupled to an intake / exhaust stage T1 called a low-pressure intake / exhaust stage, and the inlet of the intake / exhaust stage T1 leads to an intake port 9 of the vacuum pump 2. The cooling element 11b is coupled to an intake / exhaust stage T5 called a high-pressure intake / exhaust stage, and the outlet of the intake / exhaust stage T5 leads to the exhaust port 10 of the vacuum pump 2.

The vacuum pump 2 is provided with, for example, two temperature sensors 12a and 12b arranged on the stator 5 and separated from each other. The temperature sensor 12a is associated with, for example, a cooling element 11a arranged on the side of the intake port 9. The temperature sensor 12a is attached to the stator 5 in the region of the low pressure intake / exhaust stage T1 (side of the intake port 9), for example. The temperature sensor 12b is associated with, for example, a cooling element 11b located on the side of the exhaust port 10. The temperature sensor 12b is attached to the stator 5 in the region of the high-pressure intake / exhaust stage T5 (side of the exhaust port 10), for example.

The temperature sensors 12a and 12b are arranged, for example, on the stator 5 at an intermediate point between the two shafts 6 and 7 and on a straight line parallel to the axes of the shafts 6 and 7 (FIG. 1).

The control unit 13 includes one or more controllers or microcontrollers or processors and a memory for executing a series of program instructions that implement the temperature control method 100 of the vacuum pump 2. In this method, the temperature of the vacuum pump 2 exposed to fluctuations in the intake / exhaust load is controlled by at least one cooling element 11a, 11b coupled to the stator 5 based on the set temperature and the temperature measurement of the stator 5. ..

To do this, the control unit 13 is connected to at least one temperature sensor 12a, 12b to receive a temperature measurement of the stator 5, and for example, the associated valve 17 of the fluid pressure circuit 16. It is connected to at least one cooling element 11a, 11b for manipulating opening and closing. Temperature control can be performed independently on each cooling element 11a, 11b, depending on its own set temperature and the associated individual measured temperatures.

During operation, the vacuum pump 2 will be exposed to fluctuations in intake and exhaust loads that vary between high and low flow gases.

The control unit 13 monitors whether or not the value of the parameter indicating the intake / exhaust load is below the load threshold value S (diagnosis step 101, FIG. 3).

The parameter indicating the intake / exhaust load is, for example, the current induced by the vacuum pump 2 or the electric power consumed by the vacuum pump 2. The control unit 13 calculates, for example, the average value of the current induced or the power consumed over a time equal to or longer than the duration of the cycle of the processing steps P1 and P2. To do this, the control unit 13 is connected, for example, to the output of a variator that changes the motor speed of the vacuum pump 2.

As long as the value of the parameter indicating the intake / exhaust load exceeds the load threshold value S, the processing steps P1 and P2 are considered to occur in the chamber 3.

In this case, for example, when the measured temperature falls below the set temperature, the valve 17 is closed to block the circulation of water so that the valve 17 can circulate when the measured temperature is equal to or higher than the set temperature. By opening, the control unit 13 uses the cooling elements 11a, 11b to control the temperature of the vacuum pump 2 in order to achieve the set temperature (processing phase adjusting step 102).

The set temperature is, for example, higher than 70 ° C.

As long as the value of the parameter indicating the intake / exhaust load is lower than the load threshold value S, it is considered that the idle step I is occurring in the chamber 3. In this case, the control unit 13 raises the set temperature in order to control the temperature of the vacuum pump 2 by at least one cooling element 11a (idle phase adjusting step 103).

The set temperature can be raised to control the temperature by both or only one of the cooling elements 11a, 11b. However, at least the cooling element 11a coupled to the low pressure intake / exhaust stage T1 is preferable. This is because the heat exchange capacity between the rotor 8 and the stator 5 is not so good at low pressure, which makes temperature adjustment more difficult.

The set temperature to be raised corresponds to at least 3% of the set temperature, for example, exceeding 3 ° C. The set temperature to be raised corresponds to a maximum of 20% of the set temperature, for example, less than 20 ° C. The set temperature to be raised is about 6% of the set temperature, for example, 5 ° C.

The control unit 13 controls the temperature of the vacuum pump 2 by, for example, cooling elements 11a and 11b that operate the water circulation valve 17 in order to raise the set temperature between the processing steps P1 and P2.

When the parameter indicating the intake / exhaust load increases beyond the load threshold value S, it is considered that further processing steps P1 and P2 are occurring in the chamber 3.

Next, preparations can be made to maintain the raised set temperature for a predetermined additional time before returning the raised set temperature to the initial set temperature (readjustment step 104).

The additional time is predetermined and the sensor can be omitted. For example, it is set longer than 10 minutes, such as 15 minutes. The readjustment step 104 can give the stator 5 time to warm up as a result of the treatment steps P1 and P2 processing a larger intake / exhaust load. As a result, it is possible to prevent the temperature difference between the rotor 8 and the stator 5 from becoming larger when the temperature returns to the initial set temperature.

A better understanding of this is possible by referring to the graph in FIG. As an example, these graphs show the power consumption curve (curve A) of the vacuum pump 2 subjected to the intake / exhaust load fluctuation and the temperature curve (curve) of the stator 5 measured by the temperature sensor 12a near the low pressure intake / exhaust stage T1. B) and two temperature curves (curves C and D) of the stator 5 measured as indicated values at the center of the cooling element 11a coupled to the stator 5 of the low pressure intake / exhaust stage T1 to aid in understanding the invention. It shows that.

For the first 2 hours, a gas stream of 80 slm (135.12 Pa. M ³ / s) is periodically introduced into chamber 3. Therefore, the gas alternately repeats the flow at 80 slm for 5 minutes and at 0 slm for 3 minutes. Therefore, the power consumption indicating the intake / exhaust load changes in a square wave pattern of 500 to 2000 W exceeding a load threshold of 600 W, for example, in a time exceeding 3 minutes (a time equal to the no flow rate phase of the processing step) (Curve A). ..

The control unit 13 controls the temperature of the vacuum pump 2 in order to achieve the set temperature of 83 ° C. by the cooling elements 11a and 11b (processing phase adjusting step 102). Therefore, it will be seen that the temperature of the stator 5 measured by the temperature sensor 12a fluctuates between 81 ° C and 86 ° C around the set temperature due to the all-or-nothing adjustment mode (curve B). It will also be seen that the temperature measured (as an indication) at the center of the cooling element 11a varies between 84 ° C and 87 ° C (curves C and D).

Next, the power consumption drops below the load threshold S. From this, the control unit 13 concludes that idle step I is occurring in chamber 3. Therefore, the control unit 13 raises the set temperature by 5 ° C. (idle phase adjusting step 103), controls the temperature of the vacuum pump 2 to 88 ° C. by the cooling element 11a of the low pressure intake / exhaust stage T1, and controls the temperature of the vacuum pump 2 to 88 ° C. The temperature of the vacuum pump 2 is controlled to 83 ° C. or 88 ° C. by the cooling element 11b of the above.

It should be noted that the temperature of the stator 5 measured by the temperature sensor 12a associated with the cooling element 11a rises by about 5 ° C and fluctuates between 86 ° C and 90 ° C (curve B).

The temperature measured at the center of the cooling element 11a rises rapidly due to the rise in set temperature and then drops due to the decrease in intake and exhaust load until it tends to stabilize near the temperature in process P1. Can be seen (curves C and D).

Therefore, changing the set temperature makes it possible to shut off the cooling of the stator 5 by the cooling element 11a earlier, so that the stator 5 warms up near the cooling element 11a. Despite the decrease in temperature, the temperature of the stator 5 measured by the cooling element 11a, if any, is only slightly lower than the temperature of the processing step P1. Therefore, the temperature difference between the stator 5 and the rotor 8 is substantially the same in the processing step P1 and the idle step I, assuming that the rotor 8 remains at a high temperature.

Next, the power consumed increases beyond the load threshold S (curve A), indicating that further processing step P2 is occurring in chamber 3. The set temperature remains elevated to 88 ° C. for 15 minutes (readjustment step 104). It will be found that as the vacuum pump 2 is heated, the temperature of the stator 5 in the region of the cooling element 11a begins to rise again (curves C and D).

After a predetermined additional time has elapsed, the temperature at the center of the cooling element 11a has almost returned to the value before the processing step P1, so that the control unit 13 lowers the set temperature so as to return to 83 ° C. (processing phase). Adjustment step 102). The temperature at the center of the cooling element 11a decreases due to the difference in the set temperature, and then slowly increases again when the set value reaches 83 ° C. During the idle step I and the subsequent processing step P2, the temperature remained above 83 ° C. in the region of the stator 5 near the cooling element 11a.

By raising the set temperature in the idle step I, which has a low intake / exhaust load, the stator 5 can be kept at a high temperature at the center of the cooling element 11a, as in the processing steps P1 and P2. This makes it possible to prevent the risk of seizure or contact between the rotors 8 due to the difference in thermal expansion between the rotor 8 and the stator 5 in the idle step I.

By keeping the temperature high in the idle step I, it is possible to avoid the generation of low temperature regions where condensable contaminants may solidify or condense.

By changing the set temperature triggered by monitoring the intake / exhaust load, the responsiveness of the temperature control method can be improved.

The vacuum pump 2 does not require the addition of temperature sensors, does not require information about the processing occurring in the chamber 3, and does not change the position of at least one temperature sensor 12a, 12b or the structure of the cooling elements 11a, 11b. By incorporating the thermal behavior of the above into the temperature control determination mechanism, this monitoring can be further performed based on the information already available from the sensor of the vacuum pump 2.

1 Equipment 2 Vacuum pump 3 Chamber 4 Valve 5 Stator 6, 7 Shaft 8 Rotor 9 Intake port 10 Exhaust port 11a, 11b Cooling element 12a, 12b Temperature sensor 13 Control unit 14 Interstage duct 16 Fluid pressure circuit 17 Valve 100 Temperature control method 101 Diagnostic process 102 Processing phase adjustment process 103 Idle phase adjustment process 104 Readjustment process G Gas I Idle process P1, P2 Processing process T1-T5 Intake / exhaust stage S Load threshold

Claims (10)

A temperature control method (100) for a dry vacuum pump type vacuum pump (2) exposed to fluctuations in intake / exhaust load, wherein the vacuum pump (2) is a method.
○ With the stator (5)
○ At least one intake / exhaust stage (T1-T5) and
○ Drives gas (G) that extends into at least one intake / exhaust stage (T1-T5) and is intake / exhaust from the intake port (9) of the vacuum pump (2) to the exhaust port (10). In order to do so, the two shafts (6, 7) supporting at least one rotor (8) that rotates synchronously in the opposite direction in the stator (5), respectively.
○ With at least one cooling element (11a, 11b) coupled to the stator (5),
○ At least one temperature sensor (12a, 12b) designed to measure the temperature of the stator (5), and
○ It is provided with a control unit (13) that controls the temperature of the stator (5) by the at least one cooling element (11a, 11b) and the at least one temperature sensor (12a, 12b). ,
The temperature of the vacuum pump (2) is controlled by the at least one cooling element (11a, 11b) coupled to the stator (5) based on the set temperature and the measurement of the temperature of the stator (5). In the temperature control method (100) of the dry vacuum pump type vacuum pump (2),
Monitoring monitors whether the value of the parameter indicating the intake / exhaust load selected from either the current induced by the vacuum pump (2) or the power consumed is below the load threshold (S). The temperature control method (100) of the vacuum pump (2), characterized in that the set temperature is raised when the value of the parameter indicating the intake / exhaust load is lower than the load threshold value (S). The vacuum pump according to claim 1, wherein the set temperature is raised at least in order to control the temperature by a cooling element (11a) coupled to the low pressure intake / exhaust stage (T1) of the vacuum pump. 2) Temperature control method (100). After raising the set temperature, the monitoring monitors whether the value of the parameter indicating the intake / exhaust load exceeds the load threshold value (S), and the value of the parameter indicating the intake / exhaust load is The temperature control of the vacuum pump (2) according to claim 1 or 2, wherein when the load threshold value (S) is exceeded, the raised set temperature is maintained for a predetermined additional time. Method (100). The temperature control method (100) of the vacuum pump (2) according to claim 3, wherein the predetermined additional time is a time exceeding 10 minutes. The temperature control method (100) for the vacuum pump (2) according to any one of claims 1 to 4, wherein the increase in the set temperature is a temperature exceeding 3 ° C. The temperature control method (100) for the vacuum pump (2) according to any one of claims 1 to 5, wherein the increase in the set temperature is a temperature of less than 20 ° C. It is a dry vacuum pump type vacuum pump (2).
-The stator (5) and
-At least one intake / exhaust stage (T1-T5) and
-Drives a gas (G) that extends into at least one intake / exhaust stage (T1-T5) and is sucked / exhausted from the intake port (9) of the vacuum pump (2) to the exhaust port (10). In order to do so, the two shafts (6, 7) supporting at least one rotor (8) that rotates synchronously in the opposite direction in the stator (5), respectively.
-With at least one cooling element (11a, 11b) coupled to the stator (5),
-At least one temperature sensor (12a, 12b) designed to measure the temperature of the stator (5), and
-In the vacuum pump (2) including the at least one cooling element and a control unit (13) configured to control the temperature of the stator by the at least one temperature sensor.
The dry vacuum pump type vacuum pump (2) is characterized in that the control unit (13) implements the temperature control method (100) according to any one of claims 1 to 6. .. The dry vacuum pump type vacuum pump (2) according to claim 7, wherein the vacuum pump (2) is a low vacuum pump. The vacuum pump (2) comprises two cooling elements (11a, 11b) coupled to the stator, one cooling element (11a, 11b) located at each axial end of the vacuum pump. The dry vacuum pump type vacuum pump (2) according to claim 7 or 8, wherein the vacuum pump is of the dry type vacuum pump type. The dry vacuum pump type according to any one of claims 7 to 9, which is connected to the chamber (3) in order to inhale and exhaust the inside of the chamber (3) in the equipment provided with the chamber (3). Equipment (1) characterized by being equipped with a vacuum pump (2).

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