JP2022503867A - 光検出器 - Google Patents
光検出器 Download PDFInfo
- Publication number
- JP2022503867A JP2022503867A JP2021517465A JP2021517465A JP2022503867A JP 2022503867 A JP2022503867 A JP 2022503867A JP 2021517465 A JP2021517465 A JP 2021517465A JP 2021517465 A JP2021517465 A JP 2021517465A JP 2022503867 A JP2022503867 A JP 2022503867A
- Authority
- JP
- Japan
- Prior art keywords
- slot
- stripe
- stripes
- graphene
- photodetector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 59
- 229910021389 graphene Inorganic materials 0.000 claims abstract description 59
- 230000003287 optical effect Effects 0.000 claims abstract description 18
- 238000010521 absorption reaction Methods 0.000 claims abstract description 14
- 230000000694 effects Effects 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 230000002745 absorbent Effects 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K39/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic radiation-sensitive element covered by group H10K30/00
- H10K39/30—Devices controlled by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1443—Devices controlled by radiation with at least one potential jump or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type
- H01L31/1037—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type the devices comprising active layers formed only by AIVBVI compounds
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/028—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/09—Devices sensitive to infrared, visible or ultraviolet radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/112—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/112—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
- H01L31/1127—Devices with PN heterojunction gate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Optics & Photonics (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
110 基板
115 グラフェン
120 ドレインコンタクト
125 ソースコンタクト
130a、130b 導波路部
135 スロット
200 光検出器
230a~f ストライプ
235a~f 電極
Claims (20)
- 互いに対して間隔を開けられた少なくとも3つのストライプを含む光学導波路構造であって、スロットが前記少なくとも3つのストライプのうちそれぞれ2つの隣接するストライプの間に存在する、光学導波路構造と、
前記少なくとも3つのストライプの上または下に提供されたグラフェン吸収層と、
前記グラフェン吸収層の上または下に配置された、各ストライプに関する電極と、を含む光検出器であって、
前記グラフェン吸収層の一部にp-n接合効果を生じさせるために、2つの隣接する電極が反対の極性を用いてバイアスされるように、前記光検出器が構成され、
前記グラフェン吸収層の一部が、前記それぞれ2つの隣接するストライプの間の各スロットの上または下に配置される、光検出器。 - 前記光学導波路構造が少なくとも4つのストライプを含み、
第1のスロットが、第1のストライプと第2のストライプとの間に存在し、
第2のスロットが、前記第1のストライプと第3のストライプとの間であって、前記第1のスロットの一方の側に存在し、
第3のスロットが、前記第2のストライプと第4のストライプとの間であって、前記第2のスロットの反対側に存在する、請求項1に記載の光検出器。 - 前記第1のスロットが前記第2のスロットと前記第3のスロットとの間に配置され、
前記第2のスロット及び前記第3のスロットの幅が、前記第1のスロットの幅より大きい、請求項2に記載の光検出器。 - 前記第3のストライプ及び前記第4のストライプがそれぞれ、前記第1のストライプ及び前記第2のストライプよりも幅広い、請求項3に記載の光検出器。
- 前記第1のストライプ及び前記第3のストライプの配置が、前記第2のストライプ及び前記第4のストライプの配置に対して対称的である、請求項2から4のいずれか一項に記載の光検出器。
- 光熱電効果(PTE)が各スロットにおいて生じるように、前記光検出器が構成された、請求項1から5のいずれか一項に記載の光検出器。
- 前記グラフェン吸収層の外に電気信号を取り出すために、各スロットの上または下に配置された前記グラフェン吸収層の各部分と動作可能に接続された、一対のコンタクトをさらに含む、請求項1から6のいずれか一項に記載の光検出器。
- 前記光学導波路の前記ストライプが窒化シリコンを含む、請求項1から7のいずれか一項に記載の光検出器。
- 前記複数の電極の少なくともいくつかが金属電極である、請求項1から8のいずれか一項に記載の光検出器。
- 前記複数の電極の少なくともいくつかが半導体材料からなる、請求項1から8のいずれか一項に記載の光検出器。
- 前記グラフェン吸収層が前記ストライプの上部に配置され、各電極が前記グラフェン吸収層の上部に形成された、請求項1から10のいずれか一項に記載の光検出器。
- 前記グラフェン吸収層が前記ストライプの上に配置され、各電極が、前記グラフェン吸収層と前記光学導波路構造の各ストライプとの間に形成された、請求項1から10のいずれか一項に記載の光検出器。
- 前記グラフェン吸収層が前記ストライプの下に配置され、各電極が、前記グラフェン吸収層と、前記光学導波路構造の各ストライプとの間に形成された、請求項1から10のいずれか一項に記載の光検出器。
- 前記グラフェン吸収層が前記ストライプの下に配置され、各電極が、前記グラフェン吸収層の下に形成された、請求項1から10のいずれか一項に記載の光検出器。
- 前記グラフェン吸収層が前記ストライプの下に配置され、各電極が各ストライプの上部に形成された、請求項1から10のいずれか一項に記載の光検出器。
- 前記導波路構造の前記ストライプがドープされたシリコンを含む、請求項15に記載の光検出器。
- 前記電極が前記ストライプの端部を覆う、請求項1から16のいずれか一項に記載の光検出器。
- 前記ストライプが、動作波長において前記スロットよりも低い屈折率を有する、請求項1から17のいずれか一項に記載の光検出器。
- 第1のスロットを間に画定する第1の対の長手方向ストライプを含む第1のスロット導波路構造と、
前記第1のスロット導波路構造のそれぞれの側に配置された第2の対の長手方向ストライプであって、前記第1のスロット導波路構造が前記第1のストライプと前記第2のストライプの1つの間にそれぞれ一対の第2のスロットを確定し、前記第2のスロットが前記第1のスロットよりも幅広い、第2の対の長手方向ストライプと、
を含む広帯域光学導波路構造と、
前記第1のスロット及び前記第2のスロットを橋渡しするグラフェンの層と、
前記スロットの上または下のグラフェンの領域内にp-n接合を生成するために電極をバイアスするために、前記長手方向ストライプのそれぞれの上または下に配置された電極のセットと、を含む、グラフェン光検出器。 - 請求項1から19のいずれか一項に記載の光検出器を製造する方法であって、前記方法が、CMOSまたはCMOS互換のプロセスを使用する、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1815847.7 | 2018-09-28 | ||
GBGB1815847.7A GB201815847D0 (en) | 2018-09-28 | 2018-09-28 | Photodetector |
PCT/GB2019/052759 WO2020065356A1 (en) | 2018-09-28 | 2019-09-30 | Photodetector |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2022503867A true JP2022503867A (ja) | 2022-01-12 |
Family
ID=64108958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021517465A Pending JP2022503867A (ja) | 2018-09-28 | 2019-09-30 | 光検出器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US11616161B2 (ja) |
EP (1) | EP3857600A1 (ja) |
JP (1) | JP2022503867A (ja) |
KR (1) | KR20210066849A (ja) |
CN (1) | CN113039645A (ja) |
GB (1) | GB201815847D0 (ja) |
WO (1) | WO2020065356A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US12025832B2 (en) * | 2021-02-08 | 2024-07-02 | Nippon Telegraph And Telephone Corporation | Photo-detector |
CN113655644A (zh) * | 2021-07-14 | 2021-11-16 | 中国科学院微电子研究所 | 一种电光调制器 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8554022B1 (en) * | 2009-12-21 | 2013-10-08 | University Of Washington Through Its Center For Commercialization | Silicon-graphene waveguide photodetectors, optically active elements and microelectromechanical devices |
WO2016106731A1 (zh) * | 2014-12-31 | 2016-07-07 | 华为技术有限公司 | 一种石墨烯槽波导光探测器 |
JP2017011209A (ja) * | 2015-06-25 | 2017-01-12 | 株式会社東芝 | グラフェン受光素子、およびグラフェン光変調器 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2968776B1 (fr) * | 2010-12-13 | 2012-12-28 | Commissariat Energie Atomique | Procédé pour réaliser un guide optique a fente sur silicium |
WO2014089454A2 (en) | 2012-12-07 | 2014-06-12 | The Trustees Of Columbia University In The City Of New York | Systems and methods for graphene photodetectors |
US8901689B1 (en) * | 2013-05-10 | 2014-12-02 | International Business Machines Corporation | Graphene photodetector |
WO2015087988A1 (ja) * | 2013-12-11 | 2015-06-18 | 住友大阪セメント株式会社 | 電気光学素子 |
KR102189605B1 (ko) * | 2014-01-06 | 2020-12-14 | 한국전자통신연구원 | 광검출기 |
CN103760699B (zh) * | 2014-02-19 | 2016-08-17 | 华中科技大学 | 基于液晶狭缝波导的微环谐振腔型可调谐光滤波器 |
CN103811568B (zh) | 2014-02-21 | 2016-04-20 | 中国科学院半导体研究所 | 一种基于一维光栅的表面入射石墨烯光电探测器 |
CN108231803B (zh) | 2017-12-26 | 2020-08-11 | 中国电子科技集团公司第五十五研究所 | 氮化硅光波导器件和石墨烯探测器集成芯片及其制作方法 |
-
2018
- 2018-09-28 GB GBGB1815847.7A patent/GB201815847D0/en not_active Ceased
-
2019
- 2019-09-30 EP EP19780329.9A patent/EP3857600A1/en active Pending
- 2019-09-30 US US17/280,791 patent/US11616161B2/en active Active
- 2019-09-30 JP JP2021517465A patent/JP2022503867A/ja active Pending
- 2019-09-30 WO PCT/GB2019/052759 patent/WO2020065356A1/en unknown
- 2019-09-30 CN CN201980075348.8A patent/CN113039645A/zh active Pending
- 2019-09-30 KR KR1020217011745A patent/KR20210066849A/ko not_active Application Discontinuation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8554022B1 (en) * | 2009-12-21 | 2013-10-08 | University Of Washington Through Its Center For Commercialization | Silicon-graphene waveguide photodetectors, optically active elements and microelectromechanical devices |
WO2016106731A1 (zh) * | 2014-12-31 | 2016-07-07 | 华为技术有限公司 | 一种石墨烯槽波导光探测器 |
JP2017011209A (ja) * | 2015-06-25 | 2017-01-12 | 株式会社東芝 | グラフェン受光素子、およびグラフェン光変調器 |
Non-Patent Citations (1)
Title |
---|
SIMONE SCHULER ET AL.: ""Controlled Generation of a p-n Junction in a Waveguide Integrated Graphene Photodetector"", NANO LETTERS, vol. 16, JPN6023031578, 2016, pages 7107 - 7112, ISSN: 0005122959 * |
Also Published As
Publication number | Publication date |
---|---|
EP3857600A1 (en) | 2021-08-04 |
GB201815847D0 (en) | 2018-11-14 |
US20220005968A1 (en) | 2022-01-06 |
CN113039645A (zh) | 2021-06-25 |
KR20210066849A (ko) | 2021-06-07 |
US11616161B2 (en) | 2023-03-28 |
WO2020065356A1 (en) | 2020-04-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7826700B2 (en) | In-line light sensor | |
US6897498B2 (en) | Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform | |
US8098965B1 (en) | Electroabsorption modulator based on fermi level tuning | |
US20150372159A1 (en) | Systems and methods for graphene photodetectors | |
Srisonphan | Hybrid graphene–Si-based nanoscale vacuum field effect phototransistors | |
JP2022503867A (ja) | 光検出器 | |
CN107533248A (zh) | 波导调制器结构 | |
KR20130048629A (ko) | 도파로 일체형 그래핀 광검출기 | |
US20200119205A1 (en) | Waveguide-integrated photodetector | |
US20060249789A1 (en) | Inter-digitated silicon photodiode based optical receiver on SOI | |
Vangelidis et al. | Unbiased plasmonic-assisted integrated graphene photodetectors | |
Edelstein et al. | Waveguide-integrated mid-IR photodetector and all-optical modulator based on interlayer excitons absorption in a WS2/HfS2 heterostructure | |
US11109781B2 (en) | Arrayed waveguide grating (AWG)-based Raman spectroscopy for glucose monitoring | |
Ogudo et al. | Towards 10-40 GHz on-chip micro-optical links with all integrated Si Av LED optical sources, Si N based waveguides and Si-Ge detector technology | |
FR2805902B1 (fr) | Dispositif optoelectronique semiconducteur a fonction de transfert modulable electriquement | |
ITTO20120634A1 (it) | Fotorivelatore con canale microfluidico integrato e relativo procedimento di fabbricazione | |
Karow et al. | On-chip light detection using monolithically integrated quantum dot micropillars | |
EP3066694B1 (en) | A photodetection apparatus | |
US11942761B2 (en) | Optical semiconductor integrated element | |
JP4158197B2 (ja) | 受光素子 | |
Yu et al. | Ultraviolet Wavelength Identification Using Energy Distribution of Hot Electrons | |
JP3957187B2 (ja) | 可変光減衰器 | |
JP7208494B2 (ja) | 光検出器 | |
Reboud et al. | Photonic ge-based platforms for mid-infrared applications | |
KR20230086262A (ko) | 그래핀이 덮힌 나노플라즈모닉 도파로에 기반한 광검출기 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220907 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230621 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230807 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20231107 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240205 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240401 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20240701 |