JP2022168945A - Film filled with hard particles for vibration control and vibration control method - Google Patents

Abstract

To improve damping characteristics while maintaining static rigidity by manufacturing a film filled with hard particles and by inserting the film filled with the hard particles into a clamping part of a structure, such as a machine.SOLUTION: A film filled with hard particles for vibration control 1 includes a film 2 extendable by a clamping force exerted on an opposing surface, and a hard particle group made up of hard particles 3 filling the film 2. The hard particle group includes biting-contact hard particles 13 that bite and contact with two clamping surfaces 35 and 36 constituting the clamping part when the film filled with hard particles 1 is disposed at a clamping part 37 of a structure, such as a machine, and is compressed and extended by a predetermined clamping force.SELECTED DRAWING: Figure 7

Description

The present invention relates to a vibration damping hard particle-filled film and a vibration damping method.

It is known that the damping property can be improved by inserting a resin film between the mechanical joint surfaces. Patent Document 1 includes at least one constraining layer, at least one dissipative layer, and at least one dynamic spacer layer including a plurality of spacer elements, wherein the spacer elements are ceramic, glass, etc., and have a dynamic surface. A multi-layer damping material is described for damping the

On the contact surfaces of general machines and structures, energy dissipation (called contact damping here) occurs due to micro-slips and plastic deformation of surface roughness protrusions. For example, in machine tools, by making good use of this contact damping, chatter vibration resistance can be expected to be improved without providing a special damping mechanism.

In Non-Patent Document 1, improvement of contact attenuation is studied by surface structure design focusing on the surface roughness and contact stress distribution of the bonding surface.

Japanese Patent Publication No. 2018-521275

Kaiichi Hitomi, Hiroki Inagaki, Satoru Maekawa, Takashi Nakamura, Fumihiro Itoigawa, Tribology Conference 2019 Spring Tokyo Proceedings, pp. 52-53.

However, such a damping material is multi-layered and has a complicated structure, and there is a problem that it lacks the viewpoint of improving damping performance while securing static rigidity. Therefore, an object of the present invention is to produce a hard particle-filled film and sandwich the hard particle-filled film between fastening portions of a structure such as a machine to improve damping performance while ensuring static rigidity.

The present invention for solving the above problems is as follows.
(1) A vibration-damping hard particle-filled film comprising a film that is compressed and stretched by a clamping force acting on opposite sides, and a hard particle group filled in the film and made of hard particles that are harder than the film. When the vibration-damping hard particle-filled film is placed in a fastening portion of a structure such as a machine and is compressed and stretched by a predetermined fastening force, the hard particle group constitutes the fastening portion. A damping hard particle-filled film characterized by containing biting contact hard particles that bit into and contact two fastening surfaces.
"Facing" means facing surfaces, for example, front (one side) and back (other side). means to work.
(2) The hard particle group includes, in addition to the biting contact hard particles, low surface pressure contact hard particles that contact the fastening surface with a degree of biting less than that of the biting contact hard particles. A vibration damping hard particle-filled film according to (1).
(3) The thickness of the vibration-damping hard particle-filled film exceeds the average particle diameter of the hard particles, and when the vibration-damping hard particle-filled film is stretched by the predetermined tightening force, the thickness is The vibration damping hard particle-filled film according to (1) or (2) is characterized by including a portion having a thickness equal to or smaller than the average particle size.
(4) A vibration-damping hard particle-filled film comprising a film that is compressed and stretched by a clamping force acting on opposite sides, and a hard particle group filled in the film and made of hard particles that are harder than the film. When the hard particle-filled film for vibration damping is arranged in a fastening portion of a structure such as a machine and is compressed and stretched by a predetermined fastening force, the hard particle group moves the fastening portion. A structure such as a machine characterized in that the vibration-damping hard particle-filled film containing biting contact hard particles that bite into and contact with two constituting fastening surfaces is sandwiched between the fastening parts and fastened. is a damping method.
(5) In addition to the biting contact hard particles, the hard particle group further includes low surface pressure contact hard particles that contact the fastening surface with a degree of biting less than that of the biting contact hard particles. A vibration damping method for a structure such as a machine according to (4).
(6) The thickness of the vibration-damping hard particle-filled film exceeds the average particle size of the hard particles, and when the vibration-damping hard particle-filled film is compressed and expanded by the predetermined tightening force, the thickness (4) or (5) is a vibration damping method for a structure such as a machine, characterized in that the vibration is performed so as to include a portion having the average particle size or less.

ADVANTAGE OF THE INVENTION According to this invention, damping property can be improved, ensuring the static rigidity of structures, such as a machine.

(a) Appearance, (b) partial enlarged view (scale: 50.0 μm) of a vibration damping hard particle-filled film (hereinafter sometimes simply referred to as “hard particle-filled film”) that is an embodiment of the present invention 3A and 3B, respectively. (a) to (c) are diagrams schematically showing static stiffness maintenance mechanisms by hard particle-filled films. (a) to (e) are diagrams schematically showing damping property improvement mechanisms by hard particle-filled films. It is the figure which showed each (a) front view, (b) side view, and (c) the partial enlarged view (front view) of the part containing a contact part and a test piece about an experimental apparatus. It is the figure which showed the damping property evaluation result (time change of acceleration). It is the figure which showed the damping evaluation result (frequency response curve). FIG. 5 is a diagram showing a damping property evaluation result (equivalent damping ratio ζ obtained from a damped oscillation waveform); (a) to (d) are diagrams showing static stiffness evaluation results (relationship between displacement and force for each contact condition). 9 is a diagram showing (a) the amount of slip and (b) the rigidity after elastic deformation under each contact condition obtained from FIG. 8; FIG. FIG. 2 shows surface observations of test pieces after testing under (a) solid contact condition and (b) film 1/3 condition under static load test conditions. It is the figure which showed the mode in (a) conditions without a hard particle-filled film, (b) conditions with a hard particle-filled film about the measurement of the hard-particle-filled film thickness. FIG. 4 is a diagram showing a large number of indentations thought to be due to hard particles digging into the surface of the aluminum test piece. FIG. 4 shows (a) acceleration time waveforms and (b) frequency response curves when ⅓ of the film is sandwiched and the roughness of the test piece is changed.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings. The present invention is not limited to the following embodiments, and changes, modifications, and improvements can be made without departing from the scope of the invention.

Static rigidity and dynamic rigidity are required properties and characteristics of structures such as machines. The required static rigidity means that no large deformation or displacement should occur, and the required dynamic rigidity means that the influence of vibration or the like is undesirable. Static rigidity is increased by increasing contact rigidity (strong tightening, making the fastening surface less slippery). Rigidity increases. In other words, there is a trade-off between the static rigidity, which improves when it is less likely to slip, and the dynamic rigidity, which improves when slip occurs. In addition, due to the characteristics of frictional damping, it is difficult to increase the damping performance with a small slip in normal contact.

In the present invention, the trade-off relationship could be resolved by using a hard particle-filled film.
As shown in FIGS. 1(a) and 1(b), a hard particle-filled film 1 according to one embodiment of the present invention comprises a film 2 and a hard particle group composed of hard particles 3 filled in the film 2. . The film 2 can be compressed and stretched by a tightening force acting on two opposing surfaces (front and back surfaces). Therefore, it is preferable that the film 2 is an elastic body. Although the base material of the film is not particularly limited, it is preferably a resin capable of forming an elastic body, such as a silicone elastomer such as PDMS (a type of silicone, polydimethylsiloxane), a synthetic resin, or the like.

Hard particles 3 are harder than film 2 . Here, as an index of hardness, a Vickers hardness of 10 GPa or more is preferable. As shown in FIG. 1(b), in the hard particle-filled film 1, the film 2 is filled with a large number of hard particles 3, so the hard particles 3 form hard particle groups. From the viewpoint of the strength and damping property of the film, the volume ratio of the film to the hard particles is preferably 10:1 to 1:1, more preferably 4:1 to 2:1. The material of the hard particles 3 can be appropriately selected depending on the hardness of the film 2 and the hardness of the fastening surface (contact surface) of the structure described later. The size of the hard particles 3 is preferably 50 to 1 μm, more preferably 30 to 10 μm as an average particle size, from the viewpoint of the size relationship with the roughness of the fastening surface.

In a fastening portion 37 of a structure such as a machine comprising fastening surfaces 35 and 36 as shown in FIG. 2(a), the fastening surfaces 35 and 36 are in solid contact. For example, PDMS (a type of silicone, polydimesylsiloxane) is used as a base material for the film, and when it is sandwiched between the fastening surfaces 35 and 36, it becomes as shown in FIG. (c) shows the case where hard particle-filled film 1 is used in place of film 2 in (b). Since a predetermined tightening force acts on the fastening portion 37, the hard particle-filled film 1 is compressed and stretched by the tightening force.

In such a state, the hard particle-filled film 1 can maintain the static rigidity of the fastening surfaces 35 and 36 (fastening portion 37). The mechanism can be inferred as follows.
When a vertical force (clamping force) is applied to the fastening portion (contact portion) 37, the hard particle-filled film 1 is compressed and gradually flows out (extends) out of the contact surface, resulting in high surface pressure. When it becomes , the hard particles contained in the hard particle-filled film 1 come into contact with both contact surfaces 35 and 36, and the hard particles are caught as the contact hard particles 13, which are like one roughness projection. It is inferred that the static rigidity was maintained by playing a role to support the force. Therefore, if the density of the hard particles contained in the film is as high as possible, the number of contact points during tightening increases and the contact area increases, so it is speculated that the static rigidity increases.

Furthermore, the mechanism capable of improving the damping property while ensuring the static rigidity will be described later, but based on FIG. 3, it can be inferred as follows.
[1] The hard particles that are in plastic contact under high surface pressure do not exhibit a damping effect, and merely support the vertical force and contribute to maintaining static rigidity (Fig. 3(a)). [2] The hard particles that are in contact with relatively low surface pressure generate frictional damping at the contact surfaces 35' and 36' during vibration as the low surface pressure contact hard particles 23, and exhibit a damping effect (same ( b)). [3] When the roughness of the contact surface is small, many hard particles are in the contact state of [1], and when the roughness of the contact surface is large, many hard particles enter the valleys of the roughness protrusions. , [1], and [2] are assumed to be hard particles (same (c)). Therefore, it can be inferred that the damping effect is most exhibited on the contact surface having a roughness equivalent to the contact gap of the filled hard particles (same (b)). [4] Not only the damping effect of the hard particles but also the viscous damping of the film base material can be obtained at the same time, resulting in a greater damping effect. Since the low surface pressure contact hard particles 23 contact the contact surfaces (fastening surfaces) 35 ′ and 36 ′ in a state of less biting than the biting contact particles 13 , the hard particles contact the contact surfaces (fastening surfaces) 35 . ' and 36' are reduced (conversely, it can be said that the contact pressure (pressure) applied to the low contact pressure contact hard particles 23 from the contact surfaces (fastening surfaces) 35' and 36' is reduced). In this state, it can be said that the film is more likely to intervene between the low surface pressure contact hard particles 23 and the contact surfaces (fastening surfaces) 35 ′ and 36 ′ compared to the biting contact particles 13 because of the low surface pressure. Further, the contact surface (fastening surface) in which the low contact pressure contact hard particles 23 bite may be one surface.

(Creation of hard particle-filled film)
The produced hard particle-filled film 1 will be explained. PDMS (polydimethylsiloxane) was used as the base material of the film, and white fused alumina (WA) with a median particle size of 21 μm was used as hard particles to fill the film. The procedure for creation is as follows. First, a curing agent and WA were added to the main agent of PDMS, and the mixture was stirred so that the WA was uniform. The filling rate of WA is the volume ratio of PDMS:WA = 4:1 film (Film 1/5, Film 1/5, Example 1) and PDMS:WA = 2:1 film (Film 1/3, Film 1 /3, Example 2, and FIGS. 1(a) and 1(b)) were produced, and the thickness of the hard particle-filled film 1 was unified at 1 mm.

(Blow test, hammering conditions)
FIG. 4 shows a schematic diagram of the experimental apparatus (model binding surface used in the impact test). In this device, a beam-shaped metal test piece (material: A2017 (aluminum), length L = 180 mm, width W = 15 mm, thickness T = 30 mm) is fixed on a surface plate and two metal blocks (material: A2017 (aluminum) ), length L′=80 mm, width W′=40 mm, thickness T′=80 mm). The contact load was given by the axial force of the bolt as shown in FIGS. 4(a) and 4(b). A metal washer (inner diameter: 6 mm, outer diameter: 10 mm, material: SUS440C) is sandwiched between the connecting surfaces in order to define the apparent contact area of the fastening surfaces (see (c) above).

For each experiment, the surface of the contact portion of the test piece was polished with #2000 waterproof abrasive paper (Rz about 1.0 μm). In the impact test, an impulse force (200 N) was applied to the test piece at point A in FIG. 4(a) in the depth direction of the paper. At the same time, the acceleration waveform was measured with an acceleration sensor fixed at the position of point B in the same figure. Conditions in which only WA was sandwiched between (“PDMS”, Comparative Experimental Example 2), conditions in which Film 1/5 was sandwiched between the test piece and the washer (“Film 1/5”, Experimental Example 1), between the test piece and the washer The impact test was conducted under a total of 4 conditions with Film 1/3 sandwiched therebetween (“Film 1/3”, Experimental Example 2). The axial force (normal force applied to the contact surface), etc. in the impact test (hammering conditions) are shown in Table 1, and the average surface pressure of the contact surface was 300 Mpa.

(static load conditions)
On the other hand, the static load conditions are as shown in Table 2. By applying a quasi-static load to the test piece in the loading direction shown in FIGS. Obtain the force-displacement relationship for the specimen. A stepping motor is used to apply a load to the test piece, and the load cell is slowly pressed, and the static load at that time is read. In addition, the displacement of the test piece is acquired by a palpable microsensor of the simultaneous series of test pieces. In the static stiffness evaluation test, the above steps were performed multiple times (3 to 5 times) to acquire the relationship between force and displacement (Comparative Experimental Example 3 for “solid contact”, Comparative Experimental Example 4 for “PDMS”, “ Experimental Example 3 for "Film 1/5" and Experimental Example 4 for "Film 1/3").

(Attenuation evaluation)
In FIG. 5, the time zone of the horizontal axis of the acceleration time waveform indicates 0.12 to 0.22 [s] after about 0.1 [s] from the time of excitation, and the vertical axis is obtained by the acceleration sensor. A raw acceleration waveform is shown. In FIG. 6, the frequency band of the horizontal axis of the frequency response indicates 300 to 400 [Hz], and the vertical axis indicates the dynamic compliance obtained by dividing the vibration amplitude by the excitation force in 0 to 60 [μm / N]. ing. Also, FIG. 7 shows the equivalent damping ratio .zeta. obtained from the damped oscillation waveform.

As can be seen from FIG. 5, the test piece was vibrated by the impulsive force, and then the acceleration amplitude monotonously decreased. Also, it can be seen that the rate of decrease in the acceleration amplitude varies greatly depending on the difference in the experimental conditions.
From FIG. 6, it can be read that the maximum value of the dynamic compliance is smaller under any condition compared to the contact condition with the washer (assuming general solid contact). First, regarding the contact conditions with PDMS, it is presumed that the compliance decreased due to the internal attenuation of PDMS itself. Next, regarding the contact conditions with the film 1/5 and the film 1/3, in addition to the internal attenuation of PDMS itself, the hard particles in the film bite into the test piece, as in the case of the contact condition with PDMS. It is speculated that due to plastic deformation and frictional attenuation due to hard particles, the compliance was further reduced compared to the contact conditions with the washer and the contact conditions with PDMS. Therefore, it is presumed that the film 1/3 with a high hard particle content ratio had a lower compliance than the film 1/5.

Next, from FIG. 7, it can be read that the damping ratio is _{larger (ζ PDMS =} 0.010, _?Film1/5 = 0.020, _?Film1/3 = 0.029). On the other hand, from FIG. 5, it can be read that the acceleration waveform actually attenuates quickly in accordance with the above tendency.
As described above, the compliance of the film 1/3 filled with hard particles was reduced to about 1/3 times and the damping ratio was increased by about 3.6 times with respect to the contact condition with the washer. Therefore, it can be seen that the damping property was greatly improved by sandwiching the hard particle-filled film between the contact portions.

(Static stiffness evaluation)
FIG. 8(a) shows the contact condition (curve) between the test piece and the washer when the static stiffness evaluation test was performed, (b) shows the contact condition (curve) between the test piece and PDMS, and (c) shows the test The relationship between displacement and force is shown for the contact condition (curve) between the piece and the film 1/5, and for the contact condition (curve) between the test piece and the film 1/3 in (d). The horizontal axis indicates the test piece displacement [μm] when the load cell is pushed in, and the vertical axis indicates the force [N] at the time of pushing. In addition, the equations of the straight lines shown on the upper left in each figure represent the straight lines obtained by the method of least squares.

From Figs. 8(a) to (d), it can be read that under any conditions, slip occurs at the time of the first load, and then the displacement is almost elastic. Here, a summary of the amount of slip and the rigidity after elastic deformation are shown in FIGS. 9(a) and 9(b), respectively.

From FIG. 9(a), when comparing the respective slip amounts, 2.26 [μm] under the contact condition with the washer, 9.44 [μm] under the contact condition with PDMS, and 9.44 [μm] under the contact condition with the film 1/5 10.31 [μm], and 6.77 [μm] under the contact condition with the film ⅓. That is, it can be read that the amount of slip increases under any condition with respect to the contact condition with the washer.

On the other hand, the sliding amount is relatively small under the contact condition with the film ⅓ as compared with the contact condition with PDMS and the contact condition with the film ⅕. Further, from FIG. 9(b), comparing the respective static stiffnesses, it is 12.7 [N/μm] under the condition of contact with the washer, 10.9 [N/μm] under the condition of contact with PDMS, and 1/ It was 11.7 [N/μm] under the contact condition with 5 and 10.6 [N/μm] under the contact condition with the film 1/3. Although there are some differences, the difference is about 10% to 20%, and it can be read that the static rigidity is almost the same.

Summarizing the results of the static stiffness evaluation test from the above, slip occurs once under any conditions, and then elastically deforms. At that time, it was clarified that the amount of slip was the smallest under the condition of contact with the washer (solid contact), and that the amount of slip was greater under other conditions. However, when the ⅓ film fully filled with hard particles was sandwiched, the amount of slip was relatively small compared to PDMS and the ⅕ film. Also, the static stiffness after elastic deformation was almost the same under all conditions, although there were some differences.

In FIG. 10 (a), after the experiment under the contact condition of the test piece and the washer, and in (b), after the experiment under the contact condition of the test piece and the film 1/3, photographed with a laser microscope. Observation in the contact part observation image is shown (an annular contact surface was observed with a microscope). 10 (a) and (b), compared with the test piece surface after the experiment under the contact condition with the washer, the test piece surface after the experiment under the contact condition with the film 1/3 shows a large number of It can be confirmed that the indentation of As a result, it can be seen that when the hard particle-filled film is sandwiched between the contact portions and fastening force is applied, the hard particles in the film are caught in the test piece.

The following measurements from FIG. 10(b) could be made. The number of hard particles in the contact area is 180,000, and the number of contact points of hard particles in plastic contact (biting contact hard particles)=real contact area/contact area of one hard particle is about 36,000 points. Therefore, the contact point that makes plastic contact and supports the normal force = 36000/180000 ≈ 0.20, which is about 20%, and the remaining about 80% of the hard particles (including low surface pressure contact hard particles) is the contact surface (annular It is presumed that friction damping and plastic deformation are generated at the point where the washer is in contact), and the damping effect appears.

As shown in FIG. 11(a), two collars are tightened with M6 bolts and (b) a hard particle-filled film is sandwiched between the two collars and tightened with M6 bolts. was measured six times with a digital vernier caliper (minimum reading unit: 10 µm), and the average values were compared. At this time, the surface pressure during tightening is set to 300 [MPa] in accordance with the experimental conditions of the impact test and the static rigidity evaluation test. The result of averaging the respective measured values is the average value without the film: 37.815 [mm], the average value with the hard particle-filled film: 37.833 [mm]. The thickness of the hard particle-filled film is about 20 [μm], which is equivalent to the particle size of the hard particles.

On the other hand, as shown in FIG. 12, in Experimental Example 2, a large number of indentations, which are thought to be due to the hard particles digging into the surface of the aluminum test piece, are observed. Moreover, the hard particle-filled film having a thickness of 1 mm before fastening was compressed to a thickness of about 20 μm (the median particle size of the hard particles was 21 μmm) at the time of fastening. From the above, it can be concluded that the hard particle-filled film is crushed (compressed and stretched) as the tightening force increases, and finally the single hard particle layer remaining between the contact surfaces supports the vertical load. Recognize. That is, rather than direct contact between metal surfaces, contact occurs via hard particles. In the case of film 1/5 and film 1/3, it is believed that PDMS as the base material exists in the gaps between the hard particles. That is, when the hard particle-filled film is compressed and expanded by the tightening force, it is preferable that the thickness includes a portion having a thickness equal to or smaller than the average particle size of the hard particles.

By the way, the fastening force acting on the fastening surface (contact surface) is as follows. A general fastening portion requires a fastening force of several 100N to several 1000N or more. On the other hand, the hardness of the fastening surface (contact surface) is determined by the hardness of the metal used, and is generally about 0.5 GPa to 3 GPa in terms of Vickers hardness. Therefore, the preferred hardness of the hard particles is 10 GPa or more, which is at least three times the hardness of the fastening surface. This is because if the hardness of the hard particles is 10 GPa or more, they have sufficient hardness to plastically deform and bite into the generally used contact surface.

Further, from FIG. 6, it can be seen that there is no significant difference in the natural frequency (vibration frequency at the compliance peak) depending on the presence or absence of the resin film, and sufficient static rigidity is maintained even when the film is sandwiched. From the above, the hard particles (biting contact hard particles) sandwiched between the metal surfaces supported the force in the vertical and sliding directions to ensure static rigidity, and at the same time remained on the contact surface with a relatively low contact surface pressure. It is considered that the hard particles (hard particles with low surface pressure contact) slide finely between the metal surfaces to improve the damping property. In addition, the PDMS film that has entered the gaps of the contact surface supported by the hard particles also contributes to the improvement of the damping property.

In addition, we consider the results of the impact test, taking into account the static stiffness maintenance mechanism. In the contact state as shown in FIG. It is speculated that there are particles that are in contact with the original contact surface (low surface pressure contact hard particles) and particles that are not in contact with the contact surface and are still wrapped in PDMS, which is the base material.

When a shear force is applied to the contact surface, such as during excitation, plastic deformation due to particles caught in the contact surface (biting contact hard particles) and particles in contact with low surface pressure (low surface It is speculated that frictional damping due to pressure-contact hard particles) and viscous damping of PDMS are exhibited.
Regarding the change in vibration when the roughness of the contact surface is changed, the change in the contact surface, and the change in vibration with respect to the change in contact surface roughness when only hard particles are caught in the contact surface, the film 1/3 13(a) and 13(b) respectively show the acceleration time waveform and frequency response when the roughness of the test piece is changed. Each roughness is indicated by the maximum height roughness (Rz) in the legend, and the maximum height roughness is about 1 [μm] (Experimental Example 5), about 15 [μm] (Experimental Example 6), about It is an experimental result for the maximum height roughness of 40 [μm] (Experimental Example 7).

From FIG. 13(b), compared to the result of Rz=1 [μm], the peak value in the case of Rz=15 [μm], which has a larger maximum height roughness, is the smallest, and the maximum height roughness It can be read that the peak value is large in the result of Rz=40 [μm], which has a large height. Therefore, it is inferred that vibration is most suppressed when the maximum height roughness is approximately the same as one packed particle.

It can be used to improve the damping technology of machine tools.

1: Hard particle-filled film for damping (hard particle-filled film)
2: Film 3: Hard particles 13: Biting contact hard particles 23: Low surface pressure contact hard particles 35, 36, 35', 36': Fastening surface (contact surface)
37, 37': fastening part

Claims (6)

A vibration-damping hard particle-filled film comprising a film that is compressed and stretched by a clamping force acting on opposite sides, and a hard particle group filled in the film and made of hard particles that are harder than the film, When the vibration-damping hard particle-filled film is placed in a fastening portion of a structure such as a machine, and compressed and expanded by a predetermined fastening force, the hard particle group forms the fastening portion. A hard particle-filled film for vibration damping, comprising bite contact hard particles that bite into and contact a fastening surface. In addition to the biting contact hard particles, the hard particle group further includes low surface pressure contact hard particles that contact the fastening surface with a degree of biting less than that of the biting contact hard particles. The hard particle-filled film for vibration damping according to claim 1 . The thickness of the vibration-damping hard particle-filled film exceeds the average particle size of the hard particles, and when the vibration-damping hard particle-filled film is compressed and expanded by the predetermined tightening force, the thickness is 3. The vibration damping hard particle-filled film according to claim 1 or 2, comprising a portion having a thickness equal to or smaller than the average particle diameter. A vibration-damping hard particle-filled film comprising: a film that is stretched by a clamping force acting on opposite sides; When the hard particle-filled film for a machine is placed on the fastening portion of a structure such as a machine and is stretched by the predetermined fastening force, the hard particle groups are caught in the two fastening surfaces that constitute the fastening portion. A vibration damping method for a structure such as a machine, wherein the hard particle-filled film for vibration damping containing biting contact hard particles that come into contact with each other is sandwiched and fastened between the fastening portions. In addition to the biting contact hard particles, the hard particle group further includes low surface pressure contact hard particles that contact the fastening surface with a degree of biting less than that of the biting contact hard particles. A vibration damping method for a structure such as a machine according to claim 4. The thickness of the vibration-damping hard particle-filled film exceeds the average particle diameter of the hard particles, and when the vibration-damping hard particle-filled film is compressed and expanded by the predetermined tightening force, the thickness is the average 6. A vibration damping method for a structure such as a machine according to claim 4 or 5, characterized in that the vibration damping method for a structure such as a machine or the like is performed so as to include a portion having a particle size or less.

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