JP2022162322A - Lid for substrate storage container and substrate storage container - Google Patents

Abstract

To provide a lid for a substrate storage container and the substrate storage container that can automate attachment/detachment of a top lid and a locking piece without significantly changing the appearance of the top lid.SOLUTION: A freely attachable and detachable top lid 10 for opening and closing an opening upper portion of a substrate storage box is provided. A pair of locking pieces 11 which are fitted and locked to locking fixtures at upper portions of both side walls of an outer box constituting the substrate storage box is integrally molded at both side portions of the top lid 10 in a suspended state, and each locking piece 11 is provided with an automatic opening/closing support member 20 such as a permanent magnet 22 that enables automatic opening/closing of the top lid 10 with respect to the upper portion of the substrate storage box. Since the top lid 10 can be automatically attached and detached, the possibility of contamination of a semiconductor wafer can be eliminated; miniaturization and improvement in cleanliness of a semiconductor device can be expected; and the performance of the semiconductor device can be improved. Further, since the top lid 10 is automatically opened and closed, loads acting on the top lid 10 and its locking piece 11 can be equalized.SELECTED DRAWING: Figure 3

Description

The present invention relates to a substrate storage container cover and a substrate storage container used for storing and transporting small semiconductor wafers and the like.

Semiconductor wafers are classified into 6-inch (150 mm) and 8-inch (200 mm) small-diameter types, 12-inch (300 mm) large-diameter types, and the like. A box-type substrate container is used. Although not shown, this type of substrate storage container comprises a substrate storage box for storing a plurality of small semiconductor wafers and an upper lid for opening and closing the upper opening of the substrate storage box (Patent Document 1). reference).

The substrate storage box includes a bottomed cylindrical outer box and an inner box that is fitted into the outer box to store a plurality of small semiconductor wafers. ing. The upper lid is formed in a substantially rectangular shape in plan view, and has locking pieces integrally formed on both sides thereof. Some of the holes are locked by the locking tool.

When small semiconductor wafers are accommodated in such a substrate storage container and transported, a plurality of semiconductor wafers are stored in an inner box, the inner box is fitted into the outer box, and the upper opening of the outer box is closed. By fitting the upper lid to the container and then engaging the pair of locking pieces of the upper lid with the locking members of the outer box, small semiconductor wafers can be accommodated and transported in the substrate storage container. On the other hand, when small semiconductor wafers are to be taken out from the transported substrate storage container and used, the pair of locking pieces of the upper lid are removed from the locking members of the outer box, the upper lid is removed from the upper part of the outer box, After pulling out the inner box from the outer box, a plurality of semiconductor wafers can be pulled out one by one from the inner box, so that small semiconductor wafers can be taken out from the transported substrate storage container and used.

By the way, the substrate storage container is a front-open box type with an opening at the front when storing and transporting large-sized large-diameter semiconductor wafers. However, in the case of storing or transporting small-sized small-diameter type semiconductor wafers, it is still necessary to manually operate the attachment/detachment of the upper lid and the attachment/detachment of the locking piece. It is

JP 2009-170591 A Japanese Patent Application Publication No. 2018-524809

Conventional substrate storage containers are constructed as described above, and when small-sized small-diameter type semiconductor wafers are stored or transported, the upper cover is attached and detached and the locking pieces are attached and detached manually.

However, with manual operation, it is not easy to adjust the force, and there is a considerable risk of contamination of the semiconductor wafer. needs to be automated. In this automation, it is preferable to change the appearance of the top cover as little as possible in order to ensure compatibility of the device.

SUMMARY OF THE INVENTION The present invention has been devised in view of the above, and provides a substrate storage container lid body and a substrate storage container that can automate attachment/detachment of the top lid and attachment/detachment of locking pieces without significantly changing the appearance of the top lid. It is intended to

In order to solve the above-mentioned problems, the present invention is provided with a detachable upper lid for opening and closing the upper opening of the substrate storage box. It is characterized in that the stopper piece is provided with an automatic opening/closing support member that enables automatic opening/closing of the top cover with respect to the upper part of the substrate storage box.

The substrate storage box includes a cylindrical outer box with a bottom and an inner box that is detachably fitted in the outer box and capable of storing a plurality of substrates with a width of 200 mm or less in alignment. It is preferable to form each latch with a projection on the top of the wall.
In addition, the top lid is formed in a substantially rectangular shape so as to be fitted to the upper opening of the outer box, and substantially plate-shaped locking pieces are formed on both sides of the top lid so as to be capable of swinging (rocking). It is preferable to form the piece horizontally and provide a plurality of holes arranged in the longitudinal direction of the piece so that some of the plurality of holes can be fitted to the projections of the locking tool.

Further, the automatic opening/closing support member is either a magnet or a magnetic body that is attracted to the magnet. It should be attracted to the device by magnetic force.
Further, the automatic opening/closing support member includes a magnet and a magnetic body that is attracted to the magnet. It may be provided in an automatic opening/closing device that automatically opens/closes the upper lid.
Further, the automatic opening/closing support member is preferably composed of a substantially flat closing member that closes the remaining holes among the plurality of holes of the locking piece, and this closing member is preferably adsorbed by the adsorption member of the automatic opening/closing device.

In addition, in order to solve the above-mentioned problems, the present invention has a cylindrical outer box with a bottom, an inner box fitted in the outer box for storing a plurality of substrates in alignment, and opening and closing the upper opening of the outer box. and a deformable sealing member interposed between the outer case and the top lid, wherein the top lid is the substrate storage container lid body according to any one of claims 1 to 5. there is

Here, the substrate storage box and the top lid in the claims do not particularly matter whether they are transparent, opaque, or translucent. The substrate storage box may have openings formed at the upper and lower portions of the inner box, respectively, and a plurality of alignment grooves may be arranged and formed on the inner surfaces of the plurality of opposing walls of the inner box. Also, a retainer for pressing the substrate can be attached to the inside of the top cover. This pressing retainer has a frame mounted inside the upper lid, and a plurality of flexible elastic pieces protrude from both sides of the frame. It is possible to prevent misalignment, rattling, and the like. The upper lid and the locking piece may be integrated or separated. The magnets of the automatic opening/closing support member may be ferrite magnets excellent in versatility, neodymium magnets excellent in magnetism, samarium magnets excellent in heat resistance, and alnico magnets excellent in strength.

The substrate includes a semiconductor wafer of at least 6 inches or 8 inches, a glass plate of photomask material of approximately the same size (for example, about 200 mm wide) or smaller, and the like. Further, the automatic opening/closing device is not particularly limited. It is preferable to comprise a swingable opening/closing claw for swinging the locking piece of the upper lid. Further, the substrate storage container preferably includes a substrate storage box for storing a plurality of small semiconductor wafers, and an upper lid for opening and closing the upper opening of the substrate storage box.

According to the present invention, for example, when the top cover is automatically removed from the substrate storage container and the substrate is taken out from the substrate storage box, the substrate storage container and the automatic opening/closing device are made to face each other, the automatic opening/closing device is brought into contact with the ceiling of the top cover, and the automatic opening/closing device is automatically opened. After the opening/closing device is brought into contact with the locking piece of the upper lid and the locking piece is held by the automatic opening/closing support member, the locking piece of the upper lid is removed from the locking member of the board storage box by the automatic opening/closing device. After removing the latching piece of the top lid from the substrate storage box, the top lid is held by the automatic opening/closing device, the automatic opening/closing device is raised to remove the top lid from the top of the substrate storage box, and the substrate is removed from the substrate storage box. The upper cover is automatically removed from the storage box, and the substrate can be taken out from the substrate storage box.

According to the present invention, since the latching piece is provided with an automatic opening/closing support member that enables automatic opening and closing of the top lid with respect to the upper part of the substrate storage box, the attachment and detachment of the top lid and the latching piece can be performed without significantly changing the appearance of the top lid. There is an effect that the attachment and detachment of the can be automated.

According to the second aspect of the invention, by using the inner box, a plurality of substrates having a width of 200 mm or less can be collectively housed in the outer box or taken out from the outer box. In addition, since locking members with projections are formed on the upper parts of both side walls of the outer box, the upper cover can be fitted to the upper part of the opening of the outer box using locking pieces that are short in the vertical direction, and can be firmly closed.
According to the third aspect of the present invention, when a part of the hole of the locking piece of the top lid is fitted to the projection of the locking piece of the outer box from the outside, the locking piece of the top lid is caught by the locking piece of the outer box. , the upper lid can be tightly fitted to the upper part of the opening of the outer box to prevent it from coming off. Also, since a plurality of holes are arranged in the longitudinal direction of the locking piece, the flexibility of the locking piece can be improved and the weight can be reduced.

According to the fourth aspect of the invention, either the magnet or the magnetic material is provided on the engaging piece of the upper lid, and the engaging piece of the upper lid is attracted to the automatic opening/closing device by magnetic force, so that the movement of the automatic opening/closing device does not affect the movement of the automatic opening/closing device. Accordingly, the locking piece is oscillated by magnetic force, making it possible to automate attachment and detachment of the top cover and attachment and detachment of the locking piece.
According to the fifth aspect of the present invention, since the blocking material of the automatic opening/closing support member is adsorbed by the adsorption member of the automatic opening/closing device, a negative pressure can be generated between the approximately flat blocking material and the adsorption member. In addition, the locking piece swings according to the movement of the automatic opening/closing device, so that attachment and detachment of the top cover and attachment and detachment of the locking piece can be automated.

According to the sixth aspect of the invention, there is an effect that it is possible to obtain a substrate container capable of automating attachment and detachment of the top lid and attachment and detachment of the locking pieces without significantly changing the appearance of the top lid.

BRIEF DESCRIPTION OF THE DRAWINGS It is perspective explanatory drawing which shows typically the lid|cover of a substrate storage container and embodiment of a substrate storage container which concern on this invention. BRIEF DESCRIPTION OF THE DRAWINGS It is front explanatory drawing which shows typically the lid|cover of a substrate storage container and embodiment of a substrate storage container which concern on this invention. FIG. 3 is a perspective explanatory view schematically showing the inside of the upper lid and the locking piece in the embodiment of the lid of the substrate storage container and the substrate storage container according to the present invention. FIG. 4 is a perspective view of essential parts schematically showing a IV section of FIG. 3 ; FIG. 4 is a perspective explanatory view schematically showing the lid of the substrate storage container and the upper lid and its unbent locking piece in the embodiment of the substrate storage container according to the present invention. FIG. 4 is a perspective explanatory view schematically showing the lid of the substrate storage container and the upper lid and locking pieces bent upward and outward in the embodiment of the substrate storage container according to the present invention. FIG. 4 is a front explanatory view schematically showing the lid of the substrate storage container and the upper lid and locking pieces bent upward and outward in the embodiment of the substrate storage container according to the present invention. FIG. 10 is a perspective explanatory view schematically showing the lid body of the substrate storage container and the upper lid and locking pieces thereof in the second embodiment of the substrate storage container according to the present invention;

A preferred embodiment of the present invention will now be described with reference to the drawings. As shown in FIGS. 1, an upper lid 10 for opening and closing the upper opening of the substrate storage box 1, and an endless packing interposed between the substrate storage box 1 and the upper lid 10, the upper lid 10 being provided with a peripheral wall of the substrate storage box 1. A plurality of locking pieces 11 to be locked to the locking member 3 are provided, and each locking piece 11 is provided with an automatic opening/closing support member 20 that enables automatic opening and closing of the upper lid 10 with respect to the upper part of the substrate storage box 1. , Contributing to the achievement of Goal 10 of the SDGs adopted at the United Nations Summit do.

The plurality of semiconductor wafers, although not shown, are composed of, for example, 8-inch (200 mm) small-diameter silicon wafers, and an orientation flat or notch for alignment is formed in a part of the periphery of the silicon wafers. Such a plurality of semiconductor wafers are stored side by side in the substrate storage box 1, for example, 25 wafers.

As partially shown in FIGS. 1 and 2, the substrate storage box 1 comprises a cylindrical outer box 2 with an open top and a plurality of semiconductor wafers which are detachably fitted in the outer box 2 . and an inner box for arranging and storing the The outer box 2 and the inner box are molded from a molding material. Examples of resins for this molding material include polycarbonate resin, cycloolefin polymer, polyetherimide resin, polyethersulfone resin, and polyetheretherketone resin. , polypropylene resin, polybutylene terephthalate resin, and the like. In addition to the above resins, conductive carbon, conductive fibers, metal fibers, conductive materials such as conductive polymers, antistatic agents, ultraviolet absorbers, and the like are selectively added to such molding materials.

The outer box 2 is made of inexpensive polypropylene (PP) resin, which is excellent in heat resistance, chemical resistance, and mechanical strength. It is formed into a tight fit with the packing. Locking devices 3 with protrusions 4 are integrally formed on the upper portions of both side walls that are the peripheral walls of the outer case 2, and polygonal and tapered projections 4 are integrally formed on the front and rear portions of each locking device 3, respectively. be.

Although not shown, the inner box is formed into a substantially rectangular cassette using inexpensive polypropylene resin or the like that is excellent in heat resistance, chemical resistance, and mechanical strength, and has openings at the top and bottom, respectively. The upper part is wide open and the lower part is narrower than the upper part. A pair of opposing side walls of the inner box are gradually curved downward, and the lower portions approach each other to prevent the semiconductor wafer from falling off. A plurality of vertically extending alignment grooves are formed on the inner surfaces of the pair of side walls, respectively, and the plurality of semiconductor wafers are vertically aligned by inserting the peripheral edge portions of the semiconductor wafers into the plurality of alignment grooves. be housed.

As shown in FIGS. 1 to 7, the upper lid 10 is molded into a substantially rectangular tray shape using polycarbonate (PC) resin, which is excellent in impact resistance, heat resistance, weather resistance, and dimensional stability. A retainer for holding down semiconductor wafers is attached to the ceiling, and is detachably fitted to the upper part of the opening of the outer case 2 . The molding material for the top cover 10 is not particularly limited, but for example, the same molding material as for the outer box 2 and the inner box can be used. The pressing retainer has a frame (not shown) attached to the center of the ceiling inside the upper lid 10, and a plurality of substantially L-shaped elastic pieces having flexibility protrude from both left and right sides of the frame. , each elastic piece presses against the peripheral edge of the semiconductor wafer and functions to prevent positional deviation and rattling.

On both sides of the upper lid 10, substantially plate-shaped locking pieces 11 having flexibility are integrally formed in a suspended state so as to be vertically swingable. , so that when the upper lid 10 is fitted to the substrate storage box 1, it can face the locking member 3 of the outer box 2 from the outside, and a plurality of holes 12 are formed in the locking piece 11 in the longitudinal direction. The plurality of holes 12 include, for example, a long fitting hole 13, a horizontally long hole 14, and a long fitting hole 13 arranged in a row. The projection 4 of 3 is fitted and locked from the outside.

Although not shown, the packing is molded into an elastic frame shape using a predetermined elastomer, and is interposed between the upper end of the outer case 2 of the substrate storage box 1 and the inner peripheral surface of the upper lid 10, It deforms as a sealing member and functions to improve the airtightness of the substrate storage container. The predetermined elastomer for this packing is not particularly limited, but examples thereof include silicone rubber, fluororubber, and thermoplastic elastomer.

As partially shown in FIGS. 3, 4, and 7, the automatic opening/closing support member 20 is made of a magnet 21 or a ferromagnetic material that is attracted to the magnet 21. The locking piece 11 of the upper lid 10 is selectively provided at 11 and attracted by magnetic force to an automatic opening/closing device for automatically opening/closing the upper lid 10 with respect to the upper portion of the substrate storage box 1 . The magnet 21 is not particularly limited, but may be a permanent magnet 22 such as a ferrite magnet, a neodymium magnet, an alnico magnet, or a samarium magnet, or an electromagnet, preferably a permanent magnet 22. When this permanent magnet 22 is used, are insert-molded in the locking piece 11 of the upper lid 10, or formed into a plurality of elongated band shapes and adhered to the lower inner surface or lower outer surface of the locking piece 11 facing the locking tool 3. As shown in FIG.

Although the automatic opening/closing device is not particularly limited, for example, an elevating body that can move up and down at least with respect to the upper lid 10 and a plurality of suction devices that are supported by this elevating body and vacuum-suck the ceiling surface of the upper lid 10 from above. A pad and a pair of opening and closing claws which are supported by an elevating body and are capable of swinging in the vertical direction for swinging the locking piece 11 of the upper lid 10. A plurality of suction pads are connected to a vacuum pump or the like, and a pair An electromagnet that generates a magnetic force when energized is selectively installed in the opening/closing claw, and the locking piece 11 with the permanent magnet 22 of the top cover 10 is attracted to the electromagnet by the magnetic force.

The ferromagnetic material is made of a metal material such as an iron plate, an iron piece, or a nickel piece. It may be molded, or a metal material may be formed into a plurality of elongated strips on the lower inner surface or the lower outer surface of the locking piece 11 facing the locking tool 3 and adhered, and the locking piece 11 with the metal material automatically opens and closes. It is attracted by a magnetic force to the electromagnets of a pair of opening and closing claws of the device.

Such an automatic opening/closing support member 20 is not limited to any particular type of magnet 21 or ferromagnetic material, but from the viewpoint of reliably swinging the locking piece 11 of the top cover 10 and reliably automatically opening/closing the top cover 10, Then, it is desirable that the permanent magnet 22 is provided on the engaging piece 11 of the top cover 10 and the electromagnet is provided on the opening/closing claw of the automatic opening/closing device.

In the above configuration, when small semiconductor wafers are accommodated in the substrate storage container and the upper lid 10 is automatically fitted to the upper opening of the outer box 2 for transportation, first, a plurality of semiconductor wafers are placed in the inner box. are aligned and stored, and this inner box is fitted into the outer box 2 from above. Before or after this work, the upper lid 10 is vacuum-sucked while being positioned on a plurality of suction pads of the automatic opening/closing device. Each locking piece 11 with a permanent magnet 22 of the top cover 10 is magnetically held by an opening/closing claw with an electromagnet of an automatic opening/closing device. It maintains the swinging state while bending (see FIG. 6).

After inserting the inner box into the outer box 2, the outer box 2 and the elevating body of the automatic opening/closing device are positioned and opposed to each other in the vertical direction, and the elevating body of the automatic opening/closing device is lowered to create a vacuum above the opening of the outer box 2. The upper lid 10 that has been sucked is fitted from above, and the pair of opening and closing claws of the elevating body is pivoted downward to close and swing the pair of locking pieces 11 of the upper lid 10 to the protrusions 4 of the locking tool 3 of the outer box 2, respectively. By fitting and locking, the upper lid 10 is automatically fitted to the upper opening of the outer case 2, and a small semiconductor wafer can be accommodated and transported.

Next, when the upper lid 10 is automatically removed from the outer case 2 and small semiconductor wafers are taken out from the substrate storage container for use, first, the substrate storage container and the lifting body of the automatic opening/closing device are positioned respectively. They face each other in the vertical direction, and the elevating body of the automatic opening/closing device is lowered to bring the plurality of suction pads into contact with the ceiling surface of the upper lid 10, and the opening/closing claws of the elevating body are brought into contact with the locking pieces 11 of the upper lid 10 from the outside. After holding the locking piece 11 on the opening/closing claw by magnetic force, each opening/closing claw is opened and swung upward to bend and swing the locking piece 11 upward (see the arrow in FIG. 7). A pair of locking pieces 11 of the upper lid 10 are removed from the locking tools 3 of the outer case 2. - 特許庁

After removing the pair of locking pieces 11 of the upper lid 10 from the locking members 3 of the outer case 2 in this manner, the upper lid 10 is vacuum-sucked by a plurality of suction pads of the lifting body, and the lifting body is lifted to remove the upper lid 10 from the outer box. 2, and after pulling out the inner box from the outer box 2, if a plurality of semiconductor wafers are pulled out one by one from the inner box, the upper lid 10 is automatically removed from the outer box 2, and the small semiconductor is removed from the substrate storage container. The wafer can be taken out and used.

According to the above configuration, the upper cover 10 of the substrate storage container can be automatically attached and detached. Therefore, the risk of contamination of small semiconductor wafers can be eliminated, miniaturization of semiconductor devices and improvement of cleanliness can be achieved. It is expected that the performance of the semiconductor device can be improved. In addition, since the top cover 10 is automatically opened and closed, the loads acting on the top cover 10 and its engaging pieces 11 can be made uniform.

Further, since friction between the locking member 3 of the outer case 2 and the locking piece 11 of the upper lid 10 is reduced by automatic opening and closing instead of manual operation, it is highly expected to suppress dust generation, and contamination of small semiconductor wafers can be prevented. It becomes possible to prevent damage to the substrate storage box 1 . Moreover, since the appearance of the upper lid 10 is not changed at all, it is possible to ensure the compatibility of the device.

In addition, the opening/closing claw and the locking piece 11 are brought into close contact with each other by the magnetic force, and the locking piece 11 swings in conjunction with the movement of the opening/closing claw. Automatic opening and closing of the upper lid 10 is possible even if the Further, the locking pieces 11 are integrally formed on both sides of the upper lid 10 in a suspended state, and each locking piece 11 is perforated with a horizontally elongated through hole 14 to reduce the amount of polycarbonate resin required for molding. Therefore, the flexibility of the locking piece 11 can be improved at low cost.

Next, FIG. 8 shows a second embodiment of the present invention. A substantially flat blocking member 23 for blocking the hole 14 is used, and this blocking member 23 is made to be sucked by the suction cup of the opening/closing claw of the automatic opening/closing device.

The latching piece 11 is suspended from the side of the upper lid 10 and integrally molded. During this integral molding, the horizontally elongated hole 14 is flatly closed with a polycarbonate resin to expand the planar area, and the closed polycarbonate resin is closed. The resin forms the automatic opening/closing support member 20 as the blocking material 23 . The suction cup is made of a rubber material such as nitrile rubber, silicone rubber, or fluororubber so as to be elastically deformable. A plurality of pieces are arranged in a row on the nail, and deformed by being pressed against and adsorbed to the flat and smooth surface of the polycarbonate resin filling the laterally elongated hole 14 of the locking piece 11, that is, the blocking member 23 .

In the above configuration, when small semiconductor wafers are accommodated in the substrate storage container and the upper lid 10 is automatically fitted to the upper opening of the outer box 2 for transportation, first, a plurality of semiconductor wafers are placed in the inner box. are aligned and stored, and this inner box is fitted into the outer box 2 from above. Before or after this work, the upper lid 10 is vacuum-sucked while being positioned on a plurality of suction pads of the automatic opening/closing device. The locking pieces 11 of the upper lid 10 are held by the opening/closing claws of the automatic opening/closing device by the negative pressure action of the suction cups, and as the opening/closing claws swing upward, the locking pieces 11 swing outward while flexing evenly. maintain state.

After inserting the inner box into the outer box 2, the outer box 2 and the elevating body of the automatic opening/closing device are positioned and opposed to each other in the vertical direction, and the elevating body of the automatic opening/closing device is lowered to create a vacuum above the opening of the outer box 2. The upper lid 10 that has been sucked is fitted from above, and the pair of opening and closing claws of the elevating body is pivoted downward to close and swing the pair of locking pieces 11 of the upper lid 10 to the protrusions 4 of the locking tool 3 of the outer box 2, respectively. By fitting and locking, the upper lid 10 is automatically fitted to the upper opening of the outer case 2, and a small semiconductor wafer can be accommodated and transported.

Next, when the upper lid 10 is automatically removed from the outer case 2 and small semiconductor wafers are taken out from the substrate storage container for use, first, the substrate storage container and the lifting body of the automatic opening/closing device are positioned respectively. They face each other in the vertical direction, and the elevating body of the automatic opening/closing device is lowered to bring the plurality of suction pads into contact with the ceiling surface of the upper lid 10, and the opening/closing claws of the elevating body are brought into contact with the locking pieces 11 of the upper lid 10 from the outside. After holding the locking piece 11 on the opening/closing claw by the negative pressure action of the deformed sucker, each opening/closing claw is opened and swung upward to bend the locking piece 11 outward while swinging it. A pair of locking pieces 11 of the upper lid 10 is removed from the locking tool 3 of the box 2. - 特許庁

After removing the pair of locking pieces 11 of the upper lid 10 from the locking members 3 of the outer case 2 in this manner, the upper lid 10 is vacuum-sucked by a plurality of suction pads of the lifting body, and the lifting body is lifted to remove the upper lid 10 from the outer box. 2, and after pulling out the inner box from the outer box 2, if a plurality of semiconductor wafers are pulled out one by one from the inner box, the upper lid 10 is automatically removed from the outer box 2, and the small semiconductor is removed from the substrate storage container. The wafer can be taken out and used. Other parts are the same as those of the above embodiment, so description thereof will be omitted.

In this embodiment, the same effects as those of the above embodiment can be expected, and the upper lid 10 of the substrate storage container can be automatically attached and detached only by slightly changing the shape of the locking piece 11 of the upper lid 10. Therefore, it is clear that miniaturization of semiconductor devices and improvement of cleanliness can be expected, and that high performance of semiconductor devices can be achieved. In addition, since the top cover 10 is automatically opened and closed, the loads acting on the top cover 10 and its engaging pieces 11 can be made uniform. Furthermore, since there is no need to install an electromagnet on the opening/closing claw of the automatic opening/closing device, simplification of the construction of the automatic opening/closing device can be greatly expected.

It should be noted that the insertion and removal of the inner box into and out of the outer box 2 in the above-described embodiment is preferably automated, but manual operation may be performed as long as it does not cause any trouble. Also, the packing may be divided into a plurality of parts as required. Moreover, the top lid 10 may be a newly manufactured top lid 10 or an existing product. In the above embodiment, the locking pieces 11 are integrally formed on both sides of the upper lid 10. Separate locking pieces 11 are pivotally supported on both sides of the upper lid 10 via pins or the like. Also good.

Also, in the above embodiment, the permanent magnet 22 is provided on the lower inner surface of the locking piece 11, but it is not limited to this. For example, the permanent magnet 22 and the ferromagnetic material may be provided on both sides of the inner surface of the locking piece 11 , or the permanent magnet 22 and the ferromagnetic material may be provided on the entire inner surface of the locking piece 11 . Furthermore, although the blocking member 23 of the locking piece 11 is adsorbed to the elastically deformable suction cup of the opening/closing claw, the present invention is not limited to this. For example, a plurality of suction pads, which are suction members, may be arranged in each opening/closing claw, and the blocking member 23 may be vacuum-sucked by the plurality of suction pads.

The substrate storage container lid and the substrate storage container according to the present invention are used in the field of manufacturing semiconductor devices, precision equipment, and the like.

1 Substrate storage box 2 Outer box 3 Locking tool 4 Projection 10 Upper lid 11 Locking piece 12 Hole 13 Long fitting hole (partial hole)
14 horizontally long hole (remaining hole)
20 Automatic opening/closing support member 21 Magnet 22 Permanent magnet 23 Blocking material

Claims (6)

A detachable upper lid for opening and closing the upper opening of the substrate storage box is provided, the upper lid is provided with a locking piece to be caught by a locking member on the peripheral wall of the substrate storage box, and the locking piece is provided with the upper lid for the upper part of the substrate storage box. A lid body for a substrate storage container, characterized in that an automatic opening/closing support member that enables automatic opening/closing of the substrate storage container is provided. The substrate storage box includes a cylindrical outer box with a bottom, and an inner box that is detachably fitted in the outer box and capable of storing a plurality of substrates with a width of 200 mm or less in alignment, and the upper portions of both side walls of the outer box. 2. A lid for a substrate storage container according to claim 1, wherein each of the lids is formed with a projection. The top lid is formed in a substantially rectangular plane so as to be fitted to the upper opening of the outer box, and substantially plate-shaped locking pieces are formed swingably on both sides of the top lid, and each locking piece is formed horizontally long. 3. A lid body for a substrate storage container according to claim 2, wherein a plurality of holes are arranged in the longitudinal direction thereof, and some of the plurality of holes can be fitted to the projections of the locking member. The automatic opening/closing support member is either a magnet or a magnetic substance that is attracted to the magnet. 4. A lid for a substrate storage container according to claim 1, which is attracted by magnetic force. 4. The substrate according to claim 3, wherein the automatic opening/closing support member comprises a substantially flat blocking member that blocks the remaining holes of the plurality of holes of the locking piece, and the blocking member is attracted to the suction member of the automatic opening/closing device. The lid of the storage container. A cylindrical outer box with a bottom, an inner box fitted in the outer box to store a plurality of substrates in alignment, a top cover for opening and closing the upper opening of the outer box, and an interposition between the outer box and the top cover. 6. A substrate storage container comprising a deformable sealing member, wherein the upper lid is the substrate storage container lid body according to any one of claims 1 to 5.

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