JP2022159022A - Robot device - Google Patents

Abstract

To suppress upsizing of a fluid supply system, which supplies a fluid to a plurality of fluid actuators of a robot device and, at the same time, to make it possible to securely supply a liquid pressure satisfying the request of each of the plurality of fluid actuators.SOLUTION: A fluid supply system of a robotic device of the present disclosure includes: a supply source of fluid; a plurality of linear solenoid valves each of which adjusts and outputs a pressure of the fluid from the supply source; and at least one control valve having an input port, an output port, a signal pressure input port and a spool. Of a plurality of fluid actuators, at least one fluid actuator is supplied with the fluid from the control valve, and the remaining fluid actuators are supplied with the fluid from the linear solenoid valves corresponding to them, respectively.SELECTED DRAWING: Figure 3

Description

TECHNICAL FIELD The present disclosure relates to a robot apparatus including at least one fluid actuator that receives supply of fluid to operate, and a fluid supply device that supplies and discharges fluid to and from the fluid actuator.

Conventionally, there has been known a joint device (robot device) including two rubber artificial muscles (hydraulic actuators) having a rubber tube whose both ends are closed with plugs and a net covering the rubber tube (for example, , see Patent Document 1). In addition to the two artificial rubber muscles, this articulation device includes a base, a pulley supported by the base via a support member, an arm fixed to the pulley, and positioned on either side of the pulley's rotational neutrality. It includes two locking brackets attached to the base so that one end of the artificial rubber muscle is connected to each other, and a rope connected to the other end of the two artificial rubber muscles and wound around a pulley. In addition, the inlet and outlet of each artificial rubber muscle are connected via pressure control valves to a hydraulic pressure source for pumping conductive hydraulic fluid. As a result, each rubber artificial muscle expands in the radial direction while contracting in the axial direction when hydraulic fluid flows into the inlet/outlet, and expands in the axial direction while contracting in the radial direction when the hydraulic fluid flows out from the inlet/outlet. .

Conventionally, as a robot arm that is pivotally positioned in the vertical direction by a servomotor, there is known one that includes a hydraulic balancer that acts to bear part of the weight of the robot arm between the arm and the pillar (for example, , see Patent Document 2). In this robot arm, the first amplifier amplifies the input fluctuation proportional to the load when the robot arm of the servomotor rotates upward. Hydraulic pressure is supplied to the rear chamber of the hydraulic balancer. In addition, the second amplifier amplifies the input fluctuation proportional to the load when the robot arm of the servomotor rotates downward, and the hydraulic pressure regulated by the second pressure reducing valve with electromagnetic proportional relief is reduced according to the output of the second amplifier. It is supplied to the front chamber of the hydraulic balancer. As a result, the direction of action of the hydraulic balancer is automatically switched according to the rotation direction of the servomotor, and the output of the hydraulic balancer is controlled in proportion to the load of the servomotor.

JP-A-63-216691 JP-A-63-212489

In a device including a plurality of fluid actuators, such as the conventional joint device described above, the maximum value of the required output (force generated by the fluid actuator x differential value (velocity) of the displacement of the fluid actuator) between the plurality of fluid actuators is generally different. For this reason, a fluid supply device that supplies fluid to a plurality of fluid actuators must reliably supply a fluid pressure that meets demand not only to fluid actuators with small required outputs, but also to fluid actuators with large required outputs. is required. On the other hand, in order to reduce the size and weight of a device including a plurality of fluid actuators, it is necessary to suppress an increase in the size of the fluid supply device.

Accordingly, the present disclosure makes it possible to reliably supply fluid pressure to each of the plurality of fluid actuators as required while suppressing an increase in the size of a fluid supply device that supplies fluid to the plurality of fluid actuators of a robot device. The main purpose is to

The robot apparatus of the present disclosure includes a plurality of joints, a plurality of links, and a plurality of joints that operate by being supplied with fluid and relatively rotate the two corresponding links that are connected via the joints. A robot apparatus comprising: a fluid actuator; and a fluid supply device for supplying and discharging the fluid to and from the plurality of fluid actuators, wherein the fluid supply device includes a supply source of the fluid and the fluid from each of the supply sources. A plurality of linear solenoid valves that adjust and output the pressure of, an input port, an output port, a signal pressure input port and a spool, and at least a signal supplied from the corresponding linear solenoid valve to the signal pressure input port The pressure of the fluid from the supply source side is adjusted by balancing the force applied to the spool by the action of pressure and the force applied to the spool by the action of the pressure of the fluid at the output port. and at least one control valve that outputs from the output port, wherein at least one of the plurality of fluid actuators is supplied with the fluid from the control valve, and the remaining fluid actuators are supplied with the fluid. The fluid is supplied from the linear solenoid valve corresponding to each.

The fluid supply device of the robotic device of the present disclosure includes a plurality of linear solenoid valves that adjust and output the pressure of the fluid from the supply source side, and at least one control having an input port, an output port, a signal pressure input port, and a spool. including valves. The control valve controls at least the force applied to the spool by the action of the signal pressure supplied to the signal pressure input port from the corresponding linear solenoid valve and the force applied to the spool by the action of the fluid pressure at the output port. It balances and adjusts the pressure of the fluid from the supply source side and outputs it from the output port. Among the plurality of fluid actuators, at least one fluid actuator is supplied with fluid from the control valve, and the remaining fluid actuators are supplied with fluid from the corresponding linear solenoid valves. Here, in the control valve, compared with the linear solenoid valve, it is possible to suppress the pressure drop of the fluid in the output port due to the increase in the flow rate of the fluid supplied to the fluid actuator. The combination of the control valve and the linear solenoid valve can reliably supply the required fluid pressure to the fluid actuator requiring a large output while reducing the size of the linear solenoid valve as compared with a single linear solenoid valve. As a result, in the robot apparatus of the present disclosure, it is possible to reliably supply the required fluid pressure to each of the plurality of fluid actuators while suppressing an increase in the size of the fluid supply device that supplies the fluid to the plurality of fluid actuators. becomes possible.

1 is a schematic configuration diagram showing a robot device of the present disclosure; FIG. 1 is an enlarged view of a robotic device of the present disclosure; FIG. 1 is a system diagram showing a fluid supply device of a robotic device of the present disclosure; FIG. FIG. 4 is a system diagram showing another fluid supply device of the robotic device of the present disclosure; FIG. 3 is a schematic configuration diagram showing another robotic device of the present disclosure; FIG. 4 is a cross-sectional view showing a fluid actuator included in another robotic device of the present disclosure; FIG. 4 is a system diagram showing a fluid supply device of another robotic device of the present disclosure; FIG. 4 is a system diagram showing another fluid supply device applicable to another robotic device of the present disclosure;

Next, embodiments for carrying out the invention of the present disclosure will be described with reference to the drawings.

FIG. 1 is a schematic configuration diagram showing a robot device 1 of the present disclosure, and FIG. 2 is an enlarged view showing the robot device 1. As shown in FIG. A robotic device 1 shown in these drawings includes a robotic arm 2 and a fluid supply device (liquid supply device) 10 . In this embodiment, the robot apparatus 1 is mounted on a carrier 20, which is a so-called automatic guided vehicle (AGV) or autonomous mobile carrier robot (AMR) capable of self-propelled to a designated target position. However, the robot device 1 is not limited to being mounted on the carriage 20, and may be fixed at a predetermined installation location.

The robot arm 2 includes a plurality of (three in this embodiment) joints (pin joints) J1, J2, and J3, a plurality of (three in this embodiment) arms (links) 3, joints J1, A plurality of fluid actuators (hydraulic pressure actuators) M1, M2, M3, M4, M5, M6 as artificial muscles provided, for example, in an even number (two in this embodiment) for each of J2 and J3, and an arm on the tip side. It is a multi-joint arm including a hand portion (robot hand) 4 as a grasping portion (tip) attached to the arm 3. The hand portion 4 of the robot arm 2 is controlled by the control device 100 (see FIG. 3) of the robot device 1 so as to grip a target object (hereinafter referred to as a "gripping target"). Further, the fluid supply device 10 is controlled by the control device 100 to supply and discharge working oil (liquid) as a fluid (working fluid) to each of the fluid actuators M1 to M6. As a result, the robot arm 2 can be hydraulically driven to move the hand portion 4 to a desired position.

Each of the fluid actuators M1-M6 of the robot arm 2 is a so-called McKibben-type artificial muscle that includes a tube T that expands under the pressure of hydraulic fluid and a braided sleeve S that covers the tube T, as shown in FIG. . The tube T is formed in a cylindrical shape from an elastic material such as a rubber material having high oil resistance. A hydraulic oil inlet/outlet IO is formed in a sealing member C on the base end side of the tube T (on the fluid supply device 10 side, the lower end side in FIG. 2). The braided sleeve S is formed in a cylindrical shape by weaving a plurality of cords oriented in a predetermined direction so as to intersect each other, and is contractible in the axial and radial directions. As the cords forming the braided sleeve S, fiber cords, high-strength fibers, metal cords composed of ultrafine filaments, and the like can be used. Hydraulic fluid is supplied from the inlet/outlet IO into the tubes T of the fluid actuators M1 to M6 to increase the pressure of the hydraulic fluid in the tubes T, so that the tubes T move radially due to the action of the braided sleeve S. It expands and contracts in the axial direction, generating a contraction force according to the pressure of the hydraulic oil inside.

As shown in FIGS. 1 and 2, among the plurality of arms 3, the arm 3 closest to the proximal end (the side closest to the fluid supply device 10) is rotatable by a support member 5 as a link via a joint J1. Supported. Also, the two arms 3 are rotatably connected to each other via a joint J2 or J3. Further, a connecting member 6 is fixed to the distal ends (tip-side ends) of the two arms 3 on the fluid supply device 10 side. As shown in the figure, the support member 5 rotatably supports the sealing member C on the proximal side of the fluid actuator M1 corresponding to the joint J1 on the most proximal side via the first connecting shaft, A sealing member C on the base end side of the fluid actuator M2 corresponding to the joint J1 is rotatably supported via a second connecting shaft.

In addition, each connecting member 6 rotates the sealing member C on the distal side (hand side) of the fluid actuator M1 or M3 corresponding to the joint J1 or J2 located on the proximal side via the first connecting shaft. Also, the sealing member C on the distal end side (hand side) of the fluid actuator M2 or M4 corresponding to the joint J1 or J2 is rotatably supported via the second connecting shaft. Further, each connecting member 6 rotatably supports the sealing member C on the base end side of the fluid actuator M3 or M5 corresponding to the joint J2 or J3 positioned on the distal end side through the first connecting shaft. , the sealing member C on the base end side of the fluid actuator M4 or M6 corresponding to the joint J2 or J3 is rotatably supported via the second connecting shaft.

As a result, on both sides of each arm 3 extending from the joint axis of the joints J1 to J3 to the hand side (hand portion 4 side), corresponding two of the fluid actuators M1 to M6 are arranged in parallel with the arm 3. . Fluid actuators M1, M3 and M5 arranged on one side of each arm 3 constitute a first artificial muscle (one antagonistic muscle) corresponding to one joint J1, J2 or J3. The fluid actuators M2, M4, M6 arranged on the other side constitute a second artificial muscle corresponding to one joint J1, J2 or J3 paired with the first artificial muscle.

However, the first and second artificial muscles may each be composed of two or more (same number) fluid actuators, and the number of fluid actuators constituting the first artificial muscle and the number of fluid actuators constituting the second artificial muscle A different number of fluid actuators may be used. Furthermore, in the present embodiment, the plurality (two) fluid actuators M1, M2, etc. provided for one joint J1, J2 or J3 have the same specifications, but constitute the first artificial muscle. The specification of the fluid actuator that constitutes the second artificial muscle may be different from the specification of the fluid actuator that constitutes the second artificial muscle.

Further, in this embodiment, each arm 3 is formed hollow, and a plurality of hoses H (see broken lines in FIG. 2) as fluid supply pipes are arranged inside each arm 3 . Each hose H is connected to an inlet/outlet IO formed in the sealing member C on the base end side of the corresponding fluid actuator M1-M6, and the fluid is supplied through the hose H into the tube T of the fluid actuator M1-M6. Hydraulic oil (hydraulic pressure) from the device 10 is supplied.

Therefore, by controlling the fluid supply device 10 with the control device 100, the hydraulic pressure in the tube T such as the fluid actuator M1 constituting the first artificial muscle and the second artificial muscle paired with the first artificial muscle are controlled. can be made different from the hydraulic pressure in the tube T of the fluid actuator M2 or the like that constitutes . As a result, a force (rotational force) is applied to each arm 3 via the connecting member 6 from the two fluid actuators M1, M2, etc., which are arranged to oppose each other, that is, a pair of first and second artificial muscles. torque) to rotate each arm 3 with respect to the support member 5 or the arm 3 on the base end side, thereby changing the joint angles of the joints J1 to J3. In this embodiment, the fluid actuators M1 and the like that constitute the first artificial muscle and the fluid actuators M2 and the like that constitute the second artificial muscle paired with the first artificial muscle are configured such that the tube T is positioned from the natural state. It is driven by the hydraulic pressure from the fluid supply device 10 with a state in which it is contracted in the axial direction by a fixed amount (for example, about 10% of its natural length) as an initial state.

In addition, in the present embodiment, of the pair of fluid actuators M1 and M2 corresponding to the joint J1 on the most proximal end side of the robot arm 2, the fluid actuator M1 is attached to the hand portion 4 with respect to the arm 3 while the robot device 1 is operating. The maximum required output (maximum required output) for the fluid actuator M1, which is always positioned on the opposite side and is determined from the movable range of the joint J1, becomes larger than the maximum required output for the fluid actuator M2. Furthermore, in this embodiment, the maximum required output for fluid actuator M1 is the largest among all fluid actuators M1-M6 during operation of robot device 1 (robot arm 2). The required output for the fluid actuators M1-M6 is the product (power or power) of the contraction force and the contraction velocity (extension velocity) required for the fluid actuators M1-M6.

As shown in FIG. 1, the fluid supply device 10 of the robot device 1 that supplies hydraulic fluid to the fluid actuators M1 to M6 and the like includes a tank 11 that defines a hydraulic fluid reservoir (fluid reservoir), and the tank 11 and a base portion 12 rotatably supported around a rotating shaft extending in the vertical direction (see one-dot chain line in FIG. 1). The tank 11 is, for example, a cylindrical body with closed upper and lower ends, and can store hydraulic oil therein. In this embodiment, the support member 5 of the robot arm 2 is fixed to the upper wall portion 11u of the tank 11 via a bolt or the like (not shown) so as to extend coaxially with the rotation axis of the tank 11 (see FIG. 2). ). That is, the robot arm 2 is supported by the tank 11 (upper wall portion 11 u) of the fluid supply device 10 .

The base portion 12 is mounted (fixed) on the carriage 20 so as to be positioned below the robot arm 2 and the tank 11 . The base portion 12 also supports a rotation drive unit (not shown) that rotates the tank 11 about the rotation axis by a predetermined angle (eg, 360°). Accordingly, by operating the rotation drive unit, the robot arm 2 can be rotated integrally with the tank 11 around the rotation axis. In this embodiment, the rotary drive unit is a swing motor driven by hydraulic pressure supplied from the fluid supply device 10 . However, the rotary drive unit may include an electric motor, a gear mechanism, or the like.

Further, as shown in FIG. 3, the fluid supply device 10 includes, in addition to the tank 11 and the base portion 12, a pump 13 as a fluid supply source, a valve body (not shown) arranged in the tank 11, and a first relief A valve (pressure control valve) RV1, a second relief valve RV2, a check valve CV, an accumulator (pressure accumulator) 14, and a plurality of linear solenoid valves 151, 152, 153 as fluid adjustment valves (fluid adjustment units) , 154 , 155 , 156 and a control valve (pressure control valve) 16 .

The pump 13 is an electric pump controlled by the control device 100, sucks hydraulic oil stored in the tank 11, and discharges (pressure-feeds) the hydraulic oil from a discharge port to the oil passage L1. In this embodiment, the pump 13 has a pump portion arranged in the tank 11, an electric motor, a reduction gear mechanism, a driving circuit such as an inverter controlled by the control device 100, and the like, and the pump 13 is driven inside or outside the tank 11. and a drive unit 130 located in the .

The first relief valve RV1 prevents the pressure of the hydraulic fluid discharged by the pump 13 from exceeding a predetermined upper limit pressure (limiting pressure) Plim (upper limit value, for example, about 6 to 7 MPa in this embodiment). is limited to In this embodiment, the first relief valve RV1 is a relief valve that includes a spool S1 arranged in the valve body and a spring SP1 that biases the spool S1. Further, the first relief valve RV1 includes an input port i1 communicating with the oil passage L1, a first discharge port da1, and a second discharge port db1.

In the mounted state of the first relief valve RV1 in which hydraulic oil is not supplied from the pump 13 to the input port i1, the first relief valve RV1 is configured such that the spool S1 is urged by the spring SP1 to separate the input port i1 and the first discharge port da1. form a first communication state in which the Further, the discharge pressure of the pump 13, that is, the pressure of hydraulic oil supplied from the pump 13 to the input port i1 is lower than a predetermined relatively low standby pressure Pst (second target pressure, for example, about 1000 kPa in this embodiment). When the pressure is higher than the switching pressure set sufficiently lower than the upper limit pressure Plim (for example, about 1 to 2 MPa in the present embodiment), the first relief valve RV1 operates so that the spool S1 is connected to the input port i1 and the first relief valve RV1. 1 discharge port da1 is established.

Furthermore, when the pressure of the hydraulic fluid supplied from the pump 13 to the input port i1 is equal to or higher than the switching pressure and does not exceed the upper limit pressure Plim, the first relief valve RV1 operates so that the spool S1 is biased by the spring SP1. A cut-off state is formed to cut off the communication between the input port i1 and the first and second discharge ports da1 and db1 against the pressure. Further, when the flow rate of the hydraulic oil supplied from the pump 13 to the input port i1 exceeds the required supply flow rate and the pressure of the hydraulic oil reaches the upper limit pressure Plim, the first relief valve RV1 is closed so that the spool S1 is attached to the spring SP1. A second communication state is formed in which the input port i1 and the second discharge port db1 are communicated against the force.

As shown in FIG. 3, the first discharge port da1 of the first relief valve RV1 communicates with the hydraulic oil reservoir in the tank 11 via an oil passage L0 formed in a valve body (not shown). An orifice Or is installed in the oil passage L0 so as to be close to the first discharge port da1. When the pressure of hydraulic fluid supplied from the pump 13 to the input port i1 is less than the switching pressure and the spool S1 of the first relief valve RV1 forms the first communication state, the orifice Or is connected to the first relief valve Hydraulic oil flows in from the first discharge port da1 of RV1. The specifications of the orifice Or, such as the orifice diameter, are generated by the passage of hydraulic oil supplied from the pump 13 when the pump 13 operates at a rotational speed higher than a predetermined lower limit rotational speed by a predetermined value. The front-rear differential pressure is determined to be the standby pressure Pst. At this time, since the pressure of hydraulic fluid on the downstream side, that is, on the tank 11 side is approximately zero, the pressure of hydraulic fluid on the upstream side, that is, at the first discharge port da1 becomes the standby pressure Pst.

The second relief valve RV2 includes a spool S2 arranged within the valve body and a spring SP2 that biases the spool S2. Further, the second relief valve RV2 has an input port i2 communicating with the second discharge port db1 of the first relief valve RV1 via an oil passage formed in the valve body, and the oil passage L0 downstream of the orifice Or. and an exhaust port db2 communicating with. The second relief valve RV2 temporarily dams the hydraulic fluid discharged from the first relief valve RV1 to increase the pressure to a predetermined pressure, and the increased pressure moves the spool to discharge the reduced hydraulic fluid. It is made to flow out from the port db2 to the hydraulic fluid reservoir in the tank 11 .

The check valve CV allows hydraulic fluid from the pump 13 (and the first relief valve RV1) side, i.e., the oil passage L1, to flow out to the oil passage LL, and from the oil passage LL to the oil passage L1, that is, the pump 13 (and the first relief valve). It regulates the flow of hydraulic fluid to the RV1) side. The accumulator 14 has an inlet/outlet for hydraulic oil that is directly connected (connected) to the oil passage LL without a valve or the like on the downstream side of the check valve CV, and stores hydraulic pressure from the pump 13 side. As the accumulator 14, one having a maximum working pressure equal to or higher than the upper limit pressure Plim is used. Further, in the oil passage LL, a source pressure sensor PS is installed downstream of the check valve CV and upstream of the accumulator 14 to detect the pressure (original pressure) of the working oil in the oil passage LL.

The linear solenoid valves 151 - 156 have a common configuration, are each arranged in a valve body and controlled by the controller 100 . In this embodiment, the linear solenoid valve 151 adjusts the signal pressure to the control valve 16, and the linear solenoid valve 152 adjusts the hydraulic pressure (driving pressure) to the fluid actuator M2. Also, the linear solenoid valve 153 adjusts the hydraulic pressure (driving pressure) to the fluid actuator M3, and the linear solenoid valve 154 adjusts the hydraulic pressure (driving pressure) to the fluid actuator M4. Furthermore, the linear solenoid valve 155 adjusts the hydraulic pressure (driving pressure) to the fluid actuator M5, and the linear solenoid valve 156 adjusts the hydraulic pressure (driving pressure) to the fluid actuator M6.

As shown in FIG. 3, each of the linear solenoid valves 151-156 includes an electromagnetic portion 15e that is energized and controlled by the control device 100, a spool 15s that is axially movably disposed within a sleeve held by the valve body, and a spring 15sp that biases the spool 15s toward the electromagnetic portion 15e (from the output port 15o side to the input port 15i side, the upper side in FIG. 3). Furthermore, the linear solenoid valves 151-156 include an input port 15i, an output port 15o, a feedback port 15f communicating with the output port 15o, and a drain port 15d communicating with the input port 15i and the output port 15o. The input ports 15i of the linear solenoid valves 151-156 communicate with the oil passage LL on the downstream side of the accumulator 14, respectively. Also, the output ports 15o of the linear solenoid valves 152-156 communicate with hydraulic oil inlets and outlets IO of the corresponding fluid actuators M2-M6 (tube T) via oil passages, hoses H, etc. formed in the valve bodies. Further, the drain ports 15d of the linear solenoid valves 151-156 communicate with the hydraulic oil reservoirs in the tank 11 via oil passages LD, respectively.

In this embodiment, the linear solenoid valves 151-156 are normally closed valves that open when current is supplied to the electromagnetic part 15e. The spool 15s is axially moved so as to communicate with the output port 15o. As a result, the electromagnetic portion 15e acts on the spool 15s due to the thrust generated by the power supply to the electromagnetic portion 15e (coil), the biasing force of the spring 15sp, and the hydraulic pressure (driving pressure) supplied from the output port 15o to the feedback port 15f. Hydraulic oil from the pump 13 (and the first relief valve RV1) supplied to the input port 15i can be adjusted to a desired pressure and flowed out from the output port 15o by balancing the thrust to the side. becomes.

In addition, by feeding back the hydraulic pressure (signal pressure or drive pressure) supplied to the fluid actuators M1-M6 to the linear solenoid valves 151-156, the robot arm 2 driven by the fluid actuators M1-M6 as artificial muscles When an external force is applied from a source other than the fluid actuators M1-M6, it is possible to absorb oil pressure fluctuations according to volume changes of the tubes T of the fluid actuators M1-M6 due to the external force. In addition, after the external force disappears, it is possible to quickly supply hydraulic pressure (driving pressure) to the fluid actuators M1 to M6 according to the demand.

The control valve 16 adjusts the pressure of the working oil from the oil passage LL according to the signal pressure from the linear solenoid valve 151, and supplies it to the tube T of the fluid actuator M1 that maximizes the maximum required output. The control valve 16 is a spool valve that includes a spool 16s arranged in a valve body and a spring 16sp that biases the spool 16s. 3, the control valve 16 includes an input port 16i, an output port 16o, a feedback port 16f, a signal pressure input port 16c and a drain port 16d.

The input port 16i communicates with the oil passage LL downstream of the accumulator 14 . The output port 16o communicates with the hydraulic fluid inlet/outlet IO of the fluid actuator M1 (tube T) via an oil passage formed in the valve body, a hose H, and the like. The feedback port 16f communicates with the output port 16o through an oil passage formed in the valve body. The signal pressure input port 16c communicates with the output port 15o of the linear solenoid valve 151 through an oil passage formed in the valve body. The drain port 16d communicates with the hydraulic oil reservoir in the tank 11 via the oil passage LD.

The spool 16s of the control valve 16 moves in the axial direction against the biasing force of the spring 16sp due to the signal pressure from the linear solenoid valve 151 corresponding to the current applied to the electromagnetic portion 15e. This balances the thrust applied to the spool 16s by the action of the signal pressure, the biasing force of the spring 16sp, and the thrust acting on the spool 16s by the hydraulic pressure (driving pressure) supplied from the output port 16o to the feedback port 16f. As a result, part of the hydraulic fluid from the pump 13 (and the first relief valve RV1) supplied to the input port 16i is drained appropriately through the drain port 16d, and is discharged from the output port 16o to the tube T of the fluid actuator M1. Hydraulic fluid supplied to can be adjusted to a desired pressure.

A control device 100 of the robot device 1 includes a microcomputer including a CPU, a ROM, a RAM, an input/output interface, etc., and various logic ICs (all not shown). The control device 100 inputs the detection values of the source pressure sensor PS and voltage sensors (not shown) for detecting the voltage of the power sources of the linear solenoid valves 151 to 156 and the like. Further, the control device 100 controls the drive unit 130 of the pump 13 so that the oil pressure (source pressure) in the oil passage LL detected by the source pressure sensor PS becomes a target value. Further, the controller 100 controls the current supplied to the electromagnetic portions 15e of the linear solenoid valves 151-156.

Next, the operation of the robot apparatus 1 configured as described above will be described.

When a start switch (not shown) is turned off and the operation of the robot device 1 is completely stopped, the hand part 4 is held by a locking part formed on a support base (not shown). As a result, the posture of the robot arm 2 is forcibly held at the predetermined standby posture. Further, when the start switch of the robot device 1 is turned on and the system start-up is completed, the control device 100 controls the oil pressure ( The pump 13 is controlled so that the original pressure) becomes the standby pressure Pst (for example, about 1000 kPa).

In this embodiment, the standby pressure Pst is a pressure higher than the pressure (for example, about 700 to 900 kPa) that can axially contract each of the plurality of fluid actuators M1 to M6 from the natural state to the initial state by a predetermined value. stipulated in Further, when the hydraulic pressure (original pressure) in the oil passage LL is set to the standby pressure Pst, the pump 13 is controlled to operate at a rotation speed equal to or higher than a predetermined lower limit rotation speed. At this time, the first relief valve RV1 forms the first communication state, and a part of the hydraulic oil discharged from the pump 13 is transferred to the first relief valve RV1, the orifice Or, and the oil that form the first communication state. It is discharged to the fluid reservoir of tank 11 via path L0. As a result, the oil pressure (original pressure) in the input port i1 of the first relief valve RV1 and the oil passage LL is adjusted by the orifice Or to the standby pressure Pst.

Next, the control device 100 fills the tubes T of the fluid actuators M1-M6 with hydraulic oil in a predetermined order, and directs the electromagnetic portions 15e of the linear solenoid valves 151-156 to bring the tubes T into the initial state. to control the current of As a result, hydraulic fluid is supplied to the tubes T of the fluid actuators M1-M6 from any one of the control valve 16 and the linear solenoid valves 152-156, and each tube T moves from its natural state to a predetermined amount (for example, natural about 10% of the length) in the axial direction. After that, current is continuously supplied to each electromagnetic part 15e of the linear solenoid valves 151 to 156 until the hand part 4 is placed on the support base or the like and the operation of the robot apparatus 1 is stopped. The valves 151-156 adjust the pressure of hydraulic fluid from the pump 13 side according to the current supplied to the electromagnetic portion 15e.

After completion of the work start preparation of the robot device 1 as described above, when the start of work using the robot arm 2 and the hand unit 4 is instructed, the control device 100, based on the detection value of the source pressure sensor PS, The pump 13 is controlled so that the hydraulic pressure (original pressure) in the oil passage LL becomes a predetermined relatively high normal pressure Pw (first target pressure, in this embodiment, about 5-6 MPa, for example). In this embodiment, the normal pressure Pw is set higher than the standby pressure Pst and switching pressure, lower than the upper limit pressure Plim, and equal to or higher than the minimum operating pressure of the accumulator 14 . Further, the control device 100 causes the hydraulic pressures required to hold the robot arm 2 in the waiting posture without external force (support table) to the tubes T of the fluid actuators M1 to M6 in a predetermined order. Control the current to the electromagnetic portion 15e of the linear solenoid valves 151-156 so that the current is supplied.

Then, the control device 100 supplies current to each electromagnetic portion 15e so that the control valve 16 and the linear solenoid valves 152 to 156 supply the fluid actuators M1 to M6 with hydraulic pressure corresponding to the demand of the robot arm 2. A command value is set, and the current supplied to each electromagnetic portion 15e is controlled based on the current command value. As a result, hydraulic pressure (driving pressure) adjusted according to demand by the control valve 16 and the linear solenoid valves 152-156 can be supplied to the tubes T of the fluid actuators M1-M6. As a result, each arm 3 can be rotated by a plurality of fluid actuators M1 to M6 to move the hand section 4 of the robot device 1 to a desired position.

Also, the pump 13 is controlled in accordance with fluctuations in the oil pressure (original pressure) in the oil passage LL caused by contraction of the tubes T of the fluid actuators M1-M6. When the discharge amount becomes excessive, the pressure of the hydraulic fluid supplied to the input port i1 reaches the upper limit pressure Plim, so that the first relief valve RV1 forms the second communication state. As a result, part of the hydraulic oil discharged from the pump 13 is transferred to the tank 11 via the first relief valve RV1 (the input port i1 and the second discharge port db1), the second relief valve RV2, and the oil passage L0. The oil pressure (original pressure) in the oil passage LL is adjusted by the first relief valve RV1 so as not to exceed the upper limit pressure Plim.

Further, the fluid supply device 10 includes an accumulator 14 connected to an oil passage (fluid passage) LL connecting the check valve CV and the fluid actuators M1-M6. As a result, even if the pump 13 stops while the robot arm 2 is operating (moving), the hydraulic fluid from the accumulator 14 is supplied to the fluid actuator M1- through the control valve 16 and the linear solenoid valves 152-156 for a while. It can be supplied to the M6. As a result, it is possible to suppress sudden changes in the state of the fluid actuators M1-M6 (tube T).

As described above, in the robot device 1, the fluid supply device 10 includes a plurality of linear solenoid valves 151 to 156 that adjust and output the pressure of hydraulic oil from the pump 13 side, an input port 16i, an output port 16o, a signal and a control valve 16 having an injection port 16c and a spool 16s. The control valve 16 is operated by the force applied to the spool 16s by the action of the signal pressure supplied from the corresponding linear solenoid valve 151 to the signal pressure input port 16c, and by the action of the hydraulic oil pressure (driving pressure) at the output port 16o. The force applied to the spool 16s is at least balanced to adjust the pressure of the hydraulic oil from the pump 13 side and output from the output port 16o. Among the plurality of fluid actuators (artificial muscles) M1-M6, one fluid actuator M1 is supplied with hydraulic oil output from the output port 16o of the control valve 16, and the remaining fluid actuators M2-M6 , are supplied with hydraulic oil output from linear solenoid valves 152 to 156 corresponding to each.

Here, the control valve 16 is excellent in so-called override characteristics, and compared to the linear solenoid valves 152 to 156, the hydraulic oil at the output port 16o is increased as the flow rate of the hydraulic oil supplied to the fluid actuator (artificial muscle) increases. It is possible to satisfactorily suppress the pressure drop of Furthermore, the combination of the control valve 16 and the linear solenoid valve 151 makes it possible to reliably supply the required hydraulic pressure to the fluid actuator M1, which requires a large output, while making the size smaller than that of a single linear solenoid valve. can. As a result, in the robot device 1, while suppressing an increase in the size of the fluid supply device 10 that supplies hydraulic fluid to the plurality of fluid actuators M1 to M6, each of the plurality of fluid actuators M1 to M6 is supplied with hydraulic pressure according to the demand. It becomes possible to reliably supply.

Further, in the robot device 1, hydraulic fluid is supplied from the control valve 16 to the fluid actuator M1 having the largest maximum required output among the plurality of fluid actuators M1 to M6. As a result, while suppressing an increase in the size of the fluid supply device 10, it is possible to reliably supply the required hydraulic pressure to the fluid actuator M1, which requires the maximum output among the plurality of fluid actuators M1 to M6. becomes possible. However, it goes without saying that hydraulic fluid may be supplied from the control valve 16 to two or more of the plurality of fluid actuators M1 to M6.

Further, in the robot apparatus 1, the control valve 16 supplies hydraulic fluid to the fluid actuator M1, which has a larger maximum required output determined by the movable range of the joint J1, among the pair of fluid actuators M1 and M2 corresponding to the joint J1. As a result, the arm 3 and the support member 5, which are connected via the joint J1, can be relatively rotated stably and smoothly. However, it goes without saying that hydraulic fluid may be supplied from the control valves 16 corresponding to both of the pair of fluid actuators M1, M2, etc. corresponding to any of the joints J1-J3.

Further, in the robot device 1 , the control valve 16 supplies hydraulic fluid to the fluid actuator M<b>1 corresponding to the joint J<b>1 on the most proximal side of the robot arm 2 . This allows the robot arm 2 to operate stably and smoothly. However, depending on the structure of the robot arm 2, it goes without saying that hydraulic fluid may be supplied from the control valve 16 to fluid actuators corresponding to joints other than the proximal-most joint J1 of the robot arm 2. FIG.

In the robot device 1, the fluid actuators connected to the control valve 16 are determined by using the maximum required output of the fluid actuators M1 to M6 as an index, but the fluid actuators connected to the control valve 16 have outputs other than the maximum required output. may be determined based on the index of That is, the fluid actuator connected to the control valve 16 has the pressure of the fluid supplied to the fluid actuator (tube), the flow rate of the fluid supplied to the fluid actuator, and the product of the pressure and the flow rate of the fluid supplied to the fluid actuator. It may be determined based on the value, the volume of the space containing the fluid when the fluid actuator is maximally contracted, the contraction force generated by the fluid actuator, or the maximum value of the maximum contraction speed (maximum expansion/contraction speed) of the fluid actuator. Among the plurality of fluid actuators, the fluid actuator having the maximum maximum value of the index other than the maximum required output may be connected to the control valve 16. Among the pair of fluid actuators corresponding to one joint, the maximum required output One of the indicators other than the one that has the largest maximum value determined from the movable range of the joint may be connected to the control valve 16 .

FIG. 4 is a system diagram showing another fluid supply device 10B applicable to the robot device 1. As shown in FIG. In the fluid supply device 10B shown in the figure, one opening/closing valve 17 is provided between the output port 16o of the control valve 16 and the fluid actuator M1, and between the linear solenoid valves 152-156 and the corresponding fluid actuators M2-M6. placed one by one. The open/close valve 17 is a normally closed spool valve including a spool 17s arranged in a valve body and a spring 17sp for urging the spool 17s. Driven by valve 18 .

The opening/closing valve 17 includes an input port 17i, an output port 17o, and a signal pressure input port 17c, as shown. The input port 17i communicates with the output ports 15o, 16o of the control valve 16 or the corresponding linear solenoid valves 152-156 through oil passages formed in the valve body. The output port 17o communicates with the hydraulic fluid inlet/outlet IO of the corresponding fluid actuators M1-M6 (tube T) via an oil passage formed in the valve body, a hose H, or the like. The on/off solenoid valve 18 is a normally closed valve including an input port 18i, an output port 18o, and an electromagnetic portion 18e whose energization is controlled by the control device 100. FIG. The input port 18i communicates with the oil passage LL or an output port of a pressure reducing valve (modulator valve) (not shown) connected to the oil passage LL. The output port 18o communicates with the signal pressure input port 17c of each opening/closing valve 17 via an oil passage formed in the valve body.

Each of the on-off valves 17 closes the input port 17i by urging the spool 17s by the spring 17sp when the signal pressure from the on-off solenoid valve 18 is not supplied to the signal pressure input port 17c, and also closes the input port 17i and the output port 17i. An outflow restricting state is created that cuts off the communication with the port 17o. In addition, when the signal pressure from the on/off solenoid valve 18 is supplied to the signal pressure input port 17c in response to the energization of the electromagnetic portion 16e, the spool 17s of each opening/closing valve 17 is energized by the thrust based on the signal pressure. As a result, the input port 17i is opened against the biasing force of the spring 17sp, and a communication state is formed in which the input port 17i and the output port 17o are communicated with each other.

While the robot device 1 is system-activated and the pump 13 is in operation, current is supplied to the electromagnetic portion 18e of the on/off solenoid valve 18, and the on/off solenoid valve 18 opens the input port according to the energization of the electromagnetic portion 18e. A signal pressure to each opening/closing valve 17 is output by causing the hydraulic oil supplied to 18i to flow out to the output port 18o. As a result, each open/close valve 17 forms the above-described communication state, and hydraulic oil can be supplied from the control valve 16 and the linear solenoid valves 152-156 to the fluid actuators M1-M6.

Further, when the power supply to the electromagnetic portion 18e of the on/off solenoid valve 18 is cut off due to a power failure, the signal pressure is no longer output from the on/off solenoid valve 18, and accordingly each opening/closing valve 17 enters the outflow restriction state. Form. As a result, the spool 17s blocks the hydraulic oil flowing back from the tubes T of the fluid actuators M1-M6 to the output port 17o of the on-off valve 17, preventing the hydraulic oil from flowing out to the control valve 16 and the linear solenoid valves 152-156. can be regulated. Furthermore, even when an abnormality occurs in the fluid supply device 10B, that is, in the pump 13, the linear solenoid valves 151 to 156, or the like, by canceling the energization of the electromagnetic portion 18e, each opening/closing valve 17 is allowed to form an outflow regulating state. The outflow of hydraulic oil from the tubes T of the fluid actuators M1-M6 can be restricted.

As a result, according to the fluid supply device 10B including the plurality of open/close valves 17 and the on/off solenoid valves 18, even if an abnormality occurs in the supply of hydraulic oil to the tubes T of the fluid actuators M1 to M6, the state of the tubes T is maintained. By suppressing sudden changes, it is possible to satisfactorily suppress the occurrence of unexpected movements of the robot arm 2, which is the object to be driven by the fluid actuators M1 to M6. As a result, it is possible to further improve the stability and reliability of the operation of the robot device 1 . However, in the fluid supply device 10B, instead of the plurality of opening/closing valves 17 and the on/off solenoid valves 18, a plurality of electromagnetic opening/closing valves each having an electromagnetic portion may be used.

Furthermore, in the above embodiment, the fluid actuators M1-M6 as artificial muscles are provided with a tube T that radially expands and axially contracts in response to an increase in the hydraulic pressure inside the fluid actuators M1 to M6 supplied with hydraulic oil. , and a braided sleeve S covering the tube T, the configuration of the fluid actuators M1 to M6 in the robot apparatus 1 is not limited to this. That is, the fluid actuators M1 to M6 may include a tube that expands in the radial direction and contracts in the axial direction when supplied with fluid. Axial fiber reinforced axial fiber reinforced body comprising an outer tubular member formed by a body and coaxially disposed outside the inner tubular member; and a fiber layer disposed between the inner tubular member and the outer tubular member. It may be a fluid actuator (see, for example, JP-A-2011-137516).

FIG. 5 is a schematic configuration diagram showing another robot device 1C of the present disclosure. Among the constituent elements of the robot apparatus 1C, the same elements as those of the above-described robot apparatus 1 are denoted by the same reference numerals, and overlapping descriptions are omitted.

The robot device 1C shown in FIG. 5 includes a robot arm 2C and a plurality of (two in this embodiment) double-acting cylinders (hydraulic pressure cylinders) 7 as fluid actuators (hydraulic pressure actuators) for operating the robot arm 2C. and a fluid supply device (liquid supply device) 10C that supplies and discharges fluid to and from. Such a robot device 1C is also mounted on a carrier that is an automatic guided vehicle (AGV) or an autonomous mobile carrier robot (AMR) capable of self-propelled to a designated target position, or is fixed at a predetermined installation location. used. As shown in FIG. 5, the robot arm 2C includes a plurality of double-acting cylinders 7, a support member (bracket) 5, a plurality of arms (links) 3a, 3b, 3c, and the plurality of arms 3a, 3b. , 3c, links 61, 62, 63, and 64 constituting first and second parallel link mechanisms, a hand portion (robot hand) 4 as a grip portion (hand), and a plurality of (this embodiment is a multi-joint arm including three (3) joints (pin joints) J1, J2, and J3.

Each double-acting cylinder 7 of the robot arm 2C includes, as shown in FIG. A fixed piston rod 75 is included. Furthermore, each double-acting cylinder 7 has a first fluid chamber (contraction-side fluid chamber) 71 defined on one side (right side in FIG. 6) of a piston 74 in the cylinder (cylinder tube) 70 and a and a second fluid chamber (extension-side fluid chamber) 72 defined on the other side (left side in FIG. 6) of the piston 74 . By supplying hydraulic fluid to the first fluid chamber 71 and discharging hydraulic fluid from the second fluid chamber 72 by the fluid supply device 10C, the piston 74 and the piston rod 75 are moved to the left side in FIG. can be used to extend the double-acting cylinder 7 as a double-acting actuator. Further, by supplying hydraulic fluid to the second fluid chamber 72 and discharging hydraulic fluid from the first fluid chamber 71 by the fluid supply device 10C, the piston 74 and the piston rod 75 are moved to the right side of the cylinder 70 in FIG. By moving, the double-acting cylinder 7 can be contracted.

The arm 3a of the robot arm 2C is rotatably connected to a support member 5 as a link via a joint J1, and rotates relative to the support member 5 by extension and contraction of one double-acting cylinder 7. As shown in FIG. One end of the double-acting cylinder 7 corresponding to the support member 5 and the arm 3a, that is, the joint J1, that is, the end of the piston rod 75 is rotatably connected to a lever member fixed to the support member 5, and the other end, that is, the end of the cylinder 70 The end is rotatably connected to the tip of the arm 3a (the end on the arm 3b side). The arm 3b is rotatably connected to the arm 3a via a joint J2, and rotates relative to the arm 3a by extension and contraction of one double-acting cylinder 7. As shown in FIG. One end of the double-acting cylinder 7 corresponding to the arms 3a and 3b, that is, the joint J2, that is, the end of the piston rod 75 is rotatably connected to the base end of the arm 3a (the end on the support member 5 side). That is, the end of the cylinder 70 is rotatably connected to a lever member fixed to the base end of the arm 3b (the end on the arm 3a side). Furthermore, the arm 3c is rotatably connected to the distal end of the arm 3b via a joint J3. Two double-acting cylinders 7 arranged in parallel may be provided for the support member 5 and the arm 3a, and two double-acting cylinders 7 arranged in parallel may be arranged for the arms 3a and 3b. may be provided.

The link 61 is fixed to the support member 5, and the proximal end of the link 62 is rotatably connected to the distal end of the arm 3a and the proximal end of the arm 3b via the joint J2. The link 63 has the same link length as the arm 3a, is rotatably connected to the free end portion (pivot portion) of the link 61, and has a length corresponding to the link length of the link 61 from the joint J2. are rotatably connected to the link 62 at positions spaced apart by . As a result, a first parallel link mechanism is configured with the arm 3a as a fixed link, the link 61 as a drive link, the link 62 as a driven link, and the link 63 as an intermediate link. Further, the link 64 is rotatably connected to the arm 3c at a position separated by a predetermined length from the joint J3, and is rotatably connected to the link 62 at a position separated by the predetermined length from the joint J2. be. As a result, a second parallel link mechanism is constructed in which the arm 3b is a fixed link, the link 62 is a drive link, the arm 3c is a driven link, and the link 64 is an intermediate link. By the action of these first and second parallel link mechanisms, the arm 3c is always parallel to the traveling surface of the carriage or the installation surface of the robot device 1C regardless of the rotation angle of the arms 3a and 3b. maintained.

The hand unit 4 of the robot arm 2C is attached to the arm 3c closest to the hand, and is controlled by the controller 100C of the robot device 1C so as to grip a target object (hereinafter referred to as a "gripping target"). be. Further, the fluid supply device 10C includes, for example, a tank whose upper and lower ends are closed and which can store hydraulic oil as a working fluid, a pump that pressure-feeds the hydraulic oil, a plurality of linear solenoid valves, and the like. , and is controlled by the control device 100C so as to supply and discharge hydraulic oil to each double-acting cylinder 7 . As a result, the robot arm 2C can be driven by hydraulic pressure (fluid pressure) to move the hand portion 4 to a desired position. However, the fluid supply device 10C may supply and discharge liquid other than hydraulic oil such as water to and from each double-acting cylinder 7, for example, supply and discharge gas such as compressed air to and from each double-acting cylinder 7. may be

FIG. 7 is a system diagram showing a fluid supply device 10C of the robot device 1C. As shown in the figure, the fluid supply device 10C includes a pump 13, a first relief valve RV1, a second relief valve RV2, a check valve CV, an accumulator 14, and fluid control valves (flow control units). a plurality of linear solenoid valves 152, 153, 154 and control valve 16. In the fluid supply device 10</b>C, the control valve 16 adjusts the hydraulic pressure (driving pressure) to the first fluid chamber 71 of the double acting cylinder 7 corresponding to the joint J<b>1 according to the signal pressure from the linear solenoid valve 151 . That is, the output port 16o of the control valve 16 communicates with the hydraulic fluid inlet/outlet of the first fluid chamber 71 of the double-acting cylinder 7 corresponding to the joint J1 via an oil passage, a hose H, or the like formed in the valve body. On the other hand, the hydraulic fluid inlet/outlet of the second fluid chamber 72 of the double-acting cylinder 7 corresponding to the joint J1 is connected to a linear solenoid valve (second solenoid valve) through an oil passage formed in the hose H or the valve body. ) 152 to the output port 15o. That is, the hydraulic pressure to the second fluid chamber 72 of the double-acting cylinder 7 corresponding to the joint J1 is adjusted by the linear solenoid valve 152. Furthermore, in the fluid supply device 10C, the linear solenoid valve 153 adjusts the hydraulic pressure to the first fluid chamber 71 of the double-acting cylinder 7 corresponding to the joint J2. Also, the linear solenoid valve 154 adjusts the hydraulic pressure to the second fluid chamber 72 of the double-acting cylinder 7 corresponding to the joint J2.

During the operation of the robot apparatus 1C as described above, the output required for the double-acting cylinder 7 corresponding to the joint J1 on the most proximal end side of the robot arm 2C (thrust generated by the double-acting cylinder 7 and expansion and contraction of the double-acting cylinder 7 The maximum value (maximum required output) of the product value with the velocity) becomes larger (maximum) than the maximum required output for the double-acting cylinder 7 corresponding to the joint J2. Further, during operation of the robot device 1C (robot arm 2C), the maximum required output for the double-acting cylinder 7 of the joint J1 is that the hydraulic fluid is supplied to the first fluid chamber 71 and the hydraulic fluid is discharged from the second fluid chamber 72. is larger than when hydraulic fluid is supplied to the second fluid chamber 72 and hydraulic fluid is discharged from the first fluid chamber 71 . Therefore, by applying the combination of the control valve 16 with excellent override characteristics and the linear solenoid valve 151 to the first fluid chamber 71 of the double-acting cylinder 7 corresponding to the joint J1, the size can be made smaller than that of a single linear solenoid valve. At the same time, the required hydraulic pressure can be reliably supplied to the first fluid chamber 71 of the double-acting cylinder 7 corresponding to the joint J1 for which the required output is large.

As a result, in the robot device 1C, while suppressing an increase in the size of the fluid supply device 10C that supplies hydraulic fluid to the plurality of double-acting cylinders 7, the hydraulic pressure required for each of the plurality of double-acting cylinders 7 is ensured. It is possible to stably and smoothly operate the robot arm 2C by supplying it. Further, in the robot device 1C, the control valve 16 supplies hydraulic fluid to the first fluid chamber 71 of the double-acting cylinder 7 corresponding to the joint J1 on the most proximal side of the robot arm 2C. As a result, the arm 3a and the support member 5, which are connected via the joint J1, can be relatively rotated stably and smoothly.

However, it goes without saying that hydraulic fluid may be supplied from the control valve 16 to two or more of the first and second fluid chambers 71 and 72 of the plurality of double-acting cylinders 7 of the robot device 1C. 10C may be provided with, for example, a control valve and a linear solenoid valve that adjust the hydraulic pressure to the first fluid chamber 71 of the double-acting cylinder 7 corresponding to the joint J2. Further, it goes without saying that hydraulic oil may be supplied from the corresponding control valve 16 to both the first and second fluid chambers 71 and 72 of one double-acting cylinder 7 . Furthermore, depending on the structure of the robot arm 2C, it goes without saying that the hydraulic fluid may be supplied from the control valve 16 to the double-acting cylinders 7 corresponding to the joints other than the joint J1 on the most proximal side of the robot arm 2C. .

In the robot device 1C, the double-acting cylinder 7 connected to the control valve 16 and the fluid chamber are determined using the maximum required output of the double-acting cylinder 7 as an index. and the fluid chamber may be determined based on an index other than the maximum required output. That is, the double-acting cylinder 7 and the fluid chamber connected to the control valve 16 have the maximum flow rate of the hydraulic oil (fluid) supplied to the first and second fluid chambers 71 and 72 of the double-acting cylinder 7, the hydraulic oil or the maximum value of the maximum expansion/retraction speed of the double-acting cylinder 7 .

As shown in FIG. 8, the fluid supply device 10C has at least one opening/closing valve driven by an on/off solenoid valve 18 as a signal pressure output valve controlled by the control device 100C, similarly to the fluid supply device 10B. 17 may be provided. In the example of FIG. 8, between the output port 16o of the control valve 16 and the first fluid chamber 71 of the double-acting cylinder 7 corresponding to the joint J1, the output port 15o of the linear solenoid valve 152 and the double-acting cylinder corresponding to the joint J1 7, between the output port 15o of the linear solenoid valve 153 and the first fluid chamber 71 of the double acting cylinder 7 corresponding to the joint J2, and between the output port 15o of the linear solenoid valve 154 and the joint One on-off valve 17 is arranged between the second fluid chamber 72 of the double-acting cylinder 7 corresponding to J2.

While the robot device 1C is system-activated and the pump 13 is operating, the on-off solenoid valve 18 outputs a signal pressure to each opening/closing valve 17 in accordance with the energization of the electromagnetic portion 18e. As a result, each opening/closing valve 17 forms a communication state, and hydraulic oil can be supplied from the control valve 16 and the linear solenoid valves 152 to 154 to the first and second fluid chambers 71 and 72 of each double-acting cylinder 7 . Further, when the power supply to the electromagnetic portion 18e of the on/off solenoid valve 18 is cut off due to a power failure, the on/off solenoid valve 18 stops outputting the signal pressure, and each open/close valve 17 forms an outflow restriction state. do. As a result, the hydraulic oil flowing back from the first and second fluid chambers 71 and 72 of each double-acting cylinder 7 to the output port 17o of the on-off valve 17 is blocked by the spool 17s. Outflow to the 152-154 side can be regulated. Furthermore, even when an abnormality occurs in the pump 13 or the linear solenoid valves 151 to 154 or the like, by canceling the energization of the electromagnetic part 18e, the first and second fluid chambers 71 and 72 of each double-acting cylinder 7 of hydraulic fluid can be regulated.

As a result, according to the fluid supply device 10C including the plurality of open/close valves 17 and the on/off solenoid valves 18, even if an abnormality occurs in the supply of hydraulic fluid to each double-acting cylinder 7, the robot arm 2 will not operate unexpectedly. can be suppressed satisfactorily, the stability and reliability of the operation of the robot apparatus 1C can be further improved. However, in the fluid supply device 10C, instead of the plurality of opening/closing valves 17 and the on/off solenoid valves 18, a plurality of electromagnetic opening/closing valves each having an electromagnetic portion may be used.

At least one of the linear solenoid valves 151-156 in the fluid supply devices 10, 10B, and 10C may be a normally open valve. In this case, the normally open valve balances the thrust from the electromagnetic section and the thrust from the hydraulic pressure supplied to the feedback port so as to act in the same direction as the thrust from the electromagnetic section with the biasing force of the spring. There may be. In addition, at least one of the linear solenoid valves 151-156 does not have a dedicated feedback port, and is configured so that the output pressure (driving pressure) acts on the spool as feedback pressure inside the sleeve that accommodates the spool. (See, for example, Japanese Unexamined Patent Application Publication No. 2020-41687). Similarly, the control valve 16 may also be configured so that the output pressure (driving pressure) acts on the spool as feedback pressure inside the spool.

In addition, the fluid supply devices 10, 10B, and 10C serve as fluid adjustment valves (fluid adjustment units), for example, fluid actuators M1 to M6 so that the fluid pressure (fluid pressure) detected by a pressure sensor becomes the required pressure. Alternatively, it may include a flow control valve that controls the flow rate of liquid (fluid) to the double-acting cylinder 7 . The fluid supply devices 10, 10B, and 10C may supply liquid other than hydraulic oil such as water or gas such as air to the fluid actuators M1 to M6 and the double-acting cylinders .

Further, the robot apparatus 1, 1C may include only one joint, or may include only one or two fluid actuators M1 or the like or double-acting cylinders 7. FIG. Further, the robot devices 1 and 1C are not limited to those including at least one fluid actuator M1 or the like or the robot arms 2 and 2C having the double-acting cylinder 7 and the hand portion 4, and at least one fluid actuator and, for example, a drill bit. , and a robot arm to which elements other than the hand unit 4, such as a pressing member for pressing a switch or the like, are attached to the tip of the hand. Furthermore, the robot devices 1 and 1C may be walking robots, wearable robots, or the like.

Further, the robot arms 2 and 2C of the robot devices 1 and 1C have swing motors (for example, swing motors for rotating the base (wrist portion) of the hand portion 4) as fluid actuators (double-acting actuators) for driving the arms 3 and the like. ) may be included. That is, the robot body of the robot apparatus 1, 1C may include at least one of the fluid actuator M1 or the like, the double-acting cylinder 7, and the swing motor. Furthermore, in the robot apparatus 1C, at least one of the double-acting cylinders 7 may be replaced with a double-acting actuator including, for example, two single-acting cylinders arranged to oppose each other. Also, the robot arms 2, 2C of the robot devices 1, 1C may include air cylinders as fluid actuators. Furthermore, it is not always necessary to provide a plurality of pairs of fluid actuators (artificial muscles) M for all of the two arms 3 etc. connected via the joints J1-J3, and any one set of the two arms 3 etc. Alternatively, one or more fluid actuators may be connected to an elastic body such as a spring or rubber material arranged to oppose the fluid actuators. Also, in the robot devices 1 and 1C, the tank 11 may be supported by a robot body such as the robot arms 2 and 2C.

It goes without saying that the invention of the present disclosure is not limited to the above-described embodiments, and various modifications can be made within the scope of the present disclosure. Furthermore, the above-described embodiment is merely one specific form of the invention described in the Summary of the Invention column, and does not limit the elements of the invention described in the Summary of the Invention column.

INDUSTRIAL APPLICABILITY The invention of the present disclosure can be used in the manufacturing industry of robot devices including at least one fluid actuator that operates by being supplied with fluid.

1, 1C robot device, 2 robot arm, 3, 3a, 3b, 3c arm, 5 support member, 7 double acting cylinder, 70 cylinder, 71 first fluid chamber, 72 second fluid chamber, 74 piston, 75 piston rod, 10, 10B, 10C fluid supply device, 11 tank, 13 pump, 14 accumulator, 151, 152, 153, 154, 155, 156 linear solenoid valve, 16 control valve, CV check valve, J1, J2, J3 joint, M1 , M2, M3, M4, M5, M6 fluid actuator (artificial muscle), Or orifice, RV1 first relief valve, RV2 second relief valve.

Claims (8)

a plurality of joints, a plurality of links, a plurality of hydraulic actuators that are respectively actuated by being supplied with fluid and relatively rotate the two corresponding links that are connected via the joints; A robot apparatus comprising a fluid supply device for supplying and discharging the fluid to and from a fluid actuator,
The fluid supply device
a source of the fluid;
a plurality of linear solenoid valves each adjusting and outputting the pressure of the fluid from the supply source side;
an input port, an output port, a signal pressure input port, and a spool, and a force applied to the spool by the action of signal pressure supplied from the corresponding linear solenoid valve to the signal pressure input port; At least one control for adjusting the pressure of the fluid supplied from the supply source to the input port by at least balancing the force applied to the spool by the action of the pressure of the fluid, and outputting the pressure from the output port. a valve;
including
At least one fluid actuator among the plurality of fluid actuators is supplied with the fluid output from the output port of the control valve, and the remaining fluid actuators are supplied with the linear solenoid valves corresponding to the respective fluid actuators. A robotic device to which the fluid output from is supplied. The robot device according to claim 1,
A robotic device in which the fluid is supplied from the control valve to at least the fluid actuator having the largest maximum value of a predetermined index among the plurality of fluid actuators. The robot device according to claim 1 or 2,
The fluid actuator is a double-acting actuator having two fluid chambers,
A robot device in which the fluid is supplied from the control valve to one of the two fluid chambers of the fluid actuator corresponding to any of the joints, and the fluid is supplied from the solenoid valve to the other of the two fluid chambers. . The robot device according to claim 3,
The fluid actuator includes a cylinder, a piston slidably disposed within the cylinder, a piston rod fixed to the piston, and a first fluid defined on one side of the piston within the cylinder. a double-acting cylinder including a chamber and a second fluid chamber defined within the cylinder on the other side of the piston;
The control valve is a robot device that supplies the fluid to one of the first and second fluid chambers that has a greater maximum value of a predetermined index. The robot device according to claim 3 or 4,
The indicator is any one of a flow rate of fluid supplied to the fluid chamber of the fluid actuator, a product value of pressure and flow rate of the fluid supplied to the fluid chamber, and a maximum expansion/contraction speed of the fluid actuator. Device. The robot device according to claim 1 or 2,
The two links are relatively rotated by a pair of the fluid actuators arranged to oppose each other,
The control valve supplies the fluid to one of the pair of fluid actuators corresponding to one of the joints, the maximum value determined from the movable range of the joint of a predetermined index being larger. The robot device according to claim 6,
The indicators include the pressure of the fluid supplied to the fluid actuator, the flow rate of the fluid supplied to the fluid actuator, the product value of the pressure and the flow volume of the fluid supplied to the fluid actuator, and the maximum contraction of the fluid actuator. A robot device, which is any one of a volume of the fluid containing space, a contraction force generated by the fluid actuator, and a maximum contraction speed of the fluid actuator. The robot device according to any one of claims 1 to 7,
said plurality of joints, said plurality of links, and said plurality of fluid actuators form a robotic arm;
The control valve is a robot device that supplies the fluid to the fluid actuator corresponding to the joint on the most proximal side of the robot arm.

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